JP2967599B2 - Drive device for vibration motor - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of generating vibration in a vibrator, such as an ultrasonic motor, to generate a relative motion between a vibrator and a relative motion member which comes into pressure contact with the vibrator. The present invention relates to a driving device for a vibration motor.

[0002]

2. Description of the Related Art Conventionally, a phase difference between a drive voltage waveform applied to a drive electrode of an ultrasonic motor and a voltage waveform of a monitor electrode for generating a frequency voltage corresponding to vibration of an elastic body of the ultrasonic motor is stable. There is known an ultrasonic motor driving device that controls a driving frequency so that a predetermined driving state is obtained (see, for example, Japanese Patent Application Laid-Open No. 61-251490).

FIG. 9 shows the configuration of a driving apparatus for such an ultrasonic motor. The driving signal of frequency f1 generated by the oscillating unit 1 is converted by the phase shift unit 2 into two driving signals having phases different from each other by π / 2, and these driving signals are separately amplified by the output amplifying unit 3, respectively. Then, it is applied to the drive electrodes 11 a and 11 b of the piezoelectric body 11 of the ultrasonic motor 10.

When the piezoelectric body 11 of the ultrasonic motor 10 is excited by these drive signals, a progressive vibration wave is generated on the drive surface of the elastic body 12 joined to the piezoelectric body 11.
Then, the moving element 1 is brought into pressure contact with the driving surface of the elastic body 12.
3 is driven and rotated by this progressive vibration wave.

[0005] The output detection unit 4 detects a phase difference between a frequency voltage (hereinafter referred to as a monitor voltage) generated on the monitor electrode 11c in response to the vibration of the elastic body 12 and a drive voltage applied to the drive electrodes 11a and 11b. And the output control unit 5 controls the oscillation unit 1 so that the phase difference becomes a predetermined value that can obtain a stable driving state. That is, the output detection unit 4 and the output control unit 5 constitute a feedback circuit of the ultrasonic motor driving device.

By the way, using a plurality of ultrasonic motors,
When driving two rotating shafts, rotating cylinders, and the like, the dynamic characteristics of each ultrasonic motor with respect to a drive signal are different. Therefore, a device in which a driving device is independently provided for each ultrasonic motor has been proposed (for example, See JP-A-1-227669).

[0007]

However, when an ultrasonic motor driving device having a feedback circuit shown in FIG. 9 is used for each of a plurality of ultrasonic motors for driving one rotating shaft, rotating cylinder, etc. However, there is a problem that the size of the apparatus becomes large and the apparatus becomes large, and it is necessary to perform adjustment for each ultrasonic motor, and the operability is poor.

SUMMARY OF THE INVENTION It is an object of the present invention to control a plurality of ultrasonic motors to drive one rotating body, reduce the size with a minimum circuit configuration, and improve the operability by reducing the number of adjustment steps. It is an object of the present invention to provide a driving device for a sound wave motor.

[0009]

