JP2019052999A - Angular velocity detection device, inertial measurement device, mobile body positioning device, portable electronic device, electronic device, and mobile body - Google Patents

Abstract

To provide an angular velocity detector that can increase the stability of detection of an angular velocity.SOLUTION: The angular velocity detector includes: an angular velocity detecting element; a first integrated circuit chip for controlling the operation of the angular velocity detecting element; and a second integrated circuit chip for generating a bias voltage to apply to the angular velocity detecting element, the first and second integrated circuit chips being separate chips.SELECTED DRAWING: Figure 3

Description

  The present invention relates to an angular velocity detection device, an inertial measurement device, a mobile body positioning device, a portable electronic device, an electronic device, and a mobile body.

  In recent years, a capacitance-type angular velocity detection that detects an angular velocity by utilizing the change in the capacitance value of the capacitance generated between opposing electrodes provided in the angular velocity detection element according to the magnitude and direction of the angular velocity. Equipment has been developed. For example, a capacitance-type angular velocity detection device using silicon MEMS (Micro Electro Mechanical System) technology is widely known.

  In general, in a capacitive angular velocity detection device, a control IC that controls the operation of an angular velocity detection element applies a high voltage (for example, tens of volts) bias voltage (DC voltage) to a movable portion of the angular velocity detection element. At the same time, by inputting drive signals (such as sine waves) of opposite phases to the two drive electrodes of the angular velocity detecting element, an electrostatic attractive force is generated between the two drive electrodes and the movable part to drive the movable part. Vibrate. When rotation (angular velocity) about the rotation axis orthogonal to the vibration direction is applied while the movable part is driving and vibrating, Coriolis force in the direction orthogonal to the vibration direction and the rotation axis is generated. The capacitance between the movable part changes. The control IC can detect the angular velocity by detecting the change in capacitance. Such a capacitance-type angular velocity detection device is disclosed in Patent Document 1, for example.

JP 2005-351820 A

  As described above, in the capacitance type angular velocity detection device, the control IC generates the drive signal and the angular velocity and generates the bias voltage. However, in order to reduce the cost, the control IC When an IC is manufactured by a relatively inexpensive semiconductor manufacturing process, noise generated in a circuit that generates a high bias voltage may increase. As a result, there is a problem that noise superimposed on the bias voltage increases and it is difficult to improve the stability of angular velocity detection by the angular velocity detection device.

  The present invention has been made in view of the above problems, and according to some aspects of the present invention, it is possible to provide an angular velocity detection device capable of improving the stability of angular velocity detection. it can. Further, according to some aspects of the present invention, it is possible to provide an inertial measurement device capable of improving the accuracy of inertial data transmitted to the outside by using the angular velocity detection device. In addition, according to some aspects of the present invention, it is possible to provide a moving body positioning apparatus that can measure the position of a moving body with high accuracy by using the inertial measurement apparatus. In addition, according to some aspects of the present invention, by using the angular velocity detection device, a portable electronic device, an electronic device, and a moving body that can perform processing based on the detected angular velocity with high accuracy are provided. can do.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following aspects or application examples.

[Application Example 1]
An angular velocity detection device according to this application example includes an angular velocity detection element, a first integrated circuit chip that controls the operation of the angular velocity detection element, and a second integrated circuit that generates a bias voltage applied to the angular velocity detection element. The second integrated circuit chip is separate from the first integrated circuit chip.

  In the angular velocity detection device according to this application example, since the second integrated circuit chip is separate from the first integrated circuit chip, the low noise is emphasized independently of the first integrated circuit chip. Thus, the second integrated circuit chip can be designed and manufactured, whereby noise generated in the circuit that generates the bias voltage included in the second integrated circuit chip is reduced. Therefore, according to the angular velocity detection device according to this application example, noise superimposed on the bias voltage is reduced, and the stability of angular velocity detection can be improved.

[Application Example 2]
In the angular velocity detection device according to the application example, the first integrated circuit chip operates by being supplied with a first power supply voltage, and the second integrated circuit chip has a second power supply higher than the first power supply voltage. A voltage may be supplied to operate.

  According to the angular velocity detection device according to this application example, since the power supply voltage higher than that of the first integrated circuit chip is supplied to the second integrated circuit chip, the generation of the high voltage bias voltage can be realized with a simpler circuit. Therefore, noise generated in the circuit is reduced. Therefore, according to the angular velocity detection device according to this application example, noise superimposed on the bias voltage is reduced, and the stability of angular velocity detection can be improved.

[Application Example 3]
In the angular velocity detection device according to the application example, the second integrated circuit chip includes a booster circuit that boosts the second power supply voltage, and a regulator that operates with the voltage boosted by the booster circuit and generates the bias voltage. And may be included.

  According to the angular velocity detection device according to this application example, in the second integrated circuit chip, since the booster circuit boosts the power supply voltage higher than that of the first integrated circuit chip, the number of boosting stages can be reduced. Noise superimposed on the voltage is reduced, and noise generated in the regulator that operates with the boosted voltage to generate the bias voltage is also reduced. Therefore, according to the angular velocity detection device according to this application example, noise superimposed on the bias voltage is reduced, and the stability of angular velocity detection can be improved.

[Application Example 4]
In the angular velocity detection device according to the application example described above, the voltage value of the bias voltage may be variable.

  In the angular velocity detection device according to this application example, the first integrated circuit chip may transmit a signal for controlling a voltage value of the bias voltage to the second integrated circuit chip.

  According to the angular velocity detection device according to this application example, since the bias voltage is variable, the characteristics of the detection signal output from the angular velocity detection element can be adjusted.

[Application Example 5]
In the angular velocity detection device according to the application example, the angular velocity detection element is accommodated in a container,
The first integrated circuit chip and the container in which the angular velocity detecting element is accommodated may be stacked.

  In the angular velocity detection device according to this application example, the distance between the first integrated circuit chip and the angular velocity detection element is shortened, and the wiring that electrically connects the first integrated circuit chip and the angular velocity detection element is shortened. Therefore, according to the angular velocity detection device according to this application example, when a minute detection signal output from the angular velocity detection element propagates through the wiring, noise superimposed on the detection signal is reduced. The stability of the can be improved.

[Application Example 6]
In the angular velocity detection device according to the application example, the angular velocity detection element is housed in a container, the first integrated circuit chip, the container, and the second integrated circuit chip are stacked, and the container includes the container It may be provided between the first integrated circuit chip and the second integrated circuit chip.

  In the angular velocity detection device according to this application example, the distance between the first integrated circuit chip and the angular velocity detection element is shortened, and the wiring that electrically connects the first integrated circuit chip and the angular velocity detection element is shortened. Therefore, according to the angular velocity detection device according to this application example, when a minute detection signal output from the angular velocity detection element propagates through the wiring, noise superimposed on the detection signal is reduced. The stability of the can be improved.

[Application Example 7]
In the angular velocity detection device according to the application example, a conductor pattern to which the bias voltage is applied may be provided on a surface of the second integrated circuit chip facing the container.

  In the angular velocity detection device according to this application example, since there is almost no potential difference between the angular velocity detection element and the conductor pattern provided on the surface of the second integrated circuit chip, the charge amount of the container in which the angular velocity detection element is accommodated is reduced. The Therefore, according to the angular velocity detection device according to this application example, it is possible to reduce a possibility that the stability of the angular velocity detection is lowered due to charging of the container in which the angular velocity detection element is accommodated.

[Application Example 8]
In the angular velocity detection device according to the application example, the second integrated circuit chip may be manufactured by a semiconductor manufacturing process under conditions different from those of the first integrated circuit chip.

  In the angular velocity detection device according to this application example, the second integrated circuit chip is manufactured by an appropriate semiconductor manufacturing process different from the first integrated circuit chip, so that the bias voltage included in the second integrated circuit chip is generated. Noise generated in the circuit to be generated is reduced. Therefore, according to the angular velocity detection device according to this application example, noise superimposed on the bias voltage is reduced, and the stability of angular velocity detection can be improved.

[Application Example 9]
An angular velocity detection device according to this application example includes an angular velocity detection element and a first integrated circuit chip that controls the operation of the angular velocity detection element, and the first integrated circuit chip and the angular velocity detection element are containers. The container is provided with a terminal to which a bias voltage of the angular velocity detecting element is applied.

In the angular velocity detection device according to this application example, since the bias voltage is supplied from the outside through the terminal, it is not necessary for the first integrated circuit chip to include a circuit for generating the bias voltage. Therefore,
According to the angular velocity detection device according to this application example, the stability of angular velocity detection can be improved by supplying a low-noise bias voltage from the outside.

[Application Example 10]
An inertial measurement device according to this application example includes any one of the angular velocity detection devices described above, a signal processing circuit that acquires the angular velocity signal from the angular velocity detection device, processes the angular velocity signal, and processing by the signal processing circuit. And a communication circuit for transmitting the obtained inertial data to the outside.

  According to the inertial measurement device according to this application example, the angular velocity detection stability is improved by the angular velocity detection device, so that the accuracy of the inertial data transmitted to the outside can be improved.

[Application Example 11]
A mobile body positioning apparatus according to this application example is a mobile body positioning apparatus that is mounted on a mobile body and measures the position of the mobile body, and receives the satellite signal from the inertial measurement apparatus and the positioning satellite, A satellite signal receiving unit that acquires positioning information superimposed on the satellite signal, a position calculation unit that calculates a position of the moving body based on the positioning information, and the inertial measurement device that is output from the inertial measurement device An attitude calculation unit that calculates the attitude of the movable body based on inertial data; and a position correction unit that corrects the position based on the attitude.

  According to the mobile body positioning device according to this application example, highly accurate inertia data can be obtained by the inertial measurement device, so that the position of the mobile body can be measured with high accuracy.

[Application Example 12]
A portable electronic device according to this application example includes any one of the angular velocity detection devices described above, a case in which the angular velocity detection device is accommodated, and a case in which the output data from the angular velocity detection device is processed. The processing part, the display part accommodated in the said case, and the translucent cover which has block | closed the opening part of the said case are included.

  According to the portable electronic device according to this application example, the angular velocity detection stability is improved by the angular velocity detection device, so that the processing based on the angular velocity detected by the angular velocity detection device can be performed with high accuracy.

[Application Example 13]
An electronic apparatus according to this application example includes any one of the angular velocity detection devices described above.

  According to the electronic apparatus according to this application example, the angular velocity detection device improves the stability of the angular velocity detection, so that the processing based on the angular velocity detected by the angular velocity detection device can be performed with high accuracy.

[Application Example 14]
The moving body according to this application example includes any one of the angular velocity detection devices described above.

  According to the moving body according to this application example, the angular velocity detection stability is improved by the angular velocity detection device, and therefore processing based on the angular velocity detected by the angular velocity detection device can be performed with high accuracy.

The top view which shows an angular velocity detection element typically. Sectional drawing which shows an angular velocity detection element typically. The figure which shows the structure of the angular velocity detection apparatus of 1st Embodiment. The figure which shows the structural example of IC for control. The figure which shows the structural example of IC for bias voltage generation. Sectional drawing which shows the angular velocity detection apparatus of 1st Embodiment typically. The figure which shows an example of the noise characteristic of the angular velocity detection apparatus of a conventional structure, and an example of the noise characteristic of the angular velocity detection apparatus of 1st Embodiment. The figure which shows an example of the bias stability of the angular velocity detection apparatus of a conventional structure, and an example of the bias stability of the angular velocity detection apparatus of 1st Embodiment. Sectional drawing which shows the angular velocity detection apparatus of 2nd Embodiment typically. The figure which shows the structure of the angular velocity detection apparatus of 3rd Embodiment. Sectional drawing which shows the angular velocity detection apparatus of 3rd Embodiment typically. The figure which shows the structural example of the inertial measurement apparatus of this embodiment. The figure which shows the structural example of the mobile body positioning apparatus of this embodiment. 1 is a functional block diagram of an electronic apparatus according to an embodiment. FIG. 14 is a diagram illustrating an example of the appearance of a smartphone that is an example of an electronic apparatus. FIG. 6 is a diagram illustrating an example of an appearance of an arm-mounted portable device that is an example of an electronic device. The figure which shows an example of the external appearance of the wrist apparatus (watch-type activity meter) which is an example of an electronic device. The functional block diagram of a wrist device (watch-type activity meter). The figure (top view) which shows an example of the mobile body of this embodiment.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. Also, not all of the configurations described below are essential constituent requirements of the present invention.

