JP2020148142A - Vacuum pump, fixation method for vacuum pump, exterior body, auxiliary flange and conversion flange - Google Patents

Abstract

An object of the present invention is to provide a vacuum pump in which an auxiliary flange can be fixed using a fixing portion (bolt screw hole) provided in a normal standard product on the device side. A vacuum pump according to an embodiment of the present invention is further provided with a conversion flange (200) for fixing an auxiliary flange (213). and fix the conversion flange and the auxiliary flange (hereinafter, a component for changing the fastening position between the auxiliary flange 213 and the device-side flange 100 is referred to as the conversion flange). By doing so, the vacuum pump and the device can be fixed using the auxiliary flange 213 without changing the design of the conventional standard product. [Selection drawing] Fig. 2

Description

The present invention relates to a vacuum pump capable of handling torque generated at an abnormal time, a method for fixing the vacuum pump, an exterior body, an auxiliary flange, and a conversion flange.

Molecular pumps (vacuum pumps) such as turbo molecular pumps and thread groove pumps are used for exhaust in semiconductor manufacturing equipment and vacuum containers such as electron microscopes that require high vacuum.
Such a vacuum pump is usually provided with a flange of a predetermined size, and is fixed with a flange (hereinafter referred to as a device side flange) of an exhaust port of a device requiring exhaust (hereinafter referred to as a device) and a bolt or the like. It is supposed to be done.
A high degree of airtightness is maintained by fixing the flange of the vacuum pump (hereinafter, the flange of the vacuum pump is referred to as the intake flange) and the flange on the device side with an O-ring sandwiched between them. ..

The vacuum pump is provided with a rotor that is rotatably supported and can be rotated at high speed by a motor, and a stator that is fixed inside the casing of the vacuum pump. Then, as the motor rotates at high speed, the exhaust action is exerted by the interaction between the rotor and the stator. By this exhaust action, the gas on the device side is sucked from the intake port of the vacuum pump and exhausted from the exhaust port. In this way, a high vacuum state inside the device is realized.
Normally, a vacuum pump exhausts a gas in a molecular flow region (a region where the degree of vacuum is high and molecules collide with each other infrequently). In order to exhibit the exhaust capacity in this molecular flow region, the rotor is required to rotate at a high speed of about 30,000 rpm.

By the way, if some trouble occurs during the operation of the molecular pump and the rotor collides with the stator or other members fixed in the vacuum pump, the angular momentum of the rotor is transmitted to the stator and other fixing members, and the entire vacuum pump A large torque is instantly generated to rotate the rotor in the direction of rotation. This torque also exerts a large stress on the device side through the flange. If torque is transmitted to the device side, a shearing force acts on the bolt fixing the intake port flange and the device side flange, and the bolt may be damaged or the molecular pump may drop in some cases. It was.
In such a situation, there is a concern that the product inside the device may be adversely affected or the gas inside (which may be toxic gas) leaks.
Therefore, in order to alleviate the impact caused by such torque, various proposals have been made conventionally, such as providing a cushioning member for torque on the intake port flange.

JP-A-2017-14945

FIG. 15 is a diagram illustrating an outline of a turbo molecular pump disclosed in Patent Document 1. In this turbo molecular pump, when fixing the intake port flange 211 and the device side flange (exhaust port flange) 100, they are not directly fixed, but are fixed via a separate auxiliary flange 213 (hereinafter,). When the intake port flange 211 and the device side flange 100 are fastened, a member for mediating and fixing the two is used as an auxiliary flange).
That is, with the sandwiching portion 222 of the auxiliary flange 213 in contact with the back surface (the surface opposite to the sealing surface) of the intake port flange 211, the fastening portion 223 is fastened to the device side flange 100 using the bolt 105. Then, when the fastening portion 223 is bolted to the device-side flange 100, the intake port flange 211 is sandwiched between the sandwiching portion 222 and the device-side flange 100. Therefore, the intake port flange 211 and the device side flange 100 are sealed by the O-ring seal 110.
According to such a fixing method, since the intake port flange 211 and the device side flange 100 are not directly fixed, even if an impact due to torque occurs, the torque transmitted to the device side is transmitted by sliding both of them. It can be reduced to some extent.

By the way, when such a technique is applied to a vacuum pump, the intake port flange 211 is not directly fixed to the device side flange 100, but is sandwiched by the sandwiching portion 222 of the auxiliary flange 213 and the device side flange 100. The turbo molecular pump (vacuum pump) rotates greatly due to the impact of the torque. At that time, a force acts on the exhaust pipe and the electric cable connected to the vacuum pump to damage the vacuum pump, and further, the moved pipe and the cable may damage the device.
Further, when the technique of fastening the intake port flange 211 and the device side flange 100 via the auxiliary flange 213 is applied to the vacuum pump, the auxiliary flange 213 is installed in the bolt screw hole provided in the normal standard product. Since it cannot be fixed to the side exhaust port flange (device side flange 100), a new dedicated bolt and screw hole must be provided in the device side exhaust port flange. That is, in order to fasten the intake port flange 211 and the device side flange via the auxiliary flange 213, a separate bolt screw hole must be provided on the outer side of the bolt screw hole provided in the standard product. Therefore, it is necessary to change the design of the flange on the device side or increase the size.

Therefore, according to the present invention, when the intake port flange is fixed to the device side flange via the auxiliary flange, it is possible to prevent the vacuum pump from rotating significantly due to the impact of torque and further reduce the torque to the device side. It is an object of the present invention to provide a vacuum pump capable of providing.
Another object of the present invention is to provide a vacuum pump capable of fixing an auxiliary flange by using a fixing portion (bolt screw hole) provided in a normal standard product on the device side.

