JP2019211314A5 - - Google Patents
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- JP2019211314A5 JP2019211314A5 JP2018107017A JP2018107017A JP2019211314A5 JP 2019211314 A5 JP2019211314 A5 JP 2019211314A5 JP 2018107017 A JP2018107017 A JP 2018107017A JP 2018107017 A JP2018107017 A JP 2018107017A JP 2019211314 A5 JP2019211314 A5 JP 2019211314A5
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- 238000000034 method Methods 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims description 3
- 238000000691 measurement method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Description
本発明は、ベクトルネットワークアナライザ(以下「VNA」と呼ぶ)を用いた反射係数の測定方法に関し、より具体的には、VNAの校正を含む1ポートでの被対象物(以下「DUT」と呼ぶ)の反射係数の測定方法に関する。 The present invention relates to a method for measuring a reflectance coefficient using a vector network analyzer (hereinafter referred to as "VNA"), and more specifically, an object to be subjected to one port including calibration of VNA (hereinafter referred to as "DUT"). ) Is related to the measurement method of the reflectance coefficient.
本発明は、ベクトルネットワークアナライザ(VNA)を用いた反射係数の測定方法を提供する。その測定方法は、(a)VNAの1つのポートに直接接続された被測定物の反射係数Γdmを測定するステップと、(b)その1つのポートにSパラメータSij,X(i、j=1、2、X=A、B、C)が既知の長さが異なる3つのラインA、B、Cを介して接続された被測定物の反射係数ΓXm(X=A、B、C)を測定するステップと、(c)反射係数Γdm、ΓXm及びSパラメータSij,Xを用いて被測定物の真の反射係数Γdを求めるステップと、を含む。 The present invention provides a method for measuring a reflectance coefficient using a vector network analyzer (VNA). Its measurement method, (a) a step of measuring a reflection coefficient gamma dm of the object that is directly connected to one port of VNA, (b) S parameter S ij to the one port, X (i, j = 1, 2, X = A, B, C) Reflection coefficient Γ Xm (X = A, B, C) of the object to be measured connected via three lines A, B, C with different known lengths. ), And (c) finding the true reflection coefficient Γ d of the object under test using the reflection coefficients Γ dm , Γ Xm and the S-parameters Sij, X.
本発明によれば、VNAの1つのポートでのDUTの反射係数の測定においてVNAの回路エラーを全て取り除いた、すなわち回路エラーの校正を含む測定が可能である。高精度の測定結果(真の反射係数)を得ることができる。また、基準器として長さの異なる3つのラインのみを用いるのでその製造や長さを基にした特性評価が容易である。 According to the present invention to remove any circuit errors of the VNA in the measurement of the reflection coefficient of the DUT at one port VNA, i.e. it is possible to measure including calibration circuitry error. Highly accurate measurement results (true reflectance coefficient) can be obtained. Moreover, since only three lines having different lengths are used as the reference device, it is easy to manufacture the lines and evaluate the characteristics based on the lengths.
図2は、本発明の一実施形態のVNAの1ポートでのDUTの反射係数の測定の概念図である。図2では、図1の場合同様に、VNA20の内部回路(部品)として、信号源11と受信器12のみを記載している。実際にはVNA20は他に信号分離器(スプリッタ、カプラ)、検波器、信号処理部(プロセッサ)、表示部等を含む。図2の四角枠内のδ、μ、τは、順番に方向性、トラッキング、マッチングのVNA内部の回路エラーを意味している。 FIG. 2 is a conceptual diagram of measuring the reflectance coefficient of a DUT at one port of a VNA according to an embodiment of the present invention. In Figure 2, similarly if the Figure 1, as the internal circuit of VNA20 (parts) describes only the receiver 12 and the signal source 11. Actually, the VNA 20 also includes a signal separator (splitter, coupler), a detector, a signal processing unit (processor), a display unit, and the like. Δ, μ, and τ in the square frame of FIG. 2 mean circuit errors inside the VNA of directionality, tracking, and matching in order.
