JP2019060667A - Three-dimensional capacitive touch sensor - Google Patents

Abstract

To detect three-dimensional force sense or three-dimensional pressure or displacement by using capacity detection means because there has been need by now to wire electrodes from both an electrode of a movable part connected with a sensor probe and an electrode of a fixed substrate, which results in many limitations and high performance cannot be achieved.SOLUTION: In the present invention, a sensor detects three-dimensional force sense or three-dimensional pressure or displacement by using capacity detection means. A floating electrode not requiring taking out an electrode is used for a movable plate connected with a sensor probe. Series capacity of capacities between a plurality of electrodes disposed on a fixed substrate and the floating electrode is read out by a measuring circuit connected with a fixed electrode. A sensing system achieves design with high degree of freedom and measurement with high accuracy by the floating electrode not having an electrical connection mechanism.SELECTED DRAWING: Figure 1

Description

The present invention aims to realize various measurement solutions by realizing a small-sized, low-cost, high-precision capacitive touch sensor that detects three-dimensional pressure, displacement, and position.

Heretofore, there have been high-precision but expensive force sensors used in robots and machine tools, and inexpensive three-dimensional touch sensors used as input devices for computers that do not require precision.

In addition, there are sensors that require high-level machining, sensors using MEMS technology, and more recently, sensors using film, but film-based capacitive sensors have low initial development costs. It is a promising technology area and application area because it is thin and can be used for various applications.

In addition, a sensor using a film or thin substrate can be mounted on a printed circuit board on which an electronic circuit is mounted, or a film substrate that bends freely, so that it can be applied inexpensively to various applications, and these capacitive three-dimensional sensors Pressure, displacement, and position sensors are extremely important industrially as they also serve as a platform for measuring other physical quantities such as flow rate, wind speed, wind direction, particles, and environment.

In the electrostatic capacitance type three-axis acceleration sensor disclosed in the prior art document 1, the fixed plate and the flexible plate to which the weight is fixed are opposed to each other and fixed to the case body, and the fixed plate and the flexible plate are opposed to each other. When the fixed electrode and the displacement electrode are provided on the surface and the fixed plate rigidity is high and it is made of a material which is hardly bent and acceleration is applied from the outside, the flexible plate changes the distance between the fixed electrode and the displacement electrode. The capacitance value between the electrodes also changes, and the change in the capacitance value can be detected in the X axis direction, the Y axis direction, and the Z axis direction to detect the acceleration.

In the electrostatic capacitance type three-axis acceleration sensor disclosed in the prior art document 2, an intermediate displacement plate made of a metal plate is disposed on a printed circuit board having a plurality of electrode patterns, and a strain generating body made of silicon rubber is formed thereon. And the elastic deformation portion is elastically deformed and squeezed by application of force sense, and the capacitance value of the capacitive element formed by the electrode and the intermediate displacement plate changes according to how the intermediate displacement plate is pushed down. By detecting this change, it is possible to detect three-dimensional axial components of the applied force.

Furthermore, as a prior art of a capacitive type three-dimensional pressure, displacement, and position sensor, in the publication "Capacitive touch sensor" disclosed in Patent Document 3, an elastic polymer substrate and an air gap supported by a side wall There is also disclosed a method in which there are two electrodes sandwiched in the air gap, and for the wiring of the upper electrode, an oblique evaporation method is used to take out the electrode using the wall of the side wall. It is necessary to use a special apparatus called oblique deposition method which is used for wiring, and the structure becomes complicated, which causes an increase in cost.

As another capacitive type prior art, in the publication disclosed in Patent Document 4, a conductive elastomer having elasticity and conductivity is used as a counter movable electrode, and the movable electrode is taken out, and a plurality of fixed electrodes are used. By detecting the capacitance of the electrode, a configuration is shown in which the pressure in the longitudinal direction and the shear component in the lateral direction are detected.

As another capacitance type prior art, in the publication disclosed in Patent Document 5, a conductive elastomer which is elastic and conductive is used as a counter movable electrode, and the movable electrode is taken out, and a plurality of fixed electrodes are used. By detecting the capacitance of the electrode, a configuration is shown in which the pressure in the longitudinal direction and the shear component in the lateral direction are detected.

