[go: up one dir, main page]

JP2853645B2 - Polishing tape - Google Patents

Polishing tape

Info

Publication number
JP2853645B2
JP2853645B2 JP8075779A JP7577996A JP2853645B2 JP 2853645 B2 JP2853645 B2 JP 2853645B2 JP 8075779 A JP8075779 A JP 8075779A JP 7577996 A JP7577996 A JP 7577996A JP 2853645 B2 JP2853645 B2 JP 2853645B2
Authority
JP
Japan
Prior art keywords
polishing
tape
polishing tape
polishing liquid
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8075779A
Other languages
Japanese (ja)
Other versions
JPH09262774A (en
Inventor
虎彦 神田
健一 大野
眞成 三橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP8075779A priority Critical patent/JP2853645B2/en
Priority to US08/684,615 priority patent/US5727989A/en
Priority to DE19629528A priority patent/DE19629528A1/en
Priority to US08/789,136 priority patent/US5738576A/en
Publication of JPH09262774A publication Critical patent/JPH09262774A/en
Application granted granted Critical
Publication of JP2853645B2 publication Critical patent/JP2853645B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、高精度な研磨加工
に使用する研磨テープに関する。
The present invention relates to a polishing tape used for high-precision polishing.

【0002】[0002]

【従来の技術】従来、この種類の研磨テープは、図5
(B)に示すように、基材7の表面にと粒6を結合剤8
で固定して形成されている。このように形成された研磨
テープ31を使用して加工物の端面の研磨加工を行うに
は、図5(A)に示すように、加工物2を垂直軸の周り
に回転させながら研磨テープ31を介して研磨台3に垂
直に押し付け、研磨テープ31を供給ロール34から送
り出しつつ巻取ロール35で巻取り、その間、研磨テー
プ31の表面の加工物2の直前に研磨液33を滴下して
供給し、研磨屑の排出と研磨加工点の冷却を促進して、
研磨テープ31の目詰まりと研磨熱の発生を抑制しなが
ら研磨加工を行い、研磨された端面12をスクラッチや
むしれ痕のない高精度の面に仕上げていた。研磨液33
には一般に水などから選ばれる液が使用されている。
2. Description of the Related Art Conventionally, this type of polishing tape is shown in FIG.
As shown in (B), the particles 6 are attached to the surface of the
It is fixed and formed. In order to polish the end face of the workpiece using the polishing tape 31 thus formed, as shown in FIG. 5A, the polishing tape 31 is rotated while rotating the workpiece 2 around a vertical axis. The polishing tape 31 is vertically pressed to the polishing table 3 and wound up by a take-up roll 35 while sending the polishing tape 31 from a supply roll 34, during which the polishing liquid 33 is dropped just before the workpiece 2 on the surface of the polishing tape 31. Supply, promote the discharge of polishing debris and cooling of the polishing processing point,
Polishing is performed while suppressing clogging of the polishing tape 31 and generation of polishing heat, and the polished end face 12 is finished to a high-precision surface free of scratches and scratches. Polishing liquid 33
In general, a liquid selected from water and the like is used.

【0003】[0003]

【発明が解決しようとする課題】上述したように、従来
の研磨テープを用いて研磨加工を行うには、研磨装置に
付随した研磨液の供給装置や研磨液の貯蔵タンクを備え
なければならず、したがって研磨装置全体を小形化でき
ないという欠点があり、また、研磨装置を傾けると研磨
液が液だれを生じるため、装置を容易に持ち運ぶことが
できず、さらに、研磨加工を行う際には装置を水平に設
置しなければならないという欠点がある。
As described above, in order to carry out polishing using a conventional polishing tape, it is necessary to provide a polishing liquid supply device and a polishing liquid storage tank associated with the polishing apparatus. Therefore, there is a disadvantage that the entire polishing apparatus cannot be downsized, and when the polishing apparatus is tilted, the polishing liquid is dripped, so that the apparatus cannot be easily carried. There is a drawback that it must be installed horizontally.

【0004】本発明の目的は、研磨加工においてスクラ
ッチやむしれ痕のない高精度の研磨加工面が得られ、研
磨加工装置全体を小形化して容易に持ち運びができ、か
つ傾けても液だれの生じない研磨装置に適した研磨テー
プを提供することにある。さらにその研磨テープは、研
磨加工を中断したり、長時間未使用の状態で保管して
も、常に安定した研磨性能が得られるものとする。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a highly polished surface free of scratches and scratches during polishing, to make the entire polishing apparatus compact, to be easily carried, and to cause dripping even when inclined. It is an object of the present invention to provide a polishing tape suitable for a polishing apparatus. Further, it is assumed that the polishing tape can always obtain stable polishing performance even if the polishing process is interrupted or stored for a long time in an unused state.

【0005】[0005]

【課題を解決するための手段】本発明の第1の発明の研
磨テープは、樹脂などから選ばれた結合剤によって、表
面に固定されたと粒を有する薄い帯状の基材を、円筒状
に巻き付けた研磨テープにおいて、と粒が固定された基
材の表面が、微細な滴状または薄い層状の研磨液を有
し、かつ基材の裏面に密着するように円筒状に巻き付け
られている。
A polishing tape according to a first aspect of the present invention is obtained by winding a thin strip-shaped base material having particles fixed on the surface thereof in a cylindrical shape with a binder selected from a resin or the like. In such a polishing tape, the surface of the substrate to which the grains are fixed has fine droplet-like or thin layer-like polishing liquid, and is wound in a cylindrical shape so as to be in close contact with the back surface of the substrate.

【0006】研磨液はあらかじめ基材の表面に研磨に必
要な最低量が塗布され、しかも液だれは生じない。研磨
テープ未使用のとき、基材の表面の研磨液と基材の裏面
とが密着して巻き付けられているため、基材の表面にあ
る研磨液は殆ど蒸発しない。このため研磨加工時、研磨
液を新たに供給する必要はなく、したがって研磨装置全
体を小形化でき、かつ容易に運搬することが可能とな
る。
[0006] The minimum amount of polishing liquid required for polishing is applied to the surface of the base material without dripping. When the polishing tape is not used, the polishing liquid on the surface of the substrate hardly evaporates because the polishing liquid on the surface of the substrate and the back surface of the substrate are closely wound. Therefore, it is not necessary to newly supply a polishing liquid during the polishing process, so that the entire polishing apparatus can be reduced in size and can be easily transported.

