JP2021019053A - Semiconductor laser module, light source unit, light source device, and fiber optic laser - Google Patents

Abstract

To provide a semiconductor laser module, a light source unit, and a direct diode laser which are highly reliable and can be miniaturized.SOLUTION: A semiconductor laser module 10 according to the present invention includes a semiconductor laser element 11 that outputs a multi-mode laser beam, a reflector 13 having a paraboloid 13a that collimates the laser beam in the vertical direction, and a package housing 15 having a mounting surface on which the semiconductor laser element is mounted and a window portion 16 through which a laser beam collimated by the reflector 13 is transmitted, and the mounting surface of the package housing 15 on which the semiconductor laser element is mounted is a heat radiating surface, and the window portion 16 is provided on a surface facing the mounted surface.SELECTED DRAWING: Figure 1

Description

The present invention relates to a semiconductor laser module, a light source unit, a light source device, and an optical fiber laser.

Conventionally, a laser module including a semiconductor laser element housed in a package housing and a condensing optical system for coupling a laser beam output from the semiconductor laser element to an optical incident end face of an optical fiber is known (for example). See Patent Document 1).

In such a laser module, for example, a FAC lens or a SAC lens is used to collimate the beams in the fast axis direction and the slow axis direction of the laser beam, respectively. Since the collimated lens such as the FAC lens is arranged outside the package housing, the focal length cannot be shortened, and the collimated beam width becomes wide, so that the system size becomes large.

Japanese Unexamined Patent Publication No. 2004-253783

By incorporating the collimating lens in the package housing, the collimating beam width can be narrowed and the system can be miniaturized. However, when the collimating lens is fixed in the package housing, the fixing agent may be deteriorated by the irradiation of the laser beam, which may adversely affect the reliability of the semiconductor laser element.

The present invention has been made in view of the above, and an object of the present invention is to provide a highly reliable and miniaturized semiconductor laser module, a light source unit, a light source device, and an optical fiber laser.

In order to solve the above-mentioned problems and achieve the object, the semiconductor laser module according to the present invention has a semiconductor laser element that outputs a multimode laser beam and a radial surface that collimates the laser beam in the vertical direction. A package housing having a reflector, a mounting surface on which the semiconductor laser element is mounted, and a window portion through which the collimated laser beam is transmitted is provided, and the semiconductor laser of the package housing is mounted. The mounting surface to be mounted is a heat radiating surface, and the window portion is provided on a surface facing the mounting surface.

Further, the semiconductor laser module according to the present invention is characterized in that, in the above invention, the package housing is hermetically sealed.

Further, in the above invention, the semiconductor laser module according to the present invention is characterized in that at least one of the side surfaces perpendicular to the mounting surface is a heat radiating surface.

Further, the semiconductor laser module according to the present invention is characterized in that, in the above invention, the reflector is mounted on the mounting surface.

Further, the semiconductor laser module according to the present invention is characterized in that, in the above invention, the reflector is made of a glass material whose mounting surface is metallized, and is bonded to the mounting surface of the package housing by soldering. To do.

Further, the light source unit according to the present invention includes the semiconductor laser module according to any one of the above, a SAC element that collimates a laser beam output from the semiconductor laser module in the horizontal direction, the semiconductor laser module, and the above. The SAC lens is characterized by comprising a condensing lens that condenses beams collimated in the vertical and horizontal directions, and an optical fiber that photocouples the beams condensed by the condensing lens.

Further, the light source unit according to the present invention is characterized in that, in the above invention, the SAC element is a lens or a mirror.

Further, the light source unit according to the present invention includes a plurality of semiconductor laser modules according to any one of the above, a plurality of first reflection mirrors each reflecting a laser beam output from the semiconductor laser module, and a plurality of first reflection mirrors. A plurality of SAC lenses that collimate the laser beam output from the semiconductor laser module in the horizontal direction, and beams collimated in the vertical and horizontal directions by the semiconductor laser module and the SAC lens are reflected, respectively. A semiconductor laser is formed by combining the two reflection mirrors, a condensing lens that condenses the laser beam from the second reflection mirror, an optical fiber that photocouples the condensed beam of the condensing lens, and the semiconductor laser module. A mounting member to be mounted on the mounting surface of the element is provided, and the mounting surface of the semiconductor laser module of the mounting member has a stepped shape, and one semiconductor laser module is arranged in one step portion, and one step is provided. The laser beam output from the semiconductor laser module arranged in each unit is reflected or collimated through the plurality of first reflection mirrors, the plurality of SAC lenses, and the plurality of second reflection mirrors, respectively. The condensing lens is characterized in that it condenses a group of laser beams reflected by each of the plurality of second reflecting mirrors.

