JP2017013475A - Liquid discharging head, liquid discharging unit and liquid discharging device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid discharging head reducing variation in liquid discharge characteristics derived from difference in rigidity within a holding substrate arranged between an actuator substrate and a common liquid chamber member in a cantilever state.SOLUTION: A liquid discharging head comprises: an actuator substrate forming a plurality of individual liquid chambers communicating with a nozzle, and including a piezo electric element applying pressure to liquid in individual liquid chambers; and a common liquid chamber member forming a common liquid chamber communicating with the plurality of individual liquid chambers; and a holding substrate 50 arranged between the actuator substrate and the common liquid chamber member, and forming a part of a flow channel from the common liquid chamber to the individual liquid chamber. The holding substrate 50 is provided with: a damper, which can be deformed and restored, and forms a part of a wall of the common liquid chamber; and a damper chamber 92 on the side opposite to the common liquid chamber across the damper. The damper chamber 92 has, in a nozzle arrangement direction, a width W2 at end sides wider than a width W1 at central part side in a direction orthogonal to a nozzle arrangement direction.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a liquid discharge head, a liquid discharge unit, and an apparatus for discharging liquid.

  In the liquid discharge head, when the liquid in the individual liquid chamber is pressurized and discharged, vibration is applied to a part of the wall surface of the common liquid chamber in order to attenuate the pressure fluctuation transmitted from the individual liquid chamber to the common liquid chamber. Some damper members are arranged to be damped.

  Conventionally, a reservoir serving as a common liquid chamber is formed by a protective substrate bonded to the surface of the flow path forming substrate on the pressure generating element side, and vibration is attenuated on the surface of the protective substrate opposite to the flow path forming substrate. What bonded the compliance board | substrate to perform is known (patent document 1).

JP 2007-301736 A

  By the way, as the liquid discharge head, a holding substrate that forms a part of the wall surface of the common liquid chamber is provided on the actuator substrate including the flow path plate that forms the individual liquid chamber and the pressure generating means that pressurizes the liquid in the individual liquid chamber. There is one that joins and joins a common liquid chamber member that forms a common liquid chamber on the holding substrate.

  In the liquid discharge head having such a configuration, the holding substrate is restrained in the short side direction and the long side direction by the actuator substrate and the common liquid chamber member on the end side in the nozzle arrangement direction. At the center of the direction, only the long side direction is constrained by the actuator substrate and the common liquid chamber member. Since the holding substrate needs an opening for connecting the common liquid chamber and the individual liquid chamber, the holding substrate is substantially in a cantilever state in which only one long side portion of the holding substrate is restrained.

  Thus, the degree of restraint of the holding substrate in the nozzle arrangement direction is different, so that the rigidity of the holding substrate is different between the end side and the center side, and as a result, between the end side and other portions in the nozzle arrangement direction. As a result, variations in liquid ejection characteristics may occur.

  The present invention has been made in view of the above problems, and an object thereof is to reduce variations in liquid ejection characteristics.

In order to solve the above-described problem, a liquid discharge head according to claim 1 of the present invention includes:
A nozzle plate formed with a plurality of nozzles for discharging liquid;
An actuator substrate including pressure generating means for forming a plurality of individual liquid chambers that communicate with the nozzle and pressurizing the liquid in the individual liquid chambers;
A common liquid chamber member that forms a common liquid chamber that communicates with the plurality of individual liquid chambers;
A holding substrate disposed between the actuator substrate and the common liquid chamber member and forming a flow path from the common liquid chamber to the individual liquid chamber;
The holding substrate is provided with a reversibly deformable damper that forms a part of the wall surface of the common liquid chamber,
A damper chamber is formed on the holding substrate on the opposite side of the common liquid chamber via the damper.
The damper chamber is configured such that, in the nozzle arrangement direction, the width in the direction orthogonal to the nozzle arrangement direction on the end side in the nozzle arrangement direction is wider than the width on the central side in the nozzle arrangement direction.

  According to the present invention, it is possible to reduce variations in liquid ejection characteristics.