The present invention will be described with reference to FIG. 1 showing the configuration of one embodiment. The invention according to claim 1 comprises at least two vibrators (11, 12), (21,
22) and the vibrators (11, 12), (21, 22) generated by the vibrations generated in the vibrators (11, 12) and (21, 22).
2) a driving device for a vibration motor having at least one relative motion member 13 and 23 performing relative motion between the vibration motor 1 and the oscillation unit 1 for generating a drive signal; Detecting units 4 and 5 for controlling the oscillating unit 1 based on the detected values, and the driving signals generated by the oscillating unit 1 are converted into at least two vibrators (11, 12), (21, 2).
2) A first driving circuit for applying to any one of the vibrators and a driving signal from the first driving circuit obtained from a relative motion member 13 driven by the applied vibrators 11 and 12. Drive signal corrector 7 (7A) for correcting the drive signal from oscillating unit 1 so that the output characteristics obtained substantially match the output characteristics obtained from relative motion member 23 driven by other vibrators 21 and 22. And the drive signal correction unit 7 (7
And a second drive circuit for applying the drive signal corrected in A) to a vibrator other than the vibrator driven by the first drive circuit. According to a second aspect of the present invention, in the driving apparatus for the vibration motor according to the first aspect, the vibration motor includes a plurality of units each provided with one relative movement member for one vibrator. The relative motion vibration members are directly connected via the same rotating body. According to a third aspect of the present invention, in the driving device for a vibration motor according to the first aspect, the vibration motor includes a plurality of vibrators and a plurality of relative motions, wherein vibrators are arranged on both sides of a relative motion member. . According to a fourth aspect of the present invention, there is provided a vibration motor having at least two vibrators and at least one relative motion member performing relative motion between the vibrators by vibration generated in each of the vibrators. A driving circuit that generates an AC voltage and applies the AC voltage to the at least two vibrators.
The drive circuit provides a drive device for a vibration motor that can set different voltage values for each of the AC voltages applied to the at least two vibrators while maintaining the same frequency. In the invention of claim 5,
5. The driving device for a vibration motor according to claim 4, wherein the driving circuit controls an AC voltage applied to one vibrator so that output characteristics obtained from relative motion members driven by the vibrators become equal to each other. While the voltage value is fixed, the voltage value of the AC voltage applied to the remaining vibrators is changed.
According to a sixth aspect of the present invention, in the vibration motor driving device according to the fourth or fifth aspect, the vibration motor includes a plurality of units each provided with one relative motion member for one vibrator. The relative motion vibration members are directly connected via the same rotating body. According to the invention of claim 7, claim 4
Alternatively, in the vibration motor driving device according to claim 5, the vibration motor includes a plurality of vibrators and a plurality of relative motions, wherein vibrators are arranged on both sides of a relative motion member.

[0010]

According to the first aspect of the present invention, in the first driving circuit, the oscillating section 1 generates a driving signal and generates at least two vibrators (1).
1, 12) and (21, 22). Then, the detection units 4 and 5 detect the output of the vibration motor, and control the oscillation unit 1 based on the detected value. On the other hand, in the second drive circuit, the drive signal correction unit 7 (7
A) shows that the output characteristic obtained from the relative motion member 13 driven by the vibrators 11 and 12 to which the drive signal from the first drive circuit is applied is the relative motion driven by the other vibrators 21 and 22 The drive signal from the oscillating unit 1 is corrected so as to substantially match the output characteristic obtained from the member 23, and the drive signal corrected by the drive signal correction unit 7 (7A) is vibrated by the first drive circuit. Applied to transducers other than the transducer.
According to claim 4, the drive circuit sets the AC voltage applied to the at least two vibrators such that the frequency is equal to each other and the respective voltage values are different from each other. Is applied. According to the fifth aspect, the remaining oscillators are fixed while the voltage value of the AC voltage applied to one oscillator is fixed so that the output characteristics obtained from the relative motion members driven by the oscillators are equal to each other. To change the voltage value of the AC voltage applied to the AC power supply.

In the means and means for solving the above-mentioned problems which explain the constitution of the present invention, the drawings of the embodiments are used to make it easier to understand the present invention. However, the present invention is not limited to this.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment FIG. 1 is a block diagram showing a configuration of a first embodiment of the present invention. It should be noted that the same components as those of the conventional device shown in FIG. 20 is
An ultrasonic motor having the same configuration as that of the ultrasonic motor 10, and the moving element 23 of the ultrasonic motor 10
And the rotating body 6. The ultrasonic motor 1
0 and 20 correspond to the frequency of the driving voltage in FIG.
2 (a) and 2 (b).

As a driving circuit of the ultrasonic motor 10, a circuit similar to the driving circuit shown in FIG. 9 is used. On the other hand, the drive circuit of the ultrasonic motor 20 includes an output correction unit 7 for correcting the frequency of the drive signal from the oscillating unit 1 and a drive signal after correction converted into two drive signals having phases different from each other by π / 2. And an output amplifying unit 3 for amplifying them and applying them to the drive electrodes 21a and 21b of the ultrasonic motor 20.

