JP2024101253A - Decontamination system and decontamination method - Google Patents

Abstract

To perform decontamination inside the sealed chamber or an object to be decontaminated in the sealed chamber more securely by detecting the concentration of a decontamination gas component included in a condensate inside a sealed chamber.SOLUTION: Hydrogen peroxide water injected into an evaporator 16B by a pump 16A is gasified, which is supplied into an isolator 12 as decontamination gas through a decontamination gas supply line 16. Decontamination gas is condensed in the isolator 12, and the inside of the isolator 12 or an object to be decontaminated in the isolator 12 is decontaminated. A condensate sensor 26 which detects the concentration of hydrogen peroxide contained in the condensate is provided inside the isolator 12. On the basis of the hydrogen peroxide concentration of the condensate detected by the condensate sensor 26, a supply amount of hydrogen peroxide gas to be supplied into the isolator 12 is controlled.SELECTED DRAWING: Figure 1

Description

The present invention relates to a decontamination system and method for supplying a decontamination gas into a sealed chamber and decontaminating the sealed chamber or an object to be decontaminated within the sealed chamber with the decontamination gas condensed in the sealed chamber.

A wet decontamination method is known in which a decontamination gas such as hydrogen peroxide gas is supplied into a sealed chamber such as an isolator, and the decontamination gas is condensed on the surface of the object to be decontaminated in the sealed chamber to decontaminate the surface of the object to be decontaminated. In addition, a decontamination method is known in which a condensation sensor capable of detecting the condensation of the decontamination gas is provided in the sealed chamber, and the condensation amount of the condensate is measured by the condensation sensor to manage the decontamination status in the sealed chamber (see Patent Documents 1 and 2).

Patent No. 4447893 Patent No. 4742058

When hydrogen peroxide gas is supplied as a decontamination gas into a sealed chamber, hydrogen peroxide has a lower vapor pressure than water, so hydrogen peroxide begins to condense first, followed by water. As a result, the concentration of hydrogen peroxide in the condensate decreases as condensation progresses. For decontamination, it is desirable that the concentration of hydrogen peroxide in the condensate be maintained at or above a predetermined value for a required period of time. However, in configurations such as those in Patent Documents 1 and 2 that use a condensation sensor to detect the presence or absence of condensation and the amount of condensation, there is a possibility that decontamination inside the sealed chamber is not being performed sufficiently.

The present invention aims to provide a decontamination system and method that can more reliably decontaminate a sealed chamber by detecting the concentration of decontamination gas components contained in the condensate in the sealed chamber.

The first invention of the present invention is a decontamination system comprising a decontamination gas generating means for generating a decontamination gas by gasifying a decontamination liquid, and a decontamination gas supplying means for supplying the decontamination gas generated by the decontamination gas generating means into a sealed chamber, and supplying the decontamination gas generated by the decontamination gas generating means into the sealed chamber, and decontaminating the sealed chamber or the object to be decontaminated within the sealed chamber by condensing the decontamination gas in the sealed chamber, characterized in that the decontamination system comprises a detection sensor provided in the sealed chamber for detecting the concentration of the decontamination gas component contained in the condensate, and a control means for controlling the supply amount of the decontamination gas supplied to the sealed chamber based on the concentration of the decontamination gas component contained in the condensate detected by the detection sensor.

The second aspect of the present invention is a decontamination system according to the first aspect of the present invention, which is characterized in that it includes an air supply means for supplying air into the sealed chamber and an exhaust means for exhausting air from the sealed chamber, and the control means operates the air supply means and the exhaust means during decontamination of the sealed chamber to ventilate the sealed chamber while controlling the amount of decontamination gas supplied to the sealed chamber.

The third invention of the present invention is a decontamination system according to the second invention, characterized in that the control means reduces the supply of decontamination gas when the concentration of decontamination gas components contained in the condensate detected by the detection sensor is lower than a predetermined value.

