JP3065142B2 - Optical magnetic field sensor - Google Patents
Optical magnetic field sensorInfo
- Publication number
- JP3065142B2 JP3065142B2 JP3281738A JP28173891A JP3065142B2 JP 3065142 B2 JP3065142 B2 JP 3065142B2 JP 3281738 A JP3281738 A JP 3281738A JP 28173891 A JP28173891 A JP 28173891A JP 3065142 B2 JP3065142 B2 JP 3065142B2
- Authority
- JP
- Japan
- Prior art keywords
- optical
- magnetic field
- magneto
- field sensor
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 42
- 239000013307 optical fiber Substances 0.000 claims description 23
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 13
- 230000005415 magnetization Effects 0.000 claims description 7
- 239000002223 garnet Substances 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 6
- 150000002910 rare earth metals Chemical class 0.000 claims description 6
- 230000005381 magnetic domain Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 description 17
- 239000010408 film Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は，磁気光学素子を用いた
新規な構造の光磁界センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical magnetic field sensor having a novel structure using a magneto-optical element.
【０００２】[0002]
【従来の技術及び発明が解決しようとする課題】光磁界
センサは，光を媒体としているため，絶縁性が良好であ
り，電磁誘導の影響を受けないという特徴を持ち，送電
線の電流測定等に使用されている。図６に従来の光磁界
センサの検出部の光学系を示す。光学系は，磁気光学素
子１，光ファイバ２，２’，コリメ−タレンズ３，
３’，偏光子７，検光子８から構成されている。光ファ
イバ２から出射した光はコリメ−タレンズ３により平行
ビ−ムとなり，偏光子７を透過し，直線偏光となる。磁
気光学素子１に磁界が印加されるとファラデ−効果によ
りこの直線偏光の偏光面が磁界の強度に比例して回転す
る。この光が検光子３を透過すると偏光面の角度により
光量が変化し，コリメ−タレンズ３’により光ファイバ
２’へ集光される。このようにして，磁界の大きさが光
量に変換される。2. Description of the Related Art An optical magnetic field sensor, which uses light as a medium, has good insulation properties and is not affected by electromagnetic induction. Used in FIG. 6 shows an optical system of a detection unit of a conventional optical magnetic field sensor. The optical system includes a magneto-optical element 1, an optical fiber 2, 2 ', a collimator lens 3,
3 ', a polarizer 7, and an analyzer 8. The light emitted from the optical fiber 2 is converted into a parallel beam by the collimator lens 3, transmitted through the polarizer 7, and converted into linearly polarized light. When a magnetic field is applied to the magneto-optical element 1, the plane of polarization of the linearly polarized light rotates in proportion to the strength of the magnetic field due to the Faraday effect. When this light passes through the analyzer 3, the amount of light changes depending on the angle of the polarization plane, and is condensed on the optical fiber 2 'by the collimator lens 3'. In this way, the magnitude of the magnetic field is converted into a light amount.
【０００３】しかしながら，上記のような従来の光磁界
センサは，特定の偏光成分を取り出すことにより光強度
を調整するため磁気光学素子の両側に偏光子，検光子を
配置する必要があり構造が複雑であるという問題があっ
た。However, the conventional optical magnetic field sensor as described above requires a polarizer and an analyzer to be disposed on both sides of the magneto-optical element in order to adjust the light intensity by extracting a specific polarization component. There was a problem that is.
【０００４】本発明の目的は，偏光子，検光子を要せ
ず，そのため光磁界センサ全体の構造を簡単にすること
ができる新規な光磁界センサを提供することにある。An object of the present invention is to provide a novel optical magnetic field sensor which does not require a polarizer and an analyzer, and thus can simplify the structure of the entire optical magnetic field sensor.
【０００５】[0005]
【課題を解決するための手段】本発明者は，上記課題を
解決するために鋭意検討・研究した結果，偏光子，検光
子を配置しなくても，垂直磁化の磁気光学材料を通過し
た光量が外部磁界により大きく変化できることを見出
し，本発明の光磁界センサを完成するに至った。Means for Solving the Problems As a result of intensive studies and studies to solve the above problems, the present inventor has found that the amount of light passing through a perpendicularly magnetized magneto-optical material can be obtained without disposing a polarizer and an analyzer. Can be changed greatly by an external magnetic field, and the optical magnetic field sensor of the present invention has been completed.