FIG. 3 shows the configuration of the output correction section 7. In the figure, reference numeral 71 denotes a differentiating circuit for performing a differential operation on a drive signal;
72 is a rectifier circuit for rectifying the drive signal after differential operation, 7
3 is a positive constant voltage + supplied from a constant voltage source (not shown)
The switch switches between Vd and a constant negative voltage -Vd. Numeral 74 denotes a non-inverting type amplifying circuit to be described later, which amplifies the input voltage selected by the switch 73 to generate a voltage ± △.
Output V. Note that when the switch 73 selects the positive constant voltage + Vd, the amplifier circuit 74 outputs the positive voltage + △.
When V is output and the negative constant voltage −Vd is selected, the amplifier circuit 74 outputs a negative voltage −ΔV. An adder circuit 75 adds the output voltage V of the rectifier circuit 72 and the output voltage ± △ V of the amplifier circuit 74. Reference numeral 76 denotes a voltage controlled oscillator (hereinafter, referred to as a VCO), which outputs a frequency voltage having a frequency proportional to the input voltage as shown in FIG.

FIG. 5 shows a detailed circuit of the amplifier circuit 74. The amplifier circuit 74 includes a non-inverting amplifier AMP1 and resistors Rs and Rf, and the output voltage ΔV is calculated by the following equation. ΔV = (+ Vd or −Vd) × (1 + Rf / Rs) (1) That is, by adjusting the resistance value of the resistor Rf,
The output voltage ΔV can be changed.

FIG. 6 shows voltage waveforms at various parts of the circuit of the output correction section 7, (a) shows a drive signal waveform of the oscillation section 1,
(B) shows the waveform of the output voltage fD of the differentiating circuit 71,
(C) shows the waveform of the output voltage V of the rectifier circuit 72,
(D) shows the waveform of the output voltage V + △ V of the adding circuit 75, and (e) shows the output voltage waveform of the VCO 76. The operation of the output correction unit 7 will be described with reference to these drawings. The driving signal A · sin (2
π · f1 · t) is input to the differentiating circuit 71 via the terminal IN of the output correction unit 7. The differentiating circuit 71 performs a differential operation on the input drive signal, and obtains a signal fD =
2π · f1 · A · cos (2π · f1 · t) is output. The amplitude of the signal fD increases as the frequency f1 of the drive signal increases. Next, the rectifier circuit 72 converts the differentiated drive signal into a DC voltage V shown in FIG. On the other hand, the amplification circuit 74
The positive constant voltage + Vd selected by the switch 73 is amplified, and the voltage + ΔV is output to the adding circuit 75. The adding circuit 75 adds these voltages V and + ΔV, and
The output voltage V + ΔV shown in (d) is output to the VCO 76. The VCO 76 has an input voltage V + △ as shown in FIG.
A square wave frequency voltage having a frequency f1 + Δf proportional to V (FIG. 6E) is output, and a sine wave voltage having a frequency f1 + Δf is output to a terminal OUT via a waveform shaping circuit (not shown). That is, the signal frequency of the drive signal from the oscillation unit 1 is corrected to f1 + Δf. Conversely, when -Vd is selected by the switch 73, the amplifier circuit 74 outputs-出力 V, and the adder circuit 75 outputs the voltage V- △ V. As a result, the frequency of the drive signal is corrected to f1-Δf. It should be noted that even if the constant positive / negative voltage ± Vd switched by the switch 73 is changed, the output voltage of the amplifier circuit 74 ± V
Can be changed.

In this output correction unit 7, the correction amount is
Since it is set separately from the drive signal input from the controller, it is not affected by changes in the voltage and frequency of the drive signal.

Next, the operation of the first embodiment will be described. First, in the drive circuit of the ultrasonic motor 10, the drive signal of the frequency f1 generated from the oscillation unit 1 is converted by the phase shift unit 2 into two drive signals having a phase difference of π / 2, and these are output. The signals are separately amplified by the amplifier 3 and applied to the drive electrodes 11 a and 11 b of the ultrasonic motor 10. As a result, a progressive vibration wave is generated on the driving surface of the elastic body 12 of the ultrasonic motor 10, and the moving element 13 is driven to rotate at the rotation speed n1 as shown in FIG. The monitor voltage generated at the monitor electrode 11c of the ultrasonic motor 10 and the drive voltage of the drive electrode 11a are detected by the output detector 4, and the phase difference between the voltage waveforms is calculated. This phase difference is input to the output control unit 5, and the frequency f1 of the oscillating unit 1 is corrected so as to have a predetermined phase difference for obtaining a stable driving state of the ultrasonic motor 10. As a result, the oscillating unit 1 generates a drive signal having an optimum frequency for the ultrasonic motor 10.

