JP2742014B2 - Fiber branch light guide switching device for high power laser - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention
The present invention relates to a switching device that branches into a plurality of optical fibers and switches to guide light.

[0002]

2. Description of the Related Art High-power laser light is used, for example, for cutting metal plates. In the prior art, in order to branch and guide a laser beam to a plurality of optical fibers, a configuration in which a beam splitter that semi-transmits the laser beam and a total reflection mirror are used. In such prior art,
It is difficult to split the laser light corresponding to an arbitrary number of optical fibers, and the combination of the beam splitter and the total reflection mirror is changed so that the laser light is split into a desired number of optical fibers. It must be reconfigured.
Further, there is a prior art (Japanese Patent Laid-Open No. Hei 3-165992) in which laser light is branched in two directions by a wedge-shaped transparent body, and this prior art also has a similar problem.

In another prior art, as is known as a laser printer, for example, a low-power laser beam is scanned at a high speed by using a galvanometer mirror. When used in connection with, the laser beam reflected and scanned by the galvanomirror may irradiate a surrounding object and cause undesired heating. There is a possibility that the coating layer made of synthetic resin that protects the fiber may be damaged.

[0004]

SUMMARY OF THE INVENTION An object of the present invention is to provide a high-power laser beam that can be accurately positioned at a desired speed at a high speed on a plurality of desired optical fibers so that the laser beam can be branched and guided. An object of the present invention is to provide a fiber branch light guide switching device for an output laser.

[0005]

SUMMARY OF THE INVENTION The present invention comprises a laser source,
A chopper that is interposed in the path of the laser light from the laser source and passes / blocks the laser light, a galvanometer mirror that reflects the laser light from the chopper, and a plurality of positions where the laser light reflected by the galvanometer mirror is guided. A plurality of optical fibers, each of which is provided with an incident surface, a Q switch provided in a laser source, and in synchronization with the operation of the Q switch, the chopper passes laser light while the Q switch is open, The galvanomirror is in a stationary state, the chopper is in a cutoff state while the Q switch suppresses oscillation, and the galvanomirror is controlled so as to move angularly displaced, and between the galvanomirror and the input end of the optical fiber. A first protection means main body 58, which is made of a heat conductive metal, has a cooling water passage formed therein, and is water-cooled, and is fixed to the first protection means main body 58. First guiding the laser light to the incident end
A metal aperture member 59 in which the opening 8 is formed;
A condenser lens 9 fixed to the opening 8, wherein the first opening 8
The first opening 8 prevents the laser beam from being incident on the support 62 on the first protection means main body 58 which is the periphery of the condensing lens 9. A second protection means main body provided between the optical lens 9 and the condenser lens and the input end of the optical fiber, and having a second opening 68 having an inner diameter d1 equal to or less than the diameter d2 of the core at the input end of the optical fiber; 66 and a plurality of temperature detecting elements 71 arranged on the surface of the second protection means main body 66 on the downstream side of the laser beam at equal intervals in the circumferential direction around the second opening 68 in the vicinity of the second opening 68. And the gas support means 72 and the housing 77
An optical fiber insertion hole 79 having an inner diameter larger than the outer diameter of the optical fiber 10 is formed in the center of the nozzle member 78 fixed to the optical fiber 10. A plurality of sets of three or more nozzle holes 80 along the direction are formed along the axis of the optical fiber insertion hole 79, and a space 81 in the housing 77 is supplied with compressed air. A gas supporting means 72 which is radially radiated onto the outer surface of the optical fiber 10 in the radial direction and supports the optical fiber 10 in a non-contact manner in the optical fiber insertion hole 79, and a laser beam downstream from the gas supporting means 72. An optical fiber is inserted and fixed in the mounting hole 85 of the protection member 84, and the protection member 84 is housed in a holding cylinder 86, Mounting holes 8 mutually orthogonal through line
On a pair of virtual straight lines 87 and 88 perpendicular to the axis of 5,
Positioning means 74 provided with a pair of combinations of springs 89 and 90 and driving elements 91 and 92, respectively, and a pair of driving elements 91,
And a processing circuit for driving the optical fiber to move the optical fiber toward a portion having a higher temperature around the second opening.

Further, according to the present invention, at a position farther from the incident end than the positioning means 74, the optical fiber is bent so that the outer surface of the optical fiber is held by the black holding surface, and the leaked light to be cooled is provided. It is characterized by including absorption means.

The present invention also provides an infrared thermometer for detecting the temperature of a laser beam output end of a laser source in a non-contact manner, and responding to the output of the infrared thermometer when the detected temperature rises to a predetermined temperature or higher. Means for suspending the oscillation of the laser source.

[0008]

[0009]

[0010]

[0011]

[0012]

[0013]

[0014]

[0015]

According to the present invention, the laser light that has passed through the chopper from the laser source is reflected by the galvanomirror, is incident on the input ends of the plurality of optical fibers, and is branched and guided. By using such a galvanometer mirror,
The laser light can be branched and guided to an arbitrary optical fiber, and the time for guiding the laser light to the incident end of each optical fiber can be individually selected.

