JP2910942B2 - Magnetic head and method of manufacturing the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head capable of coping with high-density magnetic recording and a method of manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, in the field of magnetic recording, the recording density of signals recorded on a magnetic recording medium has been improved and the coercive force of the magnetic recording medium itself has been improved. Are required to have a narrower track and a higher saturation magnetic flux density.

In such a background, a monolithic type magnetic head using a sintered ferrite such as Mn-Zn ferrite for a head core and a slider is widely used as a floating magnetic head for performing recording and reproduction on a magnetic disk. Have been.

A method of manufacturing the monolithic type magnetic head will be briefly described below. First, a material block made of sintered ferrite such as Mn-Zn ferrite is cut by machining to form a slider core block having a flat plate shape. Then, a head core block having a substantially U-shaped cross section is formed, and an SiO ₂ film for forming a magnetic gap is formed on a necessary portion of the head core block by sputtering.

Subsequently, a head core block is joined to one side surface of the slider block by welding glass. Next, a plurality of head cores having a predetermined core width are formed by cutting out the head core block at a predetermined interval along a joint surface with the slider block, and thereafter, a negative pressure groove for improving the floating property on the medium facing surface of the slider block. Are machined along each head core. Then, a lapping process is performed on the slider surface to improve its surface roughness, and a predetermined chamfering process is performed to form a large number of magnetic heads simultaneously.

[0006]

As described above, in this type of magnetic head, higher density and narrower track are being promoted. However, in the magnetic head having the above structure, the magnetic head is obtained by simply integrating the cut out of the sintered ferrite block into a magnetic head.
It is not possible to obtain magnetic properties higher than that of Zn ferrite itself, and since sintered ferrite is a compact of fine particles, it is necessary to prevent degranulation of fine particles. There was a problem with limitations.

Also, a problem with the progress of narrowing the track is the determination of the gap depth. Usually, in order to determine the gap depth in the above-described manufacturing method, after joining the slider block and the core block, the medium facing surfaces of both blocks are polished to perform an alignment operation for determining the specified gap depth. ing. However, when the track is narrowed, the accuracy of the gap depth needs to be higher than before. Here, in the conventional magnetic head, the allowable range of about ± 2 μm in the gap depth is changed to 1 in the track width by narrowing the track.
When the accuracy of 0 μm or less is required, the gap depth is required to have an accuracy of ± 1 μm or less. However, it is difficult to adjust the gap depth to such a fine value by the current polishing technique. There's a problem.

For the purpose of realizing a narrow track and a high density, a ferromagnetic metal thin film is conventionally formed on a magnetic core half as disclosed in JP-A-60-229210.
A magnetic head formed by joining a pair of magnetic core halves is known. In this magnetic head, narrow track and high density can be realized, but it is difficult to manage a fine gap depth when the track is narrow.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and enables high-density recording as compared with the prior art, and a magnetic head having a structure capable of realizing a narrow track, or a gap depth can be easily managed. It is an object of the present invention to provide a magnetic head and to provide a suitable method for manufacturing the magnetic head.

[0010]

According to a first aspect of the present invention, there is provided a method for solving the above-mentioned problem, wherein a block in which a ferromagnetic metal thin film is buried in a direction intersecting a surface direction of the thin film with a medium facing surface includes a pair. , Ferromagnetic metal thin film exposed on the medium facing surface
End faces are connected linearly via an insulating layer to form a magnetic gap, and the junctions adjacent to the medium facing surface of each block
A magnetic head that is joined face-to-face
The inner edge of the ferromagnetic metal thin film at the junction surface of each block.
The surfaces are each formed linearly, and the ferromagnetic
The linear inner end surfaces of the metal thin film match on the medium facing surface
That are spaced apart from the medium facing surface.
It is.

According to a second aspect of the present invention, there is provided a magnetic recording medium comprising a magnetic core portion formed by sandwiching a ferromagnetic metal thin film between a pair of fused glass portions on a medium facing surface side. Edge of ferromagnetic metal thin film exposed on opposing surface
The surfaces are connected linearly via an insulating layer to form a magnetic gap, and the bonding surfaces adjacent to the medium facing surface of each block are connected.
A magnetic head that is joined by
Each inner end face of the ferromagnetic metal thin film
A pair of blocks of ferromagnetic metal thin film formed linearly
Are aligned on the medium facing surface, and
The part away from the body facing surface is separated .

According to a third aspect of the present invention, there is provided a magnetic head according to the first or second aspect, wherein
Each block is made of Mn-Zn ferrite.

According to a fourth aspect of the present invention, there is provided a magnetic head according to the first or second aspect, wherein inner end lines of a pair of ferromagnetic metal thin films facing each other at a joint surface of the pair of blocks are formed by: Depth direction from the medium facing surface
Extending in opposite directions to each other
You.

[0014]

According to a fifth aspect of the present invention, there is provided a magnetic head block according to the second aspect, wherein one of a pair of fused glass portions sandwiching the ferromagnetic metal thin film has a high melting point glass or crystal. The other is made of low melting glass.