In the present invention according to claim 1, an exterior body, an exhaust port, a base portion, the exterior body, and the above, in which an intake port is formed and an intake port flange for connecting to the device is formed on the intake port side. A vacuum pump including a rotating portion contained in a base portion and rotatably supported, and an auxiliary flange provided separately from the intake port flange and formed with a bolt through hole for fixing. When the auxiliary flange sandwiches the intake port flange with the device and is fixed to the device, the vacuum pump is attached to the device and a shock absorbing mechanism is provided in the vicinity of the bolt through hole. Provide a characteristic vacuum pump.
According to the second aspect of the present invention, the shock absorbing mechanism is provided in the vicinity of the rotation direction of the rotating portion of the bolt through hole, and plastically deforms the impact transmitted between the intake port flange and the auxiliary flange. The vacuum pump according to claim 1, wherein the vacuum pump is a cushioning portion that is relaxed by the above means.
The second aspect of the present invention according to claim 3, wherein the cushioning portion is a thin-walled portion, and the thin-walled thickness of the thin-walled portion is a wall thickness in the circumferential direction of the auxiliary flange. Provide a vacuum pump.
According to the fourth aspect of the present invention, the cushioning portion is formed of a member different from the auxiliary flange, and is a member inserted into the bolt through hole, or the hole or recess formed in the auxiliary flange. The vacuum pump according to claim 2 is provided.
In the invention of the present invention according to claim 5, the shock absorbing mechanism is provided with a cushioning material for cushioning an impact transmitted between the intake port flange and the auxiliary flange in a space formed by the intake port flange and the auxiliary flange. The vacuum pump according to any one of claims 1 to 4, wherein the vacuum pump is provided.
The present invention according to claim 6 is characterized in that at least a part of the contact surfaces of the intake port flange and the auxiliary flange that are in contact with each other is subjected to a treatment for increasing the friction coefficient. The vacuum pump according to any one of claims 5 is provided.
According to the seventh aspect of the present invention, the intake port flange and the auxiliary flange are provided with positioning pins for positioning both in the radial direction or the circumferential direction, and a shock absorbing member is provided around the positioning pins. The vacuum pump according to any one of claims 1 to 6 is provided.
The invention according to claim 8 provides the vacuum pump according to claim 7, wherein the positioning pin has a stepped structure.
The invention according to claim 9 provides the vacuum pump according to claim 7 or 8, wherein a collar is provided around the positioning pin to fill a gap.
In the invention of the present application according to claim 10, in order to ensure the sealing property between the intake port flange and the device, when the auxiliary flange sandwiches the intake port flange with the device, the auxiliary flange and the device The vacuum pump according to any one of claims 1 to 9, wherein a gap is provided between the two.
11. The invention of the present application according to claim 11, wherein a bolt screw hole for fixing the auxiliary flange and the intake port flange with a bolt is provided in the intake port flange. The vacuum pump according to any one of the above items is provided.
In the invention of the present application according to claim 12, the vacuum pump according to any one of claims 1 to 11, wherein the auxiliary flange and the intake port flange are fixed by bolts, and the auxiliary flange and the auxiliary flange. Provided is a vacuum pump characterized in that a bolt for fixing the device is stronger than a bolt for fixing the auxiliary flange and the intake port flange.
In the invention of the present application according to claim 13, the vacuum pump according to any one of claims 1 to 11, wherein the auxiliary flange and the intake port flange are fixed by bolts, and the auxiliary flange and the auxiliary flange are fixed. The number of bolt screw holes for fixing the intake port flange is the same as the number of bolt through holes when the intake port flange is directly fixed to the device without passing through the auxiliary flange, and the holes are arranged at equal pitches. Provide a vacuum pump characterized by.
In the present invention according to claim 14, the vacuum pump according to any one of claims 1 to 11, wherein the auxiliary flange and the intake port flange are fixed by bolts, and the auxiliary flange is Provided is a vacuum pump having a divided structure divided into a plurality of parts in the circumferential direction, wherein the divided position of the auxiliary flange does not overlap with the position of the bolt.
In the invention of the present application according to claim 15, a conversion flange having a bolt through hole at a position corresponding to a fixing bolt screw hole formed in the device is provided, and the intake port flange is formed by the auxiliary flange and the conversion flange. The vacuum pump according to any one of claims 1 to 14, characterized in that it is attached to the device by sandwiching and fixing the conversion flange to the device.
In the present invention according to claim 16, in the vacuum pump according to claim 15, the strength of the bolt for fastening the device and the conversion flange is A, and the strength of the bolt for fastening the conversion flange and the auxiliary flange is defined as A. B. Provided is a vacuum pump characterized in that the relational expression of A ≧ B ≧ C is established when the strength of the bolt for fastening the auxiliary flange and the intake port flange is C.
In the invention of the present application according to claim 17, in the vacuum pump according to any one of claims 1 to 16, the auxiliary flange and the intake port flange are temporarily fixed, and then the auxiliary flange is fixed to the device. By doing so, the present invention provides a method of fixing a vacuum pump, which comprises attaching the vacuum pump to the apparatus.
The invention according to claim 18 is characterized in that the bolt through hole of the auxiliary flange is opened in a size larger than the shaft diameter of the bolt to be used in advance, and the backlash is eliminated when the bolt is fastened. Item 17. The method for fixing the vacuum pump according to Item 17 is provided.
The present invention according to claim 19, is an exterior body of a vacuum pump provided with an intake port flange for connecting to the device on the intake port side, which is provided separately from the intake port flange and is used for fixing. Provided is an exterior body characterized in that a bolt screw hole for fixing the intake port flange with a bolt is provided in the intake port flange with respect to an auxiliary flange in which a bolt through hole is formed.
According to the present invention of claim 20, it is an auxiliary flange of a vacuum pump provided with an intake port flange for connecting to the device on the intake port side, and is provided separately from the intake port flange for fixing. Provided is an auxiliary flange characterized in that a bolt through hole is formed, the intake port flange is sandwiched between the device, and the device is fixed to the device.
In the invention of the present application according to claim 21, it is a conversion flange of a vacuum pump provided with an intake port flange for coupling to the device on the intake port side, and is provided separately from the intake port flange in the device. The intake is provided by an auxiliary flange which has a bolt through hole at a position corresponding to the formed fixing bolt screw hole, is provided separately from the intake port flange, and has a fixing bolt through hole formed therein. Provided is a conversion flange characterized in that the mouth flange is sandwiched, the auxiliary flange is fixed, and the auxiliary flange is fixed to the device.

