JP2022165917A - Movable electrostatic discharge preventing transport device for manufacturing component carrier - Google Patents

Abstract

To effectively and safely transport a component carrier and/or a preform of the component carrier in a component carrier manufacturing facility by an ESD-preventing method.SOLUTION: A transport device comprises: i) a storage capacity for storing the component carrier and/or the preform of the component carrier by the ESD-preventing method; ii) a lock element for locking the storage capacity; iii) a lock control unit joined with the lock element, composed so as to a) release the lock element when authority is given to an operator, and b) keep the lock element in a closed state when the authority is not given to the operator; and iv) a wireless communication device composed so as to communicate with an external device regarding information related to the transport device.SELECTED DRAWING: Figure 1

Description

The present invention relates to a mobile electrostatic discharge (ESD) shielded transport apparatus for component carriers and/or preforms for component carriers. The present invention may further relate to a mobile ESD shielded transport device loaded with component carriers (preforms), a transport system including a plurality of transport devices, and a transport device configuration system. Further, the invention can relate to a method of transporting component carriers (preforms) in an ESD shielded manner and the use of wireless communication devices.

In the context of the development of product functionality of component carriers with one or more electronic components and the increasing miniaturization of such electronic components and the increasing number of electronic components mounted on component carriers such as printed circuit boards. Increasingly powerful arrays or packages are being used that have several electronic components, with multiple contacts or connections, and with these contacts more closely spaced. Removal of heat generated by such electronic components and the component carriers themselves during operation is becoming increasingly problematic. At the same time, the component carrier must be mechanically robust and electrically and magnetically reliable so that it can operate under harsh conditions.

In particular, electrostatic discharge (ESD) during the component carrier manufacturing process poses a high risk of damage. Conventionally, component carriers (preforms) during manufacturing can be safely stored in lockers to prevent ESD events. However, part carriers during manufacturing need to be handled by operators, such as human workers or robots. According to the standard ANSI ESD S20.20/IEC61340-5-1 for static control conditions, the operator's static voltage must be below ±100V to avoid the risk of causing ESD. However, since it is impossible to estimate the electrostatic voltage of an operator, ESD sensing devices are often damaged or even destroyed by mishandling by electrostatically charged operators. Furthermore, since the environment of the part carrier manufacturing facility is full of chemicals, the lockers themselves may have rusted and created foreign matter that can also damage the part carrier during manufacture. Opening locker doors in the busy environment of part carrier production may further increase the risk of injury to the human operator. Furthermore, in large component carrier manufacturing facilities, a large number of lockers may be used and accordingly many of them may be lost or not opened (increasing the risk of ESD damage). It may no longer be possible to identify this content in the

SUMMARY OF THE INVENTION It is an object of the present invention to transport part carriers and/or preforms for part carriers in a part carrier manufacturing facility in an efficient and safe manner in an ESD shielded manner.

In order to achieve the object defined above, a carrier, a loading carrier, a carrier system, a carrier configuration system, a method for transporting component carriers (preforms) and a wireless communication device are used according to the independent claims A method is provided. Advantageous embodiments are described in the dependent claims.

According to one aspect of the invention, a movable electrostatic discharge (ESD) shield for a component carrier (e.g. printed circuit board) and/or a preform of a component carrier (e.g. a panel comprising a plurality of semi-finished component carriers) ( an anti-static) transport device (hereinafter referred to as "transport device"), the transport device comprising:
i) a containment volume (e.g., a cavity between defining walls) for storing the component carrier and/or the preform of the component carrier in an ESD-shielded manner (e.g., by using an ESD-shielding material);
ii) a locking element (e.g. a movable gate) for (safely) locking the containment volume (in an ESD shielded manner);
iii) coupled with a locking element, and a) releasing the locking element when the operator is authorized (e.g. when the operator passes an electrostatic test), and b) when the operator is not authorized (e.g. a lock control unit (e.g., a lock and/or gate opening mechanism) configured to keep the locking element closed when the operator fails an electrostatic test);
iv) Communicate with external devices (e.g., other transport devices and/or controllers) regarding transport related information (such as transport device location, specific operator authorization status, information about part carriers (preforms), etc.) A carrier device is described comprising a wireless communication device configured to: a.

According to another aspect of the present invention, a (parts carrier) mounted mobile ESD shielded transport apparatus comprising:
i) a mobile ESD shielded transport device as described above;
ii) component carriers and/or preforms for component carriers that are ESD-shielded mounted in a containment volume.

According to another aspect of the present invention, a carrier system comprising a plurality of carrier devices as described above, the plurality of carrier devices being configured to wirelessly communicate with each other within a wireless communication network (particularly , configured to communicate carrier-related information between each other), a carrier system is described.

According to another aspect of the invention,
i) at least one carrier and/or carrier system as described above;
ii) a controller comprising a further wireless communication device configured to communicate with the wireless communication device;

According to another aspect of the invention, a method of transporting a component carrier and/or a preform of a component carrier in an ESD shielded manner, comprising:
i) performing an operator static test;
ii) storing the results of the static electricity test in a wireless communication network (e.g. WLAN, WiFi);
iii) an operator approaching a mobile ESD shielded transport device as described above;
iv) obtaining test results from a wireless communication network; and based on the test results,
v) authorizing or not authorizing the operator to open the locking element of the transport device.

According to another aspect of the invention, a wireless mounted mobile ESD shielded transport apparatus for adjusting (configuring) ESD shielding of part carriers and/or preforms of part carriers in a part carrier manufacturing facility. The use (how to use) of the communication device is described.

In the context of this specification, the term "electrostatic discharge" (ESD) can refer to the sudden flow of electricity between two charged objects. ESD can occur when differently charged objects are brought close together. In the context of component carrier manufacturing, ESD can be considered an undesirable effect that can damage or destroy a component carrier (during manufacturing). They can be permanently damaged when ESD high voltages are applied. Manufacturers of component carriers may therefore use antistatic strategies and antistatic devices to establish static protected areas (EPAs) that are substantially free of static charge. In particular, sensing products can be protected by ESD shielding. ESD shielding or "ESD shielding scheme" may refer to a device or strategy that reduces, dampens, or otherwise prevents electrostatic discharge. In the context of this specification, therefore, the term "ESD shielding" may refer to any measure to reduce/prevent ESD, for example, by applying antistatic materials and antistatic agents. As used herein, the terms "ESD shielding" and "antistatic" may be used synonymously.

