JP2826087B2 - Texture device and texture processing method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a texture apparatus and a texture processing method, and more particularly, to the above apparatus and processing method using a laser beam.

[0002]

2. Description of the Related Art In a magnetic disk drive, in order to stably maintain a small air gap between a magnetic disk and a magnetic head, the magnetic head comes into contact with the surface of the magnetic disk when stopped, and stops when driven. A so-called contact start stop (CSS) system in which a head slides on a magnetic disk surface and travels while flying is employed. Texture processing is processing for forming minute projections (streak patterns) on the surface of a magnetic disk substrate, and is performed to obtain good CSS characteristics and the like.

Heretofore, the above-mentioned texturing has been mainly performed by mechanical grinding using a polishing tape coated with abrasive particles dispersed in a binder or a slurry in which the abrasive particles are dispersed. However, in recent years, with the downsizing of the magnetic disk drive, the motor used has also been reduced in size, and the torque during driving tends to decrease. For this reason, the conventional texture method cannot sufficiently reduce the contact area, and the sticking force of the head to the disk surface at the time of stop exceeds the torque of the motor, which causes a sticking phenomenon that hinders startup.

In addition, the flying height of the head tends to decrease in order to improve the recording density, and accordingly, the texture processing applied to the CSS zone is required to have a low and uniform height. However, in texture processing by conventional mechanical grinding, it is difficult to control both the uniformity and the processing height, and it is impossible to follow recent demands.

Therefore, as an alternative method, for example, US Pat. No. 5,062,021 proposes texture processing using a Q-switched YAG laser beam having a short pulse width and a large output. This method is a method of forming crater-shaped projections and depressions composed of a melt-formed hole and an annular rim in which the periphery is raised by surface tension and solidified.

Texture processing using a laser beam is easier to control the absolute height and its uniformity than processing by mechanical polishing, and is considered to be a promising processing method in the future. However, the above-mentioned U.S. Patent does not discuss a processing apparatus that actually considers industrial production.

[0007] Laser beam generators are expensive, laser beam processing requires a long time, and texture processing generally requires processing over a width of several mm to several tens mm with a pitch of about several μm. For this reason, despite the necessity of rotating the magnetic disk substrate several hundred rotations by the end of processing, the above-mentioned U.S. patent specification does not propose a practical apparatus with improved productivity. Moreover, the textured substrate obtained by the proposed method is insufficient for the problem of sticking between the magnetic disk and the magnetic head.

[0008]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a texture device which utilizes a laser beam to improve processing productivity. Another object of the present invention is to provide a texture device and a texture processing method that can simultaneously achieve good CSS characteristics and sticking characteristics and a low flying height of a magnetic head.

[0009]

That is, the first aspect of the present invention is as follows.
The gist of the invention is a texture device used in a process of manufacturing a magnetic disk substrate, a substrate rotating mechanism capable of holding and rotating the substrate, a laser beam oscillator, a modulator for controlling ON / OFF of a laser beam from the oscillator, A texture device comprising: a deflector for deflecting a laser beam from a modulator; and a condensing mechanism for irradiating a deflected laser beam from the deflector to a substrate surface rotatably supported by the substrate rotation mechanism. Exists.

The second aspect of the present invention is to provide a method using the above-described texture device, wherein a minute projection having a shape having a concave portion connected to the convex portion on the surface of the magnetic disk substrate near the convex portion is formed per 1 mm ² . The present invention is directed to a method for texturing a magnetic disk substrate, wherein 10 to 10 ⁸ pieces are formed.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. First, the texture device of the present invention will be described. FIG. 1 is an explanatory diagram of an example of the texture device of the present invention, and FIG. 2 is an explanatory diagram of an example of a projection forming pattern by a deflected laser beam.

