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JP2555016Y2 - Vertical movement device for focusing in magnifying observation equipment - Google Patents

Vertical movement device for focusing in magnifying observation equipment

Info

Publication number
JP2555016Y2
JP2555016Y2 JP1989104254U JP10425489U JP2555016Y2 JP 2555016 Y2 JP2555016 Y2 JP 2555016Y2 JP 1989104254 U JP1989104254 U JP 1989104254U JP 10425489 U JP10425489 U JP 10425489U JP 2555016 Y2 JP2555016 Y2 JP 2555016Y2
Authority
JP
Japan
Prior art keywords
main body
substrate
vertical movement
magnifying observation
focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989104254U
Other languages
Japanese (ja)
Other versions
JPH0343615U (en
Inventor
保夫 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP1989104254U priority Critical patent/JP2555016Y2/en
Publication of JPH0343615U publication Critical patent/JPH0343615U/ja
Application granted granted Critical
Publication of JP2555016Y2 publication Critical patent/JP2555016Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Microscoopes, Condenser (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Lens Barrels (AREA)

Description

【考案の詳細な説明】 〔産業上の利用分野〕 本考案は拡大観察装置の合焦上下動装置に関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION [Industrial application field] The present invention relates to a focusing vertical movement device of a magnifying observation device.

〔従来の技術〕[Conventional technology]

従来のこの種装置、例えば投影機では第4図に示す様
な構造であった。
A conventional device of this type, for example, a projector has a structure as shown in FIG.

第4図において、本体(51)にはリニアボールベアリ
ングガイド(53)のリニアガイドが固設されている。投
影ヘッド(52)にはリニアボールベアリングガイド(5
3)のボールベアリングが固設されており、リニアボー
ルベアリングガイド(53)を介して本体(51)に対し上
下に移動自在に成している。対物レンズの保持部材(5
2)の本体(51)内部に位置する下部にはリードねじ(5
4)が投影ヘッド(52)の移動方向に植接され、そのね
じ部には歯車付きナット(55)が螺合しており、歯車付
きナット(55)は回転のみ可能に本体に固設されてい
る。また歯車付きナット(55)に固設された歯車はモー
ター(56)の回転軸に固設された歯車と噛合している。
In FIG. 4, a linear guide of a linear ball bearing guide (53) is fixed to the main body (51). The projection head (52) has a linear ball bearing guide (5
The ball bearing of 3) is fixedly mounted, and is movable vertically with respect to the main body (51) via the linear ball bearing guide (53). Object lens holding member (5
2) The lead screw (5
4) is implanted in the direction of movement of the projection head (52), and a threaded nut (55) is screwed into the threaded part. The geared nut (55) is fixed to the main body so that it can rotate only ing. The gear fixed to the geared nut (55) meshes with the gear fixed to the rotating shaft of the motor (56).

上記構成においてモーター(56)を駆動させると歯車
付きナット(55)が回転してリードねじ(54)が上下に
移動する。よって、リードねじ(54)の上下移動に伴い
対物レンズの保持部材(52)はリニアボールベアリング
ガイド(53)に沿って上下に移動する。
When the motor (56) is driven in the above configuration, the geared nut (55) rotates and the lead screw (54) moves up and down. Therefore, as the lead screw (54) moves up and down, the holding member (52) of the objective lens moves up and down along the linear ball bearing guide (53).

対物レンズ保持部材(52)には投影レンズ(57)が取
付けられており、投影ヘッド(52)の上下移動によりス
テージ(58)に載置された被検物(59)に合焦する。
A projection lens (57) is attached to the objective lens holding member (52), and focuses on an object (59) mounted on a stage (58) by moving the projection head (52) up and down.

以上のように従来の技術においては、投影ヘッド(5
2)を合焦のために上下動させるための部材は装置本体
内部前面に配置されていた。
As described above, in the conventional technology, the projection head (5
A member for vertically moving 2) for focusing was arranged on the front inside the apparatus main body.

