JP2933318B2 - Vibration type motor - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a vibration type motor using a progressive vibration wave.

[Prior Art] The principle of a vibration wave motor (vibration type motor) using a progressive vibration wave is as follows.

A stator in which two groups of a plurality of piezoelectric elements arranged in the circumferential direction are fixed to one surface of a ring-shaped vibrating body made of an elastic material having a total circumferential length that is an integral multiple of a certain length λ. .
These piezoelectric elements are arranged in each group at a pitch of λ / 2 and alternately have opposite expansion and contraction polarities, and a shift of an odd multiple of λ / 4 between both groups. Are located. Both groups of piezoelectric elements are provided with electrode films. When an AC voltage is applied to only one of the groups (hereinafter, referred to as phase A), the vibrating body is located at the center of each piezoelectric element of the group and every λ / 2 therefrom, and A standing wave (wavelength λ) of bending vibration is generated over the entire circumference of the vibrating body such that the center point between the antinode positions is the node position. If an AC voltage is applied only to the other group (hereinafter referred to as the B phase), a standing wave is similarly generated, but the position of the film and the node is shifted by λ / 4 with respect to the standing wave by the A phase. Become. When an AC voltage having the same frequency and a time phase difference of 90 ° is applied to both phases A and B at the same time, as a result of the combination of the standing waves of the two, the vibrating body vibrates in the circumferential direction. The traveling wave (wavelength λ) is generated, and at this time, each of the polyhedral points of the vibrating body having a thickness performs a kind of elliptical motion. Therefore, if a rotor, for example, a ring-shaped moving body is brought into pressure contact with each other surface of the vibrating body as a rotor, the moving body is rotated by receiving friction in the circumferential direction from the vibrating body.

Also, in addition to the A and B phase piezoelectric element groups, a vibrating body is provided with a vibration detecting piezoelectric element (hereinafter, referred to as an S phase). For example, the output from the S phase and the A and B phase piezoelectric elements are provided. A driving method is employed in which the motor is driven at a frequency that satisfies a condition for maintaining a constant phase difference with the drive application voltage to the group, thereby keeping the vibration state of the vibrating body constant and stabilizing the motor output.

FIG. 28 shows a drive circuit of a conventional vibration wave motor, and FIG. 29 shows the arrangement of A, B and S phases and a polarization pattern of a ring-shaped vibrator.

1 is a vibrating body formed in a ring shape of a vibration wave motor,
An S-phase piezoelectric element 1-1 and an A-phase piezoelectric element group 1-
2. The B-phase piezoelectric element group 1-3 is bonded with, for example, an adhesive, and the C-phase electrode C serving as a common electrode of these piezoelectric elements.
Are similarly adhered.

The A-phase piezoelectric element group 1-2 and the B-phase piezoelectric element group 1-3 convert the phase difference or vibration information from the oscillator 3, the 90 ° phase shifter 4, the amplifiers 5, 6 and the S-phase piezoelectric element 1-1, respectively. The drive signal is controlled by a drive circuit including a vibration detection circuit 2 for detecting a vibration state based on the AC signal from the oscillator 3. A time phase difference of 90 degrees is input via the phase shifter 4 to drive the A-phase piezoelectric element group 1-2 and the B-phase piezoelectric element group 1-3. The oscillator 3 is controlled by the vibration detection circuit 2 so as to drive the motor at a regular wave number while detecting the phase or voltage amplitude of the progressive vibration wave formed on the vibrating body 1 by the piezoelectric element 1-1.

The frequency of the AC signal applied to the A-phase piezoelectric element group 1-2 and the B-phase piezoelectric element group 1-3 by the oscillator 3 is determined by the natural frequency of the vibrating body 1, and The wave number of the vibration wave is, for example, A
The polarization direction in the phase piezoelectric element group 1-2 is determined by the distance between adjacent piezoelectric elements having different polarization directions and the circumference of the vibrating body 1.
In the case of FIG. 29, eight traveling waves are formed.

