JP2647162B2 - Inspection device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial application field) The present invention relates to an inspection apparatus capable of rotating a test head.

(Prior Art) For example, in a semiconductor wafer inspection apparatus, a probe device is used to contact a probe needle or the like with an electrode pad of each chip on a semiconductor wafer, and a tester measures each chip via the probe needle. By applying a pattern and monitoring the output pattern from each chip by a tester, the electrical characteristics of each chip on the semiconductor wafer are inspected.

In recent years, particularly when performing high-frequency measurement, it is not possible to perform an accurate inspection due to the superimposition of noise by lengthening the input / output cable from the semiconductor wafer to the tester. It is desired to adopt a configuration in which the test head is connected and retracted during non-inspection to ensure the use of the microscope on the probe device.

In order to most easily execute such a movement of the test head, a configuration in which the test head is rotated is advantageous.

(Problems to be Solved by the Invention) By the way, since the test head as described above has a considerable weight (for example, about 200 kg), it is burdensome for the operator to rotate the test head by hand as in the past, and the impact is high. It is extremely difficult to rotate and place it at a predetermined position.

Therefore, it is preferable to completely automate the rotation of such a considerable weight test head. Further, when the rotational movement of the test head is automated, it is sufficient if the test head can be stopped between two points, that is, the connection position with the normal prober body and the retracted position where the connection with the prober body is released. Some users desire to stop at an angle in the middle, and there are also cases where the test head is required to be stopped halfway for convenience of maintenance.

It is virtually impossible to stop the test head in the middle of the rotation area in the case where the test head is rotated by hand, because the test head having a considerable weight must be manually supported during this time.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an inspection apparatus that can automatically stop a test head at an arbitrary rotation position in a rotation area thereof.

[Configuration of the Invention] (Means for Solving the Problems) The invention according to claim 1 is an inspection apparatus for rotating and moving a test head between a connection position and a non-connection position with a prober. A switch for instructing input of a stop, and by turning on the switch, the main shaft eccentric position of a driven member fixed to the rotary main shaft of the test head is moved up and down to rotate and drive the test head. A vertical drive unit that swings with the rotation of a rotating main shaft; and a horizontal drive unit that applies a horizontal external force to the vertical drive unit when the vertical drive unit is located at a top dead center or a bottom dead center. And when the switch is turned off at a position in the middle of rotation between the connection position and the non-connection position, stops the rotation of the test head by controlling the vertical movement driving means. And having a stop control unit, the to.

According to a second aspect of the present invention, in the first aspect, the up / down movement driving means includes an air cylinder that applies a higher air pressure to one of both sides of the piston than the other to drive the piston rod to move forward and backward, and the stop control means. Is characterized in that when the switch is turned off, both sides of the piston of the air cylinder have substantially the same pressure.

According to a third aspect of the present invention, in the first or second aspect, an engaged portion provided at a portion that moves with the test head is fixed to a position facing a movement path of the engaged portion.
And an engaging portion that engages with the engaged portion when the switch is turned off.

According to a fourth aspect of the present invention, in the third aspect, the engaging portion is configured by a lock pin that is protruded and driven by an operation of turning off the switch, and the engaged portion is engaged with the lock pin when the test head rotates. It is characterized in that it has a hole or a concave portion formed on the opposing moving surface at every predetermined rotation angle for engaging the lock pin.

(Operation) In the invention of claim 1, a stylus such as a probe needle supported by a prober is brought into contact with an object to be inspected to perform an electrical characteristic inspection of the object to be inspected. At this time, a stylus such as a probe needle is connected to a tester outside the prober via a test head set at a connection position with respect to the prober, and supplies a signal from the tester to the device under test, The output signal from the test object can be monitored by the tester.

This test head can be moved to a position other than the connection position with the prober by rotation at times other than inspection,
According to the first aspect of the present invention, in order to perform the rotation drive, a vertical drive means for vertically moving the main shaft eccentric position of the driven member fixed to the rotary main shaft of the test head is mainly used. Since the vertical drive unit itself swings with the rotation of the rotating main shaft, when the vertical drive unit is located at the top dead center or the bottom dead center, a horizontal external force is applied to the vertical drive unit. Horizontal driving means is provided as auxiliary driving means for continuing the rotation of the test head.