〔考案が解決しようとする課題〕[Problems to be solved by the invention]

しかしながら従来の技術は、合焦させるために投影ヘ
ッド(又は載物台)を上下動させる案内(リニアボール
ベアリングガイド)や上下に駆動させる駆動装置を各々
単独で拡大観察装置本体に取付けるように構成されてい
た。そのため本体に取付ける各々の構成部材の整合性を
保つために、所定位置に取付けた後にそれぞれ個々に調
整を行なわなければならず、作業性が悪いという問題が
あった。
However, in the prior art, a guide (linear ball bearing guide) for vertically moving a projection head (or a stage) and a driving device for vertically driving a projection head (or a stage) for focusing are independently mounted on the main body of the magnifying observation apparatus. It had been. Therefore, in order to maintain the consistency of the components attached to the main body, it is necessary to individually adjust the components after they are attached to predetermined positions, and there is a problem that workability is poor.

また、比較的本体に取付けやすい前面部分に構成部材
をが集中することになり、部材の配置やその取付けのた
めに、本体前面部に穴や切欠き等を設けねばならず、そ
れ故に本体の剛性を悪くしている問題もあった。
Also, the components are concentrated on the front part which is relatively easy to attach to the main body, and holes and notches must be provided in the front part of the main body for the arrangement and attachment of the members. There was also a problem that the rigidity was deteriorated.

更に、穴や切欠き等を覆うための部品を必要とする欠
点もあった。
Further, there is a disadvantage that a component for covering a hole, a notch or the like is required.

本考案の目的は、剛性が高く、組立調整が容易でしか
も部品点数を減少させた拡大観察装置が得られる合焦用
上下動装置を提供することにある。
SUMMARY OF THE INVENTION It is an object of the present invention to provide an in-focus vertical movement device capable of obtaining a magnifying observation device having high rigidity, easy assembly adjustment, and reduced number of parts.

〔課題を解決する為の手段〕[Means for solving the problem]

上記目的のために、拡大観察装置における合焦用上下
動装置を、対物レンズの保持部材(13)と載置台の保持
部材とのいずれか一方を保持する上下動テーブル(3)
と、前記上下動テーブル(3)の合焦のために上下動さ
せる駆動装置(4、5、6、7)と、前記駆動装置が取
り付けられると共に、前記駆動装置が前記拡大観察装置
内に配設されるように拡大観察装置本体に取り付けられ
る基板(1)と、を有する構成にした。
For the above purpose, a vertical movement device for focusing in a magnifying observation apparatus is provided by a vertical movement table (3) for holding one of a holding member (13) for an objective lens and a holding member for a mounting table.
And a driving device (4, 5, 6, 7) for vertically moving the vertically moving table (3) for focusing, and the driving device is mounted, and the driving device is disposed in the magnifying observation device. And a substrate (1) attached to the magnifying observation apparatus main body so as to be provided.

〔作用〕[Action]

本考案においては、上下動装置を構成する部材を基板
上に配設するようにしたので、上下動装置を部分組立し
た後、本体に取付けることが可能となるので組立が容易
になると共に基板を本体裏側から取付けるので本体前面
に構成部材が集結する不都合は解消する。
In the present invention, the members constituting the up-down movement device are arranged on the substrate, so that the up-down movement device can be attached to the main body after partially assembling, so that the assembling becomes easy and the substrate is removed. Since it is mounted from the back side of the main body, the inconvenience that the constituent members gather on the front surface of the main body is eliminated.

また前記の様に上下動装置を本体裏側から基板によっ
て取付けるようにしたので、従来のように本体前面に設
けた穴や切欠き等が不要となる。よって、それを覆う部
品を必要としなくなることに加えて本体裏側から基板を
固設するので本体の剛性が高くなる。
Further, as described above, since the vertical movement device is mounted from the back side of the main body by the substrate, holes and notches provided on the front surface of the main body as in the related art are not required. Therefore, in addition to eliminating the necessity of a component covering the substrate, the rigidity of the main body is increased because the substrate is fixed from the back side of the main body.

