JP2019187163A - Two-axis integrated motor and actuator - Google Patents

Abstract

To provide a two-axis integrated motor or the like in which two detection units can be individually adjusted.SOLUTION: A two-axis integrated motor 1 includes an inner shaft rotor 110 and an outer shaft rotor 10 with the same rotation axis direction, and an output shaft 111a of the inner shaft rotor 110 and an output shaft 11a of the outer shaft rotor 10 are located on one end side. The two-axis integrated motor 1 includes an inner shaft stator 120, an outer shaft stator 20, a first bearing portion 261 and a third bearing portion 302 of the inner shaft rotor 110, a second bearing portion 265 and a fourth bearing portion 305 of the outer shaft rotor 10, a first detector 240 of the inner shaft rotor 110, and a second detector 250 of the outer shaft rotor 10. The first bearing portion 261, the inner shaft stator 120, the third bearing portion 302, and the first detector 240 are disposed in this order from one end side on the outer peripheral side of the inner shaft rotor 110, and the second detector 250, the second bearing unit 265, the outer shaft stator 20, and the fourth bearing unit 305 are disposed in this order from one end side on the inner peripheral side of the outer shaft rotor 10.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a two-axis integrated motor and an actuator.

  2. Description of the Related Art A two-shaft integrated motor is known that includes two rotors that are independently rotatable and two detectors that individually detect the rotation angles of the two rotors (for example, Patent Document 1).

JP 2002-238234 A

  It is desirable that the two detection units can be individually adjusted. That is, it is desirable that the two detection units be arranged so that access for adjustment work on one of the two detection units does not affect the other. However, in the conventional two-axis integrated motor, such an arrangement is difficult.

  An object of the present invention is to provide a two-axis integrated motor and actuator capable of individually adjusting two detection units.

  In order to achieve the above object, the present invention includes an inner shaft rotor and an outer shaft rotor that are rotatably provided and have the same rotation axis direction, and the output shaft of the inner shaft rotor and the outer shaft rotor An output shaft is a two-shaft integrated motor positioned on one end side in the rotation shaft direction, and an inner shaft stator that is a stator core of the inner shaft rotor, an outer shaft stator that is a stator core of the outer shaft rotor, and the inner shaft A first bearing portion disposed on the one end side with respect to the shaft stator and rotating in conjunction with the inner shaft rotor; and disposed on the one end side with respect to the outer shaft stator in conjunction with the outer shaft rotor. A second bearing portion that rotates, a third bearing portion that is disposed on the opposite side of the first bearing portion with respect to the inner shaft stator and rotates in conjunction with the inner shaft rotor, and the outer shaft stator Located on the opposite side of the second bearing part A fourth bearing that rotates in conjunction with the outer shaft rotor, a first detection unit that detects a rotation angle of the inner shaft rotor, and a second detection unit that detects the rotation angle of the outer shaft rotor. The first bearing portion, the inner shaft stator, the third bearing portion, and the first detection portion are arranged in this order from the one end side on the outer peripheral side of the inner shaft rotor, and the inner peripheral side of the outer shaft rotor. In addition, the second detection portion, the second bearing portion, the outer shaft stator, and the fourth bearing portion are arranged in this order from the one end side.

  Therefore, the second detection unit can be adjusted from one end side (motor output end side). Further, the first detection unit can be adjusted from the other end side. In this way, the two detection units can be adjusted individually. In addition, since there are bearings on one end side and the other end side with respect to the stator, it is possible to suppress the expansion of the influence of the moment load accompanying the extension of the axial length of the rotor and the stator. Therefore, it becomes easier to improve the output torque by extending the axial lengths of the rotor and the stator.

  In the present invention, the first bearing portion and the second bearing portion have preloaded bearings, and the third bearing portion and the fourth bearing portion have unpreloaded bearings.

  Therefore, the displacement of the inner shaft rotor and the outer shaft rotor due to a load from the outside can be further reduced. That is, the displacement of the positional relationship between the inner shaft rotor and the inner shaft stator and the displacement of the positional relationship between the outer shaft rotor and the outer shaft stator can be further reduced. Further, the third bearing portion can secure a margin for displacement of the positional relationship between the inner shaft rotor and the inner shaft stator due to expansion in the direction of the rotating shaft due to heat. Similarly, a margin with respect to the displacement of the positional relationship between the outer shaft rotor and the outer shaft stator can be ensured by the fourth bearing portion.

  In the present invention, the inner shaft rotor and the outer shaft rotor have a rotor yoke and a magnet, and the inner shaft stator and the outer shaft stator have a coil.

  Therefore, the structure of the rotating inner shaft rotor and outer shaft rotor can be simplified.

  In the present invention, the inner shaft rotor, the inner shaft stator, the outer shaft stator, and the outer shaft rotor are arranged in this order from the rotating shaft in the radial direction, and between the inner shaft stator and the outer shaft stator. And a non-magnetic material interposed between adjacent positions of the inner shaft stator and the outer shaft stator along the circumferential direction around the rotation shaft.

  Therefore, since the nonmagnetic material is interposed between the inner shaft stator and the outer shaft stator, the nonmagnetic material suppresses the interference of the magnetic field generated in each of the inner shaft stator and the outer shaft stator by the nonmagnetic material. Can do. Thus, magnetic field interference can be further suppressed.

  In the present invention, the inner shaft stator includes an inner shaft motor core provided with the coil, the outer shaft stator includes an outer shaft motor core provided with the coil, and the nonmagnetic material includes the inner magnetic core. It is located between the shaft motor core and the outer shaft motor core.

  Therefore, since the nonmagnetic material is interposed between the inner shaft motor core and the outer shaft motor core provided with the coil for generating the magnetic field, the interference of the magnetic field can be more reliably suppressed.

  In the present invention, the inner shaft stator has a cylindrical inner shaft stator back yoke provided outside the inner shaft motor core, and the outer shaft stator is formed in a cylindrical shape provided inside the outer shaft motor core. The non-magnetic body is located between the inner shaft stator back yoke and the outer shaft stator back yoke.

  Therefore, the shape of the non-magnetic material may be any shape that fits between the cylindrical inner shaft stator back yoke and the outer shaft stator back yoke. Therefore, a nonmagnetic material can be provided more simply.

  In the present invention, the non-magnetic body is an arcuate member whose cross-sectional shape in a direction orthogonal to the rotation axis is centered on the rotation axis.

  Therefore, the two-axis integrated motor can be easily accommodated in a cylindrical shape with the rotation axis as the center.

  In the present invention, the nonmagnetic material is a nonmagnetic alloy or resin.

  Therefore, the interference of the magnetic field can be more reliably suppressed by the nonmagnetic material. Further, the non-magnetic material can be provided with a material that is relatively easily available, and magnetic field interference can be suppressed at a lower cost.

  In the present invention, the magnet provided in the inner shaft rotor and the inner shaft stator have a longer axial length in the rotation axis direction than the magnet provided in the outer shaft rotor and the outer shaft stator.

  Therefore, it becomes easier to reduce the difference between the output torque of the outer shaft rotor and the output torque of the inner shaft rotor.

  In the actuator of the present invention, any one of the above-described two-shaft integrated motors, a housing containing the two-shaft integrated motors, and the inner shaft rotor are disposed in the direction of the rotation axis, and the inner shaft rotor is disposed. A shaft member having a thread portion in a first portion protruding from the inner shaft rotor to one side in the rotation axis direction and a groove portion extending in the rotation axis direction in a second portion protruding from the inner shaft rotor to the other in the rotation axis direction And a nut that is arranged outside the one of the inner shaft rotors in the rotation axis direction, is screwed into the screw portion, and rotates with the inner shaft rotor to move the shaft member in the rotation axis direction. And arranged on the other outer side in the rotation axis direction with respect to the inner shaft rotor, guides the shaft member in the rotation axis direction along the groove portion, and rotates together with the outer shaft rotor to rotate the shaft. Rotate the member around the axis And a spline nut to rolling.

  Therefore, since the nut and the spline outer cylinder are disposed on the outer side in the rotation axis direction with respect to the inner shaft rotor, the inner shaft rotor and the outer shaft rotor can be reduced in size in the radial direction. Thereby, a footprint can be made small. Further, the spline outer cylinder can suppress the accompanying rotation of the shaft member when the outer shaft rotor is rotated.

  In the present invention, an inner diameter of the inner shaft rotor is smaller than outer diameters of the nut and the spline outer cylinder.

  Therefore, the inner shaft rotor and the outer shaft rotor can be downsized in the radial direction by making the inner diameter of the inner shaft rotor smaller than the outer diameter of the nut and the spline outer cylinder.

  In the present invention, an arm attachment member that is connected to the tip of the second portion and attaches an arm is further provided.

  Accordingly, the transfer device can be configured by attaching the arm to the arm attachment member.

  In the present invention, the housing has a housing for a spline outer cylinder that accommodates the ball spline and covers a part of the second portion, and the arm attachment member extends toward the ball spline and extends for the spline outer cylinder. It has a cylindrical part which accommodates the tip of the axis of rotation of the housing, and the cylindrical part has a crevice between the spline outer cylinder housing.

  Therefore, the sealability from the external environment can be ensured by the gap. Moreover, since resistance is received in the rotation direction of the spline outer cylinder housing in the gap, rotation of the shaft member can be suppressed.

  In the present invention, the nut is supported by the housing via a fifth bearing portion, and the spline outer cylinder is supported by the housing via a sixth bearing portion.

  Therefore, when a force is applied to the shaft member in a direction orthogonal to the rotation axis direction, the force can be received by the housing via the rolling bearing, so that the displacement of the nut and the spline outer cylinder can be suppressed.

  The present invention further includes a negative operating electromagnetic brake connected to the nut.

  Therefore, the shaft member can be prevented from dropping.

  In the actuator of the present invention, any one of the above-described two-shaft integrated motors, a housing containing the two-shaft integrated motors, and the inner shaft rotor are disposed in the direction of the rotation axis, and the inner shaft rotor is disposed. A shaft member having a thread portion in a first portion protruding from the inner shaft rotor to one side in the rotation axis direction and a groove portion extending in the rotation axis direction in a second portion protruding from the inner shaft rotor to the other in the rotation axis direction A nut that is screwed into the threaded portion and rotates with the inner shaft rotor to move the shaft member in the direction of the rotational axis, guides the shaft member in the direction of the rotational axis along the groove, and A spline outer cylinder that rotates together with the outer shaft rotor to rotate the shaft member in a direction around the axis.

  Accordingly, the spline outer cylinder can suppress the accompanying rotation of the shaft member when the outer shaft rotor is rotated.

  ADVANTAGE OF THE INVENTION According to this invention, the two-axis integrated motor and actuator which can adjust two detection parts separately can be provided.