In the context of this specification, the term "conveyor" may denote any device suitable for storing component carriers (in cavities) in an ESD-shielded manner. The carrier may include a locking element for securely locking the ESD sensitive product to the ESD shielded cavity. Preferably, the walls around the containment volume and locking element comprise ESD shielding/antistatic material. In one embodiment, the transport device is mobile, ie using wheels. A component carrier manufacturing facility may include a plurality of such transport devices, each containing a different component carrier at a different stage of production.

In the context of this specification, the term "wireless communication device" may refer to any device suitable for communicating wirelessly (with further wireless communication devices). For example, data (information) between one wireless communication device and a further wireless communication device may be 4G, 5G, Wifi (802.11p), Radio Frequency (RF), RFID, NFC, or DSRC (dedicated may be communicated (sent/received) via short range communication). A wireless communication device may be configured as a receiver, transmitter, or transceiver. The wireless communication device may further be configured to communicate with wireless communication devices (external devices) of other carrier devices. Additionally, the wireless communication device may be configured to communicate with a controller (external device) of the transport device configuration system. Additionally or alternatively, wireless communication devices may be integrated in wireless communication networks and/or IoT systems.

In the context of this specification, the term "wireless communication network" may refer to a computer network that uses wireless data connections between network nodes, eg, wireless communication devices. In one example, a network is a wireless local area network that uses wireless distribution methods to link two or more devices over short distances (e.g., by providing connections through access points for Internet access). (WLAN). In one example, the IEEE 802.11 WLAN standard (Wi-Fi®) may be used. In the network described above, information indicative of a transport device can be stored and retrieved again. For example, an electrostatic test (apparatus) may be connected to a network and store test results (personal information related) of different operators on the network or in network-associated memory. Additionally, transport devices may upload their current location and/or their current payload to a network or network-associated memory. Such data may be stored in a memory (of the controller), for example. By combining information in the network, it may be feasible to efficiently configure the transport device.

The wireless communication device and/or the further wireless communication device are equipped with 4G and/or 5G capabilities. In the context of this specification, the term "4G and/or 5G capabilities" may refer to known wireless system standards. 4G (or LTE) is an established standard, but 5G is an upcoming technology that will be standardized and may become fully established in the near future. Wireless communication devices may also be suitable for future developments such as 6G.

Wireless communication devices may also comply with WiFi standards such as 2.4 GHz, 5 GHz, and 60 GHz. Electronic devices may include, for example, so-called wireless combos (integrated with WiFi, Bluetooth, GPS, etc.), radio frequency front ends (RFFF), or low power wide area (LPWA) network modules.

The wireless communication device and/or the additional wireless communication device may comprise an antenna. In the context of the present specification, the term "antenna" may particularly denote an element that is connected to a receiver or transmitter, for example via a transmission line. An antenna may thus be denoted as an electrical member that converts electrical power into radio waves and/or vice versa. Antennas such as radio transmitters and/or radio receivers may be used in conjunction with a controller (eg, control chip). When transmitting, a radio transmitter supplies an electric current oscillating at radio frequencies (ie, high frequency alternating current) to an antenna, which may radiate energy from the electric current as electromagnetic waves (especially radio waves). In receive mode, the antenna may intercept a portion of the electromagnetic wave's power, for example, to provide a small voltage that may be applied to the receiver to be amplified. In embodiments, the antennas may be configured as receiver antennas, transmitter antennas, or transceiver (ie, transmitter and receiver) antennas. In one example, the antenna may be configured as a single antenna. In another example, the antennas may be configured as an (attached, embedded) antenna array.

The wireless communication device and/or the additional wireless communication device may include radar. In the context of this specification, the term "radar" may refer to object detection that uses electromagnetic waves to determine the range, angle, or velocity of one or more objects. A radar device may comprise a transmitter that transmits electromagnetic waves (eg, in the radio or microwave range). Electromagnetic waves from a transmitter reflect off objects and return to the receiver. This allows one antenna structure to be used for transmission and reception. Additionally, processors such as electronic components may be used to determine properties of objects such as position and velocity based on the received electromagnetic waves. According to a further embodiment, the described component carrier can be applied in the context of radar applications. In particular, the application of radar to industry. Radar applications can be performed in the frequency range of 65 GHz and above in medium or long range, currently typically from 77 GHz to 81 GHz, but increasing to 90 GHz and even more in the long term as technology advances. can. Radar applications can be implemented in the mm-wave range, especially for industrial applications (eg level indicators). In these examples, the antenna structure and electronic components (eg, HF components for radar applications) can advantageously be placed in close spatial proximity without undesirable parasitic effects occurring.

In the context of this specification, the term "parts carrier" specifically means a component capable of housing one or more parts on and/or in order to provide mechanical support and/or electrical connectivity. any supporting structure. In other words, the component carrier may be configured as a mechanical and/or electronic carrier for components. In particular, the component carrier can be one of a printed circuit board, an organic interposer, and an IC (integrated circuit) substrate. The component carrier can also be a hybrid substrate combining different ones of the above types of component carriers.

In one embodiment, the component carrier comprises a (layer) stack of at least one electrically insulating layer structure and at least one electrically conducting layer structure. For example, the component carrier may in particular be a stack of the mentioned electrically insulating and conducting layer structures formed by applying mechanical pressure and/or thermal energy. The mentioned stack can provide a plate-like component carrier which is capable of providing a large mounting surface for further components and which is nevertheless very thin and compact. The term "layered structure" can specifically refer to a continuous layer in a common plane, a patterned layer, or a plurality of discontinuous islands.

In the context of the present specification, the term "part carrier preform" may particularly refer to a panel comprising a plurality of semi-finished part carrier products (as described above). For example, the panel may later be divided (singulated) into multiple (finished) component carriers. In another example, the part carrier preform may be a single semi-finished part carrier.

