JP2019125083A - Touch sensor - Google Patents

Abstract

To provide a touch sensor achieving a reduced thickness, while capable of detecting coordinates of a touched position as well as detecting a touch pressure with high accuracy.SOLUTION: A touch sensor 1 includes a capacitive sensor 8 for detecting coordinates of a touched position, and a piezoelectric sensor 7 for detecting a touch pressure. The piezoelectric sensor 7 includes a first substrate film 12, a piezoelectric material layer 13 having a thickness T1 of more than 0.05 μm and less than 20 μm, a first transparent electrode 11 disposed on a front side of the first substrate film 12 and the piezoelectric material layer 13, and a second transparent electrode 15 disposed on a rear side of the first substrate film 12 and the piezoelectric material layer 13. The capacitive sensor 8 includes a second substrate film 18 and a fourth transparent electrode 20 supported by the second substrate film 18. Patterns of the first transparent electrode 11 and of the second transparent electrode 15 are substantially identical to the pattern of the fourth transparent electrode 20 when they are projected in a front-rear direction.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a touch sensor, and more particularly to a touch sensor that detects both coordinates of a touched position and pressure of a touch.

  Conventionally, a touch panel with a pressure detection function for detecting the position and pressure of a touch is known (see, for example, Patent Document 1).

  For example, in the touch panel with pressure detection function described in FIG. 13 of Patent Document 1, the piezoelectric body is disposed between the charge measurement electrode (lower electrode) and the charge measurement electrode (middle electrode), and charge measurement is further performed. The electrode (middle electrode) doubles as a capacitance electrode.

  And in the touch panel with a press detection function given in patent documents 1, the position to which press was added is detected by detecting change of electric capacity with the charge measurement electrode (middle part electrode). At the same time, the charge generated when the piezoelectric body is pressed is detected by detecting the charge generated in the piezoelectric body with the two charge measurement electrodes.

JP, 2015-005231, A

  In recent years, with a touch panel with a pressure detection function, detection of a pressure with higher accuracy has been required while detecting the position of the touch.

  Furthermore, in the touch panel with a pressure detection function, thinning is also required.

  The present invention provides a thin touch sensor that can detect the pressure of a touch with high accuracy while detecting the coordinates of a touched position.

  The present invention (1) is a touch sensor disposed on the front side of a display, the capacitance sensor detecting coordinates of a touched position, and a touch sensor disposed on the back side of the capacitance sensor, the touch sensor A piezoelectric sensor for detecting pressure, wherein the piezoelectric sensor is supported by a base film, the base film, and a piezoelectric layer having a thickness of more than 0.05 μm and less than 20 μm, the base film, and A first transparent electrode disposed on the front side of the piezoelectric layer, and a second transparent electrode disposed on the rear side of the substrate film and the piezoelectric layer, wherein the capacitance sensor is a second substrate. A film and a transparent electrode supported by a second base film, wherein the pattern of the first transparent electrode or the second transparent electrode is substantially the same as the pattern of the transparent electrode when projected in the front-rear direction Is Includes touch sensor.

  In this touch sensor, the transparent electrode detects the coordinate of the touched position by the transparent electrode.

  Further, since the first transparent electrode or the second transparent electrode has substantially the same pattern as the pattern of the transparent electrode when projected in the front-rear direction, the first transparent electrode or the first transparent electrode immediately after the transparent electrode detecting The pressure of the touch can be detected with high accuracy by the first transparent electrode or the second transparent electrode located in the vicinity of the two transparent electrodes instead of the transparent electrodes. Therefore, the pressure of the touch can be detected with high accuracy while detecting the coordinates of the touched position.

  In addition, since the thickness of the piezoelectric layer is as thin as more than 0.05 μm and less than 20 μm, thinning of the piezoelectric sensor can be achieved, and consequently, thinning of the touch sensor can be achieved.

  As a result, this touch sensor can not only detect the position of the touch, but can achieve detection of the pressing with higher accuracy, and can be thinned.

  The present invention (2) includes the touch sensor according to (1), wherein the pattern of the second transparent electrode is substantially the same as the pattern of the first transparent electrode when projected in the front-rear direction.

  In this touch sensor, since the second transparent electrode has substantially the same pattern as the first transparent electrode when projected in the front-rear direction, the pressure on the touch can be further increased by the first transparent electrode and the second transparent electrode. Can be detected.

  The present invention (3) includes the touch sensor according to (1) or (2), wherein the piezoelectric layer is a coated layer or a sputtering layer.

  In this touch sensor, since the piezoelectric layer is a coating layer or a sputtering layer, the thickness of the piezoelectric layer is reliably set to the above-described thin thickness.

  The present invention (4) is the touch sensor according to (3), wherein the coating layer is a coating layer coated with a fluorine resin, and the sputtering layer is a sputtering layer sputtering an inorganic compound having a wurtzite structure. including.

  In this touch sensor, when the coating layer is a coating layer coated with a fluorine resin and the sputtering layer is a sputtering layer obtained by sputtering an inorganic compound having a wurtzite structure, the piezoelectric characteristics of the piezoelectric layer are excellent.

  The present invention (5) is the coated layer, wherein the piezoelectric layer has a thickness of more than 0.5 μm and less than 20 μm, and the fluorine resin is a group consisting of vinylidene fluoride, tetrafluoroethylene and chlorotrifluoroethylene. The touch sensor according to (4), which is a polymer formed by polymerization of at least one selected monomer.

  In this touch sensor, the piezoelectric layer, which is a coating layer having a specific thickness and a specific polymer, is excellent in piezoelectric characteristics.

  The present invention (6) is the sputtering layer, wherein the piezoelectric layer has a thickness of more than 0.05 μm and 0.5 μm or less, and the inorganic compound is ZnO, ZnS, ZnSe, ZnTe, AlN, GaN, CdSe, The touch sensor according to (4), including at least one selected from the group consisting of CdTe and SiC.

  In this touch sensor, a piezoelectric layer having a specific thickness and a sputtering layer which is a specific inorganic compound has excellent piezoelectric characteristics.

  The present invention (7) includes the touch sensor according to any one of (1) to (6), wherein the transparent electrode is a third transparent electrode disposed on the front side of the second base film. .

  In this touch sensor, a third transparent electrode is disposed on the front side of the second base film. That is, the third transparent electrode is positioned on the front side of the first transparent electrode or the second transparent electrode across the second base film. Therefore, the third transparent electrode is disposed far from the first transparent electrode or the second transparent electrode. As a result, in the case of applying a voltage to the third transparent electrode, it is possible to suppress the influence (propagation) of the noise caused thereby on the first transparent electrode or the second transparent electrode. As a result, the pressure of the touch can be detected accurately.

  The present invention (8) is the touch sensor according to any one of (1) to (7), wherein the transparent electrode is a fourth transparent electrode disposed on the rear side of the second base film. Including.

  In this touch sensor, the fourth transparent electrode is disposed on the rear side of the second base film. Therefore, the fourth transparent electrode having a pattern substantially the same as the pattern of the first transparent electrode or the second transparent electrode is disposed close to the piezoelectric sensor, and thus both the coordinates of the touched position and the pressure of the touch It can detect accurately.

  The present invention (9) includes the touch sensor according to (8), wherein the transparent electrode is doubled by the first transparent electrode.

  Since the transparent electrode is also used by the first transparent electrode, the structure can be simplified and thickness can be reduced as compared with the structure including the transparent electrode provided separately from the first transparent electrode.

