JP2023080540A - Method for manufacturing optical communication module and optical communication module manufacturing device - Google Patents

Abstract

To provide a method for manufacturing an optical communication module and an optical communication module manufacturing device that can easily align the optical axis of a light reception element and the optical axis of a light collecting lens to each other.SOLUTION: The position of an inspection optical fiber 53 is adjusted so that an imaging unit 75 will take an image of all of a plurality of inspection lights which enter from the inspection optical fiber 53 to a flat surface type optical waveguide 3, branch, and exit from the flat surface type optical waveguide 3. After that, the position of an exit-side light collecting lens 7 is adjusted so that the light reception current generated in the light reception element 9 will be maximized in that state.SELECTED DRAWING: Figure 14

Description

The present disclosure relates to an optical communication module manufacturing method and an optical communication module manufacturing apparatus.

In recent years, the amount of communication in optical networks has increased. In order to cope with the increase in communication traffic, optical communication modules are required to have higher communication speed, smaller size, and lower power consumption. An optical communication module using a planar optical waveguide is considered promising for downsizing and low power consumption of the optical communication module. A planar optical waveguide is called a PLC (Planar Lightwave Circuit).

For this type of optical communication module, there is a demand for a technique for optically coupling optical components integrated in the housing of the optical communication module with low loss. The optical components include a fiber, a planar optical waveguide into which the light emitted from the fiber enters, a condenser lens that collects the light emitted from the planar optical waveguide, and a receiver that receives the light condensed by the condenser lens. There is a light receiving element that

In order to optically couple the light emitted from the output side of the planar optical waveguide and condensed by the condensing lens to the light-receiving element, the light emitted from the fiber and condensed should be directed to the incident side of the planar optical waveguide. should be optically coupled to the core of the optical waveguide located at the Japanese Patent Application Laid-Open No. 2002-201001 proposes an optical adjustment device that detects whether light emitted from a fiber and condensed is optically coupled to a core on the incident side of a planar optical waveguide.

Japanese Unexamined Patent Application Publication No. 2014-26108

In an optical communication module, in order to achieve low-loss optical coupling between optical components integrated in the housing of the optical communication module, a condenser lens and a light-receiving lens are placed on the side of the light-receiving element with respect to the planar optical waveguide. There is a demand for easy and accurate optical axis alignment with the element.

The present disclosure has been made under such development, and one object thereof is to provide a method for manufacturing an optical communication module that can easily align the optical axes of a light receiving element and a condenser lens. and another object is to provide an optical communication module manufacturing apparatus capable of easily performing such optical axis alignment.

A method for manufacturing an optical communication module according to the present disclosure has a plurality of optical components including a planar optical waveguide, a condenser lens, and a light receiving element, and emits light into the planar optical waveguide, exits from the planar optical waveguide, and concentrates. A method for manufacturing an optical communication module in which an optical signal condensed by an optical lens is received by a light receiving element, comprising the following steps. A housing is prepared that accommodates a substrate that has an opening through which an optical signal is incident and on which a planar optical waveguide and a light-receiving element are mounted. An inspection optical fiber for emitting inspection light as an optical signal is prepared, and the position of the inspection optical fiber is adjusted so that the inspection light emitted from the inspection optical fiber enters the opening. A plurality of inspection lights that are incident on the planar optical waveguide from the inspection optical fiber, branched, and respectively emitted from the planar optical waveguide toward the light receiving element are reflected in a direction different from the direction toward the light receiving element. A plurality of inspection light images are captured. The position of the optical fiber for inspection is adjusted so that an image corresponding to the number of the plurality of inspection lights emitted from the planar optical waveguide is captured as an image of the inspection light. A condensing lens is arranged between the planar optical waveguide and the light-receiving element in a state in which images corresponding to the number of the plurality of inspection lights emitted from the planar optical waveguide are captured. The inspection light that enters the planar optical waveguide from the optical fiber for inspection, is emitted from the planar optical waveguide, is collected by the condenser lens, is received by the light receiving element, and the current value generated in the light receiving element becomes the highest. Align the condenser lens as shown.

An optical communication module manufacturing apparatus according to the present disclosure manufactures an optical communication module in which a light receiving element receives an optical signal that enters a planar optical waveguide, exits from the planar optical waveguide, and is condensed by a condensing lens. An optical communication module manufacturing apparatus comprising an inspection optical fiber, a fiber adjustment mechanism, a mirror section, a mirror section adjustment mechanism, an imaging section, a condenser lens adjustment mechanism, and an ammeter. The inspection optical fiber emits inspection light toward the planar optical waveguide. The fiber adjustment mechanism adjusts the position of the inspection optical fiber with respect to the planar optical waveguide. The mirror unit divides each of the plurality of inspection lights emitted from the optical fiber for inspection, incident on the planar optical waveguide, branched, and emitted in the first direction from the planar optical waveguide toward the light receiving element. has reflective mirrors that reflect in different second directions. The mirror section adjustment mechanism adjusts the position of the mirror section. The imaging unit captures images of a plurality of inspection lights reflected by the mirror unit. The condenser lens adjustment mechanism adjusts the position of the condenser lens arranged between the planar optical waveguide and the light receiving element. The ammeter is electrically connected to the light receiving element and measures the current generated in the light receiving element by receiving the inspection light.