In the publication disclosed in Patent Document 5, in order to use a conductive elastomer which is elastic and conductive as the opposing movable electrode, it is measured by the shape of this special material, Young's modulus, Poisson's ratio, further conductivity, etc. Because the relationship between pressure and strain has changed, it has been necessary to prepare many shapes of conductive elastomer.

In the publication disclosed in Patent Document 6, a movable electrode made of a conductive material is provided on the surface side of a resin film substrate, and the movable electrode has a displacement portion that is displaced by pressing and a fixing portion that is adhesively fixed to the surface of the resin film substrate. The fixed portion is electrically connected to the extraction electrode, and the tip of the protrusion contacts or adheres to the surface of the resin film substrate in the initial state in the transition portion, and the capacitance detection electrode faces the transition portion. It is characterized in that it is disposed and electrically connected to a lead-out electrode provided on the resin film substrate.

Patent Document 1: JP-A-4-148833 "Force sensor" JP, 2001-165790, A "force detection sensor" Patent Document 1: Japanese Patent Application Laid-Open No. 5-288619 "Capacitive touch sensor" Patent Document 1: JP-A-2001-91382 "Capacitance sensor" JP, 2010-8343, "force sensor and its assembling method" JP, 2011-159599, "Input device"

A conventional capacitive three-dimensional pressure, displacement, position sensor is a sensor called a force sensor or a tactile sensor as described in the prior patent document, and is a method of measuring a pair of electrode capacitances. One of them is fixed, and the other is the position of the electrode changes due to displacement or strain, and the capacitance of the pair of electrodes is measured.

In particular, since movable electrodes need to be electrically conductive and be plastic or elastic, in Patent Documents 4 to 6, a conductive elastomer is used as the electrode material.

These force sensors or tactile sensors separate vertical displacement (or pressure) or horizontal two-dimensional displacement (or pressure) with respect to the horizontal direction of the sensor by combining a plurality of electrodes. Although measurement can be performed, in many cases, it was not possible to clearly separate them due to the presence of longitudinal and transverse (shearing direction) coupling components resulting from the structure.

Also, in the prior art documents 4 to 6, in order to use the conductive elastomer, it is necessary to optimize the mechanical and electrical properties and shape of this material, and the initial investment for development has been large.

The problem to be shared by these prior patent documents is the problem in processing and assembling the movable electrode, that is, two functions of mechanically transmitting external three-dimensional displacement and pressure and electrically connecting to the substrate circuit. It was necessary to realize it.

These mechanical and electrical transmissions are often contradictory, and mechanical bonding is inherent, that is, electrical conductivity is also low if the force constant is small, and vice versa mechanically That is, when the force constant is large, the conductivity is also high electrically.

In order to expand to practical and flexible specifications and applications, it is important to set the mechanical coupling condition and the electrical coupling condition, which are in a reciprocal relationship, independently, so in the present invention, three-dimensional displacement is By electrically insulating the movable electrode to be reflected as a floating electrode, various problems can be solved, and a configuration is devised in which accurate displacement detection can be performed even with the floating electrode.

As in the basic configuration shown in FIG. 1, in this configuration, the common electrode Ec, the first electrode E1, the second electrode E2, and the third electrode E3 are disposed on the fixed substrate 2 concerned, and an air layer or A floating electrode Ef is provided on the parallel movable plate 3 with the dielectric layer 6 interposed therebetween, and the floating electrode is not electrically connected by a wire or the like.

In this sensor configuration, the plurality of fixed electrodes are fixed to the circuit board 2, and the movable portion 3 is physically connected to the sensor probe 5, which is an object to be measured, and displacement of the probe or The pressure is detected as displacement.

The electrical equivalent circuit of this sensor configuration shown in FIG. 2 has a capacitance Cfc between the common electrode Ec and the floating electrode Ef, a capacitance Cf1 between the first electrode E1 and the floating electrode Ef, and a second electrode E2 There is a capacitance Cf2 between the floating electrodes Ef and a capacitance Cf3 between the third electrode E3 and the floating electrodes Ef.

Here, the actual measurement is performed using the capacitance C1 between the common electrode Ec and the first electrode E1, the capacitance C2 between the common electrode Ec and the second electrode E2, and the capacitance between the common electrode Ec and the third electrode E3. Although the displacement of the sensor probe 5 is measured by measuring C3, Cfc and Cf1, Cfc and Cf2, and Cfc and Cf3 are all in series, for example, C1 is calculated by Equation 1.