FIG. 3 is a cross-sectional explanatory diagram in a direction along the nozzle arrangement direction of the liquid ejection head according to the first embodiment of the present invention. FIG. 2 is a schematic sectional view in a direction orthogonal to a nozzle arrangement direction along the line AA in FIG. 1. FIG. 2 is a schematic cross-sectional view in a direction orthogonal to a nozzle arrangement direction along line BB in FIG. 1. It is principal part plane explanatory drawing of the holding substrate in the state except the damper member of the head. FIG. 5 is an explanatory plan view of a main part similar to FIG. 4 for explaining a second embodiment of the present invention. FIG. 6 is a cross-sectional explanatory view taken along the line CC in FIG. 5. FIG. 5 is an explanatory plan view of a main part similar to FIG. 4 for explaining a third embodiment of the present invention. It is principal part explanatory drawing similar to FIG. 4 with which it uses for description of 4th Embodiment of this invention. It is sectional explanatory drawing which follows the direction orthogonal to the nozzle arrangement direction with which it uses for description of 5th Embodiment of this invention. It is sectional explanatory drawing in alignment with the direction orthogonal to the nozzle arrangement direction with which it uses for description of 6th Embodiment of this invention. It is principal part plane explanatory drawing of an example of the apparatus which discharges the liquid which concerns on this invention. It is principal part side explanatory drawing of the apparatus. It is principal part plane explanatory drawing of the other example of the liquid discharge unit which concerns on this invention. It is front explanatory drawing of the further another example of the liquid discharge unit which concerns on this invention.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. A liquid discharge head according to a first embodiment of the present invention will be described with reference to FIGS. 1 is a cross-sectional explanatory view of the head in the direction along the nozzle arrangement direction, FIG. 2 is a schematic cross-sectional view in the direction orthogonal to the nozzle arrangement direction along the line AA in FIG. 1, and FIG. FIG. 6 is a schematic cross-sectional view in a direction perpendicular to the nozzle arrangement direction along line B. FIG. 4 is an explanatory plan view of the main part of the head with the damper member removed. The hatching in FIG. 4 is for easy understanding and does not show a cross section.

  The liquid discharge head includes a nozzle plate 1, a flow path plate 2, a vibration plate member 3, a piezoelectric element 11 that is a pressure generating element (pressure generating means), a holding substrate 50, a common liquid chamber member 70, A housing 80 and a drive IC 509 are provided.

  Note that the entire members interposed between the nozzle plate 1 and the holding substrate 50 such as the flow path plate 2, the vibration plate member 3, and the piezoelectric element 11 are collectively referred to as “actuator substrate 20”. However, the present invention is not limited to the case where an independent member is formed as the actuator substrate 20 and then joined to the nozzle plate 1 or the holding substrate 50.

  The nozzle plate 1 is provided with two nozzle rows in which a plurality of nozzles 4 for discharging liquid are arranged. The number of nozzle rows is not limited to two, and may be one row or three or more rows.

  The flow path plate 2, together with the nozzle plate 1 and the vibration plate member 3, forms an individual liquid chamber 6 that communicates with the nozzle 4, a fluid resistance portion 7 that communicates with the individual liquid chamber 6, an introduction port portion 8, and the like. The liquid is supplied from the common liquid chamber 10 to the individual liquid chamber 6 through the fluid resistance portion 7 and the introduction port portion 8, the through-portion portion 31 of the diaphragm member 3, and the through-portion portion 51 of the holding substrate 50.

  The diaphragm member 3 forms a deformable diaphragm (vibration region) 30 that forms a part of the wall surface of the individual liquid chamber 6.

  A piezoelectric element 11 is provided integrally with the vibration plate 30 on the surface of the vibration member 30 opposite to the individual liquid chamber 6 of the vibration plate 30, and the vibration plate 30 and the piezoelectric element 11 constitute a piezoelectric actuator. Yes. The piezoelectric element 11 is configured by sequentially laminating a lower electrode 13, a piezoelectric layer (piezoelectric layer) 12, and an upper electrode 14 from the diaphragm 30 side.

  Here, by applying a voltage from the driving IC 509 to the upper electrode 14 and the lower electrode 13 of the piezoelectric element 11, the piezoelectric layer 12 extends in the electrode stacking direction, that is, the electric field direction, and in a direction parallel to the diaphragm 30. Shrink. At this time, since the lower electrode 13 side is constrained by the diaphragm 30, a tensile stress is generated on the lower electrode 13 side of the diaphragm 30, and the diaphragm 30 bends to the individual liquid chamber 6 side to apply the internal liquid. By pressurizing, the liquid is discharged from the nozzle 4.

  The holding substrate 50 has a recess (also referred to as a vibration chamber) 52 that accommodates the piezoelectric element 11, and is bonded onto the vibration plate member 3 of the actuator substrate 20, so that the actuator substrate 20 and the common liquid chamber member 70 are interposed. Is arranged.

