JP2023141505A - vernier motor - Google Patents

Abstract

To provide a linear type vernier motor that can easily adjust the thrust and size of the motor and achieve low detent.SOLUTION: A movable element 30 that is configured as a field magnet is configured of a polar anisotropic magnet, etc. in which a permanent magnet 33 moves a magnetic flux to and from adjacent magnetic portions 34. For example, an inner portion 31a, which is a rear side portion of the permanent magnet 33 with respect to a stator 20, is configured of a non-magnetic material.SELECTED DRAWING: Figure 1

Description

The present disclosure relates to a linear vernier motor.

A linear vernier motor consists of a stator in which multiple magnetic pole parts are arranged in a straight line, and a mover in which multiple magnetic pole parts are also arranged in a straight line and are combined to move linearly with respect to the stator. It will be equipped with. The stator includes, for example, an armature including a magnetic pole portion having a coil. The mover is composed of, for example, a field element including a permanent magnet and a magnetic pole part having a magnetic part. Furthermore, since the vernier motor is configured to obtain a magnetic deceleration effect during magnetic transmission between the stator and the movable element, it is possible to obtain a high linear thrust (see, for example, Patent Document 1).

Patent No. 5812680

By the way, in the conventional general configuration, the number of combinations of pole pairs of each magnetic pole of the stator and mover that can realize the desired low detent of the vernier motor is limited. In other words, in order to achieve the desired low detent of the vernier motor, the number of magnetic poles is limited and the thrust and physique of the motor need to be adjusted in stages, so the inventors have been considering a configuration that can finely adjust them.

An object of the present disclosure is to provide a vernier motor that achieves low detent and allows easy adjustment of the thrust and body size of the motor.

A vernier motor that solves the above problems includes an armature (20) in which a plurality of first magnetic pole parts (21) of one pole pair including a coil (22) and a magnetic member (23) are provided in a straight line, and a permanent magnet. (33, 33a to 33c) and a field element (30) in which a plurality of second magnetic pole portions (32) of one pole pair including a magnetic portion (34) are provided in a straight line; The configuration is such that a magnetic deceleration effect is obtained during magnetic transmission between the first and second magnetic pole parts based on energization, and linear movement in the axis (L1) direction is achieved by relative linear movement of the armature and the field element. A linear vernier motor that obtains a thrust, wherein the field element is composed of a polar anisotropic magnet or a Halbach array magnet in which the permanent magnet passes magnetic flux back and forth between the adjacent magnetic part. , at least a portion of the permanent magnet and the rear side portion (31, 31a, 31b) of the magnetic portion relative to the armature are constituted by a non-magnetic portion.

According to the above configuration, the permanent magnet of the field element is composed of a polar anisotropic magnet or a Halbach array magnet, and magnetic flux is mainly guided so that the magnetic flux goes back and forth between adjacent magnetic parts. . Here, if a part of the magnetic flux passes through the permanent magnet and the rear side portion of the magnetic part and acts on the magnetic part and permanent magnet that are farther away than the adjacent ones, it becomes a ripple, which can be a factor in increasing the ripple. In consideration of this, by configuring at least a portion of the permanent magnet and the rear side portion of the magnetic portion with respect to the armature as a non-magnetic portion, it is possible to suppress the generation of unnecessary magnetic flux that leads to an increase in ripple. In other words, ripples can be kept small and detents can be reduced. Further, even if the permanent magnet and the rear side portion of the magnetic portion are made non-magnetic, the influence on the thrust of the motor is small, and the thrust can be maintained. Maintaining the thrust and suppressing the ripple rate without relying on the combination of the number of magnetic poles in this way increases the degree of freedom in combining the number of magnetic poles, and it can be said that it is easy to fine-tune the thrust and physique of the motor.