FIG. 1 is a cross-sectional view illustrating an example of a specific configuration of the two-axis integrated motor according to the first embodiment. FIG. 2 is a diagram illustrating an example of a stator core portion. FIG. 3 is a diagram illustrating an example of a specific shape of a nonmagnetic material and a shape different from that in FIG. FIG. 4 is a diagram illustrating an example of a specific shape of a non-magnetic material and an example of a shape different from that in FIG. FIG. 5 is a diagram illustrating an example of a specific shape of a non-magnetic material and an example of a shape different from that in FIG. FIG. 6 is a diagram illustrating an example of a specific structure of the stator (stator) according to the first embodiment. FIG. 7 is a diagram illustrating a laminated structure of electromagnetic steel sheet layers included in the outer shaft motor core according to the first embodiment. FIG. 8 is a view showing one electromagnetic steel plate according to the first embodiment. FIG. 9 is a diagram showing one of two phases of the arrangement of a plurality of electromagnetic steel sheets in one electromagnetic steel sheet layer. FIG. 10 is a diagram showing the other of the two phases of the arrangement of the plurality of electromagnetic steel sheets in one electromagnetic steel sheet layer. FIG. 11 is a diagram illustrating an example of a case where magnetic steel sheet layers having the same phase are continuously stacked. FIG. 12 is a diagram showing one of the two phases of the arrangement of a plurality of electromagnetic steel sheets in one electromagnetic steel sheet layer. FIG. 13 is a diagram showing the other of the two phases of the arrangement of a plurality of electromagnetic steel sheets in one electromagnetic steel sheet layer. FIG. 14 is a partial cross-sectional view of the actuator of the second embodiment. FIG. 15 is a cross-sectional view of main parts showing main parts in FIG. FIG. 16 is a cross-sectional view of a two-axis integrated motor with a plane orthogonal to the rotation axis. FIG. 17 is a diagram illustrating a state where the screw shaft is raised from the state illustrated in FIG. 14.

  Hereinafter, embodiments according to the present invention will be described with reference to the drawings, but the present invention is not limited thereto. The requirements of the embodiments described below can be combined as appropriate. Some components may not be used.

(Embodiment 1)
FIG. 1 is a cross-sectional view showing an example of a specific configuration of the two-axis integrated motor 1. The two-shaft integrated motor 1 includes an inner shaft rotor 110 and an outer shaft rotor 10 that are rotors that are individually rotatable, and an inner shaft stator 120 and an outer shaft stator 20 that are stators. Hereinafter, the rotational axis direction of the two-shaft integrated motor 1 may be referred to as the Z direction in connection with the description of the embodiment with reference to the drawings. In addition, two directions orthogonal to each other along a plane orthogonal to the Z direction may be described as an X direction and a Y direction.

  The inner shaft rotor 110 and the outer shaft rotor 10 are rotatably provided and have the same rotation axis direction. Specifically, the inner shaft rotor 110 includes a cylindrical inner shaft rotor yoke 111 and a magnet 112 arranged in an annular shape along the outer peripheral surface of the inner shaft rotor yoke 111. The outer shaft rotor 10 includes a cylindrical outer shaft rotor yoke 11 and a magnet 12 arranged in an annular shape along the inner peripheral surface of the outer shaft rotor yoke 11. The inner shaft rotor 110 and the outer shaft rotor 10 of the first embodiment share the same ideal axis of the rotation axis P at the time of design, but the positions of the rotation axes of the inner shaft rotor 110 and the outer shaft rotor 10 are different. May be.

  The inner shaft stator 120 has an inner shaft motor core 130 provided with a coil 150. The inner shaft rotor 110 rotates in response to power supply to the coil 150 of the inner shaft motor core 130. The outer shaft stator 20 has an outer shaft motor core 30 provided with a coil 50. The outer shaft rotor 10 rotates in response to power supply to the coil 50 of the outer shaft motor core 30.

  The inner shaft stator 120 of the first embodiment has a cylindrical inner shaft stator back yoke 140 provided outside the inner shaft motor core 130. In addition, the outer shaft stator 20 of the first embodiment includes a cylindrical outer shaft stator back yoke 40 provided inside the outer shaft motor core 30. The inner-shaft stator back yoke 140 and the outer-shaft stator back yoke 40 according to the first embodiment are cylindrical members provided as integral members in the rotation axis direction, and are made of, for example, iron or a dust core (dust core).

  The two-shaft integrated motor 1 according to the first embodiment includes an inner shaft rotor 110, an inner shaft stator 120, an outer shaft stator 20, and an outer shaft rotor 10 in this order from the inner side to the outer side of the diameter around the rotation axis P. Is arranged.

  The magnitude of the output torque of the electric motor is related to the magnitude of the distance from the rotation axis P to the thrust generation position (between the magnet and the coil). For this reason, the torque of the outer shaft rotor 10 tends to be relatively larger than that of the inner shaft rotor 110. In the first embodiment, the axial lengths of the magnet 112 and the inner shaft stator 120 provided in the inner shaft rotor 110 are made longer than the magnet 12 and the outer shaft stator 20 provided in the outer shaft rotor 10, whereby the outer shaft rotor 10. The thrust of the inner shaft rotor 110 is made larger than the thrust. Thus, in the first embodiment, the difference between the output torque of the outer shaft rotor 10 and the output torque of the inner shaft rotor 110 is made smaller. For this reason, the inner shaft stator 120 has a longer axial length in the rotation axis direction than the outer shaft stator 20.

  Holes 11b and 111b are provided in the output end portions 11a and 111a of the inner shaft rotor 110 and the outer shaft rotor 10 located on one end side of the inner shaft rotor yoke 111 and the outer shaft rotor yoke 11, respectively. By connecting and fixing the driven body to each of the inner shaft rotor 110 and the outer shaft rotor 10 provided with the holes 11b and 111b, the rotational driving force is transmitted to the driven body. The specific shapes of the holes 11b and 111b correspond to the specific shapes of the members that connect and fix the driven body. For example, when the member is a screw, the hole is a screw hole that is screwed with the screw. Further, when the member is a pin-shaped member having no thread, the hole is a hole into which the pin-shaped member is fitted. One end side is the upper side in FIG. 1 (the output end side of the two-shaft integrated motor 1). When described as the other end side, it refers to the opposite side (the lower side in FIG. 1) of the one end side.

  A bearing portion 260 is disposed on one end side of the outer shaft stator back yoke 40. The bearing portion 260 includes a first bearing portion 261 and a second bearing portion 265. The first bearing portion 261 rotates in conjunction with the inner shaft rotor 110. The second bearing portion 265 rotates in conjunction with the outer shaft rotor 10. The first bearing portion 261 is provided at a position on the inner peripheral side with respect to the extending portion 299 extending from the outer shaft stator back yoke 40 to one end side and on the outer peripheral side with respect to the inner shaft rotor 110. Since the first bearing portion 261 is interposed between the inner shaft rotor 110 and the extending portion 299, the inner shaft rotor 110 is rotatably supported. The second bearing portion 265 is provided on the outer peripheral side with respect to the extending portion 299 and on the inner peripheral side with respect to the outer shaft rotor 10. Since the second bearing portion 265 is interposed between the outer shaft rotor 10 and the extending portion 299, the outer shaft rotor 10 is rotatably supported. The extension part 299 is interposed between the first bearing part 261 and the second bearing part 265.

  In the biaxially integrated motor 1, the position in the rotation axis direction of the end portion on the one end side of the first bearing portion 261 and the position in the rotation axis direction of the end portion on the one end side of the second bearing portion 265 are the same. Specifically, for example, as shown in FIG. 1, a first bearing portion 261 having two bearings 262 and 263 and a second bearing portion 265 having two bearings 266 and 267 are relatively closer to one end side. The ends of the bearings 262 and 266 on one end side are along the same plane orthogonal to the rotation axis P.

  The first bearing portion 261 includes pre-loaded bearings 262 and 263. The second bearing portion 265 has preloaded bearings 266 and 267. The bearings 262, 263, 266, and 267 of the first embodiment are subjected to fixed position preload, but may be constant pressure preload or other preload. Since the bearings 262, 263, 266, and 267 are preloaded, the displacement of the outer shaft rotor yoke 11 and the inner shaft rotor yoke 111 due to an external load can be further reduced. That is, the displacement of the positional relationship between the outer shaft rotor 10 and the outer shaft stator 20 and the displacement of the positional relationship between the inner shaft rotor 110 and the inner shaft stator 120 can be further reduced.

  Moreover, as shown in FIG. 1, the bearing 262 and the bearing 263 are a back combination with respect to the outer peripheral side. Further, the bearing 266 and the bearing 267 are a combination of the back surface with respect to the outer peripheral side. As a result, the first bearing portion 261 and the second bearing portion 265 can further reduce displacement with respect to the radial load on the outer shaft rotor yoke 11 and the inner shaft rotor yoke 111 and the axial load and moment load from the outer peripheral side.

  In the first embodiment, the first bearing portion 261 and the second bearing portion 265 each have two ball bearings 262 and 263 and bearings 266 and 267, which are the first bearing portion 261 and the second bearing portion 265. It is an example of the concrete structure of the 2 bearing part 265, and is not restricted to this. Each of the first bearing portion 261 and the second bearing portion 265 only needs to have one or more bearings.

  An extending portion 303 is provided on the other end side of the outer shaft stator back yoke 40. Although the extension part 303 shown in FIG. 1 inclines toward the outer peripheral side, the specific shape of the extension part 303 is not restricted to this, It can change suitably. For example, the extension part 303 may be cylindrical toward the other end side. Note that the outer peripheral side refers to the outer side in the radial direction around the rotation axis P. When it is described as the inner peripheral side of a certain thing, it refers to the inner side in the radial direction around the rotation axis P with respect to the certain thing.

  A base 281 is fixed to the other end side of the extending portion 303. An end portion on the outer peripheral side of the base 281 extends to a position not in contact with the outer shaft rotor yoke 11 on the other end side of the outer shaft rotor yoke 11. An annular fitting portion 304 extending from the base 281 is fitted to the inner peripheral side near the other end side of the extending portion 303.

  Further, a backup bearing portion 300 is provided on the other end side of the stator core portion 70 from which the extending portion 303 extends. The backup bearing unit 300 includes a third bearing unit 302 and a fourth bearing unit 305. The third bearing portion 302 is interposed between the fitting portion 304 and the inner shaft rotor yoke 111. The third bearing portion 302 rotates in conjunction with the inner shaft rotor 110 on the opposite side of the first bearing portion 261 across the outer shaft stator 120. The fourth bearing portion 305 is interposed between the extension portion 303 and the outer shaft rotor yoke 11. The fourth bearing portion 305 rotates in conjunction with the outer shaft rotor 10 on the opposite side of the second bearing portion 265 across the outer shaft stator 20. The fourth bearing portion 305 is surrounded by the extending portion 303, the base 281, and the outer shaft rotor yoke 11. The third bearing portion 302 and the fourth bearing portion 305 shown in FIG. 1 have one bearing that is not preloaded. The third bearing portion 302 and the fourth bearing portion 305 may have a plurality of bearings.

  The diameter of the ring formed by the outer peripheral surface of the extending portion 281 is the same as the diameter of the outer shaft rotor yoke 11. In the first embodiment, a hole 282 that is used when the biaxial integrated motor 1 is fixed to an attachment target of the biaxial integrated motor 1 is provided on the other end side of the base 280.

  A first detector 240 is disposed on the inner peripheral side of the base 281. That is, the first detector 240 is disposed on the other end side of the inner shaft stator 120. The first detector 240 detects the rotation angle of the inner shaft rotor 110. Specifically, the first detection unit 240 includes a first rotation unit 241 and a first fixing unit 242. The first rotating portion 241 is an annular magnetized body that is fixed to the inner shaft rotor 110 and rotates together with the inner shaft rotor 110. The first rotating portion 241 is alternately magnetized with N and S poles along the circumferential direction. The first rotating portion 241 is fixed to the inner shaft rotor 110 at a position where the inner shaft rotor 110 and the rotation axis P are the same. The first fixing unit 242 is a magnetic detection circuit provided on the substrate 242a. The substrate 242a is fixed to the base 281 with a fastener (not shown). That is, the first fixing portion 242 detects the rotation angle of the first rotating portion 241 provided so as to be able to change the position relative to the first fixing portion 242 while being fixed to the outer shaft stator back yoke 40. To do.

