JP2019136782A - Abrasion amount measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately measure the amount of wear of a lower tool and an upper tool while sandwiching it between a lower tool and an upper tool and polishing or grinding both surfaces of the workpiece. A measuring device is provided. A wear amount measuring device 1 includes a first contact type displacement sensor 11, a second contact type displacement sensor 12, and a swing member. The first contact type displacement sensor 11 detects the vertical position of the upper surface of the lower tool 21 arranged under the workpiece. The second contact type displacement sensor 12 detects the vertical position of the lower surface of the upper tool 22 arranged on the upper side of the workpiece. The swing member fixes the first contact type displacement sensor 11 and the second contact type displacement sensor 12 in a state where they can swing in opposite directions. The wear amount measuring device 1 swings the first contact type displacement sensor 11 and the second contact type displacement sensor 12 to bring them into contact with the upper surface of the lower tool 21 and the lower surface of the upper tool 22, respectively, and wears the upper surface. And the amount of wear on the lower surface is measured. [Selection diagram] Fig. 1

Description

  The present invention relates to a wear amount measuring apparatus.

  Patent Document 1 discloses a technique for detecting the wear amount of a grindstone by detecting a difference in the vertical position of the grindstone before and after dressing (sharpening of the grindstone) in a single-side grinding apparatus.

JP 2017-154238 A

  By the way, in the double-side grinding apparatus, when trying to calculate the wear amount of the upper grindstone and the wear amount of the lower grindstone from the contact type displacement sensor, the contact type displacement sensor dedicated to the upper grindstone and the contact type displacement sensor dedicated to the lower grindstone, The position of the upper whetstone and the position of the lower whetstone are detected respectively.

  However, if the grinding is interrupted and the positions of the upper and lower wheels are detected, the heat generated by the grinding process in the double-side grinding device is transferred to the holding tool that holds both contact displacement sensors, and the holding tool Thermal expansion. As a result, each contact-type displacement sensor is displaced (thermally displaced) from the initial position, so there is a possibility that the positions of the upper grindstone and the lower grindstone cannot be detected with high accuracy.

  Accordingly, an object of the present invention is to accurately measure the amount of wear of the lower tool and the upper tool while being sandwiched between the lower tool and the upper tool and performing processing such as polishing or grinding on both surfaces of the workpiece. It is an object of the present invention to provide a wear amount measuring apparatus capable of performing the above.

In order to achieve the above object, one embodiment of the present invention provides:
A first contact-type displacement sensor that detects a vertical position of an upper surface of a lower tool disposed on a lower side of the workpiece;
A second contact-type displacement sensor for detecting a vertical position of the lower surface of the upper tool disposed on the upper side of the workpiece;
An oscillating member for fixing the first contact displacement sensor and the second contact displacement sensor in an oscillatable state in opposite directions;
With
The first contact displacement sensor and the second contact displacement sensor are swung to contact the upper surface of the lower tool and the lower surface of the upper tool, respectively, and the amount of wear on the upper surface of the lower tool and the upper Measure the amount of wear on the underside of the tool,
This is a wear amount measuring device.

  In the wear amount measuring apparatus according to this aspect, the first contact displacement sensor for detecting the position of the lower tool upper surface and the second contact displacement sensor for detecting the position of the upper tool lower surface are swung. The member is fixed so as to be removable from the lower tool and the upper tool. Therefore, according to this aspect, the amount of wear of the lower tool and the upper tool is accurately measured while being sandwiched between the lower tool and the upper tool and performing processing such as polishing or grinding on both surfaces of the workpiece. be able to.

  According to the present invention, it is possible to accurately measure the wear amount of the lower tool and the upper tool while being sandwiched between the lower tool and the upper tool and performing processing such as polishing or grinding on both surfaces of the workpiece. It is possible to provide a simple wear amount measuring apparatus.

It is a schematic side view which shows the example of 1 structure of the abrasion amount measuring apparatus which concerns on one Embodiment of this invention. It is a perspective view which shows the external appearance of the abrasion amount measuring apparatus of FIG. It is a partial cross section figure which shows a mode that the abrasion amount measuring apparatus of FIG. 2 is installed. It is a schematic diagram which shows the mode of measurement with the abrasion amount measuring apparatus of FIG. It is a schematic diagram which shows the mode of measurement with the abrasion amount measuring apparatus which concerns on a comparative example. It is a side view which shows the other structural example of the abrasion amount measuring apparatus which concerns on one Embodiment of this invention.