According to the method for manufacturing an optical communication module according to the present disclosure, first, all images of a plurality of inspection light beams that enter the planar optical waveguide from the optical fiber for inspection, are branched, and are emitted from the planar optical waveguide are captured by the imaging unit. The position of the optical fiber for inspection is adjusted so as to be imaged by . Next, in that state, the position of the condenser lens is adjusted so that the light receiving current generated in the light receiving element is maximized. As a result, when the optical axis of the optical fiber for inspection is aligned with the optical axis of the optical waveguide in the planar optical waveguide, by confirming the image of the signal light so that all of the images of the plurality of inspection lights are captured, Optical axis alignment can be easily performed. Also, when the optical axis of the condenser lens is aligned with the optical axis of the light receiving element, the optical axis can be easily aligned by checking the current value.

The optical communication module manufacturing apparatus according to the present disclosure includes an imaging unit that captures a plurality of inspection lights that are incident on the planar optical waveguide from the inspection optical fiber, branched, and emitted from the planar optical waveguide. It also has an ammeter for measuring the light-receiving current generated in the light-receiving element. Accordingly, when the optical axis of the optical fiber for inspection is aligned with the optical axis of the optical waveguide in the planar optical waveguide, the image of the signal light is confirmed so that all of the images of the plurality of inspection lights are captured by the imaging unit. Accordingly, optical axis alignment can be easily performed. Also, when the optical axis of the condenser lens is aligned with the optical axis of the light-receiving element, it is possible to easily align the optical axis by checking the current value of the ammeter.

1 is a perspective view showing a first example of an optical communication module manufactured by an optical communication module manufacturing apparatus according to an embodiment; FIG. 2 is a plan view showing the structure of the optical communication module shown in FIG. 1 in the embodiment; FIG. FIG. 2 is a plan view showing an example of arrangement of optical waveguide cores on the end surface of the planar optical waveguide of the optical communication module shown in FIG. 1 on the optical fiber side in the same embodiment; FIG. 2 is a plan view showing an example of the arrangement of optical waveguide cores on the end surface of the planar optical waveguide of the optical communication module shown in FIG. 1 on the light receiving element side in the same embodiment; FIG. 4 is a perspective view showing a second example of an optical communication module manufactured by the optical communication module manufacturing apparatus in the same embodiment; FIG. 10 is a perspective view showing a third example of an optical communication module manufactured by the optical communication module manufacturing apparatus in the same embodiment; FIG. 11 is a perspective view showing a fourth example of an optical communication module manufactured by the optical communication module manufacturing apparatus in the same embodiment; FIG. 11 is a perspective view showing a fifth example of an optical communication module manufactured by the optical communication module manufacturing apparatus in the same embodiment; FIG. 2 is a perspective view conceptually showing an example of the configuration of an optical communication module manufacturing apparatus in the same embodiment; FIG. 4 is a perspective view conceptually showing another example of the configuration of the optical communication module manufacturing apparatus in the same embodiment. FIG. 4 is a perspective view showing one step of a method for manufacturing an optical communication module using the optical communication module manufacturing apparatus in the same embodiment; FIG. 5 is a diagram showing an example of an image of inspection light when the optical axes of the optical fiber for inspection and the planar optical waveguide are not aligned in the same embodiment. FIG. 10 is a diagram showing an image of inspection light when the optical axes of the optical fiber for inspection and the planar optical waveguide are aligned in the same embodiment; FIG. 14 is a perspective view showing a process performed after the state shown in FIG. 13 is obtained in the same embodiment;

First, the configuration of the optical communication module manufactured by the optical communication module manufacturing apparatus according to the embodiment will be described.

(Configuration of optical communication module)
As shown in FIGS. 1 and 2, the optical communication module 1 includes a plurality of optical components 5 including planar optical waveguides 3 within a housing 13 . The planar optical waveguide 3 serves as a transmission path for optical signals. The planar optical waveguide 3 has a structure in which an undercladding, a core for propagating an optical signal, and an overcladding are laminated on a substrate made of SiO ₂ such as Si or quartz. The undercladding and the like are formed from a thin film of _SiO2 . A plurality of optical components 5 including the planar optical waveguide 3 are mounted on a substrate 13 arranged within a housing 13 .