Further, the light source unit according to the present invention includes a plurality of semiconductor laser modules according to any one of the above, a plurality of first reflection mirrors each reflecting a laser beam output from the semiconductor laser module, and a plurality of first reflection mirrors. A plurality of SAC lenses that collimate the laser beam output from the semiconductor laser module in the vertical direction, and beams collimated in the vertical direction and the horizontal direction by the semiconductor laser module and the SAC lens are reflected, respectively. A semiconductor laser is formed by combining the two reflection mirrors, a condensing lens that condenses the laser beam from the second reflection mirror, an optical fiber that photocouples the condensed beam of the condensing lens, and the semiconductor laser module. The plurality of semiconductor laser modules are mounted on the same plane of the mounting member, and the laser beam output from the semiconductor laser module is the plurality of first units, including a mounting member mounted on the mounting surface of the element. From the first reflective mirror, the SAC lens, and the second reflective mirror so that they are reflected or collimated via the reflective mirror, the plurality of SAC lenses, and the plurality of second reflective mirrors, respectively. A set of optical systems is arranged at different heights, and the condenser lens collects a group of laser beams reflected by the plurality of second reflection mirrors arranged at different heights. It is characterized by.

Further, the light source unit according to the present invention is characterized in that, in the above invention, the SAC lens is arranged between the semiconductor laser module and the first reflection mirror, respectively.

Further, the light source unit according to the present invention includes a plurality of semiconductor laser modules according to any one of the above, and a plurality of SAC lenses that collimate the laser beam output from the semiconductor laser module in the horizontal direction. A second reflection mirror that reflects the beams collimated in the vertical and horizontal directions by the semiconductor laser module and the SAC lens, and a condenser lens that collects the laser beam from the second reflection mirror. The semiconductor of the mounting member includes an optical fiber that photocouples the beam focused by the condensing lens and a mounting member that mounts the semiconductor laser module on a side surface perpendicular to the mounting surface of the semiconductor laser element. The mounting surface of the laser module has a stepped shape, and a set of the semiconductor laser module, the SAC lens, and the second reflection mirror are arranged in one step portion, and the semiconductor laser module is the semiconductor laser. The laser beam output from the module is arranged so as to be parallel to the step portion, and the condenser lens collects a group of laser beams reflected by the plurality of second reflection mirrors arranged in each step portion. It is characterized by shining.

Further, the light source device according to the present invention is characterized by including at least one light source unit according to any one of the above.

Further, the optical fiber laser according to the present invention is characterized by including the light source device described above and an optical amplification fiber photoexcited by a laser beam output from the light source unit.

According to the present invention, it is possible to realize a semiconductor laser module, a light source unit, a light source device, and an optical fiber laser that can be miniaturized and have high reliability.

FIG. 1 is a schematic partial cutaway drawing of the semiconductor laser module according to the first embodiment of the present invention. FIG. 2 is a schematic plan view of a light source unit using the semiconductor laser module of FIG. FIG. 3 is a schematic partial cutaway drawing showing a side surface of the light source unit shown in FIG. FIG. 4 is a diagram showing the arrangement of the semiconductor laser module and the optical system in the light source unit shown in FIG. FIG. 5 is a schematic view of a light source device using the light source unit of FIG. FIG. 6 is a schematic view of an optical fiber laser using the light source unit of FIG. FIG. 7 is a diagram showing another example of arrangement of the semiconductor laser module and the optical system in the light source unit shown in FIG. FIG. 8 is a schematic partial cutaway drawing showing a side surface of the optical unit according to the second embodiment of the present invention. FIG. 9 is a schematic plan view of the light source unit according to the third embodiment of the present invention. FIG. 10 is a schematic partial cutaway drawing showing a side surface of the light source unit shown in FIG. FIG. 11 is a diagram showing the arrangement of the semiconductor laser module and the optical system in the light source unit shown in FIG.

Hereinafter, embodiments of the semiconductor laser module, optical unit, light source device, and optical fiber laser according to the present invention will be described with reference to the drawings. The present invention is not limited to this embodiment. Further, in the description of the drawings, the same or corresponding elements are appropriately designated by the same reference numerals. In addition, it should be noted that the drawings are schematic, and the relationship between the dimensions of each element, the ratio of each element, and the like may differ from the reality. Even between drawings, there may be parts where the relationship and ratio of dimensions are different from each other.