[Problems to be Solved by the Invention] By the way, when the vibration wave motor is driven at the wave number of the progressive vibration wave as designed, the performance of the vibration wave motor can be sufficiently brought out. For example, when self-excited vibration occurs due to the frictional force between the vibrating body and the moving body of the vibration wave motor, and a vibration of a progressive vibration wave (having a different wave number) that is not as designed is applied, the signal is output from the S phase. Since a signal voltage that does not meet the design value is also added to the output signal, an accurate phase and voltage amplitude at a normal wave number cannot be obtained. Therefore, there is a possibility that the driving control of the vibration wave motor cannot be performed normally.

An object of the present invention is to provide a vibration-type motor that can stably drive even if a wave other than the drive mode is generated, without generating unnecessary vibration without affecting the drive mode. is there.

[Means for Solving the Problems] In order to achieve the above object, according to the present invention, frequency signals having different phases are applied to the first and second electro-mechanical energy conversion elements disposed on the vibrating body. Then, in the vibration type motor that excites the vibrating body to obtain a driving force, the vibrating body includes a third electro-mechanical energy conversion element unit for suppressing vibration, and a vibration for detecting a vibration state of the vibrating body. A detection machine-electric energy conversion element unit, and a frequency signal having a phase opposite to the moving speed of the mass point of the vibrating body according to the detection output of the vibration detection machine-electric energy conversion element unit. -The voltage is applied to the mechanical energy conversion element.

EXAMPLES Hereinafter, the present invention will be described in detail based on examples shown in the drawings.

Embodiment 1 FIG. 1A is a block diagram of Embodiment 1, and FIG. 2 is a plan view showing an electrode pattern of the vibration wave motor.

The vibration wave motor of the present embodiment has a ring-shaped vibrating body 1a with A
A group of phase piezoelectric elements 1-2 and a group of phase B piezoelectric elements 1-3 are provided as shown in FIG. 2 so as to form eight progressive vibration waves, and detection from the S-phase piezoelectric element 1-1. The oscillator 3 is driven and controlled based on the information, and the A-phase piezoelectric element group 1-2 and the B-phase piezoelectric element group 1-3 are driven via the amplifier 5, the phase shifter 4, and the amplifier 6, respectively. 23 is the same as that of the conventional example shown in FIG. 23, but in this embodiment, the vibration element 1a is further polarized to the negative electrode and the unnecessary vibration suppressing piezoelectric element D
(In FIG. 1, reference numerals 1-4) are fixed.

The detection signal from the S-phase piezoelectric element 1-1 is amplified by the amplifier 7, and the unnecessary vibration suppressing piezoelectric element 1-4 is driven.

That is, the present embodiment applies a detection signal of a progressive vibration wave detected in the S phase to the unnecessary vibration suppressing piezoelectric element 1-4 to cancel unnecessary vibration and maintain a normal vibration mode of 8 waves. It is.

FIG. 1B shows an equivalent circuit of the A phase and the S phase of the vibration wave motor thus configured.

In the figure, the left side from the line AA 'indicates the A phase, and the right side indicates the S phase.

C _d [F]: Braking capacity A [V / N]: Force coefficient m [kg]: Lumped constant of mass of vibration system 1 / S [N / m]: Lumped constant of stiffness of vibration system R [NS / m ]: Lumped constant of the loss of the vibration system F [N]: External force in the vibration system v [m / S]: Speed of a mass point in the vibration system I [A]: Current flowing into the piezoelectric element V [A]: To the piezoelectric element Applied voltage And external force F and current I are given by the following equations.

F = −A · V + Z _m · v (1) I = Y _d · V + A · v (2) Y _d = jωC _d {admittance [S]} That is, in the A phase, when the external force F _A = 0, A _A · V _A
＝ Z _mA・ v _A At the time of resonance, A _A · V _A = R _A · v _A

Here, since the A _A and R _A real number, the drive voltage V _A and the material point moving velocity v _A of the A-phase are in phase.

Further, in the S phase, than the I = 0, the _{-Y d V S = A s v} S.

And if v _A = v _S , Becomes

Therefore, V _S leads 90 ° from v _S , and V _S leads 90 ° from V _A.

