JP2503710B2 - X-ray deriving window of X-ray irradiator and manufacturing method thereof - Google Patents

Description

TECHNICAL FIELD The present invention relates to a window for deriving X-rays from an X-ray generator of an X-ray irradiator and a method for manufacturing the window, and a specific component as a bonding material layer. By using one containing more than one, and by diffusion bonding after forming this bonding material layer, without impairing the strength and shape of the beryllium window material,
The X-ray derivation window having excellent heat resistance can be manufactured.

"Prior Art" X as an apparatus for exposing the pattern of a high-density integrated circuit
A line irradiation device is provided. In general, this X-ray irradiator takes out X-rays generated by an X-ray generator kept in a vacuum through an X-ray derivation window and passes the derived X-rays through a mask on which a predetermined absorber pattern is formed. To irradiate the sample. It is known that a beryllium thin film is optimal as a material for forming the X-ray deriving window of the X-ray irradiator, in terms of the X-ray transmittance and maintaining the degree of vacuum of the X-ray generating portion.

By the way, since the beryllium thin film itself cannot be directly attached to the apparatus main body, the window material made of the beryllium thin film is attached to the apparatus main body through a frame member for reinforcement and fixing.

The joining of the beryllium thin film and the frame member has conventionally been performed by joining using an adhesive, a brazing method, or an electron beam welding method.

[Problems to be Solved by the Invention] However, when the beryllium window material and the frame member are joined as described above, there are the following problems.

In the joining method using an adhesive, the manufactured X
The heat resistance of the X-ray drawing window becomes insufficient, and the X-ray drawing window cannot withstand the vacuum baking process performed at about 200 to 400 ° C.

When the brazing method is adopted, the beryllium window material is exposed to a high temperature of about 800 to 1000 ° C. at the time of joining, so that the strength of the beryllium window material deteriorates. Therefore, it is difficult to make the window material thin, and it becomes difficult to improve the X-ray transmittance by thinning the window material.

In the electron beam welding method, since a strong electron beam is used, the beryllium window material is easily thermally deformed. Further, when the window material is made thin, this problem occurs more frequently.

The present invention has been made in view of the above circumstances, and an object of the present invention is to make it possible to manufacture an X-ray derivation window having excellent heat resistance without impairing its strength or shape even if the beryllium window material is thin. To aim.

"Means for Solving the Problem" In the X-ray deriving window of the X-ray irradiator of the present invention, the window material and the frame member are diffused through a bonding material layer containing one or more components selected from silver, gold and nickel. The above object was achieved by joining.

The thickness of the bonding material layer is preferably about 1 to 200 μm. If the bonding material layer is formed thinner than this range, the disadvantage that bonding cannot be performed occurs. In addition, if the thickness of the bonding layer exceeds this range, the disadvantage that sufficient bonding cannot be achieved still occurs.

As a method of manufacturing the X-ray derivation window of this X-ray irradiation device,
A preferable method is to form a layer made of a bonding material containing one or more components selected from silver, gold and nickel by a vapor phase method, and then superimpose the window material and the frame member on each other and heat and pressurize.

Here, the vapor phase method is a broad concept and includes a physical vapor deposition method such as a vacuum vapor deposition method and a chemical vapor deposition method such as a chemical vapor deposition method. If the vapor phase method is adopted when forming the bonding material layer, the treatment can be performed at a relatively low temperature, and thus thermal damage to the beryllium window material can be avoided.

The heating and pressurizing treatment performed after the window member and the frame member are superposed on each other is preferably performed at a pressure of 1 to 100 kg / mm ² . If the pressure is less than this range, there is a disadvantage that diffusion bonding does not occur. Further, if the pressure exceeds this range, there is an inconvenience that deformation of the joint portion and its peripheral portion begins to occur.

Further, it is desirable that the temperature of the heat and pressure treatment is set in the range of 300 to 900 ° C. If the temperature falls below this range, the disadvantage that diffusion bonding does not occur sufficiently occurs. On the other hand, if the temperature exceeds this range, diffusion bonding will proceed too much and the strength will decrease, which is a disadvantage.

Further, it is desirable to set the time for performing the heating / pressurizing treatment in the range of 30 to 120 minutes. If the processing time is short, the bonding material cannot be sufficiently diffused in the window material and the frame member. Further, if the treatment time exceeds this range, further improvement in the bonding strength can hardly be expected, which is uneconomical.

In addition, it is desirable that this heat and pressure treatment is performed in a vacuum atmosphere of about 10 ^-2 to 10 ^-6 Torr. If the degree of vacuum is less than this range, the surfaces of the Be foil and the bonding material layer are oxidized, which causes a disadvantage that diffusion bonding is stopped. Further, if the degree of vacuum exceeds this range, there is a disadvantage that a more expensive vacuum system is required and it becomes uneconomical.

The position for forming the bonding layer may be on either side of the window member or the frame member.

"Operation" Since silver, gold, and nickel used as the bonding material in the X-ray deriving window of the X-ray irradiating apparatus of the present invention easily diffuse into beryllium, a window material containing beryllium as a main component and stainless steel are used. It is possible to reliably perform diffusion bonding with the frame member.
In addition, these bonding materials have a temperature (about 30
Since it has a melting point of 0 ° C. to 400 ° C.) or higher, the X-ray deriving window of the present invention can sufficiently satisfy the heat resistance required for practical use.

After the bonding material layer is formed, the window material and the frame member are overlapped with each other and subjected to heat and pressure treatment, whereby the metal atoms of the thin film bonding material layer diffuse into the window material and the frame member to bond them.