The texture device of the present invention is an apparatus for forming fine protrusions on the surface of a magnetic disk substrate. In a preferred embodiment, the fine protrusions are formed at equal intervals in a CSS zone. As a substrate, an Ni-P electroless plating base layer is provided on the surface of a substrate called a substrate, that is, a substrate of an Al alloy, for example, an Al-Mg alloy, and the base layer is mirror-finished (polished). Processed), a glass substrate, a silicon substrate, and the like, but other metal substrates such as copper and titanium, a carbon substrate, a ceramic substrate, and a resin substrate can also be used.

In the following description, the substrate will be simply referred to as a substrate for the sake of convenience. However, not only the above-mentioned substrate but also a state after an underlayer, a magnetic layer, a protective layer, a lubricant layer, etc. are provided on the substrate. In any case, the texture device according to the present invention can be used even in the process, and hereinafter, the substrate means any of the above states.

The texture device of the present invention comprises a substrate rotating mechanism (10), a laser beam oscillator (1), a modulator (2) for controlling ON / OFF of a laser beam from the oscillator,
A deflector (1) for deflecting the laser beam from the modulator
2) a light condensing mechanism (5) for irradiating the surface of the substrate (11) rotatably supported by the substrate rotating mechanism with the deflected laser beam from the deflector;

The example shown in FIG. 1 is a texture device according to a preferred embodiment of the present invention, and includes a plurality of substrate rotating mechanisms (1).
0), (10)... And a plurality of laser beam splitters (4) for splitting the deflected laser beam from the deflector (12);
(4)... And a plurality of condensing mechanisms (5) for irradiating the respective deflected laser beams split by the laser beam splitter to the surfaces of the substrates rotatably supported by the plurality of substrate rotating means. And 5) a moving mechanism (6) for relatively moving the light collecting mechanism and the substrate rotating mechanism. Although three substrate rotation mechanisms (10) are exemplified, the number is arbitrary.

In the above configuration, when the laser beam is deflected by the deflector (12), the beam can be scanned on the substrate (11) without moving the focusing means (5). Further, when the amount of movement of the condensing means (5) per unit time is increased and the laser beam is deflected by the deflector (12), the amount of movement of the condensing mechanism (5) is increased and the deflector is moved within the track pitch. In this case, it is possible to operate sinusoidally, and in this case, the projection density in the radial direction can be increased without increasing the rotation speed of the spindle.

The substrate rotating mechanism (10) is usually constituted by a spindle motor, and the substrates (11) are supported by a rotating shaft of the spindle motor and are moved at a constant rotation speed or linear speed. The number of rotations of the substrate is determined in consideration of productivity, but the number of rotations of the substrate is preferably 900 rpm or more, particularly preferably 1800 rpm or more.
00 rpm or more is most preferable. When the rotation axis of the spindle motor is shaken, the surface shake becomes large, it becomes difficult to focus, and the projection shape varies, and in some cases, a desired projection shape cannot be obtained. Therefore, the shake is preferably less than ± 25 μm. .

As the laser beam oscillator (1), a gas laser is preferable. Among them, a CO ₂ gas laser, an Ar gas laser, and a YAG laser capable of continuous oscillation are preferable, and an Ar gas laser is particularly preferably used. Gas lasers
Compared to a Q-switched YAG laser, an excimer laser, or the like, the phase is uniform and the beam spot can be narrowed easily, so that it is advantageous in that a sharp projection can be formed.

As for the wavelength of the laser, a higher output is usually more easily obtained in the visible region. The Ar gas laser beam typically has a wavelength of 488 nm or 514.5 nm. When directly irradiating the glass substrate, a relatively small output ultraviolet region, for example, 350 nm argon, FHG (fourth harmonic gen) is used.
266 nm YAG laser passed through an EAG.

The laser beam oscillator (1) sends the substrate (1).
It is preferable that the laser beam applied to the surface of 1) is controlled to an energy capable of forming a minute projection having a concave portion connected to the convex portion in the vicinity of the convex shape.