Here, as shown in FIG. 1, the area of the common electrode is Sc, the area of the first electrode is S1, the area of the second electrode is the product of the width W and the length D + d, and the third electrode Assuming that the product of the width W and the length D-d and the distance of the air or dielectric gap is T + t displaced in the direction perpendicular to T, the dielectric constant ε0 of the vacuum and the dielectric constant εr of the dielectric For example, C1 is represented by Equation 2 and C2 is represented by Equation 3.

Here, calculation of the actually measured capacitance using these equations is extremely complicated, but when the area of the common electrode is larger than other areas and when d is smaller than D, t is As small as compared with T, C1 is approximated to equation 4 and C2 is approximated to equation 5 as an approximation equation.

As a result, it is possible to estimate t / T, which is the displacement rate of the movable portion 3 in the vertical direction, by measuring C1, and to estimate d / D, which is the displacement rate of the movable portion 3 in the horizontal direction, by measuring C2 and C3.

The greatest feature of the present invention is that the floating electrode Cf does not require any electrode wiring for applying a potential, thereby extremely displacing the probe and sensing the force without being subject to mechanical and physical limitations. The point is that it can be accurately transmitted to the movable electrode and its displacement can be measured.

The block diagram of the Example (Example 1) of this invention, and the basic composition of a sensor module are shown. The electrical equivalent circuit of the sensor module of Example 1 is shown. 2 shows a measurement electronic circuit of the configuration of Example 1; 2 shows drive electronics of the configuration of Example 1; The block diagram of Example 2, the cross section of a sensor module is shown. The block diagram of Example 3, and the cross section of a sensor module are shown. The block diagram of Example 4, and the cross section of a sensor module are shown. The block diagram of Example 5, and the cross section of a sensor module are shown. The block diagram of Example 6, and the cross section of a sensor module are shown. 17 shows a measurement electronic circuit of the configuration of Example 7;

FIG. 1 is a basic configuration diagram of the present invention, and a sensor module 1 includes a fixed substrate 2 having a plurality of electrodes, a movable plate 3 having a sensor probe 5 for capturing displacement and force and a floating electrode Ef, and a movable plate. An elastic layer 4 acting as a spring for returning the 3 to a predetermined position in an equilibrium state, an air layer or dielectric layer 6 having a thickness T between the fixed substrate 2 having a plurality of electrodes and the floating electrode Ef It is configured.

A common electrode Ec is disposed on the fixed substrate 2, and a common electrode-floating electrode capacitance Cfc formed of an air layer or dielectric layer 6 sandwiched between the common electrode Ec and the floating electrode Ef is formed. A first electrode E1 for detecting the amount of change t of the displacement of the fixed substrate 2 in the vertical direction is disposed on the first electrode E1.

A first electrode-floating electrode capacitance Cf1 formed of an air layer or dielectric layer 6 sandwiched between the first electrode E1 and the floating electrode Ef is formed, and the fixed substrate 2 also has a parallel direction with the fixed substrate 2 Between the second electrode and the floating electrode, which is formed of an air layer or dielectric layer 6 sandwiched between the second electrode E2 and the floating electrode Ef. A capacitance Cf2 is formed, and a third electrode E3 for detecting the reverse change -d of the displacement in the parallel direction to the fixed substrate 2 is disposed on the fixed substrate 2 as well, and the third electrode E3 and the floating electrode Ef are disposed. A third electrode-floating electrode capacitance Cf3 composed of an air layer or dielectric layer 6 sandwiched between the two is formed.

Here, for example, as shown in FIG. 1, it is desirable that the floating electrode Ef centered on the sensor probe 5 located at the center, the common electrode E1 be on a disc, and the second electrode E2 and the third electrode E3 be The separation pattern 13 of the electrode needs to be provided in part according to the characteristics of the direction of the displacement, which is in the shape of a disk centered on the sensor probe 5.