The planar optical waveguide 3 is formed with an optical waveguide 3a for propagating and demultiplexing an optical signal. The optical waveguide 3a has an optical waveguide core. As shown in FIG. 3, a fiber-side optical waveguide core 3b is positioned (exposed) on a fiber-side end face 4a of the planar optical waveguide 3 into which an optical signal is incident. As shown in FIG. 4, an element-side optical waveguide core 3c is positioned (exposed) at an element-side end surface 4b of the planar optical waveguide 3 from which an optical signal is emitted. An optical signal optically coupled to one fiber-side optical waveguide core 3b propagates through the optical waveguide 3a, is branched into four, and is emitted from each element-side optical waveguide core 3c.

As shown in FIGS. 1 to 4, here, four optical waveguides 3a (output side) are branched from one optical waveguide 3a (incident side). 1 and 2, the number of optical waveguides 3a arranged on the incident side is two, but this number is an example. Further, although four optical waveguides 3a are branched from one optical waveguide 3a, the number of branched optical waveguides 3a is also an example.

The optical component 5 includes an optical component 5 associated with an optical signal entering the planar optical waveguide 3 and an optical component 5 associated with an optical signal emitted from the planar optical waveguide 3 . Since the later-described optical communication module manufacturing apparatus is an apparatus for aligning the optical axes of the optical components 5 related to the optical signal emitted from the planar optical waveguide 3, the latter optical component 5 will be described first.

In the optical communication module 1, the optical components 5 related to the signal light emitted from the planar optical waveguide 3 include a photodiode element 9a as the light receiving element 9 and an element side condenser lens 7a as the output side condenser lens 7. are placed. The light-receiving element 9 corresponds to the light-receiving element in the claims, and the exit-side condenser lens 7 corresponds to the condenser lens in the claims. The element-side condenser lens 7a converges the optical signal emitted from the planar optical waveguide 3 toward the photodiode element 9a. The photodiode element 9a and the element-side condensing lens 7a are mounted on the substrate 13 by, for example, solder or adhesive.

As an optical component 5 related to an optical signal incident on the planar optical waveguide 3, a fiber side condenser lens 11a as an incident side condenser lens 11 and an optical fiber 15 are arranged. The fiber-side condenser lens 11a condenses the optical signal emitted from the optical fiber 15 toward the planar optical waveguide. The fiber-side condenser lens 11a is mounted on the substrate 13, for example, by soldering or adhesive.

The optical fiber 15 is attached to an opening 19 provided in the housing 17 and fixed to the opening 19 . Opening 19 may be provided with a receptacle (not shown). An electrode pattern (not shown) for controlling semiconductor components such as the photodiode element 9 a is formed on the side surface of the housing 17 . The light receiving current of the photodiode element 9a is measured by an ammeter through the electrode pattern. Here, the optical signal is not a signal whose optical intensity is modulated with respect to the frequency used in actual optical communication, but a signal of continuous light having a constant optical intensity.

(Modified example of optical component)
As the optical component 5 of the optical communication module 1, in addition to the optical component 5 described above, the following optical component 5 may be applied. In the optical communication module 1 shown in FIG. 5, the optical components 5 for inputting the optical signal into the planar optical waveguide 3 include an optical fiber 15a with a collimator lens as the optical fiber 15 and a collimated light condensing lens 11 as the incident side condensing lens. A light lens 11b is applied. By using the optical fiber 15a with a collimating lens and the collimating light condensing lens 11b, the optical signal can be made to enter the fiber-side optical waveguide core 3b with high accuracy.

Further, in the optical communication module 1 shown in FIG. 6, an array photodiode element 9b is applied as the light receiving element 9 for receiving the optical signal emitted from the planar optical waveguide 3. As shown in FIG. Further, in the optical communication module 1 shown in FIG. 7, an array lens 7b is applied as the exit side condenser lens 7 for condensing the optical signal emitted from the planar optical waveguide 3. As shown in FIG.

Further, in the optical communication module 1 shown in FIG. 8, an array lens 7b is applied as the exit side condenser lens 7, and an array photodiode element 9b is applied as the light receiving element 9. As shown in FIG. In the following description, the optical communication module 1 shown in FIG. 8 is to be manufactured.

Next, a conventional manufacturing method of the optical communication module 1 (see FIG. 8) and problems thereof will be described as the circumstances leading to the idea of the optical communication module manufacturing apparatus according to the embodiment.

(Conventional Manufacturing Method of Optical Communication Module) First, as a premise, in the optical communication module 1, the array photodiode element 9b and the planar optical waveguide 3 are mounted in advance on the substrate 13 arranged in the housing 17. (see Figure 8). The array lens 7b, the fiber-side condenser lens 11a, and the optical fiber 15 are mounted on the substrate 13 in this order.

