JP2018132432A - Encoder device, driving device, stage device, and robot device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an encoder device which can stably operate.SOLUTION: An encoder device EC includes: a position detection unit for detecting the positional information on a mobile body; a magnet 3, which relatively moves to the position detection unit; a supporting member 22 supporting the position detection unit at least partially; and a signal generation unit 4 partially located in a hole part 24 of the supporting member 22, the signal generation unit generating an electric signal by changes in the magnetic field formed by the magnet 3.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an encoder device, a drive device, a stage device, and a robot device.

  A multi-rotation type encoder device that distinguishes the number of rotations of a rotary shaft is mounted on various devices such as a robot device (see, for example, Patent Document 1 below).

JP-A-8-50034

  According to the first aspect of the present invention, a position detection unit that detects position information of the moving body, a magnet that moves relative to the position detection unit, a support member that supports at least a part of the position detection unit, An encoder device is provided that includes a signal generation unit that is arranged at least partially in a hole formed in a support member and generates an electrical signal by a change in a magnetic field formed by a magnet.

  According to the second aspect of the present invention, the position detection unit that detects the position information of the moving body, the magnet that moves relative to the position detection unit, the position detection unit is supported, and the detection result of the position detection unit is obtained. An encoder device is provided that includes a processing substrate to be processed, and a signal generation unit that generates at least a part of a space formed in the processing substrate and generates a detection signal by a change in a magnetic field formed by a magnet.

  According to a third aspect of the present invention, there is provided a driving device including the encoder device according to the first or second aspect and a driving unit that supplies a driving force to the moving body.

  According to a fourth aspect of the present invention, there is provided a stage apparatus including the driving device according to the third aspect and a stage moved by the driving device.

  According to a fifth aspect of the present invention, there is provided a robot apparatus including the driving device according to the third aspect and an arm that is moved by the driving device.

It is a figure which shows the encoder apparatus which concerns on 1st Embodiment. It is a figure which shows the encoder apparatus which concerns on 1st Embodiment. It is a figure which shows the magnet, support member, and signal generation part which concern on 1st Embodiment. It is a figure which shows the signal generation part which concerns on 1st Embodiment. It is a figure which shows the multi-rotation information detection part and electric power supply part which concern on 1st Embodiment. It is a figure which shows the magnet, support member, and signal generation part which concern on 2nd Embodiment. It is a figure which shows the magnet of the modification which concerns on embodiment, a supporting member, and a signal generation part. It is a figure which shows the magnet of the modification which concerns on embodiment, a supporting member, and a signal generation part. It is a figure which shows the magnet, support member, and signal generation part which concern on 3rd Embodiment. It is a figure which shows the drive device which concerns on embodiment. It is a figure which shows the stage apparatus which concerns on embodiment. It is a figure which shows the robot apparatus which concerns on embodiment.

[First Embodiment]
A first embodiment will be described. FIG. 1 is a diagram illustrating an encoder device according to the present embodiment. The encoder device EC detects position information (moving position information) of a moving body (moving member, rotating member). The encoder device EC is, for example, a rotary encoder. The moving body in the rotary encoder is, for example, the rotation axis SF of the motor M (power supply unit), and the movement of the moving body is, for example, rotation around a predetermined axis. Further, the position information of the moving body is, for example, rotation position information of the rotation axis SF.

  The rotating shaft SF is, for example, a shaft (rotating body or rotating member) of the motor M, and is connected to the shaft of the motor M via a power transmission unit such as a transmission and connected to a load (output shaft). ). The rotational position information detected by the encoder device EC is supplied to the motor control unit MC. The motor control unit MC controls the rotation of the motor M (for example, the rotation axis SF) using the rotation position information supplied from the encoder device EC. The encoder device EC may be, for example, a one-dimensional or two-dimensional linear encoder, and may detect position information of a moving body in a power driving unit such as a linear motor or a planar motor.

  The encoder device EC includes a position detection unit 1 and a power supply unit 2. The position detection unit 1 detects rotation position information of the rotation axis SF. The encoder device EC is, for example, a multi-rotation absolute encoder. The encoder device EC can detect rotational position information including multi-rotation information indicating the number of rotations of the rotation axis SF and angular position information indicating an angular position (rotation angle) of less than one rotation. The position detection unit 1 includes a multi-rotation information detection unit 1A and an angle detection unit 1B. The angle detector 1B detects the angular position of the rotation axis SF. The multi-rotation information detection unit 1A detects multi-rotation information of the rotation axis SF.

  The encoder device EC detects rotational position information of the rotating shaft SF in each of a normal state and a backup state in which the power supply sources consumed by the encoder device EC are different. For example, at least a part of the position detection unit 1 (for example, the multi-rotation information detection unit 1A, the angle detection unit 1B) detects the rotation position information of the rotation axis SF by the power supplied from the first power supply PW1 in the normal state. To do.

  The first power supply PW1 is, for example, a main power supply of a device (eg, drive device, stage device, robot device) on which the encoder device EC is mounted. In the normal state, the power of the first power supply PW1 is turned on, the first power supply PW1 is turned on, and power is supplied from the first power supply PW1 to the device on which the encoder device EC is mounted. And at least one of a state in which power is supplied from the first power supply PW1 to the encoder device EC.

  For example, the first power supply PW1 is, in a normal state, power consumed for driving the rotation axis SF and a detection operation of the position detection unit 1 (for example, an operation for calculating and detecting angular position information and multi-rotation information). Supply the power consumed. At least a part of the position detection unit 1 receives power supply from the first power supply PW1 and detects rotational position information of the rotation shaft SF. The motor control unit MC controls the rotation of the rotating shaft SF by adjusting the electric power from the first power supply PW1 and supplying it to the motor M based on the detection result of the position detection unit 1.

  At least a part of the position detection unit 1 (eg, the multi-rotation information detection unit 1A) is supplied from a second power source (eg, the power supply unit 2) different from the first power source PW1 in a backup state different from the normal state. It is possible to operate with power. The backup state includes, for example, a state where the power supply from the first power supply PW1 is cut off, a state where the power of the first power supply PW1 is not turned on, a state where the first power supply PW1 is off, and an encoder device EC Includes at least one state in which power is not supplied from the first power source PW1 to the device on which the power is mounted, and a state in which power is not supplied from the first power source PW1 to the encoder device EC.

  The power supply unit 2 includes, for example, a magnet 3, a signal generation unit 4, a switching unit 5, and a battery 6. For example, the power supply unit 2 intermittently (selectively, intermittently) supplies power to at least a part of the position detection unit 1 (for example, the multi-rotation information detection unit 1A) in the backup state. In the backup state, the position detection unit 1 receives power supply from the power supply unit 2 and detects at least a part (for example, multi-rotation information) of the rotation position information of the rotation axis SF. For example, the multi-rotation information detection unit 1A intermittently receives the power supply from the second power source (for example, the power supply unit 2) and intermittently detects the multi-rotation information. The multi-rotation information detected by the multi-rotation information detection unit 1A in the backup state is, for example, when power supply from the first power supply PW1 is started and switched from the backup state to the normal state (for example, when the drive device is started). The rotation of the rotating shaft SF by the motor control unit MC is used for control.