Further, according to the present invention, while the laser beam passes through the galvanomirror via the chopper, the galvanomirror is stationary, so that the laser beam can be accurately incident on the incident end of the optical fiber. Can be. Further, during the period when the chopper is shut off, the galvanomirror is controlled so that the laser beam is being angularly moved to the input end of the optical fiber to which the laser beam is to be incident next, so that the laser beam is scanned and reflected by the galvanomirror. The light does not move continuously, thereby avoiding the laser light from being irradiated to the area other than the incident end, thereby eliminating the possibility of damaging other parts of the optical fiber other than the incident end. This is important for high-power laser light.

According to the present invention, a Q switch is used,
For example, a laser waist is provided in an optical resonator of a laser source, and the oscillation is suppressed by this Q switch, whereby the stored energy of the laser medium is sufficiently increased. As a result, a pulse laser beam with a short pulse width and a large peak value can be obtained. In synchronization with the operation of the Q switch, the operation of the chopper and the galvanomirror is synchronized, so that the pulse laser light is accurately incident on the incident end of the optical fiber, and that the other parts are irradiated with the laser light. Can be prevented. When using this Q switch, a chopper may be provided to improve safety, but it is also possible to omit the chopper.

Further, according to the present invention, the first protection means main body 58 is provided on the upstream side of the lens for condensing the laser light at the incident end of the optical fiber, and the aperture member fixed to the first protection means main body 58 First opening 8 formed in 59
Guides the laser light through the lens to the lens, thereby preventing the laser light from being guided to the periphery of the lens and damaging the lens support, and displacing the laser light from the incident end of the optical fiber near the incident end. Irradiation can be prevented, and damage to the optical fiber can be prevented. The first protection means main body 58 is cooled by water, so that the first protection means main body 5 is cooled.
When the laser beam is irradiated on the laser beam 8, the laser beam can be absorbed and cooled.

According to the present invention, the laser light passing through the lens is guided to the incident end through the second opening 68 of the second protection means main body 66, and the second opening 68 is connected to the core at the incident end of the optical fiber. It has an inner diameter d1 that is less than or equal to the diameter d2, whereby the laser light is guided only to the core and prevents light from being incident on the cladding of the optical fiber. The second protection means main body 66 may be water-cooled or air-cooled.

Further, according to the present invention, the portion near the incident end of the optical fiber is supported by gas, such as air, injected from a nozzle, and the portion near the incident end of the optical fiber is supported in a non-contact manner. Will be surfaced. Therefore, since the optical fiber is not held in a gripped state, even if the optical fiber is irradiated while being shifted from the incident end of the optical fiber, the gas supporting means 72 can be prevented from being damaged.

According to the present invention, the optical fiber is connected to the optical fiber at a position downstream of the laser beam farther from the incident end than the gas supporting means 72, that is, at a position opposite to the incident end with respect to the gas supporting means. It is supported by positioning means abutting the outer surface. This makes it possible to position the optical fiber by displacing it in the radial direction, thereby setting the position of the incident end accurately and accurately guiding the laser light reflected by the galvanometer mirror to the core. I do.

According to the present invention, the temperature detecting element 71 is provided around the second opening 68 of the second protection means main body 66 and in the vicinity of the second opening, so that the temperature detection element 71 is deviated from the second opening and irradiated to the second protection means main body. When the temperature of the second protection means body rises due to the laser light, the temperature is detected by the temperature detecting element, and the position where the temperature detected by the temperature detecting element is high so that the laser light is incident on the incident end. The incident end is moved and positioned by the positioning means 74 so as to approach. In this way, the laser beam is made to enter the incident end as much as possible.

According to the present invention, the leakage light absorbing means is provided at a position farther from the incident end than the positioning means, and thus at a position opposite to the incident end with respect to the positioning means,
This leaking light absorbing means bends the optical fiber, so that the light in the cladding escapes through the cladding and leaks, and thus the light leaking outward through the cladding is absorbed by the black holding surface of the leaking light absorbing means. You. Therefore, the coating layer made of the flexible synthetic resin that covers the optical fiber on the side opposite to the incident end with respect to the leaked light absorbing means is prevented from being burned out by the laser light leaking from the clad. This leaked light absorbing means is water-cooled or air-cooled.

Further, according to the present invention, the temperature of the laser light output end of the laser source is detected in a non-contact manner using an infrared thermometer, and when the detected temperature rises above a predetermined temperature, Oscillation is halted. For example, when the laser source is an iodine laser source, the supply of the laser medium gas is halted and laser oscillation is stopped. Accordingly, when the temperature rises compared to the steady state at the time of abnormality, such as when the output mirror of the gas laser source becomes dirty, monitoring is performed so as to determine that an abnormality has occurred and to stop laser oscillation.

[0025]

FIG. 1 is a system diagram showing an entire configuration of an embodiment of the present invention. Infrared laser light from the iodine laser source 1 passes through the beam shaping device 3 from the safety shutter 2 and is reflected by the reflecting mirror 4.
The light is cut off, reflected by the galvanomirror 6, passes through the first opening 8 of the first protection means 7 and the condenser lens 9, and
Second protection means 57 (see FIGS. 13 and 15 described later)
The light is selectively incident on the incident end 11 of the optical fiber 10 through the opening 68. In the embodiment shown in FIG. 1, for example, a total of three optical fibers 10 are provided, and a plurality of other optical fibers may be provided. The laser light from the optical fiber 10 is irradiated from the connection optical system 108 to the workpiece 109 to perform a cutting process or the like.