According to an exemplary embodiment, the present invention provides an ESD shielded mobile device comprising: i) an ESD shielded containment volume that is safely closable by a locking element; and ii) a wireless communication device for communicating carrier related information with an external device. When the transport device is applied, it can be based on the idea that the component carriers and/or the preforms of the component carriers can be stored and transported in an ESD-shielded manner in an efficient and safe manner in the component carrier manufacturing facility. This ensures that only authorized and ESD-free operators open the transport device and handle the component carriers inside. The external device can be another transport device, controller and/or network. Thereby, the transport device may (automatically) receive relevant information about the authorization status of the operator. Further, the transport device (or multiple transport devices) can be efficiently configured and coordinated during the component carrier manufacturing process using a wireless communication device.

Conventionally, it has not been possible for the operator to verify that there is no ESD risk. Inspection was only possible at certain inspection stations, e.g. an operator who accidentally forgot to inspect himself was opening an ESD-shielded locker and damaging the contents/contents was breaking These drawbacks are overcome by the described transport device, which opens only when it receives authorization information (from an electrostatic test) wirelessly.

Moreover, in the past, in large installations, ESD shielding lockers were often lost or information about their installation was no longer possible to be identified without opening them. These shortcomings are also overcome because the described transport device can be located and coordinated using transport device related information via a wireless communication device and/or wireless communication network (especially using a controller). be done.

Exemplary Embodiment According to an exemplary embodiment, a wireless communication device is coupled to a lock control unit, the wireless communication device controlling the lock control unit (or triggering a reaction thereof) based on transport device related information. ) is configured as This may provide the advantage that the ESD sensitive contents of the carrier are effectively protected, but this relies on the information received by the wireless communication device to open/close the locking element. It is from.

For example, the transport device related information includes information about the authorization status of the operator, particularly if the operator passed an electrostatic test. Thus, the wireless communication device may receive authorization information from the static test device (over the network), after which the wireless communication device may issue a test-related command to "open" or "keep closed". may be passed to the lock control unit.

According to further exemplary embodiments, the external device is at least one of the group consisting of at least one further mobile ESD shielded transport device, a control device, an Internet of Things (IoT) application. This may provide the advantage that the transport devices are widely connected within the component carrier manufacturing facility, allowing efficient coordination of information.

The term "IoT" in this context refers to physical objects including sensors, software and other technologies for the purpose of connecting and exchanging data with other devices and systems over a network (Internet). It may refer to the network of In other words, the term IoT application may refer to particularly complex wireless communication networks. A component carrier manufacturing facility, which may at least partially comprise an IoT application, interconnects a large number of devices. A carrier device or multiple carrier devices can be integrated into such an IoT application. In one example, an electrostatic test device and/or controller may also be integrated into an IoT application.

According to a further exemplary embodiment, the carrier related information includes information regarding the location of the carrier (especially in the component carrier manufacturing facility). This may provide the advantage that the location of a particular carrier device (and its contents) can be easily determined, especially by obtaining this information from a wireless communication network. This overcomes the known shortcoming that ESD shielding lockers are not found in complex component carrier manufacturing facilities.

According to a further exemplary embodiment, the transporter related information includes information about the part carriers and/or preforms of the part carriers to be stored in the storage volume. This offers the advantage that the localization of a particular component carrier (preform) at a particular process step (or equipment level) can be easily determined, inter alia, by obtaining this information from a wireless communication network. obtain.

Furthermore, it is possible to identify which carrier contains which component carrier (preform) without having to open the carrier (which could create unnecessary ESD risks). This may overcome the known drawback that certain component carriers cannot be found in complex component carrier manufacturing facilities and ESD shielding lockers must be opened to verify their contents.

According to a further exemplary embodiment, the transport device related information includes information regarding the authorization status of a particular operator (especially static test results). This may provide the advantage that, in particular, authorization information can be provided to the transport device (and lock control unit) in a dynamic (periodically updated) manner, depending on recent static test results. .

According to further exemplary embodiments, the locking element comprises a locking gate, such as a seat shutter gate and/or a telescoping sliding door type gate. Conventional ESD shielding lockers occupy space in a space-constrained manufacturing environment by providing a door that opens in a window-like fashion. This increased the risk of operator injury. Locking gates configured as seat shutter gates and/or telescoping sliding door gates overcome these problems and provide additional safety benefits to the work environment.

According to further exemplary embodiments, the transport device includes at least one of an ESD shielding material, an antistatic material, an ESD shielding agent, an antistatic agent, an ESD or antistatic coating, an antirust coating. The ESD-sensitive contents of the transport device are thereby particularly protected against ESD. Further, rusting of the transport equipment (which can occur in component carrier manufacturing facilities where large amounts of chemicals are used) can be effectively suppressed.

According to a further exemplary embodiment, the transport device further comprises a token reader coupled to the lock control unit for analyzing the operator's token (particularly a smart card). The token reader is further configured to provide information to the lock control unit that the operator is authorized or the operator is not authorized based on the results of the analysis. A token reader may advantageously be applied as a further authorization mechanism interacting with the wireless communication device (coupled to the lock control unit).

The token reader may be located outside the carrier and configured as a card reader (eg RFID or NFC). The operator may swipe his personal (equipment) card to the card reader, and the card reader may identify the operator's personal information. This may increase safety, as only certain operators may be allowed to open certain transports. Thus, even if the operator is authorized from a static standpoint, access may still be denied from a privacy standpoint.

According to a further exemplary embodiment, the transport device further comprises a (self)locating device adapted to perform self-localization of the transport device and to store the localization result as transport device related information. In this manner, the transport device may locate itself and communicate such information to the network (eg, to the controller) so that configuration/adjustment can be performed efficiently.

(Self) localization devices are for example: range sensors, velocity sensors, localization sensors, cameras, radar, ultrasound capabilities, GPS (Global Positioning System), differential GNSS, SLAM (simultaneous localization and mapping) capabilities. , GPR (Ground Penetrating Radar). In principle, the locating device can be any kind of sensor device that allows the transport device to localize itself within the component carrier manufacturing facility (especially for different levels of the facility).