  The multi-rotation information detection unit 1A detects multi-rotation information of the rotation shaft SF in each of a normal state in which power is supplied from the first power source PW1 and a backup state in which power is supplied from the second power source. For example, the encoder device EC switches from the normal state to the backup state when the power supply of the first power supply PW1 is stopped. The encoder device EC switches from the backup state to the normal state when the power supply of the first power supply PW1 is started. When the encoder device EC is switched between the normal state and the backup state, the multi-rotation information detection unit 1A continues to detect multi-rotation information (continues calculation). For example, the angle detection unit 1B does not detect (calculate) angle information in a backup state in which the power supply from the first power supply PW1 is cut off. For example, the second power supply does not supply power to the angle detection unit 1B in the backup state. For example, the angle detection unit 1B is in a state where power supply is cut off in the backup state, and does not detect angular position information.

  In the power supply unit 2, the magnet 3 moves in conjunction with the rotation axis SF. The magnet 3 moves relative to the signal generator 4. For example, the magnet 3 moves relative to the signal generating unit 4 (eg, relative rotation) by movement (eg, rotation) of a moving body (eg, rotation axis SF). The signal generator 4 generates a detection signal by a change in magnetic field due to relative movement with the magnet 3. The switching unit 5 uses the detection signal generated by the signal generation unit 4 as a control signal, and switches whether to supply power from the battery 6 as the second power source to the position detection unit 1. The position detection unit 1 receives power supply from the power supply unit 2 and starts detecting position information. For example, the position detection unit 1 detects the rotational position information of the rotation axis SF based on the power supplied from the power supply unit 2 based on the detection signal generated by the signal generation unit 4. The position detection unit 1 may be fixed to the rotation axis SF and move in conjunction with the rotation axis SF. In this case, the magnet 3 moves relative to the position detector 1.

  The multi-rotation information detection unit 1A is, for example, a magnetic detection unit, and detects multi-rotation information by magnetism. The multi-rotation information detection unit 1A includes, for example, a magnet 3, a magnetic detection unit 10, a processing unit 11, and a storage unit 12. The multi-rotation information detection unit 1A may not be magnetic, for example, optical.

  The magnet 3 moves relative to at least a part of the position detection unit 1 (for example, the magnetic detection unit 10). For example, the magnet 3 moves relative to the position detection unit 1 (eg, relative rotation) by movement (eg, rotation) of a moving body (eg, rotation axis SF). The magnet 3 is provided, for example, on a scale S (first rotating body) fixed to the rotating shaft SF. Since the scale S rotates with the rotation axis SF, the magnet 3 rotates in conjunction with the rotation axis SF. The magnetic detection unit 10 is fixed outside the rotation shaft SF. The relative position (relative angular position) of the magnet 3 and the magnetic detection unit 10 is changed by the rotation of the rotation axis SF. The intensity and direction of the magnetic field on the magnetic detection unit 10 formed by the magnet 3 changes according to the rotation of the rotation axis SF.

  The magnetic detection unit 10 detects a magnetic field formed by the magnet 3. The magnetic detection unit 10 includes a magnetic sensor 13 and a magnetic sensor 14. For example, the magnetic sensor 13 is disposed at an angular position greater than 0 ° and less than 90 ° with respect to the signal generating unit 4 in the rotation direction of the rotation axis SF. For example, the magnetic sensor 14 is arranged at an angular position greater than 90 ° and less than 180 ° with respect to the signal generating unit 4 in the rotation direction of the rotation axis SF.

  The processing unit 11 detects (calculates) the multi-rotation information of the rotation axis SF based on the result of the magnetic detection unit 10 detecting the magnetic field formed by the magnet 3. For example, the processing unit 11 uses the detection result of the magnetic sensor 13 for the A phase signal and uses the detection result of the magnetic sensor 14 for the B phase signal to detect the multi-rotation information. The processing unit 11 is, for example, a multi-rotation processing unit that processes multi-rotation information. The storage unit 12 stores position information detected and processed by the processing unit 11 based on a storage command (data write command) of position information (eg, multi-rotation information) from the processing unit 11. When the magnetic detection unit 10 is provided on the scale S, the magnet 3 may be provided outside the scale S.

  The angle detection unit 1B is an optical or magnetic encoder, and detects position information (angular position information, absolute or relative position information) within one rotation of the scale S. In the present embodiment, the angle detection unit 1B is an optical encoder. The angle detection unit 1B detects the angular position information within one rotation of the rotation axis SF by reading the patterning information of the scale S with the light receiving element. The patterning information of the scale S detected by the angle detection unit 1B is, for example, a light / dark pattern such as a transmission pattern (eg, a slit) or a reflection pattern (eg, a reflective film) on the scale S. The angle detection unit 1B detects the same angular position information of the rotation axis SF as the detection target of the multi-rotation information detection unit 1A.

  The angle detection unit 1B includes a scale S, an irradiation unit 15, a detection unit 16, and a processing unit 17. The scale S is fixed to the rotation axis SF. The scale S includes an incremental pattern INC and an absolute pattern ABS. For example, the incremental pattern INC and the absolute pattern ABS are provided on the same surface as the magnet 3 in the scale S. For example, the incremental pattern INC and the absolute pattern ABS are arranged outside the magnet 3 in the radial direction (eg, radial direction) with respect to the rotation axis SF. The absolute pattern ABS is disposed outside the incremental pattern INC, for example, in the radial direction (eg, the radial direction of the scale S) with respect to the rotation axis SF.

  One or both of the incremental pattern INC and the absolute pattern ABS may be provided on the same surface as the magnet 3 in the scale S or on the opposite surface. One or both of the incremental pattern INC and the absolute pattern ABS may be provided on at least one of the inside and the outside with respect to the position of the magnet 3. The magnet 3 may be provided on a member different from the scale S. For example, the scale S is a first moving body (eg, first rotating body) fixed to a detection target (eg, rotation axis SF), and the magnet 3 is a first moving body fixed to the detection target. Two moving bodies (eg, second rotating body) may be provided. The first moving body may be integrated (unitized) with the second moving body.