FIG. 2 is a simplified sectional view showing the configuration of the iodine laser source 1. As shown in FIG. The airtight laser resonator 13 includes:
A reflection mirror 14 and an output mirror 15 are provided, and the laser resonator 1
3, an iodine gas, which is a laser medium, is supplied from an iodine gas source 16 via a solenoid valve 17 via a conduit 18,
Also, excited oxygen is supplied, and a laser beam 19 is generated. At a position corresponding to the beam waist of the laser beam 19, a shutter member 21 of the Q switch 20 is interposed.

FIG. 3 is a front view of the shutter member 21. The shutter member 21 is made of, for example, metal, and is rotationally driven by a motor 22 in the direction of an arrow 23. The shutter member 21 has a disk shape and has, for example, a circular opening 2.
4 are formed, and two detection through holes 25 and 26 for detecting the rotational position of the shutter member 21 are formed. These detection through holes 25 and 26 are
And is provided on the imaginary circle centered on the rotation axis 27 at intervals in the circumferential direction. These detection through holes 25 and 26 pass light from the light emitting element 28 disposed on one side in the thickness direction of the shutter member 21,
When the light is detected by the light receiving element 29 or the light is blocked, the angular position of the shutter member 21 is detected. The shutter member 21 is driven by the motor 22.
When the laser beam 19 starts passing through the opening 24 in a state in which the light-emitting element 28 is continuously rotated,
Is detected by the light receiving element 29 through the detection through hole 25, and when the laser beam 19 does not pass through the opening 24 and the cutoff is started, the detection through hole 26
Is passed from the light emitting element 28 to the light receiving element 29 and detected.

While the Q switch 20 is suppressing oscillation,
That is, during the period when the laser beam 19 is in a portion other than the opening 24, the laser beam 19 is cut off, the oscillation is suppressed, and the energy stored in the laser medium is increased.

FIG. 4 is a perspective view of the beam shaper 3.
A laser beam 30 having a circular cross section from the laser source 1 is converged and shaped into a laser beam 31 having a rectangular cross section by a beam shaper realized by, for example, a cylindrical lens.
The beam cross-section is reduced, so that the components of the subsequent light path, such as the galvanomirror 6, can be miniaturized.

FIG. 5 is a sectional view showing the structure of the chopper 5. In the chopper 5, a chopper member 32 realized by a metal disk is continuously driven to rotate by a motor 33, so that the laser light passes through the opening 34 and the laser light is cut off at the remaining portion.

FIG. 6 is a front view of the chopper member 32. The chopper member 32 is also located at a position radially outward of the opening 34 in the same manner as the shutter member 21 described above.
One of the detection through holes 35 and 36 is formed, and light from the light emitting element 37 shown in FIG.
The time when the laser beam starts to pass through the aperture 34 of the laser beam and the time when the laser beam begins to block are detected in correspondence with the detection through holes 35 and 36, respectively.

In order to cool the chopper member 32, nozzles 39 and 40 are respectively arranged on both sides in the thickness direction of the chopper member 32, and a cooling gas, for example, a gas such as Ar or He is injected. The positions of the nozzles 39 and 40 are at the same position as the opening 34 from the rotation axis 41 of the chopper member 32.

FIG. 7 shows a chopper 5 according to another embodiment of the present invention.
3 is a simplified sectional view of FIG. In this embodiment, in order to cool the chopper member 32, cooling rollers 42, 43 are arranged on both sides in the thickness direction, and the rollers 42, 43
Is resiliently pressed against the surface of the chopper member 32 by the spring force of the spring. The cooling rollers 42 and 43 are made of a metal such as copper or aluminum, which is a good heat conductor, and are located at the same position as the opening 34 from the rotation axis 41. Other configurations are the same as those of the above-described embodiment.

FIG. 8 is a simplified side view showing the configuration of the galvanometer mirror 6, and FIG. 9 is a bottom view of the galvanometer mirror 6. Referring to these drawings, reflection surface 44 of reflector 43 of galvanometer mirror 6 is formed of a dielectric multilayer film or a coating layer of a highly reflective material such as aluminum, silver, or gold. The reflector 43 is fixed to a holder 45, and a cooling fin 47 perpendicular to the rotation axis 46 is integrally formed on the holder 45 on the back surface of the reflector 43. The holder 45 is moved by electromagnet means 48 or the like.
It can be angularly displaced around the axis 46 by a desired angle within the reciprocating movable range θ1. Axis 46 is within reflective surface 44. By flowing air or an inert gas along the fins 47, the cooling effect can be enhanced. In order to enable the reflector 43 and the holder 45 to be angularly displaced at a high speed, the components 43 and 45 need to be configured as lightly as possible.