The equivalent circuit of this first embodiment is extremely simple as shown in FIG. 2, and the change amount t of the displacement in the vertical direction of the common electrode Ec and the fixed substrate 2 from which signals can be taken out by an external electronic circuit is obtained. The first electrode E1 for detection, the second electrode E2 for detecting the change amount d of the displacement in the parallel direction with the fixed substrate 2, the reverse change amount -d of the displacement in the parallel direction with the fixed substrate 2 The capacitance between the common electrode and the floating electrode is constituted by an air layer or dielectric layer 6 sandwiched between the common electrode Ec and the floating electrode Ef. A first electrode-floating electrode capacitance Cf1 formed of an air layer or dielectric layer 6 sandwiched between the first electrode E1 and the floating electrode Ef, an air layer or dielectric sandwiched between the second electrode E2 and the floating electrode Ef The second electrode-floating electrode capacitance Cf2 composed of the body layer 6, and further, the third electrode E3 and the floating electrode Ef A third electrode-floating electrode capacitance Cf3 composed of the sandwiched air layer or dielectric layer 6 is shown.

The measurement detection circuit of the sensor module 1 having the equivalent circuit shown in FIG. 2 is, as shown in FIG. 3, a circuit connected to the terminal of each electrode from the common electrode Ec and the first electrode E1, here Up to five electrodes E5 are shown, and a change in capacitance between terminals is detected to detect a change in the Y-direction (direction connecting the second and third electrodes), X direction (direction connecting the fourth and fifth electrodes), It is possible to detect a change in displacement in the Z direction (the direction perpendicular to the fixed substrate 2).

Methods of capacitance detection include a method of measuring the resonance frequency of the resonance circuit generated by the capacitance and the known inductance of the coil as in the Hartley oscillator, and a method of using a circuit called charge amplifier to convert an amount of charge into voltage. Here, an impedance measurement circuit using an AC voltage capable of detecting a minute capacity with extremely high accuracy is used.

An alternating voltage having a specific frequency is applied to the common electrode Ec in FIG. 3, but if the capacitance between the terminals is small, the frequency or the applied amplitude is increased.

The first electrode E1 to the fifth electrode E5, which are other electrodes, connect necessary load resistances and detect a signal between terminals of this additional resistance, but the load resistance may be either a resistance or a capacitance It may be good, or it may have a specific impedance mixed of resistance and capacitance.

In the example of FIG. 3, in order to detect the displacement in the Y direction, the difference between the signals generated in the load resistances of the second and third electrodes is detected, and in order to detect the displacement in the X direction, the fourth and fifth electrodes are detected. The method of detecting the difference between the signals generated in the load resistances of the electrodes and detecting the signals generated in the load resistances of the first electrode in the Z direction by the differential amplifiers Q2 to Q3 and the buffer amplifier Q1 is illustrated.

An example of a circuit that generates an AC voltage to be applied to the common electrode Ec generally uses a Wien bridge circuit, but as shown in FIG. 4, a square wave P1 generated by a microcomputer or timer and Q5 are used. A method of generating a sine wave using the used band pass filter and creating an AC voltage of a specific frequency using the current drive circuit of Q6 is shown.

Here, the rectangular wave P1 is integrated by the pre-stage circuits R2 and C1 of Q4, formed into a sine wave by the feedback band pass filter using Q5, and after the offset voltage V1 is superimposed by the resistors R7 and R8, Q6 When a current determined by the emitter resistance of R12 flows to R10 in the current drive circuit, an alternating voltage is generated at both ends of R10, and this terminal voltage is applied to the common electrode Ec.

FIG. 1 is a block diagram of an embodiment (first embodiment) of the present invention, and a sensor module 1 is a fixed substrate 2 having a plurality of electrodes, and a movable sensor having a sensor probe 5 for detecting displacement and force and a floating electrode Ef. A plate 3, an elastic body 4 serving as a spring for returning the movable plate 3 to a predetermined position during equilibrium, an air layer or a dielectric having a thickness T between the fixed substrate 2 having a plurality of electrodes and the floating electrode Ef The body layer 6 is configured.

A common electrode Ec is disposed on the fixed substrate 2, and a common electrode-floating electrode capacitance Cfc formed of an air layer or dielectric layer 6 sandwiched between the common electrode Ec and the floating electrode Ef is formed. A first electrode E1 for detecting the amount of change t in the vertical direction of the fixed substrate 2 is disposed on the first electrode E1, and the first electrode E1 and an air layer or dielectric layer 6 sandwiched between the floating electrodes Ef are provided. The first electrode-floating electrode capacitance Cf1 is formed, and the second electrode E2 for detecting the amount of change d of the displacement in the parallel direction to the fixed substrate 2 is disposed on the fixed substrate 2 as well. A second electrode-floating electrode capacitance Cf2 formed of an air layer or dielectric layer 6 sandwiched between the electrode E2 and the floating electrode Ef is formed, and the fixed substrate 2 is similarly displaced in a direction parallel to the fixed substrate 2 A third electrode E3 for detecting the reverse change amount -d is disposed, and the third electrode E3 and the floating electrode Ef are provided. A third electrode-floating electrode capacitance Cf3 composed of the sandwiched air layer or dielectric layer 6 is formed.