(Embodiment 1)
First, the configuration of the semiconductor laser module according to the embodiment of the present invention will be described. FIG. 1 is a schematic partial cutaway drawing of the semiconductor laser module according to the embodiment of the present invention. The semiconductor laser module 10 includes a semiconductor laser element 11 that outputs a multi-mode laser beam, a reflector 13 having a radial surface 13a that collimates the laser beam in the vertical direction, and a package housing 15 that houses the semiconductor laser element 11. And have.

The semiconductor laser element 11 is a multimode laser and is mounted on the submount 12. The semiconductor laser element 11 outputs a laser beam in the direction of the reflector 13 on the right side of the paper surface. The semiconductor laser element 11 is a high-output semiconductor laser element having an output laser light intensity of 1 W or more and further 10 W or more. In the present embodiment, the light intensity of the laser beam output by the semiconductor laser device 11 is, for example, 11 W. Further, the semiconductor laser element 11 outputs laser light having a wavelength of, for example, 900 nm to 1000 nm.

The reflector 13 is made of a glass material, and the mounting surface 13b is metallized. The reflector 13 is arranged at a position where the output light of the semiconductor laser element 11 is substantially parallel light in the vertical direction. In the reflector 13, the mounting surface 13b is joined to the bottom surface portion 15a, which is the mounting surface of the package housing 15, via the solder 14. The reflector 13 may be formed of a metal material such as aluminum in addition to the glass material, and the paraboloid 13a is formed with an aluminum coating, a silver coating, or a gold coating with or without a protective film. There is. Further, it is possible to join to the bottom surface portion 15a with an adhesive or the like without metallizing the mounting surface 13b, but from the viewpoint of deterioration of the adhesive or the like as a fixing material, the mounting surface 13b is metallized and the solder 14 is used. It is preferable to join.

The package housing 15 has a substantially rectangular parallelepiped shape, and has a bottom surface portion 15a as a mounting surface and side surface portions 15b, 15c, 15d, 15e (15e is notched in FIG. 1) perpendicular to the bottom surface portion 15a. It is not shown (see FIG. 4) and has an upper surface portion 15f. The package housing 15 is attached to a box portion including a bottom surface portion 15a and side surface portions 15b, 15c, 15d, and 15e in a state where the upper surface portion 15f is hermetically sealed. The bottom surface portion 15a on which the semiconductor laser element 11 is mounted via the submount 12 is a heat radiating surface. The submount 12 and the bottom surface portion 15a are preferably made of a material having good thermal conductivity, and may be a metal member made of various metals or ceramics having high thermal conductivity such as aluminum nitride and beryllium oxide. Further, a window portion 16 that transmits a laser beam is provided on the upper surface portion 15f, which is a surface facing the bottom surface portion 15a.

In the semiconductor laser module 10, when the semiconductor laser element 11 outputs the laser beam in the direction of the reflector 13, the reflector 13 collimates the laser beam with respect to the bottom surface portion 15a of the package housing 15 in the vertical direction. It reflects in the direction of the upper surface portion 15f where the window portion 16 is provided. In the semiconductor laser module 10, since the reflector 13 is provided in the package housing 15, the beam width collimated by the reflector 13 and reflected can be narrowed, and the system can be miniaturized. Further, since the reflector 13 is joined to the bottom surface portion 15a of the package housing 15 and the radial surface 13a is coated with metal, the beam emitted from the semiconductor laser element 11 is emitted from the reflector 13. Since the mounting surface of the semiconductor laser device is not irradiated, deterioration of the fixing material can be prevented, and the reliability of the semiconductor laser element 11 due to deterioration of the fixing material is not adversely affected.

Next, an optical unit using the semiconductor laser module 10 will be described. FIG. 2 is a schematic plan view of a light source unit using the semiconductor laser module of FIG. FIG. 3 is a schematic partial cutaway drawing showing a side surface of the light source unit shown in FIG. FIG. 4 is a diagram showing the arrangement of the semiconductor laser module and the optical system in the light source unit shown in FIG.