It is preferable that the modulator (2) can perform high-speed modulation. The rise time is 50 ns.
Hereinafter, the pulse width including the rise time and the fall time is preferably 50 ns to 2 μs. When the pulse width is less than 50 ns, no projection is formed or a projection having a desired shape is hardly formed. When the pulse width exceeds 2 μs, the area of the tip of the projection becomes large, and the CSS characteristics tend to deteriorate.

In addition, the modulator has a good ON /
Preferably, it can be turned off. Since the rise time of the modulator affects the sharpness of the protrusion, the use of a modulator with a long rise time results in the formation of a protrusion having a large contact area with the head. As a modulation element used for such a modulator, an electro-optic modulation element (EOM) is preferable. The electro-optic modulation element is capable of high-speed modulation (ON /
OFF) is possible. In addition, analog modulation can be performed at the time of ON.

The modulation frequency is 0.5 to 10 MHz
Is particularly preferable, and 0.5 to 5 MHz is particularly preferable. If the modulation frequency is less than 0.5 MHz, the contact area between the protrusion and the head increases. If the frequency exceeds 10 MHz, adjacent projections interfere with each other, and it is difficult to form independent projections. Also,
Pulse width (irradiation time required to form one protrusion)
Is preferably 40 ns to 100 μsec, and 50 ns
ec to 2 μsec is particularly preferred. As the pulse width increases, the projections continue, and the contact area with the head increases.

As the deflector (12), for example, an electric polarizer (AOD, EOD) is preferably used. As the laser beam splitter (4), a so-called beam splitter cube in which two right-angle prisms are used, and one of the hypotenuses is coated with a semi-permeable membrane and the hypotenuses are joined to each other is used. Then, by using a plurality of laser beam splitters having different splitting ratios, the amount of laser beam applied to each substrate can be adjusted to be constant.

The light collecting mechanism (5) is configured as a combination of at least a total reflection mirror and an objective lens. The last focusing mechanism (5) is configured as a combination of a total reflection mirror and an objective lens, and the previous focusing mechanism (5) is configured as a combination of the laser beam splitter (4) and the objective lens. Is done. It is preferable to provide a beam expander in front of the objective lens and increase the beam diameter to an extent equal to the effective diameter of the objective lens in order to form a clear spot. Usually, the effective diameter of the lens is about 50 to 80% of the lens diameter.

Since the feature of the texture device of the present invention is to provide minute projections uniformly, the absolute value, uniformity and sharpness of the spot diameter of the laser beam applied to the substrate are important factors. The spot diameter is preferably 0.2 to 4 μm, more preferably 0.2 to 2 μm.
Here, the spot diameter represents the diameter of a circle whose intensity is reduced to “the square of e”, which is the highest intensity at the central portion of the light.
In addition, when the numerical aperture of the objective lens is NA and the wavelength of the laser beam is λ, the NA is 0.3 to 0.8 and λ /
It is preferable that NA satisfies 0.16 to 3.3.

Further, from the viewpoint of the sharpness of the spot, the focal length of the objective lens is 20 mm or less, particularly 5 mm.
The following is preferred. In such a case, since the substrate and the objective lens are arranged very close to each other, stable attachment / detachment and rotation of the substrate and high-speed rotation are possible, and sufficient movement of the objective lens is not hindered. It is necessary to have a shape.

That is, the distance between the upper surface of the substrate and the tip of the rotation axis of the spindle is 0.8 or less, preferably 0.6 or less, relative to the distance (working distance) between the upper surface of the substrate and the objective lens. It is preferable that it overhangs. The working distance is usually 10
mm or less. In addition, it is preferable to provide a notch near the back surface of the substrate on the rotation axis of the spindle to compensate for the stable movement of the objective lens.

It is preferable to use an aspherical lens as the objective lens, because the weight of the lens can be reduced, the light transmittance can be increased, and the working distance can be widened. Since the distance between the objective lens and the substrate fluctuates due to the undulation of the substrate or the shaft deviation of the spindle, the light-collecting mechanism preferably further has an auto-focus (AF) mechanism to keep the spot diameter constant.
In particular, the response frequency of the autofocus mechanism is preferably 90 Hz or more.

