JP2020194901A - Transfer robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To save space by integrating a work holding portion and a ring frame gripping portion in a transfer robot so that the work and the ring frame can be conveyed and the ring frame is not deformed. SOLUTION: The robot 1 conveys a plate-shaped work and a ring frame, sandwiches a suction pad 12 for holding the work, a first moving means 3 for moving the suction pad 12 back and forth in the X-axis direction, and a frame opening. Two rails 16a and b arranged in parallel to support both side surfaces of the frame, a second moving means 4 for moving the rails back and forth in the X-axis direction, a ring frame outer peripheral edge grip portion 50, and a grip portion 50 in the X-axis direction. The third moving means 6 for moving the ring frame in the X-axis direction on the rails 16a and b, and the suction pad 12, the rails 16a and 16b, and the grip portion 50 are swiveled in the horizontal direction or in the Y-axis direction. A robot 1 including a fourth moving means 7 that directly moves the suction pad 12, rails 16a and 16b, and a lifting means 8 that raises and lowers the grip portion 50 in the Z-axis direction. [Selection diagram] Fig. 2

Description

The present invention relates to a robot that conveys a plate-shaped work and a ring frame having an opening.

A conventional transfer robot includes a work holding portion that sucks and holds a plate-shaped work and conveys it, and a grip portion that grips and conveys a ring frame (see, for example, Patent Document 1).

JP-A-2017-130515

Since the grip portion grips and conveys a part of the ring frame, there is a problem that the ring frame is bent by the weight and the ring frame is deformed with the gripped portion as a fulcrum. Further, the plate-shaped work is conveyed to a device for grinding the plate-shaped work, a tape mounter device for attaching tape to the plate-shaped work, and a device for dividing the plate-shaped work (for example, a cutting device or a laser processing device). At that time, there is a problem that a plurality of transfer robots are required, which takes up space.

Therefore, in the transfer robot, the work holding portion that holds the plate-shaped work and the grip portion that grips the ring frame are integrated to save space, and the plate-shaped work and the ring frame can be conveyed. , There is a problem of transporting the ring frame so as not to deform it.

The present invention for solving the above problems is a robot that conveys a plate-shaped work and a ring frame having an opening, and horizontally holds a suction pad having a suction surface for sucking and holding the plate-shaped work and the suction pad. A first moving means for advancing or reversing in the X-axis direction in a direction, two rails arranged in parallel with an opening of the ring frame in between to support both side surfaces of the ring frame, and the rails in the X-axis direction. A second moving means for advancing or reversing, a grip portion for gripping the outer peripheral edge of the ring frame, and a grip portion for advancing or reversing the grip portion in the X-axis direction to move the ring frame in the X-axis direction on the rail. A third moving means for moving, and a fourth moving means for rotating the suction pad, the rail, and the grip portion in the horizontal direction, or linearly moving the suction pad, the rail, and the grip portion in the Y-axis direction orthogonal to the X-axis direction. The transfer robot includes a suction pad, a rail, and a lifting means for raising and lowering the grip portion in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction.

The transfer robot according to the present invention accommodates the suction pad, the grip portion, the rail, the first moving means, the second moving means, and the third moving means, and the suction pad can be taken in and out and the suction pad is taken in and out. It is preferable to have a box having a grip portion and an entrance / exit where the rail can be taken in and out.

The transfer robot according to the present invention includes an adhesive roller that is arranged below the suction pad, is rotatable about a rotation axis extending in a direction intersecting the X-axis direction, and has an adhesive on the outer surface. The suction pad is positioned at a height at which the suction surface contacts the outer surface of the adhesive roller by the elevating means, and the suction pad is moved forward or backward in the X-axis direction by the first moving means to move the suction surface. It is preferable to bring the adhesive roller into contact with the outer surface of the adhesive roller and roll the adhesive roller to dry-clean the suction surface.

The transfer robot according to the present invention that conveys the plate-shaped work and the ring frame having an opening has a suction pad having a suction surface for sucking and holding the plate-shaped work, and the suction pad is moved forward or backward in the X-axis direction in the horizontal direction. The first moving means for causing the rails to be moved, two rails arranged in parallel across the opening of the ring frame to support both side surfaces of the ring frame, the second moving means for moving the rails forward or backward in the X-axis direction, and the ring frame. The grip portion that grips the outer peripheral edge, the third moving means that moves the grip portion forward or backward in the X-axis direction and moves the ring frame in the X-axis direction on the rail, and the suction pad, the rail, and the grip portion are horizontal. A fourth moving means that swivels in the direction or moves linearly in the Y-axis direction that is orthogonal to the X-axis direction, and a suction pad, a rail, and a grip portion that are orthogonal to the X-axis direction and the Y-axis direction. By providing an elevating means for ascending and descending in the axial direction, space can be saved, and since the ring frame is supported by rails and taken in and out, it is possible to transport the ring frame without deforming it. Then, for example, a grinding device for grinding the plate-shaped work, and a work unit in which the plate-shaped work is supported by a ring frame with a ring frame so that the small-sided chips do not disperse after the plate-shaped work is divided are integrated. It is possible to efficiently convey the plate-shaped workpiece or ring frame to the tape mounter to be formed or a dividing device such as a dicing device or a laser processing device.

The transfer robot according to the present invention accommodates the suction pad, the grip portion, the rail, the first moving means, the second moving means, and the third moving means, and the suction pad can be taken in and out, and the grip portion and the rail can be taken in and out. By providing a box with an entrance / exit, it is possible to save space, to properly position the suction pad with respect to the plate-shaped work, and to appropriately position the grip or rail with respect to the ring frame. It becomes possible.