  More specifically, the 1st rotation part 241 is being fixed to the outer peripheral side of the inner shaft rotor 110 via the fixing tool 241a. The fixture 241a includes a planar surface portion orthogonal to the rotation axis P, a cylindrical portion extending toward one end with respect to the surface portion, and a curved portion that is curved or bent so that the surface portion and the cylindrical portion are continuous. including. The 1st rotation part 241 is being fixed to the other end side of the surface part of the fixing tool 241a. Further, the cylindrical portion of the fixture 241 a is fitted and fixed to the outer peripheral surface side of the inner shaft rotor yoke 111. Thus, the first rotating portion 241 is fixed on the outer peripheral side of the inner shaft rotor yoke 111 so as to face the other end side. The first fixing part 242 is provided on the surface on one end side of the substrate 242a and faces the first rotating part 241.

  The first rotating part 241 and the first fixing part 242 are not in contact with each other. Thus, since the 1st detection part 240 is the structure which detects a rotation angle by the positional relationship in which the 1st rotation part 241 and the 1st fixing part 242 have an axial gap, a moment load is applied to the biaxially integrated motor 1. In addition, even if a moment displacement occurs in the inner shaft rotor yoke 111, the influence on the detection accuracy of the rotation angle can be suppressed.

  As described above, the third bearing portion 302 is disposed between the first detection unit 240 and the inner shaft stator 120. The third bearing portion 302 can further reduce the magnetic influence from the inner shaft stator 120 on the first detection portion 240. Further, a backup bearing portion 300 is provided between the first rotating portion 241 and the outer shaft stator 20, and the backup bearing portion 300 includes a third bearing portion 302 and a fitting portion 304. For this reason, the magnetic influence from the outer shaft stator 20 with respect to the 1st detection part 240 can be reduced more. Therefore, the first detection unit 240 can detect the rotation angle of the inner shaft rotor yoke 111 with higher accuracy.

  In Embodiment 1, the cover 295 which covers the inner peripheral side and other end side of the 1st detection part 240 is provided. The cover 295 is a plate-like ring that is orthogonal to the rotation axis P. The surface portion of the cover 295 faces the substrate 242a on the other end side of the substrate 242a. The cover 295 covers the first detection unit 240 from the other end side by fixing the position with respect to the base 281 by the fixing member 298.

  The cover 295 is a separate body from the base 281. For this reason, by removing the cover 295, the first detector 240 can be easily accessed from the other end side. Therefore, adjustment of the first detection unit 240 such as adjustment of the attachment position of the first rotating part 241 with respect to the inner shaft rotor yoke 111 and adjustment of the attachment position of the first fixing part 242 with respect to the base 281 can be easily performed. In addition, since access to the first detection unit 240 is performed from the other end side, the first detection unit 240 can be accessed without unnecessary access to the configuration on the one end side (second detection unit 250 described later).

  On the inner peripheral surface and the outer peripheral surface of the extending portion 299, a step, a protrusion, a depressed portion, a hole, and the like corresponding to the configuration of each portion of the bearing portion 260 are provided. A support member 231 is fixed to one end side of the extending portion 299. The support member 231 and the extending portion 299 are connected and fixed by a fastener 232. On the other end side of the extending portion 299, a hole is provided for the tip of the fastener 232 to enter inside. The specific shape of the hole corresponds to the specific shape of the fastener 232 in the same manner as the holes 11b and 111b.

  A second detection unit 250 is disposed on one end side of the bearing unit 260. The second detector 250 detects the rotation angle of the outer shaft rotor 10. Specifically, the second detection unit 250 includes a second rotation unit 251 and a second fixing unit 252. The second rotating portion 251 is an annular magnetized body that is fixed to the outer shaft rotor 10 and rotates together with the outer shaft rotor 10. The second rotating portion 251 is alternately magnetized with N and S poles along the circumferential direction. The second rotating portion 251 is fixed to the outer shaft rotor 10 at a position where the outer shaft rotor 10 and the rotation axis P are the same. The second fixing unit 252 is a magnetic detection circuit provided on the substrate 252a. The substrate 252a is fixed to the support member 231 by a fastener 252b. That is, the position of the second fixing portion 252 is changed relative to the second fixing portion 252 in a state where the second fixing portion 252 is fixed to the extension portion 299 via the substrate 252a, the fastener 252b, the support member 231 and the fastener 232. The rotation angle of the second rotation unit 251 provided as possible is detected.

  More specifically, the 2nd rotation part 251 is being fixed to the inner peripheral side of the outer shaft rotor 10 via the base part 251a. The base 251a includes a planar surface portion orthogonal to the rotation axis P, a cylindrical portion extending toward one end with respect to the surface portion, and a curved portion that is curved or bent so that the surface portion and the cylindrical portion are continuous. Including. The second rotating part 251 is fixed to one end side of the surface part of the base part 251a. Further, the surface portion of the base portion 251a is fixed to a protruding portion 11c that protrudes from the outer shaft rotor yoke 11 to the inner peripheral side. The base 251a and the protrusion 11c are connected and fixed by a fastener 251b. A hole for allowing the end of the fastener 251b to enter the inside is provided on the surface on one end side of the protruding portion 11c. The specific shape of the hole corresponds to the specific shape of the fastener 251b, similar to the holes 11b and 111b.

  The second rotating portion 251 is fixed on the inner peripheral side of the outer shaft rotor yoke 11 so as to face one end side. The second fixing portion 252 is provided on the other end surface of the substrate 252a and faces the second rotating portion 251. The second rotating part 251 and the second fixing part 252 are not in contact with each other. As described above, the second detection unit 250 is configured to detect the rotation angle based on the positional relationship in which the second rotation unit 251 and the second fixing unit 252 have an axial gap. In addition, even if moment displacement occurs in the outer shaft rotor yoke 11, the influence on the detection accuracy of the rotation angle can be suppressed. Further, no other configuration is arranged between the second detection unit 250 and the bearing unit 260. For this reason, even if a moment load is applied, the degree of influence that the moment displacement having the bearing 260 as a fulcrum has on the second detection unit 250 can be further reduced. Moreover, since the bearing part 260 is arrange | positioned between the 2nd detection part 250 and the stator core part 70, the magnetic influence from the stator core part 70 with respect to the 2nd detection part 250 can be reduced more. Thus, the second detection unit 250 can detect the rotation angle of the outer shaft rotor yoke 11 with higher accuracy.

  A cover 291 is provided on one end side with respect to the second detection unit 250. The cover 291 is, for example, a plate-shaped ring disposed between the ring formed by the output end portion 11a and the ring formed by the output end portion 111a, and is disposed along a plane orthogonal to the rotation axis P. . The cover 291 is fixed to one end side of the second detection unit 250 using, for example, a fastener 292. The fastener 292 is provided, for example, so as to be fixed to one end side of the fastener 252b. The fastener 292 may be configured to be connected and fixed to the support member 231 at a position different from the fastener 252b.

  By removing the cover 291, the second detector 250 can be easily accessed from one end side. Therefore, adjustment of the second detection unit 250 such as adjustment of the attachment position of the second rotating part 251 with respect to the outer shaft rotor yoke 11 and adjustment of the attachment position of the second fixing part 252 with respect to the support member 231 can be easily performed. In addition, since the second detection unit 250 is accessed from one end side, the second detection unit 250 can be accessed without unnecessary access to the first detection unit 240 on the other end side.

  As described above and as shown in FIG. 1, the first bearing portion 261, the inner shaft stator 120, the third bearing portion 302, and the first detection portion 240 are arranged on the outer peripheral side of the inner shaft rotor yoke 111 in order from one end side. ing. Further, on the inner peripheral side of the outer shaft rotor yoke 11, a second detection unit 250, a second bearing unit 265, an outer shaft stator 20, and a fourth bearing unit 305 are arranged in this order from one end side.

  FIG. 2 is a diagram illustrating an example of the stator core unit 70 according to the first embodiment. The coil 150 included in the inner shaft stator 120 is electrically connected to the first driver 421. The first driver 421 drives the first rotor 20 by supplying a first drive current I1 to the coil 150.

  The coil 50 included in the outer shaft stator 20 is electrically connected to the second driver 422. The second driver 422 drives the second rotor 30 by supplying the second drive current I <b> 2 to the coil 50.

  The first driver 421 and the second driver 422 are electrically connected to the controller 420. The controller 420 controls the first driver 421 and the second driver 422 independently. The controller 420 independently controls the current amount of the first drive current I1 and the current amount of the second drive current I2. The rotation angle of the first rotor 20 is controlled by the amount of the first drive current I1. The rotation angle of the second rotor 30 is controlled by the amount of the second drive current I2. The controller 420 controls the rotation angle of the first rotor 20 and the rotation angle of the second rotor 30 independently.

  The first detector 240 detects the rotation angle of the inner shaft rotor yoke 111 with respect to the inner shaft stator 120 and supplies it to the controller 420. The controller 420 adjusts the current amount of the first drive current I1 based on the detection result of the first detection unit 240 so that the inner shaft rotor 110 can obtain a desired rotation angle.

  The 2nd detection part 250 detects the rotation angle of the outer shaft rotor yoke 11 with respect to the outer shaft stator 20, and supplies it to the controller 420 (refer FIG. 2). The controller 420 adjusts the current amount of the second drive current I2 based on the detection result of the second detection unit 250 so that the outer shaft rotor 10 can obtain a desired rotation angle.

  The two-shaft integrated motor 1 includes a non-magnetic body 45 provided between the inner shaft stator 120 and the outer shaft stator 20. The nonmagnetic material 45 of the first embodiment is located between the inner shaft motor core 130 and the outer shaft motor core 30, for example. More specifically, the non-magnetic body 45 is positioned between the inner shaft stator back yoke 140 and the outer shaft stator back yoke 40 and is disposed on at least one of the inner shaft stator back yoke 140 and the outer shaft stator back yoke 40. It is fixed. Thus, the nonmagnetic material 45 is interposed between the inner shaft stator 120 and the outer shaft stator 20 along the circumferential direction around the rotation axis P.

  The nonmagnetic material 45 is a member using, for example, a nonmagnetic alloy, resin, or both. More specifically, the non-magnetic material 45 is formed in a cylindrical shape using at least one material of, for example, an aluminum alloy, austenitic stainless steel (for example, SUS316, SUS316, SUS305, etc.), or a synthetic resin. It is the member formed in. The cylinder of the nonmagnetic body 45 has a cross-sectional shape in the direction orthogonal to the rotation axis P with the rotation axis P as the center. When the non-magnetic material 45 is an alloy, it is fixed by a method such as adhesion using an adhesive or shrink fitting. When the non-magnetic body 45 is resin, the non-magnetic body 45 formed in a cylindrical shape in advance between the inner shaft stator back yoke 140 and the outer shaft stator back yoke 40 may be fixed by a method of bonding. Alternatively, the inner shaft stator back yoke 140 and the outer shaft stator back yoke 40 may be fixedly formed by a method of filling resin.