According to a sixth aspect of the present invention, there is provided a magnetic head according to the sixth aspect of the present invention, wherein the welding glass portions of the pair of blocks made of low-melting glass are fused and integrated with each other. Are joined together.

According to a seventh aspect of the present invention, there is provided a method of manufacturing a magnetic head in which a pair of blocks having a ferromagnetic metal thin film formed thereon are integrated by abutting the ferromagnetic metal thin films together, and then polished after the integration. In a method, a joining surface and a medium facing base surface are formed in a pair of blocks adjacent to each other, so as to reach the medium facing base surface and be exposed, and to reach the joining surface and be obliquely exposed. A ferromagnetic metal thin film is formed, and then a pair of blocks are joined to each other so that the medium facing base surfaces are flush with each other, and the joining surfaces are applied to each other. Then, the medium facing base surface is polished, and the pair of ferromagnetic metal thin films is gradually reduced together with the polishing, and the polishing is completed at the intersection of the pair of ferromagnetic metal thin films. Tsu it is an end of the depth alignment of the flops.

According to an eighth aspect of the present invention, there is provided a method of manufacturing a magnetic head in which a pair of blocks having a ferromagnetic metal thin film formed thereon are integrated by abutting the ferromagnetic metal thin films, and then polished after the integration. A method, wherein a high melting point glass part or a crystallized glass part is coated on each of a pair of blocks so as to reach a bonding surface of each block, and a high melting point glass part or a crystallized glass part is formed on each block. Form grooves to reach the joint surface of the block by dividing, and incline the inner surface of each groove, form a ferromagnetic metal thin film that reaches the joint surface on the inner surface of the inclined groove, and fill each groove After forming the low melting point glass part, the inner end face of the ferromagnetic metal thin film along the joining surface of one block and the inner end face of the ferromagnetic metal thin film along the joining surface of the other block intersect, and The low-melting glass part of the other block and the low-melting glass part of the other block are joined to join a pair of blocks, and after joining, both blocks are polished, and a pair of ferromagnetic metal thin films are gradually reduced with polishing to form a pair of strong metal thin films. Polishing is completed at the intersection of the magnetic metal thin films, and the completion of the polishing completes the track width adjustment and the gap depth adjustment.

[0019]

[Function] The end face of the ferromagnetic metal thin film formed on the block is a medium.
Since the magnetic gap is formed by being linearly connected on the body-facing surface, a magnetic head having excellent soft magnetic characteristics according to the magnetic characteristics of the ferromagnetic metal thin film to be used can be obtained. Further, the ferromagnetic metal thin film can be easily formed as thin as a micron order by a film forming technique. Therefore, a magnetic head having a narrower track than that of the conventional magnetic head can be obtained. Also,
The inner end face of the ferromagnetic metal thin film at the junction surface of each block
Each of the pair of blocks is formed in a linear shape,
The linear inner end faces of the thin film
And separated from the medium facing surface
The surface facing the medium is shaped by polishing the block.
For the magnetic head to be formed, the end face of the ferromagnetic metal thin film
Is exactly the target media facing surface position
It is understood that the setting is specified. Furthermore, since a magnetic gap is formed by forming a ferromagnetic metal thin film in the grooves formed in the slider block and the core block and joining them, a magnetic head having excellent soft magnetic characteristics can be easily obtained. Furthermore, since the low melting point glass portions provided in the groove formed in the slide block and the groove formed in the core block are welded to each other, the slider block and the core block are easily bonded, and the bonding strength is sufficiently increased. .

On the other hand, when the ferromagnetic metal thin films formed on the pair of blocks are joined together so as to intersect each other, the blocks are polished after the joining to reduce the ferromagnetic metal thin film. If the polishing is completed at the intersection of the two, the gap depth is determined simultaneously with the determination of the track width, so that the fine gap depth can be easily determined.

[0021]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 8 show an embodiment in which the present invention is applied to a two-rail monolithic magnetic head. It should be noted that the structure of the present invention can be applied to a three-rail type monolithic magnetic head and, of course, to a composite type magnetic head.

As shown in FIG. 2, the magnetic head 1 of this embodiment is mainly composed of a plate-shaped slider body 2 and a head portion 3 extending to the rear side of the slider body 2. The slider body 2 includes a pair of parallel floating rails 4 on a surface facing the magnetic recording medium.
One end (left side in FIG. 2) of the rail portion 4 is the front side (leading side) of the slider body 2, and the other end side (right side in FIG. 2) of the rail portion 4 is the rear side (trading side) of the slider body 2. ). In this embodiment, the slider body 2 is made of Mn-Zn ferrite, but may be made of other materials.

The head section 3 is shown in an enlarged manner in FIG.
It comprises a C-shaped core block 6 and a slider block 7 at the rear of the slider body joined to the core block 6.

The core block 6 is joined to the slider block 7 with its one end 6a and the other end 6b abutting against the slider block 7. The core block 6 includes a ferromagnetic metal thin film 10 sandwiched between welding glass portions 8 and 9 on the medium facing surface S (the upper surface in FIG. 1). The ferromagnetic metal thin film 10 is provided to be inclined with respect to the medium facing surface S as described later, and the welding glass portions 8 and 9 sandwich both sides in the thickness direction.