In FIG. 1, the cross section of the first configuration diagram in the upper stage, the plan view of the floating electrode Ef in the middle stage, and the electrode in the lower stage, that is, the first electrode E1 has a disc shape in the innermost to detect displacement. The common electrode Ec has a disk shape on the outer side, the second to fifth electrodes have a shape obtained by dividing the circular plate on the outer side of the common electrode Ec into four.

In the first embodiment, the invention is applied to the equivalent circuit of the sensor module shown in FIG. 2, the method of measurement shown in FIG. 3, and the method of generating the applied voltage to the common electrode Ec shown in FIG. It is the same as the description shown in the form.

From the measured signal shown in FIG. 3, the change in displacement in the Z direction is measured based on Eq. 4 by the capacitance measured from the first electrode according to Eq. 4 and Eq. 5, and the second electrode and the second The change in displacement in the Y direction is measured based on equation 5 by the difference in capacitance measured from the three electrodes, and the displacement in the X direction from the difference in capacitance measured from the fourth electrode and the fifth electrode in the same manner. Measure the change of

In the second embodiment shown in FIG. 5, the sensor module 1 fixes the fixed substrate 2 having a plurality of electrodes, and the movable plate 3 and the movable plate 3 having the sensor probe 5 for capturing displacement and force and the floating electrode Ef. The elastic body 4 acting as a spring for returning to the initial position in the X direction and the Y direction, the movable plate 3 is returned to the initial position in the vertical direction or the Z direction of the fixed substrate 2 Furthermore, the capacitance between the fixed substrate 2 having a plurality of electrodes and the floating electrode Ef is formed by the dielectric layer 7 made of an elastic material of thickness T.

In the first embodiment shown in FIG. 1, the function of the spring acting as a spring for returning the movable plate to the initial position when there is no displacement or probe on the probe is constituted between the fixed support 9 and the sensor probe 5 If the force sense applied to the probe 5 deviates from the center, the movable plate 3 receives asymmetric displacement.

For this reason, in the second embodiment shown in FIG. 5, separately from the elastic body 4 serving as a spring for returning the movable plate 3 to the initial position in the horizontal direction or the X direction and the Y direction with the fixed substrate, The spring for returning the movable plate 3 to the initial position in the vertical direction or Z direction of the fixed substrate 2 is also used as a dielectric that forms a capacitance between the fixed substrate 2 having a plurality of electrodes and the floating electrode Ef. Play a role in the dielectric layer 7 composed of an elastic body of thickness T.

Since the dielectric layer 7 made of this elastic body is plate-like, the movable plate 3 is uniform and symmetrical in the X and Y directions even when the force sense applied to the probe 5 deviates from the center. And the accuracy of measurement increases.

In the third embodiment shown in FIG. 6, in the first embodiment, the fixed support 9 is fixed to the fixed substrate 2 by means of a nut or the like, and between the fixed support 9 and the sensor probe 5, X, This is an example in which the elastic body 4 is disposed which can return to the initial value when there is no displacement or force sense in any of the Y and Z directions.

In the third embodiment, the movable plate 3 and the sensor probe 5 are configured so as to be slippery so that the movable plate 3 does not adhere to the sensor probe 5 and can freely follow the displacement of the sensor probe 5 in the left and right or XY directions. Make it

In this embodiment, although the displacement in the Z direction can not be measured, the first electrode E1 that measures the displacement in the Z direction when the movable plate 3 is deformed in the Z direction due to the friction between the movable plate 3 and the sensor probe 5 is used. By configuring, correction in the Z direction becomes possible.

In the fourth embodiment shown in FIG. 7, in the first embodiment, the fixed support 9 is fixed to the fixed substrate 2 using a nut or the like, and X, In this example, a spring 10 is disposed which can return to the initial value when there is no displacement or force sense in any of the Y and Z directions.

