JP2019171283A - Coating tool and coating method - Google Patents

Abstract

To make the thickness of a coating film uniform without generating variation in straightness of a lip part or complication in supply voltage management of a coating liquid or nonuniformity of a film thickness due to the deposition of solid components in the coating liquid.SOLUTION: A slot 6 is formed which opens from a manifold 5 formed in a tool body 1 to extend in a longitudinal direction to the tip part of the tool body 1, where the tool body 1 has an introduction passage 7 extending in parallel with the manifold 5 and a plurality of longitudinally arranged flow adjustment passages 9 that connect this introduction passage 7 with the manifold 5 to cause a coating liquid to be introduced into the introduction passage 7 and supplied into the manifold 5 through the flow adjustment passage 9, and the flow adjustment passage 9 comprises a flow adjustment valve 11 that adjusts the flow rate of the coating liquid supplied into the manifold 5 through this flow adjustment passage 9.SELECTED DRAWING: Figure 5

Description

  The present invention provides a coating film by discharging a coating liquid supplied to a manifold formed in a longitudinally extending tool body through a slot opened from the manifold to the tip of the tool body and coating the coating liquid The present invention relates to a coating tool and a coating method for forming a film.

  In such a coating tool, the thickness of the coating film is made uniform by partially adjusting the discharge amount of the coating liquid in the longitudinal direction by adjusting the opening width of the slot. For example, it is described in Patent Documents 1 and 2. That is, the coating tool described in Patent Document 1 includes a rotating shaft, a nut screwed to the rotating shaft, and a fixing ring having an outer periphery larger than the rotating shaft, and the rotating shaft between the nut and the fixing ring. Lip width accommodated in the groove for accommodating the lip width adjusting means formed at substantially the full width in the longitudinal direction of the head member, with the shaft orthogonal to the slot and one end of the rotary shaft protruding outward of the head member It has adjustment means.

  Further, in the coating tool described in Patent Document 2, the side surface opposite to the side surface defining the slot of the head member faces each other in the direction along the slot extending direction, which is the flow direction of the coating liquid. A recess having a pair of wall surfaces is formed, and a distance between the pair of wall surfaces is increased in the recess by a fluid pressure generated by compressing a fluid sealed in the fluid pressure chamber or a pressing force by a wedge member. Thus, an adjustment unit capable of adjusting the width of the slot by deforming the head member is provided, and this adjustment unit can be moved and fixed at an arbitrary position in the longitudinal direction of the slot.

  Furthermore, in the coating tool described in Patent Document 3, by providing a plurality of supply ports for supplying the coating liquid to the manifold, the discharge amount of the coating liquid in the longitudinal direction of the tool body can be made uniform, and the coating film thickness can be made uniform. There is a description in which variations are reduced. Furthermore, Patent Document 4 includes a choke bar body that is arranged facing a slot and that is connected to a plurality of divided bars divided in the longitudinal direction of the slot, and an advance / retreat adjuster provided for each divided bar. In addition, there is described a configuration in which the amount of the gap between the slots is adjusted for each divided bar by advancing and retracting each divided bar with each advance / retreat adjuster.

Japanese Patent No. 5498826 Japanese Patent No. 3501159 JP 2005-238169 A JP 2007-044643 A

  However, as described in Patent Documents 1 and 2, with a coating tool that adjusts the discharge amount of the coating liquid by deforming the head member, the straightness of the lip portion at the tip of the tool body that the coating liquid discharges also changes. Therefore, it becomes difficult to make the discharge amount of the coating solution uniform accurately. In addition, when a slit extending in the longitudinal direction is formed in the head member in order to change the slot width by locally deforming the head member, the rigidity of the tool body may be reduced.

  On the other hand, when the coating liquid is supplied to the manifold from a plurality of supply ports as in the coating tool described in Patent Document 3, management of the supply pressure of the coating liquid to the plurality of supply ports becomes complicated. . Further, in the case where the gap amount of the slot is adjusted by a plurality of dividing bars facing the slot as in the coating tool described in Patent Document 4, solid content in the coating solution is deposited on the dividing bar and applied. There is a possibility that the film thickness becomes non-uniform.