The ferromagnetic metal thin film 10 is formed of a material having better soft magnetic properties than Mn-Zn ferrite, such as an Fe-based alloy thin film and a sendust film. Further, the welding glass portion 9 on the near side in FIG. 1 is made of low melting point glass, and the welding glass portion 8 on the back side in FIG. 1 is made of high melting point glass. Preferred as the low melting point glass is one having a melting point of about 500 to 650 ° C, and preferred as the high melting point glass is one having a melting point of 750 to 800 ° C.
Of the degree. Further, instead of the high melting point glass, the crystallized glass may be heated and pressed at 600 to 800 ° C. and joined to the ferrite.

On the other hand, the slider block 7 has a projection 7a joined to one end 6a of the core block 6 and a projection 7b joined to the other end 6b of the core block 6.
On the medium facing surface (upper surface in FIG. 1) side of the convex portion 7a, a ferromagnetic metal thin film 13 sandwiched between welding glass portions 11 and 12 is provided. The ferromagnetic metal thin film 13 is provided to be inclined with respect to the medium facing surface as described later, and the welding glass portions 11 and 12 sandwich both sides in the thickness direction. This ferromagnetic metal thin film 13 is made of the same material as the ferromagnetic metal thin film 10 described above. The welding glass part 11 is made of the same high-melting glass as the above-mentioned welding glass part 8, and the welding glass part 12 is made of the same low-melting glass as the above-mentioned welding glass part 9.

An SiO _{2 (not} shown) is provided between the protrusion 7 a of the slider block 7 and one end 6 a of the core block 6.
The slider block 7 and the core block 6 are integrated by the filler glass 14 to form a magnetic gap with an insulating layer made of
13 are joined to each other via a magnetic gap so as to form the same straight line on the medium facing surface.
The welding glass part 11 and the welding glass part 9 abut against each other. In addition, the welding glass part 9, the welding glass part 12, and the filling welding glass 14
Are fused and integrated.

On the other hand, the distal end surface of the convex portion 6a of the core block 6 is a joint surface 6c, and the distal end surface of the convex portion 7a of the core block 7 is a joint surface 7c. The joining surface 6c and the joining surface 7c are joined via the insulating layer (not shown) as described above, but the ferromagnetic metal thin film 13 along the joining surface 6c
Metal thin film 10 along the inner end face 13b and the joining face 7c
As shown in FIG. 9, the inner end face 10b intersects with a chevron (a triangular corner) so that the inner end face 10b and the inner end face 13b coincide with each other in the medium facing surface.

In the above embodiment, the ferromagnetic metal thin film 10
The inner end face 10b and the inner end face 13b of the ferromagnetic metal thin film 13 intersect each other in a triangular corner as shown in FIG. 9, but the inner end face 10b and the inner end face 13b are circular as shown in FIG. It may be curved in an arc shape, or may be bent as shown in FIG. 11. In short, the inner end face 10 b and the inner end face 1
It is sufficient that the ends of 3b coincide with each other on the medium facing surface S, and the other portions are separated from each other. However, the intersection of both
As will be described later, these marks serve as marks for polishing.
Is preferable.

Next, a method of manufacturing the magnetic head having the above configuration will be described. In manufacturing a magnetic head, a flat material block is prepared. This material block is made of sintered ferrite, and its manufacturing procedure will be briefly described. First, powders such as oxides and carbonates (for example, α-Fe ₂ O ₃ , Mn ₃ O ₄ , MnCO ₃ , ZnO) is weighed to the molecular component ratio of the ferrite, and is mechanically mixed and heated at 900 to 1200 ° C. to cause the following reaction to produce ferrite. MnO + Fe ₂ O ₃ → MnFe ₂ O ₄ ZnO + Fe ₂ O ₃ → ZnFe ₂ O ₄

Next, the produced ferrite powder is placed in a suitable flexible container and formed into a desired shape by applying static pressure, and then the formed green compact is sintered to carry out a solid phase reaction. It is produced to produce a sintered ferrite having a desired shape. In addition, when hot isostatic pressing is performed during molding, a higher density ferrite can be obtained. The ferrite powder may be produced by a liquid phase reaction, or may be sintered simultaneously with molding by a hot press method.

In order to manufacture a magnetic head from the material block thus manufactured, first, the material block is cut into a slider block 20 and a core block 21 as shown in FIG. The side surface 22 of the slider block 20 is a bonding surface and the upper surface is a medium facing base surface 20a, and the side surface 23 of the core block 21 is a bonding surface and the upper surface is a medium facing base surface 21a. Here, a cut portion inclined at an angle of about 45 degrees with respect to the joint surface 22 is formed in one ridge of the slider block 20, and a triangular prism-shaped high melting point glass portion 24 is formed in this cut portion. Slider block 21
A high melting point glass portion 25 is formed in the same ridge in the same procedure.