  The irradiation unit 15 (light emitting unit) irradiates light to the incremental pattern INC and absolute pattern ABS of the scale S. The irradiation unit 15 includes, for example, a light emitting element (eg, a solid light source) such as an LED (light emitting diode). The detection unit 16 (sensor unit, light receiving unit) detects light emitted from the irradiation unit 15 and passing through the incremental pattern INC, and light emitted from the irradiation unit 15 and passing through the absolute pattern ABS. The irradiation unit 15 includes, for example, a light receiving element (eg, a photoelectric conversion element) such as a photodiode. In FIG. 1, the angle detector 1B is of a reflective type. In this case, the detection unit 16 detects light reflected by the scale S. The angle detector 1B may be a transmissive type. In this case, the detection unit 16 detects light transmitted through the scale S. Note that the scale S in the present embodiment is, for example, a disk-shaped member (eg, a member made of glass, metal, resin, or the like).

  The detection unit 16 supplies a signal indicating the detection result to the processing unit 17. The processing unit 17 detects the angular position of the rotation axis SF using the detection result of the detection unit 16. For example, the processing unit 17 detects the angular position information of the first resolution using the result of detecting the light from the absolute pattern ABS. Further, the processing unit 17 uses the result of detecting the light from the incremental pattern INC to perform an interpolation operation on the angular position information of the first resolution, so that the angular position information of the second resolution higher than the first resolution. Is detected.

  In the present embodiment, the encoder device EC includes a combining unit 18 and a communication unit 19. The synthesizing unit 18 acquires angular position information of the second resolution detected by the processing unit 17. Further, the synthesizing unit 18 acquires the multi-rotation information of the rotation axis SF from the storage unit 12 of the multi-rotation information detection unit 1A. The synthesizing unit 18 synthesizes the angular position information from the processing unit 17 and the multi-rotation information from the multi-rotation information detection unit 1A, and calculates the rotational position information of the rotation axis SF. For example, when the detection result of the processing unit 17 is θ [rad] and the detection result of the multi-rotation information detection unit 1A is n rotations, the synthesis unit 18 uses (2π × n + θ) [rad] as rotation position information. Is calculated. The rotation position information may be information obtained by combining multi-rotation information and angular position information of less than one rotation. The combining unit 18 transmits the calculated rotational position information to the communication unit 19.

  The communication unit 19 (external communication unit, external connection interface) is communicably connected to the communication unit MC1 of the motor control unit MC by wire or wireless. The communication unit 19 supplies digital rotational position information to the communication unit MC1 of the motor control unit MC. The motor control unit MC appropriately decodes the rotational position information from the communication unit 19 of the angle detection unit 1B. The motor control unit MC controls the rotation of the motor M by controlling the power (drive power) supplied to the motor M using the rotational position information.

  In the power supply unit 2, the signal generation unit 4 generates an electrical signal (detection signal) due to a change in the magnetic field accompanying the movement (eg, rotation) of the moving body (eg, the rotation axis SF). The signal generator 4 outputs an electrical signal according to the angular position of the rotation axis SF, for example. The electrical signal generated in the signal generator 4 includes, for example, a waveform in which power (current, voltage) changes over time. For example, a detection signal is generated in the signal generation unit 4 by a change in a magnetic field formed by the magnet 3 used by the multi-rotation information detection unit 1A to detect multi-rotation information of the rotation axis SF. The signal generator 4 is arranged so that the relative angular position with respect to the magnet 3 is changed by the rotation of the rotation axis SF. For example, when the relative position between the signal generator 4 and the magnet 3 reaches a predetermined position, the signal generator 4 generates a pulsed electric signal.

  The electric signal generated by the signal generator 4 is used for the operation of at least a part of the position detector 1 (for example, the multi-rotation information detector 1A). For example, the power supply unit 2 supplies power used for the operation of the position detection unit 1 using an electrical signal generated by the signal generation unit 4 in the backup state. For example, the position detection unit 1 (for example, the multi-rotation information detection unit 1A) performs the rotation position information detection operation by starting power supply using an electric signal generated by the signal generation unit 4 in the backup state. Do.

  In the power supply unit 2, the battery 6 (battery) supplies at least a part of the power consumed by the position detection unit 1 in accordance with, for example, an electrical signal generated by the signal generation unit 4. For example, the battery 6 is a primary battery such as a button-type battery or a dry battery, but may be a secondary battery such as a lithium ion secondary battery.

  The switching unit 5 switches the presence / absence of power supply from the battery 6 to the position detection unit 1 using the detection signal generated by the signal generation unit 4 as a control signal. For example, the switching unit 5 starts the supply of power from the battery 6 to the position detection unit 1 when the level of the electric signal generated by the signal generation unit 4 is equal to or higher than the threshold value. For example, the switching unit 5 starts supplying power from the battery 6 to the position detection unit 1 when the signal generation unit 4 generates a detection signal equal to or greater than the threshold value.

  Further, the switching unit 5 stops the supply of power from the battery 6 to the position detection unit 1 when the level of the electric signal generated by the signal generation unit 4 becomes less than the threshold value. For example, the switching unit 5 stops the supply of power from the battery 6 to the position detection unit 1 when the detection signal generated by the signal generation unit 4 is less than the threshold value. For example, when a pulsed electric signal is generated in the signal generating unit 4 in a state where the power supply from the first power supply PW1 is cut off (backup state), the switching unit 5 determines the level (potential) of the electric signal. Is started from the low level to the high level, the supply of power from the battery 6 to the position detection unit 1 is started, and after a predetermined time has elapsed since the level (potential) of this electric signal has changed to the low level, The supply of power from the battery 6 to the position detection unit 1 is stopped.

  The power supply unit 2 may supply the position detection unit 1 with power obtained by adjusting the voltage of the electrical signal generated by the signal generation unit 4 with a regulator or the like. For example, the power supply unit 2 may supply the position detection unit 1 with the power obtained by adjusting the voltage of the detection signal with a regulator or the like and the power from the battery 6 in combination or switching. Further, the power supply unit 2 may supply power without using the electrical signal generated by the signal generation unit 4 in the backup state. For example, the power supply unit 2 may continuously supply power in the backup state. The power supply unit 2 may supply power to a part other than the multi-rotation information detection unit 1A (eg, at least a part of the angle detection unit 1B).

  FIG. 2 is a diagram illustrating the encoder device according to the first embodiment. In the following description, the XYZ orthogonal coordinate system shown in FIG. In this XYZ orthogonal coordinate system, the X direction and the Y direction are directions orthogonal to the rotation axis SF, respectively. The Z direction is a direction parallel to the rotation axis SF. Further, in each of the X direction, the Y direction, and the Z direction, the same side as the arrow is appropriately referred to as a + side (eg, + X side), and the opposite side of the arrow is referred to as a − side (eg, −X side). .

