JP2704157B2 - Magnetic parts - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic component using a soft magnetic alloy.

[0002]

2. Description of the Related Art Conventionally, crystalline materials such as permalloy and ferrite have been used for magnetic cores used at high frequencies such as switching regulators. However,
Permalloy has the drawback that iron loss at high frequencies increases because of its low specific resistance.

Further, ferrite has a small loss at high frequencies, but also has a low saturation magnetic flux density of at most 5 kG. Therefore, when used at a high magnetic flux density, it becomes close to saturation, resulting in an increase in iron loss. have.
In recent years, magnetic cores used at high frequencies, such as power transformers used in switching regulators, smoothing choke coils, and common mode choke coils, have been required to be smaller in shape. In this case, it is necessary to increase the operating magnetic flux density. Therefore, an increase in iron loss of ferrite is a serious problem in practical use.

[0004] For this reason, amorphous alloys having no crystal structure have recently attracted attention because they exhibit excellent soft magnetic properties such as high magnetic permeability and low coercive force, and some of them have been put to practical use. These amorphous alloys are based on Fe, Co, Ni, etc.
P, B, C, Al and the like are included.

[0005] However, not all of these amorphous alloys have low iron loss in the high frequency range. For example, an Fe-based amorphous alloy is inexpensive, and shows a very small iron loss of about 1/4 of silicon steel in a low frequency range of 50 to 60 Hz in a low frequency range, but significantly large iron loss in a high frequency range of 10 to 50 kHz. It is not suitable for use in high frequency range such as switching regulator. Therefore, in order to improve this, by replacing a part of Fe with a nonmagnetic alloy such as Nb, Mo, Cr, etc., the magnetostriction is reduced to achieve low iron loss and high magnetic permeability. However, for example, the deterioration of the magnetic properties due to the shrinkage of the resin at the time of resin molding is relatively large, and sufficient properties have not been obtained as a soft magnetic material used in a high frequency range.

On the other hand, Co-based amorphous alloys have been put to practical use in magnetic components for electronic devices such as saturable reactors because of their low iron loss and high squareness in the high frequency range, but their cost is relatively high. It is expensive.

In magnetic recording in storage devices such as audio, video, and computers, the coercive force of magnetic recording media has been increasing with the recent increase in density, and a high saturation magnetic flux density has been used as a magnetic head material that can cope with this. The development of wood is desired. At present, ferrite, permalloy, sendust, Co-based amorphous alloy and the like are used as this material.

Here, ferrite has good wear resistance, but has a low saturation magnetic flux density of 5 kG at most, and permalloy has a saturation magnetic flux density of about 8 kG, which is not sufficient yet, and there remains a problem in wear resistance. I have. In Sendust, the composition having the best soft magnetic properties has a saturation magnetic flux density of about 10 kG.
12-13k by nitriding with NbZr-based alloy
The saturation magnetic flux density can be increased to G. However, even with these alloys, a higher saturation magnetic flux density is desired.

[0009]

As described above, as described above,
Although an Fe-based amorphous alloy is an inexpensive soft magnetic material, it has relatively large magnetostriction, and is inferior in iron loss and magnetic permeability as compared with a Co-based amorphous alloy, and has a problem in use in a high frequency range.

On the other hand, although the Co-based amorphous alloy has good magnetic properties, it is not industrially advantageous due to the high price of the material.

Accordingly, an object of the present invention is to provide a magnetic component made of a soft magnetic alloy having a high saturation magnetic flux density and excellent magnetic properties in a high frequency region in view of the above problems.

[0012]

The first magnetic component of the invention of the SUMMARY OF THE INVENTION The present invention relates to compounds of the general ^{formula; T a M b M 'c} M "d Y e (T;
At least one selected from Fe, Co, and Ni; M; C
at least one selected from u, Ag, Au, Zn, Sn, Pb, Sb, Bi; M '; at least one selected from Zr, Hf, Nb; M "; Ti, V, T
a, at least one selected from Cr, Mo, W, Mn, Al; Y; at least one selected from Si, P, B, C, a + b + c + d + e = 100 (atomic%), 0.01 ≦ b ≦ 5 (atomic%), 3 ≦ c ≦ 18 (atomic%), 0 ≦ d ≦ 5 (atomic%), 0.01 ≦ e ≦ 15
(Atomic%)), characterized by using a soft magnetic alloy having fine crystal grains, high saturation magnetic flux density and excellent soft magnetic properties.

