JP2021125399A - Heat treatment equipment - Google Patents

Abstract

To provide heat treatment equipment capable of achieving a higher processing efficiency of a processed object by achieving a higher transport efficiency of the processed object with respect to an induction heating coil and also capable of inductively heating the processed object under more optimal conditions.SOLUTION: Heat processing equipment 1 includes an induction heating coil 34 and a positioning mechanism 35. The induction heating coil 34 includes a pair of split coils 100, 200 arranged apart from each other in an opposite direction B1. A processed object arrangement space S1 for inductively heating a processed object 80 is formed between the pair of split coils 100, 200 in the opposite direction B1. The positioning mechanism 35 sets the relative position between the pair of split coils 100, 200 in the opposite direction B1 to be changeable.SELECTED DRAWING: Figure 10

Description

The present invention relates to a heat treatment apparatus.

There is known an induction heating coil for performing a heat treatment such as quenching treatment on a metal part such as a gear as an object to be processed (see, for example, Patent Document 1). The induction heating coil described in Patent Document 1 is formed in a spiral shape.

Japanese Unexamined Patent Publication No. 2019-090997

In the configuration described in Patent Document 1, the object to be processed is moved in and out of the spiral coil by being moved along the axial direction of the spiral coil. Therefore, when the total length (shaft length) of the spiral coil is long, or when the total length of the object to be processed is long, the object to be processed is moved a long distance along the axial direction of the spiral coil and is surrounded by the spiral coil. It is necessary to put the object to be processed in and out of the space for arranging the object to be processed. More specifically, when the object to be processed is heated by the induction heating coil, the object to be processed is displaced along the first direction (for example, the horizontal direction) to, for example, above the coil, and then the object to be processed is placed. It is necessary to reach the space for arranging the object to be processed by shifting the induction heating coil in the second direction (for example, the vertical direction) along the axial direction. As described above, regardless of the total length of the object to be processed, it is necessary to move the object to be processed in the first direction and then in the second direction as a preparation for induction heating. Therefore, it takes time to convey the object to be processed, and the transfer mechanism for conveying the object to be processed becomes complicated. Further, depending on the total length of the spiral coil and the total length of the object to be processed, the moving distance of the object to be processed when the object to be processed is carried in and out of the spiral coil becomes long.

Here, by forming the induction heating coil into a U-shape (horseshoe shape) in a plan view, it is conceivable that the object to be processed is taken in and out through the U-shaped cutout portion. In this case, the object to be processed is moved in and out of the induction heating coil by moving it in the first direction (for example, the horizontal direction) described above. However, the object to be treated is heated under conditions suitable for the purpose of the heat treatment, such as quenching treatment and carburizing treatment. In order to heat the object to be processed according to this purpose, it is necessary to optimize the distance between the induction heating coil and the object to be processed. However, the above-mentioned U-shaped induction heating coil is not provided with a position adjusting mechanism that can optimize the distance from the object to be processed.

In view of the above problems, one of the objects of the present invention is to increase the processing efficiency of the object to be processed by increasing the transfer efficiency of the object to be processed with respect to the induction heating coil, and to make the object to be processed more optimal. It is to enable induction heating under various conditions.

(1) In order to solve the above problems, the heat treatment apparatus according to a certain aspect of the present invention is a pair of split coils arranged apart from each other in a predetermined facing direction, and the pair of split coils in the facing direction. The relative positions of the induction heating coil including the pair of dividing coils for forming the object arrangement space for inductively heating the object to be processed and the pair of divided coils in the facing direction can be changed. It has a positioning mechanism and a positioning mechanism.

According to this configuration, by setting the distance between the pair of split coils to a sufficiently wide value by the positioning mechanism, the object to be processed can be moved between the places where the distance is wide. As a result, the object to be processed can be moved in and out of the space for arranging the object to be processed between the pair of divided coils by moving the object to be processed by a short distance in a direction orthogonal to the axial direction of the induction heating coil, for example. Therefore, regardless of the total length of the induction heating coil (the length of the pair of split coils in the axial direction of the coil) and the total length of the object to be processed, the object to be processed is carried in and out of the induction heating coil. The moving distance of the processed object can be shortened. Therefore, it is possible to shorten the time required for taking in and out the object to be processed with respect to the induction heating coil for the induction heating treatment. As a result, the time required for induction heating treatment of one object to be treated can be shortened. As described above, the productivity of the object to be processed can be improved by improving the transfer process of the object to be processed. That is, the number of objects to be processed that can be heated by the induction heating coil can be increased per unit time, and the productivity of heat treatment by the induction heating coil can be further increased. Further, since the positioning mechanism is provided, the relative position between the object to be processed and each division application coil can be changed. As a result, each divided coil can be arranged at a more optimum position with respect to the object to be processed according to the type of heat treatment and the heating conditions. This allows induction heating of the object to be treated under more optimal conditions.

(2) The positioning mechanism may move the pair of the split coils relative to each other while arranging the pair of the split coils in parallel.

According to this configuration, a pair of split coils can be arranged at locations suitable for each of the objects to be processed having different sizes and shapes. As a result, a plurality of types of objects to be processed can be induced and heated by the same induction heating coil without replacing the induction heating coil for each shape of the object to be processed. Therefore, the efficiency of the work of heat-treating the object to be treated can be further increased.

(3) The positioning mechanism may operate so as to incline at least one of the pair of the split coils with respect to the axial direction of the induction heating coil.

According to this configuration, when an object to be processed is arranged between a pair of divided coils, when the portion of the object to be processed that is inclined with respect to the axial direction of the induction heating coil is induced and heated, the inclined portion is made more even. Can be induced and heated. Therefore, it is possible to increase the types of shapes of the object to be treated that can be induced and heated by the induction heating coil. That is, the versatility of the induction heating coil can be increased.

(4) A plurality of the pair of the split coils are provided so as to be arranged along the axial direction of the induction heating coil, and the positioning mechanism is independently provided for each of the pair of the split coils of the pair of the split coils. Relative position may be set.

According to this configuration, when the object to be processed is arranged between the pair of divided coils and the shape of the object to be processed differs depending on the axial position of the induction heating coil, a pair of the objects to be processed has different outer shapes. The split coil can be optimally arranged. As a result, even for an object to be processed having a complicated shape, the entire surface of the object to be processed can be heated more evenly without using a dedicated induction heating coil.

(5) The heat treatment apparatus further includes an identification unit for identifying information about the object to be processed and a control unit for controlling the positioning mechanism, and the control unit is the object identified by the identification unit. By operating the positioning mechanism based on the information about the object to be processed, the relative positions of the pair of the split coils may be set.

According to this configuration, the identification unit identifies information about the object to be processed, such as information represented by a two-dimensional bar code, and the control unit operates the positioning mechanism based on the information about the object to be processed to form a pair. The relative position of the split coil can be set. In this way, the pair of split coils can be arranged at positions more suitable for the object to be processed by using the information about the object to be processed. As a result, the induction heating coil can induce and heat the object to be processed more efficiently.

According to the present invention, by increasing the transfer efficiency of the object to be processed with respect to the induction heating coil, the production efficiency of the object to be processed can be further increased, and the object to be processed can be induced and heated under more optimum conditions.

It is a schematic cross-sectional view which shows the state which looked at the state of the heat treatment apparatus which concerns on one Embodiment of this invention from the front. It is a schematic plan view around the opening area variable part of a purge module. It is a typical partial cross-sectional side view which shows the structure around the induction heating coil of a heat treatment apparatus. It is a perspective view of an induction heating coil and an object to be processed. It is a cross-sectional view of each of the 1st division coil and the 2nd division coil of the induction heating coil, and shows the state of being cut in the cross section orthogonal to the front-rear direction, one 1st division coil is shown, and 2nd division is shown. The coils show two identical configurations for illustration purposes. It is a figure which shows the state which superposed the 1st division coil and the 2nd division coil of an induction heating coil. (A) is a plan view of an induction heating coil and an object to be processed, and shows a state in which the object to be processed is induced to be heated. (B) is a plan view of an induction heating coil and an object to be processed, and shows a state when the object to be processed is being conveyed. It is a block diagram which shows the structure about the control of a heat treatment apparatus. (A) and (B) are diagrams showing an example of the heat treatment operation of the object to be treated by the heat treatment apparatus. (A) and (B) are diagrams showing an example of the heat treatment operation of the object to be treated by the heat treatment apparatus. It is a top view of the main part which shows the 1st modification of the structure of a transport port and an aperture mechanism, (A) shows the state which the shutter is open, and (B) shows the state which the shutter is almost closed. ing. It is a top view of the main part which shows the 2nd modification of the structure of the transport port and the diaphragm mechanism, (A) shows the state which the shutter is open, and (B) shows the state which the shutter is almost closed. ing. It is a schematic plan view of the main part for demonstrating the deformation example of the moving direction of a split coil. It is a figure which shows the main part of the 1st modification of the layout of an induction heating coil. It is a figure which shows the main part of the 2nd modification of the layout of an induction heating coil. It is a perspective view of the induction heating coil and the object to be processed which concerns on 1st modification. (A) is a cross-sectional view of each of the first split coil and the second split coil of the induction heating coil A, and shows a state of being cut in a cross section orthogonal to the front-rear direction. (B) is a figure which shows the state which superposed the 1st division coil and the 2nd division coil of the induction heating coil. (A) is a perspective view of the induction heating coil and the object to be processed of the second modification. (B) is a plan view of an induction heating coil and an object to be processed of the second modification, and shows a state in which the object to be processed is induced to be heated. (A) is a cross-sectional view of each of the first split coil and the second split coil of the induction heating coil of the second modification, and shows a state of being cut in a cross section orthogonal to the front-rear direction. (B) is a figure which shows the state which superposed the 1st division coil and the 2nd division coil of the induction heating coil of the 2nd modification. It is a perspective view of the induction heating coil and the object to be processed of the 3rd modification. It is a top view of the induction heating coil and the object to be processed of the 3rd modification. It is a graph which shows the experimental result of a reference example and Examples 1-3.

<Background to the idea of the present invention>
Steel heat treatment such as quenching is performed for the purpose of improving the mechanical properties of the object to be treated, and is utilized in various fields. Induction heating is known as one of the heating methods for the object to be treated during this heat treatment. In induction heating, heating conditions such as the shape of the induction heating coil and the oscillation frequency are important in order to heat the object to be treated suitable for the purpose of heat treatment. In particular, (i) the shape of the induction heating coil and (ii) the distance between the induction heating coil and the object to be processed have a great influence on the heat treatment quality of the object to be processed. Further, since the elements (i) and (ii) have a great influence on the transport process of the object to be processed and the transport structure for transporting the object to be processed, the productivity of the object to be processed is also greatly affected. Under such a premise, we focused on the shape of the induction heating coil and the relationship between the induction heating coil and the object to be processed, and diligently researched a method capable of improving the productivity of the object to be processed, and came up with the present invention. I came to do it.

<Explanation of Embodiment>
Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. The present invention can be applied as a heat treatment apparatus for heat-treating an object to be treated.

FIG. 1 is a schematic cross-sectional view showing a state in which the heat treatment apparatus 1 according to the embodiment of the present invention is viewed from the front. FIG. 2 is a schematic plan view of the periphery of the variable opening area 7 of the purge module 2. FIG. 3 is a schematic partial cross-sectional side view showing the configuration around the induction heating coil 34 of the heat treatment apparatus 1.

In the following, the horizontal direction X, the front-rear direction Y, and the vertical direction Z are defined with reference to a state in which the heat treatment apparatus 1 is viewed from the front, that is, a state in which the heat treatment apparatus 1 is viewed in the direction shown in FIG.

With reference to FIGS. 1 to 3, the heat treatment apparatus 1 is provided for heat-treating the object to be processed 80. This heat treatment is a heat treatment and a cooling treatment. As an example of the heat treatment, carburizing heat treatment, soaking heat treatment and the like can be exemplified. Further, as the cooling treatment, quenching treatment and the like can be exemplified. Although specific examples of the heat treatment and the cooling treatment performed by the heat treatment apparatus 1 are not particularly limited, in the present embodiment, the carburizing treatment will be described as an example. Further, in the present embodiment, the object to be processed 80 is a metal part, for example, a metal shaft as a material for a torque transmission shaft. The object to be processed 80 is not limited to the metal shaft, and may be any member such as a metal ring that can be induced and heated. The heat treatment apparatus 1 is configured to be capable of heat-treating each of the objects to be processed 80 at high speed.

The heat treatment device 1 includes a purge module 2, a heat treatment module 3, a transfer mechanism 4, and a control device 5.

The purge module 2 is configured to arrange the object to be processed 80 in an atmosphere of purge gas. As the purge gas, nitrogen gas as an inert gas is used in the present embodiment. The purge module 2 is a portion through which the object to be processed 80 passes from the outside of the heat treatment apparatus 1 toward the inside of the heat treatment module 3. In the present embodiment, the purge module 2 is arranged on the upper left side of the heat treatment apparatus 1.

The purge module 2 includes a purge chamber 6, a variable opening area 7, a purge gas supply unit 8 as a first atmosphere gas supply unit, a purge gas sensor 9, and a reading unit 10.

The purge chamber 6 forms a space in which the object to be processed 80 that has passed through the transport port 12 passes and is accommodated. Below the purge chamber 6, there is a space in which the object to be processed 80 is taken in and out of the heat treatment apparatus 1, that is, a space outside the heat treatment apparatus 1. In the present embodiment, the purge chamber 6 is formed in a hollow square column shape, but the specific shape is not particularly limited as long as it can accommodate the object to be processed 80.

The purge chamber 6 has a top wall 6a, a plurality of side walls 6b, and a bottom wall 6c.

The top wall 6a is provided as the ceiling of the purge chamber 6. In the present embodiment, the top wall 6a is a rectangular wall. Side walls 6b extend downward from each of the four sides of the top wall 6a. The side wall 6b is formed in a rectangular shape in the present embodiment. In FIG. 1, the left side wall 6b, the rear side wall 6b, and the right side wall 6b are shown, and the front side wall 6b is not shown. The right side wall 6b is also a partition wall arranged between the space in the purge chamber 6 and the space in the heat treatment chamber 31 described later. An opening 11 through which the object to be processed 80 passes is formed in the right side wall 6b.

A bottom wall 6c is arranged at the lower end of the four side walls 6b. In the present embodiment, the bottom wall 6c is a rectangular wall, and a space outside the heat treatment apparatus 1 exists below the bottom wall 6c. The distance from the ground on which the heat treatment apparatus 1 is installed to the bottom wall 6c is longer than the total length of the object to be processed 80. A square columnar space is formed in the purge chamber 6 by the top wall 6a, the four side walls 6b, and the bottom wall 6c. The bottom wall 6c has a transport port 12 for transporting the object to be processed 80. The transport port 12 forms a passage through which the object to be processed 80 is taken in and out of the purge chamber 6, and faces downward. The transport port 12 is formed in a size capable of passing through the object to be processed 80 to be heat-treated by the heat treatment apparatus 1. The object to be processed 80 that has passed through the transport port 12 passes through the purge chamber 6. A variable opening area 7 is installed in the transport port 12.

The variable opening area 7 is configured so that the opening area of the transport port 12 can be changed. In the present embodiment, the configuration in which the opening area variable portion 7 includes the diaphragm mechanism 13 described later will be described as an example, but this may not be the case. The variable opening area 7 may have a configuration in which the opening area of the transport port 12 can be changed, and may be, for example, a mechanism including a shutter that linearly moves in a direction parallel to the bottom wall 6c. Further, since the variable opening area portion 7 is omitted, the transport port 12 may be fully opened at all times.

The variable aperture area 7 includes a diaphragm mechanism 13 and a diaphragm mechanism actuator 14.

The diaphragm mechanism 13 has an annular case 15, a shutter 17 including a plurality of blades 16 supported by the case 15, and an operating lever 18 for displacing the plurality of blades 16.