  In the present invention (10), the material of the base film is selected from the group consisting of polyethylene terephthalate, polyethylene naphthalate, polyolefin, polycycloolefin, polycarbonate, polyethersulfone, polyarylate, polyimide, polyamide, polystyrene and polynorbonene. The touch sensor according to any one of (1) to (9), which is at least one.

  In this touch sensor, since the material of the substrate film is at least one of the polymers described above, the substrate film is excellent in toughness, and therefore the substrate film ensures the piezoelectric layer while achieving thinning of the piezoelectric sensor. Support.

  The present invention (11) is the touch sensor according to any one of (1) to (10), wherein the material of the first transparent electrode, the second transparent electrode, and the transparent electrode is an indium-containing oxide. including.

  In this touch sensor, since the material of the first transparent electrode, the second transparent electrode, and the transparent electrode is an indium-containing oxide, the surface resistance of the first transparent electrode, the second transparent electrode, and the transparent electrode can be reduced. .

  The present invention (12) includes the touch sensor according to any one of (1) to (11), further including an adhesive layer in contact with the piezoelectric layer.

  In this touch sensor, the piezoelectric layer can be bonded to either the first transparent electrode or the second transparent electrode by the adhesive layer in contact with the piezoelectric layer.

  The present invention (13) includes the touch sensor according to (12), wherein the thickness of the adhesive layer is more than 1 μm and less than 200 μm.

  In this touch sensor, since the thickness of the adhesive layer is thin, the thickness of the piezoelectric sensor can be further reduced, and thus, the thickness of the touch sensor can be further reduced.

  In the invention (14), the piezoelectric sensor is formed directly on the front surface or the rear surface of the base film, and at least one functional layer selected from the group consisting of an undercoat layer, a refractive index adjustment layer and an antiblocking layer. The touch sensor according to any one of (1) to (13) is further included.

  In this touch sensor, the function can be exerted by the functional layer.

  The present invention (15) includes the touch sensor according to any one of (1) to (14), wherein one of the first transparent electrode and the second transparent electrode is a reference potential electrode.

  In this touch sensor, since any one of the first transparent electrode and the second transparent electrode is the reference potential electrode, the piezoelectric layer can be shielded from noise caused by the capacitance sensor.

  The touch sensor according to the present invention not only detects the position of the touch, but can achieve detection of the pressing with higher accuracy, and the thickness can be reduced.

FIG. 1 shows a cross-sectional view of a first embodiment of the touch sensor of the present invention. FIG. 2 shows a cross-sectional view of a modification of the touch sensor shown in FIG. FIG. 3 shows a cross-sectional view of a modification of the touch sensor shown in FIG. FIG. 4 shows a cross-sectional view of a modification of the touch sensor shown in FIG. FIG. 5 shows a cross-sectional view of a second embodiment of the touch sensor of the present invention. FIG. 6 shows a cross-sectional view of a modification of the touch sensor shown in FIG. FIG. 7 shows a cross-sectional view of a third embodiment of the touch sensor of the present invention. FIG. 8 shows a cross-sectional view of a modification of the touch sensor shown in FIG. FIG. 9 shows a cross-sectional view of a fourth embodiment of the touch sensor of the present invention. FIG. 10 shows a cross-sectional view of a fifth embodiment of the touch sensor of the present invention. FIG. 11 shows a cross-sectional view of a modification of the touch sensor shown in FIG.

First Embodiment
A first embodiment of the touch sensor of the present invention will be described with reference to FIG.

  The touch sensor 1 is disposed on the front side of the display 2 (virtual line) via, for example, a fifth pressure-sensitive adhesive layer 3 (described later). Specifically, the display 2, the fifth pressure-sensitive adhesive layer 3, and the touch sensor 1 are arranged in order toward the front side.

  In addition, on the front side of the touch sensor 1, a cover glass 4 (virtual line) is disposed via a sixth pressure-sensitive adhesive layer 5 (described later). Specifically, the touch sensor 1, the sixth pressure-sensitive adhesive layer 5 and the cover glass 4 are arranged in order toward the front side. Therefore, the display 2, the fifth pressure-sensitive adhesive layer 3, the touch sensor 1, the sixth pressure-sensitive adhesive layer 5 and the cover glass 4 are arranged in order toward the front side.

  The touch sensor 1 has a film shape (including a sheet shape) having a predetermined thickness, extends in a surface direction (direction orthogonal to the front-rear direction), and has a flat front surface and a flat rear surface (two main surfaces). The front surface of the touch sensor 1 provides an operation surface for the user to operate the touch sensor 1. The rear surface of the touch sensor 1 is an opposing surface facing the display 2.

  The touch sensor 1 is a sensor that detects both a pressure in the front-rear direction based on a touch of a user's finger or a pen and coordinates of the touched position (specifically, XY coordinates).

  The touch sensor 1 includes a piezoelectric sensor 7, a first pressure-sensitive adhesive layer 6, and a capacitance sensor 8 in order from the front side. Specifically, the touch sensor 1 includes a piezoelectric sensor 7, a first pressure-sensitive adhesive layer 6 disposed on the front surface of the piezoelectric sensor 7, and a capacitance sensor disposed on the front surface of the first pressure-sensitive adhesive layer 6. And 8. Preferably, the touch sensor 1 includes only the piezoelectric sensor 7, the first pressure-sensitive adhesive layer 6, and the capacitance sensor 8.

  The piezoelectric sensor 7 is a sensor (force sensor or load sensor) that detects the pressure (load) in the thickness direction based on the touch of the user's finger or pen. The piezoelectric sensor 7 is also a Z-direction sensor that detects pressure in the Z direction (front-rear direction) (depth direction) due to touch. The piezoelectric sensor 7 extends in the surface direction and has a flat front surface and a flat rear surface (two main surfaces). The piezoelectric sensor 7 forms a rear surface of the touch sensor 1. That is, the piezoelectric sensor 7 is the last layer in the touch sensor 1.

  The piezoelectric sensor 7 includes a first transparent electrode 11, a first base film 12 as an example of a base film, a piezoelectric layer 13, a second pressure-sensitive adhesive layer 14, a second transparent electrode 15, and a second transparent electrode 15. The four base films 16 are provided in order toward the rear side. Specifically, the piezoelectric sensor 7 includes a first transparent electrode 11, a first base film 12 disposed on the rear surface of the first transparent electrode 11, and a piezoelectric body disposed on the rear surface of the first base film 12. Layer 13, a second pressure-sensitive adhesive layer 14 disposed on the rear surface of the piezoelectric layer 13, a second transparent electrode 15 embedded on the rear surface of the second pressure-sensitive adhesive layer 14, and a rear surface of the second transparent electrode 15 And a fourth base film 16 disposed on the Preferably, the piezoelectric sensor 7 includes the first transparent electrode 11, the first base film 12, the piezoelectric layer 13, the second pressure-sensitive adhesive layer 14, the second transparent electrode 15, and the fourth base film. It consists only of 16.

  The first transparent electrode 11 extends in the surface direction. The first transparent electrode 11 forms the front surface of the piezoelectric sensor 7. That is, the first transparent electrode 11 is the frontmost layer in the piezoelectric sensor 7.

  The first transparent electrode 11 is a reference potential electrode (or a ground electrode). Specifically, the first transparent electrode 11 is grounded via the wiring 9. The first transparent electrode 11 is disposed on the front side of the first base film 12 and the piezoelectric layer 13.