According to the present invention, even when the auxiliary flange is used, it is possible to deal with the torque generated at the time of abnormality.
Further, according to the present invention, the auxiliary flange can be fixed by using a fixing portion (bolt screw hole) provided in a normal standard product on the device side.
Further, according to the present invention, the work of fixing the vacuum pump to the external device can be efficiently performed.

It is a figure which showed the schematic structure example of the vacuum pump which concerns on embodiment of this invention. It is a figure for demonstrating Embodiment 1-1. It is a figure for demonstrating the torque buffering mechanism (a) of Embodiment 1-1. It is a figure for demonstrating the torque buffer mechanism (b) of Embodiment 1-1. It is a figure for demonstrating the torque buffer mechanism (c) of Embodiment 1-1. It is a figure for demonstrating the torque buffer mechanism (d) of Embodiment 1-1. It is a figure for demonstrating the torque buffer mechanism (e) of Embodiment 1-1. It is a figure for demonstrating Embodiment 1-2. It is a figure for demonstrating the embodiment which provides the collar around the positioning pin of Embodiment 2-1. It is a figure for demonstrating Embodiment 1-4 and Embodiment 1-5. It is a figure for demonstrating the structure which provided the conversion flange for fixing an auxiliary flange. It is a figure for demonstrating the relationship of bolt strength when a conversion flange is used. It is a figure for demonstrating the relationship of bolt strength when a conversion flange is not used. It is a figure for demonstrating the positional relationship of the fixing hole of an auxiliary flange. It is a figure for demonstrating the vacuum pump which concerns on the prior art.

(I) Outline of the Embodiment In the vacuum pump according to the embodiment of the present invention, the intake port flange 211 and the auxiliary flange 213 are fixed when the intake port flange 211 and the device side flange 100 are fastened via the auxiliary flange 213. A fastening portion (for example, a bolt through hole and a bolt 320) is provided, and a torque buffer mechanism (buffer portion) 330 is provided at the fastening portion. This torque buffer mechanism (buffer) 330 corresponds to the shock buffer mechanism.
Further, a conversion flange 200 for fixing the auxiliary flange 213 is provided, and the conversion flange 200 and the device side flange 100 are fixed by using the bolt screw holes provided in the standard product, and the conversion flange 200 and the auxiliary flange are fixed. The 213 is fixed (hereinafter, a component for converting the fastening position between the auxiliary flange 213 and the device side flange 100 is referred to as a conversion flange). Here, the device-side flange does not necessarily have to be in the shape of a flange, and a bolt screw hole may be formed directly in the device.
By doing so, even when the intake port flange 211 is fixed to the device side flange via the auxiliary flange 213, it is possible to prevent the vacuum pump from rotating significantly due to the impact of the torque generated at the time of abnormality, and further, The torque to the device side can be reduced, and the vacuum pump and the device can be fixed without changing the design of the conventional standard product.

(Ii) Details of Embodiments Hereinafter, preferred embodiments of the present invention will be described in detail with reference to FIGS. 1 to 14.
(Configuration of vacuum pump 1)
FIG. 1 is a diagram showing a schematic configuration example of the vacuum pump 1 according to the first embodiment of the present invention, and shows a cross-sectional view of the vacuum pump 1 in the axial direction.
In the embodiment of the present invention, for convenience, the diameter direction of the rotor blade will be described as "diameter (diameter / radius) direction", and the direction perpendicular to the diameter direction of the rotor blade will be described as "axial direction (or axial direction)".
The casing (outer cylinder) 2 forming the exterior body of the vacuum pump 1 has a substantially cylindrical shape, and the housing of the vacuum pump 1 together with the base 3 provided at the lower part of the casing 2 (exhaust port 6 side). Consists of. A gas transfer mechanism, which is a structure that allows the vacuum pump 1 to exert an exhaust function, is housed inside the housing.
In the present embodiment, this gas transfer mechanism includes a rotating body (rotor blade 9 / rotor cylindrical portion 10 or the like) rotatably supported and a stator portion (fixed wing 30 / thread groove exhaust) fixed to a housing. It is composed of elements 20 and the like).
Further, although not shown, a control device for controlling the operation of the vacuum pump 1 is connected to the outside of the exterior body of the vacuum pump 1 via a dedicated line.

