JP2018118230A - Cleaning device, and cleaning method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To carry out efficient cleaning effectively by a small number of processes.SOLUTION: A cleaning device 100 removes dirt by jetting cleaning liquid to a cleaned object L, and includes a cleaning tank 10 having a bottom opening 11, a cleaning nozzle 20 which jets the cleaning liquid to the cleaned object housed in the cleaning tank, a holding tool 30 which holds the cleaned object, a vertical motion actuator 40 which vertically moves at least one of the holding tool and the cleaning tank and puts the cleaned object in and out, and a sealing member 50 which seals the bottom opening of the cleaning tank during cleaning. The cleaned object held by the holding tool is introduced from the bottom opening to an inside of the cleaning tank by first motion of the vertical motion actuator, and the sealing member water-tightly seals the bottom opening. The cleaned object held by the holding tool is taken out from the bottom opening to an outside of the cleaning tank by motion in an opposite direction to the first motion of the vertical motion actuator, and sealing of the bottom opening by the sealing member is released.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a cleaning apparatus and a cleaning method, and more particularly to a technique suitable for use in cleaning optical elements such as lenses. The present invention can be applied, for example, to cleaning after manufacturing an endoscope lens.

In the manufacturing process of an optical element such as an endoscope lens made of glass or plastic, it is necessary to perform cleaning after each process.
For example, in a manufacturing process of an optical element such as a glass lens, after processing a glass base material into the shape of the optical element, the optical element is cleaned by a cleaning device including a cleaning tank and a drying tank. The optical element that has been cleaned is subjected to an inspection process or the like as necessary.

When cleaning objects such as glass lenses in the cleaning tank,
(1) The object to be cleaned attached to the holder is introduced into the cleaning tank through the inlet,
(2) Close the water inlet tightly,
(3) In the cleaning tank, discharge the cleaning liquid to the object to be cleaned and clean it.
(4) Open the outlet of the cleaning tank and discharge the cleaning liquid, then dry it.
(5) Open the inlet and take out the object to be cleaned.
It was necessary. As described above, since many steps are required before and after the cleaning operation, the cleaning tact time is inevitably long, which is an obstacle to efficiency.

In addition, a compact cleaning device that can easily clean the optical element after processing near the processing place is strongly desired. In such an optical element cleaning apparatus, it is preferable to perform at least cleaning by discharging water together with air, draining and drying.
A cleaning apparatus having such a simple function is known for uses other than cleaning of optical elements.

For example, Patent Document 1 discloses a nozzle cleaning unit that cleans a nozzle used for sucking and discharging a liquid, and in which a cleaning liquid is ejected in a cleaning tank in which at least a portion to be cleaned is accommodated among the nozzles. Cleaning liquid injection means, drying injection means for injecting air to blow away the cleaning liquid adhering to the outer surface of the nozzle into the cleaning tank, and moving means for moving the nozzle up and down relative to the cleaning liquid injection means and the drying injection means And a nozzle cleaning unit including at least a cleaning liquid ejecting unit, a drying ejecting unit, and a control unit that controls the operation of the moving unit.
Since the nozzle cleaning unit described in Patent Document 1 only needs to clean a small nozzle, the nozzle can be moved into a small cleaning layer and cleaned with the nozzle sealed in a cleaning tank.

JP 2011-078881 A

  However, if the technique described in Patent Document 1 is applied to cleaning after manufacturing the optical element, an optical element that is an object to be cleaned is included in the cleaning layer in order to clean the manufactured optical element such as a lens. In order to put in and out, it is necessary to separate from the jig used for polishing and shaping of the base material at the time of manufacture, and to hold it again in another jig for insertion into the cleaning tank. There was a problem that the lens could be contaminated or damaged.

  For this reason, it is preferable to clean an optical element such as a lens in the vicinity of the manufacturing apparatus or in the manufacturing apparatus continuously in the manufacturing process. However, in the cleaning process, the cleaning liquid is scattered when sprayed. In such a case, there is a possibility that the manufacturing apparatus may be affected. Therefore, cleaning inside or in the vicinity of the optical element manufacturing apparatus has not been performed.

There has also been a demand to be able to carry out the inspection process continuously after the cleaning.
Furthermore, there is a demand to reduce the amount of cleaning liquid used for cleaning, and there is a demand for enabling more efficient cleaning.

  In order to perform effective cleaning in cleaning by spraying the cleaning liquid from the nozzle, the distance between the object to be cleaned and the nozzle is important. However, different lenses are used in the manufacture of lenses such as endoscopes that are manufactured in small quantities. In order to cope with the difference in dimensions, there has been a demand for effective cleaning by making it possible to accurately set the distance between the nozzle and the object to be cleaned during cleaning.

The present invention has been made in view of the above circumstances, and aims to achieve at least one of the following objects.
1. Enable efficient cleaning.
2. Make it possible to reduce the amount of cleaning liquid used and the amount discarded.
3. It is possible to perform cleaning continuously in the manufacture of optical elements.
4). Enable continuous product inspection after cleaning.
5. The distance between the nozzle and the object to be cleaned during cleaning can be set accurately.

The cleaning device of the present invention is a cleaning device that removes dirt by spraying a cleaning liquid onto an object to be cleaned,
A washing tank having a bottom opening;
A cleaning nozzle for injecting the cleaning liquid onto the object to be cleaned contained in the cleaning tank;
A holder for holding the object to be cleaned;
A vertically moving actuator that moves up and down at least one of the holding tool and the cleaning tank and puts an object to be cleaned held in the holding tool into and out of the cleaning tank;
A sealing member for sealing the bottom opening of the cleaning tank during cleaning;
Have
By the first movement of the vertical movement actuator, the object to be cleaned held by the holder is introduced into the cleaning tank from the bottom opening, and the sealing member seals the bottom opening,
By the movement of the vertical movement actuator in the direction opposite to the first movement, the object to be cleaned held by the holder is taken out of the cleaning tank through the bottom opening, and the bottom portion by the sealing member The opening is unsealed,
The above-described problems have been solved by being configured as described above.
In the present invention, the holder is configured to fix the object to be cleaned to an upper end of an upright holding column,
A distance setting mechanism for setting a distance between the tip of the cleaning nozzle and the object to be cleaned at the tip of the holding column during the cleaning can be provided.
In the cleaning device of the present invention, the holder may have a horizontal reciprocating actuator that reciprocates the holding column in the horizontal direction during cleaning.
In the cleaning apparatus of the present invention, the sealing member may be a flat lid body integrated with the base of the holding column.
In the cleaning apparatus of the present invention, the cleaning liquid and gas may be supplied to the cleaning nozzle.
In the cleaning apparatus of the present invention, the cleaning nozzle may be provided with an ultrasonic transducer that enables ultrasonic cleaning.
The cleaning apparatus of the present invention also performs drying after cleaning,
The cleaning tank may have a drying nozzle that injects gas to the object to be cleaned during drying.
In the cleaning apparatus of the present invention, a discharge port for discharging the cleaning liquid may be provided on a side surface of the cleaning tank.
The cleaning method of the present invention is a cleaning method of drying the object to be cleaned after removing dirt by spraying a cleaning liquid in the cleaning tank to the object to be cleaned,
A step of fixing and transporting the object to be cleaned to the upper end of a holding column erected on the holder;
By moving at least one of the holder and the cleaning tank upward or downward, the object to be cleaned is introduced into the cleaning tank from the bottom opening of the cleaning tank, and the bottom of the cleaning tank is sealed by a sealing member. Sealing the opening;
A cleaning step of spraying a cleaning liquid onto the object to be cleaned from a cleaning nozzle located above the cleaning tank in a state where the cleaning tank is sealed,
A step of spraying a gas from a drying nozzle onto the object to be cleaned and moving at least one of the holder and the cleaning tank in a direction opposite to the movement, thereby removing the object to be cleaned from the cleaning tank; And releasing the sealing of the bottom opening of the cleaning tank by the sealing member,
Can have.

The cleaning device of the present invention is a cleaning device that removes dirt by spraying a cleaning liquid onto an object to be cleaned,
A washing tank having a bottom opening;
A cleaning nozzle for injecting the cleaning liquid onto the object to be cleaned contained in the cleaning tank;
A holder for holding the object to be cleaned;
A vertically moving actuator that moves up and down at least one of the holding tool and the cleaning tank and puts an object to be cleaned held in the holding tool into and out of the cleaning tank;
A sealing member for sealing the bottom opening of the cleaning tank during cleaning;
Have
By the first movement of the vertical movement actuator, the object to be cleaned held by the holder is introduced into the cleaning tank from the bottom opening, and the sealing member seals the bottom opening,
By the movement of the vertical movement actuator in the direction opposite to the first movement, the object to be cleaned held by the holder is taken out of the cleaning tank through the bottom opening, and the bottom portion by the sealing member The opening is unsealed,
By being configured in this way, the holder and the sealing member can be moved simultaneously with respect to the cleaning tank by the vertical movement actuator, whereby the object to be cleaned is disposed in the cleaning tank, and the sealing member The cleaning tank can be sealed with a single operation. In addition, since the cleaning tank is sealed with the sealing member, the cleaning liquid can be prevented from splashing around when the cleaning liquid is sprayed from the cleaning nozzle onto the object to be cleaned. Alternatively, since the cleaning tank is sealed with the sealing member, the cleaning liquid can be stored in the cleaning tank and the object to be cleaned can be immersed in the cleaning tank for cleaning. During or after cleaning, the cleaning liquid can be discharged from the bottom opening. Furthermore, when cleaning is completed, the vertical movement actuator moves the holder and the sealing member simultaneously with respect to the cleaning tank, thereby removing the object to be cleaned and releasing the sealing of the cleaning tank by the sealing member. It can be done by the same operation.
Here, the first movement is an upward movement of the holder relative to the cleaning tank, and the movement in the opposite direction to the first movement is a downward movement of the holder relative to the cleaning tank. Alternatively, the first movement may be a downward movement of the cleaning tank relative to the holder, and the movement in the direction opposite to the first movement may be an upward movement of the cleaning tank relative to the holder. .