  3, 4, and 5 are diagrams showing examples of specific shapes of the non-magnetic material, and examples of shapes different from those in FIG. 2. The nonmagnetic material according to the present invention may not be a cylindrical shape in which the cross-sectional shape in the direction orthogonal to the rotation axis P is continuous without being interrupted in an annular shape, or may be an arc-shaped member. Specifically, as shown in FIG. 3, for example, the non-magnetic body 45a may have a shape in which one portion of the ring drawn by the cross-sectional shape is interrupted and discontinuous. In this case, for example, when the nonmagnetic material 45a is an alloy, the cylindrical nonmagnetic material 45a can be more easily formed by curving the plate-like alloy in an arc shape. Further, as shown in FIGS. 4 and 5, for example, the non-magnetic material may be formed in a cylindrical shape as a whole by combining a plurality of arc-shaped members. 4 shows an example in which the nonmagnetic material has two nonmagnetic members 45b and 45b, and FIG. 5 shows an example in which the nonmagnetic material has three nonmagnetic members 45c, 45c and 45c. Is an example and is not limited to this. The nonmagnetic material may be constituted by four or more members. In addition, the non-magnetic material may have a configuration in which a plurality of members are provided side by side in the rotation axis direction. 3-5, the non-continuous location AP may be a gap, or non-magnetic materials facing each other across the non-continuous location AP may be in contact with each other. Moreover, the adhesive agent etc. may be filled into the discontinuous part AP. Hereinafter, the nonmagnetic members 45b and 45c and the nonmagnetic members 45b and 45c constituting the nonmagnetic member may be collectively referred to as a nonmagnetic member 45 or the like.

  FIG. 6 is a diagram illustrating an example of a specific structure of the stator (stator) according to the first embodiment. A specific configuration example of the stator (stator) included in the two-shaft integrated motor 1 will be described with the outer shaft stator 20 as an example with reference to FIGS. 2 and 6. The outer shaft motor core 30 has an annular edge portion 31 located on the outer peripheral side, and four or more core portions 32 protruding inward from the edge portion 31. A coil 50 is provided in each core portion 32. The outer shaft motor core 30 has a laminated structure in which electromagnetic steel plate layers in which electromagnetic steel plates 60 described later are annularly arranged are laminated. The edge portion 31 is positioned along a cylindrical shape having the rotation axis P as a central axis as a whole by such a laminated structure. Further, the four or more core portions 32 and the coils 50 are arranged in an annular shape around the rotation axis P inside the edge portion 31. The outer shaft stator back yoke 40 is located on the opposite side of the outer shaft rotor 10 with respect to the core portion 32.

  In FIG. 6, the outer shaft stator 20 and the inner shaft stator 120 are viewed from the Z direction. Further, in FIG. 6, for the purpose of clearly showing the teeth 61 and 161 constituting the core portion 32, illustration of a part of the windings of the coils 50 and 150 surrounding the core portion 32 in FIG. 2 is omitted. Yes. FIG. 7 is a view showing a laminated structure of electromagnetic steel sheet layers included in the outer shaft motor core 30 according to the first embodiment. In FIG. 7, the outer shaft motor core 30 is viewed from one direction (for example, the Y direction) orthogonal to the Z direction. FIG. 8 is a view showing one electromagnetic steel plate 60 according to the first embodiment.

  As shown in FIG. 7, for example, the outer shaft motor core 30 has a structure in which a plurality of electromagnetic steel sheet layers are stacked in the Z direction. As shown in FIGS. 6 and 7, a plurality of electromagnetic steel sheets 60 are annularly arranged in one electromagnetic steel sheet layer. As shown in FIGS. 6 and 8, the electromagnetic steel plate 60 has two teeth 61. The outer shaft motor core 30 forms the core portion 32 of the coil 50 by laminating the teeth 61 of the electromagnetic steel plates 60 included in each of the plurality of electromagnetic steel plates by a laminated structure. That is, for example, as shown in FIG. 7, the core portion 32 that functions as the core of the coil 50 provided in the outer shaft stator 20 includes teeth 61 stacked in the Z direction.

  For example, as shown in FIG. 8, one electromagnetic steel plate 60 has a base portion 62 in which two teeth 61 are physically continuous. Specifically, the base 62 has, for example, an arc shape in which two teeth 61 included in one electromagnetic steel plate 60 are positioned at a predetermined distance. A plurality of electromagnetic steel plates 60 are annularly arranged in one electromagnetic steel plate layer, and the plurality of electromagnetic steel plate layers are laminated, so that the base portions 62 come into contact with each other to form the edge portion 31. In the first embodiment, the two teeth 61 included in the electromagnetic steel sheet 60 are discontinuous on the opposite side of the outer shaft rotor 10. Specifically, for example, as shown in FIG. 8, on the side opposite to the base portion 62, the tip of the tooth 61 is disposed with a gap with respect to the other adjacent teeth 61. Thus, a gap (slot) is provided between the teeth 61 provided so as to protrude from the base 62 in the radial direction of the outer shaft motor core 30. Further, in the electromagnetic steel sheet 60 arranged in the electromagnetic steel sheet layer, the two teeth 61 protrude from the base 62 positioned on the rotor side with respect to the two teeth 61 on the opposite side of the outer shaft rotor 10.

  More specifically, in a so-called outer rotor motor such as a motor on the outer shaft side, the electromagnetic steel plate 60 is provided with two teeth 61 projecting toward the inside of the arc of the base 62. The shape of the base 62 is not necessarily an arc shape. For example, as shown in FIG. 8 and the like, the side of the base portion 62 from which the teeth 61 protrude may be a straight line perpendicular to the protruding direction of the teeth 61. For example, the electromagnetic steel sheet 60 shown in FIG. 8 has a shape in which two T-shaped upper sides are connected by projecting two teeth 61 from a base 62. A base portion 62 projecting on both sides in the circumferential direction like the upper side of the T shape with respect to the teeth 61 constituting the core portion 32 locks the coil 50 in the radial direction. Thereby, the extension of the winding of the coil 50 in the direction in which the outer shaft rotor 10 is located, the jumping out, and the like can be suppressed. Further, the base 62 has an arc shape on the side of the upper side of the connected T-shaped portion where the teeth 61 do not protrude.

  In the base 62, a portion corresponding to the midpoint between the two teeth 61 included in one electromagnetic steel plate 60 is thinner than the other portions. More specifically, for example, the intermediate portion 63 which is a portion corresponding to the intermediate point is curved like a bay station shape with a concave lens cross section in the radial direction, and the thickness of the base portion 62 in the radial direction. Is narrowing. The teeth 61 are configured such that a plurality of the teeth 61 are stacked along the rotation axis direction to form the core portion 32 and the coil 50 is provided. Interference can occur. It is desirable that the interference of the magnetic field is further reduced from the viewpoint of further improving the efficiency of the two-axis integrated motor 1. Magnetic wraparound tends to occur relatively stronger in the closed slot HS in which the teeth 61 are physically connected than in the open slot KS in which the teeth 61 are not physically connected. Further, the magnetic wraparound tends to occur more strongly as the degree of physical continuity in the closed slot HS increases. Therefore, in the first embodiment, the magnetic wraparound is suppressed by making the portion corresponding to the midpoint between the teeth 61 thinner than the other portions. As a result, a decrease in efficiency due to magnetic field interference can be suppressed, and the efficiency of the two-shaft integrated motor 1 can be made higher. In FIG. 6, the intermediate part 63 with parentheses and a reference numeral is arranged in a different electromagnetic steel sheet layer from the electromagnetic steel sheet layer in which the electromagnetic steel sheet 60 having the intermediate part 63 with no parentheses in the reference numeral is arranged. It is the intermediate part 63 of the electromagnetic steel plate 60 that is being used.

  FIG. 9 is a diagram showing one of the two phases of the arrangement of the plurality of electromagnetic steel sheets 60 in one electromagnetic steel sheet layer. FIG. 10 is a diagram showing the other of the two phases of the arrangement of the plurality of electromagnetic steel plates 60 in one electromagnetic steel plate layer. The difference between FIG. 9 and FIG. 10 shows the difference in the arrangement of the electromagnetic steel sheets 60 having different phases as viewed from the same direction. Hereinafter, one phase shown in FIG. 9 is referred to as a first phase. The other phase shown in FIG. 10 is referred to as a second phase. Symbol PS1 indicates a first phase electrical steel sheet layer. Symbol PS2 indicates a second phase electrical steel sheet layer.

  There are two phases of arrangement of the plurality of electromagnetic steel sheets 60 in one electromagnetic steel sheet layer. The outer shaft stator 20 has such two phases of electrical steel sheet layers. Specifically, the phase of the arrangement of the electromagnetic steel sheets 60 is shifted by 1 tooth between the two phases. Since the phase of the arrangement of the electromagnetic steel plates 60 is shifted by one tooth between the two phases, the arrangement of the two teeth 61 included in one electromagnetic steel plate 60 is staggered between the two phases. Specifically, for example, one of the teeth 61a and 61b, which is the two teeth 61 of one electromagnetic steel plate 60 in the first phase (the teeth 61a), is disposed at the position where the other (the teeth 61) in the second phase. 61b) is located. Moreover, in the 1st phase, the other (tooth 61b) is located in the position where one (tooth 61a) is arrange | positioned among the teeth 61a and 61b which one electromagnetic steel plate 60 has in a 2nd phase. 9 and 10, for the purpose of distinguishing the phases, one of the two teeth 61 is denoted by reference numeral 61a, and the other is denoted by reference numeral 61b.

  In the first embodiment, a plurality of electromagnetic steel sheets 60 in one electromagnetic steel sheet layer are arranged with a gap therebetween. Specifically, the electromagnetic steel sheets 60 arranged annularly in one electromagnetic steel sheet layer are not in contact with each other. More specifically, it is two teeth 61 which each different electromagnetic steel plate 60 has, and the interval between adjacent teeth 61 in a non-contact state, the interval between two teeth 61 which one electromagnetic steel plate 60 has, Are arranged along the annular arrangement direction in one electromagnetic steel sheet layer so that they are the same. As described above, the gap (slot) between the two teeth 61 is the gap (closed slot HS) between the two teeth 61 included in one electromagnetic steel sheet 60 or the gap between the two teeth 61 included in different electromagnetic steel sheets 60. Regardless of whether (open slot KS) or not, the spacing between the teeth 61 arranged in an annular shape is the same.

  In the first embodiment, the shape of the electromagnetic steel plate 60 is two teeth 61 that are different from each other in the electromagnetic steel plate 60, and the distance between adjacent teeth 61 in a non-contact state and the two teeth 61 that one electromagnetic steel plate 60 has. It is the shape which can make the space | interval of mutual the same. Specifically, the extension length of the portion of the base 62 that extends so as to connect the two teeth 61 included in one electromagnetic steel plate 60 is from the tooth 61 toward the opposite side of the extending direction. It is more than twice the extended length of the protruding portion.

  In Embodiment 1, the phase of arrangement | positioning of the some electromagnetic steel plate 60 of adjacent electromagnetic steel plate layers differs. Specifically, as shown in FIG. 7, for example, the outer shaft motor core 30 is formed by alternately laminating first-phase electromagnetic steel plate layers PS1 and second-phase electromagnetic steel plate layers PS2. For this reason, the open slots KS and the closed slots HS are alternately arranged in the axial direction. In the first embodiment, for example, as shown in FIG. 7, the number of electromagnetic steel sheet layers having two phases is equal. In this case, the slot of the outer shaft motor core 30 is a slot (semi-closed slot) in which one layer is an open slot KS and one layer is a closed slot HS for two magnetic steel sheet layers in the rotation axis direction. Such a structure is lighter than a structure in which one electromagnetic steel sheet layer is a complete closed slot HS that is completely continuous in an annular shape. Moreover, according to the structure, since the wraparound of magnetism generated between the coils 50 provided in the core portion 32 formed by stacking the teeth 61 can be reduced, the efficiency of the two-shaft integrated motor 1 can be further improved. Can be increased.