The fourth invention of the present invention is a decontamination system comprising a decontamination gas generating means for generating a decontamination gas by gasifying a decontamination liquid, and a decontamination gas supplying means for supplying the decontamination gas generated by the decontamination gas generating means into a sealed chamber, and supplying the decontamination gas generated by the decontamination gas generating means into the sealed chamber, and decontaminating the sealed chamber or the object to be decontaminated within the sealed chamber by condensing the decontamination gas in the sealed chamber, characterized in that the decontamination system comprises a detection sensor provided in the sealed chamber for detecting the concentration of the decontamination gas components contained in the condensate, an air conditioning means for adjusting the temperature and/or humidity within the sealed chamber, and a control means for operating the air conditioning means to control the temperature and/or humidity within the sealed chamber based on the concentration of the decontamination gas components contained in the condensate detected by the detection sensor.

The fifth aspect of the present invention is a decontamination system according to any one of the first to fourth aspects of the present invention, characterized in that it includes a decontamination liquid concentration adjustment means for concentrating or diluting the decontamination liquid supplied to the decontamination gas generation means.

The sixth aspect of the present invention is a decontamination method for supplying a decontamination gas obtained by gasifying a decontamination liquid into a sealed chamber and decontaminating the sealed chamber or an object to be decontaminated in the sealed chamber by condensing the decontamination gas in the sealed chamber, the method comprising a pre-decontamination process for dehumidifying the sealed chamber so that the humidity in the sealed chamber is equal to or lower than a predetermined value, a pre-condensation supply process for supplying decontamination gas into the sealed chamber until a detection sensor installed in the sealed chamber detects condensation of the decontamination gas, and a post-condensation supply process for detecting the concentration of decontamination gas components contained in the condensate by the detection sensor and controlling the supply amount of decontamination gas supplied into the sealed chamber based on the concentration of decontamination gas components contained in the condensate detected by the detection sensor.

The present invention provides a decontamination system and method that detects the concentration of decontamination gas components contained in the condensate in a sealed chamber, thereby more reliably decontaminating the sealed chamber.

FIG. 1 is a block diagram showing the arrangement of decontamination systems according to first and second embodiments of the present invention. 1 is a graph showing time series changes in hydrogen peroxide vapor concentration and relative humidity inside an isolator, and time series changes in hydrogen peroxide concentration and amount of condensate detected by a condensate sensor in a post-condensation supply process. FIG. 13 is a block diagram showing the arrangement of decontamination systems according to third to fifth embodiments of the present invention.

Embodiments of the present invention will now be described with reference to the drawings. Figure 1 is a block diagram showing the layout of a decontamination system according to the first and second embodiments of the present invention.

The decontamination system 10 of the first and second embodiments includes an isolator (sealed chamber) 12 whose interior is isolated from the outside atmosphere, and an inlet HEPA filter 12A is provided on the top side of the isolator 12, and an outlet HEPA filter 12B is provided on the bottom side. An air supply line (air supply means) 14 that supplies dry air is connected to the inlet HEPA filter 12A, and a decontamination gas supply line (decontamination gas supply means) 16 that gasifies and supplies a decontamination liquid such as hydrogen peroxide (H ₂ O ₂ ) is connected to the inlet HEPA filter 12A. In this embodiment, a commercially available 35% hydrogen peroxide solution is used as the decontamination liquid.

The air supply line 14 is provided with a heater 14A, a blower 14B, and a valve 14C from the upstream side. That is, by opening the valve 14C and operating the blower 14B, dry air heated to a predetermined temperature by the heater 14A can be supplied to the isolator 12 through the inlet HEPA filter 12A. In addition, the decontamination gas supply line 16 is provided with a pump 16A, an evaporator (decontamination gas generating means) 16B, and a valve 16C from the upstream side. That is, by opening the valve 16C and operating the pump 16A, the decontamination liquid is supplied to the evaporator 16B and vaporized. In addition, by operating the blower 20B, the decontamination gas generated in the evaporator 16B can be supplied to the isolator 12 through the inlet HEPA filter 12A. The means for gasifying the decontamination liquid is not limited to an evaporator that generates decontamination gas by dripping the decontamination liquid, and may be, for example, a means for vaporizing the decontamination liquid by ultrasonic waves.

An exhaust line (exhaust means) 18 is connected to the outlet HEPA filter 12B, and the exhaust line 18 is provided with a valve 18A, a blower 18B, and a catalyst 18C from the upstream side. In other words, by opening the valve 18A and operating the blower 18B, the gas containing the decontamination gas inside the isolator 12 can be rendered harmless by the catalyst 18C and then discharged to the outside.