It is a sectional view showing a vernier motor in a 1st embodiment. It is a sectional view showing a stator and a movable element in a first embodiment. It is an enlarged sectional view showing a part of a stator and a mover in a 1st embodiment. It is an exploded perspective view showing a mover in a 1st embodiment. It is a graph showing a comparison of the thrust and ripple rate of each type of vernier motor. It is a sectional view showing a stator and a movable element in a second embodiment. It is an exploded perspective view showing a mover in a 2nd embodiment. It is a sectional view showing a stator and a mover in a third embodiment. It is an exploded perspective view showing a mover in a 3rd embodiment. It is a perspective view which shows the mover in the example of a change. It is an enlarged sectional view showing a part of a stator and a mover in a modification. It is an enlarged sectional view showing a part of a stator and a mover in a modification. It is an enlarged sectional view showing a part of a stator and a mover in a modification. It is an enlarged sectional view showing a part of a stator and a mover in a modification. It is a sectional view showing a stator and a mover in a modification. It is a sectional view showing a stator and a mover in a modification. It is a sectional view showing a stator and a mover in a modification. It is a sectional view showing a stator and a mover in a modification. It is a perspective view which shows the mover in the example of a change. It is a perspective view which shows the mover in the example of a change. It is a perspective view which shows the mover in the example of a change.

(First embodiment)
A first embodiment of the vernier motor will be described below.
(Overall configuration of vernier motor M1)
As shown in FIG. 1, the vernier motor M1 of this embodiment is configured as a linear vernier motor that obtains a direct thrust. The vernier motor M1 includes a housing 10, a stator 20, and a movable element 30. In this embodiment, the stator 20 side is configured as an armature, and the movable element 30 side is configured as a field element. The vernier motor M1 is configured such that the movable element 30 linearly reciprocates with respect to the stator 20 along its own axis L1 direction (hereinafter simply referred to as the axial direction).

(Configuration of housing 10)
The housing 10 includes a cylindrical case 11 that extends along the axial direction, and a pair of disc-shaped end housings 12 that respectively close both ends of the case 11. A bearing 13 is provided at the center of each end housing 12 . The bearing 13 supports the movable element 30 so as to be movable along the axial direction.

(Configuration of stator 20)
As shown in FIGS. 1 and 2, the stator 20 is fixed to the inner peripheral surface of the case 11. The stator 20 has a generally annular shape that extends along the axial direction. The stator 20 has an axial length shorter than the length of the case 11 in the same direction, for example, about ⅓ to ½ of the length.

The stator 20 has six magnetic pole parts 21 (first magnetic pole parts) in this embodiment. Each magnetic pole part 21 is arranged in a straight line in the axial direction. Each magnetic pole portion 21 is configured to have one pair of magnetic poles. Each magnetic pole portion 21 includes a coil 22, a magnetic plate 23 (magnetic member), and a permanent magnet 24.

The coil 22 has a winding shape in which the conductor wire goes around the axis L1. Note that the coil 22 will be described including an insulator (not shown) made of an insulating resin material. Magnetic plates 23 are disposed in contact with each other on both sides of the coil 22 in the axial direction. The magnetic plate 23 is made of a magnetic metal material such as a soft magnetic material and has an annular plate shape. The outer peripheral edge of the magnetic plate 23 is in contact with the inner peripheral surface of the case 11. The inner peripheral edge of the magnetic plate 23 faces the outer peripheral surface of the movable element 30 with a predetermined gap therebetween.

The outer peripheral surface of a permanent magnet 24 is placed in contact with the radially inner side of the coil 22 . The permanent magnet 24 is made of a single magnetic material in an annular shape. Further, both end surfaces of the permanent magnet 24 in the axial direction are arranged in contact with the magnetic plates 23 on both sides of the coil 22, respectively. The inner peripheral surface of the permanent magnet 24 and the inner peripheral edge of the magnetic plate 23 are flush with each other.

As shown in FIG. 3, the permanent magnet 24 is magnetized in such a manner that the magnetic flux at the central portion in the axial direction is locally oriented in the radial direction on the inner circumferential surface facing the movable element 30. The permanent magnet 24 of this embodiment is a polar anisotropic magnet in which the inner circumferential surface of the central portion divided into three equal parts in the axial direction appears as a north pole, and both end faces in the axial direction that contact the magnetic plate 23 appear as south poles. It is configured. Further, in this embodiment, the axial length of 1/3 of the permanent magnet 24 and the thickness of two magnetic plates 23 are configured to be equivalent.

