JP2022071440A - Laminated body manufacturing method and laminated body manufacturing equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laminate manufacturing method and a laminate manufacturing apparatus capable of preventing the occurrence of manufacturing defects of the laminate. SOLUTION: The method for manufacturing a laminated body is a method for manufacturing a laminated body LM in which an adhesive sheet AS is attached to an adherend WK, and a plurality of adherend WKs arranged with a gap CL at a predetermined interval. A pasting step of pasting the adhesive sheet base material ASB and a sheet cutting step of cutting the adhesive sheet base material ASB to form an adhesive sheet AS are carried out so as to straddle the sheet, and the sheet is located in the gap CL in the sheet cutting step. A suction cutting step is performed in which the unnecessary sheet portion US, which is a part of the adhesive sheet base material ASB, is sucked and cut. [Selection diagram] Fig. 1

Description

The present invention relates to a laminate manufacturing method and a laminate manufacturing apparatus.

There is known a method for manufacturing a laminate in which an adhesive sheet is attached to an adherend (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2012-164953

In the method for manufacturing a semiconductor device (layered body manufacturing method) described in Patent Document 1, high-pressure air (gas) is sprayed from a nozzle 26 (sheet cutting means) onto an adhesive layer 33 (adhesive sheet base material) to prepare an adhesive sheet mother. Since the structure for cutting the material is adopted, even if the adherend is sprayed with gas when the thickness of the semiconductor chip 1 (adhesive body) is thin or the adhesive sheet base material has elasticity, the adherend can be used. The adhesive sheet base material comes into contact with the supporting protective tape 32, and the adhesive sheet base material cannot be cut, resulting in a manufacturing defect of the laminated body.

An object of the present invention is to provide a laminated body manufacturing method and a laminated body manufacturing apparatus capable of preventing the occurrence of manufacturing defects of the laminated body.

The present invention has adopted the configuration described in the claims.

According to the present invention, since the unnecessary sheet portion located in the gap is sucked and cut, the adhesive sheet base material does not come into contact with the object supporting the adherend and the adhesive sheet base material cannot be cut. It is possible to prevent the occurrence of manufacturing defects in the laminated body.
Further, if gas is sprayed on the unnecessary sheet portion, the efficiency of cutting the adhesive sheet base material is improved.
Further, if the adhesive sheet base material is cooled, the adhesive sheet base material can be easily cut.

Explanatory drawing of the laminated body manufacturing apparatus which concerns on one Embodiment of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to FIG.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Further, in the present embodiment, when viewed from the front direction of FIG. 1 parallel to the Y axis, when the direction is shown, "up" is the arrow direction of the Z axis, "down" is the opposite direction, and ". "Left" is the X-axis arrow direction, "right" is the opposite direction, "front" is the Y-axis arrow direction, and "rear" is the opposite direction.

The laminated body manufacturing apparatus EA of the present invention is an apparatus for manufacturing a laminated body LM (see FIG. 1 (B)) in which an adhesive sheet AS is attached to an adherend WK, and is arranged with a gap CL at a predetermined interval. The sticking means 10 for sticking the adhesive sheet base material ASB so as to straddle the plurality of adherends WK, the sheet cutting means 20 for cutting the adhesive sheet base material ASB to form the adhesive sheet AS, and the adhesive sheet mother. It is provided with a cooling means 30 for cooling the material ASB.

The sticking means 10 is a so-called articulated robot as a drive device which is composed of a plurality of arms and can displace what is supported by the tip arm 11A, which is a working portion, at any position and at any angle within the working range. 11 is provided with a holding member 12 as a pressing member, which is supported by the tip arm 11A and has a holding surface 12A which is supported by a pressure reducing means (holding means) (not shown) such as a pressure reducing pump or a vacuum ejector.