An intake port 4 for introducing gas into the vacuum pump 1 is formed at the end of the casing 2. Further, an intake port flange 211 projecting to the outer peripheral side is formed on the end surface of the casing 2 on the intake port 4 side.
Further, on the downstream side of the vacuum pump 1, an exhaust port 6 for exhausting gas from the vacuum pump 1 is formed.

The rotating body includes a shaft 7 which is a rotating shaft, a rotor 8 arranged on the shaft 7, a plurality of rotary blades 9 provided on the rotor 8, and a rotor cylindrical portion (skirt portion) provided on the exhaust port 6 side. 10 is provided.
Each rotor 9 is composed of members extending radially perpendicular to the axis of the shaft 7.
Further, the rotor cylindrical portion 10 is composed of a cylindrical member having a cylindrical shape concentric with the rotation axis of the rotor 8.

Although details are not shown in the stator column 700, a motor portion for rotating the shaft 7 at high speed is provided in the middle of the shaft 7 in the axial direction. Further, radial magnetic bearing devices for supporting the shaft 7 in the radial direction (diameter direction) in a non-contact manner are provided on the intake port 4 side and the exhaust port 6 side with respect to the motor portion. Further, at the lower end of the shaft 7, an axial magnetic bearing device for supporting the shaft 7 in the axial direction (axial direction) without contact is provided.

A fixed wing 30 is formed on the inner peripheral side of the housing. The fixed wings 30 are separated from each other by a cylindrical fixed wing spacer 35 and fixed.
The rotary blades 9 and the fixed blades 30 are arranged alternately and are formed in a plurality of stages in the axial direction. However, in order to satisfy the discharge performance required for the vacuum pump 1, an arbitrary number of rotor parts and an arbitrary number of rotor parts and A stator component can be provided.

In the vacuum pump 1 according to the present embodiment, the thread groove exhaust element 20 (thread groove type exhaust mechanism) is arranged on the exhaust port 6 side. A thread groove (spiral groove) is formed on the surface of the thread groove exhaust element 20 facing the rotor cylindrical portion 10. Alternatively, a thread groove may be formed on the surface of the rotor cylindrical portion 10 facing the thread groove exhaust element 20.
The side of the thread groove exhaust element 20 facing the rotor cylindrical portion 10 (that is, the inner peripheral surface parallel to the axis of the vacuum pump 1) faces the outer peripheral surface of the rotor cylindrical portion 10 with a predetermined clearance. When the rotor cylindrical portion 10 rotates at high speed, the gas compressed by the vacuum pump 1 is sent out to the exhaust port 6 side while being guided by the screw groove as the rotor cylindrical portion 10 rotates. That is, the thread groove is a flow path for transporting gas.

In this way, the surface of the thread groove exhaust element 20 facing the rotor cylindrical portion 10 and the rotor cylindrical portion 10 face each other with a predetermined clearance, so that the inner peripheral surface of the thread groove exhaust element 20 on the axial direction side. It constitutes a gas transfer mechanism that transfers gas through a screw groove formed in.
The smaller the clearance, the more preferable it is, in order to reduce the force of the gas flowing back to the intake port 4.
Further, the direction of the spiral groove formed in the thread groove exhaust element 20 is the direction toward the exhaust port 6 when the gas is transported in the rotation direction of the rotor 8 in the spiral groove.
The depth of the spiral groove gradually becomes shallower as it approaches the exhaust port 6, and the gas transported through the spiral groove is gradually compressed as it approaches the exhaust port 6.
With the above-described configuration, the vacuum pump 1 can perform a vacuum exhaust process in the apparatus in which the vacuum pump 1 is fixed (arranged).

(Embodiment 1: An embodiment provided with a detent structure for a vacuum pump)
In the embodiment (1-1 to 1-5), the vacuum pump is provided with a detent structure for the vacuum pump as a safety measure when an abnormality occurs.
In a vacuum pump, a torque generated when an abnormality occurs causes a rotational force to be generated in the vacuum pump, but the structure described in Patent Document 1 does not provide a structure for preventing (reducing) the rotation of the vacuum pump.
When the vacuum pump rotates, a force acts on the exhaust pipe and the electric cable connected to the vacuum pump to damage the vacuum pump, and further, the moved pipe and the cable may damage the device.
Therefore, in the following embodiments (1-1 to 1-5), by providing a detent structure for the vacuum pump, damage such as damage to the vacuum pump itself and the device is reduced when an abnormality occurs.
The embodiments 1-1 to 1-5 can be applied to both the conventional technique described in Patent Document 1 and the embodiment of the conversion flange 200 (described later) of the third embodiment.
(Embodiment 1-1)
FIG. 2 is a diagram illustrating embodiment 1-1.
In the first embodiment, as shown in FIG. 2, a fixing component (bolt 320) for fixing the intake port flange 211 and the auxiliary flange 213 of Patent Document 1 or the first embodiment is further provided, and torque is provided at the fastening portion thereof. A buffer mechanism (buffer) 330 is provided.
In the first embodiment, the rotation of the vacuum pump 1 is stopped and the torque is not transmitted to the device side when an abnormality occurs.

Hereinafter, a specific example of the torque buffer mechanism (buffer) 330 will be described.
(A) In this example, in the bolt through hole of the auxiliary flange 213, as shown in FIG. 3, a through hole for forming a thin-walled portion 500 in a portion facing the bolt hole 510 and the direction opposite to the rotor rotation direction. The elongated hole 520 and the elongated hole 530 are formed. When an impact is generated by torque in the entire vacuum pump 1 when an abnormality occurs, the bolt 330 inserted into the bolt hole 510 collides with the thin-walled portion 500, and the thin-walled portion 500 is plastically deformed to generate rotational energy due to torque. Absorb.
(B) In this example, as shown in FIG. 4, a fitting portion 640 is provided in the auxiliary flange 213, and a cushioning member 600 composed of another member is fitted and fixed in the fitting portion 640. In addition, a bolt penetration portion 614 for penetrating the bolt is provided.
The cushioning member 600 is made of a member that can be plastically deformed when a bolt 665 (corresponding to the bolt 320 in FIG. 2) collides.