1. Angular velocity detector 1-1. First Embodiment [Configuration and Operation of Angular Velocity Detection Element]
First, an example of an angular velocity detection element included in the angular velocity detection device of the present embodiment will be described with reference to the drawings. FIG. 1 is a plan view schematically showing an angular velocity detection element 10 which is an example of the angular velocity detection element in the present embodiment. FIG. 2 is a cross-sectional view taken along the line II-II in FIG. 1 and 2, the X axis, the Y axis, and the Z axis are illustrated as three axes orthogonal to each other.

  As shown in FIG. 1 and FIG. 2, the angular velocity detection element 10 is provided on the substrate 110 and is accommodated in an accommodation portion configured by the substrate 110 and the lid 120. For convenience, the substrate 110 and the lid 120 are omitted in FIG.

  The material of the substrate 110 is, for example, glass or silicon. The substrate 110 is provided with a recess 112. The substrate 110 has a post portion 114 provided on the bottom surface of the recess 112 (the surface of the substrate 110 defining the recess 112) 112a. The post part 114 is a member for supporting the angular velocity detection element 10.

  The lid 120 is provided on the substrate 110 (on the + Z axis direction side of the substrate 110). The material of the lid 120 is, for example, silicon. The substrate 110 and the lid 120 may be joined by anodic bonding. In the illustrated example, a recess is formed in the lid 120, and the recess constitutes the cavity 102.

In addition, the joining method of the board | substrate 110 and the cover body 120 is not specifically limited, For example, joining by low melting glass (glass paste) may be sufficient and joining by solder may be sufficient. Or substrate 1
The substrate 110 and the lid 120 may be joined by forming a metal thin film (not shown) at each joint portion of the lid 10 and the lid 120 and eutectic joining the metal thin films.

  The angular velocity detection element 10 is bonded to the substrate 110 by, for example, anodic bonding. The angular velocity detection element 10 is accommodated in a cavity 102 formed by a substrate 110 and a lid 120. The cavity 102 is preferably in a reduced pressure state. Thereby, it can suppress that the vibration of the angular velocity detection element 10 attenuate | damps by air viscosity.

  The angular velocity detection element 10 includes, for example, a fixed portion 130, a drive spring portion 140, a drive portion 150, a detection spring portion 160, a connection spring portion 170, a detection portion 180, fixed drive monitor electrodes 190 and 192, have.

  The fixing unit 130 is fixed to the substrate 110. The fixing portion 130 is bonded to the post portion 114 of the substrate 110 by, for example, anodic bonding. The fixed part 130 is connected to at least one of the drive spring part 140 and the detection spring part 160. A plurality of fixing portions 130 are provided. In the illustrated example, the planar shape (the shape seen from the Z-axis direction) of the fixed portion 130 is a quadrangle.

  The drive spring unit 140 connects the fixed unit 130 and the movable drive electrode 152 of the drive unit 150. The drive spring portion 140 is provided apart from the substrate 110. In the illustrated example, the drive spring portion 140 extends in the Y-axis direction while reciprocating in the X-axis direction. The drive spring part 140 can smoothly expand and contract in the Y-axis direction, which is the vibration direction of the drive part 150 (the vibration direction of the movable drive electrode 152).

  The drive unit 150 vibrates the movable body 182 of the detection unit 180 in the Y-axis direction. A plurality of driving units 150 are provided. In the illustrated example, two drive units 150 are provided (a first drive unit 150a and a second drive unit 150b). For example, the detection unit 180 is provided between the first drive unit 150a and the second drive unit 150b. In the illustrated example, the first drive unit 150a is provided on the −Y axis direction side with respect to the second drive unit 150b. The drive unit 150 includes, for example, a movable drive electrode 152 and fixed drive electrodes 154 and 156.

  The movable drive electrode 152 is provided apart from the substrate 110. The movable drive electrode 152 has, for example, a comb-like shape including a trunk portion extending in the X-axis direction and a plurality of branch portions extending from the trunk portion in the Y-axis direction. In the illustrated example, the movable drive electrode 152 is supported by four drive spring portions 140. Specifically, the four corners of the movable drive electrode 152 are connected by the drive spring portion 140.

  The fixed drive electrodes 154 and 156 are fixed to the substrate 110. The fixed drive electrodes 154 and 156 are bonded to a post portion (not shown) of the substrate 110 by, for example, anodic bonding. The fixed drive electrodes 154 and 156 are provided to face the movable drive electrode 152. That is, the fixed drive electrode 154 and the movable drive electrode 152 form a capacitance, and the fixed drive electrode 156 and the movable drive electrode 152 form a capacitance. In the first drive unit 150 a, the fixed drive electrode 154 is provided on the + Y axis direction side of the movable drive electrode 152, and the fixed drive electrode 156 is provided on the −Y axis direction side of the movable drive electrode 152. In the second drive unit 150 b, the fixed drive electrode 154 is provided on the −Y axis direction side of the movable drive electrode 152, and the fixed drive electrode 156 is provided on the + Y axis direction side of the movable drive electrode 152. The fixed drive electrodes 154 and 156 have a comb-like shape corresponding to the movable drive electrode 152, for example.

The detection spring unit 160 connects the fixed unit 130 and the movable body 182 of the detection unit 180. The detection spring portion 160 is provided away from the substrate 110. The detection spring portion 160 is configured to be deformable in the Z-axis direction in accordance with the displacement of the movable body 182 in the Z-axis direction.

  A plurality of detection spring portions 160 are provided. The first detection spring portion (first spring portion) 160a among the plurality of detection spring portions 160 is connected to the first fixing portion (first fixing portion of the plurality of fixing portions 130) 130a. The first detection spring part 160 a connects the first fixed part 130 a and the movable body 182. The second detection spring part (second spring part) 160b of the plurality of detection spring parts 160 connects the second fixing part (second fixing part of the plurality of fixing parts 130) 130b and the movable body 182. ing. A third detection spring portion (third spring portion) 160c of the plurality of detection spring portions 160 connects the third fixing portion (third fixing portion of the plurality of fixing portions 130) 130c and the movable body 182. ing.

  In the illustrated example, two first fixing portions 130a are provided, one first fixing portion 130a and the second fixing portion 130b are provided integrally, and the other first fixing portion 130a and the third fixing portion are fixed. The part 130c is provided integrally. The first detection spring portion 160a is provided between the second detection spring portion 160b and the third detection spring portion 160c in plan view (as viewed from the Z-axis direction). Although not shown, the fixing portions 130a, 130b, and 130c may be provided independently of each other. Moreover, the number of the fixing | fixed part 130a, 130b, 130c is not specifically limited.

  The first detection spring portion 160a has a shape extending in the Y-axis direction orthogonal to the X-axis while reciprocating in the X-axis direction. The first detection spring part 160a has a plurality of extending parts 162 extending in the X-axis direction. Among the plurality of extending portions 162, the extending portion 162 that overlaps with the first fixing portion 130a when viewed from the Y-axis direction (the extending portion 162 having a portion overlapping with the first fixing portion 130a), which is the first fixing portion The extension part 162 (extension part 162a in the illustrated example) close to 130a is thicker (the size in the Y-axis direction is larger) than the other extension parts 162 (for example, the extension part 162b). The extension part 162a has a surface facing the surface of the first fixing part 130a.

  The connection spring unit 170 connects the movable drive electrode 152 of the drive unit 150 and the movable body 182 of the detection unit 180. The connecting spring portion 170 is provided apart from the substrate 110. The connecting spring portion 170 is configured to be deformable in the Z-axis direction according to the displacement of the movable body 182 in the Z-axis direction. The connecting spring part 170 transmits the vibration in the Y-axis direction of the movable drive electrode 152 of the drive part 150 to the movable body 182 of the detection part 180. Thereby, the movable body 182 can vibrate in the Y-axis direction.

  The detection unit 180 detects an angular velocity. The detection unit 180 includes, for example, a movable body 182 and a fixed detection electrode (fixed electrode) 186.

  The movable body 182 vibrates in the Y-axis direction due to the vibration of the drive unit 150 and is displaced in the Z-axis direction according to the angular velocity. The movable body 182 is provided apart from the substrate 110. The movable body 182 is a portion where the four corners are supported by the detection spring portion 160. That is, the detection spring portions 160 are connected to the four corners of the movable body 182. The movable body 182 has movable drive monitor electrodes 188 and 189 having a comb-like shape composed of a plurality of branches extending from the main body in the Y-axis direction. The movable body 182 has a movable detection electrode (movable electrode) 184. The movable detection electrode 184 is a portion overlapping the fixed detection electrode 186 of the movable body 182 in plan view. In the illustrated example, the planar shape of the movable detection electrode 184 is a rectangle. The movable detection electrode 184 vibrates in the Y-axis direction due to the vibration of the driving unit 150 and is displaced in the Z-axis direction according to the angular velocity.

The fixed detection electrode 186 is fixed to the substrate 110. The fixed detection electrode 186 is provided to face the movable detection electrode 184. That is, the fixed detection electrode 186 and the movable detection electrode 184 form a capacitance.

  A plurality of detection units 180 are provided. In the illustrated example, two detection units 180 are provided (a first detection unit 180a and a second detection unit 180b). The first detection unit 180a is provided on the −Y axis direction side of the second detection unit 180b, for example.

  The movable body 182 (first movable body 182a) of the first detection unit 180a vibrates by driving the first drive unit 150a. The fixed detection electrode 186 (first fixed detection electrode 186a) of the first detection unit 180a faces the movable detection electrode 184 (first movable detection electrode 184a) of the first detection unit 180a. The movable body 182 (second movable body 182b) of the second detection unit 180b vibrates by driving the second drive unit 150b. The fixed detection electrode 186 (second fixed detection electrode 186b) of the second detection unit 180b faces the movable detection electrode 184 (second movable detection electrode 184b) of the second detection unit 180b.

  The 1st movable body 182a and the 2nd movable body 182b are connected by the detection spring part 160, for example.

  The first movable body 182a and the second movable body 182b vibrate in reverse phase (reverse phase). That is, for example, when the first movable body 182a is displaced toward the + X axis direction, the second movable body 182b is displaced toward the −X axis direction.

  The first movable body 182a and the second movable body 182b have the same size and the same shape. The angular velocity detection element 10 may have a symmetric shape with respect to a virtual straight line α that passes through the center C of the angular velocity detection element 10 and is parallel to the X axis in plan view. The angular velocity detection element 10 may have a symmetric shape with respect to a virtual straight line β that passes through the center C of the angular velocity detection element 10 and is parallel to the Y axis in plan view.

  The first movable body 182a has two movable drive monitor electrodes 188a and two movable drive monitor electrodes 189a, and a plurality of branches constituting each movable drive monitor electrode 188a is -Y A plurality of branches extending in the axial direction and constituting each movable drive monitor electrode 189a extend from the main body in the + Y-axis direction. Similarly, the second movable body 182b has two movable drive monitor electrodes 188b and two movable drive monitor electrodes 189b, and a plurality of branches constituting each movable drive monitor electrode 188b is a main body portion. A plurality of branch portions constituting each movable drive monitor electrode 189b extend from the main body portion in the −Y axis direction.

The fixed drive monitor electrodes 190 and 192 are fixed to the substrate 110. The fixed drive monitor electrodes 190 and 192 are bonded to a post portion (not shown) of the substrate 110 by, for example, anodic bonding. The fixed drive monitor electrode 190 is provided to face each branch of the movable drive monitor electrode 188 of the movable body 182, and the fixed drive monitor electrode 192 faces each branch of the movable drive monitor electrode 189 of the movable body 182. Is provided. That is, the fixed drive monitor electrode 190 and the movable drive monitor electrode 188 form a capacitance, and the fixed drive monitor electrode 192 and the movable drive monitor electrode 189 form a capacitance. More specifically, two fixed drive monitor electrodes 190 are provided on the −Y axis direction side of the two movable drive monitor electrodes 188a of the first movable body 182a, and the two movable drive monitor electrodes 188b of the second movable body 182b are provided. Two fixed drive monitor electrodes 190 are provided on the + Y axis direction side. Two fixed drive monitor electrodes 192 are provided on the + Y axis direction side of the two movable drive monitor electrodes 189a of the first movable body 182a, and the −Y axis direction of the two movable drive monitor electrodes 189b of the second movable body 182b is provided. Two fixed drive monitor electrodes 192 are provided on the side. The fixed drive monitor electrodes 190 and 192 have a comb-like shape corresponding to the movable drive monitor electrodes 188 and 189, for example.

