JP2572619Y2 - Optical axis adjustment device - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical axis adjusting device capable of adjusting an optical axis so as to pass through a predetermined optical path, and is particularly effective for invisible light.

[0002]

_2. Description of the Related Art In a device for converting a CO ₂ laser into a Raman laser by a multiple reflection cell and guiding the Raman laser to a reaction vessel (Japanese Patent Application Laid-Open No. 64-13784), the laser passes along a predetermined optical path. Need to be adjusted.

However, since invisible light, for example, infrared light having a wavelength of about 16 μm, cannot be directly detected, it is more difficult to adjust the optical axis than visible light.

For this reason, as shown in FIG. 2, an opening 10 having a diameter equal to or smaller than the beam diameter is formed at the center, and energy meters 11a, 11b, 11c, and 11 are formed in four directions around the opening 10.
A sensor with 11d is under development. Since these energy meters 11a to 11d output detection values according to the distance from the infrared light, the energy meters 11a to 11d
When the output of d is uniform, it can be confirmed that the center of the infrared light is located at the center of the opening 10.

[0005]

However, in order to confirm the optical axis of infrared light passing through the sensor shown in FIG. 4, at least two of the above sensors are installed along the optical axis, and eight energy meters are used. A complicated device for observing the satellite at the same time was required. In other words, the above sensor only checks the passing point, so in order to determine the optical axis,
It is necessary to measure at least two places

The present invention has been made in view of the above-mentioned prior art, and an optical axis which can easily adjust the optical axis by observing the amount of light beam passing through two openings. It is an object to provide an adjusting device.

[0007]

In order to achieve the above object, the configuration of the present invention comprises two apertures arranged linearly along a light beam, and a beam diameter of the light beam formed at the center of the aperture. An aperture having substantially the same diameter, a beam splitter installed behind the aperture and splitting the light beam passing through the aperture, and an energy meter for measuring the intensity of the split spectrum. And

[0008]

FIG. 1 shows an embodiment of the present invention. As shown in FIG. 1, apertures 1 and 2 having a disk shape are arranged on a straight line along the invisible light 101, and these apertures 1 and 2 are arranged.
2, a central portion of the opening 1a through which the invisible light 101 passes,
2a is formed. The openings 1a and 2a have substantially the same diameter as the beam diameter of the invisible light 101, and when the center of the openings 1a and 2a and the optical axis of the invisible light 101 coincide, all the invisible light passes. Openings 1a, 2 without interruption
a. Conversely, if the centers of the openings 1a and 2a do not coincide with the optical axis of the invisible light 101, the light is blocked by the apertures 1 and 2 and the amount of light passing therethrough decreases. Half mirrors are arranged behind the apertures 1 and 2 as beam splitters 3 and 4, respectively, and the invisible light 101 after passing through the apertures 1 and 2 is split by the beam splitters 3 and 4 in a right angle direction into a beam splitter 10.
2, 103 is branched. These spectroscopy 102 and 103 are incident on energy meters 5 and 6, respectively, and their intensities are measured.

Therefore, when the optical axis of the invisible light 101 coincides with the center of the openings 1a and 2a of the apertures 1 and 2, the invisible light 101 is not obstructed by the apertures 1 and 2 and the opening 1a. , 2a, the maximum value is observed by the energy meters 5, 6. That is, when the optical axis of the invisible light 101 does not coincide with the center of the openings 1a and 2a of the apertures 1 and 2, the invisible light 1
Since 01 is blocked by the apertures 1 and 2, the value observed by the energy meters 5 and 6 is lower than the maximum value.

In this embodiment having the above configuration, when the invisible light 101 passes through the apertures 1a and 2a of the apertures 1 and 2, the beam splitters 3 and 4 provided at the rear of the apertures 1 and 2 split the light into the light beams 102 and 102. 103 branches. The intensities of the spectroscopy 102 and 103 are observed by energy meters 5 and 6, respectively. The intensities of the spectroscopy 102 and 103 observed by the energy meters 5 and 6 show the maximum values when the invisible light 101 passes through the centers of the openings 1a and 2a of the apertures 1 and 2. Therefore, when the optical axis of the invisible light 101 is adjusted so that the energy meters 5 and 6 indicate the maximum value, the optical axis of the invisible light 101 is a straight line connecting the centers of the apertures 1a and 2a of the apertures 1 and 2. Will match the above.