The transfer robot according to the present invention is provided with an adhesive roller that is arranged below the suction pad and is rotatable about a rotation axis extending in a direction intersecting the X-axis direction and has an adhesive on the outer surface. The suction pad is positioned at a height at which the suction surface contacts the outer surface of the adhesive roller by the elevating means, and the suction pad is moved forward or backward in the X-axis direction by the first moving means to bring the suction surface into contact with the outer surface of the adhesive roller. It is possible to dry-clean the suction surface by rolling the adhesive roller.

It is a perspective view which shows an example of the whole transfer robot from above. It is a perspective view which shows an example of the whole transfer robot with the box removed from above. It is a perspective view which shows an example of the whole transfer robot from below. It is a perspective view which shows the suction pad, the first movement means, the suction pad, the fourth movement means, and the elevating means of a transfer robot from above. It is a perspective view which shows an example of the structure of the 1st moving means, the 2nd moving means, the 3rd moving means, the gripping part, and a rail of a transfer robot from above behind the transfer robot. It is a perspective view which shows an example of the structure of the 2nd moving means, the 3rd moving means, the grip part, and a rail of a transfer robot from the upper side of the front side of a transfer robot. It is a perspective view explaining an example of the gripping part of a transfer robot and the third moving means. It is a perspective view explaining a state in which a transfer robot supports a work unit by a rail and conveys it. It is a perspective view explaining the state in which the work unit in which the ring frame is gripped by the gripping portion is moving on the ring frame by the third moving means.

The transfer robot 1 according to the present invention, which is shown in its entirety in FIGS. 1 to 3, is, for example, a grinding device, a tape mounter, and a dividing device (not shown) installed in a clean room or the like by arranging or connecting them at predetermined intervals. It is arranged so as to be movable between (cutting device, laser processing device, or expanding device) or the front of each device. That is, for example, a guide rail or the like is arranged between or in front of each of the above-mentioned devices, and a transfer robot 1 that moves along the guide rail can pass between each device or in front of each device. It is a passage. The transfer robot 1 that moves on the guide rail by a linear motor type moving mechanism or the like is a work unit composed of a plate-shaped work W or a ring frame F, or a plate-shaped work W, a circular tape not shown, and a ring frame F. It is possible to carry out smooth loading and unloading and handling between each device by using only the transfer robot 1.

The plate-shaped work W shown in FIG. 1 is, for example, a circular semiconductor wafer made of a silicon base material or the like, but the type and shape of the plate-shaped work W are not particularly limited, and gallium arsenide, sapphire, gallium nitride, and ceramics are not particularly limited. , Resin, silicon carbide or the like, or a rectangular package substrate or the like.
The substantially annular ring frame F shown in FIG. 1 is formed in a substantially annular plate shape by, for example, SUS or the like, and a circular opening penetrating from the front surface to the back surface is formed in the center. A flat surface Fc for positioning is formed on the outer circumference of the ring frame F by notching a part of the outer circumference flatly.

As shown in FIGS. 1 to 3, the transfer robot 1 according to the present invention that conveys a plate-shaped work W, a ring frame F having an opening, or a work unit including a plate-shaped work W and a circular tape and a ring frame F (not shown) is shown in FIGS. A suction pad 12 having a suction surface for sucking and holding the plate-shaped work W, a first moving means 3 (see FIG. 4) for moving the suction pad 12 forward or backward in the X-axis direction in the horizontal direction, and a ring frame F. Two rails 16a and 16b (see FIG. 2) arranged in parallel with the opening in between to support both side surfaces of the ring frame F, and a second moving means 4 (see FIG. 2) for moving the rails 16a and 16b forward or backward in the X-axis direction. (See FIGS. 5 and 6), the grip portion 50 that grips the outer peripheral edge of the ring frame F, and the grip portion 50 are moved forward or backward in the X-axis direction to move the ring frame F in the X-axis direction on the rails 16a and 16b. A fourth movement in which the third moving means 6 to be moved, the suction pad 12, the rails 16a and 16b, and the grip portion 50 are swiveled in the horizontal direction or linearly moved in the Y-axis direction orthogonal to the X-axis direction and the horizontal direction. At least the means 7 (see FIG. 3) and the elevating means 8 for raising and lowering the suction pad 12, the rails 16a and 16b, and the grip portion 50 in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction are provided.

The suction pad 12 shown in FIGS. 2 and 3 has a circular outer shape, and is composed of a porous member or the like and has a suction portion 120 that sucks the plate-shaped work W and a frame body 121 that surrounds and supports the suction portion 120. And. The suction unit 120 communicates with a suction source, which is an ejector mechanism or a vacuum generator (not shown), via a joint 129 (see FIGS. 2 and 4), a flexible resin tube (not shown), and the like. Then, the suction force generated by the operation of the suction source (not shown) is transmitted to the flat suction surface 120a which is the exposed surface (lower surface) of the suction unit 120.
The structure of the suction pad 12 is not limited to the above example, and a plurality of suction grooves may be formed on the suction surface.

As shown in FIG. 4, in the suction pad 12, the upper surface of the frame body 121 is connected to the lower surface of the transport arm 13 via the connector 125 by bolts 125a.
The transport arm 13 extends in the shape of a long plate in the X-axis direction below the first base plate 30 of the first moving means 3 shown in FIG. 4, which will be described later, and the root portion 130 on the + X direction side thereof extends. It is connected to the arm connecting portion 341 of the first moving means 3.