A magnetic component according to a second aspect of the present invention includes:
In the magnetic component of the first invention, the fine crystal grains are present in the alloy in an area ratio of 30% or more, in which the crystal grain size is 50 to 30%.
It is characterized in that at least 80% of 0 angstrom crystals are present.

Further, a magnetic component according to a third aspect of the present invention includes:
The soft magnetic alloy used for the magnetic component of the first and second inventions is a thin ribbon.

A magnetic component according to a fourth aspect of the present invention includes:
The soft magnetic alloy used for the magnetic component of the first and second inventions is a thin film.

According to the above configuration, it is possible to obtain a magnetic component having a high saturation magnetic flux density in a high frequency region and using a soft magnetic alloy having excellent soft magnetic characteristics and having excellent magnetic characteristics.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The reasons for limiting the composition of the soft magnetic alloy used for the magnetic component of the present invention and the reasons for limiting the fine crystal grains will be described.

M is an element effective for improving corrosion resistance and preventing coarsening of crystal grains and improving soft magnetic properties such as iron loss and magnetic permeability.

However, if the content is too small, the effect of the inclusion cannot be obtained, and if the content is too large, the magnetic properties deteriorate, so the content is made 0.01 to 5 atomic%. Preferably it is 0.02 to 4.5 atomic%, more preferably 0.5 to 4 atomic%. Also, among M, Cu, A
g, Au, and Sn are preferable for improving soft magnetic characteristics. The alloy becomes brittle when the content of Cu is 3 atomic% or more, and therefore, when Cu is contained, the content of only Cu should be 0.01 atomic% or more and less than 3% atomic%. Is preferred.

M 'is effective for non-crystallization by ultra-quenching and uniformity of crystal grain size, reduces magnetostriction and magnetic anisotropy to improve soft magnetic properties, and further improves magnetic properties against temperature change. It is an effective element for improvement.

However, if the amount is too small, non-crystallinity is not obtained and the effect of addition is not obtained. Conversely, if the amount is too large, non-crystallization is not performed, and the saturation magnetic flux density is further reduced. And its amount was 3 to 18 atomic%. Preferably it is 5 to 12 atomic%.

M ″ is effective in uniformizing the crystal grain size similarly to M ′, and is effective in reducing magnetostriction and magnetic anisotropy to improve soft magnetic characteristics, and also in improving magnetic characteristics against temperature change. Element.

However, if the amount is too large, non-crystallization will not occur and the saturation magnetic flux density will further decrease. Therefore, the amount is set to 5 atomic% or less. It is preferably at most 4 atomic%.

Here, each element contained in M ″ has the following effects in addition to the above-mentioned effects. First, Ti has an expanded range of heat treatment conditions for obtaining optimum magnetic characteristics. Ta and Mn are effective for improving embrittlement resistance and workability such as cutting, Cr, Mo, and W are effective for improving corrosion resistance and surface properties, and Al is effective for reducing crystal anisotropy and reducing magnetic anisotropy. This has the effect of improving magnetostriction, soft magnetic properties, etc. In particular, Ti, V, Ta, Mo, and W are preferable for reducing iron loss.

Y is an element which promotes the non-crystallization of the alloy at the time of manufacturing, can improve the crystallization temperature, and is effective for the heat treatment for improving the magnetic properties.

However, if the amount is too large, the saturation magnetic flux density decreases. Therefore, the amount is set to 15 atomic% or less. Preferably it is 2 to 14 atomic%. In particular, B is remarkable in making the alloy non-crystalline, so that it is effective for improving magnetic properties by precipitation of fine crystal grains after obtaining an amorphous alloy, and is preferable. Here, in the case of containing only B or adding Si and B in combination, the amount is preferably less than 5 atomic%.

In T, when Fe is the main component, the content of Co and Ni is preferably 20 atomic% or less.