The light source unit 100 reflects the six semiconductor laser modules 10-1 to 10-6 and the six first reflection mirrors 20-1 that reflect the laser beams output from the semiconductor laser modules 10-1 to 10-6, respectively. ~ 20-6, six SAC lenses 30-1 to 30-6 that collimate the laser beams output from the semiconductor laser modules 10-1 to 10-6 in the horizontal direction, and the semiconductor laser modules 10-1 to 10-1. A second reflection mirror 40-1 to 40-6 and a second reflection mirror 40 that reflect the beams collimated vertically and horizontally by the 10-6 and the SAC lens 30-1 to 30-6, respectively. Condensing lenses 60 and 62 that collect the laser beams from -1 to 40-6, an optical filter 61, an optical fiber 66 that photocouples the beams focused by the condensing lenses 60 and 62, and a semiconductor laser module. A mounting member 52 for mounting 10-1 to 10-6 on a bottom surface portion 15a, which is a mounting surface of the semiconductor laser element 11, is provided.

Semiconductor laser module 10-1 to 10-6, first reflection mirror 20-1 to 20-6, SAC lens 30-1 to 30-6, second reflection mirror 40-1 to 40-6, condenser lens 60 and 62 are housed in the housing 51. The housing 51 includes a lid 51a as shown in FIG. 3, but in FIG. 2, the lid of the package 51a is not shown. Further, the light source unit 100 includes a lead pin 53 for injecting a current into the semiconductor laser modules 10-1 to 10-6.

As shown in FIG. 3, the mounting surface of the mounting member 52 has a stepped shape, and one semiconductor laser module 10-1 (or 10-2, ..., 10-6) is arranged in one step. Has been done. The semiconductor laser modules 10-1 to 10-6 are arranged with a step inside the housing 51 by the mounting member 52. In addition, a set of first reflective mirrors 20-1 (or 20-2, ..., 20-6), SAC lens 30-1 (or 30-2, ..., 30-6), And the second reflection mirror 40-1 (or 40-2, ..., 40-6) is a semiconductor laser module 10-1 (or 10-2, ..., 40-6), as shown in FIG. From the semiconductor laser module 10-1 (or 10-2, ..., 10-6) at the same height so that the laser beam output from 10-6) can be reflected or transmitted and collimated. It is located at the top. Semiconductor laser module 10-1 to 10-6, first reflection mirror 20-1 to 20-6, SAC lens 30-1 to 30-6, second reflection mirror 40-1 to 40-6, condenser lens The 60, 62, and the optical filter 61 are fixed to the inside of the housing 51, respectively.

One end of the optical fiber 66 on the side where the laser beam is incident is housed inside the housing 51. A loose tube 65 is provided at the insertion portion of the optical fiber 66 into the housing 51, and the boot 64 is externally fitted to a part of the housing 51 so as to cover a part of the loose tube 65 and the insertion portion. ing.

Further, as shown in FIG. 3, the optical fiber 66 is inserted through a glass capillary 67 as an optical component. The optical fiber 66 includes a covering portion 66a, but the covering portion 66a is removed from the portion of the optical fiber 66 that is inserted into the glass capillary 67. Further, the optical fiber 66 includes a protruding portion 66b protruding from the glass capillary 67 on a part on the incident side. The outer periphery of the glass capillary 67 is covered with a light absorber 68. The light absorber 68 is fixed to the housing 51.

The housing 51 is preferably made of a material having good thermal conductivity in order to suppress an internal temperature rise, and may be a metal member made of various metals. Further, as shown in FIG. 3, it is preferable that the bottom surface of the housing 51 is separated from the surface on which the light source unit 100 is installed in the region where the glass capillary 67 is arranged. As a result, when fixing the housing 51 with screws or the like, the influence of the warp on the bottom surface of the housing 51 can be reduced.

As described above, the mounting member 52 is fixed in the housing 51, adjusts the height of the semiconductor laser modules 10-1 to 10-6, and outputs the semiconductor laser modules 10-1 to 10-6. The optical paths of the laser beams do not interfere with each other. The mounting member 52 may be integrally configured with the housing 51.

Optics consisting of a semiconductor laser module 10-1 to 10-6, a first reflection mirror 20-1 to 20-6, a SAC lens 30-1 to 30-6, and a second reflection mirror 40-1 to 40-6. The number of systems may be plural as in the light source unit 100 according to the embodiment, but may be one, and the number thereof is not particularly limited.

The lead pin 35 supplies electric power to the semiconductor laser modules 10-1 to 10-6 via a bonding wire (not shown). The power to be supplied may be a constant voltage, but may be a modulated voltage.

The first reflection mirrors 20-1 to 20-6 may be mirrors provided with various metal films or dielectric films, and at the wavelength of the laser light output by the semiconductor laser module 10-1 to 10-6, The higher the reflectance, the more preferable. Further, the first reflection mirrors 20-1 to 20-6 reflect the laser beam of the corresponding semiconductor laser module 10-1 to 10-6 to the SAC lenses 30-1 to 30-6.