  In addition, sealing the cleaning tank only requires that the cleaning liquid sprayed from the cleaning nozzle at the time of cleaning can be blocked to the outside, and if the cleaning liquid is stored in the cleaning tank for cleaning. It is only necessary that the cleaning liquid supplied from the cleaning nozzle can be kept in a watertight state in which a predetermined water level is maintained in the cleaning tank. Therefore, in the sealed state of the cleaning tank bottom opening and the sealing member, it is not necessary that the entire circumference of these is strictly in contact with each other, but preferably, the entire circumference of the cleaning tank bottom opening and the sealing member Can be in contact with each other.

Furthermore, the cleaning tank bottom opening and the sealing member are set so as to have a gap in an unsealed state, and this gap can be used as a means for discharging the cleaning liquid. Here, in the configuration in which the entire circumference of the bottom opening of the cleaning tank and the sealing member are in contact with each other and can be sealed, they can be stopped in a state where they are separated and do not come into contact with each other, thereby creating a gap. When this configuration is adopted, when cleaning liquid is stored in the cleaning tank and cleaned, the entire circumference of the cleaning tank bottom opening and the sealing member are in contact with each other to be in a sealed state, and at the time of discharging or supplying cleaning liquid, etc. In the case of cleaning, the entire circumference of the cleaning tank bottom opening and the sealing member can be separated from each other.
Alternatively, a notch or a through hole extending in the cleaning tank radial direction can be formed in either the cleaning tank bottom opening or the sealing member, and the cleaning liquid can be discharged through the notch or the through hole.

  Further, it is preferable that the position of the holding tool at the time of cleaning is set so that the cleaning nozzle ejects the cleaning liquid downward and the object to be cleaned is disposed below the cleaning nozzle.

  In addition, gas is supplied to the cleaning nozzle, and the object to be cleaned is dried by injecting the gas from the cleaning nozzle to the object to be cleaned. It is also possible to wash the wash.

  In addition, the sealing member acts as a lid for opening and closing the opening for taking in and out the holder for holding the object to be cleaned, thereby improving the efficiency of introducing and removing the object to be cleaned from the cleaning tank, and the sealing member By adopting a configuration in which the bottom opening of the cleaning tank is sealed and released, the cleaning liquid is automatically discharged from the bottom surface of the cleaning tank by gravity, so that further efficiency can be achieved.

In the present invention, the holder is configured to fix the object to be cleaned to an upper end of an upright holding column,
By having a distance setting mechanism that sets the distance between the cleaning nozzle tip and the object to be cleaned at the tip of the holding column at the time of cleaning, the holding tool and the sealing member are held by the vertical movement actuator. Even if the objects to be cleaned have different standards, the height position of the holding column tip of the tool is set within a predetermined range in consideration of the thickness (height dimension) of the object to be cleaned. It is possible to maintain the distance between the tip of the cleaning nozzle and the object to be cleaned within a range in which effective cleaning can be performed in accordance with the height dimension at.

  The object to be cleaned can be fixed to the upper end surface of the holding column with an adhesive or the like. Alternatively, the fixing can be released by providing a suction port at the upper end of the holding column.

  The distance setting mechanism that sets the distance between the tip of the cleaning nozzle and the object to be cleaned at the tip of the holding column includes a configuration that allows the position of the cleaning tank and the cleaning nozzle to be set, a spacer that can be attached to the bottom of the cleaning tank, and sealing Holding column of variable height that enables position setting of member and holding column, moving mechanism of holding column that enables setting of fixed position to holding column with respect to sealing member, position of sealing member and lower end of cleaning tank It is possible to employ a thickness direction dimension setting mechanism of the sealing member that enables setting.

  In the cleaning apparatus of the present invention, the holder has a horizontal reciprocating actuator that reciprocates the holding column in the horizontal direction during cleaning, so that the position and angle at which the cleaning liquid sprayed from the cleaning nozzle reaches the object to be cleaned. It is possible to change and effectively perform cleaning.

  In the cleaning apparatus of the present invention, the sealing member is a flat plate cover integrated with the base of the holding column, so that the flat plate cover around the holding column is flush with the lower end of the cleaning tank. It becomes possible to contact the body surface uniformly and easily seal the inside of the cleaning tank.

In addition, it is also possible to move / convey continuously from the manufacturing process of the article to be cleaned, which is a previous process, with the holding member having the holding column as an integral unit with respect to the sealing member that is a flat lid.
Alternatively, the cleaning tank can be sealed with a through hole in the thickness direction provided at the center of the sealing member that is a flat lid, and the holding column of the holder is inserted into the through hole. In the state, the sealing member and the holding column can be moved in the axial direction of the holding column.

  Moreover, since at least the vicinity of the tip of the holder can be cleaned, when returning the holder to the manufacturing process again, the work time required for preparing the holder can be shortened, and the number of work processes can be reduced. It is suitable for use in multi-product small-volume production.

  Furthermore, in the cleaning apparatus of the present invention, the object to be cleaned can be continuously fixed to the holder during an inspection which is a post-cleaning process. Thereby, since it can test | inspect continuously in a washing | cleaning process, work time can be shortened, the number of work processes can be reduced, and manufacturing cost can be reduced.

  In the cleaning apparatus of the present invention, when the cleaning liquid and the gas are supplied to the cleaning nozzle, the cleaning liquid and the gas are switched and ejected from the cleaning nozzle, or the cleaning liquid and the gas are mixed and injected. It can be set as the structure which can do. As a result, cleaning with the cleaning liquid or the cleaning fluid / gas mixed fluid in the cleaning tank and drying in the cleaning tank become possible.

In the cleaning apparatus of the present invention, the cleaning nozzle is provided with an ultrasonic vibrator that enables ultrasonic cleaning, whereby ultrasonic vibration is applied to the cleaning liquid to efficiently clean the object to be cleaned. It becomes possible.
In addition, when an ultrasonic transducer is provided, it is preferable to provide a drying nozzle that ejects a gas for drying separately from the cleaning nozzle, but the structure is such that the ejection of the cleaning liquid and the gas is switched to be ejected from the same nozzle. You can also.

  The cleaning apparatus of the present invention also performs drying after cleaning, and the cleaning tank has a drying nozzle that injects gas to the object to be cleaned at the time of drying, thereby enabling drying in the cleaning tank. . In addition, even when an ultrasonic vibrator capable of ultrasonic cleaning is provided in the cleaning nozzle, it is possible to perform drying by jetting a gas to the object to be cleaned.

In the cleaning apparatus of the present invention, a discharge port for discharging the cleaning liquid is provided on the side surface of the cleaning tank, so that the cleaning liquid can be discharged from the cleaning tank while being sprayed from the cleaning nozzle. In this case, the discharge port is preferably provided near the lower end of the cleaning tank.
Alternatively, by setting the position of the discharge port to the upper part of the cleaning tank, it is possible to store the cleaning liquid in the cleaning tank and perform cleaning, and then discharge the cleaning liquid from the cleaning tank via the discharge port. . In this case, the discharge port is preferably provided at a position above the upper end position of the object to be cleaned in the cleaning tank.

  In the cleaning apparatus of the present invention, an elastic member that contacts the sealing member is provided around the bottom opening of the cleaning tank, so that the sealing member contacts the cleaning tank bottom opening and seals the inside of the cleaning tank. When stopping, the watertightness of the washing tank can be easily maintained. In this configuration, it is possible to prevent the cleaning liquid from leaking when the cleaning liquid is stored in the cleaning tank and cleaning is performed.

The cleaning method of the present invention is a cleaning method of drying the object to be cleaned after removing dirt by spraying a cleaning liquid in the cleaning tank to the object to be cleaned,
A step of fixing and transporting the object to be cleaned to the upper end of a holding column erected on the holder;
By moving at least one of the holder and the cleaning tank upward or downward, the object to be cleaned is introduced into the cleaning tank from the bottom opening of the cleaning tank, and the bottom of the cleaning tank is sealed by a sealing member. Sealing the opening;
A cleaning step of spraying a cleaning liquid onto the object to be cleaned from a cleaning nozzle located above the cleaning tank in a state where the cleaning tank is sealed,
A step of spraying a gas from a drying nozzle onto the object to be cleaned and moving at least one of the holder and the cleaning tank in a direction opposite to the movement, thereby removing the object to be cleaned from the cleaning tank; And releasing the sealing of the bottom opening of the cleaning tank by the sealing member,
With this, the object to be cleaned fixed to the holder can be placed in the cleaning tank, and the inside of the cleaning tank can be sealed by contacting the sealing member with the bottom opening of the cleaning tank by the same operation. In this state, when the cleaning liquid is sprayed from the cleaning nozzle onto the object to be cleaned, the cleaning liquid can be prevented from splashing around. It is also possible to store the cleaning liquid in the cleaning tank and immerse the object to be cleaned in the cleaning tank for cleaning. During or after cleaning, the cleaning liquid can be discharged from at least the bottom opening to dry the object to be cleaned. Furthermore, when the cleaning is completed, the object to be cleaned is taken out from the cleaning tank by moving the holder and the sealing member with respect to the cleaning tank by the vertical movement actuator, and the cleaning tank by the sealing member is moved by the same operation. Sealing can be released.