FIG. 3 shows a waveform diagram in the case where four vibrations are applied as an example of unnecessary vibrations in the vibration wave motor of the present embodiment thus configured.

This waveform diagram shows that the electrode pattern shown in FIG.
FIG. 3A shows the vibration of each part of the eight waves, FIG. 3B shows the vibration of each part of the four waves, and FIG. 3B shows the vibration of each part of the four waves at the moment when the peaks of the eight and four waves overlap the center position of the electrode C. (C) shows the state of the synthesized vibration. When four vibrations are generated for some reason during the driving of the vibration wave motor, the observed waveform is the waveform shown in FIG. 3C, but the synthesis of the vibrations can be considered to be substantially linear. , FIG. 3 (a) and FIG. 3 (b).

Here, considering the phase relationship between the driving voltage and the generated vibration from the above-described basic formula (1) of the piezoelectric, if the relationship between the S phase and the D phase is the same as the relationship between the A phase and the S phase, Since the voltage and the moving speed of the mass point have the same phase, when it is desired to suppress the vibration, a voltage having the opposite phase to the moving speed may be applied to the unnecessary vibration suppressing piezoelectric element 1-4.

Next, S is used to detect vibration from the above-described basic formula (2) of piezoelectricity.
Considering the phases, the generated voltage is 90 ° ahead of the moving speed of the mass point, so that the generated voltage is 180 ° ahead of the displacement.

Therefore, it is possible to suppress an unnecessary wave by adding a signal extracted from a position advanced by 90 ° of the wave to the D phase.

That is, the circumference of the vibrating body 1 is defined as Φ _m , where a phase difference of a wave (wave number m) to be suppressed is a integer, and The S-phase and the D-phase may be provided at positions separated by a distance x that satisfies the above condition.

In the case of the present embodiment, since the equivalent position of the vibration detection S-phase piezoelectric element and the unnecessary vibration suppression piezoelectric element D is shifted by 90 ° in position, the signal extracted from the S-phase piezoelectric element is used for the unnecessary vibration suppression. That is, it is only necessary to input to the piezoelectric element D for use.

Amplifier 7 for unnecessary vibration suppressing piezoelectric element D shown in FIG.
As a specific circuit example, although a simple non-inverting amplifier circuit using an operational amplifier is possible, a large output current as shown in FIG. 4 can be taken out in consideration of the fact that the vibration wave motor is a capacitive load. A circuit configuration is desirable.

The polarization pattern shown in FIG. 2 has the same polarity in the S phase and the D phase. However, when the polarity is different as shown in FIG. 5, the use of the amplifier shown in FIG. Due to the difference in the polarization direction between the D and D phases, four waves, which should be unnecessary, are excited in reverse.
(6) The phase shifter may be provided before or after the amplifier 7, or an amplifier having a circuit configuration of inverting amplification as shown in FIG. 6 may be used for driving the unnecessary vibration suppressing piezoelectric element D.

Further, in this embodiment, the case where four traveling waves travel from left to right is taken as an example. However, it is conceivable that the traveling wave may travel in the opposite direction. The same effect can be obtained by setting the S and S phases for useless vibration suppression.

FIG. 23 shows an electrode pattern of a vibration wave motor driven by 9 waves, and FIG. 24 shows a waveform diagram when three unnecessary vibrations are generated. Here, if the phase difference of the driving wave is set to Φ _n and the distance x = / 12 between the S phase and the D phase, Therefore, if the output of the S phase is amplified as it is and input to the D phase, it is possible to suppress three unnecessary waves and to vibrate nine driving waves. Therefore, the output can be improved.

Embodiment 2 In FIG. 3 of Embodiment 1 described above, considering the phase difference between the S phase and the D phase of eight waves, there is a phase difference of 180 °,
There is a 180 ° phase difference between the vibration displacement and the generated voltage in the S phase, and a 180 ° phase difference is added. As a result, the voltage input to the D phase and the vibration displacement on the D phase eventually become the same phase. The phase of the eight waves generated above is different from that of the vibration, and a new wave having the same frequency is to be generated, which is not preferable.