As shown in FIG. 2, in the stator 20, magnetic plates 23 of magnetic pole portions 21 adjacent in the axial direction are arranged so as to be in contact with each other. Between adjacent magnetic pole parts 21, two magnetic plates 23 overlap. All six magnetic pole parts 21 used in the stator 20, including the permanent magnet 24, have the same configuration. Further, the coils 22 of the six magnetic pole parts 21 are set as U phase, -W phase, V phase, -U phase, W phase, and -V phase in order from one side in the axial direction. Each of the six coils 22 is supplied with a corresponding three-phase current. The stator 20 made of the armature of this embodiment is configured in this way.

(Configuration of mover 30)
As shown in FIGS. 1 and 2, the movable element 30 has a substantially circular rod shape that extends in the axial direction. The axial center portion of the movable element 30 is arranged radially inside the stator 20. The movable element 30 is provided to be capable of reciprocating linear movement in the axial direction relative to the stator 20. The mover 30 includes a shaft portion 31 and a magnetic pole portion 32 (second magnetic pole portion). The shaft portion 31 is configured to be longer than the case 11 in the axial direction. The shaft portion 31 is supported by bearings 13 of each end housing 12 at both axial sides thereof. A plurality of magnetic pole portions 32 are integrally provided at the center portion of the shaft portion 31 in the axial direction.

The plurality of magnetic pole parts 32 are arranged in a straight line in the axial direction on the outer peripheral surface of the shaft part 31. The plurality of magnetic pole parts 32 are configured such that the overall length in the axial direction is longer than the length of the stator 20 in the same direction. In this embodiment, the plurality of magnetic pole parts 32 are eight magnetic pole parts. Five of the eight magnetic pole parts 32 are configured to have an axial length equivalent to the length of the stator 20 in the same direction. In other words, the six magnetic pole parts 21 of the stator 20 and the five magnetic pole parts 32 of the movable element 30 are always opposed to each other in the radial direction. When the number of pole pairs of the armature is "m" and the number of pole pairs of the field element is "n", "n=m±1" holds true for the vernier motor. The number of pole pairs of the magnetic pole part 21 of the stator 20, which is an armature, is "m = 6", and the number of pole pairs of the magnetic pole part 32 of the mover 30, which is a field element, is "n = 5". satisfy.

Each magnetic pole section 32 includes a permanent magnet 33 and a magnetic section 34, respectively. In the eight magnetic pole parts 32 as a whole, permanent magnets 33 and magnetic parts 34 are provided alternately in the axial direction. Note that eight permanent magnets 33 are provided, and nine magnetic parts 34 are provided so as to be arranged on both sides of the permanent magnets 33. The axial lengths of the permanent magnet 33 and the magnetic portion 34 are set to be equal to each other. One permanent magnet 33 and one adjacent magnetic section 34 function as a pair of magnetic pole sections 32 .

The permanent magnet 33 is made of a single magnetic material in an annular shape. Both end surfaces of the permanent magnet 33 in the axial direction are arranged in contact with the magnetic parts 34 on both sides, respectively. As shown in FIG. 3, the permanent magnet 33 is magnetized on its outer circumferential surface facing the stator 20 such that the magnetic flux at the axial center is locally oriented in the radial direction. The permanent magnet 33 of this embodiment is constituted by a polar anisotropic magnet in which the outer circumferential surface of the central part divided into three equal parts in the axial direction appears as an S pole, and both end faces in the axial direction that contact the magnetic part 34 appear as N poles. has been done.

As shown in FIGS. 2 and 4, the inner portion 31a of the permanent magnet 33, which constitutes a part of the shaft portion 31, is made of a non-magnetic metal material such as aluminum or SUS in this embodiment. In this embodiment, the permanent magnet 33 and the inner portion 31a are manufactured by integrally combining different materials.

The magnetic part 34 is made of a magnetic metal material in an annular shape. The outer peripheral surface of the magnetic part 34 and the outer peripheral surface of the permanent magnet 33 are flush with each other. In this embodiment, the inner portion 31b of the magnetic portion 34, which constitutes a part of the shaft portion 31, is made of a magnetic metal material. In this embodiment, the magnetic part 34 and the inner part 31b are made as an integral part from one magnetic metal material such as a soft magnetic material.