【０００６】すなわち，このような目的は，下記（１）
〜（５）の発明により達成される。That is, such an object is achieved by the following (1)
This is achieved by the inventions of (5) to (5).
【０００７】（１）磁界を印加しない状態では多磁区構
造を有し且つ磁区内の光の進行方向と平行な磁化成分が
隣接する磁区で互いに異なる磁気光学素子を用い、磁気
光学素子を前記進行方向に透過する非回折光を検出する
ことを特徴とする光磁界センサ。(1) When no magnetic field is applied, a magneto-optical element having a multi-domain structure and having different magnetization components in adjacent magnetic domains in parallel with the traveling direction of light in the magnetic domain is used .
An optical magnetic field sensor for detecting undiffracted light transmitted through an optical element in the traveling direction .
【０００８】（２）磁気光学素子の一方の側に１本また
は２本の光ファイバを配置し，他方の側に反射鏡を配置
したことを特徴とする上記（１）に記載の光磁界セン
サ。(2) An optical magnetic field sensor according to (1), wherein one or two optical fibers are arranged on one side of the magneto-optical element, and a reflecting mirror is arranged on the other side. .
【０００９】（３）反射鏡として磁気光学素子の表面に
作製した反射膜を用いることを特徴とする上記（２）に
記載の光磁界センサ。(3) The optical magnetic field sensor according to the above (2), wherein a reflection film formed on the surface of the magneto-optical element is used as the reflection mirror.
【００１０】（４）複数枚の上記磁気光学素子を光の進
行方向に重ねて備えることを特徴とする上記（１）ない
し（３）のいずれかに記載の光磁界センサ。(4) The optical magnetic field sensor according to any one of (1) to (3), wherein a plurality of the magneto-optical elements are provided so as to overlap in a traveling direction of light.
【００１１】（５）磁気光学素子としてＬＰＥ法により
作製したＢｉ置換した希土類鉄ガ−ネット膜を用いるこ
とを特徴とする上記（１）ないし（４）のいずれかに記
載の光磁界センサ。(5) The optical magnetic field sensor according to any one of (1) to (4), wherein a Bi-substituted rare earth iron garnet film produced by the LPE method is used as the magneto-optical element.
【００１２】本発明に用いる磁気光学素子は，磁界を印
加しないときに，多磁区構造を有する材料であって，入
射光の進行方向に対する磁化ベクトル成分が隣接する磁
区で互いに異なるように入射光に対して配置される。磁
気光学素子の入射光に対する配置は，図２に示すよう
に，隣接する磁区内の磁化方向が入射光と平行であり且
つ互いに逆向きであることが好ましいが，垂直磁化を有
する磁気光学素子自体を入射光に対して斜めの配置にす
ることもできる。これは，斜めの配置にしても，入射光
と平行な磁化成分があり，かつ隣接するこの磁化成分が
逆向きになっているからである。また，感度の調整の目
的で磁気光学素子を複数枚重ね合わせて使用することも
できる。The magneto-optical element used in the present invention is made of a material having a multi-domain structure when no magnetic field is applied. Placed for The arrangement of the magneto-optical element with respect to the incident light is preferably such that the magnetization directions in adjacent magnetic domains are parallel to the incident light and opposite to each other as shown in FIG. May be arranged obliquely to the incident light. This is because there is a magnetization component parallel to the incident light and the adjacent magnetization component is in the opposite direction even in the oblique arrangement. In addition, a plurality of magneto-optical elements can be used in an overlapping manner for the purpose of adjusting the sensitivity.
