JP2019061920A - ヒータ - Google Patents
ヒータ Download PDFInfo
- Publication number
- JP2019061920A JP2019061920A JP2017187556A JP2017187556A JP2019061920A JP 2019061920 A JP2019061920 A JP 2019061920A JP 2017187556 A JP2017187556 A JP 2017187556A JP 2017187556 A JP2017187556 A JP 2017187556A JP 2019061920 A JP2019061920 A JP 2019061920A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic body
- metal cylinder
- heater
- heating resistor
- conductive member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 66
- 229910052751 metal Inorganic materials 0.000 claims abstract description 39
- 239000002184 metal Substances 0.000 claims abstract description 39
- 230000002093 peripheral effect Effects 0.000 claims abstract description 6
- 238000010438 heat treatment Methods 0.000 claims description 33
- 230000020169 heat generation Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 abstract 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 16
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 16
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Images
Landscapes
- Resistance Heating (AREA)
Abstract
Description
りに窒化硼素を4〜12質量%添加することもできる。発熱抵抗体3は全長を3〜15mm、断面積を0.15〜0.8mm2に設定することができる。
2:セラミック体
3:発熱抵抗体
31:引出部
4:金属筒
5:導電性部材
Claims (3)
- 棒状のセラミック体と、該セラミック体の内部に位置しており前記セラミック体の外周面に引き出された発熱抵抗体と、前記発熱抵抗体のうち引き出された部分を覆うように前記セラミック体に嵌め合わされるとともに前記発熱抵抗体に電気的に接続される金属筒とを有しており、
前記引き出された部分を通り前記セラミック体の軸方向に対して垂直な断面を見たときに、前記金属筒の内周の形状が円形状であるとともに、前記セラミック体が前記金属筒の内周に接しているとともに、前記引き出された部分と前記金属筒との間に導電性部材が設けられていることを特徴とするヒータ。 - 前記断面を見たときに、前記引き出された部分が直線状であることを特徴とする請求項1に記載のヒータ。
- 引き出された部分と前記セラミック体との間に隙間があるとともに、前記隙間に前記導電性部材が入り込んでいることを特徴とする請求項1または請求項2に記載のヒータ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017187556A JP6952395B2 (ja) | 2017-09-28 | 2017-09-28 | ヒータ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017187556A JP6952395B2 (ja) | 2017-09-28 | 2017-09-28 | ヒータ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019061920A true JP2019061920A (ja) | 2019-04-18 |
JP6952395B2 JP6952395B2 (ja) | 2021-10-20 |
Family
ID=66177521
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017187556A Active JP6952395B2 (ja) | 2017-09-28 | 2017-09-28 | ヒータ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6952395B2 (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6222911A (ja) * | 1985-07-22 | 1987-01-31 | Ngk Spark Plug Co Ltd | セラミツクグロ−プラグ |
JPH0220293U (ja) * | 1988-07-26 | 1990-02-09 |
-
2017
- 2017-09-28 JP JP2017187556A patent/JP6952395B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6222911A (ja) * | 1985-07-22 | 1987-01-31 | Ngk Spark Plug Co Ltd | セラミツクグロ−プラグ |
JPH0220293U (ja) * | 1988-07-26 | 1990-02-09 |
Also Published As
Publication number | Publication date |
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JP6952395B2 (ja) | 2021-10-20 |
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