The entire magnetic pole part 32 having eight permanent magnets 33 and nine magnetic parts 34 is housed within the cylindrical member 35. The cylindrical member 35 is made of a non-magnetic metal material such as aluminum or SUS in a cylindrical shape. The cylindrical member 35 is fixed and integrally formed with each magnetic section 34 located on both sides in the axial direction, for example. The movable element 30 made of the field element of this embodiment is configured in this manner.

(Procedure for manufacturing mover 30)
As shown in FIGS. 1 and 4, in the movable element 30 of the present embodiment, a disk-shaped component A disk-shaped component X2 manufactured integrally is used. Eight parts X1 including the permanent magnets 33 and seven parts X2 including the magnetic parts 34 are used. Furthermore, a component X3 is used in which a disk portion consisting of the magnetic portion 34 and the inner portion 31b is integrally manufactured at the shaft end portion constituting the end side portion of the shaft portion 31. Two parts X3 are used. Then, the parts X1 and X2 are alternately inserted into the cylindrical member 35 and stacked, and the parts X3 are arranged on both sides in the axial direction. The permanent magnets 33 and the magnetic parts 34 are arranged alternately, and the inner parts 31a and 31b of the permanent magnets 33 and the magnetic parts 34 are integrated as the shaft part 31. Both ends of the cylindrical member 35 in the axial direction are fixed to the magnetic part 34 of the disc part of the component X3 by caulking or the like, thereby producing the integral movable element 30.

(Action of this embodiment)
The operation of this embodiment will be explained.
In the vernier motor M1 of this embodiment, due to the above-mentioned structure, when the movable element 30 moves by one magnetic pole part 32 in one axial direction, the magnetic flux density distribution of the air gap changes to the six magnetic pole parts of the stator 20 in the other axial direction. 21 minutes (in this case, 1 block). Since the six magnetic pole parts 21 of the stator 20 and the five magnetic pole parts 32 of the movable element 30 are set to have the same length, the movable element due to one cycle change when energizing each coil 22 of the stator 20 The operation of 30 corresponds to 32 minutes of one magnetic pole section. In other words, the motion of the movable element 30 is reduced to 1/5. In the vernier motor M1 that can obtain such a magnetic deceleration effect during magnetic transmission from the stator 20 to the movable element 30, a high thrust motor output can be obtained.

Further, in this embodiment, a polar anisotropic magnet or the like is used as the permanent magnet 33 of the movable element 30, and magnetic flux is mainly guided so that the magnetic flux flows back and forth between the adjacent magnetic parts 34. Here, when a part of the magnetic flux passes through the shaft part 31 on the radially inner side of the permanent magnet 33 and the magnetic part 34 and interacts with the magnetic part 34 and the permanent magnet 33 that are farther away than the adjacent ones, it becomes a ripple, which becomes a factor for increasing the ripple. obtain. Therefore, in this embodiment, the inner portion 31a of the permanent magnet 33 that constitutes a part of the shaft portion 31 is made into a non-magnetic portion, and the back and forth of magnetic flux between the distant magnetic portion 34 and the permanent magnet 33 is suppressed. By optimizing the path of the magnetic flux in the movable element 30 in this way, generation of unnecessary magnetic flux that leads to an increase in ripples is suppressed.

FIG. 5 shows the thrust and ripple rate of the vernier motor in each embodiment. The first embodiment is indicated by "A1". Regarding Comparative Example "B" and Comparative Example "C" to be compared, Comparative Example "C" is composed only of the magnetic part 34 without using the above-mentioned permanent magnet 33 as the magnetic pole part of the mover. Further, in Comparative Example "B", the permanent magnet 33 and the magnetic part 34 described above are used as the magnetic pole part of the mover, but the shaft part 31 such as the inner part 31a of the permanent magnet 33 is made of a magnetic metal material. It is composed of. Each aspect is compared by setting the thrust of comparative example "C" to "1", the ripple ratio representing the magnitude of ripple with respect to unit thrust, and the ripple ratio of comparative example "C" to "1". Note that the combination of the number of magnetic poles of the stator and the number of magnetic poles of the mover is set to be the same.

In Comparative Example "B", a sufficiently high thrust was obtained compared to Comparative Example "C", and the ripple rate was also greatly suppressed. However, in the embodiment of Comparative Example "B", since the shaft portion 31 such as the inner portion 31a of the permanent magnet 33 is made of a magnetic material, the magnetic flux that leads to ripples is not suppressed, and there is still room for improvement, especially regarding the ripple rate. Ta.

