JP2508503B2 - Photoelectric conversion device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention provides a semiconductor functional element and an optical element, respectively, disposed between a first transparent substrate and a second transparent substrate. The present invention relates to a photoelectric conversion device configured to perform photoelectric conversion between the optical element and the optical element, and is optimal when applied to a liquid crystal color display.

[Outline of Invention]

According to the present invention, a semiconductor functional element and an optical element are respectively arranged between a first transparent substrate and a second transparent substrate, and photoelectric conversion is performed between the semiconductor functional element and the optical element. In the photoelectric conversion device described above, a light control layer at least partially formed of a filter made of an organic material for selecting the wavelength of light entering and leaving the optical element is uniformly formed on the first transparent substrate. Of the filter and the optical element by respectively forming the semiconductor functional element and the optical element on the light control layer.
It is possible to prevent a color shift due to a parallax from the transparent substrate side portion of the above, and when combining the first transparent substrate and the second transparent substrate, the pattern of the filter and the pattern of the semiconductor functional element are used. And the alignment of the optical element with the pattern on the side of the first transparent substrate of the optical element is unnecessary.
There is no fear that unevenness will occur in the light control layer, especially the filter, and color unevenness will not occur due to this unevenness, and the process of forming the light control layer, especially the filter, can be simplified, and the light control layer can be provided at low cost. It is something that can be done.

[Conventional technology]

Conventionally, for example, a liquid crystal color display for a liquid crystal color television has a structure as shown in FIG. As shown in FIG. 3, in the conventional liquid crystal color display, red (R), green (G), arranged in a mosaic pattern,
A glass substrate 5 on which a blue (B) color filter 1, a protective layer 2, a transparent electrode 3 made of ITO, which is a common electrode for each picture element, and a liquid crystal alignment layer 4, are sequentially provided, and a TFT for switching the picture element. The liquid crystal 11 is sealed between the (thin film transistor) 6, the SiO ₂ film 7, the pixel electrode 8 made of ITO, and the glass substrate 10 on which the liquid crystal alignment layer 9 is provided.
Polarizing plates 12 and 13 are provided on one side of each of the. In FIG. 3, for example, the color filters 1a to 1c correspond to red, green and blue color filters, respectively.

The TFT 6 includes a source region 14, a drain region 15, an Si layer 16 forming an active layer, a gate electrode 17 and the gate electrode 17
And the Si layer 16 between the gate insulating film and the SiO ₂ film 7, and the pixel electrode 8 is formed in the drain region 15.
One end of is connected.

In the liquid crystal color display shown in FIG. 3, light from a light source (not shown) provided on the back side of the polarizing plate 13 is used.
18 is made incident on the liquid crystal 11 through the polarizing plate 13 and the passage of the light 18 in the liquid crystal 11 is controlled by the on / off operation of the TFT 6, thereby being selected according to the color filters 1a to 1c of the respective picture elements. Light of a wavelength is emitted from the polarizing plate 12 to display a desired color image.

In the liquid crystal color display shown in FIG. 3 described above, the color filter 1 is not provided on the outer surface (that is, the surface opposite to the liquid crystal 11) of the glass substrate 5, but the inner surface (that is, the surface on the liquid crystal 11 side). This is to minimize the parallax between the picture element electrode 8 provided on the glass substrate 10 and the color filter 1 having the same picture element. Originally, the color filter 1 may be provided at any place on the light path, but it is essential to eliminate the parallax described above in order to prevent color misregistration.

[Problems to be solved by the invention]

However, in the conventional liquid crystal color display having the structure as shown in FIG. 3, the parallax becomes relatively large especially when the pixel pitch (or size) is made small for high resolution, and as a result, The color shift was unavoidable.

It is an object of the present invention to provide a photoelectric conversion device such as a liquid crystal color display in which the above-mentioned drawbacks of the prior art are corrected.

[Means for solving problems]

The present inventors have conducted extensive studies to correct the above-mentioned drawbacks of the liquid crystal color display, and have devised the present invention with this as a starting point.