  The present invention has been made under such a background, such as a change in straightness of the lip portion, a complicated supply pressure management of the coating liquid, or a non-uniform film thickness due to deposition of solid content in the coating liquid. An object of the present invention is to provide a coating tool and a coating method capable of making the coating film uniform in thickness.

  In order to solve the above problems and achieve such an object, the coating tool of the present invention has a manifold extending in the longitudinal direction in the tool body and an opening from the manifold to the tip of the tool body. The tool body is moved relative to the workpiece in a direction intersecting the longitudinal direction with the tip of the tool body facing the workpiece, and the manifold is moved to the manifold. An application tool that forms an application film by applying the supplied application liquid to the object to be applied by discharging the supplied application liquid from the tip of the tool body through the slot, and the manifold and An introduction path extending in parallel and a plurality of flow rate adjustment paths arranged in the longitudinal direction connecting the introduction path and the manifold are formed, and the coating liquid is guided to the introduction path. Is supplied to the manifold through the flow rate adjusting path, and the flow rate adjusting path has a flow rate adjusting valve for adjusting the flow rate of the coating liquid supplied to the manifold through the flow rate adjusting path. It is provided.

  In the coating tool configured in this way, the coating liquid is once introduced into the introduction path, spreads in the longitudinal direction, supplied to the manifold through a plurality of flow rate adjustment paths, and then passed through the slot to the tip of the tool body. And is applied to an object to be coated. Here, the flow rate adjustment path is provided with a flow rate adjustment valve that adjusts the flow rate of the coating liquid supplied to the manifold through the flow rate adjustment path. In the direction, the flow rate of the coating liquid supplied to the manifold from the flow rate adjustment path provided with the flow rate adjustment valve and discharged through the slot will decrease, and conversely, by opening this flow rate adjustment valve, In the longitudinal direction, the flow rate of the coating liquid supplied to the manifold from the flow rate adjusting path provided with the flow rate adjusting valve and discharged through the slot increases.

  Therefore, when the film thickness of the coating film applied to the object to be coated becomes non-uniform in the longitudinal direction, the film thickness is made uniform by operating the flow rate adjusting valve of the non-uniform part in this way. Can be maintained. For this reason, since it is not necessary to deform the head member, the straightness of the lip portion does not change, and it is not necessary to form a slit extending in the longitudinal direction on the head member, so that the rigidity of the tool body is ensured. Can do.

  Furthermore, since it is only necessary to supply the coating liquid from one supply path to the introduction path and spread it in the longitudinal direction, management of the supply pressure of the coating liquid does not become complicated. Further, since the flow rate adjusting valve is disposed in the flow rate adjusting path in front of the manifold, even if the solid content in the coating liquid is deposited, the film thickness does not become uneven.

  Here, by controlling the flow rate of the coating liquid adjusted by the flow rate adjusting valve based on the detection result by the coating film thickness detecting means for detecting the thickness of the coating film formed on the object to be coated. Further, it is possible to achieve a more uniform film thickness, and for example, by automatically operating the flow rate adjustment valve based on the detection result, it is possible to form a coating film having a uniform film thickness even without an unmanned person. .

  In other words, the coating method of the present invention detects the thickness of the coating film formed on the coated object using the coating tool having the above-described configuration provided with such a coating film thickness detecting means. Based on the detection result by the detection means, the application liquid is applied to the object to be applied to form the application film while controlling the flow rate adjustment valves provided in the plurality of flow rate adjustment paths arranged in the longitudinal direction. It is characterized by that.

  Here, in such a coating method, specifically, the coating film thickness detection means continuously outputs the data on the position of the coating film in the longitudinal direction and the data on the thickness of the coating film at each position. The data of the position of the coating film and the data of the thickness of the coating film are collected in an external server via the network, and the thickness data of the coating film and the reference coating film thickness set in advance are collected. The difference in thickness of the coating film from the thickness data is calculated and compared with a preset threshold value.If the difference in thickness of the coating film exceeds the threshold value, the threshold value is set in the longitudinal direction. The flow rate adjusting valve at the position exceeding the position is controlled to adjust the flow rate of the coating liquid.