According to a further exemplary embodiment, the transport device is coupled to the storage volume and configured to automatically output at least one component carrier and/or preforms of component carriers from the storage volume in an ESD shielded manner. It further comprises an output element that receives the output. This may provide the advantage that the ESD sensitive contents are even more secure, since the operator does not have to manually retrieve the component carrier (preform) from the containment volume. is.

The output element may comprise any mechanism suitable for automatically dispensing the contents of the carrier. For example, the output element may comprise a (particularly L-shaped) drawer that is automatically pushed out of the storage volume (see Figure 2).

According to a further exemplary embodiment, the storage volume includes a plurality of slots for storing a plurality of component carriers and/or preforms of component carriers. Thereby the contents of the transport device can be well organized and the desired object can be obtained in an easy and safe manner.

According to further exemplary embodiments, the operator is a human and/or a transport robot. The operator is in many instances a human facility worker, but may be any type of robot configured to handle part carriers (preforms) during manufacturing. The robot may also have to perform an electrostatic test before being authorized to open the locking elements of the transport device.

According to a further exemplary embodiment, the transport device further comprises a display configured to provide transport device related information of the transport device to an operator. The carrier-related information may indicate, for example, the component carriers and/or preforms of the component carriers to be stored in the storage volume. It provides the advantage that the location of a particular component carrier (preform) at a particular process step can be easily sought by the operator without having to open the transport device (creating unnecessary ESD risks). obtain. Known drawbacks can thereby be overcome such that certain component carriers cannot be found in complex component carrier manufacturing facilities and ESD shielding lockers must be opened to verify their contents.

According to a further exemplary embodiment, the transport device further comprises a mechanical locking element that receives the master key and is coupled to the locking element, the mechanical lock being configured to open the locking element when receiving the master key. . This measure offers the advantage of additional security. For example, in an emergency it can be extremely critical to open a locking element without the operator being authorized. The mechanical lock can be part of the lock control unit or can be arranged independently from the lock control unit.

According to a further exemplary embodiment, the lock control unit is arranged to automatically close the lock element after a predetermined period of time. This aspect provides an additional security measure for the contents of the ESD sensitive carrier.

According to a further exemplary embodiment, the transport device comprises at least one movable element, in particular wheels, for manually or automatically moving the transport device within the component carrier manufacturing facility. In particular, the movable element is coupled to the containment volume via a mounting structure such that the containment volume is positioned at a height that is essentially within reach of an upright human operator. This may offer the advantage that the transport device described is easy to operate and particularly user-friendly.

According to a further exemplary embodiment, the control device provides the location of the plurality of transport devices, the identity of the authorized operator and/or the non-authorized operator, the part carrier in the part carrier manufacturing facility and/or A memory is provided for storing at least one transport device related information of a group of transport directions of preforms of a component carrier.

According to a further exemplary embodiment, the controller is configured to coordinate a plurality of transport devices. In particular, the adjustments are of the group consisting of position specific adjustments, authorized operator and non-authorized operator adjustments, and adjustment of the direction of travel of the component carrier and/or preforms of the component carrier in the component carrier manufacturing facility. At least one.

This can offer the advantage that multiple (large) transport devices can be configured and coordinated even in large component carrier manufacturing installations. A controller may be any processor or processors configured to receive, store, and control information received from a carrier device and/or a wireless network. The controller may be handled by a human operator or may function automatically. The controller may also include AI capabilities (eg, neural networks) that can be trained based on human judgment. The controller may be coupled to wireless communication networks and/or IoT applications.

According to a further exemplary embodiment, the carrier configuration system is coupled to an Internet of Things (IoT) application, particularly in this case the IoT application includes artificial intelligence (AI) algorithms (see discussion above).

According to a further exemplary embodiment, presenting the operator's token to a token analyzer of the transport device; parsing the token; granting further privileges or not granting further privileges (see token description above).

According to a further exemplary embodiment, the token identifies the operator, and the operator's identification is combined with test results stored in the wireless communication network. In this manner, the operator's identity can be identified using the token, after which test results can be retrieved from the network using the identity. The transport device can thereby be handled in a safe, automated and user-friendly manner.

According to a further exemplary embodiment, if the operator is authorized, the method further comprises automatically opening the locking element and/or manually opening the locking element (see description above).

According to a further exemplary embodiment, electrostatic testing includes testing specific parts of the operator, particularly shoes or wrists. This may offer the advantage that established electrostatic testing methods are applicable, so that the described method can be directly implemented in existing installations. Preferably, the electrostatic testing device can be coupled to the facility's wireless communication network to upload test results. Additionally, the uploaded test results can be combined with each operator (eg, personal information).

According to a further exemplary embodiment, the movable element comprises a locking feature. For example, the wheels can be self-locking. This may provide the advantage that, for example, the locking element should not be closed or the safety is increased even when the ESD shielded device is being charged.

According to a further exemplary embodiment, an ESD shielded transport device includes an energy storage element (eg, battery and/or accumulator) and automatic charging capability. For example, the device is configured to automatically charge the Energy Storage Element (and self-drive to a charging station) when the Energy Storage Element's power status is low (eg, below 10%). This may provide the advantage that the power supply of the device is robust and accordingly the device functions in a very safe manner.

In one embodiment, the component carrier is shaped like a plate. This contributes to a compact design, yet the component carrier provides a large base for mounting components. Further, in particular, by way of example, bare dies for embedded electronic components can be conveniently embedded in thin substrates such as printed circuit boards due to their small thickness.

In one embodiment, the component carrier is configured as one of the group consisting of a printed circuit board, a substrate (particularly an IC substrate), and an interposer.