In this embodiment, in order to suppress unnecessary four waves without affecting the vibration of eight waves, as shown in FIG.
The detection signal from the S phase is amplified by an amplifier 7 through a low-pass filter 8 to drive a piezoelectric element D for suppressing unnecessary vibration. This low-pass filter 8 has eight waves as shown in FIG. and has a cut-off frequency between the frequency f ₄ of the frequency f ₈ and 4 waves.

That is, by inputting a signal passed through a low-pass filter 8 having a cutoff frequency as shown in FIG. 7 to the D phase, unnecessary four waves can be suppressed without affecting the vibration of the eight waves. Is possible.

Embodiment 3 In each of the embodiments described above, the drive mode is 8 waves and the unnecessary vibration is 4
In the case of a wave, in this case, since the positional phase difference between the S phase and the D phase is 90 ° or 180 °, the signal detected in the S phase can be directly added to the D phase. However, the unnecessary vibration is not limited to four waves, but to other modes, for example, as shown in FIG. 9 (assuming that the waves travel from left to right as in FIG. 3), eight waves shown in FIG. There are cases where six waves shown in (b) are generated and traveling waves shown in (c) are generated. In this case, since the 6 waves are ahead of the D phase by 135 ° in the S phase,
If the signal from the S phase is directly applied to the D phase as in the circuit configuration of the first embodiment shown in FIG. 1, a sufficient vibration suppression effect cannot be obtained.

In the present embodiment, as shown in FIG. 10, the signal from the S phase 1-1 is output to the amplifier 7 via the delay circuit 9 having the delay time Δt to drive the unnecessary vibration suppressing piezoelectric element D. It was done.

The delay time Δt of the delay circuit 9 corresponds to the frequency of six waves.
f ₆ , when the interval between the centers of the S phase and the D phase is x and the circumference of the motor (vibrating body) is a, Should be set so as to satisfy the relationship of .DELTA.t. Note that Φ ₆ indicates a phase difference of six waves.

Although the traveling directions of the six waves have been described as being from left to right in FIG. 9, when the traveling directions of the six waves are reversed, the functions of the S phase and the D phase are reversed as in the case of the four waves described above. Has the same effect, A similar effect can be obtained by switching to Δt that satisfies

As for the delay circuit 9, an active device such as a CCD or a BDD (bucket break device) is convenient because the delay time can be changed, but it is also possible to use a delay line.

In addition, if the frequency of the eight waves is assumed to be f ₈ and b as integers so that the eight driving waves do not affect the vibration, the rotation direction is also taken into consideration. Is preferably set to satisfy Δt, but it is often difficult to simultaneously satisfy the conditions of 6 waves and 8 waves.
In such a case, it is desirable to provide a filter on the input side, the output side, or both of the delay circuit to attenuate the frequency of eight waves.

 The circuit block in this case is shown in FIG.

The circuit shown in FIG. 11 uses a signal from the S-phase 1-1 and a signal from the C-phase 1-5 as a vibration detection signal, and includes two delay circuits 9-1 and 9-2 each including a delay line. provided with two filter circuits 8a having a cutoff frequency between f ₆ and f _8, and 8b provided, S phase 1-1 and C phases 1-5
As shown in FIG. 9 (b), only six signals are taken out through the filter circuits 8a and 8b, respectively, and the direction detection circuit 10 receives the signals from the C phase 1-5 taken out from the filter circuit 8b. The traveling direction of the wave is detected, and one of the two delay circuits 9-1 and 9-2 is selected by the switch circuit 11 according to the detected traveling direction of the six waves, and the signal from the filter circuit 8a is selected. Delayed delay time of amplifier 7
Drives the D phases 1-4.

The direction detection circuit 10 can be composed of, for example, two comparators and a D-flip-flop circuit.