As shown in, for example, Japanese Patent Application Laid-Open No. 63-206171, a pulse generator is provided on the rotating body 6 and the number of pulses is counted by the output detecting section 4 to determine the number of the moving element.
The rotation speed of the ultrasonic motor 1 is detected by the output control unit 5.
The oscillation unit 1 may be controlled so that 0 is in a stable driving state.

The drive signal of the oscillating unit 1 corrected so as to obtain a stable drive state by detecting the output of the ultrasonic motor 10 is also supplied to the output correction unit 7 of the drive circuit of the ultrasonic motor 20. As shown in FIG. 2A, the output correction unit 7
The drive signal is corrected so that the rotation speed characteristic of the ultrasonic motor 20 matches that of the ultrasonic motor 10. That is,
The frequency of the drive signal output from the output correction unit 7 is f1-
A negative constant voltage −Vd is selected by the switch 73 shown in FIG.
To adjust. Thereafter, the output drive signal of the output correction unit 7 is
The phase shift unit 2 converts the two drive signals into two drive signals having a phase difference of π / 2, which are separately amplified by the output amplifying unit 3 and applied to the drive electrodes 21 a and 21 b of the ultrasonic motor 20. . As a result, as shown in FIG. 2A, the dynamic characteristics of the two ultrasonic motors 10 and 20 match, and the ultrasonic motor 2
0 is driven by a drive voltage having a frequency f2 = f1- △ f,
The driving of the moving element 23 is controlled to a rotation speed n1 equal to that of the moving element 13 of the ultrasonic motor 10.

In the above embodiment, the output correction unit 7 corrects the frequency of the drive signal of the oscillation unit 1 and controls the ultrasonic motor 20 so as to match the rotational speed of the ultrasonic motor 10. It is known that the rotation speed in the drive frequency region is proportional to the drive voltage, and the drive voltage of the ultrasonic motor 20 may be corrected so as to be controlled to match the rotation speed of the ultrasonic motor 10. FIG. 7 shows a circuit of an output correction unit 7A that corrects only the voltage of the drive signal while keeping the frequency of the drive signal generated by the oscillation unit 1 at f1. The output correction unit 7A is an inverting amplifier circuit including an amplifier AMP2 and resistors Rs and Rf.
The output Vout of the oscillating unit 1 with respect to the drive signal input Vin is expressed by the following equation. Vout = Vin · (−Rf / Rs) (2) That is, by adjusting the resistor Rf, the output voltage Vout of the output correction unit 7A, that is, the voltage of the drive signal is corrected. The corrected drive signal is, as described above,
The drive electrodes 21a and 21a of the ultrasonic motor 20 are transmitted through the phase shift unit 2 and the output amplifier 3 of the drive circuit of the ultrasonic motor 20.
b. As a result, as shown in FIG. 2B, the dynamic characteristics of the two ultrasonic motors 10 and 20 match, and the ultrasonic motor 20 has a rotation speed n before correction at the drive frequency f1.
2, the drive speed is increased to a rotational speed n1 equal to that of the ultrasonic motor 10, and drive control is performed.

Since the output correction section 7A is composed of only the operational amplifier circuit, it does not require a complicated circuit configuration unlike the output correction section 7 shown in FIG. With the configuration, an optimal drive signal for the ultrasonic motor 20 can be generated. The method of correcting the frequency or voltage of the drive signal in the output correction units 7 and 7A is not limited to the above-described embodiment, but may be a method of controlling the drive so that the dynamic characteristics of the ultrasonic motor 20 match those of the ultrasonic motor 10. Should be fine.