When the response frequency becomes slow, the size of the beam spot varies, and the size and height of the projection become uneven. Further, as the AF mechanism, it is preferable to improve the control efficiency by utilizing the result of the surface shake learning function, that is, the result of the AF control in the portion where the laser irradiation is performed, for example, in a feedforward manner and synchronizing with the rotation of the disk in the AF control. .

As the moving mechanism (6), for example, a linear slider is suitably used. FIG. 1 exemplifies a configuration in which the light collecting mechanism (5) and the substrate rotating mechanism (10) are moved on the light collecting mechanism (5) side as a relative movement method. That is, a plurality of light collecting mechanisms (5), (5)... Are mounted on one linear slider (6).

Then, a plurality of substrate rotating mechanisms (5),
(5) are simultaneously moved at a constant speed. If the relative movement speed between the light-condensing mechanism and the substrate is too slow, it is difficult to improve the CSS characteristics, and if it is too fast, the contact area between the projection and the head becomes large. Usually, the relative scanning speed on the irradiation surface of the beam is 2 m
/ S or more, especially 2 to 50 m / s.

On the other hand, as another structure for relatively moving the substrate rotating mechanism (10) and the light condensing mechanism (5), a structure for moving the substrate rotating mechanism (10) or a combination thereof can be used. You may.

Returning to FIG. 1, the moving mechanism (6) can move the plurality of substrates (11) and (11) at the required low speed over the entire process of texturing. However, usually, in consideration of productivity, one substrate (1
When moving from 1) to another substrate (11), the substrate is moved at an increased speed. And such speed control is:
It is also possible to mount another moving mechanism on the moving mechanism (6) so that one of them moves between the substrates, and the other moves for texture processing.

When the moving mechanism (6) is used only when moving from one substrate (11) to another substrate (11), the other moving mechanism (6) on which the light collecting mechanism (5) is mounted is used.
It is necessary to use a) and to texture one substrate (11) by its movement. Other moving mechanisms (6
The linear slider described above is also preferably used as a).

In the present invention, minute projections can be simultaneously formed on the back surface as well as the front surface of the magnetic disk substrate. Such an embodiment is, for example, as shown, before the first focusing mechanism (5), a laser beam splitter (7),
A total reflection mirror (8) and a condensing mechanism (9) configured as a combination of a total reflection mirror and an objective lens are arranged, and the laser beam emitted from the laser beam oscillator (1) is divided and divided. This can be achieved by irradiating the laser beam to the back surface of the substrate that is rotatably supported by the substrate rotation mechanism.

In FIG. 1, the laser beam is applied only to the back surface of the first substrate (11). However, a plurality of light collecting mechanisms having the same structure as described above are arranged corresponding to the back surface of the substrate. Thereby, minute projections can be simultaneously formed on both surfaces of a plurality of substrates.

The texture device according to the present invention includes, as shown in FIG. 1, a timing for controlling a modulation timing of a laser beam as a means for forming minute projections on the surface of a substrate in a constant pattern at the same or different intervals. A control unit (3) is provided.

That is, for example, when minute projections are formed at the same interval which is usually adopted, the substrate (11) is moved at a constant rotation speed and a constant speed by a constant speed operation of the moving mechanism (6) and the substrate rotating mechanism (10). When moved, the distance between the fine protrusions formed on the substrate surface becomes wider toward the outer periphery. Therefore, the position of the substrate is confirmed by the timing control unit (3), the modulation timing (irradiation time) of the laser beam is controlled by the signal, and the interval between the minute projections formed on the substrate surface is made constant.

The timing control section (3) comprises a computer, a position detecting mechanism, necessary interfaces, and the like. As the position detecting mechanism, for example, a laser displacement meter, an encoder, or the like can be used. The speed of the moving mechanism (6) and the speed of the substrate rotating mechanism (10) may be controlled without controlling the modulation timing of the laser beam.