The sheet cutting means 20 includes an upper lid member 22 supported by an output shaft 21A of a linear motor 21 as a drive device and having a recess 22A formed therein, and a first linear motor 23 as a drive device supported in the recess 22A. , The second linear motor 24 supported by the slider 23A of the first linear motor 23, and the unnecessary sheet portion supported by the slider 24A of the second linear motor 24 and being a part of the adhesive sheet base material ASB located in the gap CL. Tension is applied to the suction cutting means 25 for sucking and cutting the US, the pedestal 26 on which the recess 26A is formed, and the holding sheet ASK to which the adherend base material WKB is attached, and the adherend base material is applied. It is provided with a separating means 27 for forming a plurality of adherends WK by opening a gap CL from the WKB, and a support table 28 supported by the separating means 27.
The suction cutting means 25 includes a nozzle 25A connected to a decompression means (not shown) such as a decompression pump or a vacuum ejector. In the case of this actual mode, the suction cutting means 25 is configured such that a gas supply means (not shown) for blowing a gas such as air or gas by a pressure pump, a turbine or the like is also connected to the nozzle 25A and the gas is blown to the unnecessary sheet portion US. The suction and the spraying of gas are alternately repeated to cut the adhesive sheet base material ASB by the suction.
The separating means 27 is a holding means having a linear motor 27A as a drive device that is supported by the bottom surface of the recess 26A and supports the support table 28 by the output shaft 27B, and a pair of gripping members 27D that are supported by the side surfaces of the recess 26A. It also has a chuck cylinder 27C as a drive device.

The cooling means 30 is connected to the recess 22A of the upper lid member 22 via a pipe 31A, and includes a cooling medium supply means 31 that supplies a cooling medium such as cooling air or cooling gas into the recess 22A.

The operation of the above-mentioned laminate manufacturing apparatus EA will be described.
First, with respect to the laminated body manufacturing apparatus EA in which each member is arranged at the initial position shown by the solid line in FIG. 1 (A), the user of the laminated body manufacturing apparatus EA (hereinafter, simply referred to as “user”) is shown. Do not input the signal to start automatic operation via an operation means such as an operation panel or a personal computer. Next, when a user or a transport means (not shown) such as an articulated robot or a belt conveyor brings the adhesive sheet base material ASB into contact with the holding surface 12A as shown in FIG. 1 (A), the sticking means 10 is shown. No depressurizing means is driven, and the adsorption and holding of the adhesive sheet base material ASB on the holding surface 12A is started. After that, as shown in FIG. 1 (A), the user or a transport means (not shown) attaches an integral UP in which the adherend base material WKB is supported by the ring frame RF as a frame member via the holding sheet ASK. , Placed in a predetermined position on the support table 28. Next, the sheet cutting means 20 drives the chuck cylinder 27C and the linear motion motor 27A, and as shown by the two-dot chain line in FIG. 1 (A), the ring frame RF is gripped by the gripping member 27D, and then the support table 28 is held. It is raised to apply tension to the holding sheet ASK, widen the mutual spacing between the adherends WK, and form a gap CL. Then, when it is detected by an image pickup means such as a camera or a projector or a gap detection means (not shown) composed of various sensors such as an optical sensor or an ultrasonic sensor that the gap CL becomes a predetermined interval, the sheet is formed. The cutting means 20 stops driving the linear motion motor 27A.

Next, the sticking means 10 drives the articulated robot 11 to move the holding member 12, and as shown by the alternate long and short dash line in FIG. 1 (A), the adhesive sheet base material so as to straddle the plurality of adherends WK. Attach the ASB. After that, the sticking means 10 stops driving the decompression means (not shown), releases the suction holding of the adhesive sheet base material ASB on the holding surface 12A, and then drives the articulated robot 11 to return the holding member 12 to the initial position. Let me. Next, the sheet cutting means 20 drives the linear motion motor 21, and as shown in FIG. 1 (B), the upper lid member 22 is lowered to form a space SP with the pedestal 26, and then the cooling means 30 cools. The medium supply means 31 is driven to supply a cooling medium to the space SP to cool the adhesive sheet base material ASB. At this time, the gas before cooling that was present in the space SP may be discharged, or the gas may be circulated by the cooling medium supply means 31 to make cold air. Then, the sheet cutting means 20 drives the first and second linear motors 23 and 24, the decompression means and the gas supply means (not shown), and the nozzle 25A sucks the unnecessary sheet portion US and blows the gas onto the unnecessary sheet portion US. The suction cutting means 25 is moved along the gap CL while alternately repeating. As a result, as shown in FIG. 1 (B), the unnecessary sheet portion US fluctuates up and down and the adhesive sheet base material ASB is cut to form the adhesive sheet AS, and the adhesive sheet AS is formed on the adherend WK. A laminated body LM to which is affixed is formed. When the adhesive sheet base material ASB is cut, the unnecessary sheet portion US cut from the adhesive sheet base material ASB is sucked by the suction cutting means 25, while the unnecessary sheet portion US that is not cut is adhered. It will remain in the laminated body LM as a part of the sheet AS.