  The encoder device EC according to the embodiment includes a fixing member 21 and a support member 22. The fixing member 21 is, for example, a cylindrical member, and is fixed to a stator-side member (for example, the main body portion BD) in the motor M in FIG. The body portion BD of the motor M houses an armature (eg, a mover) and a magnet (eg, a stator) in the motor M. The armature in the motor M is connected to the rotation shaft SF. The fixing member 21 accommodates the scale S therein, for example. For example, the scale S is a flange-shaped member, and its axis AX is supported by the fixed member 21 via the bearing 23. The rotating shaft SF has its distal end (+ Z side) inserted into the fixing member 21 and is fixed to the axis AX of the scale S.

  The support member 22 is disposed at a position overlapping the magnet 3 when viewed from a crossing direction (eg, Z direction) with respect to a moving direction (eg, rotation direction) of the moving body (eg, rotation axis SF). The support member 22 overlaps the magnet 3 when viewed from the axial direction of the rotation axis SF (eg, viewed in the Z direction). For example, the support member 22 is disposed away from the magnet 3 in a direction parallel to the rotation axis SF. The support member 22 is arrange | positioned so that the opening of the fixing member 21 may be plugged up, for example. The support member 22 is fixed to the fixing member 21. The support member 22 is fixed to the main body BD of the motor M via the fixing member 21. The support member 22 and the fixing member 21 form, for example, a space partitioned from the outside, and the scale S is accommodated in this space.

  The support member 22 has, for example, a plate shape (eg, a disk shape). The support member 22 has a first surface 22a and a second surface 22b. The support member 22 is disposed so that the first surface 22a faces the scale S. The first surface 22a is arranged in parallel with the scale S, for example. The support member 22 is disposed so that the first surface 22 a faces the magnet 3. The second surface 22b is a surface on the opposite side of the first surface 22a.

  The support member 22 supports at least a part of the position detection unit 1. The support member 22 is, for example, a printed board. For example, wiring, circuits, and the like are formed on the surface (eg, second surface) of the support member (eg, processing substrate) 22. The support member 22 supports, for example, at least a part of a signal processing unit (for example, the processing unit 11, the storage unit 12, the processing unit 17, the combining unit 18, and the communication unit 19) that processes signals in the position detection unit 1. At least a part of the position detection unit 1 is provided on the second surface 22b, for example. For example, in the position detection unit 1, the signal processing unit includes a circuit (eg, logic circuit, arithmetic circuit) that processes a signal. This circuit is formed (eg, mounted, mounted) on the second surface 22b of the support member 22 (eg, printed circuit board). Further, for example, the hole 24 may be formed on the second surface 22b (for example, a circuit forming surface) on which the circuit of the signal processing unit is formed, or a surface (first surface) opposite to the circuit forming surface. It may be formed on one surface 22a).

  The support member 22 supports, for example, the irradiation unit 15, the detection unit 16, and the magnetic detection unit 10. The irradiation unit 15, the detection unit 16, and the magnetic detection unit 10 are provided on the first surface 22 a of the support member 22, for example. Note that at least a part of the irradiation unit 15, the detection unit 16, and the magnetic detection unit 10 may be supported by a member (for example, the fixed member 21) different from the support member 22. The support member 22 has a hole 24 (eg, a through hole). The hole 24 is open to the first surface 22 a side, and forms a member arrangement space in the support member 22. At least a part of the signal generation unit 4 is disposed in the hole 24 and is buried in a space formed by the hole 24.

  FIG. 3 is a diagram illustrating a magnet, a support member, and a signal generator according to the present embodiment. FIG. 3A is a plan view of the support member 22 as viewed from the side opposite to the magnet 3 (+ Z side). The magnet 3 is, for example, an annular member that is coaxial with the rotation axis SF. The main surfaces (front surface and back surface) of the magnet 3 are each substantially perpendicular to the rotation axis SF.

  The magnet 3 is, for example, a permanent magnet magnetized with 8 poles. The magnet 3 has N and S poles arranged in the circumferential direction on the inner and outer peripheral sides thereof, and the phases are shifted by 90 ° between the inner and outer peripheral sides. In the magnet 3, the boundary between the N pole and the S pole on the inner peripheral side substantially coincides with the boundary between the N pole and the S pole on the outer peripheral side in the circumferential direction (angular position). The magnet 3 rotates around the rotation axis SF to form an alternating magnetic field at the position of the signal generator 4. The direction and strength of the magnetic field formed at the position of the signal generator 4 changes as the magnet 3 rotates.

  FIG. 3B is a cross-sectional view taken along line A1-A1 in FIG. For example, at least a part of the support member 22 is accommodated inside the hole 24 of the support member 22 (a space formed in the support member 22). The signal generator 4 is provided, for example, in a linear manner, and at least a part of the signal generator 4 is embedded in the hole 24 of the support member 22. The signal generation unit 4 has flexibility, for example, is fixed to the support member 22, and is supported by the support member 22. For example, the signal generator 4 includes a terminal 25 (eg, an external terminal, an output terminal, or a connection terminal) that protrudes outside the hole 24 in a direction parallel to the first surface 22a (eg, the X direction). For example, the signal generating unit 4 is fixed to the support member 22 in a state where the terminal 25 is in contact with a terminal 26 (substrate side terminal) provided on the first surface 22 a of the support member 22.

  Note that the terminal 26 may be provided on the second surface 22b side. The terminal 25 and the terminal 26 may be electrically connected by a conductive member (eg, wiring, through electrode) or the like. The conductive member may electrically connect the terminal 25 and the terminal 26 through the inside of the hole 24. The conductive member may be a conductive film formed on the inner wall of the hole 24. The conductive member may electrically connect the terminal 25 and the terminal 26 through the hole 24 and the inside of another through hole. Further, the terminal 26 may include at least a part of the conductive member (eg, through electrode).

  The entire signal generator 4 may be accommodated inside the hole 24. The signal generator 4 may be fixed to the support member 22 in the hole 24. For example, the signal generator 4 may be fixed to the support member 22 by embedding an adhesive or the like between the signal generator 4 and the inner wall of the hole 24. Further, as shown in FIG. 3C, a part of the signal generator 4 may be disposed outside the hole 24 on the opposite side (+ Z side) from the magnet 3. For example, the signal generator 4 may protrude beyond the second surface 22 b of the support member 22 on the side opposite to the magnet 3. Further, the hole 24 may be a recess (a depression or a groove) having a bottom or a step on the + Z side. In this case, the signal generator 4 may be fixed to the bottom of the hole 24. The hole 24 (the space formed by the hole) may be formed in accordance with the shape of the signal generator 4, and the signal generator 4 may be fitted into the hole 24 and fixed to the support member 22.

  Note that the recess (space) may be formed on one substrate by etching or the like. Moreover, said recessed part may be formed by closing one opening of the through-hole provided in the board | substrate. Further, the support member 22 may include, for example, a first substrate having a through hole and a second substrate stacked on the first substrate so as to close the through hole. In this case, the through hole of the second substrate can be used as the recess.