In order to make the shape of the projection uniform,
The sweep distance of the laser spot based on the relative movement of the condensing mechanism and the substrate rotating mechanism is preferably such that the inner and outer peripheries of the disc-shaped substrate are constant even if the radial position changes, In this case, it is preferable to change the pulse width or the number of rotations of the substrate according to the irradiation position. As a specific device configuration, for example, the following configuration is provided.

In an apparatus having a constant spindle rotation speed, a means for measuring the position in the radial direction, and a constant sweep distance of the laser spot with respect to each position in the radial direction measured by the measuring means. And a means for modulating the laser beam based on the calculation result.

In an apparatus having a constant pulse width,
Means for measuring the position in the radial direction, means for calculating the spindle rotation speed for keeping the sweep distance of the laser spot constant for each position in the radial direction measured by the measuring means, a laser beam based on the calculation result .

Next, the texture processing method of the present invention using the above-described texture device will be described. In the texture processing method of the present invention, the above-described texture device is used, and 10 to 10 ⁸ minute protrusions per mm ² each having a concave portion connected to the convex portion near the convex shape on the surface of the magnetic disk substrate. Form.

First, a plurality of substrate rotating mechanisms (10), (1)
The substrates (11), (11),... Are set at 0), and the substrate (11) is moved at a constant rotation speed and a constant speed by a constant speed operation of the moving mechanism (6) and the substrate rotating mechanism (10). .
Next, the laser beam from the laser beam oscillator (1) is converted into a pulse laser by the modulator (2).
Deflected by the deflector (12), a plurality of laser beam splitters (4), (4).
(5) ... are irradiated onto the surfaces of the substrates (11) and (11).

That is, the texture processing is performed continuously over a wide range in the radial direction of the substrate as illustrated in FIG. 2A or 2B by shaking the spot position on the substrate surface at a high speed. Then, such texture processing can be performed simultaneously on a plurality of substrates.

The output of the laser beam is important as a condition for forming a minute projection having a concave portion connected to the convex portion in the vicinity of the convex portion. The specific output of the laser beam depends on the surface material of the substrate and the like, but is usually 50 to 2000 mW, preferably 50 to 2000 mW on the irradiation surface.
A light source in the range of 1000 mw, more preferably 50-400 mW is used. If it is less than 50 mW, it is difficult to form projections, and if it exceeds 2000 mW, it is difficult to perform texture processing with excellent CSS characteristics. Further, it is preferable to use a laser capable of continuous output.

In the case of a typical NI-P layer, 50 to 50
700 mw, preferably selected from the range of 50 to 700 mw, and the average irradiation time is 0.04 to 100 μs
It is selected from the range of c. Here, the average irradiation time is
It indicates the irradiation time required to form one projection.

In particular, when the output of the laser beam exceeds the above range, the crater-shaped projections and depressions described in US Pat. No. 5,062,021 are formed, and sticking between the magnetic disk and the magnetic head is performed. Not enough for the problem. The thickness of the Ni-P layer is 50 to 2
It is good to be in the range of 0000 nm, preferably 100-15,000 nm.

Further, the spot diameter of the laser beam is set to 0.1.
The range of 2 to 4 μm is preferred, and the range of 0.2 to 1.5 μm is particularly preferred. Although the number of rotations of the substrate is determined in consideration of productivity, the number of rotations of the substrate is usually 900 to 7
200 rpm, the moving speed of the substrate is 0.03 to 60 mm / sec as the moving speed of the moving mechanism (linear slider).
It is better to select from the range of c.