The first moving means 3 shown in FIG. 4 includes a first base plate 30 whose longitudinal direction is the X-axis direction, and a first ball screw 31 extending in the X-axis direction in the central region of the upper surface of the first base plate 30. , And a pair of first guide rails 32 arranged in parallel with the first ball screw 31 with the first ball screw 31 sandwiched between them, and the first ball screw 31 connected to the rear end side (+ X direction side). A first rotation drive mechanism 33 for rotating one ball screw 31 and a first movable member 34 whose bottom surface slides on the first guide rail 32 are provided.

The first rotary drive mechanism 33 is, for example, a pulley mechanism. The first rotary drive mechanism 33 includes a plate-shaped motor bracket 330 shown in FIGS. 4 and 5 extending in the Z-axis direction. The motor bracket 330 is formed with two mounting holes at the top and bottom, and the shaft of the first motor 331 serving as a rotation drive source and the main pulley 332 attached to the shaft are inserted into the mounting holes on the upper side. A driven pulley 333 attached to the rear end side of the first ball screw 31 (see FIG. 4) and the rear end of the first ball screw 31 is inserted into the through hole on the lower side. An endless belt 334 is wound around the main pulley 332 and the driven pulley 333. When the first motor 331 rotates and drives the main pulley 332, the endless belt 334 rotates with the rotation of the main pulley 332, and the endless belt 334 rotates to rotate the driven pulley 333 and the first ball screw 31. Rotates.

The first movable member 34 shown in FIG. 4 includes, for example, a substantially rectangular elongated plate extending in the Y-axis direction, and slides on both outer surfaces of the lower surface of the elongated plate on the first guide rail 32. A slide member 340 in contact is attached, and a first ball screw 31 is screwed into a nut (not shown) arranged in the center of the lower surface.

Two elongated holes 300 formed by being cut out in a rectangular shape extending in the X-axis direction are formed at positions outside the first guide rails 32 in the central region of the first base plate 30. Has been done. For example, an arm connecting portion 341 connected to the root portion 130 of the transport arm 13 that supports the suction pad 12 is formed on the lower surfaces of the long plate of the first movable member 34 on both ends in the Y-axis direction. That is, the arm connecting portion 341 hangs down in the −Z direction, passes through the elongated hole 300 of the first base plate 30, and then is fixed to the root portion 130 of the transport arm 13 located below the elongated hole 300. Etc. are connected.

Therefore, when the first rotation drive mechanism 33 rotates the first ball screw 31, the first movable member 34 is guided by the first guide rail 32 and is below the first base plate 30. It reciprocates in the X-axis direction together with the position transfer arm 13, and the suction pad 12 arranged on the tip side of the transfer arm 13 also reciprocates in the X-axis direction accordingly.

As shown in FIGS. 2 and 5, the upper part of the first ball screw 31, the first guide rail 32, and the elongated hole 300 shown in FIG. 4 is covered with the sheet metal cover 39. For example, FIG. As shown in 5, the first motor 331 of the first rotation drive mechanism 33 is in a state of being attached to the upper surface of the sheet metal cover 39.
Then, each component described later of the second moving means 4 is placed on a region of the upper surface of the first base plate 30 shown in FIGS. 2 and 5 which is not covered by the sheet metal covers 39 on both sides in the Y-axis direction.

The second moving means 4 for advancing or reversing the pair of rails 16a and 16b shown in FIGS. 5 and 6 in the X-axis direction is, for example, covered with a Y-axis direction outer region (covered with a sheet metal cover 39) on the upper surface of the first base plate 30. A second ball screw 41 (shown only in FIG. 6) extending in the X-axis direction in the unbroken region), a second guide rail 42a arranged parallel to the second ball screw 41, and a second guide. The rail 42b, the second rotation drive mechanism 43 connected to the rear end of the second ball screw 41 and rotating the second ball screw 41, and the second bottom surface sliding onto the second guide rails 42a and 42b. The movable members 44a and 44b of the above are provided.

The second ball screw 41 and the second guide rail 42a located on the upper surface of the first base plate 30 in the −Y direction form a slider type robot cylinder and are protected by the ball screw cover 45. A cable carrier 45a on which a bundled power cable or the like is placed is attached to the side surface of the ball screw cover 45, for example. The second movable member 44a arranged on the second guide rail 42a has a slider 45d arranged on the lower surface side thereof via the third base plate 60 of the third moving means 6. As the ball screw 41 of the above rotates, the slider 45d makes it possible to slide and move on the second guide rail 42a together with the third base plate 60. A rail 16a is attached to the tip end side of the second movable member 44a.

For example, on the second guide rail 42a, the slider 45d that connects the lower surface of the second movable member 44a with the third base plate 60 is arranged.

As shown in FIGS. 5 and 6, the flat plate-shaped second movable member 44b located in the region on the + Y direction side of the upper surface of the first base plate 30 has the second movable member 44a and the X axis as symmetric axes. It has a symmetrical shape, a rail 16b is attached to the tip end side thereof, and a slider (not shown) is attached to the lower surface thereof via a third base plate 60 of the third moving means 6, which is not shown. The slider is slidably loosely fitted to the second guide rail 42b.