【0007】本発明の第2の発明の研磨テープは、樹脂
などから選ばれた結合剤によって、表面に固定されたと
粒を有する薄い帯状の基材を、円筒状に巻き付けた研磨
テープにおいて、と粒が固定された基材の表面が、微細
な滴状または薄い層状の研磨液と、研磨液の上面に密着
したフィルムとを有し、かつフィルムの上面が基材の裏
面と当接するように、円筒状に巻き付けられている。
A polishing tape according to a second aspect of the present invention is a polishing tape obtained by winding a thin strip-shaped base material having grains formed on a surface thereof with a binder selected from a resin or the like in a cylindrical shape. The surface of the substrate on which the grains are fixed has a fine droplet-like or thin layer-like polishing liquid and a film that is in close contact with the upper surface of the polishing liquid, and the upper surface of the film is in contact with the back surface of the substrate. , Wound in a cylindrical shape.

【0008】本発明では第1の発明と同様に、基材の表
面に研磨に必要な最低量の研磨液を塗布する。しかも液
だれは生じない、研磨テープが未使用の状態では、基材
の表面とフィルムとが密着しているため研磨液は殆ど蒸
発しない。研磨加工を行うとき、研磨テープは研磨加工
点の直前でフィルムをはがして使用するため、研磨加工
点に至るまでの間に、蒸発する研磨液の量を最小限に止
めることができる。このため、本発明は第1の発明と同
様、研磨加工時、研磨液を新たに供給する必要がなく、
したがって研磨装置全体を小形化でき、かつ容易に運搬
することが可能となる。
In the present invention, as in the first invention, a minimum amount of polishing liquid required for polishing is applied to the surface of the substrate. In addition, in a state where no dripping occurs and the polishing tape is not used, the polishing liquid hardly evaporates because the surface of the base material is in close contact with the film. When performing the polishing process, since the polishing tape is used by peeling the film immediately before the polishing point, the amount of the polishing liquid that evaporates can be minimized before reaching the polishing point. For this reason, the present invention does not require a new supply of a polishing liquid during polishing, as in the first invention.
Therefore, the entire polishing apparatus can be reduced in size and can be easily transported.

【0009】本発明の第3の発明は、第1および第2の
発明の研磨テープにおいて、円筒状に巻かれた軸方向の
両側端に円盤状のプレートを設け、プレートを基材の両
側端部分に密着させるものである。
According to a third aspect of the present invention, in the polishing tapes of the first and second aspects, disk-shaped plates are provided at both ends in the axial direction wound in a cylindrical shape, and the plates are attached to both ends of the base material. It is to adhere to the part.

【0010】本発明では、基材の表面にあらかじめ塗布
した研磨液が、基材の表面側と裏面側だけでなく、円筒
状のテープの軸方向の両端部でも密封されている。した
がって、研磨テープを長期間未使用の状態で保存して
も、研磨液は乾燥せずに、常に安定した研磨性能が得ら
れる。
In the present invention, the polishing liquid previously applied to the surface of the substrate is sealed not only on the front and back sides of the substrate, but also on both ends in the axial direction of the cylindrical tape. Therefore, even if the polishing tape is stored in an unused state for a long period of time, the polishing liquid is not dried and stable polishing performance is always obtained.

【0011】本発明の第4の発明は、第1、第2および
第3の発明の研磨テープにおいて、基材の表面の両側端
近傍にあらかじめ接着剤を塗布して設け、テープを円筒
状に巻き付けたとき接着剤でテープの両側端部分を密封
するものである。
According to a fourth aspect of the present invention, there is provided the polishing tape according to the first, second and third aspects, wherein an adhesive is applied in advance near both side edges of the surface of the base material, and the tape is formed into a cylindrical shape. When the tape is wound, the both ends of the tape are sealed with an adhesive.

【0012】本発明の研磨テープは、研磨加工を行うた
めに供給ロールから引き出すとき、基材の両側端近傍に
設けた接着剤がはがれる。第3の発明と同様、研磨テー
プが未使用の状態では、基材の表面にあらかじめ設けた
研磨液が基材の表面側と裏面側だけでなく、円筒状のテ
ープの軸方向の両側端部でも密封されている。したがっ
て研磨テープを長期間未使用の状態で保存しても研磨液
は乾燥せず、常に安定した研磨性能が得られる。
When the polishing tape of the present invention is pulled out from the supply roll for polishing, the adhesive provided near both side edges of the substrate is peeled off. Similarly to the third invention, when the polishing tape is not used, the polishing liquid previously provided on the surface of the base material is not only applied to the front side and the back side of the base material, but also to both ends in the axial direction of the cylindrical tape. But it is sealed. Therefore, even if the polishing tape is stored in an unused state for a long time, the polishing liquid does not dry, and stable polishing performance is always obtained.

【0013】[0013]

【発明の実施の形態】次に本発明の実施の形態について
図面を参照して説明する。図1は本発明による第1の発
明の研磨テープを使用する研磨装置と、研磨テープの構
成を示す略図であって、図1(A)は研磨装置の側面
図、図1(B)は円筒状に巻いた研磨テープの部分拡大
断面図である。
Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a schematic view showing a polishing apparatus using the polishing tape of the first invention according to the present invention, and a configuration of the polishing tape. FIG. 1 (A) is a side view of the polishing apparatus, and FIG. FIG. 2 is a partially enlarged cross-sectional view of a polishing tape wound in a shape.

【0014】研磨テープ1は、薄い帯状で柔軟性があり
かつ研磨液や空気が浸透しにくい基材7の表面に、ダイ
ヤモンドなどのと粒6が樹脂などの結合剤8によって固
定され、さらにその表面に微細な滴状または薄い層状の
研磨液13を塗布して形成され、研磨液13が蒸発する
前に円筒状に巻き付けられて供給ロール4を形成する。
研磨テープ1は、供給ロール4から引き出される前や、
供給ロール4に装着する前の円筒状の未使用の状態にお
いては、基材7の表面が裏面に密着している。
The polishing tape 1 has a thin belt-like shape and flexibility and is hardly permeable to a polishing liquid or air. The polishing liquid 13 is formed by applying a fine droplet or thin layer of the polishing liquid 13 on the surface, and is wound into a cylindrical shape before the polishing liquid 13 evaporates to form the supply roll 4.
Before the polishing tape 1 is pulled out from the supply roll 4,
In a cylindrical unused state before being attached to the supply roll 4, the surface of the base material 7 is in close contact with the back surface.