  FIG. 11 is a diagram illustrating an example of a case where magnetic steel sheet layers having the same phase are continuously stacked. In the example shown in FIG. 7, the phase of the arrangement of the plurality of electromagnetic steel plates 60 between the electromagnetic steel plate layers adjacent in the rotation axis direction is different, but this is an example of the phase relationship between the laminated electromagnetic steel plate layers. It is shown and not limited to this. For example, as shown in FIG. 11, the number of consecutive identical phases may be two or more. The continuous number of the same phase is a number in which the electromagnetic steel sheet layers having the same phase are continuous along the rotation axis direction. In the example shown in FIG. 11, the number of consecutive identical phases is 5, but it may be any natural number of 4 or less or 6 or more.

  In addition, in the description relating to the outer shaft stator 20, except for special matters relating to the difference between the motor of the in-rotor and the motor of the outer rotor, the outer shaft stator 20, the outer shaft motor core 30, the edge portion 31, the core portion 32, and the coil 50 are included. , Magnetic steel sheet 60, teeth 61, 61a, 61b, base 62, intermediate part 63, closed slot HS, open slot KS, first phase electromagnetic steel sheet layer PS1, and second phase electromagnetic steel sheet layer PS2 Are denoted by the inner shaft stator 120, the inner shaft motor core 130, the edge portion 131, the core portion 132, the coil 150, the electromagnetic steel plate 160, the teeth 161, 161a, 161b, the base portion 162, the intermediate portion 163, and the closed slot, respectively. By replacing hs, open slot ks, first phase electromagnetic steel sheet layer ps1, and second phase electromagnetic steel sheet layer ps2, the inner shaft stator 120 is replaced. It can be read as a light.

  FIG. 12 is a diagram showing one of the two phases of the arrangement of the plurality of electromagnetic steel plates 160 in one electromagnetic steel plate layer. FIG. 13 is a diagram showing the other of the two phases of the arrangement of the plurality of electromagnetic steel plates 160 in one electromagnetic steel plate layer. In an inner shaft stator 120 of a so-called in-rotor electric motor such as an inner shaft motor, a coil 150 is provided outside the inner shaft motor core 130. Specifically, two teeth 161 projecting toward the outer side of the arc of the base portion 162 are provided on the electromagnetic steel sheet 160. The shape of the base 162 is not necessarily an arc. For example, the side of the base 162 from which the teeth 161 protrude may be a straight line orthogonal to the protruding direction of the teeth 161. The inner shaft stator back yoke 140 is provided outside the inner shaft motor core 130.

  As described above, according to the first embodiment, the second detection unit 250 can be adjusted from one end side (the output end side of the biaxially integrated motor 1). Further, the adjustment of the first detection unit 240 can be performed from the other end side of the two-axis integrated motor 1. In this way, the two detection units can be adjusted individually. Further, since the bearing portion 260 is provided on one end side of the stator core portion 70 and the backup bearing portion 300 is provided on the other end side, the influence of the moment load accompanying the extension of the axial lengths of the magnets 12 and 112 and the stator core portion 70 is increased. Can be suppressed. Therefore, the output torque can be easily improved by extending the axial lengths of the magnets 12 and 112 and the stator core portion 70.

  Further, by preloading the bearings 262, 263, 266, and 267, the displacement of the inner shaft rotor 110 and the outer shaft rotor 10 due to an external load can be further reduced. Further, the third bearing portion 302 can secure a margin for displacement of the positional relationship between the inner shaft rotor 10 and the inner shaft stator 20 due to expansion in the direction of the rotation axis due to heat. Similarly, the fourth bearing portion 305 can ensure a margin for displacement in the positional relationship between the outer shaft rotor 110 and the outer shaft stator 120.

  Further, since the inner shaft stator 120 includes the coil 150 and the outer shaft stator 20 includes the coil 50, the configuration of the rotating inner shaft rotor 110 and outer shaft rotor 10 can be further simplified.

  Further, the inner shaft rotor 110, the inner shaft stator 120, the outer shaft stator 20, and the outer shaft rotor 10 are arranged in this order from the rotating shaft P in the radial direction. Since the nonmagnetic material 45 or the like is interposed at the adjacent position, the nonmagnetic material 45 or the like can suppress interference of the magnetic field generated in each of the inner shaft stator 120 and the outer shaft stator 20 by the nonmagnetic material 45 or the like. Thus, magnetic field interference can be further suppressed.

  The inner shaft stator 120 has an inner shaft motor core 130 provided with a coil 150, the outer shaft stator 20 has an outer shaft motor core 30 provided with a coil 50, and the nonmagnetic material 45 and the like are It is located between the shaft motor core 130 and the outer shaft motor core 30. Therefore, since the non-magnetic body 45 and the like are interposed between the inner shaft motor core 130 provided with the coils 50 and 150 that generate the magnetic field and the outer shaft motor core 30, the interference of the magnetic field can be suppressed more reliably.

  The inner shaft stator 120 has a cylindrical inner shaft stator back yoke 140 provided outside the inner shaft motor core 130, and the outer shaft stator 20 is formed in a cylindrical shape provided inside the outer shaft motor core 30. The outer shaft stator back yoke 40 is provided, and the nonmagnetic material 45 and the like are located between the inner shaft stator back yoke 140 and the outer shaft stator back yoke 40. Accordingly, the shape of the non-magnetic body 45 or the like may be any shape that fits between the cylindrical inner shaft stator back yoke 140 and the outer shaft stator back yoke 40. Therefore, the nonmagnetic material 45 etc. can be provided more simply.

  Further, the non-magnetic body 45 and the like are arc-shaped members whose cross-sectional shape in the direction orthogonal to the rotation axis P is centered on the rotation axis P. Therefore, the two-shaft integrated motor 1 can be easily housed in a cylindrical shape with the rotation axis P as the center.

  Further, the nonmagnetic material 45 or the like is a nonmagnetic alloy or resin. Therefore, the interference of the magnetic field can be more reliably suppressed by the nonmagnetic material 45 or the like. In addition, the nonmagnetic material 45 and the like can be provided with a material that is relatively easily available, and magnetic field interference can be suppressed at a lower cost.

  Furthermore, since the second detection unit 250 is located on one end side of the bearing unit 260 and the stator core unit 70, that is, on the output shaft side of the inner shaft rotor 110 and the outer shaft rotor 10, the first detection unit 240 and the second detection unit 250 are disposed. The centering of the detection unit 250 and the adjustment of the gap of the rotation angle at which the inner shaft rotor 110 and the outer shaft rotor 10 are detected as 0 degrees can be performed on the output shaft of the two-shaft integrated motor 1. Therefore, the influence of physical shielding due to the arrangement of the bearing portion 260 and the stator core portion 70 can be suppressed when accessing the second detection portion 250 in the centering and gap adjustment performed on the output shaft side. The detection accuracy of the second detector 250 that detects the rotation angle of the rotor can be more easily ensured. Further, since the bearing portion 260 is positioned between the second detection unit 250 and the stator core unit 70, the second detection unit 250 and the stator core unit 70 can be separated from each other, and the magnetism from the stator core unit 70 to the second detection unit 250 can be separated. The influence on the environment can be further reduced.

  Furthermore, since the magnitude of the output torque of the motor is related to the distance from the rotation axis P to the thrust generation position (between the magnet and the coil), the output torque of the outer shaft rotor 10 is relatively higher than that of the inner shaft rotor 110. In consideration of the tendency to become large, the magnet 112 and the inner shaft stator 120 provided in the inner shaft rotor 110 are made longer than the magnet 12 and the outer shaft stator 20 provided in the outer shaft rotor 10 in the axial direction in the rotation axis direction. ing. Therefore, the thrust of the inner shaft rotor 110 can be made larger than the thrust of the outer shaft rotor 10, and the difference between the output torque of the outer shaft rotor 10 and the output torque of the inner shaft rotor 110 can be made smaller. .

  Further, the position of the first detection unit 240 in the rotation axis direction is the same as the position of the second detection unit 250 in the rotation axis direction. Therefore, the shaft length of the two-shaft integrated motor 1 can be made more compact. In addition, since one of the first detection unit 240 and the second detection unit 250 does not shield the other in the rotation axis direction, the detection accuracy of the second detection unit 250 that detects the rotation angle of the two rotors is ensured. It can be performed more simply.

  Further, the position in the rotation axis direction of the end portion on the one end side of the first bearing portion 261 is the same as the position in the rotation axis direction of the end portion on the one end side of the second bearing portion 265. Therefore, the shaft length of the two-shaft integrated motor 1 can be made more compact.

  Further, the inner shaft rotor 110, the stator core portion 70, and the outer shaft rotor 10 are arranged in this order from the rotating shaft P toward the outer side in the radial direction. Therefore, since the inner shaft stator 120 and the outer shaft stator 20 can be arranged together between the inner shaft rotor 110 and the outer shaft rotor 10, the diameter of the two-shaft integrated motor 1 can be made more compact. it can.

  Furthermore, the first rotating part 241, the first fixing part 242, the second fixing part 252, and the second rotating part 251 are arranged in this order from the rotation axis P toward the outside in the radial direction. Therefore, since the first fixing portion 242 and the second fixing portion 252 can be arranged between the first rotating portion 241 and the second rotating portion 251, the diameter of the two-shaft integrated motor 1 can be made more compact. Can be.

  Furthermore, a cover 291 that covers the first detection unit 240 and the second detection unit 250 is provided on one end side with respect to the first detection unit 240 and the second detection unit 250. Therefore, the second detection unit 250 can be protected by providing the cover 291 after the centering and the gap adjustment are completed.

  Furthermore, by arranging the electromagnetic steel sheet 60 having two teeth 61 of one electromagnetic steel sheet 60 in an annular shape, more teeth 61 are provided in one electromagnetic steel sheet layer, so that the variation in the shape of the teeth 61 is further increased. Can be reduced. That is, since there are two integrally formed teeth 61 per electromagnetic steel sheet 60, the consistency of the shapes of all the teeth 61 is ensured by ensuring the accuracy of the consistency of the shapes of the two teeth 61. Accuracy can be ensured. Moreover, even if one electromagnetic steel sheet 60 has a magnetic directionality by arranging a plurality of electromagnetic steel sheets 60 in a single electromagnetic steel sheet layer, one electromagnetic steel sheet layer is one electromagnetic steel sheet. It becomes difficult to be controlled by the magnetic directivity of 60, and the variation in the magnetic characteristics of each tooth 61 can be further reduced. Moreover, since the electromagnetic steel sheet layers in which the electromagnetic steel sheets 60 having the two teeth 61 are arranged in an annular shape are stacked in two different phases, sufficient rigidity is ensured by a three-dimensional structure by stacking the electromagnetic steel sheet layers having different phases. Can do.

  Furthermore, the phase of the arrangement | positioning of the electromagnetic steel plate 60 has shifted | deviated 1 tooth 61 for two types of phases. Accordingly, the electromagnetic steel sheets 60 having the two teeth 61 are staggered at positions where the electromagnetic steel sheet layers having different phases are stacked. Therefore, since the structure which continues in an annular shape can be formed by laminating | stacking the electromagnetic steel plates 60 from which a phase differs, sufficient rigidity as a cyclic | annular structure can be ensured.

