JP2018093231A - Semiconductor laser drive circuit - Google Patents
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Abstract
【課題】高速にAPC制御できる半導体レーザ駆動回路を提供する。
【解決手段】直列に接続された複数の半導体レーザLD1〜LDNと、複数の半導体レーザに電流を流す電流源2と、電流源を駆動して電流源の電流を制御する電流源駆動回路3と、複数の半導体レーザからのレーザ光を検出する検出手段5と、複数の半導体レーザの内の最後の半導体レーザLDNから最後の半導体レーザを含む1個以上の半導体レーザに接続された電流制御素子4と、検出手段の出力に基づき電流制御素子を制御することにより1個以上の半導体レーザの電流量を制御する電流量制御回路6とを備える。
【選択図】図1A semiconductor laser driving circuit capable of APC control at high speed is provided.
A plurality of semiconductor lasers LD1 to LDN connected in series, a current source 2 for passing a current to the plurality of semiconductor lasers, a current source driving circuit 3 for driving a current source and controlling a current of the current source, Detection means 5 for detecting laser light from a plurality of semiconductor lasers, and current control element 4 connected to one or more semiconductor lasers including the last semiconductor laser from the last semiconductor laser LDN among the plurality of semiconductor lasers And a current amount control circuit 6 that controls the current amount of one or more semiconductor lasers by controlling the current control element based on the output of the detection means.
[Selection] Figure 1
Description
本発明は、複数の半導体レーザを駆動する半導体レーザ駆動回路に関する。 The present invention relates to a semiconductor laser driving circuit for driving a plurality of semiconductor lasers.
複数の半導体レーザを駆動する半導体レーザ駆動回路において、特許文献1は、各々の半導体レーザに対してAPC(オートパワーコントロール)回路を設け、このAPC回路により、各々の半導体レーザの出力を所定値に制御することにより独立に安定化させている。 In a semiconductor laser driving circuit for driving a plurality of semiconductor lasers, Patent Document 1 provides an APC (auto power control) circuit for each semiconductor laser, and the output of each semiconductor laser is set to a predetermined value by this APC circuit. It is stabilized independently by controlling.
しかしながら、特許文献1では、APC回路が半導体レーザと同数だけ必要となり、構成が複雑化する。また、複数の半導体レーザを直列に接続した場合には、駆動電流が共通となるため、上述した手法を用いることはできない。1つの半導体レーザの出力に基づきAPC回路で光量調整を行うと、その他の半導体レーザの出力を安定化することはできない。 However, Patent Document 1 requires the same number of APC circuits as the number of semiconductor lasers, and the configuration becomes complicated. In addition, when a plurality of semiconductor lasers are connected in series, the drive current is common, so the above-described method cannot be used. If the light amount is adjusted by the APC circuit based on the output of one semiconductor laser, the outputs of the other semiconductor lasers cannot be stabilized.
また、全ての半導体レーザの合成出力に対してAPC制御することはできるが、直列に接続された半導体レーザは、駆動回路の浮遊成分(例えば浮遊容量)が大きくなるため、高周波成分が減衰して、高速にAPC制御できない。 In addition, although APC control can be performed on the combined output of all semiconductor lasers, the semiconductor lasers connected in series have a large floating component (for example, stray capacitance) in the drive circuit. APC cannot be controlled at high speed.
また、並列に接続された半導体レーザにおいても、例えば浮遊成分が並列に接続されて大きくなるため、高周波成分が減衰し、高速にAPC制御できない。 Also, in the semiconductor lasers connected in parallel, for example, floating components are connected and increased in parallel, so that high frequency components are attenuated and APC control cannot be performed at high speed.
本発明の課題は、高速にAPC制御することができる半導体レーザ駆動回路を提供することにある。 An object of the present invention is to provide a semiconductor laser driving circuit capable of performing APC control at high speed.