In addition, one end of a circulation line 20 is connected between the outlet HEPA filter 12B and the valve 18A in the exhaust line 18, and the other end of the circulation line 20 is connected to the evaporator 16B of the decontamination gas supply line 16. The circulation line 20 is provided with a valve 20A, a blower 20B, and a dehumidifier (heat exchanger) 20C from the exhaust line 18 side. That is, when the valve 16C of the decontamination gas supply line 16 and the valve 20A of the circulation line 20 are opened and the blower 20B is operated, the exhaust gas containing the decontamination gas discharged from the isolator 12 through the outlet HEPA filter 12B is returned to the isolator 12 through the evaporator 16B and the inlet HEPA filter 12A.

A temperature sensor 22, a humidity sensor 24, and a condensate sensor (detection sensor) 26 are provided in the isolator 12, and signals from each of the sensors 22, 24, and 26 are sent to a control device (control means) 28. The condensate sensor 26 irradiates the condensate with an inspection light, detects the transmitted light, and calculates the hydrogen peroxide concentration (decontamination gas component concentration) contained in the condensate from the intensity of the detected transmitted light. It also calculates the proportion (coverage rate:%) of droplets (liquid film) present (covering the surface) on the surface of an inspection area of a predetermined size using a camera, and estimates the amount (weight) of condensate from the calculated coverage rate or from the coverage rate and the shape, thickness, etc. of the droplets (liquid film). The amount (weight) of condensate may be detected by machine learning such as deep learning from an image taken by a camera. Based on signals from sensors 22, 24, 26, the control device 28 controls the operation and opening/closing of the heater 14A, blower 14B, and valve 14C of the air supply line 14, the pump 16A, evaporator 16B, and valve 16C of the decontamination gas supply line 16, the valve 18A and blower 18B of the exhaust line 18, and the valve 20A, blower 20B, and dehumidifier 20C of the circulation line 20.

Next, the decontamination process in the decontamination system of the first and second embodiments will be described with reference to Figures 1 and 2. Note that Figure 2(A) is a graph showing the time series changes in the hydrogen peroxide vapor concentration HG (ppm) and relative humidity RH (%) in the isolator 12 in the decontamination process of this embodiment, and Figure 2(B) is a graph showing an example of the time series changes in the hydrogen peroxide concentration HL (wt%) and condensate amount CW (wt) of the condensate detected by the condensate sensor 26 in the post-condensation supply process P3 described later.

The decontamination process of this embodiment includes (1) a pre-decontamination process P1 in which the evaporator 16B is heated to a predetermined temperature and the humidity inside the isolator 12 is dehumidified to a predetermined value or less, (2) a pre-condensation supply process P2 in which decontamination gas is supplied into the isolator 12 until the condensate sensor 26 installed in the isolator 12 detects condensation of the decontamination gas, and (3) a post-condensation supply process P3 in which the amount of decontamination gas supplied into the isolator 12 is controlled based on the concentration of the decontamination gas component contained in the condensate detected by the condensate sensor 26. In each process of the decontamination process, the inside of the isolator 12 is kept at a positive pressure to maintain a sterile environment, and after the decontamination process is completed, (4) aeration P4 of the decontamination system 10 is performed.

Each step will be described in detail below.
(1) Pre-decontamination process (heating and humidity adjustment process) P1
First, in the pre-decontamination process P1, valves 16C and 20A are opened while valves 14C and 18A are closed, and the blower 20B is operated and the evaporator 16B is heated to heat the piping from the evaporator 16B to the isolator 12 so that condensation of the decontamination gas does not occur in the piping. Also, in this process, the dehumidifier 20C provided in the circulation line 20 is operated to dehumidify until the relative humidity RH in the isolator 12 detected by the humidity sensor 24 becomes a preset value RH _min or less (30% RH, more preferably 20% RH or less). In addition, the dehumidification inside the isolator 12 in this process is not limited to the method of dehumidifying by operating the dehumidifier 20C provided in the circulation line 20. It can also be performed by opening the valve 14C of the air supply line 14 and operating the blower 14B to supply low-humidity air (dry air) into the isolator 12, and opening the valve 18A of the exhaust line 18 and operating the blower 18B to exhaust the air inside the isolator 12, thereby replacing the air inside the isolator 12 with low-humidity air (dry air).