(C) In this example, as shown in FIG. 5, a gap is provided between the shaft of the bolt 715 and the bolt through hole 714 by using a special washer in which the bush portion 717a inserted into the bolt through hole 714 is formed. W is formed.
As a result, when torque is applied, the portion of the region H of the bolt 715 (corresponding to the bolt 320 in FIG. 2) is bent and deformed, the impact is absorbed by the strain energy at that time, and the impact is transmitted to the device side flange 100. Can be suppressed.
(D) In this example, as shown in FIG. 6, the penetrating direction of the bolt through hole 814 of the auxiliary flange 213 is inclined by an angle θ with respect to the vertical direction.
In this embodiment, when the torque in the arrow direction is applied, the angle θ is inclined, so that the shearing force acting on the bolt 815 (corresponding to the bolt 320 in FIG. 2) is decomposed in two directions of the shearing force and the tensile force. Will be done. Therefore, a part of the shearing energy can be received as the strain energy of the bolt 815, which makes it difficult for the bolt 815 (corresponding to the bolt 320 in FIG. 2) to be sheared and at the same time reduces the torque transmitted to the device side flange 100. Can be done.

(E) In this example, as shown in FIG. 7, the bolt 911 (corresponding to the bolt 320 in FIG. 2) penetrates the bolt through hole 950 of the auxiliary flange 213 and is screwed into the intake flange flange 211. With such a configuration, the cut portion 920 and the cut portion 930 are present in the vicinity of the bolt through hole 950, so that the thin portion 940 is formed. When the bolt 911 (corresponding to the bolt 320 in FIG. 2) collides with the thin-walled portion 940, the thin-walled portion 940 is plastically deformed to absorb torque.

Each of the above embodiments (a) to (e) has been described with an example in which the torque buffer mechanism (buffer) 330 is provided at the fastening portion between the auxiliary flange 213 and the intake flange 211, but the conversion flange 200 and the device It may be provided at the fixing portion with the side flange 100, the fixing portion between the auxiliary flange 213 and the conversion flange 200, or the fixing portion (fastening portion) between the auxiliary flange 213 and the device side flange 100 when the conversion flange is not used. ..
Further, when a positioning pin is installed, torque is transmitted from the installation location. Therefore, when the positioning pin is installed, the torque buffer mechanism (buffer portion) 330 may be provided at the fixed portion of the auxiliary flange 213 and the conversion flange 200 (or the device side flange 100).

(Embodiment 1-2)
In the first and second embodiments, a torque buffer collar is provided around the positioning pin.
FIG. 8 is a diagram for explaining the first and second embodiments.
As shown in FIG. 8, the device side flange 100 and the auxiliary flange 213 are fixed by bolts 1020.
A positioning pin (rod) 1000 used for this fixing is provided on the auxiliary flange 213. The positioning pin 1000 is provided for positioning the intake flange flange 211, and a shearing force is generated on the positioning pin 1000 by torque. In order to prevent shearing of the positioning pin 1000 and reduce torque, a torque buffering member is provided around the positioning pin 1000. Specifically, it is a foamed metal color 1010.

(Embodiment 1-3)
In the first to third embodiments, an embodiment in which a detent structure for other vacuum pumps is provided will be described.
Although not shown, the legs may be fixed by leg parts installed on the lower surface of the base 3 of the vacuum pump 1, or the vacuum pump 1 may be prevented from rotating due to an angle or the like.
Further, when the vacuum pump 1 and the device are fixed at a place other than the intake port flange 211, a detent may be provided at the place.

(Embodiment 1-4)
FIG. 10 is a diagram for explaining Embodiments 1-4 and 1-5.
In the first to fourth embodiments, the cushioning material 400 is provided in the space G between the outer peripheral 212 of the intake flange 211 and the auxiliary flange 213. Although a conversion flange 200 (described later) for fixing the auxiliary flange 213 is provided here, a detailed description thereof will be omitted because it is not a part related to the present embodiment.
The purpose of the cushioning material 400 is to consume torque (destruction energy) due to the amount of deformation or plastic deformation, and if the Young's modulus and yield point are smaller than the material of the intake flange 211 (generally stainless steel). Good. Specifically, it is made of a metal (aluminum, silver, copper, etc.) with a smaller Young's modulus than the material of the intake flange 211, foamed metal, gel-like member, thin-walled part, notch, space. A member having a buffering structure against such forces can be mentioned.

The torque generated at the time of abnormality works in the tangential direction of the circumference, but not with respect to the perfect circle. Therefore, the cushioning material 400 provided in the space G functions as a detent against the rotational force.
It should be noted that the space G may be made larger and the cushioning material 400 may be increased to improve the function as a detent.
The cushioning material 400 may be provided on the entire outer circumference of the intake port flange 211, or may be provided in a half-split structure.