As described above, for the two sets of ultrasonic motors 10 and 20 having a pair of stators and movers, the oscillating unit 1 for generating a drive signal and the drive signal are mutually shifted by π / 2. A phase shift unit 2 and an output amplifying unit 3 which convert the driving signals into two driving signals having different phases, amplify them and apply a driving voltage to the driving electrodes 11a and 11b of the stator of one ultrasonic motor 10; A first drive circuit including an output detection unit 4 and an output control unit 5 for detecting the output of the ultrasonic motor 10 and controlling the oscillation unit 1 so as to obtain a stable driving state, and a rotational speed of the ultrasonic motor 20 An output correction unit 7 (7A) that corrects the drive signal from the oscillation unit 1 so as to match the rotation speed of the ultrasonic motor 10, and two drive units whose phases are different from each other by π / 2. And convert them into signals. A second drive circuit comprising an output amplifying unit 3 for amplifying and applying the amplified drive signals to the drive electrodes 21a and 21b of the stator of the ultrasonic motor 20 is provided. There is no need to provide a separate oscillation circuit 1 and a feedback circuit composed of the output detection unit 4 and the output control unit 5, and the circuit configuration is small, the device is downsized, and the number of adjustment steps is reduced, and the operation is reduced. The performance is improved.

The oscillation unit 1 generates an optimum drive signal for obtaining a stable drive state for the ultrasonic motor 10, and the output correction unit 7 (7 A) controls the rotational speed of the ultrasonic motor 20. Since the drive signal of the oscillating unit 1 is corrected so as to match the rotational speed of the ultrasonic motor 10, even if the ultrasonic motors 10 and 20 have control characteristics different from each other, the dynamic characteristics of the two approximately match. While driving efficiency improves,
The control accuracy of the rotating body 6 driven by the ultrasonic motors 10 and 20 is improved.

In the first embodiment, two ultrasonic motors 10 and 20 each having a pair of stators and a movable element have been described as an example. However, two ultrasonic motors 10 and 20 are provided on both sides of one movable element. The present invention can also be applied to an ultrasonic motor that drives each of the stators by pressurizing and contacting them, and similar effects can be obtained.

Second Embodiment Next, a description will be given of a second embodiment for driving three sets of ultrasonic motors each including a pair of stators and moving elements. FIG. 8 is a block diagram showing the configuration of the second embodiment. In addition,
The same components as those in FIG. 1 showing the configuration of the first embodiment are denoted by the same reference numerals, and the description will focus on the differences. The movers 13, 23, 33 of the ultrasonic motors 10, 20, 30 are directly connected to the same rotating body 6. Ultrasonic motors 10, 20
1 is the same as the circuit shown in FIG. 1 described above, and the drive circuit of the ultrasonic motor 30 is
Is the same as the drive circuit of FIG. That is, the ultrasonic motor 30
The output correction unit 7 (7A) is connected to the oscillation unit 1 and a drive signal is supplied from the oscillation unit 1.

The drive signal generated by the oscillating unit 1 is supplied to the phase shift unit 2 of the ultrasonic motor 10 and the output correction unit 7 (7A) of the ultrasonic motor 20 and the ultrasonic motor 30.
In the drive circuit of the ultrasonic motor 10, as described above, the drive signal is converted into two drive signals having phases different from each other by π / 2 in the phase shift unit 2, and these are separately output in the output amplifying unit 3. Drive electrode 1 of amplified ultrasonic motor 10
1a and 11b. In the drive circuit of the ultrasonic motor 20, as described above, the output correction unit 7 (7A)
The drive signal is corrected so that the drive speed of the ultrasonic motor 20 coincides with the drive speed of the ultrasonic motor 10, and the corrected drive signals are different in phase by π / 2 from each other in the phase shift unit 2.
Are converted into two drive signals, which are further output to the output amplifier 3
Are amplified separately and applied to the drive electrodes 21a and 21b of the ultrasonic motor 20. Further, in the drive circuit of the ultrasonic motor 30, similarly to the drive circuit of the ultrasonic motor 20, the drive speed of the ultrasonic motor 30 is matched with the drive speed of the ultrasonic motor 10 by the output correction unit 7 (7A). The drive signal is corrected, and the corrected drive signal is converted into two drive signals having phases different from each other by π / 2 in the phase shift unit 2,
Further, they are separately amplified by the output amplifier 3 and applied to the drive electrodes 31a and 31b of the ultrasonic motor 30.

