JP2781874B2 - Gas supply device with cylinder - Google Patents
Gas supply device with cylinderInfo
- Publication number
- JP2781874B2 JP2781874B2 JP2094110A JP9411090A JP2781874B2 JP 2781874 B2 JP2781874 B2 JP 2781874B2 JP 2094110 A JP2094110 A JP 2094110A JP 9411090 A JP9411090 A JP 9411090A JP 2781874 B2 JP2781874 B2 JP 2781874B2
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- cylinder
- line
- vent
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
- B08B9/0325—Control mechanisms therefor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明はボンベ付ガス供給装置、特に安全装置を有す
るボンベ付ガス供給装置に関するものである。Description: TECHNICAL FIELD The present invention relates to a gas supply device with a cylinder, and more particularly to a gas supply device with a cylinder having a safety device.
（従来の技術） 第２図は従来のボンベ付半導体材料ガス供給装置を示
し、1a,1bは夫々シラン，ホスフィン等の半導体材料ガ
スのボンベ、２はガス供給口、3a,3bは夫々上記ボンベ1
a,1bとガス供給口２間を連通するガス供給ライン、4a,4
b及び5a,5bは夫々上記ガス供給ライン3a,3bに介挿した
ボンベ側高圧開閉弁及びガス供給口側低圧開閉弁、６は
パージ用N2ガス源、7a,7bは夫々このN2ガス源６と上記
ガス供給ライン3a,3bのボンベ接続部分間を連通するパ
ージライン、8a,8bは夫々上記パージライン7a,7bに介挿
された開閉弁、９はベント口、10a,10bは夫々このベン
ト口９と上記ガス供給ライン3a,3b内の高圧開閉弁4a,4b
のボンベ側開口間を連通するベントライン、11a,11bは
夫々上記ベントライン10a,10bに介挿された開閉弁、12
は上記ベント口９に真空を作用せしめるためのエゼクタ
ー、13はこのエゼクター12にエゼクター作用を生ぜしめ
るために流す高圧N2ガスのガス源、14はその供給ライン
である。(Prior Art) FIG. 2 shows a conventional semiconductor material gas supply apparatus with a cylinder, wherein 1a and 1b are cylinders of a semiconductor material gas such as silane and phosphine, 2 is a gas supply port, and 3a and 3b are the above cylinders, respectively. 1
gas supply lines communicating between a, 1b and the gas supply port 2, 4a, 4
b and 5a, 5b are respectively the gas supply line 3a, the cylinder-side pressure off valves interposed in 3b and the gas supply port side low pressure off valve, the N 2 gas source for purging 6, 7a, 7b are respectively the N 2 gas A purge line communicating between the source 6 and the cylinder connection portion of the gas supply lines 3a and 3b, 8a and 8b are on-off valves inserted in the purge lines 7a and 7b, respectively, 9 is a vent port, and 10a and 10b are respectively This vent port 9 and the high-pressure on-off valves 4a, 4b in the gas supply lines 3a, 3b
Vent lines communicating between the cylinder side openings, 11a and 11b are on-off valves inserted into the vent lines 10a and 10b, respectively, and 12
Ejector for exerting a vacuum on the vent 9, 13 gas source of the high-pressure N 2 gas flow for causing a ejector acting on the ejector 12, 14 is its supply line.
このような従来のボンベ付ガス供給装置においては、
例えばボンベ1a内のガスが消耗したとき、これを検知し
て自動的にガス供給ラインを3aから3bに切り替えてボン
ベ1bを使用し、ボンベ1bを使用している間にボンベ1aを
新しいボンベに交換するようにしている。In such a conventional gas supply device with a cylinder,
For example, when the gas inside the cylinder 1a is exhausted, this is detected and the gas supply line is automatically switched from 3a to 3b to use the cylinder 1b, and the cylinder 1a is replaced with a new cylinder while the cylinder 1b is being used. I am trying to replace it.
このボンベ1aの交換に際してはガス供給ライン3a内に
残存する有害な又は危険性のあるガスが外部に漏れるの
を防ぐためボンベ1a切り離しに先立ってガス供給ライン
3a内の高圧及び低圧開閉弁4a,5aを閉じ、パージライン7
a内の開閉弁8a及びベントライン10a内の開閉弁11aを開
いてパージ用N2ガス源６からパージ用N2ガスをパージラ
イン7a、ボンベ側のガス供給ライン3a及びベントライン
10aを介してベント口９から排出せしめ、この際エゼク
ター12による真空排気作用が上記排気を促進し、ボンベ
側のガス供給ライン3a内から有害又は危険性のあるガス
が完全にベントガス処理機構（図示せず）内に排出処理
されるようにしている。In order to prevent the harmful or dangerous gas remaining in the gas supply line 3a from leaking outside when replacing the cylinder 1a, the gas supply line must be removed before the cylinder 1a is disconnected.