(Embodiment 1-5)
In the first to fifth embodiments, the friction coefficient between the contact surface between the intake port flange 211 and the auxiliary flange 213 (the portion indicated by X in FIG. 10) is increased so as to function as a detent. By increasing the coefficient of friction, the function is improved as a detent against torque.
The following examples can be given as a method of increasing the coefficient of friction.
(B) Coat a rubber material such as urethane or silicone, which has a high coefficient of surface friction.
(B) A member with a high coefficient of friction is sandwiched. Specifically, a rubber material such as urethane or silicone, a non-metal fiber material such as aramid fiber or glass fiber, or a sintered material (ceramic) is sandwiched.
(C) Roughen the surface by processing both or one of the contact surfaces (process the surface to be jagged or uneven).
Further, although not shown, the side surface of the intake port flange 211 may be notched to increase the frictional force with the inner peripheral surface of the auxiliary flange.

(Embodiment 2: Improvement of installation workability of vacuum pump)
(Embodiment 2-1)
(B) Make the shape of the positioning pin a stepped structure In order to accurately position the positioning pin, it is necessary to take the same axis as the hole. However, considering the case of installation, since some gap is required around it, if the positioning pin is rod-shaped, it may be tilted and it may be difficult to take the same axis.
Therefore, by making the shape of the positioning pin a stepped structure as shown in FIG. 11 to be described later, it is easy to install the positioning pin, and the backlash of the hole of the positioning pin can be reduced on the side where the diameter is widened, and the positioning accuracy can be improved. Can be improved. That is, in the case of the stepped structure, since the positioning pin itself does not become slanted at the time of installation, the positioning pin itself can be easily attached and the gap can be made tight.
If there is a large amount of play between the positioning pin and the positioning hole, when the intake port flange 211 is fixed, it may be mounted unevenly on one side. In that case, the force acting on the intake port flange 211 and the auxiliary flange 213 by torque. Is biased, and there is a risk that fixing will not be sufficient. By forming the shape of the positioning pin into a stepped structure, such inconvenience can be prevented and the coaxial can be accurately aligned with the hole.

(B) Providing a collar around the positioning pin FIG. 9 is a diagram for explaining an embodiment in which a collar is provided around the positioning pin.
As shown in FIG. 9, by providing the collar (foam metal collar) 1002 around the positioning pin 1000, the backlash can be further reduced.

(Embodiment 2-2)
In the second embodiment, the axial positioning of the intake flange 211, the auxiliary flange 213, and the conversion flange 200 (or the device side flange 100) is performed by the auxiliary flange 213 and the intake flange 211, and the auxiliary flange 213 is used. There should be a slight gap between the device and the fixed surface on the device side.
If the surface of the intake port flange 211 is not in close contact with the fixed surface of the conversion flange 200 (or the device side flange 100), there is a risk that the seal between the two cannot be sufficiently sealed. In order to ensure that the surface of the intake port flange 211 is in close contact with the fixed surface of the conversion flange 200 (or the device side flange 100) in consideration of the tolerance variation of the auxiliary flange 213, the auxiliary flange 213 and the conversion flange 200 (or the conversion flange 200) are assembled at the time of assembly. It is designed in advance so that a slight gap is formed between the device side flange 100) and the fixed surface.
By designing in this way, the fixing surface of the auxiliary flange 213 and the conversion flange 200 (or the device side flange 100) adheres to the surface of the intake port flange 211 and the fixing surface of the conversion flange 200 (or the device side flange 100). Will not be hindered.

(Embodiment 2-3)
In the second embodiment, the intake flange flange 211 is provided with a screw hole for temporarily fixing the auxiliary flange 213 during the mounting work.
Due to the existence of another component called the auxiliary flange 213 (the same applies when the conversion flange 200 is used), it is difficult to attach the vacuum pump 1 to the apparatus. This is because the vacuum pump 1 and the auxiliary flange 213 may be lifted up separately to perform fixing work.
Therefore, a screw hole for temporarily fixing the auxiliary flange 213 is provided in the intake port flange 211, and the auxiliary flange 213 is jacked up together with the vacuum pump 1 in a state where the auxiliary flange 213 is temporarily fixed to the intake port flange 211. Try to fix it to the side. That is, the auxiliary flange 213 is integrated with the vacuum pump 1 in advance, and then jacking up is performed.
By temporarily fixing the vacuum pump 1 and the auxiliary flange 213 separately, it is not necessary to perform the fixing work, and the workability is improved.
Further, by temporarily fixing the mounting work, the mounting work can be performed while maintaining the initial dimensions, and the positioning work after mounting becomes easy.

(Embodiment 2-4)
Embodiment 2-4 relates to eliminating play in the bolt through hole.
Normally, the diameter of the bolt through hole is about 0.5 mm to 1.0 mm extra on one side with respect to the shaft diameter of the bolt used for fastening. If there are three fixing bolt through holes including the conversion flange 200, in the worst case, all the backlash (gap) may be added and overlap.
For example, if the backlash of three places is added from the bolt fastening position between the device side flange 100 and the conversion flange 200 as described above, the bolt fastening position of the vacuum pump 1 and the auxiliary flange 213 and the sealing surface of the O-ring may shift. It ends up. Therefore, not only the vacuum pump 1 and the device-side flange 100 cannot be properly fixed, but also the sealing property may not be ensured.
As a countermeasure, at the time of fixing work, the intake port flange 211 and the auxiliary flange 213 are temporarily fixed and then attached. By eliminating the play at the fixed portion at the stage of temporary fixing, the displacement of the bolt position of the vacuum pump 1 during the fixing operation is reduced. Alternatively, the bolt through hole of the auxiliary flange 213 may be made large in advance to eliminate the backlash.

