JP2936628B2 - Inspection equipment for integrated circuit components - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an integrated circuit component inspection apparatus, and more particularly, to a device in which a large number of integrated circuit components are arranged in a row on a long strip-shaped flexible tape. The present invention relates to an inspection device for performing an electrical inspection of the integrated circuit component of the mounting tape.

[Conventional technology]

In recent years, the technological progress in the electronics industry has been remarkable,
In integrated circuit components such as C and LSI, the density and the number of pins are increasing, and the number of semiconductor elements mounted on one substrate is increasing. The requirements for component reliability have become increasingly severe. Accordingly, the importance and necessity of electrical testing of integrated circuit components such as a burn-in test (temperature test) has been further increased.

Recently, a system in which a large number of integrated circuit components are arranged in a row on a long strip-shaped flexible tape to form a mounting tape, and a system for continuously supplying the mounting tape to an assembly process is employed. Therefore, development of an inspection apparatus suitable for electrical inspection of integrated circuit components of such a long strip-shaped mounting tape is desired.

However, as a conventional integrated circuit component inspection apparatus,
The following are known:

(1) An inspection apparatus in which an inspection socket for mounting an integrated circuit component is arranged on an inspection substrate provided with a wiring pattern.

(2) A flat package IC in which an inspection socket for pressure-fixing and inspecting integrated circuit components is arranged in a housing provided with a contact pin having a spring property and a pressure lid.
Inspection equipment.

(3) An inspection device comprising an inspection circuit board provided with an inspection electrode and a conductive elastic plate instead of the contact pin in the above (2).

[Problems to be solved by the invention]

However, in the inspection apparatus of (1) to (3), a large number of integrated circuit components are arranged in a row on a continuous long strip-shaped flexible tape having a width of about 35 mm and a length of about 20 m. When performing a burn-in test of the integrated circuit component on the mounting tape that is installed, it is necessary to cut the mounting tape at appropriate intervals to shorten it and store it in an oven with limited space. Is difficult to perform a burn-in test, and therefore cannot be applied to a system in which a long strip of mounting tape is continuously supplied to an assembling process without being cut. is there.

The present invention has been made in view of the above circumstances, and an object of the present invention is to cut a mounting tape in which a large number of integrated circuit components are arranged in a row on a long strip-shaped flexible tape. Another object of the present invention is to provide an integrated circuit component inspection apparatus capable of efficiently performing an electrical inspection of each integrated circuit component in a long strip state.

[Means for solving the problem]

In order to achieve the above object, in the inspection apparatus of the present invention, an electrical connection of the integrated circuit component of a mounting tape in which a large number of integrated circuit components are arranged in a row on a long strip-shaped flexible tape is provided. An inspection device for performing an inspection, comprising: a holder having a polygonal cylindrical holding surface having a plurality of flat side surfaces; and a discontinuously or continuously helically disposed on the holding surface of the holder. Inspection means in which a large number of inspection circuits are arranged in a row, a contact tape superimposed on the inspection means and discontinuously or continuously spirally arranged, and And a pressing means for pressing the mounting tape, which is arranged in a state of being continuously spirally wound on the holding surface of the holder and superposed on the holding surface, against the holding surface. I do.

That is, in the present invention, the inspection means, the contact tape, and the mounting tape are continuously connected to each other by using a holder having a non-conventional special shape having a polygonal columnar holding surface having a plurality of flat side surfaces. By adopting a configuration of helically disposing, it is possible to inspect each integrated circuit component in a long strip state without cutting the mounting tape, and also achieve downsizing of the device. .

The holding surface of the holder is a polygonal columnar surface composed of a plurality of flat side surfaces, and the number of corners and the length of the side of each side surface is determined by the width and length of the mounting tape, the arrangement pitch of the integrated circuit components, and the like. Is appropriately selected in consideration of That is, at the corners of the holding surface, it is preferable that the angle is gentle so that the mounting tape is not creased. From this point, the number of corners of the holding surface is preferably as large as possible. Is good. In addition, the length of each side should be selected so that the integrated circuit components of the mounting tape are not located at the corners, and in particular, so that the copper foil and the like forming the conductive portion of the integrated circuit components are not cut by the fold. Is essential.

The holding surface of the holder is preferably made of a cylindrical body,
In this case, it is possible to provide a necessary wiring portion inside the cylinder, it is possible to further reduce the space, and it is also possible to closely arrange the inspection means to inspect a considerably long mounting tape. Can be made possible. In addition, it is also possible to arrange the wiring portion on the outer surface side of the holding surface.