  The fixed portion 130, the spring portions 140, 160, 170, the movable drive electrode 152, and the movable body 182 of the angular velocity detection element 10 are provided integrally. The material of the fixed part 130, the spring parts 140, 160, 170, the driving part 150, and the movable body 182 is, for example, silicon imparted with conductivity by doping impurities such as phosphorus and boron. The material of the fixed detection electrode 186 is, for example, aluminum, gold, platinum, or ITO (Indium Tin Oxide). By using a transparent electrode material such as ITO as the fixed detection electrode 186, foreign matter or the like existing on the fixed detection electrode 186 can be easily visually recognized from the lower surface side of the substrate 110.

  Next, the operation of the angular velocity detection element 10 will be described.

  When a voltage is applied between the movable drive electrode 152 and the fixed drive electrodes 154 and 156 by a power source (not shown), an electrostatic force can be generated between the movable drive electrode 152 and the fixed drive electrodes 154 and 156. Thereby, the drive unit 150 can vibrate the movable body 182 in the Y-axis direction.

  As shown in FIG. 1, in the first drive unit 150a, the fixed drive electrode 154 is provided on the + Y axis direction side of the movable drive electrode 152, and the fixed drive electrode 156 is on the −Y axis direction side of the movable drive electrode 152. Is provided. In the second drive unit 150 b, the fixed drive electrode 154 is provided on the −Y axis direction side of the movable drive electrode 152, and the fixed drive electrode 156 is provided on the + Y axis direction side of the movable drive electrode 152. Therefore, a first alternating voltage is applied between the movable drive electrode 152 and the fixed drive electrode 154, and a second alternating voltage is 180 degrees out of phase with the first alternating voltage between the movable drive electrode 152 and the fixed drive electrode 156. By applying the voltage, the first movable body 182a and the second movable body 182b can be vibrated in the Y-axis direction (tuning fork type vibration) with a predetermined phase and a mutually opposite phase (reverse phase). More specifically, a constant bias voltage is applied to the movable drive electrode 152, and AC voltages having a predetermined frequency that are 180 degrees out of phase with each other are applied to the fixed drive electrodes 154 and 156, respectively. The body 182a and the second movable body 182b vibrate in the Y-axis direction with phases opposite to each other and at a predetermined frequency.

  When the movable bodies 182a and 182b vibrate as described above, the distance between the fixed drive monitor electrode 190 and the movable drive monitor electrode 188a changes due to the displacement of the movable bodies 182a and 182b in directions opposite to each other in the Y-axis direction. However, the distance between the fixed drive monitor electrode 192 and the movable drive monitor electrode 189a changes. Therefore, the capacitance between the fixed drive monitor electrode 190 and the movable drive monitor electrode 188a changes, and the capacitance between the fixed drive monitor electrode 192 and the movable drive monitor electrode 189a changes. These changes in capacitance are reversed, and when one capacitance increases, the other capacitance decreases.

  In addition, when the angular velocity ωx around the X axis is applied to the angular velocity detection element 10 in a state where the movable bodies 182a and 182b perform the above vibration, a Coriolis force acts, and the first movable body 182a and the second movable body 182b. Are displaced in opposite directions to each other in the Z-axis direction. The movable bodies 182a and 182b repeat this operation (detection vibration) while receiving the Coriolis force.

  When the movable bodies 182a and 182b are displaced in the Z-axis direction according to the Coriolis force, the distances between the movable detection electrodes 184a and 184b and the fixed detection electrodes 186a and 186b change. Therefore, the capacitance between the movable detection electrodes 184a and 184b and the fixed detection electrodes 186a and 186b changes. By detecting the amount of change in capacitance between the movable detection electrodes 184a and 184b and the fixed detection electrodes 186a and 186b, the angular velocity ωx around the X axis can be obtained.

  In the above description, the mode (electrostatic drive method) in which the movable body 182 is vibrated by an electrostatic force has been described. However, the method for driving the movable body 182 is not particularly limited, and the piezoelectric drive method or the Lorentz force of the magnetic field The electromagnetic drive system used can be applied.

  In the angular velocity detecting element 10 configured as described above, the first detection spring portion 160a that connects the first fixed portion 130a and the first movable body 182a, and the second fixed portion 130b and the first movable body 182a are connected. A second detection spring portion 160b, and a third detection spring portion 160c connecting the third fixed portion 130c and the first movable body 182a. The first detection spring portion 160a is a second detection in plan view. It is provided between the spring part 160b and the third detection spring part 160c. Therefore, in the angular velocity detection element 10, it can reduce that the 1st movable body 182a bends compared with the case where the 1st detection spring part 160a is not provided, for example.

  In the angular velocity detection element 10, the first detection spring portion 160a has a shape extending in the second axis direction (Y axis direction) orthogonal to the X axis while reciprocating in the first axis direction (X axis direction). Among the plurality of extending parts 162 extending in the X-axis direction of the first detection spring part 160a, the extending part 162a that is separated from the first fixing part 130a and is closest to the first fixing part 130a is the Y-axis. When viewed from the direction, at least a part of the first fixed portion 130 a overlaps, and among the plurality of extending portions 162, the width in the Y-axis direction is larger than the other extending portions 162. Therefore, in the angular velocity detection element 10, the extension part 162a can be hardly displaced in the Y-axis direction. For example, the extension part 162a collides with the first fixing part 130a and the first detection spring part 160a is destroyed. Can be reduced.

  In the angular velocity detection element 10, the first movable body 182a and the second movable body 182b vibrate in opposite phases. For this reason, even if a physical quantity such as acceleration other than the angular velocity is applied, for example, the angular velocity detecting element 10 can cancel the acceleration component by differential detection, and can detect the angular velocity more accurately.

[Configuration and operation of angular velocity detection device]
FIG. 3 is a diagram illustrating a configuration of the angular velocity detection device 1 according to the first embodiment. As shown in FIG. 3, the angular velocity detection device 1 of the first embodiment includes the angular velocity detection element 10 shown in FIG. 1, a control IC chip 20 (an example of a “first integrated circuit chip”), and a bias. And a voltage generation IC chip 30 (an example of a “second integrated circuit chip”).

The angular velocity detection device 1 operates by being supplied with the first power supply voltage and the second power supply voltage via the external terminals VDD1 and VDD2, respectively, and supplied with the ground voltage (0V) via the external terminal VSS. Further, the angular velocity detection device 1 is connected to an I ² C (Inter-Integrated Circuit) bus via external terminals SCL and SDA, and can perform serial communication with an external device (not shown) via the I ² C bus. . The angular velocity detection device 1 may be connected to a bus different from an I ² C bus such as an SPI (Serial Peripheral Interface) bus.

  The terminals VDD, VSS, SCL, and SDA of the control IC chip 20 are electrically connected to the external terminals VDD1, VSS, SCL, and SDA of the angular velocity detection device 1, respectively. The terminals SCL2 and SDA2 of the control IC chip 20 are electrically connected to the terminals SCL and SDA of the bias voltage generation IC chip 30, respectively. The terminals D1 and D2 of the control IC chip 20 are electrically connected to fixed drive electrodes 154 and 156 (see FIG. 1) of the angular velocity detection element 10, respectively. The terminals DM1 and DM2 of the control IC chip 20 are electrically connected to fixed drive monitor electrodes 190 and 192 (see FIG. 1) of the angular velocity detection element 10, respectively. The terminals S1 and S2 of the control IC chip 20 are electrically connected to fixed detection electrodes 186a and 186b (see FIG. 1) of the angular velocity detection element 10, respectively.

  The terminals VDD and VSS of the bias voltage generating IC chip 30 are electrically connected to the external terminals VDD2 and VSS of the angular velocity detection device 1, respectively. The terminal VDC of the bias voltage generating IC chip 30 is electrically connected to the movable drive electrode 152 (see FIG. 1) of the angular velocity detecting element 10.

  The control IC chip 20 operates by being supplied with the first power supply voltage via the terminal VDD and supplied with the ground voltage (0 V) via the terminal VSS, and controls the operation of the angular velocity detection element 10. Specifically, the control IC chip 20 has two phases opposite to each other based on signals input from the fixed drive monitor electrodes 190 and 192 (see FIG. 1) of the angular velocity detection element 10 via the terminals DM1 and DM2. Two drive signals are generated and output to the fixed drive electrodes 154 and 156 (see FIG. 1) of the angular velocity detection element 10 via the terminals D1 and D2. Further, the control IC chip 20 detects the angular velocity based on two detection signals having opposite phases output from the fixed detection electrodes 186a and 186b (see FIG. 1) of the angular velocity detection element 10 via the terminals S1 and S2. Data (angular velocity data) corresponding to the magnitude and direction of the angular velocity detected by the element 10 is generated. Further, the control IC chip 20 can perform serial communication with an external device (not shown) via terminals SCL and SDA. For example, the control IC chip 20 transmits angular velocity data to the external device. The control IC chip 20 can serially communicate with the bias voltage generation IC chip 30 via the terminals SCL2 and SDA2. For example, the control IC chip 30 controls the bias voltage generation IC chip 30 to control the voltage value of the bias voltage. Send a signal.

  The bias voltage generating IC chip 30 operates by being supplied with the second power supply voltage via the terminal VDD and supplied with the ground voltage (0 V) via the terminal VSS, and generates the bias voltage of the angular velocity detecting element 10. This bias voltage is output from the terminal VDC of the bias voltage generating IC chip 30 and applied to the movable drive electrode 152 (see FIG. 1) of the angular velocity detecting element 10. A configuration example of the control IC chip 20 will be described later.

  The control IC chip 20 operates at, for example, 1.8 V in order to reduce power consumption. That is, for example, 1.8 V is supplied as the first power supply voltage, so that the withstand voltage of the semiconductor element included in the control IC chip 20 may be low. Therefore, the control IC chip 20 can be manufactured by a general and relatively inexpensive semiconductor manufacturing process. On the other hand, since the bias voltage of the angular velocity detection element 10 is a high voltage of, for example, several tens of volts, a circuit for generating a bias voltage (bias voltage generation circuit) is assumed to be inside the control IC chip 20 as in the conventional configuration. If it is provided, it is necessary to generate a bias voltage of several tens of volts from the low-voltage first power supply voltage (for example, 1.8 V), which complicates the configuration of the bias voltage generation circuit. As a result, noise generated in the bias voltage generation circuit increases, and it is difficult to reduce the noise of the bias voltage.

Therefore, in the present embodiment, the bias voltage generating IC chip 30 that generates the bias voltage is provided separately from the control IC chip 20. Therefore, the bias voltage generating IC chip 30 can be designed and manufactured with an emphasis on low noise independently of the control IC chip 20, thereby reducing noise generated in the bias voltage generating circuit. Is done. In order to reduce the noise, the bias voltage generating IC chip 30 may be manufactured by a semiconductor manufacturing process different from that of the control IC chip 20 (a semiconductor manufacturing process capable of reducing the noise of the bias voltage). For example, the bias voltage generating IC chip 30 is manufactured by a semiconductor manufacturing process (hereinafter referred to as a “high voltage process”) capable of forming a semiconductor element having a high breakdown voltage (for example, a breakdown voltage of 5 V or more), and the first power supply The second power supply voltage (for example, 5V) higher than the voltage (for example, 1.8V) may be supplied to operate. The bias voltage generation circuit included in the bias voltage generation IC chip 30 may generate a bias voltage of several tens of volts from a second power supply voltage (for example, 5 V) higher than the first power supply voltage (for example, 1.8 V). Therefore, it is realized with a simpler configuration. As a result, noise generated in the bias voltage generation circuit is reduced, and the bias voltage can be reduced. A configuration example of the bias voltage generating IC chip 30 will be described later.

[Configuration and operation of control IC chip]
FIG. 4 is an example of a functional block diagram of the control IC chip 20. As shown in FIG. 4, the control IC chip 20 includes a drive circuit 21, a detection circuit 22, a storage unit 23, a serial interface circuit 24, and a serial interface circuit 25.