According to the texture processing method of the present invention, by adopting the above conditions, the height of the projections (projections) on the surface of the magnetic disk substrate is 1 to 100 nm and the height of the projections is in the vicinity of the convex shape. It is possible to form 10 to 10 ⁸ fine protrusions per 1 mm ² having a concave portion connected to the portion. Above all, a relatively steep one having an average area of figure areas surrounded by contour lines at a height of 1 nm below the apex of each projection is 1 μm ² or less. As a result, good CS
A magnetic disk substrate that can simultaneously achieve the S characteristic and the sticking characteristic and lower the flying height of the magnetic head can be obtained.

[0052]

EXAMPLES Hereinafter, the present invention will be described in more detail with reference to examples, but the present invention is not limited to the following examples unless it exceeds the gist of the present invention.

Example 1 A disk-shaped Al alloy substrate having a diameter of 95 mm
μm Ni-P electroless plating, the surface roughness (R
A disk substrate was obtained by polishing the surface so that a) became 1 nm or less, and one side of the disk substrate was textured. The structure of the used texture device is as follows.

That is, in the configuration shown in FIG. 1, the beam splitter (7) is not used, and two light-collecting mechanisms (5) are used. And an objective lens combined with an auto-focus system, and another condensing mechanism was configured as a combination of a total reflection mirror and an objective lens combined with an auto-focus system. A beam splitter cube was used as the beam splitter (4). In addition, A is placed between the modulator and the first light collecting mechanism.
An OD deflector was provided. An Ar gas laser beam tube (wavelength 488 nm, maximum output 2 W) is used as a laser beam light source, and an electro-optic modulator (response frequency: 2 MHz, rise time: 15 ns) is used as a modulator.
Other conditions were as follows.

[0055]

[Table 1] Laser beam output: 400 mw Pulse width: 0.234 μsec Beam spot diameter: 1 μm Auto focus response frequency: 180 Hz Substrate rotation speed: 3600 rpm Moving speed (relative speed) of linear slider: 0.6 mm
/ Sec Beam scanning speed on irradiation surface: 7.2 m / s Deflection speed: 64 mm / sec

As a result of observing the surface shape of the substrate after the texture processing with a surface shape measuring device (“ZYGO” manufactured by Zigo Corporation, USA) by laser interference, it was found that the shape provided with a concave portion connected to the convex portion near the convex shape. It was confirmed that minute projections were formed. The average projection density was 9260 / m
m ² , the average protrusion height is 33 nm, and the average value of the area of a figure surrounded by contour lines at a height 1 nm below the vertex is:
0.1 μm ² .

The static friction coefficient (initial stiction) before the CSS test and the friction force after 20,000 times of CSS were measured.
The CSS test was carried out using a thin film head (slider material: Al ₂ O ₃ TiC) having a load gram of 6 gf and a flying height of 2 μ inch. Further, a glide tester was used to evaluate the flying height of the head at the time of seeking between the data zone and the CSS zone. The initial stiction is 0.18 and the friction force after 20,000 times of CSS is 3g
f, The flying height of the head was 1.5 μ inch.

By a sputtering method, a Cr intermediate layer (thickness: 100 nm), a Co—Cr—Ta alloy magnetic layer (thickness: 50 nm), and a carbon protective layer (thickness: 20 nm) were sequentially formed on the above substrate surface.
m), and a 2 nm-thick fluorinated liquid lubricant (“DOL-20” manufactured by Monte Edison Co., Ltd.) is formed on the surface of the carbon protective layer.
00 ") by dip coating to obtain a magnetic disk.

For the above magnetic disk, the static friction coefficient (initial stiction) and CSS before the CSS test
The friction force after 20,000 times was measured. The CSS test was performed on a thin film head with a load gram of 6 gf (slider material: Al ₂ O ₃
Using TiC), the head flying height was 2 μ inch. Further, a glide tester was used to evaluate the flying height of the head at the time of seeking between the data zone and the CSS zone. Initial stiction is 0.19, C
The frictional force after 20,000 times of SS was 3 gf, and the flying height of the head was 1.5 μ inch.