  The holding substrate 50 is formed with a through-hole portion 51 that becomes a part of a flow path from the common liquid chamber 10 to the individual liquid chamber 6. Further, the holding substrate 50 is formed with a recess 52 for accommodating the piezoelectric element 11 and an opening 53 for accommodating the drive IC 509.

  A common liquid chamber member 70 is joined to the holding substrate 50 on the side opposite to the diaphragm member 3, and the common liquid chamber 10 having the holding substrate 50 as a part of the wall surface is formed by the common liquid chamber member 70.

  The common liquid chamber member 70 includes a first common liquid chamber member 71 and a second common liquid chamber member 72 joined to the first common liquid chamber member 71 from the holding substrate 50 side. The second common liquid chamber portion 72 is provided with a liquid supply port portion 73 for supplying liquid to the common liquid chamber 10 from the outside at the center in the nozzle arrangement direction.

  As shown in FIG. 1, the common liquid chamber 10 has a constricted portion 10 a in which the height of both end portions in the nozzle arrangement direction (height in the stacking direction) gradually decreases. The narrowed portion 10a can be formed by making the width in the direction perpendicular to the nozzle arrangement direction narrower than the central portion in the nozzle arrangement direction, and making the height and width smaller (narrower) than the central portion in the nozzle arrangement direction. Can also be formed

  In the present embodiment, a damper member 90 having a reversibly deformable damper 91 that forms a part of the wall surface of the common liquid chamber 10 on the holding substrate 50 is provided. The holding substrate 50 is provided with a damper chamber 92 on the opposite side of the common liquid chamber 10 with the damper 91 interposed therebetween.

  The damper member 90 that forms the damper 91 may be directly bonded to the holding substrate 50, or a reinforcing member or the like may be bonded to the member that forms the damper 91 and bonded to the holding substrate 50 as the damper member 90. . As the damper 91, a thin film or the like can be used.

  Here, in the nozzle arrangement direction, the width of the damper chamber 92 in the direction orthogonal to the nozzle arrangement direction is such that the width W2 on the end side in the nozzle arrangement direction is wider than the width W1 on the center side in the nozzle arrangement direction. As shown in FIG. 4, the width W2 on the end side in the nozzle arrangement direction gradually increases toward the end in the nozzle arrangement direction, and is not limited to a constant width.

  The width of the damper 91 in the direction orthogonal to the nozzle arrangement direction is the same as that of the damper chamber 92. That is, in the nozzle arrangement direction, the width of the damper 91 in the direction orthogonal to the nozzle arrangement direction is closer to the end of the common liquid chamber 10 than the width W1 (FIG. 2) on the liquid supply port 73 side to the common liquid chamber 10. The width W2 (FIG. 3) is increased.

  The width of the damper chamber 92 and the width of the damper 91 are the same, but may be different. That is, a portion that does not function as the damper 91 can be provided in a part of the damper member 90 that faces the damper chamber 92.

  In the liquid discharge head configured as described above, by driving the piezoelectric element 11, the piezoelectric element 11 is deformed along with the deformation of the vibration plate 30, and the liquid in the individual liquid chamber 6 is pressurized as described above. Then, the liquid is discharged from the nozzle 4.

  Here, the holding substrate 50 is constrained in a substantially cantilever state along the longitudinal direction of the common liquid chamber (nozzle arrangement direction) by the actuator substrate 20 and the common liquid chamber member 70 and is short at the end in the nozzle arrangement direction. It is also restrained in the hand direction (direction orthogonal to the nozzle arrangement direction).

  Therefore, the holding substrate 50 is constrained at the end in the longitudinal direction of the common liquid chamber, and in the state without the damper chamber 92, the holding substrate 50 is deformed at the end in the longitudinal direction of the common liquid chamber (nozzle arrangement direction). It becomes difficult to do.

  In this manner, the diaphragm 30 on the end side in the nozzle arrangement direction is strongly subjected to the restraining force by the holding substrate 50 due to the fact that the end side in the nozzle arrangement direction of the holding substrate 50 becomes difficult to deform. Therefore, when the piezoelectric element 11 is driven, the diaphragm 30 on the end side is relatively less deformed than the diaphragm 30 on the center side in the nozzle arrangement direction. As a result, the liquid ejection characteristics may vary in the nozzle arrangement direction.

  Therefore, in the present embodiment, as shown in FIG. 4, the damper chamber 92 is provided in the holding substrate 50 and the width W2 in the short side direction at the nozzle arrangement direction end in the nozzle arrangement direction is set to the central portion in the nozzle arrangement direction. It is wider than the width W1 in the short side direction at the liquid supply port 73 side.

