JP2021185228A - Resin composition - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a cured product having excellent smear removing property and excellent adhesion to a conductor layer; a resin sheet containing the resin composition; formed by using the resin composition. Printed wiring boards with insulating layers; and semiconductor devices provided.
A resin composition containing (A) an epoxy resin, (B) a benzoxazine-based curing agent, and (C) (meth) acrylic acid ester, wherein the mass of the component (B) is the benzoxazine ring equivalent. A resin composition having a b / c of 0.08 or more and 2.5 or less, where b is the value divided by and c is the value obtained by dividing the mass of the component (C) by the (meth) acryloyl group equivalent.
[Selection diagram] None

Description

The present invention relates to a resin composition. Further, the present invention relates to a resin sheet, a printed wiring board, and a semiconductor device containing the resin composition.

As a manufacturing technique for a printed wiring board, a manufacturing method by a build-up method in which an insulating layer and a conductor layer are alternately stacked on an inner circuit board is known. The insulating layer is generally formed by curing the resin composition. For example, Patent Document 1 describes a resin composition containing (A) a radically polymerizable compound, (B) an epoxy resin, (C) a curing agent, and (D) a roughening component.

Japanese Unexamined Patent Publication No. 2014-304580

Many proposals for resin compositions suitable for forming an insulating layer of an inner layer circuit board have been made, including the resin composition described in Patent Document 1, but in recent years, there has been a demand for an insulating layer having a low dielectric loss tangent. It is increasing.

As a result of the study by the present inventor, the cured product of the resin composition containing a material having a low dielectric loss tangent has difficulty in obtaining adhesion to a conductor layer or the like, and has a smear removing property for ensuring conduction reliability. It turned out to be low. In recent years, in the manufacture of multi-layer printed wiring boards, the cured product of the resin composition for forming the insulating layer is required to have sufficient adhesion and smear removal property even in the miniaturization and high density of wiring. However, the current situation is that these conditions have not been fully satisfied.

The subject of the present invention is a resin composition capable of obtaining a cured product having excellent smear removing property and excellent adhesion to a conductor layer; a resin sheet containing the resin composition; using the resin composition. It is an object of the present invention to provide a printed wiring board having a formed insulating layer; and a semiconductor device.

As a result of diligent studies to solve the above problems, the present inventor has included (A) an epoxy resin, (B) a benzoxazine-based curing agent, and (C) (meth) acrylic acid ester in combination, and (B). The present invention has been completed by finding that the above-mentioned problems can be solved by a resin composition in which the amount ratio of the benzoxazine-based curing agent and the (C) (meth) acrylic acid ester is within a predetermined range.
That is, the present invention includes the following contents.

（式（Ｃ−１）中、Ｒ^１及びＲ^４はそれぞれ独立にアクリロイル基又はメタクリロイル基を表し、Ｒ^２及びＲ^３はそれぞれ独立に２価の連結基を表す。環Ａは、２価の環状基を表す。）
［５］ （Ｂ）成分が、下記式（Ｂ−１）で表される構造を有する、［１］〜［４］のいずれかに記載の樹脂組成物。

（式（Ｂ−１）中、Ｒ^１１はｎ価の基を表し、Ｒ^１２はそれぞれ独立にハロゲン原子、アルキル基、又はアリール基を表す。ｎは２〜４の整数を表し、ｍは０〜４の整数を表す。）
［６］ （Ａ）成分が、液状エポキシ樹脂及び固体状エポキシ樹脂を含む、［１］〜［５］のいずれかに記載の樹脂組成物。
［７］ さらに（Ｄ）無機充填材を含む、［１］〜［６］のいずれかに記載の樹脂組成物。
［８］ （Ｄ）成分の含有量が、樹脂組成物中の不揮発成分を１００質量％とした場合、７０質量％以上である、［７］に記載の樹脂組成物。
［９］ （Ｃ）成分の含有量が、樹脂組成物中の樹脂成分を１００質量％とした場合、１質量％以上２０質量％以下である、［１］〜［８］のいずれかに記載の樹脂組成物。
［１０］ （Ｂ）成分の含有量が、樹脂組成物中の樹脂成分を１００質量％とした場合、１質量％以上１５質量％以下である、［１］〜［９］のいずれかに記載の樹脂組成物。
［１１］ 絶縁用途に用いる、［１］〜［１０］のいずれかに記載の樹脂組成物。
［１２］ 絶縁層形成用である、［１］〜［１１］のいずれかに記載の樹脂組成物。
［１３］ 導体層を形成するための絶縁層形成用である、［１］〜［１２］のいずれかに記載の樹脂組成物。
［１４］ 半導体チップの封止用である、［１］〜［１３］のいずれかに記載の樹脂組成物。
［１５］ 支持体と、該支持体上に設けられた、［１］〜［１４］のいずれかに記載の樹脂組成物を含む樹脂組成物層とを含む、樹脂シート。
［１６］ ［１］〜［１４］のいずれかに記載の樹脂組成物の硬化物により形成された絶縁層を含む、プリント配線板。
［１７］ ［１６］に記載のプリント配線板を含む、半導体装置。 [1] (A) Epoxy resin,
A resin composition containing (B) a benzoxazine-based curing agent and (C) (meth) acrylic acid ester.
When b is the mass of the component (B) divided by the benzoxazine ring equivalent and c is the mass of the component (C) divided by the (meth) acryloyl group equivalent, b / c is 0.08 or more. A resin composition of 2.5 or less.
[2] The resin composition according to [1], wherein the component (C) has two or more (meth) acryloyl groups per molecule.
[3] The resin composition according to [1] or [2], wherein the component (C) has a cyclic structure.
[4] The resin composition according to any one of [1] to [3], wherein the component (C) has a structure represented by the following formula (C-1).

(In the formula (C-1), R ¹ and R ⁴ each independently represent an acryloyl group or a methacryloyl group, and R ² and R ³ each independently represent a divalent linking group. Ring A is a divalent group. Represents a cyclic group.)
[5] The resin composition according to any one of [1] to [4], wherein the component (B) has a structure represented by the following formula (B-1).

(In formula (B-1), R ¹¹ represents an n-valent group, R ¹² independently represents a halogen atom, an alkyl group, or an aryl group. N represents an integer of 2 to 4, and m represents 0. Represents an integer of ~ 4.
[6] The resin composition according to any one of [1] to [5], wherein the component (A) contains a liquid epoxy resin and a solid epoxy resin.
[7] The resin composition according to any one of [1] to [6], further comprising (D) an inorganic filler.
[8] The resin composition according to [7], wherein the content of the component (D) is 70% by mass or more when the non-volatile component in the resin composition is 100% by mass.
[9] The content of the component (C) is 1% by mass or more and 20% by mass or less when the resin component in the resin composition is 100% by mass, according to any one of [1] to [8]. Resin composition.
[10] The content of the component (B) is 1% by mass or more and 15% by mass or less when the resin component in the resin composition is 100% by mass, according to any one of [1] to [9]. Resin composition.
[11] The resin composition according to any one of [1] to [10], which is used for insulating applications.
[12] The resin composition according to any one of [1] to [11], which is used for forming an insulating layer.
[13] The resin composition according to any one of [1] to [12], which is used for forming an insulating layer for forming a conductor layer.
[14] The resin composition according to any one of [1] to [13], which is used for encapsulating a semiconductor chip.
[15] A resin sheet comprising a support and a resin composition layer provided on the support and containing the resin composition according to any one of [1] to [14].
[16] A printed wiring board including an insulating layer formed of a cured product of the resin composition according to any one of [1] to [14].
[17] A semiconductor device including the printed wiring board according to [16].

According to the present invention, a resin composition capable of obtaining a cured product having excellent smear removing property and excellent adhesion to a conductor layer; a resin sheet containing the resin composition; using the resin composition. A printed wiring board with a formed insulating layer; and a semiconductor device can be provided.

Hereinafter, the present invention will be described in detail with reference to embodiments and examples. However, the present invention is not limited to the embodiments and examples listed below, and may be arbitrarily modified and implemented without departing from the scope of claims of the present invention and the equivalent scope thereof.

[Resin composition]
The resin composition of the present invention is a resin composition containing (A) an epoxy resin, (B) a benzoxazine-based curing agent, and (C) (meth) acrylic acid ester, and the mass of the component (B) is determined. When b is the value divided by the benzoxazine ring equivalent and c is the value obtained by dividing the mass of the component (C) by the (meth) acryloyl group equivalent, b / c is 0.08 or more and 2.5 or less.

By using such a resin composition, it is possible to obtain a cured product having excellent smear removing property and excellent adhesion between the resin composition and the conductor layer. Furthermore, by using such a resin composition, the dielectric loss tangent of the cured product can usually be lowered, and the arithmetic average roughness (Ra) of the surface of the cured product obtained after the roughening treatment can be lowered. Is possible.

The resin composition may further contain any component in combination with the components (A) to (C). Optional components include, for example, (D) inorganic filler, (E) curing agent, (F) thermoplastic resin, (G) curing accelerator, (H) polymerization initiator, and (I) other additives. And so on. Hereinafter, each component contained in the resin composition will be described in detail.

<(A) Epoxy resin>
Examples of the epoxy resin include bixilenol type epoxy resin, bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bisphenol AF type epoxy resin, dicyclopentadiene type epoxy resin, and trisphenol type. Epoxy resin, naphthol novolac type epoxy resin, phenol novolac type epoxy resin, tert-butyl-catechol type epoxy resin, naphthalene type epoxy resin, naphthol type epoxy resin, anthracene type epoxy resin, glycidylamine type epoxy resin, glycidyl ester type epoxy resin , Cresol novolak type epoxy resin, biphenyl type epoxy resin, linear aliphatic epoxy resin, epoxy resin having a butadiene structure, alicyclic epoxy resin, heterocyclic epoxy resin, spiro ring-containing epoxy resin, cyclohexane type epoxy resin, cyclohexane Examples thereof include a dimethanol type epoxy resin, a naphthylene ether type epoxy resin, a trimethylol type epoxy resin, and a tetraphenylethane type epoxy resin. One type of epoxy resin may be used alone, or two or more types may be used in combination.

The resin composition preferably contains, as the (A) epoxy resin, an epoxy resin having two or more epoxy groups in one molecule. From the viewpoint of remarkably obtaining the desired effect of the present invention, the ratio of the epoxy resin having two or more epoxy groups in one molecule is preferably 50% by mass with respect to 100% by mass of the non-volatile component of the epoxy resin (A). % Or more, more preferably 60% by mass or more, and particularly preferably 70% by mass or more.

The epoxy resin may be a liquid epoxy resin at a temperature of 20 ° C. (hereinafter sometimes referred to as “liquid epoxy resin”) or a solid epoxy resin at a temperature of 20 ° C. (hereinafter referred to as “solid epoxy resin”). ). The resin composition may contain only the liquid epoxy resin or only the solid epoxy resin as the (A) epoxy resin, but may contain a combination of the liquid epoxy resin and the solid epoxy resin. Is preferable. (A) By using a liquid epoxy resin and a solid epoxy resin in combination as the epoxy resin, sufficient flexibility can be obtained when used in the form of a resin sheet, or the cured product of the resin composition is broken. It can improve the strength.

As the liquid epoxy resin, a liquid epoxy resin having two or more epoxy groups in one molecule is preferable.

Examples of the liquid epoxy resin include bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol AF type epoxy resin, naphthalene type epoxy resin, glycidyl ester type epoxy resin, glycidylamine type epoxy resin, phenol novolac type epoxy resin, and ester skeleton. The alicyclic epoxy resin, the cyclohexane type epoxy resin, the cyclohexanedimethanol type epoxy resin, the glycidylamine type epoxy resin, and the epoxy resin having a butadiene structure are preferable, and the bisphenol A type epoxy resin and the bisphenol F type epoxy resin are more preferable.

Specific examples of the liquid epoxy resin include "HP4032", "HP4032D" and "HP4032SS" (naphthalene type epoxy resin) manufactured by DIC; "828US", "jER828EL", "825" and "Epicoat" manufactured by Mitsubishi Chemical Co., Ltd. 828EL "(bisphenol A type epoxy resin);" jER807 "," 1750 "(bisphenol F type epoxy resin) manufactured by Mitsubishi Chemical Co., Ltd .;" jER152 "(phenol novolak type epoxy resin) manufactured by Mitsubishi Chemical Co., Ltd.; "630", "630LSD" (glycidylamine type epoxy resin); "ZX1059" manufactured by Nippon Steel & Sumitomo Metal Corporation (mixture of bisphenol A type epoxy resin and bisphenol F type epoxy resin); "EX" manufactured by Nagase ChemteX. -721 "(glycidyl ester type epoxy resin);" seroxide 2021P "manufactured by Daicel Co., Ltd. (alicyclic epoxy resin having an ester skeleton);" PB-3600 "manufactured by Daicel Co., Ltd. (epoxy resin having a butadiene structure); Examples thereof include "ZX1658" and "ZX1658GS" (liquid 1,4-glycidylcyclohexane type epoxy resin) manufactured by Sumikin Chemical Co., Ltd. These may be used individually by 1 type, or may be used in combination of 2 or more types.

As the solid epoxy resin, a solid epoxy resin having three or more epoxy groups in one molecule is preferable, and an aromatic solid epoxy resin having three or more epoxy groups in one molecule is more preferable.