  FIG. 4 is a diagram showing the signal generator 4 according to the present embodiment. The signal generation unit 4 includes a magnetic body 31, a power generation unit 33, and a case 34. The magnetic body 31 is a magnetic sensitive part that feels magnetic force. The magnetic body 31 is a magnetic sensitive wire such as a Wiegand wire. A large Barkhausen jump (Wiegand effect) occurs in the magnetic body 31 due to a change in the magnetic field accompanying the rotation of the magnet 3. The magnetic body 31 is a columnar member. In the magnetic body 31, when an AC magnetic field is applied in the axial direction (Y direction) and the magnetic field is reversed, a domain wall is generated from one end to the other end in the axial direction. As shown in FIG. 4B, a part of the magnetic circuit 35 between the magnet 3 and the magnetic body 31 is formed inside the hole 24 (a space formed in the support member 22). At least a part of the magnetic body 31 is disposed in the hole 24 (eg, space).

  The power generation unit 33 generates an electric signal by electromagnetic induction accompanying a large Barkhausen jump that occurs in the magnetic body 31. The power generation unit 33 includes, for example, a high density coil (coil unit). The power generation unit 33 is, for example, wound around the magnetic body 31 and arranged. In the power generation unit 33, electromagnetic induction occurs due to the occurrence of the domain wall in the magnetic body 31, and an induced current flows. The power generation unit 33 can operate without power supply from the outside (for example, the first power supply PW1 in FIG. 1).

  In the power generation unit 33, for example, a pulsed current (electric signal) is generated by a large Barkhausen jump generated in the magnetic body 31. The power generation unit 33 can output an electric signal (detection signal) including a detection pulse such as a positive pulse or a negative pulse using, for example, a large Barkhausen jump. The direction of the current generated in the power generation unit 33 changes according to the direction before and after the reversal of the magnetic field. The electric power (inductive current) generated in the power generation unit 33 can be set by, for example, the number of turns of the high density coil.

  The case 34 accommodates the magnetic body 31 and the power generation unit 33. The magnetic body 31 is supported by the case 34, for example. At least a part of the case 34 is disposed in the hole 24. The terminal 25 (terminal 25a, terminal 25b) is provided in the case 34. The terminal 25a is electrically connected to a first end of a path (eg, wiring) through which a current flows in the power generation unit 33 (eg, high density coil). Terminal 25b is electrically connected to a second end of a path through which a current flows in power generation unit 33. The signal generator 4 can output the generated electrical signal to the outside via the terminal 25a and the terminal 25b.

  The configuration of the signal generation unit 4 described above is an example, and the configuration can be changed as appropriate. For example, the signal generator 4 may generate electric power by electromagnetic induction that does not use the large Barkhausen jump (Wiegand effect). Also, the number of signal generators 4 included in the encoder device EC may be two or more. Further, the arrangement of the signal generator 4 can be changed as appropriate.

  Next, a circuit configuration of the encoder device EC according to the embodiment will be described. FIG. 5 is a diagram illustrating a circuit configuration of the position detection unit 1 (eg, the multi-rotation information detection unit 1A) and the power supply unit 2 according to the present embodiment. The power supply unit 2 includes a rectifier stack 61 and a regulator 63 as the switching unit 5 in FIG.

  The rectification stack 61 is a rectifier that rectifies the current flowing from the signal generator 4. The first input terminal 61 a of the rectifying stack 61 is connected to the terminal 25 a of the signal generator 4. The second input terminal 61 b of the rectification stack 61 is connected to the terminal 25 b of the signal generator 4. The ground terminal 61g of the rectifying stack 61 is connected to a ground line GL to which the same potential as the signal ground SG is supplied. During the operation of the multi-rotation information detection unit 1A, the potential of the ground line GL becomes the reference potential of the circuit 60. The output terminal 61 c of the rectifying stack 61 is connected to the control terminal 63 c of the regulator 63.

  The regulator 63 adjusts the power supplied from the battery 6 to the position detection unit 1 in accordance with the on state and off state of the regulator 63. The regulator 63 includes a switch (for example, a switching element 64) provided in a power supply path between the battery 6 and the position detection unit 1. The regulator 63 controls the operation of the switching element 64 using an electrical signal (detection signal) generated by the signal generator 4 as a control signal (eg, an enable signal).

  An input terminal 63 a of the regulator 63 is connected to the battery 6. The output terminal 63b of the regulator 63 is connected to the power supply line PL. The ground terminal 63g of the regulator 63 is connected to the ground line GL. The control terminal 63c of the regulator 63 is an enable terminal, and the regulator 63 maintains the potential of the output terminal 63b at a predetermined voltage in a state where a voltage higher than the threshold is applied to the control terminal 63c. The output voltage of the regulator 63 (the above-mentioned predetermined voltage) is, for example, 3 V when the counting unit 67 is configured by a CMOS or the like. For example, the operating voltage of the storage unit 12 is set to the same voltage as the predetermined voltage. The predetermined voltage is a voltage necessary for power supply, and may be a constant voltage value or a voltage that changes stepwise.

  The switching element 64 switches between conduction and interruption of the circuit 60 that supplies power to the position detection unit 1. The circuit 60 forms, for example, a power supply path that connects a first electrode (positive electrode) and a second electrode (negative electrode) of a second power supply (eg, battery 6), and includes a power supply line PL and a ground line GL. For example, the ground line GL is connected to the negative electrode of the battery 6, and the potential thereof becomes the reference potential of the circuit 60. For example, the switching element 64 switches whether or not power is supplied from the battery 6 to the position detection unit 1 via the circuit 60.

  The regulator 63 uses the electrical signal supplied from the signal generator 4 to the control terminal 63c as a control signal (enable signal), and conducts between the first terminal 64a and the second terminal 64b of the switching element 64 (ON). State) and insulation state (off state). For example, the switching element 64 includes a MOS, a TFT, etc., the first terminal 64a and the second terminal 64b are a source electrode and a drain electrode, and the control terminal 64c is a gate electrode.

  The switching element 64 switches the circuit 60 to conduction based on the voltage of the control terminal 64c generated by the electric signal (detection signal) generated by the signal generator 4. For example, the switching element 64 blocks the circuit 60 in a state where the potential of the control terminal 64 c is the reference potential of the circuit 60. Moreover, the switching element 64 will be in a conduction | electrical_connection state (on state) between the 1st terminal 64a and the 2nd terminal 64b because the voltage of the control terminal 64c becomes more than predetermined value. Switch circuit 60 to conduction. When the first terminal 64a and the second terminal 64b are turned on, power is supplied from the battery 6 to the circuit 60 via the power supply line PL and the ground line GL. The power supply unit 2 may include an acquisition unit that acquires the on state and the off state of the regulator 63.