1、11:信号源
2、12:受信器
3、13:被測定物(DUT)
10、20:ベクトルネットワークアナライザ(VNA)
15、16、17:ラインA、B、C
1, 11: Signal source 2, 12: Receiver 3, 13: Object to be measured (DUT)
10, 20: Vector network analyzer (VNA)
15, 16, 17: Lines A, B, C
Claims (5)
VNAの1つのポートに直接接続された被測定物の反射係数Γdmを測定するステップと、
前記1つのポートにSパラメータSij,X(i、j=1、2、X=A、B、C)が既知の長さが異なる3つのラインA、B、Cを介して前記被測定物を接続した場合の反射係数ΓXm(X=A、B、C)を測定するステップと、
前記反射係数Γdm、ΓXm及び前記SパラメータSij,Xを用いて前記被測定物の真の反射係数Γdを求めるステップと、を含む測定方法。 A method of measuring the reflectance coefficient using a vector network analyzer (VNA).
The step of measuring the reflectance coefficient Γ dm of the object to be measured directly connected to one port of the VNA,
The object to be measured is via three lines A, B, and C having S-parameters S ij, X (i, j = 1, 2, X = A, B, C) known to the one port and having different lengths. And the step of measuring the reflectance coefficient Γ Xm (X = A, B, C) when
A measurement method including a step of obtaining the true reflection coefficient Γ d of the object to be measured by using the reflection coefficients Γ dm and Γ Xm and the S parameters Sij and X.
前記1つのポートに前記ラインAを介して前記被測定物を接続した場合の反射係数ΓAmを測定するステップと、
前記1つのポートに前記ラインBを介して前記被測定物を接続した場合の反射係数ΓBmを測定するステップと、
前記1つのポートに前記ラインCを介して前記被測定物を接続した場合の反射係数ΓCmを測定するステップと、を含む請求項1〜3のいずれか一項に記載の測定方法。 The step of measuring the reflectance coefficient Γ Xm of the object to be measured is
A step of measuring the reflectance coefficient Γ Am when the object to be measured is connected to the one port via the line A, and
A step of measuring the reflectance coefficient Γ Bm when the object to be measured is connected to the one port via the line B, and
The measuring method according to any one of claims 1 to 3, comprising a step of measuring a reflectance coefficient Γ Cm when the object to be measured is connected to the one port via the line C.
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JP2018107017A JP7153309B2 (en) | 2018-06-04 | 2018-06-04 | Measurement method of reflection coefficient using vector network analyzer |
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JP2018107017A JP7153309B2 (en) | 2018-06-04 | 2018-06-04 | Measurement method of reflection coefficient using vector network analyzer |
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JP2019211314A JP2019211314A (en) | 2019-12-12 |
JP2019211314A5 true JP2019211314A5 (en) | 2020-12-10 |
JP7153309B2 JP7153309B2 (en) | 2022-10-14 |
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CN111983431B (en) * | 2020-08-31 | 2022-11-15 | 中电科思仪科技股份有限公司 | Method for improving simulation precision of port reflection coefficient of vector network analyzer |
KR20220105531A (en) * | 2021-01-20 | 2022-07-27 | 삼성전자주식회사 | Method and apparatus for detecting reflection coeffiectient |
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US4853613A (en) * | 1987-10-27 | 1989-08-01 | Martin Marietta Corporation | Calibration method for apparatus evaluating microwave/millimeter wave circuits |
US6823276B2 (en) * | 2003-04-04 | 2004-11-23 | Agilent Technologies, Inc. | System and method for determining measurement errors of a testing device |
WO2005101037A1 (en) * | 2004-04-02 | 2005-10-27 | Murata Manufacturing Co., Ltd. | High frequency electric characteristics measuring method and equipment for electronic component |
WO2006090550A1 (en) * | 2005-02-22 | 2006-08-31 | Murata Manufacturing Co., Ltd. | Method for measuring dielectric constant of transmission line material and method for measuring electric characteristic of electronic component using the dielectric constant measuring method |
CN101258412B (en) * | 2005-09-01 | 2013-02-20 | 株式会社村田制作所 | Method and apparatus for measuring scattering coefficient of device under test |
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