Examples of the solid epoxy resin include bixilenol type epoxy resin, naphthalene type epoxy resin, naphthalene type tetrafunctional epoxy resin, cresol novolac type epoxy resin, dicyclopentadiene type epoxy resin, trisphenol type epoxy resin, naphthol type epoxy resin, and biphenyl. Type epoxy resin, naphthylene ether type epoxy resin, anthracene type epoxy resin, bisphenol A type epoxy resin, bisphenol AF type epoxy resin, tetraphenylethane type epoxy resin are preferable, and naphthalene type epoxy resin is more preferable.

Specific examples of the solid epoxy resin include "HP4032H" (naphthalene type epoxy resin) manufactured by DIC; "HP-4700" and "HP-4710" (naphthalen type tetrafunctional epoxy resin) manufactured by DIC; DIC. "N-690" (cresol novolac type epoxy resin); DIC "N-695" (cresol novolac type epoxy resin); DIC "HP-7200" (dicyclopentadiene type epoxy resin); "HP-7200HH", "HP-7200H", "EXA-7311", "EXA-7311-G3", "EXA-7311-G4", "EXA-7311-G4S", "HP6000" manufactured by DIC Naftylene ether type epoxy resin); "EPPN-502H" (trisphenol type epoxy resin) manufactured by Nippon Kayaku Co., Ltd .; "NC7000L" (naphthol novolac type epoxy resin) manufactured by Nihon Kayaku Co., Ltd .; "NC3000H", "NC3000", "NC3000L", "NC3100" (biphenyl type epoxy resin); "ESN475V" (naphthol type epoxy resin) manufactured by Nippon Steel & Sumikin Chemical Co., Ltd .; "ESN485" (naphthol novolac) manufactured by Nippon Steel & Sumikin Chemical Co., Ltd. Type epoxy resin); "YX4000H", "YX4000", "YL6121" (biphenyl type epoxy resin) manufactured by Mitsubishi Chemical Co., Ltd .; "YX4000HK" (bixilenol type epoxy resin) manufactured by Mitsubishi Chemical Co., Ltd. "YX8800" (anthracen type epoxy resin); "PG-100" and "CG-500" manufactured by Osaka Gas Chemical Co., Ltd .; "YL7760" (bisphenol AF type epoxy resin) manufactured by Mitsubishi Chemical Co., Ltd .; "YL7800" manufactured by Mitsubishi Chemical Co., Ltd. (Fluorene type epoxy resin); "jER1010" (solid bisphenol A type epoxy resin) manufactured by Mitsubishi Chemical Co., Ltd .; "jER1031S" (tetraphenylethane type epoxy resin) manufactured by Mitsubishi Chemical Co., Ltd. and the like can be mentioned. These may be used individually by 1 type, or may be used in combination of 2 or more types.

(A) When a liquid epoxy resin and a solid epoxy resin are used in combination as the epoxy resin, their quantity ratio (liquid epoxy resin: solid epoxy resin) is a mass ratio, preferably 1: 1 to 1:20. , More preferably 1: 1.5 to 1:15, and particularly preferably 1: 2 to 1:10. When the quantitative ratio of the liquid epoxy resin and the solid epoxy resin is in such a range, the desired effect of the present invention can be remarkably obtained. Further, usually, when used in the form of a resin sheet, moderate adhesiveness is provided. Further, when used in the form of a resin sheet, sufficient flexibility is usually obtained and handleability is improved. Further, usually, a cured product having sufficient breaking strength can be obtained.

The epoxy equivalent of the epoxy resin (A) is preferably 50 to 5000, more preferably 50 to 3000, still more preferably 80 to 2000, and even more preferably 110 to 1000. Within this range, the crosslink density of the cured product of the resin composition layer becomes sufficient, and an insulating layer having a small surface roughness can be obtained. Epoxy equivalent is the mass of a resin containing 1 equivalent of an epoxy group. This epoxy equivalent can be measured according to JIS K7236.

The weight average molecular weight (Mw) of the epoxy resin (A) is preferably 100 to 5000, more preferably 250 to 3000, still more preferably 400 to 1500, from the viewpoint of remarkably obtaining the desired effect of the present invention.
The weight average molecular weight of the resin can be measured as a polystyrene-equivalent value by a gel permeation chromatography (GPC) method.

The content of the epoxy resin (A) is preferably 1% by mass or more when the non-volatile component in the resin composition is 100% by mass from the viewpoint of obtaining an insulating layer showing good mechanical strength and insulation reliability. It is preferably 5% by mass or more, more preferably 10% by mass or more. The upper limit of the content of the epoxy resin is preferably 30% by mass or less, more preferably 25% by mass or less, and particularly preferably 20% by mass or less, from the viewpoint of remarkably obtaining the desired effect of the present invention. In the present invention, the content of each component in the resin composition is a value when the non-volatile component in the resin composition is 100% by mass, unless otherwise specified.

<(B) Benzoxazine-based curing agent>
The resin composition contains (B) a benzoxazine-based curing agent. The (B) benzoxazine-based curing agent is a compound having a benzoxazine ring represented by the following formula (B-2) in its molecule.

By using (B) a benzoxazine-based curing agent in combination with (C) (meth) acrylic acid ester so as to have a predetermined amount ratio, it is excellent in smear removal property and excellent adhesion to the conductor layer. You can get things. (B) The benzoxazine-based curing agent may be used alone or in combination of two or more.

(B) The number of benzoxazine rings per molecule of the benzoxazine-based curing agent is preferably one or more from the viewpoint of obtaining a cured product having excellent adhesion to the conductor layer and having a low arithmetic mean roughness. It is more preferably 2 or more, preferably 10 or less, and more preferably 5 or less.

(B) The benzoxazine-based curing agent preferably has an aromatic ring in addition to the benzoxazine ring. By having an aromatic ring in addition to the benzoxazine ring, it is possible to obtain a cured product having better adhesion to the conductor layer and having a lower arithmetic mean roughness. Examples of the aromatic ring include a benzene ring, a naphthalene ring, an anthracene ring, a biphenyl ring and the like, and a benzene ring is preferable. The number of aromatic rings is preferably 1 or more, more preferably 2 or more, preferably 10 or less, and more preferably 5 or less, from the viewpoint of improving the adhesion.

（式（Ｂ−１）中、Ｒ^１１はｎ価の基を表し、Ｒ^１２はそれぞれ独立にハロゲン原子、アルキル基、又はアリール基を表す。ｎは２〜４の整数を表し、ｍは０〜４の整数を表す。） As the (B) benzoxazine-based curing agent, a benzoxazine-based curing agent represented by the following general formula (B-1) is preferable.

(In formula (B-1), R ¹¹ represents an n-valent group, R ¹² independently represents a halogen atom, an alkyl group, or an aryl group. N represents an integer of 2 to 4, and m represents 0. Represents an integer of ~ 4.

R ¹¹ represents an n-valent group. As such a group, an n-valent aromatic hydrocarbon group, an n-valent aliphatic hydrocarbon group, an oxygen atom, or a combination thereof is preferable. For example, when n is 2, R ¹¹ is preferably a divalent group selected from the group consisting of an arylene group, an alkylene group, an oxygen atom, or a combination of two or more thereof, and is preferably an arylene group or two or more kinds. It is more preferable that it is a divalent group selected from the group consisting of two or more combinations, and it is further preferable to be a divalent group selected from the group consisting of two or more kinds of combinations.

As the arylene group, an arylene group having 6 to 20 carbon atoms is preferable, an arylene group having 6 to 15 carbon atoms is more preferable, and an arylene group having 6 to 12 carbon atoms is further preferable. Specific examples of the arylene group include a phenylene group, a naphthylene group, an anthrasenylene group, a biphenylene group and the like, and a phenylene group is preferable.
As the alkylene group, an alkylene group having 1 to 10 carbon atoms is preferable, an alkylene group having 1 to 6 carbon atoms is more preferable, and an alkylene group having 1 to 3 carbon atoms is further preferable. Specific examples of the alkylene group include a methylene group, an ethylene group, a propylene group and the like, and a methylene group is preferable.

Examples of the divalent group selected from the group consisting of a combination of two or more thereof include a group in which one or more arylene groups and one or more oxygen atoms are bonded, one or more arylene groups and one or more alkylene groups. 1 A group in which the above arylene group and one or more oxygen atoms are bonded is preferable, and a group in which one or more arylene groups and one or more alkylene groups are bonded is preferable. Specific examples of the divalent group selected from the group consisting of a combination of two or more thereof include the following groups. In the formula, "*" represents a bond.

The arylene group and the alkylene group may have a substituent. The substituent is not particularly limited, and is, for example, a halogen atom, -OH, -OC _1-6 alkyl group, -N (C _1-6 alkyl group) ₂ , C _1-6 alkyl group, C _6-. Examples thereof include a _{10 aryl group, -NH 2} , -CN, -C (O) O-C _1-6 alkyl group, -COOH, -C (O) H, -NO _{2 and the} like. Here, the term "C _p-q " (p and q are positive integers and satisfy p <q) is described immediately after this term in that the number of carbon atoms of the organic group is p to q. Represents that there is. For example, _{the expression "C 1-6} alkyl group" refers to an alkyl group having 1 to 6 carbon atoms.

The above-mentioned substituent may further have a substituent (hereinafter, may be referred to as a "secondary substituent"). Unless otherwise specified, the same as the above-mentioned substituent may be used as the secondary substituent.

R ¹² independently represents a halogen atom, an alkyl group, or an aryl group. The alkyl group is preferably an alkyl group having 1 to 10 carbon atoms, more preferably an alkyl group having 1 to 6 carbon atoms, and further preferably an alkyl group having 1 to 3 carbon atoms. The aryl group is preferably an aryl group having 6 to 20 carbon atoms, more preferably an aryl group having 6 to 15 carbon atoms, and even more preferably an aryl group having 6 to 10 carbon atoms. The halogen atom represents a fluorine atom, a chlorine atom, a bromine atom or an iodine atom. The alkyl group and the aryl group may have a substituent. The substituent is the same as the substituent that the arylene group may have.

n represents an integer of 2 to 4, preferably an integer of 2 to 3, and more preferably 2. m represents an integer of 0 to 4, preferably an integer of 0 to 3, and more preferably 0.

The benzoxazine-based curing agent represented by the general formula (B-1) is a benzo represented by the following general formulas (B-3) and (B-4) from the viewpoint of obtaining the desired effect of the present invention. It is preferably at least one of the oxazine-based curing agents.

The benzoxazine-based curing agent represented by the general formula (B-3) may be at least one of the benzoxazine-based curing agent represented by the general formula (B-5) and the general formula (B-6). Preferably, the benzoxazine-based curing agent represented by the general formula (B-4) is preferably the benzoxazine-based curing agent represented by the general formula (B-7).

The benzoxazine-based curing agent represented by the general formula (B-1) may be used alone or as a mixture of two or more kinds. For example, when a benzoxazine-based curing agent represented by the general formula (B-5) and a benzoxazine-based curing agent represented by the general formula (B-6) are used as a mixture, the mass mixing ratio (general formula (general formula (B-6)). B-5): The general formula (B-6)) is preferably 1:10 to 10: 1, more preferably 1: 5 to 5: 1, and more preferably 1: 3 to 3: 1. By setting the mass mixing ratio within such a range, the adhesion between the insulating layer and the conductor layer can be improved.

(B) Specific examples of the benzoxazine-based curing agent include "JBZ-OD100" (benzoxazine ring equivalent 218), "JBZ-OP100D" (benzoxazine ring equivalent 218), and "ODA-BOZ" manufactured by JFE Chemical. (Benzoxazine ring equivalent 218); "Pd" (benzoxazine ring equivalent 217), "FA" (benzoxazine ring equivalent 217) manufactured by Shikoku Kasei Kogyo Co., Ltd .; "HFB2006M" manufactured by Showa Polymer Co., Ltd. ( Benzoxazine ring equivalent 432) and the like can be mentioned.

(B) The molecular weight of the benzoxazine-based curing agent is preferably 200 or more, more preferably 300 or more, still more preferably 400 or more, preferably 10,000 or less, more preferably 5000 or less, from the viewpoint of improving adhesion. , More preferably 3000 or less.

(B) The benzoxazine ring equivalent of the benzoxazine-based curing agent is preferably 50 g / eq. From the viewpoint of obtaining a cured product having excellent adhesion to the conductor layer and a low arithmetic mean roughness. ~ 500 g / eq. , More preferably 50 g / eq. ~ 400 g / eq. , More preferably 100 g / eq. ~ 300 g / eq. Is. The benzoxazine ring equivalent is the mass of the component (B) containing 1 equivalent of the benzoxazine ring.

Let a be a value obtained by dividing the mass of the component (A) by the epoxy equivalent of the component (A). This value "a" indicates the equivalent number (eq.) Of the epoxy group contained in the component (A). Further, the value obtained by dividing the mass of the component (B) by the benzoxazine ring equivalent of the component (B) is defined as b. This value "b" represents the equivalent number (eq.) Of the benzoxazine ring contained in the component (B). In this case, b / a is preferably 0.01 or more, more preferably 0.02 or more, still more preferably 0.03 or more, preferably 10 or less, still more preferably 5 or less, and more preferably 1 or less. be. By setting the amount ratio of the component (A) and the component (B) within such a range, it is possible to obtain a cured product having excellent adhesion. Here, when two or more kinds of the component (A) are contained in the resin composition, the above-mentioned a is the total of all the values obtained by dividing the mass of the non-volatile component of each epoxy resin present in the resin composition by each epoxy equivalent. It is the value that was set. When two or more kinds of the component (B) are contained in the resin composition, the mass of the non-volatile component of each benzoxazine-based curing agent present in the resin composition is divided by each benzoxazine ring equivalent. It is the sum of all the values.