When the switch-on operation is performed, the drive control means drives and controls the vertical movement means during the switch-on time, and the test head is driven to rotate. Also, the horizontal drive unit is driven only when the vertical drive unit reaches the top dead center or the bottom dead center, and the rotation of the test head continues smoothly. On the other hand, at the time of the switch-off operation, the vertical movement driving means is controlled to be stopped by the stop control means.

As described above, according to the first aspect of the present invention, the rotational movement of the test head can be automated based on the switch-on operation, and when the switch-off operation is performed during the rotation of the test head, the test head is switched off. It can be stopped at an arbitrary rotation angle in the rotation area at the timing.

Therefore, the test head can be controlled to stop at any position desired by the user without any effort, which is convenient for maintenance work and the like.

In order to perform this operation, according to the first aspect of the present invention, the driving unit that operates based on the switch-on operation is controlled by the stop control unit when the switch-off operation is performed during the rotation of the test head. Is stopped at an arbitrary rotation position.

In particular, as in the invention of claim 2, when the rotational power of the test head is performed by driving the piston rod of the air cylinder forward and backward, when the switch is turned off, the air pressure on both sides of the piston is made substantially the same. The test head is stopped at an arbitrary rotation stop position.

In order to enhance the reliability of the stopping operation, it is preferable that the engaging portion and the engaged portion are mechanically engaged by a switch-off operation as in the invention of claim 3. In this case, as in the invention of claim 4, the engaging portion may be a lock pin protruding by a switch-off operation, and the engaged portion may be a hole or a recess in which the lock pin is engaged. In the arbitrary stop position, the lock pin does not always engage with the hole or the recess. At this time, even if the test head starts to fall, the locked state is ensured by the engagement of the lock pin with the nearest hole.

(Example) Hereinafter, an example in which the present invention is applied to a semiconductor wafer inspection apparatus will be specifically described with reference to the drawings.

First, the outline of the inspection apparatus will be described with reference to FIGS. 2 (A) and 2 (B). The prober main body 10 makes the probe pads pass through the electrode pads of the respective chips of the semiconductor wafer to make contact with the respective chips. This is a device for ensuring electrical connection, and the probe needle is connected to a second
It is connected by a cable (not shown) to a tester 12 arranged on the upper side of FIG.

The prober main body 10 and the test head 1 can be electrically connected to each other by a connector. When the test head 1 is arranged directly above the prober main body 10 as shown by a solid line in FIG. It is supposed to be.

The test head 1 is rotatably supported by a hinge box 14 arranged next to the prober body 10, and moves on a side desk 16 arranged on the left side of the hinge box 14. , Prober body
It can be evacuated by releasing the connection with 10. For this reason, as shown in FIG. 6, the test head 1 is rotatable with respect to the center of rotation between θ ₁ ° (position on the prober body side) and θ ₂ ° (position on the side desk side). It has become. The prober body 10 and the side desk 16 are respectively provided with the clamper 10 of the test head 1.
a, 16a are provided. In addition, the hinge box 14
The swing switch 14a for moving the test head 1 to the prober main body 10 and the swing switch 14 for moving the test head 1 to the side desk 16
b is provided.

Next, a mechanism for automating the rotational movement of the test head 1 will be described with reference to FIG.

The spindle 20 is rotatably supported so as to be able to rotate integrally with the test head 1 fixed thereto.
An arm 22 is fixed to 20. And this arm
An eccentric point 22a distant from the center of the spindle of 22 is the vertical movement guide member 2.
4 vertically rotatably supported on the upper end of a vertically movable member 26 which is vertically movably supported.

The vertically moving member 26 is screwed to a movable part 32 of a first air cylinder 30 which is an example of a first reciprocating means, and a lower end of a guide shaft 34 of the first air cylinder 30 is
It is fixed to the vertical movement guide member 24.

The driving principle of the first air cylinder 30 is as follows. When air is introduced into the IN side shown in FIG.
Conversely, the movable portion 32 is raised by introducing air to the OUT side.

The first air cylinder 30 is movable in the direction from the back surface to the front surface in FIG. 3 (A), that is, in the left-right direction in FIG. 3 (B). Accordingly, the first air cylinder 30 and a member for fixing the first air cylinder 30 are surely horizontally moved.