The SAC lenses 30-1 to 30-6 are, for example, cylindrical lenses having a focal length of 5 mm. The SAC lenses 30-1 to 30-6 collimate the output light from the semiconductor laser modules 10-1 to 10-6 in the horizontal direction, respectively. The SAC lenses 30-1 to 30-6 are arranged at positions where the output light from the semiconductor laser modules 10-1 to 10-6 is substantially parallel light.

The second reflection mirrors 40-1 to 40-6 may be mirrors provided with various metal films or dielectric films, and at the wavelength of the laser light output by the semiconductor laser modules 10-1 to 10-6, The higher the reflectance, the more preferable. Further, the second reflection mirror 40-1 to 40-6 finely adjusts the reflection direction so that the laser light of one corresponding semiconductor laser module 10-1 to 10-6 is suitably coupled to the optical fiber 66. can do.

The condenser lenses 60 and 62 are cylindrical lenses having orthogonal curvatures to each other, and are output by the semiconductor laser modules 10-1 to 10-6, and a plurality of second reflection mirrors 40-1 to 40-1 arranged in each stage. The laser light reflected by 40-6 is focused and suitably coupled to the optical fiber 66. The positions of the condenser lenses 60 and 62 are adjusted with respect to the optical fiber 66 so that, for example, the coupling efficiency of the laser light output by the semiconductor laser modules 10-1 to 10-6 to the optical fiber 66 is 85% or more. There is.

The optical filter 61 is, for example, a low-pass filter that reflects light having a wavelength of 1060 nm to 1080 nm and transmits light having a wavelength of 900 nm to 1000 nm. As a result, the optical filter 61 transmits the laser light output by the semiconductor laser modules 10-1 to 10-6, and the semiconductor laser modules 10-1 to 10-6 are irradiated with light having a wavelength of 1060 nm to 1080 nm from the outside. To prevent that. Further, the optical filter 61 is used to prevent the output laser light of the semiconductor laser modules 10-1 to 10-6 slightly reflected by the optical filter 61 from returning to the semiconductor laser modules 10-1 to 10-6. It is arranged at an angle to the optical axis.

The optical fiber 66 may be, for example, a multimode optical fiber having a core diameter of 105 μm and a clad system of 125 μm, but may be a single mode optical fiber. The NA of the optical fiber 112 may be, for example, 0.15 to 0.22.

In the light source unit 100, each semiconductor laser module 10-1 to 10-6 arranged with a step is supplied with electric power from a lead pin 53 to output a laser beam. Each of the output laser beams is collimated in the vertical direction by the reflector 13 in each semiconductor laser module 10-1 to 10-6, and the first reflection mirrors 20-1 to 20-6 pass through the window portion 16. Is output to. The output laser light is bent 90 ° by the first reflection mirrors 20-1 to 20-6 and reflected in the directions of the SAC lenses 30-1 to 30-6, respectively, and the SAC lenses 30-1 to 30-6. Each is collimated horizontally. Next, each laser beam is reflected in the direction of the optical fiber 66 by the second reflection mirrors 40-1 to 40-6, and each laser beam is focused by the condenser lens 60 and the condenser lens 62. It is coupled to the optical fiber 66. The laser light coupled to the optical fiber 66 is guided to the outside of the light source unit 100 by the optical fiber 66 and output. The light source unit 100 prevents unnecessary loss from occurring in the laser beam due to the steps of the semiconductor laser modules 10-1 to 10-6 and the like arranged in the stepped steps of the mounting member 52. In the present embodiment, assuming that the light intensity of the output light of each semiconductor laser module 10-1 to 10-6 is 11 W and the coupling efficiency is 85%, the light of the output light of the light source unit 100 The strength is 56W.

The light source unit 100 can be used as a light source device. FIG. 5 is a schematic view of a light source device using the light source unit of FIG.

The light source device 110 has a plurality of light source units 100, and includes a combiner 90 as an optical coupling unit. The light source device 110 uses the light source unit 100 as an excitation light source. In the plurality of light source units 100 included in the light source device 110, the light is propagated to the combiner 90 by the optical fiber 66. The output ends of the optical fiber 66 are coupled to a plurality of input ports of the combiner 90 having a plurality of inputs and one output. The light source device 110 is not limited to having a plurality of light source units 100, and may have at least one light source unit 100.