上記の課題を解決するために、本発明に係る半導体レーザ駆動回路は、直列に接続された複数の半導体レーザと、前記複数の半導体レーザに電流を流す電流源と、前記電流源を駆動して前記電流源の電流を制御する電流源駆動回路と、前記複数の半導体レーザからのレーザ光を検出する検出手段と、前記複数の半導体レーザの内の最後の半導体レーザから最後の半導体レーザを含む1個以上の半導体レーザに接続された電流制御素子と、前記検出手段の出力に基づき前記電流制御素子を制御することにより前記直列に接続された複数の半導体レーザに流れる電流を前記1個以上の半導体レーザへの電流と前記電流制御素子への電流とに分岐するように制御する電流量制御回路とを備え、前記電流量制御回路による制御対象は、前記1個以上の半導体レーザと前記電流制御素子とによる小さな閉回路で閉じ、前記閉回路の一端は、基準電位に固定されていることを特徴とする。 In order to solve the above-described problems, a semiconductor laser driving circuit according to the present invention includes a plurality of semiconductor lasers connected in series, a current source for passing a current through the plurality of semiconductor lasers, and driving the current source. 1 includes a current source driving circuit for controlling the current of the current source, detection means for detecting laser light from the plurality of semiconductor lasers, and a last semiconductor laser to a last semiconductor laser of the plurality of semiconductor lasers. A current control element connected to one or more semiconductor lasers and a current flowing through the plurality of semiconductor lasers connected in series by controlling the current control element based on an output of the detection means; A current amount control circuit that controls to branch into a current to the laser and a current to the current control element, and the control target by the current amount control circuit is the one or more It closed with a small closed circuit by a conductor laser and said current control element, one end of the closed circuit, characterized in that it is fixed to the reference potential.
また、半導体レーザ駆動回路は、並列に接続された複数の半導体レーザと、前記複数の半導体レーザに接続される電圧源と、前記複数の半導体レーザに対応して設けられ、前記半導体レーザに直列に接続された複数の電流制御素子と、前記複数の半導体レーザからのレーザ光を検出する検出手段と、前記検出手段の出力に基づき前記複数の電流制御素子の内の1つの電流制御素子を除く残りの電流制御素子を駆動することにより前記残りの半導体レーザに電流を流す駆動回路と、前記検出手段の出力に基づき前記1つの電流制御素子
を制御することにより前記検出手段の出力を所定値に制御するパワー制御回路とを備えることを特徴とする。
The semiconductor laser driving circuit is provided corresponding to the plurality of semiconductor lasers connected in parallel, the voltage source connected to the plurality of semiconductor lasers, and the plurality of semiconductor lasers, and connected in series to the semiconductor lasers. A plurality of connected current control elements, detection means for detecting laser light from the plurality of semiconductor lasers, and the rest excluding one current control element among the plurality of current control elements based on the output of the detection means A drive circuit for supplying current to the remaining semiconductor lasers by driving the current control element, and controlling the one current control element based on the output of the detection means to control the output of the detection means to a predetermined value And a power control circuit.
本発明に係る半導体レーザ駆動回路によれば、電流量制御回路が直列に接続された複数の半導体レーザに流れる電流を1個以上の半導体レーザへの電流と電流制御素子への電流とに分岐するように制御する。電流量制御回路による制御対象は、1個以上の半導体レーザへの電流と電流制御素子とによる小さな閉回路で閉じており、閉回路の一端は、基準電位に固定されているので、浮遊成分が小さいため、複数の半導体レーザを直列に接続した場合でも高速にAPC制御することができる半導体レーザ駆動回路を提供できる。 According to the semiconductor laser drive circuit of the present invention, the current flowing through the plurality of semiconductor lasers connected in series with the current amount control circuit is branched into a current to one or more semiconductor lasers and a current to the current control element. To control. The object to be controlled by the current amount control circuit is closed by a small closed circuit composed of a current to one or more semiconductor lasers and a current control element, and one end of the closed circuit is fixed to a reference potential. Since it is small, it is possible to provide a semiconductor laser driving circuit capable of performing APC control at high speed even when a plurality of semiconductor lasers are connected in series.