  Hereinafter, a wear amount measuring apparatus according to an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic side view showing a configuration example of a wear amount measuring apparatus according to the present embodiment. 2 is a perspective view showing an appearance of the wear amount measuring apparatus of FIG. 1, and FIG. 3 is a partial cross-sectional view showing a state in which the wear amount measuring apparatus of FIG. 2 is installed. 2 (a) and 3 (a) show the state at the time of non-measurement, and FIGS. 2 (b) and 3 (b) show the state at the time of measurement.

  As shown in FIG. 1, the wear amount measuring device 1 according to the present embodiment is a device that measures the wear amount of the lower tool 21 and the wear amount of the upper tool 22. The lower tool 21 and the upper tool 22 are tools that sandwich the workpiece when machining the workpiece (workpiece), and the lower tool 21 is disposed below the workpiece, and the upper tool 22 is arranged above the workpiece.

  The lower tool 21 and the upper tool 22 can be used when polishing or grinding both surfaces of a workpiece in a double-side polishing machine or a double-side grinding machine. In this case, each of the lower tool 21 and the upper tool 22 can be a platen such as a polishing surface plate or a grinding wheel, and the workpiece can be referred to as a workpiece or a workpiece. In the double-side polishing machine, the object to be polished can be processed by a surface plate and floating abrasive grains, and in the double-side grinding machine, the object to be ground can be processed (fixed abrasive grain processing) by a grindstone.

  As the workpiece, an object such as a wafer that requires flatness on both sides can be applied. This is because it is necessary to accurately measure the amount of wear on both sides of a platen serving as a tool when processing such a workpiece requiring flatness on both sides.

  The wear amount measuring apparatus 1 includes a first contact displacement sensor 11, a second contact displacement sensor 12, and a swing member. This rocking member can be composed of, for example, a rocking plate 13, a shaft member 14, and a support member 15 described later.

  The first contact displacement sensor 11 detects a vertical position (hereinafter, vertical position) of the upper surface of the lower tool (hereinafter, lower platen) 21. The first contact-type displacement sensor 11 can have a main body 11a and a measuring element (first measuring element) 11b in contact with the object. The main body 11a detects the vertical position of the upper surface in a state where the tip of the first measuring element 11b is in contact with the upper surface of the lower platen 21. In addition, the upper surface of the lower platen 21 can be used as a mounting surface for the workpiece.

  The second contact displacement sensor 12 detects the vertical position of the lower surface of the upper tool (hereinafter referred to as the upper platen) 22. The second contact-type displacement sensor 12 can have a main body 12a and a measuring element (second measuring element) 12b in contact with the object. The main body 12a detects the vertical position of the lower surface in a state where the tip of the second probe 12b is in contact with the lower surface of the upper platen 22.

  The first contact-type displacement sensor 11 can be configured to detect the position of the measurement target surface brought into contact as a displacement amount from the position at the time of non-measurement (non-contact). The position at the time of non-measurement refers to the position of the first probe 11b relative to the main body 11a at the time of non-measurement. The first contact type displacement sensor 11 may be, for example, a transformer type sensor having a coil inside, a scale type sensor having a fixed scale inside, or the like. A sensor having a glass scale as a fixed scale may be classified as an optical sensor, and a sensor having a magnetic scale as a fixed scale may be classified as a magnetic detection type sensor. Further, the second contact displacement sensor 12 can have the same configuration as the first contact displacement sensor 11.

  The rocking member fixes the first contact type displacement sensor 11 and the second contact type displacement sensor 12 in a state where the rocking member can rock in opposite directions. Specifically, the swing member illustrated in FIG. 1 will be described. As described above, this rocking member can be composed of, for example, the rocking plate 13, the shaft member 14, and the support member 15. The support member 15 is fixed at a position (hereinafter, a fixed position) where the height does not change, such as a double-side polishing machine or a double-side grinding machine, or a ceiling or floor of a work place. The support member 15 can also be fixed at a fixed position so as to be movable in the horizontal direction.

  The swing plate 13 fixes the first contact displacement sensor 11 and the second contact displacement sensor 12 to each other. Here, the first contact displacement sensor 11 can be fixed to one end of the swing plate 13, and the second contact displacement sensor 12 can be fixed to the other end of the swing plate. Further, the swing plate 13 can attach the first contact displacement sensor 11 and the second contact displacement sensor 12 to the support member 15 so as to be swingable around the shaft member 14. The shaft member 14 in FIG. 1 can be a hinge that can swing (rotate) around the axis indicated by the alternate long and short dash line in FIG. An example of a mechanism for swinging the swing plate 13 will be described later.