When the array lens 7b is mounted, first, an optical signal emitted from the optical fiber 15 is condensed by the fiber-side condenser lens 11a and made incident on the fiber-side optical waveguide core 3b of the planar optical waveguide 3. FIG. Next, the optical signal emitted from the element-side optical waveguide core 3c of the planar optical waveguide 3 is condensed by the array lens 7b and optically coupled to the array photodiode element 9b.

At this time, the position and angle of the optical component 5 are adjusted so that the current value output from each of the array photodiode elements 9b is maximized. The array lens 7b is fixed to the substrate 13 with solder or adhesive while the current value is maximized.

Next, when mounting the fiber-side condenser lens 11a, the respective positions of the optical fiber 15 and the fiber-side condenser lens 11a are adjusted so that the current value output from each of the array photodiode elements 9b is maximized. to adjust. The fiber-side condenser lens 11a is fixed to the substrate 13 with solder or adhesive while the current value is maximized.

Finally, when mounting the optical fiber 15, the position of the optical fiber 15 is adjusted so that the current value output from each of the array photodiode elements 9b is maximized. With the current value maximized, the optical fiber 15 is fixed to the housing 17 by YAG (Yttrium Aluminum Garnet) laser welding. As described above, the optical communication module 1 is completed.

(Problems with conventional manufacturing methods)
When the array lens 7b is mounted, the optical signal emitted from the element-side optical waveguide core 3c of the planar optical waveguide 3 is optically coupled to each of the array photodiode elements 9b. The optical signal to be condensed must be optically coupled to the fiber-side optical waveguide core 3b of the planar optical waveguide 3 . That is, it is necessary to align the optical axis of the optical fiber 15 with the optical axis of the fiber-side optical waveguide core 3b.

However, even in a state in which the optical signal emitted from the optical fiber 15 and condensed is not optically coupled to the fiber-side optical waveguide core 3b, the optical signal enters the fiber-side end surface 4a of the planar optical waveguide 3. Sometimes. The incident optical signal propagates inside the planar optical waveguide 3 and is emitted from the element-side end face 4b of the planar optical waveguide 3 as leaked light.

Optical signals emitted as leaked light may be collected by the array lens 7b and enter the array photodiode element 9b. In this state, if the position and angle of the array lens 7b are adjusted while measuring the current value output from each of the array photodiode elements 9b, the array lens 7b is adjusted to an incorrect position and angle. I will put it away.

In order to solve such a problem, it is necessary to establish means for detecting that the optical signal emitted from the optical fiber 15 and condensed is optically coupled to the fiber-side optical waveguide core 3b. Japanese Patent Application Laid-Open No. 2002-200002 proposes an optical axis adjustment device for aligning an optical signal (optical axis) emitted from a planar optical waveguide and an optical axis of an array lens.

In this optical axis adjustment device, a circulator and an optical power meter are arranged on the incident side of the planar optical waveguide, and a mirror is arranged on the outgoing side of the planar optical waveguide. The test light incident on the incident side of the planar optical waveguide is reflected by the mirror on the outgoing side of the planar optical waveguide. The intensity of the reflected test light is measured by an optical power meter on the incident side of the planar optical waveguide.

In such an optical axis adjustment device, since the circulator and the optical power meter are arranged on the incident side of the planar optical waveguide, the cost of the device is high, and there is concern that the optical axis adjustment cannot be easily performed. be done. In addition, the method of making the test light incident on the planar optical waveguide is not clear.

In order to solve such problems of the optical axis adjusting device, the inventors came up with an optical communication device manufacturing apparatus according to an embodiment. An optical communication module manufacturing apparatus according to an embodiment for manufacturing the optical communication module 1 will be specifically described below.

Embodiment.
(Optical communication module manufacturing equipment)
An optical communication module manufacturing apparatus according to an embodiment is an optical axis adjustment apparatus that aligns the optical axis of an output side condenser lens (array lens) with the optical axis of a light receiving element (array photodiode element). More specifically, the output-side condenser lens is positioned such that the current value output from the light receiving element that receives the optical signal that is emitted from the planar optical waveguide and condensed by the condenser lens is maximized. It is an optical axis adjustment device for adjustment. For convenience of explanation, the X-axis, Y-axis and Z-axis that are orthogonal to each other will be used as appropriate.

As shown in FIG. 9, the optical communication module manufacturing apparatus 51 includes an inspection optical fiber 53, an inspection optical fiber adjustment mechanism 55, a condenser lens gripping mechanism 71, a condenser lens adjustment mechanism 73, a mirror section 59, and a mirror section adjustment mechanism. It has a mechanism 61 , an imaging unit 75 and an installation base 79 . The optical communication module manufacturing apparatus 51 further includes an inspection light source 57 , an electrode 63 , an ammeter 67 , a motor controller 81 and a control section 83 .