【0015】したがってこの状態においては、基材7が
研磨液13の浸透や空気の通過を遮断しているため、基
材7の表面に塗布された研磨液13は殆ど蒸発すること
がない。塗布した研磨液13の量は、研磨加工を行い得
る程度に微量であるため研磨装置を傾けても液だれの問
題は生じない。
Therefore, in this state, since the base material 7 blocks penetration of the polishing liquid 13 and passage of air, the polishing liquid 13 applied to the surface of the base material 7 hardly evaporates. Since the amount of the applied polishing liquid 13 is so small that polishing can be performed, even if the polishing apparatus is tilted, the problem of dripping does not occur.

【0016】このように形成した研磨テープ1を用いた
研磨加工装置の側面の略図を図1(A)に示す。供給ロ
ール4は、研磨テープ1を巻取り装着した供給用ロール
である。研磨テープ1は、巻取りロール5を回転するこ
とによって供給ロール4から引き出され、研磨台3と加
工物2の間を送られる。加工物2には所定の垂直方向の
荷重と軸の周りの回転が与えられ、端面12の研磨加工
が行われる。研磨加工に必要な研磨液は、研磨テープ1
の表面にあらかじめ塗布されている研磨液13によって
必要な最低量が与えられ、研磨屑の排出と研磨熱の冷却
が行われる。
FIG. 1A is a schematic side view of a polishing apparatus using the polishing tape 1 thus formed. The supply roll 4 is a supply roll on which the polishing tape 1 is wound and mounted. The polishing tape 1 is pulled out from the supply roll 4 by rotating the take-up roll 5, and is sent between the polishing table 3 and the workpiece 2. A predetermined vertical load and rotation about an axis are applied to the workpiece 2, and the end face 12 is polished. The polishing liquid required for polishing is a polishing tape 1
The required minimum amount is given by the polishing liquid 13 applied in advance to the surface of the substrate, and the discharge of polishing debris and the cooling of polishing heat are performed.

【0017】図2は本発明の第2の発明による研磨テー
プを使用する研磨装置と、研磨テープの構成を示す略図
であって、図2(A)は研磨装置の側面図、図2(B)
は研磨テープの部分拡大断面図である。
FIG. 2 is a schematic view showing a polishing apparatus using a polishing tape according to the second invention of the present invention, and a configuration of the polishing tape. FIG. 2A is a side view of the polishing apparatus, and FIG. )
FIG. 3 is a partially enlarged sectional view of a polishing tape.

【0018】研磨テープ1aは、上述の第1の発明によ
る研磨テープ1に施された研磨液13の上面に、さらに
フィルム9を密着して設けて研磨液13の蒸発を防止し
たものであって、円筒状に巻き付けられて供給ロール4
を形成している。
The polishing tape 1a is one in which a film 9 is further provided in close contact with the upper surface of the polishing liquid 13 applied to the polishing tape 1 according to the first invention to prevent the polishing liquid 13 from evaporating. Supply roll 4 wound in a cylindrical shape
Is formed.

【0019】研磨テープ1aは、フィルム9を引きはが
す前や供給ロール4に装着する前の円筒状の未使用の状
態では、基材7の表面とフィルム9とを密着させている
ため、研磨液13の浸透や空気の通過が遮断できるの
で、基材7の表面の研磨液13は蒸発することはない。
When the polishing tape 1a is in a cylindrical unused state before the film 9 is peeled off or mounted on the supply roll 4, the polishing tape 1a keeps the surface of the substrate 7 and the film 9 in close contact with each other. Since the penetration of 13 and the passage of air can be blocked, the polishing liquid 13 on the surface of the base material 7 does not evaporate.

【0020】研磨テープ1aは、フィルム9が研磨加工
点の直前でガイドローラ15を用いて基材7から引きは
がされた後、研磨台3と加工物2の間を送られて研磨加
工に用いられる。引きはがされたフィルム9はフィルム
巻取りロール11によって回収される。
The polishing tape 1a is transported between the polishing table 3 and the workpiece 2 after the film 9 is peeled off from the substrate 7 using the guide roller 15 immediately before the polishing point, and is subjected to polishing. Used. The peeled film 9 is collected by a film take-up roll 11.

【0021】本第2の発明が第1の発明と異なる点は、
研磨加工直前でフィルム9を引きはがし、基材7の表面
を露出させる点にある。このため、基材7の表面が外気
に触れてから、研磨加工点に至るまでの距離が短い。こ
の間に蒸発する研磨液13の量は、第1の発明と比較し
て最小限に止めることができた。
The difference between the second invention and the first invention is that
The point is that the film 9 is peeled off immediately before the polishing process to expose the surface of the substrate 7. For this reason, the distance from the surface of the base member 7 to the outside air to the polishing point is short. During this time, the amount of the polishing liquid 13 evaporating could be minimized as compared with the first invention.

【0022】本実施例では、研磨液13の塗布量を第1
の発明の実施例の1/2に低減しても、研磨テープ1a
の目詰まりや研磨熱の発生を防止でき、加工物2の端面
12を高精度な面に研磨加工できた。研磨液13を新た
に供給する必要はなく、研磨液13の液だれの問題も生
じなかった。
In this embodiment, the amount of the polishing liquid 13
Even if the polishing tape 1a is reduced to a half of the
Clogging and generation of polishing heat can be prevented, and the end surface 12 of the workpiece 2 can be polished to a highly accurate surface. There was no need to newly supply the polishing liquid 13, and there was no problem of dripping of the polishing liquid 13.