On the other hand, in the first embodiment "A1", it is possible to suppress the ripple rate more sufficiently than in the comparative example "B". Further, the combination of the number of magnetic poles of the stator 20 and the number of magnetic poles of the mover 30 in this embodiment is a combination that can originally reduce the ripple rate. In other words, when the numbers of magnetic poles of the stator 20 and the movable element 30 are changed, there are some combinations in which the ripple rate increases. Suppressing the ripple rate without relying on the combination of the number of magnetic poles as in this embodiment also leads to increasing the degree of freedom in combining the number of magnetic poles. Moreover, in the first embodiment "A1", a high thrust equivalent to that of the comparative example "B" can be obtained, and it is possible to maintain a high thrust.

In addition, in FIG. 5, the thrust force and ripple rate of a second embodiment "A2" and a third embodiment "A3" which will be described later are also shown.
(Effects of this embodiment)
The effects of this embodiment will be explained.

(1-1) The permanent magnet 33 of the mover 30 of this embodiment is composed of a polar anisotropic magnet, and the magnetic flux is mainly guided so that the magnetic flux flows back and forth between the adjacent magnetic part 34. There is. As described above, when a part of the magnetic flux passes through the inner parts 31a and 31b, which are the rear side parts of the permanent magnet 33 and the magnetic part 34, and interacts with the magnetic part 34 and the permanent magnet 33 that are farther away than the adjacent ones, ripples occur. This can be a factor in increasing ripple. In consideration of this, in this embodiment, the inner portion 31a of the permanent magnet 33 is configured as a non-magnetic portion, thereby suppressing the generation of unnecessary magnetic flux that would lead to an increase in ripple. In other words, ripples can be kept small and detents can be reduced. Furthermore, by making the inner portion 31a of the permanent magnet 33 a non-magnetic portion, the influence on the thrust of the vernier motor M1 is small, and the thrust can be maintained. In this way, maintaining the thrust and suppressing the ripple rate without relying on the combination of the number of magnetic poles leads to a greater degree of freedom in combining the number of magnetic poles, making it easy to fine-tune the thrust and size of the vernier motor M1. I can say that.

(1-2) The movable element 30 is integrally configured including a portion where a first component X1 including a permanent magnet 33 and a second component X2 including a magnetic section 34 are stacked in the axial direction. has been done. That is, since the movable element 30 is divided into a plurality of parts in the axial direction and relatively small parts X1 and X2 are handled, effects such as easier manufacture of the movable element 30 can be expected.

(1-3) Components X1 and X2 forming part of the movable element 30 are housed within the cylindrical member 35 and are integrated. Therefore, effects such as ease of assembling each part X1 and X2 and easy regulation of the shape of an integrated part using each part X1 and X2 can be expected.

(1-4) Since the entire inner portion 31a of the annular permanent magnet 33 becomes a non-magnetic portion, unnecessary magnetic flux crossing the shaft portion 31 can be effectively suppressed. It is possible to suppress ripples more reliably.

(Second embodiment)
A second embodiment of the vernier motor will be described below.
(Configuration of stator 20 and mover 30)
As shown in FIGS. 6 and 7, in the vernier motor M2 of this embodiment, the stator 20 is configured similarly to the first embodiment. In the mover 30, an inner portion 31a of the permanent magnet 33 and an inner portion 31b of the magnetic portion 34, which constitute a part of the shaft portion 31, have been changed.

In this embodiment, the inner portion 31a of the permanent magnet 33 is made of a magnetic metal material. The permanent magnet 33 and the inner portion 31a are made by integrally combining different materials. In this embodiment, the inner portion 31b of the magnetic portion 34 is made of a non-magnetic metal material. The magnetic part 34 and the inner part 31b are made by integrally combining different materials. That is, the inner parts 31a and 31b of the permanent magnet 33 and the magnetic part 34 are replaced with those of the first embodiment. Also in this embodiment, the component X1 including the permanent magnet 33 and the component X2 including the magnetic portion 34 are inserted into the cylindrical member 35, so that the mover 30 is integrally configured.