FIG. 10 is a block diagram showing the electrical configuration of the embodiment shown in FIGS. The processing circuit 49
For example, it is realized by a microcomputer,
Driving the light emitting elements 28 and 37 and responding to the output of the light receiving elements 29 and 38,
Is operated, and the motor 35 of the chopper 5 is operated,
Further, the electromagnet means 48 of the galvanometer mirror 6 is operated. The processing circuit 49 supplies a switching signal to the analog switch 54, whereby the output voltage from the power supply circuit 55 is switched and supplied to the electromagnet means 48 of the galvanomirror 6. In the power supply circuit 55, a plurality of resistors 56 are connected in series to divide a constant voltage V1, and the reflector 43 is driven for angular displacement by an angle corresponding to this voltage value. 10 is incident.

FIG. 11 is a waveform diagram for explaining the operation of the above embodiment. Q switch 2 in laser source 1
At 0, when the motor 22 is rotating the shutter member 21, the light-receiving element 29 detects the detection through-hole 25 at time t1 in FIG. 11 (1), and thereafter, the time shown in FIG. 11 (2). At t2, the laser beam 19 passes through the opening 24 of the shutter member 21 and oscillates, thereby generating a pulse laser beam 30 having a large peak value as shown in FIG.

In synchronism with the output of the light receiving element 29, the chopper 5 controls the motor 33 as shown in FIG.
The laser beam 31a passes through the opening 34 of the chopper member 32 driven by the laser.

The holding member 45 of the galvanometer mirror 6, that is, the reflecting member 43 synchronizes with the output of the light receiving element 29, and
The angular displacement movement is performed as shown in (5), and the stationary state is maintained after time t1a. As a result, the laser beam 31a from the reflecting mirror 4 is reflected on the reflecting surface 44 of the galvanometer mirror 6, and can be accurately incident on the predetermined incident end 11 of the optical fiber 10.

After time t3 (see FIG. 11 (2)) at which the shutter member 21 blocks the laser beam 19 in the laser source 1, the detection through hole 26 of the shutter member 21 is moved to the state shown in FIG. 11 (1) at time t4. By being detected as shown, the chopper 5 starts to block the laser beam 31a, and the holder 45 of the galvanomirror 6, and thus the reflector 43, remains stationary. Hereinafter, a similar operation is performed. In FIG. 1, the optical fiber is
The incident ends are indicated by reference numerals 11, 11a and 11b, and the suffixes a and b may be omitted when generically indicated.

In the state where the pulse laser beam 30 is generated at least from time t2 to time t3, the reflector 43 of the galvanomirror 6 is stationary, so that the laser beam is not scanned, and the incidence end 11 , 11
There is no possibility that the laser beam is accurately incident on the a and 11b and the other undesired portions are irradiated with the laser beam to cause damage.

More specifically, referring to FIG. 12, which is simplified, when the reflecting surface 44 of the galvanometer mirror 6 is stationary, the laser beam 31a is turned off as indicated by reference numeral 50. The light passes through the first opening 8 of the first protection means 7, passes through the condenser lens 9, and is accurately incident on the incident surface 11 of the optical fiber 10. If it is assumed that the laser light 31a is irradiated on the reflection surface 44 at the position 143 where the reflection surface 44 of the galvanometer mirror 6 is moving angularly displaced, the laser light indicated by the reference numeral 51 is applied to the first protection means. 7 is reflected and guided toward the first opening 8, and a part of the light 52 is
Through the condenser lens 9 to the optical fiber 10 side.
After passing through the lens 9, such laser light 50 is guided to a position different from the incident end 11 as indicated by reference numeral 53, and therefore is not incident on the incident end 11, and Will result in damage. The present invention solves such a problem, and the reflecting surface 44 of the galvanometer mirror 6 is provided.
Guides the reflected laser light 50 in a stationary state, and allows the laser light 50 to be accurately incident on the incident end 11.

FIG. 13 is a cross-sectional view showing a configuration related to the first protection means 7 and the second protection means 57 disposed downstream thereof. The first protection means 7 is arranged between the galvanomirror 6 and the incident end 11 of the optical fiber 10, and an aperture member 59 is fixed to a main body 58 made of a heat conductive metal such as copper. 59 has the first
An opening 8 is formed. A condenser lens 9 is fixed to the first opening 8. The aperture member 59 is made of metal such as steel having excellent heat resistance. The surface of the main body 58 on the galvanometer mirror 6 side is formed with a coating layer 60 that is dyed black, so that even if the laser beam is irradiated, it is easily absorbed. A cooling water passage 61 is formed in the main body 58.

FIG. 14 is a development view of the main body 58 of the first protection means 7, as viewed from the galvanomirror 6 side. The cooling water passage 61 formed in the main body 58 has a zigzag shape, and cooling water is supplied from the pipe line 61a to cool the main body 58 with water.

The first opening 8 formed in the main body 58 prevents the laser beam from being erroneously incident on the support portion 62 on the main body 58, which is the periphery of the lens 9, and the support portion 62 is damaged by the laser beam. It works to prevent The main body 58 has a cylindrical body 63.
Is fixed, and a laser beam 64 from the lens 9 is guided, and a holding body 65 is fixed to the cylindrical body 63.