【0023】さらに、加工物2を交換したり研磨加工を
一時中断すると、第1の発明の研磨テープ1では、供給
ロール4から研磨加工点までの間で、表面にあらかじめ
塗布した研磨液13の蒸発が進む。これに対して、本発
明ではフィルム9の効果により、研磨液13が蒸発する
部分は僅かであり、研磨加工を再開したとき、研磨液1
3が蒸発して使用できなくなった研磨テープ1aの部分
を余分に送る無駄が低減できた。
Further, when the workpiece 2 is replaced or the polishing is temporarily interrupted, the polishing tape 1 of the first aspect of the present invention uses the polishing liquid 13 previously applied to the surface between the supply roll 4 and the polishing point. Evaporation proceeds. On the other hand, in the present invention, the polishing liquid 13 evaporates only slightly due to the effect of the film 9, and the polishing liquid 1
As a result, it is possible to reduce the waste of sending the portion of the polishing tape 1a which has become unusable due to evaporation of the tape 3.

【0024】図2における供給ロール4、巻取ロール5
の回転方向が、図1に示す場合と反対になっているが,
二つのロールを図1と同様の配置として図1と同じ回転
方向とすることもできる。
The supply roll 4 and the take-up roll 5 in FIG.
Rotation direction is opposite to that shown in FIG. 1,
The two rolls can be arranged in the same manner as in FIG. 1 and have the same rotational direction as in FIG.

【0025】図3は本発明の第3の発明の実施の形態を
説明する略図であって、図3(A)は供給ロールの斜視
図、図3(B)は図3(A)の供給ロールの軸方向部分
拡大断面図である。
FIG. 3 is a schematic view illustrating a third embodiment of the present invention. FIG. 3 (A) is a perspective view of a supply roll, and FIG. 3 (B) is a supply roll of FIG. 3 (A). It is an axial direction partial enlarged sectional view of a roll.

【0026】本第3の発明の特徴は、円筒状に巻き付け
た研磨テープ1または1aの両側端部に、テープの軸方
向の両側端に設けた円盤状のプレート10を密着させた
点にある。図3に示した研磨テープ1は、研磨液13を
基材7の表面に薄層状に塗布し、研磨液13が蒸発する
前に基材7を円筒状に巻き付けた後、プレート10を円
筒状のテープの両端部に密着して固定した。
A feature of the third aspect of the present invention is that disc-shaped plates 10 provided on both ends in the axial direction of the tape are brought into close contact with both ends of the polishing tape 1 or 1a wound in a cylindrical shape. . The polishing tape 1 shown in FIG. 3 is such that the polishing liquid 13 is applied to the surface of the base material 7 in a thin layer, and the base material 7 is wound into a cylindrical shape before the polishing liquid 13 evaporates. And fixed firmly to both ends of the tape.

【0027】本第3の発明では、第1および第2の発明
と同様、供給ロール4aから研磨テープ1を引き出し
て、研磨台3と加工物2の間に向かって送り研磨加工を
行った。研磨テープ1の目詰まりや研磨熱の発生を防止
でき、加工物2の端面12を高精度な面に研磨加工でき
た。研磨液13を新たに供給する必要はなく、研磨液1
3の液だれの問題も生じなかった。
In the third aspect of the invention, as in the first and second aspects, the polishing tape 1 is pulled out from the supply roll 4a and fed between the polishing table 3 and the workpiece 2 for polishing. Clogging of the polishing tape 1 and generation of polishing heat were prevented, and the end surface 12 of the workpiece 2 was polished to a highly accurate surface. It is not necessary to newly supply the polishing liquid 13 and the polishing liquid 1
No problem of dripping of No. 3 occurred.

【0028】図3においては、研磨テープを上述の第1
の発明において述べた研磨テープ1について示してある
が、第2の発明による研磨テープ1aと置き換えること
もできる。
In FIG. 3, the polishing tape is connected to the first
Although the polishing tape 1 described in the second invention is shown, it can be replaced with the polishing tape 1a according to the second invention.

【0029】第1および第2の発明の研磨テープ1,1
aは、円筒状に巻き付けた未使用の状態において、基材
7の表面側と裏面側は密着しているが、供給ロール4の
軸方向の両側端部は密封していない。このため、研磨テ
ープ1,1aを6ケ月以上の長期間、未使用の状態で保
存した場合、研磨液13が両端部から僅かずつ蒸発し、
研磨性能が低下した。これに対して、本第3の発明では
円盤状のプレート10をロールの軸方向の両側端部に設
けてあるので、基材7の表面側と裏面側だけでなく、両
側端部でも密封でき、したがって研磨テープ1,1aを
6ケ月以上保存しても、研磨液13は蒸発せずに、常に
安定した研磨性能が得られた。
The polishing tapes 1, 1 of the first and second inventions
In the case of “a”, the front side and the back side of the substrate 7 are in close contact with each other in an unused state wound in a cylindrical shape, but the both ends in the axial direction of the supply roll 4 are not sealed. For this reason, when the polishing tapes 1 and 1a are stored in an unused state for a long period of 6 months or more, the polishing liquid 13 evaporates little by little from both ends,
Polishing performance decreased. On the other hand, in the third aspect of the present invention, since the disk-shaped plate 10 is provided at both ends in the axial direction of the roll, not only the front and back sides of the base material 7 but also the both ends can be sealed. Therefore, even if the polishing tapes 1 and 1a were stored for 6 months or more, the polishing liquid 13 did not evaporate, and stable polishing performance was always obtained.

【0030】図4は本発明の第4の実施の形態を説明す
る略図であって、図4(A)は供給ロールの斜視図、図
4(B)は図4(A)の供給ロールの軸方向部分拡大断
面図である。
FIG. 4 is a schematic view for explaining a fourth embodiment of the present invention. FIG. 4 (A) is a perspective view of a supply roll, and FIG. 4 (B) is a view of the supply roll of FIG. 4 (A). It is an axial direction partial enlarged sectional view.

【0031】図4に示す研磨テープ1bは、と粒6が固
定された基材7の表面の両側端部に接着剤14を塗布
し、研磨液13を基材7の表面に塗布して形成される。
接着剤14と研磨液13とが乾燥、蒸発しないうちに、
研磨テープ1bは円筒状に巻かれて供給ロール4bを形
成する。
The polishing tape 1b shown in FIG. 4 is formed by applying an adhesive 14 to both ends of the surface of the substrate 7 to which the grains 6 are fixed, and applying a polishing liquid 13 to the surface of the substrate 7. Is done.
Before the adhesive 14 and the polishing liquid 13 are dried and evaporated,
The polishing tape 1b is wound into a cylindrical shape to form a supply roll 4b.