The method for producing a soft magnetic alloy used in the present invention is, for example, after obtaining an amorphous alloy ribbon by a liquid quenching method, obtaining a quenched powder by an atomizing method or the like, or a method usually used. After obtaining an amorphous alloy ribbon having similar characteristics by a sputtering method, a vapor deposition method, or the like, the temperature is -50 to + 120 ° C, preferably -30 to + 100 ° C with respect to the crystallization temperature of the amorphous alloy. At a temperature of from 1 minute to 10 hours, preferably from 10 minutes to 5 hours to precipitate the intended fine crystal grains.

Here, as an example of a manufacturing method for obtaining an amorphous alloy thin film, a manufacturing method by an ion beam sputtering method will be described.

First, a desired alloy is prepared by a high-frequency vacuum melting method or the like, processed into a predetermined shape, and then adhered to a backing plate to produce a target. This target was fixed at a predetermined position of a sputtering apparatus, and 1 × 1
After evacuating to a degree of vacuum of 0 ^-4 Torr or more, Ar gas is introduced, a voltage is applied between the substrate and the target, Ar ions collide with the target and sputtered, and deposited on the substrate.

In the case of forming a laminated film, for example, SiO ₂ , Si ₃ N ₄ , Al to be an insulating layer prepared separately are used.
What is necessary is just to sputter | spatter using a target, such as N, and to laminate | stack alternately with an amorphous alloy thin film. At this time, the thickness of the insulating layer is preferably about 5 to 100 Å, and more preferably 10 to 50 Å.

Next, the fine crystal grains of the soft magnetic alloy used in the present invention will be described.

In the alloy used in the present invention, if there are too few fine crystal grains, that is, if there are too many amorphous phases, the iron loss is large, the magnetic permeability is low, the magnetostriction is large, and the magnetic properties of the resin mold are low. Since the deterioration is increased, it is preferable that the fine crystal grains in the alloy exist in an area ratio of 30% or more. More preferably 40% or more, newly preferably 50%
% Or more.

Further, even in the fine crystal grains, if the crystal grain size is too small, the magnetic properties cannot be improved, and if the crystal grain size is too large, the magnetic properties deteriorate.
It is preferable that 80% or more of crystals having a crystal grain size of 50 to 300 Å exist in the fine crystal grains.

The magnetic component of the present invention includes, for example, a magnetic head,
Thin film head, high frequency transformer including high power, saturable reactor, common mode choke coil, normal mode choke coil, noise filter for high voltage pulse, magnetic core used for laser power supply, current sensor, direction sensor, security sensor, torque It has excellent properties as magnetic parts, such as magnetic materials for various sensors such as sensors.

[0036]

EXAMPLE An amorphous alloy ribbon having a thickness of about 15 μm and a width of 4.5 mm was obtained from each of the alloys shown in Tables 1 and 2 by a single roll method in an Ar atmosphere. After that, this ribbon is wound and the outer diameter is 18m.
m, an inner diameter of 12 mm, and a height of 4.5 mm, molded into a toroidal magnetic core, and then heated at about 50 ° C. above the crystallization temperature (measured at a heating rate of 10 deg / min) obtained from the first exothermic peak of each material.
After a heat treatment for 5 minutes, the sample was subjected to measurement.

For comparison, a magnetic core in an amorphous state was prepared by subjecting the magnetic core of the wound body to a heat treatment at a temperature 70 ° C. lower than each crystallization temperature (measured at a heating rate of 10 deg / min) for about 50 minutes. And subjected to the measurement in the same manner. For comparison, a magnetic core using Permalloy and Sendust was similarly subjected to measurement.

The ratio of the fine crystal grains in the ribbon constituting the obtained magnetic core and the ratio of the fine crystal grains having a crystal grain size of 50 to 300 Å therein are defined as A and B (%), respectively. It is shown in Table 1.

Further, five magnetic cores having fine crystal grains of the present invention and five magnetic cores having no fine crystal grains shown in comparison were used, and B = 3 kG, f = 50 k
Loss after heat treatment at 1 Hz, magnetostriction, 1 kHz, 2 mOe
Table 1 shows the magnetic permeability and the saturation magnetic flux density at the same time.