Close the high-pressure and low-pressure on-off valves 4a and 5a in 3a, and
off valve 8a and the on-off valve 11a and open the purge N 2 gas source for the 6 purging N 2 gas purge line 7a in the vent line 10a in a, gas cylinder side supply line 3a and the vent line
The gas is exhausted from the vent port 9 through the vent port 10a. At this time, the evacuation by the ejector 12 promotes the evacuation, and the harmful or dangerous gas is completely removed from the gas supply line 3a on the cylinder side (see FIG. (Not shown).
（発明が解決しようとする課題） 然しながら上記のような従来のボンベ付ガス供給装置
においては、例えばガス供給ライン3a内の高圧開閉弁4a
に閉状態でリークがあった場合、高圧及び低圧開閉弁4
a,5a間のガス供給ライン3a内に残留している有害ガスが
ボンベ1a交換の際上記高圧開閉弁4aからリークして外部
に漏れるおそれがあった。(Problems to be Solved by the Invention) However, in the conventional gas supply device with a cylinder as described above, for example, the high-pressure on-off valve 4a in the gas supply line 3a
If there is a leak in the closed state, the high and low pressure
The harmful gas remaining in the gas supply line 3a between a and 5a may leak from the high-pressure on-off valve 4a and leak outside when the cylinder 1a is replaced.
本発明は上記の欠点を除くようにしたものである。 The present invention has been made to eliminate the above disadvantages.
（課題を解決するための手段） 本発明のボンベ付ガス供給装置はボンベとガス供給口
間を連通するガス供給ラインと、このガス供給ラインに
介挿されたボンベ側及びガス供給口側開閉弁と、パージ
用ガス源と、ベント口と、上記ガス供給ラインのボンベ
接続部分と上記パージ用ガス源間を連通するパージライ
ンと、上記ボンベ側開閉弁のボンベ側開口と上記ベント
口間を連通するベントラインと、このパージライン及び
ベントラインに夫々介挿した開閉弁と、上記ガス供給ラ
インの上記ボンベ側及びガス供給口側開閉弁間と上記ベ
ント口間を連通する安全ラインと、この安全ラインに介
挿した開閉弁と、ボンベ交換に際し上記パージ用ガス源
を上記パージライン，ボンベ側ガス供給ライン及びベン
トラインを介して上記ベント口に接続し、その後この接
続を解除し、上記ガス供給ラインの上記ボンベ側及びガ
ス供給口側開閉弁間を上記安全ラインを介して上記ベン
ト口に接続するよう上記各開閉弁を開閉操作する制御機
構とより成ることを特徴とする。(Means for Solving the Problems) A gas supply device with a cylinder according to the present invention includes a gas supply line communicating between a cylinder and a gas supply port, and a cylinder-side and gas supply-port-side opening / closing valve inserted into the gas supply line. A purge gas source, a vent port, a purge line communicating between the cylinder connection part of the gas supply line and the purge gas source, and a communication between the cylinder side opening of the cylinder side opening / closing valve and the vent port. A vent line, an on-off valve inserted in each of the purge line and the vent line, a safety line communicating between the gas supply port-side on-off valve and the gas supply port-side on-off valve, and between the vent port. An on-off valve inserted in the line and the purge gas source for cylinder replacement are connected to the vent port via the purge line, the gas supply line on the cylinder side, and the vent line. Then, the connection mechanism is released, and a control mechanism for opening and closing each of the on-off valves so as to connect the gas supply line between the cylinder side and the gas supply port side on-off valve to the vent port via the safety line is provided. It is characterized by comprising.
（作用） 本発明のボンベ付ガス供給装置においてはボンベと高
圧開閉弁間のガス供給ライン内のガスがパージ用ガスに
よってパージされると共に、高圧及び低圧開閉弁間のガ
ス供給ライン内のガスがベント口を介して排出されるよ
うになる。(Operation) In the gas supply device with a cylinder of the present invention, the gas in the gas supply line between the cylinder and the high-pressure on-off valve is purged by the purge gas, and the gas in the gas supply line between the high-pressure and the low-pressure on-off valve is removed. It is discharged through the vent.
（実施例） 以下図面によって本発明の実施例を説明する。Embodiment An embodiment of the present invention will be described below with reference to the drawings.
本発明においては第１図に示すようにガス供給ライン
3a,3bにおける上記高圧及び低圧開閉弁4a,5a間及び4b,5
b間のラインに夫々圧力検知機構15a,15bを接続すると共
に、この各ラインと上記ベント口９間を夫々安全ライン
16a,16bによって連通し、この各ライン16a,16bに夫々開
閉弁17a,17bを介挿せしめる。In the present invention, as shown in FIG.