【0032】本発明においても、供給ロール4bから研
磨テープ1bを引き出して、第1および第2の発明と同
様に研磨台3と加工物2の間に研磨テープ1bを送り、
研磨加工を行った。研磨テープ1bの目詰まりや研磨熱
の発生を防止でき、加工物2の端面12を高精度な面に
研磨加工できた。研磨液13を新たに供給する必要はな
く、研磨液13の液だれの問題も生じなかった。
Also in the present invention, the polishing tape 1b is pulled out from the supply roll 4b, and the polishing tape 1b is sent between the polishing table 3 and the workpiece 2 as in the first and second inventions.
Polishing was performed. Clogging of the polishing tape 1b and generation of polishing heat were prevented, and the end surface 12 of the workpiece 2 was polished to a highly accurate surface. There was no need to newly supply the polishing liquid 13, and there was no problem of dripping of the polishing liquid 13.

【0033】本発明の研磨テープ1bは、研磨加工を行
うために供給ロール4bから引き出されるとき、基材7
の両端部に設けた接着剤14がはがれ、基材7の表面が
露出する。第3の発明と同様、未使用の状態では基材7
の表面側と裏面側だけでなく、両側端部分でも密封でき
るため、研磨テープ1bを6ケ月以上保存しても、研磨
液13は蒸発せずに、常に安定した研磨性能が得られ
た。
When the polishing tape 1b of the present invention is pulled out from the supply roll 4b for polishing, the base material 7
The adhesive 14 provided at both ends of the substrate 7 is peeled off, and the surface of the substrate 7 is exposed. As in the third invention, the base material 7 when not in use is used.
The polishing liquid 13 can be sealed not only on the front side and the back side but also on both sides, so that even when the polishing tape 1b is stored for 6 months or more, the polishing liquid 13 did not evaporate and stable polishing performance was always obtained.

【0034】[0034]

【実施例】次に、第1の発明の実施例を、図1を用いて
具体的に詳細に説明する。本実施例では研磨台3の材質
をテフロンとし、研磨テープ1の巻取り長さ150m、
幅25mm、基材7はポリエステル製で厚み25μmと
し、1.5μm径のダイヤモンドと粒6を付着させたも
のを用いた。研磨液13には純水を用い、層厚が約10
μmになるまでミスト状の純水を噴霧して塗布した後、
供給ロール4に巻き付けた。
Next, an embodiment of the first invention will be described in detail with reference to FIG. In this embodiment, the material of the polishing table 3 is Teflon, and the winding length of the polishing tape 1 is 150 m.
The base material 7 was made of polyester and had a thickness of 25 μm, a width of 25 mm, and a 1.5 μm diameter diamond and particles 6 attached thereto. Pure water is used for the polishing liquid 13 and the layer thickness is about 10
After spraying and applying mist-like pure water until μm,
It was wound around the supply roll 4.

【0035】加工物2には、125μm径の光ファイバ
を挿入した2.5mm径のガラス製フェルール光コネク
タを用いた。加工物2に150gfの垂直方向荷重を与
え、200rpmで回転させて、2.5分間の研磨加工
を行った。研磨テープ1は100mm/minの速度で
送り、500個の加工物2を加工する毎に研磨テープ1
を交換した。
As the workpiece 2, a glass ferrule optical connector having a diameter of 2.5 mm into which an optical fiber having a diameter of 125 μm was inserted was used. The workpiece 2 was subjected to a vertical load of 150 gf, rotated at 200 rpm, and polished for 2.5 minutes. The polishing tape 1 is fed at a speed of 100 mm / min.
Was replaced.

【0036】本実施例では、研磨液13を新たに供給し
なくても、加工物2の端面12は、従来技術と同等の表
面粗さ0.03μmRmax以下の歪みのない滑らかな
鏡面に研磨加工できた。
In this embodiment, even if the polishing liquid 13 is not newly supplied, the end face 12 of the workpiece 2 is polished to a smooth mirror surface having a surface roughness of 0.03 μm Rmax or less and a distortion equal to or less than that of the prior art. did it.

【0037】第2の発明の実施例では、図2に示すよう
に、研磨台3や研磨テープ1aの巻長さと幅、基材7の
厚みやと粒6は、第1の発明の実施例と同一条件のもの
を使用した。フィルム9はポリエステル製で、厚み25
μm、幅25mmのものを用い、研磨加工点の手前8m
mの地点で、直径3mmの円筒形のガイドローラ15を
用いて基材7から引きはがした。
In the embodiment of the second invention, as shown in FIG. 2, the winding length and width of the polishing table 3 and the polishing tape 1a, the thickness and the grain 6 of the base material 7 are different from those of the first embodiment of the invention. The same conditions were used. Film 9 is made of polyester and has a thickness of 25
8m, width of 25mm, 8m before polishing point
At point m, the substrate was peeled off from the substrate 7 using a cylindrical guide roller 15 having a diameter of 3 mm.

【0038】本実施例では、研磨加工中の研磨液13の
蒸発量を上述の第1の発明の場合より低減できるため、
研磨液13として用いた純水は、層厚が約5μmになる
までミスト状で噴霧して塗布し、研磨液13が乾燥する
前にフィルム9で覆って研磨テープ1aを製作し、供給
ロール4に巻取った。加工物2には、第1の発明と同
様、125μm径の光ファイバを挿入した2.5mm径
のガラス製フェルールからなる光コネクタを用い、荷重
は150gf、回転数は200rpm、研磨テープ1a
の送り速度を100mm/minとして2.5分間の研
磨加工を行った。
In this embodiment, since the evaporation amount of the polishing liquid 13 during the polishing process can be reduced as compared with the case of the first invention,
Pure water used as the polishing liquid 13 is sprayed and applied in the form of a mist until the layer thickness becomes about 5 μm, and before the polishing liquid 13 is dried, it is covered with a film 9 to produce a polishing tape 1a. Wound up. As in the case of the first invention, an optical connector made of a glass ferrule having a diameter of 2.5 mm into which an optical fiber having a diameter of 125 μm was inserted was used as the workpiece 2, the load was 150 gf, the rotation speed was 200 rpm, and the polishing tape 1a was used.
The polishing process was performed for 2.5 minutes at a feed speed of 100 mm / min.