As shown in FIGS. 5 and 6, the second rotary drive mechanism 43 is, for example, a pulley mechanism, which includes a plate-shaped motor bracket 430 extending in the Z-axis direction, and is provided on the lower side of the motor bracket 430. The shaft of the second motor 431, which is a rotational drive source, and the main pulley 432 attached to the shaft are inserted. A driven pulley 433 attached to the rear end side of the second ball screw 41 and the rear end of the second ball screw 41 is inserted through the upper side of the motor bracket 430. An endless belt 434 is wound around the main pulley 432 and the driven pulley 433. When the second motor 431 rotates and drives the main pulley 432, the endless belt 434 rotates with the rotation of the main pulley 432, and the endless belt 434 rotates, so that the driven pulley 433 and the second ball screw 41 Rotates, and the second movable member 44a on the second guide rail 42a moves in the X-axis direction.

The rear end side of the second movable member 44a and the rear end side of the second movable member 44a are connected by a cylinder mechanism 169 which will be described later extending in the Y-axis direction, and the second movable member 44b is connected. The second movable member 44a reciprocates in the X-axis direction in conjunction with the reciprocating movement in the X-axis direction.

As shown in FIGS. 5 and 6, each of the two rails 16a and 16b has an L-shaped cross section and extends parallel to the X-axis direction. The two rails 16a and 16b are connected to the tip ends of the second movable member 44a and the second movable member 44b so that the stepped guide surfaces (inner side surfaces) face each other. The ring frame F gripped by the grip portion 50, which will be described later, is placed on the two rails 16a and 16b, and the guide surface is on the flat surface Fc (see FIG. 1) for positioning the ring frame F in the ± Y direction. Contact from.
For example, a detection sensor 163 such as an optical sensor that detects the ring frame F may be arranged at the tips of the two rails 16a and 16b.

In the present embodiment, as shown in FIGS. 5 and 6, the rail 16a and the rail 16b are attached to the second movable member 44a to which the rail 16a is attached and the second movable member 44b to which the rail 16b is attached. A cylinder mechanism 169 is provided that allows the distance to be extended from, for example, a distance capable of supporting a 200 mm ring frame F to a distance capable of supporting, for example, a 300 mm ring frame F. The cylinder mechanism 169 guides the second movable member 44a to the guide 169a arranged on the third base plate 60, which will be described later, and moves the second movable member 44b in the -Y direction to move the second movable member 44b to the third base. The guide 169b arranged on the plate 60 can be guided and moved in the + Y direction to change the 300 mm ring frame F into a state in which it can be supported by the rails 16a and 16b.

The third moving means 6 shown in FIGS. 6 and 7 for moving the gripping portion 50 holding the ring frame F in the X-axis direction is, for example, above the sheet metal cover 39 of the first moving means 3 as shown in FIG. A third base plate 60 having a rectangular shape in a plan view in which the two movable members 44a and 44b are connected and movable in the X-axis direction, a third ball screw 61 having an axial center in the X-axis direction, and a third ball screw 61. A third rotary drive that connects a pair of third guide rails 62 arranged on the third base plate 60 in parallel with the third base plate 60 and the rear end of the third ball screw 61 to rotate the third ball screw 61. It includes a mechanism 63 and a third movable member 64 whose bottom surface slides into contact with the third guide rail 62.

In the third base plate 60, the left and right outer regions are cut out in a rectangular shape extending in the X-axis direction, for example, and two cutout portions 600 are formed. For example, the cutout on the + Y direction side in FIGS. A third ball screw 61 is housed in the notch 600.

The third rotary drive mechanism 63 is, for example, a pulley mechanism including a third motor 630 and an endless belt (not shown), and the third motor 630 is a motor bracket 633 next to the + Y direction side of the third base plate 60. The third ball screw 61 can be rotated by rotationally driving the third motor 630.

The third movable member 64 is, for example, a long plate extending in the Y-axis direction, and a nut arranged inside a connecting portion 640 provided at the end on the + Y direction side is attached to the third ball screw 61. Each slider 641 screwed and arranged on the lower surfaces on both ends thereof is loosely fitted to the third guide rail 62 so as to be slidable. A grip portion fixing plate 51 on which the grip portion 50 is arranged is screwed to a position substantially at the center of the lower surface of the third movable member 64. When the third rotation drive mechanism 63 rotates the third ball screw 61, the third movable member 64 is guided by the third guide rail 62 and is guided on the third base plate 60 together with the grip portion 50. Reciprocates in the X-axis direction.

The grip portion 50 that grips the outer peripheral edge of the ring frame F from the vertical direction is attached to the tip of the grip portion fixing plate 51 that extends from the third movable member 64 in the −X direction side.
The grip portion 50 is, for example, a mechanical clamp having a substantially U-shaped outer shape in a side view, and a direction in which a pair of holding claws 500 facing each other in the Z-axis direction approach each other by a grip portion drive source 501 such as an electric cylinder. The outer peripheral edge of the ring frame F can be gripped by moving to.

For example, on the third base plate 60, a power cable is laid between the third guide rail 62 and the grip portion 50 shown in FIG. 6 by using a fixture or a cable case 66 (not shown). As shown in FIG. 2, the third base plate 60 is partially covered with the sheet metal cover 67 so as to exclude the movement path of the grip portion 50 on the third base plate 60.

In the present embodiment, the third moving means 6 can move above the sheet metal cover 39 of the first moving means 3 in the X-axis direction as a whole of the third moving means 6. That is, as the slider 45d for moving the second movable member 44a and the slider (not shown) for moving the second movable member 44b shown in FIG. 5 move on the second guide rails 42a and 42b, respectively. , The slider 45d and the third moving means 6 mounted on the slider (not shown) are also movable in the X-axis direction.