The spring 10 may be formed by spirally winding a high rigidity wire such as a piano wire, or the radius may be gradually expanded along the center line in the horizontal direction (in the X and Y directions) like a spring spring. May be rolled around.

The spring is fixed at its both ends to the fixed support 9 and the sensor probe 5. In this example, the sensor probe 5 and the movable plate 3 are fixed by the adhesive 8, and the movable plate in the left or right or XY direction is further fixed. In order to maintain the balance of 3, the spring for returning the movable plate 3 to the initial position in the vertical direction or Z direction of the fixed substrate 2 is used to set the capacitance between the fixed substrate 2 having a plurality of electrodes and the floating electrode Ef. In this configuration, a dielectric layer 7 made of an elastic material of thickness T, which also serves as a dielectric to be formed, is added.

In the fifth embodiment shown in FIG. 8, the first electrode E1 used for measuring the displacement of the fixed substrate 2 in the vertical direction or Z direction in the fourth embodiment is omitted. An example is described in which the movable plate 3 is specialized for detecting displacement and force sense in the horizontal direction or in the X and Y directions of the fixed substrate 2.

In the sixth embodiment shown in FIG. 9, external noise or electric field is applied to the upper surface of the movable plate provided with the floating electrode except for the sensor probe of the sensor module 1 and the lower portion of the fixed substrate 2 provided with a plurality of fixed electrodes. And ground electrode 12 at the top and ground electrode 11 at the bottom to suppress instability due to the antenna effect of electromagnetic waves, other metals and human body, and by connecting this ground electrode to the fixed potential of the circuit system, it is stable It was made strong against noise.

The seventh embodiment shown in FIG. 10 is an example of a signal processing circuit, and in the first embodiment of FIG. 3, when there is an unintended parasitic capacitance or parasitic resistance in the sensor capacitance Cfc or Cf1, etc. There is a case where the phase information is put on the terminal signal of the load resistor and the correct amplitude information can not be obtained.

For this reason, as shown in FIG. 10, rms conversion circuits B1 and B2 which take out the mean square root value by performing full-wave rectification after amplifying the signal of the load resistance of each terminal once by non-inverting amplifiers Q7, Q8 and Q10. , B3 to obtain a value proportional to the amplitude information, and comparing this with a differential amplifier configured with Q9 makes a correct measurement.

Specifically, when performing quantitative estimation in the case of implementation using the first embodiment, the size of the sensor probe is between 1 mm and 10 mm, considering ease of processing and practical application to an industrial application. As the size of the sensor system itself, the diameter of the movable plate or the floating electrode is about 5 mm to 50 mm, and the gap distance is suitably 1 micrometer to 1 mm.

Here, as a typical value when the diameter of the movable plate or the floating electrode is 20 mm, if the outer diameter (diameter) of the common electrode Ec is 15 mm and the inner diameter is 10 mm, the area becomes 98.1 mm square and the ratio In the case of air having a dielectric constant of 1 and a gap distance of 10 micrometers, or for a polymer having a dielectric constant of 4, for example, 40 micrometers, the capacity with the floating electrode is 86.8 pF when calculated as a hollow circle.

Assuming that the size of the first electrode disposed on the inner side is 8.3 mm in outer diameter (diameter) and 5 mm in inner diameter, 30.5 pF under the same conditions, and further, the second and third electrodes have outer diameters (diameter ) Is divided into four, and the capacity of one electrode and the floating electrode is 20.4 pF, and the overlap is 50%, when the overlap with the floating electrode is maximized. It will be 10.2 pF.

When this value is used, the measurement capacitance of the first electrode is 22.5 pF because it is connected in series with the capacitance configured with the common electrode Ec according to Equation 1, and the average of 9.03 pF for the second and third electrodes is The maximum is 16.5 pF.

At a frequency of 10 kHz, the measured impedance of the first electrode is 71 kΩ, and the second and third electrodes have an average of 96 kΩ and a maximum of 176 kΩ at the frequency of 10 kHz.

From these, the load resistance is desirably about 1 kΩ to 100 kΩ, and the drive frequency is about 10 kHz to 1 MHz in consideration of the size of the sensor module, the size of the movable plate, the gap distance with the floating electrode, and the setting of the relative permittivity of the material. It is desirable to determine this range below.