  Further, when the flow rate adjusting path has a circular cross section, the flow rate adjusting valve has a hemispherical tip having a radius equal to the radius of the circle formed by the cross section of the flow rate adjusting path, By providing a valve body that can be projected and retracted in an orthogonal direction, accumulation of the solid content of the coating liquid on the valve body can be suppressed, and the flow rate adjustment path of the application liquid when closing the flow rate adjustment valve It is possible to reliably block the distribution in the interior.

  As described above, according to the present invention, the head member is deformed to change the straightness of the lip portion, the supply pressure management of the coating liquid is complicated, or the film formed by the solid content deposition in the coating liquid. It is possible to ensure uniform thickness of the coating film formed on the object to be coated without causing non-uniform thickness.

It is a front view showing one embodiment of the present invention. It is a partially broken top view of embodiment shown in FIG. It is a side view of embodiment shown in FIG. It is AA sectional drawing in FIG. It is BB sectional drawing in FIG. FIG. 7A is an enlarged cross-sectional view corresponding to the BB cross section in FIG. 1 in the vicinity of the flow control path in a state where the flow control valve is open in the embodiment shown in FIG. 1, and FIG. 6B is a CC cross-sectional view in FIG. In the embodiment shown in FIG. 1, (a) an enlarged cross-sectional view corresponding to the BB cross section in FIG. 1 and (b) a CC cross-sectional view in FIG. is there. FIG. 9A is an enlarged cross-sectional view corresponding to the BB cross section in FIG. 1 in the vicinity of the flow control path in a state where the flow control valve is closed in the embodiment shown in FIG. 1, and FIG. 9B is a CC cross-sectional view in FIG. It is a side view of the rear-end part of the tool main body which shows the modification of embodiment shown in FIG.

  1 to 8 show an embodiment of the present invention. In this embodiment, the tool body 1 has a horizontally long block shape and an outer shape formed of a metal material such as a steel material having a trapezoidal shape as shown in FIG. 3 when viewed from the longitudinal direction (left and right direction in FIGS. 1 and 2). A plurality (two in the present embodiment) of head members 2 and 3 having substantially the same shape and the same size face each other so as to abut one of the wide inner surfaces 2a and 3a extending in the longitudinal direction. Then, a thin plate-like shim 4 made of a metal material such as a steel material is interposed between the inner side surfaces 2a and 3a, and is attached by bolting or the like, so that the cross section when viewed from the longitudinal direction is shown in FIGS. As shown in FIG. 5, it is formed to form a home-base pentagon.

  Of these two head members 2 and 3, the first head member (the right head member in FIGS. 3 to 5) 2 has the second head member (the left head member in FIGS. 1 to 5) 3. A concave groove-like manifold 5 having a cross section perpendicular to the longitudinal direction, for example, formed in a semicircular shape and opened to the inner side surface 2a, extends in the longitudinal direction on the inner side surface 2a that is abutted against the inner side surface 3a. In addition, the inner side surface 2a is formed at a distance from the four sides. The shim 4 is notched from the manifold 5 to the tip of the tool body 1 (the lower portion in FIGS. 1 and 3 to 5), and the notched portion of the shim 4 is the tool. A slot 6 in the main body 1 through which the coating liquid flows is used. In addition to using such a shim 4, the slot 6 may be formed by carving a stepped surface on at least one of the inner surfaces 2a, 3a of the head members 2, 3.