(Action of this embodiment)
The operation of this embodiment will be explained.
Also in this embodiment, the inner part 31b of the magnetic part 34 that constitutes a part of the shaft part 31 of the mover 30 is made into a non-magnetic part, and the back and forth of magnetic flux between the distant magnetic part 34 and the permanent magnet 33 is suppressed. ing. Also in this configuration, as in the first embodiment, the path of the magnetic flux in the movable element 30 is optimized, thereby suppressing the generation of unnecessary magnetic flux that would lead to an increase in ripple.

Therefore, as shown in "A2" of the second embodiment in FIG. 5, it is possible to sufficiently suppress the ripple rate, similarly to the first embodiment. This also leads to increasing the degree of freedom in combining the numbers of magnetic poles of the stator 20 and the movable element 30. Moreover, it is possible to maintain high thrust even in the second embodiment "A2".

(Effects of this embodiment)
The effects of this embodiment will be explained.
(2-1) Also in this embodiment, the same effects as the effects (1-1) to (1-3) of the first embodiment can be obtained.

(2-2) Since the entire inner portion 31b of the annular magnetic portion 34 is a non-magnetic portion, unnecessary magnetic flux crossing the shaft portion 31 can be effectively suppressed in this embodiment as well. Similarly to the first embodiment, it is possible to suppress ripples more reliably.

(Third embodiment)
A third embodiment of the vernier motor will be described below.
(Configuration of stator 20 and mover 30)
As shown in FIGS. 8 and 9, in the vernier motor M3 of this embodiment, the stator 20 is configured in the same manner as in the first embodiment. In the mover 30, a permanent magnet 33 that constitutes a part of the shaft portion 31 and inner portions 31a and 31b of the magnetic portion 34 are both made of a non-magnetic metal material. The permanent magnet 33 and the inner portion 31a are made by integrally combining different materials. The magnetic part 34 and the inner part 31b are also made by integrally combining different materials. Also in this embodiment, the component X1 including the permanent magnet 33 and the component X2 including the magnetic portion 34 are inserted into the cylindrical member 35, so that the mover 30 is integrally configured.

(Action of this embodiment)
The operation of this embodiment will be explained.
In this embodiment as well, the inner parts 31a and 31b of the permanent magnet 33 and the magnetic part 34, which constitute a part of the shaft part 31 of the movable element 30, are both non-magnetic parts, and between the far magnetic part 34 and the permanent magnet 33, The back and forth of magnetic flux is suppressed. Also in this configuration, as in the first embodiment, the path of the magnetic flux in the movable element 30 is optimized, thereby suppressing the generation of unnecessary magnetic flux that would lead to an increase in ripple.

Therefore, as shown in the third embodiment "A3" in FIG. 5, it is possible to sufficiently suppress the ripple rate, similarly to the first and second embodiments. This also leads to increasing the degree of freedom in combining the numbers of magnetic poles of the stator 20 and the movable element 30. Moreover, it is possible to maintain high thrust even in the third embodiment "A3".

(Effects of this embodiment)
The effects of this embodiment will be explained.
(3-1) Also in this embodiment, the same effects as the effects (1-1) to (1-3) of the first embodiment can be obtained.

(3-2) Since the entire inner parts 31a and 31b of the annular permanent magnet 33 and magnetic part 34 become non-magnetic parts, in this embodiment as well, unnecessary magnetic flux crossing the shaft part 31 can be effectively reduced. It can be controlled. Similarly to the first embodiment, it is possible to suppress ripples more reliably.

(Example of change)
Each of the above embodiments can be modified and implemented as follows. The above embodiment and the following modification examples can be implemented in combination with each other within a technically consistent range.

- In the magnetic pole part 32 of the mover 30, the part X1 having the permanent magnet 33 and the part X2 having the magnetic part 34 are inserted into the cylindrical member 35 and constructed integrally, but each part , X2 may be fixed to each other. In this case, the cylindrical member 35 can also be omitted.