〔実施例〕〔Example〕

第1図は本考案の一実施例であって、投影機本体(1
5)の裏側から固設された基板(1)にはリニアボール
ベアリングガイド(2、2′)(以下リニアガイドと称
する)のリニアガイドレール(2)が基板(1)の上部
の左右に2個、下部に中央に1個、固設されリニアガイ
ド(2、2′)のベアリング(2′)は上下動テーブル
(3)の前記のレール(2)の対向する位置に固設され
ており、上下動テーブル(3)を基板(1)に対して移
動自在にしている。
FIG. 1 shows an embodiment of the present invention.
5) Linear guide rails (2) of linear ball bearing guides (2, 2 ') (hereinafter referred to as linear guides) are fixed on the substrate (1) fixed from the back side of the substrate (1) on the left and right of the upper part of the substrate (1). The bearings (2 ') of the linear guides (2, 2') are fixedly mounted at the lower portion and one at the center, and are fixed at positions opposed to the rails (2) of the vertically movable table (3). The vertically moving table (3) is movable with respect to the substrate (1).

基板(1)には上下動テーブル(3)の駆動機構であ
るリードねじ(4)を軸支する2つの軸受(5、6)が
固設され、一端にかさ歯車(8)を設けたリードねじ
(4)が軸支されている。
Two bearings (5, 6) for supporting a lead screw (4), which is a drive mechanism of a vertically moving table (3), are fixedly mounted on the substrate (1), and a lead having a bevel gear (8) provided at one end. A screw (4) is supported.

リードねじ(4)にはナット(7)が螺合しており、
ナット(7)は上下動テーブル(3)に固設されてい
る。
A nut (7) is screwed into the lead screw (4),
The nut (7) is fixed to the vertically movable table (3).

軸受(6)に支持された継手に設けたかさ歯車
(8′)はリードねじ(4)に設けられたかさ歯車
(8)と噛合している。継手(11)は本体(15)の前側
から押入されたハンドル軸(10)の一端とピン(11′)
によって連結されており、ハンドル軸(10)の他端には
ハンドル(9)が固設されている。
The bevel gear (8 ') provided on the joint supported by the bearing (6) meshes with the bevel gear (8) provided on the lead screw (4). The joint (11) has one end of the handle shaft (10) pushed in from the front side of the main body (15) and a pin (11 ').
The handle (9) is fixedly mounted on the other end of the handle shaft (10).

上記の如く構成された投影機の動作について以下説明
する。
The operation of the projector configured as described above will be described below.

ハンドル(9)を回転させるとかさ歯車(8′)、
(8)の噛合によりその回転はリードねじ(4)に伝達
される。リードねじ(4)の回転により螺合しているナ
ット(7)がリードねじ(4)に沿って上下に移動す
る。ナット(7)を固定している上下動テーブル(3)
は、ナット(7)の動きと同じくしてリニアガイドレー
ル(2)に沿って上下に移動する。従って対物レンズの
保持部材(13)は上下に移動して合焦が行なわれる。
By rotating the handle (9), the bevel gear (8 '),
By the engagement of (8), the rotation is transmitted to the lead screw (4). The nut (7) screwed by the rotation of the lead screw (4) moves up and down along the lead screw (4). Vertical table (3) fixing nut (7)
Moves up and down along the linear guide rail (2) in the same manner as the movement of the nut (7). Therefore, the holding member (13) of the objective lens moves up and down to perform focusing.

本考案の実施例では上下動の案内として、リニアガイ
ドを3本用いたが、案内機構としては、剛性を考慮して
用いればこれにこだわるものではない。また別種の案内
機構、例えばアリ溝ガイド、クロスローラーガイドなど
を用いてもよい。尚、駆動機構においてナット(7)を
移動させるようにしたが、リードねじを移動するように
してよい。更には上下動装置を駆動させるためにハンド
ル(9)による手動を説明したがこれにこだわるもので
はなく、電動にしてもよい。また、上下動装置は、対物
レンズの保持部材を上下動させているが、載置台の保持
部材を上下動させてもよい。
In the embodiment of the present invention, three linear guides are used as vertical guides, but the guide mechanism is not limited to this if it is used in consideration of rigidity. Further, another type of guide mechanism, for example, a dovetail guide, a cross roller guide, or the like may be used. Although the nut (7) is moved in the drive mechanism, the lead screw may be moved. Further, the manual operation using the handle (9) has been described for driving the up-and-down moving device. However, the present invention is not limited to this, and may be electrically operated. In addition, although the vertical movement device moves the holding member of the objective lens up and down, the holding member of the mounting table may be moved up and down.