Thus, the three ultrasonic motors 10, 2
Even when the same rotating body 6 is driven by 0 and 30, the oscillating unit 1 is separately provided for each of the ultrasonic motors 10, 20, and 30, and the output detecting unit 4 and the output controlling unit 5 that constitute a feedback circuit are used. It is not necessary to provide the device, and the circuit configuration becomes small, the device is downsized, and the number of adjustment steps is reduced, and the operability is improved.

Further, the oscillation unit 1 generates an optimal drive signal for obtaining a stable drive state for the ultrasonic motor 10, and the output correction unit 7 (7 A) of the drive circuit of the ultrasonic motor 20. The drive signal of the oscillating unit 1 is corrected so that the rotational speed of the ultrasonic motor 20 matches the rotational speed of the ultrasonic motor 10, and similarly, the output correction unit 7 (7A) of the drive circuit of the ultrasonic motor 30. Then, the drive signal of the oscillating unit 1 is corrected so that the rotational speed of the ultrasonic motor 30 matches the rotational speed of the ultrasonic motor 10, and therefore, as in the first embodiment, the dynamic characteristics differ from each other. Sound wave motors 10, 20, 30
Even though the dynamic characteristics are almost the same, the driving efficiency and the control accuracy are improved.

Although the above embodiment has been described by taking as an example a drive device for two and three ultrasonic motors, the present invention can be applied to four or more ultrasonic motors. The same effect as described above can be obtained.

In the above embodiment, the ultrasonic motor 10
Although the oscillation unit 1, the output detection unit 4 and the output control unit 5 are provided for the ultrasonic motor 20, the ultrasonic motor 20 or the ultrasonic motor 30 may be provided.

In the configuration of the above embodiment, the piezoelectric body 11
And the elastic body 12, the piezoelectric body 21 and the elastic body 22, and the piezoelectric body 31 and the elastic body 32, respectively.
Reference numeral 3 denotes a relative motion member, the oscillating unit 1 constitutes an oscillating unit, the output detection unit 4 and the output control unit 5 constitute a detection unit, and the output correction unit 7 or 7A constitutes a drive signal correction unit.

[0033]

As described above, according to the present invention, it is not necessary to separately provide an oscillating unit and a detecting unit for each vibration motor, and the circuit configuration can be reduced in size.
Adjustment man-hours are reduced and operability is improved. The output characteristic obtained from the relative motion member driven by the vibrator to which the drive signal from the first drive circuit is applied by the drive signal correction unit is obtained from the relative motion member driven by another vibrator. Since the driving signal of the oscillating unit is corrected so as to substantially match the output characteristics to be obtained, even if the vibration motors have different output characteristics, their output characteristics substantially match, and the driving efficiency and control accuracy are improved. In addition, one oscillator
A plurality of units provided with the relative motion members,
Even for a vibration motor in which each relative motion member is directly connected via the same rotating body, it is not necessary to separately provide an oscillating unit and a detecting unit for each unit, and the same effect as described above can be obtained. Further, vibrators are arranged on both sides of the relative motion member, and also for a vibration motor including a plurality of vibrators and a plurality of relative motion members, an oscillation unit and a detection unit are separately provided for each vibrator. There is no need to provide them, and the same effects as above can be obtained.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a configuration of a first embodiment.

FIGS. 2A and 2B are diagrams showing a rotational speed characteristic with respect to a frequency of a driving voltage of an ultrasonic motor. FIG. 2A is a diagram illustrating a driving frequency of one of two ultrasonic motors. A drive signal correction method for matching speed characteristics is shown,
(B) shows a drive signal correction method for correcting one drive voltage of two ultrasonic motors to make the drive speed characteristics of both ultrasonic motors coincide.

FIG. 3 is a block diagram illustrating a configuration of an output correction unit.

FIG. 4 is a diagram illustrating an output frequency characteristic with respect to an input voltage of a voltage controlled oscillator (VCO).

FIG. 5 is a detailed circuit diagram of a non-inverting amplifier circuit.