  The drive circuit 21 is a circuit that drives the angular velocity detection element 10 and generates a drive signal based on signals input from the fixed drive monitor electrodes 190 and 192 of the angular velocity detection element 10 via the terminals DM1 and DM2, and the terminal A drive signal is output to the fixed drive electrodes 154 and 156 via D1 and D2. The drive circuit 21 outputs a drive signal to drive the angular velocity detection element 10 and receives a feedback signal from the angular velocity detection element 10. Thereby, the angular velocity detecting element 10 is excited.

  The drive circuit 21 in the present embodiment includes Q / V converters (charge amplifiers) 211A and 211B, phase adjustment circuits 212A and 212B, a differential amplifier 213, a rectifier circuit 214, an integration circuit 215, a drive signal generation circuit 216, and a comparator. 217 and 218 are included.

  When the movable body 182 (the first movable body 182a and the second movable body 182b) of the detection unit 180 of the angular velocity detection element 10 vibrates, currents in opposite phases based on the capacitance change are fed from the fixed drive monitor electrodes 190 and 192 as feedback signals. Is output.

  The Q / V converter 211A converts a current (charge) input from the fixed drive monitor electrode 190 of the angular velocity detection element 10 via the terminal DM1 into an AC voltage signal. Similarly, the Q / V converter 211B converts a current (charge) input from the fixed drive monitor electrode 192 of the angular velocity detection element 10 via the terminal DM2 into an AC voltage signal.

  The AC voltage signals output from the Q / V converters 211A and 211B are input to the phase adjustment circuits 212A and 212B, respectively, and the phases are adjusted by the phase adjustment circuits 212A and 212B.

  The output signals of the phase adjustment circuits 212A and 212B are input to the differential amplifier 213. The differential amplifier 213 outputs a signal obtained by differentially amplifying the output signal of the phase adjustment circuit 212A and the output signal of the phase adjustment circuit 212B.

  The output signals of the phase adjustment circuits 212A and 212B are input to the comparator 217. Comparator 217 compares the voltage of the output signal of phase adjustment circuit 212A with the voltage of the output signal of phase adjustment circuit 212B, and outputs a rectangular wave signal.

  The output signal of the differential amplifier 213 and the output signal of the comparator 217 are input to the rectifier circuit 214. The rectifier circuit 214 performs full-wave rectification on the output signal of the differential amplifier 213 according to the logic level of the output signal of the comparator 217.

The output signal of the rectifier circuit 214 is input to the integration circuit 215. The output signal of the integration circuit 215 and the output signal of the comparator 217 are input to the drive signal generation circuit 216. The drive signal generation circuit 216 outputs rectangular wave signals having opposite phases to each other by selecting the output signal of the integration circuit 215 or its polarity inversion signal according to the logic level of the output signal of the comparator 217. The rectangular wave signals having opposite phases output from the drive signal generation circuit 216 are connected to the terminals D1,
The drive signal is input to the fixed drive electrodes 154 and 156 of the angular velocity detection element 10 through D2. The angular velocity detection element 10 is driven by a drive signal input to the fixed drive electrodes 154 and 156.

  The output signals from the phase adjustment circuits 212A and 212B are also input to the comparator 218. The comparator 218 compares the output voltage of the phase adjustment circuit 212A and the output voltage of the phase adjustment circuit 212B, and outputs a rectangular wave signal. In the example of FIG. 4, the rectangular wave signal output from the comparator 218 is used as a reference signal SDET described later.

  The detection signals (alternating current) output from the fixed detection electrodes 186a and 186b of the angular velocity detection element 10 are Coriolis signals that are angular velocity components based on the Coriolis force acting on the angular velocity detection element 10, and the excitation vibration of the angular velocity detection element 10. And a quadrature signal (a leakage signal generated due to driving vibration of the angular velocity detection element 10), which is a self-vibration component based on the above. The quadrature signal and the Coriolis signal included in the detection signal output from the first fixed detection electrode 186a are 90 ° out of phase. Similarly, the quadrature signal and the Coriolis signal included in the detection signal output from the second fixed detection electrode 186b are 90 degrees out of phase. Further, the Coriolis signal included in the detection signal output from the first fixed detection electrode 186a and the Coriolis signal included in the detection signal output from the second fixed detection electrode 186b are in opposite phases. In general, the quadrature signal included in the detection signal output from the first fixed detection electrode 186a and the quadrature signal included in the detection signal output from the second fixed detection electrode 186b are in opposite phases. is there.

  The detection circuit 22 receives the detection signal output from the fixed detection electrodes 186a and 186b of the angular velocity detection element 10 driven by the drive signal, attenuates the quadrature signal included in the detection signal, and detects the Coriolis from the detection signal. The angular velocity data SO is generated by extracting the Coriolis signal based on the force.

  The detection circuit 22 in this embodiment includes Q / V converters (charge amplifiers) 221A and 221B, a differential amplifier 222, a synchronous detection circuit 223, an AC amplifier 224, a low-pass filter 225, and an A / D converter 226. Has been.

  The Q / V converter 221A converts the current output from the first fixed detection electrode 186a of the angular velocity detection element 10 into a voltage. Similarly, the Q / V converter 221B converts the current output from the second fixed detection electrode 186b of the angular velocity detection element 10 into a voltage.

  Specifically, when the movable body 182 of the angular velocity detection element 10 vibrates, a current based on the capacitance change is output from the fixed detection electrodes 186a and 186b. The Q / V converter 221A converts the alternating current output from the first fixed detection electrode 186a into a voltage and outputs the voltage. Similarly, the Q / V converter 221B converts the current output from the second fixed detection electrode 186b into a voltage and outputs the voltage.

  The AC voltage signal output from the Q / V converter 221A and the AC voltage signal output from the Q / V converter 221B are input to the differential amplifier 222. The differential amplifier 222 outputs a signal obtained by differentially amplifying the output signal of the Q / V converter 221A and the output signal of the Q / V converter 221B.

The signal output from the differential amplifier 222 is input to the synchronous detection circuit 223. The synchronous detection circuit 223 performs synchronous detection on the output signal of the differential amplifier 222 based on the reference signal SDET. More specifically, the synchronous detection circuit 223 selects the output signal of the differential amplifier 222 when the reference signal SDET is at a high level, and the differential amplifier 22 when the reference signal SDET is at a low level.
The full-wave rectification is performed by selecting a signal obtained by inverting the polarity of the output signal 2 and a signal obtained by full-wave rectification is output. Since the reference signal SDET and the Coriolis signal included in the output signal of the differential amplifier 222 are substantially in phase, the Coriolis signal is extracted by the synchronous detection of the synchronous detection circuit 223. On the other hand, the quadrature signal included in the output signal of the differential amplifier 222 is 90 degrees out of phase with the Coriolis signal, and therefore 90 degrees out of phase with the reference signal SDET. Not extracted.

  The output signal of the synchronous detection circuit 223 is input to the AC amplifier 224, and the AC amplifier 224 outputs a signal obtained by amplifying the output signal of the synchronous detection circuit 223.

  The output signal of the AC amplifier 224 is input to the low-pass filter 225. The low-pass filter 225 passes the Coriolis signal included in the output signal of the AC amplifier 224 and attenuates the high-frequency noise signal. Thus, the signal output from the low-pass filter 225 is a signal obtained by extracting the Coriolis signal from the detection signals output from the fixed detection electrodes 186a and 186b of the angular velocity detection element 10, and depends on the magnitude of the Coriolis signal. Voltage.

  The A / D converter 226 converts the signal output from the low pass filter 225 into a digital signal. The digital signal output from the A / D converter 226 is input to the serial interface circuit 24 as angular velocity data SO.

  The serial interface circuit 24 is a circuit for performing serial communication with an external device (not shown) via terminals SCL and SDA. In communication via the serial interface circuit 24, for example, the external device functions as a master, and the control IC chip 20 (angular velocity detection device 1) functions as a slave. The external device can write and read data to and from the storage unit 23 via the serial interface circuit 24. Further, the external device can read the angular velocity data SO through the serial interface circuit 24. As described above, the angular velocity detection device 1 is configured to output angular velocity data in response to a request from an external device.

  The serial interface circuit 25 is a circuit for performing serial communication with the bias voltage generating IC chip 30 via the terminals SCL2 and SDA2. In communication via the serial interface circuit 25, for example, the control IC chip 20 functions as a master, and the bias voltage generation IC chip 30 functions as a slave. The control IC chip 20 can write and read data to and from the storage unit 34 (see FIG. 5) of the bias voltage generation IC chip 30 via the serial interface circuit 25. For example, the control IC chip 20 reads control information for controlling the voltage value of the bias voltage stored in advance in the storage unit 23 at a predetermined timing such as at the time of activation, and via the serial interface circuit 25, Write to the storage unit 34 of the IC chip 30 for bias voltage generation.

[Configuration and operation of IC chip for generating bias voltage]
FIG. 5 is an example of a functional block diagram of the IC chip 30 for generating a bias voltage. As shown in FIG. 5, the bias voltage generating IC chip 30 includes a booster circuit 31, a regulator 32, a resistance control circuit 33, a storage unit 34, and a serial interface circuit 35.

  The booster circuit 31 boosts the second power supply voltage supplied from the terminal VDD. The booster circuit 31 in the present embodiment is a charge pump, and includes capacitors 311 to 313, switches 314 to 318, and a switch control circuit 319.

  The switch 314 has a first terminal connected to the terminal VDD of the bias voltage generating IC chip 30 and a second terminal connected to the first terminal of the capacitor 311. The switch 315 has a first terminal connected to the first terminal of the capacitor 311 and a second child connected to the first terminal of the capacitor 312. The switch 316 has a first terminal connected to the first terminal of the capacitor 312 and a second terminal connected to the first terminal of the capacitor 313. The second terminal of the capacitor 313 is connected to the terminal VSS of the IC chip 30 for bias voltage generation.

  The switch 317 has a first terminal connected to the second terminal of the capacitor 311, a second terminal connected to the terminal VDD, and a third terminal connected to the terminal VSS. The switch 318 has a first terminal connected to the second terminal of the capacitor 312, a second terminal connected to the terminal VDD, and a third terminal connected to the terminal VSS.

  The switch control circuit 319 generates clock signals φ1 and φ2 of opposite phases to control the switches 314 to 318. When the clock signal φ1 is active (for example, high level), the switches 314 and 316 are turned on, the switch 315 is turned off, the first terminal and the third terminal of the switch 317 are turned on, and the first terminal of the switch 318 is turned on. And the second terminal becomes conductive. That is, the switches 314 to 318 are in the first state shown in FIG. On the other hand, when the clock signal φ2 is active, the switches 314 and 316 are turned off, the switch 315 is turned on, the first terminal and the second terminal of the switch 317 are turned on, and the first and third terminals of the switch 318 are turned on. Is conducted. That is, the switches 314 to 318 are in the second state opposite to the first state shown in FIG.

  The switches 314 to 318 alternately repeat the first state and the second state, so that the voltage at the first terminal of the capacitor 313 is three times the second power supply voltage supplied from the terminal VDD. For example, if the second power supply voltage is 5V, the voltage at the first terminal of the capacitor 313 is boosted to 15V.

  The regulator 32 operates with the voltage boosted by the booster circuit 31 and generates a bias voltage for the angular velocity detection element 10. The regulator 32 in this embodiment includes an operational amplifier 321, a resistor 322, a variable resistance circuit 323, and a reference voltage circuit 324.

  The operational amplifier 321 is supplied with a constant reference voltage (for example, 1.8 V) output from the reference voltage circuit 324 at the non-inverting input terminal, the inverting input terminal is connected to the second terminal of the resistor 322, and the output terminal is It is connected to the first terminal of the resistor 322 and operates with the voltage boosted by the booster circuit 31 (the voltage at the first terminal of the capacitor 313). Further, the second terminal of the resistor 322 and the first terminal of the variable resistor circuit 323 are connected, and the second terminal of the variable resistor circuit 323 and the terminal VSS are connected.

  In the regulator 32 having such a configuration, the operational amplifier 321 has a voltage obtained by dividing the output voltage of the operational amplifier 321 by the ratio of the resistance value of the resistor 322 and the resistance value of the variable resistance circuit 323, and the reference voltage. The output voltage of 321 is controlled. The reference voltage may be supplied from the outside of the bias voltage generating IC chip 30 and may be, for example, the first power supply voltage.