After cutting the unnecessary sheet portion US located in the entire gap CL or the gap CL in the predetermined region, the sheet cutting means 20 and the cooling means 30 stop driving the decompression means, the gas supply means, and the cooling medium supply means 31 (not shown). The sheet cutting means 20 drives the linear motor 21 and the first and second linear motors 23 and 24 to return the upper lid member 22 and the suction cutting means 25 to the initial positions. Next, after the sheet cutting means 20 drives the linear motion motor 27A and the chuck cylinder 27C to return the support table 28 and the gripping member 27D to the initial positions, the user or the transport means (not shown) moves the integrated product UP to the next step. After transporting, the same operation as described above is repeated.

According to the above embodiment, since the unnecessary sheet portion US located in the gap CL is sucked and cut, the adhesive sheet base material ASB abuts on the holding sheet ASK and the adhesive sheet base material ASB can be cut. It does not disappear, and it is possible to prevent the production defect of the laminated body LM from occurring.

As described above, the best configuration, method, etc. for carrying out the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, although the present invention has been particularly illustrated and described primarily with respect to a particular embodiment, the shape, with respect to the embodiments described above, without departing from the scope of the technical idea and object of the present invention. Those skilled in the art can make various modifications in terms of material, quantity, and other detailed configurations. Further, the description limiting the shape, material, etc. disclosed above is merely an example for facilitating the understanding of the present invention, and does not limit the present invention. Therefore, the shape, material, and the like are described above. The description in the name of the member excluding a part or all of the limitation such as is included in the present invention.

For example, the sticking means 10 supplies the adhesive sheet base material ASB in accordance with the relative movement with the adherend WK, and presses the adhesive sheet base material ASB against the adherend WK with a pressing means such as a pressing roller to attach the adhesive sheet base material ASB. (For example, the configuration exemplified in the embodiment of Japanese Patent Application Laid-Open No. 2019-117834) may be adopted.

The sheet cutting means 20 may move the support table 28 to form a space SP between the upper lid member 22 and the pedestal 26 while the upper lid member 22 is not moved or is moved, or the upper lid member 22 or the receiver may be formed. The table 26 may not be provided, and the suction cutting means 25 may be moved in the left-right direction and the front-back direction on a so-called XY table as a driving device in place of or in combination with the first and second linear motors 23 and 24. Alternatively, the gas may be blown from another nozzle without connecting the gas supply means to the nozzle 25A, and the gas is continuously or intermittently blown and the gas is continuously or intermittently sucked. The adhesive sheet base material ASB may be cut, or the adhesive sheet base material ASB may be cut by only sucking continuously or intermittently without spraying gas, or the unnecessary sheet portion may be adsorbed by Bernoulli. US may be sucked to cut the adhesive sheet base material ASB, a single or a plurality of nozzles 25A and different nozzles may be provided, respectively, and the gas to be blown by the gas supply means may be cold air, air, single gas, or the like. It may be a mixed gas or the like, or tension may be applied in one direction or two or more directions in the plane of the holding sheet ASK to widen the mutual spacing of the adherends WK to form a gap CL. When the holding sheet ASK is not attached to the ring frame RF, the holding sheet ASK may be supported and tension may be applied to the holding sheet ASK to form a gap CL, or the support table 28 may be used. The chuck cylinder 27C may be moved to form the gap CL without or while moving, and the gap CL may or may not be provided.