  Further, the two teeth 61 included in the electromagnetic steel sheet 60 are discontinuous on the opposite side of the outer shaft rotor 10. Therefore, the coil 50 formed in advance can be fitted into the core on which the teeth 61 are laminated, and the coil 50 can be easily provided.

  Further, the plurality of electromagnetic steel sheets 60 in one electromagnetic steel sheet layer are arranged with a gap therebetween. Therefore, the weight can be reduced as compared with a structure in which the electromagnetic steel sheet layer is completely continuous in an annular shape. In addition, since the magnetic wraparound generated between the coils 50 can be reduced, the efficiency of the two-shaft integrated motor 1 can be further increased.

  Furthermore, the number of each of the two phases of the electrical steel sheet layers is equal. Therefore, it becomes easy to balance the strength and magnetic characteristics of the outer shaft stator 20 as a whole.

  Furthermore, the phase of arrangement | positioning of the some electromagnetic steel plate 60 of the electromagnetic steel plate layers adjacent to a rotating shaft direction differs. Accordingly, the electromagnetic steel sheets 60 having the two teeth 61 are staggered at the position where the two layers of the electromagnetic steel sheet layers are laminated. Therefore, since the annularly continuous structure can be formed by laminating the electromagnetic steel sheets 60 having different phases, sufficient rigidity can be ensured more reliably as an annular structure.

  Furthermore, in the base portion 62 in which two teeth 61 are physically continuous in one electromagnetic steel sheet 60, a portion corresponding to an intermediate point between the two teeth 61 is thinner than the other portions. Therefore, it is possible to reduce the magnetic wraparound between the coils 50 adjacent to each other in the annular direction, and the efficiency of the two-axis integrated motor 1 can be made higher.

  Further, the outer shaft stator 20 has a cylindrical yoke provided on the opposite side of the outer shaft rotor 10 with respect to the teeth 61, and the yoke is integral in the rotation axis direction. Therefore, since the outer shaft stator 20 is supported by the yoke that is integrated in the stacking direction of the electromagnetic steel sheet layers, sufficient rigidity can be ensured more reliably.

  In addition, although the 2nd detection part 250 in said embodiment is a magnetic encoder, this is an example and is not restricted to this. The second detection unit 250 may be, for example, an optical encoder.

  The two-axis integrated motor according to the first embodiment can be used as an actuator for various industrial machines such as a small component conveying device, an electronic component inspection device, and a semiconductor inspection device, but is not limited thereto.

(Embodiment 2)
FIG. 14 is a partial cross-sectional view of the actuator 301 of the second embodiment. The cross section of FIG. 14 is a cross section by a plane including the rotation axis P, but the internal configuration of a nut 351 described later is omitted. In the cross section of FIG. 14, in order to show the position of the fixing member, a partial cross section is shown so that other cross sections can be seen as appropriate. FIG. 15 is a cross-sectional view of the main part showing the main part (two-axis integrated motor 1) in FIG. FIG. 16 is a cross-sectional view of a main part showing a main part (a spline outer cylinder housing described later) in FIG. FIG. 17 is a diagram illustrating a state where the screw portion is raised.

  The actuator 301 shown in FIG. 14 is used as a pick and place device, for example. The actuator 301 includes an arm unit 380 that transfers a workpiece, a biaxial integrated motor 1 that drives the arm unit 380, and a ball screw 350 and a ball spline 360 that are connected to the biaxial integrated motor 1. In the following description, the direction parallel to the Z axis, the direction from the biaxially integrated motor 1 toward the arm unit 380 is referred to as the upper side, and the direction from the arm unit 380 toward the biaxially integrated motor 1 is referred to as the lower side.

  The arm unit 380 is, for example, a cantilever arm having only a single arm. For example, the actuator 301 is fixed to a support base (not shown) with the rotation axis P of the arm portion 380 directed in the Z direction. As shown in FIG. 14, the actuator 301 moves the arm unit 380 in the Z direction (linear motion direction) to move the arm unit 380 up and down in the Z direction, and moves the arm unit 380 in an arbitrary plane orthogonal to the Z direction. Then, the workpiece is transferred to a desired position by rotating or rotating around the rotation axis P.

  The actuator 301 has connection brackets 323 and 324 connected to a nut 351 described later. The inner shaft rotor yoke 111 is provided in a cylindrical shape around the rotation axis P. The inner shaft rotor yoke 111 can also be said to be a cylindrical output shaft on the inner diameter side. The inner diameter of the inner shaft rotor 110 is smaller than the outer shapes of a nut 351 and a spline outer cylinder 361 described later.

  The connecting bracket 323 is formed in a cylindrical shape and is disposed on the inner peripheral side of the inner shaft rotor yoke 111. In the second embodiment, the connection bracket 323 is fixed to the upper end of the inner shaft rotor yoke 111 and extends downward along the inner periphery of the inner shaft rotor yoke 111. The connection bracket 324 is configured to be fixed to the lower end of the connection bracket 323 and extend downward from the connection bracket 323. Therefore, between the inner shaft rotor yoke 111 and a nut 351 described later, the connection brackets 323 and 324 are connected so as to be folded back inward and downward from the upper end of the inner shaft rotor yoke 111.

  The ball screw 350 includes a nut 351, a screw shaft (first portion) 352, and a rolling element (not shown). The nut 351 is disposed below the inner shaft rotor yoke 111. That is, the nut 351 is disposed on the lower outer side in the rotation axis direction with respect to the inner shaft rotor 110. The nut 351 is arranged coaxially with the inner shaft rotor 110 and rotates with the rotation of the inner shaft rotor 110. The nut 351 has a flange portion 351a. The flange portion 351a is fixed to the connection bracket 324 by a fixing member 351b. The nut 351 is connected to the inner shaft rotor yoke 111 via the connection bracket 324 and the connection bracket 323. For example, the inner shaft rotor yoke 111 and the connection bracket 323 are fixed with a fixing member 326. Further, the connection bracket 323 and the connection bracket 324 are fixed by a fixing member 327. For example, bolts or the like are used as the fixing members 326 and 27. The nut 351 is provided integrally with the inner shaft rotor yoke 111 by connecting brackets 323 and 324. Therefore, when the inner shaft rotor 110 rotates, the nut 351 rotates in the direction around the rotation axis P integrally with the inner shaft rotor 110.

  The screw shaft 352 protrudes downward from the inner shaft rotor 110. The screw shaft 352 is inserted on the inner diameter side of the nut 351. The screw shaft 352 is screwed with the nut 351. When the nut 351 rotates, the screw shaft 352 moves in the axial direction (Z direction) according to the rotation. A rolling element is disposed inside the nut 351.

  The ball screw 350 is provided with a negative operation electromagnetic brake 353. The negative operation electromagnetic brake 353 includes a field 353a, a side plate 353b, an armature 353c, a brake disk 353d, and an electromagnetic coil 353e. A coil spring (not shown) is disposed in the field 353a. The coil spring presses the armature 353c against the brake disc 353d side. When the electromagnetic coil 353e is energized, the armature 353b is attracted to the field 353a with a force stronger than the elastic force of the coil spring, and the brake disk 353d is released. Further, when the electromagnetic coil 353e is not energized, the attractive force by the electromagnetic coil 353e does not act, so the armature 353c is rapidly pressed against the brake disc 353d side by the elastic force of the coil spring. The brake disc 353 d is connected to the lower end 324 a of the connection bracket 324, and is connected to the nut 351 through the connection bracket 324. When the brake disc 353d is released, the nut 351 can rotate. Further, when the armature 353c is pressed against the brake disc 353d, the rotation of the brake disc 353d is restricted, and thereby the rotation of the nut 351 is restricted. Therefore, the drop of the screw shaft 352 is suppressed when the electromagnetic coil 353e is not energized. In addition, about the structure of the negative action | operation electromagnetic brake 353, it is not limited to the said structure, Another structure may be sufficient.

  A stopper 354 is attached to the lower end portion of the screw shaft 352. The stopper 354 restricts the rise of the screw shaft 352.

  The ball spline 360 includes a spline outer cylinder 361, a shaft (second portion) 362, and a rolling element (not shown). The spline outer cylinder 361 is disposed above the outer shaft rotor yoke 11. That is, the spline outer cylinder 361 is disposed on the outer side in the rotational axis direction with respect to the inner shaft rotor 110. The spline outer cylinder 361 is arranged coaxially with the outer shaft rotor 10 and rotates with the rotation of the outer shaft rotor 10. The spline outer cylinder 361 is coupled to the outer shaft rotor yoke 11 via a coupling bracket 333. For example, the outer shaft rotor yoke 11 and the connection bracket 333 are fixed by the fixing member 36. As the fixing member 36, for example, a bolt or the like is used. The spline outer cylinder 361 is provided integrally with the outer shaft rotor yoke 11 by a connection bracket 333. Therefore, when the outer shaft rotor 10 rotates, the spline outer cylinder 361 rotates integrally with the outer shaft rotor 10 in the direction around the rotation axis P.

  A connection bracket 334 is disposed at the upper end of the spline outer cylinder 361. The connection bracket 334 is fixed to the connection bracket 333 by a fixing member 337. For example, a bolt or the like is used as the fixing member 337.

  The shaft 362 protrudes upward from the inner shaft rotor 110. The shaft 362 is inserted on the inner diameter side of the spline outer cylinder 361. The lower end side of the shaft 362 is integrally connected to the screw shaft 352 via the connecting portion 356. In the second embodiment, the screw shaft 352 and the shaft 362 are press-fitted at the connecting portion 356 and integrally form the shaft member SF. The connecting portion 356 is provided with a hole portion 356a through which air is released when the screw shaft 352 and the shaft 362 are press-fitted. The shaft 362 is provided with a plurality of groove portions 362a parallel to the rotation axis direction in the circumferential direction. The shaft 362 has a reduced diameter portion 362b at the upper end. The reduced diameter portion 362b is fixed to an arm attachment member 370 described later.

  A plurality of protrusions corresponding to the groove 362 a of the shaft 362 are provided on the inner peripheral surface of the spline outer cylinder 361 in the circumferential direction. By inserting the protruding portion of the spline outer cylinder 361 into the groove 362a of the shaft 362, the relative movement between the spline outer cylinder 361 and the shaft 362 in the direction around the rotation axis P is restricted, and the spline in the rotation axis direction is restricted. Relative movement between the outer cylinder 361 and the shaft 362 is allowed. For this reason, when the spline outer cylinder 361 rotates, the shaft 362 moves in the axial direction (Z direction) according to the rotation. Further, when the screw shaft 352 moves in the rotation axis direction by the rotation of the nut 351 without rotating the spline outer cylinder 361, the shaft 362 moves in the rotation axis direction together with the screw shaft 352. A rolling element is disposed inside the spline outer cylinder 361.

  The housing 340 includes a motor housing 341, a nut housing 342, and a spline outer cylinder housing 343. The motor housing 341 is formed, for example, in a cylindrical shape, and accommodates the two-axis integrated motor 1.

  The nut housing 342 includes a flange portion 342a and a tubular portion 342b. The flange portion 342 a is formed in an annular shape, and is fixed to the lower end of the motor housing 341 by a fixing member 44. A fixing member 45 for fixing the stator core fixing housing 17 is attached to the flange portion 342a. The stator core 11 is fixed to the housing 340 by the fixing member 45. The cylindrical portion 342b extends downward from the inner periphery of the flange portion 342a. The cylindrical portion 342b accommodates the nut 351 of the ball screw 350. A negative operating electromagnetic brake 353 is fixed to the lower end of the cylindrical portion 342b.

