JP2019002809A - Removal member, calibration device and gas analyzer - Google Patents

Abstract

To easily remove removal target substance from calibration gas.SOLUTION: A scrubber 103 includes: an inlet Is; a case 1031; scrubber substance 1034; and an exit Os. The inlet Is is connected to an exhaust port Oc through which calibration gas is exhausted. The case 1031 has an interior space S through which calibration gas Gc taken in from the inlet Is passes. The scrubber substance 1034 is filled into the interior space S of the case 1031 and is solid matter for removing removal target substance contained in the calibration gas Gc passing through the interior space S. The exit Os exhausts the calibration gas Gc whose removal target substance is removed.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a removal member used in a gas analyzer, a calibration device using the removal member, and a gas analyzer using the calibration device.

  Conventionally, an apparatus for analyzing the concentration of a predetermined component contained in exhaust gas flowing through a flue or the like is known. For example, Patent Document 1 discloses an apparatus that irradiates a sample gas existing in a flue or the like with light and analyzes the concentration of a predetermined component that absorbs irradiation light from the intensity of light that has passed through the sample gas. Yes.

  In this apparatus, a reflector disposed outside the wall constituting the flue is disposed on the optical path of the irradiation light, and the apparatus is calibrated in a space formed between the reflector and the light source that irradiates the irradiation light. By filling a gas to be used (referred to as calibration gas) and irradiating the space with light, span calibration and / or zero point calibration of the apparatus is performed.

JP 2013-57651 A

In the above apparatus, when exhaust gas or the like is a measurement target, the exhaust gas may include a substance to be removed and discharged to the outside (substance to be removed). In such a case, the calibration of the apparatus is executed using a gas containing the substance to be removed as a calibration gas.
In the above apparatus, it is necessary to discharge the calibration gas from the above space after the calibration is performed. To easily execute the calibration of the apparatus, it is required to easily discharge the calibration gas into the atmosphere. .

  An object of the present invention is to easily remove a substance to be removed from a calibration gas used during calibration of a gas analyzer.

Hereinafter, a plurality of modes will be described as means for solving the problems. These aspects can be arbitrarily combined as necessary.
A removal member according to an aspect of the present invention is a member for processing a calibration gas used during calibration of a gas analyzer. The removing member includes an inlet, a case, a scrubber substance (removing substance, adsorbing substance), and an outlet. The inlet is connected to an outlet for discharging calibration gas. The case has an internal space through which calibration gas taken from the inlet passes. The scrubber substance is a solid material that fills the internal space of the case and removes the removal target substance contained in the calibration gas that passes through the internal space. The outlet discharges the calibration gas from which the substance to be removed has been removed.
The removal member can easily remove the substance to be removed from the calibration gas by a dry method, and discharge the calibration gas containing almost no substance to be removed.

  The scrubber substance may contain at least one substance selected from calcium hydroxide, magnesium hydroxide, potassium hydroxide, calcium carbonate, potassium carbonate, zeolite, and activated carbon. Thereby, the removal target substance contained in the calibration gas can be efficiently removed, and a highly safe removal member can be provided.

  The removal member may further include a filter. The filter is disposed between the inlet and the scrubber material. Thereby, even if water is mixed in the gas to be introduced, the scrubber substance can be protected.

  The scrubber material may be impregnated with a colorant whose color changes according to the removal ability of the scrubber material to be removed. Thereby, the removal capability of the removal target substance of a scrubber substance can be confirmed visually.

A calibration apparatus according to another aspect of the present invention includes a calibration gas introduction unit and the removal member. The calibration gas introducing unit introduces a calibration gas used when the gas analyzer is calibrated into the gas analyzer.
As a result, the calibration device can discharge the calibration gas introduced into the gas analyzer by the calibration gas introduction unit after the removal target substance is easily removed in a dry manner.

A gas analyzer according to still another aspect of the present invention includes a light source, a calibration cell, a light receiving unit, a calibration gas introducing unit, and the removing member.
The light source irradiates the measurement light in the measurement space where the measurement target gas exists. The calibration cell is provided on the optical path of the measurement light and has an inlet for introducing the calibration gas therein and an outlet for discharging the internal calibration gas. The light receiving unit receives the measurement light that has passed through the measurement space or the calibration cell. The calibration gas introduction unit is connected to the introduction port of the calibration cell and fills the calibration cell with the calibration gas. The removal member is connected to the outlet of the calibration cell.
Thereby, the calibration gas used for calibration of the gas analyzer can be discharged after the removal target substance is easily removed by a dry method.