【0039】本実施例においても、研磨液13を新たに
供給することなく、加工物2の端面12を従来技術と同
等の表面粗さ0.03μmRmax以下の歪みのない滑
らかな鏡面に研磨加工できた。また、フィルム9の効果
によって、加工中断などで研磨液13が蒸発した研磨テ
ープ1aを余分に送る無駄を省くことができたため、巻
長さが150mの研磨テープ1aで550個の加工物2
を加工することができた。
Also in this embodiment, the end face 12 of the workpiece 2 can be polished to a smooth mirror surface having a surface roughness of 0.03 μm Rmax or less and a distortion of equal to or less than that of the prior art without newly supplying the polishing liquid 13. Was. In addition, the effect of the film 9 can eliminate wasteful feeding of the polishing tape 1a in which the polishing liquid 13 evaporates due to processing interruption or the like. Therefore, 550 workpieces 2 are formed by the polishing tape 1a having a winding length of 150 m.
Could be processed.

【0040】次に、第3の発明の実施例を、図1および
図3を用いて説明する。本実施例では、研磨台3や研磨
テープ1の巻長さと幅、基材7の厚みやと粒6は、第1
の発明の実施例と同一の条件のものを使用し、研磨液1
3の層厚が約10μmになるまでミスト状の純水を噴霧
して研磨テープ1を製作した。
Next, an embodiment of the third invention will be described with reference to FIGS. In the present embodiment, the winding length and width of the polishing table 3 and the polishing tape 1, the thickness and the grain 6 of the substrate 7,
Polishing liquid 1 was used under the same conditions as in the embodiment of the invention.
Mist-like pure water was sprayed until the layer thickness of No. 3 became about 10 μm to produce the polishing tape 1.

【0041】研磨液13が乾燥する前に研磨テープ1を
供給ロールに巻付け、ポリエステル製で厚み0.2mm
のプレート10を、供給ロールの両端部に固定して密着
し供給ロール4aを形成した。プレート10の密封効果
により、研磨テープ1を製作してから6ケ月以上保存し
ても、研磨液13は乾燥しなかった。研磨液13を新た
に供給することなく、加工物2の端面12を、従来技術
と同等の表面粗さ0.03μmRmax以下の歪みのな
い滑らかな鏡面に研磨加工できた。
Before the polishing liquid 13 dries, the polishing tape 1 is wound around a supply roll, and is made of polyester and has a thickness of 0.2 mm.
The plate 10 was fixed to both ends of the supply roll and adhered tightly to form the supply roll 4a. Due to the sealing effect of the plate 10, the polishing liquid 13 did not dry even when stored for 6 months or more after the production of the polishing tape 1. The end face 12 of the workpiece 2 could be polished to a smooth mirror surface having a surface roughness of 0.03 μmRmax or less and a distortion equal to or less than that of the conventional technique without newly supplying the polishing liquid 13.

【0042】次に第4の発明の実施例を、図1と図4を
用いて説明する。本実施例では、研磨台3や研磨テープ
1bの巻長さと幅、基材7の厚みやと粒6は、第1の発
明の実施例と同一条件のものを使用した。まず、基材7
の表面の両側端に幅15μm、厚さ20μmで帯状に接
着剤14を塗布した後、純水の研磨液13を層厚が約1
0μmになるまでミスト状で噴霧により塗布した。研磨
液13と接着剤14が蒸発、乾燥する前に、基材7を円
筒状に巻き付けて研磨テープ1bの供給ロール4bを製
作した。
Next, an embodiment of the fourth invention will be described with reference to FIGS. In the present embodiment, the winding length and width of the polishing table 3 and the polishing tape 1b, the thickness and the grain 6 of the substrate 7, and the same conditions as those in the embodiment of the first invention were used. First, the base material 7
After applying an adhesive 14 in a band shape with a width of 15 μm and a thickness of 20 μm on both side edges of the surface of
It was applied by spraying in a mist until it became 0 μm. Before the polishing liquid 13 and the adhesive 14 were evaporated and dried, the substrate 7 was wound into a cylindrical shape to produce a supply roll 4b of the polishing tape 1b.

【0043】本実施例においても、研磨液13を新たに
供給することなく、加工物2の端面12を従来の技術と
同等の表面粗さ0.03μmRmax以下の歪みのない
滑らかな鏡面に研磨加工できた。また、接着剤14によ
って基材7の両端部が密封されたため、研磨テープ1b
を製作した後、6ケ月以上保存しても研磨液13は乾燥
せず、製作直後と同等の鏡面に研磨加工することができ
た。
Also in this embodiment, the end face 12 of the workpiece 2 is polished to a smooth mirror surface having a surface roughness of 0.03 μm Rmax or less and a distortion of equal to or less than that of the conventional technique without newly supplying the polishing liquid 13. did it. Further, since both ends of the base material 7 are sealed by the adhesive 14, the polishing tape 1b
After the production, the polishing liquid 13 was not dried even when stored for 6 months or more, and the polishing surface could be polished to the same mirror surface as immediately after the production.

【0044】上述の実施例においては、基材7はポリエ
ステル製で厚み25μm、幅25mmとし、と粒6とし
て1.5μm径ダイヤモンドを使用した研磨テープ1,
1a、1bを用いたが、と粒6をAl23 やSiCと
し粒径が本実施例と異なるものを用いても同様の効果が
得られる。
In the above embodiment, the base material 7 is made of polyester and has a thickness of 25 μm and a width of 25 mm.
Although 1a and 1b were used, the same effect can be obtained by using Al 2 O 3 or SiC as the particle 6 and using a particle having a particle diameter different from that of the present embodiment.