  In the cleaning method of the present invention, the object to be cleaned is fixed to the holder at the time of the pre-cleaning process, so that the holder is continuously processed from the object to be cleaned process that is the pre-cleaning process. The object to be cleaned can be held. For example, when cleaning an object to be cleaned that is an optical element, the manufacturing process is completed with the object to be cleaned to be an optical element fixed to a holder at the time of the optical element manufacturing process that is a previous process. An object to be cleaned that is continuously an optical element can be cleaned. At this time, it is not necessary to unfix the object to be cleaned that is an optical element at the end of the previous process from the holder in the manufacturing process, and to re-fix the object to be cleaned to the holder that performs cleaning. As a result, it is possible to prevent unnecessary contamination and damage or damage during re-fixing. Moreover, since it can wash | clean continuously in a manufacturing process, work time can be shortened, the number of work processes can be reduced, and a manufacturing cost can be reduced.

  According to the present invention, it is possible to achieve an effect that efficient cleaning can be effectively performed with a small number of steps.

It is a lineblock diagram showing a 1st embodiment of a cleaning device concerning the present invention. It is a schematic front view which shows the vertical motion actuator in 1st Embodiment of the washing | cleaning apparatus which concerns on this invention. It is a flowchart which shows 1st Embodiment of the cleaning method which concerns on this invention. It is a front sectional view explaining operation in a 1st embodiment of a cleaning device concerning the present invention. It is a fragmentary front sectional view explaining operation in a 1st embodiment of a cleaning device concerning the present invention. It is a fragmentary front sectional view explaining operation in a 1st embodiment of a cleaning device concerning the present invention. It is a fragmentary front sectional view explaining operation in a 1st embodiment of a cleaning device concerning the present invention. It is a fragmentary front sectional view explaining operation in a 1st embodiment of a cleaning device concerning the present invention. It is a fragmentary front sectional view explaining operation in a 1st embodiment of a cleaning device concerning the present invention. It is a fragmentary front sectional view explaining operation | movement in 2nd Embodiment of the cleaning apparatus which concerns on this invention. It is a fragmentary front sectional view explaining operation | movement in 3rd Embodiment of the washing | cleaning apparatus which concerns on this invention. It is a fragmentary front sectional view explaining operation | movement in 4th Embodiment of the washing | cleaning apparatus which concerns on this invention. It is a fragmentary front sectional view explaining the operation | movement in 5th Embodiment of the washing | cleaning apparatus which concerns on this invention. It is a fragmentary front sectional view explaining the operation | movement in 6th Embodiment of the cleaning apparatus which concerns on this invention. It is a fragmentary front sectional view explaining the operation | movement in 6th Embodiment of the cleaning apparatus which concerns on this invention.

Hereinafter, a cleaning device and a cleaning method according to a first embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a configuration diagram illustrating a cleaning device according to the present embodiment. FIG. 2 is a schematic front view illustrating a vertical movement actuator of the cleaning device according to the present embodiment. In the figure, reference numeral 100 denotes a cleaning device. .
In addition, since each drawing is a schematic diagram, the shape and dimension are exaggerated (the following drawings are also the same).

The cleaning apparatus 100 according to the present embodiment is an apparatus that cleans the optical element L as an object to be cleaned.
The optical element L is not particularly limited as long as it is an optical element. Examples of the optical element L that can be cleaned by the cleaning apparatus 100 include a lens, a prism, a mirror, and a filter. In this embodiment, an example of an endoscope lens will be described as the optical element L.

  In the drawing, each configuration is schematically shown, and the optical element L is drawn in a plano-convex lens shape. However, the shape of the optical element L is not limited to the plano-convex lens shape. For example, when the optical element L is a lens, various shapes such as a biconvex lens, a biconcave lens, a plano-concave lens, and a meniscus lens are possible. Further, when the optical element L is an optical element other than a lens, for example, an appropriate three-dimensional shape including a disk shape and a rectangular plate shape is possible.

  Among the optical elements L, for example, a glass polishing lens repeats polishing processing in multiple stages until it is processed into a predetermined shape in the previous process in the manufacturing apparatus 110. The cleaning apparatus 100 removes abrasives and the like adhering to the optical element L in the previous process after such a process. As a result, it is possible to start the inspection of the next process in the inspection apparatus 120 while the surface of the optical element L is clean.

  As shown in FIG. 1, the cleaning apparatus 100 according to this embodiment includes a cleaning tank 10, a cleaning nozzle 20, a holder 30, a vertical movement actuator 40, a sealing member 50, a discharge mechanism 60, and a control unit 70. And a distance setting member / mechanism (distance setting mechanism) 80.

As shown in FIG. 1, the cleaning apparatus 100 is disposed between the manufacturing apparatus 110 and the inspection apparatus 120. An optical element L as an object to be cleaned is carried in from the manufacturing apparatus 110 and carried out to the inspection apparatus 120 by a conveying device 130 such as a belt conveyor.
Specifically, the cleaning apparatus 100 can be disposed adjacent to the manufacturing apparatus 110 that is a manufacturing machine of the optical element L, or can be disposed inside the manufacturing apparatus 110.

  As shown in FIGS. 1 and 2, the cleaning tank 10 has a substantially cylindrical shape having a substantially vertical axis and an open bottom, and a cleaning nozzle 20 is disposed at the central position of the closed top. The material of the cleaning tank 10 is not particularly limited as long as it has resistance to the cleaning liquid and exhibits durability at a set temperature, a set pressure, and the like at the time of cleaning. For example, the material of the cleaning tank 10 can be metal, resin, or a combination thereof.

In addition, the washing tank 10 is not limited to a cylindrical shape, and may have other shapes such as a rectangular column shape having a rectangular cross section, a prism base, a cone, and a truncated cone shape.
Moreover, the dimension of the washing tank 10 should just have the volume which can wash | clean the optical element L which is a to-be-cleaned object by a washing | cleaning liquid so that it may mention later, and in order to reduce the washing | cleaning liquid to be used. Also, it is assumed that the volume is as small as possible. For example, in order to wash the lens L for an endoscope, it is possible to have a volume of about 10 cc to 300 cc.

  The bottom opening 11 of the cleaning tank 10 has the same diameter as the horizontal cross section of the cylindrical cleaning tank 10 and is arranged in a circular shape that is positioned substantially horizontally, and can contact the sealing member 50 described later with its entire circumference. So as to be flush with each other. The bottom opening 11 serves as an insertion / extraction port for taking in and out the optical element L from the lower side of the cleaning tank 10, and is set to have at least a diameter dimension through which the optical element L can pass.

  As shown in FIGS. 1 and 2, the cleaning nozzle 20 is arranged at the center of the top of the cleaning tank 10 so as to be able to spray vertically downward, and is connected to a cleaning liquid supply unit 21 and a gas supply unit 22 outside the cleaning tank 10. Has been. The cleaning nozzle 20 is provided at a position facing the bottom opening 11 of the cleaning tank 10. Since the cleaning nozzle 20 is arranged to inject the cleaning liquid vertically downward, cleaning can be performed efficiently by the injection force and gravity.

  The supply unit 21 supplies pressurized cleaning liquid to the cleaning nozzle 20. As shown in FIG. 1, the supply unit 21 includes, for example, a cleaning liquid reservoir 21a that stores a cleaning liquid that is pure water, a pump 21b that pumps the cleaning liquid in the cleaning liquid reservoir 21a, and impurities from the cleaning liquid that is pumped from the pump 21b. A filter 21c to be removed, a regulator 21d provided downstream of the filter 21c, and an electromagnetic valve 21e provided downstream of the regulator 21d for switching the supply of pressurized cleaning liquid or controlling the supply amount. The supply unit 21 is connected to the cleaning nozzle 20.

The pump 21b, the regulator 21d, and the electromagnetic valve 21e are all electrically connected to a control unit 70 that is an electronic circuit (CPU) described later.
The cleaning liquid reservoir 21a may be capable of supplying pure water to the cleaning nozzle 20 via a pipe by a siphon method. In this case, the cleaning liquid reservoir 21a can supply pure water without using a pump.

  The pump 21b can switch between high pressure and low pressure, and can switch between a state in which the cleaning liquid is supplied at a high pressure and a state in which the cleaning liquid is supplied at a low pressure. When the cleaning liquid is supplied at a high pressure, the optical element L is cleaned by jetting from the cleaning nozzle 20, and when the cleaning liquid is supplied at a low pressure, the cleaning liquid is stored in the cleaning tank 10 to clean the optical element L. It is also possible to do it.

  The supply unit 22 supplies a gas such as compressed air to the cleaning nozzle 20. As shown in FIG. 1, the supply unit 22 includes a compressor 22a that compresses air and the like, a filter 22b that removes impurities such as dust from the gas pumped from the compressor 22a, a regulator 22c that is provided downstream of the filter 22b, An electromagnetic switching valve 22d that is provided downstream of the regulator 22c and switches the supply of compressed air or controls the supply amount.

  The compressor 22a, the regulator 22c, and the electromagnetic valve 22d are all electrically connected to the control unit 70 described later.

  The supply units 21 and 22 supply pure water pressurized by the pump 21a and air compressed by the compressor 22a to the cleaning nozzle 20 from the inside, and the mixed state of these, cleaning liquid, or air It is also possible to inject by switching to. At this time, the pure water and the air can be switched or the supply amount can be controlled by controlling the opening and closing of the valves 21e and 22d by the controller 70.

  As shown in FIGS. 1 and 2, the holding tool (jig) 30 fixes an optical element L as an object to be cleaned to the upper end of a standing holding column 31, and is cleaned by a vertical movement actuator 40. The tank 10 can be inserted from below. A flat lid 51 that is a sealing member 50 is integrally formed at the base of the holding column 31.

In the holder 30, as shown in FIGS. 1 and 2, the optical element L that is an object to be cleaned is fixed to the upper end surface of the holding column 31 with an adhesive or the like.
For this reason, the holder 30 can be made common with a processing jig used when the lens (optical element) L is formed from the base material by polishing or the like in the lens processing machine (manufacturing apparatus) 110. Accordingly, the optical element L can be taken out from the lens processing machine 110 while being attached to the holder 30, and the optical element L can be introduced into the cleaning tank 10 while being attached to the holder 30. Accordingly, it is possible to remove the dirt adhering to the surface of the optical element L after the lens processing without waiting time immediately after the processing.