Further, the light source unit 100 can be used for an optical fiber laser. FIG. 6 is a schematic view of an optical fiber laser using the light source unit of FIG. The optical fiber laser 200 includes a plurality of light source units 100, a light source device 110 used as an excitation light source, a combiner 90, a rare earth-added optical fiber 130, and an output side optical fiber 140. Highly reflective FBRs (Fiber Bragg Gratings) 120 and 121 are provided at the input end and the output end of the rare earth-added optical fiber 130, respectively.

The input end of the rare earth-added optical fiber 130 is connected to the output end of the combiner 90, and the input end of the outlet-side optical fiber 140 is connected to the output end of the rare earth-added optical fiber 130. The incident portion for incident the laser light output from the plurality of light source units 100 onto the rare earth-added optical fiber 130 may have another configuration instead of the combiner 90. For example, the optical fibers 66 of the output units of the plurality of light source units 100 are arranged side by side, and the laser light output from the plurality of optical fibers 66 is transmitted to the rare earth-added optical fiber 130 by using an incident portion such as an optical system including a lens. It may be configured to be incident on the input end of.

The light source unit 100, the light source device 110, and the optical fiber laser 200 described above can be miniaturized by using the semiconductor laser module 10.

The light source unit 100 may use a SAC mirror instead of the first reflection mirror 20-1 to 20-6 and the SAC lens 30-1 to 30-6. FIG. 7 is a diagram of another example showing the arrangement of the semiconductor laser module and the optical system in the light source unit shown in FIG.

The SAC mirror 70-1 collimates in the horizontal direction while reflecting the laser beam output from the semiconductor laser module 10-1. The second reflection mirror 40-1 reflects the beam collimated vertically and horizontally by the semiconductor laser module 10-1 and the SAC mirror 70-1.

Similar to the light source unit 100, the light source unit including the semiconductor laser module, the SAC mirror, and the second reflection mirror can be miniaturized when used as a light source device or an optical fiber laser.

(Embodiment 2)
Next, the second embodiment will be described. FIG. 8 is a schematic partial cutaway drawing showing a side surface of the optical unit according to the second embodiment of the present invention. Hereinafter, the main differences between the light source unit 100A according to the second embodiment and the light source unit 100 according to the first embodiment will be described.

In the light source unit 100A, similarly to the light source unit 100, the six semiconductor laser modules 10-1 to 10-6 and the six thirds that reflect the laser beams output from the semiconductor laser modules 10-1 to 10-6, respectively. The reflection mirrors 20-1 to 20-6 of 1 and the 6 SAC lenses 30-1 to 30-6 that collimate the laser beams output from the semiconductor laser modules 10-1 to 10-6 in the horizontal direction, respectively. With the second reflection mirror 40-1 to 40-6, which reflects the beams collimated in the vertical and horizontal directions by the semiconductor laser module 10-1 to 10-6 and the SAC lens 30-1 to 30-6, respectively. , Light that photocouples the beams focused by the condensing lenses 60 and 62, the optical filter 61, and the condensing lenses 60 and 62 that condense the laser beams from the second reflection mirrors 40-1 to 40-6. It includes a fiber 66.

In the light source unit 100A, the semiconductor laser modules 10-1 to 10-6 are mounted on the same plane of the mounting member 52A. Also, the first reflective mirror 20-1 (or 20-2, ..., 20-6), the SAC lens 30-1 (or 30-2, ..., 30-6), and the second. A set of optical systems consisting of the reflection mirrors 40-1 (or 40-2, ..., 40-6) of the semiconductor laser module 10-1 (or 10-2, ..., 10-6) ), The first reflection mirror 20-1 (or 20-2, ..., 20-6), SAC lens 30-1 (or 30-2, ..., 30). -6), and the semiconductors are arranged at the same height so that they are reflected or collimated via the second reflection mirror 40-1 (or 40-2, ..., 40-6), respectively. The optical systems are arranged at different heights so that the optical paths of the laser beams output by the laser modules 10-1 to 10-6 do not interfere with each other. Each optical system consisting of a first reflective mirror 20-1 to 20-6, a SAC lens 30-1 to 30-6, and a second reflective mirror 40-1 to 40-6 is arranged at different heights. As a result, the output from the semiconductor laser module 10-1 to 10-6 is output from the first reflection mirror 20-1 to 20-6, the SAC lens 30-1 to 30-6, and the second reflection mirror 40-1 to 40-1. The laser beam group reflected by 40-6 can be focused by the condenser lenses 60 and 62 and optically coupled to the optical fiber 66 without unnecessary loss.