【００１３】上記のような磁界を印加しない状態で多磁
区構造を有する材料としては，例えば，ＬＰＥ法等によ
り作製したＢｉ置換希土類鉄ガ−ネット材料，希土類鉄
ガ−ネット，オルソフェライト等を挙げることができる
が，特にこれらに限定されず，本発明の目的を達成でき
る範囲内で多磁区材料を有する種々の材料を用いること
ができる。これらの材料を，磁化容易軸が面と垂直な方
向となるように切り出すことによって，一般に，垂直磁
化の薄膜状が得られ，本発明の素子として用いることが
できる。特に，ＬＰＥ法により作製したＢｉ置換希土類
鉄ガ−ネット膜の場合は，成長誘導磁気異方性により特
別の処理をしなくてもそのままで垂直磁化性を有してお
り，本発明の目的を達成する上で好ましい。しかも，こ
のＢｉ置換希土類鉄ガ−ネット材料はファラデ−回転能
が大きいため，薄い厚さで大きな回折損失が得られると
いう点からも好適である。As a material having a multi-domain structure in a state where no magnetic field is applied as described above, for example, Bi-substituted rare earth iron garnet material, rare earth iron garnet, orthoferrite, etc. produced by the LPE method or the like are exemplified. However, the present invention is not particularly limited thereto, and various materials having a multi-domain material can be used as long as the object of the present invention can be achieved. By cutting out these materials so that the axis of easy magnetization is in a direction perpendicular to the plane, a thin film having perpendicular magnetization is generally obtained and can be used as an element of the present invention. In particular, in the case of a Bi-substituted rare earth iron garnet film produced by the LPE method, the film has perpendicular magnetizability without any special treatment due to the growth-induced magnetic anisotropy. It is preferable to achieve. In addition, since the Bi-substituted rare earth iron garnet material has a large Faraday rotatory power, it is preferable in that a large diffraction loss can be obtained with a small thickness.
【００１４】[0014]
【作用】前記のような多磁区構造を有する磁気光学素子
からの回折損失は，外部磁界により磁壁の移動を介して
変化するので，外部磁界の強度が変化すると光強度が変
化し，磁界センサを実現できる。一般に回折損失は外部
磁界が０のとき最大になり，外部磁界が増すと磁壁の移
動により回折損失が減少する。そして飽和磁界以上で
は，該素子の多磁区構造は単磁区構造に変化するので回
折は生じなくなる。The diffraction loss from the magneto-optical element having the multi-domain structure as described above changes through the movement of the magnetic domain wall due to the external magnetic field. realizable. Generally, the diffraction loss becomes maximum when the external magnetic field is 0, and when the external magnetic field increases, the diffraction loss decreases due to the movement of the domain wall. When the magnetic field exceeds the saturation magnetic field, the multi-domain structure of the element changes to a single-domain structure, so that diffraction does not occur.
【００１５】この回折による透過率Ｔは以下の近似式で
表される。The transmittance T due to this diffraction is represented by the following approximate expression.
【００１６】 Ｔ＝ＣＯＳ2θf＋（Ｈ／Ｈｓ）2ＳＩＮ2θf ここで，θf は，飽和のファラデ−回転角 Ｈ は，外部磁界 Ｈｓは，飽和磁界である。T = COS 2 θ f + (H / Hs) 2 SIN 2 θ f where θ f is a Faraday rotation angle of saturation H, an external magnetic field Hs is a saturation magnetic field.
【００１７】このように透過率は外部磁界の２乗に依存
する。そのため外部磁界の大きさにのみ透過率が依存
し，外部磁界の正負は区別できない。通常，光磁界セン
サは，送電線から発生する交流磁界を検出するために用
いられるので，磁界の大きさが検出できれば充分であ
る。なお，磁気光学素子１にバイアスの磁界を印加して
おけば，外部磁界の正負も検出できる。As described above, the transmittance depends on the square of the external magnetic field. Therefore, the transmittance depends only on the magnitude of the external magnetic field, and the sign of the external magnetic field cannot be distinguished. Usually, an optical magnetic field sensor is used for detecting an AC magnetic field generated from a power transmission line, so that it is sufficient if the magnitude of the magnetic field can be detected. If a bias magnetic field is applied to the magneto-optical element 1, the sign of the external magnetic field can be detected.
【００１８】以下に本発明の実施例を示すが，本発明は
それらに限定されるものではない。Examples of the present invention will be described below, but the present invention is not limited thereto.