(2) Pre-condensation supply process P2
When the evaporator 16B is heated to a predetermined temperature and the relative humidity RH in the isolator 12 becomes equal to or lower than a predetermined value RH _min , the pre-condensation supply step P2 is started. In the pre-condensation supply step P2, the valves 14C and 18A are closed, the valves 16C and 20A are open, and the pump 16A is operated to start supplying hydrogen peroxide solution to the evaporator 16B. The supply of hydrogen peroxide gas through the decontamination gas supply line 16 is performed until the condensate sensor 26 detects the condensation of hydrogen peroxide gas (until the saturated vapor concentration HG _SAT is exceeded). In this step, the operation of the blower 20B is continued, and the saturated hydrogen peroxide gas is distributed throughout the isolator 12 by circulating the air in the isolator 12.

(3) Post-condensation supply process P3
When it is determined that the hydrogen peroxide gas is saturated in the entire area inside the isolator 12, the process proceeds to a post-condensation supply process P3. In the post-condensation supply process P3, the control device 28 monitors the hydrogen peroxide concentration HL (and the condensate amount CW) in the condensate in real time (at predetermined time intervals) based on a signal from the condensate sensor 26. The control device 28 controls the above-mentioned devices of the air supply line 14, the decontamination gas supply line 16, and the exhaust line 18 based on the hydrogen peroxide concentration HL (and the condensate amount CW) in the condensate so that the hydrogen peroxide concentration HL (wt%) in the condensate in the isolator 12 is maintained at _a predetermined value HL min or more. That is, the control device 28 controls one (or two or more) of the supply amount (speed) of hydrogen peroxide solution, the supply of dry air, the exhaust speed, the room temperature, and the relative humidity by any of the methods (first to fifth embodiments of the post-condensation supply process P3) described later to maintain the hydrogen peroxide concentration HL in the condensate at a predetermined value HL _min or more. The post-condensation supply step P3 is terminated when a predetermined time has elapsed while the hydrogen peroxide concentration HL in the condensate is maintained at or above a predetermined value HL _min , as it is determined that sufficient decontamination has been performed.

(4) Aeration process P4
When each step P1 to P3 of the decontamination process is completed, the supply of hydrogen peroxide gas using the pump 16A is stopped. Meanwhile, the valves 14C and 18A are opened, and the blowers 14B and 18B are operated with the heater 14A stopped operating, so that outside air is supplied into the isolator 12 through the air supply line 14, and air is exhausted from the isolator 12 through the catalyst 18C in the exhaust line 18. The blower 20B is operated to circulate air for aeration through the circulation line 20, and hydrogen peroxide components remaining in the circulation line 20 are exhausted. As a result, condensate adhering to the inside of the isolator 12 and the surface of the object to be decontaminated in the isolator 12 is vaporized (evaporated), and hydrogen peroxide gas remaining in the isolator 12 and outside air are exhausted to the outside. At this time, the hydrogen peroxide gas is decomposed by the catalyst 18C and made harmless. The aeration process P4 is performed until a preset time has elapsed or until the residual concentration of hydrogen peroxide detected by a concentration sensor (not shown) installed in the isolator 12 or in the exhaust line 18 falls below a preset value.

Next, we will explain the first and second embodiments that are applied to the post-condensation supply process P3.

First Embodiment
In the post-condensation supply step P3 of the first embodiment, the drive of the pump 16A is controlled to adjust the supply rate of hydrogen peroxide solution while maintaining a state in which ventilation is constantly performed within the isolator 12. That is, when the process shifts from the pre-condensation supply step P2 to the post-condensation supply step P3, the control device 28 opens the valve 18A to operate the blower 18B, exhausting the air within the isolator 12 from the exhaust line 18, while opening the valve 14C to operate the blower 14B to supply low-humidity air (dry air) into the isolator 12 through the air supply line 14. In addition, the control device 28 opens the valve 16C to operate the pump 16A, injecting (mixing) hydrogen peroxide gas into the low-humidity air, so as to maintain a state in which the concentration HG of hydrogen peroxide gas within the isolator 12 exceeds the saturation concentration HG _SAT . While maintaining this state, the speed of the pump 16A is controlled based on the hydrogen peroxide concentration HL detected by the condensate sensor 26 to control the supply amount of hydrogen peroxide solution as follows (A) and (B).