  The first transparent electrodes 11 have patterns which are spaced apart from each other in the surface direction. The pattern of the first transparent electrode 11 is not particularly limited, and examples thereof include a linear shape, a rectangular shape, a circular shape, a parallel beam shape, and a frame shape. These may be used alone or in combination. Preferably, the pattern of the first transparent electrode 11 is the same as the pattern of the fourth transparent electrode 20 described later when projected in the front-rear direction.

  The first transparent electrode 11 is in contact with the front surface of the first base film 12 and has the above-described pattern, so that the front surface of the first base film 12 around the first transparent electrode 11 is exposed.

  As a material of the 1st transparent electrode 11, a transparent conductive material is mentioned, for example. Examples of the transparent conductive material include indium-containing oxides such as indium tin complex oxide (ITO), antimony-containing oxides such as antimony tin complex oxide (ATO), and the like, and preferably indium-containing oxide And, more preferably, ITO.

  The surface resistance of the first transparent electrode 11 is, for example, 1000 Ω / sq or less, preferably 300 Ω / sq or less, and for example, 1 Ω / sq or more, preferably 10 Ω / sq or more.

  The thickness of the first transparent electrode 11 is, for example, 35 nm or less, and for example, 1 nm or more.

  The first base film 12 is in contact with the rear surface of the first transparent electrode 11. The first base film 12 extends in the plane direction, and has dimensions (larger than the first transparent electrode 11) including the first transparent electrode 11 in a plan view. Thus, the first base film 12 supports the first transparent electrode 11 from the rear side. That is, the first transparent electrode 11 is disposed on the front side with respect to the first base film 12. The first substrate film 12 has a film shape extending in the plane direction, and has a flat front surface and a flat rear surface (two main surfaces).

  Examples of the material of the first base film 12 include transparent materials. Transparent materials include, for example, polyethylene terephthalate, polyethylene naphthalate, polyolefins (eg, polyethylene, polypropylene, ethylene-propylene copolymer etc.), polycycloolefins (eg, including cycloolefin copolymers etc.), polycarbonate, polyethersulfone And polymers having toughness, such as polyarylates, polyimides, polyamides, polystyrenes and polynorbonenes. These can be used alone or in combination of two or more.

The material of the first base film 12 preferably has an insulating property. The volume resistivity of the material is, for example, 10 × ⁶ Ω · cm or more, preferably 10 × ⁸ Ω · cm or more, and for example, 10 × ¹⁵ Ω · cm or less.

  The thickness T2 of the first base film 12 is, for example, 1 μm or more, preferably 10 μm or more, and for example, 100 μm or less, preferably 60 μm or less.

  The piezoelectric layer 13 is in contact with the entire rear surface of the first base film 12. Thus, the piezoelectric layer 13 is supported by the first base film 12 from the front side. The first transparent electrode 11 is disposed on the front side of the piezoelectric layer 13. The piezoelectric layer 13 is located on the opposite side of the first transparent electrode 11 with respect to the first base film 12 in the front-rear direction. Therefore, in the touch sensor 1, the piezoelectric layer 13 is insulated from the first transparent electrode 11 by the first base film 12.

  The piezoelectric layer 13 is, for example, a coating layer, a sputtering layer, or the like. The piezoelectric layer 13 may be a single layer, or may be a multilayer in which layers of different types selected from the above are stacked. Preferably, it is a single layer.

  The material of the piezoelectric layer 13 is not particularly limited as long as it has a piezoelectric property, and examples thereof include a fluorine resin and an inorganic compound having a wurtzite structure. Specifically, as the material of the piezoelectric layer 13, if the piezoelectric layer 13 is an application layer, a fluorine resin is mentioned, and if the piezoelectric layer 13 is a sputtering layer, an inorganic compound having a wurtzite structure is mentioned. Be

  Examples of the fluorine resin include polymers formed by polymerization of at least one monomer selected from the group consisting of vinylidene fluoride, tetrafluoroethylene and chlorotrifluoroethylene. Specifically, as the fluorine resin, for example, homopolymers such as polyvinylidene fluoride, polytetrafluoroethylene, polychlorotrifluoroethylene and the like, for example, vinylidene fluoride-trifluoroethylene copolymer, vinylidene fluoride-tri Fluoroethylene-chlorotrifluoroethylene copolymer, hexafluoropropylene-vinylidene fluoride copolymer, perfluorovinyl ether-vinylidene fluoride copolymer, tetrafluoroethylene-vinylidene fluoride copolymer, hexafluoropropylene oxide-fluorocarbon Examples include vinylidene fluoride copolymers, hexafluoropropylene oxide-tetrafluoroethylene-vinylidene fluoride copolymers, and hexafluoropropylene-tetrafluoroethylene-vinylidene fluoride copolymers. The fluorine resin can be used alone or in combination.

  As an inorganic compound which has a wurtzite structure, ZnO, ZnS, ZnSe, ZnTe, AlN, GaN, CdSe, CdTe, SiC etc. are mentioned, for example. The inorganic compounds having a wurtzite structure can be used alone or in combination.

  The piezoelectric layer 13 has, for example, transparency. Specifically, the total light transmittance of the piezoelectric layer 13 is, for example, 90% or more, preferably 92% or more, more preferably 95% or more, and for example, 100% or less.

  The thickness T1 of the piezoelectric layer 13 is more than 0.05 μm, preferably 0.1 μm or more. The thickness T1 of the piezoelectric layer 13 is less than 20 μm, preferably 15 μm or less, more preferably 10 μm or less, still more preferably 5 μm or less, and particularly preferably 1 μm or less.

  Specifically, when the piezoelectric layer 13 is a coating layer, the thickness T1 is preferably more than 0.5 μm and less than 20 μm. When the piezoelectric layer 13 is a sputtering layer, the thickness T1 is preferably more than 0.05 μm and 0.5 μm or less.

  When the thickness T1 of the piezoelectric layer 13 exceeds the above-described upper limit, thinning of the piezoelectric sensor 7 can not be achieved, and thinning of the touch sensor 1 can not be achieved.

  On the other hand, when the thickness T1 of the piezoelectric layer 13 falls below the above-described lower limit, the piezoelectric characteristics are degraded.

  The ratio (T1 / T2) of the thickness T1 of the piezoelectric layer 13 to the thickness T2 of the first base film 12 is, for example, 0.086 or less, and for example, 0.0005 or more.

In particular, when the piezoelectric layer 13 is a sputtering layer, the above-mentioned ratio (T1 / T2) is, for example, 0.0005 or more, preferably 0.0008 or more, more preferably 0.0017 or more, For example, it is 0.00500 or less, More preferably, it is 0.0250 or less, More preferably, it is 0.0200 or less. On the other hand, if the piezoelectric layer 13 is a coating layer, the above ratio (T1 / T2) is, for example, 0.005 or more, preferably 0.008 or more, more preferably 0.017 or more, more preferably , 0.050 or more, for example, 2.000 or less, preferably 1.000 or less, more preferably 0.750 or less, more preferably 0.600 or less.
If the above ratio is equal to or less than the above-described upper limit, thinning of the piezoelectric sensor 7 can be sufficiently achieved, and furthermore, thinning of the touch sensor 1 can be sufficiently achieved.