  By using the above removal member, it is possible to easily remove the substance to be removed from the calibration gas by a dry method.

The schematic cross section of a gas analyzer. The figure which shows the structure of a scrubber. The flowchart which shows the calibration method of a gas analyzer.

1. First Embodiment (1) Overall Configuration of Gas Analyzer A gas analyzer 100 according to an embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic cross-sectional view of a gas analyzer.
The gas analyzer 100 according to the present embodiment is an apparatus for analyzing, for example, hydrogen chloride (HCl) contained in the exhaust gas Ge discharged from the flue 1 of the garbage incineration facility as the measurement target gas Gs. In addition, the gas analyzer 100 according to the present embodiment can analyze, for example, ammonia (NH ₃ ), hydrogen fluoride (HF), and carbon monoxide (CO) contained in the exhaust gas Ge as the measurement target gas Gs.

  In another embodiment, the gas analyzer 100 may analyze a process gas generated in various manufacturing processes (for example, a semiconductor process, a petrochemical process, etc.) and containing hydrogen chloride.

  The gas analyzer 100 includes a probe tube 2 that is connected to a wall 1 a of the flue 1 via a flange f and a part of which is inserted into the flue 1. The probe tube 2 is a cylindrical member provided at a location where the introduction hole 21 for introducing the exhaust gas Ge into the inside by diffusion is inserted into the flue 1. The material of the probe tube 2 can be, for example, a metal exhibiting durability against strong acidity and / or strong alkalinity.

The gas analyzer 100 includes a light source 3 disposed inside the housing C at the proximal end of the probe tube 2. The light source 3 is, for example, a laser such as a DFB laser diode, an LED, a halogen lamp, or the like that outputs the measurement light Lm to the internal space of the probe tube 2.
In particular, by adopting an optical system that uses a laser as the light source 3 in principle and has little drift, the frequency of performing calibration of the gas analyzer 100 can be reduced (for example, every six months to one year, as described later). Perform calibration).

  The gas analyzer 100 includes a light receiving unit 4 disposed in the vicinity of the light source 3 outside the wall 1a. The light receiving unit 4 is a photoelectric conversion device such as a photodiode that measures the intensity of the measurement light Lm that has passed through the internal space of the probe tube 2 (the measurement space where the measurement target gas Gs exists or the calibration cell Sc described later). is there.

In the present embodiment, the light source 3 and the light receiving unit 4 are isolated from the internal space of the probe tube 2 by an optical window W that can transmit the measurement light Lm. Further, another optical window W1 capable of transmitting the measurement light Lm is arranged at a position away from the optical window W in the internal space of the probe tube 2 by a predetermined distance. The internal space of the probe tube 2 and the two optical windows W and W1 form a calibration cell Sc.
That is, the calibration cell Sc is provided on the optical path of the measurement light Lm, and when the gas analyzer 100 is calibrated, the calibration gas Gc used for the calibration is filled therein.

In the portion of the probe tube 2 where the calibration cell Sc is formed, an introduction port Ic for introducing the calibration gas Gc and an exhaust port Oc for discharging the calibration gas from the calibration cell Sc are provided. When calibration is performed in the gas analyzer 100, the calibration device 10 is connected to the introduction port Ic and the discharge port Oc.
The calibration device 10 is a device that introduces the calibration gas Gc into the calibration cell Sc from the introduction port Ic, and discharges the calibration gas Gc from the inside of the calibration cell Sc to the outside through the discharge port Oc. The detailed configuration of the calibration apparatus 10 will be described in detail later.

The gas analyzer 100 includes a first reflector 5. The first reflector 5 is, for example, a corner cube or a movable plane mirror that can be inserted into or removed from the flue 1 side of the calibration cell Sc by a driving mechanism (not shown). As shown in FIG. 1, when the first reflector 5 is present in the internal space of the probe tube 2, the measurement light Lm that has passed through the calibration cell Sc is reflected by the first reflector 5 and is incident on the light receiving unit 4.
On the other hand, the first reflector 5 is removed from the internal space of the probe tube 2 by the drive mechanism described above when performing the analysis of the measurement target gas Gs.