(Embodiment 3)
Next, the third embodiment will be described. FIG. 9 is a schematic plan view of the light source unit according to the third embodiment of the present invention. FIG. 10 is a schematic partial cutaway drawing showing a side surface of the light source unit shown in FIG. FIG. 11 is a diagram showing the arrangement of the semiconductor laser module and the optical system in the light source unit shown in FIG. Hereinafter, the main differences between the light source unit 100B according to the third embodiment and the light source unit 100 according to the first embodiment will be described.

The light source unit 100B does not have six first reflection mirrors 20-1 to 20-6 that reflect the laser beams output from the semiconductor laser modules 10-1 to 10-6, respectively. Different from 100. Further, as shown in FIGS. 9 to 11, the semiconductor laser modules 10-1 to 10-6 are mounted on the mounting member 52 at the side surface portion 15b of the package housing 15.

The mounting surface of the mounting member 52 has a stepped shape, and one set of semiconductor laser modules 10-1 (or 10-2, ..., 10-6) and SAC lens 30-1 (or 30) are formed in one step. -2, ..., 30-6), and a second reflection mirror 40-1 (or 40-2, ..., 40-6) are arranged. The semiconductor laser modules 10-1 to 10-6 are mounted on the mounting member 52 on a side surface (side surface 15b shown in FIG. 1) perpendicular to the mounting surface of the semiconductor element 11. The semiconductor laser modules 10-1 to 10-6 are arranged with a step inside the housing 51 by the mounting member 52. Further, the SAC lenses 30-1 to 30-6 and the second reflection mirrors 40-1 to 40-6 are output from one corresponding semiconductor laser module 10-1 to 10-6, respectively, as shown in FIG. The laser beams are arranged at the same height so that they can be transmitted or reflected.

In the light source unit 100B, each semiconductor laser module 10-1 to 10-6 arranged with a step is supplied with electric power from a lead pin 53 to output a laser beam. Each of the output laser beams is collimated in the vertical direction by the reflector 13 in each semiconductor laser module 10-1 to 10-6, and is collimated in the vertical direction through the window portion 16 in the direction of the SAC lenses 30-1 to 30-6. Each is ejected. The SAC lenses 30-1 to 30-6 collimate the laser beams in the horizontal direction, and each collimated laser light is reflected in the direction of the optical fiber 66 by the second reflection mirror 40-1 to 40-6. Then, each laser beam can be photocoupled to the optical fiber 66 by the condenser lens 60 and the condenser lens 62 without unnecessary loss.

In the semiconductor laser module 10-1 to 10-6, the bottom surface portion 15a, which is the mounting surface, is used as the heat dissipation surface. In addition to the bottom surface portion 15a, at least one of the side surface portions perpendicular to the bottom surface portion 15a is the heat dissipation surface. May be. When at least one of the side surface portions perpendicular to the bottom surface portion 15a is used as the heat radiating surface, it is preferable that the side surface portion 15b, which is the mounting surface on the mounting member 52, is used as the heat radiating surface.

As described above, the semiconductor laser module, the light source unit, and the light source device according to the present invention are mainly suitable for use in high-power optical fiber lasers.

10, 10-1 to 10-6 Semiconductor laser module 11 Semiconductor laser element 12 Submount 13 Reflector 14 Solder 15 Package housing 16 Window 20-1 to 20-6 First reflection mirror 30-1 to 30-6 SAC Lens 40-1 to 40-6 Second Reflective Mirror 51 Housing 52 Mounting Member 53 Lead Pin 60, 62 Condensing Lens 61 Light Filter 64 Boots 65 Loose Tube 66 Optical Fiber 67 Glass Capillary 68 Light Absorber 70-1 SAC Mirror 90 Combiner 100, 100A, 100B Light source unit 110 Light source device 130, 131 High reflection FBG
140 Rare earth-added optical fiber 150 Output side optical fiber 200 Optical fiber laser

Claims (13)