  The second pressure-sensitive adhesive layer 14 is in contact with the entire rear surface of the piezoelectric layer 13. The second pressure-sensitive adhesive layer 14 extends in the surface direction, and has a flat front surface, a rear surface that follows the shape of the second transparent electrode 15, and (two main surfaces). The second pressure-sensitive adhesive layer 14 covers the rear surface of the piezoelectric layer 13 in a close contact manner. Thus, the second pressure-sensitive adhesive layer 14 adheres and fixes the second transparent electrode 15 and the fourth base film 16 described below to the piezoelectric layer 13.

  As a material of the 2nd pressure sensitive adhesive layer 14, the pressure sensitive adhesive composition which has transparency and insulation is mentioned, for example. The pressure-sensitive adhesive composition is not limited, and examples thereof include acrylic pressure-sensitive adhesive compositions and silicone pressure-sensitive adhesive compositions. The thickness of the second pressure-sensitive adhesive layer 14 is, for example, more than 1 μm, preferably 4 μm or more, more preferably 10 μm or more, and for example, less than 200 μm, preferably 100 μm or less.

  Specifically, the second transparent electrode 15 is disposed so as to be embedded in the rear surface of the second pressure-sensitive adhesive layer 14. The second transparent electrode 15 is disposed on the rear side of the first base film 12 and the piezoelectric layer 13.

  The second transparent electrode 15 has the same pattern as the first transparent electrode 11 when projected in the front-rear direction. That is, the second transparent electrode 15 does not have a non-overlapping portion which does not overlap with the first transparent electrode 11 when projected in the front-rear direction. Further, the surface direction edge of the second transparent electrode 15 overlaps the surface direction edge of the first transparent electrode 11 when projected in the front-rear direction. That is, the pattern of the second transparent electrode 15 matches (matches) the pattern of the first transparent electrode 11 when projected in the front-rear direction.

  The second transparent electrode 15 is a signal electrode. The second transparent electrode 15 is electrically connected to a device (not shown) for detecting the amount of charge in the piezoelectric layer 13 via a wire (not shown) and calculating the pressure of the touch, the controller 24 and the like. Connected to The material, surface resistance and thickness of the second transparent electrode 15 are the same as those exemplified for the first transparent electrode 11.

  The fourth base film 16 is in contact with the rear surface of the second transparent electrode 15 and the rear surface of the fourth base film 16 between the second transparent electrodes 15 and outside the second transparent electrode 15. The fourth base film 16 extends in the plane direction and has a dimension (larger than the second transparent electrode 15) including the second transparent electrode 15 in a plan view. Thereby, the fourth base film 16 supports the second transparent electrode 15 from the rear side. The fourth substrate film 16 has a flat front surface and a flat rear surface (two main surfaces). In addition, the fourth base film 16 forms the rear surface of the piezoelectric sensor 7. That is, the fourth base film 16 is the last layer in the piezoelectric sensor 7. The material, volume resistivity, and thickness of the fourth base film 16 are the same as those exemplified for the first base film 12.

  The thickness T3 of the piezoelectric sensor 7 is the total thickness of the first transparent electrode 11, the first base film 12, the piezoelectric layer 13, the second pressure-sensitive adhesive layer 14, the second transparent electrode 15, and the fourth base film 16. Specifically, for example, it is 500 μm or less, preferably 300 μm or less, more preferably 100 μm or less, and for example, 45 μm or more.

  The first pressure-sensitive adhesive layer 6 is in contact with the entire front surface of the piezoelectric sensor 7. Specifically, the first pressure-sensitive adhesive layer 6 is in contact with the front surface and the peripheral side surface of the first transparent electrode 11 and the front surface of the first base film 12 exposed from the first transparent electrode 11. The first pressure-sensitive adhesive layer 6 is interposed between the piezoelectric sensor 7 and the capacitance sensor 8. Therefore, the first pressure-sensitive adhesive layer 6 forms an intermediate layer in the touch sensor 1. In addition, the first pressure-sensitive adhesive layer 6 has a film shape that extends in the surface direction and has a flat front surface and a rear surface (two main surfaces). The rear surface of the first pressure-sensitive adhesive layer 6 follows the front surface of the first transparent electrode 11. The first pressure-sensitive adhesive layer 6 covers the front surface of the piezoelectric sensor 7 in a close contact manner. The material and thickness of the first pressure sensitive adhesive layer 6 are the same as those exemplified for the second pressure sensitive adhesive layer 14.

  The capacitance sensor 8 is a position sensor that detects touched coordinates (specifically, XY coordinates) in the surface direction. Further, the capacitance sensor 8 is a so-called XY sensor that detects a touch position in the XY direction (two-dimensional direction).

  The capacitance sensor 8 extends in the surface direction and has a flat front surface and a flat rear surface (two main surfaces). The capacitance sensor 8 forms the front surface of the touch sensor 1. That is, the capacitance sensor 8 is the frontmost layer in the touch sensor 1. The capacitance sensor 8 is in contact with the entire front surface of the first pressure-sensitive adhesive layer 6. The capacitance sensor 8 is pressure-sensitively bonded to the front side of the piezoelectric sensor 7 via the first pressure-sensitive adhesive layer 6. That is, it is disposed on the front side of the piezoelectric sensor 7.

  The capacitance sensor 8 includes a third transparent electrode 17, a second base film 18, a third pressure-sensitive adhesive layer 19, a fourth transparent electrode 20 as an example of a transparent electrode, and a third base film 21. And in order toward the rear side. Specifically, the capacitance sensor 8 is disposed on the third transparent electrode 17, the second base film 18 disposed on the rear surface of the third transparent electrode 17, and the rear surface of the second base film 18. The third pressure-sensitive adhesive layer 19, the fourth transparent electrode 20 disposed on the rear surface of the third pressure-sensitive adhesive layer 19, and the third base film 21 disposed on the rear surface of the fourth transparent electrode 20 are provided. The capacitance sensor 8 preferably comprises only the third transparent electrode 17, the second base film 18, the third pressure-sensitive adhesive layer 19, the fourth transparent electrode 20, and the third base film 21. Become.

  The third transparent electrode 17 forms the front surface of the capacitance sensor 8. That is, the third transparent electrode 17 is the frontmost layer in the capacitance sensor 8. The third transparent electrodes 17 have patterns which are spaced apart from each other in the surface direction. The pattern of the third transparent electrode 17 is not particularly limited. For example, in plan view, a connection portion connecting the plurality of first detection portions 31 having a rhombus (diamond shape) shape and the adjacent first detection portions 31 Examples of such patterns include a pattern having (not shown in FIG. 1) continuously, a well pattern, and the like. Further, the pattern of the third transparent electrode 17 deviates from the pattern of the first transparent electrode 11 when projected in the front-rear direction. The material, surface resistance and thickness of the third transparent electrode 17 are the same as those exemplified for the first transparent electrode 11.

  The third transparent electrode 17 is electrically connected to an external device (such as a galvanometer) not shown.

  The second base film 18 is in contact with the rear surface of the third transparent electrode 17. The third transparent electrode 17 is disposed on the front side of the second base film 18. The second base film 18 extends in the plane direction and has a dimension (larger than the third transparent electrode 17) including the third transparent electrode 17 in a plan view. Thereby, the second base film 18 supports the third transparent electrode 17 from the rear side. The second substrate film 18 has a flat front surface and a flat rear surface (two main surfaces). The material, volume resistivity and thickness of the second base film 18 are the same as those exemplified for the first base film 12.