The second protection means 57 is fixed to the holder 65. The second protection means 57 is shown in an enlarged manner in FIG. A layer 67 of a highly reflective material is formed on the surface of the main body 66 of the second protection means 57 on the side of the condenser lens 9.
The main body 66 is made of a material such as gold, silver, and aluminum, and the reflection layer 67 is made of gold or silver,
Laser light is reflected with high reflectance. This second protection means 57
Is fixed to the holder 65 and has a second opening 68. The inner diameter d1 of the second opening 68 is selected to be equal to or less than the diameter d2 of the core 69 of the optical fiber 10. The core 69 is covered by the cladding 70, thus forming the optical fiber 10.

D 1 ≦ d 2 (1) By forming the reflective layer 67 on the main body 66, even if a laser beam is irradiated on the reflective layer 67, the temperature of the second protection means 57 abnormally increases. Although this is prevented, the body 66 may be further water-cooled or air-cooled if necessary. On the surface of the main body 66 opposite to the reflection layer 67, that is, on the surface on the downstream side of the laser beam 50, temperature detecting elements 71a to 71d (see FIG. 19 described later, which may be generally indicated by reference numeral 71) are provided. Laser light 64
Is guided into the second opening 68, and when the second protective means 57 is not erroneously irradiated, the detection temperature is low, but the positioning of the laser beam is inaccurate and at least partially. When the light is applied to the reflective layer 67, the temperature of the main body 66 rises, and this is detected by the temperature detecting means 71. As a result, the position of the optical fiber 10 is displaced as described later, and the optical fiber 10 is displaced so that as much laser light as possible enters the core 69.

FIG. 16 shows gas supporting means 72 and 73 for the optical fiber 10 attached to the holder 65 and positioning means 74 for positioning the optical fiber 10 in the radial direction.
And light leakage absorbing means 75 called a scrambler or the like.
FIG. 76 is a diagram schematically illustrating 76.

FIG. 17 is a sectional view of the gas supporting means 72 taken along the axis of the optical fiber 10, and FIG. 18 is a sectional view of the gas supporting means 72 taken at right angles to the axis. An optical fiber 10 is provided at the center of the nozzle member 78 fixed to the housing 77.
Optical fiber insertion hole 79 having an inner diameter larger than the outer diameter of
Are formed, and three or more nozzle holes 8 extending in the radial direction at equal intervals in the circumferential direction facing the optical fiber insertion hole 79.
0 along the axis of the optical fiber insertion hole 79, a plurality of sets,
It is formed. Compressed air is supplied from a connection port 82 to a space 81 in the housing 77. In this way, the compressed air is jetted radially radially outward on the outer surface of the optical fiber 10 so that the optical fiber 10 is inserted into the insertion hole 79.
It is supported without contact within. Since the optical fiber 10 is not directly contacted and supported as described above, light leaks outward through the clad 70 of the optical fiber 10 or the position of the laser light from the galvanometer mirror 6 via the lens 9 is erroneously set. When the gas support means 72 is shifted,
However, it is prevented from being damaged by the laser beam.
Another gas support means 73 is similarly configured.

FIG. 19 is a sectional view of the positioning means 74. The optical fiber 10 is inserted and fixed in the mounting hole 85 of the holding member 84. The holding member 84 is housed in a holding tube 86, and springs 89, 90 and drive elements 91, 92 are mounted on virtual straight lines 87, 88 passing through the axis of the optical fiber 10. The driving elements 91 and 92 may be, for example, piezoelectric elements or the like, and may be realized by a configuration having another displacement driving mechanism. Straight line 8
7, 88 are perpendicular to each other and perpendicular to the axis of the mounting hole 85.

The temperature detecting elements 71 described with reference to FIG. 15 are spaced at equal intervals in the circumferential direction around the second opening 68, for example, at 90 ° intervals in this embodiment. It is arranged near the two openings 68. Outputs from these temperature detecting elements 71 are provided to a processing circuit 94 realized by a microcomputer or the like, and the processing circuit 94 drives the driving elements 91 and 92. In this way, the operation of the driving elements 91 and 92 is controlled so that the optical fiber 10 is displaced toward the portion having a higher temperature around the second opening 68 so that the optical fiber 10 receives as much laser light as possible. The control means 94 is supplied with a signal from the manual input means 95, and the operation of the driving elements 91 and 92 can also be controlled by this. Thus, the optical fiber 10
Can be displaced in the X-axis direction along the straight line 88 and the Y-axis direction along the straight line 87 in FIG. In the Z-axis direction of the optical fiber 10, the holding member 84 is initially set and fixed to the optical fiber 10. Therefore, the input end 11 of the optical fiber 10 and the axis of the optical fiber 10 can be made to coincide with the optical axis of the lens 9, and the displacement can be driven so that the laser light can be accurately incident on the core 69 of the optical fiber 10.

The driving elements 91 and 92 can be realized by a giant magnetostrictive element, an electric micromotor and other structures in addition to the above-described piezoelectric element.