- As shown in FIG. 10, the shaft portion 31 of the mover 30 may be made from a single long shaft material, and the annular permanent magnet 33 and the annular magnetic portion 34 may be attached to the outer peripheral surface. . In this aspect, as in the movable member 30 of the third embodiment shown in FIG. Easy to apply to magnetic metal materials. The shaft portion 31 can be made from a single long shaft material such as non-magnetic metal or non-magnetic resin. In this way, effects such as being able to manufacture the shaft portion 31 with high rigidity can be expected. Of course, as in the first and second embodiments shown in FIGS. 2 and 6, even if the inner parts 31a and 31b of the permanent magnet 33 and the magnetic part 34 are made of different materials, The book shaft portion 31 may be prepared in advance, and then the permanent magnet 33 and the magnetic portion 34 may be attached thereto.

- As shown in FIGS. 11 and 12, permanent magnets 33a and 33b may be used in the movable element 30. Although the permanent magnet 33 used in the mover 30 is composed of one polar anisotropic magnet, as shown in FIG. good. Further, as shown in FIG. 12, a permanent magnet 33b made of a Halbach array magnet of three magnet materials divided into three in the axial direction may be used. Of course, each of the permanent magnets 33a and 33b has the same function as the permanent magnet 33 described above.

- As shown in FIG. 13, a permanent magnet 33c may be used in which both end faces in the axial direction are inclined so as to expand toward the stator 20 side. The permanent magnet 33c is made of, for example, a Halbach array magnet. The permanent magnet 33c whose axially opposite end surfaces are inclined can be expected to have the effect of slowing down changes in the magnetic flux distribution in the axial direction.

- Although not shown, not only the permanent magnet 33 used in the mover 30 can be changed to each of the permanent magnets 33a to 33c, but also the permanent magnet 24 used in the stator 20 can be changed in the same way as each of the permanent magnets 33a to 33c. good.

- As shown in FIG. 14, a slit 23a extending in the axial direction may be provided on the inner peripheral surface of the magnetic plate 23 of the stator 20, that is, on the surface facing the movable element 30. Further, a slit 34a extending in the axial direction may be provided on the outer circumferential surface of the magnetic portion 34 of the movable element 30, on the surface facing the stator 20. For example, a plurality of slits 23a and 34a are provided at equal intervals in the circumferential direction. The functions of each slit 23a and 34a are the same, and effects such as rectification of magnetic flux can be expected. Although not shown, the same effect can be expected even if protrusions are provided in place of each slit 23a, 34a.

- As shown in FIGS. 15 to 18, elongated members 36a and 36b extending in the entire axial direction of the shaft portion 31 of the mover 30 may be disposed within the shaft portion 31.
In the embodiment shown in FIGS. 15 and 16, the elongated member 36a is made of a non-magnetic material and also functions as a non-magnetic portion. If the elongated member 36a is made of a metal material, effects such as increasing the rigidity of the shaft portion 31 of the movable element 30 can be expected. Furthermore, if the elongated member 36a is made of a resin material, effects such as weight reduction of the shaft portion 31 of the movable element 30 can be expected. In the embodiment shown in FIGS. 17 and 18, the elongated member 36b is made of a magnetic material. If the elongated member 36b is made of a metal material, effects such as increasing the rigidity of the shaft portion 31 of the movable element 30 can be expected. Note that the embodiments shown in FIGS. 15 and 17 are applied to the first embodiment described above, in which the inner portion 31a of the permanent magnet 33 is made of a non-magnetic material. Moreover, the aspect shown in FIG. 16 and FIG. 18 is an application to the said 2nd Embodiment in which the inner part 31b of the magnetic part 34 is made of a non-magnetic material.

Further, as shown in FIG. 19, a plurality of rod-shaped members 37a made of a non-magnetic material may be used as an example of the elongated member 36a. The plurality of rod-shaped members 37a are provided at equal intervals in the circumferential direction at intermediate positions in the radial direction of the shaft portion 31. Further, as shown in FIG. 20, a cylindrical member 37b made of a non-magnetic material may be used as an example of the elongated member 36a. Note that the inner portion 37c of the cylindrical member 37b may be made of a magnetic material or may be made of a gap. Further, as shown in FIG. 21, both the cylindrical member 37b and the inner portion 37c shown in FIG. 20 may be made of non-magnetic material, that is, a cylindrical member 37d. The cylindrical member 37d is provided at the center of the shaft portion 31.