An inspection light source 57 is connected to the inspection optical fiber 53 . The inspection optical fiber 53 emits inspection light as an optical signal. The inspection optical fiber 53 has a condenser lens. The inspection optical fiber adjustment mechanism 55 has a function of adjusting the position and angle of the inspection optical fiber 53 . The condenser lens gripping mechanism 71 has a function of attaching and detaching the exit side condenser lens 7 (array lens 7b). The condenser lens gripping mechanism 71 grips the exit-side condenser lens 7 by, for example, vacuum suction or mechanical clamping. The condenser lens adjustment mechanism 73 has a function of adjusting the position and angle of the exit-side condenser lens 7 gripped by the condenser lens gripping mechanism 71 .

The mirror section 59 has a reflecting surface 59 a that reflects the inspection light (optical signal) emitted from the planar optical waveguide 3 toward the imaging section 75 . The mirror portion adjusting mechanism 61 has a function of adjusting the position and angle of the mirror portion 59 . The imaging unit 75 has a camera 75a and a camera barrel 75b. The imaging section 75 has a function of imaging the inspection light reflected by the mirror section 59 . The optical communication module 1 to be manufactured is placed on the installation table 79 .

The optical communication module manufacturing apparatus 51 will be described in more detail. The inspection light (optical signal) condensed by the array lens 7b is incident (optically coupled) on the array photodiode element 9b. At this time, the efficiency of optical coupling changes depending on the position and angle of the array lens 7b with respect to the planar optical waveguide 3. FIG. Further, the efficiency of optical coupling changes depending on the position and angle of the array lens 7b with respect to the array photodiode element 9b.

Therefore, the condenser lens adjustment mechanism 73 has a function of driving the array lens 7b in translation and a function of driving it in rotation. Translational drive is along the X, Y or Z axis. Rotational driving is performed with the X-axis, Y-axis, or Z-axis as rotation axes (θX, θY, θZ). For translational drive, for example, a linear motion stage with stepping motors or servomotors is used. A rotary stage equipped with a stepping motor or a servomotor, for example, is used for the rotary drive.

The mirror portion 59 reflects the inspection light (optical signal) emitted from the planar optical waveguide 3 in the Z-axis negative direction (first direction) directly above the housing 17 (Y-axis positive direction (second direction)). It has the function to In this optical communication module manufacturing apparatus 51, the angle of the reflecting surface 59a of the mirror section 59 with respect to the XZ plane is an angle that allows the inspection light to be reflected in the vertical direction (Y-axis positive direction) with respect to the housing 17. . The mirror section 59 is fixed to the mirror section adjustment mechanism 61 .

Before mounting the exit-side condenser lens 7 (array lens 7 b ) in the housing 17 , it is necessary to retract the mirror section 59 out of the housing 17 . Therefore, the mirror section adjustment mechanism 61 has a function of driving the mirror section 59 in translation along the X-axis, Y-axis or Z-axis. For translational drive, for example, a linear motion stage with stepping motors or servomotors is used.

Moreover, it is necessary to make the inspection light reflected by the mirror section 59 enter the camera lens barrel 75b of the imaging section 75 perpendicularly. Therefore, the mirror section adjustment mechanism 61 has a function of rotationally driving the mirror section 59 with the X axis or Z axis as the rotation axes (θX, θZ). A rotary stage equipped with a stepping motor or a servomotor, for example, is used for the rotary drive.

The camera 75 a in the imaging section 75 has a function of imaging the inspection light reflected by the reflecting surface 59 a of the mirror section 59 . The camera 75a is sensitive to the wavelength band used for the optical signal (inspection light). A camera barrel 75b is attached to the camera 75a. The camera lens barrel 75b is equipped with a lens for enlarging the imaging area so that the element-side optical waveguide core 3c can be imaged.

The magnification of the camera barrel 75b is set so that all of the multiple element-side optical waveguide cores 3c branched from one fiber-side optical waveguide core 3b can be imaged. Here, the magnification of the camera barrel 75b is set so that four element-side optical waveguide cores 3c can be imaged. The imaging unit 75 is installed such that the distance from the tip of the camera barrel 75b to the element-side optical waveguide core 3c matches the focal length of the lens attached to the camera barrel 75b.

A monitor 77 is connected to the imaging unit 75 . The inspection light (optical signal) imaged by the camera 75 a is displayed on the monitor 77 . Further, as shown in FIG. 10, the imaging unit 75 may be connected to the control unit 83 so that the data of the inspection light image captured by the camera 75 a may be sent to the control unit 83 . Note that instead of the mirror portion adjusting mechanism 61, the imaging portion 75 (camera 75a) may be rotationally driven with the X axis or the Y axis as the rotation axes (θX, θY). A rotary stage equipped with a stepping motor or a servomotor, for example, is used for the rotary drive.