3a, 3b between the high and low pressure on-off valves 4a, 5a and 4b, 5
The pressure detection mechanisms 15a and 15b are connected to the lines between the b and the vent port 9, respectively.
The lines 16a and 16b communicate with each other, and the on-off valves 17a and 17b are inserted into the respective lines 16a and 16b.
本発明のボンベ付ガス供給装置は上記のような構成で
あるから、例えばボンベ1aを交換する際には上述のよう
にパージ用N2ガスによってボンベ1a側のガス供給ライン
3a内のガスの排出を行った後パージライン7a内の開閉弁
8a及びベントライン10a内の開閉弁11aを閉じ、上記安全
ライン16a内の開閉弁17aを開く。Since the cylinder with a gas supply device of the present invention is configured as described above, for example, above the gas supply line of the cylinder 1a side by purging N 2 gas as is when replacing the cylinder 1a
After discharging the gas in 3a, the on-off valve in the purge line 7a
On / off valve 11a in 8a and vent line 10a is closed, and on / off valve 17a in safety line 16a is opened.
このようにすればエゼクター12による真空が安全ライ
ン16aを介して上記高圧及び低圧開閉弁4a,5a間のガス供
給ライン3aに作用し、このライン内に残存するガスがベ
ント口９を介して排出され、例えガス供給ライン3aの高
圧開閉弁4aにリークがあってもボンベ1aの交換の際に有
害ガスが外部に漏れ出るおそれが無い。In this way, the vacuum generated by the ejector 12 acts on the gas supply line 3a between the high-pressure and low-pressure on-off valves 4a and 5a via the safety line 16a, and the gas remaining in this line is discharged through the vent port 9. Therefore, even if there is a leak in the high-pressure on-off valve 4a of the gas supply line 3a, there is no possibility that the harmful gas leaks outside when the cylinder 1a is replaced.
尚上記ガス供給ライン3a内が減圧排気されているか否
かは上記圧力検知機構15aによって確認することが出来
る。Whether or not the inside of the gas supply line 3a is exhausted under reduced pressure can be confirmed by the pressure detection mechanism 15a.
（発明の効果） 上記のように本発明のボンベ付ガス供給装置によれ
ば、例え開閉弁にリークが生じていてもボンベ交換の際
の有害ガスの漏れを完全に防止出来る大きな利益があ
る。(Effect of the Invention) As described above, according to the gas supply device with a cylinder of the present invention, even if a leak occurs in the on-off valve, there is a great advantage that leakage of harmful gas at the time of cylinder replacement can be completely prevented.
第１図は本発明のボンベ付ガス供給装置の構成図、第２
図は従来のボンベ付ガス供給装置の構成図である。 1a,1b……ボンベ、２……ガス供給口、3a,3b,14……ガ
ス供給ライン、4a,4b……高圧開閉弁、5a,5b……低圧開
閉弁、6,13……N2ガス源、7a,7b……パージライン、8a,
8b,11a,11b,17a,17b……開閉弁、９……ベント口、10a,
10b……ベントライン、12……エゼクター、15a,15b……
圧力検知機構、16a,16b……安全ライン。FIG. 1 is a block diagram of a gas supply device with a cylinder according to the present invention.
FIG. 1 is a configuration diagram of a conventional gas supply device with a cylinder. 1a, 1b ...... bomb 2 ...... gas supply port, 3a, 3b, 14 ...... gas supply lines, 4a, 4b ...... pressure off valve, 5a, 5b ...... low pressure off valve, 6, 13 ...... N 2 Gas source, 7a, 7b …… Purge line, 8a,
8b, 11a, 11b, 17a, 17b ... On-off valve, 9 ... Vent port, 10a,
10b …… vent line, 12 …… ejector, 15a, 15b ……
Pressure detection mechanism, 16a, 16b ... Safety line.
Claims (3)
ラインと、このガス供給ラインに介挿されたボンベ側及
びガス供給口側開閉弁と、パージ用ガス源と、ベント口
と、上記ガス供給ラインのボンベ接続部分と上記パージ
用ガス源間を連通するパージラインと、上記ボンベ側開
閉弁のボンベ側開口と上記ベント口間を連通するベント
ラインと、このパージライン及びベントラインに夫々介
挿した開閉弁と、上記ガス供給ラインの上記ボンベ側及
びガス供給口側開閉弁間と上記ベント口間を連通する安
全ラインと、この安全ラインに介挿した開閉弁と、ボン
ベ交換に際し上記パージ用ガス源を上記パージライン，
ボンベ側ガス供給ライン及びベントラインを介して上記
ベント口に接続し、その後この接続を解除し、上記ガス
供給ラインの上記ボンベ側及びガス供給口側開閉弁間を
上記安全ラインを介して上記ベント口に接続するよう上
記各開閉弁を開閉操作する制御機構とより成ることを特
徴とするボンベ付ガス供給装置。A gas supply line that communicates between a cylinder and a gas supply port, a cylinder-side and gas supply-port-side on-off valve inserted into the gas supply line, a purge gas source, a vent port, A purge line communicating between a cylinder connecting portion of a gas supply line and the purge gas source, a vent line communicating between a cylinder side opening of the cylinder side opening / closing valve and the vent port, and a purge line and a vent line, respectively. An on-off valve inserted, a safety line communicating between the gas supply port-side on-off valve on the gas supply line and the vent port, an on-off valve inserted on this safety line, and The purge gas source is the purge line,
It is connected to the vent port via the gas supply line on the cylinder side and the vent line, then this connection is released, and the vent line between the cylinder side of the gas supply line and the on-off valve on the gas supply port side is vented via the safety line. A gas supply device with a cylinder, comprising: a control mechanism that opens and closes each of said on-off valves so as to be connected to a port.