The content of the (B) benzoxazine-based curing agent is preferably 0.1% by mass or more, more preferably 0.5% by mass or more, and more preferably more preferably 0.5% by mass or more when the resin component in the resin composition is 100% by mass. It is 1% by mass or more. The upper limit is preferably 15% by mass or less, more preferably 14% by mass or less, still more preferably 13% by mass or less. By setting the content of the component (B) within such a range, a cured product having excellent adhesion to the conductor layer and having a low arithmetic mean roughness can be obtained.

The "resin component" of the resin composition refers to a component of the non-volatile components contained in the resin composition, excluding (D) the inorganic filler.

<(C) (meth) acrylic acid ester>
The resin composition contains (C) (meth) acrylic acid ester. (C) By containing the (meth) acrylic acid ester in the resin composition, it is possible to lower the dielectric loss tangent and obtain a cured product having excellent smear removing property. Here, the term "(meth) acrylic acid" includes acrylic acid and methacrylic acid, and combinations thereof.

The (C) (meth) acrylic acid ester preferably has two or more (meth) acryloyl groups per molecule from the viewpoint of lowering the dielectric loss tangent and obtaining a cured product having excellent smear removing property. The term "(meth) acryloyl group" includes acryloyl groups, methacryloyl groups and combinations thereof.

The (meth) acrylic acid ester preferably has a cyclic structure from the viewpoint of lowering the dielectric loss tangent and obtaining a cured product having excellent smear removing property. As the cyclic structure, a divalent cyclic group is preferable. The divalent cyclic group may be either a cyclic group containing an alicyclic structure or a cyclic group containing an aromatic ring structure. Above all, from the viewpoint of remarkably obtaining the desired effect of the present invention, a cyclic group containing an alicyclic structure is preferable.

The divalent cyclic group is preferably a 3-membered ring or more, more preferably a 4-membered ring or more, still more preferably a 5-membered ring or more, and preferably a 20-membered ring, from the viewpoint of remarkably obtaining the desired effect of the present invention. Hereinafter, it is more preferably 15-membered ring or less, still more preferably 10-membered ring or less. Further, the divalent cyclic group may have a monocyclic structure or a polycyclic structure.

The ring in the divalent cyclic group may be composed of a heteroatom other than a carbon atom to form a ring skeleton. Examples of the hetero atom include an oxygen atom, a sulfur atom, a nitrogen atom and the like, and an oxygen atom is preferable. The heteroatom may have one in the ring or two or more.

Specific examples of the divalent cyclic group include the following divalent groups (i) to (xi). Among them, (x) or (xi) is preferable as the divalent cyclic group.

The divalent cyclic group may have a substituent. Examples of such a substituent include a halogen atom, an alkyl group, an alkoxy group, an aryl group, an arylalkyl group, a silyl group, an acyl group, an acyloxy group, a carboxy group, a sulfo group, a cyano group, a nitro group and a hydroxy group. Examples thereof include a mercapto group and an oxo group, and an alkyl group is preferable.

The (meth) acryloyl group may be directly bonded to a divalent cyclic group or may be bonded via a divalent linking group. Examples of the divalent linking group include an alkylene group, an alkaneylene group, an arylene group, a heteroarylene group, −C (= O) O−, −O−, −NHC (= O) −, and −NC (= O). N-, -NHC (= O) O-, -C (= O)-, -S-, -SO-, -NH- and the like can be mentioned, and a group in which a plurality of these are combined may be used. As the alkylene group, an alkylene group having 1 to 10 carbon atoms is preferable, an alkylene group having 1 to 6 carbon atoms is more preferable, an alkylene group having 1 to 5 carbon atoms, or an alkylene group having 1 to 4 carbon atoms. Is even more preferable. The alkylene group may be linear, branched or cyclic. Examples of such an alkylene group include a methylene group, an ethylene group, a propylene group, a butylene group, a pentylene group, a hexylene group, a 1,1-dimethylethylene group and the like, and a methylene group, an ethylene group and 1,1 -Dimethylethylene groups are preferred. As the alkenylene group, an alkenylene group having 2 to 10 carbon atoms is preferable, an alkenylene group having 2 to 6 carbon atoms is more preferable, and an alkenylene group having 2 to 5 carbon atoms is further preferable. As the arylene group and the heteroarylene group, an arylene group or a heteroarylene group having 6 to 20 carbon atoms is preferable, and an arylene group or a heteroarylene group having 6 to 10 carbon atoms is more preferable. As the divalent linking group, an alkylene group is preferable, and a methylene group and a 1,1-dimethylethylene group are particularly preferable.

（式（Ｃ−１）中、Ｒ^１及びＲ^４はそれぞれ独立にアクリロイル基又はメタクリロイル基を表し、Ｒ^２及びＲ^３はそれぞれ独立に２価の連結基を表す。環Ａは、２価の環状基を表す。） The (meth) acrylic acid ester is preferably represented by the following formula (C-1).

(In the formula (C-1), R ¹ and R ⁴ each independently represent an acryloyl group or a methacryloyl group, and R ² and R ³ each independently represent a divalent linking group. Ring A is a divalent group. Represents a cyclic group.)

R ¹ and R ⁴ independently represent an acryloyl group or a methacryloyl group, and an acryloyl group is preferable.

R ² and R ³ each independently represent a divalent linking group. The divalent linking group is the same as the above divalent linking group.

Ring A represents a divalent cyclic group. The ring A is the same as the above-mentioned divalent cyclic group.

Ring A may have a substituent. The substituent is the same as the substituent that the above divalent cyclic group may have.

Hereinafter, specific examples of the component (C) will be shown, but the present invention is not limited thereto.

As the component (C), a commercially available product may be used, for example, "A-DOG" ((meth) acryloyl group equivalent 163) manufactured by Shin-Nakamura Chemical Industry Co., Ltd. and "DCP-A" manufactured by Kyoeisha Chemical Co., Ltd. (((Meta) acryloyl group equivalent 163). Meta) acryloyl group equivalent 152), Nippon Kayakusha "NPDGA" ((meth) acryloyl group equivalent 106), "FM-400" ((meth) acryloyl group equivalent 156), "R-687" ((meth)) Acryloyl group equivalent 187), "THE-330" ((meth) acryloyl group equivalent 143), "PET-30" ((meth) acryloyl group equivalent 88), "DPHA" ((meth) acryloyl group equivalent 96), etc. Can be mentioned. The component (C) may be used alone or in combination of two or more.

The (meth) acryloyl group equivalent of the (C) (meth) acrylic acid ester is preferably 30 g / eq. From the viewpoint of obtaining a cured product having a low dielectric loss tangent and excellent smear removing property. ~ 400 g / eq. , More preferably 50 g / eq. ~ 300 g / eq. , More preferably 75 g / eq. ~ 200 g / eq. Is. The (meth) acryloyl group equivalent is the mass of the component (C) containing 1 equivalent of the (meth) acryloyl group.

The content of the component (C) is preferably 1% by mass or more, more preferably 3% by mass or more, when the resin component in the resin composition is 100% by mass, from the viewpoint of remarkably obtaining the effect of the present invention. More preferably, it is 5% by mass or more. The upper limit is preferably 20% by mass or less, more preferably 18% by mass or less, and further preferably 15% by mass or less.

By using a combination of (B) benzoxazine-based curing agent and (C) (meth) acrylic acid ester in a predetermined amount ratio, the resin composition has excellent adhesion and low arithmetic mean roughness. It becomes possible to obtain things. Let b be the value obtained by dividing the mass of the component (B) by the benzoxazine ring equivalent of the component (B). Further, the value obtained by dividing the mass of the component (C) by the (meth) acryloyl group equivalent of the component (C) is defined as c. This value "c" represents the equivalent number (eq.) Of the (meth) acryloyl group equivalent contained in the component (C). In this case, b / c is 0.08 or more, preferably 0.1 or more, and more preferably 0.13 or more. The upper limit is 2.5 or less, preferably 2 or less, and more preferably 0.19 or less. By adjusting the amount ratio of the component (B) and the component (C) so that b / c is within such a range, it is possible to obtain a cured product having excellent adhesion and a low arithmetic mean roughness. .. In addition, it is usually possible to lower the dielectric loss tangent of this cured product. When two or more kinds of the component (C) are contained in the resin composition, the above c is a value obtained by dividing the mass of each (meth) acrylic acid ester present in the resin composition by each (meth) acryloyl group equivalent. It is the total value of all.

<(D) Inorganic filler>
In addition to the above-mentioned components, the resin composition may further contain (D) an inorganic filler as an arbitrary component.

An inorganic compound is used as the material of the inorganic filler. Examples of materials for inorganic fillers include silica, alumina, glass, cordierite, silicon oxide, barium sulfate, barium carbonate, talc, clay, mica powder, zinc oxide, hydrotalcite, boehmite, aluminum hydroxide, Magnesium hydroxide, calcium carbonate, magnesium carbonate, magnesium oxide, boron nitride, aluminum nitride, manganese nitride, aluminum borate, strontium carbonate, strontium titanate, calcium titanate, magnesium titanate, bismuth titanate, titanium oxide, zirconate titanate , Barium titanate, barium zirconate titanate, barium zirconate, calcium zirconate, zirconate titanate, zirconate titanate phosphate and the like. Of these, silica is particularly suitable. Examples of silica include amorphous silica, fused silica, crystalline silica, synthetic silica, hollow silica and the like. Further, as silica, spherical silica is preferable. (D) The inorganic filler may be used alone or in combination of two or more.

(D) Commercially available inorganic fillers include, for example, "UFP-30" manufactured by Denka Kagaku Kogyo Co., Ltd .; "SP60-05" and "SP507-05" manufactured by Nippon Steel & Sumikin Materials Co., Ltd .; "YC100C", "YA050C", "YA050C-MJE", "YA010C"; "UFP-30" manufactured by Denka Corporation; "Silfil NSS-3N", "Silfil NSS-4N", "Silfil NSS-" manufactured by Tokuyama Corporation. 5N ”;“ SC2500SQ ”,“ SO-C4 ”,“ SO-C2 ”,“ SO-C1 ”; etc. manufactured by Admatex.

(D) The average particle size of the inorganic filler is preferably 0.01 μm or more, more preferably 0.05 μm or more, and particularly preferably 0.1 μm or more, from the viewpoint of remarkably obtaining the desired effect of the present invention. It is preferably 5 μm or less, more preferably 2 μm or less, still more preferably 1 μm or less.

(D) The average particle size of the inorganic filler can be measured by a laser diffraction / scattering method based on the Mie scattering theory. Specifically, it can be measured by creating a particle size distribution of the inorganic filler on a volume basis by a laser diffraction / scattering type particle size distribution measuring device and using the median diameter as the average particle size. As the measurement sample, 100 mg of an inorganic filler and 10 g of methyl ethyl ketone can be weighed in a vial and dispersed by ultrasonic waves for 10 minutes. The measurement sample was measured using a laser diffraction type particle size distribution measuring device, the light source wavelengths used were blue and red, and the volume-based particle size distribution of the (D) inorganic filler was measured by the flow cell method, and the obtained particles were obtained. The average particle size was calculated as the median diameter from the diameter distribution. Examples of the laser diffraction type particle size distribution measuring device include "LA-960" manufactured by HORIBA, Ltd.

(D) The specific surface area of the inorganic filler is preferably 1 m ² / g or more, more preferably 2 m ² / g or more, and particularly preferably 3 m ² / g or more, from the viewpoint of remarkably obtaining the desired effect of the present invention. be. The upper limit is not particularly limited, but is preferably 60 m ² / g or less, 50 m ² / g or less, or 40 m ² / g or less. The specific surface area is obtained by adsorbing nitrogen gas on the sample surface using a specific surface area measuring device (Macsorb HM-1210 manufactured by Mountech) according to the BET method and calculating the specific surface area using the BET multipoint method. ..

(D) The inorganic filler is preferably treated with a surface treatment agent from the viewpoint of enhancing moisture resistance and dispersibility. Examples of the surface treatment agent include fluorine-containing silane coupling agents, aminosilane-based coupling agents, epoxysilane-based coupling agents, mercaptosilane-based coupling agents, silane-based coupling agents, alkoxysilanes, organosilazane compounds, and titanate-based agents. Coupling agents and the like can be mentioned. In addition, one type of surface treatment agent may be used alone, or two or more types may be used in any combination.

Examples of commercially available surface treatment agents include "KBM403" (3-glycidoxypropyltrimethoxysilane) manufactured by Shin-Etsu Chemical Co., Ltd., "KBM803" (3-mercaptopropyltrimethoxysilane) manufactured by Shin-Etsu Chemical Co., Ltd., and Shin-Etsu Chemical Co., Ltd. "KBE903" (3-aminopropyltriethoxysilane) manufactured by Shin-Etsu Chemical Co., Ltd., "KBM573" (N-phenyl-3-aminopropyltrimethoxysilane) manufactured by Shin-Etsu Chemical Co., Ltd., "SZ-31" manufactured by Shin-Etsu Chemical Co., Ltd. ( Hexamethyldisilazane), "KBM103" (phenyltrimethoxysilane) manufactured by Shin-Etsu Chemical Co., Ltd., "KBM-4803" (long-chain epoxy type silane coupling agent) manufactured by Shin-Etsu Chemical Co., Ltd., "KBM-" manufactured by Shin-Etsu Chemical Co., Ltd. 7103 ”(3,3,3-trifluoropropyltrimethoxysilane) and the like.