  Further, the nut housing 342 holds the fifth bearing portion 328 with the connection bracket 324. The fifth bearing portion 328 has one or more rolling bearings. The fifth bearing portion 328 supports the nut 351 rotatably. The fifth bearing portion 328 is, for example, a rolling bearing. The fifth bearing portion 328 is supported by the flange portion 342a via the wave washer 329a and the pressing member 329b. The fifth bearing portion 328 is pressed against the tubular portion 342b side by a wave washer 329a and a pressing member 329. For example, when the object is supported by the arm unit 380 and the center of gravity of the load of the arm unit 380 and the object does not coincide with the rotation axis P, or when receiving the rotation moment of the arm unit 380 and the object, the shaft member SF is rotated by the rotation axis P. There is a possibility of receiving a force in a direction tilting with respect to. On the other hand, since the fifth bearing portion 328 is supported in the radial direction by the nut housing 342 and the fixing base ST via the wave washer 329a and the pressing member 329b, the nut 351 in the direction orthogonal to the rotation axis direction. Displacement or vibration is suppressed.

  The spline outer cylinder housing 343 includes a flange part 343a, a first cylindrical part 343b, and a second cylindrical part 343c. The flange portion 343 a is formed in an annular shape, and is fixed to the upper end of the motor housing 341 by a fixing member 346. Further, the flange portion 343a is fixed to the fixing base ST by a fixing member 347. By fixing the flange portion 343a to the fixed base ST, the actuator 301 is fixed to the fixed base ST.

  The first tubular portion 343b is formed in a cylindrical shape and extends upward from the inner periphery of the flange portion 343a. The first cylindrical portion 343b accommodates the spline outer cylinder 361 of the ball spline 360. The first tubular portion 343b is connected to the second tubular portion 343c via the first step portion 343d and the second step portion 343e.

  The first cylindrical portion 343b holds the sixth bearing portion 338 with the connection bracket 334 at the first step portion 343d. The sixth bearing portion 338 has one or more rolling bearings. The sixth bearing portion 338 supports the spline outer cylinder 361 rotatably. The sixth bearing portion 338 is, for example, a rolling bearing. The sixth bearing portion 338 is supported by the second step portion 343e via a wave washer 339a and a pressing member 339b. The sixth bearing portion 338 is pressed against the connection bracket 334 side by a wave washer 339a and a pressing member 339b. The sixth bearing portion 338 is supported in the radial direction by the spline outer cylinder housing 343 and the fixing base ST (see FIG. 14). For example, when the object is supported by the arm unit 380 and the center of gravity of the load of the arm unit 380 and the object does not coincide with the rotation axis P, or when receiving the rotation moment of the arm unit 380 and the object, the shaft member SF is rotated by the rotation axis P. There is a possibility of receiving a force in a direction tilting with respect to. On the other hand, since the sixth bearing portion 338 is supported in the radial direction by the spline outer cylinder housing 343 and the fixing base ST via the wave washer 339a and the pressing member 339b, the sixth bearing portion 338 extends in the direction orthogonal to the rotation axis direction. Displacement or vibration of the spline outer cylinder 361 is suppressed.

  The second step portion 343e is provided with an air supply portion 343f. The air supply part 343f can be attached with an air purge air joint. The air supply part 343f communicates between the outside and a space formed between the second cylindrical part 343c and the shaft 362. The air supply part 343f is provided with a closing bolt 343g. The bolt 343g is detachably attached to the air supply unit 343f. The bolt 343g is closed so that foreign matter such as dust does not enter the air supply portion 343f.

  The second cylindrical portion 343c is formed in a cylindrical shape and extends upward from the upper end of the first cylindrical portion 343b. The second cylindrical portion 343c has a smaller diameter than the first cylindrical portion 343b. The second cylindrical portion 343c is disposed so as to cover a part of the outer peripheral surface of the shaft 362. For example, as shown in FIG. 14, the dimension of the second tubular portion 343c in the rotation axis direction is such that the upper end of the second tubular portion 343c and the shaft member SF are in a state where the shaft member SF is disposed at the lowermost end. The upper end (the upper end of the shaft 362) is set so as to be flush with each other.

  The arm attachment member 370 is connected to the tip (upper end) of the shaft 362. The arm attachment member 370 includes a connecting portion 371, a cylindrical portion 372, and a lid portion 373. The connecting portion 371 is connected to the reduced diameter portion 362 b of the shaft 362. The connecting portion 371 includes a penetrating portion 371a that penetrates the reduced diameter portion 362b, a depressed portion 371b into which the connecting member 374 is inserted, an arm attachment surface 371c to which the arm 380 is attached, and a lid portion attaching surface 371d to which the lid portion 373 is attached. Have.

  The through portion 371a is formed corresponding to the shape of the reduced diameter portion 362b. The depressed portion 371b forms a space with the reduced diameter portion 362b in a state where the reduced diameter portion 362b is inserted into the penetration portion 371a. A connecting member 374 is disposed in this space. The connecting member 374 includes a concave member 374a and a convex member 374b on which opposing tapered surfaces having the same inclination are formed. The concave member 374a is formed in an annular shape and is disposed in contact with the inner periphery of the depressed portion 371b. The convex member 374b is formed in an annular shape and is inserted inside the depressed portion 371b. The inner periphery of the convex member 374b is disposed in contact with the outer periphery of the reduced diameter portion 362b. The connecting member 374 is fixed by pressing the convex member 374b into the concave member 374a by the fixing member 75. Thereby, between the inner periphery of the depression 371b and the outer periphery of the concave member 374a, between the tapered surface of the concave member 374a and the tapered surface of the convex member 374b, and the inner periphery and the reduced diameter portion of the convex member 374b. Between the outer periphery of 362b, it will be in the state mutually pressed. Therefore, a frictional force is generated between the depressed portion 371b, the concave member 374a, the convex member 374b, and the reduced diameter portion 362b. By this frictional force, the arm attachment member 370 is integrally connected to the reduced diameter portion 362b.

  The arm 380 is attached to the arm attachment surface 371c. The arm attachment surface 371c is provided with an insertion hole 371e for inserting a fixing member (not shown) for fixing the arm 380. A lid 373 described later is attached to the lid attachment surface 371d.

  The cylindrical part 372 is formed in a cylindrical shape, and is provided in a state extending from the connecting part 371 to the spline outer cylinder 361 side (downward). The cylindrical portion 372 is disposed outside the second cylindrical portion 343c of the spline outer cylinder housing 343 and accommodates the tip (upper end) of the second cylindrical portion 343c. The cylindrical portion 372 has a stepped portion 372a at the lower end. The step portion 372a has a configuration in which the lower end of the inner peripheral surface is expanded in diameter. A seal portion 377 is disposed on the step portion 372a. The seal portion 377 seals a gap formed between the tubular portion 372 and the second tubular portion 343c of the spline outer cylinder housing 343. Examples of the seal portion 377 include a structure in which a U-shaped or U-shaped member is formed in a ring shape in a cross-sectional view. The seal portion 377 is formed using, for example, an elastically deformable material. The seal portion 377 is disposed in an elastically deformed state in contact with the inner peripheral surface of the step portion 372a and the outer peripheral surface of the second tubular portion 343c. The shaft 362 is protected from the outside by the seal portion 377. In addition, the protrusion part which protrudes inside is formed in the lower end part of the step part 372a. By this protrusion, the drop of the seal portion 377 is suppressed. Further, when the power is shut off, the rotation of the shaft 362 (shaft member SF) is suppressed by the seal resistance of the seal portion 377.

  Further, as shown in FIGS. 14 and 16, a cylindrical gap is formed between the cylindrical portion 372 and the second cylindrical portion 343c. Due to this gap, a labyrinth structure is formed between the shaft 362 and the outside, so that dustproofness and waterproofness are enhanced.

  The lid portion 373 is attached to the lid portion attachment surface 371d of the connecting portion 371 by a fixing member 376 such as a bolt. The lid portion 373 protects the reduced diameter portion 362b of the shaft 362 from the external environment.

  In the actuator 301, when the arm 380 is moved in the rotation axis direction (Z direction), the controller 420 moves the inner shaft rotor 110 to one or the other in the direction around the rotation axis P without rotating the outer shaft rotor 10. Rotate. In this case, the nut 351 of the ball screw 350 rotates together with the rotation of the inner shaft rotor 110. Due to the rotation of the nut 351, the nut 351 and the screw shaft 352 rotate relatively in the direction around the rotation axis P, so that the screw shaft 352 moves in the Z direction. By the movement of the screw shaft 352, the shaft 362 integrally connected to the screw shaft 352, that is, the shaft member SF moves in the Z direction. As the shaft member SF moves, the arm attachment member 370 and the arm 380 connected to the upper end of the shaft 362 move in the Z direction. When the shaft member SF is moved upward, as shown in FIG. 17, the stopper 354 at the lower end of the screw shaft 352 contacts the lower end of the connection bracket 324, and the upward movement of the shaft member SF is restricted. When the shaft member SF is moved downward, as shown in FIGS. 14 and 16, the connecting portion 371 contacts the upper end of the second cylindrical portion 343c of the spline outer cylinder bracket 343, and the shaft member SF is moved downward. Movement to is regulated.

  In the actuator 301, when the arm 380 is moved in the direction around the axis of the rotation axis P, the controller 420 rotates the inner shaft rotor 110 and the outer shaft rotor 10 in synchronization. In this case, the nut 351 of the ball screw 350 rotates together with the rotation of the inner shaft rotor 110. In addition, the spline outer cylinder 361 of the ball spline 360 rotates as the outer shaft rotor 10 rotates. As the spline outer cylinder 361 rotates, the shaft 362 rotates integrally with the spline outer cylinder 361. The screw shaft 362 connected to the shaft 362, that is, the shaft member SF is rotated by the rotation of the shaft 362. Therefore, in the ball screw 350, the nut 351 and the screw shaft 352 do not rotate relatively, and the screw shaft 352 of the ball screw 350 does not move in the Z direction with respect to the nut 351. That is, the shaft member SF rotates in the direction around the rotation axis P without moving in the Z direction. The rotation of the shaft member SF causes the arm attachment member 370 and the arm 380 to rotate in the direction around the rotation axis P.

  The actuator 301 of the second embodiment described above includes a housing 340, an inner shaft rotor 110, an outer shaft rotor 10, a shaft member SF (screw shaft 352 and shaft 362), a nut 351, a spline outer cylinder 361, Is provided. The inner shaft rotor 110 is rotatable with respect to the housing 340. The outer shaft rotor 10 is disposed on the radially outer side of the inner shaft rotor 110 and is rotatable with respect to the housing 340. The shaft member SF is disposed so as to penetrate the inner shaft rotor 110 in the rotation axis direction of the inner shaft rotor 110, and has a screw shaft 352 projecting from the inner shaft rotor 110 in one direction of the rotation axis direction. A shaft 362 protruding to the other side in the rotation axis direction has a groove 362a along the rotation axis direction. The nut 351 is disposed on the outer side below the inner shaft rotor 110 in the rotation axis direction, is screwed into the screw shaft 352, rotates together with the inner shaft rotor 110, and moves the shaft member SF in the rotation axis direction. The spline outer cylinder 361 is disposed on the upper outer side in the rotation axis direction with respect to the inner shaft rotor 110, guides the shaft member SF along the groove portion 362 a in the rotation axis direction, and rotates together with the outer shaft rotor 10 to rotate the shaft. The member SF is rotated in the direction around the rotation axis P of the outer shaft rotor 10.