As shown in FIGS. 1 and 3, the transfer robot 1 in the present embodiment includes the suction pad 12, the grip portion 50, the rails 16a and 16b, the first moving means 3, the second moving means 4, and the third moving means 6. It includes a box 20 having a first opening 201 that accommodates and allows the suction pad 12 to be taken in and out, and a second opening 202 that allows the grip portion 50 and rails 16a and 16b to be taken in and out. In the present embodiment, the first opening 201 and the second opening 202, which are not integrated, form an entrance / exit in which the suction pad 12 can be taken in and out and the grip portion 50 and the rails 16a and 16b can be taken in and out.
The first opening 201 and the second opening 202 are integrated, and the integrated large opening can be used as an entrance / exit where the suction pad 12 can be taken in and out and the grip portion 50 and the rails 16a and 16b can be taken in and out. Good.

The box 20 shown in FIGS. 1 and 3 has, for example, a polygonal outer shape larger than the first base plate 30 and similar to the first base plate 30 in a plan view, and the box top wall 200 and the box top wall 200. The box side wall 203, the box front wall 204, and the box rear wall 205 that hang down from the lower surface of the 200 in the −Z direction are provided.
For example, as shown in FIGS. 2 and 3, the first connecting plate 307 hangs down in the −Z direction from the lower surfaces of both sides of the first base plate 30 in the Y-axis direction, and the first connecting plate 307 From the side surface, the box mounting plate 302 extends horizontally toward the outside in the Y-axis direction. Then, as shown in FIG. 3, the box 20 is mounted on the box mounting plate 302, and the box side wall 203 is fixed to the box mounting plate 302 by a fixture such as a spring can or a bolt. An electric cable (not shown) or the like is also placed and fixed on the box mounting plate 302 in a bundled state.

The first opening 201 to which the suction pad 12 shown in FIGS. 1 and 3 can be taken in and out is formed by cutting out a region on the lower side of the box front wall 204 located on the −X direction side of the box 20 in a substantially rectangular shape. .. Further, the second opening 202 into which the grip portion 50 and the rails 16a and 16b can be taken in and out is formed by cutting out the upper region of the box front wall 204 in a substantially rectangular shape.

At the lower end of the first connecting plate 307, a horizontal plate 79 to which each configuration of the elevating means 8 and the fourth moving means 7 is connected is fixed. Therefore, the suction pad 12 is housed in the space formed by the horizontal plate 79, the two first connecting plates 307 on both sides in the Y-axis direction, and the first base plate 30 so as to be able to move forward and backward in the X-axis direction.

The elevating means 8 for raising and lowering the suction pad 12, the rails 16a and 16b, and the grip portion 50 shown in FIGS. 1 to 3 in the Z-axis direction is, for example, a prismatic block having a substantially concave cross section extending in the Z-axis direction. The body 80, the elevating ball screw 82 (only shown in FIG. 3) having an axial center in the Z-axis direction and arranged on the front surface of the block body 80 on the −X direction side, and the block body 80 parallel to the elevating ball screw 82. Between the pair of elevating guide rails 81 arranged on the front surface and extending in the Z-axis direction, the elevating rotation drive mechanism 83 connected to the lower end of the elevating ball screw 82 to rotate the elevating ball screw 82, and the pair of elevating guide rails 81. It is provided with an elevating member 84 arranged in the above.

An elevating ball screw 82 and a substantially square columnar elevating member 84 are arranged in a recessed portion formed on the front surface of the block body 80 on the −X direction side.
As shown in FIG. 3, the elevating member 84 that can be raised with respect to the fixed block body 80 is fixed to the lower surface of the horizontal plate 79, extends in the Z-axis direction, and moves up and down in the recess of the block body 80. It is provided with at least a possible elevating column portion 840 and a slider 841 that is integrally formed on the lower end side of the elevating column portion 840 and whose side surfaces are loosely fitted to a pair of elevating guide rails 81.
For example, as shown in FIG. 3, a power cable 88 that supplies electric power to each motor of the transfer robot 1 is arranged on the side of the block body 80 via a cable case 880 and a cable bear (registered trademark) (not shown). It is installed.

The elevating / rotating drive mechanism 83 shown in detail in FIG. 3 is, for example, a pulley mechanism, and includes an elevating motor 831 attached to the lower end surface of the block body 80 via a motor bracket 830. A driving pulley 832 is attached to the shaft of the lifting motor 831 which is a drive source for rotating the lifting ball screw 82, and an endless belt 833 is wound around the driving pulley 832. A driven pulley 834 is attached to the lower end side of the lifting ball screw 82, and the endless belt 833 is also wound around the driven pulley 834. When the elevating motor 831 rotates and drives the main pulley 832, the endless belt 833 rotates with the rotation of the main pulley 832, and the driven pulley 834 and the elevating ball screw 82 rotate as the endless belt 833 rotates. Then, as the lifting ball screw 82 rotates, the lifting member 84 moves linearly in the Z-axis direction, and the suction pad 12, the rails 16a, 16b, and the grip portion 50 are arranged stepwise above the horizontal plate 79. Moves together in the Z-axis direction.

A fourth moving means 7 is arranged on the upper side of the elevating column portion 840. The fourth moving means 7 in the present embodiment shown in FIGS. 3 and 4 swivels and moves the suction pad 12, the rails 16a and 16b, and the grip portion 50 in the horizontal direction, that is, on the X-axis and Y-axis plane. The pedestal 70 attached to the front surface of the elevating column portion 840 on the −X direction side, the rotating shaft 71 extending from the pedestal 70 in the + Z direction and the upper end side connected to the lower surface of the horizontal plate 79, and the side surface of the pedestal 70 A fourth rotation drive mechanism 73, which is attached to a bracket 77 attached so as to protrude in the −Y direction and rotates the rotation shaft 71, and the horizontal plate 79 are provided.
The fourth moving means 7 may be a ball screw mechanism or the like that linearly moves the suction pad 12, the rails 16a, 16b, and the grip portion 50 in the Y-axis direction, which is the horizontal direction.