The degree of surface treatment with the surface treatment agent is preferably within a predetermined range from the viewpoint of improving the dispersibility of the inorganic filler. Specifically, 100 parts by mass of the inorganic filler is preferably surface-treated with 0.2 parts by mass to 5 parts by mass of a surface treatment agent, and is surface-treated with 0.2 parts by mass to 3 parts by mass. It is preferable that the surface is treated with 0.3 parts by mass to 2 parts by mass.

The degree of surface treatment with the surface treatment agent can be evaluated by the amount of carbon per unit surface area of the inorganic filler. Carbon content per unit surface area of the inorganic filler, from the viewpoint of improving dispersibility of the inorganic filler is preferably 0.02 mg / ^{m 2} or more, 0.1 mg / ^{m 2} or more preferably, 0.2 mg / ^{m 2} The above is more preferable. On the other hand, from the viewpoint of suppressing an increase in the melt viscosity of the resin varnish and the melt viscosity in the sheet form, 1 mg / m ² or less is preferable, 0.8 mg / m ² or less is more preferable, and 0.5 mg / m ² or less is further preferable. preferable.

The amount of carbon per unit surface area of the inorganic filler can be measured after the surface-treated inorganic filler is washed with a solvent (for example, methyl ethyl ketone (MEK)). Specifically, a sufficient amount of MEK as a solvent is added to the inorganic filler surface-treated with a surface treatment agent, and ultrasonic cleaning is performed at 25 ° C. for 5 minutes. After removing the supernatant and drying the solid content, the amount of carbon per unit surface area of the inorganic filler can be measured using a carbon analyzer. As the carbon analyzer, "EMIA-320V" manufactured by HORIBA, Ltd. or the like can be used.

The content of the inorganic filler (D) is preferably 50% by mass or more, more preferably 50% by mass or more, when the non-volatile component in the resin composition is 100% by mass from the viewpoint of lowering the dielectric loss tangent and improving the smear removing property. Is 60% by mass or more, more preferably 70% by mass or more. Further, from the viewpoint of maintaining the adhesiveness, it is preferably 90% by mass or less, more preferably 85% by mass or less, and further preferably 80% by mass or less. Normally, when the content of the inorganic filler is relatively large, the adhesion tends to decrease, but in the present invention, sufficient adhesion can be maintained.

<(E) Curing agent>
The resin composition may further contain (E) a curing agent as an arbitrary component in addition to the above-mentioned components. However, (B) benzoxazine-based curing agent is not included in (E) curing agent. The curing agent (E) usually has a function of reacting with the component (A) to cure the resin composition. (E) As the curing agent, one type may be used alone, or two or more types may be used in combination at any ratio.

As the curing agent (E), a compound capable of reacting with an epoxy resin to cure the resin composition can be used, and for example, a phenol-based curing agent, an active ester-based curing agent, a cyanate ester-based curing agent, and a carbodiimide can be used. Examples thereof include a system curing agent, an amine system curing agent, and an acid anhydride type curing agent. Among them, a phenol-based curing agent and an active ester-based curing agent are preferable, and an active ester-based curing agent is more preferable, from the viewpoint of remarkably obtaining the desired effect of the present invention.

Examples of the phenolic curing agent include a curing agent having one or more, preferably two or more hydroxyl groups bonded to an aromatic ring (benzene ring, naphthalene ring, etc.) in one molecule. Of these, a compound having a hydroxyl group bonded to a benzene ring is preferable. Further, from the viewpoint of heat resistance and water resistance, a phenol-based curing agent having a novolak structure is preferable. Further, from the viewpoint of adhesion, a nitrogen-containing phenol-based curing agent is preferable, and a triazine skeleton-containing phenol-based curing agent is more preferable. In particular, a triazine skeleton-containing phenol novolac curing agent is preferable from the viewpoint of highly satisfying heat resistance, water resistance, and adhesion.

Specific examples of the phenol-based curing agent and the naphthol-based curing agent include "MEH-7700", "MEH-7810", "MEH-7851", and "MEH-8000H" manufactured by Meiwa Kasei Co., Ltd .; manufactured by Nippon Kayaku Co., Ltd. "NHN", "CBN", "GPH"; Nippon Steel & Sumitomo Metal Corporation "SN-170", "SN-180", "SN-190", "SN-475", "SN-485", "SN" -495 "," SN-495V "," SN-375 "," SN-395 ";" TD-2090 "," TD-2090-60M "," LA-7052 "," LA-7054 "manufactured by DIC Corporation. , "LA-1356", "LA-3018", "LA-3018-50P", "EXB-9500", "HPC-9500", "KA-1160", "KA-1163", "KA-1165" "; Examples thereof include "GDP-6115L", "GDP-6115H" and "ELPC75" manufactured by Gunei Chemical Co., Ltd.

Examples of the active ester-based curing agent include curing agents having one or more active ester groups in one molecule. Among them, as the active ester-based curing agent, two or more ester groups having high reaction activity such as phenol esters, thiophenol esters, N-hydroxyamine esters, and esters of heterocyclic hydroxy compounds are contained in one molecule. The compound to have is preferable. The active ester-based curing agent is preferably obtained by a condensation reaction between a carboxylic acid compound and / or a thiocarboxylic acid compound and a hydroxy compound and / or a thiol compound. In particular, from the viewpoint of improving heat resistance, an active ester-based curing agent obtained from a carboxylic acid compound and a hydroxy compound is preferable, and an active ester-based curing agent obtained from a carboxylic acid compound and a phenol compound and / or a naphthol compound is more preferable. ..

Examples of the carboxylic acid compound include benzoic acid, acetic acid, succinic acid, maleic acid, itaconic acid, phthalic acid, isophthalic acid, terephthalic acid, pyromellitic acid and the like.

Examples of the phenol compound or naphthol compound include hydroquinone, resorcin, bisphenol A, bisphenol F, bisphenol S, phenolphthalin, methylated bisphenol A, methylated bisphenol F, methylated bisphenol S, phenol, o-cresol, m-. Cresol, p-cresol, catechol, α-naphthol, β-naphthol, 1,5-dihydroxynaphthalene, 1,6-dihydroxynaphthalene, 2,6-dihydroxynaphthalene, dihydroxybenzophenol, trihydroxybenzophenone, tetrahydroxybenzophenone, fluoroglucin, Examples thereof include benzenetriol, dicyclopentadiene-type diphenol compound, and phenol novolac. Here, the "dicyclopentadiene-type diphenol compound" refers to a diphenol compound obtained by condensing two phenol molecules with one dicyclopentadiene molecule.

Preferred specific examples of the active ester-based curing agent include an active ester compound containing a dicyclopentadiene-type diphenol structure, an active ester compound containing a naphthalene structure, an active ester compound containing an acetylated product of phenol novolac, and a benzoyl compound of phenol novolac. Examples include active ester compounds containing. Of these, an active ester compound containing a naphthalene structure and an active ester compound containing a dicyclopentadiene-type diphenol structure are more preferable. The "dicyclopentadiene-type diphenol structure" represents a divalent structure composed of phenylene-dicyclopentylene-phenylene.

Commercially available products of the active ester-based curing agent include "EXB9451", "EXB9460", "EXB9460S", "HPC-8000", "HPC-8000H", and "EXB9451", "EXB9460", "EXB9460S", and "EXB9451", "EXB9460S", and "HPC-8000H", as active ester compounds containing a dicyclopentadiene type diphenol structure. HPC-8000-65T "," HPC-8000H-65TM "," EXB-8000L "," EXB-8000L-65TM "," EXB-8150-65T "(manufactured by DIC); as an active ester compound containing a naphthalene structure. "EXB9416-70BK" (manufactured by DIC); "DC808" (manufactured by Mitsubishi Chemical Co., Ltd.) as an active ester-based curing agent which is an acetylated product of phenol novolac; "YLH1026" as an active ester-based curing agent which is a benzoylated product of phenol novolac. (Manufactured by Mitsubishi Chemical Co., Ltd.), "YLH1030" (manufactured by Mitsubishi Chemical Co., Ltd.), "YLH1048" (manufactured by Mitsubishi Chemical Co., Ltd.); and the like.

Examples of the cyanate ester-based curing agent include bisphenol A dicyanate, polyphenol cyanate, oligo (3-methylene-1,5-phenylencyanate), 4,4'-methylenebis (2,6-dimethylphenylcyanate), and 4,4. '-Etilidene diphenyl disyanate, hexafluorobisphenol A dicyanate, 2,2-bis (4-cyanate) phenylpropane, 1,1-bis (4-cyanate phenylmethane), bis (4-cyanate-3,5-dimethyl) Bifunctional cyanate resins such as phenyl) methane, 1,3-bis (4-cyanatephenyl-1- (methylethylidene)) benzene, bis (4-cyanatephenyl) thioether, and bis (4-cyanatephenyl) ether; Examples thereof include polyfunctional cyanate resins derived from phenol novolak, cresol novolak, and the like; prepolymers in which these cyanate resins are partially triazined. Specific examples of the cyanate ester-based curing agent include "PT30" and "PT60" manufactured by Lonza Japan Co., Ltd. (both are phenol novolac type polyfunctional cyanate ester resins); "ULL-950S" (polyfunctional cyanate ester resin); BA230 ”,“ BA230S75 ”(prepolymer in which part or all of bisphenol A dicyanate is triazined to form a trimer); and the like.

Specific examples of the carbodiimide-based curing agent include "V-03" and "V-07" manufactured by Nisshinbo Chemical Co., Ltd.

Examples of the amine-based curing agent include curing agents having one or more amino groups in one molecule, and examples thereof include aliphatic amines, polyether amines, alicyclic amines, and aromatic amines. Among them, aromatic amines are preferable from the viewpoint of achieving the desired effect of the present invention. The amine-based curing agent is preferably a primary amine or a secondary amine, more preferably a primary amine. Specific examples of the amine-based curing agent include 4,4'-methylenebis (2,6-dimethylaniline), diphenyldiaminosulfone, 4,4'-diaminodiphenylmethane, 4,4'-diaminodiphenylsulfone, 3,3'. -Diaminodiphenylsulfone, m-phenylenediamine, m-xylylenediamine, diethyltoluenediamine, 4,4'-diaminodiphenylether, 3,3'-dimethyl-4,4'-diaminobiphenyl, 2,2'-dimethyl- 4,4'-Diaminobiphenyl, 3,3'-dihydroxybenzidine, 2,2-bis (3-amino-4-hydroxyphenyl) propane, 3,3-dimethyl-5,5-diethyl-4,4-diphenylmethane Diamine, 2,2-bis (4-aminophenyl) propane, 2,2-bis (4- (4-aminophenoxy) phenyl) propane, 1,3-bis (3-aminophenoxy) benzene, 1,3- Bis (4-aminophenoxy) benzene, 1,4-bis (4-aminophenoxy) benzene, 4,4'-bis (4-aminophenoxy) biphenyl, bis (4- (4-aminophenoxy) phenyl) sulfone, Examples thereof include bis (4- (3-aminophenoxy) phenyl) sulfone. Commercially available products may be used as the amine-based curing agent, for example, "KAYABOND C-200S", "KAYABOND C-100", "Kayahard A-A", "Kayahard AB", "Kayahard AB" manufactured by Nippon Kayaku Corporation. Examples include "Kayahard AS" and "Epicure W" manufactured by Mitsubishi Chemical Corporation.

Examples of the acid anhydride-based curing agent include a curing agent having one or more acid anhydride groups in one molecule. Specific examples of the acid anhydride-based curing agent include phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyltetrahydrohydride phthalic acid, methylhexahydrohydride phthalic acid, methylnadic acid anhydride, and hydride methylnadic acid. Anhydride, Trialkyltetrahydrophthalic anhydride, Dodecenyl succinic anhydride, 5- (2,5-dioxotetrahydro-3-franyl) -3-methyl-3-cyclohexene-1,2-dicarboxylic acid anhydride, Trianhydride Merit acid, pyromellitic anhydride, benzophenone tetracarboxylic acid dianhydride, biphenyltetracarboxylic acid dianhydride, naphthalenetetracarboxylic acid dianhydride, oxydiphthalic acid dianhydride, 3,3'-4,4'- Diphenylsulfone tetracarboxylic acid dianhydride, 1,3,3a, 4,5,9b-hexahydro-5- (tetrahydro-2,5-dioxo-3-franyl) -naphtho [1,2-C] furan-1 , 3-Dione, ethylene glycol bis (anhydrotrimeritate), polymer-type acid anhydrides such as styrene / maleic acid resin in which styrene and maleic acid are copolymerized, and the like.