The gas analyzer 100 includes a control unit 6. The control unit 6 includes a CPU (Central Processing Unit), a storage device such as a RAM and a ROM, a display unit (for example, a liquid crystal display), and various interfaces, and a computer system that controls the gas analyzer 100. It is.
Further, the control unit 6 is based on, for example, the ratio between the intensity of the measurement light Lm output from the light source 3 and the intensity of the measurement light Lm received through the internal space of the probe tube 2 and received by the light receiving unit 4. The concentration of the measurement target gas Gs is calculated.

  The gas analyzer 100 includes a second reflector 7 at the tip of the probe tube 2 on the flue 1 side. The second reflector 7 is, for example, a corner cube or a plane mirror that reflects the measurement light Lm propagating through the internal space of the probe tube 2 toward the light receiving unit 4 during analysis of the measurement target gas Gs.

  The gas analyzer 100 includes a purge gas introduction unit 8. The purge gas introduction unit 8 introduces purge air Pa into the internal space of the probe tube 2. Thereby, it can prevent that the 2nd reflector 7 etc. are contaminated with exhaust gas Ge or process gas.

(2) Configuration of Calibration Device The detailed configuration of the calibration device 10 for introducing and discharging the calibration gas Gc from the gas analyzer 100 will be described below with reference to FIG.
The calibration apparatus 10 includes a calibration gas introduction unit 101 that is connected to the introduction port Ic and fills the calibration cell Sc with the calibration gas Gc. The calibration gas introduction unit 101 includes, for example, a first gas cylinder 1011 filled with a background gas Gb, a second gas cylinder 1013 filled with a span gas Gsp, and a three-way valve 1015.

  The background gas Gb is a gas component that is not the measurement target gas Gs contained in the exhaust gas Ge, and is, for example, nitrogen or air. That is, the background gas Gb is a gas for measuring the intensity of the measurement light Lm received by the light receiving unit 4 when the measurement light Lm passes through the gas not including the measurement target gas Gs. . Therefore, the background gas Gb is the calibration gas Gc used for the zero point calibration of the gas analyzer 100.

  On the other hand, the span gas Gsp is a gas including, for example, a background gas Gb used for zero point calibration and a measurement target gas Gs having a predetermined concentration. For example, nitrogen or air and a measurement target gas Gs having a predetermined concentration (this In the embodiment, hydrogen chloride). That is, the span gas Gsp is a gas for measuring the intensity of the measurement light Lm received by the light receiving unit 4 when the measurement light Lm passes through the gas containing the measurement target gas Gs having a specific concentration. is there. Therefore, the span gas Gsp is a calibration gas Gc used for span calibration of the gas analyzer 100.

  When performing span calibration in the gas analyzer 100, the three-way valve 1015 is operated to allow gas to flow between the second gas cylinder 1013 and the inlet Ic, and the calibration gas Gc is used as the calibration gas Gc from the second gas cylinder 1013. Introduce into Sc.

  On the other hand, when zero calibration is performed in the gas analyzer 100, the three-way valve 1015 is operated to allow gas to flow between the first gas cylinder 1011 and the inlet Ic, and the background gas Gb is calibrated from the first gas cylinder 1011. The gas Gc is introduced into the calibration cell Sc.

  The calibration device 10 includes a scrubber 103 (an example of a removal member) that is connected to the discharge port Oc when the gas analyzer 100 is calibrated, and removes a substance to be removed from the calibration gas Gc discharged from the calibration cell Sc. . The detailed configuration of the scrubber 103 will be described later.

  The calibration device 10 has a flow meter 105 connected to the outlet Os of the scrubber 103. The flow meter 105 is, for example, a needle valve that controls the flow rate of the calibration gas Gc introduced into the calibration cell Sc.

By having the above configuration, the calibration apparatus 10 can discharge the calibration gas Gc introduced into the calibration cell Sc by the calibration gas introduction unit 101 after easily removing the substance to be removed.
In particular, for example, a gas not provided with a special exhaust port (for example, an exhaust port connected to the flue 1 through which the exhaust gas Ge flows) for discharging the calibration gas Gc containing the substance to be removed introduced into the calibration cell Sc. It is a useful device for an analyzer (for example, a direct insertion type gas analyzer). This is because the above-described calibration device 10 is used without being connected to the flue 1 as long as there is an exhaust port for exhausting the calibration gas Gc to the atmosphere. Because it can.