The case 15 is fixed to, for example, the peripheral edge of the transport port 12 on the bottom wall 6c. The plurality of blades 16 work together to cover at least a part of the opening inside the case 15. The operating lever 18 is supported by the case 15 and is connected to each blade 16 via a link mechanism (not shown). When the operation lever 18 linearly moves in a predetermined operation direction A1 in a plan view, for example, the plurality of blades 16 move. As a result, the degree to which the plurality of blades 16 cover the opening inside the case 15, that is, the degree to which the shutter 17 covers the transport port 12, changes. As a result, the opening area of the transport port 12 changes. The portion surrounded by the inner peripheral end portion 17a of the shutter 17 is the portion of the transport port 12 that is open. Further, the drawing mechanism 13 changes the opening area of the region surrounded by the drawing mechanism 13 (inner peripheral end portion 17a) around the center 12a of the transport port 12. Since the configuration of the throttle mechanism 13 is known, detailed description of the configuration for connecting the operation lever 18 and the blade 16 and the like will be omitted.

The throttle mechanism actuator 14 is provided to set the opening area (area surrounded by the inner peripheral end portion 17a) of the transport port 12 by moving the operation lever 18 of the throttle mechanism 13 in the operation direction A1. There is. The throttle mechanism actuator 14 may have a configuration in which the operating lever 18 can be operated in the operating direction A1, and the specific configuration is not limited. In the present embodiment, the throttle mechanism actuator 14 is formed by using a linear actuator such as a solenoid or a screw mechanism with an electric motor.

The throttle mechanism actuator 14 has a housing 14a fixed to the bottom wall 6c, and a rod 14b movably supported by the housing 14a in the operation direction A1 and connected to the operation lever 18. The throttle mechanism actuator 14 operates the operation lever 18 by arranging the rod 14b at a position corresponding to the power supplied to the throttle mechanism actuator 14, and as a result, sets the opening area of the transport port 12. ..

The purge gas supply unit 8 is configured to supply the purge gas into the purge chamber 6 in order to fill the purge chamber 6 with the purge gas. In the present embodiment, the purge gas supply unit 8 supplies nitrogen gas as the purge gas as described above.

The purge gas supply unit 8 includes a first purge gas nozzle 21, a second purge gas nozzle 22, and a purge gas on-off valve 23.

The first purge gas nozzle 21 is a nozzle for filling the purge chamber 6 with the purge gas, and has a nozzle supply port toward the center of the purge chamber 6, for example. The first purge gas nozzle 21 is connected to a purge gas supply source 25 such as a purge gas tank via a purge gas on-off valve 23. The purge gas on-off valve 23 is, for example, an electric valve such as a solenoid valve, and opens and closes by being given a control signal.

The second purge gas nozzle 22 supplies purge gas as a seal gas in order to prevent air outside the heat treatment apparatus 1 from entering the purge chamber 6 through the transport port 12. The second purge gas nozzle 22 is arranged around the transport port 12, and in the present embodiment, the second purge gas nozzle 22 is attached to, for example, one blade 16 of the throttle mechanism 13 in the purge chamber 6. The second purge gas nozzle 22 faces the tip end side (inner peripheral end portion 17a side) of the blade 16 and blows purge gas toward the transport port 12 (toward the inner peripheral end portion 17a).

As described above, the opening area variable portion 7 including the blade 16 changes the opening area of the transport port 12 by operating the operating lever 18. During this opening area changing operation, the tip position of the blade 16 also changes. That is, the position of the second purge gas nozzle 22 also changes. Therefore, the variable opening area portion 7 is also a nozzle position variable portion 24 capable of changing the position of the injection port of the second purge gas nozzle 22 with respect to the transport port 12. The second purge gas nozzle 22 is connected to the purge gas supply source 25 via a flexible flexible tube and a purge gas on-off valve 23. The position of the injection port of the second purge gas nozzle 22 may be fixed by installing the second purge gas nozzle 22 in the case 15 or the like of the throttle mechanism 13.

The purge gas sensor 9 is a sensor that detects the concentration of purge gas in the purge chamber 6 and the pressure (atmospheric pressure) in the purge chamber 6. The purge gas sensor 9 is installed in the purge chamber 6 and outputs a detection signal according to the concentration of the purge gas in the purge chamber 6 and the pressure in the purge chamber 6.

The reading unit 10 is installed on the lower surface of, for example, the bottom wall 6c of the purge chamber 6 so as to read the information associated with the object to be processed 80 located outside the purge chamber 6 (outside the heat treatment apparatus 1). It is configured. The reading unit 10 is a member including an image sensor such as a CCD (Charge Coupled Device) camera, and generates image data indicating the read image. The object to be processed 80 is formed with an information display unit 81 that indicates information about the object to be processed 80, such as a two-dimensional bar code. The information display unit 81 may have a structure in which information is displayed on a sticker or the like and may be attached to the surface of the object to be processed 80, or may be directly printed or stamped on the surface of the object to be processed 80. It may be formed by. The reading unit 10 reads the information display unit 81 of the object to be processed 80 conveyed to the heat treatment apparatus 1 to generate image data that identifies the information display unit 81. The reading unit 10 may have a configuration capable of reading the information display unit 81, and the specific installation location is not limited. The reading unit 10 may be installed in, for example, the heat treatment chamber 31 described later.

Next, the configuration of the heat treatment module 3 will be described.

The heat treatment module 3 performs heat treatment including heat treatment and cooling treatment on the object to be processed 80 that has passed through the purge chamber 6 and reached the heat treatment chamber 31 described later. In this embodiment, the heat treatment module 3 is arranged on the right side of the purge module 2.

The heat treatment module 3 includes a heat treatment chamber 31, a heat treatment gas supply unit 32 as a second atmosphere gas supply unit, a heat treatment gas sensor 33, an induction heating coil 34, a coil positioning mechanism 35, a cooling tank 36, and a cooling pump 37. And have.

The heat treatment chamber 31 has a top wall 31a, a plurality of side walls 31b, and a bottom wall 31c.

The top wall 31a is provided as the ceiling of the heat treatment chamber 31. In the present embodiment, the top wall 31a is a rectangular wall. Side walls 31b extend downward from each of the four sides of the top wall 31a. The side wall 31b is formed in a rectangular shape in the present embodiment. In FIG. 1, the left side wall 31b, the rear side wall 31b, and the right side wall 31b are shown, and the front side wall 31b is not shown. The left side wall 31b is also a partition wall arranged between the space in the heat treatment chamber 31 and the space in the purge chamber 6. An opening 11 for the object to be processed 80 to pass through is formed at the upper end of the left side wall 31b. In the present embodiment, the upper half of the left side wall 31b is also the right side wall 6b.

The lower end of each side wall 31b of the heat treatment chamber 31 is located near the ground on which the heat treatment apparatus 1 is installed, and is located below the lower end position of the side wall 6b of the purge chamber 6. A bottom wall 31c is arranged at the lower end of the four side walls 31b. The bottom wall 31c is a rectangular wall in this embodiment. A square columnar space is formed in the heat treatment chamber 31 by the top wall 31a, the four side walls 31b, and the bottom wall 31c. The upper half of the heat treatment chamber 31 is aligned with the purge chamber 6 in the left-right direction X, and forms a heating chamber 38 for heating the object to be processed 80. Further, the lower half portion of the heat treatment chamber 31 is arranged at a height position lower than the height position of the purge chamber 6, and forms a cooling chamber 39 for cooling the object to be processed 80.

The heat treatment gas supply unit 32 is provided to supply the heat treatment gas into the heat treatment chamber 31. Examples of the heat treatment gas include an inert gas such as nitrogen and a combustible gas such as methane gas and propane gas.

The heat treatment gas supply unit 32 includes a heat treatment gas nozzle 41 and a heat treatment gas on-off valve 42.

The heat treatment gas nozzle 41 is a nozzle for filling the heat treatment chamber 31, particularly the heating chamber 38 with the heat treatment gas, and is installed in the heating chamber 38. The heat treatment gas nozzle 41 is arranged near, for example, the induction heating coil 34. The heat treatment gas nozzle 41 is connected to a heat treatment gas supply source 26 such as a tank via a heat treatment gas on-off valve 42. The heat-treated gas on-off valve 42 is, for example, an electric valve such as a solenoid valve, and opens and closes by being given a control signal.

The heat treatment gas sensor 33 is a sensor that detects the concentration of the heat treatment gas in the heating chamber 38. The heat treatment gas sensor 33 is installed in the heating chamber 38, and outputs a detection signal according to the concentration of the heat treatment gas in the heating chamber 38.

The induction heating coil 34 heats the object to be processed 80 by inductively heating the object to be processed 80 conveyed to the heating chamber 38. The induction heating coil 34 is arranged on the right side of the opening 11 in the heating chamber 38. The induction heating coil 34 has a movable structure, and is configured so that it can be optimally arranged according to the shape of the object to be processed 80 and the like.

FIG. 4 is a perspective view of the induction heating coil 34 and the object to be processed 80. FIG. 5 is a cross-sectional view of each of the first split coil 100 and the second split coil 200 of the induction heating coil 34, showing a state of being cut in a cross section orthogonal to the front-rear direction Y, and the first split coil 100 is One is shown, and the second split coil 200 shows two identical configurations for the sake of explanation. FIG. 6 is a diagram showing a state in which the first divided coil 100 and the second divided coil 200 of the induction heating coil 34 are superposed. FIG. 7A is a plan view of the induction heating coil 34 and the object to be processed 80, showing a state in which the object to be processed 80 is induced to be heated. FIG. 7B is a plan view of the induction heating coil 34 and the object to be processed 80, showing a state when the object to be processed 80 is being conveyed. In addition, in FIGS. 4 to 7B, only a part of the elements in the heat treatment apparatus 1 are shown, and some of the elements are omitted.

With reference to FIGS. 1, 3, 4, 7 (A) and 7 (B), the induction heating coil 34 is a pair of split coils 100, 200 arranged apart from each other in a predetermined facing direction B1. And the first terminal lines 101R, 101L for one dividing coil 100, and the second terminal lines 201R, 201L for the other dividing coil 200.

The facing direction B1 is the front-rear direction Y in the present embodiment, and is orthogonal to the left-right direction X, which is the transport direction when the object to be processed 80 is transported between the heating chamber 38 and the purge chamber 6.

The split coils 100 and 200 do not have portions that are in direct contact with each other. The first split coil 100 and the second split coil 200 can move independently of each other in the heat treatment chamber 31 in the opposite direction B1. Each of the divided coils 100 and 200 is formed by using a metal material having excellent conductivity such as copper. A space S1 for arranging the object to be processed is formed between the pair of split coils 100 and 200 in the opposite direction B1 to induce and heat the object to be processed 80. The length (width) of the object to be processed space S1 in the facing direction B1 is shortened when the object to be processed 80 is induced and heated, and is lengthened when the object to be processed 80 is conveyed. With this configuration, the object to be processed 80 can be heated efficiently, and the object to be processed 80 can be conveyed more quickly.

In this embodiment, the divided coils 100 and 200 are formed vertically. More specifically, the longitudinal direction D1 along the vertical direction Z is defined, and the lateral direction D2 along the horizontal direction X is defined. In this way, the divided coils 100 and 200 are arranged so as to extend along the longitudinal direction D1 and the lateral direction D2 that are orthogonal to each other when viewed from the facing direction B1. In each of the divided coils 100 and 200, the length in the longitudinal direction D1 is set to be longer than the length in the lateral direction D2. The longitudinal direction D1 does not have to be along the vertical direction Z, and similarly, the lateral direction D2 does not have to be along the horizontal direction X. For example, the longitudinal direction D1 may be along the left-right direction X, and the lateral direction D2 may be along the vertical direction Z.

A pair of first terminal lines 101R and 101L are continuous with the first divided coil 100. The pair of first terminal lines 101R and 101L extend rearward in the heating chamber 38 toward, for example, the rear side wall 31b along the opposite direction B1, and for example, the pair of flexible electric wires 58, respectively. It is connected to 58 and is electrically connected to the high frequency power supply circuit 43 via these pairs of electric wires 58 and 58. Similar to the first split coil 100, the second split coil 200 has a pair of terminal lines 201R and 201L continuous. The pair of terminal wires 201R and 201L extend in the heating chamber 38, for example, along the facing direction B1 toward the side wall 31b on the front side (the back side of the facing direction B1), and for example, a pair of flexible terminals, respectively. It is connected to the electric wires 59 and 59, and is electrically connected to the high frequency power supply circuit 43 via the pair of electric wires 59 and 59.

A detailed description of the split coils 100 and 200 will be described later.

The relative positions of the first split coil 100 and the second split coil 200 in the opposite direction B1 are defined by the coil positioning mechanism 35.

The coil positioning mechanism 35 can change the relative positions of the pair of split coils 100 and 200 in the facing direction B1. In the present embodiment, the coil positioning mechanism 35 moves the pair of split coils 100, 200 relative to each other while arranging the pair of split coils 100, 200 parallel to the left-right direction X. In the present embodiment, the coil positioning mechanism 35 will be described by taking a slide-type positioning mechanism as an example, but this may not be the case. For example, as the coil positioning mechanism, a positioning mechanism other than the slide type may be used.

The coil positioning mechanism 35 includes a first positioning actuator 45 for the first split coil 100 and a second positioning actuator 50 for the second split coil 200.

The first positioning actuator 45 movably supports the first split coil 100 in the opposite direction B1. The first positioning actuator 45 is, for example, a rail 46 fixed to the heating chamber 38 and extending in the opposite direction B1, and a slider 47 mounted on the rail 46 and to which the first terminal lines 101R and 101L of the first dividing coil 100 are fixed. It also has a first positioning actuator motor 48 as a power source, and a motion conversion mechanism (not shown) that converts the power of the motor 48 into linear motion of the slider 47 on the rail 46. Then, the slider 47 slides on the rail 46 by the power of the motor 48 for the first positioning actuator, so that the first split coil 100 moves in the opposite direction B1.

The second positioning actuator 50 movably supports the second split coil 200 in the opposite direction B1. The second positioning actuator 50 includes, for example, a rail 51 fixed to the heating chamber 38 and extending in the opposite direction B1, a slider 52 mounted on the rail 51 and fixed with terminal lines 201R and 201L of the second split coil 200. It has a second positioning actuator motor 53 as a power source, and a motion conversion mechanism (not shown) that converts the power of the motor 53 into a linear motion of the slider 52 on the rail 51. Then, the slider 52 slides on the rail 51 by the power of the motor 53 for the second positioning actuator, so that the second split coil 200 moves in the opposite direction B1.

The first positioning actuator 45 and the second positioning actuator 50 may support the corresponding split coils 100 and 200 so as to be movable in the opposite direction B1, and the specific configuration is not limited.

Instead of the motors 48 and 53 for the positioning actuators, an electromagnetic solenoid or the like that changes the position of the rod according to the applied electric power may be used. In this case, the sliders 47 and 52 are fixed to the rod.

One motor (drive source) may be used instead of the two actuator motors 48 and 53 (drive source). As such an actuator, an actuator including a rack and pinion mechanism and an electric motor can be exemplified. Actuators including a rack and pinion mechanism include, for example, a rack gear fixed to a slider 47 and extending in an opposing direction B1, a rack gear fixed to a slider 52 and extending in an opposing direction B1, a pinion gear that meshes with these rack gears, and the like. It has an electric motor that drives the pinion gear to rotate.

A cooling tank 36 is installed below the induction heating coil 34.

The cooling tank 36 is provided to cool the object to be processed 80, which is induced to be heated by the induction heating coil 34. The cooling tank 36 is arranged below the object to be arranged space S1 in the cooling chamber 39. In the present embodiment, the cooling tank 36 is fixed to the bottom wall 31c of the cooling chamber 39. The cooling tank 36 is formed in a tubular shape (for example, a cylindrical shape) extending upward from the bottom wall 31c toward the object arrangement space S1. The opening at the upper end of the cooling tank 36 is open upward and has a size capable of passing the object to be processed 80 moving along the vertical direction Z. In the present embodiment, the cooling tank 36 has a height capable of accommodating the entire object to be processed 80.