以下、本発明の半導体レーザ駆動回路の実施の形態について、図面を参照しながら詳細に説明する。 Hereinafter, embodiments of a semiconductor laser driving circuit of the present invention will be described in detail with reference to the drawings.
図1は、本発明の実施例1に係る半導体レーザ駆動回路の構成を示す回路図である。この半導体レーザ駆動回路は、定電流源2、電流源駆動回路3、複数の半導体レーザLD1〜LDN、MOSFET4、フォトダイオード(PD)5、電流量制御回路6aを有している。 FIG. 1 is a circuit diagram showing a configuration of a semiconductor laser driving circuit according to Embodiment 1 of the present invention. This semiconductor laser drive circuit includes a constant current source 2, a current source drive circuit 3, a plurality of semiconductor lasers LD1 to LDN, a MOSFET 4, a photodiode (PD) 5, and a current amount control circuit 6a.
複数の半導体レーザLD1〜LDNは、直列に接続され、最初の半導体レーザのLD1のアノード(一端)に電流源2が接続されている。電流源2は、複数の半導体レーザLD1〜LDNに定電流を流す。 The plurality of semiconductor lasers LD1 to LDN are connected in series, and the current source 2 is connected to the anode (one end) of the LD1 of the first semiconductor laser. The current source 2 supplies a constant current to the plurality of semiconductor lasers LD1 to LDN.
電流源駆動回路3は、電流源2を駆動して電流源2の電流を制御する。フォトダイオード5は、本発明の検出手段に対応し、複数の半導体レーザLD1〜LDNからの合成レーザ光を検出する。 The current source drive circuit 3 controls the current of the current source 2 by driving the current source 2. The photodiode 5 corresponds to the detection means of the present invention, and detects the combined laser light from the plurality of semiconductor lasers LD1 to LDN.
MOSFET4は、本発明の電流制御素子に対応し、複数の半導体レーザLD1〜LDNの内の最後の半導体レーザLDNのアノードにドレインが接続されている。MOSFET4のソースは基準電位、例えばグランドに接続される。MOSFET4のゲートは電流量制御回路6aに接続される。 The MOSFET 4 corresponds to the current control element of the present invention, and has a drain connected to the anode of the last semiconductor laser LDN among the plurality of semiconductor lasers LD1 to LDN. The source of the MOSFET 4 is connected to a reference potential, for example, ground. The gate of the MOSFET 4 is connected to the current amount control circuit 6a.
電流量制御回路6aは、フォトダイオード5の出力に基づきMOSFET4を制御することにより半導体レーザLDNの電流量を制御する。また、電流量制御回路6aは、フォトダイオード5の出力が所定値になるように制御することにより半導体レーザLDNの電流量を制御する。 The current amount control circuit 6 a controls the current amount of the semiconductor laser LDN by controlling the MOSFET 4 based on the output of the photodiode 5. The current amount control circuit 6a controls the current amount of the semiconductor laser LDN by controlling so that the output of the photodiode 5 becomes a predetermined value.
次にこのように構成された実施例1の半導体レーザ駆動回路の動作を図1を参照しながら説明する。 Next, the operation of the semiconductor laser drive circuit according to the first embodiment configured as described above will be described with reference to FIG.
まず、複数の半導体レーザLD1〜LDNには、電流源2からの電流I2が流れる。この電流I2は、並列に接続されたMOSFET4と半導体レーザLDNとに分岐する。MOSFET4に電流I4が流れ、半導体レーザLDNに電流(I2−I4)が流れる。 First, the current I2 from the current source 2 flows through the plurality of semiconductor lasers LD1 to LDN. This current I2 branches to MOSFET 4 and semiconductor laser LDN connected in parallel. A current I4 flows through the MOSFET 4 and a current (I2-I4) flows through the semiconductor laser LDN.
電流I4は、フォトダイオード5からの出力に基づき、電流量制御回路6aによりMOSFET4を制御することにより決定される。電流源2の電流値制御は、全ての半導体レーザLD1〜LDNや配線の浮遊成分が影響するため、高速に制御することはできない。 The current I4 is determined by controlling the MOSFET 4 by the current amount control circuit 6a based on the output from the photodiode 5. The current value control of the current source 2 cannot be controlled at high speed because all the semiconductor lasers LD1 to LDN and the floating components of the wiring are affected.