(A) When the condensation of the water component that had been vaporized inside the isolator 12 progresses and the hydrogen peroxide concentration HL falls close to HL _min , the speed (output) of the pump 16A is reduced to reduce the amount of hydrogen peroxide gas supplied to the isolator 12. This reduces the relative humidity RH inside the isolator 12 and promotes the vaporization (evaporation) of the condensate. At this time, the water component mainly vaporizes, causing the hydrogen peroxide concentration HL to rise.

(B) If the speed (output) of pump 16A is continued to be reduced, the concentration of hydrogen peroxide gas in isolator 12 cannot be maintained above the saturation concentration HG _SAT , and the hydrogen peroxide component will also be vaporized (evaporated). Therefore, when the hydrogen peroxide concentration HL rises close to HL _max , the speed (output) of pump 16A is increased from the reduced state to increase the amount of hydrogen peroxide gas supplied to isolator 12. This increases the relative humidity RH in isolator 12, and promotes condensation. At this time, the hydrogen peroxide concentration HL decreases because mainly the water component condenses.

By repeating the above controls (A) and (B), in the post-condensation supply process P3 of the first embodiment, the hydrogen peroxide concentration HL in the condensate can be maintained within a predetermined range (HL _min or more and HL _max or less).

Second Embodiment
In the post-condensation supply step P3 of the second embodiment, the valves 18A and 14C are closed to form a closed system. When the condensation of the water component vaporized in the isolator 12 progresses and the hydrogen peroxide concentration HL detected by the condensate sensor 26 falls to near HL _min , the pump 16A is stopped to stop the supply of hydrogen peroxide gas into the isolator 12, or the output of the pump 16A is reduced to reduce the amount of hydrogen peroxide gas supplied into the isolator 12, and the closed system of the isolator 12 is temporarily (for a predetermined time) released. That is, the control device 28 opens the valves 18A and 14C, operates the blower 18B to exhaust the air in the isolator 12, and operates the blower 14B to supply low-humidity air (dry air) into the isolator 12. Since the hydrogen peroxide gas in the isolator 12 is replaced with low-humidity air (dry air) by this step, the relative humidity RH (absolute amount of water vapor) in the isolator 12 falls, and the vaporization (evaporation) of the condensate progresses. At this time, the water component mainly vaporizes, so the hydrogen peroxide concentration HL increases.

Furthermore, because the decrease in relative humidity RH makes it possible to increase the hydrogen peroxide vapor concentration HG inside isolator 12, when a predetermined time has elapsed or when the hydrogen peroxide concentration HL detected by condensate sensor 26 has risen to near HL _max , valves 18A and 14C are closed again to make isolator 12 a closed system, and the operation of pump 16A is resumed or its output is increased to inject hydrogen peroxide water into evaporator 16B and replenish hydrogen peroxide gas inside isolator 12, and this process is repeated.

By the above control, in the post-condensation supply step P3 of the second embodiment, the hydrogen peroxide concentration HL in the condensate can be maintained at a predetermined value (HL _min ) or higher.

Figure 3 is a block diagram showing the arrangement of a decontamination system having a different configuration from that shown in Figure 1, which is used in the post-condensation supply process P3 of the third to fifth embodiments of the present invention. In addition to the configuration of the decontamination system shown in Figure 1, the decontamination system shown in Figure 3 is provided with a cooler 21A and a heater 21B as an air conditioner 21 (air conditioning means) in the circulation line 20. In this embodiment, the cooler 21A has a function as a dehumidifier and can also be used as a dehumidifier, but a separate dehumidifier can also be provided. In addition, a concentration adjustment device 23 (concentration adjustment means) is provided upstream of the pump 16A of the decontamination gas supply line 16 as a means for concentrating or diluting a commercially available 35% hydrogen peroxide solution (solution).

Third Embodiment
In the post-condensation supply process P3 of the third embodiment, the operation of the blower 20B is continued with the valves 18A and 14C closed to form a closed system, and the air inside the isolator 12 is circulated to distribute saturated hydrogen peroxide gas throughout the entire area inside the isolator 12, and the hydrogen peroxide concentration HL of the condensate is adjusted by adjusting the temperature inside the isolator 12 to vary the saturated water vapor pressure (amount) of hydrogen peroxide. That is, in the post-condensation supply process P3 of the third embodiment, the control device 28 controls the air conditioner 21 provided in the circulation line 20 based on the hydrogen peroxide concentration HL detected by the condensate sensor 26 to control the temperature inside the isolator 12 as follows (A) and (B).