The pedestal 70 and the lower end side of the rotary shaft 71 are connected via a lower bearing (not shown), and the rotary shaft 71 is rotated on the pedestal 70 by the lower bearing by transmitting the rotational power generated by the fourth rotary drive mechanism 73. It is possible.

As shown in FIGS. 3 and 4, the fourth rotation drive mechanism 73 is, for example, a pulley mechanism and includes a fourth motor 731 supported by a bracket 77. A driving pulley 732 is attached to the shaft of the fourth motor 731 which is a driving source for rotating the rotating shaft 71, and an endless belt 733 is wound around the driving pulley 732. A driven pulley (not shown) is attached to the lower end side of the rotating shaft 71, and the endless belt 733 is also wound around the driven pulley (not shown). When the fourth motor 731 rotates and drives the main pulley 732, the endless belt 733 rotates with the rotation of the main pulley 732, and the endless belt 733 rotates, so that the driven pulley and the rotating shaft 71 (not shown) are rotated. Rotate. Then, as the rotation shaft 71 rotates, the horizontal plate 79 swivels in the horizontal plane, and the suction pads 12, the rails 16a, 16b, and the grip portion 50, which are arranged stepwise on the horizontal plate 79, are together. Swirl around the horizontal plane.
For example, as shown in FIGS. 1 and 2, the fourth rotation drive mechanism 73 is covered with the protective cover 75 attached to the block body 80.

In the present embodiment, as shown in FIGS. 1 to 4, the transfer robot 1 is arranged below the suction pad 12 and extends in a direction intersecting the X-axis direction (Y-axis direction) (hereinafter referred to as a rotation axis). An adhesive roller 17 that is rotatable around a roller rotation shaft 17d and has an adhesive on the outer surface is provided.

For example, as shown in FIG. 3, an adhesive roller support plate 14 movable in the X-axis direction is arranged on the lower surface of the horizontal plate 79 that moves up and down together with the elevating column portion 840 at a position below the horizontal plate 79. ing. The adhesive roller support plate 14 is guided in the X-axis direction by a guide rail (not shown) arranged on the lower surface of the horizontal plate 79, and moves back and forth in the X-axis direction by the air cylinder 14a. The adhesive roller support plate 14 is attached to the front surface of the protective cover 75 attached to the block body 80 of the elevating means 8.
A support portion 143 that rotatably supports both ends of the roller rotation shaft 17d is fixed to the upper surface of the adhesive roller support plate 14.

In the present embodiment, for example, the adhesive roller 17 formed to have a length equal to or larger than the diameter of the suction pad 12 is horizontally supported by the roller rotating shaft 17d inserted therein. The pressure-sensitive adhesive disposed on the outer surface of the pressure-sensitive adhesive roller 17 is made of adhesive and elastic synthetic rubber or the like. The suction pad 12 is positioned at a height at which the suction surface 120a contacts the outer surface of the adhesive roller 17 by the elevating means 8, and the suction pad 12 is moved forward or backward in the X-axis direction by the first moving means 3 to move the suction surface 120a to the adhesive roller. When it comes into contact with the outer surface of 17, the processing waste and the like adhere to the adhesive and are removed (dry cleaning) from the suction surface 120a of the suction pad 12. When cleaning the suction surface 120a of the suction pad 12, the adhesive roller support plate 14 shown in FIG. 3 is moved in the −X direction, and when the cleaning is completed, the adhesive roller support plate 14 is moved in the + X direction.
As a result, the transfer robot 1 can be configured without being enlarged in the X-axis direction.
The adhesive strength of the adhesive is restored by removing the processing debris adhering to the outer peripheral surface of the adhesive roller 17.

Hereinafter, a case where the plate-shaped work W shown in FIGS. 1 and 4 is conveyed by using the transfer robot 1 will be described.

For example, in the case of transporting the plate-shaped work W placed on the holding table of the grinding apparatus (not shown), the first moving means 3 shown in FIG. 4 advances the suction pad 12 in the −X direction side, and FIG. The suction pad 12 is advanced from the first opening 201 of the box 20 shown in 1 to the outside of the box 20, and the suction pad 12 is formed so that the center of the suction surface 120a of the suction pad 12 substantially coincides with the center of the plate-shaped work W. It is positioned above the shaped work W. Further, the suction force generated by the operation of the suction source (not shown) is transmitted to the suction surface 120a of the suction pad 12.

After the suction pad 12 is lowered in the −Z direction to a height position where the suction surface 120a contacts the upper surface of the plate-shaped work W by the elevating means 8, the lowering is stopped at the height position. Then, the suction pad 12 sucks the upper surface of the plate-shaped work W on the suction surface 120a by the suction force transmitted to the suction surface 120a. After that, the suction pad 12 that sucks and holds the plate-shaped work W is raised by the elevating means 8, and the plate-shaped work W is separated from the holding table (not shown).