  The third pressure-sensitive adhesive layer 19 is in contact with the entire rear surface of the second base film 18. The third pressure-sensitive adhesive layer 19 extends in the plane direction and has a flat front surface and a rear surface (two main surfaces) that follow the shape of the fourth transparent electrode 20. The third pressure-sensitive adhesive layer 19 covers the rear surface of the second base film 18 in a close contact manner. The material and thickness of the third pressure sensitive adhesive layer 19 are the same as those exemplified for the second pressure sensitive adhesive layer 14.

  The fourth transparent electrode 20 is disposed so as to be embedded in the rear surface of the third pressure-sensitive adhesive layer 19. The fourth transparent electrode 20 is disposed on the rear side of the second base film 18 via the third pressure-sensitive adhesive layer 19. That is, the fourth transparent electrode 20 is disposed on the rear side of the second base film 18.

  The fourth transparent electrode 20 has the same pattern as the first transparent electrode 11 when projected in the front-rear direction. That is, the fourth transparent electrode 20 substantially does not have a non-overlapping portion which does not overlap with the first transparent electrode 11 when projected in the front-rear direction. Further, the surface direction edge of the fourth transparent electrode 20 overlaps the surface direction edge of the first transparent electrode 11 when projected in the front-rear direction. That is, the pattern of the fourth transparent electrode 20 matches (matches) the pattern of the first transparent electrode 11 when projected in the front-rear direction.

  Therefore, the fourth transparent electrode 20, the first transparent electrode 11, and the second transparent electrode 15 have the same pattern when projected in the front-rear direction.

  For example, the fourth transparent electrodes 20 have patterns that are spaced apart from each other in the surface direction.

  The fourth transparent electrode 20 has a pattern that does not overlap with the third transparent electrode 17 when projected in the front-rear direction.

  The pattern of the fourth transparent electrode 20 is, for example, a plurality of second detection portions 32 which have a rhombus (diamond shape) shape in plan view and are arranged to be offset from the first detection portion 31 of the third transparent electrode 17. And a connection portion (not shown in FIG. 1) connecting the adjacent second detection portions 32 in a continuous manner, a parallel pattern, and the like.

  The material, surface resistance and thickness of the fourth transparent electrode 20 are the same as those exemplified for the first transparent electrode 11.

  The fourth transparent electrode 20 is electrically connected to an external device (not shown) and the control device 24.

  The third base film 21 is in contact with the rear surface of the fourth transparent electrode 20 and the rear surface of the third pressure-sensitive adhesive layer 19 between the fourth transparent electrodes 20 and outside the fourth transparent electrode 20. In addition, the fourth base film 16 extends in the plane direction and has a dimension (larger than the fourth transparent electrode 20) including the fourth transparent electrode 20 in a plan view. Thereby, the third base film 21 supports the fourth transparent electrode 20 from the rear side. The fourth substrate film 16 has a flat front surface and a flat rear surface (two main surfaces). The material, volume resistivity, and thickness of the third base film 21 are the same as those exemplified for the first base film 12.

  The third base film 21 is bonded and fixed to the second base film 18 via the third pressure-sensitive adhesive layer 19 together with the fourth transparent electrode 20. That is, in the capacitance sensor 8, the third base film 21 is bonded to the second base film 18.

  On the other hand, in the touch sensor 1, the third base film 21 is bonded and fixed to the first transparent electrode 11 via the first pressure-sensitive adhesive layer 6.

  The thickness of the capacitance sensor 8 is the total thickness of the third transparent electrode 17, the second base film 18, the third pressure-sensitive adhesive layer 19, the fourth transparent electrode 20 and the third base film 21. , 100 μm or less, preferably 50 μm or less, and for example, 2 μm or more, preferably 15 μm or more.

  The thickness of the touch sensor 1 is the total thickness of the piezoelectric sensor 7, the first pressure-sensitive adhesive layer 6, and the capacitance sensor 8, and is, for example, 200 μm or less, preferably 150 μm or less, and for example, 3 μm or more Preferably, it is 20 micrometers or more.

  In order to manufacture the touch sensor 1, first, each of the piezoelectric sensor 7 and the capacitance sensor 8 is prepared.

  In order to prepare the piezoelectric sensor 7, a first base film 12 in which the first transparent electrode 11 and the piezoelectric layer 13 are formed on each of the front and back surfaces, and a second transparent electrode 15 on the front surface The two base films 16 are pasted together via the second pressure-sensitive adhesive layer 14.

  In the production of the first base film 12 in which the piezoelectric layer 13 is formed on the rear surface, if the material of the piezoelectric layer 13 is a fluorocarbon resin, a coating liquid containing the fluorocarbon resin is prepared and used as a first base film It is applied to the rear surface of 12 and then, if necessary, heated to form a coated layer. If the material of the piezoelectric layer 13 is an inorganic compound having a wurtzite structure, the rear surface of the first base film 12 is sputtered using the above-described inorganic compound as a target to form a sputtering layer. According to the method described above, the piezoelectric layer 13 having a thin thickness T1 can be formed.

  In the production of the first base film 12 in which the first transparent electrode 11 is formed on the front side, for example, the front side of the first base film 12 is sputtered and subsequently a pattern is formed by etching to form the first transparent electrode 11 is formed directly on the front surface of the first base film 12;

  In the production of the fourth substrate film 16 having the second transparent electrode 15 formed on the front surface, for example, the front surface of the fourth substrate film 16 is sputtered and subsequently a pattern is formed by etching to form the second transparent electrode 15 is formed directly on the front of the fourth substrate film 16;

  In order to prepare the capacitance sensor 8, the second base film 18 having the third transparent electrode 17 formed on the front surface, and the third base film 21 having the fourth transparent electrode 20 formed on the front surface, It bonds together through the 3rd pressure-sensitive adhesive layer 19.

  In the production of the second base film 18 having the third transparent electrode 17 formed on the front side, for example, the front side of the second base film 18 is sputtered and subsequently a pattern is formed by etching to form a third transparent electrode. 17 is formed directly on the front surface of the second base film 18;

  In the manufacture of the third base film 21 having the fourth transparent electrode 20 formed on the front side, for example, the front side of the third base film 21 is sputtered and subsequently a pattern is formed by etching to form the fourth transparent electrode 20 are formed directly on the front surface of the third substrate film 21;

  Thereafter, the piezoelectric sensor 7 and the capacitance sensor 8 are attached to each other via the first pressure-sensitive adhesive layer 6.

  The touch sensor 1 obtained in this manner is used, for example, for the touch sensor device 30.

  The touch sensor device 30 includes, for example, the touch sensor 1, the display 2, the cover glass 4, an external device (such as a galvanometer) (not shown), a device (not shown), and a noise filter (not shown). And a controller 24).

  The touch sensor 1 is adhesively fixed to the front side of the display 2 via the fifth pressure-sensitive adhesive layer 3. The cover glass 4 is adhered and fixed to the front side of the capacitance sensor 8 via the sixth pressure-sensitive adhesive layer 5. The materials and thicknesses of the fifth pressure-sensitive adhesive layer 3 and the sixth pressure-sensitive adhesive layer 5 are the same as those exemplified for the second pressure-sensitive adhesive layer 14.

  An external device (not shown) is electrically connected to each of the third transparent electrode 17 and the fourth transparent electrode 20.

  A device (not shown) is electrically connected to the second transparent electrode 15.

  The noise filter is interposed between the second transparent electrode 15 and the device. The noise filter removes (cuts) or reduces noise in the wiring (not shown) between the second transparent electrode 15 and the device.