That is, a first pulley 50 is fixed to the main shaft 20, and a second pulley 52 rotatably supported by the bracket 14c of the hinge box 14 is provided.
A belt 54 is stretched between the second pulleys 50 and 52.
An arm 58 is fixed to the tip of a pulley shaft 56 to which the second pulley 52 is fixed. On the other hand, the other end side of this arm 58 is a pushing block fixed to the vertical moving member 26.
It is rotatably supported by 60. As a result, the spindle 20
Is rotated, the second pulley 52 is rotated via the first pulley 50 and the belt 54, and the arm 58 is rotated integrally therewith. Since the arm 58 follows the locus shown in FIG. 3 (C), the pushing block 60 moves in the left-right direction of FIG. 3 (C). Will move horizontally.

Next, a mechanism for surely rotating the test head 1 by the first air cylinder 30 will be described.

A rail block 40 is provided at the lower end of the vertical movement guide member 24 supporting the first air cylinder 30 via a bearing 38. The rail block 40 is provided in a rail blanket 44 fixed to the hinge box 14. It can be moved horizontally on the rails 42 that are arranged.

A second reciprocating means as an example of a second reciprocating means for applying an external force to the rail block 40 in the horizontal direction.
An air cylinder 60 is fixed on the rail blanket 44.

The second air cylinder 60 horizontally drives the piston 62 by air drive, and the distal end side of the piston 62 is connected to the rail block 40 via the connection plate 64, so that the second air cylinder 60 , The horizontal force can be applied to the rail block 40.

Next, based on the ON operation of the swing switches 14a, 14b, the first and second air cylinders 30, 60 are driven,
An air circuit for stopping the test head 1 at an arbitrary rotation position based on the turning off of the switches 14a and 14b will be described with reference to FIG.

As an air circuit for driving the first air cylinder 30, first, two air introduction paths for introducing air to the OUT side of the cylinder 30 are provided. Are provided, and a third solenoid 72 is provided in the middle of the lower path. Here, the second solenoid 71 is turned on when the power is turned off, and the first solenoid 70 is turned on when the swing switch 14a or 14b is turned off during the rotation of the test head 1, and the first air is turned on. The test head 1 is stopped at an arbitrary rotation position by introducing an air pressure having the same output as the air pressure on the IN side of the cylinder 30 to the OUT side. On the other hand, the third solenoid 72 is turned on when moving up the movable portion 32.

Further, a fourth solenoid 73 is arranged in the middle of the path for introducing air to the IN side of the first air cylinder 30, and similarly in the middle of the path for introducing air to the IN side and OUT side of the second air cylinder 60. Is provided with fifth and sixth solenoids 74 and 75, respectively. An air pressure gauge G and a quick exhaust valve EV for rapidly returning the pressure in the cylinder to the atmospheric pressure are provided on the front and rear sides of each solenoid.

Further, in order to safely maintain the stopped state of the test head 1 in the middle of the rotation area, the test head 1 can be stopped by the lock pin 81 in the present embodiment. Air can be introduced into the cylinder 80, which is always urged and supported by the projection 82, and the lock pin 81 can be retracted into the cylinder 80 by the introduction of the air. In order to realize such an operation, air is introduced while the test head 1 is rotating, and a seventh air supply for shutting off the air introduction when the swing switch 14a or 14b is turned off. A solenoid 83 is provided in the middle of the air introduction path to the cylinder 80. At a position where the lock pin 81 protrudes and rotates together with the test head 1, nine holes (not shown) are provided, for example, at intervals of 20 °, and the lock pin 81 is inserted into the holes. As a result, the test head 1 can be mechanically stopped at a rotation position every 20 degrees.

 Next, the operation will be described.

First, a case where the test head 1 in the retracted state is moved from the side desk 16 to the prober body 10 will be described with reference to the operation flowchart of FIG.

Turn on the power of the prober body 10 (step 1),
An initial switch (not shown) is pushed to make an initial ON state (steps 2 and 3). When the power switch is turned on, the second solenoid 71 shown in FIG. 1 is turned on. Here, it is determined whether or not the mode is a manual mode (step 4). If the mode is not a manual mode, a manual mode is set (step 5).

Next, it is determined whether or not the microscope (not shown) on the prober body 10 is in the avoidance state (step 6). If not, the microscope is moved to the avoidance position (step 7). If the microscope is not avoided, the test head 1 is moved to the prober body 10.
This is because when the microscope is moved to the side, interference occurs. If the microscope is not avoided, the subsequent operation is controlled to be impossible.

Next, it is determined whether or not the head plate of the base plate 1 is in the set state (step 8). If the head plate is in the up state, it is set to the set state (step 9). In addition,
Even when the head plate is in the up state, safety measures are taken so that subsequent operations cannot be performed.