(3) Configuration of Scrubber Hereinafter, the configuration of the scrubber 103 used in the calibration apparatus 10 will be described with reference to FIG. FIG. 2 is a diagram showing the configuration of the scrubber.
The scrubber 103 has a case 1031. The case 1031 is, for example, a resin member such as a transparent or translucent cylindrical plastic, and a material resistant to corrosive gas is preferable. The scrubber 103 is screwed at one end of the case 1031 and has an inlet member 1032 provided with an inlet Is for the calibration gas Gc at the center thereof. The calibration gas Gc taken from the inlet Is can pass through the internal space S of the case 1031.

  A filter 1033 is filled inside one end of the case 1031 to which the inlet member 1032 is screwed. The filter 1033 is, for example, a Bonden (registered trademark) filter that removes moisture of the calibration gas Gc taken from the inlet Is. In addition, since the filter 1033 has elasticity, the scrubber material 1034 can be prevented from being damaged when the case 1031 is filled with the solid scrubber material 1034.

  The scrubber 103 has a scrubber material 1034. The scrubber substance 1034 is a solid substance that removes the removal target substance (hydrogen chloride that is the measurement target gas Gs in this embodiment) contained in the calibration gas Gc that passes through the internal space S. The scrubber substance 1034 is filled in the internal space S of the case 1031.

As the scrubber substance 1034 for removing hydrogen chloride contained in the calibration gas Gc, for example, a substance whose main component is an alkaline substance can be used. Specifically, for example, a scrubber substance 1034 whose main component is porous calcium hydroxide (Ca (OH) ₂ ) or magnesium hydroxide (Mg (OH) ₂ ) can be used. In this embodiment, a scrubber substance 1034 containing porous calcium hydroxide in a concentration ratio of about 80 to 90% is used.
By using calcium hydroxide and magnesium hydroxide as main components, the scrubber substance 1034 can be easily handled, and the removal target substance having acidity such as hydrogen chloride can be efficiently removed.

  Since the scrubber substance 1034 is porous, the surface area can be increased, and hydrogen chloride contained in the calibration gas Gc can be efficiently removed.

When hydrogen fluoride is a substance to be removed, for example, it is preferable to use a scrubber substance 1034 whose main component is calcium hydroxide or potassium hydroxide (KOH). For ammonium, it is preferable to use, for example, a scrubber substance 1034 mainly composed of calcium carbonate (CaCO ₃ ), potassium carbonate (K ₂ CO ₃ ), zeolite, and activated carbon. For carbon monoxide, for example, it is preferable to use a scrubber substance 1034 mainly composed of activated carbon or zeolite.
The scrubber substance 1034 is not limited to the above as long as the scrubber substance 1034 contains a substance that can be adsorbed or reacted and converted into another safe substance as a main component.

  The scrubber substance 1034 is impregnated with a colorant that changes in color according to the removal ability of the scrubber substance 1034 to be removed. As such a colorant, for example, a colorant that changes color depending on the pH of the scrubber substance 1034 or that changes color by reacting with the substance to be removed (hydrogen chloride) can be used.

  For example, ethyl violet can be used as the colorant that changes color depending on the pH of the scrubber substance 1034. In this case, when the scrubber substance 1034 is used for removing the substance to be removed, the pH value of the scrubber substance 1034 decreases, and the color of the scrubber substance 1034 changes from white to bluish purple.

On the other hand, for example, silver nitrate (AgNO ₃ ) can be used as a colorant that changes color by reacting with hydrogen chloride. In this case, as the scrubber substance 1034 is used to remove the substance to be removed, hydrogen chloride and silver nitrate react to generate more silver chloride (AgCl), and the color of the scrubber substance 1034 changes to white.

  The scrubber 103 has an outlet member 1035. The outlet member 1035 is screwed at the other end of the case 1031 opposite to the side where the inlet member 1032 is screwed, and an outlet Os for the calibration gas Gc is provided at the center thereof. The calibration gas Gc from which the removal target substance has been removed through the internal space S is discharged to the outside from the outlet Os.

  The inside of the other end of the case 1031 to which the outlet member 1035 is screwed is filled with a filter 1036 (for example, Bonden (registered trademark) filter). In addition, a member 1037 (for example, a rubber O-ring or the like) that makes the case 1031 and the outlet member 1035 airtight is provided between the outlet member 1035 and the filter 1036.