【００１９】[0019]
【実施例】 実施例１ 図１に，本発明の光磁界センサの一具体例を用いた光学
系を示す。光学系は，印加磁界がないときに多磁区構造
を有する磁気光学材料１，コリメ−タレンズ３，３’，
光ファイバ２，２’から構成されている。光ファイバ２
から出射した光は，コリメ−タレンズ３により平行ビ−
ムに変換され，磁気光学素子１を透過する。磁気光学素
子１により回折されない光のみ，コリメ−タレンズ３’
により光ファイバ２’へ入射する。磁気光学材料１とし
て，ＬＰＥ法により作製したＢｉ1.4Ｙ1.6Ｆｅ5Ｏ12 の
材料を用いた。この材料は垂直磁化性を有していた。こ
の材料の厚さを２００μｍとした。この系において，外
部磁界の強度を０から徐々に大きくすることによって磁
気光学材料１からの回折損失が低下し，光ファイバ２’
への入射光が増加する。磁界を印加しない状態での透過
損失は１２ｄＢであった。徐々に磁界を印加すると，損
失は徐々に減少し，約１．５ｋＯｅの磁界の下で損失は
１ｄＢとなった。これ以上磁界を印加しても，損失は１
ｄＢのまま変化しなかった。Embodiment 1 FIG. 1 shows an optical system using a specific example of the optical magnetic field sensor of the present invention. The optical system includes a magneto-optical material having a multi-domain structure when there is no applied magnetic field, a collimator lens 3, 3 ',
It is composed of optical fibers 2, 2 '. Optical fiber 2
Of light emitted from the collimator lens 3
And is transmitted through the magneto-optical element 1. Only the light that is not diffracted by the magneto-optical element 1, the collimator lens 3 '
Incident on the optical fiber 2 ′. As magneto-optical material 1, a material other Bi 1.4 Y 1.6 Fe 5 O 12 prepared by LPE method. This material had perpendicular magnetizability. The thickness of this material was 200 μm. In this system, the diffraction loss from the magneto-optical material 1 is reduced by gradually increasing the intensity of the external magnetic field from 0, and the optical fiber 2 ′
The incident light to the light increases. The transmission loss when no magnetic field was applied was 12 dB. When a magnetic field was gradually applied, the loss gradually decreased, and the loss became 1 dB under a magnetic field of about 1.5 kOe. Even if a magnetic field is applied any more, the loss is 1
It remained unchanged in dB.
【００２０】実施例２ 図３は，本発明の光磁界センサの別の具体例を用いた光
学系を示す図である。Embodiment 2 FIG. 3 is a view showing an optical system using another specific example of the optical magnetic field sensor of the present invention.
【００２１】磁気光学材料１の一方の側に，併設した２
本の光ファイバ２，２’を，他方の側に反射鏡４を配置
した光学系である。光ファイバ２から出射した光はコリ
メ−タレンズ３で平行ビ−ムとなり磁気光学素子１を透
過後，反射鏡４で反射される。On one side of the magneto-optical material 1, 2
This is an optical system in which two optical fibers 2 and 2 'are arranged and a reflecting mirror 4 is arranged on the other side. The light emitted from the optical fiber 2 becomes a parallel beam by the collimator lens 3, passes through the magneto-optical element 1, and is reflected by the reflecting mirror 4.
【００２２】反射光は再び磁気光学素子１を透過し，コ
リメ−タレンズ３により光ファイバ２’へ集光される。
但し，磁気光学素子１により回折された光は光ファイバ
２’へ集光されず，損失が生じる。この場合，光は，磁
気光学素子１を２度透過するため，実施例１と比較して
磁気光学素子１の厚さをほぼ半分にできる。実際に実施
例１と同じ材料を，厚さを１００μｍとして用い，反射
鏡としては磁気光学素子１の表面に蒸着により作製した
Ａｌ膜を用いて光磁界センサを作製した。各素子は接着
剤により一体化した。測定した所，実施例１とほぼ同様
な結果が得られた。The reflected light passes through the magneto-optical element 1 again and is condensed by the collimator lens 3 onto the optical fiber 2 '.
However, the light diffracted by the magneto-optical element 1 is not condensed on the optical fiber 2 ', causing a loss. In this case, since the light passes through the magneto-optical element 1 twice, the thickness of the magneto-optical element 1 can be reduced to almost half as compared with the first embodiment. An optical magnetic field sensor was actually manufactured using the same material as in Example 1 with a thickness of 100 μm, and using an Al film formed by evaporation on the surface of the magneto-optical element 1 as a reflecting mirror. Each element was integrated with an adhesive. As a result of measurement, almost the same results as in Example 1 were obtained.