  The fixing of the optical element L to the holding column 31 is not limited to an adhesive. For example, the optical element L, which is an object to be cleaned, is fixed and released from the upper end of the holding column 31 by a suction mechanism having a suction hole provided at the upper end of the holding column 31 and a decompressor connected to the suction hole. You can also.

As shown in FIGS. 1 and 2, the sealing member 50 is a flat lid 51 integrated with the base of the holding column 31. As shown in FIG. 1 and FIG. 2, the flat plate lid 51 is positioned around the holding column 31 with respect to the lower end of the bottom opening 11 of the cleaning tank 10 whose upper surface is a smooth flat plate. The surface of the flat lid 51 can be contacted uniformly. The cleaning tank 10 can be easily sealed in a state in which the flat lid 51 is in contact with the lower end of the bottom opening 11 of the cleaning tank 10.
The sealing member 50 acts as a lid that opens and closes the bottom opening 11 through which the holder 30 that holds the cleaning object L is taken in and out.

As shown in FIGS. 1 and 2, the vertical movement actuator 40 is a robot arm or the like that raises the holder 30 and the sealing member 50 that have been carried out of the manufacturing apparatus 110 by the transfer device 130 together. The vertically moving actuator 40 is provided substantially horizontally and can extend and retract a horizontally extendable arm (robot arm) 41 capable of holding the holder 30 and the sealing member 50 at its tip, and a base 42 of the arm 41. It has an upper and lower rail 43 that regulates the position in the direction, and a drive unit (not shown).
The vertical movement actuator 40 is connected to the control unit 70, and its operation can be controlled by the control unit 70.

  The arm 41 integrally holds the holder 30 and the sealing member 50 that have been transported to the lower position of the cleaning tank 10 in the transport device 130 and is lifted in a position-controlled state by the upper and lower rails 43. The surface of the flat plate lid 51 located around the holding column 31 can be raised to a sealing position where it is uniformly in contact with the lower end of the bottom opening 11 of the cleaning tank 10. Further, the arm 41 can be lowered from the sealing position to a conveying position where the holder 30 and the sealing member 50 are integrally placed on the conveying device 130.

  Although the vertical movement actuator 40 is shown in a simplified manner in the figure, the holder 30 and the sealing member 50 can be moved up and down integrally, and the cleaning tank 10 can be sealed. It is not limited as long as it is. The vertical movement actuator 40 may have a joint part that becomes a joint that can be bent in the middle of the arm 41, an angle changing part that changes the angle of the tip of the arm 41, or other configurations.

  For example, the vertical movement actuator 40 that drives the holder 30 can be configured to move the air cylinder or the mechanism in addition to the robot. Further, the cleaning tank 10 is moved to make the holder 30 and the bottom opening 11 watertight. It is also possible to have a configuration in which the door is closed.

  As shown in FIG. 1, the discharge mechanism 60 discharges the cleaning liquid from the cleaning tank 10 at the time of cleaning, and includes a bottom opening 11, a discharge port 61 provided as a position where the cleaning liquid can be discharged, and a discharge It has the discharge tank 62 to store. The discharge port 61 in the present embodiment can be a through hole provided on a side surface near the bottom opening 11 of the cleaning tank 10.

  The discharge port 61 has a moderately large cross-sectional area that can efficiently discharge the cleaning liquid. Moreover, the cross-sectional shape and the number of arrangement can be appropriately set appropriately so that the cleaning liquid can be efficiently discharged.

  In addition, after completion | finish of washing | cleaning, the bottom part opening 11 of the washing tank 10 is mainly used as the discharge mechanism 60. FIG. For this reason, the discharge tank 62 is arranged so as to be able to receive the discharge flowing down (dropping) from the bottom opening 11 of the cleaning tank 10 opened after the end of the cleaning and the sealing member 50 positioned below this. The

  The distance setting member / mechanism (distance setting mechanism) 80 is a member or mechanism that sets the distance t1 between the cleaning nozzle 20 tip 20a and the optical element L to be cleaned at the tip of the holding column 31 during cleaning. As shown in FIG. 1, since the height t2 of the holding column 31 from the surface of the flat plate lid 51 is fixed, the height of the upper surface changes during cleaning depending on the thickness t3 of the optical element L. It will be.

  Correspondingly, in order to set the distance t1 within an effective range for cleaning, the distance setting member / mechanism 80 is attached to the bottom opening 11 of the cleaning tank 10 as shown in FIG. A possible ring (spacer) 81 is provided.

  As shown in FIG. 1, the ring 81 has the same dimension as the thickness t <b> 4, is made of the same material having the same diameter and the same thickness as the bottom opening 11 of the cleaning tank 10, and the cleaning tank 10. When attached to the bottom opening 11, the inner surface thereof is flush with the inner wall of the bottom opening 11 of the cleaning tank 10.

By attaching the ring 81 to the bottom opening 11 of the cleaning tank 10, the height position of the surface of the flat plate lid 51 is lowered by a height corresponding to the thickness t <b> 4 as compared with the case where the ring 81 is not attached. Position. Thereby, compared with the case where the ring 81 is not attached, the tip of the holding column 31 is lowered by a height corresponding to the thickness t4, and the optical element L has a large thickness t3. The distance t1 between the cleaning nozzle 20 tip 20a during cleaning and the optical element L to be cleaned at the tip of the holding column 31 can be set within a preferable range.
Further, the thin optical element L is cleaned in a state where the ring 81 is not attached to the bottom opening 11 of the cleaning tank 10.

  In addition, it is preferable to prepare many types of rings 81 corresponding to the thickness dimension t3 of different types of optical elements L as the thickness t4.

  Next, the cleaning method in this embodiment will be described.

FIG. 3 is a flowchart showing the cleaning method in the present embodiment.
As shown in FIG. 3, the cleaning method in the present embodiment includes a lens thickness setting step S01, a preparation step S02, a nozzle distance setting step S03, a lens processing step S04, a carry-in step S05, and a rising sealing step S06. The spray cleaning step S07, the discharge step S08, the drying step S09, the descending / opening step S10, the unloading step S11, and the inspection step S12.

4 to 9 are schematic front sectional views showing the operation of the cleaning apparatus in the cleaning method of the present embodiment. In each of these drawings, the configuration may be omitted as appropriate in accordance with the description of the process.
In the cleaning method of the present embodiment, as a pre-cleaning process, first, in the lens thickness setting process S01 shown in FIG. 3, the thickness t3 of the optical element (lens) L to be cleaned and the holder The dimensions such as the height t2 of the 30 holding columns 31 are set in advance.

  Next, as a pre-cleaning step, as a preparatory step S02 shown in FIG. 3, the base material to be processed into the optical element (lens) L is fixed to the tip of the holding column 31 of the holder 30.

  Next, as a nozzle distance setting step S03 shown in FIG. 3, corresponding to the thickness t3 of the lens (optical element) L to be cleaned, the object to be cleaned at the tip 20a of the cleaning nozzle 20 and the tip of the holding column 31 at the time of cleaning is used. A distance t1 from the optical element L is set. At this time, the distance t1 between the tip of the cleaning nozzle 20 and the lens L is set by confirming in advance a distance range in which the effect of removing dirt is maximized before the cleaning process.

  In order to set the distance t1, as shown in FIG. 4, a ring 81 as a distance setting member / mechanism 80 having a thickness t4 corresponding to the thickness t3 of the lens L is attached to the bottom opening 11 of the cleaning tank 10. .

  Specifically, for example, a relatively small ring 81a having a thickness t4 corresponding to the thickness t3 corresponds to the optical element L1 having a relatively small thickness t3 as shown in FIG. Then, for the optical element L having a relatively large thickness t3, as shown in FIG. 4B, a ring 81 having a relatively large thickness t4 is made to correspond to the thickness t3.

Here, the distance t1 is set so as to be within a range in which the cleaning can be effectively performed by the cleaning liquid ejected from the cleaning nozzle 20.
For example, the distance t1 is set so as to be within the optimum range depending on the material of the optical element L, the adhesion state of dirt or the like in the lens processing step S04, which is a pre-cleaning step, and the cleaning conditions such as the pressure of the cleaning liquid ejected from the cleaning nozzle 20. Is done. The thickness t4 of the corresponding ring 81 is set in consideration of the height t2 of the fixed holding column 31 from the surface of the flat plate lid 51.

  Further, in the nozzle distance setting step S03, the type or thickness t3 of the optical element L set in the lens thickness setting step S01, the dimensions such as the height t2 of the holding column 31 of the holder 30, and the like In the spray cleaning step S07, cleaning is performed in a sealed state in which the bottom opening 11 and the flat cover 51 are brought into contact as described later, or the bottom opening 11 and the flat cover 51 are separated from each other. Set whether to perform cleaning in the stopped state. The contact non-contact state between the bottom opening 11 and the flat lid 51 also affects the distance t1 between the cleaning nozzle 20 tip 20a and the optical element L to be cleaned at the tip of the holding column 31. It is preferable to set in the nozzle distance setting step S03 in the step before S07.

  The nozzle distance setting step S03 may be performed before or after the lens thickness setting step S01 and / or the preparation step S02 based on the dimensions such as the thickness t3 of the optical element L set in the lens thickness setting step S01. Can be done.

  Next, as a pre-cleaning process, as a lens processing step S04 shown in FIG. 3, in the manufacturing apparatus 110, the base material fixed to the tip of the holding column 31 of the holder 30 is applied to the optical element (lens) L by a technique such as polishing. Process.