(A) When the condensation of the water component that had been vaporized in the isolator 12 progresses and the hydrogen peroxide concentration HL in the condensate falls close to HL _min , the heater 21B provided in the circulation line 20 is operated to increase the temperature inside the isolator 12 and increase the saturated water vapor pressure. This causes the water contained mainly in the condensate to evaporate (vaporize), and the hydrogen peroxide concentration HL in the condensate increases.

(B) If the temperature inside the isolator 12 continues to rise, the hydrogen peroxide component of the condensate will also vaporize (evaporate). Therefore, when the hydrogen peroxide concentration HL in the condensate rises close to _HLmax , for example, the cooler 21A provided in the circulation line 20 as an air conditioning device is operated to lower the temperature inside the isolator 12 and reduce the saturated water vapor pressure.

By repeating the above controls (A) and (B), in the post-condensation supply process P3 of the third embodiment, the hydrogen peroxide concentration HL in the condensate can be maintained at or above a predetermined value (HL _min ).

Fourth Embodiment
In the post-condensation supply process P3 of the fourth embodiment, the operation of the blower 20B is continued with the valves 18A and 14C closed to form a closed system, and the air inside the isolator 12 is circulated to distribute saturated hydrogen peroxide gas throughout the entire inside of the isolator 12. Here, a dehumidification function is provided inside the isolator 12, and the hydrogen peroxide concentration HL of the condensate is adjusted by adjusting the relative humidity RH inside the isolator 12. For example, the cooler 21A provided in the circulation line 20 is operated as a dehumidifier to adjust (reduce) the relative humidity RH inside the isolator 12.

When the hydrogen peroxide concentration HL in the condensate falls close to HL _min , the control device 28 operates the cooler 21A to lower the relative humidity RH in the isolator 12 and promotes the vaporization (evaporation) of the condensate. At this time, the hydrogen peroxide concentration HL in the condensate rises because the water component mainly vaporizes. In addition, since the relative humidity RH falls, it becomes possible to increase the hydrogen peroxide vapor concentration HG in the isolator 12, so that the hydrogen peroxide solution is injected into the evaporator 16B by the pump 16A to replenish the hydrogen peroxide gas in the isolator 12. In addition, by operating the cooler 21A as a dehumidifier and operating the heater 21B provided in the circulation line 20 to raise the temperature in the isolator 12, the relative humidity in the isolator can be more effectively lowered and the vaporization (evaporation) of the condensate can be promoted.

By the above control, in the post-condensation supply process P3 of the fourth embodiment, the hydrogen peroxide concentration HL in the condensate can be maintained at or above a predetermined value (HL _min ). Note that the relative humidity RH inside the isolator 12 may be adjusted by adopting a dehumidification mechanism other than the cooler 21A or a configuration for supplying a desiccant.

Fifth Embodiment
In the post-condensation supply process P3 of the fifth embodiment, the hydrogen peroxide concentration HL of the condensate is adjusted by concentrating or diluting the concentration of the hydrogen peroxide solution supplied to the evaporator 16B. That is, in the decontamination gas supply line 16, a concentration adjustment device 23 is provided upstream of the pump 16A as a means for concentrating or diluting a commercially available 35% hydrogen peroxide solution (solution), and the hydrogen peroxide vapor concentration HG of the hydrogen peroxide gas supplied to the isolator 12 is increased or decreased. In the post-condensation supply process P3 of the fifth embodiment, when the hydrogen peroxide concentration HL of the condensate detected by the condensate sensor 26 falls to near HL _min , the control device 28 concentrates the hydrogen peroxide solution and supplies it to the isolator 12, thereby increasing the hydrogen peroxide concentration in the isolator 12. Also, when the hydrogen peroxide concentration HL of the condensate detected by the condensate sensor 26 rises to near HL _max , the control device 28 stops the concentration.

In the post-condensation supply step P3 of the fifth embodiment, the concentration of the supplied hydrogen peroxide solution is adjusted, so that the hydrogen peroxide concentration HL in the condensate can be maintained at a predetermined value (HL _min or more) or higher.