Thereafter, it is determined whether or not the clamper 10a on the prober body 10 is turned off (step 10), and if it is on, it is set to the off state (step 11). Thereafter, the clamper 16a on the side desk 16 is set to the off state (step 12). When the clampers 10a and 16a are on, safety measures are taken so that subsequent operations cannot be performed.

Next, the swing switch 14a is turned on to start the rotational movement of the test head 1 (step 13). The rotation of the test head 1 is continued until the test head 1 can be clamped by the clamper 10a of the prober body 10. (Step 14).

The rotational movement of the test head 1 will be described.
When the swing switch 14a is turned on, the fourth solenoid 73 is turned on and the operating direction of the first air cylinder 30 is changed.
Air is introduced into the IN side, and as a result, the movable portion 32 is lowered from the state shown by the chain line on the right side of FIG. 3B, and is driven to rotate the main shaft 20 via the arm 22. The rotation of the main shaft 22 causes the first pulley 50 to rotate integrally, and the second pulley 52 to rotate via the belt 54. Therefore, the arm 58 swings, thereby causing the first air cylinder 30 and the like to rotate. Will move in the horizontal direction. By the downward movement and the horizontal movement of the movable part 32, the main shaft 20 is continuously rotated. As a result, the test head 1 fixed to the main shaft 20 is driven to rotate.

Then, when the test head 1 reaches around 60 ° in FIG. 6 (detection of such a timing includes detection of the rotational position of the test head 1 or detection of the rotational position of the test head 1 from the elapsed time from the initial rotation). A), the sixth solenoid 75 is turned on, and air is introduced into the IN side of the second air cylinder 60. As a result, the piston 62 contracts and pushes the rail block 40 to the left side in FIG. By driving the second air cylinder 60, the rotation of the test head 1 in the rotation area A from 60 ° to about 120 ° is followed.

Here, when the test head 1 reaches 90 °, the movable portion 32 reaches the lowest point, so that the first solenoid 70 is turned on at this timing and the first air cylinder 30 is turned on.
Air having a pressure that is larger than the output by the IN-side pressure is introduced to the OUT side, and the movable section 32 is moved upward from the lowest point.

When switching from descending to ascending, the second
Since the horizontal external force of the air cylinder 60 is applied to the first air cylinder 30, the test head 1 can be surely rotated in the same direction.

Then, when the test head 1 reaches about 120 °, the sixth solenoid 75 is turned off, and the air entering the OUT side of the second air cylinder 60 becomes atmospheric pressure due to the open state of the quick exhaust valve EV. It becomes equal, and the role of the second air cylinder 60 ends.

Thereafter, the test head 1 is driven to rotate by the rise of the movable portion 32 of the first air cylinder 30, and the test head 1 reaches the position of θ ₂ 、 and is moved to the prober main body 10 side. Then, at this time, for example, the position inspection switch attached to the test head 1 is turned ON, and the IN of the first air cylinder 30 is
The air that has entered the side becomes equal to the atmospheric pressure due to the open state of the quick exhaust valve EV, thereby preventing the test head 1 from jumping up.

In this state, the prober main body 10 can be clamped, and the test head 1 suitable for operating the clamper 10a is clamped to the prober main body 10 (step 1).
5), the movement of the test head 1 from the side table 16 to the prober body 10 is completed.

When the test head 1 is moved from the prober main body 10 to the side table 16 in a manner opposite to the above operation, the operation is performed according to the operation flow shown in FIG. 5 so as to follow the reverse path. At this time, the first air cylinder 30
Is operated so that the movable portion 32 is lowered from the state shown by the chain line on the left side of FIG. 3B, and the switching operation is performed so that the movable portion 32 is raised when the test head 1 reaches 90 °. The second air cylinder 60 operates to extend the piston 62 to the right in FIG. 3C when the test head 1 is at about 120 °.
Until it reaches around 60 °, that is, the rotation area in FIG.
Will be continued between.

Thus, according to the present embodiment, the first air cylinder
When the moving direction of the movable part 32 of the 30 is switched, the second
Since the external force that uniquely determines the horizontal movement direction of the first air cylinder 30 is applied by the air cylinder 60, the horizontal direction is not changed as in the case where the first air cylinder 30 reaches the bottom dead center. Even when it is not determined, the rotation in the same direction can be smoothly performed by applying the external force.

Next, an operation when the test head 1 is stopped at an arbitrary rotation position will be described with reference to a flowchart of FIG.