Embodiment 4 In the circuit shown in FIG. 11 of Embodiment 3 described above, the traveling direction of the unnecessary vibration is detected by the signal after passing through the filter circuit 8b, but when the frequency of the unnecessary vibration and the driving frequency are extremely close to each other. In some cases, it may be difficult to remove the driving frequency signal using a filter. For example, as shown in FIG. 12, in the case of (c) in which seven waves of unnecessary vibration shown in (b) are mixed with eight waves of driving shown in (a), the eight and seven waves are separated by a filter. Requires a high-order, high-precision filter, which is not practical. In such a case, pay attention to unnecessary vibration, and adjust the wavelength of unnecessary vibration.
Signals taken from points separated by an integral multiple of 1/2 may be phase-shifted and input to the unnecessary vibration suppressing piezoelectric element D.

That is, It suffices to provide an S phase for vibration detection at a position x.

Considering the eight driving waves, If the phase difference between the 8th wave and the 7th wave is Φ _8-7 = 2πx (8−7) / = π + 2cπ, this is the S phase for vibration detection and the D phase for unnecessary vibration suppression. Eight waves are in phase with each other, and seven waves are out of phase, or vice versa. If a phase shifter is set in a direction to suppress the seven waves of unnecessary vibration, eight driving waves will be excited. It is very convenient. FIG. 13 shows an electrode pattern satisfying such a positional relationship between the S phase and the D phase,
FIG. 14 shows a block diagram of the drive circuit.

In the drive circuit of FIG. 14, a phase shifter is provided before the amplifier 7.
The phase shifter 12 shifts the signal from the S phase by the phase shifter 12, and drives the D phase by the amplifier 7. The phase shifter 12 includes a differentiating circuit, an integrating circuit, or integrating with the differentiating circuit. A circuit configuration is possible.

Example 5 The area of the unnecessary vibration suppressing phase D is desirably about half a wavelength of the unnecessary vibration (the width is assumed to be constant).
If the configuration is such that eight driving waves are excited as in each of the above-described embodiments, the area of the unnecessary vibration suppression phase is preferably about half a wavelength of eight waves as shown in FIG. . However, when the drive frequency signal can be sufficiently attenuated by the filter as in the case where the unnecessary vibration is four waves, as shown in FIG. 16 and FIG. The electrode area can be set to an electrode area corresponding to the wavelength of unnecessary vibration.

In addition, if the electrode area is sufficient for a half wavelength, as shown in FIG. 18, a plurality of electrodes D ₁ , D ₂ , and D ₃ can be used as an unnecessary vibration suppression phase.

Example 6 When the electrode area that can be used besides the drive phase for the eight-wave resonance drive is severely restricted, one or both of the unnecessary vibration suppression phase D and the vibration detection phase S are made of a piezoelectric polymer material.
For example, it can be configured using PVDF.

FIG. 19 shows an electrode pattern of a vibration wave motor using PVDF for the vibration detection phase _SN .

In this embodiment, if the unnecessary vibration is six waves,
Since the position of the vibration detection phase _{SN and} the position of the D phase made of PVDF indicated by the broken line in FIG. 19 are the same phase for 8 waves and the opposite phase for 6 waves, the signal of the _SN phase is shifted by 90 °. , Only suppression of 6 waves and excitation of 8 waves are possible.

FIG. 20 shows a circuit block diagram in this case. That is, the signal from the _SN phase 1-5 is applied to the D phase by the amplifier 7 via the 90 ° phase shifter 12.

Embodiment 7 This embodiment is to suppress unnecessary vibration when there are a plurality of wave numbers of unnecessary vibration. FIG. 21 shows a circuit block diagram of this embodiment.

In the present embodiment, the signal from the S phase 1-1 is divided into two systems via two delay circuits 9-1 and 9-2 having different delay times, and the signal of one of the delay circuits 9-1 is added to the adder 13. Output to
The signal of the other delay circuit 9-2 is output to the adder 13 through the filter circuit 8, and the signal of the adder 13 is output to the D-phase 1-4.
Output to

That is, the setting is made so as to satisfy the relationship between the respective wave numbers of the unnecessary vibrations and the drive waves, and the unnecessary signals are suppressed by adding and amplifying the respective signals and driving the D phases 1-4.