  In this embodiment, such a coating tool has the longitudinal direction horizontal as shown in FIGS. 1 and 2, and in this embodiment, the tip of the tool body 1 protruding in a triangular shape when viewed in the longitudinal direction is provided. Relative to a horizontal movement direction perpendicular to the longitudinal direction with respect to an object to be coated such as a substrate, which is supported downward and is disposed so as to face the tip portion with a slight gap. The coating liquid supplied to the manifold 5 is discharged from the opening of the slot 6 at the tip of the tool body 1 through the slot 6 and applied to the surface (upper surface) of the object to be coated. Form. The head portions of the two head members 2 and 3 and the shim 4 are formed so that the cross section perpendicular to the longitudinal direction is a rectangular shape and protrudes toward the tip end, and are formed as lip portions 2b and 3b.

  In the first head member 2, an introduction path 7 having a circular cross section extending in parallel with the manifold 5 is formed at substantially the same position as the manifold 5 in the vertical direction in the present embodiment. The introduction path 7 is formed by sealing both ends of a hole penetrating the first head member 2 in the longitudinal direction in parallel with the manifold 5 with a plug 7a. In the form, the manifold 5 is substantially equal to the semicircle formed by the cross section, and the length in the longitudinal direction is also substantially equal to the manifold 5. The introduction path 7 is connected to one application liquid supply path 8 formed from the rear end (upper portion in FIGS. 1 and 3 to 5) at the longitudinal center of the tool body 1. Yes.

  Further, the introduction path 7 and the manifold 5 are connected by a plurality of flow rate adjustment paths 9 arranged in the longitudinal direction. In the present embodiment, these flow rate adjusting passages 9 have a cross-sectional diameter smaller than that of the manifold 5 or the introduction passage 7, and are perpendicular to the manifold 5 and the introduction passage 7 and have rear end edges (upper end edges). ) Extend in contact with the rear end edge (upper end edge) of the manifold 5 and the introduction path 7, and in this embodiment, an even number is provided in the longitudinal direction so as to avoid the central portion where the supply path 8 is connected to the introduction path 7. The flow rate adjusting passages (14) are arranged at equal intervals.

  Furthermore, a valve hole 10 having an inner diameter substantially equal to that of the flow rate adjusting path 9 is connected to these flow rate adjusting paths 9 so as to extend from the rear end side of the tool body 1 and to be orthogonal to the flow rate adjusting path 9. A flow rate adjusting valve 11 for adjusting the flow rate of the coating liquid flowing through the flow rate adjusting path 9 is inserted into the valve hole 10. The flow rate adjusting valve 11 has a valve body 11 a that has a hemispherical tip having a radius equal to the radius of a circle formed by the cross section of the flow rate adjusting path 9, and can be projected and retracted in a direction perpendicular to the flow rate adjusting path 9. The O-ring 11b that seals between the inner peripheral surface of the valve hole 10 is interposed on the outer peripheral portion of the valve body 11a on the rear end side of the hemispherical tip portion. It is disguised.

  In addition, an intrusion mechanism 12 is provided in the valve hole 10 on the rear end side of the valve body 11 a of the flow rate adjusting valve 11 so as to make the valve body 11 a appear and disappear in the flow rate adjusting path 9. In the present embodiment, the intrusion mechanism 12 is a so-called micrometer head that converts the rotation of the micro gauge 12a into the intrusion of the pin 12b inserted into the valve hole 10 and connected to or abutting the rear end of the valve body 11a. Yes, the scale of the microgauge 12a can confirm the amount of protrusions and depressions of the pin 12b and the valve body 11a. In the present embodiment, all of the plurality of flow rate adjustment paths 9 are provided with the flow rate adjustment valve 11 and the retracting mechanism 12.

  In the coating tool having such a configuration, when the coating liquid is supplied from the supply path 8 to the introduction path 7, the coating liquid spreads in the introduction path 7 in the longitudinal direction, flows to the manifold 5 through the flow rate adjustment path 9, and further into the slot. 6 is discharged from the tip of the tool body 1 as described above and applied to the object to be coated to form a coating film on the object to be coated. Here, on the opposite side of the movement direction of the tool body relative to the object to be coated, a coating film thickness (not shown) such as a non-contact type light reflection measuring instrument or an X-ray measuring instrument for measuring the coating film thickness. Detection means is provided, and when the coating film thickness detection means detects the non-uniformity of the film thickness in the longitudinal direction, the flow rate adjusting valve 11 adjusts the flow rate of the coating liquid at the portion where the film thickness is non-uniform. This makes the film thickness uniform.