Let a be the value obtained by dividing the mass of the component (A) by the epoxy equivalent of the component (A), and let e be the value obtained by dividing the mass of the component (E) by the reaction group equivalent of the component (E). This value "e" indicates the number of equivalents (eq.) Of the reactive groups contained in the component (E). In this case, e / a is preferably 0.1 or more, more preferably 0.3 or more, and even more preferably 0.5 or more. The upper limit is preferably 3 or less, more preferably 2 or less, still more preferably 1 or less. Here, the reactive group of the curing agent is an active hydroxyl group or the like, and differs depending on the type of the curing agent. When two or more kinds of the component (A) are contained in the resin composition, when two or more kinds of the component (E) are contained in the resin composition, the above e is each component (E) present in the resin composition. It is the sum of all the values obtained by dividing the mass of the above by each reaction group equivalent. By setting the amount ratio of the epoxy resin and the curing agent within such a range, the heat resistance of the cured product of the resin composition is further improved.

Further, (b + e) / c is 1.31 or more, preferably 1.35 or more, and more preferably 1.4 or more. The upper limit is 7 or less, preferably 6 or less, and more preferably 5 or less. By adjusting the amount ratio of the component (B) and the component (C) so that (b + e) / c is within such a range, it is possible to obtain a cured product having excellent adhesion and a low arithmetic mean roughness. Will be.

The content of the (E) curing agent is preferably 1% by mass or more, more preferably 3% by mass, when the non-volatile component in the resin composition is 100% by mass from the viewpoint of remarkably obtaining the desired effect of the present invention. As mentioned above, it is more preferably 5% by mass or more, preferably 15% by mass or less, more preferably 13% by mass or less, still more preferably 10% by mass or less.

<(F) Thermoplastic resin>
The resin composition may further contain (F) a thermoplastic resin as an arbitrary component in addition to the above-mentioned components.

Examples of the thermoplastic resin as the component (F) include phenoxy resin, polyvinyl acetal resin, polyolefin resin, polybutadiene resin, polyimide resin, polyamideimide resin, polyetherimide resin, polysulfone resin, polyethersulfone resin, and polyphenylene ether resin. , Polycarbonate resin, polyether ether ketone resin, polyester resin and the like. Of these, the phenoxy resin is preferable from the viewpoint of remarkably obtaining the desired effect of the present invention and from the viewpoint of obtaining an insulating layer having a small surface roughness and particularly excellent adhesion to the conductor layer. Further, the thermoplastic resin may be used alone or in combination of two or more.

Examples of the phenoxy resin include bisphenol A skeleton, bisphenol F skeleton, bisphenol S skeleton, bisphenol acetophenone skeleton, novolak skeleton, biphenyl skeleton, fluorene skeleton, dicyclopentadiene skeleton, norbornene skeleton, naphthalene skeleton, anthracene skeleton, adamantan skeleton, and terpene. Examples thereof include phenoxy resins having one or more skeletons selected from the group consisting of skeletons and trimethylcyclohexane skeletons. The terminal of the phenoxy resin may be any functional group such as a phenolic hydroxyl group or an epoxy group.

Specific examples of the phenoxy resin include "1256" and "4250" manufactured by Mitsubishi Chemical Co., Ltd. (both are bisphenol A skeleton-containing phenoxy resins); "YX8100" manufactured by Mitsubishi Chemical Co., Ltd. (bisphenol S skeleton-containing phenoxy resin); "YX6954" (bisphenol acetophenone skeleton-containing phenoxy resin); "FX280" and "FX293" manufactured by Nippon Steel & Sumitomo Metal Corporation; "YL7500BH30", "YX6954BH30", "YX7553", "YX7553BH30" manufactured by Mitsubishi Chemical Co., Ltd. Examples thereof include "YL7769BH30", "YL6794", "YL7213", "YL7290" and "YL7482";

Examples of the polyvinyl acetal resin include polyvinyl formal resin and polyvinyl butyral resin, and polyvinyl butyral resin is preferable. Specific examples of the polyvinyl acetal resin include "Electrified Butyral 4000-2", "Electrified Butyral 5000-A", "Electrified Butyral 6000-C", and "Electrified Butyral 6000-EP" manufactured by Denki Kagaku Kogyo. Examples thereof include Eslek BH series, BX series (for example, BX-5Z), KS series (for example, KS-1), BL series, and BM series manufactured by the same company.

Specific examples of the polyimide resin include "Ricacoat SN20" and "Ricacoat PN20" manufactured by NEW JAPAN CHEMICAL CO., LTD. Specific examples of the polyimide resin include a linear polyimide obtained by reacting a bifunctional hydroxyl group-terminated polybutadiene, a diisocyanate compound and a tetrabasic acid anhydride (polyimide described in JP-A-2006-37083), and a polysiloxane skeleton. Examples thereof include modified polyimides such as contained polyimides (polyimides described in JP-A-2002-12667 and JP-A-2000-31386).

Specific examples of the polyamide-imide resin include "Vilomax HR11NN" and "Vilomax HR16NN" manufactured by Toyobo Co., Ltd. Specific examples of the polyamide-imide resin include modified polyamide-imides such as "KS9100" and "KS9300" (polysiloxane skeleton-containing polyamide-imide) manufactured by Hitachi Chemical Co., Ltd.

Specific examples of the polyether sulfone resin include "PES5003P" manufactured by Sumitomo Chemical Co., Ltd.

Specific examples of the polyphenylene ether resin include oligophenylene ether / styrene resin "OPE-2St 1200" manufactured by Mitsubishi Gas Chemical Company.

Specific examples of the polysulfone resin include polysulfones "P1700" and "P3500" manufactured by Solvay Advanced Polymers.

(F) The weight average molecular weight (Mw) of the thermoplastic resin is preferably 8,000 or more, more preferably 10,000 or more, and particularly preferably 20,000 or more, from the viewpoint of remarkably obtaining the desired effect of the present invention. It is preferably 70,000 or less, more preferably 60,000 or less, and particularly preferably 50,000 or less.

The content of the (F) thermoplastic resin is preferably 0.01% by mass or more, more preferably, when the non-volatile component in the resin composition is 100% by mass, from the viewpoint of remarkably obtaining the desired effect of the present invention. Is 0.05% by mass or more, more preferably 0.1% by mass or more, preferably 5% by mass or less, more preferably 3% by mass or less, still more preferably 1% by mass or less.

<(G) Curing accelerator>
In addition to the above-mentioned components, the resin composition may further contain (G) a curing accelerator as an arbitrary component.

Examples of the curing accelerator include phosphorus-based curing accelerators, amine-based curing accelerators, imidazole-based curing accelerators, guanidine-based curing accelerators, metal-based curing accelerators, and the like. Among them, a phosphorus-based curing accelerator, an amine-based curing accelerator, an imidazole-based curing accelerator, and a metal-based curing accelerator are preferable, and an amine-based curing accelerator, an imidazole-based curing accelerator, and a metal-based curing accelerator are more preferable. The curing accelerator may be used alone or in combination of two or more.

Examples of the phosphorus-based curing accelerator include triphenylphosphine, phosphonium borate compound, tetraphenylphosphonium tetraphenylborate, n-butylphosphonium tetraphenylborate, tetrabutylphosphonium decanoate, and (4-methylphenyl) triphenylphosphonium thiocyanate. , Tetraphenylphosphonium thiocyanate, butyltriphenylphosphonium thiocyanate and the like, and triphenylphosphine and tetrabutylphosphonium decanoate are preferable.

Examples of the amine-based curing accelerator include trialkylamines such as triethylamine and tributylamine, 4-dimethylaminopyridine, benzyldimethylamine, 2,4,6, -tris (dimethylaminomethyl) phenol, and 1,8-diazabicyclo. Examples thereof include (5,4,0) -undecene, and 4-dimethylaminopyridine and 1,8-diazabicyclo (5,4,0) -undecene are preferable.

Examples of the imidazole-based curing accelerator include 2-methylimidazole, 2-undecylimidazole, 2-heptadecylimidazole, 1,2-dimethylimidazole, 2-ethyl-4-methylimidazole, 1,2-dimethylimidazole, and the like. 2-Ethyl-4-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, 1-benzyl-2-methylimidazole, 1-benzyl-2-phenylimidazole, 1-cyanoethyl-2-methylimidazole, 1-Cyanoethyl-2-undecylimidazole, 1-cyanoethyl-2-ethyl-4-methylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-cyanoethyl-2-undecylimidazolium trimellitate, 1-cyanoethyl- 2-Phenylimidazolium trimellitate, 2,4-diamino-6- [2'-methylimidazolyl- (1')]-ethyl-s-triazine, 2,4-diamino-6- [2'-undecyl Imidazolyl- (1')]-ethyl-s-triazine, 2,4-diamino-6- [2'-ethyl-4'-methylimidazolyl- (1')]-ethyl-s-triazine, 2,4- Diamino-6- [2'-methylimidazolyl- (1')]-ethyl-s-triazine isocyanuric acid adduct, 2-phenylimidazole isocyanuric acid adduct, 2-phenyl-4,5-dihydroxymethylimidazole, 2- Phenyl-4-methyl-5-hydroxymethylimidazole, 2,3-dihydro-1H-pyrrolo [1,2-a] benzimidazole, 1-dodecyl-2-methyl-3-benzylimidazolium chloride, 2-methylimidazolin , 2-Imidazole compounds such as phenylimidazolin and adducts of imidazole compounds and epoxy resins are mentioned, with 2-ethyl-4-methylimidazole and 1-benzyl-2-phenylimidazole being preferred.

As the imidazole-based curing accelerator, a commercially available product may be used, and examples thereof include "P200-H50" manufactured by Mitsubishi Chemical Corporation.

Examples of the guanidine-based curing accelerator include dicyandiamide, 1-methylguanidine, 1-ethylguanidine, 1-cyclohexylguanidine, 1-phenylguanidine, 1- (o-tolyl) guanidine, dimethylguanidine, diphenylguanidine, and trimethylguanidine. Tetramethylguanidine, pentamethylguanidine, 1,5,7-triazabicyclo [4.4.0] deca-5-ene, 7-methyl-1,5,7-triazabicyclo [4.4.0] Deca-5-ene, 1-methylbiguanide, 1-ethylbiguanide, 1-n-butylbiguanide, 1-n-octadecylviguanide, 1,1-dimethylbiguanide, 1,1-diethylbiguanide, 1-cyclohexylbiguanide, 1 Examples thereof include allylbiguanide, 1-phenylbiguanide, 1- (o-tolyl) biguanide, and dicyandiamide, 1,5,7-triazabicyclo [4.4.0] deca-5-ene is preferable.

Examples of the metal-based curing accelerator include organic metal complexes or organic metal salts of metals such as cobalt, copper, zinc, iron, nickel, manganese, and tin. Specific examples of the organic metal complex include an organic cobalt complex such as cobalt (II) acetylacetonate and cobalt (III) acetylacetonate, an organic copper complex such as copper (II) acetylacetonate, and zinc (II) acetylacetonate. Examples thereof include organic zinc complexes such as iron (III) acetylacetonate, organic nickel complexes such as nickel (II) acetylacetonate, and organic manganese complexes such as manganese (II) acetylacetonate. Examples of the organic metal salt include zinc octylate, tin octylate, zinc naphthenate, cobalt naphthenate, tin stearate, zinc stearate and the like.

The content of the (G) curing accelerator is preferably 0.01% by mass or more, more preferably, when the non-volatile component in the resin composition is 100% by mass, from the viewpoint of remarkably obtaining the desired effect of the present invention. Is 0.03% by mass or more, more preferably 0.05% by mass or more, preferably 0.3% by mass or less, more preferably 0.2% by mass or less, still more preferably 0.1% by mass or less. ..

<(H) Polymerization Initiator>
In addition to the above-mentioned components, the resin composition may further contain (H) a polymerization initiator as an arbitrary component. The (H) polymerization initiator usually has a function of promoting the cross-linking of the (meth) acryloyl group in the component (C). (H) The polymerization initiator may be used alone or in combination of two or more.

Examples of the (H) polymerization initiator include t-butylcumyl peroxide, t-butylperoxyacetate, α, α'-di (t-butylperoxy) diisopropylbenzene, t-butylperoxylaurate, and t. -Butylperoxy-2-ethylhexanoate t-Butylperoxyneodecanoate, t-butylperoxybenzoate and other peroxides can be mentioned.

(H) Commercially available products of the polymerization initiator include, for example, "Park Mill P", "Park Mill D", "Perbutyl C", "Perbutyl A", "Perbutyl P", "Perbutyl L", and "Perbutyl" manufactured by NOF CORPORATION. Examples thereof include "O", "perbutyl ND", and "perbutyl Z".

The content of the (H) polymerization initiator is preferably 0.01% by mass or more, more preferably, when the non-volatile component in the resin composition is 100% by mass, from the viewpoint of remarkably obtaining the desired effect of the present invention. Is 0.03% by mass or more, more preferably 0.05% by mass or more, preferably 0.5% by mass or less, more preferably 0.3% by mass or less, still more preferably 0.1% by mass or less. ..

<(I) Other additives>
In addition to the above-mentioned components, the resin composition may further contain other additives as arbitrary components. Examples of such additives include organic fillers; resin additives such as thickeners, defoamers, leveling agents, and adhesion-imparting agents; and the like. These additives may be used alone or in combination of two or more.