  According to this configuration, since the nut 351 and the spline outer cylinder 361 are disposed on the outer side in the rotation axis direction with respect to the inner shaft rotor 110, the inner shaft rotor 110 and the outer shaft rotor 10 can be reduced in size in the radial direction. it can. Thereby, a footprint can be made small. Further, the spline outer cylinder 361 can suppress the accompanying rotation of the shaft member SF when the outer shaft rotor 10 is rotated.

  In the actuator 301 of the second embodiment, the inner diameter of the inner shaft rotor 110 is smaller than the outer diameters of the nut 351 and the spline outer cylinder 361. According to this configuration, the inner shaft rotor 110 and the outer shaft rotor 10 can be reduced in size in the radial direction.

  The actuator 301 of the second embodiment further includes an arm attachment member 370 that is connected to the tip of the shaft 362 and attaches the arm 380. According to this configuration, the transfer device can be configured by attaching the arm 380 to the arm attachment member 370.

  In the actuator 301 of the second embodiment, the housing 340 includes a spline outer cylinder housing 343 that houses the spline outer cylinder 361 and covers a part of the shaft 362, and the arm attachment member 370 extends to the spline outer cylinder 361 side. The spline outer cylinder housing 343 has a cylindrical portion 372 that accommodates the tip in the rotation axis direction, and the cylindrical portion 372 has a gap 72 b that seals the shaft 362 with the spline outer cylinder housing 343. According to this configuration, sealing performance from the external environment can be ensured.

  In the actuator 301 of the second embodiment, the nut 351 is supported by the housing 340 via the fifth bearing portion 328, and the spline outer cylinder 361 is supported by the housing 340 via the sixth bearing portion 338. According to this configuration, the displacement of the nut 351 and the spline outer cylinder 361 can be suppressed.

  The actuator 301 of the second embodiment further includes a negative operating electromagnetic brake 353 connected to the nut 351. According to this structure, the fall of shaft member SF can be suppressed.

  The actuator 301 according to the second embodiment includes a housing 340, an inner shaft rotor 110, an outer shaft rotor 10, a shaft member SF (screw shaft 352 and shaft 362), a nut 351, and a spline outer cylinder 361. Prepare. The inner shaft rotor 110 is rotatable with respect to the housing 340. The outer shaft rotor 10 is disposed on the radially outer side of the inner shaft rotor 110 and is rotatable with respect to the housing 340. The shaft member SF is disposed through the inner shaft rotor 110 in the rotation axis direction of the inner shaft rotor 110, and has a screw shaft 51 that protrudes from the inner shaft rotor 110 in one direction of the rotation axis direction. A shaft 362 protruding to the other side in the rotation axis direction has a groove 362a along the rotation axis direction. The nut 351 is screwed to the screw shaft 352 and rotates together with the inner shaft rotor 110 to move the shaft member SF in the rotation axis direction. The spline outer cylinder 361 guides the shaft member SF along the groove 362a in the rotation axis direction, and rotates together with the outer shaft rotor 10 to rotate the shaft member SF about the rotation axis P of the outer shaft rotor 10. .

  According to this configuration, the spline outer cylinder 361 can suppress the accompanying rotation of the shaft member SF when the outer shaft rotor 10 is rotated.

  As mentioned above, although preferred embodiment of this invention was described, this invention is not limited to what was described in said embodiment. For example, in the above embodiment, the nut 351 of the ball screw 350 is connected to the inner inner shaft rotor 110, and the spline outer cylinder 361 of the ball spline 360 is connected to the outer outer shaft rotor 10. It is not limited. For example, the spline outer cylinder 361 of the ball spline 360 may be connected to the inner inner shaft rotor 110 and the nut 351 of the ball screw 350 may be connected to the outer outer shaft rotor 10.

  In the above-described embodiment, the ball spline 360 is disposed on the upper side and the ball screw 350 is disposed on the lower side with respect to the two-axis integrated motor 1, but the present invention is not limited thereto. For example, the ball screw 350 may be disposed on the upper side of the two-axis integrated motor 1 and the ball spline 360 may be disposed on the lower side.

DESCRIPTION OF SYMBOLS 1 Two-shaft integrated motor 10 Outer shaft rotor 11 Outer shaft rotor yoke 11a, 111a Output end part 12, 112 Magnet 20 Outer shaft stator 30 Outer shaft motor core 40 Outer shaft stator back yoke 45, 45a Nonmagnetic body 45b, 45c Nonmagnetic member 50, 150 Coil 70 Stator core portion 110 Inner shaft rotor 111 Inner shaft rotor yoke 120 Inner shaft stator 130 Inner shaft motor core 140 Inner shaft stator back yoke 240 First detector 250 Second detector 261 First bearing portion 265 Second bearing portion 302 Third bearing portion 305 Fourth bearing portion 301 Actuator 328 Fifth bearing portion 338 Sixth bearing portion 340 Housing 341 Motor housing 342 Nut housing 342a, 343a Flange portion 342b, 372 Tubular portion 343 Spline outer cylinder housing 343b First Cylindrical portion 343c Second cylindrical portion 350 Ball screw 351 Nut 352 Screw shaft 353 Negative operating electromagnetic brake 354 Stopper 356, 371 Connecting portion 360 Ball spline 361 Spline outer cylinder 362 Shaft 362a Groove 362b Reduced diameter portion 370 Arm mounting member 372a Step Portion 372b Clearance 374 Connecting member 374a Concave member 374b Convex member 380 Arm, arm P Rotating shaft SF Shaft member ST Fixing base

Claims (16)

Each has an inner shaft rotor and an outer shaft rotor that are rotatably provided and have the same rotating shaft direction, and the output shaft of the inner shaft rotor and the output shaft of the outer shaft rotor are positioned at one end side in the rotating shaft direction. Two-axis integrated motor
An inner shaft stator that is a stator core of the inner shaft rotor;
An outer shaft stator that is a stator core of the outer shaft rotor;
A first bearing portion disposed on the one end side with respect to the inner shaft stator and rotating in conjunction with the inner shaft rotor;
A second bearing portion disposed on the one end side with respect to the outer shaft stator and rotating in conjunction with the outer shaft rotor;
A third bearing portion disposed on the opposite side of the first bearing portion with respect to the inner shaft stator and rotating in conjunction with the inner shaft rotor;
A fourth bearing portion disposed on the opposite side of the second bearing portion with respect to the outer shaft stator and rotating in conjunction with the outer shaft rotor;
A first detector for detecting a rotation angle of the inner shaft rotor;
A second detector for detecting a rotation angle of the outer shaft rotor;
The first bearing portion, the inner shaft stator, the third bearing portion, and the first detection portion are arranged in order from the one end side on the outer peripheral side of the inner shaft rotor,
The two-shaft integrated motor in which the second detection portion, the second bearing portion, the outer shaft stator, and the fourth bearing portion are arranged in order from the one end side on the inner peripheral side of the outer shaft rotor. The first bearing portion and the second bearing portion have preloaded bearings,
The two-axis integrated motor according to claim 1, wherein the third bearing portion and the fourth bearing portion have bearings that are not preloaded. The inner shaft rotor and the outer shaft rotor have a rotor yoke and a magnet,
The biaxial integrated motor according to claim 1, wherein the inner shaft stator and the outer shaft stator have coils. From the rotating shaft toward the radial direction, the inner shaft rotor, the inner shaft stator, the outer shaft stator, the outer shaft rotor are arranged in this order,
A nonmagnetic material provided between the inner shaft stator and the outer shaft stator and interposed between adjacent positions of the inner shaft stator and the outer shaft stator along a circumferential direction around the rotation shaft. Item 4. The biaxial integrated motor according to any one of items 1 to 3. The inner shaft stator has an inner shaft motor core provided with the coil,
The outer shaft stator has an outer shaft motor core provided with the coil,
The two-axis integrated motor according to claim 4, wherein the non-magnetic body is located between the inner shaft motor core and the outer shaft motor core. The inner shaft stator has a cylindrical inner shaft stator back yoke provided outside the inner shaft motor core,
The outer shaft stator has a cylindrical outer shaft stator back yoke provided inside the outer shaft motor core,
The two-shaft integrated motor according to claim 5, wherein the non-magnetic body is located between the inner shaft stator back yoke and the outer shaft stator back yoke. The biaxially integrated motor according to any one of claims 4 to 6, wherein the non-magnetic body is an arc-shaped member whose cross-sectional shape in a direction orthogonal to the rotation axis is centered on the rotation axis. The two-axis integrated motor according to any one of claims 4 to 7, wherein the non-magnetic body is a non-magnetic alloy or resin. The magnet provided in the inner shaft rotor and the inner shaft stator have an axial length in the direction of the rotation axis longer than that of the magnet provided in the outer shaft rotor and the outer shaft stator. The two-axis integrated motor described in 1. A biaxial integrated motor according to any one of claims 1 to 8,
A housing containing the two-shaft integrated motor;
A first portion that is disposed through the inner shaft rotor in the direction of the rotation axis and projects from the inner shaft rotor to one side in the direction of the rotation axis has a threaded portion, and extends from the inner shaft rotor in the direction of the rotation axis. A shaft member having a groove along the direction of the rotation axis in the second portion protruding to the other;
A nut that is disposed on the outer side in the rotational axis direction with respect to the inner shaft rotor, is screwed into the screw portion, rotates with the inner shaft rotor, and moves the shaft member in the rotational axis direction;
The shaft member is disposed on the other outer side in the rotation axis direction with respect to the inner shaft rotor, guides the shaft member in the rotation axis direction along the groove portion, and rotates together with the outer shaft rotor to rotate the shaft member. An actuator comprising: a spline outer cylinder that rotates around an axis. The actuator according to claim 10, wherein an inner diameter of the inner shaft rotor is smaller than outer diameters of the nut and the spline outer cylinder. The actuator according to claim 10 or 11, further comprising an arm attachment member that is coupled to a tip of the second portion and attaches an arm. The housing has a housing for a spline outer cylinder that accommodates the ball spline and covers a part of the second part,
The arm mounting member has a cylindrical portion that extends toward the ball spline side and accommodates the distal end of the spline outer cylinder housing in the rotational axis direction;
The actuator according to claim 12, wherein the cylindrical portion has a gap with the spline outer cylinder housing. The nut is supported by the housing via a fifth bearing portion;
The actuator according to any one of claims 10 to 13, wherein the spline outer cylinder is supported by the housing via a sixth bearing portion. The actuator according to any one of claims 10 to 14, further comprising a negatively operated electromagnetic brake connected to the nut. A biaxial integrated motor according to any one of claims 1 to 8,
A housing containing the two-shaft integrated motor;
A first portion that is disposed through the inner shaft rotor in the direction of the rotation axis and projects from the inner shaft rotor to one side in the direction of the rotation axis has a threaded portion, and extends from the inner shaft rotor in the direction of the rotation axis. A shaft member having a groove along the direction of the rotation axis in the second portion protruding to the other;
A nut that is screwed into the threaded portion and rotates with the inner shaft rotor to move the shaft member in the direction of the rotation axis;
An actuator comprising: a spline outer cylinder that guides the shaft member in the direction of the rotation axis along the groove and rotates together with the outer shaft rotor to rotate the shaft member in a direction around the axis.

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