In the context of the present application, the term "printed circuit board" (PCB) is used in particular to combine several electrically conductive layer structures and several electrically insulating layers, for example by applying pressure and/or by supplying thermal energy. It may show a plate-like component carrier formed by stacking structures. As a preferred material for PCB technology, the conductive layer structure is made of copper, whereas the electrically insulating layer structure may contain resin and/or fiberglass, so-called prepreg or FR4 material. The various conductive layer structures are connected through-holes by forming through-holes through the laminate, for example by laser drilling or mechanical drilling, and by filling them with a conductive material (especially copper). can be connected to each other in any desired manner by forming vias as . Aside from one or more components that may be embedded in the printed circuit board, printed circuit boards are typically configured to house one or more components on one or both of the opposing surfaces of a planar printed circuit board. be done. They can be connected to the corresponding main surfaces by soldering. The dielectric portion of the PCB may be composed of resin with reinforcing fibers (such as fiberglass). In the context of the present application, the term "substrate" may particularly denote a small component carrier. A substrate may be a relatively small component carrier, relative to a PCB, on which one or more components may be mounted, and function as a connection medium between one or more chips and a further PCB. can fulfill For example, the substrate may have substantially the same size as the mounted components (particularly electronic components) (eg, in the case of a chip scale package (CSP)). More specifically, the substrate serves as a carrier for electrical connections or electrical networks and is comparable to a printed circuit board (PCB), but with a density of laterally and/or vertically arranged connections. It can be understood as a component carrier that is considerably elevated. A lateral connection may be, for example, a conductive path, whereas a vertical connection may be, for example, a drilled hole. These lateral and/or vertical connections may be located within the substrate and may be of embedded or non-embedded components (such as bare dies) with printed circuit boards or intermediate printed circuit boards, particularly IC chips. It can be used to provide electrical, thermal and/or mechanical connections. Thus, the term "substrate" also includes "IC substrate". The dielectric portion of the substrate may consist of a resin with reinforcing particles (such as reinforcing spheres, especially glass spheres).

The substrate or interposer may be at least one layer of glass, silicon (Si), or a photoimageable or dry-etchable organic material such as an epoxy-based build-up material (such as an epoxy-based build-up film), or polyimide, polybenzoxazole. , or may comprise or consist of a polymeric compound such as a benzocyclobutene-functionalized polymer.

In one embodiment, the at least one electrically insulating layer structure comprises resin (reinforced or unreinforced resin, such as epoxy resin or bismaleimide triazine resin), cyanate ester resin, polyphenylene derivative, glass (especially fiberglass, multilayer glass, glass-like material), prepreg material (FR-4 or FR-5, etc.), polyimide, polyamide, liquid crystal polymer (LCP), epoxy build-up film, polytetrafluoroethylene (PTFE, Teflon (registered trademark)) , ceramics, and metal oxides. Reinforcing structures such as webs, fibers or spheres, for example made of glass (multilayer glass), can also be used. Prepregs, particularly FR4, are generally preferred for rigid PCBs, but other materials, particularly epoxy-based build-up films or photoimageable dielectric materials, may also be used. High frequency applications include high frequency materials such as polytetrafluoroethylene, liquid crystalline polymers, and/or cyanate ester resins, low temperature co-fired ceramics (LTCC), or other low, ultra-low, or ultra-low DK materials. , can be realized as an electrically insulating layer structure on the component carrier. In one embodiment, the at least one conductive layer structure comprises at least one of the group consisting of copper, aluminum, nickel, silver, gold, palladium, magnesium, and tungsten. Copper is generally preferred, but other materials or coatings thereof are also possible, particularly those coated with superconducting materials such as graphene.

The at least one (electronic) component may be a non-conductive inlay, a conductive inlay (such as a metal inlay preferably containing copper or aluminum), a heat transfer unit (e.g. heat pipe), a light guide element (e.g. an optical waveguide or conductor). optical connections), optical elements (eg, lenses), electronic components, or combinations thereof. ), for example, components include active electronic components, passive electronic components, electronic chips, memory devices (e.g. DRAM or other data memory), filters, integrated circuits, signal processing components, power management components, optoelectronic interface elements, light emitting diodes, optocouplers, voltage converters (e.g. DC/DC converters or AC/DC converters), cryptographic components, transmitters and/or receivers, electromechanical converters, sensors, actuators, microelectromechanical systems (MEMS) , microprocessors, capacitors, resistors, inductances, batteries, switches, cameras, antennas, logic chips, and energy harvesting units. However, other components may be embedded in the component carrier. For example, magnetic elements can be used as components. Such magnetic elements may be permanent magnetic elements (ferromagnetic, antiferromagnetic, multiferroic, or ferrimagnetic elements, such as ferrite cores) or they may be paramagnetic elements. However, the component can also be a substrate, an interposer, or a further component carrier, for example in a substrate-in-substrate configuration. Components may be surface mounted and/or embedded within the component carrier. In addition, other components may also be used as components, particularly those that generate and emit electromagnetic radiation and/or are sensitive to electromagnetic radiation propagating from an environment.

In one embodiment, the component carrier is a stacked component carrier. In such embodiments, the component carrier is a composite of multiple layers that are stacked and connected together by applying pressure and/or heat.

After treating the inner layer structure of the component carrier, symmetrically or asymmetrically one or both of the opposite main surfaces of the treated layer structure with one or more further electrically insulating and/or conductive layer structures. Covering (especially by lamination) is possible. In other words, the build-up can be continued until the desired number of layers is obtained.

After the formation of the stack of electrically insulating layer structures and conductive layer structures has been completed, it is possible to proceed with the surface treatment of the resulting layer structure or component carrier. In particular, an electrically insulating solder resist can be applied to one or both of the opposing major surfaces of the layer stack or the component carrier with respect to surface treatment. For example, one or more conductive layers to be used to electrically couple the component carrier to the peripheral electronics by forming a solder resist or the like over the major surface and then patterning the layer of solder resist. It is possible to expose part of the surface. Surface portions of the component carrier that remain covered with solder resist, particularly those containing copper, can be effectively protected from oxidation or corrosion.

Also, with respect to surface treatments, it is possible to selectively apply a surface finish to the exposed conductive surface portions of the component carrier. Such a surface finish can be a conductive coating material for exposed conductive layer structures (particularly pads, conductor tracks, etc. containing or consisting of copper) on the surface of the component carrier. If such exposed conductive layer structures are left unprotected, the exposed conductive component carrier material (particularly copper) can oxidize, reducing the reliability of the component carrier. A surface finish can also be formed, for example, as an interface between a surface mounted component and a component carrier. A surface finish has the function of protecting exposed conductive layer structures (especially copper circuits) and enabling the joining process with one or more components, for example by soldering. Examples of materials suitable for surface finishing include organic solderability preservatives (OSP), electroless nickel-plated immersion gold (ENIG), gold (particularly hard gold), chemical tin, nickel-gold, nickel-palladium, ENIPIG ( electroless nickel plating, electroless palladium plating, immersion gold plating), etc.