  The wear amount measuring apparatus 1 configured as described above swings the first contact-type displacement sensor 11 and the second contact-type displacement sensor 12 when measuring the wear amount, and respectively causes the upper surface of the lower platen 21 and the upper platen 22 to swing. Contact the lower surface of.

  In such a contact state, the wear amount measuring apparatus 1 measures the wear amount on the upper surface of the lower platen 21 and the wear amount on the lower surface of the upper platen 22. The wear amount measuring apparatus 1 calculates the wear amount of the upper surface of the lower platen 21 based on the detection result of the first contact displacement sensor 11, and wears the lower surface of the upper platen 22 based on the detection result of the second contact displacement sensor 12. Calculate the amount. The amount of wear on the upper surface of the lower platen 21 based on the detection result of the first contact displacement sensor 11 can be obtained as a difference (displacement) from the position of the upper surface previously detected by the first contact displacement sensor 11. The same applies to the amount of wear on the lower surface of the upper platen 22 based on the detection result of the second contact displacement sensor 12.

  In addition, since the wear amount measuring apparatus 1 integrates the first contact displacement sensor 11, the second contact displacement sensor 12, and the swing member in this way so that the upper surface and the lower surface can be measured, the upper and lower integrated double-sided It can be called a measuring device.

  Further, as shown in FIG. 3, the upper platen 22 is provided at an upper portion thereof, and can be moved up and down by a rotation holding member that rotates the upper platen 22. For example, after the lower platen 21 and the upper platen 22 are worn, the rotation holding member can be moved downward to reduce the amount of wear.

  Here, an example of a mechanism for swinging the swing plate 13 will be described. As shown in FIG. 2, the support member 15 can have an actuator 16 such as an air cylinder and a projection (projection) 18, and the swing plate 13 can have a recess 17. The recess 17 and the protrusion 18 constitute a stopper. It is desirable that the concave portion 17 and the protruding portion 18 have shapes that engage with each other at the time of contact.

  When the workpiece is processed, that is, when the lower platen 21 and the upper platen 22 are rotating, the first probe 11b and the second probe 12b are not in contact with the lower platen 21 and the upper platen 22, respectively ( Evacuation state).

  When the non-contact state as shown in FIGS. 2 (a) and 3 (a) is changed to the contact state as shown in FIGS. 2 (b) and 3 (b), the wear amount measuring apparatus 1 is as follows. The operation like this is performed. That is, the wear amount measuring apparatus 1 operates the actuator 16 and pushes up the second contact displacement sensor 12 side of the rocking plate 13 by the rod portion (piston portion) thereof, so that the first contact displacement sensor 11 The height of the second contact type displacement sensor 12 is increased by lowering the height. At this time, the actuator 16 pushes up the swing plate 13 to a position where the concave portion 17 is in contact with the protruding portion 18 and maintains the position. As described above, the contact state is a state in which the swing plate 13 swinged to the measurement side by the actuator 16 is in contact with and held by the protrusion 18 in the recess 17. When the actuator 16 is an air cylinder, this holding is performed by air pressure.

  Measurement is performed in such a contact state. At the time of measurement, the first contact displacement sensor 11 and the second contact displacement sensor 12 are positioned with good reproducibility by driving the swing plate 13 by the actuator 16 and stopping by the stopper formed by the recess 17 and the protrusion 18. .

  When the contact state is changed to the non-contact state, the operation of the actuator 16 is stopped (or the actuator 16 is operated so as to lower its rod portion), so that as shown in FIGS. 2 (a) and 3 (a). The original non-contact state can be restored. In addition, after the non-contact state is made in this way, the first contact displacement sensor 11 and the second contact displacement sensor 12 are further retracted in the horizontal direction together with the swing plate 13, and the main body of the double-side polishing machine or double-side grinding machine is Processing can also be performed after separation.

  Further, as described above, the first contact type displacement sensor 11 and the second contact type displacement sensor 12 are retracted to positions that do not interfere with processing when not measuring. Therefore, the rocking plate 13 can rock the first contact type displacement sensor 11 and the second contact type displacement sensor 12 by an angle that allows the lower platen 21 and the upper platen 22 to be in non-contact (retractable). If it is. Based on such an angle, the distance between the recess 17 and the protrusion 18 may be determined.