  The multi-rotation information detection unit 1A includes an analog comparator 65, an analog comparator 66, and a counting unit 67 as the processing unit 11 illustrated in FIG. The magnetic sensor 13 and the magnetic sensor 14 are sensors that detect the rotation axis SF, respectively. The magnetic sensor 13 and the magnetic sensor 14 detect the rotation axis SF by detecting a magnetic field formed by the magnet 3 attached to the rotation axis SF. Each of the magnetic sensor 13 and the magnetic sensor 14 detects the magnetic field formed by the magnet 3 using electric power supplied from the battery 6.

  The power supply terminal 13p of the magnetic sensor 13 is connected to the power supply line PL. The ground terminal 13g of the magnetic sensor 13 is connected to the ground line GL. The output terminal 13 c of the magnetic sensor 13 is connected to the input terminal 65 a of the analog comparator 65.

  The analog comparator 65 is a binarization unit that binarizes the voltage output from the magnetic sensor 13. The analog comparator 65 is a comparator, for example, and compares the voltage output from the magnetic sensor 13 with a predetermined voltage. The power supply terminal 65p of the analog comparator 65 is connected to the power supply line PL. The ground terminal 65g of the analog comparator 65 is connected to the ground line GL. The output terminal 65 b of the analog comparator 65 is connected to the first input terminal 67 a of the counting unit 67. The analog comparator 65 outputs an H level signal from the output terminal when the output voltage of the magnetic sensor 13 is equal to or higher than the threshold value, and outputs an L level signal from the output terminal when the output voltage is lower than the threshold value.

  The magnetic sensor 14 and the analog comparator 66 have the same configuration as the magnetic sensor 13 and the analog comparator 65. The power supply terminal 14p of the magnetic sensor 14 is connected to the power supply line PL. The ground terminal 14g of the magnetic sensor 14 is connected to the ground line GL. The output terminal 14 c of the magnetic sensor 14 is connected to the input terminal 66 a of the analog comparator 66. The power supply terminal 66p of the analog comparator 66 is connected to the power supply line PL. The ground terminal 66g of the analog comparator 66 is connected to the ground line GL. The output terminal 66 b of the analog comparator 66 is connected to the second input terminal 67 b of the counting unit 67. The analog comparator 66 outputs an H level signal from the output terminal when the output voltage of the magnetic sensor 14 is equal to or higher than the threshold value, and outputs an L level signal from the output terminal 66b when the output voltage is lower than the threshold value.

  The counting unit 67 counts the multi-rotation information of the rotation axis SF using the power supplied from the battery 6. The counting unit 67 includes, for example, a CMOS logic circuit. The counting unit 67 operates using electric power supplied via the power supply terminal 67p and the ground terminal 67g. The power supply terminal 67p of the counting unit 67 is connected to the power supply line PL. The ground terminal 67g of the counting unit 67 is connected to the ground line GL. The counting unit 67 performs a counting process using the voltage supplied via the first input terminal 67a and the voltage supplied via the second input terminal 67b as control signals.

  The storage unit 12 stores at least a part (for example, multi-rotation information) of the rotational position information detected by the processing unit 11 using electric power supplied from the battery 6 (performs a writing operation). The storage unit 12 stores the counting result (multi-rotation information) by the counting unit 67 as the rotational position information detected by the processing unit 11. The power supply terminal 14p of the storage unit 12 is connected to the power supply line PL. The ground terminal 14g of the storage unit 12 is connected to the ground line GL. The storage unit 12 includes, for example, a nonvolatile memory, and can hold information written while power is supplied even in a state where power is not supplied. Note that the multi-rotation information detection unit 1A may include means for acquiring the on state and the off state of the regulator 63.

  In the present embodiment, a capacitor 69 is provided between the rectifying stack 61 and the regulator 63. The first electrode 69 a of the capacitor 69 is connected to a signal line that connects the rectifying stack 61 and the control terminal 63 c of the regulator 63. The second electrode 69b of the capacitor 69 is connected to the ground line GL. The capacitor 69 is a smoothing capacitor, for example, and reduces pulsation to reduce the load on the regulator. The constant of the capacitor 69 is such that, for example, the power supply from the battery 6 to the processing unit 11 and the storage unit 12 is maintained during the period from the detection of the rotational position information by the processing unit 11 to the writing of the rotational position information in the storage unit 12. Is set to

  In the encoder apparatus EC according to the present embodiment, power is supplied from the battery 6 to the multi-rotation information detection unit 1A within a short time after the electrical signal is generated in the signal generation unit 4, and the multi-rotation information detection unit 1A Dynamic drive (intermittent drive). After the end of detection and writing of the multi-rotation information, the power supply to the multi-rotation information detection unit 1A is cut off, but the count value is stored because it is stored in the storage unit 12. Such a sequence is repeated every time a predetermined position on the magnet 3 passes in the vicinity of the signal generating unit 4 even in a state where the external power supply is cut off. The multi-rotation information stored in the storage unit 12 is read, for example, by the motor control unit MC when the motor M is started next time, and is used for calculating the initial position of the rotation axis SF.

  In the encoder device EC according to the present embodiment, the signal generator 4 (see FIG. 4B) is at least a part of the hole 24 of the support member 22 provided on at least the first surface 22a or the second surface 22b (example). , At least a part of the space formed by the hole 24). With such a configuration, the encoder device EC has a short distance in the axial direction (for example, the Z direction) of the rotation axis SF between the magnet 3 and the signal generation unit 4. Compared with the case where the second surface 22b of the support member 22 is surface-mounted, the magnetic field formed by the magnet 3 can be efficiently received, and the change of the magnetic field formed by the magnet 3 can be detected with high accuracy. When the signal generation unit 4 accurately detects the magnetic field of the magnet 3, for example, malfunction of the signal generation unit 4 (for example, erroneous generation of an electric signal, generation leakage) is suppressed. The position detection unit 1 operates using an electrical signal generated in the signal generation unit 4 and operates stably, for example, by suppressing malfunction of the signal generation unit 4. For example, the encoder device EC is highly reliable because the position detector 1 operates stably.

  In the present embodiment, in the encoder device EC, the battery 6 uses at least a part of the power consumed by the position detection unit 1 (for example, the multi-rotation information detection unit 1A) based on the electrical signal generated by the signal generation unit 4. Since the battery 6 is supplied, the battery 6 can have a long life. Further, the encoder device EC can eliminate maintenance (eg, replacement) of the battery 6 and can reduce the frequency of maintenance. For example, when the life of the battery 6 is longer than the life of the other part of the encoder device EC, the replacement of the battery 6 can be made unnecessary.

  Further, when a magnetosensitive wire such as a Wiegand wire is used, a pulse current output can be obtained from the signal generator 4 even when the magnet 3 rotates at a very low speed. Therefore, for example, in the state where power is not supplied to the motor M, the output of the signal generator 4 can be used as an electrical signal even when the rotation of the rotating shaft SF (magnet 3) is extremely low.