That is, the present invention relates to a first transparent substrate (for example, glass substrate 10) and a second transparent substrate (for example, glass substrate 5).
And a semiconductor functional element (for example, a TFT 6) and an optical element (for example, a liquid crystal element including a liquid crystal 11, liquid crystal alignment layers 4 and 9, a pixel electrode 8 and a transparent electrode 3) are arranged between
In a photoelectric conversion device configured to perform photoelectric conversion between the semiconductor functional element and the optical element, a filter made of an organic material for selecting the wavelength of light entering and leaving the optical element (for example, color filter 1) A light control layer at least partially composed of (eg a layer consisting of color filter 1 only or color filters 1d, 1e, 1
The layer consisting of f, 1 g and the black filter 19) is the first
Is formed on the transparent substrate with a substantially uniform thickness, and the semiconductor functional element and the optical element are formed on the light control layer.

[Action]

With this configuration, the filter and the portion of the optical element on the side of the first transparent substrate can be formed without causing unevenness in the filter to cause color misregistration or complicating the filter forming process. Can be in close proximity.

〔Example〕

An embodiment in which the photoelectric conversion device according to the present invention is applied to a transmissive liquid crystal color display will be described below with reference to the drawings. In the following FIGS. 1 and 2, the same parts as those in FIG. 3 are designated by the same reference numerals, and the description thereof will be omitted as necessary.

As shown in FIG. 1, in the liquid crystal color display according to this embodiment, a color filter 1 made of an organic material and a protective layer 2 made of, for example, a Si ₃ N ₄ film having a film thickness of 0.1 to 1 μm are provided on a glass substrate 10. On this protective layer 2
It has the same structure as the conventional liquid crystal color display shown in FIG. 3 except that a TFT 6, a SiO ₂ film 7, a pixel electrode 8 and a liquid crystal alignment layer 9 made of SiO ₂ are provided.

The organic color filter 1 is formed by using a lithography technique, a printing technique, or the like. Further, since this organic color filter 1 has a low heat resistance temperature of about 200 ° C., each TFT 6 constituting the TFT array has been developed by the present inventors, for example, in Japanese Patent Application No. 60-178921 (Japanese Patent Laid-Open No. 62-3906).
It is formed by a low temperature process using the annealing technique using an excimer laser described in Japanese Patent Publication No. 8). That is, for example, Mo is used as the material of the gate electrode 17, the source region 14, and the drain region 15, and an a-Si: H film formed by a plasma CVD method or the like is used as the Si layer 16 and irradiated with an excimer laser beam. By heating, the a-Si: H film is made into polycrystalline Si.
Form a TFT.

Although the driver IC for sequentially driving the picture elements is not shown in FIG.
For the IC, for example, an organic film made of the same material as the color filter 1 is applied on the glass substrate 10 other than the display unit, and the organic film is applied on the organic film.
It can be integrated by forming a TFT.

According to the above-mentioned embodiment, the color filter 1 is provided on the glass substrate 10, and the protective layer 2 is provided on the color filter 1.
Since the TFT 6, the pixel electrode 8 and the like are provided through the above, the color filter 1 and the pixel electrode 8 have a very close structure. Therefore, even if the pixel pitch (size) is reduced for higher resolution, no parallax between the color filter 1 and the pixel electrode 8 occurs. Therefore, it is possible to display an extremely clear image without color shift due to parallax. Further, according to the above-described embodiment, since the color filter 1 and the TFT 6 are provided on the glass substrate 10, the pattern of the color filter 1 is filled when the liquid crystal 11 is filled, as in the conventional liquid crystal color display shown in FIG. It is not necessary to align the TFT 6 and the pattern of the pixel electrodes 8 with each other, and therefore the liquid crystal color display can be easily manufactured.

Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made based on the technical idea of the present invention. For example, it is not always necessary to use a filter made of an organic material as the color filter 1, and a filter made of an inorganic material may be used if necessary. In addition, for example, in the above-described embodiments, the light control layer is composed of only the color filter 1. However, by providing the black filter 19 and the TFT 6 on the black filter 19, the light control layer is colored. It is also possible to comprise the filter 1 and the black filter 19. In this way, light is prevented from entering the TFT 6, and thus the characteristic change of the TFT 6 due to light irradiation can be prevented. Further, even if the light control layer is composed of the color filter 1 and the light shielding layer by providing the light shielding layer of Al or the like on the boundary region between the color filters 1 adjacent to each other, the same effect as described above can be obtained. In FIG. 2, reference numeral 20 is a signal electrode connected to the gate electrode of each TFT 6, and reference numeral 21 is a scanning electrode connected to the source region of each TFT 6.