【００２３】実施例３ 図４は，実施例２にさらに反射膜６を備えたガラスプリ
ズム５を配置したものである。光ファイバ２から出射し
た光はコリメ−タレンズ３で平行ビ−ムとなり，反射膜
６で反射され，磁気光学素子１を透過後，反射鏡４で反
射される。反射光はほぼ同じ光路を通り，コリメ−タレ
ンズ３により光ファイバ２’へ集光される。Embodiment 3 FIG. 4 shows an embodiment in which a glass prism 5 further provided with a reflection film 6 is arranged in Embodiment 2. The light emitted from the optical fiber 2 becomes a parallel beam by the collimator lens 3, is reflected by the reflection film 6, passes through the magneto-optical element 1, and is reflected by the reflection mirror 4. The reflected light passes through substantially the same optical path and is condensed on the optical fiber 2 'by the collimator lens 3.
【００２４】回折光が集光されないのは，実施例２と同
様であるが，図４に示すように検出可能な磁界の方向
は，実施例２の場合とは，９０°と異なっている。光フ
ァイバが送電線に沿って配置されており，測定したい磁
界が光ファイバの方向と直角の角度をなす場合に，好都
合な構造である。Although the diffracted light is not converged as in the second embodiment, the direction of the detectable magnetic field is different from that in the second embodiment by 90 ° as shown in FIG. This is a convenient structure when the optical fiber is arranged along the transmission line and the magnetic field to be measured makes an angle perpendicular to the direction of the optical fiber.
【００２５】実施例４ 図５は，実施例２において光ファイバを一本のみで構成
した場合である。光ファイバ２から出射した光は，磁気
光学素子１により回折されない光のみ，再び光ファイバ
２へ入射する。この場合は，光送受信側に光分岐器を配
置し，戻り光を受信部で受光できるようにする必要があ
る。光ファイバを一本のみで構成した非常に簡単な構造
である。Embodiment 4 FIG. 5 shows a case in which only one optical fiber is used in the second embodiment. As for the light emitted from the optical fiber 2, only the light that is not diffracted by the magneto-optical element 1 enters the optical fiber 2 again. In this case, it is necessary to arrange an optical splitter on the optical transmitting / receiving side so that the receiving light can be received by the receiving unit. This is a very simple structure composed of only one optical fiber.
【００２６】[0026]
【発明の効果】本発明の光磁界センサは，偏光子，検光
子が不要であり構造が極めて簡単である。また，反射鏡
を配置して磁気光学素子に光を２度透過させる構造を採
用した場合は，単に透過させる場合と比較して素子の厚
さを半分にでき，かつレンズも１個で済むため，極めて
小型である。The optical magnetic field sensor of the present invention does not require a polarizer and an analyzer, and has a very simple structure. In addition, when a structure is employed in which a reflecting mirror is arranged and light is transmitted twice through the magneto-optical element, the thickness of the element can be reduced by half and only one lens is required as compared with a case where light is simply transmitted. , It is extremely small.
【００２７】[0027]
【図１】 本発明の光磁界センサの一具体例を用いた光
学系を示す図である。FIG. 1 is a diagram showing an optical system using a specific example of an optical magnetic field sensor according to the present invention.
【図２】 本発明に用いる多磁区構造を有する磁気光学
素子を示す図である。FIG. 2 is a diagram showing a magneto-optical element having a multi-domain structure used in the present invention.
【図３】 反射鏡を配置した本発明の光磁界センサの他
の具体例を用いた光学系を示す図である。FIG. 3 is a diagram showing an optical system using another specific example of the optical magnetic field sensor of the present invention in which a reflecting mirror is arranged.
【図４】 プリズムを配置した本発明の光磁界センサの
他の具体例を用いた光学系を示す図である。FIG. 4 is a diagram showing an optical system using another specific example of the optical magnetic field sensor of the present invention in which a prism is arranged.