FIG. 20 is an enlarged sectional view of the leak light absorbing means 75, and FIG. 21 is an exploded perspective view of the leak light absorbing means 75 and 76. In the leaked light absorbing means 75, a pair of clamp members 97, 98 are provided, and their curved bulges 99, 100 are alternately arranged in the longitudinal direction of the optical fiber 10, and both 97, 98 are bolted 101 and nut 10
They are connected and held by a combination of the two. The holding surface of each of the raised portions 99 and 100 is formed in black, and FIG.
As shown in (1), the light leaked to the clad 70 is guided outward, and the holding members 97 and 98 absorb the laser light leaked. The holding members 97 and 98 are made of, for example, a good heat conductor such as copper, and have cooling water passages 103 and 110 formed therein. Although the other leaked light absorbing means 76 has the same configuration, the optical fiber 10 of these two leaked light absorbing means 75
22A are perpendicular to each other. Thus, the laser beam propagating through the clad 70 of the optical fiber 10 as shown in FIG. 22A is removed, and only the core 69 propagates as shown in FIG. Limited to laser light. Thereby, the side opposite to the incident end 11 with respect to the leakage light absorbing means 76 (FIG. 1)
6) (right side of FIG. 6), the laser light leaks into the flexible synthetic resin covering layer 105 surrounding the cladding 70, and the covering layer 1
05 and other parts will not be damaged.
The portion of the leaked light absorbing means 76 corresponding to the leaked light absorbing means 75 is denoted by a suffix a and will not be described.

The leakage light absorbing means 75 and 76 are
Optical fiber portion 107 near the exit end of optical fiber 10
(See FIG. 1) may also be provided. By providing means similar to the leaked light absorbing means 75 and 76 also in the optical fiber portion 107, the laser light reflected from the processing member 109 and returned and propagates through the clad 70 is guided outward to absorb the laser light. Work. The laser beam from the optical fiber portion 107 is applied to the workpiece 109 from the imaging optical system 108 to perform, for example, metal cutting.

As another embodiment of the present invention, the holding member 9
7, 98 may be water-cooled, but may be air-cooled.

FIG. 23 is a partial sectional view of another embodiment of the present invention, and FIG. 24 is a perspective view showing the outer shape thereof. The leaked light absorbing means 111 of this embodiment has a housing 112 which hermetically surrounds the clad 70 of the optical fiber 10 and has therein a medium 113 having the same refractive index as the clad 70.
Is enclosed. Such a medium is introduced from the inlet 114 of the housing 112, discharged from the outlet 115, cooled by the cooling means 116, circulated using the pump 117, and can radiate heat. The medium 113 may be, for example, water glass. Such a leaked light absorbing unit 111 can be used in place of the leaked light absorbing units 75 and 76 described above.

FIG. 25 is a simplified cross-sectional view showing a configuration related to the laser source 1. According to the present invention, in order to prevent the temperature of the output mirror 15 of the laser source 1 from becoming abnormally high due to contamination, the temperature of the laser beam transmitting portion of the output mirror 15 is measured in a non-contact manner using an infrared thermometer 120. To detect. The iodine laser light 30 has a wavelength of 1.315 μm. The infrared thermometer 120 detects the intensity of light having a wavelength of, for example, 2 to 5 μm, and is selected to have a configuration in which the detection sensitivity of the laser light 30 is zero or small.
If the surface of the output mirror 15 becomes dirty when the laser source 1 is operated continuously, for example, at time t as shown in FIG.
At 20, the output mirror 15 accurately reflects the state of the dirt.
Is rapidly increased from the value T21.

FIG. 27 is a block diagram showing an electrical configuration related to infrared thermometer 120. Level discrimination circuit 1
21 performs level discrimination of the output of the infrared thermometer 120 and, when the temperature rises to a predetermined abnormally high temperature T21 or higher, activates the driving means 122, and this driving means 122 operates the electromagnetic on-off valve shown in FIG. Block 17 Thereby, the laser oscillation of the laser source 1 is stopped. When the output mirror 15 is contaminated, the laser beam 30 emitted from the output mirror 15
Changes the mode or the divergence angle, and changes the condition of the optical fiber light guiding portion on the downstream side. Therefore, when the abnormality of the output mirror 15 is detected as described above, the operation of the laser source 1 is stopped.

Referring again to FIG. 1, in order to manually adjust the optical axis of optical fiber 10, red laser beam 125, which is visible light, is emitted from He-Ne laser source 124, and is transmitted through a semi-transmissive mirror. From 129, the light is guided to the chopper 5 and the galvanomirror 6 through the transflective reflecting mirror 4. The laser light 125 is incident on the incident end 11 of the optical fiber 10, irradiates the workpiece 109 through the optical fiber 10, passes through the imaging optical system 108, and thereby emits light at the incident end 1.
1 and the processing position can be confirmed. In addition, such a visible laser beam is observed by the television camera 126, and the input means 95 (see FIG. 19 described above) is operated.
The incident end 11 of the optical fiber 10 is
It is possible to fine-tune the nearby position.