The present inventor has found that when the (C) (meth) acrylic acid ester is contained in the resin composition, the dielectric loss tangent can be lowered and the smear removability is improved. As a result of further diligent studies, the present inventor contains the (B) benzoxazine-based curing agent in the resin composition so that the amount ratio with the (C) (meth) acrylic acid ester is within a predetermined range. Therefore, in addition to lowering the dielectric loss tangent and improving the smear removal property, the arithmetic mean roughness (Ra) of the obtained cured product surface after the roughening treatment can be lowered, and the adhesion with the plated conductor layer (adhesion to the plated conductor layer) can be lowered. It was found that the peel strength) is also improved. It is considered that (B) the benzoxazine-based curing agent increased the crosslink density in the cured product, thereby suppressing the increase in the arithmetic mean roughness and improving the peel strength.

<Physical characteristics and uses of resin composition>
The cured product obtained by thermally curing the resin composition at 130 ° C. for 30 minutes and then at 170 ° C. for 30 minutes exhibits a characteristic of excellent smear removing property. Therefore, forming a via hole in the cured product provides an insulating layer having a maximum smear length of less than 5 μm at the bottom of the via hole. The smear removability can be measured by the method described in Examples described later.

The roughened surface after roughening the surface of the cured product obtained by thermally curing the resin composition at 130 ° C. for 30 minutes and then at 170 ° C. for 30 minutes exhibits a characteristic that the arithmetic average roughness (Ra) is usually low. Therefore, the cured product provides an insulating layer having a low arithmetic mean roughness. The arithmetic average roughness is preferably 130 nm or less, more preferably 120 nm or less, and further preferably 100 nm or less. On the other hand, the lower limit of the arithmetic mean roughness may be 1 nm or more. The evaluation of the arithmetic mean roughness (Ra) described above can be measured according to the method described in Examples described later.

The cured product obtained by thermally curing the resin composition at 130 ° C. for 30 minutes and then at 170 ° C. for 30 minutes exhibits a characteristic of excellent adhesion (peel strength) with the plated conductor layer. Therefore, the cured product provides an insulating layer having excellent adhesion to the plated conductor layer. The adhesion strength with the plated conductor layer is preferably 0.2 kgf / cm or more, more preferably 0.3 kgf / cm or more, and further preferably 0.4 kgf / cm or more. On the other hand, the upper limit of the adhesion strength is not particularly limited, but may be 5 kgf / cm or less. The evaluation of the adhesion strength with the plated conductor layer can be measured according to the method described in Examples described later.

A cured product obtained by thermosetting the resin composition at 190 ° C. for 90 minutes usually indicates that the dielectric loss tangent is low. Therefore, the cured product provides an insulating layer having a low dielectric loss tangent. The dielectric loss tangent is preferably 0.005 or less, more preferably 0.004 or less, and 0.003 or less. On the other hand, the lower limit of the dielectric loss tangent is not particularly limited, but may be 0.0001 or more. The evaluation of the dielectric loss tangent can be measured according to the method described in Examples described later.

The resin composition of the present invention can provide an insulating layer having excellent smear removing property and adhesion. Therefore, the resin composition of the present invention can be suitably used as a resin composition for insulating applications. Specifically, a resin composition for forming the insulating layer for forming the conductor layer (including the rewiring layer) formed on the insulating layer (resin for forming the insulating layer for forming the conductor layer). It can be suitably used as a composition).

Further, in the multilayer printed wiring board described later, a resin composition for forming an insulating layer of the multilayer printed wiring board (resin composition for forming an insulating layer of the multilayer printed wiring board) and an interlayer insulating layer of the printed wiring board are formed. It can be suitably used as a resin composition for forming an interlayer insulating layer of a printed wiring board (resin composition for forming an interlayer insulating layer of a printed wiring board).

Further, for example, when the semiconductor chip package is manufactured through the following steps (1) to (6), the resin composition of the present invention is for a rewiring forming layer as an insulating layer for forming the rewiring layer. Can also be suitably used as a resin composition (resin composition for forming a rewiring forming layer) and a resin composition for encapsulating a semiconductor chip (resin composition for encapsulating a semiconductor chip). When the semiconductor chip package is manufactured, a rewiring layer may be further formed on the sealing layer.
(1) Step of laminating a temporary fixing film on a base material,
(2) A process of temporarily fixing a semiconductor chip on a temporary fixing film,
(3) Step of forming a sealing layer on a semiconductor chip,
(4) Step of peeling the base material and the temporary fixing film from the semiconductor chip,
(5) A step of forming a rewiring forming layer as an insulating layer on the surface from which the base material and the temporary fixing film of the semiconductor chip are peeled off, and (6) a rewiring layer as a conductor layer is formed on the rewiring forming layer. Forming process

Further, since the resin composition of the present invention provides an insulating layer having good component embedding property, it can be suitably used even when the printed wiring board is a component built-in circuit board.

[Resin sheet]
The resin sheet of the present invention includes a support and a resin composition layer provided on the support and formed of the resin composition of the present invention.

The thickness of the resin composition layer is preferably 50 μm or less from the viewpoint of reducing the thickness of the printed wiring board and providing a cured product having excellent insulating properties even if the cured product of the resin composition is a thin film. It is preferably 40 μm or less, more preferably 30 μm or less. The lower limit of the thickness of the resin composition layer is not particularly limited, but may be usually 5 μm or more, 10 μm or more, or the like.

Examples of the support include a film made of a plastic material, a metal foil, and a release paper, and a film made of a plastic material and a metal foil are preferable.

When a film made of a plastic material is used as the support, the plastic material may be, for example, polyethylene terephthalate (hereinafter abbreviated as "PET") or polyethylene naphthalate (hereinafter abbreviated as "PEN"). ) And other polyesters, polycarbonate (hereinafter abbreviated as "PC"), acrylics such as polymethylmethacrylate (PMMA), cyclic polyolefins, triacetylcellulose (TAC), polyethersulfide (PES), polyethers. Examples thereof include ketones and polyimides. Of these, polyethylene terephthalate and polyethylene naphthalate are preferable, and inexpensive polyethylene terephthalate is particularly preferable.

When a metal foil is used as the support, examples of the metal foil include copper foil, aluminum foil, and the like, and copper foil is preferable. As the copper foil, a foil made of a single metal of copper may be used, and a foil made of an alloy of copper and another metal (for example, tin, chromium, silver, magnesium, nickel, zirconium, silicon, titanium, etc.) may be used. You may use it.

The support may be matted, corona-treated, or antistatic-treated on the surface to be joined to the resin composition layer.

Further, as the support, a support with a release layer having a release layer on the surface to be joined to the resin composition layer may be used. Examples of the release agent used for the release layer of the support with the release layer include one or more release agents selected from the group consisting of alkyd resin, polyolefin resin, urethane resin, and silicone resin. .. As the support with a release layer, a commercially available product may be used. For example, "SK-1" and "SK-1" manufactured by Lintec Corporation, which are PET films having a release layer containing an alkyd resin-based mold release agent as a main component. Examples include "AL-5", "AL-7", "Lumilar T60" manufactured by Toray Industries, "Purex" manufactured by Teijin Ltd., and "Unipee" manufactured by Unitika Ltd.

The thickness of the support is not particularly limited, but is preferably in the range of 5 μm to 75 μm, and more preferably in the range of 10 μm to 60 μm. When a support with a release layer is used, the thickness of the entire support with a release layer is preferably in the above range.

In one embodiment, the resin sheet may further contain other layers, if necessary. Examples of such other layers include a protective film similar to the support provided on the surface of the resin composition layer that is not bonded to the support (that is, the surface opposite to the support). Be done. The thickness of the protective film is not particularly limited, but is, for example, 1 μm to 40 μm. By laminating the protective film, it is possible to suppress the adhesion and scratches of dust and the like on the surface of the resin composition layer.

For the resin sheet, for example, a resin varnish in which a resin composition is dissolved in an organic solvent is prepared, and this resin varnish is applied onto a support using a die coater or the like and further dried to form a resin composition layer. It can be manufactured by.

Examples of the organic solvent include ketones such as acetone, methyl ethyl ketone (MEK) and cyclohexanone; acetic acid esters such as ethyl acetate, butyl acetate, cellosolve acetate, propylene glycol monomethyl ether acetate and carbitol acetate; cellosolve and butyl carbitol and the like. Carbitols; aromatic hydrocarbons such as toluene and xylene; amide solvents such as dimethylformamide, dimethylacetamide (DMAc) and N-methylpyrrolidone. The organic solvent may be used alone or in combination of two or more.

Drying may be carried out by a known method such as heating or blowing hot air. The drying conditions are not particularly limited, but the resin composition layer is dried so that the content of the organic solvent is 10% by mass or less, preferably 5% by mass or less. Although it depends on the boiling point of the organic solvent in the resin varnish, for example, when a resin varnish containing 30% by mass to 60% by mass of an organic solvent is used, the resin composition is obtained by drying at 50 ° C. to 150 ° C. for 3 to 10 minutes. A layer can be formed.

The resin sheet can be rolled up and stored. If the resin sheet has a protective film, it can be used by peeling off the protective film.

[Printed circuit board]
The printed wiring board of the present invention includes an insulating layer formed of a cured product of the resin composition of the present invention.

The printed wiring board can be manufactured, for example, by using the above-mentioned resin sheet by a method including the following steps (I) and (II).
(I) A step of laminating the resin composition layer of the resin sheet on the inner layer substrate so as to be bonded to the inner layer substrate (II) A step of thermally curing the resin composition layer to form an insulating layer.

The "inner layer substrate" used in the step (I) is a member that becomes a substrate of a printed wiring board, and is, for example, a glass epoxy substrate, a metal substrate, a polyester substrate, a polyimide substrate, a BT resin substrate, and a thermosetting polyphenylene ether substrate. And so on. Further, the substrate may have a conductor layer on one side or both sides thereof, and the conductor layer may be patterned. An inner layer board in which a conductor layer (circuit) is formed on one side or both sides of the board may be referred to as an "inner layer circuit board". Further, an intermediate product in which an insulating layer and / or a conductor layer should be further formed when the printed wiring board is manufactured is also included in the "inner layer substrate" in the present invention. When the printed wiring board is a circuit board with built-in components, an inner layer board with built-in components can be used.

The inner layer substrate and the resin sheet can be laminated, for example, by heat-pressing the resin sheet to the inner layer substrate from the support side. Examples of the member for heat-pressing the resin sheet to the inner layer substrate (hereinafter, also referred to as “heat-bonding member”) include a heated metal plate (SUS end plate or the like) or a metal roll (SUS roll). It is preferable not to press the heat-bonded member directly onto the resin sheet, but to press it through an elastic material such as heat-resistant rubber so that the resin sheet sufficiently follows the surface irregularities of the inner layer substrate.

The inner layer substrate and the resin sheet may be laminated by a vacuum laminating method. In the vacuum laminating method, the heat crimping temperature is preferably in the range of 60 ° C. to 160 ° C., more preferably 80 ° C. to 140 ° C., and the heat crimping pressure is preferably 0.098 MPa to 1.77 MPa, more preferably 0. It is in the range of .29 MPa to 1.47 MPa, and the heat crimping time is preferably in the range of 20 seconds to 400 seconds, more preferably 30 seconds to 300 seconds. Lamination is preferably carried out under reduced pressure conditions with a pressure of 26.7 hPa or less.

Lamination can be performed by a commercially available vacuum laminator. Examples of the commercially available vacuum laminator include a vacuum pressurizing laminator manufactured by Meiki Co., Ltd., a vacuum applicator manufactured by Nikko Materials, and a batch type vacuum pressurizing laminator.

After laminating, the laminated resin sheet may be smoothed by pressing under normal pressure (under atmospheric pressure), for example, from the support side. The press conditions for the smoothing treatment can be the same as the heat-bonding conditions for the above-mentioned lamination. The smoothing process can be performed by a commercially available laminator. The laminating and smoothing treatment may be continuously performed using the above-mentioned commercially available vacuum laminator.

The support may be removed between steps (I) and step (II) or after step (II).

In step (II), the resin composition layer is thermally cured to form an insulating layer. The thermosetting conditions of the resin composition layer are not particularly limited, and the conditions usually adopted when forming the insulating layer of the printed wiring board may be used.

For example, the thermosetting conditions of the resin composition layer differ depending on the type of the resin composition and the like, but the curing temperature is preferably 120 ° C. to 240 ° C., more preferably 150 ° C. to 220 ° C., still more preferably 170 ° C. to 210. ℃. The curing time can be preferably 5 minutes to 120 minutes, more preferably 10 minutes to 100 minutes, still more preferably 15 minutes to 100 minutes.

Before the resin composition layer is thermally cured, the resin composition layer may be preheated at a temperature lower than the curing temperature. For example, prior to thermosetting the resin composition layer, the resin composition layer is heated at a temperature of 50 ° C. or higher and lower than 120 ° C. (preferably 60 ° C. or higher and 115 ° C. or lower, more preferably 70 ° C. or higher and 110 ° C. or lower). Preheating may be performed for 5 minutes or longer (preferably 5 minutes to 150 minutes, more preferably 15 minutes to 120 minutes, still more preferably 15 minutes to 100 minutes).

In manufacturing the printed wiring board, (III) a step of drilling a hole in the insulating layer, (IV) a step of roughening the insulating layer, and (V) a step of forming a conductor layer may be further carried out. These steps (III) to (V) may be carried out according to various methods known to those skilled in the art used for manufacturing a printed wiring board. When the support is removed after the step (II), the support may be removed between the steps (II) and the step (III), between the steps (III) and the step (IV), or the step ( It may be carried out between IV) and step (V). Further, if necessary, the formation of the insulating layer and the conductor layer in steps (II) to (V) may be repeated to form a multilayer wiring board.