It should be noted that the angle at which one ridge of the slider block 20 is cut is not limited to 45 degrees, but may be determined as appropriate. In order to form the high-melting glass portions 24 and 25, for example, the high-melting glass is poured into a mold in a state where the blocks 20 and 21 are placed in a mold or the like, and unnecessary portions are polished and removed. What is necessary is just to perform a molding means, or to join triangular prism-shaped crystallized glass.

Next, as shown in FIG. 13, the high-melting glass portion 24 is divided into the slider block 20 to form an inclined groove 27 reaching the joining surface 22 of the slider block 20 and the medium facing base surface 20a. The high melting point glass portion 25 is also divided at 21 to form a groove 28 reaching the bonding surface 22 of the core block 21 and the medium facing base surface 20a.
The widths of the groove 27 and the groove 28 formed here have the same value. Further, the angle θ ₁ formed between one inner side surface of the groove 27 and the ridge line of the high melting point glass portion 24 is preferably about 45 to 60 degrees, and the angle θ ₁ between the one inner side surface of the groove 28 and the ridge line of the high melting point glass portion 25 is preferable. angle theta ₂ is preferably about 45 to 60 degrees are preferred. A plurality of grooves 27 are formed at predetermined intervals in the longitudinal direction of the slider block 20, and a plurality of grooves 28 are formed at predetermined intervals in the longitudinal direction of the core block 21.

Next, as shown in FIG. 14, a ferromagnetic metal thin film 30 is formed on the inner surface of the groove 27 of the slider block 20 by sputtering, and the groove 2 of the core block 21 is formed.
8, a ferromagnetic metal thin film 31 is formed by sputtering.
To form The ferromagnetic metal thin films 30 and 31 formed here
Has a thickness of several μm to several tens μm, for example, 6 to 10 μm.
m or less.

As the ferromagnetic metal thin films 30 and 31 used here, alloy thin films obtained by adding elements such as Cr, Mn and Hf to Fe or thin films such as Sendust can be used. In order to selectively form the ferromagnetic metal thin films 30 and 31 on the inner surfaces of the grooves 27 and 28, the blocks 20 and 21 are used.
May be inclined in a sputtering apparatus to perform sputtering.
Sputtering may be performed by skipping sputtered particles obliquely.

After the ferromagnetic metal thin films 30 and 31 are formed, as shown in FIG. 15, a concave groove 35 is formed in the joint surface 22 of the slider block 20 along the longitudinal direction of the block 20, and the core block 21 is joined. A concave groove 36 is formed on the surface 23 along the longitudinal direction of the block 21. The groove 36
In the case of forming the groove 36, the inner surface 36a of the groove 36 on the side where the ferromagnetic metal thin film 31 is formed is inclined with respect to the bottom surface of the groove 36 as shown in FIG.

Next, as shown in FIG. 16, the low melting glass G is molded so as to fill the groove 27 and the concave groove 35 of the block 20, and the low melting glass G is filled so as to fill the groove 28 and the concave groove 36 of the block 21. Mold. Next, as shown in FIG. 17, the low melting point glass G is removed along the groove 35 of the block 20 and the groove 36 of the block 21 to form a low melting point glass portion 37 in the groove 27 of the block 20. A low melting point glass part 38 is formed. When the low melting point glass G is removed, the inner surface 36a of the groove 36 is removed.
The low melting point glass G is removed so that a part of the low melting point glass G formed above is left in a triangular prism shape as shown in FIG. By this processing, the filling welding glass 14 'is formed from the low melting point glass remaining on the inner side surface 36a. After the formation of the low melting point filled glass portion 38, an insulating layer such as SiO ₂ is formed on the side surface of the ferromagnetic metal thin film 31 exposed on the joint surface 23 side of the core block 21.

[0039] Then, as shown in FIG. 18, abutting by shifting the low-melting glass 3 8 of the low melting point glass of the slider block 20 portion 37 and the core block 21, the high melting point glass 24 and the core block 21 of the slider block 20 The high melting point glass part 25 is displaced and brought together, and in this state, the two are turned upside down and heated to the melting temperature of the low melting point fused glass to melt the low melting point fused glass 14 ' . Then, the two are joined and integrated.

In the heat treatment at the time of the joining, the low melting point glass portion 37 of the slider block 20, the low melting point glass portion 38 of the core block 21,
Since 4 ′ is heated while being in contact with each other, they are welded to each other and integrated. Thereby, the joining strength between the slider block 20 and the core block 21 can be increased. At the time of this joining, the ferromagnetic metal thin film 30 and the ferromagnetic metal thin film 31 abut each other via an insulating layer to form a magnetic gap.

Subsequently, the slider block 2 joined and integrated
0 and the core block 21 are cut out at predetermined intervals, and then polished to obtain a plurality of magnetic heads 1 having the structures shown in FIGS. In the magnetic head 1, the slider block 7 is cut out from the slider block 20, the core block 6 is cut out from the core block 21, the ferromagnetic metal thin film 13 is formed from the ferromagnetic metal thin film 30, and the ferromagnetic metal thin film 31 is formed. The ferromagnetic metal thin film 10 is formed from the low melting glass portion 37, the welding glass portion 9 is cut out from the low melting glass portion 38, and the high melting glass portion 24 is cut from the high melting glass portion 24. Is cut out, and the fused glass portion 8 is cut out from the high melting point glass portion 25.