１のガス供給ラインと、第２のボンベと上記ガス供給口
間を連通する第２のガス供給ラインと、上記第1,第２の
ガス供給ラインに夫々介挿されたボンベ側及びガス供給
口側開閉弁と、パージ用ガス源と、ベント口と、上記第
1,第２のガス供給ラインのボンベ接続部分と上記パージ
用ガス源間を夫々連通する第1,第２のパージラインと、
上記第1,第２のガス供給ラインにおけるボンベ側開閉弁
のボンベ側開口と上記ベント口間を夫々連通する第1,第
２のベントラインと、上記第1,第２のパージライン及び
第1,第２のベントラインに夫々介挿した開閉弁と、上記
第1,第２のガス供給ラインの上記ボンベ側及びガス供給
口側開閉弁間と上記ベント口間を夫々連通する第1,第２
の安全ラインと、この第1,第２の安全ラインに夫々介挿
した開閉弁と、ボンベ交換に際し上記パージ用ガス源を
交換すべきボンベに関連する上記パージライン，ボンベ
側ガス供給ライン及びベントラインを介してベント口に
接続し、その後この接続を解除し関連する上記ガス供給
ラインの上記ボンベ側及びガス供給口側開閉弁間を関連
する上記安全ラインを介してベント口に接続するよう上
記各開閉弁を開閉操作する制御機構とより成ることを特
徴とするボンベ付ガス供給装置。A first gas supply line communicating between the first cylinder and the gas supply port; a second gas supply line communicating between the second cylinder and the gas supply port; A cylinder-side and gas-supply-port-side opening / closing valve respectively inserted in the second gas supply line, a purge gas source, a vent port,
1, a first and a second purge line that respectively communicate between a cylinder connection portion of a second gas supply line and the purge gas source;
First and second vent lines communicating between the cylinder-side opening of the cylinder-side on-off valve and the vent port in the first and second gas supply lines, the first, second purge line, and the first An on-off valve inserted in the second vent line, and a first and a second valve respectively communicating between the first and second gas supply lines between the cylinder side and the gas supply port side on-off valve and between the vent ports. 2
Safety line, the on-off valves respectively inserted in the first and second safety lines, and the purge line, the cylinder side gas supply line and the vent associated with the cylinder to be replaced with the purge gas source when replacing the cylinder. Connected to the vent port via a line, and then disconnected and connected between the cylinder side and the gas supply port side open / close valve of the relevant gas supply line to the vent port via the relevant safety line. A gas supply device with a cylinder, comprising a control mechanism for opening and closing each on-off valve.
上記ガス供給ラインにおける上記ボンベ側及びガス供給
口側開閉弁間の圧力を検知する機構とを更に有する請求
項１又は２記載のボンベ付ガス供給装置。3. A vacuum exhaust mechanism connected to the vent port,
The gas supply device with a cylinder according to claim 1 or 2, further comprising a mechanism for detecting a pressure between the cylinder side and the gas supply port side opening / closing valve in the gas supply line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2094110A JP2781874B2 (en) | 1990-04-11 | 1990-04-11 | Gas supply device with cylinder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2094110A JP2781874B2 (en) | 1990-04-11 | 1990-04-11 | Gas supply device with cylinder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03292497A JPH03292497A (en) | 1991-12-24 |
| JP2781874B2 true JP2781874B2 (en) | 1998-07-30 |
Family
ID=14101299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2094110A Expired - Lifetime JP2781874B2 (en) | 1990-04-11 | 1990-04-11 | Gas supply device with cylinder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2781874B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3284942B2 (en) | 1997-09-17 | 2002-05-27 | ヤマハ株式会社 | Gas leak inspection method and apparatus and recording medium |
-
1990
- 1990-04-11 JP JP2094110A patent/JP2781874B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03292497A (en) | 1991-12-24 |
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