  As a result, the holding substrate 50 has a lower rigidity in the nozzle arrangement direction end portion than in the nozzle arrangement direction center portion side, and can reduce the difficulty of deformation on the nozzle arrangement direction end portion side. Therefore, the difficulty of deformation of the diaphragm 30 can be reduced, and variations in ejection characteristics can be reduced.

  Further, when the piezoelectric element 11 is driven, the pressure fluctuation in the individual liquid chamber 6 is also propagated into the common liquid chamber 10. The pressure generated in the common liquid chamber 10 at this time is such that the smaller the liquid volume per individual liquid chamber in the common liquid chamber 10 (the smaller the liquid compliance), the more the structure of the common liquid chamber member 70 and the damper 91 is. The smaller the compliance, the larger.

  Here, in the nozzle arrangement direction, the liquid volume per individual liquid chamber has a narrowed portion 10a at both ends, so that the nozzle arrangement direction end portion side (FIG. 3) compared to the nozzle arrangement direction central portion side (FIG. 2). ) Is less. In contrast, the compliance of the damper 91 is larger on the end side in the nozzle arrangement direction (FIG. 3) than on the center side in the nozzle arrangement direction (FIG. 2).

  Therefore, by appropriately setting the compliance of the damper 91 according to the cross-sectional area, it is possible to reduce the difference between the sum of the liquid compliance and the structure compliance at the center and both ends in the nozzle arrangement direction.

  This reduces variations in ejection characteristics when ejecting a single drop.

  Here, since the damper 91 has a smaller damper mass because the damper 91 has a smaller damper mass, the thickness of the damper 91 is preferably thinner.

  Thereby, the pressure difference between the nozzle arrangement direction center portion side and the nozzle arrangement direction end portion side can be further reduced.

  Further, since the compliance value of the damper 91 is controlled by the width in the short direction (width in the direction perpendicular to the nozzle arrangement direction), the continuous compliance value is easily changed, and the common liquid chamber 10 per unit length is easily changed. The difference between the liquid compliance and the structure compliance in the longitudinal direction (nozzle arrangement direction) can be further reduced.

  This reduces variations in ejection characteristics when ejecting a single drop.

  Further, the pressure difference between the central side in the nozzle arrangement direction (FIG. 2) and the end side in the nozzle arrangement direction (FIG. 3) generated in the common liquid chamber 10 when the piezoelectric element 11 is driven is reduced. Even when the pressure difference generated by the difference in the sum of compliance propagates to other parts with time, the influence is reduced.

  As a result, even when a plurality of drops are merged to form a single drop, variation in subsequent drops for forming a single drop is reduced, so a plurality of drops are merged to form a single drop But the variation is reduced.

  In the present embodiment, the damper 91 is disposed on the common liquid chamber 10 side of the holding substrate 50, which is a wall portion close to the side supplying the liquid to the individual liquid chamber 6 among the wall portions forming the common liquid chamber 10. A damper 91 is arranged.

  The effect of the damper pressure attenuation with respect to the pressure generated from the individual liquid chamber 6 by the driving of the piezoelectric element 11 occurs earlier as the distance from the pressure generation source to the damper is shorter, so that other wall portions (walls other than the holding substrate 50) are generated. The damper function can be exhibited more efficiently than the case where the damper is disposed in the part).

  Further, by providing the damper 91 on the holding substrate 50 to form the damper chamber 92, a gas portion is interposed between the piezoelectric element 11 and the common liquid chamber 10. This gas part (damper chamber 92) is located in a part of the heat transfer path when the heat generated in the piezoelectric element 11 is transmitted to the common liquid chamber 10, and the heat transfer efficiency from the piezoelectric element 11 to the common liquid chamber 10. Is lowered.

  As a result, even if a large number of piezoelectric elements 11 are driven simultaneously, the temperature difference of the liquid in the longitudinal direction of the common liquid chamber 10 can be reduced, and the discharge characteristics or variations of the discharge droplets due to the temperature difference of the liquid are reduced. .

  Further, the damper chamber 92 of the holding substrate 50 is also interposed in a part of the path through which the heat generated by the drive IC 509 is transmitted to the common liquid chamber 10, and the heat generated by the drive IC 509 is transmitted to the common liquid chamber 10. The heat transfer efficiency is also reduced.