As shown in FIG. 22, the signal from the S phase 1-1 is divided into two systems via two filter circuits 8-1 and 8-2 and two phase shifters 12-1 and 12-2, respectively. The same effect can be obtained by adding and amplifying them by the adder 13 and outputting them to the D phases 1-4.

In the circuits shown in FIGS. 21 and 22, each of the filter circuits is provided, but this filter circuit is provided as necessary in consideration of the phase relationship between the drive wave and other unnecessary vibrations for each unnecessary vibration. Just do it.

Embodiment 8 In each of the embodiments described above, a dedicated driving phase D is provided for vibration suppression. In this embodiment, the driving phase A is used as a driving phase for vibration suppression. The first
Fig. 25 shows the electrode pattern.

FIG. 26 shows a waveform diagram in the case where the useless vibration of 7 waves occurs in the vibration wave motor having such an electrode pattern (8-wave drive).

In this case, if the unnecessary vibration is suppressed using the A phase, the distance x between the center of the driving A phase and the center of the S phase for detecting the vibration is x = 15 / Since it is 64, Here, using a delay element having a delay time of Δt, After that, the signal from the S phase may be input to the driving amplifier for the A phase with a predetermined delay.

FIG. 27 is a block diagram showing an example of a drive circuit for realizing such a drive method. The output from the oscillator 3 is output to the A-phase drive amplifier 6 via the adder 15 composed of, for example, an operational amplifier. The detection signal of the S phase 1-1 is output to the adder 15 via the delay circuit 14.

[Effects of the Invention] As described above, according to the present invention, even if a vibration different from a driving wave occurs during driving of a vibration type motor,
By inputting the detection signal from the vibration detection phase directly or with a delay to the drive phase for suppressing unnecessary vibration, generation of unnecessary traveling vibration waves can be prevented without affecting the drive mode at all. In addition, it is possible to stably drive the vibration type motor and to prevent the squeal and the like.

[Brief description of the drawings]

FIG. 1 (a) is a circuit block diagram of a vibration type motor according to a first embodiment of the present invention, FIG. 1 (b) is a diagram showing an equivalent circuit of A phase and S phase of the vibration type motor, and FIG. FIG. 3 shows an electrode pattern of the vibration type motor.
FIG. 4 is a waveform diagram showing a state where unnecessary vibration of a wave occurs, FIG. 4 is a circuit diagram of an amplifier, FIG. 5 is a diagram showing a modification of the electrode pattern of the first embodiment, FIG. 6 is another circuit diagram of the amplifier, FIG. 7 is a diagram showing an attenuation characteristic of a filter used in the second embodiment, FIG. 8 is a circuit block diagram of the second embodiment, FIG. 9 is a waveform diagram for explaining the third embodiment, and FIG. FIG. 11 is a circuit block diagram of a third embodiment, FIG. 11 is a circuit block diagram showing a modification of the third embodiment, FIG. 12 is a waveform diagram for explaining the fourth embodiment,
FIG. 13 is a diagram showing an electrode pattern of the third embodiment, FIG. 14 is a circuit block diagram of the fourth embodiment, and FIG. 15, FIG. 16, FIG.
18 is a diagram showing an electrode pattern of the fifth embodiment, FIG. 19 is a diagram showing an electrode pattern of the sixth embodiment, FIG. 20 is a circuit block diagram of the sixth embodiment, FIG. 21 and FIG. 7 is a circuit block diagram of FIG. 7, FIG. 23 is an electrode pattern showing a modification of the first embodiment, FIG. 24 is a waveform diagram showing a case where three unnecessary vibrations are generated at the time of driving nine waves, and FIG. 8 is a circuit block diagram of a vibration type motor, FIG. 26 is a waveform diagram for explaining Embodiment 8, FIG. 27 is a circuit block diagram of Embodiment 8, and FIG. 28 is a circuit block diagram of a conventional vibration type motor. FIG. 29 is a view showing an electrode pattern of a conventional vibration type motor. 1: Oscillator, 2: Vibration detection circuit 3: Oscillator, 4: Phase shifter 5: Amplifier, 6: Amplifier 7: Amplifier, 8: Filter circuit 9: Delay circuit, 10: Direction detector 11: Switch circuit, 12 : Phase shifter 12: Adder, 14: Delay circuit 15: Adder.