【図５】 光ファイバを１本で構成した本発明の光磁界
センサの他の具体例を用いた光学系を示す図である。FIG. 5 is a diagram showing an optical system using another specific example of the optical magnetic field sensor of the present invention in which one optical fiber is formed.
【図６】 従来型の光磁界センサを示す図である。FIG. 6 is a diagram showing a conventional optical magnetic field sensor.
１ 磁気光学材料 ２，２’ 光ファイバ ３，３’ コリメ−タレンズ ４ 反射鏡 ５ ガラスプリズム ６ 反射膜 ７ 偏光子 ８ 検光子 DESCRIPTION OF SYMBOLS 1 Magneto-optical material 2, 2 'Optical fiber 3, 3' Collimator lens 4 Reflector 5 Glass prism 6 Reflective film 7 Polarizer 8 Analyzer
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭62−188982（ＪＰ，Ａ) 特開 昭61−140821（ＪＰ，Ａ) 特開 昭59−81570（ＪＰ，Ａ) 特開 平５−264603（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) G01R 33/00 - 33/18 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-62-188982 (JP, A) JP-A-61-140821 (JP, A) JP-A-59-81570 (JP, A) JP-A-5-81570 264603 (JP, A) (58) Field surveyed (Int. Cl. 7 , DB name) G01R 33/00-33/18
Claims (5)
有し且つ磁区内の光の進行方向と平行な磁化成分が隣接
する磁区で互いに異なる磁気光学素子を用い、磁気光学
素子を前記進行方向に透過する非回折光を検出すること
を特徴とする光磁界センサ。[Claim 1] uses a magneto-optical element traveling direction parallel to the magnetization component of the light are different from each other in adjacent domains within and magnetic domains having a multi-domain structure in a state of no applied magnetic field, the magneto-optical
An optical magnetic field sensor for detecting undiffracted light transmitted through the element in the traveling direction .
本の光ファイバを設置し、他方の側に反射鏡を配置した
ことを特徴とする請求項１に記載の光磁界センサ。2. One or two magneto-optical elements are provided on one side of the magneto-optical element.
The optical magnetic field sensor according to claim 1, wherein the optical fiber is provided, and a reflecting mirror is disposed on the other side.
した反射膜を用いることを特徴とする請求項２に記載の
光磁界センサ。3. The optical magnetic field sensor according to claim 2, wherein a reflecting film formed on the surface of the magneto-optical element is used as the reflecting mirror.
向に重ねて備えることを特徴とする請求項１ないし３の
いずれかに記載の光磁界センサ。4. The optical magnetic field sensor according to claim 1, wherein a plurality of the magneto-optical elements are provided so as to overlap in a traveling direction of light.
したＢｉ置換した希土類鉄ガーネット膜を用いることを
特徴とする請求項１ないし４のいずれかに記載の光磁界
センサ。5. The optical magnetic field sensor according to claim 1, wherein a Bi-substituted rare earth iron garnet film produced by an LPE method is used as the magneto-optical element.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3281738A JP3065142B2 (en) | 1991-10-28 | 1991-10-28 | Optical magnetic field sensor |
| US07/892,468 US5477376A (en) | 1991-06-04 | 1992-06-02 | Optical attenuators and optical modulators employing magneto-optic element |
| US08/526,336 US5619367A (en) | 1991-06-04 | 1995-09-11 | Apparatus and method for measuring magnetic fields employing magneto-optic element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3281738A JP3065142B2 (en) | 1991-10-28 | 1991-10-28 | Optical magnetic field sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05172917A JPH05172917A (en) | 1993-07-13 |
| JP3065142B2 true JP3065142B2 (en) | 2000-07-12 |
Family
ID=17643298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3281738A Expired - Fee Related JP3065142B2 (en) | 1991-06-04 | 1991-10-28 | Optical magnetic field sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3065142B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6619216B2 (en) * | 2015-11-25 | 2019-12-11 | 公益財団法人電磁材料研究所 | Translucent magnetic material |
| WO2019066050A1 (en) * | 2017-09-29 | 2019-04-04 | シチズンファインデバイス株式会社 | Magnetic sensor element and magnetic sensor device |
-
1991
- 1991-10-28 JP JP3281738A patent/JP3065142B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05172917A (en) | 1993-07-13 |
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