As described above, in this embodiment, the apertures 1 and
2 by measuring the energy of the invisible light 101 passing through the two energy meters 5 and 6,
Can be adjusted, and the device configuration becomes simpler than in the past. For this reason, the openings 1a and 2a of the apertures 1 and 2 are positioned in advance on the optical path through which the invisible light 101 is to pass, and the invisible light is set so that the maximum value is observed by the energy meters 5 and 6. Adjusting the optical axis of 101 makes it possible to guide the invisible light 101 along the intended optical path.

In particular, the present invention is suitable for application to a device (e.g., JP-A-64-13784) in which a CO ₂ laser is converted into a Raman laser by a multiple reflection cell and the Raman laser is guided to a reaction vessel. That is, this apparatus introduces a laser for exciting a Raman laser such as CO ₂ into a multiple reflection cell formed by filling a laser medium in a container, and makes multiple reflections between opposed mirrors to increase the effective medium length. The Raman laser is oscillated by the stimulated Raman effect, and the optical axis adjusting device of the present invention is suitable for guiding the oscillated Raman laser to a reaction device along a target optical path.

In the above embodiment, the optical axis of invisible light is adjusted. However, the optical axis can be similarly adjusted for visible light. Further, in the above embodiment, the apertures 1 and 2, the beam splitters 3 and 4, the energy meter 5,
6 are provided two each, but are not limited to this, and three or more may be provided respectively.

[0014]

As described above in detail with reference to the embodiments, in the present invention, the energies of the light beams passing through the two apertures are respectively measured by the two energy meters, and the measured value is the maximum. By adjusting the optical axis of the light beam so as to satisfy the following condition, the light beam can be passed along the target optical path. For this reason, the device configuration becomes simpler and the observation becomes easier as compared with the conventional case where complicated observation was required using eight energy meters. Therefore, the present invention is suitable for use when the optical axis of the Raman laser from the Raman laser output device is adjusted and applied to the reaction vessel.

[Brief description of the drawings]

FIG. 1 is a configuration diagram illustrating an optical axis adjusting device according to an embodiment of the present invention.

FIG. 2 is a configuration diagram of a sensor used for adjusting the optical axis of invisible light in the related art.

[Explanation of symbols]

 Reference Signs List 1 aperture 2 aperture 1a opening 2a opening 3 beam splitter 4 beam splitter 5 energy meter 6 energy meter 101 invisible light 102 spectral 103 spectral 10 opening 11a energy meter 11b energy meter 11c energy meter 11d energy meter

──────────────────────────────────────────────────続 き Continuing on the front page (72) Eiji Suzuki, a creator Eiji Suzuki, 33, Muramatsu, Oji, Tokai-mura, Naka-gun, Ibaraki Prefecture (72) Creator: Hideo Tashiro 2-1, Hirosawa, Wako-shi, Saitama No. Within RIKEN (72) Inventor Masakazu Kuwahara 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City, Hiroshima Prefecture Mitsubishi Heavy Industries, Ltd.Hiroshima Works (72) Inventor Keiji Yoshimura 4-6-1 Kannon Shinmachi, Nishi-ku, Hiroshima City, Hiroshima Prefecture 22 Hiroshima Works, Mitsubishi Heavy Industries, Ltd. (56) References JP-A-63-30810 (JP, A) JP-A-62-85837 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB G02B 7/00-7/06

Claims (1)

(57) [Scope of request for utility model registration] 1. An optical system comprising: two apertures arranged on a straight line along a light beam; an opening formed at the center of the aperture and having a diameter substantially equal to the diameter of the light beam; and a rear side of the aperture. An optical axis adjusting device, comprising: a beam splitter that is installed and splits a light beam that has passed through the opening, and an energy meter that measures the intensity of the split light.