As described above, the decontamination system of this embodiment can detect the concentration of the decontamination gas components contained in the condensate in the sealed chamber, and based on this, can control the decontamination system to maintain the concentration of the decontamination gas components at or above a predetermined value, thereby enabling decontamination of the sealed chamber to be performed more reliably.

In addition, in this embodiment, the concentration of the decontamination liquid contained in the condensate is monitored by a condensate sensor, so the decontamination state inside the isolator can be quantitatively grasped. In addition, the concentration of the decontamination gas components in the condensate can be maintained high, so decontamination inside the sealed chamber can be performed efficiently. Furthermore, instead of supplying excessive decontamination gas into the sealed chamber, only the necessary and sufficient decontamination gas is supplied, so the amount of remaining decontamination gas is reduced compared to conventional methods, and the aeration time can be shortened.

10 Decontamination system 12 Isolator (sealed room)
14 Air supply line (air supply means)
14B Blower (air supply means)
16 Decontamination gas supply line (decontamination gas supply means)
16B Evaporator (decontamination gas generating means)
18 Exhaust line (exhaust means)
26 Condensation sensor (detection sensor)
28 Control device (control means)

Claims (6)

A decontamination system comprising a decontamination gas generating means for generating a decontamination gas by gasifying a decontamination liquid, and a decontamination gas supplying means for supplying the decontamination gas generated by the decontamination gas generating means into a sealed chamber, the decontamination system supplying the decontamination gas generated by gasifying the decontamination liquid into the sealed chamber, and condensing the decontamination gas in the sealed chamber to decontaminate the sealed chamber or an object to be decontaminated in the sealed chamber,
A detection sensor provided in the sealed chamber for detecting a concentration of a decontamination gas component contained in the condensate;
and a control means for controlling an amount of the decontamination gas supplied into the sealed chamber based on a concentration of the decontamination gas component contained in the condensate detected by the detection sensor. An air supply means for supplying air into the sealed chamber;
and an exhaust means for exhausting air from the sealed chamber,
2. The decontamination system according to claim 1, wherein the control means controls a supply amount of the decontamination gas supplied into the sealed chamber while ventilating the sealed chamber by operating the air supply means and the exhaust means during decontamination of the sealed chamber. The decontamination system according to claim 2, characterized in that the control means reduces the supply of decontamination gas when the concentration of decontamination gas components contained in the condensate detected by the detection sensor is lower than a predetermined value. A decontamination system comprising a decontamination gas generating means for generating a decontamination gas by gasifying a decontamination liquid, and a decontamination gas supplying means for supplying the decontamination gas generated by the decontamination gas generating means into a sealed chamber, the decontamination system supplying the decontamination gas generated by gasifying the decontamination liquid into the sealed chamber, and condensing the decontamination gas in the sealed chamber to decontaminate the sealed chamber or an object to be decontaminated in the sealed chamber,
A detection sensor provided in the sealed chamber for detecting a concentration of a decontamination gas component contained in the condensate; and an air conditioning means for adjusting a temperature and/or humidity in the sealed chamber.
A decontamination system comprising a control means for controlling the temperature and/or humidity in the sealed chamber by operating the air conditioning means based on the concentration of the decontamination gas component contained in the condensate detected by the detection sensor. The decontamination system according to any one of claims 1 to 4, further comprising a decontamination liquid concentration adjustment means for concentrating or diluting the decontamination liquid supplied to the decontamination gas generation means. 1. A decontamination method for decontaminating a sealed chamber or an object to be decontaminated in the sealed chamber by supplying a decontamination gas obtained by gasifying a decontamination liquid into the sealed chamber and condensing the decontamination gas in the sealed chamber, comprising:
a pre-decontamination process for dehumidifying the sealed chamber so that the humidity therein is equal to or lower than a predetermined value;
a pre-condensation supply step of supplying a decontamination gas into the sealed chamber until a detection sensor installed in the sealed chamber detects condensation of the decontamination gas;
a post-condensation supply process for detecting a concentration of the decontamination gas component contained in the condensate by the detection sensor and controlling the amount of the decontamination gas supplied into the sealed chamber based on the concentration of the decontamination gas component contained in the condensate detected by the detection sensor.

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