In the scrubber 103 having the above-described configuration, the solid scrubber substance 1034 calibrates the removal target substance (hydrogen chloride) contained in the calibration gas Gc while the calibration gas Gc taken from the inlet Is passes through the internal space S. The calibration gas Gc which is removed from the gas Gc and hardly contains the substance to be removed can be discharged from the outlet Os.
That is, the above-mentioned scrubber 103 can easily remove the removal target substance contained in the calibration gas Gc by a dry method, and discharge the calibration gas Gc containing almost no removal target substance.

  Actually, as a result of carrying out a test of how much hydrogen chloride as a removal target substance can be removed using the scrubber 103 having the above-described configuration, the calibration gas Gc discharged from the outlet Os of the scrubber 103 is It was found that only 0.2 ppm (or about the detection limit) of hydrogen chloride was contained, and the calibration gas Gc after being processed by the scrubber 103 could be discharged to the atmosphere.

  As described above, the scrubber 103 according to the present embodiment can remove the target substance contained in the gas to a level that is sufficiently safe for the human body and the environment. Therefore, by connecting the scrubber 103 to the discharge port Oc of the calibration cell Sc and passing the calibration gas Gc through the scrubber 103 and exhausting the gas, the calibration gas Gc is harmful to the environment and the human body (for example, , Hydrogen chloride, ammonia, hydrogen fluoride, carbon monoxide, etc.) are particularly effective.

(4) Calibration Method for Gas Analyzer Hereinafter, a calibration method for the gas analyzer 100 according to the present embodiment will be described with reference to FIG. FIG. 3 is a flowchart showing a calibration method of the gas analyzer. In the following, the span calibration method of the gas analyzer 100 will be described as an example. Moreover, the following span calibration is performed, for example, at the time of maintenance of the gas analyzer 100 (for example, every six months to one year).
Zero point calibration can also be performed in the same manner as described below except that the background gas Gb is introduced from the first gas cylinder 1011 into the calibration cell Sc.

  In order to start span calibration, first, the calibration device 10 for introducing the calibration gas Gc is connected to the gas analyzer 100 (step S1).

  Specifically, the calibration gas introduction unit 101 is connected to the introduction port Ic of the gas analyzer 100 using a gas pipe or the like. Further, the inlet Is of the scrubber 103 and the outlet Oc of the gas analyzer 100 are connected using a gas pipe or the like. Further, the outlet Os of the scrubber 103 and the flow meter 105 (inlet thereof) are connected using a gas pipe or the like.

  After the calibration device 10 is connected to the gas analyzer 100 and the first reflector 5 is introduced into the internal space of the probe tube 2, the flow rate is controlled by the flow meter 105, and the calibration gas introduction unit 101 is connected to the second gas cylinder. From 1013, the span gas Gsp is introduced into the calibration cell Sc as the calibration gas Gc (step S2). In the present embodiment, during execution of span calibration, the calibration gas introduction unit 101 maintains the span gas Gsp while being circulated in the calibration cell Sc at a predetermined flow rate. Since the scrubber 103 is connected to the discharge port Oc, the span gas Gsp discharged from the flowmeter 105 while the span gas Gsp is circulated inside the calibration cell Sc contains almost all hydrogen chloride (material to be removed). Absent.

  With the span gas Gsp being circulated inside the calibration cell Sc, the light source 3 irradiates the measurement light Lm toward the calibration cell Sc, and the light receiving unit 4 measures the intensity of the measurement light Lm that has passed through the calibration cell Sc. (Step S3). Thereafter, span calibration is executed using the acquired measurement value of the intensity of the measurement light Lm, and the result of span calibration is displayed on the display unit of the control unit 6.

  If it is determined from the execution result of the span calibration that the span calibration is properly performed, the flow of the span gas Gsp to the calibration cell Sc is stopped (step S4), and the span calibration is terminated.

  In the above calibration method, the substance to be removed (hydrogen chloride) can be removed from the calibration gas Gc (span gas Gsp) to be discharged to the outside by a simple method of connecting the scrubber 103 to the discharge port Oc. Further, the scrubber 103 after use can be discarded when it is determined that the removal ability of the substance to be removed is excessively reduced based on the color change of the scrubber substance 1034.