これに対して、電流量制御回路6aによる制御対象は、半導体レーザLDNとMOSFET4とによる小さな回路で閉じており、浮遊成分は小さいため、高速なAPC制御が可能となる。 On the other hand, the object to be controlled by the current amount control circuit 6a is closed by a small circuit of the semiconductor laser LDN and the MOSFET 4, and the floating component is small, so that high-speed APC control is possible.
このように実施例1の半導体レーザ駆動回路によれば、複数の半導体レーザLD1〜LDNの全体の出力は電流源2を用いて制御することができる。また、直列に接続された複数の半導体レーザLD1〜LDNの浮遊成分の影響を受けず、半導体レーザLDNとMOSFET4とによる小さい回路でAPC回路が閉じているため、浮遊成分は小さくなり、高速にAPC制御が可能となる。また、1つの半導体レーザLDN分の光量の範囲で、APC制御することができる。 As described above, according to the semiconductor laser driving circuit of the first embodiment, the total output of the plurality of semiconductor lasers LD1 to LDN can be controlled using the current source 2. In addition, since the APC circuit is closed by a small circuit formed by the semiconductor laser LDN and the MOSFET 4 without being affected by the floating components of the plurality of semiconductor lasers LD1 to LDN connected in series, the floating component is reduced and the APC is performed at high speed. Control becomes possible. In addition, APC control can be performed within a range of light quantity corresponding to one semiconductor laser LDN.
さらに、フォトダイオード5から電流量制御回路6aに高速でフィードバックがかかるため、低速なノイズを除去することができる。 Further, since feedback is applied at high speed from the photodiode 5 to the current amount control circuit 6a, low-speed noise can be removed.
図2は、本発明の実施例1の変形例に係る半導体レーザ駆動回路の構成を示すブロック図である。図1に示す実施例1では、半導体レーザLDNのみMOSFET4を用いて光量を調整した。 FIG. 2 is a block diagram showing a configuration of a semiconductor laser drive circuit according to a modification of the first embodiment of the present invention. In Example 1 shown in FIG. 1, only the semiconductor laser LDN uses the MOSFET 4 to adjust the amount of light.
これに対して、実施例1の変形例は、最後の半導体レーザLDNから最後の半導体レーザLDNを含む2個目の半導体レーザLDN−1のアノードにMOSFET4のドレインを接続したものである。 On the other hand, in the modification of the first embodiment, the drain of the MOSFET 4 is connected to the anode of the second semiconductor laser LDN-1 including the last semiconductor laser LDN from the last semiconductor laser LDN.
実施例1の変形例によれば、複数の半導体レーザLD1〜LDN−2に電流I2が流れ、MOSFET4に電流I4が流れ、半導体レーザLDN−1,LDNに電流(I2−I4)が流れる。これにより、半導体レーザLDN−1,LDNの2個分の光量範囲で高速にAPC制御が可能となる。 According to the modification of the first embodiment, the current I2 flows through the plurality of semiconductor lasers LD1 to LDN-2, the current I4 flows through the MOSFET 4, and the current (I2-I4) flows through the semiconductor lasers LDN-1 and LDN. As a result, APC control can be performed at high speed within the light quantity range of two semiconductor lasers LDN-1 and LDN.
また、電流源2からの電流を分岐させるポイントにより、電流量制御回路6bによる制御対象の浮遊成分が変わってくる。このため、所望の帯域でAPC制御が実現できる分岐ポイントを選ぶことにより、最大の光量調整幅でAPC制御することが可能となる。 Further, the floating component to be controlled by the current amount control circuit 6b changes depending on the point at which the current from the current source 2 is branched. For this reason, it is possible to perform APC control with the maximum light amount adjustment width by selecting a branch point capable of realizing APC control in a desired band.