The step (III) is a step of drilling holes in the insulating layer, whereby holes such as via holes and through holes can be formed in the insulating layer. The step (III) may be carried out by using, for example, a drill, a laser, a plasma, or the like, depending on the composition of the resin composition used for forming the insulating layer. The dimensions and shape of the holes may be appropriately determined according to the design of the printed wiring board.

Step (IV) is a step of roughening the insulating layer. Usually, in this step (IV), smear removal is also performed. The procedure and conditions of the roughening treatment are not particularly limited, and known procedures and conditions usually used when forming the insulating layer of the printed wiring board can be adopted. For example, the insulating layer can be roughened by performing a swelling treatment with a swelling liquid, a roughening treatment with an oxidizing agent, and a neutralization treatment with a neutralizing liquid in this order. The swelling solution used for the roughening treatment is not particularly limited, and examples thereof include an alkaline solution and a surfactant solution, preferably an alkaline solution, and the alkaline solution is more preferably a sodium hydroxide solution or a potassium hydroxide solution. preferable. Examples of commercially available swelling liquids include "Swelling Dip Security Guns P" and "Swelling Dip Security Guns SBU" manufactured by Atotech Japan. The swelling treatment with the swelling liquid is not particularly limited, but can be performed, for example, by immersing the insulating layer in the swelling liquid at 30 ° C. to 90 ° C. for 1 minute to 20 minutes. From the viewpoint of suppressing the swelling of the resin of the insulating layer to an appropriate level, it is preferable to immerse the insulating layer in a swelling liquid at 40 ° C to 80 ° C for 5 to 15 minutes. The oxidizing agent used for the roughening treatment is not particularly limited, and examples thereof include an alkaline permanganate solution in which potassium permanganate or sodium permanganate is dissolved in an aqueous solution of sodium hydroxide. The roughening treatment with an oxidizing agent such as an alkaline permanganate solution is preferably performed by immersing the insulating layer in an oxidizing agent solution heated to 60 ° C. to 100 ° C. for 10 to 30 minutes. The concentration of permanganate in the alkaline permanganate solution is preferably 5% by mass to 10% by mass. Examples of commercially available oxidizing agents include alkaline permanganate solutions such as "Concentrate Compact CP" and "Dozing Solution Security P" manufactured by Atotech Japan. The neutralizing solution used for the roughening treatment is preferably an acidic aqueous solution, and examples of commercially available products include "Reduction Solution Security Gant P" manufactured by Atotech Japan. The treatment with the neutralizing solution can be performed by immersing the treated surface that has been roughened with the oxidizing agent in the neutralizing solution at 30 ° C. to 80 ° C. for 1 minute to 30 minutes. From the viewpoint of workability and the like, a method of immersing the object roughened with an oxidizing agent in a neutralizing solution at 40 ° C to 70 ° C for 5 to 20 minutes is preferable.

In one embodiment, the arithmetic mean roughness (Ra) of the surface of the insulating layer after the roughening treatment is preferably 120 nm or less, more preferably 110 nm or less, still more preferably 100 nm or less. The lower limit is not particularly limited, but is preferably 30 nm or more, more preferably 40 nm or more, and further preferably 50 nm or more. The arithmetic mean roughness (Ra) of the insulating layer surface can be measured using a non-contact surface roughness meter.

The step (V) is a step of forming a conductor layer, and a conductor layer is formed on the insulating layer. The conductor material used for the conductor layer is not particularly limited. In a preferred embodiment, the conductor layer is one or more selected from the group consisting of gold, platinum, palladium, silver, copper, aluminum, cobalt, chromium, zinc, nickel, titanium, tungsten, iron, tin and indium. Contains metal. The conductor layer may be a single metal layer or an alloy layer, and the alloy layer may be, for example, an alloy of two or more metals selected from the above group (for example, nickel-chromium alloy, copper, etc.). Examples include layers formed from nickel alloys and copper-titanium alloys). Among them, from the viewpoint of versatility, cost, ease of patterning, etc. for forming a conductor layer, a single metal layer of chromium, nickel, titanium, aluminum, zinc, gold, palladium, silver or copper, or a nickel-chromium alloy, copper, etc. A nickel alloy, a copper-titanium alloy alloy layer is preferable, a chromium, nickel, titanium, aluminum, zinc, gold, palladium, silver or copper single metal layer, or a nickel-chromium alloy alloy layer is more preferable, and a copper single metal layer is preferable. A metal layer is more preferred.

The conductor layer may have a single-layer structure, a single metal layer made of different types of metals or alloys, or a multi-layer structure in which two or more alloy layers are laminated. When the conductor layer has a multi-layer structure, the layer in contact with the insulating layer is preferably a single metal layer of chromium, zinc or titanium, or an alloy layer of nickel-chromium alloy.

The thickness of the conductor layer depends on the desired printed wiring board design, but is generally 3 μm to 35 μm, preferably 5 μm to 30 μm.

In one embodiment, the conductor layer may be formed by plating. For example, a conductor layer having a desired wiring pattern can be formed by plating the surface of an insulating layer by a conventionally known technique such as a semi-additive method or a full additive method, and the semi-additive can be manufactured from the viewpoint of ease of manufacture. It is preferably formed by the method. Hereinafter, an example of forming the conductor layer by the semi-additive method will be shown.

First, a plating seed layer is formed on the surface of the insulating layer by electroless plating. Next, a mask pattern that exposes a part of the plating seed layer corresponding to a desired wiring pattern is formed on the formed plating seed layer. After forming a metal layer by electrolytic plating on the exposed plating seed layer, the mask pattern is removed. After that, the unnecessary plating seed layer can be removed by etching or the like to form a conductor layer having a desired wiring pattern.

[Semiconductor device]
The semiconductor device of the present invention includes the printed wiring board of the present invention. The semiconductor device of the present invention can be manufactured by using the printed wiring board of the present invention.

Examples of semiconductor devices include various semiconductor devices used in electric products (for example, computers, mobile phones, digital cameras, televisions, etc.) and vehicles (for example, motorcycles, automobiles, trains, ships, aircraft, etc.).

The semiconductor device of the present invention can be manufactured by mounting a component (semiconductor chip) on a conductive portion of a printed wiring board. The "conduction point" is a "place for transmitting an electric signal in the printed wiring board", and the place may be a surface or an embedded place. Further, the semiconductor chip is not particularly limited as long as it is an electric circuit element made of a semiconductor.

The mounting method of the semiconductor chip in manufacturing a semiconductor device is not particularly limited as long as the semiconductor chip functions effectively, but specifically, a wire bonding mounting method, a flip chip mounting method, and a bumpless build-up layer. Examples thereof include a mounting method using (BBUL), a mounting method using an anisotropic conductive film (ACF), a mounting method using a non-conductive film (NCF), and the like. Here, the "mounting method using the bumpless build-up layer (BBUL)" means "a mounting method in which the semiconductor chip is directly embedded in the recess of the printed wiring board and the semiconductor chip is connected to the wiring on the printed wiring board". Is.

Hereinafter, the present invention will be specifically described with reference to examples. However, the present invention is not limited to the following examples. In the following description, "parts" and "%" representing quantities mean "parts by mass" and "% by mass", respectively, unless otherwise specified. Further, the operations described below were performed in an environment of normal temperature and pressure unless otherwise specified.

[Example 1]
10 parts of bisphenol type epoxy resin ("ZX1059" manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., 1: 1 mixture of bisphenol A type and bisphenol F type, epoxy equivalent 169), and naphthol type epoxy resin ("ESN475V" manufactured by Nippon Steel & Sumikin Chemical Co., Ltd. " , Epoxy equivalent of about 330) was dissolved by heating in 40 parts of Solvent Nafsa with stirring. This was cooled to room temperature to prepare a dissolution composition of an epoxy resin.

A phenolic curing agent having a phenoxy resin (“YX7553BH30” manufactured by Mitsubishi Chemical Corporation, a 1: 1 solution of MEK and cyclohexanone having a non-volatile content of 30% by mass), a triazine skeleton and a novolak structure in the dissolved composition of this epoxy resin ( DIC's "LA-3018-50P", reaction group equivalent of about 151, non-volatile content 50% 2-methoxypropanol solution) 5 parts, active ester-based curing agent (DIC's "HPC-8000-65T", reaction group Equivalent about 223, non-volatile content 65% by mass toluene solution) 50 parts, acrylic acid ester ("A-DOG" manufactured by Shin-Nakamura Chemical Co., Ltd., (meth) acryloyl group equivalent 156) 20 parts, benzoxazine-based curing agent (JFE chemical) 10 parts of "JBZ-OD100" manufactured by the company, benzoxazine ring equivalent of about 218, dissolved in MEK so as to have a non-volatile content of 50% by mass), curing accelerator (1-benzyl-2-phenylimidazole (1B2PZ)) , 5 parts of MEK solution with 10% by mass of non-volatile content, 2 parts of polymerization initiator (Parkmill D, manufactured by Nichiyu Co., Ltd., MEK solution with 20% non-volatile content), amine-based alkoxysilane compound ("KBM573" manufactured by Shin-Etsu Chemical Industry Co., Ltd. ) Surface-treated spherical silica (average particle size 0.5 μm, specific surface area 5.9 m ² / g “SO-C2” manufactured by Admatex), mixed with 310 parts, cyclohexanone 10 parts, and MEK 10 parts, and a high-speed rotary mixer. A resin varnish was prepared by uniformly dispersing in.

As a support, a polyethylene terephthalate (PET) film (“AL5” manufactured by Lintec Corporation, thickness 38 μm) having a release layer was prepared. The resin varnish was uniformly applied onto the release layer of the support so that the thickness of the resin composition layer after drying was 25 μm. Then, the resin varnish was dried at 80 ° C. to 100 ° C. (average 90 ° C.) for 4 minutes to obtain a resin sheet containing a support and a resin composition layer.

A-DOG has the structure shown below.

JBZ-OD100 is a mixture of p-body and m-body shown below (p-body: m-body = 6: 4).

[Example 2]
In Example 1, 20 parts of an acrylic acid ester (“A-DOG” manufactured by Shin-Nakamura Chemical Co., Ltd., (meth) acryloyl group equivalent 156) was used as an acrylic acid ester (“DCP-A” manufactured by Kyoeisha Chemical Co., Ltd., (meth) acryloyl). Base equivalent 152) Changed to 20 parts. Except for the above items, a resin varnish and a resin sheet were produced in the same manner as in Example 1.

DCP-A has the structure shown below.

[Example 3]
10 parts of the benzoxazine-based curing agent of Example 1 (a solution of "JBZ-OD100" manufactured by JFE Chemical Co., Ltd., a benzoxazine ring equivalent of about 218, dissolved in MEK so as to have a non-volatile content of 50% by mass) was added to benzoxazine. It was changed to 20 parts of a system curing agent (a solution prepared by dissolving "P-d" manufactured by JFE Chemical Co., Ltd., a benzoxazine ring equivalent of about 217, with MEK so as to have a non-volatile content of 25% by mass). Except for the above items, a resin varnish and a resin sheet were produced in the same manner as in Example 1.

Pd has the structure shown below.

[Example 4]
In Example 1,
1) 10 to 6 parts of a benzoxazine-based curing agent (a solution of "JBZ-OD100" manufactured by JFE Chemical Co., Ltd., a benzoxazine ring equivalent of about 218, dissolved in MEK so as to have a non-volatile content of 50% by mass). To
2) Change the amount of acrylic acid ester (“A-DOG” manufactured by Shin-Nakamura Chemical Co., Ltd., (meth) acryloyl group equivalent 156) from 20 parts to 15 parts.
3) The amount of spherical silica (average particle size 0.5 μm, “SO-C2” manufactured by Admatex) surface-treated with an amine-based alkoxysilane compound (“KBM573” manufactured by Shin-Etsu Chemical Co., Ltd.) is 310 to 300 parts. I changed it to.
Except for the above items, a resin varnish and a resin sheet were produced in the same manner as in Example 1.

[Example 5]
In Example 1,
1) 10 to 20 parts of a benzoxazine-based curing agent (a solution of "JBZ-OD100" manufactured by JFE Chemical Co., Ltd., a benzoxazine ring equivalent of about 218, dissolved in MEK so as to have a non-volatile content of 50% by mass). To
2) Change the amount of acrylic acid ester (“A-DOG” manufactured by Shin-Nakamura Chemical Co., Ltd., (meth) acryloyl group equivalent 156) from 20 parts to 10 parts.
3) The amount of spherical silica (average particle size 0.5 μm, “SO-C2” manufactured by Admatex) surface-treated with an amine-based alkoxysilane compound (“KBM573” manufactured by Shin-Etsu Chemical Co., Ltd.) is 310 to 300 parts. I changed it to.
Except for the above items, a resin varnish and a resin sheet were produced in the same manner as in Example 1.

[Comparative Example 1]
In Example 1,
1) Without using 10 parts of a benzoxazine-based curing agent (a solution of "JBZ-OD100" manufactured by JFE Chemical Co., Ltd., a benzoxazine ring equivalent of about 218, dissolved in MEK so as to have a non-volatile content of 50% by mass), without using.
2) The amount of spherical silica (average particle size 0.5 μm, “SO-C2” manufactured by Admatex) surface-treated with an amine-based alkoxysilane compound (“KBM573” manufactured by Shin-Etsu Chemical Co., Ltd.) is 310 to 290 parts. To
3) No two parts of the polymerization initiator (Park Mill D, manufactured by NOF CORPORATION, MEK solution having a non-volatile content of 20%) was used.
Except for the above items, a resin varnish and a resin sheet were produced in the same manner as in Example 1.