Further, using this television camera 126,
It is also possible to take an image of the vicinity of the incident end 11 of the optical fiber 10 and display it on the monitor display means 127, and thus observe the surface of the incident end 11. This TV camera 126
Can observe the incident end 11 through the transflective mirror 129 and the reflecting mirror 4 and from the galvano mirror 6 through the lens 9. When an abnormality occurs in the incident end 11 and the abnormality is displayed on the monitor display means 127 and observed, the shutter means 2 is closed to shut off the laser light, and an electromagnetic switching valve provided in relation to the laser source 1 17 is stopped to stop oscillation. The angle of the reflecting mirror 4 can be adjusted by the position adjusting means 130.

[0060]

As described above, according to the present invention, a laser beam from a laser source is guided to a galvanometer mirror by a chopper, and the laser beam reflected by the galvanometer mirror is applied to each input end of a plurality of laser beams. Since the laser beam is incident, the laser beam can be moved at high speed and branched and guided to each optical fiber.

Furthermore, since the galvanomirror is caused to move angularly only when the laser beam is cut off by the chopper, the light reflected by the galvanomirror is applied to portions other than the input end of the optical fiber. Therefore, the problem that the high-output laser light is irradiated to a portion other than the input end to cause damage is eliminated.

Further, according to the present invention, a Q switch is provided in the laser source so as to generate a pulse laser beam having a large peak value, and this pulse laser beam is supplied to the input end of an optical fiber via a chopper and a galvanometer mirror. The laser light with a high peak value can be guided to the optical fiber, and the pulse laser light with such a high peak value is irradiated to parts other than the input end, causing damage. No problem.

Further, according to the present invention, the first member of the aperture member 59 fixed to the first protection means main body 58 to be water-cooled.
The laser light is guided from the condenser lens to the input end through the opening 8, so that the laser light does not damage the support at the periphery of the lens, and undesirably extends to an area other than the input end of the optical fiber. Irradiation can be suppressed as much as possible.

According to the present invention, the second protection means main body 66 is interposed between the lens and the incident end, and the second opening 68 has an inner diameter d1 smaller than the core diameter d2. Is prevented from being incident on the cladding and other portions, and burning due to the laser light can be prevented.

According to the present invention, the portion of the optical fiber near the incident end can be supported in a non-contact manner by the gas supporting means, so that even if the laser beam is displaced from the core, the optical fiber can be supported. Damage to the supporting gas support means is avoided.

According to the present invention, a temperature detecting element is provided around the second opening, and a positioning operation near the input end of the optical fiber is performed in response to the output of the temperature detecting element.
Therefore, it becomes possible to guide the laser light to the core as much as possible. That is, the processing circuit includes the temperature detection element 71
In response to the output, the pair of driving elements 91 and 92 are driven, and the optical fiber is displaced toward the portion where the temperature around the second opening 68 is high. Thereby, as described above, the laser beam can be guided to the core of the optical fiber as much as possible.

Further, according to the present invention, at a position farther from the incident end than the positioning means, the optical fiber is bent at the holding surface to hold the outer surface, whereby the laser light in the clad is directed outward. Since the holding surface is black, the laser light is absorbed by the holding surface. Therefore, it is possible to surely prevent the laser light from leaking out of the clad on the downstream side from the leaked light absorbing means and damaging the flexible synthetic resin coating layer covering the clad layer.

Further, according to the present invention, the temperature of the output end of the laser beam is detected in a non-contact manner with an infrared thermometer, and when the detected temperature rises above a predetermined temperature, the oscillation of the laser source is stopped, As a result, it is possible to prevent the output terminal from being broken due to an abnormal temperature due to dirt or the like.

[Brief description of the drawings]

FIG. 1 is a system diagram showing an entire configuration of an embodiment of the present invention.

FIG. 2 is a simplified cross-sectional view showing a configuration of an iodine laser source 1.

FIG. 3 is a front view of a shutter member 21.

4 is a perspective view of the beam shaper 3. FIG.

FIG. 5 is a sectional view showing the configuration of the chopper 5.

6 is a front view of the chopper member 32. FIG.

FIG. 7 is a simplified sectional view of a chopper 5 according to another embodiment of the present invention.

FIG. 8 is a simplified side view showing the configuration of the galvanometer mirror 6;

9 is a bottom view of the galvanometer mirror 6. FIG.

FIG. 10 is a block diagram showing an electrical configuration of the embodiment shown in FIGS. 1 to 9;

FIG. 11 is a waveform chart for explaining the operation of the aforementioned embodiment of the present invention.

FIG. 12 is a simplified cross-sectional view showing a path of a laser beam by a galvanomirror 6;

FIG. 13 is a cross-sectional view showing a configuration related to the first protection means 7 and the second protection means 57 disposed downstream thereof.

FIG. 14 is a development view of a main body 58 of the first protection means 7;

FIG. 15 is an enlarged sectional view showing a part of the second protection means 57.

FIG. 16 shows an optical fiber 1 attached to a holder 65.
It is a figure which shows simplified gas support means 72, 73 of 0, etc.

FIG. 17 is a sectional view taken along the axis of the optical fiber 10 showing the gas supporting means 72.

FIG. 18 is a sectional view perpendicular to the axis of the gas supporting means 72.

FIG. 19 is a sectional view of the positioning means 74.

FIG. 20 is an enlarged sectional view of the leakage light absorbing means 75.