The aspects defined above and further aspects of the invention are apparent from the examples of embodiment to be described hereinafter and are explained with reference to those examples of embodiment.

FIG. 3 illustrates a mobile ESD shielded transport apparatus in accordance with an exemplary embodiment of the invention; FIG. 4 illustrates an on-board mobile ESD shielded transport apparatus in accordance with a further exemplary embodiment of the present invention; 1 illustrates a transport device configuration system in accordance with an exemplary embodiment of the invention; FIG. FIG. 3 illustrates a multi-operator static testing environment in accordance with an exemplary embodiment of the present invention; FIG. 2 depicts a component carrier manufacturing facility in accordance with an exemplary embodiment of the present invention;

The illustrations in the drawings are schematic. In different drawings, similar or identical elements are provided with the same reference numerals.

Before describing the exemplary embodiments in more detail with reference to the drawings, some basic considerations are summarized based on which the exemplary embodiments of the present invention are deployed.

According to an exemplary embodiment, the transport device's ESD cart electronic lock (lock control unit) is interconnected with a personal static system (wireless communication network) in which the (ANSI ESD S20.20 resistance conditions : Individual bracelet system resistance: 1.0*10 ⁶ to 3.5*10 ⁷ , individual shoe floor system resistance, 10 ⁵ to 10 ⁹ , tribostatic voltage from -100 V to +100 V) Personal static test Qualified by (e.g. shoes, bracelets, body resistance), the ESD cart shield (locking element) can be opened after the card (token) has been checked. When the operator passes the electrostatic test and presents the card, the electronic lock displays a light and activates the unlock button (lock control unit) to open the top lid (lock element) of the transport device.

According to an exemplary embodiment, the transport device can be realized as follows: To avoid the influence of external electric fields on the product (part carrier), cavity (containment volume) conductors are used to cover the external electric fields. As a result, the products inside are not affected by the external electric field, effectively avoiding the damage caused by static electricity. The design of the screen door (locking element) meets space requirements and is fixed on the trolley (conveyor) so that the risk of personal injury is effectively avoided. Products can be selected and placed when the shutter door lock (lock control unit) is opened. When the shutter door is pushed up into place, the internal L-frame (output element) can be moved.

According to a further exemplary embodiment, the potential foreign object (FM) problem caused by telescoping sliding doors can be overcome as follows: i) Guide rail materials can be made on the basis of roller material (POM), guide rail production can be easily replaced and/or ii) 903 rigid material can also be used for tracks, electric doors use sealed bearings as contacts, This effectively reduces the friction surface and avoids FM problems.

FIG. 1 illustrates a mobile electrostatic discharge (ESD) shielded transport apparatus 100 for a component carrier 110 and/or a component carrier preform, according to an exemplary embodiment. The transport apparatus 100 comprises a storage volume 120 in a container configured for ESD shielded storage of part carriers 110 and/or preforms of part carriers. Transport apparatus 100 includes ESD shielding and/or antistatic materials and anticorrosive coatings. Storage volume 120 is coupled to movable elements 170 (wheels, particularly wheels that are self-lockable) via mounting structure 175 so that storage volume 120 is accessible to operator 400, an upright human being. It is positioned at a high place where the Using wheels 170 , transport apparatus 100 can be moved manually or automatically within component carrier manufacturing facility 500 .

The transport device 100 further comprises a locking element 130 for securely locking the storage volume 120 . The locking element 130 is a retractable sliding gate that, in the closed state, protects the interior 120 of the transport apparatus 100 from electrostatic discharge. Further, the transport device 100 comprises a lock control unit 140 coupled to the locking element 130 and configured to control the opening and closing of the locking element 130 . Locking element status indicator 141 further indicates the status of telescoping sliding gate 130 . Lock control unit 140 can be configured as a simple lock and lock element 130 must be manually opened. Alternatively, locking device 140 comprises a mechanism for automatically opening locking element 130 . Lock control unit 140 can be configured to automatically close locking element 130 after a predetermined period of time. In the operating state of the transport device 100, the component carrier 110 (preform) is located in the storage volume 120 and the locking element 130 is closed. The lock control unit 140 only triggers the opening of the locking element 130 when the operator 400 (human or transport robot) is authorized and leaves the locking element 130 closed when the operator 400 is not authorized. to

The transport device 100 further comprises a token reader 135, a smart card reader/writer coupled to the lock control unit 140 for parsing a token, which is the operator's 400 smart card (eg, personal equipment ID). Token reader 135 is further configured to provide information to lock control unit 140 that operator 400 is authorized or operator 400 is not authorized based on the results of the analysis.

In case of emergency, the transport device 100 comprises a mechanical locking element 180 for receiving a master key coupled to the locking element 130 so that the locking element 130 can be opened using the master key. The carrier device 100 is configured to self-locate the carrier device 100 and store the localization results (eg, in a wireless network) as carrier device 100-related information (eg, GPS, not shown). device or ultrasound device).

The transport device 100 further comprises a wireless communication device 150 configured to communicate with external devices 100a-c, 210 (see FIG. 3 below) regarding transport device 100 related information. The transport device 100 related information mentioned above relates to information regarding at least one of the component carriers 110 and/or component carrier preforms to be stored in the storage volume 120, the location of the transport device 100 in the component carrier manufacturing facility 500. and/or information regarding the authorization status of a particular operator 400 .

The wireless communication device 150 is coupled to the lock control unit 140 such that the wireless communication device 150 controls the lock control unit 140 (and, for example, triggers opening/closing) based on carrier device 100 related information. be able to.

The ESD shielded transport apparatus 100 is equipped with a battery/accumulator (not shown) so that it can move freely without cables in the part carrier manufacturing facility 500 . Power status is indicated by power indicator 181 and device 100 can be turned on/off using main power switch 182 . Preferably, the ESD shielded transport apparatus 100 is configured to automatically charge itself (self-drive to a charging station) when the battery/accumulator power condition is low.