  The output voltage of the operational amplifier 321 is output from the terminal VDC of the bias voltage generating IC chip 30 as a bias voltage. Therefore, in this embodiment, the voltage value of the bias voltage is variable, and becomes a voltage value corresponding to the resistance value of the variable resistance circuit 323.

  The resistance control circuit 33 variably controls the resistance value of the variable resistance circuit 323 based on the control information stored in the storage unit 34. In the angular velocity detection element 10, the frequency of the difference between the drive frequency at which the drive unit 150 vibrates in the Y-axis direction and the detection frequency that is the resonance frequency at which the detection unit 180 vibrates in the Z-axis direction is called a detuning frequency. The frequency changes according to the voltage value of the bias voltage. In the angular velocity detection element 10, when rotational vibration having a frequency close to the detuning frequency is applied around the X axis, the detection unit 180 resonates and its amplitude becomes very large. As a result, the angular velocity data SO generated by the control IC chip 20 may be saturated. Therefore, the resistance value of the variable resistance circuit 323 is controlled so that the detuning frequency is maintained at a predetermined frequency that does not cause such an abnormality.

  The serial interface circuit 35 is a circuit for performing serial communication with the control IC chip 20 via the terminals SCL and SDA. In communication via the serial interface circuit 35, for example, the control IC chip 20 functions as a master, and the bias voltage generation IC chip 30 functions as a slave. The control IC chip 20 can write and read data to and from the storage unit 34 via the serial interface circuit 35. For example, the control IC chip 20 transmits control information (control information for controlling the voltage value of the bias voltage) for controlling the resistance value of the variable resistance circuit 323 at a predetermined timing such as at the time of startup to the serial interface. The data is written into the storage unit 34 via the circuit 35.

[Structure of angular velocity detector]
FIG. 6 is a diagram schematically illustrating the structure of the angular velocity detection device 1 according to the first embodiment, and is a cross-sectional view schematically illustrating the angular velocity detection device 1. As shown in FIG. 6, the angular velocity detection device 1 is configured by accommodating an angular velocity detection element 10, a control IC chip 20, and a bias voltage generation IC chip 30 in one package 2. The package 2 may be a stacked package such as a ceramic package, for example. An opening is provided in the upper part of the package 2, and the opening is covered with a lid (lid) 4.

  On the outer surface (bottom surface) of the package 2, electrodes 6 that function as external terminals VDD1, VDD2, VSS, SCL, and SDA (see FIG. 3) are formed. A printed circuit board 40 is provided inside the package 2.

  A plurality of electrodes 50 are formed on the printed circuit board 40, and a part of the plurality of electrodes 50 is formed through a plurality of wirings (not shown) provided on the printed circuit board 40 and the package 2. 6 are electrically connected to each other.

  As described above, the angular velocity detection element 10 is accommodated in the accommodating portion (container) configured by the substrate 110 and the lid body 120. The container (the substrate 110 and the lid body 120) in which the angular velocity detecting element 10 is accommodated is mounted on the printed circuit board 40. A plurality of electrodes 52 are formed on the surface of the substrate 110. Some of the plurality of electrodes 52 are fixed driving electrodes 154 and 156, fixed driving monitor electrodes 190 and 192, and fixed detection electrodes of the angular velocity detecting element 10 through respective wirings (not shown) provided on the substrate 110. 186a and 186b and the movable drive electrode 152 are electrically connected. Another part of the plurality of electrodes 52 is bonded to each electrode 50 formed on the printed circuit board 40 by a wire 62 such as gold.

The control IC chip 20 is mounted on the lid 120. That is, the control IC chip 20 and the container (the substrate 110 and the lid 120) in which the angular velocity detection element 10 is accommodated are stacked. A plurality of electrodes 54 functioning as terminals VDD, VSS, SCL, SDA, SCL2, SDA2, D1, D2, DM1, DM2, S1, and S2 (see FIG. 3) are formed on the surface of the control IC chip 20. Each electrode 54 is bonded to each electrode 52 provided on the substrate 110 by a wire 64 such as gold.

  The bias voltage generating IC chip 30 is mounted on the printed circuit board 40. A plurality of electrodes 56 functioning as terminals VDD, VSS, VDC, SCL, SDA (see FIG. 3) are formed on the surface of the bias voltage generating IC chip 30, and each electrode 56 is formed on the printed circuit board 40. Each electrode 50 is bonded with a wire 66 such as gold.

[Function and effect]
As described above, in the angular velocity detection device 1 of the first embodiment, the bias voltage generation IC chip 30 applied to the angular velocity detection element 10 is provided separately from the control IC chip 20. Therefore, the bias voltage generating IC chip 30 can be designed and manufactured with an emphasis on low noise independently of the control IC chip 20, thereby reducing noise generated in the bias voltage generating circuit. Is done. In particular, when the bias voltage generating IC chip 30 is manufactured by a high withstand voltage process, in the bias voltage generating IC chip 30, the booster circuit 31 has a first power supply voltage (for example, supplied to the control IC chip 20). The second power supply voltage (for example, 5V) higher than 1.8V) may be boosted to generate the operating voltage of the regulator 32 that generates the bias voltage. Therefore, when 15V is required as the operating voltage of the regulator 32, the booster circuit 31 may boost the second power supply voltage of 5V, for example, three times, and the number of boosting stages may be three. On the other hand, when a booster circuit that generates 15 V or more is provided in the control IC chip 20 as in the prior art, the booster circuit must boost the first power supply voltage of, for example, 1.8 V nine times. In other words, nine boosting stages are required. That is, according to the angular velocity detection device 1 of the first embodiment, the booster circuit 31 necessary for generating the bias voltage can be realized with a simpler circuit with a reduced number of boosting stages, and thus is generated in the booster circuit 31. Noise is reduced. As a result, noise generated in the regulator 32 operating with the boosted voltage is also reduced, and noise superimposed on the bias voltage is reduced, so that the stability of angular velocity detection is improved. FIG. 7 shows an example (G1) of the noise characteristics of the angular velocity signal generated by each of the plurality of angular velocity detection devices having the conventional configuration, and an example (G2) of the noise characteristics of the angular velocity signal generated by the angular velocity detection device 1 of the first embodiment. Indicates. In FIG. 7, the horizontal axis represents noise frequency, and the vertical axis represents noise density. FIG. 8 shows an example (G3) of bias stability of one angular velocity detection device having a conventional configuration and an example (G4) of bias stability of the angular velocity detection device 1 of the first embodiment. In FIG. 8, the horizontal axis represents the integration time of the angular velocity (offset) detected by the angular velocity detection device when the angular velocity is zero, and the vertical axis represents the Allan variance of the offset. In the example of FIG. 7, the noise characteristic is reduced by two orders of magnitude, and the bias stability is reduced by one order of magnitude.

Note that when a regulator for generating a bias voltage is provided in the control IC chip 20 as in the prior art, the resistance used for the regulator is realized by a resistance element made of polysilicon, for example. Since the resistance element made of polysilicon generates a large 1 / f noise, the noise superimposed on the bias voltage also increases. On the other hand, in the angular velocity detection device 1 of the first embodiment, the bias voltage generation IC chip 30 is provided separately from the control IC chip 20, for example, a semiconductor manufactured different from the control IC chip 20. By manufacturing the process, the resistor 322 and the variable resistance circuit 323 of the regulator 32 are realized by a resistance element (for example, a metal film resistance (thin film resistance)) having a lower noise than a resistance element made of polysilicon. Is also possible. Metal film resistance (thin film resistance) is, for example, chromium silicon (CrSi), nickel chromium (NiCr), tantalum nitride (TaN), chromium silicide (CrSi ₂ ), chromium nitride silicide (CrSiN), chromium silicon oxy (CrSi0), etc. Is realized as a material. As described above, according to the angular velocity detection device 1 of the first embodiment, the noise superimposed on the bias voltage is also reduced by realizing the resistor 322 of the regulator 32 and the variable resistor circuit 323 with a low noise resistance element. Therefore, the stability of angular velocity detection is improved.

  In the angular velocity detection device 1 of the first embodiment, the bias voltage generated by the bias voltage generation IC chip 30 is variably controlled by the control IC chip 20. Therefore, according to the angular velocity detection device 1 of the first embodiment, by setting an appropriate bias voltage according to the characteristics of the angular velocity detection element 10, the detuning frequency becomes a desired frequency outside the angular velocity detection band, The possibility that the angular velocity data SO is saturated by the resonance of the detection unit 180 of the angular velocity detecting element 10 is reduced.

  Furthermore, in the angular velocity detection device 1 of the first embodiment, the control IC chip 20 and the container (the substrate 110 and the lid body 120) in which the angular velocity detection element 10 is stacked are stacked, whereby the angular velocity detection element 10 is stacked. Two wires 64 (wires 64 through which a minute Coriolis signal propagates) connect the two electrodes 52 respectively connected to the fixed detection electrodes 186a and 186b and the two electrodes 54 functioning as the terminals S1 and S2. Becomes shorter. Therefore, according to the angular velocity detection device 1 of the first embodiment, noise superimposed on the Coriolis signal is reduced, so that the stability of angular velocity detection can be improved.

1-2. Second Embodiment Hereinafter, the angular velocity detection device 1 of the second embodiment will be described with a focus on the content different from the first embodiment, omitting the description overlapping with the first embodiment. Similar to the first embodiment (FIG. 3), the angular velocity detection device 1 of the second embodiment includes an angular velocity detection element 10, a control IC chip 20, and a bias voltage generation IC chip 30. However, the structure is different from that of the first embodiment (FIG. 6).

  FIG. 9 is a diagram schematically illustrating the structure of the angular velocity detection device 1 according to the second embodiment, and is a cross-sectional view schematically illustrating the angular velocity detection device 1. In FIG. 9, the same components as those in FIG. As shown in FIG. 9, in the angular velocity detection device 1 of the second embodiment, a plurality of electrodes 58 are formed on the inner surface of the package 2, and the plurality of electrodes 58 are not shown provided on the package 2. The plurality of electrodes 6 are electrically connected to each other through each of the plurality of wirings.

  The bias voltage generating IC chip 30 is mounted on the inner surface of the package 2. A plurality of electrodes 56 functioning as terminals VDD, VSS, VDC, SCL, and SDA (see FIG. 3) are formed on the surface of the IC chip 30 for generating the bias voltage, and some of the plurality of electrodes 56 are packaged. Each electrode 58 formed on the inner surface of 2 is bonded to a wire 68 such as gold. Another part of the plurality of electrodes 56 is bonded to each electrode 52 provided on the substrate 110 with a wire 62.

  The container (substrate 110 and lid 120) in which the angular velocity detection element 10 is housed is mounted on the IC chip 30 for bias voltage generation. A plurality of electrodes 52 are formed on the surface of the substrate 110. Some of the plurality of electrodes 52 are fixed driving electrodes 154 and 156, fixed driving monitor electrodes 190 and 192, and fixed detection electrodes of the angular velocity detecting element 10 through respective wirings (not shown) provided on the substrate 110. 186a and 186b and the movable drive electrode 152 are electrically connected. Another part of the plurality of electrodes 52 is bonded to each electrode 56 formed on the surface of the IC chip 30 for bias voltage generation with a wire 62 or is formed on the surface of the IC chip 20 for control. Bonded with the electrode 54 and the wire 64.

The control IC chip 20 is mounted on the lid 120. On the surface of the control IC chip 20, terminals VDD, VSS, SCL, SDA, SCL2, SDA2, D1, D2, DM
A plurality of electrodes 54 functioning as 1, DM2, S1, and S2 (see FIG. 3) are formed, and each electrode 54 is bonded to each electrode 52 provided on the substrate 110 by a wire 64.

  As described above, in the angular velocity detection device 1 of the second embodiment, the control IC chip 20, the container (substrate 110 and lid 120) in which the angular velocity detection element 10 is accommodated, and the bias voltage generation IC chip 30 are provided. Are stacked. Therefore, the angular velocity detection device 1 according to the second embodiment has a smaller area, a smaller volume, and a smaller size when viewed from a direction orthogonal to the lid 4 as compared with the angular velocity detection device 1 according to the first embodiment. Has been.