第2図は本考案の合焦上下動装置の斜視図であって、
基板(1)にリニアガイド(2、2′)を介して上下動
テーブル(3)が上下に移動自在に取付けられており、
基板(1)に固設された軸受(5)、(6)に軸支さ
れ、回転自在なリードねじには上下動テーブル(3)に
固設されたナット(7)が螺合している。リードねじ
(4)の軸受(6)側の端には不図示のかさ歯車が設け
られ軸受(6)に軸支された継手(11)に固設されたか
さ歯車と噛合している。
FIG. 2 is a perspective view of the focusing device of the present invention.
A vertically moving table (3) is mounted on the substrate (1) via linear guides (2, 2 ') so as to be vertically movable.
A nut (7) fixed to a vertically movable table (3) is screwed to a rotatable lead screw which is rotatably supported by bearings (5) and (6) fixed to the substrate (1). . A bevel gear (not shown) is provided at an end of the lead screw (4) on the bearing (6) side, and meshes with a bevel gear fixed to a joint (11) supported by the bearing (6).

上記の如く基板上に一体に成した合焦上下動装置を装
置本体(15)の裏側より取付けた後に上下動テーブル
(3)に不図示の対物レンズの保持部材が取付けられ
る。
After attaching the focusing up / down movement device integrally formed on the substrate as described above from the back side of the apparatus main body (15), the holding member of the objective lens (not shown) is attached to the up / down movement table (3).

第3図は本考案の合焦上下動装置を備えた投影機の分
解斜視図である。
FIG. 3 is an exploded perspective view of the projector provided with the focusing up-down movement device of the present invention.

基板(1)に上下移動自在に設けた上下動テーブル
(3)は本体(15)の裏側から基板(1)の取付により
本体内部に配置され、そのテーブル面に対物レンズの保
持部材(13)を取付けるようにした。
A vertically movable table (3) movably provided on the substrate (1) is disposed inside the main body (15) by attaching the substrate (1) from the back side of the main body (15), and the objective lens holding member (13) is provided on the table surface. Was installed.

〔考案の効果〕[Effect of the invention]

上述の実施例によれば、上下動装置を基板上に構築
し、該基板を断面がコの字形状をした装置の本体部にコ
の字のあいている一辺となるように取りつけることによ
って、断面をロの字形に成し、内部に上下動部を配置す
るようにしたので、組立調整が容易に行え、形状がコン
パクトで部品点数も少なく、したがってコストも安く、
本体の剛性も高くなるという効果がある。また一般に投
影機などの装置においては落射照明装置を本体の前側に
内蔵している。本考案では上下動部を形成した基板を、
断面がロの字形の胴体の裏板となるように配置したの
で、落射照明の光源の熱によって胴体前面が熱膨張して
も上下動部への影響は少なく、投影機などの光学測定機
に起こりがちな光軸のズレによる測定誤差が、本考案に
おいては起こりにくいという利点がある。
According to the above-described embodiment, a vertically moving device is constructed on a substrate, and the substrate is attached to the main body of the device having a U-shaped cross section so as to be one side of the U-shape. The cross section is a square shape and the vertical moving parts are arranged inside, so assembly and adjustment can be done easily, the shape is compact, the number of parts is small, and the cost is low,
This has the effect of increasing the rigidity of the main body. In general, in an apparatus such as a projector, an epi-illumination device is built in the front side of a main body. In the present invention, the substrate on which the vertical
It is arranged so that its cross-section becomes the backside of the body with a square shape, so even if the front of the body thermally expands due to the heat of the epi-illumination light source, there is little effect on the up-and-down moving parts. An advantage of the present invention is that measurement errors due to optical axis misalignment that are likely to occur are less likely to occur in the present invention.