1 sensor module 2 fixed substrate 3 movable plate 4 elastic body 5 sensor probe 6 dielectric layer
Ec common electrode
E1 first electrode
E2 second electrode
E3 third electrode
E4 fourth electrode
E5 fifth electrode
Ef floating electrode
Cfc common electrode-floating electrode capacitance
Cf1 Common electrode-first interelectrode capacitance
Cf2 Common electrode-second electrode capacitance
Cf3 Common electrode-third electrode capacitance
Cf4 Capacity between common electrode and fourth electrode
Cf5 Common electrode-fifth electrode capacitance 7 Dielectric layer 8 composed of elastic body 8 Adhesive layer 9 Fixing support 10 Spring 11 Lower GND layer 12 Upper GND layer 13 Electrode separation pattern 14 Central positioning portion

Claims (7)

    A sensor probe for detecting displacement due to force sense or pressure in two or more directions among three dimensions, and an elastic body serving as a spring for determining an initial position when there is no force sense or pressure in the sensor probe. It has a fixed substrate with a plurality of fixed electrodes which are inserted between the body and the sensor probe and which are connected to a movable plate provided with a floating electrode for transmitting its displacement, and which are arranged parallel to the movable plate The fixed substrate is provided with a common electrode, and a fixed electrode for detecting displacement in at least two directions of displacement in at least three-dimensional directions, and is provided with a movable plate provided with a floating electrode and a fixed electrode. A force / pressure / displacement sensor module comprising an air layer or a dielectric layer between fixed substrates.     The fixed electrode disposed on the fixed substrate and the floating electrode formed on the movable plate are on a disc radially disposed from the center position of the sensor probe, and the fixed electrode is in a direction perpendicular to the common electrode and the fixed substrate Total of six electrodes: one for detecting the displacement of the sensor, four electrodes for one pair of electrodes for detecting the direction parallel to the fixed substrate, or two pairs of electrodes for detecting two directions parallel to the fixed substrate and perpendicular to each other A sensor of force sense, pressure and displacement, characterized by comprising an air layer or a dielectric layer between a movable plate provided with a floating electrode and a fixed substrate provided with a fixed electrode; module.    The sensor probe and the fixed support are provided with an elastic body for determining the position of the equilibrium of radial displacement from the fixed support to the movable plate, and the position of the equilibrium to the vertical direction of the movable plate is determined The force having the structure according to claim 1 or 2, wherein the elastic body is replaced by an elastic dielectric inserted between the movable plate and the fixed substrate to improve the balance of vertical displacement in addition to the movable plate. Sensor module for perception, pressure and displacement.   The fixed support that determines the center point of the sensor probe is positioned or fixed to the fixed substrate using a nut, an adhesive, or the like, an elastic body is inserted between the sensor probe and the fixed support, and the displacement to the sensor probe The equilibrium state is determined when there is no force sense, and the fixed substrate has a common electrode, and at least a pair of fixed electrodes that detect changes in capacitance when the movable plate moves in a direction parallel to the fixed substrate. The probe is a mechanical sensor for force, pressure, and displacement that enables detection of displacement only in the radial direction of the movable plate by mechanically separating it from the movable plate with the floating electrode. Instability due to external noise, electric field, electromagnetic waves, other metals or human body antenna effect on the upper surface of the movable plate which provides floating electrodes except for the sensor probe of the sensor module and the lower part of the fixed substrate provided with a plurality of fixed electrodes. 5. The sensor module of force sense, pressure and displacement according to claim 1, further comprising: a ground electrode for suppressing the pressure sensor, said ground electrode being connected to a fixed potential of the circuit system. A signal generation circuit that generates an AC voltage having an appropriate frequency is connected to the floating electrode provided on the movable portion and the common electrode disposed on the fixed substrate, and the plurality of detection electrodes are connected to the individual load resistors, Each detection electrode is connected to an amplifier circuit with high input impedance with amplification function, and its output is connected to an rms converter circuit that performs full-wave rectification and is proportional to the value of the mean square root, and the difference as necessary The force sense, pressure, and displacement sensor system according to any one of claims 1 to 5, wherein a three-dimensional displacement is detected using a motion amplifier or the like. The diameter of the sensor probe is in the range of 1 mm to 10 mm, the diameter of the movable plate or floating electrode is in the range of 5 mm to 50 mm, and the gap between the movable plate or floating electrode and the fixed electrode is 1 micrometer to 1 mm The sensor module for force sense, pressure and displacement according to any one of claims 1 to 5, which is in the range of