  The control device 24 is connected to the fourth transparent electrode 20 and the second transparent electrode 15 via the wiring 9. The fourth transparent electrode 20 detecting the coordinates of the touched position in the control device 24 (specifically, the fourth transparent electrode 20 positioned immediately after (immediately behind) the touched position on the cover glass 4) While stopping detection by the second transparent electrode 15 located immediately behind (directly behind) the piezoelectric sensor 7 so as to continue detection by the second transparent electrode 15 located in the vicinity (surrounding) of the second transparent electrode 15 A program for controlling (specifically, the second transparent electrode 15) is stored.

  In the touch sensor device 30, when the cover glass 4 is touched with a finger or a pen of the user, the capacitance of the third transparent electrode 17 and the fourth transparent electrode 20 is changed, and the XY coordinates of the touched position are outside It is detected by a device (not shown).

  At the same time, the touch sensor 1 receives the pressure toward the rear side based on the touch immediately (specifically, for example, 1 millisecond or less, preferably 0.1 millisecond or less, or 0, for example). .01 ms or more), the control based on the program in the control device 24 causes the detection by the second transparent electrode 15 located immediately after the fourth transparent electrode 20 detecting the coordinates of the touched position to be paused While the detection by the second transparent electrode 15 located in the vicinity (surrounding) of the second transparent electrode 15 is continued, the change of the charge amount in the piezoelectric layer 13 is detected by the device (not shown). Ru.

  Thereby, the touch sensor device 30 detects both the XY coordinates of the touched position and the pressure based on the touch.

  Then, in the touch sensor 1, the coordinates of the touched position are detected by the fourth transparent electrode 20.

  In addition, since the pattern of the second transparent electrode 15 is the same pattern as the fourth transparent electrode 20 when projected in the front-rear direction, the second transparent electrode 15 immediately after the fourth transparent electrode 20 performing detection Instead, the pressure of the touch can be accurately detected by the second transparent electrode 15 located in the vicinity thereof. Therefore, the pressure of the touch can be detected with high accuracy while detecting the coordinates of the touched position.

  On the other hand, in the touch panel having a pressure detection function described in Patent Document 1, although the pattern of the capacitance electrode and the pattern of the charge measurement electrode (lower electrode) have the same pitch (total of intervals and widths), There is a big difference in each of the width and spacing. Therefore, as in the touch sensor 1 of the first embodiment, it is not possible to detect the pressure of the touch with high accuracy while detecting the coordinates of the touched position.

  At the same time, since the thickness T1 of the piezoelectric layer 13 is as thin as more than 0.05 μm and less than 20 μm, thinning of the piezoelectric sensor 7 can be achieved, and consequently, thinning of the touch sensor 1 can be achieved.

  As a result, the touch sensor 1 can not only detect the position of the touch, but also can detect the pressing with higher accuracy, and can be thinned.

  Furthermore, in the touch sensor 1, since the second transparent electrode 15 has the same pattern as the first transparent electrode 11 when projected in the front-rear direction, the first transparent electrode 11 and the second transparent electrode 15 provide a touch The pressure can be detected with higher accuracy.

  Further, in the touch sensor 1, since the piezoelectric layer 13 is a coating layer or a sputtering layer, the thickness T 1 of the piezoelectric layer 13 is reliably set to the above-described thin thickness.

  In the touch sensor 1, if the coating layer is a coating layer coated with a fluorine resin, or if the sputtering layer is a sputtering layer sputtering an inorganic compound having a wurtzite structure, the piezoelectric of the piezoelectric layer 13 The characteristics are excellent.

  Further, in the touch sensor 1, the piezoelectric layer 13 which is an application layer having the above-described specific thickness T1 (greater than 0.5 μm and less than 20 μm) is excellent in piezoelectric characteristics. In addition, when the piezoelectric layer 13 is a coating layer made of the above-described polymer, the piezoelectric characteristics are further excellent.

  Further, in the touch sensor 1, the piezoelectric layer 13 which is a sputtering layer having the above-described specific thickness T1 (more than 0.05 μm and 0.5 μm or less) is excellent in piezoelectric characteristics. In addition, when the piezoelectric layer 13 is a sputtering layer made of the above-described inorganic compound, the piezoelectric characteristics are further excellent.

  Further, in the touch sensor 1, the fourth transparent electrode 20 is disposed on the rear side of the second base film 18. Therefore, in the electrostatic capacity sensor 8, the fourth transparent electrode 20 having the same pattern as the patterns of the first transparent electrode 11 and the second transparent electrode 15 is disposed close to the piezoelectric sensor 7, and thus, the capacitive sensor 8 is touched. Both position coordinates and touch pressure can be detected accurately.

  In addition, in the touch sensor 1, if the material of the first base film 12 is at least one of the polymers described above, the first base film 12 is excellent in toughness, and therefore, the piezoelectric sensor 7 can be thinned. The first base film 12 can reliably support the piezoelectric layer 13.

  In the touch sensor 1, if the material of the first transparent electrode 11, the second transparent electrode 15, and the fourth transparent electrode 20 is an indium-containing oxide, the first transparent electrode 11, the second transparent electrode 15, and The surface resistance of the four transparent electrodes 20 can be reduced.

  Further, in the touch sensor 1, since the first transparent electrode 11 is the reference potential electrode, the piezoelectric layer 13 can be shielded from noise from the periphery of the piezoelectric sensor 7.

  In the touch sensor 1, since the first transparent electrode 11 disposed on the front side of the piezoelectric layer 13 is a reference potential electrode, noise caused by the capacitance sensor 8 disposed on the front side of the piezoelectric sensor 7 Thus, the piezoelectric layer 13 can be shielded.

<Modification>
In the following modifications, the same members and steps as those in the first embodiment described above are denoted by the same reference numerals, and the detailed description thereof will be omitted. Further, each modification can exhibit the same function and effect as those of the first embodiment except for the special mention.

  In the first embodiment, as shown in FIG. 1, the fourth transparent electrode 20 has the same pattern as the first transparent electrode 11, but may be substantially the same. That is, the fourth transparent electrode 20 can have a pattern slightly deviated from the first transparent electrode 11.

  Specifically, the fourth transparent electrode 20 can have a first non-overlapping portion that does not overlap with the first transparent electrode 11 when projected in the front-rear direction, and the fourth non-overlapping portion of the first non-overlapping portion The ratio (S1 / S20) to the area S20 of the four transparent electrodes 20 is, for example, 0.1 or less, preferably 0.01 or less, and more preferably 0.001 or less.

  On the other hand, the first transparent electrode 11 can have a second non-overlapping portion not overlapping with the fourth transparent electrode 20 when projected in the front-rear direction, and the first transparent electrode of the area S2 of the second non-overlapping portion The ratio (S2 / S11) of the 11 to the area S11 is, for example, 0.1 or less, preferably 0.01 or less, more preferably 0.001 or less.

  In the first embodiment, as shown in FIG. 1, the piezoelectric layer 13 is in contact with the rear surface of the first base film 12 (formed directly).

  However, although not shown, the piezoelectric layer 13 may be disposed on the rear side of the first base film 12 via a functional layer. That is, the piezoelectric layer 13 may be formed indirectly on the rear surface of the first base film 12.