  In the angular velocity detection device 1 of the second embodiment, the container (the substrate 110 and the lid 120) in which the angular velocity detection element 10 is accommodated is provided between the control IC chip 20 and the bias voltage generation IC chip 30. It has been. Therefore, as in the first embodiment, the wire 64 through which a minute Coriolis signal propagates is shortened, and noise superimposed on the Coriolis signal is reduced, so that the stability of angular velocity detection can be improved.

  Furthermore, in the angular velocity detection device 1 of the second embodiment, the conductor pattern 70 is provided on the surface of the bias voltage generating IC chip 30 that faces the container (specifically, the substrate 110) in which the angular velocity detection element 10 is accommodated. Is provided. A bias voltage generated by the bias voltage generating IC chip 30 is applied to the conductor pattern 70. The conductor pattern 70 is provided at a position facing the angular velocity detection element 10. That is, the conductor pattern 70 overlaps the angular velocity detection element 10 in a plan view of the angular velocity detection device 1 viewed from a direction orthogonal to the lid 4. For example, in the plan view of the angular velocity detection device 1, the conductor pattern 70 has a rectangular shape and is approximately the same size as the angular velocity detection element 10. As described above, in the angular velocity detection element 10, since a bias voltage of ten and several V is applied to the movable drive electrode 152 of the drive unit 150, the movable body 182 of the detection unit 180 connected to the movable drive electrode 152 also has ten or more V. become. On the other hand, since the bias voltage is also applied to the conductor pattern 70 to be more than a dozen V, there is almost no potential difference between the angular velocity detecting element 10 and the conductor pattern 70, and the charge amount of the substrate 110 due to the bias voltage is reduced. . Therefore, according to the angular velocity detection device 1 of the second embodiment, it is possible to reduce the possibility that the stability of the angular velocity detection is lowered due to the charging of the substrate 110.

1-3. Third Embodiment Hereinafter, the angular velocity detection device 1 of the third embodiment will be described with a focus on the content different from the first embodiment, omitting the description overlapping with the first embodiment.

  FIG. 10 is a diagram illustrating a configuration of the angular velocity detection device 1 according to the third embodiment. As shown in FIG. 10, the angular velocity detection device 1 according to the third embodiment includes an angular velocity detection element 10 and a control IC chip 20, and the angular velocity detection device 1 according to the first embodiment (FIG. 3). ), The bias voltage generating IC chip 30 is not included.

The angular velocity detection device 1 according to the third embodiment operates by being supplied with a power supply voltage (for example, 1.8V) via an external terminal VDD and supplied with a ground voltage (0V) via an external terminal VSS. Similarly to the first embodiment (FIG. 3), the angular velocity detection device 1 is connected to an I ² C bus via external terminals SCL and SDA, and is serially connected to an external device (not shown) via the I ² C bus. Communication is possible. Note that the angular velocity detection device 1 may be connected to a bus different from the I ² C bus such as an SPI bus.

The terminals VDD, VSS, SCL, and SDA of the control IC chip 20 are electrically connected to the external terminals VDD, VSS, SCL, and SDA of the angular velocity detection device 1, respectively. The terminals D1 and D2 of the control IC chip 20 are fixed drive electrodes 1 of the angular velocity detecting element 10, respectively.
54, 156 (see FIG. 1). The terminals DM1 and DM2 of the control IC chip 20 are electrically connected to fixed drive monitor electrodes 190 and 192 (see FIG. 1) of the angular velocity detection element 10, respectively. The terminals S1 and S2 of the control IC chip 20 are electrically connected to fixed detection electrodes 186a and 186b (see FIG. 1) of the angular velocity detection element 10, respectively.

  The configuration of the control IC chip 20 may be the same as that shown in FIG. 4, for example. However, the control IC chip 20 may not include the serial interface circuit 25 and the terminals SCL2 and SDA2.

  The angular velocity detection device 1 of the third embodiment has an external terminal VDC to which a bias voltage of tens of volts is applied, and the external terminal VDC is connected to the movable drive electrode 152 (see FIG. 1) of the angular velocity detection element 10. Electrically connected.

  FIG. 12 is a diagram schematically illustrating the structure of the angular velocity detection device 1 according to the third embodiment, and is a cross-sectional view schematically illustrating the angular velocity detection device 1. As shown in FIG. 12, the angular velocity detection device 1 of the third embodiment is configured by accommodating the angular velocity detection element 10 and the control IC chip 20 in one package 2 (container).

  Electrodes 6 that function as external terminals VDD, VSS, SCL, SDA, and VDC (see FIG. 10) are formed on the outer surface (bottom surface) of the package 2. That is, in the angular velocity detection device 1 of the third embodiment, unlike the angular velocity detection device 1 of the first embodiment, the package 2 has an electrode 6 that functions as a terminal VDC to which a bias voltage of the angular velocity detection element 10 is applied. Is provided.

  A plurality of electrodes 58 are formed on the inner surface of the package 2, and the plurality of electrodes 58 are electrically connected to the plurality of electrodes 6 through respective wirings (not shown) provided in the package 2. It is connected.

  A container (the substrate 110 and the lid body 120) in which the angular velocity detection element 10 is accommodated is mounted on the inner surface of the package 2. A plurality of electrodes 52 are formed on the surface of the substrate 110. Some of the plurality of electrodes 52 are fixed driving electrodes 154 and 156, fixed driving monitor electrodes 190 and 192, and fixed detection electrodes of the angular velocity detecting element 10 through respective wirings (not shown) provided on the substrate 110. 186a and 186b and the movable drive electrode 152 are electrically connected. Another part of the plurality of electrodes 52 is bonded to each electrode 58 with a wire 62.

  The control IC chip 20 is mounted on the lid 120. That is, the control IC chip 20 and the container (the substrate 110 and the lid 120) in which the angular velocity detection element 10 is accommodated are stacked. A plurality of electrodes 54 functioning as terminals VDD, VSS, SCL, SDA, D1, D2, DM1, DM2, S1, and S2 (see FIG. 10) are formed on the surface of the control IC chip 20. 54 is bonded to each electrode 52 provided on the substrate 110 by a wire 64. Therefore, according to the angular velocity detection device 1 of the third embodiment, the wire 64 through which a minute Coriolis signal propagates is shortened and noise superimposed on the Coriolis signal is reduced, as in the first embodiment. The stability of the can be improved.

  Further, in the angular velocity detection device 1 of the third embodiment, since the bias voltage is supplied from the outside via the external terminal VDC, the control IC chip 20 does not need to include a circuit for generating the bias voltage. Therefore, according to the angular velocity detection device 1 of the third embodiment, the stability of angular velocity detection can be improved by supplying a low-noise bias voltage from the outside.

1-4. In each of the above embodiments, the angular velocity signal output from the angular velocity detection device 1 is a digital signal, but may be an analog signal.

  Moreover, although the angular velocity detection apparatus 1 of each said embodiment detects the angular velocity for one axis | shaft, you may detect the angular velocity around the multiple axis | shafts (two axes | shafts, three axes | shafts, or four axes or more) which mutually cross | intersect. In the angular velocity detection device 1 of this modification, for example, an angular velocity detection element, a drive circuit, and a detection circuit may be provided independently for each axis, or a plurality of angular velocity detection elements that respectively detect angular velocities around each axis. However, one or both of the drive circuit and the detection circuit may be provided in common.

2. Inertial measurement unit (IMU)
FIG. 12 is a diagram illustrating a configuration example of the inertial measurement device according to the present embodiment. As shown in FIG. 12, the inertial measurement apparatus 400 according to the present embodiment detects three angular velocities that detect angular velocities of three axes (x axis, y axis, and z axis) that intersect (ideally, orthogonally) to each other. Detection devices 411 to 413, three acceleration detection devices 421 to 423 that detect angular velocities of three axes (x axis, y axis, and z axis) that intersect (ideally, orthogonal) to each other, a signal processing circuit 430, and a memory A unit 440 and a communication circuit 450 are included. In addition, the inertial measurement device 400 of the present embodiment may omit or change some of the components (each unit) shown in FIG. 12, or may have a configuration in which other components are added.

  The angular velocity detection device 411 detects an angular velocity generated around the x-axis, and outputs an angular velocity signal corresponding to the detected magnitude and direction of the x-axis angular velocity. The angular velocity detection device 412 detects an angular velocity generated around the y axis and outputs an angular velocity signal corresponding to the magnitude and direction of the detected y axis angular velocity. The angular velocity detection device 413 detects an angular velocity generated around the z axis and outputs an angular velocity signal corresponding to the magnitude and direction of the detected z axis angular velocity.

  The acceleration detection device 421 detects acceleration generated around the x-axis and outputs an acceleration signal corresponding to the detected magnitude and direction of the x-axis acceleration. The acceleration detection device 422 detects acceleration generated around the y-axis and outputs an acceleration signal corresponding to the magnitude and direction of the detected y-axis acceleration. The acceleration detection device 423 detects acceleration generated around the z-axis and outputs an acceleration signal corresponding to the magnitude and direction of the detected z-axis acceleration.

  Note that the three angular velocity detection devices 411 to 413 may be housed in one package to constitute a triaxial angular velocity detection module. Similarly, the three acceleration detection devices 421 to 423 may be housed in one package to constitute a three-axis acceleration detection module.

  The signal processing circuit 430 acquires triaxial angular velocity signals from the angular velocity detection devices 411 to 413, acquires triaxial acceleration signals from the acceleration detection devices 421 to 423, and processes the acquired triaxial angular velocity signals and triaxial acceleration signals. . For example, the signal processing circuit 430 sequentially performs A / D conversion on the acquired triaxial angular velocity signal and triaxial acceleration signal to generate inertia data including triaxial angular velocity data and triaxial acceleration data, and attaches time information. Processing for storing the inertial data in the storage unit 440 is performed. In addition, the signal processing circuit 430 is calculated in advance according to each mounting angle error (error between each detection axis and the x-axis, y-axis, and z-axis) of the angular velocity detection devices 411 to 413 and the acceleration detection devices 421 to 423. Using the correction parameters, the inertia data stored in the storage unit 440 is converted (corrected) into data in the xyz coordinate system and stored in the storage unit 440. Further, the signal processing circuit 430 reads the inertia data converted into xyz coordinate system data and stored in the storage unit 440 in time order, generates packet data including the time information and the inertia data, and outputs the packet data to the communication circuit 450. .

  The signal processing circuit 430 may perform an offset correction process and a temperature correction process on the inertial data, and each detection operation (for example, detection) of the angular velocity detection devices 411 to 413 and the acceleration detection devices 421 to 423 may be performed. Period etc.) may be controlled.

  The communication circuit 450 receives the packet data (inertia data with time information) obtained by the processing of the signal processing circuit 430, converts the packet data into serial data according to a predetermined communication format, and externally Send.

  The triaxial angular velocity signals output from the angular velocity detection devices 411 to 413 and the triaxial acceleration signals output from the acceleration detection devices 421 to 423 may be digital signals. In addition, the inertial measurement device 400 of the present embodiment includes the three angular velocity detection devices 411 to 413 and the three acceleration detection devices 421 to 423, but it is sufficient that at least one angular velocity detection device is included.

  In the inertial measurement device 400 of the present embodiment, the angular velocity detection device 1 of each of the above embodiments or modifications is applied as at least one of the angular velocity detection devices 411 to 413. According to the inertial measurement device 400 of the present embodiment, the angular velocity detection device 1 capable of improving the stability of angular velocity detection is applied as at least one of the angular velocity detection devices 411 to 413, so that high measurement accuracy is achieved. Can be achieved.

3. Mobile Object Positioning Device FIG. 13 is a diagram showing a configuration example of the mobile object positioning device of the present embodiment. As shown in FIG. 13, the mobile body positioning device 500 of this embodiment includes a sensor module 510, a processing unit 520, an operation unit 530, a storage unit 540, a display unit 550, a sound output unit 560, and a communication unit 570. It is configured and mounted on various mobile objects. In addition, the mobile body positioning apparatus 500 of this embodiment may omit or change a part of the components (each unit) shown in FIG. 13, or may have a configuration in which other components are added.

  The sensor module 510 includes an inertial measurement device 511 and a satellite signal receiving unit 512.