The inspection means includes a number of inspection circuits arranged in a row so as to correspond to the integrated circuit components of the mounting tape, and the inspection circuit performs an electrical inspection of each integrated circuit component of the mounting tape. Circuit for As this inspection means, an inspection tape can be suitably used.

The inspection means is discontinuously or continuously spirally arranged on the holding surface of the holder. That is, since the inspection means itself does not need to be in a belt-like state, the inspection means are arranged side by side so as not to be located at the corners, and a collection of a large number of inspection means,
It is also possible to provide a discontinuous spiral arrangement over the entire holding surface. It is also possible to use a belt-like inspection means.

Inclination angle (lead angle) when spirally arranging inspection means
Can be controlled as appropriate, and as a result, it is possible to arrange the inspection means having a length suitable for the length of the mounting tape.

The contact tape is interposed between the inspection means and the mounting tape to achieve an electrical connection therebetween, and is superimposed on the inspection means discontinuously or continuously. It is arranged in a spiral. That is, since the contact tape itself does not need to be in a strip shape, a large number of contact tape pieces can be superimposed on the inspection means and arranged in a discontinuous spiral shape over the entire holding surface. It is also possible to use one strip-shaped contact tape.

As means for positioning the mounting tape with respect to the inspection means, a means for providing perforations at positions corresponding to the holding surface, the inspection means, the contact tape, and the mounting tape, and inserting a positioning pin into the perforation is employed. be able to. It is preferable that the perforations and the positions to be positioned by the positioning pins are 4 to 6 for each piece of the mounting tape spirally wound on each side surface of the holding surface.

The pressing means presses the mounting tape, which is superimposed on the contact tape and arranged in a state of being continuously spirally wound around the holding surface of the holder, against the holding surface.

By the pressurization by the pressurizing unit, the inspection unit, the contact tape, and the integrated circuit component of the mounting tape are brought into close contact with each other, and their electrical connection is achieved.

Specifically, a configuration in which a pressing member is disposed for each side surface of the holding surface and the entire mounting tape disposed on the side surface is pressed at once, and each of the mounting tapes spirally wound on each side surface. Various configurations, such as a configuration in which pressure is applied to each piece, can be adopted.

〔Example〕

Hereinafter, examples of the present invention will be described, but embodiments of the present invention are not limited to these examples.

In the embodiment shown in FIG. 1, an inspection apparatus suitable for a burn-in test is shown, in which a holder 10 has a regular octagonal prism-shaped holding surface 11 composed of eight identical flat side surfaces 12 and an upper wall 13.
And a lower wall 14.

The angle of the corner of the holding surface 11 is 135 °, which is gentle, and there is no fear that the wound mounting tape 50 will be creased.

The length of the piece of each side surface 12 is, for example, about 50 to 100 cm for the long piece and about 20 to 50 cm for the short side.

The holding surface 11 of the holder 10 is formed of a hollow cylinder, and a wiring portion (not shown) for inspection is provided in the cylinder.

The material of the holder 10 is preferably a material that is light, has little thermal deformation, and has a heat resistance of 150 ° C. or higher, and can be specifically selected from a heat-resistant resin, a metal, and the like.

As shown in FIG. 2, the inspection tape 20 is composed of an aggregate of a large number of strip-shaped inspection tape pieces 21 having a length corresponding to the width of each side surface 12 of the holding surface 11, and the strip-shaped inspection The tape pieces 21 are arranged so as to be arranged in parallel at a constant inclination angle α, usually 1 to 10 degrees, preferably 1 to 5 degrees for each side surface 12. , Holding surface 11
Are wound in a discontinuous spiral shape.

The length of each inspection tape piece 21 is, for example, 10 to 50 m for the long piece,
The short side is about 2 to 10 cm.

The pitch P between adjacent test tape pieces 21 is 4 to
It is about 5cm.

As shown in FIG. 3, each inspection tape piece 21 has a plurality of inspection circuits for performing an electrical inspection of each integrated circuit component 51 in a positional relationship corresponding to the integrated circuit component 51 of the mounting tape 50.
22 are arranged in rows.

As shown in FIG. 4, the contact tape 30 is a strip-shaped contact tape piece having the same size as the inspection tape piece 21.
Many of the contact tapes 31 are arranged on the test tape pieces 21 in a superimposed state, and the aggregate of the contact tape pieces 31 is wound in a discontinuous spiral shape over the entire holding surface 11. ing.