  That is, when a portion having a large film thickness in the longitudinal direction is generated, the valve body 11a of the flow rate adjusting valve 11 provided in the flow rate adjusting path 9 located in this portion is caused to protrude by the retracting mechanism 12 so that the flow rate adjusting valve 11 is moved. By closing, the flow rate of the coating liquid supplied from the flow rate adjusting path 9 to the manifold 5 and discharged through the slot 6 decreases, and the film thickness can be made uniform.

  Conversely, when a portion with a thin film thickness occurs in the longitudinal direction, the valve body 11a of the flow rate adjustment valve 11 provided in the flow rate adjustment path 9 located in this portion is retracted by the retracting mechanism 12 to cause the flow rate adjustment valve 11 to move backward. By opening the flow rate, the flow rate of the coating liquid supplied from the flow rate adjusting path 9 to the manifold 5 and discharged through the slot 6 increases, and the film thickness can be made uniform.

  As described above, in the coating tool having the above-described configuration, the film thickness of the coating film formed on the coating object is made uniform by operating the flow rate adjusting valve 11 provided in the flow rate adjusting path 9 in front of the manifold 5. be able to. For this reason, it is not necessary to deform the head members 2 and 3, and the straightness of the lip portions 2b and 3b is not changed, and a uniform film thickness can be maintained. Further, since it is not necessary to form a slit extending in the longitudinal direction in order to deform the head members 2 and 3, the rigidity of the tool body 1 can be secured, and a uniform film thickness can be obtained even when the coating liquid is discharged at a high pressure. The coating film can be formed.

  On the other hand, one supply path 8 is connected to the introduction path 7 to introduce the coating liquid and spread in the longitudinal direction, so that the management of the supply pressure of the coating liquid does not become complicated. Further, since the flow rate adjusting path 9 in which the flow rate adjusting valve 11 is disposed is between the introduction path 7 before the manifold 5, the solid content in the coating liquid is accumulated on the valve body 11 a of the flow rate adjusting valve 11. However, the film thickness does not become non-uniform.

  Further, in the present embodiment, the flow rate of the coating liquid adjusted by the flow rate adjusting valve 11 is controlled based on the detection result by the coating film thickness detecting means for detecting the thickness of the coating film formed on the coating object. The For this reason, it is possible to make the film thickness even more reliable, and for example, by automatically operating the flow rate adjusting valve 11 based on the detection result, it is possible to form a coating film having a uniform film thickness even if unattended. It becomes possible.

  Here, FIG. 9 shows a modification of the above-described embodiment when the flow rate adjustment valve 11 is automatically operated in this way. In this modification, the detection result by the coating film thickness detecting means is fed back by the driving means 22 such as a stepping motor connected to the coating film thickness detecting means via the control means 21 comprising a computer controller and a power source. Then, the microgauge 12a of the retracting mechanism 12 of the flow rate adjusting valve 11 is rotated to operate the flow rate adjusting valve 11. For this reason, compared with the case where an operator operates manually, the film thickness of a coating film can be equalized more correctly.

  More specifically, in this modification, the coating film thickness detecting means continuously obtains data on the position of the coating film in the longitudinal direction and data on the thickness of the coating film at each position, and applies these coatings. Data on the position of the film and data on the thickness of the coating film are collected on an external server (not shown) via the network, and the thickness data of the coating film and the reference coating film set in advance by the computer of the control means 21 are collected. The difference in thickness of the coating film with the thickness data is calculated and compared with a preset threshold value.If the difference in thickness of the coating film exceeds the threshold value, the threshold value is set in the longitudinal direction. The microgauge 12a of the protrusion / extraction mechanism 12 of the flow rate adjusting valve 11 at the position exceeding the position is rotated by the driving means 22 to operate the flow rate adjusting valve 11.