  In this respect as well, even if a large number of piezoelectric elements 11 are driven simultaneously, the temperature difference of the liquid in the longitudinal direction of the common liquid chamber 10 can be reduced, and the discharge characteristics or variations of the discharge droplets due to the temperature difference of the liquid are reduced. The

  Further, as shown in FIG. 4, the common liquid chamber that is in a direction orthogonal to the nozzle arrangement direction of the damper 91 in the portion 93 corresponding to the narrowed portion 10 a of the common liquid chamber 10 on the end side in the nozzle arrangement direction of the damper chamber 92. The width W2 in the short direction is formed wider as the opening cross-sectional area of the narrowed portion 10a of the common liquid chamber 10 becomes smaller.

  Thereby, even if the thickness of the damper 91 is constant, the compliance of the portion of the damper 91 corresponding to the narrowed portion 10a of the common liquid chamber 10 can be increased.

  Next, a second embodiment of the present invention will be described with reference to FIGS. FIG. 5 is an explanatory plan view of an essential part similar to FIG. 4 for explaining the embodiment, and FIG. 6 is a sectional explanatory view taken along the line CC of FIG.

  In the present embodiment, in the nozzle arrangement direction, the damper chamber 92 is partitioned into a plurality of regions 92 a by ribs 94 that rise from a surface opposite to the side where the damper 91 is provided. The tip of the rib 94 is joined to the damper 91.

  Here, since the portion provided with the rib 94 does not have a damper function, the compliance of the damper 91 is reduced in the individual liquid chamber 6 in the vicinity of the rib 94.

  Therefore, it is preferable that the position of the rib 94 is set in a cross-sectional area where the compliance of the liquid is large in order to suppress the influence of the smaller compliance of the damper 91 due to the rib 94. That is, it is preferable not to provide the rib 94 in the narrow portion 10a of the common liquid chamber 10, but to provide the rib 94 in a portion excluding the narrow portion 10a.

  Further, the ribs 94 are provided at unequal intervals in the longitudinal direction of the common liquid chamber (nozzle arrangement direction) even in a region where the short direction of the common liquid chamber of the damper 91 is constant (for example, in FIG. 5). It is preferably provided at a position where the lengths L2 and L1 are different.

  Thereby, the resonance frequency of the damper 91 corresponding to the partitioned region 92a differs depending on the region 92a, and the influence of the pressure of a specific frequency component remaining in the common liquid chamber 10 due to the resonance of the damper 91 can be reduced. Stable ejection can be performed.

  Next, a third embodiment of the present invention will be described with reference to FIG. FIG. 7 is an explanatory plan view of the main part similar to FIG. 4 for explaining the embodiment.

  In the present embodiment, the rib 94 provided in the damper chamber 92 is disposed obliquely with respect to the short direction of the common liquid chamber in plan view.

  Thereby, since it becomes the structure which has the damper 91 with respect to any individual liquid chamber, the influence by providing the rib 94 can be reduced.

  Next, a fourth embodiment of the present invention will be described with reference to FIG. FIG. 8 is an explanatory plan view of the main part similar to FIG. 4 for explaining the embodiment.

  In the present embodiment, as the ribs provided in the damper chamber 92, the rib 94b that divides the short direction of the common liquid chamber along the nozzle arrangement direction, and the longitudinal direction of the common liquid chamber along the direction orthogonal to the nozzle arrangement direction. Ribs 94a are provided.

  Thereby, since it becomes the structure which has the damper 91 with respect to any individual liquid chamber, the influence by providing the rib 94 can be reduced.

  Next, a fifth embodiment of the present invention will be described with reference to FIG. FIG. 9 is a cross-sectional explanatory diagram along a direction orthogonal to the nozzle arrangement direction for explaining the embodiment.

  In the present embodiment, the holding substrate 50 is configured by laminating two (or three or more) first substrates 50a and second substrates 50b.

  The first substrate 50a is bonded to the actuator substrate 20 and has the same configuration as the holding substrate 50 of the first embodiment. The second substrate 50b also serves as a damper substrate, and is bonded to the first substrate 50b and to the common liquid chamber member 70.

  The first substrate 50a has a through hole 51a, and the second substrate 50b has a through hole 51b. A flow path through the common liquid chamber 10 and the liquid introduction part 8 is formed by the through-hole parts 51a and 51b.

  The second substrate 50 b is provided with a reversibly deformable damper 91 that forms a part of the wall surface of the common liquid chamber 10, and the damper chamber 92 is disposed on the opposite side of the common liquid chamber 10 via the damper 91. Is formed. The width of the damper chamber 92 and the like in the direction orthogonal to the nozzle arrangement direction is the same as that of the first embodiment.