As shown in FIG. 3, the contact tape 30 electrically connects the conductive portion 23 of the test circuit 22 of the test tape 20 to the conductive portion 52 of the integrated circuit component 51 of the mounting tape 50. The conductive part 32 of the contact tape 30
Are provided at positions corresponding to the conductive portions 52 of the mounting tape 50.

The pressing means 40 has a pressing member 41 arranged for each side surface 12 of the holding surface 11, and the mounting tape 50 is collectively pressed for each side surface 12 by each pressing member 41. . Due to the pressurization by the pressurizing member 41, the test tape 20, the contact tape 30, and the integrated circuit component 51 of the mounting tape 50 are brought into close contact with each other, and an electrical connection therebetween is achieved.

As shown in FIG. 5, the mounting tape 50 is positioned relative to the test tape 20 by providing perforations at positions corresponding to the side surface 12, the test tape piece 21, the contact tape piece 31, and the mounting tape 50, respectively. This is achieved by inserting positioning pins 60 into these perforations. The positioning locations are, for example, four corner locations for each of the strip-shaped inspection tape pieces 21.

6 to 8 show specific examples of the mounting tape 50 to be inspected. In these figures, 51 is an integrated circuit component,
52 is a conductive part, 53 is a flexible tape, and 55 is a perforation.

According to the inspection apparatus of this embodiment, since the integrated circuit components can be electrically inspected without cutting the long strip-shaped mounting tape 50, the long strip-shaped mounting tape can be used. An inspection device suitable for a system that continuously supplies the assembly process without cutting 50 is provided.

Then, since the inspection is performed in a state where the long strip-shaped mounting tape 50 is spirally wound around the holding surface 11 of the holder 10, the entire device is compared with the case where the mounting tape 50 is inspected in a linear posture. With a sufficiently small size, a significantly greater inspection capability is exhibited.

Therefore, in the burn-in test, the test can be performed with a small oven, the handling in the oven becomes easy, and 1000 to
As many as 5000 integrated circuit components 51 can be inspected at once, and the inspection efficiency is greatly improved.

〔The invention's effect〕

As described above, according to the present invention, a large number of integrated circuits can be formed on a long strip-shaped flexible tape by using a specially shaped holder having a polygonal columnar holding surface composed of a plurality of flat side surfaces. Since the inspection is performed by arranging the mounting tape in which the components are arranged in a row and winding it in a continuous spiral shape,
Inspection of each integrated circuit component can be performed without cutting the mounting tape in a long strip state, and an apparatus that can exhibit a remarkably large inspection capability while achieving downsizing can be obtained.

[Brief description of the drawings]

FIG. 1 is a schematic view showing an embodiment of an inspection apparatus according to the present invention, FIG. 2 is an explanatory view showing an arrangement state of an inspection tape, and FIG.
FIG. 4 is an explanatory view showing a state in which a contact tape and a mounting tape are superimposed on an inspection tape, FIG. 4 is an explanatory view showing an arrangement state of a contact tape, FIG. 5 is an explanatory view showing a specific example of positioning means, 6 to 8 are explanatory diagrams each showing a specific example of the mounting tape. 10 Holder, 11 Holding surface 12 Side, 13 Upper wall 14 Lower wall, 20 Inspection tape 21 Inspection tape piece 22, 22 Inspection circuit 23 Conductor, 30 … Contact tape 31… Contact tape piece 32… Conductive part, 40… Pressing means 41… Pressing member, 50… Mounting tape 51… Integrated circuit components, 52… Conductive part 53… Possible Flexible tape, 60 ... Positioning pin

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁶ , DB name) G01R 31/26, 31/00

Claims (1)

(57) [Claims] 1. An inspection device for electrically inspecting an integrated circuit component of a mounting tape in which a large number of integrated circuit components are arranged in a row on a long strip-shaped flexible tape, A holder having a polygonal columnar holding surface composed of a plurality of flat side surfaces, and a large number of inspection circuits arranged discontinuously or continuously in a spiral shape on the holding surface of the holder in a row. Inspection means arranged, a contact tape superimposed on the inspection means and discontinuously or continuously spirally arranged, and a superimposed on the contact tape and on a holding surface of the holder An inspection device for an integrated circuit component, comprising: a pressurizing unit configured to press the mounting tape, which is arranged in a continuous spirally wound state, against the holding surface.