[Comparative Example 2]
In Example 2,
1) Without using 10 parts of a benzoxazine-based curing agent (a solution of "JBZ-OD100" manufactured by JFE Chemical Co., Ltd., a benzoxazine ring equivalent of about 218, dissolved in MEK so as to have a non-volatile content of 50% by mass), without using.
2) The amount of spherical silica (average particle size 0.5 μm, “SO-C2” manufactured by Admatex) surface-treated with an amine-based alkoxysilane compound (“KBM573” manufactured by Shin-Etsu Chemical Co., Ltd.) is 310 to 290 parts. To
3) No two parts of the polymerization initiator (Park Mill D, manufactured by NOF CORPORATION, MEK solution having a non-volatile content of 20%) was used.
Except for the above items, a resin varnish and a resin sheet were produced in the same manner as in Example 2.

[Comparative Example 3]
In Example 1,
1) Acrylic acid ester (“A-DOG” manufactured by Shin-Nakamura Chemical Co., Ltd., (meth) acryloyl group equivalent 156) without using 20 parts,
2) The amount of spherical silica (average particle size 0.5 μm, “SO-C2” manufactured by Admatex) surface-treated with an amine-based alkoxysilane compound (“KBM573” manufactured by Shin-Etsu Chemical Co., Ltd.) is 310 to 240 parts. To
3) Without using 10 parts of a benzoxazine-based curing agent (a solution of "JBZ-OD100" manufactured by JFE Chemical Co., Ltd., a benzoxazine ring equivalent of about 218, dissolved in MEK so as to have a non-volatile content of 50% by mass), without using.
4) No two parts of the polymerization initiator (Park Mill D, manufactured by NOF CORPORATION, MEK solution having a non-volatile content of 20%) was used.
Except for the above items, a resin varnish and a resin sheet were produced in the same manner as in Example 1.

[Comparative Example 4]
In Example 1,
1) 10 to 2 parts of a benzoxazine-based curing agent (a solution prepared by dissolving "JBZ-OD100" (benzoxazine ring equivalent of about 218) manufactured by JFE Chemical Co., Ltd. with MEK so as to have a non-volatile content of 50% by mass). To
2) The amount of spherical silica (average particle size 0.5 μm, “SO-C2” manufactured by Admatex) surface-treated with an amine-based alkoxysilane compound (“KBM573” manufactured by Shin-Etsu Chemical Co., Ltd.) is 310 to 300 parts. To
3) No two parts of the polymerization initiator (Park Mill D, manufactured by NOF CORPORATION, MEK solution having a non-volatile content of 20%) was used.
Except for the above items, a resin varnish and a resin sheet were produced in the same manner as in Example 1.

[Comparative Example 5]
In Example 1,
1) 10 to 40 parts of a benzoxazine-based curing agent (a solution prepared by dissolving "JBZ-OD100" (benzoxazine ring equivalent of about 218) manufactured by JFE Chemical Co., Ltd. with MEK so as to have a non-volatile content of 50% by mass). To
2) Change the amount of acrylic acid ester (“A-DOG” manufactured by Shin-Nakamura Chemical Co., Ltd., (meth) acryloyl group equivalent 156) from 20 parts to 5 parts.
3) The amount of spherical silica (average particle size 0.5 μm, “SO-C2” manufactured by Admatex) surface-treated with an amine-based alkoxysilane compound (“KBM573” manufactured by Shin-Etsu Chemical Co., Ltd.) is 310 to 300 parts. To
4) No two parts of the polymerization initiator (Park Mill D, manufactured by NOF CORPORATION, MEK solution having a non-volatile content of 20%) was used.
Except for the above items, a resin varnish and a resin sheet were produced in the same manner as in Example 1.

[Evaluation of smear removability and arithmetic mean roughness (Ra)]
<Manufacturing of evaluation board A>
(1) Base treatment of interior substrate As an inner layer substrate, a glass cloth base material having a copper foil on the surface, an epoxy resin double-sided copper-clad laminate (copper foil thickness 18 μm, substrate thickness 0.8 mm, Panasonic “R1515A” ") Was prepared. The copper foil on the surface of this inner layer substrate was etched with a micro-etching agent (“CZ8101” manufactured by MEC) at a copper etching amount of 1 μm to perform a roughening treatment. Then, it dried at 190 degreeC for 30 minutes.

(2) Laminating and Curing of Resin Sheets The resin sheets obtained in the above-mentioned Examples and Comparative Examples are resinified using a batch type vacuum pressure laminator (2-stage build-up laminator "CVP700" manufactured by Nikko Materials Co., Ltd.). The composition layer was laminated on both sides of the inner layer substrate so as to be bonded to the inner layer substrate. This laminating was carried out by reducing the pressure for 30 seconds to reduce the atmospheric pressure to 13 hPa or less, and then crimping at a temperature of 100 ° C. and a pressure of 0.74 MPa for 30 seconds.

Next, the laminated resin sheet was heat-pressed at 100 ° C. and a pressure of 0.5 MPa for 60 seconds under atmospheric pressure to smooth it. Further, this was put into an oven at 130 ° C. and heated for 30 minutes, then transferred to an oven at 170 ° C. and heated for 30 minutes.

(3) Formation of via holes Using a CO ₂ laser machine (LK-2K212 / 2C) manufactured by Via Mechanics, an insulating layer is machined under the conditions of a pulse width of 3 μsec, an output of 0.95 W, and a number of shots of 3 at a frequency of 2000 Hz. Then, a via hole having a top diameter (diameter) of 50 μm on the surface of the insulating layer and a diameter of 40 μm on the bottom surface of the insulating layer was formed. After that, the PET film was peeled off.

(4) Roughening treatment The inner layer substrate was immersed in a swelling liquid, Swelling Dip Securigant P manufactured by Atotech Japan Co., Ltd., at 60 ° C. for 10 minutes. Next, it was immersed in a roughened solution, Concentrate Compact P ( _{aqueous solution of KMnO 4} : 60 g / L, NaOH: 40 g / L) manufactured by Atotech Japan Co., Ltd. at 80 ° C. for 20 minutes. Finally, it was immersed in a neutralizing solution, Reduction Solution Securigant P manufactured by Atotech Japan, at 40 ° C. for 5 minutes. The obtained substrate was designated as evaluation substrate A.

<Evaluation of smear removal>
The periphery of the bottom of the via hole of the evaluation substrate A was observed with a scanning electron microscope (SEM), and the maximum smear length from the wall surface of the bottom of the via hole was measured from the obtained image and evaluated according to the following criteria.
◯: The maximum smear length is less than 5 μm.
×: The maximum smear length is 5 μm or more.

<Measurement of Arithmetic Mean Roughness (Ra)>
The Ra value of the evaluation substrate A was determined by the numerical value obtained by using a non-contact type surface roughness meter (WYKO NT3300 manufactured by Becoin Sturments) with a measurement range of 121 μm × 92 μm in VSI mode and a 50x lens. Each was measured by calculating the average value of 10 randomly selected points.

[Measurement of plating peel strength]
<Manufacturing of evaluation substrate B>
The evaluation substrate A was _{immersed in an electroless plating solution containing PdCl 2} at 40 ° C. for 5 minutes, and then immersed in an electroless copper plating solution at 25 ° C. for 20 minutes. After heating at 150 ° C. for 30 minutes to perform annealing treatment, an etching resist was formed, and after pattern formation by etching, copper sulfate electrolytic plating was performed to form a conductor layer having a thickness of 30 μm. Next, the substrate obtained by performing the annealing treatment at 200 ° C. for 60 minutes was designated as the evaluation substrate B.

<Measurement of peeling strength (peeling strength) of plated conductor layer>
A notch with a width of 10 mm and a length of 150 mm is made in the conductor layer of the evaluation substrate B that does not include the via hole, and one end of the notch is peeled off to remove the grip (manufactured by TSE, Autocom type testing machine AC-). 50C-SL), and the load (kgf / cm) when 100 mm was peeled off in the vertical direction at a speed of 50 mm / min at room temperature (25 ° C.) was measured.

[Measurement of dielectric loss tangent]
The resin sheets obtained in each Example and each Comparative Example were heat-cured at 190 ° C. for 90 minutes, and the PET film was peeled off to obtain a sheet-like cured product. The cured product is cut into test pieces having a width of 2 mm and a length of 80 mm, and a cavity resonance method is used using a cavity resonator permittivity measuring device CP521 manufactured by Kanto Applied Electronics Development Co., Ltd. and a network analyzer E8632B manufactured by Azilent Technology. The dielectric positive contact (tan δ) was measured at a measurement frequency of 5.8 GHz. Measurements were made on the two test pieces, and the average value was calculated.

表中、「（Ｂ）成分の含有量」は、樹脂組成物中の樹脂成分を１００質量％とした場合の（Ｂ）成分の含有量を表し、「（Ｃ）成分の含有量」は、樹脂組成物中の樹脂成分を１００質量％とした場合の（Ｃ）成分の含有量を表し、「（Ｄ）成分の含有量」は、樹脂組成物中の不揮発成分を１００質量％とした場合の（Ｄ）成分の含有量を表す。「ｂ」は、（Ｂ）成分の質量をベンゾオキサジン環当量で除した値を表し、「ｃ」は、（Ｃ）成分の質量を（メタ）アクリロイル基当量で除した値を表す。

In the table, "content of component (B)" represents the content of component (B) when the resin component in the resin composition is 100% by mass, and "content of component (C)" is The content of the component (C) when the resin component in the resin composition is 100% by mass is represented, and the "content of the component (D)" is the case where the non-volatile component in the resin composition is 100% by mass. (D) represents the content of the component. “B” represents the value obtained by dividing the mass of the component (B) by the benzoxazine ring equivalent, and “c” represents the value obtained by dividing the mass of the component (C) by the (meth) acryloyl group equivalent.

In Examples 1 to 5, it has been confirmed that even when the components (D) to (H) are not contained, the results are the same as those in the above-mentioned Examples, although the degree is different.

Claims (18)

(A) Epoxy resin,
A resin composition containing (B) a benzoxazine-based curing agent and (C) (meth) acrylic acid ester.
When b is the mass of the component (B) divided by the benzoxazine ring equivalent and c is the mass of the component (C) divided by the (meth) acryloyl group equivalent, b / c is 0.08 or more. Resin composition of 2.5 or less, except when the resin composition is a photosensitive resin composition. The resin composition according to claim 1, wherein the component (C) has two or more (meth) acryloyl groups per molecule. The resin composition according to claim 1 or 2, wherein the component (C) has a cyclic structure. The resin composition according to any one of claims 1 to 3, wherein the component (C) has a structure represented by the following formula (C-1).

(In the formula (C-1), R ¹ and R ⁴ each independently represent an acryloyl group or a methacryloyl group, and R ² and R ³ each independently represent a divalent linking group. Ring A is a divalent group. Represents a cyclic group.) The resin composition according to any one of claims 1 to 4, wherein the component (B) has a structure represented by the following formula (B-1).

(In formula (B-1), R ¹¹ represents an n-valent group, R ¹² independently represents a halogen atom, an alkyl group, or an aryl group. N represents an integer of 2 to 4, and m represents 0. Represents an integer of ~ 4. The resin composition according to any one of claims 1 to 5, wherein the component (A) contains a liquid epoxy resin and a solid epoxy resin. The resin composition according to any one of claims 1 to 6, further comprising (D) an inorganic filler. The resin composition according to claim 7, wherein the content of the component (D) is 70% by mass or more when the non-volatile component in the resin composition is 100% by mass. The resin composition according to any one of claims 1 to 8, wherein the content of the component (C) is 1% by mass or more and 20% by mass or less when the resin component in the resin composition is 100% by mass. thing. The resin composition according to any one of claims 1 to 9, wherein the content of the component (B) is 1% by mass or more and 15% by mass or less when the resin component in the resin composition is 100% by mass. thing. The resin composition according to any one of claims 1 to 10, which is used for insulating applications. The resin composition according to any one of claims 1 to 11, which is used for forming an insulating layer. The resin composition according to any one of claims 1 to 12, which is used for forming an insulating layer for forming a conductor layer. The resin composition according to any one of claims 1 to 13, which is used for encapsulating a semiconductor chip. A resin sheet comprising a support and a resin composition layer provided on the support and containing the resin composition according to any one of claims 1 to 14. A printed wiring board including an insulating layer formed of a cured product of the resin composition according to any one of claims 1 to 14. A semiconductor device comprising the printed wiring board according to claim 16. (I) A step of laminating a resin composition layer containing a resin composition on an inner layer substrate so as to be bonded to the inner layer substrate.
(II) A step of thermally curing the resin composition layer to form an insulating layer,
It includes (III) a step of drilling a hole in the insulating layer and (IV) a step of roughening the insulating layer.
The resin composition is (A) epoxy resin,
Contains (B) a benzoxazine-based curing agent and (C) (meth) acrylic acid ester.
When b is the mass of the component (B) divided by the benzoxazine ring equivalent and c is the mass of the component (C) divided by the (meth) acryloyl group equivalent, b / c is 0.08 or more. A method for manufacturing a printed wiring board, which is 2.5 or less.