The cooling tank 36 is connected to a cooling pump 37 for supplying a refrigerant via a pipe, and the refrigerant supplied from the cooling pump 37 to the cooling tank 36 passes through the cooling tank 36. In the present embodiment, the refrigerant flows from the lower side to the upper side of the cooling tank 36. In this embodiment, water is used as the refrigerant. The refrigerant may be a liquid refrigerant other than water such as oil, or a gaseous refrigerant such as nitrogen gas. The refrigerant injected upward in the cooling tank 36 by the cooling pump 37 is blown out to the outside of the cooling tank 36 and discharged to the outside of the cooling tank 36 in the cooling chamber 39. The refrigerant discharged to the outside of the cooling tank 36 is discharged to the outside of the cooling chamber 39 through a drain port (not shown).

Next, the configuration of the transport mechanism 4 will be described.

With reference to FIG. 1, the transport mechanism 4 transports the object to be processed 80 from the outside of the heat treatment apparatus 1 in the order of the purge module 2, the object arrangement space S1 of the heat treatment module 3, and the cooling tank 36, and then the cooling tank. 36, the object to be processed space S1, the purge module 2, and the outside of the heat treatment apparatus 1 are provided in this order.

The transport mechanism 4 includes a horizontal movement mechanism 61, a vertical movement mechanism 62 supported by the horizontal movement mechanism 61, a rotation mechanism 63 supported by the vertical movement mechanism 62, and a work holder 64 supported by the rotation mechanism 63. It has a holder actuator 65 for operating the object to be processed 80 by the work holder 64.

The horizontal movement mechanism 61 is provided to move the object to be processed 80 in the horizontal direction, more specifically, in the left-right direction X. The horizontal movement mechanism 61 has, for example, a rail 66 extending in the left-right direction X and an actuator 67 (horizontal movement member) for the horizontal movement mechanism installed on the rail 66. The rail 66 extends horizontally over the heating chamber 38 of the purge chamber 6 and the heat treatment chamber 31 and is fixed to the purge chamber 6 and the heating chamber 38. The actuator 67 for a horizontal movement mechanism includes, for example, an electric motor and a tire that is connected to an output shaft of the electric motor so as to be able to transmit power and can rotate on a rail 66. When the tire is rotated by the electric motor, the actuator 67 for the horizontal movement mechanism moves linearly on the rail. The horizontal movement mechanism 61 may have a movable member that can move horizontally, and the specific configuration is not limited. The actuator 67 for the horizontal movement mechanism supports the vertical movement mechanism 62, and is configured to move integrally with the horizontal movement mechanism 61 in the left-right direction X.

The vertical movement mechanism 62 is provided to move the object to be processed 80 in the vertical direction Z. The vertical movement mechanism 62 has, for example, an actuator 68 (elevating member) for the vertical movement mechanism attached to the actuator 67 for the horizontal movement mechanism. The actuator 68 for the vertical movement mechanism is, for example, a ball screw mechanism, and is connected to the motor 69 for the vertical movement mechanism supported by the actuator 67 for the horizontal movement mechanism and the output shaft of the motor 69 for the vertical movement mechanism so as to be able to transmit power. It has a nut member (not shown) and a screw shaft 70 that linearly moves in the vertical direction Z due to the rotation of the nut member. The screw shaft 70 supports a rotation mechanism 63, and moves integrally with the rotation mechanism 63 in the vertical direction Z. The actuator 68 for the vertical movement mechanism may have a movable element that can move vertically, and the specific configuration is not limited. For example, the actuator 68 for a vertical movement mechanism includes an electric motor supported by the actuator 67 for a horizontal movement mechanism, a pinion attached to an output shaft of the electric motor, and a rack that meshes with the pinion and extends in the vertical direction Z. You may. In this case, the rotation mechanism 63 is attached to the rack.

The rotation mechanism 63 rotates the object to be processed 80 around an axis extending in the vertical direction Z during induction heating of the object to be processed 80 to obtain a temperature distribution of the object to be processed 80 in the circumferential direction of the object to be processed 80. It is provided for equalization.

The rotation mechanism 63 has, for example, a rotation mechanism motor 71 attached to the screw shaft 70 of the vertical movement mechanism actuator 68, and a rotation member 72. The casing of the rotary mechanism motor 71 is fixed to the screw shaft 70. A rotating member 72 is connected to the output shaft of the rotating mechanism motor 71 so as to be able to transmit power. When the rotating member 72 is rotated by the drive of the motor 71 for the rotating mechanism, the rotating member 72 rotates around the vertical axis extending in the vertical direction Z. The rotation mechanism 63 may have a rotating element capable of rotating the object to be processed 80 in the circumferential direction of the object to be processed 80, and the specific configuration is not limited. The rotating member 72 supports the work holder 64 via the holder actuator 65, and is configured to rotate integrally with the work holder 64 around the vertical axis.

The work holder 64 is provided to hold the object to be processed 80. In the present embodiment, the work holder 64 holds the object to be processed 80 by grasping the object to be processed 80. The work holder 64 may have a structure that can hold the object to be processed 80 in the heat treatment apparatus 1, and the specific structure is not limited. At least a part of the work holder 64 is placed in a magnetic field generated by the induction heating coil 34 during induction heating of the object to be processed 80 by the induction heating coil 34. Therefore, the work holder 64 is preferably made of a material having weak magnetism.

The work holder 64 has a plurality of arms 73 for holding the object to be processed 80. In this embodiment, two arms 73 are provided, and are configured to cooperate with each other to grip the object to be processed 80. Each arm 73 is formed in an elongated shape. The work holder 64 is supported by the holder actuator 65.

The holder actuator 65 is provided to move the plurality of arms 73 in a direction closer to each other and in a direction away from each other. The holder actuator 65 may have a configuration in which a plurality of arms 73 can be moved in a direction close to each other and a direction away from each other, and the specific configuration is not limited. The holder actuator 65 is, for example, a rack and pinion mechanism, in which an electric motor supported by a rotating member 72, a pinion connected to the output shaft of the electric motor so as to be able to transmit power, and mesh with the pinion in the left-right direction X. It has two racks that extend. The racks are arranged so as to face each other in the vertical direction Z with the pinion in between, and move in opposite directions as the pinion rotates. One arm 73 is fixed to one rack, and the other arm 73 is fixed to the other rack. With this configuration, when the electric motor of the holder actuator 65 rotates in one direction, the pair of arms 73, 73 approach each other. Further, when the electric motor of the holder actuator 65 rotates to the other side, the pair of arms 73 and 73 move away from each other.

The operations of the purge module 2, the heat treatment module 3, and the transport mechanism 4 having the above configuration are controlled by the control device 5. FIG. 8 is a block diagram showing a configuration related to control of the heat treatment apparatus 1.

With reference to FIGS. 1, 2, 7 (A) and 8, the control device 5 is formed by using a PLC (Programmable Logic Controller) or the like. The control device 5 may be formed by using a computer including a CPU (Central Processing Unit), a ROM (Read Only Memory), and a RAM (Random Access Memory), or includes an FPGA (Field Programmable Gate Array). It may be configured or may be formed by using a sequence circuit or the like. The control device 5 is connected to a plurality of connection targets.

Regarding the relationship between the control device 5 and the purge module 2, the control device 5 electrically connects the reading unit 10 of the purge module 2, the purge gas on-off valve 23, the throttle mechanism actuator 14, and the purge gas sensor 9. It is connected.

Regarding the relationship between the control device 5 and the heat treatment module 3, the control device 5 includes the heat treatment gas sensor 33 of the heat treatment module 3, the heat treatment gas on-off valve 42, and the two positioning actuator motors 48 and 53 of the coil positioning mechanism 35. , The high frequency power supply circuit 43 for the induction heating coil 34 and the cooling pump 37 are electrically connected to each other.

Regarding the relationship between the control device 5 and the transfer mechanism 4, the control device 5 includes an actuator 67 for the horizontal movement mechanism of the transfer mechanism 4, a motor 69 for the vertical movement mechanism, a motor 71 for the rotation mechanism, and a holder actuator 65. Is electrically connected to.

The control device 5 has an identification unit 55 and a control unit 56.

In the present embodiment, the identification unit 55 and the control unit 56 are programmatically realized by the processor reading the program stored in the memory.

The identification unit 55 identifies information about the object to be processed 80 by using the image data generated by the reading unit 10. As the information to be identified by the identification unit 55, the shape, dimensions, and material of the object to be processed 80 can be exemplified. The identification unit 55 may receive information about the object to be processed 80 from a communication device (not shown).

The control unit 56 controls the operation of the heat treatment device 1 in the purge module 2, the operation of the heat treatment device 1 in the heat treatment module 3, and the operation of the heat treatment device 1 in the transfer mechanism 4.

<Example of control of purge module 2 by control unit 56>
The control unit 56 operates the throttle mechanism actuator 14 of the variable opening area 7 so that the opening area of the transport port 12 becomes the minimum (for example, zero) when the object 80 to be processed does not pass through the transport port 12. .. Further, the control unit 56 controls the throttle mechanism actuator 14 to operate the throttle mechanism actuator 14 to displace the operation lever 18 of the throttle mechanism 13 in the operation direction A1 by a predetermined amount. This predetermined amount is set by the control unit 56 by calculation. With this configuration, the control unit 56 sets the opening area of the transport port 12 by the throttle mechanism 13. In the present embodiment, when the object to be processed 80 passes through the transport port 12, the control unit 56 is based on the information about the object to be processed 80 identified by the identification unit 55, particularly the size information of the object to be processed 80. By operating the throttle mechanism actuator 14, the position of the operation lever 18 of the throttle mechanism 13 of the opening area variable portion 7 is set. As a result, the control unit 56 sets the opening area of the transport port 12. In the present embodiment, the control unit 56 is used for the drawing mechanism so that the gap between the object to be processed 80 and the inner peripheral end portion 17a of the drawing mechanism 13 is minimized, for example, the gap is several mm or less. Controls the actuator 14. Further, the control unit 56 controls the throttle mechanism actuator 14 so that the transport port 12 is closed by the throttle mechanism 13 except when the object to be processed 80 passes through the transport port 12.

The control unit 56 controls the opening / closing operation of the purge gas on-off valve 23. Specifically, the control unit 56 is configured to output a control signal for opening and closing the purge gas on-off valve 23. When the control unit 56 heat-treats the object to be processed 80, for example, at least one of the concentration of the purge gas detected by the purge gas sensor 9 and the pressure in the purge chamber 6 becomes less than a predetermined threshold value, or When the throttle mechanism 13 is opened for the object to be processed 80 to pass through the transport port 12, a control signal is output so as to open the purge gas on-off valve 23. As a result, the concentration of the purge gas in the purge chamber 6 increases due to the purge gas from the first purge gas nozzle 21 of the purge gas supply unit 8. Further, the purge gas from the second purge gas nozzle 22 supplies the seal gas around the transport port 12, and the intrusion of outside air into the purge chamber 6 is suppressed. On the other hand, for example, when the concentration of the purge gas is equal to or higher than a predetermined threshold value and the throttle mechanism 13 is closed, the control unit 56 outputs a control signal so as to close the purge gas on-off valve 23.

<Control of the heat treatment module 3 by the control unit 56>
The control unit 56 controls the operation of the positioning actuator motors 48 and 53 of the coil positioning mechanism 35. Specifically, the control unit 56 drives the positioning actuator motors 48 and 53 based on the information about the object to be processed 80 identified by the identification unit 55, particularly the size information of the object to be processed 80. As a result, the relative position of the induction heating coil 34 in the opposite direction B1 between the first divided coil 100 and the second divided coil 200, that is, the width of the object to be processed space S1 is set. In the facing direction B1, the width of the object to be processed space S1 is set to be, for example, about several mm so that the gap between the object to be processed 80 and the divided coils 100 and 200 is minimized. .. Further, in the present embodiment, the control unit 56 has a positioning actuator motor 48, so that when the object to be processed 80 moves in the heat treatment chamber 31, a transfer space S2 that allows the object to be processed 80 to be conveyed is formed. The positioning actuator motors 48 and 53 may be operated so that the transfer space S2 is closed while the object to be processed 80 is being heat-treated by operating the 53.

The control unit 56 controls the opening / closing operation of the heat treatment gas on-off valve 42 of the heat treatment module 3. Specifically, the control unit 56 is configured to output a control signal for opening and closing the heat treatment gas on-off valve 42. The control unit 56 outputs a control signal so as to open the heat treatment gas on-off valve 42 when the object to be processed 80 arranged in the object to be processed space S1 is induced and heated, for example. As a result, the heat treatment gas from the heat treatment gas nozzle 41 of the heat treatment gas supply unit 32 is supplied from the inside of the heat treatment chamber 31. The control unit 56 may set a target value of the concentration of the heat treatment gas in the heating chamber 38 based on the information about the object to be processed 80 identified by the identification unit 55, for example, the material of the object to be processed 80. In this case, the control unit 56 controls the opening degree of the heat treatment gas on-off valve 42 so that the concentration of the heat treatment gas detected by the heat treatment gas sensor 33 becomes the above target value. When the object to be processed 80 is not induced to be heated, the control unit 56 outputs a control signal so as to close the heat treatment gas on-off valve 42.

The control unit 56 controls the operation of the high frequency power supply circuit 43 for the induction heating coil 34. Specifically, after the object to be processed 80 is arranged in the object to be processed space S1 and the pair of split coils 100 and 200 are arranged at positions for inducing and heating the object to be processed 80, the control unit 56 Outputs a command signal to the high-frequency power supply circuit 43, and outputs AC power from the high-frequency power supply circuit 43 to the divided coils 100 and 200. As a result, the induction heating coil 34 performs induction heating of the object to be processed 80. The control unit 56 outputs the voltage, current, frequency, and power of the high-frequency power supply circuit 43 based on the information about the object to be processed 80 identified by the identification unit 55, for example, the size and material of the object to be processed 80. The output time (heating time) and the like may be set. In this case, the control unit 56 controls the output of the high frequency power supply circuit 43 so as to output the set power.

The control unit 56 controls the operation of the cooling pump 37. Specifically, when the object to be processed 80 is arranged in the cooling tank 36, the control unit 56 drives the cooling pump 37. As a result, the cooling pump 37 injects the refrigerant (cooling water) from the lower side to the upper side of the cooling tank 36. As a result, the object to be processed 80 is rapidly cooled. The control unit 56 may set the drive time of the cooling pump 37 based on the information about the object to be processed 80 identified by the identification unit 55, for example, the size and material of the object to be processed 80. In this case, the control unit 56 drives the cooling pump 37 so that the refrigerant passes through the cooling tank 36 and is supplied to the object to be processed 80 for a set time.

<Control of the transport mechanism 4 by the control unit 56>
The control unit 56 controls the operation of the actuator 67 for the horizontal movement mechanism. Specifically, the control unit 56 drives the horizontal movement mechanism actuator 67 by outputting a command signal to the horizontal movement mechanism actuator 67. As a result, the actuator 67 for the horizontal movement mechanism, the vertical movement mechanism 62, the rotation mechanism 63, the work holder 64, and the holder actuator 65 supported by the actuator 67 for the horizontal movement mechanism are placed in the purge chamber 6 and the heat treatment chamber 31. It moves in the left-right direction X as the transport direction.

The control unit 56 controls the operation of the actuator 68 for the vertical movement mechanism. Specifically, the control unit 56 drives the screw shaft 70 of the vertical movement mechanism actuator 68 in the vertical direction Z by outputting a command signal to the vertical movement mechanism motor 69 of the vertical movement mechanism actuator 68. .. As a result, the rotation mechanism 63, the work holder 64, and the holder actuator 65 move in the vertical direction Z.

The control unit 56 controls the operation of the rotation mechanism 63. Specifically, the control unit 56 rotates the rotating member 72 of the rotating mechanism motor 71 by outputting a command signal to the rotating mechanism motor 71. As a result, the holder actuator 65, the work holder 64, and the object to be processed 80 held by the work holder 64 rotate.

The control unit 56 controls the operation of the arm 73 of the work holder 64 by controlling the operation of the holder actuator 65. Specifically, the control unit 56 drives the holder actuator 65 by outputting a command signal to the holder actuator 65. As a result, the holder actuator 65 changes the distance between the two arms 73 and 73, and causes the arms 73 and 73 to grip and release the object to be processed 80.

The above is the description of the control of the individual members by the control unit 56. Next, a series of flows when the object to be treated 80 is heat-treated will be described.

<Example of heat treatment operation of the object to be processed 80 by the heat treatment apparatus 1>
Next, an example of the heat treatment operation of the object to be processed 80 by the heat treatment apparatus 1 will be described. When the heat treatment apparatus 1 heat-treats the object to be processed 80 with reference to FIGS. 2 and 9 (A), the control unit 56 is first described in the object to be processed 80 previously arranged below the transport port 12. The information display unit 81 is read by the reading unit 10. Then, the identification unit 55 identifies information about the object to be processed 80 based on the image data generated by reading, and outputs this identification information to the control unit 56. The control unit 56 opens the transport port 12 by a predetermined amount by driving the throttle mechanism actuator 14. The opening amount of the transport port 12 at this time is set according to the dimensions of the object to be processed 80 specified by the identification information, and is, for example, the minimum value necessary for the object to be processed 80 to pass through the transfer port 12. Is set to. Further, the control unit 56 arranges the arm 73 above the transport port 12 by driving the actuator 67 for the horizontal movement mechanism. Next, the control unit 56 lowers the arm 73 to the object to be processed 80 arranged below the transport port 12 by driving the actuator 68 for the vertical movement mechanism. Next, the control unit 56 moves the arm 73 by driving the holder actuator 65, and causes the arm 73 to grasp the object to be processed 80.

With reference to FIGS. 2 and 9B, the control unit 56 then lifts the object to be processed 80 into the purge chamber 6 by driving the actuator 68 for the translation mechanism. After the object to be processed 80 is lifted into the purge chamber 6, the control unit 56 closes the shutter 17 (conveyor port 12) by driving the actuator 14 for the throttle mechanism.

While the transport mechanism 4 is operating, the control unit 56 controls the purge gas supply unit 8 by controlling the opening degree of the purge gas on-off valve 23 so that the concentration of the purge gas in the purge chamber 6 becomes a predetermined value. ..

After the object to be processed 80 is carried into the purge chamber 6 from below the purge chamber 6, the control unit 56 drives the actuator 67 for the horizontal movement mechanism to move the object to be processed 80 from the purge chamber 6 to FIG. 7. As shown in (B) and FIG. 10 (A), it is conveyed to the heating chamber 38 of the heat treatment chamber 31. At this time, the object to be processed 80 is moved between the pair of divided coils 100 and 200 of the induction heating coil 34 (object arrangement space S1) by only horizontally moving to the right without moving vertically from the purge chamber 6. Be placed. Further, the control unit 56 drives the positioning mechanism actuator motors 48 and 53 by driving the coil positioning mechanism 35 according to the dimensions of the object to be processed 80 identified by the identification unit 55, and a pair of split coils. The distance between 100 and 200 is set.

The control unit 56 sets the distance between the pair of split coils 100 and 200 to be processed so that the transfer space S2 is formed while the object to be processed 80 is transported from the purge chamber 6 to the object to be processed space S1. It is larger than the size of 80. After the object to be processed 80 reaches the object to be processed space S1, the control unit 56 brings the pair of split coils 100 and 200 close to each other so that the transport space S2 is closed, as shown in FIG. 7A. As described above, the motors 48 and 53 for the first and second positioning actuators are driven. While the transport mechanism 4 is operating, the control unit 56 controls the heat treatment gas supply unit 32 so that the concentration of the heat treatment gas in the heat treatment chamber 31 becomes a predetermined value.

The control unit 56 controls the high-frequency power supply circuit 43 in a state where the object to be processed 80 is arranged between the pair of split coils 100 and 200. As a result, AC power having a predetermined current value, voltage value, and frequency is supplied to the pair of split coils 100 and 200, and the object to be processed 80 is induced and heated. While the object to be processed 80 is induced to be heated, the control unit 56 drives the rotation mechanism 63 to rotate the rotating member 72 at a predetermined rotation speed, and causes the object to be processed 80 to rotate along the central axis of the object to be processed 80. Rotate around. As a result, the object to be processed 80 is uniformly heated in the circumferential direction of the object to be processed 80. After the induction heating of the object to be processed 80 is performed for a predetermined time, the control unit 56 controls the high frequency power supply circuit 43 to stop the power supply to the induction heating coil 34 and also controls the rotation mechanism 63. Stops the rotation of the rotating member 72.

After the induction heating by the induction heating coil 34 is stopped, the control unit 56 lowers the arm 73 by driving the actuator 68 for the vertical movement mechanism, and as shown in FIG. 10B, the object to be processed 80 Is conveyed into the cooling tank 36 of the cooling chamber 39. When the object to be processed 80 is arranged in the cooling tank 36, the control unit 56 cools the object to be processed by driving the cooling pump 37 at a predetermined timing based on the information obtained from the identification information of the object to be processed 80. The tank 36 is filled with a refrigerant to cool the object to be processed 80.

When the cooling of the object to be processed 80 is completed, the control unit 56 carries the object to be processed 80 out of the heat treatment apparatus 1. Specifically, the control unit 56 drives the actuator 68 for the vertical movement mechanism to move the object to be processed 80 from the cooling chamber 39 to the pair of split coils of the heating chamber 38 as shown in FIG. 10 (A). Raise it to between 100 and 200. Next, the control unit 56 drives the motors 48 and 53 for the first and second positioning actuators to change the state shown in FIG. 7A to the state shown in FIG. 7B, and the pair of split coils 100. , 200 are displaced. As a result, the object to be processed 80 is in a state where it can pass through the transport space S2. The interval between the divided coils 100 and 200 may be widened immediately after the induction heating by the induction heating coil 34. Next, the control unit 56 drives the actuator 67 for the horizontal movement mechanism to convey the object to be processed 80 to directly above the transfer port 12 in the purge chamber 6, as shown in FIG. 9B. With reference to FIGS. 2 and 9B, the control unit 56 then drives the throttle mechanism actuator 14 to open the shutter 17 of the diaphragm mechanism 13 by a predetermined amount. Next, the control unit 56 drives the actuator 68 for the vertical movement mechanism to carry the object to be processed 80 from the purge chamber 6 to the outside of the heat treatment apparatus 1 through the transfer port 12, as shown in FIG. 9A. .. After that, the control unit 56 releases the holding of the object to be processed 80 by the arm 73 by driving the holder actuator 65. As a result, the object to be processed 80 is delivered to a holder or the like arranged in advance around the object to be processed 80. The above is an example of heat treatment of the object to be processed 80 by the heat treatment apparatus 1.

As described above, according to the present embodiment, the heat treatment apparatus 1 is provided with the opening area variable portion 7. As a result, the opening area of the transport port 12 when the object to be processed 80 passes can be set to the minimum amount required for the object to be processed 80 to pass through. Therefore, the amount of purge gas leaking from the transport port 12 can be reduced. As a result, the amount of outside air such as air entering from the transport port 12 can be reduced, so that the time required for purging the inside of the purge chamber 6 with the purge gas can be shortened. As a result, the time required to move the object to be processed 80 to the heat treatment chamber 31 after filling the purge chamber 6 with the purge gas can be shortened, so that the time required to convey the object to be processed 80 can be shortened. Therefore, the processing efficiency of the object to be processed 80 can be further improved. Moreover, as described above, the amount of purge gas leaking from the transport port 12 can be reduced, so that the amount of gas used for heat treatment can be reduced.

Further, according to the present embodiment, the identification unit 55 identifies the information related to the object to be processed 80, such as the information represented by the two-dimensional bar code, and the control unit 56 opens based on the information about the object to be processed 80. The area variable portion 7 can be operated to set the opening area of the transport port 12. In this way, using the information about the object to be processed 80, the opening area of the transfer port 12 can be set so as to have the minimum opening area necessary for the object to be processed 80 to pass through the transfer port 12. As a result, the amount of purge gas leaking from the transport port 12 and the amount of outside air entering the purge chamber 6 from the transport port 12 can be reduced more reliably regardless of the shape of the object to be processed 80.

Further, according to the present embodiment, the purge gas supply unit 8 has a nozzle position variable unit 24 capable of changing the position of the injection port of the second purge gas nozzle 22 with respect to the transport port 12. According to this configuration, by injecting the purge gas from the second purge gas nozzle 22, it is possible to prevent outside air such as air from entering the purge chamber 6 when the object to be processed 80 passes through the transport port 12. Further, since the nozzle position variable portion 24 is provided, the position of the injection port of the second purge gas nozzle 22 can be adjusted according to the size of the object to be processed 80. As a result, the effect of suppressing the intrusion of outside air by injecting the purge gas from the second purge gas nozzle 22 can be more reliably exhibited regardless of the size of the object to be processed 80.

Further, according to the present embodiment, the throttle mechanism 13 of the variable opening area 7 changes the opening area of the region surrounded by the throttle mechanism 13 with the center 12a of the transport port 12 as the center. According to this configuration, the center of the opening region of the transport port 12 is constant regardless of the size of the opening area of the transport port 12 set by the variable opening area portion 7. Therefore, the center position of the object to be processed 80 with respect to the transport port 12 can be made constant regardless of the shape of the object to be processed 80. As a result, the transport path of the object to be processed 80 can be made constant regardless of the size of the object to be processed 80.

Further, according to the present embodiment, since the transport port 12 is arranged downward on the bottom wall 6c of the purge chamber 6, foreign matter can be more reliably suppressed from entering the purge chamber 6 from the transport port 12.

Further, according to the present embodiment, by setting the interval between the pair of divided coils 100 and 200 to a sufficiently wide value by the coil positioning mechanism 35, the object to be processed 80 is passed between the locations where the interval is wide (transport space S2). Can be transported. As a result, the object to be processed 80 is moved by a short distance in the lateral direction D2 orthogonal to the axial direction D3 of the induction heating coil 34, so that the object to be processed 80 is placed in the space for arranging the object to be processed between the pair of divided coils 100 and 200. It can be taken in and out of S1. Therefore, regardless of the total length of the induction heating coil 34 (the length of the pair of split coils 100 and 200 in the axial direction D3) and the total length of the object to be processed 80, the object to be processed 80 is carried into the induction heating coil 34. And the moving distance of the object to be processed 80 at the time of carrying out can be shortened. Therefore, the time required for taking in and out the object to be processed 80 with respect to the induction heating coil 34 for the induction heating treatment can be shortened. As a result, the time required for the induction heat treatment of one object to be treated 80 can be shortened. As described above, the productivity of the object to be processed 80 can be improved by improving the transport process of the object to be processed 80. That is, the number of objects to be processed 80 that can be heated by the induction heating coil 34 can be increased per unit time, and the productivity of heat treatment by the induction heating coil 34 can be further increased. Further, by providing the coil positioning mechanism 35, the relative positions of the object to be processed 80 and the divided coils 100 and 200 can be changed. As a result, the divided coils 100 and 200 can be arranged at more optimum positions with respect to the object to be processed 80 according to the type of heat treatment and the heating conditions. As a result, the object to be treated 80 can be induced and heated under more optimum conditions.

Further, according to the present embodiment, the coil positioning mechanism 35 moves the pair of split coils 100, 200 relative to each other while arranging the pair of split coils 100, 200 in parallel along the left-right direction X. According to this configuration, a pair of split coils 100 and 200 can be arranged at suitable locations for the objects to be processed 80 having different sizes and shapes. As a result, a plurality of types of objects to be processed 80 can be induced and heated by the same induction heating coil 34 without replacing the induction heating coil 34 for each shape of the object to be processed 80. Therefore, the efficiency of the work of heat-treating the object to be processed 80 can be further increased.

As described above, since it is not necessary to replace the induction heating coil 34 for each shape of the object to be processed 80, the storage space and storage cost of the induction heating coil when not used in the heat treatment apparatus are not required, and the object to be processed 80 is not required to be stored. Can be more productive.

Further, for example, an eccentric movable coil is known in which the position of an induction heating coil with respect to an object to be processed is changed by rotating a spiral coil around an eccentric axis parallel to the central axis of the coil. However, with this eccentric movable coil, the distance between the object to be processed and the coil becomes non-uniform at each part in the circumferential direction of the object to be processed. Therefore, the heating efficiency of the object to be treated is low. On the other hand, in the present embodiment, since the induction heating coil 34 is not eccentrically arranged with respect to the object to be processed 80, the above-mentioned problem of deterioration of heating efficiency does not occur.

Further, according to the present embodiment, the control unit 56 operates the coil positioning mechanism 35 based on the information about the object to be processed 80 identified by the identification unit 55 to determine the relative positions of the pair of split coils 100 and 200. Set. According to this configuration, the identification unit 55 identifies information about the object to be processed 80, such as information represented by a two-dimensional bar code, and the control unit 56 determines the coil positioning mechanism 35 based on the information about the object to be processed 80. Can be operated to set the relative positions of the pair of split coils 100 and 200. In this way, the pair of split coils 100 and 200 can be arranged at positions more suitable for the object to be processed 80 by using the information about the object to be processed 80. As a result, the induction heating coil 34 can induce and heat the object to be processed more efficiently.

<Detailed configuration of induction heating coil>
Next, a more detailed configuration of the induction heating coil 34 will be described.

With reference to FIGS. 4 to 7 (B), the induction heating coil 34 is formed in a curved shape so as to surround the object to be processed 80 in a plan view seen from the vertical direction Z (viewed in the longitudinal direction D1). Has been done. In a plan view, the first split coil 100 is formed by an arcuate portion 100a having a center of curvature arranged on the second split coil 200 side (rear side). Further, in a plan view, the second split coil 200 is formed by an arc-shaped portion 200a having a center of curvature arranged on the first split coil 100 side (front side). With this configuration, in a plan view, the first divided coil 100 and the second divided coil 200 are formed in a substantially elliptical shape surrounding the object to be processed 80 arranged in the object to be processed space S1 as a whole.

In the present embodiment, the first split coil 100 and the second split coil 200 are set to have the same dimensions in the longitudinal direction D1 and the same dimensions in the lateral direction D2, and are further opposed to each other. The dimensions (thickness) of the direction B1 are set to be the same. Further, the diameter and material of the conductors constituting the first divided coil 100 and the diameter and material of the conductors constituting the second divided coil 200 are the same. In the present embodiment, the pair of split coils 100 and 200 are described by taking the shape in which the contents are packed as an example, but this may not be the case. For example, a cooling water passage may be formed inside the pair of split coils 100 and 200.

In the present embodiment, the positions of both ends 100R and 100L of one split coil 100 and the positions of both ends 200R and 200L of the other split coil 200 are shifted in the left-right direction X (short direction D2). There is. Both ends 100R, 100L of one split coil 100 and both ends 200R, 200L of the other split coil 200 are, for example, displaced by about several percent of the dimensions of the split coil 100 (200) in the lateral direction D2. .. Then, a part (most) of the first split coil 100 and a part (most) of the second split coil 200 face each other in the opposite direction B1.

As described above, the relative positions of the pair of split coils 100 and 200 are defined by the coil positioning mechanism 35. Then, in the present embodiment, the coil positioning mechanism 35 is shown in FIG. 7B when the object to be processed 80 is conveyed, particularly in the lateral direction D2 (left-right direction X). As described above, a pair of split coils 100 and 200 are arranged. At this time, the pair of divisions is formed so that the transport space S2 for passing the object to be processed 80 is formed between the end portions 100L and 200L (left end portions) of the pair of division coils 100 and 200 in the lateral direction D2. The coils 100 and 200 are arranged. The transport space S2 is a space that allows transport of the object to be processed 80 along the lateral direction D2. The length of the transport space S2 in the facing direction B1 is set to a value at which the object to be processed 80 can pass. On the other hand, the coil positioning mechanism 35 has a pair of split coils 100 so as to block the transport space S2 as shown in FIG. 7A when the object to be processed 80 is induced heated by the induction heating coil 34. , 200 are arranged.

The induction heating coil 34 has at least a part of the current flow direction in one split coil 100 and the current flow direction in the other split coil 200 when viewed in the opposite direction B1. In particular, in the present embodiment, when viewed in the front-rear direction Y (opposing direction B1), a region in which the direction in which the current flows in the first divided coil 100 and the direction in which the current flows in the second divided coil 200 are aligned is possible. It is configured to be as large as possible.

Specifically, the first split coil 100 and the second split coil 200 are each formed in a spiral shape when viewed from the facing direction B1. When viewed from the rear side in the opposite direction B1, the first split coil 100 has a left-handed spiral shape, and the second split coil 200 has a right-handed spiral shape. In this way, the winding direction of the first divided coil 100 and the winding direction of the second divided coil 200 are opposite to each other.

The first split coil 100 has a portion extending in the longitudinal direction D1 (vertical direction Z) and a portion extending in the lateral direction D2 (horizontal direction X), and the portion extending in the longitudinal direction D1 and the lateral direction D2. The boundary with the extending portion is formed in a smooth curved shape (arc shape). Similarly, the second split coil has a portion extending in the longitudinal direction D1 (vertical direction Z) and a portion extending in the lateral direction D2 (horizontal direction X), and the portion extending in the longitudinal direction D1 and the lateral direction. The boundary with the portion extending to D2 is formed in a smooth curved shape (arc shape).

With reference to FIGS. 4 to 6, the first split coil 100 includes a plurality of first right side tall portions 111 to 114 extending in the longitudinal direction D1 and a plurality of first upper short portions 121 to extending in the lateral direction D2. It has 124, a plurality of first left tall portions 131 to 134 extending in the longitudinal direction D1, and a plurality of first lower short portions 141 to 143 extending in the lateral direction D2.

In the first split coil 100 viewed from the opposite direction B1, the first right-side tall portion 111-114 is provided on the right side portion, the first upper short-length portion 121-124 is provided on the upper portion, and the left side portion is provided. The first left tall portion 131 to 134 is provided in the lower portion, and the first lower lower short portion 141 to 143 is provided in the lower portion. In the present specification, the term "viewed from the opposite direction B1" means a state in which the first split coil 100 is viewed from the front side and the second split coil 200 is viewed from the back side.

From the center side to the outside of the first split coil 100, the first right-side tall portions 111-114 are arranged at equal pitches in this order. The total length is gradually increased in the order of the first right-side tall portion 111, 112, 113, 114. Similarly, the first upper short portions 121 to 124 are arranged at equal pitches in this order from the center side to the outside of the first split coil 100. The total length is gradually increased in the order of the first upper short body portions 121, 122, 123, 124. From the center side to the outside of the first split coil 100, the first left tall portions 131 to 134 are arranged at equal pitches in this order. The total length is gradually increased in the order of the first left tall portion 131, 132, 133. From the center side to the outside of the first split coil 100, the first lower short body portions 141 to 143 are arranged at equal pitches in this order. The total length is gradually increased in the order of the first lower short body portions 141, 142, 143.

The first tall portion 102 is formed by the first right-side tall portion 111-114 and the first left-side tall portion 131-134, and the first upper short portion 121-124 and the first lower short portion 141-143 form the first tall portion 102. The first short body portion 103 is formed. The first tall portion 102 extends parallel to the longitudinal direction D1. The first short body portion 103 is formed in an arc shape in a plan view, and extends in the lateral direction D2.

In the central portion of the first split coil 100, the first right side tall portion 111 is arranged. The lower end of the first right-side tall portion 111 is continuous with one of the first terminal lines 101R. The first split coil 100 includes a first right tall portion 111, a first upper short portion 121, a first left tall portion 131, and a first lower short portion 141 along the spiral direction of the first split coil 100. 1st right side tall part 112, 1st upper short part 122, 1st left side tall part 132, 1st lower short part 142, 1st right side tall part 113, 1st upper short part 123, 1st left side tall part The portions 133, the first lower short portion 143, the first right tall portion 114, the first upper short portion 124, and the first left left tall portion 134 are arranged in this order. The lower end of the first left tall portion 134 is continuous with the other first terminal line 101L. The lower end of the first left tall portion 134 is aligned in height with the lower end of the first right right tall portion 111.

With the above configuration, when a current flows from one first terminal line 101R to the other first terminal line 101L in the first dividing coil 100, the direction of the current in each part of the first dividing coil 100 is shown in FIG. Will be shown. That is, the directions of the currents of the first right-side tall portions 111 to 114 are aligned upward. Further, the directions of the electric currents of the first upper short body portions 121 to 124 are aligned to the left. Further, the directions of the electric currents of the first left tall portion 131 to 134 are aligned downward. Further, the directions of the electric currents of the first lower short body portions 141 to 143 are aligned to the right. With such a configuration, the first split coil 100 is a plurality of parallel portions extending adjacent to each other and extending in parallel in the split coil 100, and a plurality of parallel portions arranged so that the directions of currents are aligned. Is provided.

Specifically, the first right-side tall portions 111-114 form a plurality of first right-side parallel portions 115. Similarly, the first upper short body portions 121 to 124 form a plurality of first upper parallel portions 125. Further, the first left tall portions 131 to 134 form a plurality of first left parallel portions 135. Further, the first lower short body portions 141 to 143 form a plurality of first lower side parallel portions 145.

Seen in the opposite direction B1, the first split coil 100 is provided with a first outer frame portion 104 and a first inner frame portion 105 arranged inside the first outer frame portion 104. The first outer frame portion 104 forms the outermost portion of the first split coil 100 when viewed in the facing direction B1, and in the present embodiment, the first left tall portion 134, the first upper short portion 124, and the first 1 It is formed by the right side tall part 114, the first lower short part 143, and the lower part of the first left side tall part 133. The first inner portion 105 is a portion of the first divided coil 100 other than the first outer frame portion 104. Preferably, at least the first inner portion 105 is provided with the first parallel portions 115, 125, 135, 145 described above, and in the present embodiment, the first outer frame portion 104 is provided in addition to the first inner portion 105. First parallel portions 115, 125, 135, 145 are provided. Further, in the present embodiment, the first split coil 100 is formed in a spiral shape wound from the first outer frame portion 104 toward the center side of the first inner portion 105 when viewed in the facing direction B1.

Next, a more specific configuration of the second split coil 200 will be described.

The second split coil 200 includes a plurality of second right tall portions 211 to 214 extending in the longitudinal direction D1, a plurality of second upper short portions 221 to 224 extending in the lateral direction D2, and a plurality of second upper short portions 221 to 224 extending in the longitudinal direction D1. It has a second left-side tall portion 231 to 234 and a plurality of second lower-side short portions 241 to 243 extending in the lateral direction D2.

In the second split coil 200 viewed from the opposite direction B1, the second right tall portion 211 to 214 is provided on the right side portion, the second upper short body portion 221-224 is provided on the upper portion, and the left side portion is provided. The second left tall portion 231 to 234 is provided in the lower portion, and the second lower lower short portion 241 to 243 is provided in the lower portion.

The second right-side tall portions 211 to 214 are arranged at equal pitches in this order from the center side to the outside of the second split coil 200. The total length is gradually increased in the order of the second right side tall part 211, 212, 213. Similarly, the second upper short body portions 221 to 224 are arranged at equal pitches in this order from the center side to the outside of the second split coil 200. The total length is gradually increased in the order of the second upper short body portion 221,222, 223, 224. The second left tall portions 231 to 234 are arranged at equal pitches in this order from the center side to the outside of the second split coil 200. The total length is gradually increased in the order of the second left tall part 231,232, 233,234. The second lower short body portions 241 to 243 are arranged at equal pitches in this order from the center side to the outside of the second split coil 200. The total length is gradually increased in the order of the second lower short body portion 241, 242, 243.

The second tall portion 202 is formed by the second right tall portions 211 to 214 and the second left left tall portions 231 to 234, and the second upper short portions 221 to 224 and the second lower short portions 241 to 243 form the second tall portion 202. The second short body portion 203 is formed. The second tall portion 202 extends parallel to the longitudinal direction D1. The second short body portion 203 is formed in an arc shape in a plan view and extends in the lateral direction D2.

In the central portion of the second split coil 200, the second left tall portion 231 is arranged. The lower end of the second left tall portion 231 is continuous with the other second terminal line 201L. The second split coil 200 includes a second left tall portion 231 and a second upper short portion 221, a second right tall portion 211, and a second lower short portion 241 along the spiral direction of the second split coil 200. 2nd left side tall part 232, 2nd upper short part 222, 2nd right side tall part 212, 2nd lower side short part 242, 2nd left side tall part 233, 2nd upper short part 223, 2nd right side tall part The parts 213, the second lower short part 243, the second left side tall part 234, the second upper short part 224, and the second right side tall part 214 are arranged in this order. The lower end of the second right tall portion 214 is continuous with one of the second terminal lines 201R. The lower end of the second right-side tall portion 214 is aligned in height with the lower end of the second left-side tall portion 231.

With the above configuration, when a current flows from one second terminal line 201R to the other second terminal line 202L through the second split coil 200, the direction of the current in each part of the second split coil 200 is shown in FIG. Will be shown. That is, the directions of the currents of the second right-side tall portions 211 to 214 are aligned upward. Similarly, the directions of the currents of the second upper short body portions 221 to 224 are aligned to the left. Further, the directions of the electric currents of the second left tall portion 231 to 234 are aligned downward. Further, the directions of the electric currents of the second lower short body portions 241 to 243 are aligned to the right. With such a configuration, the second split coil 200 is a plurality of parallel portions extending adjacent to each other and extending in parallel in the split coil 200, and a plurality of parallel portions arranged so that the directions of currents are aligned. Is provided.

Specifically, the second right-side tall portions 211-214 form a plurality of second right-side parallel portions 215. Similarly, the second upper short body portions 221 to 224 form a plurality of second upper parallel portions 225. The second left-side tall portions 231 to 234 form a plurality of second left-side parallel portions 235. Further, the second lower short body portions 241 to 243 form a plurality of second lower side parallel portions 245.

Seen in the opposite direction B1, the second split coil 200 is provided with a second outer frame portion 204 and a second inner frame portion 205 arranged inside the second outer frame portion 204. The second outer frame portion 204 forms the outermost portion of the second split coil 200 when viewed in the facing direction B1, and in the present embodiment, the second right tall portion 214, the second upper short portion 224, and the second upper short portion 224. 2 It is formed by the left side tall part 234, the second lower side short part 243, and the lower part of the second right side tall part 213. The second inner portion 205 is a portion of the second split coil 200 other than the second outer frame portion 204. Preferably, at least the second inner portion 205 is provided with the above-mentioned second parallel portions 215, 225, 235, 245, and in the present embodiment, the second outer frame portion 204 is provided in addition to the second inner portion 205. A second parallel portion 215, 225, 235, 245 is provided. Further, in the present embodiment, the second split coil 200 is formed in a spiral shape wound from the second outer frame portion 204 toward the center side of the second inner portion 205 when viewed in the facing direction B1.

When the current flow directions in the first split coil 100 are reversed, the current directions shown in FIG. 5 are all opposite. Similarly, when the current flow directions in the second split coil 200 are reversed, the current directions shown in FIG. 5 are all opposite.

Further, in the present embodiment, the current flow direction in the first division coil 100 and the current flow direction in the second division coil 200 are aligned in at least a part of the division coils 100 and 200 when viewed in the opposite direction B1. ing. This specific configuration will be described with reference to the first split coil 100.

In FIG. 6, the first divided coil 100 is shown by a thick solid line, and the second divided coil 200 is shown by a two-dot chain line and a thin line, which are imaginary lines. Further, in FIG. 6, the current flow direction in the first split coil 100 is shown by a thick line portion, and the current flow direction in the second split coil 200 is shown by a thin alternate long and short dash line. Further, the overlapping portions of the first and second divided coils 100 and 200 are shown by cross-hatching. With reference to FIG. 6, when viewed in the opposite direction B1, one first terminal line 101R of the first dividing coil 100 and the other second terminal line 201L of the second dividing coil 200 overlap each other. The first right-side tall portion 111 and the second left-side tall portion 231 have the same length in the longitudinal direction D1 and are overlapped with each other when viewed in the opposite direction B1. Seen in the opposite direction B1, the first upper short portion 121 straddles the second left left tall portion 231,232.

The entire first left tall portion 131 continuous with the first upper short portion 121 is overlapped with the second left tall portion 232 in the opposite direction B1. Further, the entire first lower short body portion 141 and the entire second lower short body portion 241 are overlapped when viewed in the opposite direction B1. Further, the lower end portion and the intermediate portion of the first right side tall portion 112 are overlapped with each other in the opposite direction B1 to the lower end portion and the intermediate portion of the second right side tall portion 211. Seen in the opposite direction B1, the upper portion of the first right-side tall portion 112 straddles the second right-side tall portion 211 and the second upper short-length portion 222.

When viewed in the opposite direction B1, the right portion and the intermediate portion of the first upper short body portion 122 are overlapped with the second upper short body portion 222. When viewed in the opposite direction B1, the left portion of the first upper short portion 122 straddles the second upper short portion 222 and the second left left tall portion 233. The entire first left tall portion 132 continuous with the first upper short portion 122 is overlapped with the second left tall portion 233 in the opposite direction B1. Further, the entire first lower short body portion 142 and the entire second lower short body portion 242 are overlapped when viewed in the facing direction B1. Further, the lower end portion and the intermediate portion of the first right side tall portion 113 are overlapped with the lower end portion and the intermediate portion of the second right side tall portion 212 in the opposite direction B1. Seen in the opposite direction B1, the upper portion of the first right-side tall portion 113 straddles the second right-side tall portion 212 and the second upper short-length portion 223.

The right portion and the intermediate portion of the first upper short portion 123 continuous with the first right tall portion 113 are overlapped with the second upper short portion 223 when viewed in the opposite direction B1. When viewed in the opposite direction B1, the left portion of the first upper short portion 123 straddles the second upper short portion 223 and the second left left tall portion 234. The entire first left-side tall portion 133 continuous with the first upper short-length portion 123 is overlapped with the intermediate portion and the lower end portion of the second left-side tall portion 234 in the opposite direction B1. Further, the entire first lower short body portion 143 and the entire second lower short body portion 243 are overlapped when viewed in the facing direction B1. Further, the lower end portion and the intermediate portion of the first right side tall portion 114 are overlapped with each other in the opposite direction B1 to the lower end portion and the intermediate portion of the second right side tall portion 213. Seen in the opposite direction B1, the upper portion of the first right-side tall portion 114 straddles the second right-side tall portion 213 and the second upper short-length portion 224.

The right portion and the intermediate portion of the first upper short portion 124 continuous with the first right tall portion 114 are overlapped with the second upper short portion 224 when viewed in the opposite direction B1. When viewed in the opposite direction B1, the left end portion of the first upper short portion 124 and the first left tall portion 134 are arranged on the left side of the second split coil 200 and overlap with the second split coil 200. Not. Further, when viewed in the opposite direction B1, the second right tall portion 214 of the second split coil 200 and the right end portion of the second upper short portion 224 are arranged to the right of the first split coil 100. It does not overlap with the first split coil 100.

With the above configuration, the current flow direction in the first right-side tall portion 111 and the current flow direction in the second left-side tall portion 231 are opposite to each other in the facing direction B1. However, except for these tall portions 111,231, the current flow direction is the same at the portion where the first division coil 100 and the second division coil 200 overlap when viewed in the opposite direction B1. More specifically, when viewed in the opposite direction B1, the current flow direction in the first right-side tall portions 112 to 114 and the current flow direction in the second right-side tall portions 211 to 213 are the same. Further, the current flow direction in the first upper short body portions 122 to 124 and the current flow direction in the second upper short body portions 222 to 224 are the same. Further, the current flow direction in the first left-side tall portion 131 to 133 and the current flow direction in the second left-side tall portion 232 to 234 are the same. Further, the current flow direction in the first lower short body portions 141 to 143 and the current flow direction in the second lower short body portions 241 to 243 are the same. In this way, when viewed in the opposite direction B1, most of the first divided coil 100 and most of the second divided coil 200 are aligned in the current flow direction.

As described above, according to the present embodiment, the induction heating coil 34 has a pair of split coils 100 and 200. The first split coil 100 is provided with a first right parallel portion 115 as a plurality of parallel portions extending adjacent to each other and extending in parallel in the first split coil 100. Further, a first upper parallel portion 125, a first left parallel portion 135, and a first lower parallel portion 145 are provided. Similarly, the second split coil 200 is provided with a second right side parallel portion 215 as a plurality of parallel portions extending adjacent to each other and extending in parallel in the second split coil 200. Further, a second upper parallel portion 225, a second left parallel portion 235, and a second lower parallel portion 245 are provided. According to this configuration, by using the pair of split coils 100 and 200, the induction heating coil 34 can be formed without being limited to the spiral shape extending along the axial direction D3 of the induction heating coil 34. Therefore, the degree of freedom in setting the shape of the induction heating coil 34 can be increased. Further, by aligning the directions of the currents in each of the plurality of parallel portions 115, 125, 135, 145 and 215, 225, 235, 245, the magnetic flux density in the object to be processed space S1 can be further increased. In other words, in each of the plurality of parallel portions 115, 125, 135, 145 and 215, 225, 235, 245, the magnetic flux cancellation between the coils can be suppressed, and as a result, the coil portion that does not contribute to the heating of the object to be processed 80 is further formed. Can be reduced. As a result, the current value of the induction heating coil 34 can be suppressed, so that the heating efficiency of the object to be processed 80 can be further increased. Therefore, since the induction heating coil 34 can sufficiently improve the heating performance of the object to be processed 80, the object to be processed 80 can be sufficiently heated by induction heating.

Further, according to the induction heating coil 34, the object to be processed 80 is placed in the object to be processed space S1 through a gap (convey space S2) between one ends 100L and 200L of the pair of split coils 100 and 200 in the lateral direction D2. You can put it in and out. As a result, the object to be processed 80 does not have to be arranged in the object to be processed space S1 by moving it from the purge chamber 6 in the axial direction D3 of the induction heating coil 34. Therefore, the object to be processed 80 is displaced to the upper side of the induction heating coil 34 along the horizontal direction (first direction), and then displaced in the vertical direction (second direction) along the axial direction D3 of the induction heating coil 34. Therefore, it is not necessary to reach the object arrangement space S1. Therefore, even when the object to be processed 80 is long, the time required for transporting the object to be processed 80 can be shortened. As a result, the number of objects to be processed 80 that can be heated by the induction heating coil 34 can be increased per unit time, and the productivity of heat treatment by the induction heating coil 34 can be further increased. Further, the space for transporting the object to be processed 80 can be reduced. Therefore, when the space of the heating chamber 38 in which the induction heating coil 34 is arranged is used as the atmosphere of the heat treatment gas, the consumption of the heat treatment gas can be reduced. Further, since the space for transporting the object to be processed 80 can be reduced in the heating chamber 38, the heat treatment apparatus 1 can be made compact by making the space above the induction heating coil 34 compact. In particular, the dimension (device height) of the heat treatment apparatus 1 in the axial direction D3 of the induction heating coil 34 can be made smaller.

Further, according to the induction heating coil 34, a plurality of parallel portions 115, 135 and 215, 235 are provided in each of the tall portions 102 and 202 of the split coils 100 and 200, and each of the short portions 103 and 203 is provided with a plurality of parallel portions 115, 135 and 215, 235. A plurality of parallel portions 125, 145 and 225, 245 are provided. According to this configuration, in each of the tall portions 102 and 202 and the short portions 103 and 203, the current running in parallel can be increased to increase the magnetic flux density. As a result, the amount of heat of the object to be processed 80 can be increased.

Further, according to the induction heating coil 34, when viewed in the opposite direction B1, the parallel portions 115, 125, 135, 145 and 215, 225, 235, 245 of the divided coils 100, 200 correspond to the outer frame portions 104, 204. And at least the inner portions 105 and 205 of the inner portions 105 and 205 are provided. According to this configuration, the pair of split coils 100, 200 can generate more magnetic flux at a location closer to the object to be processed 80. Therefore, the amount of heat generated by the object to be processed 80 can be increased.

Further, according to the induction heating coil 34, when viewed in the opposite direction B1, each of the divided coils 100 and 200 is formed in a shape wound from the corresponding outer frame portions 104 and 204 toward the center side of the inner portions 105 and 205. Has been done. By adopting such a coil shape, the parallel portions 115, 125, 135, 145 and 215, 225, 235, 245 can be made into a simple shape.

Further, according to the induction heating coil 34, the divided coils 100 and 200 are provided with arcuate portions 100a and 200a which are arcuate when viewed in the longitudinal direction D1. According to this configuration, the pair of split coils 100 and 200 can be arranged so as to wrap the object to be processed 80. As a result, more of the divided coils 100 and 200 can be arranged close to the object to be processed 80. Therefore, the object to be processed 80 can be heated more efficiently.

Further, according to the induction heating coil 34, the positions of both ends 100R and 100L of the first split coil 100 and the positions of both ends 200R and 200L of the second split coil 200 are shifted in the lateral direction D2. .. Then, the coil positioning mechanism 35 arranges a pair of divided coils 100 and 200 so as to form a transport space S2 between the left end portions 100L and 200L when the object to be processed 80 is transported in the lateral direction D2, and is processed. When the object 80 is induction-heated, a pair of split coils 100 and 200 are arranged so as to block the transport space S2. According to this configuration, when the object to be processed 80 is heated, the heating efficiency of the object to be processed 80 can be further increased by bringing the divided coils 100 and 200 closer to the object to be processed 80. On the other hand, when the object to be processed 80 is conveyed between the heating chamber 38 and the purge chamber 6, the interval between the divided coils 100 and 200 can be made wider so that the divided coils 100 and 200 do not collide with the object to be processed 80. As a result, the object to be processed 80 can be taken in and out by moving the object to be processed 80 by a short distance with respect to the induction heating coil 34, and the amount of heat required for the object to be processed 80 can be secured. Further, by appropriately setting the positions of the divided coils 100 and 200, each of the objects to be processed 80 having different sizes (diameters) can be heated evenly.

Further, according to the induction heating coil 34, when viewed in the opposite direction B1, the current flow direction in the first split coil 100 and the current flow direction in the second split coil 200 are at least a part of the split coils 100 and 200. It is aligned. According to this configuration, the combined vector of the magnetic fluxes that can be generated can be made larger at the locations where the current flow directions of the pair of split coils 100 and 200 are aligned when viewed in the opposite direction B1. As a result, the amount of heat generated by the object to be processed 80 by induction heating can be increased.

In the conventional technique, a single spiral coil is often used as the induction heating coil. This spiral coil has good heating efficiency during induction heating, but the transport direction of the object to be processed with respect to the coil is limited to the axial direction of the coil. For this reason, the structure of the transport device for transporting the object to be processed is largely restricted, the dimensions of the heat treatment device in the axial direction of the coil tend to be large, and the manufacturing cost of the heat treatment device tends to be high. On the other hand, in the present embodiment, as described above, the space required for transporting the object to be processed 80 can be reduced, so that the heat treatment apparatus can be made compact. Further, since the structure of the transport mechanism 4 is less restricted, the configuration of the transport mechanism 4 can be simplified, so that the manufacturing cost of the heat treatment apparatus 1 can be reduced through the reduction of the manufacturing cost of the transport mechanism 4. Further, since the configuration of the transport mechanism 4 can be simplified, the transport mechanism 4 is less likely to break down. In addition, the time and effort required for maintenance of the transport mechanism 4 can be reduced. Therefore, both the initial cost (cost until commercial operation) and the maintenance cost (cost after the start of commercial operation) of the heat treatment apparatus 1 can be reduced.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments. The present invention can be modified in various ways as described in the claims. Hereinafter, configurations different from those of the above-described embodiment will be mainly described, and the same configurations as those of the above-described embodiments will be designated by the same reference numerals and detailed description thereof will be omitted.

<First modification of the configuration of the transport port and throttle mechanism>
In the above-described embodiment, the configuration in which the transport port 12 of the purge module 2 is formed in a round hole shape and the plurality of shutters 17 of the aperture mechanism 13 cooperate to form a circular opening will be described as an example. However, this does not have to be the case. 11 (A) and 11 (B) are plan views of a main part showing a first modification of the configuration of the transport port 12 and the throttle mechanism 13, and FIG. 11 (A) shows the shutter 17 being opened. The state is shown, and FIG. 11B shows a state in which the shutter 17 is almost closed.

With reference to FIGS. 11A and 11B, in this modification, a configuration in which the object to be processed 80 has a polygonal column shape (for example, a square column shape) is shown as an example. Further, in this modification, the transport port 12 has a polygonal shape (for example, a rectangular shape).

The diaphragm mechanism 13 of the opening area variable portion 7 in the modified examples of FIGS. 11A and 11B has a shutter 17 including a plurality of blades 16. For example, n blades 16 are provided when the transport port 12 has an n-sided polygonal shape (n is a positive integer). Each blade 16 is formed in a rectangular flat plate shape, and is arranged along a corresponding side portion of the transport port 12. For example, one throttle mechanism actuator 14 is provided on one blade 16.

The housing 14a of each throttle mechanism actuator 14 is fixed to the bottom wall 6c. One end of the rod 14b of each throttle mechanism actuator 14 is fixed to the corresponding blade 16 via a fixing member such as a pin. Each throttle mechanism actuator 14 displaces the corresponding blade 16 in the direction of closing the transport port 12 and in the direction of opening the transport port 12. In this modification, a plurality (two) of second purge gas nozzles 22 are provided. The two second purge gas nozzles 22 are fixed to separate blades 16.

As shown in FIG. 11B, each throttle mechanism actuator 14 is controlled by the control unit 56 so that an opening having a size corresponding to the size of the object to be processed 80 is formed in the transport port 12. The corresponding blade 16 is moved. As a result, the opening area of the transport port 12 changes. The portion surrounded by the inner peripheral end portion 17a of the shutter 17 is the portion of the transport port 12 that is open. Further, the drawing mechanism 13 changes the opening area of the region surrounded by the drawing mechanism 13 (inner peripheral end portion 17a) around the center 12a of the transport port 12.

<Second modification of the configuration of the transport port and throttle mechanism>
12 (A) and 12 (B) are plan views of a main part showing a second modification of the configuration of the transport port 12 and the throttle mechanism 13, and FIG. 12 (A) shows the shutter 17 being opened. The state is shown, and FIG. 12B shows a state in which the shutter 17 is almost closed.

With reference to FIGS. 12 (A) and 12 (B), in this modified example, a configuration in which the object to be processed 80 has a polygonal column shape (for example, a square column shape) is shown as an example. Further, in this modification, the transport port 12 has a polygonal shape (for example, a rectangular shape).

The diaphragm mechanism 13 of the opening area variable portion 7 in the modified examples of FIGS. 12A and 12B has a shutter 17 including a plurality of blades 16. Two blades 16 are provided. Each blade 16 is formed in an L-shaped flat plate shape. The L-shaped blades 16 are arranged point-symmetrically about the center 12a of the transport port 12. The L-shaped blades 16 are formed in such a size that the transport port 12 is closed in cooperation with each other. An actuator 14 for a diaphragm mechanism is provided on each of the two blades 16.

The housing 14a of each throttle mechanism actuator 14 is fixed to the bottom wall 6c. One end of the rod 14b of each throttle mechanism actuator 14 is fixed to the corresponding blade 16 via a fixing member such as a pin. Each throttle mechanism actuator 14 displaces the corresponding blade 16 in the direction of closing the transport port 12 and in the direction of opening the transport port 12. In this modification, the central axes of the rods 14b of the two throttle mechanism actuators 14 are aligned and pass through the center 12a of the transport port 12. In this modification, a plurality (two) of second purge gas nozzles 22 are provided. The two second purge gas nozzles 22 are fixed to separate blades 16.

As shown in FIG. 12B, each throttle mechanism actuator 14 is controlled by the control unit 56 so that an opening having a size corresponding to the size of the object to be processed 80 is formed in the transport port 12. The corresponding blade 16 is moved. As a result, the opening area of the transport port 12 changes. The portion surrounded by the inner peripheral end portion 17a of the shutter 17 is the portion of the transport port 12 that is open. Further, the drawing mechanism 13 changes the opening area of the region surrounded by the drawing mechanism 13 (inner peripheral end portion 17a) around the center 12a of the transport port 12.

<Other modifications of the arrangement of the transport port and the throttle mechanism>
In the above-described embodiment, a mode in which the transport port 12 and the opening area variable portion 7 are provided on the bottom wall 6c of the purge chamber 6 will be described as an example. However, this does not have to be the case. For example, the transport port 12 and the variable opening area 7 may be provided on the top wall 6a of the purge chamber 6. When the density of the purge gas supplied into the purge chamber 6 is higher than the density of air, the transport port 12 is provided on the top wall 6a of the purge chamber 6, so that the leakage of the purge gas from the transport port 12 can be easily suppressed. The transport port 12 and the variable opening area 7 may be provided on only one of the top wall 6a and the bottom wall 6c of the purge chamber 6, or may be provided on both the top wall 6a and the bottom wall 6c. May be good. Further, the transport port 12 and the variable opening area 7 may be provided on the side wall 6b of the purge chamber 6 facing the outside of the heat treatment apparatus 1.

<Example of deformation of the split coil in the moving direction>
In the above-described embodiment, the configuration in which the divided coils 100 and 200 move along the facing direction B1 has been described. However, this does not have to be the case. For example, as shown in FIG. 13, which is a schematic plan view of a main part for explaining a modification of the split coils 100 and 200 in the moving direction, at least one of the split coils 100 and 200 is different from the facing direction B1. It may be configured to move in different directions.

In a plan view, that is, in the longitudinal direction D1, the facing direction B1 and the lateral direction D2 are defined to be orthogonal to each other. Then, the coil positioning mechanism 35 changes the relative positions of the pair of split coils 100 and 200 along the coil moving direction E1 that intersects both the facing direction B1 and the lateral direction D2 in a plan view. In this modification, the moving direction E1 of the split coils 100 and 200 is set in the range of, for example, several degrees (deg) to 80 degrees with respect to the facing direction B1 in a plan view. The case of an angle of 45 degrees is shown. The configuration for moving the split coils 100 and 200 in the moving direction E1 is realized by aligning the directions of the first and second positioning actuators 45 and 50 of the coil positioning mechanism 35 along the moving direction E1.

According to the above-mentioned modification of the split coils 100 and 200 in the moving direction, the pair of split coils 100 and 200 and the object to be processed 80 can be arranged closer to each other at the time of induction heating.

<First modification of the layout of the induction heating coil>
In the above-described embodiment, a mode in which a pair of split coils 100 and 200 of the induction heating coil 34 is provided as an example has been described. However, this does not have to be the case. For example, with reference to FIG. 14, which shows the main part of the first modification of the layout of the induction heating coil 34, the induction heating coil 34 may have a plurality of sets of divided coils 100, 200; 100, 200. ..

In this modification, the pair of upper split coils 100 and 200 and the pair of lower split coils 100 and 200 are provided so as to line up along the axial direction D3 of the induction heating coil 34.

In this modification, the coil positioning mechanism 35 is installed on the first and second positioning actuators 45 and 50 installed on the pair of upper split coils 100 and 200 and on the pair of split coils 100 and 200 on the lower side. It has first and second positioning actuators 45 and 50.

The control unit 56 independently sets the relative positions of the split coils 100, 200 facing each other for each pair of split coils 100, 200; 100, 200. That is, the control unit 56 separately performs the position control of the pair of upper split coils 100 and 200 and the position control of the pair of lower split coils 100 and 200.

Specifically, the control unit 56 controls the positioning actuators 45, 50; 45, 50 based on the information about the object to be processed 80 identified by the identification unit 55, particularly the size information of the object to be processed 80. .. For example, as shown in FIG. 14, when the diameter of the lower part of the object to be processed 80 is smaller than the diameter of the upper part of the object to be processed 80, the control unit 56 is placed between the pair of lower split coils 100 and 200. The operation of the positioning actuators 45, 50; 45, 50 is controlled so that the distance between the two is smaller than the distance between the pair of upper split coils 100 and 200. As a result, the relative position of the upper first division coil 100 and the second division coil 200 in the opposite direction B1, that is, the width of the object to be processed space S1 is set, and the lower first division coil 100 and the lower first division coil 100 are set. The relative position in the direction B1 facing the second divided coil 200, that is, the width of the object to be processed space S1 is set.

According to this modification, when the shape of the object to be processed 80 differs depending on the position of the induction heating coil 34 in the axial direction D3, a pair of split coils 100, 200; 100, for each portion of the object to be processed 80 having a different outer shape. 200 can be optimally arranged. As a result, even for the object to be processed 80 having a complicated shape, the entire surface of the object to be processed 80 can be heated more evenly without using a dedicated induction heating coil.

<Second modification of the layout of the induction heating coil>
In the above-described embodiment, a mode in which the pair of split coils 100 and 200 of the induction heating coil 34 move horizontally will be described as an example. However, this does not have to be the case. For example, with reference to FIG. 15, which shows the main part of the second modification of the layout of the induction heating coil 34, the coil positioning mechanism 35 uses at least one of the pair of split coils 100 and 200 (both in this modification). The induction heating coil 34 may be operated so as to be tilted with respect to the axial direction D3 (vertical direction).

In this modification, the coil positioning mechanism 35 is installed on the upper side of the pair of split coils 100, 200 and the first and second positioning actuators 45, 50, and on the lower side of the pair of split coils 100, 200. It also has first and second positioning actuators 45 and 50.

The sliders 47, 52 of the upper first and second positioning actuators 45, 50 are connected to the upper parts of the corresponding split coils 100, 200 via spherical joints or joints 91, 92 such as hinges, and correspond to the split coils 100, 200. The upper portions of the coils 100 and 200 are swingably supported around a horizontal axis extending in the left-right direction X. On the other hand, the sliders 47 and 52 of the lower first and second positioning actuators 45 and 50 are connected to the lower parts of the corresponding split coils 100 and 200 via joints 91 and 92 such as spherical joints or hinges. The lower portions of the corresponding split coils 100 and 200 are swingably supported around a horizontal axis extending in the left-right direction X. The joints 91 and 92 may have a configuration in which the corresponding split coils 100 and 200 can be swung around a horizontal axis extending in the left-right direction X, and the specific configuration is not limited.

With the above configuration, the distance between the upper sliders 47 and 52 in the facing direction B1 and the distance between the lower sliders 47 and 52 are made different so that the first split coil 100 is tilted with respect to the axial direction D3. Can be made to. FIG. 15 shows, for example, a state in which the split coils 100 and 200 are tilted so that the distance between the split coils 100 and 200 becomes narrower as the distance advances downward. However, it is not limited to this operation. For example, the split coils 100 and 200 may be tilted so that the distance between the split coils 100 and 200 becomes wider as the distance advances downward.

In this modification, the control unit 56 sets the relative positions of the divided coils 100 and 200 facing each other by controlling the positions of the first divided coil 100 and the second divided coil 200 in a coordinated manner.

Specifically, the control unit 56 positions the upper positioning actuators 45, 50 and the lower side based on the information about the object to be processed 80 identified by the identification unit 55, particularly the size information of the object to be processed 80. Drives the actuators 45 and 50. For example, as shown in FIG. 15, a case where the object to be processed 80 is formed so as to have a tapered shape in which the diameter of the lower part of the object to be processed 80 is smaller than the diameter of the upper part of the object to be processed 80. Let's take an example. In this case, the control unit 56 controls the operations of the upper and lower positioning actuators 45, 50; 45, 50 so that the split coils 100 and 200 are tilted as shown in FIG.

According to this modification, when the object to be processed 80 is arranged between the pair of split coils 100 and 200, the surface portion of the object to be processed 80 that is inclined with respect to the axial direction D3 of the induction heating coil 34 is induced and heated. At the same time, this inclined portion can be induced and heated more evenly. Therefore, the number of types of shapes of the object to be processed 80 that can be induced and heated by the induction heating coil 34 can be increased. That is, the versatility of the induction heating coil 34 can be further increased.

In this modified example, a mode in which both the divided coils 100 and 200 are operated so as to be tilted with respect to the axial direction D3 has been described as an example. However, this does not have to be the case. Only one of the split coils 100 and 200 may be inclined with respect to the axial direction D3.

<First modification of the induction heating coil>
FIG. 16 is a perspective view of the induction heating coil 34A and the object to be processed 80 according to the first modification. FIG. 17A is a cross-sectional view of each of the first split coil 100A and the second split coil 200A of the induction heating coil 34A, and shows a state of being cut in a cross section orthogonal to the front-rear direction Y. FIG. 17B is a diagram showing a state in which the first split coil 100A and the second split coil 200A of the induction heating coil 34A are superposed. In FIG. 17B, the first split coil 100A is shown by a thick solid line, and the second split coil 200A is shown by a thin alternate long and short dash line. Further, in FIG. 17B, the overlapping portions of the divided coils 100A and 200A are shown by cross-hatching.

With reference to FIGS. 16, 17 (A) and 17 (B), the induction heating coil 34A according to the first modification is one turn on the center side of the induction heating coil 34 (see FIG. 4) according to the embodiment. It corresponds to the configuration in which the minute coil is omitted. The induction heating coil 34A has a first split coil 100A and a second split coil 200A.

The first split coil 100A includes a first right side tall part 112 to 114, a first upper short part 122 to 124, a first left side tall part 132 to 134, and a first lower short part 142 and 143. have. One first terminal line 101R is connected to the lower end of the first right side tall portion 112. The other first terminal line 101L is connected to the lower end of the first left tall portion 134. That is, the first split coil 100A includes the first right-side tall portion 111, the first upper-side tall portion 121, the first left-side tall portion 131, and the first lower-side short-length portion 141 from the first split coil 100 shown in FIG. Corresponds to the configuration in which is omitted.

The second split coil 200A includes a second right tall portion 212 to 214, a second upper short portion 222 to 224, a second left left tall portion 232 to 234, and a second lower short portion 242, 243. have. The other second terminal line 201L is connected to the lower end of the second left tall portion 232. One second terminal line 201R is connected to the lower end of the second right side tall portion 214. That is, the second split coil 200A has the second split coil 200 to the second left tall portion 231 and the second upper tall portion 221, the second right tall portion 211, and the second lower short portion 241 from the second split coil 200 shown in FIG. Corresponds to the configuration in which is omitted.

With the above configuration, there is no portion where the current flows in the opposite direction at the overlapping portion of the coils on the center side of the divided coils 100A and 200A when viewed in the opposite direction B1.

Further, in the first divided coil 100A, the coil arrangement density on the first outer frame portion 104 side is higher than the coil arrangement density on the center side of the first inner portion 105. Similarly, in the second split coil 200A, the coil arrangement density on the second outer frame portion 204 side is higher than the coil arrangement density on the center side of the second inner portion 205.

According to the induction heating coil 34A as the first modification of the induction heating coil, the portions where the current directions are opposite to each other can be reduced or eliminated on the center side of the coil inner portions 105 and 205, so that the magnetic fluxes cancel each other out. Can be suppressed. As a result, the heating efficiency of the object to be processed 80 by the induction heating coil 34A can be further increased.

In the induction heating coil 34A, the heating power of the object to be processed 80 can be further increased by increasing the number of turns of the divided coils 100A and 200A. In this case, it is preferable to increase the number of coil turns toward the outside of each of the divided coils 100A and 200A.

<Second modification of the induction heating coil>
FIG. 18A is a perspective view of the induction heating coil 34B and the object to be processed 80 as a second modification of the induction heating coil. FIG. 18B is a plan view of the induction heating coil 34B and the object to be processed 80 of the second modification, showing a state in which the object to be processed 80 is induced to be heated. FIG. 19A is a cross-sectional view of each of the first split coil 100B and the second split coil 200B of the induction heating coil 34B of the second modification, showing a state of being cut in a cross section orthogonal to the front-rear direction Y. There is. FIG. 19B is a diagram showing a state in which the first split coil 100B and the second split coil 200B of the induction heating coil 34B of the second modification are overlapped. In FIG. 19B, the overlapping portions of the first divided coil 100B and the second divided coil 200B are shown by cross-hatching.

With reference to FIGS. 18A to 19B, the difference between the induction heating coil 34B and the induction heating coil 34 is mainly that the first division coil 100B and the second division coil of the induction heating coil 34B are different. The point is that the structure is symmetrical with that of the 200B in the opposite direction B1.

The induction heating coil 34B is formed in a linear shape extending parallel to the left-right direction X in a plan view seen from the vertical direction Z (viewed in the longitudinal direction D1). In this modification, the positions of the ends 100R and 100L of one split coil 100B and the positions of the corresponding ends 200R and 200L of the other split coil 200B are aligned in the left-right direction X (short direction D2). Has been done.

The relative positions of the pair of split coils 100B and 200B are defined by the coil positioning mechanism 35. In the present embodiment, the distance between the pair of split coils 100B and 200B is set to be the same both when the object to be processed 80 is conveyed and when the object to be processed 80 is induced and heated. The distance between the pair of split coils 100B and 200B is set by the control unit 56 according to the dimensions of the object to be processed 80.

In the induction heating coil 34B, the current flow direction in one split coil 100B and the current flow direction in the other split coil 200B are aligned in the entire area of the split coils 100B and 200B when viewed in the opposite direction B1.

Specifically, the first divided coil 100B and the second divided coil 200B are formed in a spiral shape when viewed from the opposite direction B1, and the winding directions of the divided coils 100B and 200B are the same (this deformation). In the example, it is left-handed).

Seen in the opposite direction B1, the first split coil 100B corresponds to a configuration in which the first left tall portion 134 is omitted from the first split coil 100 of the embodiment shown in FIG.

The first split coil 100B includes a plurality of first right-side tall portions 111-114 extending in the longitudinal direction D1, a plurality of first upper short portions 121-124 extending in the lateral direction D2, and a plurality of first upper short portions 121-124 extending in the longitudinal direction D1. It has a first left-side tall portion 131 to 133, and a plurality of first lower-side short portions 141 to 143 extending in the lateral direction D2.

The first tall portion 102 is formed by the first right-side tall portion 111-114 and the first left-side tall portion 131-133, and the first upper short portion 121-124 and the first lower short portion 141-143 form the first tall portion 102. The first short body portion 103 is formed. The first tall portion 102 extends parallel to the longitudinal direction D1. The first short body portion 103 extends in parallel with the short side direction D2. The other first terminal line 101L is continuous with the left end of the first upper short body portion 124.

In this modification, the first right-side tall portions 111-114 form a plurality of first right-side parallel portions 115. Similarly, the first upper short body portions 121 to 124 form a plurality of first upper parallel portions 125. Further, the first left tall portions 131 to 133 form a plurality of first left parallel portions 135. Further, the first lower short body portions 141 to 143 form a plurality of first lower side parallel portions 145.

Next, a more specific configuration of the second split coil 200B will be described.

The second split coil 200B is formed in a shape symmetrical to the first split coil 100B in the direction B1 opposite to the first split coil 100B.

The second split coil 200 includes a plurality of second right tall portions 211 to 214 extending in the longitudinal direction D1, a plurality of second upper short portions 221 to 224 extending in the lateral direction D2, and a plurality of second upper short portions 221 to 224 extending in the longitudinal direction D1. It has a second left-side tall portion 231 to 233 and a plurality of second lower-side short portions 241 to 243 extending in the lateral direction D2.

The second tall portion 202 is formed by the second right tall portions 211 to 214 and the second left left tall portions 231 to 233, and the second upper short portions 221 to 224 and the second lower short portions 241 to 243 form the second tall portion 202. The second short body portion 203 is formed. The second tall portion 202 extends parallel to the longitudinal direction D1. The second short body portion 203 extends in parallel with the short side direction D2.

A second right tall portion 211 is arranged in the central portion of the second split coil 200B. The lower end of the second right-side tall portion 211 is continuous with one of the second terminal lines 201R. The second split coil 200B has a second right tall portion 211, a second upper short portion 221 and a second left left tall portion 231 and a second lower short portion 241 along the spiral direction of the second split coil 200B. 2nd right side tall part 212, 2nd upper short part 222, 2nd left side tall part 232, 2nd lower side short part 242, 2nd right side tall part 213, 2nd upper short part 223, 2nd left side tall part The portions 233, the second lower short portion 243, the second right tall portion 214, and the second upper short portion 224 are arranged in this order. The left end of the second upper tall portion 224 is continuous with the other second terminal line 201L.

In this modification, the second right-side tall portions 211-214 form a plurality of second right-side parallel portions 215. Similarly, the second upper short body portions 221 to 224 form a plurality of second upper parallel portions 225. Further, the second left tall portion 231 to 233 forms a plurality of second left side parallel portions 235. Further, the second lower short body portions 241 to 243 form the second lower parallel portion 245.

When viewed in the opposite direction B1, all of the first divided coil 100B and all of the second divided coil 200B overlap each other.

In each of the divided coils 100B and 200B, the current flow direction when the current is passed from the first terminal lines 101R and 201R is as shown in FIG. 19 (A). As is clear from FIGS. 19 (A) and 19 (B), the current flow direction in the first divided coil 100B and the current flow direction in the first divided coil 100B at an arbitrary portion of the overlapping portion of the divided coils 100B and 200B seen in the opposite direction B1. , The current flow direction in the second split coil 200B is the same.

When the current flow directions in the first split coil 100B are reversed, the current directions shown in FIG. 19A are all opposite. Similarly, when the current flow directions in the second split coil 200 are reversed, the current directions shown in FIG. 19A are all opposite.

Also in this modified example, the object to be processed 80 can be efficiently induced and heated by the induction heating coil 34B.

Although not shown, a part of the coil on the center side of the induction heating coil 34B may be omitted. As a result, in each of the divided coils 100B and 200B, the coil arrangement density on the outer frame portion side can be made higher than the coil arrangement density on the center side of the inner portion.

<Third modification of the induction heating coil>
FIG. 20 is a perspective view of the induction heating coil 34C and the object to be processed 80 as a third modification of the induction heating coil. FIG. 21 is a plan view of the induction heating coil 34C and the object to be processed 80 of the third modification. With reference to FIGS. 20 and 21, the induction heating coil 34C has a configuration in which the center of the induction heating coil 34C is hollow and the coils are arranged so as to overlap each other in the facing direction B1 in the outer frame portion. Have.

The induction heating coil 34C has a first split coil 100C and a second split coil 200C.

The relative positions of the pair of split coils 100C and 200C are defined by the coil positioning mechanism 35. In this modification, the distance between the pair of split coils 100C and 200C is set to be the same both when the object to be processed 80 is conveyed and when the object to be processed 80 is induced and heated. A transport space S2 that allows transport of the object to be processed 80 in the lateral direction D2 is formed between the left end portions 100L and 200L of the pair of split coils 100C and 200C in the lateral direction D2. The distance between the pair of split coils 100C and 200C is set by driving the coil positioning mechanism 35 by the control unit 56 according to the dimensions of the object to be processed 80.

In the induction heating coil 34C, when viewed in the opposite direction B1, the current flow direction in one split coil 100C and the current flow direction in the other split coil 200C are aligned in the entire range of the split coils 100C and 200C. ..

In this modification, the first split coil 100C and the second split coil 200C have a configuration symmetrical to the facing direction B1. Therefore, the diameter and material of the conductors constituting the first divided coil 100C and the diameter and material of the conductors constituting the second divided coil 200C are the same. Further, when viewed in the opposite direction B1, the entire first divided coil 100C and the entire second divided coil 200C are configured to overlap each other. Specifically, the first split coil 100C and the second split coil 200C are each formed in a spiral shape with the facing direction B1 as the axial direction.

The first split coil 100C has a portion extending in the longitudinal direction D1 (vertical direction Z) and a portion extending in the lateral direction D2 (horizontal direction X), and has a portion extending in the longitudinal direction D1 and a portion extending in the lateral direction D2. The boundary with the extending portion is formed in a smooth curved shape (arc shape). Similarly, the second split coil 200C has a portion extending in the longitudinal direction D1 (vertical direction Z) and a portion extending in the lateral direction D2 (horizontal direction X), and the portion extending in the longitudinal direction D1 and the lateral direction D1. The boundary with the portion extending in the direction D2 is formed in a smooth curved shape (arc shape).

The first divided coil 100C includes a front coil 151, an intermediate coil 152, a rear coil 153, and connecting portions 154 and 155 that connect coils arranged in the opposite direction B1.

The front coil 151 is a coil arranged at a position closest to the object to be processed 80 in the facing direction B1. The rear coil 153 is a coil arranged at the position farthest from the object to be processed 80 in the facing direction B1. The intermediate coil 152 is a coil arranged between the front coil 151 and the rear coil 153 in the opposite direction B1.

The coils 151, 152, and 153 are formed in an annular shape, and in this modification, they are formed in a rectangular shape when viewed in the facing direction B1. The coils 151, 152, and 153 are arranged at equal pitches in the opposite direction B1. When viewed in the opposite direction B1, the divided coils 151, 152, and 153 are formed in the same shape. It is preferable that the object to be processed 80 is arranged in the region surrounded by the outer shell lines of the coils 151, 152, 153 in the facing direction B1.

The front coil 151 includes a first right tall portion 111C extending in the longitudinal direction D1, a first upper short portion 121C extending in the lateral direction D2, a first left tall portion 131C extending in the longitudinal direction D1, and a lateral direction D2. It has a first lower short body portion 141C extending to.

The first right-side tall portion 111C has a structure divided into two, and has an upper portion 156 and a lower portion 157 arranged in a state of being separated in the longitudinal direction D1. In this modification, the upper portion 156 and the lower portion 157 are formed to have substantially the same length in the longitudinal direction D1. One of the first terminal lines 101R is continuous at the lower end of the upper portion 156 of the first right side tall portion 111C. In this modification, the first terminal lines 101R and 101L are formed in, for example, an L shape in a plan view, are supported by the slider 57 of the coil positioning mechanism 35, and are supported by the high frequency power supply circuit 43 (this modification). Is not shown) and is electrically connected. When viewed from the rear of the first split coil 100C, the upper part 156 of the first right side tall part 111C, the first upper short part 121C, the first left side tall part 131C, the first lower short part 141C, and the first right side. The lower portion 157 of the tall portion 111C is arranged in order along the counterclockwise direction. A connecting portion 154 is continuous with the upper end of the lower portion 157 of the first right side tall portion 111C.

The connecting portion 154 extends obliquely upward from the lower portion 157 of the first right-side tall portion 111C. The intermediate coil 152 is continuous with the connection portion 154.

The intermediate coil 152 includes a first right tall portion 112C extending in the longitudinal direction D1, a first upper short portion 122C extending in the lateral direction D2, a first left tall portion 132C extending in the longitudinal direction D1, and a lateral direction D2. It has a first lower short body portion 142C that extends to.

The rear coil 153 includes a first right tall portion 113C extending in the longitudinal direction D1, a first upper short portion 123C extending in the lateral direction D2, and a first left tall portion 133C extending in the longitudinal direction D1. It has a first lower short body portion 143C extending to D2.

The first right side tall part 112C, the first upper short part 122C, the first left side tall part 132C, the first lower side short part 142C in the intermediate coil 152, and the first right side tall part 113C in the rear coil 153. 1 Upper short body portion 123C, 1st left side tall part 133C, 1st lower side short body part 143C correspond to 1st right side tall part 111C, 1st upper short part 121C, 1st left side tall part 131C, respectively. Since it is formed in the same shape as the first lower short body portion 141C, detailed description thereof will be omitted.

The connecting portion 154 extends from the front coil 151 and is continuous with the lower end of the upper portion 156 of the first right side tall portion 112C in the intermediate coil 152. The connecting portion 155 is formed in the same shape as the connecting portion 154. The connection portion 155 connects the lower portion 157 of the first right side tall portion 112C of the intermediate coil 152 and the upper portion 156 of the first right side tall portion 113C of the rear coil 153. The upper end of the lower portion 157 of the first right-side tall portion 113C in the rear coil 153 is continuous with the other first terminal line 101L.

The first right tall portion 111C to 113C and the first left left tall portion 131C to 133C form the first tall portion 102C, and the first upper short portion 121C to 123C and the first lower short portion 141C to 143C form the first tall portion 102C. The first short body portion 103C is formed.

The first tall portion 102C extends parallel to the longitudinal direction D1. The first short body portion 103C extends in parallel with the short side direction D2.

With the above configuration, when a current flows from one first terminal line 101R to the other first terminal line 101L through the first split coil 100C, the direction of the current in each part of the first split coil 100 is shown in FIG. As shown, it becomes a left-handed spiral. As a result, the directions of the currents of the first right-side tall portions 111C to 113C are aligned upward. Further, the directions of the currents of the first upper short body portions 121C to 123C are aligned to the left. Further, the directions of the currents of the first left tall portion 131C to 133C are aligned downward. Further, the directions of the currents of the first lower short body portions 141C to 143C are aligned to the right. With such a configuration, the first split coil 100C is a plurality of parallel portions extending adjacent to each other and extending in parallel in the split coil 100C, and a plurality of parallel portions arranged so that the directions of currents are aligned. Is provided.

Specifically, the first right-side tall portions 111C to 113C form a plurality of first right-side parallel portions 115C arranged in the opposite direction B1. Similarly, the first upper short body portions 121C to 123C form a plurality of first upper parallel portions 125C arranged in the opposite direction B1. Further, the first left side tall portions 131C to 133C form a plurality of first left side parallel portions 135C arranged in the opposite direction B1. Further, the first lower short body portions 141C to 143C form the first lower parallel portion 145C arranged in the opposite direction B1.

Further, each of the coils 151, 152, and 153 is formed as an outer frame portion 104C, and the inside of the outer frame portion 104C is formed in a cavity.

Next, a more specific configuration of the second split coil 200C will be described. However, the second split coil 200C has a configuration symmetrical to the first split coil 100C in the opposite direction B1. Therefore, a part of the description of the second split coil 200C will be replaced with the description of the first split coil 100C, and the detailed description of the second split coil 200C will be omitted.

The second split coil 200C includes a front coil 251, an intermediate coil 252, a rear coil 253, and connecting portions 254 and 255 for connecting the coils arranged in the opposite direction B1.

The front coil 251 is a coil arranged at a position closest to the object to be processed 80 in the facing direction B1. The rear coil 253 is a coil arranged at the position farthest from the object to be processed 80 in the facing direction B1. The intermediate coil 252 is a coil arranged between the front coil 251 and the rear coil 253 in the facing direction B1.

The front coil 251 includes a second right tall portion 211C extending in the longitudinal direction D1, a second upper short portion 221C extending in the lateral direction D2, a second left tall portion 231C extending in the longitudinal direction D1, and a short direction D2. It has a second lower short body portion 241C extending to.

The second right-side tall portion 211C has an upper portion 256 and a lower portion 257 arranged below the upper portion 256. One second terminal line 201R is continuous at the lower end of the upper 256 of the second right side tall portion 211C. Each of the second terminal lines 201R and 201L is formed in, for example, an L shape in a plan view, is supported by the slider 52 of the coil positioning mechanism 35, and is a high-frequency power supply circuit 43 (not shown in this modification). Is electrically connected to.

The intermediate coil 252 includes a second right tall portion 212C extending in the longitudinal direction D1, a second upper short portion 222C extending in the lateral direction D2, a second left tall portion 232C extending in the longitudinal direction D1, and a short direction D2. It has a second lower short body portion 242C extending to.

The rear coil 253 includes a second right tall portion 213C extending in the longitudinal direction D1, a second upper short portion 223C extending in the lateral direction D2, a second left tall portion 233C extending in the longitudinal direction D1, and the lateral direction. It has a second lower short body portion 243C extending to D2.

The upper end of the lower portion 257 of the second right tall portion 213C in the rear coil 253 is continuous with the other second terminal line 201L.

The second tall portion 202C is formed by the second right tall portions 211C to 213C and the second left left tall portions 231C to 233C, and the second upper short portions 221C to 223C and the second lower short portions 241C to 243C form the second tall portion 202C. The second short body portion 203C is formed.

With the above configuration, when a current flows from one second terminal line 201R to the other second terminal line 201L through the second split coil 200C, the direction of the current in each part of the second split coil 200 is shown in FIG. As shown, it becomes a left-handed spiral. As a result, the directions of the currents of the second right-side tall portions 211C to 213C are aligned upward. Further, the directions of the currents of the second upper short body portions 221C to 223C are aligned to the left. Further, the directions of the currents of the second left tall portion 231C to 233C are aligned downward. Further, the directions of the currents of the second lower short body portions 241C to 243C are aligned to the right. With such a configuration, the second split coil 200C has a plurality of parallel portions extending adjacent to each other and extending in parallel in the split coil 200C, and a plurality of parallel portions arranged so that the directions of currents are aligned. Is provided.

Specifically, the second right-side tall portions 211C to 213C form a plurality of second right-side parallel portions 215C arranged in the opposite direction B1. Similarly, the second upper short body portions 221C to 223C form a plurality of second upper parallel portions 225C arranged in the opposite direction B1. Further, the second left side tall portions 231C to 233C form a plurality of second left side parallel portions 235C arranged in the opposite direction B1. Further, the second lower short body portions 241C to 243C form the second lower parallel portion 245C arranged in the opposite direction B1.

Each coil 251, 252, 253 is formed as an outer frame portion 204C, and the inside of the outer frame portion 204C is formed in a cavity.

In this modification, the first and second divided coils 100C and 200C have been described as an example in which one intermediate coil 152 and 252 are provided, respectively, but this may not be the case. In the first and second divided coils 100C and 200C, two or more intermediate coils 152 and 252 may be provided, respectively. In this case, the intermediate coils 152 and 152 adjacent to the opposite direction B1 are connected to each other by the same connection portion as the connection portion 154, and the intermediate coils 252 and 252 adjacent to the opposite direction B1 are connected to each other by the same connection portion as the connection portion 254. It is connected by the part.

As described above, according to the present modification, the induction heating coil 34C has a pair of split coils 100C and 200C. The first split coil 100C is provided with a first right parallel portion 115C as a plurality of parallel portions extending adjacent to each other and extending in parallel in the first split coil 100C. Further, a first upper parallel portion 125C, a first left parallel portion 135C, and a first lower parallel portion 145C are provided. Similarly, the second split coil 200C is provided with a second right side parallel portion 215C as a plurality of parallel portions extending adjacent to each other and extending in parallel in the second split coil 200. Further, a second upper parallel portion 225C, a second left parallel portion 235C, and a second lower parallel portion 245C are provided. According to this configuration, by using the pair of split coils 100C and 200C, the induction heating coil 34C can be formed without being limited to the spiral shape extending along the axial direction D3 of the induction heating coil 34C. Therefore, the degree of freedom in setting the shape of the induction heating coil 34C can be increased. Further, by aligning the directions of the currents in each of the plurality of parallel portions 115C, 125C, 135C, 145C and 215C, 225C, 235C, and 245C, the magnetic flux density in the object to be processed space S1 can be further increased. In other words, in each of the plurality of parallel portions 115C, 125C, 135C, 145C and 215C, 225C, 235C, 245C, the magnetic flux cancellation between the coils can be suppressed, and as a result, the coil portion that does not contribute to the heating of the object 80 to be processed is further increased. Can be reduced. As a result, the current value of the induction heating coil 34C can be suppressed, so that the heating efficiency of the object to be processed 80 can be further increased. Therefore, since the induction heating coil 34C can sufficiently enhance the heating performance of the object to be processed 80, the object to be processed 80 can be sufficiently heated by induction heating.

Further, according to this modification, in each of the divided coils 100C and 200C, the plurality of parallel portions 115C, 125C, 135C, 145C and 215C, 225C, 235C and 245C are arranged side by side in the opposite direction B1. According to this configuration, in the pair of split coils 100C and 200C, the directions of the currents in the parallel portions 115C, 125C, 135C, 145C and 215C, 225C, 235C and 245C arranged in the opposite direction B1 can be aligned. As a result, the magnetic flux generated by the induction heating coil 34C can be increased. Therefore, the amount of heat generated by the object to be processed 80 due to induction heating can be increased.

Further, according to this modification, the split coils 100C and 200C are formed with a cavity inside the outer frame portions 104C and 204C when viewed in the facing direction B1. According to this configuration, it is not necessary to form a coil portion in which the current is in the opposite direction inside the outer frame portions 104C and 204C. Therefore, it is possible to suppress the phenomenon that the magnetic fluxes cancel each other out in the pair of split coils 100C and 200C.

In the above embodiment and each modification, the embodiment in which each divided coil of the induction heating coil is rectangular when viewed in the facing direction B1 has been described as an example. However, this does not have to be the case. For example, each divided coil of the induction heating coil may have a polygonal shape other than a rectangular shape when viewed in the facing direction B1, or may have a circular shape, a spiral circular shape, or the like.

A spiral-shaped induction heating coil extending along the axial direction of the induction heating coil was prepared, and a configuration in which a rod-shaped object to be processed was induced and heated in a space surrounded by the spiral-shaped coil was used as a reference example. Further, the induction heating coil 34 of the embodiment shown in FIG. 4, the induction heating coil 34B according to the second modification shown in FIG. 18 (A), and the induction heating coil 34C according to the third modification shown in FIG. 20 Prepared. Then, the configuration in which the object to be treated is induced and heated by each of the induction heating coils 34, 34B, and 34C is set to Examples 1, 2, and 3, respectively.

In addition, both Reference Example and Examples 1 to 3 were carried out by calculation by modeling using a computer (Computer Aided Engineering). The heating conditions in Reference Examples and Examples 1 to 3 are points other than the shape of the coil, such as the same power supply conditions such as oscillation frequency, current, and voltage to the coil, and the same configuration of the object to be processed. Was used as a common experimental condition.

The calorific value of the object to be processed is shown in FIG. FIG. 22 is a graph showing a reference example and the experimental results of Examples 1 to 3. The vertical axis of the graph of FIG. 22 shows the calorific value (wattage) as a ratio. As is clear from FIG. 22, in each of Examples 1 to 3, about 50% of the calorific value of the object to be treated in the reference example was secured, demonstrating that it is sufficiently practical.

The present invention can be widely applied as a heat treatment apparatus.

1 Heat treatment device 34, 34A, 34B, 34C Induction heating coil 35 Positioning mechanism 55 Identification unit 56 Control unit 100, 100A, 100B, 100C First division coil (one division coil)
200, 200A, 200B, 200C 2nd split coil (the other split coil)
80 Object to be processed B1 Opposing direction D3 Axial direction of induction heating coil S1 Object arrangement space to be processed

Claims (5)

A pair of split coils arranged apart from each other in a predetermined facing direction, forming a space for arranging the object to be processed for inducing heating the object to be processed between the pair of the divided coils in the facing direction. Induction heating coil, including split coil,
A positioning mechanism that can change the relative position of the pair of split coils in the opposite direction,
Equipped with a heat treatment device. The heat treatment apparatus according to claim 1.
The positioning mechanism is a heat treatment apparatus that moves the pair of split coils relative to each other while arranging the pair of split coils in parallel. The heat treatment apparatus according to claim 1 or 2.
The positioning mechanism is a heat treatment apparatus that operates so as to incline at least one of the pair of split coils with respect to the axial direction of the induction heating coil. The heat treatment apparatus according to any one of claims 1 to 3.
A plurality of the pair of the split coils are provided so as to be arranged along the axial direction of the induction heating coil.
The positioning mechanism is a heat treatment apparatus that independently sets the relative positions of the pair of split coils for each pair of split coils. The heat treatment apparatus according to any one of claims 1 to 4.
An identification unit that identifies information about the object to be processed,
A control unit that controls the positioning mechanism is further provided.
The control unit is a heat treatment apparatus that sets a relative position of a pair of split coils by operating the positioning mechanism based on information about the object to be processed identified by the identification unit.

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