[0040]

[Table 1]

[0041]

[Table 2] As is clear from the above Tables 1 and 2, the soft magnetic alloy used in the present invention has a fine crystal grain, so that compared with a magnetic core made of an amorphous alloy having the same composition or a magnetic core made of another alloy, It has low loss, low magnetostriction, high magnetic permeability, and excellent soft magnetic properties at high frequencies.

When these magnetic cores were impregnated and cured with an epoxy resin, the core of the present invention having fine crystal grains also showed an increase in iron loss of 5% or less and maintained good direct response. However, the increase in iron loss of the magnetic core using the alloy and the amorphous alloy ribbon shown as a comparison was about three times, and the difference from the present invention became more remarkable.

As another embodiment of the present invention, Tables 3 to
Each alloy of Samples 25 to 43, 56 to 59 and 71 to 78 shown in FIG.
An amorphous alloy ribbon having a width of 4.5 mm and a width of 4.5 mm was obtained. Thereafter, these ribbons are wound, and the outer diameter is 18 mm, the inner diameter is 12 mm, and the height is 4.
It was formed into a 5 mm toroidal magnetic core.

As another embodiment of the present invention, Tables 3 to
An amorphous alloy thin film having a thickness of 5 μm was obtained from each alloy of Samples 44 to 55, 60 to 70, and 79 to 95 shown in No. 5 by RF sputtering.

As still another embodiment, an amorphous alloy thin film composed of each alloy of Samples 96 to 98 shown in Tables 3 to 5 was used to form an amorphous alloy thin film of 80 Å and an insulating film (SiO ₂ , AlN, Si ₃ N ₄ ) was set to 20 angstroms, and sputtering was repeated so that the thickness of the amorphous alloy thin film became 4000 angstroms, thereby obtaining a laminated film.

The toroidal core and the thin film were subjected to a heat treatment at a crystallization temperature (measured at a heating rate of 10 deg / min) of 80 ° C. for about 2 hours, which was obtained from the first exothermic peak of each material. did. In contrast to these cores, in the case of a toroidal core, the initial permeability (μ '
_1kHz ), 100kHz, 2kG iron loss (P
_{100kHz / 2kG} (mW / cc)) and saturation magnetization (4πMs
(KG)) using an impedance analyzer, a U function meter, and a sample vibration type magnetometer.
The initial permeability (μ ′ _{1 MHz} ) and saturation magnetization (4πMs (kG)) of z, 2 mOe were measured using an impedance analyzer and a sample vibration magnetometer.

[0047]

[Table 3]

[0048]

[Table 4]

[0049]

[Table 5] As is clear from Tables 3 to 5, the soft magnetic alloy used in the present invention has low iron loss, high magnetic permeability, and excellent soft magnetic properties at high frequencies.

[0050]

According to the present invention, it is possible to obtain a magnetic component having a high saturation magnetic flux density in a high frequency region and excellent magnetic properties by using a soft magnetic alloy provided with fine crystal grains with a desired alloy composition.

Claims (4)

(57) [Claims] 1. A general _{formula; T a M b M 'c} M "d Y e T; Fe, Co, at least one M is selected from Ni; Cu, Ag, Au, Zn, Sn, Pb, Sb, Bi
At least one selected from M '; at least one selected from Zr, Hf, Nb, M "; at least one selected from Ti, V, Ta, Cr, Mo, W, Mn, Al Y; Si , P, B, C at least one selected from a + b + c + d + e = 100 (at.%) 0.01 ≦ b ≦ 53 ≦ c ≦ 180 0 ≦ d ≦ 5 0.01 ≦ e ≦ 15 A magnetic component comprising a soft magnetic alloy having high saturation magnetic flux density and excellent soft magnetic properties having grains. 2. The alloy according to claim 1, wherein the fine crystal grains are present in the alloy in an area ratio of 30% or more, and among them, crystals having a crystal grain size of 50 to 300 Å are present in an amount of 80% or more. Magnetic parts. 3. The magnetic component according to claim 1, wherein the soft magnetic alloy is a thin ribbon. 4. The magnetic component according to claim 1, wherein the soft magnetic alloy is a thin film.