  Next, as the carrying-in process S05 shown in FIG. 3, the holder 30 that has finished the lens processing process S04 as the previous process is carried out from the manufacturing apparatus 110 by the belt conveyor 130 as shown in FIG. Hold and move to the lower side of the washing tank 20.

  At this time, when the holding tool 30 moves to a predetermined position, the belt conveyor 130 is operated so that a position sensor (not shown) is operated and the holding tool (jig) 30 is stopped. After stopping the belt conveyor 130, the vertical movement actuator 40 holds the holder 30 by a signal from the control unit 70 and conveys it to the lower position of the bottom opening 11 of the cleaning tank 10 by the robot arm 41.

  At this time, since the holder 30 used in the lens processing machine 110 is set so as to be used in common with the cleaning apparatus 100, the lens processing machine 110 and the cleaning apparatus 100 connected by the belt conveyor 130 are used. By simply moving the holder 30, it can be cleaned after processing.

  Next, as the ascending and closing step S06 shown in FIG. 3, the holder 30 is raised by the vertical movement actuator 40, and the optical element L is inserted (introduced) from the bottom opening 11 of the cleaning tank 10 as shown in FIG. At this time, the position of the optical element L fixed to the tip of the holding column 31 is set so as to be directly below the cleaning nozzle 20. At the same time, the sealing member 50 integrated with the holder 30 is raised by the vertical movement actuator 40 so that the surface around the holding column 31 of the flat lid 51 is brought into contact with the entire circumference of the bottom opening 11 of the cleaning tank 10. Then, the cleaning tank 10 is sealed.

Here, as the position setting of the optical element L, the flat plate lid 51 raised by the robot arm 41 is brought into close contact with the bottom opening 11 of the cleaning tank 10, so that the holder 30 is restricted in the vertical direction and stopped. Thus, the lens L can be set at a predetermined position in the cleaning tank 10.
In addition, the bottom part opening 11 of the washing tank 10 with which the surface of the flat cover body 51 abuts here means the lower end of the attached ring 81.

  In this way, by bringing the surface of the flat plate lid 51 into contact with the entire periphery of the bottom opening 11 of the cleaning tank 10, the tip of the holding column 31 is thicker than the ring 81 when not attached. The position is separated from the cleaning nozzle 20 downward by t4. Thereby, the distance t1 from the lower end part which is the front-end | tip of the cleaning nozzle 20 to the optical element L which is the to-be-cleaned object fixed to the upper end of the holding column 31 is set to a range suitable for the cleaning set in the nozzle distance setting step S03. be able to.

  Next, as the jet cleaning step S07 shown in FIG. 3, the control unit 70 operates the pump 21b of the supply unit 21 shown in FIG. 1 to pump the cleaning liquid to be pure water stored in the cleaning liquid storage unit 21a. At the same time, the controller 70 pumps the cleaning liquid having a predetermined pressure by the regulator 21d shown in FIG. 1, and the controller 70 opens the electromagnetic valve 21e. Thereby, the cleaning liquid filtered by the filter 21 c is supplied to the cleaning nozzle 20.

  As a result, as shown in FIG. 6, the cleaning liquid is sprayed from the cleaning nozzle 20 onto the optical element L to the optical element L set in the ascending and sealing step S06, and the sprayed cleaning liquid hits the dirt adhering to the surface. This is removed from the surface of the optical element L.

In the jet cleaning step S07, as shown in FIG. 6, the cleaning liquid that has come into contact with the surface of the optical element L can be discharged from the discharge port 61 provided on the side surface of the cleaning tank 10 to the external discharge tank 62. . The discharge port 61 is provided at a height position at which the lens 1 is not immersed even when the cleaning liquid accumulates in the cleaning tank 10, and can discharge the cleaning liquid and adjust the pressure in the cleaning tank 10 when the cleaning liquid is jetted. is there.
The discharge as the jet cleaning step S07 can be performed in parallel as the next discharge step S08.

  In the spray cleaning step S07, the pressurized cleaning liquid is sprayed from the cleaning nozzle 20, but since the periphery of the optical element L is surrounded by the cleaning tank 10, scattering of the cleaning liquid can be prevented.

In the jet cleaning step S07 in the present embodiment, a two-fluid jet may be jetted from the cleaning nozzle 20.
The two-fluid jet supplies cleaning liquid into the cleaning nozzle 20 with the force of compressed air, the cleaning liquid is refined at the front end of the cleaning nozzle 20, and is sprayed with air pressure to remove dirt on the surface of the optical element L.

In this case, simultaneously with the supply unit 21, the control unit 70 operates the compressor 22a of the supply unit 22 shown in FIG. 1 to compress air and the like, and the control unit 70 uses the regulator 22c shown in FIG. The compressed air is pumped and the electromagnetic switching valve 22d is opened by the control unit 70, whereby the gas from which impurities such as dust are removed by the filter 22b is supplied to the cleaning nozzle 20.
The two-fluid jet jets the cleaning liquid with high-pressure air. However, since the periphery of the optical element L is surrounded by the cleaning tank 10, the cleaning liquid can be prevented from scattering.

  Further, even when the two-fluid jet is ejected from the cleaning nozzle 20, the discharge port 61 can be provided at a position where the optical element L is not immersed even when liquid is accumulated in the cleaning tank 10. The discharge port 61 is in a state in which the discharge function from the cleaning tank 20 and the pressure adjustment in the cleaning tank 20 at the time of air injection can be performed so that the functions of discharging and exhausting can be sufficiently performed. The state is set, and pure water is discharged to the discharge tank 62. Accordingly, an exhaust outlet can be provided at the upper part of the cleaning tank.

  Further, when the two-fluid jet is ejected from the cleaning nozzle 20, in the nozzle distance setting step S03, the distance t1 is set in consideration of the cleaning liquid supply amount, the gas supply amount, these pressure conditions, the diameter of the cleaning nozzle 20, and the like. The gas-liquid mixed fluid ejected from the cleaning nozzle 20 is set to be within a range where cleaning can be performed effectively.

  When the set cleaning time has elapsed since the start of the spray cleaning step S07, the controller 70 stops the pump 21b and the regulator 21d of the supply unit 21 shown in FIG. 1, and closes the electromagnetic valve 21e. And Thereby, the supply of the cleaning liquid to the cleaning nozzle 20 is stopped, and the jet cleaning step S07 is ended.

  Here, when the two-fluid jet is ejected from the cleaning nozzle 20, when the predetermined cleaning time has elapsed, the control unit 70 and the compressor 22a and the regulator of the supply unit 22 shown in FIG. The supply of the gas to the cleaning nozzle 20 is stopped by stopping 22c and closing the electromagnetic switching valve 22d.

Next, as a discharge step S08 shown in FIG. 3, as shown in FIG. 7, the cleaning liquid is discharged from the discharge port 61 provided on the side surface of the cleaning tank 10 to the external discharge tank 62.
At this time, in order to further promote the discharge, the vertical movement actuator 30 is driven to lower the flat cover 51 of the sealing member 50 and to be separated from the bottom opening 11 of the cleaning tank 10. The cleaning liquid that has accumulated in the vicinity of the bottom of the plate may be discharged from the gap between the flat plate lid 51 and the bottom opening 11.
When the discharge port 61 is provided in the vicinity of the bottom opening 11 of the cleaning tank 10, the cleaning liquid can be discharged outside without separating the bottom opening 11 of the cleaning tank 10 and the flat lid 51.

  Of course, without providing the discharge port 61, the cleaning liquid can be discharged only from the gap between the bottom opening 11 of the cleaning tank 10 and the flat lid 51. At this time, if it is a problem to immerse the optical element L in the cleaning water, the amount of jetting of the two-fluid jet may be suppressed.

Moreover, the distance which separates the bottom part opening 11 and the flat cover 51 can be made into the grade which can be discharged | emitted from the washing tank 10. FIG.
Below the flat lid 51, a receiving portion 63 that receives the drained liquid flowing down or dripping and connected to the drain tank 62 can be provided.

  Next, as the drying step S09 shown in FIG. 3, when the cleaning liquid has been discharged, as shown in FIG. 8, high-pressure air, which is a drying gas, is jetted from the cleaning nozzle 20 onto the optical element L, so that the optical element The cleaning liquid adhering to the L surface is removed.

  At this time, the control unit 70 operates the compressor 22a of the supply unit 22 shown in FIG. 1 to compress air and the like, and the control unit 70 pumps compressed air having a predetermined pressure by the regulator 22c shown in FIG. Then, by opening the electromagnetic switching valve 22d by the control unit 70, the gas from which impurities such as dust are removed by the filter 22b is supplied to the cleaning nozzle 20.

Thereby, 0.5 Mpa air filtered by the filter 22b is sprayed to the optical element L through the cleaning nozzle 20 serving as a drying port, and water droplets adhering to the surface of the optical element L are removed and dried.
The cleaning liquid blown off from the surface of the optical element L is discharged from the discharge port 61 provided on the side surface of the cleaning tank 10 to the external discharge tank 62.

Alternatively, by driving the vertical movement actuator 40, the flat lid 51 of the sealing member 50 is lowered and separated from the bottom opening 11 of the cleaning tank 10, so that the cleaning liquid blown off near the bottom of the cleaning tank 10 can be removed. You may discharge | emit from the clearance gap between the flat cover body 51 and the bottom part opening 11. FIG.
When the discharge port 61 is provided near the bottom opening 11 of the cleaning tank 10, the cleaning liquid can be discharged outside without being separated from the bottom opening 11 of the cleaning tank 10.

When a predetermined drying time has elapsed since the start of the drying step S09, the control unit 70 stops the compressor 22a and the regulator 22c of the supply unit 22 shown in FIG. 1, and closes the electromagnetic valve 22d. To do. The drying time is controlled by a timer, and after the timer time has elapsed, the valve 22d is closed to complete the drying.
Thereby, supply of the gas to the washing nozzle 20 is stopped, and drying process S09 is complete | finished.