FIG. 2 illustrates a side view of an on-board mobile ESD shielded transport apparatus 100 in accordance with an exemplary embodiment. The mobile ESD shielded transport apparatus 100 is in principle the same as described for FIG. 1, but the interior can be seen in this view. Component carriers 110 and/or component carrier preforms are mounted in containment volume 120 in an ESD shielded manner. Storage volume 120 comprises a plurality of slots for storing a plurality of component carriers 110 (preforms). An L-shaped output element 160 (designed as an automatically movable drawer) is coupled with the storage volume 120 and extracts from the storage volume 120 at least one component carrier 110 and/or component carrier preforms ( optionally) configured to automatically output.

FIG. 3 illustrates a carrier configuration system 200 in a component carrier manufacturing facility 500 according to an exemplary embodiment. System 200 comprises a plurality of transport devices 100a-c (as described above) forming a transport device system. The system 200 further comprises a controller 210 (external device) that includes a further wireless communication device 250 configured to communicate with a plurality of wireless communication devices 150 each attached to the transport devices 100a-c. The controller 210 can determine the location of the plurality of transport devices 100a-c, the identity of the authorized operator and/or the non-authorized operator 400, the part carrier 110 and/or the part carrier in the part carrier manufacturing facility 500. and a memory for storing information related to the conveying apparatus 100, such as the conveying direction of the preforms.

This allows the controller 210 to perform a plurality of operations based on transport device 100 related information such as location identification, authorized and non-authorized operators 400, adjustment of the transport direction of the component carrier 110 (preform), and the like. It is configured to coordinate transport devices 100a-c. The manufacturing facility 500 includes several levels so that the (self) localization of the transport devices 100a-c may not be solely based on GPS, eg additional ultrasound capabilities may be used. The devices and controller 210 of the transport device configuration system 200 described above are coupled via a wireless communication network 151 (eg, WiFi).

Preferentially, the carrier configuration system 200 is further coupled (integrated) with Internet of Things (IoT) applications including artificial intelligence (AI) algorithms (not shown).

FIG. 4 illustrates an exemplary embodiment of an electrostatic testing 410 environment for multiple operators 400 . A static test 410 is performed by each device (and/or floor system) on a particular portion of each operator 400, for example, a shoe or wrist for static discharge. The inspection results are also stored (eg, in memory 250 of controller 210) in wireless communication network 151 (eg, WLAN) of component carrier manufacturing facility 500. FIG.

FIG. 5 illustrates an exemplary embodiment of a component carrier manufacturing facility 500 having a mobile ESD shielded transport apparatus 100 and multiple operators 400 . Operators (persons) entering an electrostatic protected area (EPA) acting on ESD sensitive products require access rights. Thus, only qualified operators 400 may operate the ESD sensitive products described above. Upon approaching the transport device 100 , the test results are obtained from the wireless communication network 151 and based on the test results, the operator 400 is authorized or not authorized to open the locking element 130 of the transport device 100 .

Preferentially, the operator 400 is equipped with a smart card that is parsed by the token reader 135 of the transport device 100 and, based on the result of the parsing, further authorizes the operator 400 to open the locking element 130 of the transport device 100 or Avoid granting further privileges. The token thereby identifies the operator 400 and the operator's 400 identity is combined with the test results stored in the wireless communication network 151 . Thus, the identity of the operator 400 (using tokens) and the static state (using test results stored in the network) are controlled prior to release of the transport apparatus 100 . If operator 400 is authorized, locking element 130 must be automatically opened and/or manually opened by operator 400 .

100 ESD Shielded Mobile Transport Device 100a-c Multiple Transport Devices 110 Part Carrier 120 Storage Volume 130 Lock Element 135 Token Reader 140 Lock Control Unit 141 Lock Element Status Indicator 150 Wireless Communication Device
151 Wireless Communication Network 160 Output Element 170 Movable Element 175 Mounting Structure 180 Mechanical Lock 181 Power Indicator 182 Main Power Switch 200 Conveyor Configuration System 210 Control Device 250 Additional Wireless Communication Device 400 Operator 410 Static Test Device 500 Component Carrier Manufacturing Equipment

Claims (32)