  The multi-rotation information detection unit 1A is a magnetic detection unit in the above embodiment, but may be an optical (eg, reflected light or transmitted light) detection unit. In this case, a part of the multi-rotation information detection unit 1A may be shared with the angle detection unit 1B. The power supply unit 2 may use the power of the detection signal generated by the signal generation unit 4 as a power source. For example, the power supply unit 2 may adjust the voltage of the detection signal to a predetermined voltage with a regulator or the like, and supply the power of the detection signal to the position detection unit 1. In the above-described embodiment, the signal generation unit 4 generates a detection signal when a predetermined positional relationship with the magnet 3 is obtained. The encoder device EC (multi-rotation information detection unit 1A) may include the signal generation unit 4 as a sensor that detects position information of the rotation axis SF (magnet 3). For example, the position detection unit 1 may detect position information using the electrical signal generated by the signal generation unit 4 as a detection result of the sensor.

[Second Embodiment]
A second embodiment will be described. In the present embodiment, the same components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is omitted or simplified. FIG. 6 is a diagram illustrating a support member and a signal generation unit according to the present embodiment. FIG. 6A is a plan view seen from the side opposite to the magnet 3 (+ Z side) with respect to the support member 22. FIG. 6B is a cross-sectional view taken along line A3-A3 in FIG.

  For example, the signal generator 4 does not include the case 34 shown in FIG. For example, the signal generator 4 is mounted directly on the support member 22 without using the case 34 (without using the case 34). At least a part of the magnetic body 31 is disposed on the side opposite to the magnet 3 (+ Z side) with respect to the support member 22. The central portion of the magnetic body 31 is disposed on the second surface of the support member 22. The support member 22 has a through hole 24a and a hole 24b. The first end of the magnetic body 31 is inserted into the hole 24 a of the support member 22. The second end of the magnetic body 31 is inserted into the hole 24 b of the support member 22.

  The power generation unit 33 is arranged in the same manner as the magnetic body 31 in a form wound around the magnetic body 31. The central portion of the power generation unit 33 is disposed on the second surface of the support member 22. A first end of the power generation unit 33 is inserted into the hole 24 a of the support member 22. A second end of the power generation unit 33 is inserted into the hole 24 b of the support member 22. The wiring of the power generation unit 33 is electrically connected to the terminal (substrate side terminal) 26 on the second surface 22 b of the support member 22. The terminal 26 is electrically connected to, for example, the rectifying stack 61 shown in FIG. For example, the hole 24 is filled with an adhesive, and the magnetic body 31 and the power generation unit 33 are fixed to the inner wall of the hole 24 by the adhesive.

  FIG. 7A is a diagram illustrating a magnet, a support member, and a signal generation unit according to a first modification according to the embodiment. In the first modification, the power generation unit 33 is disposed on the second surface 22 b of the support member 22. The power generation unit 33 is supported by the support member 22 on the second surface 22b. For example, the power generation unit 33 is not disposed in the hole 24, and a part of the magnetic body 31 is disposed in the hole 24. In FIG. 7A, both ends of the magnetic body 31 are provided up to the position of the first surface 22a of the support member 22, for example.

  FIG. 7B is a diagram illustrating a magnet, a support member, and a signal generation unit according to a second modification example of the embodiment. In the second modification, the magnetic body 31 is provided, for example, at a position where both ends thereof are closer to the second surface 22b than the first surface 22a of the support member 22. FIG. 8A is a diagram illustrating a magnet, a support member, and a signal generation unit according to a third modification example of the embodiment. In the third modification, the magnetic body 31 is provided, for example, at a position where both ends thereof are closer to the magnet 3 than the first surface 22 a of the support member 22. In the second modification and the third modification, the power generation unit 33 may be disposed in the hole 24 as illustrated in FIG. 6B.

  FIG. 8B is a diagram illustrating a magnet, a support member, and a signal generation unit according to a fourth modification example of the embodiment. In the third modification, the magnetic body 31 and the power generation unit 33 have flexibility and are nonlinearly curved on the second surface 22b side of the support member 22. The magnetic body 31 and the power generation part 33 are arrange | positioned so that the magnetic field line of the magnetic field which the magnet 3 forms may be followed, for example.

[Third Embodiment]
A third embodiment will be described. In the present embodiment, the same components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is omitted or simplified. FIG. 9 is a diagram illustrating a support member and a signal generation unit according to the present embodiment. FIG. 9A is a plan view of the support member 22 as viewed from the side opposite to the magnet 3 (+ Z side). FIG. 9B is a cross-sectional view taken along line A4-A4 in FIG.

  The magnet 3 generates a magnetic field MF around an axis parallel to the direction (Z direction) intersecting the rotation direction (rotation plane, XY plane) of the rotation axis SF. The magnetic body 31 is provided curved around an axis (for example, around the rotation axis SF). The support member 22 has a hole 24a, a hole 24b, and a hole 24c. The hole 24c is, for example, a recess having a bottom surface. For example, the entire magnetic body 31 is provided on the second surface of the support member 22 in a non-linear manner along the rotation direction of the rotation axis SF (or the magnet 3). For example, the magnetic body 31 is in contact with the second surface 22 b of the support member 22. In the power generation unit 33, the portion that protrudes to the −Z side from the magnetic body 31 is accommodated in the hole 24 c.

[Driver]
Next, the drive device according to the embodiment will be described. FIG. 10 is a diagram illustrating an example of the driving device MTR. In the following description, components that are the same as or equivalent to those in the above-described embodiment are denoted by the same reference numerals and description thereof is omitted or simplified. The drive device MTR is a motor device including an electric motor. The drive device MTR includes a rotary shaft SF, a main body (drive unit) BD that rotationally drives the rotary shaft SF, and an encoder device EC that detects rotational position information of the rotary shaft SF.

  The rotation shaft SF has a load side end portion SFa and an anti-load side end portion SFb. The load side end portion SFa is connected to another power transmission mechanism such as a speed reducer. The scale S is fixed to the non-load side end portion SFb through a fixing portion. Along with fixing the scale S, an encoder device EC is attached. The encoder device EC is an encoder device according to the above-described embodiment, modification, or combination thereof.

  In the driving device MTR, the motor control unit MC shown in FIG. 1 or the like controls the main body BD using the detection result of the encoder device EC. The drive device MTR can operate stably due to the high reliability of the encoder device EC, for example. Further, the drive device MTR can reduce the maintenance cost because, for example, there is no need or low battery replacement of the encoder device EC. The drive device MTR is not limited to a motor device, and may be another drive device having a shaft portion that rotates using hydraulic pressure or pneumatic pressure.