  As a functional layer, an undercoat layer, a refractive index adjustment layer, an antiblocking layer etc. are mentioned, for example. The undercoat layer (anchor layer) enhances the adhesion between the first base film 12 and the piezoelectric layer 13. The refractive index adjustment layer adjusts the reflectance. The anti blocking layer suppresses the pressure (blocking) of the film on which the touch sensor 1 is stacked. The functional layer may be a single layer or a multilayer formed by laminating different types of layers selected from the above. The thickness of the functional layer is, for example, 10 μm or less, preferably 5 μm or less, and for example, 0.5 μm or more, preferably 1 μm or more.

  In this case, the piezoelectric layer 13 is disposed on the rear surface of the functional layer.

  In this modification, the function can be exerted by the functional layer.

  Further, instead of the functional layer, another pressure-sensitive adhesive layer (an example of the adhesive layer, a pressure-sensitive adhesive layer different from the second pressure-sensitive adhesive layer 14) may be provided between the piezoelectric layer 13 and the first base film 12 Can also be intervened. The material and thickness (for example, more than 1 μm and less than 200 μm) of the pressure sensitive adhesive layer are the same as those exemplified for the second pressure sensitive adhesive layer 14.

  In this modification, the piezoelectric layer 13 can be pressure-sensitively bonded to the second transparent electrode 15 by the pressure-sensitive adhesive layer.

  Furthermore, when the thickness of the pressure-sensitive adhesive layer is as thin as more than 1 μm and less than 200 μm, it is possible to further reduce the thickness of the piezoelectric sensor 7 and to further reduce the thickness of the touch sensor 1.

  As an example of the adhesive layer, instead of the pressure-sensitive adhesive layer, for example, a curable adhesive layer may be used. That is, the uncured adhesive layer does not exhibit adhesiveness yet, and exhibits adhesiveness only when the cured resin composition which is a material of the adhesive layer is cured by heating, irradiation of ultraviolet light or the like.

  In the touch sensor device 30, the fifth pressure-sensitive adhesive layer 3 may be replaced by an air layer. That is, a gap partitioned by the air layer is formed between the piezoelectric sensor 7 and the display 2.

  In the first embodiment, as shown in FIG. 1, the piezoelectric layer 13 contacts the first base film 12 but does not contact the fourth base film 16.

On the other hand, in the modification shown in FIG. 2, the piezoelectric layer 13 does not contact the first base film 12 but contacts the fourth base film 16.
Specifically, the piezoelectric layer 13 contacts the entire front surface of the fourth base film 16. The piezoelectric sensor 7 includes a first transparent electrode 11, a first base film 12, a second pressure-sensitive adhesive layer 14, a piezoelectric layer 13, a fourth base film 16, and a second transparent electrode 15. In order towards the rear. The piezoelectric layer 13 is, for example, a coated layer or a sputtering layer formed by coating or sputtering on the front surface of the fourth base film 16.

  In the modification shown in FIGS. 3 and 4, the piezoelectric sensor 7 further includes a fifth base film 22 and a seventh pressure-sensitive adhesive layer 23. In these variations, the fifth base film 22 and the seventh pressure-sensitive adhesive layer 23 are disposed between the first transparent electrode 11 and the first base film 12.

  In the modification of FIG. 3, the piezoelectric sensor 7 includes the first transparent electrode 11, the fifth base film 22, the seventh pressure-sensitive adhesive layer 23, the first base film 12, and the piezoelectric layer 13. The second pressure-sensitive adhesive layer 14, the second transparent electrode 15, and the fourth base film 16 are provided in order toward the rear side.

  In the modification of FIG. 4, the piezoelectric sensor 7 includes the first transparent electrode 11, the fifth base film 22, the seventh pressure-sensitive adhesive layer 23, the piezoelectric layer 13, and the first base film 12. The second pressure-sensitive adhesive layer 14, the fourth base film 16, and the second transparent electrode 15 are provided in order toward the rear side.

Second Embodiment
In the second embodiment, the same members and steps as those of the first embodiment and the modification described above are denoted by the same reference numerals, and the detailed description thereof will be omitted. In addition, the second embodiment can exhibit the same effects as those of the first embodiment and the modified example, unless otherwise specified.

  In the first embodiment, as shown in FIG. 1, the fourth transparent electrode 20 is an example of the transparent electrode, and when projected in the front-rear direction, the fourth transparent electrode 20 is identical to the first transparent electrode 11 and the second transparent electrode 15. Have a pattern.

  On the other hand, in the second embodiment, as shown in FIG. 5, the third transparent electrode 17 is an example of the transparent electrode, and when projected in the front-rear direction, the first transparent electrode 11 (and the second transparent electrode 15). Have the same pattern as

  On the other hand, the pattern of the fourth transparent electrode 20 deviates from the pattern of the first transparent electrode 11 (and the second transparent electrode 15) when projected in the front-rear direction.

  Further, the control device 24 is connected not to the fourth transparent electrode 20 but to the third transparent electrode 17.

  In the touch sensor 1, the third transparent electrode 17 is disposed on the front side of the second base film 18. That is, the third transparent electrode 17 is positioned on the front side of the first transparent electrode 11 and the second transparent electrode 15 with the second base film 18 therebetween. Therefore, the third transparent electrode 17 is disposed far in front of the first transparent electrode 11 and the second transparent electrode 15. As a result, even if a voltage is applied to the third transparent electrode 17 having the same pattern as the first transparent electrode 11 and the second transparent electrode 15, noise resulting therefrom affects the first transparent electrode 11 and the second transparent electrode 15. The effect (propagating) can be suppressed. As a result, the pressure of the touch can be detected accurately.

<Modification>
In the following modifications, the same members and processes as those of the second embodiment described above are denoted by the same reference numerals, and the detailed description thereof will be omitted. Further, the modification can exhibit the same function and effect as those of the embodiment except for the special mention.

  As shown in FIG. 6, the first transparent electrode 11 can also constitute the shield layer 26 together with the dummy electrode 25 independent of the first transparent electrode 11. The dummy electrode 25 has a substantially inverted pattern of the first transparent electrode 11. The shield layer 26 includes the first transparent electrode 11 and the dummy electrode 25. The dummy electrode 25 is disposed on the front surface of the first base film 12 around the first transparent electrode 11. The dummy electrode 25 has substantially the same pattern as the fourth transparent electrode 20 (specifically, a very small size) when projected in the front-rear direction. Therefore, the dummy electrode 25 is insulated from the first transparent electrode 11 by the minute gap (the first pressure-sensitive adhesive layer 6 filled therein). The shield layer 26 including the first transparent electrode 11 and the dummy electrode 25 described above overlaps the piezoelectric layer 13 when projected in the front-rear direction. The shield layer 26 covers the entire piezoelectric layer 13 when projected in the front-rear direction.

  Therefore, in this modification, the shield layer 26 can block the piezoelectric layer 13 from noise caused by the capacitance sensor 8.

Third Embodiment
In the third embodiment, the same members and steps as those of the first and second embodiments and the modification described above are denoted by the same reference numerals, and the detailed description thereof will be omitted. In addition, the third embodiment can exhibit the same effects as those of the first, second embodiment and the modified example, unless otherwise stated.

  As shown in FIG. 7, in the fourth embodiment, the first transparent electrode 11 doubles as the fourth transparent electrode 20. The first transparent electrode 11 in the fourth embodiment has the same pattern as the fourth transparent electrode 20 in the first embodiment. The first transparent electrode 11 is a signal electrode, and is electrically connected to an external device (such as a galvanometer) not shown.

  On the other hand, the second transparent electrode 15 is a reference potential electrode as in the third embodiment (see FIG. 7), and is grounded via the wiring 9.

