JP2809401B2 - Method of manufacturing gas discharge panel - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Summary] The present invention relates to a method of manufacturing a substrate having a depression corresponding to a display cell functioning as a phosphor holding portion on an inner surface of a display side substrate such as a surface discharge type color display panel. It is intended to create a depression surrounded by a fine pattern partition on the inner surface of the display side substrate on the other substrate that will be the phosphor support substrate, corresponding to multiple cells of the display device with high resolution Photosensitive resin
Provided with a thickness of 90 to 200 microns, formed in the photosensitive resin a concave portion having a vertical wall surface of a width of 100 microns or less corresponding to the shape of the partition wall, a low melting glass mixed with a binder in the concave portion. After embedding, the low-melting glass containing the binder is fired to form 90-200 micron high vertical side walls with the low-melting glass remaining on the substrate.

[Industrial applications]

The present invention relates to a method for manufacturing a substrate having a depression corresponding to a display cell functioning as a phosphor holding portion on an inner surface of a display side substrate such as a surface discharge type color display panel.

In a panel with a small and close discharge cell space and a large angle of incidence of the stimulating ray, such as a recent large-sized high-resolution gas discharge fluorescent display panel, leakage of the stimulating ray from an adjacent cell and interference of operating characteristics may occur. Therefore, it is necessary to form a wall separating a large number of display cells.

In particular, in order to create a partition wall with a phosphor screen with fine pixels, such as a large color surface discharge panel with one pixel in three RGB cells and high resolution with many pixels, the patterning must be performed with precision. In the field of gas discharge panels, photolithography has been used instead of thick film printing.

In particular, in the case of a flat display panel in which the angle of incidence of ultraviolet light for stimulating the phosphor is often large (off the vertical), it is necessary to construct a boundary wall of the phosphor to protect the phosphor from other stimulating rays.

[Conventional technology]

As an example of the gas discharge panel, a related art of a color surface discharge type gas discharge panel will be described.

A first example of the application of the present invention is a front view of a colorized gas discharge panel as shown in a cutaway view in FIG. 4, wherein a phosphor zone is defined by a non-luminescent dielectric to limit the phosphor boundaries of the display. It is surrounded by layers to make the light emission clear. On the inner surface of the cover substrate 1 located on the viewer side of the display, mesh-shaped partitions 4 are formed by dividing the discharge unit cells by the "thick film printing method". The phosphor layer 6 which emits light was formed.

Here, 1 is a cover substrate which is a display side substrate, 2 is an electrode substrate having electrodes, 3 is a dielectric layer, 4 is a (mesh-shaped) partition, 5 is a hollow portion for applying a phosphor, and 6 is a phosphor. The layer 7 is a separator for limiting a discharge area on the electrode substrate, X and Y are display electrodes, A is an address electrode, M is a discharge part, and Q is a boundary of a discharge part on the electrode.

Display electrodes X and Y are formed on the electrode substrate 2,
The display electrodes X, which are widened on the electrodes via the dielectric layer 3,
A discharge cell is formed at a portion M of Y, and a bank-shaped separator 7 is insulated to intersect the discharge cell in a direction intersecting the display electrode at a boundary Q where the widened display electrode returns to its original narrow width. An address electrode A made of a metal material is formed on the inclined surface of the separator 7 closer to the widened cell electrode by vapor deposition or the like.

By assembling the completed substrate 2 in parallel with one of the constituent walls of the partition wall 4 and one of the separators 7 on the cover substrate 1 made in accordance with the same pitch, the ceiling of the discharge portion M is obtained. The depression 5 surrounded by the partition wall 4 is located at the portion, and the phosphor layer 6 can be stimulated by the ultraviolet light generated at the discharge portion M to display a discharge in a desired color. Phosphors of the three primary colors of RGB are regularly arranged in the phosphor layer 6 for each of the depressions 5, and information desired to be displayed can be displayed in color according to the presence or absence of discharge of cells immediately below.

The technology of the present invention will be described by taking the partition wall 4 formed on the cover substrate 1 of such a panel as an example.

In the thick film printing described above, a viscous ink-like partition wall material such as a copy plate is extruded from a mesh-patterned opening onto a substrate to be printed, and the partition wall material is printed. However, it is extremely difficult to form a partition having a size of 100 μm or less, and the limit has been almost reached. Therefore, a photolithography technique capable of finer processing has been adopted for a gas discharge panel.

In order to form a partition by a photolithography method, a partition material is preliminarily baked on one surface of the substrate to be formed to a maximum height of the partition, for example, a thickness of 90 μm, and a partition pattern between cells is left thereon. For this purpose, an etching resistant mask is applied, and an etchant is added to leave desired partition walls. This is the conventional well-known method.

[Problems to be solved by the invention]

However, in the case of a single material and a printed thick film having uniform etching characteristics, the etched surface reaching the substrate becomes a spherical shape having a center near the etching start point, and the tip of the etching progresses when reaching the substrate. Etching holes tend to be mortar-shaped. The shape of the depression wall expands spherically with time, and becomes different from the expected partition wall perpendicular to the substrate surface.

In addition, the thickness of a thick film material that can be printed at a time is limited on a wall having a complicated pattern with a height by the conventional mainstream thick film printing method, so the printing operation is performed a plurality of times. However, a large-sized, high-resolution panel has a problem in that the alignment accuracy for cells on the other substrate is inferior, and that the partition walls sag and the verticality is poor.