【0045】また、基材が丸形や角形のシート状であっ
ても、基材の表面にあらかじめ研磨液を塗布することに
よって同様の効果がある研磨シートが得られる。
Even if the base material is a round or square sheet, a polishing sheet having the same effect can be obtained by applying a polishing liquid on the surface of the base material in advance.

【0046】本実施例では研磨液として純水を用いた
が、水道水や溶剤を用いても同様の効果が得られる。
Although pure water was used as the polishing liquid in this embodiment, the same effect can be obtained by using tap water or a solvent.

【0047】[0047]

【発明の効果】以上説明したように本発明の研磨テープ
は、と粒が固定された基材の表面に微細な滴状または薄
い層状の研磨液を施したため、研磨加工時に別の研磨液
を与える必要はなく、しかも研磨屑の排出と研磨加工点
の冷却が行われるので、スクラッチやむしれ痕のない加
工面が得られるとともに、研磨加工装置全体を小形化し
て容易に持ち運びができ、かつ研磨装置を傾けても液だ
れを生じないという効果がある。
As described above, in the polishing tape of the present invention, a fine drop-like or thin layer-like polishing liquid is applied to the surface of the substrate on which the particles are fixed, so that another polishing liquid is applied during polishing. There is no need to apply it, and since the removal of polishing debris and the cooling of the polishing processing point are performed, a processed surface free of scratches and scratches can be obtained, and the entire polishing processing device can be miniaturized and can be easily carried, and polishing can be performed. There is an effect that no dripping occurs even if the device is tilted.

【0048】研磨テープはロール状に巻取ってあるか
ら、研磨液の上下面は基材と密着するので研磨液の蒸発
を防止できる。また研磨液の表面をフィルムで覆った後
ロールに巻き取り、フィルムを研磨加工点の直前で除去
すれば、さらに研磨液の蒸発防止に効果がある。
Since the polishing tape is wound into a roll, the upper and lower surfaces of the polishing liquid are in close contact with the substrate, so that evaporation of the polishing liquid can be prevented. If the surface of the polishing liquid is covered with a film and then wound around a roll and the film is removed immediately before the polishing point, the polishing liquid is more effectively prevented from evaporating.

【0049】また、ロールの両側端部に円盤状プレート
を密着させるか、または基材の表面の両側端部に接着剤
を施して巻取れば、研磨テープ上の研磨液の両側端部も
密封されるから、長期間保管しても研磨液が蒸発せず常
に安定した研磨性能が得られるという効果を奏する。
If a disc-shaped plate is brought into close contact with both ends of the roll, or an adhesive is applied to both ends of the surface of the base material and wound up, both ends of the polishing liquid on the polishing tape are also sealed. Therefore, there is an effect that the polishing liquid does not evaporate even when stored for a long period of time and stable polishing performance can always be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の発明の研磨テープの実施の態様
を示す図であって、図1(A)は研磨装置の側面の略
図、図1(B)はロール状の研磨テープの部分拡大断面
略図である。
FIG. 1 is a view showing an embodiment of a polishing tape according to the first invention of the present invention, wherein FIG. 1 (A) is a schematic diagram of a side surface of a polishing apparatus, and FIG. It is a partial enlarged sectional schematic diagram.

【図2】本発明の第2の発明の研磨テープの実施の態様
を示す図であって、図2(A)は研磨装置の側面の略
図、図2(B)はロール状の研磨テープの部分拡大断面
略図である。
FIG. 2 is a view showing an embodiment of a polishing tape according to the second invention of the present invention, wherein FIG. 2 (A) is a schematic diagram of a side surface of a polishing apparatus, and FIG. It is a partial enlarged sectional schematic diagram.

【図3】本発明の第3の発明の研磨テープの実施の態様
を示す図であって、図3(A)は供給ロールの斜視図、
図3(B)は図3(A)の軸方向部分拡大断面図であ
る。
FIG. 3 is a view showing an embodiment of the polishing tape of the third invention of the present invention, and FIG. 3 (A) is a perspective view of a supply roll,
FIG. 3B is an enlarged partial sectional view in the axial direction of FIG.

【図4】本発明の第4の発明の研磨テープの実施の態様
を示す図であって、図4(A)は供給ロールの斜視図、
図4(B)は図4(A)の軸方向部分拡大断面図であ
る。
FIG. 4 is a view showing an embodiment of the polishing tape of the fourth invention of the present invention, wherein FIG. 4 (A) is a perspective view of a supply roll,
FIG. 4B is an enlarged partial sectional view in the axial direction of FIG.

【図5】従来の技術による研磨テープの実施例の略図で
あって、図5(A)は研磨装置の側面図、図5(B)は
研磨テープの部分拡大断面図である。
5A and 5B are schematic views of an embodiment of a polishing tape according to the prior art, wherein FIG. 5A is a side view of a polishing apparatus, and FIG. 5B is a partially enlarged cross-sectional view of the polishing tape.

【符号の説明】[Explanation of symbols]

1,1a,1b,31 研磨テープ 2 加工物 3 研磨台 4,4a,34 供給ロール 5,35 巻取ロール 6 と粒 7 基材 8 結合剤 9 フィルム 10 プレート 11 フィルム巻取ロール 12 端面 13,33 研磨液 14 接着剤 15 ガイドローラ 1, 1a, 1b, 31 Polishing tape 2 Workpiece 3 Polishing table 4, 4a, 34 Supply roll 5, 35 Take-up roll 6 and grains 7 Base material 8 Binder 9 Film 10 Plate 11 Film take-up roll 12 End face 13, 33 Polishing liquid 14 Adhesive 15 Guide roller

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平6−278038(JP,A) 特開 平6−47677(JP,A) 特開 平5−277958(JP,A) 特開 平6−254772(JP,A) 特開 平4−129660(JP,A) 実開 昭53−161390(JP,U) (58)調査した分野(Int.Cl.6,DB名) B24D 11/00 B24B 55/02 B24D 3/28──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-6-278038 (JP, A) JP-A-6-47677 (JP, A) JP-A-5-277958 (JP, A) JP-A-6-27958 254772 (JP, A) JP-A-4-129660 (JP, A) Japanese Utility Model Application Laid-open No. 53-161390 (JP, U) (58) Fields investigated (Int. Cl. 6 , DB name) B24D 11/00 B24B 55 / 02 B24D 3/28