1. A mobile electrostatic discharge (ESD) shielded transport apparatus for component carriers and/or preforms for component carriers, comprising:
a storage volume for ESD-shielded storage of the component carrier and/or the preform of the component carrier;
a locking element for locking said containment volume;
a lock control unit, coupled with the lock element,
a lock control unit configured to open said locking element when an operator is authorized and to keep said locking element closed when an operator is not authorized;
A carrier device comprising: a wireless communication device configured to communicate with an external device regarding carrier device related information. the wireless communication device is coupled to the lock control unit;
wherein the wireless communication device is configured to control the lock control unit based on the transport device related information;
2. The conveying device according to claim 1. said external device is at least one of the group consisting of at least one further mobile ESD shielded transport device, a control device, an Internet of Things (IoT) application;
3. The conveying device according to claim 1 or 2. The conveying device related information includes information regarding the position identification of the conveying device in a component carrier manufacturing facility.
4. A conveying device according to any one of claims 1 to 3. the transport device related information includes information about the component carriers and/or preforms of the component carriers to be stored in the storage volume;
5. A conveying device according to any one of claims 1 to 4. the transport device related information includes information about a particular operator's authorization status;
A conveying device according to any one of claims 1 to 5. said locking element comprises a locking gate, in particular a seat shutter gate and/or a telescoping sliding door gate;
7. A conveying device according to any one of claims 1-6. The conveying device includes at least one of the group consisting of an ESD shielding material, an antistatic material, an antistatic agent, an ESD shielding coating, an antistatic coating, and an antirust coating.
8. A conveying device according to any one of claims 1-7. the transport device further comprising a token reader coupled to the lock control unit for parsing an operator token;
the token reader is further configured to provide information to the lock control unit that the operator is authorized or that the operator is not authorized based on the results of the analysis;
9. Conveying device according to any one of claims 1 to 8. The transport device further comprises a localization device configured to self-locate the transport device and store results of the self-location as the transport device related information.
10. A conveying device according to any one of claims 1-9. The transport device further comprises an output element coupled with the storage volume and configured to automatically output at least one component carrier and/or component carrier preforms from the storage volume.
11. Transport device according to any one of the preceding claims. the storage volume comprises a plurality of slots for storing a plurality of component carriers and/or preforms of component carriers;
12. Transport device according to any one of the preceding claims. said operator is a human and/or a transport robot,
13. A conveying device according to any one of claims 1-12. The transport apparatus further comprises a display configured to provide an operator with transport apparatus-related information of the transport apparatus, in particular the transport apparatus-related information being associated with the part carrier and/or to be stored in the storage volume. or showing a preform for a component carrier,
14. A conveying device according to any one of claims 1-13. The transport device further comprises a mechanical locking element that receives a master key and is coupled to the locking element, the mechanical locking element configured to open the locking element when receiving the master key.
15. A conveying device according to any one of claims 1 to 14. the lock control unit is configured to automatically close the lock element after a predetermined period of time;
16. A transport device according to any one of the preceding claims. said transport device comprises at least one movable element, in particular wheels, for manually or automatically moving said transport device within a component carrier manufacturing facility;
17. Transport device according to any one of the preceding claims. the at least one movable element has an automatic locking feature;
18. A transport device according to claim 17. the mobile ESD shielded transport device further comprises an energy storage element and an automatic charging function;
19. Transport device according to any one of the preceding claims. A mobile ESD shielded transport apparatus according to any one of claims 1 to 19;
and the component carriers and/or component carrier preforms mounted in the containment volume in an ESD shielded manner. Said component carrier and/or said component carrier preform has at least one electrically conductive layer structure and/or at least one electrically insulating layer structure and has the following features:
said component carrier comprising at least one electronic component surface mounted and/or embedded in said component carrier, in particular in a cavity, said at least one electronic component being in particular a non-conductive inlay and/or a conductive inlay , heat transfer units, light guide elements, optical elements, bridges, energy harvesting units, active electronic components, passive electronic components, electronic chips, memory devices, filters, integrated circuits, signal processing components, power management components, optoelectronic interface elements, voltage Transducers, cryptographic components, transmitters and/or receivers, electromechanical transducers, actuators, microelectromechanical systems, microprocessors, capacitors, resistors, inductances, accumulators, switches, cameras, antennas, magnetic elements, further components selected from the group consisting of a carrier and a logic chip;
At least one of the conductive layer structures of the component carrier comprises at least one of the group consisting of copper, aluminum, nickel, silver, gold, palladium, magnesium, and tungsten, and optionally any of the materials mentioned. be coated with a superconducting material such as graphene;
wherein said electrically insulating layer structure is a resin, in particular a reinforced or non-reinforced resin such as epoxy resin or bismaleimide triazine resin, FR-4, FR-5, cyanate ester resin, polyphenylene derivative, glass, prepreg material, polyimide, comprising at least one of the group consisting of polyamides, liquid crystalline polymers, epoxy-based build-up films, polytetrafluoroethylene, ceramics, and metal oxides;
forming the component carrier and/or the preform of the component carrier into a plate;
said component carrier being configured as one of the group consisting of a printed circuit board, a substrate, in particular an IC substrate, and an interposer, in particular an organic interposer;
The component carrier is a stacked component carrier;
wherein the component carrier preform is configured as a panel containing a plurality of semi-finished component carriers;
21. The mobile on-board ESD shielded transport apparatus of claim 20. A plurality of said transport devices of the transport device of any one of claims 1 to 19 and of the mounted mobile ESD shielded transport device of claim 20 or 21,
wherein the plurality of carrier devices are configured to wirelessly communicate carrier device related information to each other in a wireless communication network;
Conveyor system. A transport device according to any one of claims 1 to 19, at least one of said transport devices of an on-board mobile ESD shielded transport device according to claim 20 or 21 and/or according to claim 22. a carrier system;
A carrier configuration system, comprising: a controller having a further wireless communication device configured to communicate with said wireless communication device and/or a plurality of said wireless communication devices. The control device may determine the location of a plurality of transport devices, the identification of authorized operators and/or non-authorized operators, the direction of transport of the component carriers and/or preforms of the component carriers in the component carrier manufacturing facility. a memory for storing at least one carrier-related information of a group of;
24. The carrier configuration system of claim 23. the controller configured to coordinate a plurality of transport devices;
Said adjustment is at least of the group consisting of authorized operator and non-authorized operator adjustment, component carrier and/or component carrier preform location and/or transport direction adjustment in a component carrier manufacturing facility. 25. The carrier configuration system of claim 23 or 24, comprising one. the carrier configuration system is coupled to an Internet of Things (IoT) application;
In particular, said IoT application comprises artificial intelligence (AI) algorithms,
26. A carrier configuration system according to any one of claims 23-25. A method of transporting a component carrier and/or a preform of a component carrier in an ESD shielded manner, comprising:
performing an operator static test;
storing the static electricity test results in a wireless communication network;
the operator approaching the transport device of any one of claims 1 to 19 or of an on-board mobile ESD shielded transport device of claim 20 or 21;
obtaining the results of the static electricity test from the wireless communication network; and based on the results of the static electricity test,
authorizing or not authorizing said operator to open said locking element of said transport device. presenting the operator's token to a token analyzer of the transport device;
parsing the token; and based on the results of the parsing,
28. The method of claim 27, further comprising: giving or not further authorization to the operator to open the locking element of the transport device. the token identifies the operator;
the operator identification information is combined with the results of the electrostatic test stored in the wireless communication network;
29. The method of claim 28. If the operator is authorized, the method includes:
further comprising automatically releasing said locking element and/or manually releasing said locking element;
30. The method of any one of claims 27-29. The electrostatic test includes testing a specific part of the operator, in particular a shoe or wrist.
31. The method of any one of claims 28-30. A method of using a wireless communication device attached to a mobile ESD shielded transport apparatus to adjust the ESD shielding of a part carrier and/or a preform of a part carrier in a part carrier manufacturing facility.

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