FIG. 21 is an exploded perspective view of leakage light absorbing means 75 and 76.

FIG. 22 is a partially enlarged cross-sectional view showing a state in which laser light propagates in the optical fiber 10, and FIG.
FIG. 22 is a diagram showing a state where laser light leaks from FIG. 9 to the cladding 70, and FIG. 22 (2) is a diagram showing a state where laser light propagating through the cladding 70 has been removed.

FIG. 23 is a partial sectional view of another embodiment of the present invention.

FIG. 24 is a perspective view showing an outer shape of the embodiment shown in FIG. 23;

FIG. 25 is a simplified cross-sectional view showing a configuration related to the laser source 1.

FIG. 26 is a graph showing dirt on the surface of the output mirror 15 and the temperature rise on the surface.

FIG. 27 is a block diagram showing an electrical configuration related to the infrared thermometer 120.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Iodine laser source 2 Safety shutter 3 Beam shaper 5 Chopper 6 Galvanometer mirror 7 First protection means 8 First opening 9 Condensing lens 10 Optical fiber 11, 11a, 11b Incident end 20 Q switch 21 Shutter member 32 Chopper member 43 reflector 48 electromagnet means 49 processing circuit

 ──────────────────────────────────────────────────続 き Continuation of front page (72) Inventor Akira Hayakawa 3-1-1, Higashikawasaki-cho, Chuo-ku, Kobe-shi, Hyogo Kawasaki Heavy Industries, Ltd. Kobe Plant (56) References JP-A-63-179313 (JP, A ) JP-A-63-73218 (JP, A)

Claims (3)

(57) [Claims] 1. A laser source, a chopper that is interposed in a path of laser light from the laser source and passes / blocks the laser light, a galvanomirror that reflects the laser light from the chopper, and a laser that is reflected by the galvanomirror A plurality of optical fibers each having an incident surface disposed at each of a plurality of positions where light is guided; a Q switch provided in a laser source; and a period in which the Q switch is opened in synchronization with the operation of the Q switch. Means for controlling the chopper to pass laser light, the galvanomirror to be stationary, the Q switch to suppress oscillation while the Q switch is suppressing the oscillation, and the galvanomirror to perform angular displacement movement; and a galvanomirror. A first protection means main body 58 which is provided between the optical fiber and the incident end of the optical fiber, is made of a heat conductive metal, has a cooling water passage formed therein, and is water-cooled; (1) a metal aperture member (59) fixed to the protection means main body (58) and having a first opening (8) for guiding a laser beam to the incident end, and a condenser lens (9) fixed to the first opening (8); The laser beam from the opening 8 is focused on the incident end, and the first opening 8
The first protection means main body 5 which is the peripheral edge of the condenser lens 9
A condensing lens 9 for preventing the laser beam from being incident on the supporting portion 62 to the supporting member 8; a core diameter d2 provided between the condensing lens and the incident end of the optical fiber; A second protective means main body 66 in which a second opening 68 having the following inner diameter d1 is formed, and a second laser light downstream surface of the second protective means main body 66
A plurality of temperature detecting elements 71 arranged at regular intervals in the circumferential direction around the second opening 68 in the vicinity of the opening 68; and a nozzle member 78, which is gas supporting means 72 and fixed to the housing 77. An optical fiber insertion hole 79 having an inner diameter larger than the outer diameter of the optical fiber 10 is formed in the center of the optical fiber 10, and a large number of three or more radially extending radially at equal intervals facing the optical fiber insertion hole 79 in the circumferential direction. Nozzle hole 80
A plurality of sets are formed along the axis of the optical fiber insertion hole 79, and compressed air is supplied to the space 81 in the housing 77, and the compressed air is directed radially to the outer surface of the optical fiber 10. A gas support means 72 which is jetted symmetrically and supports the optical fiber 10 in a non-contact manner in the optical fiber insertion hole 79; and a positioning means 74 which is disposed downstream of the gas support means 72 on the laser beam side. Mounting hole 85 for member 84
An optical fiber is inserted and fixed in the protective member 8.
The springs 89 and 90 and the drive element 91 are accommodated in a pair of virtual straight lines 87 and 88 which are housed in a holding cylinder 86 and are orthogonal to each other and pass through the axis of the optical fiber and are perpendicular to the axis of the mounting hole 85. , 92, and a pair of driving elements 9 responsive to the output of the temperature detecting element 71.
And a processing circuit for driving the first and second optical fibers to move the optical fiber toward a portion having a higher temperature around the second opening. 2. At a position farther from the incident end than the positioning means 74, the optical fiber is bent so that the outer surface of the optical fiber is held by a black holding surface, and the leaked light absorbing means to be cooled is provided. 2. The fiber-branched light-guiding switching device for a high-power laser according to claim 1, further comprising: 3. An infrared thermometer for detecting the temperature of a laser beam output end of a laser source in a non-contact manner, and responding to the output of the infrared thermometer, and detecting the temperature of the laser source when the detected temperature rises to a predetermined temperature or higher. 3. The fiber-branched light-guiding switching device for a high-power laser according to claim 1, further comprising means for stopping oscillation.