(Embodiment 3: Embodiment using a conversion flange)
FIG. 11 is a diagram for explaining a configuration in which a conversion flange 200 for fixing the auxiliary flange 213 is provided.
In order to carry out the invention described in Patent Document 1, it is necessary to newly provide a fixing portion (bolt screw hole) for fixing the auxiliary flange 213 on the device side for fastening.
Therefore, troublesome design changes and processing such as increasing the size of the flange on the device side are unavoidable.
Therefore, in the present embodiment, a conversion flange 200 for fixing the auxiliary flange 213 is further provided. That is, the conversion flange 200 converts the fastening position between the auxiliary flange 213 and the device side flange 100.

The conversion flange 200 shown in FIG. 11 has a predetermined thickness and has a hollow disk shape, and is installed between the intake port flange 211 and the auxiliary flange 213 and the device side flange 100. Further, the conversion flange 200 is provided with a bolt through hole 301 for the bolt 300 for fastening to the device side flange 100 and a bolt screw hole 302 for the bolt 310 for fastening with the auxiliary flange 213. ing.

The conversion flange 200 and the device-side flange 100 are fastened with bolts 300. At this time, in the device side flange 100, the bolt screw holes provided in the usual standard are used. Therefore, it is not necessary to newly provide a bolt screw hole on the device side.
On the other hand, the conversion flange 200 and the auxiliary flange 213 are fastened by the bolt 310.
In this embodiment, as is clear from FIG. 11, the auxiliary flange 213 and the device side flange 100 are indirectly fastened via the conversion flange 200, and there is no direct fastening relationship between them.
A vacuum seal is indispensable between the conversion flange 200 and the device side flange 100, and the conversion flange 200 has an O-ring groove 201 corresponding to the O-ring groove of the intake flange 211 of the vacuum pump 1. Is provided.
Next, the assembly procedure of the embodiment using the conversion flange 200 will be described.
First, the conversion flange 200 is first attached to the device side flange 100 by the bolt 300. After that, the auxiliary flange 213 and the intake port flange 211 are fastened with the bolt 310.
In this embodiment, the device-side flange 100 can enjoy the merit of using the auxiliary flange in the technique described in Patent Document 1 without changing the dimensions determined by the standard.

(Embodiment 4: Improvement of fixing strength)
(Embodiment 4-1)
In the 4-1 embodiment, the relationship is as follows from the viewpoint of the required fixing strength.
(A) FIG. 12 is a diagram for explaining a case where the conversion flange 200 is used.
The magnitude of the fixing strength is bolt A <bolt B <bolt C.
When the conversion flange 200 is used, the strength increases in the order of bolt C (conversion flange 200-device side flange 100), bolt B (auxiliary flange 213-conversion flange 200), and bolt A (auxiliary flange 213-intake port flange 211). To do so. That is, the strength closer to the device-side flange 100 is increased.

(B) FIG. 13 is a diagram for explaining a case where the conversion flange 200 is not used.
The magnitude of the fixing strength is bolt A <bolt B.
When the conversion flange 200 is not used, the strength is increased in the order of bolt B (auxiliary flange 213-device side flange 100) and bolt A (auxiliary flange 213-intake port flange 211). That is, in this case as well, the strength closer to the device side flange 100 is increased.

(Embodiment 4-2)
Embodiment 4-2 relates to the positional relationship of the fixing holes of the auxiliary flange 213.
The positional relationship between the fixed positions of the bolt A and the bolt D shown in FIG. 13 is the relationship shown in FIG. That is, the bolt D (intake port flange 211) when the screw hole for the bolt A (auxiliary flange 213-intake port flange 211) is directly bolted to the device side flange 100 without passing through the auxiliary flange 213. -It should be provided between the through holes for the device side flange 100).
The number of bolt screw holes shall be the same as the number of bolt through holes, and the arrangement interval shall be the same pitch.
By arranging the fixing holes in this way, well-balanced fixing becomes possible, and as a result, stable fixing can be performed.
In addition, this embodiment (4-2) can also be applied when the conversion flange 200 is used (see FIG. 12).

(Embodiment 4-3)
The fourth embodiment relates to the division position of the auxiliary flange 213.
The auxiliary flange 213 is usually divided into half or a plurality of shapes in consideration of workability at the time of assembly. When the auxiliary flange 213 having a shape divided in half or a plurality of parts is used, the fixing bolt positions of the intake port flange 211 and the auxiliary flange 213 should be avoided for the divided positions.
This is because if the split position of the auxiliary flange 213 and the position of the fixing bolt match, the effect of torque reduction is diminished.
In addition, this embodiment (4-3) can also be applied when the conversion flange 200 is used (see FIG. 12).

In addition, the embodiment of the present invention and each modification may be configured to combine each other as necessary.

In addition, the present invention can be modified in various ways as long as it does not deviate from the spirit of the present invention. And it is natural that the present invention extends to the modified one.

1 Vacuum pump 2 Casing (outer cylinder)
3 Base 4 Intake port 6 Exhaust port 7 Shaft 8 Rotor 9 Rotor 10 Rotor cylindrical part 20 Thread groove exhaust element (thread groove stator)
30 Fixed wing 35 Fixed wing spacer 100 Device side flange (device)
105 Bolt 110 O-ring Seal 200 Conversion Flange 201 O-ring Groove 211 Intake Port Flange 213 Auxiliary Flange 222 Holding Part 300 Bolt 302 Bolt Screw Hole 310 Bolt 320 Bolt 330 Torque Buffer Mechanism (Cushioning Section)
400 Cushioning material (cushioning member)
500 Thin wall part 510 Bolt hole 520 Long hole 530 Long hole 600 Cushioning member 614 Bolt penetration part 640 Fitting hole 665 Bolt 1000 Positioning pin 1002 Foam metal collar