なお、実施例1の変形例では、最後の半導体レーザLDNから2個目の半導体レーザLDN−1のアノードで電流を分岐させたが、最後の半導体レーザLDNから3個目以上の半導体レーザのアノードで電流を分岐させても良い。 In the modification of the first embodiment, the current is branched by the anode of the second semiconductor laser LDN-1 from the last semiconductor laser LDN. However, the anodes of the third or more semiconductor lasers from the last semiconductor laser LDN are used. The current may be branched by.
図3は、本発明の実施例2に係る半導体レーザ駆動回路の構成を示す回路図である。図3に示す半導体レーザ駆動回路は、図1に示す半導体レーザ駆動回路に対して、電流源駆動回路3aがフォトダイオード5からのレーザ光に基づき電流源2の電流を制御することを特徴とする。 FIG. 3 is a circuit diagram showing a configuration of the semiconductor laser drive circuit according to the second embodiment of the present invention. The semiconductor laser drive circuit shown in FIG. 3 is characterized in that the current source drive circuit 3a controls the current of the current source 2 based on the laser light from the photodiode 5 as compared to the semiconductor laser drive circuit shown in FIG. .
電流源駆動回路3aは、電流源2の電流を低速処理し、光量の範囲を大きくすることができる。また、電流量制御回路6cにより、1つの半導体レーザLDN分の光量の範囲で、高速にAPC制御することができる。 The current source driving circuit 3a can process the current of the current source 2 at a low speed to increase the range of the amount of light. In addition, the current amount control circuit 6c can perform APC control at high speed within a light amount range corresponding to one semiconductor laser LDN.
図4は、本発明の実施例2の変形例に係る半導体レーザ駆動回路の構成を示す回路図である。図4に示す半導体レーザ駆動回路は、図2に示す半導体レーザ駆動回路に対して、電流源駆動回路3aがフォトダイオード5からのレーザ光に基づき電流源2の電流を制御することを特徴とする。 FIG. 4 is a circuit diagram showing a configuration of a semiconductor laser driving circuit according to a modification of the second embodiment of the present invention. The semiconductor laser drive circuit shown in FIG. 4 is characterized in that the current source drive circuit 3a controls the current of the current source 2 based on the laser light from the photodiode 5 as compared with the semiconductor laser drive circuit shown in FIG. .
電流源駆動回路3aは、電流源2の電流を低速処理し、光量の範囲を大きくすることができる。また、電流量制御回路6dにより、半導体レーザLDN−1,LDNの2個分の光量範囲で高速にAPC制御が可能となる。 The current source driving circuit 3a can process the current of the current source 2 at a low speed to increase the range of the amount of light. In addition, the current amount control circuit 6d enables APC control at high speed in the light amount range corresponding to the two semiconductor lasers LDN-1 and LDN.
図5は、本発明の実施例3に係る半導体レーザ駆動回路の構成を示す回路図である。この半導体レーザ駆動回路は、複数の半導体レーザLD1〜LDN、複数のMOSFETQ1〜QN、LD駆動回路10、アンプ11,12、APC回路13、電圧源Vccを有している。 FIG. 5 is a circuit diagram showing a configuration of a semiconductor laser driving circuit according to Embodiment 3 of the present invention. This semiconductor laser driving circuit has a plurality of semiconductor lasers LD1 to LDN, a plurality of MOSFETs Q1 to QN, an LD driving circuit 10, amplifiers 11 and 12, an APC circuit 13, and a voltage source Vcc.
複数の半導体レーザLD1〜LDNは、並列に接続され、複数の半導体レーザLD1〜LDNのアノードには、電圧源Vccが接続されている。複数のMOSFETQ1〜QNは、本発明の電流制御素子に対応し、複数の半導体レーザLD1〜LDNに対応して設けられ、対応する半導体レーザに直列に接続されている。 The plurality of semiconductor lasers LD1 to LDN are connected in parallel, and a voltage source Vcc is connected to the anodes of the plurality of semiconductor lasers LD1 to LDN. The plurality of MOSFETs Q1 to QN correspond to the current control element of the present invention, are provided corresponding to the plurality of semiconductor lasers LD1 to LDN, and are connected in series to the corresponding semiconductor lasers.