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 樹脂などから選ばれた結合剤によって、
表面に固定されたと粒を有する薄い帯状の基材を、円筒
状に巻き付けた研磨テープにおいて、 前記と粒が固定された前記基材の表面が、あらかじめ
細な滴状または薄い層状の研磨液を有し、かつ該研磨液
が蒸発しないように前記基材の研磨液を有する表面を、
前記基材の裏面に密着させて円筒状に巻き付けたことを
特徴とする研磨テープ。
1. A binder selected from a resin or the like,
In a polishing tape in which a thin band-shaped substrate having particles fixed to the surface thereof is wound in a cylindrical shape, the surface of the substrate to which the particles are fixed is formed into a fine droplet or thin layer in advance. Having a layered polishing liquid, and the polishing liquid
The surface having the polishing liquid of the substrate so that the evaporation does not occur ,
A polishing tape, wherein the polishing tape is wound in a cylindrical shape in close contact with the back surface of the substrate .
【請求項2】 樹脂などから選ばれた結合剤によって、
表面に固定されたと粒を有する薄い帯状の基材を、円筒
状に巻き付けた研磨テープにおいて、 前記と粒が固定された前記基材の表面が、あらかじめ
細な滴状または薄い層状の研磨液と、該研磨液が蒸発し
ないように該研磨液の上面に密着したフィルムとを有
し、かつ該フィルムの上面が前記基材の裏面と当接する
ように、円筒状に巻き付けたことを特徴とする研磨テー
プ。
2. A binder selected from a resin or the like,
In a polishing tape in which a thin band-shaped substrate having particles fixed to the surface thereof is wound in a cylindrical shape, the surface of the substrate to which the particles are fixed is formed into a fine droplet or thin layer in advance. The layered polishing liquid and the polishing liquid evaporate
No way and a film in close contact with the upper surface of the polishing liquid, and so that the upper surface of the film comes into contact with the back surface of the substrate, the polishing tape, wherein the wound cylindrically.
【請求項3】 円筒状に巻かれた前記研磨テープが、該
テープの円筒状の両側面に密着する円盤状プレートを有
する、請求項1または2に記載の研磨テープ。
3. The polishing tape according to claim 1, wherein the polishing tape wound in a cylindrical shape has a disk-shaped plate that is in close contact with both cylindrical side surfaces of the tape.
【請求項4】 前記基材の表面の両側端部にあらかじめ
塗布した接着剤が、円筒状に巻かれた前記研磨テープの
前記基材の裏面に接着して、前記研磨テープを両側端部
において密封する、請求項1ないし3のいずれか1項に
記載の研磨テープ。
4. An adhesive previously applied to both side edges of the surface of the base material is adhered to the back surface of the base material of the polishing tape wound in a cylindrical shape, and the polishing tape is attached to both side edges. The polishing tape according to any one of claims 1 to 3, which is sealed.
JP8075779A 1995-07-21 1996-03-29 Polishing tape Expired - Lifetime JP2853645B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP8075779A JP2853645B2 (en) 1996-03-29 1996-03-29 Polishing tape
US08/684,615 US5727989A (en) 1995-07-21 1996-07-22 Method and apparatus for providing a workpiece with a convex tip
DE19629528A DE19629528A1 (en) 1995-07-21 1996-07-22 Method and device for producing a convex end of a workpiece
US08/789,136 US5738576A (en) 1995-07-21 1997-01-28 Lapping tape with abrasive liquid for forming a convex tip on a workpiece

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8075779A JP2853645B2 (en) 1996-03-29 1996-03-29 Polishing tape

Publications (2)

Publication Number Publication Date
JPH09262774A JPH09262774A (en) 1997-10-07
JP2853645B2 true JP2853645B2 (en) 1999-02-03

Family

ID=13586055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8075779A Expired - Lifetime JP2853645B2 (en) 1995-07-21 1996-03-29 Polishing tape

Country Status (1)

Country Link
JP (1) JP2853645B2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53161390U (en) * 1977-05-26 1978-12-18
JPH06278038A (en) * 1993-03-31 1994-10-04 Tokyo Jiki Insatsu Kk Porous abrasive film

Also Published As

Publication number Publication date
JPH09262774A (en) 1997-10-07

Similar Documents

Publication Publication Date Title
TWI357845B (en) Polishing surfaces
JP2800802B2 (en) Semiconductor wafer CMP equipment
JP2832142B2 (en) Wafer notch polishing machine
US7429210B2 (en) Materials for chemical mechanical polishing
JP2000349056A (en) Conditioning of fixed abrasives
JP2004103825A (en) Device and method for grinding semiconductor wafer edge
JP2000317823A (en) Chemical mechanical polishing using moving abrasive sheet
JP2853645B2 (en) Polishing tape
JPH09277163A (en) Polishing method and polishing device
US20090092023A1 (en) Cleaning tape and method of producing same
JP3326841B2 (en) Polishing equipment
JP2008153248A (en) Wax application method to GaAs wafer
JP3250171B2 (en) Cleaning tape for liquid crystal panel and method of manufacturing the same
JP3821944B2 (en) Wafer single wafer polishing method and apparatus
JPH05228845A (en) Polishing film for texturing magnetic disc board
JP2832149B2 (en) Polishing equipment
JPH02185375A (en) Method and device for manufacturing abrasive tape
JP2004351524A (en) Grinding device, and magnetic recording medium manufacturing method using the same
JP7166729B2 (en) Workpiece processing method
JPH11277445A (en) Grinding wheel for polishing substrate and polishing device
JPH09235145A (en) Chamfering of brittle material plate
KR20240072803A (en) Polishing method for substrate
JP4709881B2 (en) Cleaning material and manufacturing method thereof
JP2003231051A (en) Polishing device and polishing method
JP2002126997A (en) Cmp machining dresser

Legal Events

Date Code Title Description
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20071120

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081120

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081120

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091120

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091120

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101120

Year of fee payment: 12

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111120

Year of fee payment: 13

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111120

Year of fee payment: 13

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121120

Year of fee payment: 14

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121120

Year of fee payment: 14

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131120

Year of fee payment: 15

EXPY Cancellation because of completion of term