  Next, the measurement accuracy in the wear amount measuring apparatus 1 according to the present embodiment will be described with reference to FIGS. 4 and 5. FIG. 4 is a schematic diagram showing a state of measurement by the wear amount measuring apparatus 1. FIG. 4 (a) shows the initial state, FIG. 4 (b) shows the worn state, FIG. 4 (c) shows the state of wear and displacement due to thermal expansion, etc., and FIG. 4 (d) corrects the amount of wear. Each state is shown. FIG. 5 is a schematic diagram showing a state of measurement by the wear amount measuring apparatus according to the comparative example. FIG. 5 (a) shows the initial state, FIG. 5 (b) shows the worn state, FIG. 5 (c) shows the state of wear and displacement due to thermal expansion, and FIG. 5 (d) corrects the amount of wear. Each state is shown.

  As shown in FIG. 4, in the wear amount measuring apparatus 1, the first contact displacement sensor 11 and the second contact displacement sensor 12 which are upper and lower contact displacement sensors are replaced by the swing plate 13 described in FIG. 1 and the like. It is integrated. In FIG. 4, for the sake of convenience, the rocking plate 13 is divided into a rocking plate upper portion 13a and a rocking plate lower portion 13b, but these are integrally formed. Further, in FIG. 4, for convenience, the support member 15 is illustrated so as to overlap the swing plate. FIG. 4 illustrates the support member 10 extended above the support member 15 as a member for fixing the support member 15 to the fixed position. The support member 10 is fixed at a fixed position and supports the wear amount measuring apparatus 1.

  For example, as shown in FIG. 4B, it is assumed that the lower platen 21 is worn by the wear amount Δ1, and the upper platen 22 is worn by the wear amount Δ2. In this case, the support member 10 may mainly expand due to the heat of polishing or grinding.

  In a state where the support member 10 is thermally expanded, as shown in FIG. 4C, if the first contact displacement sensor 11 is displaced downward by a displacement amount ε, the second contact displacement sensor 12 is also displaced by the same amount. It will be displaced downward by ε. At this time, strictly speaking, it is assumed that the swing plate upper portion 13a, the swing plate lower portion 13b, the first contact displacement sensor 11 itself, and the second contact displacement sensor 12 themselves are also thermally expanded. Since the length of is short and the amount of displacement due to thermal expansion is small, it is negligible.

With such a configuration, even when thermal expansion occurs, the displacement amount (error) due to thermal expansion on the lower platen 21 side and the error on the upper platen 22 side are offset, so the change in the thickness of the workpiece is reduced. be able to. Actually, it can be seen that the variation Y of the thickness of the workpiece is offset as represented by the following equation.
Y = Δ1−ε + Δ2 + ε = Δ1 + Δ2

  Further, although the displacement amounts of the swing plate upper portion 13a and the swing plate lower portion 13b are ignored, even when these displacement amounts are taken into consideration, the displacement amounts due to thermal expansion are the same in the vertical direction. More specifically, the swing plate upper portion 13a and the swing plate lower portion 13b are vertically symmetrical with respect to the shaft member 14 and the support member 15 which are the fixed portions thereof, and the first contact displacement sensor 11 and the second contact displacement. The sensor 12 can be arranged. Thereby, the linear expansion coefficient of the swing plate upper part 13a and the linear expansion coefficient of the swing plate lower part 13b become the same. Therefore, even if thermal expansion occurs, the swing plate upper portion 13a and the swing plate lower portion 13b shift symmetrically by the same amount, that is, the thermal expansion amount of the swing plate upper portion 13a and the thermal expansion of the swing plate lower portion 13b. The first measuring element 11b and the second measuring element 12b are moved to a position where the amount is balanced. As a result, the warpage of the swing plate upper portion 13a and the swing plate lower portion 13b due to heat can be ignored.

  On the other hand, in the wear amount measuring apparatus according to the comparative example shown in FIG. 5, the first contact displacement sensor 111 is provided for measuring the vertical position of the upper surface of the lower platen 21, and the second contact displacement sensor 112 is the upper contact displacement sensor 112. It is provided to measure the vertical position of the lower surface of the platen 22. The first contact type displacement sensor 111 has a main body 111a and a first measuring element 111b, and the second contact type displacement sensor 112 has a main body 112a and a second measuring element 112b. The main body 111a of the first contact displacement sensor 111 is fixed at a fixed position via a support member 121, and the main body 112a of the second contact displacement sensor 112 is fixed at a fixed position via a support member 122. Yes.