Further, in the above-mentioned embodiments, the case where the present invention is applied to the liquid crystal color display has been described, but the present invention can also be applied to an image sensor or a line sensor (in this case, FIG. LCD 11
Etc.). Furthermore, electroluminescence (EL) elements, light emitting diodes (LEDs), photoconductors, etc. are used as optical elements, and transistors such as TFTs, diodes, etc. are used as semiconductor functional elements, and photoelectric conversion is performed between them. The present invention can be applied to various photoelectric conversion devices that perform the above.

〔The invention's effect〕

According to the invention, a light control layer at least partially made up of a filter for selecting the wavelength of light entering and leaving the optical element is formed on the first transparent substrate with a substantially uniform thickness. At the same time, a semiconductor functional element and an optical element are formed on the light control layer. Therefore, since the filter and the portion of the optical element on the first transparent substrate side are in close proximity to each other, even if the pixel pitch is reduced for higher resolution, the filter and the first transparent substrate side of the optical element are arranged. It is possible to substantially prevent the occurrence of color shift due to the parallax with the portion. Further, the alignment of the pattern of the filter with the pattern of the semiconductor functional element or the pattern of the portion of the optical element on the side of the first transparent substrate is carried out on the first transparent substrate after the filter after the first of the semiconductor functional element and the optical element. Since it can be performed when sequentially forming the portion on the transparent substrate side of, the alignment of the pattern is not necessary when the second transparent substrate is combined with the first transparent substrate.

In addition, a light control layer at least partially formed of a filter for selecting the wavelength of light entering and leaving the optical element is formed on the first transparent substrate with a substantially uniform thickness, and A semiconductor functional element and an optical element are respectively formed on the control layer. Therefore, a light control layer at least partially composed of a filter is formed to be substantially flat on the first transparent substrate, and then a semiconductor functional element and an optical element are formed on the almost flat light control layer. Therefore, as in the case where the light control layer is formed after the semiconductor functional element and the optical element are respectively formed on the first transparent substrate, the light control layer is formed according to the complicated unevenness of the semiconductor functional element. In particular, there is no fear that irregularities will occur in the filter (for example, a thickness of about 1 μm) and color irregularity will occur due to these irregularities, and the process of forming the semiconductor functional element will not be complicated, and the light control layer, especially the filter The forming process can be simplified. Further, the gate lines and the source lines are intersected with each other on the first transparent substrate to form a lattice shape as a whole so that the semiconductor functional elements are scattered at each intersection, and the semiconductor functional elements, the gate lines and the sources are also provided. By providing the filter on the first transparent substrate only in the portion where the line does not exist, it is possible to arrange the semiconductor functional device and the filter on the first transparent substrate in the plane direction of the first transparent substrate. As described above, it is necessary to form the filter on the first transparent substrate only in the portion where the semiconductor functional element having the complicated unevenness, the gate line and the source line do not exist, which may make the filter forming process troublesome. Absent.

Furthermore, since the filter for selecting the wavelength of light entering and leaving the optical element is made of an inexpensive organic material having poor heat resistance, a light control layer at least partially composed of the filter, and thus photoelectric conversion. The device can be provided at low cost.

[Brief description of drawings]

FIG. 1 is a sectional view of a liquid crystal color display according to an embodiment of the present invention, FIG. 2 is a plan view of a liquid crystal color display according to a modification of the present invention, and FIG. 3 is a sectional view of a conventional liquid crystal color display. In the reference numerals used in the drawings, 1 ... color filter 3 ... transparent electrode 4,9 ... liquid crystal alignment layer 5 ... glass substrate (second transparent substrate) 6 ... TFT (semiconductor functional element) 8 ... Pixel electrode 10: Glass substrate (first transparent substrate) 11: Liquid crystal 12, 13: Polarizing plate 19: Black filter.

Claims (1)

(57) [Claims] 1. A semiconductor functional element and an optical element are respectively disposed between a first transparent substrate and a second transparent substrate, and photoelectric conversion is performed between the semiconductor functional element and the optical element. In the photoelectric conversion device described above, a light control layer at least partially formed of a filter made of an organic material for selecting the wavelength of light entering and leaving the optical element is provided on the first transparent substrate. A photoelectric conversion device having a uniform thickness and the semiconductor functional element and the optical element respectively formed on the light control layer.