Claims (8)

(57) [Claims] 1. A vibration type motor in which frequency signals having different phases are applied to first and second electro-mechanical energy conversion elements disposed on a vibrating body to excite the vibrating body to obtain a driving force. A third electric-mechanical energy conversion element for vibration suppression, and a vibration-detecting mechanical-electric energy conversion element for detecting a vibration state of the vibration body, wherein the vibration detection is performed; A vibration type wherein a frequency signal having a phase opposite to the moving speed of the mass point of the vibrating body is applied to the third electro-mechanical energy conversion element in response to a detection output from the mechanical-electrical energy conversion element for use. motor. 2. The vibrating body is formed in a ring shape, generates a progressive vibration wave of a predetermined wavelength of the vibrating body, and sets the circumferential length of the vibrating body to m and a, where a wave number of unnecessary vibrations to be suppressed is m and a.
Is an integer, considering the traveling direction and the polarization direction of the wave, The vibration according to claim 1, wherein the vibration-detecting mechanical-electrical energy converting element and the third electric-mechanical energy converting element are disposed at a position separated by a distance x that substantially satisfies the following condition. Type motor. 3. The vibrating body is formed in a ring shape and generates a progressive vibration wave of a predetermined wavelength of the vibrating body, the driving wave number is n, the wave number of unnecessary vibration to be suppressed is m, and Perimeters, a and b are integers, taking into account the traveling direction and the polarization direction of the wave, The vibration detecting machine-electrical energy conversion element unit and the third electricity-
The vibration type motor according to claim 1, wherein a mechanical energy conversion element unit is disposed. 4. The vibrating body is formed in a ring shape, generates a progressive vibration wave of a predetermined wavelength of the vibrating body, and further delays a detection signal from the vibration-detecting mechanical-electrical energy conversion element unit. The voltage is applied to the third electro-mechanical energy conversion element section with a delay of Δt through a circuit, and the frequency of the wave number m to be suppressed is fm, the circumference of the vibrating body is a integer, a Considering the traveling direction and polarization direction of The vibration detection machine-electric energy conversion element unit and the third electricity-
The vibration type motor according to claim 1, wherein a mechanical energy conversion element unit is disposed. 5. The vibrating body is formed in a ring shape to generate a progressive vibration wave of a predetermined wavelength of the vibrating body, and further delays a detection signal from the vibration-detecting mechanical-electric energy conversion element unit. A delay of a time Δt is applied to the third electro-mechanical energy conversion element through the circuit, and the driving frequency is fn, the driving wave number is n, the circumference of the vibrating body is b, and b is an integer. Considering the traveling direction and polarization direction of the wave, The vibration detection machine-electric energy conversion element unit and the third electricity-
The vibration type motor according to claim 1, wherein a mechanical energy conversion element unit is disposed. 6. The vibrating body is formed in a ring shape to generate a progressive vibrating wave of a predetermined wavelength of the vibrating body, the number of waves to be suppressed is m, the peripheral length of the vibrating body is a, and a is an integer. The vibration detection machine-electric energy conversion element unit and the third electricity-
The vibration type motor according to claim 1, wherein a mechanical energy conversion element unit is disposed. 7. The vibrating body is formed in a ring shape to generate a progressive vibrating wave of a predetermined wavelength of the vibrating body, the driving wave number is n, the peripheral length of the vibrating body is b, and b is an integer. The vibration detection machine-electric energy conversion element unit and the third electricity-
The vibration type motor according to claim 1, wherein a mechanical energy conversion element unit is disposed. 8. The vibrating body is formed in a ring shape to generate a progressive vibration wave of a predetermined wavelength of the vibrating body, the driving wave number is n, the wave number to be suppressed is m, and the circumferential length of the vibrating body is ,
Let c be an integer, The vibration detection machine-electric energy conversion element unit and the third electricity-
The vibration type motor according to claim 1, wherein a mechanical energy conversion element unit is disposed.