In this comparative example, as shown in FIG. 5C, the first contact displacement sensor 111 and the second contact displacement sensor 112 are thermally displaced by displacement amounts ε1 and ε2, respectively. The difference between the lengths of the members 121 and 122 is different mainly due to the difference. Actually, the amount of change Y in the thickness of the workpiece in the comparative example is expressed by the following equation. The difference between the displacements ε1 and ε2 results in an increase in the thickness of the workpiece.
Y = Δ1−ε1 + Δ2 + ε2 = Δ1 + Δ2− (ε1−ε2) (ε1 ≠ ε2)

  In the comparative example of FIG. 5, the case where the fixing position is fixed by the member from the upper side has been described. However, the same concept holds true when the fixing position is fixed by the member from the lower side (floor side). In this case, the directions of the displacement amounts ε1 and ε2 are opposite to those shown in FIG. Further, when one of the first contact type displacement sensor 111 and the second contact type displacement sensor 112 is fixed from the upper side and the other is fixed from the lower side, the error becomes (ε1 + ε2), which is further increased. Also, in the example of FIG. 4, the case where the fixing position is fixed by the member from the upper side has been described, but the same idea holds when the fixing is performed by the member from the lower side (floor side), and the swing plate The direction of the displacement amount of the upper portion 13a and the displacement amount of the rocking plate lower portion 13b is opposite to the direction shown in FIG.

  In addition, although only simple linear expansion has been described, the members such as the support members 121 and 122 are warped, and in this comparative example, the error is actually further increased.

  As described above, when the first contact displacement sensor 111 and the second contact displacement sensor 112 are independently positioned, the respective vertical positions change due to expansion and contraction due to processing heat or the like, resulting in an error in measurement. However, as in the present embodiment, the first contact displacement sensor 11 and the second contact displacement sensor 12 are fixed so as to be swingable by a single swinging member having a swinging plate 13 or the like. Even if there is a significant expansion / contraction change, the relative positions of the upper and lower processed surfaces can be accurately and accurately grasped. Thereby, the accuracy variation of the thickness of a to-be-processed object can be reduced.

  Actually, in a double-side polishing machine or double-side grinding machine, when the processing surface (upper surface) of the lower platen 21 and the processing surface (lower surface) of the upper platen 22 are constantly worn and the position (height) changes, the processing continues. Since the thickness of the workpiece is not stable, the quality of the product is greatly hindered. However, by using the wear amount measuring apparatus 1 according to the present embodiment and measuring the wear amount while considering the heat during processing, the relative positions of the processing surfaces of the upper and lower platens involved in the processing quality can be accurately managed. Can do.

<Alternative example>
Next, an alternative example in the present embodiment will be described.
In FIG. 1 to FIG. 4, the wear amount measuring device 1 is provided for the lower platen 21 and the upper platen 22 with respect to the double-sided polishing machine or the double-sided grinding machine in which the lower platen 21 and the upper platen 22 are alternately provided (offset arrangement). The description is based on the assumption that the position is measured. On the other hand, the wear amount measuring apparatus according to the present embodiment can also be applied when the upper and lower platens are coaxial. That is, the wear amount measuring apparatus according to the present embodiment measures the positions of the lower platen and the upper platen with respect to a double-side polishing machine or a double-side grinding machine in which the rotation axis of the lower platen and the rotation axis of the upper platen are provided coaxially. It can also be configured as a device.

  Such application will be briefly described with reference to FIG. FIG. 6 is a side view showing another configuration example of the wear amount measuring apparatus according to the present embodiment. Here, differences from the configuration example described with reference to FIGS. 1 to 4 will be mainly described, and description of similar points including components having the same names will be omitted.

  The wear amount measuring device 6 shown in FIG. 6 is a device that measures the wear amount of the processed surface of the lower platen 21a and the upper platen 22a that rotate coaxially. The wear amount measuring device 6 includes a first contact type displacement sensor 61 that detects the vertical position of the upper surface that is the processing surface of the lower platen 21a, and a second contact type that detects the vertical position of the lower surface that is the processing surface of the upper platen 22a. A displacement sensor 62 and a swing member are included. As the swing member, the wear amount measuring device 6 can include a swing plate 63, a shaft member 64, a support member 65, and the like.