The first moving means 3 shown in FIG. 4 moves the suction pad 12 backward in the + X direction, and accommodates the suction pad 12 that sucks and holds the plate-shaped work W in the box 20. Then, the plate-shaped work W sucked and held by the suction pad 12 is formed by the horizontal plate 79 shown in FIG. 4, the two first connecting plates 307 on both sides in the Y-axis direction, and the first base plate 30. When the entire transfer robot 1 moves from a grinding device (not shown) to the vicinity of a cutting device (not shown) in a state of being accommodated in the space, the transfer robot 1 transfers the plate-shaped work W between the devices. The entire transfer robot 1 may move between the devices with the suction pad 12 that sucks and holds the plate-shaped work W out of the box 20.

Hereinafter, a case where the ring frame F shown in FIGS. 1, 2, and 6 is conveyed by using the transfer robot 1 will be described.

For example, the ring frame F is housed in a frame stocker or the like (not shown) so that the rails 16a and 16b can support the flat surfaces Fc on both side surfaces thereof. The second moving means 4 shown in FIG. 6 advances the rails 16a and 16b in the −X direction side, and advances the rails 16a and 16b out of the box 20 from the second opening 202 of the box 20 shown in FIG. Further, the elevating means 8 shown in FIGS. 1 and 2 raises or lowers the rails 16a and 16b in the Z-axis direction to align the heights of the rails 16a and 16b with the ring frame F.

The second moving means 4 shown in FIG. 6 further advances the rails 16a and 16b in the −X direction side, and the stepped guide surfaces of the rails 16a and 16b are ± Y on the flat surfaces Fc which are both side surfaces of the ring frame F. The ring frame F is supported by the rails 16a and 16b in contact with each other from the direction. The second moving means 4 reverses the rails 16a and 16b in the + X direction, and accommodates the rails 16a and 16b supporting the ring frame F in the box 20 through the second opening 202 shown in FIG. Then, in a state where the ring frame F supported by the rails 16a and 16b is housed in the box 20, the entire transfer robot 1 moves from a frame stocker (not shown) to the vicinity of a tape mounter (not shown) to transfer the robot 1. The robot 1 transports the ring frame F between the devices. The entire transfer robot 1 may move between the devices with the rails 16a and 16b supporting the ring frame F out of the box 20.
Further, after the ring frame F is supported by the rails 16a and 16b, the outer peripheral edge of the ring frame F may be gripped by the grip portion 50 shown in FIG.

Hereinafter, a case where the work unit WU shown in FIGS. 8 and 9 is conveyed by using the transfer robot 1 will be described.
The plate-shaped work W shown in FIG. 8 is in a state where a circular tape T having a diameter larger than that of the plate-shaped work W is attached to the lower surface of the plate-shaped work W by a tape mounter (not shown). Further, the outer peripheral portion of the circular tape T is attached to the ring frame F. As a result, the plate-shaped work W positioned in the opening of the ring frame F is integrated with the ring frame F via the circular tape T to form a work unit WU that can be handled by the ring frame F.

For example, as shown in FIG. 8, the work unit WU is mounted on two rails 16a and 16b, and the stepped guide surfaces of the rails 16a and 16b are flat surfaces for positioning which are both side surfaces of the ring frame F. It is in a state of being supported by the rails 16a and 16b in a state of being in contact with the Fc from the ± Y direction.

The third moving means 6 shown in FIG. 8 moves the grip portion 50 with the pair of holding claws 500 open in the −X direction, and the outer peripheral edge of the ring frame F is inserted between the pair of holding claws 500. The grip portion 50 is positioned so as to be in a state. After that, the pair of holding claws 500 move in the direction of approaching each other by the gripping portion drive source 501 to grip the outer peripheral edge of the ring frame F.

For example, when the work unit WU is transported to a holding table of a grinding device (not shown), the second moving means 4 shown in FIGS. 6 and 8 is the second opening 202 to the second of the box 20 shown in FIG. The movable members 44a and 44b, the rails 16a and 16b supporting the work unit WU, the third moving means 6, and the gripping portion 50 holding the work unit WU are advanced to the outside of the box 20. Then, for example, the advance of each of the above configurations by the second moving means 4 is stopped at a predetermined position in front of the holding table (not shown).

As shown in FIG. 9, the third moving means 6 advances the grip portion 50 toward the −X direction, and moves the ring frame F on the rails 16a and 16b in the X-axis direction. Then, the center of the plate-shaped work W and the center of the holding surface of the holding table are substantially aligned.

After the grip portion 50 descends in the −Z direction to a height position where the circular tape T of the work unit WU gripped by the grip portion 50 comes into contact with the holding surface of the holding table (not shown) by the elevating means 8. The descent stops at the height position. Then, after the work unit WU is sucked and held by the holding table, the grip portion 50 releases the grip of the ring frame F and separates from the work unit WU. In this way, the transfer robot 1 can transfer the work unit WU to the grinding device or the like.

The transfer robot 1 according to the present invention that conveys the plate-shaped work W and the ring frame F having an opening has a suction pad 12 having a suction surface 120a that sucks and holds the plate-shaped work W and the suction pad 12 in the horizontal direction. The first moving means 3 for advancing or reversing in the X-axis direction, rails 16a and 16b arranged in parallel with the opening of the ring frame F in between and supporting both side surfaces of the ring frame F, and rails 16a and 16b are X. The second moving means 4 for moving forward or backward in the axial direction, the grip portion 50 for gripping the outer peripheral edge of the ring frame F, and the grip portion 50 for moving forward or backward in the X-axis direction on the rails 16a and 16b. A third moving means 6 for moving the suction pad 12 in the X-axis direction, a fourth moving means 7 for rotating the suction pad 12, the rails 16a and 16b, and the grip portion 50 in the horizontal direction, and the suction pad 12 and the rails 16a and 16b. Space saving is achieved by providing the elevating means 8 for raising and lowering the grip portion 50 in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction, and the ring frame F is supported by the rails 16a and 16b. Since it is taken in and out, it is possible to carry the ring frame F without deforming it. Then, for example, a grinding device for grinding the plate-shaped work W, the plate-shaped work W is supported and integrated by the ring frame F via the circular tape T so that the chips having small sides after the plate-shaped work W is divided are not separated. It is possible to efficiently convey the plate-shaped work W, the ring frame F, or the work unit WU to a tape mounter that forms the formed work unit WU, or a dividing device such as a dicing device or a laser processing device.