[0060]

According to the present invention described above, there is provided a texture apparatus which improves processing productivity by performing texture processing continuously over a wide range in the radial direction of a substrate using a deflected laser beam. The present invention also provides a texture processing method capable of simultaneously achieving good CSS characteristics and sticking characteristics and low flying height of a magnetic head.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of an example of a texture device according to the present invention.

FIG. 2 is an explanatory diagram of an example of a projection forming pattern by a deflection laser beam.

[Explanation of symbols]

 1: laser beam oscillator 2: modulator 3: timing controller 4: laser beam splitter 5: focusing mechanism 6: moving mechanism 7: laser beam splitter 8: total reflection mirror 9: focusing mechanism 10: substrate rotating mechanism 11: Substrate 12: Deflector

──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Ryuichi Yoshiyama 1000 Kamoshitacho, Aoba-ku, Yokohama-shi, Kanagawa Prefecture Mitsubishi Chemical Corporation Yokohama Research Laboratory (56) References JP-A-55-117740 (JP, A) JP-A-2-134725 (JP, A) JP-A-6-203478 (JP, A) US Patent 5,120,927 (US, A) US Patent 5,559,791 (US, A) (58) Fields studied (Int. Cl. ⁶ , (DB name) B23K 26/00-26/18 G11B 5/84

Claims (11)

(57) [Claims] 1. A texture device used in a process of manufacturing a magnetic disk substrate, comprising: a substrate rotating mechanism capable of holding and rotating the substrate; a laser beam oscillator; a modulator for controlling ON / OFF of a laser beam from the oscillator; A deflector for deflecting the laser beam from the modulator, and a condensing mechanism for irradiating the deflected laser beam from the deflector to a substrate surface rotatably supported by the substrate rotation mechanism. apparatus. 2. A plurality of substrate rotating mechanisms, one or more laser beam splitters for splitting a deflected laser beam from a deflector,
One or more condensing mechanisms for irradiating each of the deflected laser beams split by the laser beam splitter to the surface of each substrate rotatably supported by the plurality of substrate rotating mechanisms, the condensing mechanism and the substrate rotating mechanism 2. The texture device according to claim 1, further comprising: a moving mechanism for relatively moving the texture device. 3. The texture device according to claim 1, wherein the laser beam oscillator is a gas laser beam oscillator. 4. The texture device according to claim 1, wherein the laser beam oscillator is controlled to an energy capable of forming a minute projection having a concave portion connected to the convex portion in the vicinity of the convex shape. . 5. The texture device according to claim 1, wherein a plurality of light collecting mechanisms or a plurality of substrate rotating mechanisms are mounted on a single moving mechanism. 6. A laser beam oscillator for connecting a laser beam.
It is configured to be able to output continuously, and ON / O of the laser beam
FF control frequency is 0.5-10MHz, laser
A beam spot diameter of 0.2 to 4 μm;
5. The texture device according to any one of 5 . 7. The texture device according to claim 6, wherein the substrate rotating mechanism is capable of rotating the substrate at a rotation speed of 1800 rpm or more. 8. A laser beam from a laser beam oscillator.
The rise time is less than 50 ns,
Pulse width including pulse and fall time 50 ns to 2 μm
s, pulse laser with repetition frequency of 0.5 to 10 MHz
Beam, and the spot diameter of the laser beam is 0.2 ~
Serial mounting of texture unit in any one of claims 1 to 5 is 4 [mu] m. 9. A laser beam oscillator for connecting a laser beam.
9. The texture device according to claim 8, wherein the texture device is configured to be capable of continuous output, and uses EOM for modulating the pulse laser beam. 10. Use of the texture device according to claim 1, wherein 10 to 10 ² minute protrusions per 1 mm ² are provided on the surface of the magnetic disk substrate, the protrusions being provided in the vicinity of the protrusions with recesses connected to the protrusions. A method for processing the texture of a magnetic distor substrate, comprising: 11. The texture processing method according to claim 10, wherein the height of the projection is 1 to 100 nm.