- Although at least a portion of the shaft portion 31 of the mover 30 is made of a non-magnetic metal material, it may be changed to a non-magnetic resin material to constitute the non-magnetic portion. Further, the non-magnetic portion may be formed by post-processing the magnetic material into a non-magnetic material. Furthermore, the non-magnetic portion may be configured with a gap, such as by making part or the entire shaft portion 31 of the mover 30 hollow.

- The above combination of the number of magnetic poles of the stator 20, which is an armature, and the number of magnetic poles, of the mover 30, which is a field element, is an example, and may be changed as appropriate. When the number of pole pairs of the armature is "m" and the number of pole pairs of the field element is "n", any configuration that satisfies "n=m±1", which is a vernier motor, may be used.

- The radial relationship between the stator 20 and the movable element 30 may be reversed, such that the stator 20 is radially inner and the movable element 30 is radially outer.
- Although the stator 20 is made up of an armature and the mover 30 is made up of a field element, on the contrary, the stator 20 may be made up of a field element and the mover 30 may be made up of an armature.

- The expression "at least one" as used in this disclosure means "one or more" of the desired options. As an example, the expression "at least one" as used in this disclosure means "only one option" or "both of the two options" if the number of options is two.

M1 to M3 Vernier motor, L1 shaft, 20 stator (armature), 21 magnetic pole part (first magnetic pole part), 22 coil, 23 magnetic plate (magnetic member), 30 mover (field element), 31 shaft part (back side part), 31a, 31b inner part (back side part), 32 magnetic pole part (second magnetic pole part), 33, 33a to 33c permanent magnet, 34 magnetic part

Claims (13)

an armature (20) including a plurality of linearly arranged first magnetic pole portions (21) of one pole pair each including a coil (22) and a magnetic member (23);
A field element (30) in which a plurality of second magnetic pole parts (32) of one pole pair including permanent magnets (33, 33a to 33c) and a magnetic part (34) are provided in a straight line,
The configuration is such that a magnetic deceleration effect is obtained during magnetic transmission between the first and second magnetic pole parts based on energization of the coil, and the relative linear movement of the armature and the field element causes the shaft (L1) to A linear vernier motor (M1 to M3) that obtains a direct thrust in the direction,
The field element is composed of a polar anisotropic magnet or a Halbach array magnet in which the permanent magnet passes magnetic flux back and forth between the adjacent magnetic part, and the permanent magnet and the magnetic part are connected to the armature. At least a part of the back side portion (31, 31a, 31b) of is made of a non-magnetic part,
vernier motor. The armature is configured as a stator (20) having an annular shape,
The field element is configured as a movable element (30) arranged radially inside the stator.
The vernier motor according to claim 1. The field element is integrally configured including a portion where a first component (X1) including the permanent magnet and a second component (X2) including the magnetic portion are stacked in the axial direction.
The vernier motor according to claim 2. The first and second parts are configured to be housed within a cylindrical member (35).
The vernier motor according to claim 3. The field element is configured such that the permanent magnet and the magnetic part each have an annular shape, and the permanent magnet and the magnetic part are attached to a long shaft part (31).
The vernier motor according to claim 2. In the field element, the permanent magnet has an annular shape, and an inner portion (31a) of the permanent magnet is configured as the non-magnetic portion.
The vernier motor according to claim 2. In the field element, the magnetic part has an annular shape, and an inner part (31b) of the magnetic part is configured as the non-magnetic part.
The vernier motor according to claim 2. In the field element, the permanent magnet and the magnetic part each have an annular shape, and the inner parts (31a, 31b) of the permanent magnet and the magnetic part are both configured as the non-magnetic part.
The vernier motor according to claim 2. The field element has a shaft portion (31a) extending in the axial direction, and is configured such that elongated members (36a, 36b) extending entirely in the axial direction are disposed within the shaft portion.
The vernier motor according to claim 2. The elongated member is made of a non-magnetic material.
The vernier motor according to claim 9. The elongated member is made of a magnetic material.
The vernier motor according to claim 9. The field element is configured to have a slit (34a) or a protrusion extending in the axial direction on the opposing surface of the magnetic part on the armature side.
The vernier motor according to claim 2. The armature is configured to have a slit (23a) or a protrusion extending in the axial direction on the opposing surface of the magnetic member on the field element side.
The vernier motor according to claim 2.

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