"Embodiment" FIGS. 1 and 2 show an embodiment of the X-ray deriving window of the X-ray irradiator of the present invention, which is a window material 11 containing beryllium as a main component and having a thickness of 25 μm, and this window material. The frame member 12 is made of stainless steel (SUS304 or 430) and surrounds the periphery of the frame 11. The frame member 12 has a ring shape, and a step portion 13 is formed on the inner circumference thereof. The window material 11 is a stepped portion of the frame member 12.
It is arranged on 13 and is held between a pressing member 14 fitted to the inner circumference of the frame member 12 and this step portion 13.

A bonding layer 15 having a thickness of about 10 μm is provided between the window member 11 and the frame member 12. Nickel is used for the joining material forming the joining layer 15. And this bonding layer 15
Thus, the window material 11 and the frame member 12 are integrated.

 Next, a method of manufacturing this X-ray derivation window will be described.

In manufacturing this X-ray derivation window, a beryllium foil to be the window material 11 was first prepared. Beryllium foil production
It was performed by vacuum-depositing beryllium on the surface of a copper disc and then melting the copper plate in a nitric acid solution.

Next, the central portion of the window material 11 thus formed was covered with a mask material, and silver was vacuum-deposited in a thickness of 20 μm on the periphery to form the bonding layer 15.

After this, place the window material 11 on the stepped portion 13 of the frame member 12 and apply 10 ^-5 Torr.
r, a pressure of 10 kg / cm ² was applied between the stepped portion 13 of the frame member 12 and the periphery of the window material 11 in a vacuum atmosphere of 650 ° C. for 30 minutes, and the silver of the bonding layer 15 vapor-deposited around the window material 11 was applied. Atomic window material 11 and frame member 12
Diffused inside.

In this way, the window member 11 and the frame member 12 are joined and integrated via the joining layer 15, and then the pressing member 14 is fitted into the frame member 12 so as to sandwich the window member 11, and the X-ray shown in FIG. The derivation window was completed.

In the X-ray derivation window of this example, since the bonding layer 15 is formed of silver, the silver atoms of the bonding layer 15 are quickly diffused in the beryllium window material 11 so that the window material 11 and the frame member 12 are separated from each other. Securely join. Since the melting point of silver used as a bonding material in the X-ray drawing window is 960 ° C., the X-ray drawing window can sufficiently withstand the baking treatment performed at 200 to 400 ° C.

Further, since the window material 11 and the frame member 12 are diffusion-bonded to each other in the X-ray guiding window, the beryllium window material 11 and the frame member 12 can be integrated at low temperature without giving a thermal shock. Therefore, this X-ray derivation window can be manufactured without impairing the strength and shape of the beryllium window material 11.

Further, when the bonding material is laminated on the beryllium window material 11 by the vapor phase method when manufacturing the X-ray derivation window, the processing can be performed at a relatively low temperature, so that thermal damage to the beryllium window material can be avoided. .

As described above, according to the X-ray derivation window and the manufacturing method thereof, the beryllium-made window material 11 is not damaged when the window material 11 and the frame member 12 are joined, so that the window material 11 can be made thin. Can be planned.

"Effects of the Invention" As described above, in the X-ray deriving window of the X-ray irradiator of the present invention, the beryllium window material and the stainless steel frame member contain one or more components selected from silver, gold, and nickel. Since they are diffusion-bonded through the bonding material layer, atoms of the bonding material forming the bonding material layer are quickly diffused in the beryllium window material, and the window material and the frame member are reliably bonded. Further, the melting point of the metal forming the bonding material layer in the X-ray guiding window of the present invention is sufficiently higher than the temperature during baking. Therefore, the X-ray derivation window of the present invention has practically sufficient heat resistance that can sufficiently withstand baking.

Further, in the X-ray guiding window of the present invention, the window material and the frame member are diffusion-bonded, so that the beryllium window material and the frame member can be integrated at a low temperature without giving a thermal shock. Therefore, the X-ray derivation window of the present invention can be manufactured without impairing the strength and shape of the beryllium window material.

Furthermore, as a method of manufacturing the X-ray derivation window of the present invention,
After the bonding material layer is formed, the window material and the frame member are superposed on each other and heat-pressed for diffusion bonding, whereby the beryllium window material is not thermally damaged at all and the X-ray derivation window is provided. Can be manufactured.

Therefore, according to the X-ray deriving window of the X-ray irradiator of the present invention and the manufacturing method thereof, when the window member and the frame member are joined,
The window material made of beryllium can be made thin without damaging it.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of an X-ray deriving window of an X-ray irradiating apparatus of the present invention, and FIG. 2 is a plan view of the same. 11 …… Window material, 12 …… Frame member, 15 …… Joining layer.

Claims (2)

(57) [Claims] 1. An X-ray deriving window of an X-ray irradiator comprising a window material containing beryllium as a main component and a stainless steel frame member surrounding the window material, which is made of silver, gold or nickel. An X-ray deriving window of an X-ray irradiating device, wherein the window member and the frame member are diffusion-bonded through a bonding material layer containing one or more selected components. 2. A method of manufacturing an X-ray deriving window of an X-ray irradiating apparatus, comprising a window material containing beryllium as a main component and a stainless steel frame member surrounding the window material. A bonding material layer containing one or more components selected from silver, gold, and nickel is formed at the portion where the frame member is bonded, and then the window material and the frame member are overlapped and subjected to heat and pressure treatment for diffusion bonding of both. A method for manufacturing an X-ray deriving window of an X-ray irradiating device, comprising: