JP2021089070A - Fluid control valve - Google Patents

Abstract

To provide a fluid control valve capable of preventing the occurrence of cavitation and also preventing the occurrence of vibration due to a jet flow.SOLUTION: In a regulator 1 for performing fluid control, an annular protruded part 115 having a valve seat 115a at the front end includes an annular diameter reduction face 115b provided on the whole inner diameter side periphery of the annular protruded part 115 for reducing the inner diameter of the annular protruded part 115 toward a valve hole 114, a valve element 14 includes an abutment face 141a abutting on the valve seat 115a, and a step part 143 provided on the inner periphery side of the valve seat 115a while being protruded from the abutment face 141a to the valve hole 114 side, having a diameter larger than the inner diameter of the valve hole 114, and shaped columnar coaxially with the valve hole 114, and a first annular ridge line 145 where the outer peripheral face of the step part 143 and the end face on the valve hole 114 side of the step part 143 cross each other is located near the annular diameter reduction face 115b to form a flow path restriction part 17.SELECTED DRAWING: Figure 2

Description

In the present invention, the valve body, the valve chamber on the upstream side in which the valve body is housed, the valve hole on the downstream side communicating with the valve chamber, and the valve chamber projecting from the inner surface on the valve hole side along the outer circumference of the valve hole. The present invention relates to a fluid control valve that is provided and has an annular protrusion having a valve seat at its tip, and controls fluid by contacting and separating the valve body from the valve seat.

As a fluid control device that controls fluid by contacting and separating the valve body from the valve seat, for example, a flow rate control valve disclosed in Patent Document 1, a regulator 50 shown in FIG. 4, and the like can be considered. The regulator 50 controls the pressure of a control fluid such as pure water or a chemical solution used in a semiconductor manufacturing process. It has a flow path in which the input port 511, the valve chamber 513, the downstream fluid chamber 516a, and the output port 512 are communicated with each other, and the thin film member is formed inside the valve body 51 by the operating air introduced into the pressure acting chamber 516b. By separating the contact surface 54a of the valve body 54 connected to the 55 from the valve seat 515, the pressure of the control fluid input from the input port 511 and output from the output port 512 is controlled.

Japanese Unexamined Patent Publication No. 2009-23259

However, the above-mentioned prior art has the following problems.
When the pressure difference between the control fluid on the input side and the pressure on the output side is as large as about 200 kPa due to pressure control, the distance between the contact surface 54a and the valve seat 515 (that is, the valve opening) is, for example, The control fluid, which is as small as about 0.035 mm and passes through such a small gap, has a high flow velocity. As the flow velocity increases, the pressure of the control fluid decreases on the downstream side of the valve seat 515 (Bernoulli's theorem), resulting in a negative pressure region. Then, in the control fluid, a foaming phenomenon (cavitation) due to boiling occurs. Then, the bubbles due to cavitation collapse, and the shock wave due to the collapse of the bubbles causes vibration in the regulator 50. In addition, the volume of the control fluid vaporized by cavitation increases, but the increased volume due to the collapse of bubbles returns to the original volume. This increase or decrease in the volume of the control fluid causes pressure vibration in the downstream fluid chamber 516a. These vibrations and pressure vibrations due to shock waves are also transmitted to the piping to which the regulator 50 is connected, which may cause noise.

Further, when the control fluid passes through the gap between the contact surface 54a having a valve opening degree of about 0.035 mm and the valve seat 515, the flow velocity of the control fluid increases, so that a jet flow is generated on the downstream side of the valve seat 515. .. Since this jet flows along the contact surface 54a, there is a risk of vibrating the valve body 54, and this vibration is also transmitted to the pipe to which the regulator 50 is connected, which may cause noise.

In recent years, there has been a demand for miniaturization of fluid control valves due to miniaturization and high density of semiconductor manufacturing equipment. In the conventional regulator 50, it is considered that even if vibration caused by cavitation or jet flow is generated, it can be absorbed by the thin film member 55 connected to the valve body 54, but due to the miniaturization, the thin film member 55 has a smaller diameter than the conventional one. Since the volume of the downstream fluid chamber 516a and the pressure acting chamber 516b became smaller, it is considered that the vibration caused by cavitation could not be absorbed, and it is considered that the vibration is likely to occur.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a fluid control valve capable of preventing or suppressing vibration generated by a flow of a control fluid.

In order to solve the above problems, the fluid control valve of the present invention has the following configuration.
(1) The valve body, the valve chamber on the upstream side in which the valve body is housed, the valve hole on the downstream side communicating with the valve chamber, and projecting from the inner surface of the valve chamber on the valve hole side along the outer circumference of the valve hole. In a fluid control valve that has an annular protrusion having a valve seat at its tip and controls the fluid by contacting and separating the valve body from the valve seat, the annular protrusion is on the inner diameter side of the annular protrusion. The entire circumference is provided with an annular diameter-reduced surface that reduces the inner diameter of the annular protrusion toward the valve hole, and the valve body is provided with a contact surface that contacts the valve seat and abuts on the inner peripheral side of the valve seat. It has a diameter larger than the inner diameter of the valve hole and is provided with a columnar step portion coaxial with the valve hole, which protrudes from the surface toward the valve hole side. The annular ridge line that intersects the end face on the side is located in the vicinity of the annular reduced diameter surface, and is characterized in that a flow path narrowing portion is formed.

According to the fluid control valve described in (1), the fluid flowing from the valve chamber to the valve hole is a portion where the flow path area is narrowed by the valve body and the valve seat, the annular diameter reduced surface, the contact surface, and the step portion. It passes through a place where the flow path area is widened by the space surrounded by the outer peripheral surface and a place where the flow path area is narrowed by the flow path narrowing portion. The applicant has experimentally found that this reduces the negative pressure condition on the downstream side of the valve seat.

By reducing the negative pressure state, it is possible to suppress the occurrence of cavitation and shorten the time from the generation of bubbles to the disappearance even if cavitation occurs. As a result, it is possible to suppress the generation of vibration caused by cavitation, and it is possible to suppress the generation of noise caused by the vibration.

Further, the jet flow is guided to the valve hole side by the stepped portion protruding from the contact surface toward the valve hole side, and is separated from the valve body. By separating the jet from the valve body, it is possible to suppress the generation of vibration of the valve body due to the jet, and it is possible to suppress the generation of noise.

(2) In the fluid control valve according to (1), the value obtained by multiplying the gap dimension in the radial direction of the annular ridge line of the flow path throttle portion by the diameter dimension of the annular protrusion portion at the center portion of the valve seat is 0. It is characterized by being between .6 and 1.2.

The applicant has experimentally found that the fluid control valve described in (2) can be an excellent fluid control valve for suppressing vibration caused by cavitation.

(3) The fluid control valve according to (1) or (2) is characterized in that the distance from the valve seat to the outer peripheral surface of the step portion is within the range of 0.4 mm to 0.8 mm. ..

The applicant has experimentally found that the fluid control valve described in (3) can be an excellent fluid control valve for suppressing vibration caused by a jet flow.

(4) In the fluid control valve according to any one of (1) to (3), the valve body is a step protruding from the end surface of the step portion on the valve hole side toward the valve hole side. A second step portion having a diameter smaller than the outer diameter of the portion and coaxial with the valve hole is provided, and the outer peripheral surface of the second step portion and the end surface of the second step portion on the valve hole side intersect. The two annular ridges are located near the inner peripheral surface of the valve hole and form a second flow path narrowing portion.

According to the fluid control valve described in (4), the fluid flowing from the valve chamber to the valve hole is a portion where the flow path area is narrowed by the valve body and the valve seat, the annular diameter reduced surface, the contact surface, and the step portion. After passing through a place where the flow path area is widened by the space surrounded by the outer peripheral surface and a place where the flow path area is narrowed by the flow path narrowing section, the end face on the valve hole side of the stepped portion and the second It passes through a portion where the flow path area is widened by the outer peripheral surface of the step portion and a portion where the flow path area is narrowed by the second flow path throttle portion. The applicant has experimentally found that this further reduces the negative pressure condition on the downstream side of the valve seat.

By reducing the negative pressure state, the occurrence of cavitation can be suppressed. If the occurrence of cavitation can be suppressed, the generation of vibration caused by cavitation can be suppressed, and the generation of noise caused by the vibration can be suppressed.

(5) In the fluid control valve according to (4), the clearance dimension in the radial direction of the second annular ridge line of the second flow path throttle portion is multiplied by the diameter dimension of the annular protrusion portion at the center portion of the valve seat. The value is between 0.6 and 1.2.

The applicant has experimentally found that the fluid control valve according to (5) can be an excellent fluid control valve for suppressing vibration caused by cavitation.

(6) In the fluid control valve according to (4) or (5), the annular diameter-reduced surface and the inner peripheral surface of the valve hole are formed from the annular diameter-reduced surface toward the downstream side. The third annular ridge line, which is connected by a coaxial annular recess and where the inner peripheral surface of the annular recess and the annular reduced diameter surface intersect, is located near the annular ridge and forms a flow path narrowing portion together with the annular ridge. The fourth annular ridge line where the inner surface of the annular recess on the valve hole side and the inner peripheral surface of the valve hole intersect is located in the vicinity of the second annular ridge line, and forms the second flow path narrowing portion together with the second annular ridge line. It is characterized by that.

According to the fluid control valve described in (6), the recessed portion expands the space between the flow path throttle portion and the second flow path throttle portion, and is more excellent in suppressing vibration caused by cavitation. The applicant has experimentally found that it can be a control valve.

(7) In the fluid control valve according to (6), the distance from the valve seat to the inner surface of the annular recess on the valve hole side is from the contact surface to the end surface of the second step portion on the valve hole side. It is characterized in that it is 0.03 mm to 0.13 mm smaller than the distance.

According to the fluid control valve described in (7), the fourth annular ridge is surely the second annular ridge even at a valve opening (for example, about 0.035 mm) where a negative pressure region is likely to occur downstream of the valve seat. It is located in the vicinity and can form a second flow path throttle portion, and can be an excellent fluid control valve for suppressing vibration caused by cavitation.

(8) In the fluid control valve according to any one of (4) to (7), the distance from the outer peripheral surface of the step portion to the outer peripheral surface of the second step portion is 0.4 mm to 0.8 mm. It is characterized by being within the range.

According to the fluid control valve described in (8), the jet flow can be reliably guided to the valve hole side, and the occurrence of vibration of the valve body due to the jet flow can be suppressed to obtain an excellent fluid control valve. The applicant has found by experiment that it can be done.

(9) In the fluid control valve according to any one of (1) to (8), the valve body having the valve chamber and the valve hole inside and the valve body from a direction parallel to the contact separation direction of the valve body. A cover member stacked on the valve body and a thin film member having a thin film portion connected to the central portion and elastically deformed at the time of contact separation operation of the valve body are provided on the outer periphery of the central portion. Is provided with an opening for attaching the thin film member on the side of the cover member, the thin film member is provided with an annular fixing portion along the outer periphery of the thin film portion, and is attached to the opening by press-fitting the annular fixing portion into the opening. The thin film member is fixed by sandwiching the annular fixing portion between the cover member and the valve body from both sides in the contact separation direction, and the annular fixing portion is on the cover member side along the entire outer circumference. It is characterized in that it is provided with an annular notch portion that cuts out from the outer peripheral surface to the end surface on the valve body side, leaving the end portion of the valve body.

According to the fluid control valve according to (9), the annular fixing portion sandwiched between the cover member and the valve body from both sides in the contact separation direction leaves the end portion on the cover member side along the entire circumference of the outer circumference. Since the annular notch portion that cuts out from the outer peripheral surface to the end surface on the valve body side is provided, the end portion of the annular fixing portion on the cover member side can secure an area that can be pressed by the cover member. By securing an area pressed by the cover member in the annular fixing portion, the thin film member can be reliably fixed, and vibration generated in the valve body connected to the thin film member can be suppressed. Further, since the annular fixing portion is cut out by the annular notch, the wall thickness of the valve body can be secured, and the strength of the valve body can be improved.

(10) In the fluid control valve according to any one of (1) to (9), a guide portion for inserting a part of the valve body to guide the operation of contacting and separating the valve body is provided. The valve body is provided with a sliding portion that comes into contact with the inner peripheral surface of the guide portion, and the sliding portion is made of an elastic member and is pressed against the inner peripheral surface to exert an elastic reaction force on the inner peripheral surface. It is characterized by acting.

According to the fluid control valve according to (10), an elastic reaction force acts on the inner peripheral surface of the guide portion due to the sliding portion provided in the valve body, so that the valve body abuts and separates from the valve seat. It is possible to suppress the vibration generated in the valve body during the operation.

(11) The fluid control valve according to any one of (1) to (10) is provided with a pedestal that is in contact with the installation surface and a fixing member for fixing the fluid control valve to the installation surface. The fixing member includes a fitting portion to be fitted to the pedestal and a fixing portion that can be connected to the installation surface, and the pedestal is fitted from the fitting frontage that can be fitted to the fitting portion and the fitting frontage. On the back side of the direction, a locking piece that can be elastically deformed in the width direction of the fitting frontage and that can be engaged with the fitting portion is provided, and the fitting portion is fitted to the fitting frontage. By the operation, the fitting part elastically deforms the locking piece from the initial position, and when the fitting operation is completed, the locking piece returns to the initial position and the fitting part and the locking piece are engaged with each other, and the fixing member. It is characterized by regulating the movement in the removal direction of the.

According to the fluid control valve according to (11), the fixing member can be assembled to the fluid control valve by a fitting operation. Therefore, it is possible to select whether or not to assemble the fixing member to the fluid control valve according to the necessity of the fixing member, and it is possible to give a degree of freedom to the installation form of the fluid control valve.

According to the fluid control valve of the present invention, it is possible to prevent or suppress vibration generated by the flow of the control fluid.

The cross-sectional view of the regulator which concerns on this embodiment is shown. A partially enlarged view of the vicinity of the valve seat in FIG. 1 is shown. A partially enlarged view of the vicinity of the valve seat in FIG. 2 is shown. A cross-sectional view of a regulator according to the prior art is shown. The pressure distribution diagram of the control fluid in the vicinity of the valve seat of the regulator according to this embodiment is shown. The pressure distribution diagram of the control fluid in the vicinity of the valve seat when the gap dimension of the second flow path throttle portion is enlarged is shown. The pressure distribution map of the control fluid in the vicinity of the valve seat of the regulator according to the prior art is shown. The graph which compares the pressure value of the control fluid in the vicinity of a valve seat is shown. The distribution map of the flow velocity of the control fluid in the vicinity of the valve seat of the regulator according to this embodiment is shown. The distribution map of the flow velocity of the control fluid in the vicinity of the valve seat when the distance between the valve seat and the step portion is increased is shown. The distribution map of the flow velocity of the control fluid in the vicinity of the valve seat of the regulator according to the prior art is shown. The pressure distribution diagram of the control fluid near the valve seat in the first modification of the regulator according to this embodiment is shown. It is a figure which shows the 2nd modification of the regulator which concerns on this embodiment. A partially enlarged view of the vicinity of the valve seat in FIG. 13 is shown. It is a figure which shows the 3rd modification of the regulator which concerns on this embodiment. A partially enlarged view of the vicinity of the valve seat in FIG. 15 is shown. The cross-sectional view of the regulator which concerns on the 4th modification is shown. It is a perspective view of a sliding member. It is a perspective view of a leaf spring. It is a perspective view which shows the state which attached the fixing member to a regulator. It is a perspective view which shows the state which disassembled a regulator and a fixing member. It is a perspective view which shows the fixing member. It is a bottom view of a regulator. It is a partially enlarged view of the bottom view of the regulator, and is the figure which shows the state which attached the fixing member. FIG. 24 is a sectional view taken along the line AA of FIG. 24.

An embodiment of the fluid control valve according to the present invention will be described in detail with reference to the drawings.
The fluid control device according to the present embodiment is a regulator 1 that controls the pressure of a control fluid such as a chemical solution or pure water used in a semiconductor manufacturing process, and as shown in FIG. 1, a valve body 11 and an upper cover (cover). An example of a member) 12 and a lower cover 13 are provided, and the upper cover 12 and the lower cover are provided from a direction parallel to the direction in which the valve body 14 abuts and separates from the valve body 11 with respect to the valve seat 115a (see FIG. 2). 13 is assembled. The valve body 11 is formed with an input port 111 to which the control fluid is input and an output port 112 to which the control fluid is output. The valve body 11 which is a wetted member is molded of, for example, a fluorine-based synthetic resin having high corrosion resistance, and the upper cover 12 and the lower cover 13, which are not wetted members, are molded of, for example, polypropylene resin.

A valve chamber 113 communicating with the input port 111 by the input flow path 111a is formed in the central portion of the valve body 11 from the end surface on the side of the lower cover 13 of the valve body 11 toward the side of the upper cover 12. .. A valve hole 114 communicates with the valve chamber 113, and an annular protrusion 115 projects along the outer circumference of the valve hole 114 on the valve hole side inner surface 113a of the valve chamber 113.

As shown in FIG. 2, a valve seat 115a is formed at the tip of the annular protrusion 115 so that the valve body 14 described later abuts and separates from the tip of the annular protrusion 115. An annular reduced diameter surface 115b is formed that reduces the inner diameter of 115 toward the valve hole 114. Then, the annular reduced diameter surface 115b and the inner peripheral surface of the valve hole 114 are connected by an annular recessed portion 117 coaxial with the valve hole 114, which is formed from the annular reduced diameter surface 115b toward the valve hole 114 side. ing.

Further, as shown in FIG. 1, the valve body 11 is provided with an opening 116 communicating with the valve hole 114 on the end surface on the upper cover 12 side. The opening 116 is divided into a downstream fluid chamber 116a communicating with the output port 112 by an output flow path 112a and a pressure acting chamber 116b by a thin film member 15 described later. The input flow path 111a, the valve chamber 113, the valve hole 114, the downstream fluid chamber 116a, and the output flow path 112a form a flow path from the input port 111 to the output port 112.

The valve chamber 113 houses a columnar valve body 14 that can reciprocate in a direction parallel to the assembling direction of the upper cover 12 and the lower cover 13. The valve body 14 is formed with a diameter-expanded portion 141 having a diameter larger than that of other portions at the central portion in the axial direction thereof. As shown in FIG. 2, the end surface of the enlarged diameter portion 141 facing the valve seat 115a is a contact surface 141a that abuts on the valve seat 115a. When the valve body 14 moves toward the annular protrusion 115, the contact surface 141a comes into contact with the valve seat 115a, and the flow path from the input port 111 to the output port 112 is blocked. On the other hand, when the valve body 14 moves to the side opposite to the side of the annular protrusion 115, the contact surface 141a is separated from the valve seat 115a, and the flow path from the input port 111 to the output port 112 is communicated.

Further, on the contact surface 141a, a columnar step portion 143 is provided so as to project toward the valve hole 114 side on the inner peripheral side of the valve seat 115a. The step portion 143 has a diameter larger than the inner diameter of the valve hole 114 and is located coaxially with the valve hole 114.

As shown in FIG. 3, an annular shape is formed in the vicinity of the first annular ridge line 145 (an example of the annular ridge line) where the outer peripheral surface of the step portion 143 and the end surface (upper end surface) of the step portion 143 on the valve hole 114 side intersect. The third annular ridge line 118 where the inner peripheral surface of the recessed portion 117 and the annular reduced diameter surface 115b intersect is located, and the first annular ridge line 145 and the third annular ridge line 118 form the flow path narrowing portion 17. A space in which the cross-sectional area of the flow path narrowed by the contact surface 141a and the valve seat 115a by the flow path narrowing portion 17 is surrounded by the contact surface 141a, the outer peripheral surface of the step portion 143, and the annular diameter reduction surface 115b. After being expanded once by the first space), it will be narrowed again.

Further, as shown in FIG. 2, a columnar second step portion 144 having a diameter smaller than the outer diameter of the step portion 143 is projected from the upper end surface of the step portion 143 toward the valve hole 114 side. There is. The second step portion 144 is located coaxially with the valve hole 114.

As shown in FIG. 3, an annular recess portion is provided in the vicinity of the second annular ridge line 146 where the outer peripheral surface of the second step portion 144 and the end surface (upper end surface) of the second step portion 144 on the valve hole 114 side intersect. The fourth annular ridge line 119 where the inner surface of 117 on the valve hole 114 side and the inner peripheral surface of the valve hole 114 intersect is located, and the second annular ridge line 146 and the fourth annular ridge line 119 are the second flow path throttle portion 18 Is forming. The cross-sectional area of the flow path narrowed by the flow path throttle portion 17 by the second flow path throttle portion 18 is surrounded by the upper end surface of the step portion 143, the outer peripheral surface of the second step portion 144, and the annular recess portion 117. After being expanded by the space (second space), it will be narrowed again.

The clearance dimension C1 in the radial direction of the first annular ridge line 145 of the flow path throttle portion 17 has the diameter dimension D1 (FIG. 2) of the annular protrusion 115 at the center portion (center line CL11) of the valve seat 115a in the gap dimension C1. It is desirable to set the value multiplied by (see) to be between 0.6 and 1.2. For example, in the present embodiment, the multiplied value is set to 0.83.

Further, the gap dimension C2 in the radial direction of the second annular ridge line 146 of the second flow path throttle portion 18 is the diameter dimension of the annular protrusion 115 at the center portion (center line CL11) of the valve seat 115a in the gap dimension C2. It is desirable that the value multiplied by D1 is set to be between 0.6 and 1.2. For example, in the present embodiment, the multiplied value is set to 0.83.

The distance d1 from the central portion (center line CL11) of the valve seat 115a to the outer peripheral surface of the step portion 143 is preferably in the range of 0.4 mm to 0.8 mm. For example, in the present embodiment, it is 0. It is said to be 5.5 mm. Further, the distance d2 from the outer peripheral surface of the step portion 143 to the outer peripheral surface of the second step portion 144 is preferably in the range of 0.4 mm to 0.8 mm. For example, in the present embodiment, 0. It is said to be 4 mm.

The distance d3 from the valve seat 115a to the inner surface of the annular recess 117 on the valve hole 114 side is 0.03 mm to 0.13 mm smaller than the distance d4 from the contact surface 141a to the upper end surface of the second step portion 144. It is desirable, for example, in the present embodiment, it is set to be 0.1 mm smaller.

Further, as shown in FIG. 1, the valve body 14 is provided with a thin film portion 142 integrally molded with the valve body 14 at the end portion on the lower cover 13 side, and the thin film portion 142 is provided at the end portion on the upper cover 12 side. The thin film member 15 including the portion 152 is bonded. The thin film portion 142 of the valve body 14 and the thin film portion 152 of the thin film member 15 are elastically deformed in accordance with the movement of the valve body 14 in contact with and separated from the valve seat 115a. The valve body 14 which is a wetted member and the thin film member 15 are molded of, for example, a fluorine-based synthetic resin having high corrosion resistance.

The thin film member 15 includes a thin film portion 152 on the outer periphery of the central portion 151 to which the valve body 14 is bonded, and further includes an annular fixing portion 153 along the outer periphery of the thin film portion 152. The annular fixing portion 153 has an annular notch portion 153c that cuts out from the outer peripheral surface to the end surface (lower end surface) on the valve body 11 side, leaving the end portion (upper end surface 153b) on the upper cover 12 side along the entire circumference. To be equipped. A press-fitting portion 153a is provided on the lower end surface of the annular fixing portion 153 so that it can be press-fitted into the opening 116 of the valve body 11. The thin film member 15 press-fitted into the opening 116 is fixed by sandwiching the annular fixing portion 153 between the upper cover 12 and the valve body 11 from both sides in the direction in which the valve body 14 abuts and separates from the valve seat 115a. ing. An O-ring 19 is arranged between the upper end surface 153b of the annular fixing portion 153 and the upper cover 12 to maintain the airtightness of the pressure acting chamber 116b.

By providing the annular notch 153c, the wall thickness of the valve body 11 can be increased by the amount that the annular fixing portion 153 is cut out by the annular notch 153c, and the strength of the valve body 11 can be maintained. it can. Further, since the annular cutout portion 153c cuts out from the outer peripheral surface to the lower end surface while leaving the upper end surface 153b of the annular fixing portion 153, it is necessary to secure an area pressed by the upper cover 12 on the upper end surface 153b. Can be done.

A spring accommodating chamber 131 is formed in the lower cover 13 on the side opposite to the valve chamber 113 with the thin film portion 142 interposed therebetween. The compression coil spring 16 is housed in the spring accommodating chamber 131. Due to the urging force of the compression coil spring 16, the valve body 14 is constantly urged in the direction of contacting the valve seat 115a. As a result, the state in which the contact surface 141a of the valve body 14 is in contact with the valve seat 115a is maintained.

The upper cover 12 is formed with an introduction port 121 communicating with the pressure acting chamber 116b, and operating air is introduced into the pressure acting chamber 116b through the introduction port 121. The position of the valve body 14 is adjusted by controlling the pressure of the operating air in the pressure acting chamber 116b.

The flow condition of the control fluid in the vicinity of the contact surface 141a and the valve seat 115a of the valve body 14 of the valve body 14 of the regulator 1 having the above configuration will be described below.
First, the occurrence of cavitation, which has been a problem in the prior art, will be described with reference to FIGS. 5 to 8.

5 and 6 show the contact surface 141a in which the pressure difference of the control fluid between the input side and the output side of the regulator 1 is controlled to, for example, about 200 kPa, and the valve opening degree is about 0.035 mm. It is a pressure distribution map near the valve seat 115a and shows the result of analysis using the finite element method by a computer. Further, FIG. 7 is a pressure distribution diagram of the contact surface 54a and the valve seat 515 where the valve opening degree is about 0.035 mm in the regulator 50 according to the prior art, and is analyzed by using the finite element method by a computer. It represents the result of the above. In FIGS. 5 to 7, a portion having a high dot density indicates a portion where the pressure of the control fluid is low, and a portion having a low dot density indicates a portion where the pressure of the control fluid is high.

The lower the pressure on the downstream side of the valve seat 115a, the more likely it is that cavitation will occur. For example, a state where the pressure value is P11 (see FIG. 8) or less is a state in which cavitation is likely to occur.

When the valve opening degree is about 0.035 mm, the flow velocity of the control fluid passing through such a small gap becomes high. When the flow velocity of the control fluid becomes high, the pressure of the control fluid on the downstream side of the valve seat 515 of the regulator 50 according to the prior art is measured at three points A21, A22, and A23, for example, as shown in FIG. If you look at, you can see that they are all in a negative pressure state. This is because the pressure decreases as the flow velocity increases (Bernoulli's theorem). Then, as shown in the graph of FIG. 8, the pressure values of the measurement points A21, A22, and A23 are all equal to or less than the pressure value P11, and it can be seen that cavitation is likely to occur.

On the other hand, in the regulator 1 according to the present embodiment, as shown in FIG. 5, although the pressure is negative near the gap between the valve body 14 and the valve seat 115a, the first regulator 1 corresponds to the position of the measurement point A21. At the measurement point A11 in space, the negative pressure state is eliminated and the pressure value becomes a positive value. This is also clear in the graph shown in FIG.

Further, at the measurement point A12 in the second space, which corresponds to the position of the measurement point A22, the negative pressure state is eliminated and the pressure value becomes a positive value. This is also clear in the graph shown in FIG.

At the measurement point A13, which corresponds to the position of the measurement point A23, the pressure distribution map shows that the pressure is in a negative pressure state, but the value exceeds the pressure value P11 as shown in the graph of FIG. Therefore, it can be said that the condition where cavitation is likely to occur has been resolved.

That is, in the regulator 1 according to the present embodiment, the pressure values P11 or higher are shown at all the measurement points A11, A12, and A13, and cavitation is unlikely to occur.

Here, as described above, the clearance dimension C1 in the diameter direction of the first annular ridge line 145 of the flow path narrowing portion 17 has the clearance dimension C1 and the central portion (center line CL11) of the valve seat 115a of the annular protrusion 115. It is desirable that the value obtained by multiplying the diameter dimension D1 in the above is between 0.6 and 1.2, and the gap dimension C2 in the diameter direction of the second annular ridge line 146 of the second flow path throttle portion 18 is the gap dimension. It is desirable that the value obtained by multiplying C2 by the diameter dimension D1 of the annular protrusion 115 at the center portion (center line CL11) of the valve seat 115a is set to be between 0.6 and 1.2. For example, the gap dimension C2 is enlarged, and the value obtained by multiplying the gap dimension C2 by the diameter dimension D1 of the annular protrusion 115 at the center portion (center line CL11) of the valve seat 115a is in the range of 0.6 to 1.2. When deviating from the above, as shown in FIG. 6, the measurement point A11 in the first space and the measurement point A12 in the second space are in a negative pressure state, respectively. Then, as shown in FIG. 8 (enlarged C2), the pressure values of the measurement points A11 and the measurement points A12 are lower than P11, and it can be seen that cavitation may occur.

It should be noted that, unlike the regulator according to the first modification shown in FIG. 12, the annular recessed portion 117 may not be provided on the annular reduced diameter surface 115b. In this case, although a negative pressure state is generated in the second space, the pressure value is maintained at a level at which cavitation does not occur in the first space and in the vicinity of the valve hole 114, which is effective in suppressing the occurrence of cavitation.

Next, the generation of jets, which has been a problem in the prior art, will be described with reference to FIGS. 9 to 11. 9 and 10 show the contact surface 141a in which the pressure difference of the control fluid between the input side and the output side of the regulator 1 is controlled to, for example, about 200 kPa, and the valve opening degree is about 0.035 mm. It is a distribution map showing the flow velocity of the control fluid in the vicinity of the valve seat 115a, and shows the result of analysis using the finite element method by a computer. Further, FIG. 7 is a distribution diagram showing the flow velocity of the control fluid in the vicinity of the contact surface 54a and the valve seat 515 where the valve opening degree is about 0.035 mm in the regulator 50 according to the prior art, and is finite by a computer. It represents the result of analysis using the element method. In FIGS. 9 to 11, a portion having a high dot density indicates a portion where the flow velocity of the control fluid is high, and a portion having a low dot density indicates a portion where the flow velocity of the control fluid is low.

Looking at the analysis results of the conventional regulator 50 shown in FIG. 11, it can be seen that the portion of the control fluid having a high flow velocity extends along the contact surface 54a of the valve body 54. This indicates that the jet is generated along the contact surface 54a. The jet flow generated along the contact surface 54a causes the valve body 54 to vibrate.

On the other hand, in the regulator 1 according to the present embodiment, as shown in FIG. 9, a portion having a high flow velocity of the control fluid extends from the gap between the contact surface 141a and the valve seat 115a along the annular reduced diameter surface 115b. It can be seen that the state in which the jet flow is generated along the contact surface 54a in the prior art has been eliminated. This is because the jet flow is guided to the valve hole 114 side by the step portion 143 and is separated from the valve body 14. By separating the jet from the valve body 14, it is possible to suppress the generation of vibration of the valve body 14 due to the jet flow.

Here, as described above, the distance d1 from the central portion (center line CL11) of the valve seat 115a to the outer peripheral surface of the stepped portion 143 is preferably in the range of 0.4 mm to 0.8 mm, and the stepped portion The distance d2 from the outer peripheral surface of the 143 to the outer peripheral surface of the second step portion 144 is preferably in the range of 0.4 mm to 0.8 mm. For example, when the distance d1 is expanded and deviated from the range of 0.4 mm to 0.8 mm, as shown in FIG. 10, the portion where the flow velocity of the control fluid is high is along the contact surface 141a of the valve body 14. It can be seen that the jet flow is not separated from the valve body 14. In this state, it may not be possible to suppress the generation of vibration of the valve body 14 due to the jet flow.

As a second modification of this embodiment, as shown in FIGS. 13 and 14, the valve body 24 comes into contact with the valve seat 215a provided at the tip of the annular protrusion 215 of the valve body 21. The contact surface 241a provided on the enlarged diameter portion 241 may be inclined with respect to the axial center of the valve body 24. Further, the inner surface of the annular recess 217 on the valve hole 214 side and the end surface (upper end surface) of the step portion 243 and the second step portion 244 on the valve hole 214 side may also be inclined.

At this time, in the vicinity of the first annular ridge line 245 (an example of the annular ridge line) where the outer peripheral surface of the step portion 243 and the upper end surface of the step portion 243 intersect, the inner peripheral surface of the annular recess portion 217 and the annular reduced diameter surface 215b The third annular ridge line 218 that intersects with the third annular ridge line 218 is located, and the first annular ridge line 245 and the third annular ridge line 218 form the flow path narrowing portion 27. Further, in the vicinity of the second annular ridge line 246 where the outer peripheral surface of the second step portion 244 and the upper end surface of the second step portion 244 intersect, the inner surface of the annular recess 217 on the valve hole 114 side and the valve hole 214 The fourth annular ridge line 219 that intersects the inner peripheral surface is located, and the second annular ridge line 246 and the fourth annular ridge line 219 form the second flow path narrowing portion 28.

Furthermore, as a third modification, as shown in FIGS. 15 and 16, the third flow path narrowing portion 39 may be provided by providing the third step portion 345 and the second annular recess portion 318. ..

First, the valve body 31 will be described. The point that the valve body 31 is provided with an annular protrusion 315, a valve seat 315a at the tip thereof, a reduced diameter surface 315b, and an annular recess 317 is the first embodiment described above. Is similar to. The valve body 31 has a second annular recess 318 formed on the valve hole 314 side from the inner surface of the annular recess 317 on the valve hole 314 side.

Next, the valve body 34 will be described. The valve body 34 is provided with a diameter-expanded portion 341, the diameter-expanded portion 341 is provided with a contact surface 341a that abuts on the valve seat 315a, and the step portion 343 is a valve from the contact surface 341a. The point that the second step portion 344 is projected toward the hole 314 side and the second step portion 344 is projected from the end surface (upper end surface) of the step portion 343 on the valve hole 314 side toward the valve hole 314 side is described above. It is the same as the first embodiment. The third step portion 345 projects from the end surface (upper end surface) of the second step portion 344 on the valve hole 314 side toward the valve hole 314 side, and has a diameter smaller than that of the second step portion 344. At the same time, it is located coaxially with the valve hole 314.

At this time, in the vicinity of the first annular ridge line 346 (an example of the annular ridge line) where the outer peripheral surface of the step portion 343 and the upper end surface of the step portion 343 intersect, the inner peripheral surface of the annular recess portion 317 and the annular reduced diameter surface 315b The third annular ridge line 319 where the above intersects is located, and the first annular ridge line 346 and the third annular ridge line 319 form the flow path narrowing portion 37. Further, in the vicinity of the second annular ridge line 347 where the outer peripheral surface of the second step portion 344 and the upper end surface of the second step portion 344 intersect, the inner surface of the annular recess portion 317 on the valve hole 314 side and the second annular recess are formed. The fourth annular ridge line 320 that intersects the inner peripheral surface of the portion 318 is located, and the second annular ridge line 347 and the fourth annular ridge line 320 form the second flow path narrowing portion 38. Furthermore, in the vicinity of the fifth annular ridge line 348 where the outer peripheral surface of the third step portion 345 and the end surface of the third step portion 345 on the valve hole 314 side intersect, the side of the valve hole 314 of the second annular recess 318. The sixth annular ridge line 322 where the inner surface of the valve hole 314 intersects with the inner peripheral surface of the valve hole 314 is located, and the fifth annular ridge line 348 and the sixth annular ridge line 322 form the third flow path narrowing portion 39.

Further, in order to suppress the vibration of the valve body 14, a regulator 1 as shown in FIG. 17 can be considered as a fourth modification.

A concave guide portion 132 is bored in the spring accommodating chamber 131 of the lower cover 13 coaxially with the valve hole 114. A sliding portion 147 integrated with the valve body 14 and inserted into the guide portion 132 is provided at the end of the valve body 14 on the lower cover 13 side. The operation of contacting and separating the valve body 14 with respect to the valve seat 115a is guided by the guide portion 132 by inserting the sliding portion 147 into the guide portion 132.

The sliding portion 147 of the valve body 14 is composed of a sliding member 40 and a leaf spring 41 as elastic members.

The sliding member 40 is made of highly slidable fluororesin (for example, polytetrafluoroethylene (PTFE), tetrafluoroethylene / perfluoroalkyl vinyl airtel copolymer (PFA), polyvinylidene fluoride (PVDF), etc.). Become. A hollow portion 402 is provided in a portion of the sliding member 40 that is inserted into the guide portion 132. A slit 403 (see FIG. 18) is provided in the wall portion surrounding the hollow portion 402, and the wall portion is a cantilever spring 401.

The diameter of the portion of the sliding member 40 inserted into the guide portion 132 (the portion of the cantilever spring 401) is slightly larger than the diameter of the inner circumference of the guide portion 132. It is in a state of being pressed against the inner peripheral surface of the guide portion 132. Due to this pressing, the cantilever spring 401 is elastically deformed.

Further, the leaf spring 41 is fitted in the hollow portion 402 in a state of being in close contact with the inner peripheral surface of the hollow portion 402. As a result, the cantilever spring 401 is reinforced.

The leaf spring 41 is formed by forming a plate material of stainless steel for spring (for example, SUS304CSP) into a C shape (see FIG. 19). When the cantilever spring 401 of the sliding member 40 is pressed against the inner peripheral surface of the guide portion 132, the outer peripheral surface 412 of the leaf spring 41 is pressed by the cantilever spring 401. Since the leaf spring 41 is provided with the slit 411, when the outer peripheral surface 412 is pressed by the cantilever spring 401, the width of the slit 411 is reduced and the leaf spring 41 is elastically deformed.

Since the cantilever spring 401 is pressed against the inner peripheral surface of the guide portion 132, the elastic force of the cantilever spring 401 and the leaf spring 41 is always applied to the inner peripheral surface of the guide portion 132. Apply elastic reaction force. Since the elastic reaction force acts on the inner peripheral surface of the guide portion 132 in this way, the vibration generated in the valve body 14 when the valve body 14 comes into contact with and separates from the valve seat 115a. Can be suppressed.

Here, the structure of the regulator 1 described above to be fixed to the installation surface will be described. A fluid control valve such as the regulator 1 is often mounted in a place where equipment is densely packed due to a high density of semiconductor manufacturing equipment, and therefore, a high degree of freedom in mounting method is required. Therefore, the regulator 1 can be fixed to the installation surface 60 by directly connecting the lower cover 13 (an example of the pedestal) to the installation surface 60 (see FIG. 20), and as shown in FIGS. 20 and 21. , The fixing member 20 is attached to the regulator 1, and the fixing member 20 fitted to the lower cover 13 is fixed to the installation surface 60 in a state where the lower cover 13 is grounded to the installation surface 60. Can be fixed.

The fixing member 20 is, for example, an injection-molded product of polypropylene (PP) or polyvinylidene fluoride (PVDF), and is coupled to the fitting portion 201 to be fitted to the lower cover 13 and the installation surface 60 as shown in FIG. It comprises a possible fixing portion 208.

The fitting portion 201 of the fixing member 20 includes a misfit preventing portion 202 and a pair of engaging portions 203. The misfit prevention portion 202 has slopes 204 at both ends in the width direction, and the slopes 204 form the misfit prevention portion 202 in a trapezoidal shape in which the width decreases toward the bottom. ..

The pair of engaging portions 203 are projected from the end faces on the side opposite to the side where the fixing portion 208 of the misfit prevention portion 202 is provided. Each of the pair of engaging portions 203 is provided with a first locking projection 205 at a tip portion (end portion on the side opposite to the misfit prevention portion 202 side). The first locking projection 205 is provided with a slope-shaped pushing portion 206 so that the height thereof decreases toward the tip portion. Further, the fitting portion 201 is provided with an arc-shaped portion 207 so as to be sandwiched between the pair of engaging portions 203.

The fixing portion 208 of the fixing member 20 is formed in a ring shape by providing a through hole 209 penetrating in the height direction. For example, a bolt can be inserted into the through hole 209, and the regulator 1 is fixed to the installation surface 60 by connecting the bolt inserted through the through hole 209 to the installation surface 60.

As shown in FIG. 21, the lower cover 13 is provided with a fitting frontage 137 that can be fitted with the fitting portion 201 of the fixing member 20 on the side surface. Further, as shown in FIGS. 23 to 25, the fitting frontage 137 is elastically deformable in the width direction of the fitting frontage 137 and is engaged with the fitting portion 201 of the fixing member 20. It includes a pair of locking pieces 138 that can be combined.

The fitting frontage 137 has slopes 136 at both ends in the width direction, and the slope 136 is formed so that the width decreases toward the lower side. That is, the fitting frontage 137 is formed in a trapezoidal shape. More specifically, the trapezoidal shape of the fitting frontage 137 is substantially similar to the misfitting prevention portion 202, and the misfitting prevention portion 202 can be fitted into the fitting frontage 137 with a minute gap. It has become.

Each of the pair of locking pieces 138 is provided with a second locking projection 133 that can be engaged with the first locking projection 205 of the fixing member 20 at the tip end portion (the end portion on the fitting frontage 137 side). Further, the second locking projection 133 is provided with a slope-shaped pushed portion 134 so that the height thereof decreases toward the tip portion. Further, the lower cover 13 is provided with a tubular wall portion 135 so as to be sandwiched between a pair of locking pieces 138. The inner peripheral surface 135a of the tubular wall portion 135 is a female screw, and a bolt or the like can be screwed into the inner peripheral surface 135a.

Next, the fitting operation of the fixing member 20 to the lower cover 13 will be described.
First, since the misfitting prevention portion 202 of the fixing member 20 and the fitting frontage 137 of the lower cover 13 are both formed in a trapezoidal shape, their directions are aligned. That is, since the width is reduced as the fitting frontage 137 is directed downward, the width is reduced as the misfitting prevention portion 202 is directed downward. Here, even if the fitting operation is performed in the wrong direction, the misfitting prevention portion 202 and the fitting frontage 137 interfere with each other and cannot be assembled, so that the misfitting can be prevented.

When the fitting portion is inserted into the fitting frontage 137, the pushing portion 206 of the first locking projection 205 comes into contact with the pushed portion 134 of the second locking projection 133. As it is, when the fitting portion is further inserted into the fitting frontage, the pushing portion 206 pushes the pushed portion 134 apart, and the locking piece 138 is detached from the first locking projection 205. Elastically deforms to. Then, when the first locking projection 205 gets over the second locking projection 133, the locking piece 138 returns to the state before elastic deformation, and the fitting portion 201 and the locking piece 138 are engaged with each other. That is, the first locking projection 205 and the second locking projection 133 mesh with each other. As a result, the fitting operation is completed, and the movement of the fixing member 20 in the removing direction is restricted.

Further, in the state where the fitting operation is completed, the arcuate portion 207 is located concentrically in contact with or close to the tubular wall portion 135, whereby the movement of the fixing member 20 in the width direction is performed. Be regulated. Further, since the erroneous fitting prevention portion 202 is fitted into the fitting frontage 137 with a minute gap, the erroneous fitting prevention portion 202 and the fitting frontage 137 allow the fixing member 20 to be fitted in the width direction and the height direction. Movement is regulated.

As described above, since the fixing member 20 can be assembled to the regulator 1 by the fitting operation, it is possible to select whether or not to assemble the fixing member 20 to the regulator 1 according to the necessity of the fixing member 20. .. Therefore, it is possible to give a degree of freedom to the installation form of the regulator 1. When fixing the regulator 1 to a narrow portion where a plurality of devices are densely packed, for example, a bolt is inserted from the side opposite to the side where the regulator 1 is installed on the installation surface 60 without using the fixing member 20. The regulator 1 can be fixed to the installation surface 60 by screwing the regulator 1 onto the inner peripheral surface 135a of the tubular wall portion 135. By not using the fixing member 20, there is no portion protruding from the regulator 1, and it can be installed even in a narrow portion.

As described above, according to the regulator 1 of the present embodiment.
(1) The valve body 14, the valve chamber 113 on the upstream side in which the valve body 14 is housed, the valve hole 114 on the downstream side communicating with the valve chamber 113, and the valve chamber 113 along the outer periphery of the valve hole 114. A regulator 1 that has an annular protrusion 115 that is projected from the inner surface on the side of the valve hole 114 and has a valve seat 115a at the tip thereof, and the valve body 14 is brought into contact with and separated from the valve seat 115a to control fluid. The annular protrusion 115 is provided with an annular reduced diameter surface 115b that reduces the inner diameter of the annular protrusion 115 toward the valve hole 114 on the entire circumference of the annular protrusion 115 on the inner diameter side, and the valve body 14 is a valve seat. It has a contact surface 141a that comes into contact with 115a, and has a diameter larger than the inner diameter of the valve hole 114, which is projected from the contact surface 141a toward the valve hole 114 side on the inner peripheral side of the valve seat 115a. The first annular ridge line 145, which is provided with a columnar stepped portion 143 coaxial with the valve hole 114 and where the outer peripheral surface of the stepped portion 143 and the end surface of the stepped portion 143 on the valve hole 114 side intersect, is in the vicinity of the annular reduced diameter surface 115b. It is characterized in that it is located in and forms a flow path narrowing portion 17.

According to the regulator 1 described in (1), the control fluid flowing from the valve chamber 113 to the valve hole 114 comes into contact with a portion where the flow path area is narrowed by the valve body 14 and the valve seat 115a, and the annular diameter-reduced surface 115b. It passes through a place where the flow path area is widened by the space (first space) surrounded by the surface 141a and the outer peripheral surface of the step portion 143, and a place where the flow path area is narrowed by the flow path narrowing part 17. The applicant has experimentally found that this reduces the negative pressure state on the downstream side of the valve seat 115a.

By reducing the negative pressure state, it is possible to suppress the occurrence of cavitation and shorten the time from the generation of bubbles to the disappearance even if cavitation occurs. As a result, it is possible to suppress the generation of vibration caused by cavitation, and it is possible to suppress the generation of noise caused by the vibration.

Further, the jet flow is guided to the valve hole 114 side by the stepped portion 143 projecting from the contact surface 141a toward the valve hole 114 side, and is separated from the valve body 14. By separating the jet flow from the valve body 14, it is possible to suppress the generation of vibration of the valve body 14 due to the jet flow, and it is possible to suppress the generation of noise.

(2) In the regulator 1 according to (1), the central portion (center line CL11) of the valve seat 115a of the annular protrusion 115 has the clearance dimension C1 in the radial direction of the first annular ridge line 145 of the flow path throttle portion 17. ), The value obtained by multiplying the diameter dimension D1 is between 0.6 and 1.2.

The applicant has experimentally found that the regulator 1 described in (2) can be an excellent regulator 1 for suppressing vibration caused by cavitation.

(3) The regulator 1 according to (1) or (2) is characterized in that the distance from the valve seat 115a to the outer peripheral surface of the step portion 143 is within the range of 0.4 mm to 0.8 mm. To do.

The applicant has found through experiments that the regulator 1 described in (3) can be an excellent regulator 1 for suppressing vibration caused by a jet flow.

(4) In the regulator 1 according to any one of (1) to (3), the valve body 14 is projected from the end surface of the step portion 143 on the valve hole 114 side toward the valve hole 114 side. A columnar second step portion 144 having a diameter smaller than the outer diameter of the step portion 143 and coaxial with the valve hole 114 is provided, and the outer peripheral surface of the second step portion 144 and the valve hole 114 of the second step portion 144 are provided. The second annular ridge line 146, which intersects the end face on the side of the valve hole 114, is located near the inner peripheral surface of the valve hole 114 and forms the second flow path narrowing portion 18.

According to the regulator 1 described in (4), the control fluid flowing from the valve chamber 113 to the valve hole 114 comes into contact with the annular diameter-reduced surface 115b, where the flow path area is narrowed by the valve body 14 and the valve seat 115a. After passing through a place where the flow path area is widened by the space (first space) surrounded by the surface 141a and the outer peripheral surface of the step portion 143, and a place where the flow path area is narrowed by the flow path narrowing part 17, further. The part where the flow path area is widened by the end surface of the step portion 143 on the valve hole 114 side and the outer peripheral surface of the second step portion 144, and the place where the flow path area is narrowed by the second flow path narrowing portion 18 are sequentially arranged. pass. The applicant has experimentally found that this further reduces the negative pressure state on the downstream side of the valve seat 115a.

By reducing the negative pressure state, the occurrence of cavitation can be suppressed. If the occurrence of cavitation can be suppressed, the generation of vibration caused by cavitation can be suppressed, and the generation of noise caused by the vibration can be suppressed.

(5) In the regulator 1 according to (4), the central portion (center) of the valve seat 115a of the annular protrusion 115 at the gap dimension C2 in the radial direction of the second annular ridge line 146 of the second flow path throttle portion 18. The value obtained by multiplying the diameter dimension D1 on the line CL11) is between 0.6 and 1.2.

The applicant has experimentally found that the regulator 1 described in (5) can be an excellent fluid control valve for suppressing vibration caused by cavitation.

(6) In the regulator 1 according to (4) or (5), the annular reduced diameter surface 115b and the inner peripheral surface of the valve hole 114 are bored from the annular reduced diameter surface 115b toward the valve hole 114 side. The third annular ridge line 118, which is connected by the annular recess 117 coaxial with the valve hole 114 and where the inner peripheral surface of the annular recess 117 and the annular reduced diameter surface 115b intersect, is located in the vicinity of the first annular ridge 145. , The flow path narrowing portion 17 is formed together with the first annular ridge line 145, and the fourth annular ridge line 119 at which the inner surface of the annular recess portion 117 on the valve hole 114 side and the inner peripheral surface of the valve hole 114 intersect is the second annular ridge line 119. It is located in the vicinity of the ridge line 146 and is characterized by forming a second flow path narrowing portion 18 together with the second annular ridge line 146.

According to the regulator 1 described in (6), the annular recess 117 expands the space (second space) between the flow path throttle portion 17 and the second flow path throttle portion 18, and causes vibration caused by cavitation. The applicant has experimentally found that a better regulator 1 can be made to suppress it.

(7) In the regulator 1 according to (6), the distance from the valve seat 115a to the inner surface of the annular recess 117 on the valve hole 114 side is the distance from the contact surface 141a to the valve hole 114 of the second step portion 144. It is characterized in that it is 0.03 mm to 0.13 mm smaller than the distance to the side end face.

According to the regulator 1 described in (7), the fourth annular ridge line 119 is surely second even at a valve opening degree (for example, about 0.035 mm) where a negative pressure region is likely to occur on the downstream side of the valve seat 115a. The regulator 1 is located in the vicinity of the annular ridge line 146 and can form the second flow path narrowing portion 18, and can be an excellent regulator 1 for suppressing vibration caused by cavitation.

(8) In the regulator 1 according to any one of (4) to (7), the distance from the outer peripheral surface of the step portion 143 to the outer peripheral surface of the second step portion 144 is 0.4 mm to 0.8 mm. It is characterized by being within the range of.

According to the regulator 1 described in (8), the jet flow is surely guided to the valve hole 114 side, and the occurrence of vibration of the valve body 14 due to the jet flow is suppressed to make the regulator 1 excellent. The applicant has found through experiments that this can be done.

(9) In the regulator 1 according to any one of (1) to (8), the valve body 11 having the valve chamber 113 and the valve hole 114 inside is parallel to the contact separation direction of the valve body 14. The upper cover 12 that is stacked on the valve body 11 from various directions, and the valve body 14 that is connected to the central portion 151, and the thin film portion 152 that elastically deforms when the valve body 14 is abutted and separated from the outer periphery of the central portion 151. The valve body 11 is provided with an opening 116 for attaching the thin film member 15 on the side of the upper cover 12, and the thin film member 15 is provided with an annular fixing portion 153 along the outer periphery of the thin film portion 152. The thin film member 15 attached to the opening 116 by press-fitting the annular fixing portion 153 into the opening 116 has the annular fixing portion 153 attached to the annular fixing portion 153 from both sides in the contact separation direction by the upper cover 12 and the valve body 11. It is fixed by being sandwiched, and the annular fixing portion 153 is an annular notch that cuts out from the outer peripheral surface to the end surface on the valve body 11 side along the entire circumference of the outer circumference, leaving the end on the side of the upper cover 12. It is characterized by including a portion 153c.

According to the regulator 1 described in (9), the annular fixing portion 153 sandwiched between the upper cover 12 and the valve body 11 from both sides in the contact separation direction is an end portion on the upper cover 12 side along the entire outer circumference. The upper end surface 153b on the upper cover 12 side of the annular fixing portion 153 secures an area to be pressed by the upper cover 12 because the annular notch portion 153c that cuts out from the outer peripheral surface to the end surface on the valve body 11 side is provided. be able to. By securing an area pressed by the upper cover 12 on the annular fixing portion 153, the thin film member 15 can be reliably fixed, and vibration generated in the valve body 14 connected to the thin film member 15 can be suppressed. .. Further, since the annular fixing portion 153 is cut out by the annular notch portion 153c, the wall thickness of the valve main body 11 can be secured, and the strength of the valve main body 11 can be improved.

(10) In the fluid control valve according to any one of (1) to (9), a guide portion for inserting a part of the valve body to guide the operation of contacting and separating the valve body is provided. The valve body is provided with a sliding portion that comes into contact with the inner peripheral surface of the guide portion, and the sliding portion is made of an elastic member and is pressed against the inner peripheral surface to exert an elastic reaction force on the inner peripheral surface. It is characterized by acting.

According to the fluid control valve according to (10), an elastic reaction force acts on the inner peripheral surface of the guide portion due to the sliding portion provided in the valve body, so that the valve body abuts and separates from the valve seat. It is possible to suppress the vibration generated in the valve body during the operation.

(11) In the regulator 1 according to any one of (1) to (10), a pedestal (for example, a lower cover 13) that is grounded to the installation surface 60 and a fixing member for fixing the regulator 1 to the installation surface 60. The fixing member 20 includes a fitting portion 201 to be fitted to the lower cover 13 and a fixing portion 208 to be coupled to the installation surface 60. The lower cover 13 has a fitting portion 201. And the fitting frontage 137 that can be fitted with, and the locking that can be elastically deformed in the width direction of the fitting frontage 137 and can be engaged with the fitting portion 201 on the back side of the fitting frontage 137 in the fitting direction. When the fitting portion 201 elastically deforms the locking piece 138 from the initial position and the fitting operation is completed by the fitting operation of fitting the fitting portion 201 to the fitting frontage 137 by providing the piece 138. When the locking piece 138 returns to the initial position, the fitting portion 201 and the locking piece 138 are engaged with each other, and the movement of the fixing member 20 in the removal direction is restricted.

According to the regulator 1 described in (11), the fixing member 20 can be assembled to the regulator 1 by a fitting operation. Therefore, it is possible to select whether or not to assemble the fixing member 20 to the regulator 1 according to the necessity of the fixing member 20, and it is possible to give a degree of freedom to the installation form of the regulator 1.

It should be noted that the above embodiment is merely an example and does not limit the present invention in any way. Therefore, as a matter of course, the present invention can be improved and modified in various ways without departing from the gist thereof.
For example, in the present embodiment, the first annular ridge line 145, the second annular ridge line 146, the third annular ridge line 118, and the fourth annular ridge line 119 are shown in an edge shape, but may be R chamfered or C chamfered. ..

1 Regulator (an example of fluid control valve)
14 Valve body 17 Flow path throttle part 113 Valve chamber 114 Valve hole 115 Circular protrusion 115a Valve seat 115b Circular diameter reduction surface 143 Step portion 145 First annular ridge line (example of annular ridge line)

Claims (11)

A valve body, an upstream valve chamber in which the valve body is housed, a downstream valve hole communicating with the valve chamber, and a protrusion from the valve hole side inner surface of the valve chamber along the outer circumference of the valve hole. In a fluid control valve that is provided and has an annular protrusion having a valve seat at its tip, and that controls the fluid by contacting and separating the valve body from the valve seat.
The annular protrusion is provided with an annular reduced diameter surface that reduces the inner diameter of the annular protrusion toward the valve hole on the entire circumference of the annular protrusion on the inner diameter side.
The valve body has a contact surface that comes into contact with the valve seat, and is projected from the contact surface toward the valve hole side on the inner peripheral side of the valve seat, rather than the inner diameter of the valve hole. It has a large diameter and has a columnar step portion coaxial with the valve hole.
The annular ridge line at which the outer peripheral surface of the step portion and the end surface of the step portion on the valve hole side intersect is located in the vicinity of the annular reduced diameter surface to form a flow path narrowing portion.
A fluid control valve characterized by. In the fluid control valve according to claim 1,
The value obtained by multiplying the clearance dimension in the radial direction of the annular ridge of the flow path throttle portion by the diameter dimension of the annular protrusion at the center of the valve seat is between 0.6 and 1.2. thing,
A fluid control valve characterized by. In the fluid control valve according to claim 1 or 2.
The distance from the valve seat to the outer peripheral surface of the step portion shall be within the range of 0.4 mm to 0.8 mm.
A fluid control valve characterized by. The fluid control valve according to any one of claims 1 to 3.
The valve body has a diameter smaller than the outer diameter of the step portion, which is projected from the end surface of the step portion on the valve hole side toward the valve hole side, and is coaxial with the valve hole. Equipped with a columnar second step,
The second annular ridge line where the outer peripheral surface of the second step portion and the end surface of the second step portion on the valve hole side intersect is located near the inner peripheral surface of the valve hole, and the second flow path narrowing portion is formed. To form,
A fluid control valve characterized by. In the fluid control valve according to claim 4,
The value obtained by multiplying the gap dimension of the second flow path throttle portion in the radial direction of the second annular ridge line by the diameter dimension of the annular protrusion portion at the central portion of the valve seat is 0.6 to 1.2. Being between
A fluid control valve characterized by. In the fluid control valve according to claim 4 or 5.
The annular reduced diameter surface and the inner peripheral surface of the valve hole are connected by an annular recess portion coaxial with the valve hole, which is formed from the annular reduced diameter surface toward the valve hole side.
The third annular ridge line at which the inner peripheral surface of the annular recess portion and the annular reduced diameter surface intersect is located in the vicinity of the annular ridge line, and forms the flow path narrowing portion together with the annular ridge line.
The fourth annular ridge line where the inner surface of the annular recess portion on the valve hole side and the inner peripheral surface of the valve hole intersect is located in the vicinity of the second annular ridge line, and the second flow together with the second annular ridge line. Forming a road narrowing section,
A fluid control valve characterized by. In the fluid control valve according to claim 6,
The distance from the valve seat to the inner surface of the annular recess on the valve hole side is 0.03 mm to 0 than the distance from the contact surface to the end surface of the second step portion on the valve hole side. .13mm smaller,
A fluid control valve characterized by. In the fluid control valve according to any one of claims 4 to 7.
The distance from the outer peripheral surface of the stepped portion to the outer peripheral surface of the second stepped portion shall be within the range of 0.4 mm to 0.8 mm.
A fluid control valve characterized by. In the fluid control valve according to any one of claims 1 to 8.
A valve body having the valve chamber and the valve hole inside,
A cover member stacked on the valve body from a direction parallel to the contact separation direction of the valve body,
The valve body is connected to the central portion, and a thin film member having a thin film portion elastically deformed during the contact separation operation of the valve body is provided on the outer periphery of the central portion.
The valve body is provided with an opening for attaching the thin film member on the side of the cover member.
The thin film member includes an annular fixing portion along the outer circumference of the thin film portion.
The thin film member attached to the opening by press-fitting the annular fixing portion into the opening sandwiches the annular fixing portion between the cover member and the valve body from both sides in the contact separation direction. To be fixed by
The annular fixing portion is provided with an annular notch portion that cuts out from the outer peripheral surface to the end surface on the valve body side, leaving the end portion on the cover member side along the entire circumference of the outer circumference.
A fluid control valve characterized by. In the fluid control valve according to any one of claims 1 to 9.
Provided with a guide portion for guiding the operation of contacting and separating the valve body by inserting a part of the valve body.
The valve body is provided with a sliding portion that comes into contact with the inner peripheral surface of the guide portion.
The sliding portion is made of an elastic member, and by being pressed against the inner peripheral surface, an elastic reaction force is applied to the inner peripheral surface.
A fluid control valve characterized by. In the fluid control valve according to any one of claims 1 to 10.
A pedestal that is in contact with the installation surface and a fixing member for fixing the fluid control valve to the installation surface are provided.
The fixing member includes a fitting portion to be fitted to the pedestal and a fixing portion capable of being coupled to the installation surface.
The pedestal has a fitting frontage that can be fitted with the fitting portion, and is elastically deformable in the width direction of the fitting frontage to the back side of the fitting frontage in the fitting direction, and the fitting portion. With a locking piece that can be engaged with,
By the fitting operation of fitting the fitting portion to the fitting frontage, the fitting portion elastically deforms the locking piece from the initial position, and when the fitting operation is completed, the locking piece is subjected to the initial setting. By returning to the position, the fitting portion and the locking piece are engaged to regulate the movement of the fixing member in the removal direction.
A fluid control valve characterized by.

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