JP3030388B2 - Optical reflector for optical waveguide substrate and its forming method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical reflector for an optical waveguide substrate and a method of forming the same, and more particularly to improvement of manufacturing workability.

[0002]

2. Description of the Related Art A conventional optical waveguide substrate (for example, having a thickness of 1 mm,
As shown in FIG. 2, an optical reflecting mirror 2 having a width of 1 cm and a length of several cm is bonded to a surface of a substrate having a thickness of several mm having an angle of, for example, 45 °. At the same time, a thin disk-shaped blade 5 that is rotationally driven is pressed and ground, and at the same time, a liquid containing abrasive grains is poured into the ground portion to polish the inner surface of the U-shaped groove 6 to be dug. .
The board surface is directly 45
If it is attempted to work at an angle of °, the angle will shift or the brood 5 will be damaged, so that a yato 3 having an angle of 45 ° is required. The yoke 3 is removed after forming a generally U-shaped groove 6. One side of the U-shaped groove 6 is an optical reflecting mirror 2, it is possible to reflect the light L ₁ incident from the optical waveguide 1a to the substrate surface.

[0003]

When a conventional optical reflector for an optical waveguide substrate is manufactured, a yato 3 is required, and the gap between the bottom surface under the inclined surface of the yato 45 ° and the substrate surface. It is difficult to bond the toys at a constant interval of several μm or less, and it takes a considerable amount of time to attach the toys, and the time and effort to remove the toys 3 after the formation of the U-shaped groove 6 is disadvantageous. there were.

The present invention has been made to eliminate these conventional disadvantages.

[0005]

[Means for Solving the Problems]

(1) A method for forming an optical reflecting mirror of an optical waveguide substrate according to claim 1, wherein the optical waveguide substrate is provided with an optical waveguide formed in the vicinity of the substrate surface in parallel with the surface. So that a V-shaped groove is formed on the surface of the substrate as viewed from the side of the optical waveguide, and the V-shaped groove is substantially perpendicular to one slope crossing the optical waveguide, A generally U-shaped groove is formed so as to remove the end of the optical waveguide, as viewed from the side of the optical waveguide.

[0006] Thus, an optical reflecting mirror for reflecting light incident from the optical waveguide toward the substrate surface side is formed with one side surface of the U-shaped groove intersecting the optical waveguide as a reflecting surface. (2) The optical reflector of the optical waveguide substrate according to the second aspect of the present invention has an optical waveguide formed near the surface of the optical waveguide substrate and parallel to the surface, and is formed on the substrate surface so as to remove a small section of the optical waveguide. A V-shaped groove is formed when viewed from the side of the optical waveguide,
A substantially U-shaped groove as viewed from the side of the optical waveguide is formed so as to remove an end of the optical waveguide at a substantially right angle to one slope crossing the optical waveguide of the V-shaped groove. It is formed. One side of the U-shaped groove crossing the optical waveguide is used as a reflection surface to reflect light incident from the optical waveguide toward the substrate surface side.

[0007]

FIG. 1 shows an embodiment of the present invention, in which parts corresponding to those in FIG. In the optical waveguide substrate 1, an optical waveguide 1a having a thickness of, for example, about 5 μm and a width of about 10 μm is formed near the substrate surface (for example, about 5 μm below) and parallel to the surface. In the present invention, first, a V-shaped groove 8 as viewed from the side of the optical waveguide 1a is formed on the substrate surface so as to remove a small section of the optical waveguide 1a. That is,
While rotating a disk-shaped blade 7 having a V-shaped blade edge 7a having an angle of 90 °, the blade is pressed vertically against the substrate surface and ground to form a V-shaped groove 8.

Next, as viewed from the side of the optical waveguide 1a, the end of the optical waveguide 1a is removed at a right angle to one of the slopes intersecting with the optical waveguide 1a of the V-shaped groove 8 so as to be substantially perpendicular. Generally U
A U-shaped groove 6 is formed. In other words, the U-shaped groove 6 is ground by pressing the disk-shaped blade 5 that is driven to rotate substantially perpendicularly to the slope, and at the same time, a liquid containing fine abrasive grains is injected into the ground portion, Polish the inner surface of the groove.

As a result, an optical reflecting mirror 2 for reflecting light La incident from the optical waveguide 1a to the substrate surface side with one side surface of the U-shaped groove 6 crossing the optical waveguide 1a as a reflecting surface.
Is formed. The reflected light Lb is 90 ° with respect to the incident light La.
At an angle. When this angle is changed from 90 °, the angle of the blade 7a of the brood is changed so that the V-shaped groove 8 is formed.
Can be changed.

[0010]

As described above, according to the present invention,
After the V-shaped groove 8 is formed directly on the optical waveguide substrate 1, the optical reflecting mirror 2 is formed by forming a substantially U-shaped groove 6 on one side surface of the V-shaped groove. Accordingly, the conventional toy 3 is not required, and there is an effect that the time required for attaching and detaching the conventional toy is reduced.

[Brief description of the drawings]

FIG. 1 is a view showing an embodiment of the present invention, wherein A is a sectional view of an optical waveguide substrate for explaining a V-shaped groove forming step, and B is U
FIG. 3 is a cross-sectional view of the substrate for explaining a step of forming a U-shaped groove, and FIG.

FIG. 2 is a cross-sectional view of an optical waveguide substrate for illustrating a method of forming an optical reflecting mirror of a conventional optical waveguide substrate, wherein A is a state in which a toy is adhered to the substrate surface, and B is a U-shape via the toy. The figure which shows the state which formed the shape groove, C removes a toy,
The figure which shows the completed state of the optical reflection mirror.

Claims (2)

(57) [Claims] 1. An optical waveguide substrate in which an optical waveguide is formed in the vicinity of the substrate surface in parallel with the surface, so that a small section of the optical waveguide is removed from the surface of the substrate. A V-shaped groove is formed when viewed from the side, and the optical waveguide is formed so as to remove an end of the optical waveguide at a right angle to one slope crossing the optical waveguide in the V-shaped groove. A substantially U-shaped groove is formed when viewed from the side of the waveguide, and one side of the U-shaped groove intersecting with the optical waveguide is used as a reflection surface, and light incident from the optical waveguide is applied to the substrate surface. A method of forming an optical reflector of an optical waveguide substrate that reflects light to the side. 2. An optical waveguide is formed in the vicinity of the surface of the optical waveguide substrate in parallel with the surface of the optical waveguide, and V.sub.V is viewed from the side of the optical waveguide on the substrate surface so as to remove a small section of the optical waveguide.
A V-shaped groove is formed, and the V-shaped groove is viewed from the side of the optical waveguide so as to remove an end of the optical waveguide at a right angle to one of the slopes intersecting the optical waveguide. A substantially U-shaped groove is formed, and one side of the U-shaped groove intersecting the optical waveguide is used as a reflection surface to reflect light incident from the optical waveguide toward the substrate surface. Optical reflector for waveguide substrate.