[Stage device]
Next, the stage apparatus according to the embodiment will be described. FIG. 11 is a diagram showing a stage apparatus STG. In the following description, components that are the same as or equivalent to those in the above-described embodiment are denoted by the same reference numerals and description thereof is omitted or simplified.

  This stage device STG has a configuration in which a stage (a rotary table TB, a moving object) is attached to the load side end portion SFa of the rotation shaft SF of the drive device MTR shown in FIG. The stage apparatus STG may have a configuration in which the stage is linearly moved in one direction by a one-dimensional linear motor, for example. Further, the stage apparatus STG may be configured to move the stage in two directions by a plurality of one-dimensional linear motors or two-dimensional linear motors (eg, planar motors).

  The stage device STG drives the driving device MTR to rotate the rotation shaft SF. This rotation is transmitted to the rotary table TB, and the encoder device EC detects the angular position of the rotary shaft SF and the like at that time. By using the output from the encoder device EC, the angular position of the rotary table TB can be detected. A reduction gear or the like may be disposed between the load side end SFa of the drive device MTR and the rotary table TB.

  The stage apparatus STG can operate stably due to the high reliability of the encoder apparatus EC, for example. Further, the stage device STG can reduce the maintenance cost because, for example, the necessity of replacing the battery of the encoder device EC is low or absent. The stage apparatus STG can be applied to a rotary table provided in a machine tool such as a lathe.

[Robot equipment]
Next, the robot apparatus according to the embodiment will be described. FIG. 12 is a perspective view showing the robot apparatus RBT. FIG. 12 schematically shows a part (joint portion) of the robot apparatus RBT. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description is omitted or simplified. The robot apparatus RBT includes a first arm AR1, a second arm AR2, and a joint portion JT. The first arm AR1 is connected to the second arm AR2 via the joint portion JT.

  The first arm AR1 includes an arm portion 101, a bearing 101a, and a bearing 101b. The second arm AR2 has an arm portion 102 and a connection portion 102a. The connecting portion 102a is disposed between the bearing 101a and the bearing 101b in the joint portion JT. The connecting portion 102a is provided integrally with the rotation shaft SF2. The rotation shaft SF2 is inserted into both the bearing 101a and the bearing 101b in the joint portion JT. The end of the rotary shaft SF2 on the side inserted into the bearing 101b passes through the bearing 101b and is connected to the speed reducer RG.

  The reducer RG is connected to the drive device MTR, and reduces the rotation of the drive device MTR to, for example, 1/100 and transmits it to the rotation shaft SF2. Although not shown in FIG. 15, the load side end portion SFa of the rotation shaft SF of the drive device MTR is connected to the speed reducer RG. In addition, the scale S of the encoder device EC is attached to the non-load-side end portion SFb of the rotation shaft SF of the drive device MTR.

  When the robot apparatus RBT drives the drive apparatus MTR to rotate the rotation axis SF, the rotation is transmitted to the rotation axis SF2 via the reduction gear RG. Due to the rotation of the rotation shaft SF2, the connecting portion 102a rotates integrally, whereby the second arm AR2 rotates relative to the first arm AR1. At that time, the encoder device EC detects the angular position and the like of the rotating shaft SF. Therefore, the angular position of the second arm AR2 can be detected by using the output from the encoder device EC.

  The robot apparatus RBT can operate stably due to the high reliability of the encoder apparatus EC, for example. The robot apparatus RBT can reduce the maintenance cost because, for example, there is no need or low battery replacement of the encoder apparatus EC. The robot apparatus RBT is not limited to the above configuration, and the drive apparatus MTR can be applied to various robot apparatuses having joints.

  The technical scope of the present invention is not limited to the aspects described in the above-described embodiments. One or more of the requirements described in the above embodiments and the like may be omitted. In addition, the requirements described in the above-described embodiments and the like can be combined as appropriate. In addition, as long as it is permitted by law, the disclosure of all documents cited in the above-described embodiments and the like is incorporated as a part of the description of the text.

DESCRIPTION OF SYMBOLS 1 ... Position detection part, 1A ... Multi-rotation information detection part, 1B ... Angle detection part, 2 ... Electric power supply part, 3 ... Magnet, 4 ... Signal generation part, 22. ..Support member, 22a ... first surface, 22b ... second surface, 24 ... hole, 25 ... terminal, 31 ... magnetic body, 32 ... second magnetic body, 33 ... Power generation unit, 34 ... Case, 35 ... Magnetic circuit, EC ... Encoder device, MTR ... Drive device, RBT ... Robot device, STG ... Stage device

Claims (14)

A position detector for detecting position information of the moving object;
A magnet that moves relative to the position detector;
A support member that supports at least a part of the position detection unit;
An encoder device comprising: a signal generation unit that is arranged at least in part in a hole formed in the support member and generates an electric signal by a change in a magnetic field formed by the magnet. The signal generator is
A magnetic material that causes a large Barkhausen jump by a change in the magnetic field;
The encoder apparatus according to claim 1, further comprising: a power generation unit that generates the electrical signal by electromagnetic induction accompanying the large Barkhausen jump.   The encoder device according to claim 2, wherein a magnetic circuit between the magnetic body and the magnet is formed in the hole. The signal generator is
A case that accommodates the magnetic body and the power generation unit and is disposed in the hole;
A terminal provided on the case and electrically connecting the power generation unit and the position detection unit;
The encoder device according to claim 2, wherein the terminal is in contact with the support member and the case is supported by the support member. The magnet generates a magnetic field around an axis parallel to the intersecting direction;
The encoder device according to any one of claims 2 to 4, wherein the magnetic body is provided to be curved around the axis.   The encoder device according to any one of claims 1 to 5, wherein the signal generator is fixed to the support member in the hole. The support member has a first surface facing the magnet and a second surface opposite to the first surface;
The encoder device according to any one of claims 1 to 6, wherein at least a part of the position detection unit is provided on the second surface. The position detector is
A sensor for detecting the position of the moving body;
A processing unit for processing the detection result of the sensor,
The encoder device according to claim 7, wherein at least a part of the processing unit is provided on the second surface. A position detector for detecting position information of the moving object;
A magnet that moves relative to the position detector;
A processing substrate for supporting the position detection unit and processing a detection result of the position detection unit;
An encoder device comprising: a signal generating unit that generates at least a part in a space formed on the processing substrate and generates a detection signal by a change in a magnetic field formed by the magnet.   The encoder apparatus according to claim 9, further comprising a power supply unit that supplies power to the position detection unit based on the detection signal.   The encoder device according to claim 9 or 10, wherein the position detection unit includes a multi-rotation information detection unit that detects multi-rotation information of the moving body as the position information. The encoder device according to any one of claims 1 to 11,
And a driving unit that supplies a driving force to the moving body. A drive device according to claim 12,
And a stage that is moved by the driving device. A drive device according to claim 12,
And an arm that is moved by the driving device.

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