  The inertial measurement device 511 includes three angular velocity detectors (not shown) that detect angular velocities generated around the three axes (x axis, y axis, z axis) and around the three axes (x axis, y axis, z axis). And three acceleration detectors (not shown) that detect the generated acceleration. The sensor module 510 performs predetermined processing (A / D conversion processing, attachment angle) on the three-axis angular velocity signals detected by the three angular velocity detection devices and the three-axis acceleration signals detected by the three acceleration detection devices. Error correction processing). Further, the sensor module 510 outputs inertial data (triaxial angular velocity data and triaxial acceleration data) obtained by performing predetermined processing to the processing unit 520. As the inertial measurement device 511, the inertial measurement device 400 of the above embodiment is applied.

The satellite signal receiving unit 512 receives a navigation message (“positioning information”) from a positioning satellite such as a GPS (Global Positioning System) satellite via an antenna (not shown) including orbit information and time information of the positioning satellite. Radio wave (satellite signal) superimposed thereon. The satellite signal receiving unit 512 receives satellite signals transmitted from, for example, three or more positioning satellites, and demodulates (acquires) navigation messages superimposed on the received satellite signals, for example, by a known technique. Each navigation message is output to the processing unit 520. Note that the satellite signal receiving unit 512 may use a satellite signal from a positioning navigation satellite other than GPS or a positioning satellite other than GNSS, or a WAAS (Wide) Area Augmentation System), EGNOS (European Geostationary-Satellite Navigation Overlay Service), QZSS (Quasi Zenith Satellite System), GLONASS (GLObalNAvigation Satellite System), GALILEO, BeiDou (B
Satellite signals from positioning satellites of one or more satellite positioning systems such as eiDou Navigation Satellite System may be used.

  In FIG. 13, the inertial measurement device 511 and the satellite signal reception unit 512 are included in the sensor module 510, but may not be integrated as the sensor module 510. That is, the inertial measurement device 511 and the satellite signal receiving unit 512 may not be accommodated in one package.

  The operation unit 530 is an input device including operation keys, button switches, and the like, and outputs an operation signal corresponding to an operation by the user to the processing unit 520.

  The storage unit 540 is used as a ROM (Read Only Memory) that stores programs, data, and the like for the processing unit 520 to perform various types of calculation processing and control processing, and is used as a work area of the processing unit 520 and is read from the ROM. RAM (Random Access Memory) that temporarily stores programs and data, data input from the operation unit 530, calculation results executed by the processing unit 520 according to various programs, and the like.

  The display unit 550 is a display device that includes a liquid crystal display (LCD), an organic electro-luminescence display (OELD), an electrophoretic display, and the like, and a display signal input from the processing unit 520. Various information is displayed based on.

  The sound output unit 560 is a device that outputs sound such as a speaker.

  The communication unit 570 performs various controls for establishing data communication between the processing unit 520 and the external device.

  The processing unit 520 performs various types of calculation processing and control processing according to the program stored in the storage unit 540. Specifically, the processing unit 520 acquires inertial data from the inertial measurement device 511, acquires a navigation message from the satellite signal receiving unit 512, and performs various operations according to the acquired data and operation signals from the operation unit 530. Processing, processing for controlling the communication unit 570 to perform data communication with an external device, processing for transmitting a display signal for displaying various information on the display unit 550, and outputting various sounds to the sound output unit 560 Perform processing.

  In particular, in the present embodiment, the processing unit 520 functions as each unit of the posture calculation unit 521, the position calculation unit 522, and the position correction unit 523 by executing a program stored in the storage unit 540.

  The posture calculation unit 521 calculates the posture of the mobile body on which the mobile body positioning device 500 is mounted based on the inertia data output from the inertial measurement device 511 using, for example, a known method.

  The position calculation unit 522 calculates the position of the moving object based on the navigation message output from the satellite signal reception unit 512. Specifically, the position calculation unit 522 uses the information such as the transmission time of the satellite signal included in the three or more navigation messages output from the satellite signal reception unit 512 and the radio wave propagation delay at the time of reception to Each distance between the mobile body on which the positioning device 500 is mounted and three or more positioning satellites is calculated. And the position calculation part 522 calculates the position of a moving body from the calculated distance.

The position correcting unit 523 corrects the position of the moving object calculated by the position calculating unit 522 based on the attitude of the moving object calculated by the attitude calculating unit 521. For example, the position correction unit 523 calculates the inclination angle of the moving body with respect to the horizontal plane from the attitude of the moving body, and corrects the position of the moving body on the horizontal plane to the position on the surface on which the moving body moves based on the calculated inclination angle. May be.

  The processing unit 520 displays information such as the position and orientation of the moving body on the display unit 550, outputs the information from the sound output unit 560, or transmits the information to an external device via the communication unit 570.

  The satellite signal receiving unit 512 receives each satellite signal and demodulates the navigation message, and the position calculation unit 522 calculates the distance between the moving body and each positioning satellite using the navigation message to determine the position of the moving body. However, the satellite signal receiving unit 512 may calculate the distance between the moving body and each positioning satellite, or may calculate the position of the moving body. That is, the satellite signal reception unit 512 may perform at least a part of the processing performed by the position calculation unit 522.

  According to the mobile body positioning device 500 of the present embodiment, the inertial measurement device 400 capable of achieving high measurement accuracy is applied as the inertial measurement device 511. For example, the position and orientation of the mobile body can be further increased. It can be measured with high accuracy.

4). Electronic Device FIG. 14 is an example of a functional block diagram of the electronic device of the present embodiment. As shown in FIG. 14, the electronic apparatus 600 of the present embodiment includes an angular velocity detection device 610, an arithmetic processing device 620, an operation unit 630, a ROM 640, a RAM 650, a communication unit 660, a display unit 670, and a sound output unit 680. It is configured. Note that the electronic apparatus 600 of the present embodiment may omit or change some of the components (each unit) shown in FIG. 14, or may have a configuration in which other components are added.

  The angular velocity detection device 610 detects angular velocities generated around one axis or a plurality of axes (two axes, three axes, or four or more axes), and outputs an angular velocity signal to the arithmetic processing device 620. As the angular velocity detection device 610, the angular velocity detection device 1 of each of the above embodiments or modifications is applied.

  The arithmetic processing unit 620 performs various types of calculation processing and control processing according to a program stored in the ROM 640 or the like. Specifically, the arithmetic processing device 620 controls the communication unit 660 to perform various processes according to the angular velocity signal output from the angular velocity detection device 610 and the operation signal from the operation unit 630 and to perform data communication with the outside. A process of transmitting a display signal for displaying various information on the display unit 670, a process of outputting various sounds to the sound output unit 680, and the like.

  The operation unit 630 is an input device including operation keys, button switches, and the like, and outputs an operation signal corresponding to an operation by a user to the arithmetic processing device 620.

  The ROM 640 stores programs, data, and the like for the arithmetic processing unit 620 to perform various calculation processes and control processes.

  The RAM 650 is used as a work area of the arithmetic processing unit 620, and temporarily stores programs and data read from the ROM 640, data input from the operation unit 630, arithmetic results executed by the arithmetic processing unit 620 according to various programs, and the like. To remember.

  The communication unit 660 performs various controls for establishing data communication between the arithmetic processing device 620 and an external device.

The display unit 670 is a display device that includes a liquid crystal display (LCD), an organic electro-luminescence display (OELD), an electrophoretic display, and the like, and a display input from the arithmetic processing device 620. Various information is displayed based on the signal.

  The sound output unit 680 is a device that outputs sound such as a speaker.

  According to the electronic apparatus 600 of the present embodiment, the angular velocity detection device 1 capable of improving the stability of angular velocity detection is applied as the angular velocity detection device 610. For example, processing based on changes in angular velocity (for example, The control according to the posture can be performed with higher accuracy.

  Various electronic devices can be considered as the electronic device 600. For example, work robots, health monitoring devices, unmanned driving devices, personal computers (for example, mobile personal computers, laptop personal computers, tablet personal computers), mobile terminals such as mobile phones, digital cameras, inkjet discharge Devices (for example, inkjet printers), storage area network devices such as routers and switches, local area network devices, mobile terminal base station devices, televisions, video cameras, video recorders, car navigation devices, pagers, electronic notebooks (communication functions) With electronic dictionary), electronic dictionary, calculator, electronic game machine, game controller, word processor, workstation, video phone, security TV monitor , Electronic binoculars, point-of-sale (POS) terminals, medical equipment (eg electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices, instruments (For example, vehicle, aircraft, ship instrumentation), flight simulator, head mounted display, motion trace, motion tracking, motion controller, PDR (pedestrian position measurement), and the like.

  FIG. 15 is a diagram illustrating an example of the appearance of a smartphone that is an example of the electronic device 600, and FIG. 16 is a diagram illustrating an example of the appearance of an arm-mounted portable device that is an example of the electronic device 600. A smartphone that is the electronic device 600 illustrated in FIG. 15 includes a button as the operation unit 630 and an LCD as the display unit 670. The arm-mounted portable device that is the electronic device 600 shown in FIG. 16 includes a button and a crown as the operation unit 630, and an LCD as the display unit 670. In these electronic devices 600, the angular velocity detection device 1 capable of improving the stability of angular velocity detection is applied as the angular velocity detection device 610, and therefore processing based on changes in angular velocity (for example, display control according to the posture) Etc.) can be performed with higher accuracy.

  Furthermore, as an example of the electronic device 600, there is a wristwatch-type activity meter (active tracker) which is one of portable electronic devices. A wristwatch-type activity meter is attached to a part such as a wrist (subject) by a band or the like, and includes a digital display unit so that wireless communication is possible. The above-described angular velocity detection device 1 according to the present embodiment is incorporated in a wristwatch type activity meter.

  In the liquid crystal display (LCD) constituting the display unit 670, according to various detection modes, for example, position information using a GPS or a geomagnetic sensor, exercise information such as an amount of movement using an acceleration sensor, an angular velocity sensor, or the like. In addition, biological information such as a pulse rate using a pulse wave sensor or time information such as the current time is displayed.

  FIG. 17 is a plan view of a wrist device 800 (a wristwatch-type activity meter) according to the embodiment of the portable electronic device 600. The wrist device 800 can be widely applied to a running watch, a runners watch, a multisport compatible runners watch such as duathlon and triathlon, an outdoor watch, and a satellite positioning system such as a GPS watch equipped with GPS.

The wrist device 800 is worn on a given part (for example, wrist) of a user (wearer),
User position information, exercise information, and the like can be detected. The wrist device includes a device main body 810 that is attached to the user and detects position information, exercise information, and the like, and a first band unit 821 and a second band that are attached to the device main body 810 and are attached to the user. Part 822. The wrist device 800 can be provided with a function of detecting biological information such as pulse wave information and a function of acquiring time information in addition to the user position information and exercise information.

  In the device main body 810, a bottom case (not shown) as a case is arranged on the side attached to the user, and a top case 830 as a case having an opening opening on the front side is provided on the side opposite to the side attached to the user. Has been placed. Here, the bottom case and the top case 830 form a case. A bezel 840 is provided outside the opening located on the front side (top case 830) of the device main body 810, and a top plate portion that is arranged alongside the bezel 840 inside the bezel 840 to protect the internal structure ( A windshield (for example, a glass plate) 850 is provided as an outer wall. The windshield 850 functions as a translucent cover and is disposed so as to close the opening of the top case 830. A plurality of operation units 871 (operation buttons) are provided on the side surface of the front side (top case 830) of the device main body 810. Note that the bezel 840 can be provided with a display visible from the front side.

  In addition, the device main body 810 is disposed between a display unit 874 configured by a liquid crystal display (LCD) or the like disposed immediately below the windshield plate 850, and an outer edge portion of the windshield plate 850 and the display unit 874. The display portion 874 and the moisture absorbing member 860 are accommodated in a case. Note that the moisture absorption member 860 can be provided with a display that is visible from the front side. The device main body 810 may be configured such that the user can view the display on the display unit 874 and the display on the moisture absorbing member 860 via the windshield plate 850. That is, in the list device 800 of this embodiment, various information such as detected position information, exercise information, or time information is displayed on the display unit 874, and the display is presented to the user from the top side of the device body 810. There may be. In addition, a pair of band mounting portions (not shown) that are connection portions between the first band portion 821 and the second band portion 822 are provided on both sides of the bottom case.