  Next, as the lowering and opening step S10 shown in FIG. 3, the sealing member 50 integrated with the holder 30 is lowered by the vertical movement actuator 40, and as shown in FIG. The sealing of the cleaning tank 10 is released by separating the flat plate lid 51 that has been in contact with the entire circumference of the bottom opening 11 of the cleaning tank 10. At the same time, the holder 30 is lowered by the vertical movement actuator 40, and the optical element L is extracted from the bottom opening 11 of the cleaning tank 10.

  Next, as the unloading step S11 shown in FIG. 3, the robot arm 41 is further lowered, and the robot arm 41 returns the holder 30 to the belt conveyor 130 shown in FIG. The holding tool 30 and the sealing member 50 are released from the robot arm 41. The holder 30 and the sealing member 50 released from the vertical movement actuator 40 are transported from the cleaning device 100 to the inspection device 120 connected by the belt conveyor 130 by the belt conveyor 130 and moved to the subsequent process.

  Next, as the inspection step S12 shown in FIG. 3, the holding device 30 conveyed by the belt conveyor 130 is fixed to the upper end of the holding column 31 in the inspection apparatus 120 after the belt conveyor 130 is stopped, and the optical element L which has been cleaned. Inspect.

  At this time, since the holder 30 used in the inspection device 120 is set so as to be used in common with the cleaning device 100, the inspection device 120 and the cleaning device 100 connected by the belt conveyor 130 hold the holding device 30. Inspection can be performed after cleaning by simply moving the tool 30.

  If the cleaning is insufficient after the inspection is completed, the optical element L together with the holder 30 is returned to the cleaning device 100 to perform cleaning again.

  The cleaning of the object to be cleaned (optical element) L is completed through the above steps.

  In the present embodiment, the holder 30 and the sealing member 50 are raised together by the vertical movement actuator 40, whereby the optical element L is disposed immediately below the cleaning nozzle 20 in the cleaning tank 10 and the sealing member 50. Is brought into contact with the bottom opening 11 of the cleaning tank 10 to seal the inside of the cleaning tank 10. These can be performed in the same operation. Further, when cleaning is performed in this state, the cleaning liquid can be prevented from being scattered around by the cleaning tank 10. The optical element L can be dried after washing. Further, after cleaning, the vertical movement actuator 40 lowers the holder 30 and the sealing member 40 in the same operation, thereby taking out the optical element L from the cleaning tank 10 and sealing the cleaning tank 10 with the sealing member 40. Can be released.

  At this time, since the holder 30 used in the manufacturing apparatus 110 and the inspection apparatus 120 is set to be used in common with the cleaning apparatus 100, the manufacturing apparatus 110 and the inspection apparatus connected by the belt conveyor 130 are set. 120 and the cleaning apparatus 100, by moving the holder 30, immediately after processing of the optical element (lens) L, the dirt adhering to the surface of the optical element L is removed without waiting time immediately after processing. And can be inspected without waiting after cleaning.

  Hereinafter, a cleaning device and a cleaning method according to a second embodiment of the present invention will be described with reference to the drawings.

FIG. 10 is a schematic front sectional view showing the operation of the cleaning apparatus in the cleaning method of the present embodiment.
This embodiment is different from the first embodiment described above in respect of the lateral reciprocating actuator, and other corresponding components are denoted by the same reference numerals and description thereof is omitted.

  As shown in FIG. 10, the cleaning apparatus 100 according to the present embodiment includes a horizontal reciprocating actuator 45.

  The horizontal reciprocating actuator 45 is connected to the control unit 70 to reciprocate the holding column 31 in the horizontal direction during cleaning, and is capable of reciprocating the holder 30 and the sealing member 50 integrally in the horizontal direction. Yes. Specifically, the robot arm 41 of the vertical movement actuator 40 is reciprocated so as to expand and contract in the axial direction, or the robot arm 41 of the vertical movement actuator 40 is swung in a direction perpendicular to the axial direction. It shall be driven.

  In the cleaning method of the present embodiment, as the jet cleaning step S07 shown in FIG. 3, the control unit 70 operates the pump 21b of the supply unit 21 shown in FIG. 1 to store the pure water stored in the cleaning liquid storage unit 21a. At the same time, the controller 70 pressure-feeds the cleaning liquid having a predetermined pressure by the regulator 21d shown in FIG. 1, and the controller 70 opens the electromagnetic valve 21e. Thereby, the cleaning liquid filtered by the filter 21 c is supplied to the cleaning nozzle 20.

  At this time, as shown in FIG. 10, the controller 70 reciprocates or swings the robot arm 41 as the horizontal reciprocating actuator 45 to hold the holding pillar 31 of the holder 30 and the flat lid 51 of the sealing member 50. Are moved back and forth in the horizontal direction.

  As a result, as shown in FIG. 10, the cleaning liquid is sprayed onto the surface of the optical element L set in the rising sealing step S06 from the cleaning nozzle 20 to the optical element L that is reciprocating. It is struck by the adhered dirt and removed from the surface of the optical element L.

  In the cleaning method of the present embodiment, the position / angle at which the cleaning liquid ejected from the cleaning nozzle 20 or the two-fluid jet abuts can be changed by adding a swinging process for changing the position of the optical element L during cleaning. it can. By swinging in this way, the cleaning liquid or the two-fluid jet can be uniformly applied to the entire surface of the optical element L, so that the effect of removing dirt can be enhanced. Therefore, it is preferable to add a swinging process according to the adhesion strength of dirt.

  During the swinging process by the horizontal reciprocating actuator 45, the contact position between the flat lid 51 of the sealing member 50 and the bottom opening 11 of the cleaning tank 10 changes, but the contact state does not change. In other words, the bottom opening 11 of the cleaning tank 10 is maintained in contact with the flat plate lid 51 on the entire circumference. Thus, the sealing state of the cleaning tank 10 and the distance t1 between the cleaning nozzle 20 tip 20a set as the nozzle distance setting step S03 and the optical element L to be cleaned at the tip of the holding column 31 do not change. The cleaning efficiency is not reduced.

  In addition, since the ejected cleaning liquid and the high-pressure jet can be uniformly applied to the surface of the optical element L by swinging, the effect of removing dirt can be enhanced. Therefore, it is preferable to add a swinging process also in other embodiments according to the adhesion strength of dirt.

  Hereinafter, a third embodiment of a cleaning apparatus and a cleaning method according to the present invention will be described with reference to the drawings.

FIG. 11 is a schematic front sectional view showing the operation of the cleaning apparatus in the cleaning method of the present embodiment.
This embodiment is different from the first and second embodiments described above in respect of the distance setting member / mechanism, and other corresponding components are denoted by the same reference numerals and description thereof is omitted.

  As shown in FIG. 11, the cleaning apparatus 100 of the present embodiment has a configuration that sets the height t <b> 2 of the holding column 31 as the distance setting member / mechanism 80.

In the present embodiment, as shown in FIG. 11, the holding column 31 is divided into an upper holding column 31 a and a lower holding column 31 b, and these are screwed by a screw portion 83.
The height t2 of the holding column 31 is changed by rotating the upper holding column 31a with respect to the lower holding column 31b by the screw portion 83, whereby the standard of the thickness t3 of the optical element L as the distance setting member / mechanism 80 is changed. The distance t1 between the cleaning nozzle 20 tip 20a and the optical element L to be cleaned at the tip of the holding column 31 can be set.

  In the cleaning method of the present embodiment, the upper holding column 31a is rotated with respect to the lower holding column 31b by the screw portion 83 in the preparation step S02, and the height t2 of the holding column 31 is set, or in the nozzle distance setting step S03. The height t2 of the holding column 31 can be set by rotating the upper holding column 31a with respect to the lower holding column 31b by the screw portion 83.

  In the present embodiment, it is not necessary to prepare many types of rings 81 having different thicknesses t4 corresponding to the thickness dimension t3 of different types of optical elements L, and a variety of types can be obtained by using one type of holder 30. It is possible to correspond to the optical element L.

  Hereinafter, a cleaning device and a cleaning method according to a fourth embodiment of the present invention will be described with reference to the drawings.

FIG. 12 is a schematic front sectional view showing the operation of the cleaning apparatus in the cleaning method of the present embodiment.
The present embodiment differs from the first to third embodiments described above in terms of the jet cleaning step S07, the elastic member 13, and the discharge mechanism 60, and other corresponding components are denoted by the same reference numerals. The description is omitted.

  In the cleaning apparatus 100 of the present embodiment, as shown in FIG. 12, the optical element L is cleaned by storing the cleaning liquid in the cleaning tank 10 in the jet cleaning step S07.

  For this reason, the discharge port 61 in the discharge mechanism 60 is provided in the cleaning tank 10 at a position above the upper end position of the optical element L during cleaning.

  Further, in order to improve the sealing property of the cleaning tank 10 and easily maintain a watertight state, the bottom opening 11 of the cleaning tank 10 is provided with an elastic member 13 that contacts the sealing member 50. The elastic member 13 can be an O-ring made of an elastic member such as silicon resin, Teflon (registered trademark) resin, nitrile resin, or urethane resin.

  In addition, the discharge port 61 provided on the side surface of the cleaning tank 10 cleans the optical element L in the cleaning tank 10 so that it can be immersed, and discharges the cleaning liquid and the pressure in the cleaning tank 10 when the cleaning liquid and air are jetted. Adjustments can be made.