Claims (21)

An exterior body in which an intake port is formed and an intake port flange for connecting to the device is formed on the intake port side.
Exhaust port and
With the base
A rotating portion contained in the exterior body and the base portion and rotatably supported,
An auxiliary flange that is provided separately from the intake flange and has a bolt through hole for fixing.
It is a vacuum pump equipped with
The auxiliary flange sandwiches the intake port flange with the device and is fixed to the device.
The vacuum pump is attached to the device
A vacuum pump characterized in that a shock absorbing mechanism is provided in the vicinity of the bolt through hole. The shock absorbing mechanism is provided in the vicinity of the rotation direction of the rotating portion of the bolt through hole, and is a buffer portion that alleviates the impact transmitted between the intake port flange and the auxiliary flange by plastic deformation. The vacuum pump according to claim 1. The buffer portion is a thin-walled portion and
The vacuum pump according to claim 2, wherein the thin wall thickness of the thin wall portion is a wall thickness in the circumferential direction of the auxiliary flange. The second aspect of the present invention, wherein the cushioning portion is formed of a member different from the auxiliary flange, and is a member inserted into the bolt through hole, or the hole or recess formed in the auxiliary flange. Vacuum pump. The shock absorbing mechanism is characterized in that a cushioning material for cushioning an impact transmitted between the intake port flange and the auxiliary flange is provided in a space formed by the intake port flange and the auxiliary flange. The vacuum pump according to any one of claims 4. Any one of claims 1 to 5, wherein at least a part of the contact surfaces of the intake port flange and the auxiliary flange that are in contact with each other is subjected to a treatment for increasing the coefficient of friction. The vacuum pump described in. Claims 1 to 1, wherein the intake port flange and the auxiliary flange are provided with positioning pins for positioning both in the radial direction or the circumferential direction, and a shock absorbing member is provided around the positioning pins. The vacuum pump according to any one of 6. The vacuum pump according to claim 7, wherein the positioning pin has a stepped structure. The vacuum pump according to claim 7 or 8, wherein a collar is provided around the positioning pin to fill a gap. In order to ensure the sealing property between the intake port flange and the device, when the auxiliary flange sandwiches the intake port flange with the device, a gap is provided between the auxiliary flange and the device. The vacuum pump according to any one of claims 1 to 9, wherein the vacuum pump is characterized. The vacuum according to any one of claims 1 to 10, wherein a bolt screw hole for fixing the auxiliary flange and the intake port flange with a bolt is provided in the intake port flange. pump. The vacuum pump according to any one of claims 1 to 11.
The auxiliary flange and the intake port flange are fixed by bolts.
A vacuum pump characterized in that a bolt for fixing the auxiliary flange and the device has a higher strength than a bolt for fixing the auxiliary flange and the intake port flange. The vacuum pump according to any one of claims 1 to 11.
The auxiliary flange and the intake port flange are fixed by bolts.
The number of bolt screw holes for fixing the auxiliary flange and the intake port flange is the same as the number of bolt through holes when the intake port flange is directly fixed to the device without passing through the auxiliary flange, and the holes are arranged at equal pitches. A vacuum pump characterized by being. The vacuum pump according to any one of claims 1 to 11.
The auxiliary flange and the intake port flange are fixed by bolts.
The auxiliary flange has a divided structure divided into a plurality of parts in the circumferential direction.
A vacuum pump characterized in that the divided position of the auxiliary flange does not overlap with the position of the bolt. A conversion flange having a bolt through hole at a position corresponding to the fixing bolt screw hole formed in the device is provided.
The intake port flange is sandwiched between the auxiliary flange and the conversion flange.
The vacuum pump according to any one of claims 1 to 14, wherein the conversion flange can be attached to the device by fixing the conversion flange to the device. The vacuum pump according to claim 15.
When the strength of the bolt that fastens the device and the conversion flange is A, the strength of the bolt that fastens the conversion flange and the auxiliary flange is B, and the strength of the bolt that fastens the auxiliary flange and the intake flange is C. , A ≧ B ≧ C, the vacuum pump is characterized in that the relational expression holds. In the vacuum pump according to any one of claims 1 to 16.
After temporarily fixing the auxiliary flange and the intake flange,
A method for fixing a vacuum pump, characterized in that the vacuum pump is attached to the device by fixing the auxiliary flange to the device. The fixing of the vacuum pump according to claim 17, wherein the bolt through hole of the auxiliary flange is made larger than the shaft diameter of the bolt to be used in advance, and the backlash is eliminated when the bolt is fastened. Method. An exterior body of a vacuum pump having an intake flange on the intake side for connecting to the device.
A bolt screw hole for fixing the intake port flange with a bolt is provided in the intake port flange with respect to an auxiliary flange which is provided separately from the intake port flange and has a bolt through hole for fixing. An exterior body characterized by being present. It is an auxiliary flange of a vacuum pump equipped with an intake flange for connecting to the device on the intake side.
An auxiliary flange that is provided separately from the intake port flange, has a bolt through hole for fixing, sandwiches the intake port flange with the device, and is fixed to the device. A conversion flange for a vacuum pump equipped with an intake flange for connecting to the device on the intake side.
It is provided separately from the intake flange and has a bolt through hole at a position corresponding to the fixing bolt screw hole formed in the device.
The intake port flange is sandwiched between an auxiliary flange which is provided separately from the intake port flange and has a bolt through hole for fixing.
The auxiliary flange is fixed
A conversion flange characterized by being fixed to the device.

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