The inspection optical fiber adjusting mechanism 55 , the condenser lens adjusting mechanism 73 and the mirror portion adjusting mechanism 61 are connected to the control portion 83 via the motor controller 81 . The electrode 63 is fixed to the installation table 79 by an electrode fixture 65 . Electrode 63 is connected to ammeter 67 . When the optical axis is aligned, the current generated in the light receiving element 9 (array photodiode element 9b) is measured by the ammeter 67 via the electrode 63. FIG. The ammeter 67 is connected to the controller 83 .

The control unit 83 is a general personal computer or programmable logic computer. The control unit 83 controls the imaging unit 75 , the ammeter 67 , the motor controller 81 and the inspection light source 57 . In addition, the control section 83 controls a safety device (not shown) of the optical communication module manufacturing apparatus 51 . The control unit 83 also controls an air compressor (not shown) having a vacuum generator such as an air cylinder. Furthermore, the inspection light source 57 may be connected to the controller 83 . The control unit 83 controls on and off of the inspection light source 57 . The optical communication module manufacturing apparatus 51 according to the embodiment is configured as described above.

(Manufacturing method of optical communication module)
Next, an example of an optical communication module manufacturing method using the optical communication module manufacturing apparatus 51 will be described.

(Step 1)
As shown in FIG. 9 and the like, the housing 17 of the optical communication module 1 is placed on the installation table 79 and the housing 17 is fixed to the installation table 79 . The electrode 63 is brought into contact with the electrode pattern on the housing 17 so that the current generated in the light receiving element 9 (array photodiode element 9b) can be measured by the ammeter 67 .

In the housing 17, the planar optical waveguide 3 and the array photodiode element 9b are mounted in advance on the substrate 13 with an accuracy of about ±several tens of μm. The array lens 7b is positioned between the planar optical waveguide 3 and the array photodiode element 9b with an accuracy of about ±several μm.

(Step 2)
As shown in FIG. 11, by driving the mirror portion adjusting mechanism 61, the mirror portion 59 is moved to the substrate 13 (see FIG. 1) positioned between the planar optical waveguide 3 and the light receiving element 9 (array photodiode element 9b). etc.).

(Step 3)
By driving the inspection optical fiber adjustment mechanism 55, the inspection optical fiber is adjusted so that the inspection light (optical signal) emitted from the inspection optical fiber 53 enters the housing 17 through the opening 19 of the housing 17. Adjust the position of 53. At this time, the angle between the optical axis of the inspection optical fiber 53 and the optical axis of the fiber-side optical waveguide core 3b in the planar optical waveguide 3 is optically determined in the planar optical waveguide 3. (Optical signal) is adjusted to the incident angle.

(Step 4)
The inspection light (optical signal) emitted from the inspection optical fiber 53 passes through the planar optical waveguide 3 and is emitted from the planar optical waveguide 3 even when it is not optically coupled to the fiber-side optical waveguide core 3b. The emitted inspection light is reflected by the reflecting surface 59a of the mirror section 59 toward the imaging section 75, and the inspection light is imaged by the camera 75a. As shown in FIG. 12, when the inspection light (optical signal) is not optically coupled to the fiber-side optical waveguide core 3b, the monitor 77 displays one optical signal image 91a as the optical signal image 91, for example. be done.

(Step 5)
Next, the position of the inspection optical fiber 53 is adjusted in order to optically couple the inspection light (optical signal) emitted from the inspection optical fiber 53 to the fiber-side optical waveguide core 3b. The optical signal image displayed on the monitor 77 is checked while the position (XYZ coordinates) of the inspection optical fiber 53 is sequentially fed by the inspection optical fiber adjustment mechanism 55 .

As shown in FIG. 13, in a state in which the inspection light (optical signal) is optically coupled to the fiber-side optical waveguide core 3b, the monitor 77 has a branch signal from the optical waveguide 3a (fiber-side optical waveguide core 3b) into which the inspection light is incident. A number of optical signal images 91b corresponding to the number of optical waveguides 3a (element-side optical waveguide cores 3c) are displayed. The inspection light is radially emitted from the element-side optical waveguide core 3c, so that the optical signal image 91b has a substantially circular shape.

(Step 6)
The position of the inspection optical fiber 53 in which the optical signal image 91b is acquired is held.

(Step 7)
Next, as shown in FIG. 14, the mirror section 59 is retracted to the outside of the housing 17 by driving the mirror section adjustment mechanism 61 . Next, by driving the condenser lens adjustment mechanism 73, the array lens 7b as the exit side condenser lens 7 is arranged between the planar optical waveguide 3 and the array photodiode element 9b.