  In the cleaning method of the present embodiment, as the spray cleaning step S07 illustrated in FIG. 3, first, the cleaning liquid is stored in the cleaning tank 10 by the supply unit 21. At this time, the water level of the cleaning liquid stored in the cleaning tank 10 is at least an upper position than the upper end of the optical element L, for example, an upper position than the tip 20 a of the cleaning nozzle 20. In the cleaning tank 10 storage step, the supply of the cleaning liquid by the supply unit 21 can be performed at a lower pressure than in the next step.

  At this time, the pressure may be switched to a low pressure by a pump 21b capable of switching between a high pressure and a low pressure, and it is desirable to supply water at a low pressure until the cleaning liquid reaches the tip 20a of the cleaning nozzle 20.

  In addition, the decision to stop the water injection when the cleaning tank 10 is full is detected based on the detection signal output to the control unit 70 by detecting the timer setting or the start of drainage from the discharge port 61 with a detector. You can also

  Next, the cleaning liquid pressurized by the pump 21b is supplied by the supply unit 21 to the cleaning nozzle 20 through a pipe, and the cleaning liquid is controlled by the on-off valve 21e and passes through the front end 20a of the cleaning nozzle 20 to the cleaning tank. 10 is sprayed into the cleaning liquid stored in 10.

  In the cleaning method of the present embodiment, the cleaning liquid supplied at a higher pressure than that at the time of storage is sprayed from the hole of the tip 20a of the cleaning nozzle 20 to remove dirt on the surface of the optical element L, and compressed gas is supplied to the tip 20a of the cleaning nozzle 20. The surface of the optical element L can be dried by spraying from the holes.

  That is, as a cleaning method of the optical element L, a crushing impact force caused by cavitation grown in the water jet is used. For this reason, the supply unit 21 and the supply unit 22 set the supply conditions such as the pressure of the cleaning liquid within a preferable range for the occurrence of cavitation.

  In order to generate a cavitation jet (high-speed submerged water jet), a cleaning tank 10 for storing the cleaning liquid is generally required to inject the cleaning liquid into the cleaning liquid at a high pressure. For this reason, in the cleaning by the cavitation jet, the object to be cleaned needs to be sealed.

  In addition, it is necessary to set the distance t1 between the cleaning nozzle 20 and the optical element L that is the object to be cleaned within a range in which the cleaning effect by the cavitation jet can be effectively obtained. If the distance t1 is larger than this range, the crushing impact force due to cavitation generated by the high-pressure jet does not reach the level necessary for cleaning, and it is not preferable. If the distance t1 is smaller than this range, sufficient cavitation is caused. However, it is not preferable because the impact range due to cavitation is out of the center and the central portion is not sufficiently cleaned.

  When the set cleaning time has elapsed since the start of cleaning by the cavitation jet in the jet cleaning step S07, the controller 70 stops the pump 21b and the regulator 21d of the supply unit 21 shown in FIG. Then, the electromagnetic valve 21e is closed. Thereby, the supply of the cleaning liquid to the cleaning nozzle 20 is stopped.

  Next, as the discharging step S08 shown in FIG. 3, as shown in FIG. 7, by driving the vertical movement actuator 30, the flat plate lid body 51 of the sealing member 50 is lowered, and the bottom opening 11 of the cleaning tank 10. The cleaning tank 10 is released from the sealed state, and the cleaning liquid stored in the cleaning tank 10 is discharged from the gap between the flat lid 51 and the bottom opening 11. The cleaning liquid discharged or dropped from the periphery of the flat lid 51 is discharged to the discharge tank 62 via the receiving portion 63.

  Here, the distance which separates the flat plate lid 51 and the bottom opening 11 can be set to such an extent that the cleaning liquid stored in the cleaning tank 10 can be discharged.

  According to this embodiment, it is possible to perform more effective cleaning and efficiently remove dirt. In particular, since it can only be transmitted in water, it can be washed with a high-pressure jet that needs to be ejected in the stored cleaning liquid, and it is not necessary to take out the object to be cleaned from the stored cleaning liquid and perform a separate drying process. Therefore, the size of the cleaning device 100 and the operation mechanism can be simplified.

  Further, the water sprayed at high pressure does not scatter, the drive mechanism for controlling the position of the object to be put in and out and the object to be cleaned is not complicated, and the volume of the cleaning liquid to be stored is compared with the object L to be cleaned. Therefore, it is possible to prevent the water supply / drainage from taking time.

  Hereinafter, a cleaning device and a cleaning method according to a fifth embodiment of the present invention will be described with reference to the drawings.

FIG. 13 is a schematic front sectional view showing the operation of the cleaning apparatus in the cleaning method of the present embodiment.
This embodiment differs from the first to fourth embodiments described above with respect to the ultrasonic transducer 25 and the drying nozzle 26, and the other corresponding components are denoted by the same reference numerals and description thereof. Is omitted.

In the cleaning apparatus 100 of the present embodiment, as shown in FIG. 13, an ultrasonic transducer 25 that enables ultrasonic cleaning is provided in the cleaning nozzle 20.
The ultrasonic vibrator 25 applies ultrasonic vibration to the cleaning liquid, and the cleaning nozzle 20 is an ultrasonic water flow nozzle.

In addition to the cleaning nozzle 120, the top of the cleaning tank 10 is provided with a drying nozzle 26 that injects a drying gas onto the optical element L during drying.
In the present embodiment, a supply unit 21 is connected to the cleaning nozzle 20, and a supply unit 22 is connected to the drying nozzle 26. The cleaning liquid pressurized by the pump 21 a is supplied to the ultrasonic water nozzle 20. The air supplied and compressed by the compressor 22 a is supplied to the drying nozzle 26.

  The ultrasonic flowing water nozzle 20 in this embodiment applies ultrasonic waves to the cleaning liquid passing through the ultrasonic flowing water nozzle 20 when the ultrasonic vibrator 25 exposed in the nozzle interior 20b is electrically vibrated and applied to the liquid. The contamination on the surface of the optical element L can be removed by the ultrasonic vibration in the state. Thus, in order to transmit ultrasonic vibration directly to the dirt on the surface of the optical element L, it is necessary not to immerse the surface of the optical element L in the cleaning liquid.

  Therefore, the discharge port 61 provided on the side surface of the cleaning tank 10 is provided at a position where the optical element L is not immersed even when the cleaning liquid accumulates in the cleaning tank 10, and the cleaning tank is used for discharging the cleaning liquid and jetting the cleaning liquid or air. The pressure within 10 can be adjusted. Since it is preferable that the cleaning liquid is efficiently discharged, the discharge port 61 may have a large cross section or a large number of discharge ports.

  Since the drying nozzle 26 is attached separately from the ultrasonic water nozzle 20, the drying nozzle 26 is installed so that the surface of the optical element L is positioned on the line extending in the ejection direction from the tip.

  In the cleaning method of this embodiment, as the jet cleaning step S07 shown in FIG. 3, the cleaning liquid pressurized by the pump 21a is supplied from the supply unit 21 to the ultrasonic water nozzle 20 and the ultrasonic vibrator 25 is electrically connected. The ultrasonic wave is applied to the cleaning liquid that passes through the ultrasonic water nozzle 20 by virtue of mechanical vibration, and the surface of the optical element L is removed by the ultrasonic vibration force.

  Prior to this, in the cleaning method of the present embodiment, in the nozzle distance setting step S03 shown in FIG. 3, the distance t1 between the nozzle tip and the optical element L is confirmed in advance as to the range where the effect of removing dirt is maximized. To set in advance. The ultrasonic flowing water generates pure water vapor when ultrasonic waves are applied, but since it is surrounded by the cleaning tank 10, it is possible to prevent the vapor from being scattered.

  Simultaneously with the elapse of the set cleaning time, the oscillation of the ultrasonic transducer 25 is stopped by a signal output from the control unit 70, and the cleaning liquid valve 21e is closed, and the spray cleaning step S07 is completed.

  Next, as the discharging step S08 shown in FIG. 3, as shown in FIG. 7, the vertical movement actuator 30 is driven to lower the flat plate lid 51 of the sealing member 50, and the bottom opening 11 of the cleaning tank 10. The cleaning tank 10 is released from the sealed state, and the cleaning liquid stored in the cleaning tank 10 is discharged from the gap between the flat lid 51 and the bottom opening 11. The cleaning liquid discharged or dropped from the periphery of the flat lid 51 is discharged to the discharge tank 62 via the receiving portion 63.

  Next, as the drying step S09 shown in FIG. 3, in the supply unit 22, the air electromagnetic switching valve 22d is opened, and 0.5 Mpa of air pressurized by the compressor 22a and filtered by the filter 22b is dried by the drying nozzle. The water droplets sprayed onto the optical element L through the nozzle 26 and adhered to the surface of the optical element L are removed and dried. The drying time is controlled by a timer, and after the timer time has elapsed, the air electromagnetic switching valve 22d is closed to complete the drying step S09.

  According to this embodiment, it is possible to perform more effective cleaning and efficiently remove dirt.

  Hereinafter, a cleaning device and a cleaning method according to a sixth embodiment of the present invention will be described with reference to the drawings.

14 and 15 are schematic front sectional views showing the operation of the cleaning apparatus in the cleaning method of the present embodiment.
This embodiment is different from the first to fifth embodiments described above with respect to the distance setting member / mechanism 80, the holder 30, and the sealing member 50, and other corresponding components are denoted by the same reference numerals. The description is omitted.

  In the cleaning apparatus 100 of the present embodiment, as shown in FIGS. 14 and 15, the distance setting member / mechanism 80 is configured to set the height direction positions of the holding column 31 and the sealing member 50.

  In this embodiment, as shown in FIGS. 14 and 15, the holding column 31 is erected on the base 33 and can be transferred by the transfer mechanism 130, and the height of the holding column 31 is fixed. It is said that.

  Further, the sealing member 50 is divided into two pieces in the horizontal direction as the flat plate lid bodies 53 and 54, and a recess 55 through which the holding column 31 can pass is provided at the abutting center position where these contact each other. The tank 10 can be sealed. Further, a drive mechanism for driving the flat lid bodies 53 and 54 in the lateral direction is provided.