従って、本考案によれば、剛性が高く、組立調整が容易
で部品点数を減少させた拡大観察装置における合焦用上
下動装置が得られる。
Therefore, according to the present invention, it is possible to obtain a focusing vertical moving device in a magnifying observation device having high rigidity, easy assembly adjustment, and reduced number of parts.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本考案による装置の実施例を示す縦断面図、 第2図は本考案による合焦上下動装置を示す斜視図、 第3図は第2図の合焦上下動装置を本体に取り付け、そ
のテーブル上に対物レンズの保持部材が取り付く様子を
示す分解斜視図、 第4図は従来の上下動装置を備えた投影機の縦断面図で
ある。 〔主要部分の符号の説明〕 1……基板、2……リニアガイドレース 2′……ベアリング、3……上下動テーブル 4……リードねじ、5、6……軸受け 7……ナット、8、8′……かさ歯車
FIG. 1 is a longitudinal sectional view showing an embodiment of the device according to the present invention, FIG. 2 is a perspective view showing a focusing vertical moving device according to the present invention, and FIG. FIG. 4 is an exploded perspective view showing a state where the holding member of the objective lens is mounted on the table, and FIG. 4 is a longitudinal sectional view of a projector equipped with a conventional vertical movement device. [Description of Signs of Main Parts] 1... Substrate 2... Linear guide race 2 ′... Bearing 3... Vertical movement table 4. Lead screw 5 6 Bearing 7. 8 'bevel gear

Claims (1)

(57)【実用新案登録請求の範囲】(57) [Scope of request for utility model registration] 【請求項1】対物レンズの保持部材と載物台の保持部材
とのいずれか一方を保持する上下動テーブルと、コの字
形断面の支柱を開口部が後面に位置する如く有する拡大
観察装置本体と、前記拡大観察装置本体の支柱の開口部
に後面から取り付けられてロの字形断面の支柱となす基
板と、前記上下動テーブルを移動自在になすガイドと、
前記上下動テーブルを上下動させる駆動装置とを有し、 前記基板が前記上下動テーブルと前記ガイドと前記駆動
装置とを保持し、前記上下動テーブルと前記ガイドと前
記駆動装置が前記本体内に収納されるように、前記基板
が拡大観察装置本体の支柱の開口部に後面から取り付け
られて、ロの字形断面の支柱となすことを特徴とする、
拡大観察装置における合焦用上下動装置。
1. A magnifying observation apparatus main body having a vertically movable table for holding one of a holding member for an objective lens and a holding member for a stage, and a column having a U-shaped cross-section such that an opening is located on a rear surface. And a substrate attached to the opening of the column of the magnifying observation apparatus main body from the rear surface to form a column with a square cross section, and a guide that makes the vertically moving table movable.
A drive device for vertically moving the vertical movement table, wherein the substrate holds the vertical movement table, the guide, and the drive device, and the vertical movement table, the guide, and the drive device are inside the main body. The substrate is attached to the opening of the column of the magnifying observation apparatus main body from the rear surface so as to be housed, and the substrate is formed into a column having a square cross section.
A vertical movement device for focusing in a magnifying observation device.
JP1989104254U 1989-09-05 1989-09-05 Vertical movement device for focusing in magnifying observation equipment Expired - Fee Related JP2555016Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989104254U JP2555016Y2 (en) 1989-09-05 1989-09-05 Vertical movement device for focusing in magnifying observation equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989104254U JP2555016Y2 (en) 1989-09-05 1989-09-05 Vertical movement device for focusing in magnifying observation equipment

Publications (2)

Publication Number Publication Date
JPH0343615U JPH0343615U (en) 1991-04-24
JP2555016Y2 true JP2555016Y2 (en) 1997-11-19

Family

ID=31653055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989104254U Expired - Fee Related JP2555016Y2 (en) 1989-09-05 1989-09-05 Vertical movement device for focusing in magnifying observation equipment

Country Status (1)

Country Link
JP (1) JP2555016Y2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4331754Y1 (en) * 1966-11-28 1968-12-23
JPH071610Y2 (en) * 1986-04-22 1995-01-18 株式会社ニコン Vertical movement device for focusing in magnifying observation device

Also Published As

Publication number Publication date
JPH0343615U (en) 1991-04-24

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