  Thus, in the above-described calibration method, for example, in order to pass the calibration gas Gc through a liquid that can dissolve the substance to be removed, the labor for transporting the container containing the liquid to the vicinity of the discharge port Oc is not required. In addition, it is possible to easily remove the removal target substance contained in the calibration gas Gc and discharge the processed calibration gas Gc to the atmosphere without causing a problem that it becomes difficult to process the liquid in which the removal target substance is dissolved. It can be removed to the extent.

2. Other Embodiments Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention. In particular, a plurality of embodiments and modifications described in this specification can be arbitrarily combined as necessary.
(A) Gases other than the measurement target gas Gs contained in the exhaust gas Ge may be removal target substances to be removed by the scrubber 103. In this case, when the zero point calibration of the gas analyzer 100 is performed, the calibration gas introduction unit 101 introduces, for example, a gas containing nitrogen or air and the removal target substance into the calibration cell Sc as the background gas Gb. To do.

  As described above, even when the gas other than the measurement target gas Gs is the removal target substance, that is, even when the background target gas Gb used when performing the zero point calibration includes the removal target substance, the calibration device 10 By having the scrubber 103, the background gas Gb can be discharged to the outside after the removal target substance contained in the background gas Gb is removed during the zero point calibration.

(B) The calibration apparatus 10 and / or scrubber 103 described in the first embodiment is a type (probe system) type gas analyzer that introduces exhaust gas Ge into the internal space of the probe tube 2 described in the first embodiment. It can be used besides.
For example, the present invention can also be used for a gas analyzer of a type (cross-stack type) that directly irradiates the flue 1 containing the exhaust gas Ge or the like with the measurement light Lm and receives the measurement light Lm that has passed through the flue 1.
Further, for example, it can be used for a gas analyzer of a type (sampling method) in which the measurement light Lm is irradiated inside the measurement cell in which the exhaust gas Ge or the like is sampled and the measurement light Lm that has passed through the measurement cell is received.

  The present invention can be widely applied to scrubbers used in gas analyzers that remove and remove a substance to be removed from a calibration gas.

DESCRIPTION OF SYMBOLS 100 Gas analyzer 1 Flue 1a Wall 2 Probe tube 21 Introduction hole 3 Light source 4 Light-receiving part 5 1st reflector 6 Control part 7 2nd reflector 8 Purge gas introduction part 10 Calibration apparatus 101 Calibration gas introduction part 1011 1st gas cylinder 1013 2nd Gas cylinder 1015 Three-way valve 103 Scrubber 1031 Case 1032 Inlet member 1033 Filter 1034 Scrubber substance 1035 Outlet member 1036 Filter 1037 Member 105 Flowmeter Ic Inlet Oc Outlet Is Inlet Os Outlet S Internal space Sc Calibration cell W, W1 Optical window f Flange

Claims (6)

A member for processing calibration gas used at the time of calibration of the gas analyzer,
An inlet connected to an outlet for discharging the calibration gas;
A case having an internal space through which the calibration gas taken from the inlet passes;
A scrubber substance that is a solid substance that removes a substance to be removed contained in the calibration gas that is filled in the internal space and passes through the internal space;
An outlet for discharging the calibration gas from which the substance to be removed has been removed;
A removal member comprising:   The removal member according to claim 1, wherein the scrubber substance includes at least one substance selected from calcium hydroxide, magnesium hydroxide, potassium hydroxide, calcium carbonate, potassium carbonate, zeolite, and activated carbon.   The removal member according to claim 1, further comprising a filter disposed between the inlet and the scrubber material.   The removal member according to any one of claims 1 to 3, wherein the scrubber substance is impregnated with a colorant that changes in color according to the removal ability of the removal target substance of the scrubber substance. A calibration gas introduction part for introducing a calibration gas used for calibration of the gas analyzer into the gas analyzer;
The removal member according to any one of claims 1 to 4, connected to an exhaust port for discharging the calibration gas of the gas analyzer.
A calibration apparatus comprising: A light source for irradiating measurement light to the measurement space where the measurement target gas exists
A calibration cell provided on the optical path of the measurement light and having an inlet for introducing a calibration gas therein and an outlet for discharging the calibration gas therein;
A light receiving unit that receives the measurement light that has passed through the measurement space or the calibration cell;
A calibration gas introduction unit connected to the introduction port and filling the calibration gas into the calibration cell;
The removal member according to any one of claims 1 to 4, connected to the discharge port,
A gas analyzer comprising:

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