After the cutting, the slider block 20
The medium opposing base surface 20a and the medium opposing base surface 21a of the core block 21 are polished to perform an alignment operation for defining the gap depth. When performing this alignment operation and polishing, the ferromagnetic metal thin film 30 and the ferromagnetic metal thin film 31 are connected to each other via the joint surfaces of the blocks 20 and 21 as shown in FIG.
As shown in FIG. 9, they cross in an X-shape. When the medium facing base surfaces 20a and 21a are polished from this state, the ferromagnetic metal thin films 30 and 31 are sequentially polished from the upper side and reduced as shown in FIGS. When the polishing progresses and the upper surfaces of the ferromagnetic metal thin films 30 and 31 completely match as shown in FIG. 21, the polishing is completed.

By finishing the polishing in the state shown in FIG. 21, the ferromagnetic metal thin film 13 and the ferromagnetic metal thin film 10 can be aligned in a straight line as shown in FIG. Can be eliminated, and the polishing end surface at this point becomes the medium facing surface S, and the magnetic head 1 shown in FIG. 1 can be obtained. When the polishing is completed as described above, since the inclination angle of the ferromagnetic metal thin film 30 and the inclination angle of the ferromagnetic metal thin film 31 are determined, the gap depth becomes a constant value. Therefore, in this case, the gap depth is automatically determined by adjusting the track width.

In the magnetic head 1 manufactured as described above, the slider block 20 and the core block 21 are made of ferrite, but the portions constituting the magnetic gap are made of the ferromagnetic metal thin films 10 and 13. In addition, it exhibits excellent soft magnetic properties superior to ferrite. Therefore, it is possible to cope with a magnetic recording medium having a higher coercive force than a magnetic head made of a conventional ferrite. Also,
Since the ferromagnetic metal thin films 10 and 13 are formed by sputtering, it is easy to reduce the thickness to about 6 to 10 μm or less, and it is possible to easily cope with a narrow track of the magnetic head.

Incidentally, a structure in which the slider block and the core block are formed from ferromagnetic metal blocks is also conceivable. However, if the slider block is made of metal, there is an inconvenience such as causing a coalescence phenomenon at the start of rotation of the magnetic medium due to friction with the magnetic medium.If the core block is made of metal, eddy current loss occurs in a high frequency region. There are problems that arise. On the other hand, in the magnetic head 1, since the slider itself is made of ferrite, the slider is advantageous in relation to friction with the magnetic recording medium, and there is little possibility of adhesion.
Since the core block 6 is also made of ferrite, no eddy current loss occurs in a high frequency region.

Furthermore, in the magnetic head 1 having the above-described structure, the slider block 20 and the core block 21 are joined by mutual welding of the welding glass portions 9 and 12 in addition to the filling welding glass 14 '. Bonding strength is high.

FIGS. 22 to 25 show another embodiment in which the present invention is applied to a two-rail monolithic type magnetic head.

As shown in FIG. 23, the magnetic head 100 of this embodiment is mainly composed of a plate-shaped slider body 2 and a head portion 3 'extending to the rear side of the slider body 2. The slider body 2 includes rail portions 4 and 4 like the magnetic head 1 of the previous embodiment, and is made of Mn-Zn ferrite.

The head section 3 'is composed of a core block 60 and a slider block 70 as shown in an enlarged manner in FIG. The core block 60 has one end 60a and the other end 60b as in the previous embodiment, and
A ferromagnetic metal thin film 101 sandwiched between 0 and 90 is provided. The ferromagnetic metal thin film 101 is provided to be inclined with respect to the medium facing surface S, and welding glass portions 80 and 90 sandwich both sides in the thickness direction. On the other hand, the slider block 70 has a convex portion 70a and a convex portion 70b, and has a ferromagnetic metal thin film 130 sandwiched between the welded glass portions 110 and 120 as in the previous embodiment. The ferromagnetic metal thin film 130 is provided to be inclined with respect to the medium facing surface S.

Further, the slider block 70 and the core block 60 are integrated by the filler glass 14 ',
The ferromagnetic metal thin films 101 and 130 are butted and joined on the medium facing surface via a magnetic gap, and
0 and the welding glass part 110, and the welding glass part 90 and the welding glass part 120, respectively. In addition, the fused glass part 90, the fused glass part 120, and the filled fused glass 14 'are melted and integrated.

On the other hand, the distal end surface of the core block 60 is a joining surface 60c, and the distal end surface of the projection 70a of the core block 70 is a joining surface 70c. Further, the inner end face of the ferromagnetic metal thin film 130 along the bonding surface 60c and the inner end face of the ferromagnetic metal thin film 10 along the bonding surface 70c are crossed in a mountain shape (triangular corner shape) as in the previous embodiment. These are aligned and connected on the medium facing surface S.

Next, a method of manufacturing the magnetic head 100 having the above configuration will be described.