  The first contact type displacement sensor 61 can include a main body 61 a and a first measuring element 61 b, similarly to the first contact type displacement sensor 11, and the second contact type displacement sensor 62 is the second contact type displacement sensor 12. Similarly, the main body 62a and the second measuring element 62b can be provided. The swing plate 13 has a first contact displacement sensor 61 and a second contact displacement sensor 62 attached to the support member 15 so as to be swingable about the shaft member 14. That is, the main body 61 a is attached to one end of the swing plate 63 that can swing around the shaft member 64, and the main body 62 a is attached to the other end of the swing plate 63.

  At the time of measurement, as shown in FIG. 6, either one is moved in the vertical direction so as to separate the lower platen 21a and the upper platen 22a, and the wear amount measuring device 6 is inserted therebetween, and the measurement is executed. . After the measurement, the oscillating plate 63 is oscillated so that the first measuring element 61b and the second measuring element 62b are separated from the upper surface of the lower platen 21a and the lower surface of the upper platen 22a, respectively, and are indicated by linear arrows in FIG. The wear amount measuring device 6 is retracted in the direction. Thereafter, the processing can be resumed by closing the space between the lower platen 21a and the upper platen 22a.

  In the above, various examples of the wear amount measuring apparatus according to the present embodiment have been described. However, the shape of each component is not limited to that illustrated, and it is sufficient that each function can be performed. For example, the shapes of the first contact displacement sensors 11, 61, the second contact displacement sensors 12, 62, the swing plates 13, 63, the support members 15, 65, and the like are not limited to those illustrated. Moreover, the recessed part 17 and the projection part 18 should just be a shape which can fulfill | perform the function of a stopper by both, both may be a reverse shape, and another shape may be sufficient as them. Further, the workpiece can be a plate-like object as exemplified by the wafer, but is not limited thereto.

Although the present embodiment has been described above, the above embodiment has the following features.
That is, the wear amount measuring apparatus 1 according to the embodiment includes a first contact displacement sensor 11, a second contact displacement sensor 12, and a swing member. The first contact-type displacement sensor 11 detects the vertical position of the upper surface of the lower tool 21 arranged on the lower side of the workpiece. The second contact-type displacement sensor 12 detects the vertical position of the lower surface of the upper tool 22 disposed above the workpiece. The swing member fixes the first contact type displacement sensor 11 and the second contact type displacement sensor 12 in a state in which they can swing in opposite directions. The wear amount measuring apparatus 1 swings the first contact type displacement sensor 11 and the second contact type displacement sensor 12 so as to contact the upper surface of the lower tool 21 and the lower surface of the upper tool 22, respectively. The amount of wear on the upper surface and the amount of wear on the lower surface of the upper tool 22 are measured.

  In the wear amount measuring apparatus 1 described above, the first contact displacement sensor 11 for detecting the position of the upper surface of the lower tool 21 and the second contact displacement sensor 12 for detecting the position of the lower surface of the upper tool 22. Are fixed by a swinging member. Further, in the wear amount measuring apparatus 1, the first contact displacement sensor 11 and the second contact displacement sensor 12 are fixed in a state where they can be detached from the lower tool 21 and the upper tool 22 by a swing member. Therefore, according to this wear amount measuring apparatus 1, the lower side of the workpiece is sandwiched between the lower tool 21 and the upper tool 22 and subjected to processing such as polishing or grinding on both surfaces of the workpiece (in a state where the processing is interrupted). The amount of wear of the tool 21 and the upper tool 22 can be accurately measured.

1,6 Wear amount measuring device 10 Support member 11, 61 First contact displacement sensor 11a, 61a Main body 11b, 61b of first contact displacement sensor First probe 12, 62 Second contact displacement sensor 12a, 62a Main body 12b, 62b of the two-contact displacement sensor Second probe 13, 63 Oscillating plate 13a Oscillating plate upper part 13b Oscillating plate lower part 14, 64 Shaft member 15, 65 Support member 16 Actuator 17 Recess 18 Protruding part 21, 21a Lower tool (lower platen)
22, 22a Upper tool (upper platen)

Claims (1)

A first contact-type displacement sensor that detects a vertical position of an upper surface of a lower tool disposed on a lower side of the workpiece;
A second contact-type displacement sensor for detecting a vertical position of the lower surface of the upper tool disposed on the upper side of the workpiece;
An oscillating member for fixing the first contact displacement sensor and the second contact displacement sensor in an oscillatable state in opposite directions;
With
The first contact displacement sensor and the second contact displacement sensor are swung to contact the upper surface of the lower tool and the lower surface of the upper tool, respectively, and the amount of wear on the upper surface of the lower tool and the upper Measure the amount of wear on the underside of the tool,
Wear amount measuring device.

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