(Step 8)
Next, the light-receiving current generated in the array photodiode element 9b is measured by the ammeter 67 while the condenser lens adjusting mechanism 73 is driven to sequentially change the position and angle of the array lens 7b.

(Step 9)
Next, with the position and angle of the array lens 7b at which the value of the received light current measured by the ammeter 67 is the maximum, the optical axis of the array lens 7b and the optical axis of the array photodiode element 9b are measured. Alignment is completed. In this state, the array lens 7b is fixed to the substrate 13, and the condenser lens gripping mechanism 71 and the like are retracted out of the housing 17. FIG. The process of manufacturing an optical module using the optical communication module manufacturing apparatus 51 according to the present embodiment ends when the array lens 7b is fixed to the substrate 13. FIG.

After that, in another process, another manufacturing apparatus (not shown) is used to mount the incident-side condenser lens 11 and the optical fiber 15 (see FIG. 8, etc.). The incident-side condenser lens 11 corresponds to another condenser lens in the claims. The incident-side condenser lens 11 and the optical fiber 15 are positioned so that the light-receiving current generated in the array photodiode element 9b is maximized. (substrate 13). Thus, the optical communication module 1 is completed.

In the optical communication module manufacturing apparatus 51 described above, first, inspection light is emitted in order to align the optical axis of the array lens 7b (exiting side condenser lens 7) with the optical axis of the array photodiode element 9b (light receiving element 9). The optical axis of the inspection optical fiber 53 is aligned with the optical axis of the fiber-side optical waveguide core 3 b of the planar optical waveguide 3 .

Specifically, the inspection optical fiber 53 is incident on the planar optical waveguide 3, branched, and emitted from the planar optical waveguide 3 so that a plurality of images of the inspection light are captured by the imaging unit. The position of the inspection optical fiber 53 is adjusted. The optical axis of the optical fiber for inspection 53 can be easily aligned with the optical axis of the fiber-side optical waveguide core 3 b of the planar optical waveguide 3 by checking the images of the plurality of inspection lights. That is, the inspection light emitted from the inspection optical fiber 53 can be easily optically coupled to the fiber-side optical waveguide core 3b.

Next, in that state, the position and angle of the array lens 7b are adjusted so that the light receiving current generated in the array photodiode element 9b is maximized. By checking the current value, the optical axis of the array lens 7b can be easily aligned with the optical axis of the array photodiode element 9b. That is, the inspection light condensed by the array lens 7b can be easily optically coupled to the array photodiode element 9b.

As the optical communication module 1 manufactured by the optical communication module manufacturing apparatus 51 described above, the optical communication module 1 (see FIG. 8) including the array lens 7b and the array photodiode element 9b has been described as an example.

The object to be manufactured by the optical communication module manufacturing apparatus 51 is not limited to this, and the optical communication module 1 (see FIGS. 1 and 5) including the element-side condenser lens 7a and the photodiode element 9a can also be manufactured. can be done. The optical communication module 1 (see FIG. 6) including the element-side condenser lens 7a and the array photodiode element 9b can also be manufactured. Furthermore, the optical communication module 1 (see FIG. 7) including the array lens 7b and the photodiode element 9a can also be manufactured.

It should be noted that the optical communication module manufacturing apparatuses described in the embodiments can be combined in various ways as required.

The embodiment disclosed this time is an example and is not limited to this. The present disclosure is defined by the scope of the claims rather than the scope described above, and is intended to include all changes within the scope and meaning equivalent to the scope of the claims.

INDUSTRIAL APPLICABILITY The present disclosure is effectively used for manufacturing an optical communication module including a light receiving element and an output-side condenser lens.

1 optical communication module 3 planar optical waveguide 3a optical waveguide 3b fiber-side optical waveguide core 3c element-side optical waveguide core 4a fiber-side end surface 4b element-side end surface 5 optical component 7 emission-side condenser lens 7a element side condenser lens 7b array lens 9 light receiving element 9a photodiode element 9b array photodiode element 11 incident side condenser lens 11a fiber side condenser lens 11b collimated light condenser lens 13 substrate 15 Optical fiber 15a Optical fiber with collimator 17 Housing 19 Opening 51 Optical communication module manufacturing apparatus 53 Inspection optical fiber 55 Inspection optical fiber adjustment mechanism 57 Inspection light source 59 Mirror part 59a Reflecting surface , 61 mirror unit adjustment mechanism, 63 electrode, 65 electrode fixture, 67 ammeter, 71 condenser lens gripping mechanism, 73 condenser lens adjustment mechanism, 75 imaging unit, 75a camera, 75b camera barrel, 77 monitor, 79 installation base, 81 motor controller, 83 control section, 91, 91a, 91b light signal image.