  The touch sensor 1 includes a second transparent electrode 15, a first transparent electrode 11 (fourth transparent electrode 20), and a third transparent electrode 17 in this order toward the front side. Specifically, in the touch sensor 1, the fourth base film 16, the second transparent electrode 15, the second pressure-sensitive adhesive layer 14, the piezoelectric layer 13, the first base film 12, and the first transparent electrode 11 (fourth transparent electrode 20), the third pressure-sensitive adhesive layer 19, the second base film 18, and the third transparent electrode 17 are disposed in order.

  And in 4th Embodiment, since the 1st transparent electrode 11 serves as the 4th transparent electrode 20, it is necessary to arrange the 1st transparent electrode 11 and the 4th transparent electrode 20 as two layers on two base films, respectively. There is no Therefore, while being able to simplify a structure, thickness reduction of the touch sensor 1 can be achieved.

<Modification>
In the modification, about the member and process similar to above-mentioned 3rd Embodiment, the same referential mark is attached | subjected and the detailed description is abbreviate | omitted. Further, the modification can exhibit the same function and effect as those of the third embodiment except for the special mention.

  As shown in FIG. 8, the third transparent electrode 17 has the same pattern as the second transparent electrode 15 when projected in the front-rear direction.

  On the other hand, in this modification, the pattern of the fourth transparent electrode 20 (and the first transparent electrode 11) deviates from the pattern of the second transparent electrode 15 when projected in the front-rear direction.

Fourth Embodiment
In the fourth embodiment, the same members and steps as those in the first to third embodiments and the modification described above are denoted by the same reference numerals, and the detailed description thereof will be omitted. In addition, the fourth embodiment can exhibit the same function and effect as those of the first to third embodiments and the modified example, unless otherwise specified.

  As shown in FIG. 9, both the third transparent electrode 17 and the fourth transparent electrode 20 are in contact with the front surface of the second base film 18.

  The capacitance sensor 8 is a self-capacitance detection type or mutual capacitance detection type position sensor. The position sensors of the self-capacitance detection type and the mutual-capacitance detection type are described, for example, in JP-A-2017-049749 and JP-A-2017-037386.

As shown in FIG. 9, the first transparent electrode 11 and the second transparent electrode 15 have substantially the same pattern as the fourth transparent electrode 20 in the self-capacitance detection type capacitance sensor 8 in a plan view. The fourth transparent electrode 20 is electrically connected to the control device 24.
Fifth Embodiment
In 5th Embodiment, about the member and process similar to above-described 1st-4th embodiment and modification, the same referential mark is attached | subjected and the detailed description is abbreviate | omitted. Further, the fifth embodiment can exhibit the same function and effect as those of the first to fourth embodiments and the modified example, unless otherwise stated.

  As shown in FIG. 10, the third transparent electrode 17 and the fourth transparent electrode 20 both contact the front surface of the second base film 18, and the first transparent electrode 11 is a third transparent electrode 17 and a fourth transparent electrode. It has substantially the same pattern as the transparent electrode 20. The second transparent electrode 15 has substantially the same pattern as the third transparent electrode 17 and the fourth transparent electrode 20. The third transparent electrode 17 and the fourth transparent electrode 20 are electrically connected to the control device 24.

<Modification>
In the following modification, about the member and process similar to above-mentioned 5th Embodiment, the same referential mark is attached | subjected and the detailed description is abbreviate | omitted. Further, the modified example can exhibit the same function and effect as those of the fifth embodiment except for the special mention.

  As shown in FIG. 11, the first transparent electrode 11 can also constitute the shield layer 26 together with the dummy electrode 25 independent of the first transparent electrode 11.

<Combination>
Although not shown, the above-described first to fifth embodiments and modifications can be combined as appropriate.

Reference Signs List 1 touch sensor 2 display 7 piezoelectric sensor 8 capacitance sensor 11 first transparent electrode 12 first base film 13 piezoelectric layer 15 second transparent electrode 16 fourth base film 17 third transparent electrode 18 second base film 20 fourth transparent electrode T1 thickness of piezoelectric layer

Claims (15)

A touch sensor disposed on the front side of the display,
A capacitance sensor that detects the coordinates of the touched position;
A piezoelectric sensor disposed on the rear side of the capacitance sensor to detect the pressure of the touch;
The piezoelectric sensor is
A substrate film,
A piezoelectric layer supported by the base film and having a thickness of more than 0.05 μm and less than 20 μm;
A first transparent electrode disposed on the front side of the base film and the piezoelectric layer;
The substrate film and a second transparent electrode disposed on the rear side of the piezoelectric layer;
The capacitance sensor is
A second substrate film,
And a transparent electrode supported by the second substrate film,
A touch sensor, wherein a pattern of the first transparent electrode or the second transparent electrode is substantially the same as a pattern of the transparent electrode when projected in the front-rear direction.   The touch sensor according to claim 1, wherein the pattern of the second transparent electrode is substantially the same as the pattern of the first transparent electrode when projected in the front-rear direction.   The touch sensor according to claim 1, wherein the piezoelectric layer is a coating layer or a sputtering layer. The coating layer is a coating layer coated with a fluorine resin,
The touch sensor according to claim 3, wherein the sputtering layer is a sputtering layer formed by sputtering an inorganic compound having a wurtzite structure. The piezoelectric layer is the coated layer having a thickness of more than 0.5 μm and less than 20 μm,
The touch sensor according to claim 4, wherein the fluorine resin is a polymer formed by polymerizing at least one monomer selected from the group consisting of vinylidene fluoride, tetrafluoroethylene and chlorotrifluoroethylene. . The piezoelectric layer is a sputtering layer having a thickness of more than 0.05 μm and 0.5 μm or less,
The touch sensor according to claim 4, wherein the inorganic compound comprises at least one selected from the group consisting of ZnO, ZnS, ZnSe, ZnTe, AlN, GaN, CdSe, CdTe, and SiC.   The touch sensor according to any one of claims 1 to 6, wherein the transparent electrode is a third transparent electrode disposed on the front side of the second base film.   The touch sensor according to any one of claims 1 to 6, wherein the transparent electrode is a fourth transparent electrode disposed on the rear side of the second base film.   The touch sensor according to any one of claims 1 to 8, wherein the transparent electrode is shared by the first transparent electrode.   The material of the substrate film is at least one selected from the group consisting of polyethylene terephthalate, polyethylene naphthalate, polyolefin, polycycloolefin, polycarbonate, polyethersulfone, polyarylate, polyimide, polyamide, polystyrene and polynorbonene The touch sensor according to any one of claims 1 to 9, characterized by   The touch sensor according to any one of claims 1 to 10, wherein materials of the first transparent electrode, the second transparent electrode, and the transparent electrode are indium-containing oxides.   The touch sensor according to any one of claims 1 to 11, further comprising an adhesive layer in contact with the piezoelectric layer.   The touch sensor according to claim 12, wherein a thickness of the adhesive layer is more than 1 μm and less than 200 μm. The piezoelectric sensor is
The method according to claim 1, further comprising at least one functional layer formed directly on the front surface or the rear surface of the substrate film and selected from the group consisting of an undercoat layer, a refractive index adjustment layer, and an antiblocking layer. The touch sensor according to any one of 13. The touch sensor according to any one of claims 1 to 14, wherein any one of the first transparent electrode and the second transparent electrode is a reference potential electrode.