When manufacturing the magnetic head 100 of this embodiment, the same procedure as that of the method of the previous embodiment is performed. First, a slider block 200 and a core block 210 shown in FIG. 26 are cut out from a material block and used. Further, a leading groove 201 is formed in one edge of the slider block 200 and covered with a high melting point glass part 240,
10, a high-melting glass part 2 is formed on the upper surface of
Covering with 50 makes the state shown in FIG. In the slider block 200 shown in FIG.
The upper surface becomes the medium facing base surface 200a, and the core block 21
0, the side surface 230 is the bonding surface, and the upper surface is the medium facing base surface 2
10a.

Subsequently, as shown in FIG. 27, the high melting point glass portion 240 is divided into the slider block 200 to form an inclined groove 270 reaching the joining surface 220 of the slider block 200 and the medium facing base surface 200a, and the core block The high-melting-point glass portion 250 is also divided at 210 to form a groove 280 reaching the bonding surface 220 of the core block 210 and the medium facing base surface 200a. The widths of the groove 270 and the groove 280 formed here have the same value. Also, the groove 27
And one of the angle theta ₁ between the inner surface and the ridge of the high melting point glass portion 240 of 0, is the angle theta ₂ between the edge line of one of the inner surface and the high melting point glass portion 250 of the groove 280 as in the embodiment Set.

Next, as shown in FIG. 28, a ferromagnetic metal thin film 300 is formed on the inner surface of the groove 270 of the slider block 200 by sputtering.
A ferromagnetic metal thin film 310 is formed on the inner surface of the zero groove 280 by sputtering. Ferromagnetic metal thin films 300, 31
0 , slider slider as shown in FIG.
Groove 270 of the block 200 and groove 280 of the core block 210
Then, low melting point glass parts 370 and 380 are formed. And
Further, as shown in FIG. 30, a concave groove 350 and a concave groove 360 are formed.

Next, as shown in FIG. 31, the low melting point glass portion 370 of the slider block 200 and the core block 21 are formed.
The low melting point glass portion 370 of the slider block 200 and the high melting point glass portion 250 of the core block 210 are displaced and abutted. The low-melting point fused glass is placed on the joint, and the two are heated to the melting temperature of the low-melting point fused glass to melt the low-melting point filled fused glass 14 ', thereby joining the two together.

In the heat treatment at the time of this joining, the slider block 200 is heated while the low-melting glass portion 370 of the slider block 200, the low-melting glass portion 380 of the core block 210, and the filling welding glass 14 'are in contact with each other. , Welded together and integrated. Thereby, the joining strength between the slider block 200 and the core block 210 can be increased. In this connection, the ferromagnetic metal thin film 30
0 and the ferromagnetic metal thin film 310 are abutted via an insulating layer to form a magnetic gap.

Subsequently, the slider block 2 joined and integrated
00 and the core block 210 are cut out at a predetermined interval, and then polished to obtain a plurality of magnetic heads 100 having the structures shown in FIGS. This magnetic head 100
5, the slider block 70 is cut out from the slider block 200, the core block 60 is cut out from the core block 210, the ferromagnetic metal thin film 130 is formed from the ferromagnetic metal thin film 30, and the ferromagnetic metal thin film 31 is formed.
0, the ferromagnetic metal thin film 101 is formed, the welding glass part 110 is cut out from the low melting point glass part 370, the welding glass part 90 is cut out from the low melting point glass part 380, and the welding glass part is cut out from the high melting point glass part 240. 120
Is cut out, and the fused glass part 80 is cut out from the high melting point glass part 250.

After cutting, the slider block 20
The alignment work for defining the gap depth is performed by polishing the medium facing base surface 200a of 0 and the medium facing base surface 210a of the core block 210. When polishing by performing this alignment work, the ferromagnetic metal thin film 300 and the ferromagnetic metal thin film 310 are in a state of intersecting in an X-shape via the joint surfaces of the blocks 200 and 210. From this state, the medium facing base surfaces 200a and 210a are polished. When the end faces of the ferromagnetic metal thin films 300 and 310 on the medium facing surface side coincide with each other, the polishing is completed.

By finishing polishing as described above, the ferromagnetic metal thin film 130 and the ferromagnetic metal thin film 10 are formed as shown in FIG.
1 can be joined without displacement, the displacement of the track width can be eliminated, and the polishing end surface at this point becomes the medium facing surface S, and the magnetic head 100 shown in FIG. 22 can be obtained. As in the embodiment, the effect that the gap depth can be easily determined can be obtained.

FIG. 32 shows the magnetic head 10 of this embodiment.
0, the ferromagnetic metal thin film 101 in a state immediately before the end of polishing,
The crossing state of 130 is shown. This figure shows a magnetic head in the case where the track width is 6 μm and the crossing angle between the ferromagnetic metal thin films is 60 degrees.
Assuming that polishing is accurately completed at the intersection of 02 and 130, a magnetic head having a triangular depth d having a regular triangular shape as shown by the hatched intersection in FIG. 32 is formed.