For example, the rotational movement of the test head 1 is started from the side desk 16 side, and during this rotational movement, the swing switch 14a is turned on.
Is turned off (step 1), the first air cylinder 30
The air pressure on the IN side is maintained as it is (step 2), the first solenoid 70 is turned on, and the seventh solenoid 83
Is turned off (steps 3 and 4).

When the first solenoid 70 is turned on, an air pressure adjusted so as to have the same output as the IN side is applied to the OUT side of the first air cylinder 30 via this air introduction path, so that the movable section 32 The downward movement is stopped (step 5).
Also, when the seventh solenoid 83 is turned off, the cylinder
The lock pin 81 in 80 is protruded by the urging force of the compression coil spring 82 (step 6). If any of the above-mentioned holes is present at the protruding position, the lock pin 81 is inserted into this hole and the test head 1 is mechanically moved. To stop and lock.
When there is no hole, the lock pin 81 comes into contact with the surface of the hole.

As a result, the test head 1 is stopped during the rotational movement (step 7). The test head 1 can be stopped and maintained only by balancing the air pressures on the IN and OUT sides of the first air cylinder 30.
Further, in order to more reliably maintain the stop of the test head 1, a mechanical stop state by the lock pin 81 is employed. When the lock pin 81 is inserted into the hole described above, the movement of the test head 1 can be reliably controlled at this position, and when the lock pin 81 is in contact with a position separated from the hole. Therefore, even if the test head 1 starts dropping, the lock pin 81 is immediately inserted into any of the holes closest to the start of the drop, so that the mechanical lock state by the lock pin 81 is similarly secured. can do.

Next, when the test head 1 in the stopped state is rotated again, for example, the swing switch 14a is turned on (switch 8). Then, the air pressure on the IN side of the first air cylinder 30 is maintained as it is (step 9), the first solenoid 70 is turned off, and the seventh air cylinder 30 is turned off.
Will be turned on (steps 10 and 1).
1).

When the first solenoid 70 is turned off, the air pressure on the OUT side of the first air cylinder 30 becomes equal to the atmospheric pressure,
In addition, when the seventh solenoid 83 is turned on, the lock pin 81 is retracted by air pressure.
Therefore, the stop lock state of the test head 1 is released (step 14).

Therefore, the movable part 32 is lowered by the air pressure on the IN side of the first air cylinder 30, and the rotational movement of the test head 1 is restarted.

Next, a stopping operation in the case where the movable portion 32 of the first air cylinder 30 moves upward will be described with reference to a flowchart of FIG.

For example, when the swing switch 14a is turned off from 90 ° while rotating toward the prober body 10 (step 1), the first
The air pressure on the IN side of the air cylinder 30 is maintained as it is (step 2).
The first solenoid 70 is turned on at the same time when the third solenoid 72 for making the ascending movement is turned off (steps 3 and 4),
Further, the seventh solenoid 83 is turned off (step 5).

The third solenoid 72 turns off and the first air cylinder
At the same time as the air on the OUT side of 30 becomes equal to the atmospheric pressure, the first solenoid 70 is turned on, and the switching valve 90 makes the first solenoid 70 a path.
The upward movement of the movable portion 32 is stopped by applying the air pressure adjusted to the same output as the IN side to the OUT side (Step 8).

Further, when the seventh solenoid 83 is turned off, the lock pin 81 in the cylinder 80 is protruded by the urging force of the compression coil spring 82 (step 6). Then, the test head 1 is inserted into this hole to mechanically stop the test head 1 and lock it. If there is no hole, a lock pin is provided on its surface.
81 come into contact with each other (step 7).

As a result, the test head 1 is stopped during the rotational movement (step 8). The test head 1 can be stopped and maintained only by balancing the air pressures on the IN and OUT sides of the first air cylinder 30.
Further, in order to more reliably maintain the stop of the test head 1, a mechanical stop state by the lock pin 81 is employed. When the lock pin 81 is inserted into the hole described above, the movement of the test head 1 can be reliably controlled at this position, and when the lock pin 81 is in contact with a position separated from the hole. Therefore, even if the test head 1 begins to fall into the scale, the lock pin 81 is immediately inserted into any of the holes closest to the start of the fall, so that the mechanical lock state by the lock pin 81 is similarly secured. be able to.