  FIG. 18 is an example of a functional block diagram of the wrist device 800. As shown in FIG. 18, the wrist device 800 includes a processing unit 870, a GPS sensor 880, a geomagnetic sensor 881, a pressure sensor 882, an acceleration sensor 883, an angular velocity sensor 884, a pulse sensor 885, a temperature sensor 886, an operation unit 871, and a time measuring unit. 872, a storage unit 873, a display unit 874, a sound output unit 875, a communication unit 876, a battery 877, and the like, and these units are housed in a case. However, the configuration of the list device 800 may be such that some of these components are deleted or changed, or other components are added.

The communication unit 876 performs various controls for establishing communication between the wrist device 800 and another information terminal. The communication unit 876 is, for example, Bluetooth (registered trademark) (BTLE: Bluetooth Low
Transceivers and communication units compatible with near field communication standards such as Wi-Fi (registered trademark), Zigbee (registered trademark), NFC (Near field communication), ANT + (registered trademark), etc. Reference numeral 876 includes a connector corresponding to a communication bus standard such as USB (Universal Serial Bus).

The processing unit 870 (processor) is configured by, for example, an MPU (Micro Processing Unit), a DSP (Digital Signal Processor), an ASIC (Application Specific Integrated Circuit), or the like. The processing unit 870 executes various processes based on the program stored in the storage unit 873 and the signal input from the operation unit 871. The processing by the processing unit 870 includes data processing for output signals (output data) of the GPS sensor 880, the geomagnetic sensor 881, the pressure sensor 882, the acceleration sensor 883, the angular velocity sensor 884, the pulse sensor 885, the temperature sensor 886, and the time measuring unit 872. Display processing for displaying an image on the display unit 874, sound output processing for outputting sound to the sound output unit 875, communication processing for communicating with the information terminal via the communication unit 876, and supplying power from the battery 877 to each unit Includes power control processing.

  The processing unit 870 measures the total distance traveled by the user from the start of measurement with a high-precision GPS function. Further, the processing unit 870 measures and displays the user's current travel pace from the result of distance measurement. The processing unit 870 calculates and displays the average speed from the start of the user's travel to the present. Further, the processing unit 870 measures and displays the altitude by the GPS function. The processing unit 870 measures and displays the user's stride even in a tunnel where GPS radio waves do not reach. The processing unit 870 measures and displays the number of steps (pitch) per minute of the user. The processing unit 870 measures and displays the user's heart rate with a pulse sensor. In addition, the processing unit 870 measures and displays the ground gradient in training and trail running in the mountainous area of the user. Further, the processing unit 870 automatically performs lap measurement (auto lap) when the vehicle travels a predetermined distance or a predetermined time. Further, the processing unit 870 displays the user's calorie consumption. The processing unit 870 displays the total number of steps from the start of the user's exercise.

  The angular velocity sensor 884 including the angular velocity detection device 1 according to the above embodiment detects the angular velocities in the three axial directions that intersect each other (ideally orthogonal), and according to the detected magnitude and direction of the three axial angular velocities. Output a signal (angular velocity signal).

  The wrist device 800 described above uses GPS (Global Positioning System) as a satellite positioning system, but may use other Global Navigation Satellite System (GNSS). For example, one or more satellite positioning systems such as EGNOS (European Geostationary-Satellite Navigation Overlay Service), QZSS (Quasi Zenith Satellite System), GLONASS (GLObalNAvigation Satellite System), GALILEO, and BeiDou (BeiDou Navigation Satellite System) May be used. Also, using satellite-based augmentation systems (SBAS) such as WAAS (Wide Area Augmentation System) and EGNOS (European Geostationary-Satellite Navigation Overlay Service) as at least one of the satellite positioning systems Also good.

5. FIG. 19 is a diagram (top view) illustrating an example of a moving object according to the present embodiment. As shown in FIG. 19, the moving body 700 of this embodiment includes a controller 720, a controller 730, a controller 740, a battery 750, and various controls such as an angular velocity detection device 710, an engine system, a brake system, and a keyless entry system. A backup battery 760 is included. In addition, the mobile body 700 of this embodiment may omit or change a part of the components (each part) shown in FIG. 19, or may have a configuration in which other components are added.

  The angular velocity detection device 710 detects angular velocities generated around one axis or a plurality of axes (two axes, three axes, or four or more axes), and outputs them to the controllers 720, 730, and 740, respectively. As the angular velocity detection device 710, the angular velocity detection device 1 of each of the above embodiments or modifications is applied.

According to the moving body 700 of the present embodiment, the angular velocity detection device 1 capable of improving the stability of angular velocity detection is applied as the angular velocity detection device 710, so that the change in angular velocity by the controllers 720, 730, and 740 is applied. It is possible to perform a process based on the control (for example, a control for suppressing side slip or rollover) with higher accuracy.

  As such a moving body 700, various moving bodies can be considered, and examples thereof include agricultural machines, construction machines, other automobiles (including electric cars), airplanes such as jet airplanes and helicopters, ships, rockets, and artificial satellites. .

  The present invention is not limited to the present embodiment, and various modifications can be made within the scope of the gist of the present invention.

  The above-described embodiments and modifications are merely examples, and the present invention is not limited to these. For example, it is possible to appropriately combine each embodiment and each modification.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

DESCRIPTION OF SYMBOLS 1 ... Angular velocity detection apparatus, 2 ... Package, 4 ... Lid, 6 ... Electrode, 10 ... Angular velocity detection element, 20 ... Control IC chip, 21 ... Drive circuit, 22 ... Detection circuit, 23 ... Memory | storage part, 24 ... Serial interface Circuit: 25 ... Serial interface circuit, 30 ... IC chip for generating bias voltage, 31 ... Booster circuit, 32 ... Regulator, 33 ... Resistance control circuit, 34 ... Memory unit, 35 ... Serial interface circuit, 40 ... Printed circuit board, 50, 52, 54, 56, 58 ... Electrode, 62, 64, 66, 68 ... Wire, 70 ... Conductor pattern, 102 ... Cavity, 110 ... Substrate, 112 ... Recess, 112a ... Bottom, 114 ... Post part, 120 ... Cover Body, 130 ... fixed part, 130a ... first fixed part, 130b ... second fixed part, 130c ... third fixed part, 140 ... drive Spring part 150 ... Drive part 150a ... First drive part 150b ... Second drive part 152 ... Movable drive electrode 154,156 ... Fixed drive electrode 160 ... Detection spring part 160a ... First detection spring part 160b ... 2nd detection spring part, 160c ... 3rd detection spring part, 162, 162a, 162b ... Extension part, 170 ... Connection spring part, 180 ... Detection part, 180a ... 1st detection part, 180b ... 2nd detection part 182 ... movable body, 182a ... first movable body, 182b ... second movable body, 184 ... movable detection electrode, 184a ... first movable detection electrode, 184b ... second movable detection electrode, 186 ... fixed detection electrode, 186a ... First fixed detection electrode, 186b, second fixed detection electrode, 188, 188a, 188b, movable drive monitor electrode, 189, 189a, 189b, movable drive monitor electrode, 190, 192 Fixed drive monitor electrode, 211A, 211B ... Q / V converter (charge amplifier), 212A, 212B ... phase adjustment circuit, 213 ... differential amplifier, 214 ... rectifier circuit, 215 ... integration circuit, 216 ... drive signal generation circuit, 217 ... Comparator, 218 ... Comparator, 221A, 221B ... Q / V converter (charge amplifier), 222 ... Differential amplifier, 223 ... Synchronous detection circuit, 224 ... AC amplifier, 225 ... Low pass filter, 226 ... A / D converter, 311 to 313: capacitor, 314 to 318 ... switch, 319 ... switch control circuit, 321 ... operational amplifier, 322 ... resistor, 323 ... variable resistor circuit, 324 ... reference voltage circuit, 400 ... inertial measuring device, 411 , 412, 413 ... angular velocity detection device, 421, 422, 423 ... acceleration detection device, 4 DESCRIPTION OF SYMBOLS 30 ... Signal processing circuit, 440 ... Memory | storage part, 450 ... Communication circuit, 500 ... Mobile body positioning apparatus, 510 ... Sensor module, 520 ... Processing part, 521 ... Posture calculation part, 522 ... Position calculation part, 523 ... Position correction part 530: operation unit, 540 ... storage unit, 550 ... display unit, 560 ... sound output unit, 570 ... communication unit, 600 ... electronic device, 610 ... angular velocity detection device, 620 ... arithmetic processing unit, 630 ... operation unit, 640 ... ROM, 650 ... RAM, 660 ... communication unit, 670 ...
Display unit, 680 ... Sound output unit, 700 ... Moving body, 710 ... Angular velocity detection device, 720 ... Controller, 730 ... Controller, 740 ... Controller, 750 ... Battery, 760 ... Backup battery, 800 ... Wrist device, 810 ... Device Body, 821 ... first band part, 822 ... second band part, 830 ... top case, 840 ... bezel, 850 ... windshield, 860 ... moisture absorbing member, 870 ... processing part, 880 ... GPS sensor, 881 ... geomagnetic Sensor, 882 ... Pressure sensor, 883 ... Acceleration sensor, 884 ... Angular velocity sensor, 885 ... Pulse sensor, 886 ... Temperature sensor, 871 ... Operation part, 872 ... Timekeeping part, 873 ... Memory part, 874 ... Display part, 875 ... Sound Output unit, 876 ... communication unit, 877 ... battery

Claims (14)

An angular velocity detection element;
A first integrated circuit chip for controlling the operation of the angular velocity detecting element;
A second integrated circuit chip that generates a bias voltage applied to the angular velocity detecting element;
Including
The second integrated circuit chip is an angular velocity detection device that is separate from the first integrated circuit chip. In claim 1,
The first integrated circuit chip is supplied with a first power supply voltage and operates.
The angular velocity detection device, wherein the second integrated circuit chip operates by being supplied with a second power supply voltage higher than the first power supply voltage. In claim 2,
The second integrated circuit chip is
A booster circuit for boosting the second power supply voltage;
A regulator that operates at a voltage boosted by the booster circuit and generates the bias voltage;
An angular velocity detection device. In any one of Claims 1 thru | or 3,
The angular velocity detection device, wherein a voltage value of the bias voltage is variable. In any one of Claims 1 thru | or 4,
The angular velocity detection element is accommodated in a container,
The first integrated circuit chip and the container in which the angular velocity detecting element is accommodated are stacked in an angular velocity detecting device. In any one of Claims 1 thru | or 4,
The angular velocity detection element is accommodated in a container,
The first integrated circuit chip, the container, and the second integrated circuit chip are stacked,
The container is an angular velocity detection device provided between the first integrated circuit chip and the second integrated circuit chip. In claim 6,
The angular velocity detection device, wherein a conductor pattern to which the bias voltage is applied is provided on a surface of the second integrated circuit chip facing the container. In any one of Claims 1 thru | or 7,
The second integrated circuit chip is an angular velocity detection device manufactured by a semiconductor manufacturing process under conditions different from those of the first integrated circuit chip. An angular velocity detection element;
A first integrated circuit chip for controlling the operation of the angular velocity detecting element;
Including
The first integrated circuit chip and the angular velocity detecting element are accommodated in a container,
The angular velocity detection device, wherein the container is provided with a terminal to which a bias voltage of the angular velocity detection element is applied. The angular velocity detection device according to any one of claims 1 to 9,
A signal processing circuit for obtaining an angular velocity signal from the angular velocity detection device and processing the angular velocity signal;
A communication circuit for transmitting the inertial data obtained by the processing of the signal processing circuit to the outside;
Including an inertial measurement device. A mobile body positioning device mounted on a mobile body and measuring the position of the mobile body,
An inertial measurement device according to claim 10;
A satellite signal receiving unit that receives a satellite signal from a positioning satellite and obtains positioning information superimposed on the satellite signal;
A position calculation unit that calculates the position of the moving body based on the positioning information;
An attitude calculation unit that calculates an attitude of the moving body based on the inertia data output from the inertia measurement device;
A position correction unit that corrects the position based on the posture;
Including a mobile positioning device. The angular velocity detection device according to any one of claims 1 to 9,
A case in which the angular velocity detection device is accommodated;
A processing unit housed in the case and processing output data from the angular velocity detection device;
A display unit housed in the case;
A translucent cover closing the opening of the case;
Including portable electronic devices.   An electronic apparatus comprising the angular velocity detection device according to any one of claims 1 to 9.   A moving body comprising the angular velocity detection device according to claim 1.