In FIG. 32, the relationship between the value of the track deviation and the value of the gap depth at a position slightly above the cross-hatched portion d, that is, about 1 μm before the polishing end point, can be easily calculated as described below. First, the cross hatched portion is an equilateral triangle, and the small inverted triangle corresponding to the upper right track shift is also an equilateral triangle, so that the value of the track width shift is 0.6 μm. From this, conversely, if the value of the track width deviation is controlled to 0.6 μm or less, it means that in this case, the error of the gap depth can be controlled to ± 1 μm or less. Therefore, it is clear that the gap depth can be controlled to ± 1 μm or less if the track width is controlled to be 0.6 μm or less by grasping the end point of polishing while observing the track width with a microscope or the like when polishing the block.

[0063]

As described above, according to the present invention, since the magnetic gap is formed by using the ferromagnetic metal thin film, it is possible to obtain soft magnetic characteristics superior to the conventional ferrite magnetic head. Further, since the ferromagnetic metal thin film can be easily formed thin by sputtering or the like, it is possible to realize a track narrowing of about 6 to 10 μm or less. Therefore, the magnetic head of the present invention can cope with a magnetic recording medium having a higher coercive force than the conventional one, and has an effect of reducing the track width during recording and reproduction.

Further, the end surfaces of the ferromagnetic metal thin films are aligned at the joining surface of the block at the medium facing surface, and
By taking a separated configuration in the part away from the facing surface ,
By ending the polishing at the intersection of the ferromagnetic metal thin films when polishing the block, the deviation of the track width can be eliminated, and the determination of the gap depth can also be ended. In this case, by managing the deviation of the track width, the accuracy of managing the gap depth can be improved,
Fine gap depth control of a magnetic head having a narrow track can be easily performed. Specifically, a gap depth of 1 μm required by narrowing the track to 10 μm or less.
The following management can also be realized. Furthermore, if the connection state between the ferromagnetic metal thin films via the joint surface is a triangular corner, the gap depth can be easily calculated by managing the track width. This has the effect of being easier. In addition, the block is Mn-
Those made of Zn ferrite do not cause the adhesion phenomenon with the magnetic recording medium.

According to the method of the present invention, a groove is formed in the slider block and the core block, a ferromagnetic metal thin film is formed on the inner surface of the groove, and then the groove is filled with a low melting point glass portion. By joining the slider block and the core block, a magnetic gap using the ferromagnetic metal thin film can be formed. Therefore, a magnetic head having a narrow track width and excellent soft magnetic characteristics can be manufactured. Furthermore, since the slider block and the core block can be joined and integrated with the low melting point glass portion provided on the side of the ferromagnetic metal thin film of each block, the joining strength of both blocks can be increased.

[Brief description of the drawings]

FIG. 1 is an enlarged perspective view showing a main part of a magnetic head according to one embodiment of the present invention.

FIG. 2 is a bottom view of the magnetic head.

FIG. 3 is a schematic side view of the magnetic head shown in FIG. 1;

FIG. 4 is an enlarged plan view of a main part of the magnetic head shown in FIG. 1;

FIG. 5 is an arrow D diagram of FIG. 3;

FIG. 6 is an enlarged right side view of a main part of the magnetic head shown in FIG. 1;

FIG. 7 is an enlarged left side view of a main part of the magnetic head shown in FIG. 1;

FIG. 8 is a perspective view in which a part of the magnetic head is cut away.

FIG. 9 is a configuration diagram showing a cross state of ferromagnetic metal thin films.

FIG. 10 is a configuration diagram showing another example of an intersecting state of the ferromagnetic metal thin films.

FIG. 11 is a configuration diagram showing still another example of the crossing state of the ferromagnetic metal thin films.

FIG. 12 is a perspective view showing a state in which a material block is covered with a glass part.

FIG. 13 is a perspective view showing a state in which a groove is formed in the block.

FIG. 14 is a perspective view showing a state in which a ferromagnetic metal thin film is formed in a groove of a block.

FIG. 15 is a perspective view showing a state where a groove is formed in the block.

FIG. 16 is a perspective view showing a state where a groove of a block is filled with low-melting glass.

FIG. 17 is a perspective view showing a state where a part of the low melting point glass filled in the block is removed.

FIG. 18 is a perspective view showing a state where two blocks are joined.

FIG. 19 is an explanatory view showing a state before the crossed ferromagnetic metal thin films are polished.

FIG. 20 is an explanatory view showing a state in which the crossed ferromagnetic metal thin films are being polished;

FIG. 21 is an explanatory view showing an intersection of a ferromagnetic metal thin film at the end of polishing.

FIG. 22 is an enlarged perspective view showing a main part of a magnetic head according to another embodiment of the present invention.

FIG. 23 is a bottom view of the magnetic head.

FIG. 24 is an enlarged bottom view of a main part of the magnetic head shown in FIG. 22;

FIG. 25 is an enlarged side view of a main part of the magnetic head shown in FIG. 22;

FIG. 26 is a perspective view showing a state in which a material block is covered with a glass part.

FIG. 27 is a perspective view showing a state in which a groove is formed in a block.

FIG. 28 is a perspective view showing a state where a ferromagnetic metal thin film is formed in a groove of a block.