フォトダイオード5は、本発明の検出手段に対応し、複数の半導体レーザLD1〜LDNからのレーザ光を検出する。LD駆動回路10は、フォトダイオード5の出力に基づきアンプ11を介してMOSFETQ1〜QN−1を駆動することにより複数の半導体レーザLD1〜LDN−1に電流を流す。 The photodiode 5 corresponds to the detection means of the present invention, and detects laser light from the plurality of semiconductor lasers LD1 to LDN. The LD driving circuit 10 drives the MOSFETs Q1 to QN-1 via the amplifier 11 based on the output of the photodiode 5, thereby causing a current to flow through the plurality of semiconductor lasers LD1 to LDN-1.
APC回路13は、フォトダイオード5の出力に基づきアンプ12を介してMOSFETQNを駆動することによりフォトダイオード5の出力を所定値に制御する。 The APC circuit 13 controls the output of the photodiode 5 to a predetermined value by driving the MOSFET QN via the amplifier 12 based on the output of the photodiode 5.
このように実施例3の半導体レーザ駆動回路によれば、1つのAPC回路13により1つのMOSFETQNをオンオフ制御するのみで、高速にAPC制御が可能となる。 As described above, according to the semiconductor laser driving circuit of the third embodiment, APC control can be performed at high speed only by turning on / off one MOSFET QN by one APC circuit 13.
本発明は、レーザ装置、レーザ加工装置などに利用できる。 The present invention can be used for laser devices, laser processing devices, and the like.
2 定電流源
3 電流源駆動回路
4,Q1〜QN MOSFET
5 フォトダイオード(PD)
6a〜6d 電流量制御回路
10 LD駆動回路
11,12 アンプ
13 APC回路
Vcc 電圧源
LD1〜LDN 半導体レーザ
2 Constant current source 3 Current source drive circuit 4, Q1 to QN MOSFET
5 Photodiode (PD)
6a-6d Current amount control circuit 10 LD drive circuit 11, 12 Amplifier 13 APC circuit Vcc Voltage source LD1-LDN Semiconductor laser
Claims (3)
前記複数の半導体レーザに電流を流す電流源と、
前記電流源を駆動して前記電流源の電流を制御する電流源駆動回路と、
前記複数の半導体レーザからのレーザ光を検出する検出手段と、
前記複数の半導体レーザの内の最後の半導体レーザから最後の半導体レーザを含む1個以上の半導体レーザに接続された電流制御素子と、
前記検出手段の出力に基づき前記電流制御素子を制御することにより前記直列に接続された複数の半導体レーザに流れる電流を前記1個以上の半導体レーザへの電流と前記電流制御素子への電流とに分岐するように制御する電流量制御回路と、
を備え、
前記電流量制御回路による制御対象は、前記1個以上の半導体レーザと前記電流制御素子とによる小さな閉回路で閉じ、前記閉回路の一端は、基準電位に固定されていることを特徴とする半導体レーザ駆動回路。 A plurality of semiconductor lasers connected in series;
A current source for passing a current through the plurality of semiconductor lasers;
A current source driving circuit for controlling the current of the current source by driving the current source;
Detecting means for detecting laser light from the plurality of semiconductor lasers;
A current control element connected to one or more semiconductor lasers including the last semiconductor laser from the last semiconductor laser of the plurality of semiconductor lasers;
By controlling the current control element based on the output of the detection means, the current flowing through the plurality of semiconductor lasers connected in series is changed into a current to the one or more semiconductor lasers and a current to the current control element. A current amount control circuit for controlling to branch;
With
A target to be controlled by the current amount control circuit is closed by a small closed circuit including the one or more semiconductor lasers and the current control element, and one end of the closed circuit is fixed to a reference potential. Laser drive circuit.
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Cited By (1)
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| JP2020047957A (en) * | 2019-12-25 | 2020-03-26 | 株式会社島津製作所 | Semiconductor laser drive circuit |
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