  In this embodiment, the robot arm 41 of the vertical movement actuator 40 is driven as a distance setting member / mechanism 80, and the flat lid bodies 53 and 54 are separated from each other so that the bottom opening 11 of the cleaning tank 10 is opened as shown in FIG. In the opened state, the holding column 31 is raised and inserted into the cleaning tank 10, and as shown in FIG. It is possible to seal the bottom opening 11 of the cleaning tank 10 by abutting the flat plate lids 53 and 54 so as to contact the holding column 31. The recesses 55, 55 are set in a shape that can contact the entire circumference of the side surface of the holding column 31 in the sealed state of the sealing member 50. The sealing member 50 is set to a height position at which the sealing member 50 can contact the bottom opening 11 only by moving in the horizontal direction.

  In this closed state, the holding column 31 is moved in the axial direction (vertical direction) by the vertical movement actuator 40, so that the interior of the cleaning tank 10 is removed from the surface of the flat lid bodies 53 and 54 of the sealing member 50 as shown in FIG. It is possible to change the height t2 of the holding column 31 protruding in the direction. The holding column 31 and the sealing member 50 that can be positioned relative to each other are used as a distance setting member / mechanism 80 to cope with the difference in the standard of the thickness t3 of the optical element L, and to cover the tip of the cleaning nozzle 20 and the tip of the holding column 31 It is possible to set the distance t1 with the optical element L to be cleaned.

In the cleaning method of the present embodiment, as the ascending and sealing step S06 shown in FIG. 3, the holder 30 is raised by the vertical movement actuator 40, and the optical element L is removed from the bottom opening 11 of the cleaning tank 10 as shown in FIG. Insert.
Thereafter, the sealing member 50 is moved in the direction approaching by the driving mechanism, the opposing end portions of the flat plate lid bodies 53 and 54 are brought into contact with each other, and the concave portions 55 and 55 are brought into contact with the side surface of the holding column 31. In this state, the cleaning tank 10 is sealed by bringing the surfaces of the flat lid bodies 53 and 54 into contact with the entire periphery of the bottom opening 11 of the cleaning tank 10.

  Next, as the nozzle distance setting step S03, after the ascending and sealing step S06, as shown in FIG. 15, the holder 30 is moved up and down by the vertical movement actuator 40 to the thickness t3 of the optical element (lens) L to be cleaned. Correspondingly, the distance t1 between the cleaning nozzle 20 tip 20a during cleaning and the optical element L to be cleaned at the tip of the holding column 31 is set.

Then, after going through the spray cleaning step S07, the discharge step S08, and the drying step S09,
As the downward opening step S10 shown in FIG. 3, the flat plate lids 53 and 54 of the sealing member 50 are moved in the direction of separation by the drive mechanism, and the bottom opening 11 of the cleaning tank 10 is opened. At this time, the flat plate lids 53 and 54 are set so as to be in the horizontal outer position of the bottom opening 11 of the cleaning tank 10.
Thereafter, the holder 30 is lowered by the vertical movement actuator 40, and the optical element L is extracted from the bottom opening 11 of the cleaning tank 10.

  In the present embodiment, in the discharging step S08 and / or the drying step S09, the flat lid bodies 53 and 54 of the sealing member 50 are moved away from each other by the drive mechanism, so that the bottom opening 11 of the cleaning tank 10 is opened. It can also be opened. At this time, the separation distance between the flat lid bodies 53 and 54 can be close to that in the open state of the bottom opening 11, and the cleaning liquid can be discharged.

  In this embodiment, it is possible to set the distance t1 between the cleaning nozzle 20 tip 20a and the optical element L to be cleaned at the tip of the holding column 31 more precisely. Thereby, it becomes possible to cope with precise setting of the cleaning conditions.

  In each of the above embodiments, the holder 30 side is moved as the nozzle distance setting step S03. However, the cleaning nozzle 20 may be configured to be positionable with respect to the cleaning tank 10.

  In addition, when an operator wipes and inspects the optical element (lens) surface without using the cleaning apparatus and the cleaning method of the present invention, the time for wiping the optical element is about 60 sec. On the other hand, when the cleaning apparatus and the cleaning method of the present invention are used, the time required for cleaning is about 30 seconds, and the required time can be reduced by about 50%.

  Furthermore, when the cleaning apparatus and the cleaning method of the present invention are used, the operator does not wipe the optical element (lens) directly, so that another operation can be performed until the processing for the lot is completed, and the time can be further reduced. it can. In addition, when the cleaning device and the cleaning method of the present invention are used, dirt is removed from the processed optical element (lens) surface and dried, so that the dirt is firmly fixed on the optical element (lens) surface. The effect that it can prevent is acquired.

In addition, if the apparatus is equipped with a conventional immersion cleaning tank and hot air drying tank, it has three tank configurations of cleaning, rinsing and drying, so the installation area of the apparatus is about 2 m × 1 m = 2 m ^2. Necessary. On the other hand, in the cleaning apparatus of the present invention, only about 0.8 m × 0.8 m = 0.64 m ² is necessary, so that the installation area can be reduced to about 1/3.

  As an application example of the present invention, it can be used for removing dirt after processing an optical element, removing dirt from an optical element during assembly, removing dirt from a minute metal part during assembly, and removing dirt from a processed part in a metal working machine.

DESCRIPTION OF SYMBOLS 10 ... Cleaning tank 11 ... Bottom opening 13 ... Elastic member 20 ... Cleaning nozzle 20a ... Tip 20b ... Inside 21 ... Supply unit 21a ... Compressor 21b ... Pump 21c ... Filter 21d ... Regulator 21e ... Electromagnetic valve 22 ... Supply unit 22a ... Compressor 22b ... Filter 22c ... Regulator 22d ... Electromagnetic valve 25 ... Ultrasonic vibrator 26 ... Drying nozzle 30 ... Holder 31 ... Holding pillar 31a ... Upper holding pillar 31b ... Lower holding pillar 33 ... Base 40 ... Vertical actuator 41 ... Arm (robot) arm)
42 ... Base 43 ... Upper / lower rail 45 ... Horizontal reciprocating actuator 50 ... Sealing member 51 ... Flat plate lid 53, 54 ... Flat plate lid 55 ... Concave 60 ... Discharge mechanism 61 ... Discharge port 62 ... Discharge tank 63 ... Receiving portion 70 ... Control unit 80: Distance setting member / mechanism (distance setting mechanism)
81 ... Ring (spacer)
83 ... Screw part 100 ... Cleaning device L ... Optical element (object to be cleaned) lens

Claims (10)

A cleaning device that removes dirt by spraying a cleaning liquid onto an object to be cleaned,
A washing tank having a bottom opening;
A cleaning nozzle for injecting the cleaning liquid onto the object to be cleaned contained in the cleaning tank;
A holder for holding the object to be cleaned;
A vertically moving actuator that moves up and down at least one of the holding tool and the cleaning tank and puts an object to be cleaned held in the holding tool into and out of the cleaning tank;
A sealing member for sealing the bottom opening of the cleaning tank during cleaning;
Have
By the first movement of the vertical movement actuator, the object to be cleaned held by the holder is introduced into the cleaning tank from the bottom opening, and the sealing member seals the bottom opening,
By the movement of the vertical movement actuator in the direction opposite to the first movement, the object to be cleaned held by the holder is taken out of the cleaning tank through the bottom opening, and the bottom portion by the sealing member The opening is unsealed,
It is comprised so that the washing | cleaning apparatus characterized by the above-mentioned. The holder is to fix the object to be cleaned to the upper end of a standing holding column,
The cleaning apparatus according to claim 1, further comprising a distance setting mechanism that sets a distance between the tip of the cleaning nozzle and the object to be cleaned at the tip of the holding column during the cleaning. The cleaning apparatus according to claim 2, wherein the holder has a horizontal reciprocating actuator that reciprocates the holding column in a horizontal direction during cleaning. The cleaning apparatus according to claim 2, wherein the sealing member is a flat plate lid integrated with a base portion of the holding column. The cleaning apparatus according to claim 1, wherein the cleaning liquid and gas are supplied to the cleaning nozzle. The cleaning apparatus according to claim 1, wherein the cleaning nozzle is provided with an ultrasonic vibrator that enables ultrasonic cleaning. The cleaning device also performs drying after cleaning,
The cleaning apparatus according to claim 6, wherein the cleaning tank includes a drying nozzle that injects a gas to the object to be cleaned during drying. The cleaning apparatus according to any one of claims 1 to 7, wherein a discharge port for discharging the cleaning liquid is provided on a side surface of the cleaning tank. The cleaning apparatus according to claim 1, wherein an elastic member that comes into contact with the sealing member is provided around the bottom opening of the cleaning tank. A cleaning method for drying the object to be cleaned after removing dirt by spraying a cleaning liquid on the object to be cleaned in a cleaning tank,
A step of fixing and transporting the object to be cleaned to the upper end of a holding column erected on the holder;
By moving at least one of the holder and the cleaning tank upward or downward, the object to be cleaned is introduced into the cleaning tank from the bottom opening of the cleaning tank, and the bottom of the cleaning tank is sealed by a sealing member. Sealing the opening;
A cleaning step of spraying a cleaning liquid onto the object to be cleaned from a cleaning nozzle positioned above the cleaning layer in a state where the cleaning tank is sealed;
A step of spraying a gas from a drying nozzle onto the object to be cleaned, and moving at least one of the holder and the cleaning layer in a direction opposite to the movement, thereby extracting the object to be cleaned from the cleaning tank; And releasing the sealing of the bottom opening of the cleaning tank by the sealing member,
A cleaning method comprising the steps of:

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