FIG. 29 is a perspective view showing a state in which a groove of a block is filled with low-melting glass.

FIG. 30 is a perspective view showing a state in which a new groove is formed in the block.

FIG. 31 is a perspective view showing a state where two blocks are joined.

FIG. 32 is an explanatory view showing a state immediately before polishing of the crossed ferromagnetic metal thin films is completed.

[Explanation of symbols]

1, 100 Magnetic head 6, 20, 60, 200 Core block 7, 21, 70, 210 Slider block 8, 12, 80, 120 Welding glass part 9, 11, 90, 110 Welding glass part 6c, 7c, 60c, 70c joint surfaces 10 and 13, the ferromagnetic metal thin film 10 ', 13', 10 '', 13 '' ferromagnetic metal thin film 10b, 13b in the end surface 24, 25, 250 high-melting-point glass unit 27,28,270,280 groove 30 , 31, 300, 310 Ferromagnetic metal thin film 20a, 21a, 200a, 210a Medium facing base surface 37, 38, 370, 380 Low melting point glass portion

Claims (8)

(57) [Claims] A block in which a ferromagnetic metal thin film is buried in a direction intersecting a plane direction of the ferromagnetic metal thin film with a medium facing surface is paired with one end face of the ferromagnetic metal thin film exposed on the medium facing surface. Are connected linearly via an insulating layer to form a magnetic gap, and the joining surfaces adjacent to the medium facing surface of each block are connected.
A magnetic head that is butt-joined, and the inner end face of the ferromagnetic metal thin film at the joining surface of each block is
Each of the pair of blocks is formed in a linear shape,
The linear inner end faces of the thin film
A magnetic head characterized in that the magnetic head is spaced apart from the medium facing surface . 2. A block in which a magnetic core portion formed by sandwiching a ferromagnetic metal thin film between a pair of deposited glass portions on a medium facing surface side is formed by a pair of end surfaces of the ferromagnetic metal thin film exposed on the medium facing surface. Are connected linearly via an insulating layer to form a magnetic gap, and the junction adjacent to the medium facing surface of each block
A magnetic head that is joined face-to-face
Te, the inner end surface of the ferromagnetic metal thin film in the bonding surfaces of each block
Each of the pair of blocks is formed in a linear shape,
The linear inner end faces of the thin film
A magnetic head characterized in that the magnetic head is spaced apart from the medium facing surface . 3. The magnetic head according to claim 1, wherein each block is made of Mn—Zn ferrite. 4. The magnetic head according to claim 1, wherein the inner end lines of the pair of ferromagnetic metal thin films facing each other at the joining surface of the pair of blocks are in a depth direction from the medium facing surface.
A magnetic head, wherein the magnetic heads extend in opposite directions to each other . 5. In each block of the magnetic head according to claim 2, one of a pair of deposited glass portions sandwiching the ferromagnetic metal thin film is made of high melting point glass or crystallized glass, and the other is made of low melting point glass. A magnetic head comprising: 6. The magnetic head according to claim 5, wherein the welding glass portions of the pair of blocks made of low-melting glass are:
A magnetic head characterized by being fused and integrated with each other and joined by a pair of blocks. 7. A method of manufacturing a magnetic head in which a pair of blocks formed with a ferromagnetic metal thin film are integrated by abutting the ferromagnetic metal thin films, and polishing after the integration, wherein a bonding surface and a medium facing base surface are formed. A ferromagnetic metal thin film is formed on a pair of adjacently formed blocks so as to reach and expose the medium facing base surface and to reach the bonding surface and be obliquely exposed. The opposing base surfaces are flush with each other, the joining surfaces are applied to each other, and the exposed portions of the ferromagnetic metal thin film on the joining surfaces of the blocks are joined so as to intersect with each other. The magnetic metal thin film is gradually reduced along with the polishing, polishing is completed at the intersection of the pair of ferromagnetic metal thin films, and the completion of the polishing completes the track width adjustment and the gap depth adjustment. Method of manufacturing a head. 8. A method of manufacturing a magnetic head in which a pair of blocks on which a ferromagnetic metal thin film is formed is integrated by abutting the ferromagnetic metal thin films, and polishing is performed after the unification. The high melting point glass part or the crystallized glass part is covered so as to reach the joining surface of the block, and the high melting point glass part or the crystallized glass part is divided at the top of each block to form a groove reaching the joining surface of the block, After inclining the inner surface of each groove, forming a ferromagnetic metal thin film reaching the bonding surface on the inner surface of the inclined groove, forming a low melting point glass part so as to fill each groove, then joining one block The inner end face of the ferromagnetic metal thin film along the surface intersects the inner end face of the ferromagnetic metal thin film along the junction surface of the other block, and the low melting point glass part of one block and the low melting point glass of the other block After joining, a pair of blocks are joined, and after joining, both blocks are polished and the pair of ferromagnetic metal thin films are gradually reduced with polishing, and polishing is completed at the intersection of the pair of ferromagnetic metal thin films. A method for manufacturing a magnetic head, comprising: completing a track width adjustment and a gap depth adjustment by finishing polishing.