The transfer robot 1 according to the present invention accommodates the suction pad 12, the grip portion 50, the rails 16a and 16b, the first moving means 3, the second moving means 4, and the third moving means 6, and for example, the suction pad 12 is taken in and out. By providing a box 20 having a possible first opening 201 and, for example, a grip portion 50 and a second opening 202 through which rails 16a and 16b can be taken in and out, space can be saved and the plate-shaped work W can be compared. Therefore, the suction pad 12 can be appropriately positioned, and the grip portion 50 or the rails 16a and 16b can be appropriately positioned with respect to the ring frame F.

The transfer robot 1 according to the present invention has an adhesive roller 17 that is arranged below the suction pad 12 and is rotatable about a rotating shaft 17d extending in a direction intersecting the X-axis direction and has an adhesive on the outer surface. By providing the suction pad 12, the suction pad 12 is positioned at a height where the suction surface 120a contacts the outer surface of the adhesive roller 17 by the elevating means 8, and the suction pad 12 is moved forward or backward in the X-axis direction by the first moving means 3 to move the suction pad 12 forward or backward. It is possible to bring the 120a into contact with the outer surface of the adhesive roller 17 and roll the adhesive roller 17 to dry-clean the suction surface 120a.

It goes without saying that the transfer robot 1 according to the present invention is not limited to the above-described embodiment, and may be implemented in various different forms within the scope of its technical idea. Further, the shape and the like of each configuration of the transfer robot 1 shown in the attached drawings are not limited to this, and can be appropriately changed within the range in which the effects of the present invention can be exhibited.

W: Plate-shaped work F: Ring frame Fc: Flat surface T: Circular tape WU: Work unit 1: Transfer robot 12: Suction pad 120: Suction part 120a: Suction surface 121: Frame body 129: Joint 125: Connecting member 13: Transport arm 130: Base portion of transport arm 17: Adhesive roller 17d: Roller rotation shaft 14: Adhesive roller support plate 14a: Air cylinder 20: Box 200: Box top wall 201: First opening 202: Second opening
203: Box side wall 204: Box front wall 205: Box rear wall 3: First transportation means 30: First base plate 300: Long hole 302: Box mounting plate 307: First connecting plate 31: First ball screw 32: First guide rail 33: First rotary drive mechanism 330: Motor bracket 331: First motor 332: Main pulley 333: Driven pulley 334: Endless belt 34: First movable member 340: Slide member 341: Arm connecting portion 39: Sheet metal cover 16a, 16b: Rail 4: Second moving means 41: Second ball screw 42a, 42b: Pair of second guide rails 43: Second rotary drive mechanism 44a: Second movable member 44b: Second movable member 50: Grip part 500: Pair of holding claws 501: Grip part drive source 6: Third moving means 60: Third base plate 61: Third ball screw 62: Third guide rail 63 : Third rotary drive mechanism 64: Third movable member 7: Fourth moving means 70: Pedestal 71: Rotating shaft 73: Rotary drive mechanism 79: Horizontal plate 8: Lifting means 80: Block body 81: Pair of lifting guides Rail 82: Ball screw 83: Lifting / rotating drive mechanism 84: Lifting member

Claims (3)

A robot that conveys a plate-shaped work piece and a ring frame having an opening.
A suction pad with a suction surface that sucks and holds the plate-shaped work,
A first moving means for moving the suction pad forward or backward in the horizontal direction in the X-axis direction,
Two rails arranged in parallel across the opening of the ring frame and supporting both side surfaces of the ring frame, and
A second moving means for moving the rail forward or backward in the X-axis direction, and
A grip portion that grips the outer peripheral edge of the ring frame,
A third moving means for moving the grip portion forward or backward in the X-axis direction and moving the ring frame in the X-axis direction on the rail.
A fourth moving means for rotating the suction pad, the rail, and the grip portion in the horizontal direction, or linearly moving the suction pad, the rail, and the grip portion in the Y-axis direction orthogonal to the X-axis direction.
A transfer robot including a suction pad, a rail, and a lifting means for raising and lowering the grip portion in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction. The suction pad, the grip portion, the rail, the first moving means, the second moving means, and the third moving means can be accommodated, the suction pad can be taken in and out, and the grip portion and the rail can be taken in and out. The transfer robot according to claim 1, further comprising a box having a doorway. An adhesive roller that is arranged below the suction pad and is rotatable about a rotation axis extending in a direction intersecting the X-axis direction and has an adhesive on the outer surface is provided.
The suction pad is positioned at a height at which the suction surface contacts the outer surface of the adhesive roller by the elevating means, and the suction pad is moved forward or backward in the X-axis direction by the first moving means to move the suction surface. The transfer robot according to claim 1 or 2, wherein the adhesive roller is brought into contact with the outer surface of the adhesive roller and the adhesive roller is rolled to dry-clean the suction surface.

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