The cooling means 30 may be cooled by directly spraying a cooling medium from the suction cutting means 25 or other members onto the adhesive sheet base material ASB, or the cooling side of the Pelche element or the heat pipe inside the support table 28. The cooler may or may not be provided in the laminate manufacturing apparatus EA of the present invention.

The laminate manufacturing apparatus EA penetrates the adherend base material WKB in the thickness direction, and the adherend base material WKB does not penetrate into a plurality of adherend WKs or penetrate in the thickness direction. An adherend base material cutting means such as a cutter blade or a laser cutter that forms a notch in which the adherend base material WKB is split into a plurality of adherend WKs when tension is applied may be provided. Then, when tension is applied, the adherend base material WKB is split to form a plurality of adherend WKs, and a fragile modified layer is formed on the adherend base material WKB by a laser irradiation device or a drug solution administration means. A fragile layer forming means such as, etc. may be provided, or a grinding means such as a grinder or a grinding machine for grinding the adherend base material WKB to reduce the thickness of the adherend base material WKB may be provided. By grinding the adherend base material WKB, which has a notch that does not penetrate in the thickness direction, from the surface opposite to the surface on which the notch is formed until the notch is reached. A grinding machine, a grinding machine, or the like for forming a plurality of adherends WK from the body base material WKB may be provided, or a pressing member such as a pressing roller may be used to attach another adhesive sheet to the plurality of laminated bodies LM. It may be provided with another sticking means for sticking by pressing, or a holding sheet ASK with a sheet gripping member such as a chuck cylinder or a chuck motor, or a peeling tape such as a single-wafer or band-shaped adhesive tape or adhesive tape. The holding sheet peeling means for peeling the holding sheet ASK from the laminated body LM by applying tension to the laminated body LM may be provided.

The adherend base material WKB may be penetrated in the thickness direction, and the adherend base material WKB may be formed with cuts forming a plurality of adherend WKs, or may be formed without penetrating in the thickness direction. It may be a fragile modification in which a notch is formed to split into a plurality of adherends WK by applying tension, or split into a plurality of adherends WK by applying tension. It may have a layer formed or may not be supported by the holding sheet ASK.
The adherend WK may not be supported by the holding sheet ASK, or may not be formed from the adherend base material WKB, but may be arranged with a predetermined gap CL in advance. good.
In the one-piece UP, the holding sheet ASK may not be supported by the frame member.
The frame member may have a non-annular shape (the outer circumference is not connected), a circular shape, an elliptical shape, a polygonal shape, or any other shape other than the ring frame RF.

The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the constituents of the mere embodiment shown in the above-described embodiment. It is not limited to the process at all. For example, the sticking step may be any step as long as it is a step of sticking the adhesive sheet base material so as to straddle a plurality of adherends arranged at predetermined intervals, and it is based on the common general technical knowledge at the time of filing. In light of this, there is no limitation as long as it is within the technical scope (the same applies to other means and processes).

The materials, types, shapes, etc. of the adhesive sheet base material ASB, the adhesive sheet AS, the holding sheet ASK, the adherend base material WKB, and the adherend WK are not particularly limited. For example, the adhesive sheet base material ASB, the adhesive sheet AS, the holding sheet ASK, the adherend base material WKB and the adherend WK may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a square shape, or any other shape. Alternatively, the adhesive sheet base material ASB, the adhesive sheet AS, and the holding sheet ASK may have an adhesive form such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness, and when a heat-sensitive adhesive material is adopted, the adhesive sheet base material ASB, the adhesive sheet AS, and the holding sheet ASK may be in an adhesive form. , It may be bonded by an appropriate method such as providing an appropriate coil heater for heating the corresponding sheet or a heating means such as a heating side of the heat pipe. Further, such an adhesive sheet base material ASB, an adhesive sheet AS and a holding sheet ASK are, for example, a single layer having only an adhesive layer, a material having an intermediate layer between a base sheet and an adhesive layer, and the like. It may be a so-called double-sided adhesive sheet having three or more layers such as having a cover layer on the upper surface of the base sheet, or a so-called double-sided adhesive sheet capable of peeling the base sheet from the adhesive layer. May be a single layer or a multi-layer having an intermediate layer of a single layer or a multi-layer, or a single layer or a multi-layer without an intermediate layer. The adherend base material WKB includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording substrates such as optical disks, glass plates, steel plates, pottery, wood plates or resins. It may be a single product such as, or a composite product formed by two or more of them, and any form of a member or an article can be targeted. The adhesive sheet base material ASB and the holding sheet ASK can be read in a functional and versatile manner, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, and a recording. Any sheet such as a layer-forming resin sheet, a film, a tape, or the like may be used.
When the adhesive sheet base material ASB is a die attach film, the temperature for cooling the adhesive sheet base material ASB in the cooling means 30 or the cooling step is preferably 20 degrees or less, more preferably 0 degrees or less, and more preferably -5 degrees or less. Is more preferable, and -10 degrees or less is particularly preferable.