  In the present embodiment, the flow rate adjusting path 9 has a circular cross section, whereas the flow rate adjusting valve 11 has a hemispherical tip having a radius equal to the radius of the circle formed by the cross section of the flow rate adjusting path 9. A body 11 a is provided, and the valve body 11 a can be projected and retracted in a direction orthogonal to the flow rate adjusting path 9 by the retracting mechanism 12. That is, since there is no angular portion at the tip of the valve body 11a protruding into the flow rate adjusting path 9, it is possible to suppress the solid content of the coating liquid on the valve body 11a, as shown in FIG. In addition, when the flow rate adjusting path 9 is completely closed by the flow rate adjusting valve 11, the flow of the coating liquid in the flow rate adjusting path 9 can be reliably blocked.

  In the present embodiment, the flow rate adjusting path 9 is an even number, the radius thereof is smaller than that of the manifold 5 and the introduction path 7, and the rear end edge extends so as to be in contact with the rear end edges of the manifold 5 and the introduction path 7. However, the number of the flow rate adjusting paths 9 and the connection form and arrangement of the manifold 5 and the introducing path 7 are not limited to the above embodiment. Absent.

DESCRIPTION OF SYMBOLS 1 Tool main body 2, 3 Head member 4 Shim 5 Manifold 6 Slot 7 Introduction path 8 Supply path 9 Flow rate adjustment path 11 Flow rate adjustment valve 11a Valve body 12 Intrusion mechanism 21 Control means 22 Drive means

Claims (6)

A manifold that extends in the longitudinal direction is formed in the tool body, and a slot that opens from the manifold to the distal end portion of the tool body is formed. The main body is moved relative to the object to be coated in a direction intersecting the longitudinal direction, and the coating liquid supplied to the manifold is discharged from the tip of the tool body through the slot. A coating tool for coating a material to form a coating film,
An introduction path extending in parallel with the manifold and a plurality of flow rate adjustment paths arranged in the longitudinal direction connecting the introduction path and the manifold are formed in the tool body, and the coating liquid is introduced into the tool body. And is supplied to the manifold through the flow rate adjustment path after being introduced to the path,
The application tool, wherein the flow rate adjustment path is provided with a flow rate adjustment valve for adjusting the flow rate of the application liquid supplied to the manifold through the flow rate adjustment path.   The flow rate of the coating liquid adjusted by the flow rate adjusting valve is controlled based on a detection result by a coating film thickness detecting unit that detects the thickness of the coating film formed on the coating object. The coating tool according to claim 1.   The flow rate adjusting path has a circular cross section, and the flow rate adjusting valve has a hemispherical tip having a radius equal to the radius of a circle formed by the cross section of the flow rate adjusting path and is orthogonal to the flow rate adjusting path. The coating tool according to claim 1, further comprising a valve body capable of appearing and retracting.   By controlling the flow rate adjusting valve based on the detection result by the coating film thickness detecting means for detecting the thickness of the coating film formed on the coated object using the coating tool according to claim 2. An application method comprising: applying the application liquid to the object to be applied to form the application film while adjusting a flow rate of the application liquid supplied to the manifold through the flow rate adjusting path.   A plurality of flow rates arranged in the longitudinal direction based on the detection result by the coating film thickness detecting means for detecting the thickness of the coating film formed on the coated object using the coating tool according to claim 2. An application method, wherein the application film is formed by applying the application liquid to the application object while controlling the flow rate adjusting valve provided in the adjustment path. The coating film thickness detecting means continuously obtains data on the position of the coating film in the longitudinal direction and data on the thickness of the coating film at each position,
Collect the data of the position of the coating film and the data of the thickness of the coating film on an external server via a network,
Calculate the difference in coating film thickness between the coating film thickness data and the preset reference coating film thickness data, and compare with a preset threshold value.
When the difference in thickness of the coating film exceeds the threshold value, the flow rate adjusting valve at a position exceeding the threshold value in the longitudinal direction is controlled to adjust the flow rate of the coating liquid. The coating method according to claim 5.

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