A semiconductor laser device that outputs a multi-mode laser beam and
A reflector having a paraboloid that collimates the laser beam in the vertical direction,
A package housing having a mounting surface on which the semiconductor laser is mounted and a window portion through which the reflector collimates a laser beam.
The semiconductor laser module is characterized in that the mounting surface of the package housing on which the semiconductor laser is mounted is a heat dissipation surface, and the window portion is provided on a surface facing the mounting surface. The semiconductor laser module according to claim 1, wherein the package housing is hermetically sealed. The semiconductor laser module according to claim 1 or 2, wherein the package housing has at least one side surface perpendicular to the mounting surface as a heat radiating surface. The semiconductor laser module according to any one of claims 1 to 3, wherein the reflector is mounted on the mounting surface. The semiconductor laser module according to claim 4, wherein the reflector is made of a glass material whose mounting surface is metallized, and is joined to the mounting surface of the package housing by soldering. The semiconductor laser module according to any one of claims 1 to 5.
A SAC element that collimates the laser beam output from the semiconductor laser module in the horizontal direction,
A condensing lens that collects beams collimated vertically and horizontally by the semiconductor laser module and the SAC lens.
An optical fiber that photocouples the beam focused by the condenser lens,
A light source unit characterized by being equipped with. The light source unit according to claim 6, wherein the SAC element is a lens or a mirror. The plurality of semiconductor laser modules according to any one of claims 1 to 5 and
A plurality of first reflection mirrors that reflect the laser beam output from the semiconductor laser module, respectively.
A plurality of SAC lenses that collimate the laser beam output from the semiconductor laser module in the horizontal direction, respectively.
A second reflection mirror that reflects beams collimated vertically and horizontally by the semiconductor laser module and the SAC lens, respectively.
A condenser lens that collects the laser beam from the second reflection mirror, and
An optical fiber that photocouples the beam focused by the condenser lens,
A mounting member for mounting the semiconductor laser module on the mounting surface of the semiconductor laser element is provided.
The mounting surface of the semiconductor laser module of the mounting member has a stepped shape, one of the semiconductor laser modules is arranged in one step, and a laser output from the semiconductor module arranged in each of the steps. The beam is reflected or collimated via the plurality of first reflection mirrors, the plurality of SAC lenses, and the plurality of second reflection mirrors, respectively.
The condensing lens is a light source unit characterized by condensing a group of laser beams reflected by each of the plurality of second reflection mirrors. The plurality of semiconductor laser modules according to any one of claims 1 to 5 and
A plurality of first reflection mirrors that reflect the laser beam output from the semiconductor laser module, respectively.
A plurality of SAC lenses that collimate the laser beam output from the semiconductor laser module in the horizontal direction, respectively.
A second reflection mirror that reflects beams collimated vertically and horizontally by the semiconductor laser module and the SAC lens, respectively.
A condenser lens that collects the laser beam from the second reflection mirror, and
An optical fiber that photocouples the beam focused by the condenser lens,
A mounting member for mounting the semiconductor laser module on the mounting surface of the semiconductor laser element is provided.
The plurality of semiconductor laser modules are mounted on the same plane of the mounting member, and the laser beams output from the plurality of semiconductor modules are the plurality of first reflection mirrors, the plurality of SAC lenses, and the plurality of laser beams. A set of optics consisting of the first reflective mirror, the SAC lens, and the second reflective mirror are arranged at the same height so that they are reflected or collimated, respectively, through the second reflective mirror. At the same time, each optical system is arranged at a different height,
The condensing lens is a light source unit that condenses a group of laser beams reflected by each of the plurality of second reflecting mirrors arranged at different heights. The light source unit according to claim 7 or 8, wherein the SAC lens is arranged between the semiconductor laser module and the first reflection mirror, respectively. The plurality of semiconductor laser modules according to any one of claims 1 to 5 and
A plurality of SAC lenses that collimate the laser beam output from the semiconductor laser module in the horizontal direction, respectively.
A second reflection mirror that reflects beams collimated vertically and horizontally by the semiconductor laser module and the SAC lens, respectively.
A condenser lens that collects the laser beam from the second reflection mirror, and
An optical fiber that photocouples the beam focused by the condenser lens,
A mounting member for mounting the semiconductor laser module on a side surface perpendicular to the mounting surface of the semiconductor laser element is provided.
The mounting surface of the semiconductor laser module of the mounting member has a stepped shape, and a set of the semiconductor laser module, the SAC lens, and the second reflection mirror are arranged in one step, and the semiconductor laser is arranged. The module is arranged so that the laser beam output from the semiconductor laser module is parallel to the step portion.
The condensing lens is a light source unit that condenses a group of laser beams reflected by a plurality of the second reflection mirrors arranged in each stage. A light source device comprising at least one light source unit according to any one of claims 6 to 11. The light source device according to claim 12,
An optical amplifier fiber that is photoexcited by the laser light output from the light source unit,
An optical fiber laser characterized by comprising.

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