The drive device in the above embodiment is an electric device such as a rotary motor, a linear motor, a linear motor, a single-axis robot, an articulated robot having two-axis or three-axis or more joints, an air cylinder, a hydraulic cylinder, and a rodless. An actuator such as a cylinder and a rotary cylinder can be adopted, and a combination thereof can be directly or indirectly adopted.
In the above embodiment, when a pressing means such as a pressing roller or a pressing head or a pressing member for pressing a pressed object is adopted, a roller, a round bar, or a roller, a round bar, may be used in place of or in combination with those exemplified above. A member such as a blade material, rubber, resin, or sponge may be adopted, or a structure that presses by blowing a gas such as air or gas may be adopted, or the pressed object can be deformed such as rubber or resin. It may be composed of a member, it may be composed of a member that does not deform, or a member that supports (holds) a supported member (held member) such as a supporting (holding) means or a supporting (holding) member is adopted. If so, use a gripping means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli suction, suction suction, drive equipment, etc. A configuration that supports (holds) the supported member may be adopted, or a structure that cuts the cut member such as a cutting means or a cutting member, or forms a cut or a cutting line in the cut member is adopted. In this case, instead of or in combination with the ones exemplified above, a cutter blade, a laser cutter, an ion beam, a thermal power, a heat, a water pressure, a heating wire, a material that cuts by spraying gas or liquid, etc. may be adopted. It is also possible to move a device to be cut by combining an appropriate drive device to cut it.

EA ... Laminated body manufacturing equipment 10 ... Attaching means 20 ... Sheet cutting means 30 ... Cooling means AS ... Adhesive sheet ASB ... Adhesive sheet base material CL ... Gap LM ... Laminated body US ... Unnecessary sheet part WK ... Adhesive

Claims (4)

It is a laminate manufacturing method for manufacturing a laminate in which an adhesive sheet is attached to an adherend.
A sticking step of sticking the adhesive sheet base material so as to straddle the plurality of adherends arranged at predetermined intervals, and
A sheet cutting step of cutting the adhesive sheet base material to form the adhesive sheet was carried out.
The sheet cutting step is a method for producing a laminate, which comprises performing a suction cutting step of sucking and cutting an unnecessary sheet portion which is a part of the adhesive sheet base material located in the gap. The laminate manufacturing method according to claim 1, wherein in the sheet cutting step, a gas spraying step of blowing gas onto the unnecessary sheet portion is performed. The laminate manufacturing method according to claim 1 or 2, wherein a cooling step for cooling the adhesive sheet base material is carried out. It is a laminate manufacturing device that manufactures a laminate in which an adhesive sheet is attached to an adherend.
A sticking means for sticking the adhesive sheet base material so as to straddle the plurality of adherends arranged at predetermined intervals.
A sheet cutting means for cutting the adhesive sheet base material to form the adhesive sheet is provided.
The sheet cutting means is a laminate manufacturing apparatus comprising a suction cutting means for sucking and cutting an unnecessary sheet portion which is a part of the adhesive sheet base material located in the gap.

Images