Next, when the test head 1 in the stopped state is rotated again, for example, the swing switch 14a is turned on (step 9). Then, the air pressure on the IN side of the first air cylinder 30 is maintained as it is (step 16), the first solenoid 70 is turned off, and the third
Is turned on, and the seventh solenoid 83 is turned on (steps 10, 11, 12).

When the first solenoid 70 is turned off, the air cylinder
At the same time as the air pressure on the OUT side of 30 becomes equal to the atmospheric pressure, the third solenoid is turned on, and the air pressure on the first air cylinder IN side through the third solenoid 72 by the switching valve 90 is also large. When the air pressure is applied, and the seventh solenoid 83 is turned on, the lock pin 81 is retracted by the air pressure, so that the stop lock state of the test head 1 is released (steps 13 and 14). , 15).

Therefore, the movable portion 32 rises due to the air pressure on the OUT side of the first air cylinder 30, and the rotational movement of the test head 1 is restarted.

According to the above description, the test head 1 can be stopped halfway by the same operation when the test head 1 is at any position in the 180 ° rotation area.

It should be noted that the present invention is not limited to the above embodiment, and various modifications can be made within the scope of the present invention.

For example, as a switch that drives the test head 1 when it is turned on and stops it when it is turned off, for example, a non-lock switch that is kept on when the switch is kept pressed and turned off when the switch is released, Any switch may be used, such as a switch with a lock that is kept on even when released and is turned off when pushed again, or two types of switches dedicated to on and off.

Further, the driving means for realizing the rotational driving of the test head 1 is not limited to one employing two types of air cylinders in the vertical direction and the horizontal direction as in the above-described embodiment. Various possible drive mechanisms can be employed.

[Effects of the Invention] As described above, according to the present invention, the rotation driving of the test head can be automated, and further, the test head can be stopped in the middle of the rotation area of the test head. Inspection apparatus can be provided.

[Brief description of the drawings]

FIG. 1 is a schematic explanatory view for explaining an example of an air circuit for driving a test head and stopping at an intermediate position of an inspection apparatus to which the present invention is applied, and FIGS. FIG. 3 is a plan view, a front view, and FIG. 3 of a device of one embodiment of the present invention, showing a rotating mechanism of a test head. FIG. 3A is a front view of a first air cylinder, and FIG. FIG. 4A is a side view, FIG. 4C is a plan view of a second air cylinder, and FIG.
FIG. 5 is an operation flowchart when the test head is moved from the side desk side to the prober body side, FIG. 5 is an operation flowchart when the test head is moved from the prober body side to the side desk side, and FIG. FIGS. 7 and 8 are schematic explanatory diagrams for schematically explaining the operation principle of the apparatus, and FIGS. 7 and 8 are operation flowcharts for explaining the operation when the test head is stopped halfway. 1 Test head, 10 Prober body, 12 Tester, 14a, 14b Switch, 16 Side desk, 30 First air cylinder 60 Second air cylinder, 70-75 , 83 …… Solenoid, 81 …… Lock pin.

Claims (4)

(57) [Claims] 1. An inspection apparatus for rotating a test head between a position connected to a prober and a position not connected to a prober, comprising: a switch for inputting an instruction to rotate and stop the test head; Vertical drive means for rotating the test head by vertically moving an eccentric position of a driven member fixed to a rotating spindle of the head, and swinging itself with the rotation of the rotating spindle; A horizontal drive unit for applying a horizontal external force to the vertical drive unit when the dynamic drive unit is located at the top dead center or the bottom dead center; and a mid-rotation position between the connection position and the non-connection position. And a stop control means for controlling the vertical movement drive means to stop the rotation of the test head when the switch is turned off at Location. 2. The apparatus according to claim 1, wherein the up-down movement driving means includes an air cylinder for applying a higher air pressure to one of both sides of the piston than the other to drive the piston rod forward and backward. An inspection apparatus, wherein when the switch is turned off, both sides of the piston of the air cylinder have substantially the same pressure. 3. The device according to claim 1, wherein said engaged portion is fixed to a position opposed to a moving path of said engaged portion, said engaged portion being provided at a portion moving with said test head, and said switch is turned off. An inspection device, further comprising: an engagement portion that engages with the engaged portion. 4. The lock device according to claim 3, wherein the engagement portion is formed by a lock pin protrudingly driven by turning off the switch, and the engaged portion faces the lock pin when the test head rotates. An inspection apparatus characterized by having a hole or a concave portion formed on the moving surface for every predetermined rotation angle and engaged with the lock pin.