SUMMARY OF THE INVENTION An object of the present invention is to form a depression surrounded by a fine pattern partition on the inner surface of a display-side substrate, corresponding to a plurality of cells of a display device having multiple pixels and high resolution.

[Means for solving the problem]

The partition wall forming method of the present invention, the photosensitive resin on the substrate 90 ~
A recess having a vertical wall having a width of 100 μm or less corresponding to the shape of the partition wall was formed in the photosensitive resin, and a low-melting glass mixed with a binder was embedded in the recess. Thereafter, the low-melting glass containing the binder is fired, and the low-melting glass remaining on the substrate is used to form a partition having vertical side surfaces of 90 to 200 microns in height.

(Operation)

A photosensitive resin formed so as to have a pattern corresponding to the discharge portion and a thickness equivalent to the height of the partition wall is used as a male mold, and a partition wall of low melting point glass can be formed along the mold.

〔Example〕

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIGS. 1 to 3 show, in an order, an example of the present invention, in which a concave portion is formed on an inner surface of a display-side substrate of a surface discharge type gas discharge panel.

In the figure, 1 is a display-side substrate, 2 is an island-shaped convex portion made of a photosensitive resin, 4 'is a dielectric layer mainly composed of low-melting glass serving as a partition, and 4 is an island-shaped convex portion made of a photosensitive resin. Is a partition wall obtained by sintering the completed 4 '.

On the display-side substrate 1 using a glass substrate, island-shaped convex portions made of generally used photosensitive organic resin are formed by photolithography technology corresponding to the cells as shown in FIG. The general size of this is, for example, about 100 to 600 microns square in plan view on the glass surface and about several microns to 200 microns in height.

Next, a binder containing silica is mixed in the powder of the low-melting glass that has been finely ground to about several percent, and the above-prepared low-melting glass material is rubbed into the gap at the top of the already formed island-shaped concave portion. FIG. 2 shows this state.

After being dried and solidified in this state, it is fired at the melting temperature of the low-melting glass of 500 to 600 degrees Celsius, and when cooled, the low-melting glass is melted and densified in almost the same shape, and the island-shaped convex portion is formed. It disappears by oxidation or evaporation. After the disappearance of the protrusion, the shape surrounding the protrusion before melting is faithfully reproduced by the plastic force of the dielectric layer to which the binder is added, and the partition is completed as shown in FIG. As already understood, the heat resistance of the projection does not particularly matter, and may be a solid at room temperature. This is because the binder is incorporated in the filled low melting point glass, and the rigidity can be maintained even if the resin disappears during heating.

After the partition walls are formed in this way, the RGB phosphor layers are applied to the depressions between the partition walls as in the conventional case.

Although the partition is simply formed on the display-side substrate here, the partition may be formed on the electrode substrate so as to surround the discharge region of one cell instead of the separator 7. Even in a matrix type display panel having electrodes on both constituent substrates, it is possible to form a fine partition having a desired steepness by the method of printing the core of the present invention first, thereby avoiding interference from adjacent cells.

〔The invention's effect〕

According to the present invention, by forming island-shaped convex portions made of a photosensitive resin, a discharge space corresponding to a cell can be formed with the accuracy of photolithography technology. Since the photosensitive resin having good etching properties is used for the island-shaped convex portions, an accurate male mold is formed. This makes it possible to achieve an almost ideal shape with a clear vertical surface as compared with the conventional method of forming a concave portion in a thick film layer which has been printed in advance by etching.

In addition, the thickness of the dielectric layer, which is the base of the partition wall, needs to be thick enough to be impossible in one printing. However, in the method of the present invention, the simplicity of “solid surface” makes it one of the printing techniques. Thick film thickness can be used. As described above, the accuracy of photolithography and the efficiency of the thick film technology are combined, so that the effect that can contribute to the expansion of industry is great.

[Brief description of the drawings]

FIG. 1 is a view showing a substrate provided with convex portions corresponding to cells made of a photosensitive resin in the manufacturing method of the present invention, and FIG. 2 is a view showing a state in which the convex portions of the present invention are filled with a melting point glass material. FIG. 3 is a front view of the present invention. FIG. 3 is a view showing a state where the low-melting glass is sintered and the convex portions are eliminated. FIG. 4 is a cutaway view of a surface discharge color display panel to which the present invention is applied. . In the figure, 1 is a substrate, 2 is an island-shaped convex portion made of a photosensitive resin, 4 'is a partition made of a low-melting glass material filling the island-shaped convex portion, 4
Is a partition wall made of a low-melting-point glass in which the convex portions have disappeared by sintering.

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) H01J 9/02

Claims (1)

(57) [Claims] When manufacturing a gas discharge panel having a partition for partitioning a discharge part between a pair of substrates disposed opposite to each other, a photosensitive resin having a thickness of 90 to 200 microns is provided on one of the substrates. 100 corresponding to the shape of the partition wall on resin
After forming a concave portion having a vertical wall surface with a width of not more than micron, and embedding a low-melting glass mixed with a binder in the concave portion, firing the low-melting glass containing the binder, on the substrate A method for manufacturing a gas discharge panel, comprising forming a partition having vertical side surfaces having a height of 90 to 200 microns from the remaining low melting point glass.