Claims (9)

A plurality of optical components including a planar optical waveguide, a condensing lens, and a light-receiving element, an optical signal incident on the planar optical waveguide, emitted from the planar optical waveguide, and condensed by the condensing lens is received by the light receiving element, comprising:
a step of preparing a housing containing a substrate having an opening for receiving the optical signal and having the planar optical waveguide and the light-receiving element mounted thereon;
An inspection optical fiber for emitting inspection light as the optical signal is prepared, and the position of the inspection optical fiber is adjusted so that the inspection light emitted from the inspection optical fiber is incident on the opening. process and
a plurality of inspection lights that enter the planar optical waveguide from the optical fiber for inspection, are branched, and are emitted from the planar optical waveguide toward the light-receiving element in a direction different from the direction toward the light-receiving element; and capturing a plurality of images of the reflected inspection light;
adjusting the position of the optical fiber for inspection so that the image corresponding to the number of the plurality of inspection lights emitted from the planar optical waveguide is captured as the image of the inspection light;
The condensing lens is arranged between the planar optical waveguide and the light receiving element under the condition that the images corresponding to the number of the plurality of inspection lights emitted from the planar optical waveguide are captured. and
The inspection light that is incident on the planar optical waveguide from the optical fiber for inspection, is emitted from the planar optical waveguide, is condensed by the condenser lens, is received by the light receiving element, and is generated in the light receiving element. A method of manufacturing an optical communication module, comprising the step of aligning the position of the condenser lens so that the current value applied is the highest. In the step of capturing the image of the inspection light, a mirror portion having a reflective surface for reflecting the inspection light is arranged between the planar optical waveguide and the light receiving element, and reflects the inspection light on the reflective surface. 2. The method of manufacturing an optical communication module according to claim 1, wherein an imaging unit for imaging said inspection light is arranged. 3. The optical communication module according to claim 1, wherein in the step of adjusting the position of the optical fiber for inspection, the position of the optical fiber for inspection is adjusted by a fiber adjustment mechanism connected to the optical fiber for inspection. manufacturing method. 4. The method according to any one of claims 1 to 3, wherein in the step of adjusting the position of the condenser lens, the position of the condenser lens is adjusted by a condenser lens adjustment mechanism connected to the condenser lens. A method for manufacturing an optical communication module. the plurality of optical components,
an optical fiber for emitting the optical signal;
and another condensing lens for condensing the optical signal incident from the opening of the housing and causing it to enter the planar optical waveguide,
After the step of aligning the condenser lens,
attaching the optical fiber to the opening of the housing, emitting the optical signal from the optical fiber, passing through the other condensing lens and the planar optical waveguide, and condensing the optical signal by the condensing lens; and aligning the positions of the optical fiber and the other condenser lens so that the light is received by the light receiving element and the current value generated in the light receiving element is maximized. 2. A method for manufacturing the optical communication module according to item 1. An optical communication module manufacturing apparatus for manufacturing an optical communication module in which a light receiving element receives an optical signal that is incident on a planar optical waveguide, emitted from the planar optical waveguide, and condensed by a condensing lens,
an inspection optical fiber that emits inspection light toward the planar optical waveguide;
a fiber adjustment mechanism for adjusting the position of the optical fiber for inspection with respect to the planar optical waveguide;
each of the plurality of inspection lights emitted from the inspection optical fiber, incident on the planar optical waveguide, branched, and emitted from the planar optical waveguide in a first direction toward the light receiving element; a mirror unit having a reflecting mirror that reflects in a second direction different from the first direction;
a mirror adjustment mechanism for adjusting the position of the mirror;
an imaging unit configured to capture a plurality of images of the inspection light reflected by the mirror unit;
a condenser lens adjustment mechanism for adjusting the position of the condenser lens disposed between the planar optical waveguide and the light receiving element;
An optical communication module manufacturing apparatus, comprising: an ammeter electrically connected to the light-receiving element for measuring a current generated in the light-receiving element by receiving the inspection light. a monitor that is electrically connected to the imaging unit and displays an image of the inspection light;
7. The optical communication module manufacturing apparatus according to claim 6, further comprising a control section for controlling driving of said fiber adjustment mechanism, said mirror section adjustment mechanism, and said condensing lens adjustment mechanism. 8. The optical communication module manufacturing apparatus according to claim 7, wherein said imaging unit and said control unit are electrically connected. 9. The optical communication according to any one of claims 6 to 8, wherein each of said fiber adjustment mechanism, said mirror unit adjustment mechanism and said condenser lens adjustment mechanism includes either a stepping motor or a servomotor as a drive source. Module manufacturing equipment.

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