FIG. 6 is a diagram showing voltage waveforms at various parts of a circuit of an output correction unit.
(A) shows the waveform of the driving signal of the oscillating section, (b) shows the waveform of the output voltage fD of the differentiating circuit, (c) shows the waveform of the output voltage V of the rectifying circuit, and (d) shows the waveform of the adding circuit. Output voltage V
+ EV waveform, and (e) shows a voltage controlled oscillator (VC
3 shows the output voltage waveform of O).

FIG. 7 is a circuit diagram of another output correction unit.

FIG. 8 is a block diagram showing a configuration of a second embodiment.

FIG. 9 is a block diagram illustrating a conventional ultrasonic motor driving device.

[Explanation of symbols]

REFERENCE SIGNS LIST 1 oscillation unit 2 phase shift unit 3 output amplification unit 4 output detection unit 5 output control unit 6 rotator 7, 7A output correction unit 10, 20, 30 ultrasonic motor 11, 21, 31 piezoelectric body 11a, 11b, 21a, 21b , 31a, 31b Drive electrode 11c Monitor electrode 12, 22, 32 Elastic body 13, 23, 33 Mover 71 Differentiator 72 Rectifier 73 Switch 74 Amplifier 75 Adder 76 Voltage controlled oscillator (VCO) AMP1, AMP2 Amplifier Rs, Rf resistor

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-2-193836 (JP, A) JP-A-64-30472 (JP, A) JP-A-1-214271 (JP, A) JP-A 61-1986 277384 (JP, A) JP-A-60-183982 (JP, A) JP-A-60-174078 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) H02N 2/00

Claims (7)

(57) [Claims] At least two vibrators and said vibrator
Relative motion between the vibrator and the vibrator
A driving device for a vibration motor having at least one relative motion member for performing a driving signal, comprising: an oscillation unit that generates a driving signal; and an output of the vibration motor.
Detection and control for controlling the oscillating unit based on the detected value.
And a driving signal generated by the oscillation unit.
At least one of the two transducers
A first drive circuit to be applied, and the drive circuit to which a drive signal from the first drive circuit is applied.
Output obtained from a relative moving member driven by a moving element
Characteristic is from relative motion members driven by other vibrators
In order to almost match the obtained output characteristics,
A drive signal correction unit for correcting the drive signals,
The drive signal corrected by the motion signal correction unit is transmitted to the first drive circuit.
A second drive applied to a vibrator other than the vibrator driven on the road
A driving device for a vibration motor, comprising: a driving circuit . 2. The driving apparatus for a vibration motor according to claim 1, wherein said vibration motor has one relative drive with respect to one vibrator.
A plurality of units each provided with a moving member,
A drive control device for a vibration motor, wherein the moving members are directly connected via the same rotating body . 3. The vibration motor driving device according to claim 1, wherein the vibration motor has vibrators arranged on both sides of a relative motion member.
And a plurality of transducers and a plurality of relative motion members.
The driving device for a vibration motor, characterized in that are. 4. At least two vibrators and each of said vibrators
Relative to these transducers due to the vibrations
Having at least one relative motion member for performing motion
A vibration motor, Generate an AC voltage and apply it to the at least two vibrators
And a driving circuit that performs The driving circuit is connected to the at least two vibrators.
The frequency is equal to each other for each of said AC voltages
In the state, set each voltage value to be different Can do
And a vibration motor driving device. 5. A driving device for a vibration motor according to claim 4.
At The driving circuit includes a relative moving unit driven by each vibrator.
1 so that the output characteristics obtained from the materials are equal to each other.
The voltage value of the AC voltage applied to
The voltage value of the AC voltage applied to the remaining vibrators is
A driving device for a vibration motor, wherein the driving device is changed. 6. A vibration module according to claim 4 or claim 5.
Data drive, The vibration motor has one relative drive for one vibrator.
A plurality of units each provided with a moving member,
It is noted that the moving members are directly connected via the same rotating body.
The driving device for the vibration motor. 7. A vibration module according to claim 4 or claim 5.
Data drive, In the vibration motor, vibrators are arranged on both sides of the relative motion member.
And a plurality of transducers and a plurality of relative motion members.
A driving device for a vibration motor.