  Even in this configuration, the holding substrate 50 is constrained and held in a cantilever state between the common liquid chamber member 70 and the actuator substrate 20 as described in the first embodiment. Therefore, the restriction at the end portion in the nozzle arrangement direction becomes stronger than the restriction at the central portion in the nozzle arrangement direction, and the liquid ejection characteristics may vary in the nozzle arrangement direction as described in the first embodiment.

  Therefore, by forming the damper 91 on the second substrate 50b constituting the holding substrate 50 and providing the damper chamber 92, it is possible to obtain the same effects as those of the first embodiment.

  Furthermore, since the second substrate 50b forms one surface of the common liquid chamber 10 on the nozzle plate side, the bonding surface between the holding substrate 50 and the common liquid chamber member 70 can be made wider than in the first embodiment. Even if the accuracy of the joining position shift is low, the joining can be reliably performed.

  Next, a sixth embodiment of the present invention will be described with reference to FIG. FIG. 10 is a cross-sectional explanatory diagram along a direction orthogonal to the nozzle arrangement direction for explaining the embodiment.

  In this embodiment, the common liquid chamber member 70 is formed by one member.

  As a result, the number of parts is smaller than in the first to fourth embodiments.

  Next, an example of an apparatus for ejecting liquid according to the present invention will be described with reference to FIGS. FIG. 11 is an explanatory plan view of the main part of the apparatus, and FIG. 12 is an explanatory side view of the main part of the apparatus.

  This apparatus is a serial type apparatus, and the carriage 403 reciprocates in the main scanning direction by the main scanning moving mechanism 493. The main scanning movement mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, and the like. The guide member 401 spans the left and right side plates 491A and 491B and holds the carriage 403 so as to be movable. The carriage 403 is reciprocated in the main scanning direction by the main scanning motor 405 via the timing belt 408 spanned between the driving pulley 406 and the driven pulley 407.

  A liquid discharge unit 440 in which the liquid discharge head 404 and the head tank 441 according to the present invention are integrated is mounted on the carriage 403. The liquid discharge head 404 of the liquid discharge unit 440 discharges, for example, yellow (Y), cyan (C), magenta (M), and black (K) liquids. The liquid ejection head 404 is mounted with a nozzle row composed of a plurality of nozzles arranged in the sub-scanning direction orthogonal to the main scanning direction, and the ejection direction facing downward.

  The liquid stored in the liquid cartridge 450 is supplied to the head tank 441 by the supply mechanism 494 for supplying the liquid stored outside the liquid discharge head 404 to the liquid discharge head 404.

  The supply mechanism 494 includes a cartridge holder 451 that is a filling unit for mounting the liquid cartridge 450, a tube 456, a liquid feeding unit 452 including a liquid feeding pump, and the like. The liquid cartridge 450 is detachably attached to the cartridge holder 451. Liquid is fed from the liquid cartridge 450 to the head tank 441 by the liquid feeding unit 452 via the tube 456.

  This apparatus includes a transport mechanism 495 for transporting the paper 410. The transport mechanism 495 includes a transport belt 412 serving as transport means, and a sub-scanning motor 416 for driving the transport belt 412.

  The conveyance belt 412 adsorbs the paper 410 and conveys it at a position facing the liquid ejection head 404. The transport belt 412 is an endless belt and is stretched between the transport roller 413 and the tension roller 414. The adsorption can be performed by electrostatic adsorption or air suction.

  The transport belt 412 rotates in the sub-scanning direction when the transport roller 413 is rotationally driven by the sub-scanning motor 416 via the timing belt 417 and the timing pulley 418.

  Further, on one side of the carriage 403 in the main scanning direction, a maintenance / recovery mechanism 420 that performs maintenance / recovery of the liquid ejection head 404 is disposed on the side of the transport belt 412.

  The maintenance / recovery mechanism 420 includes, for example, a cap member 421 for capping the nozzle surface (surface on which the nozzle is formed) of the liquid ejection head 404, a wiper member 422 for wiping the nozzle surface, and the like.

  The main scanning movement mechanism 493, the supply mechanism 494, the maintenance / recovery mechanism 420, and the transport mechanism 495 are attached to a housing including the side plates 491A and 491B and the back plate 491C.

  In this apparatus configured as described above, the paper 410 is fed and sucked onto the transport belt 412, and the paper 410 is transported in the sub-scanning direction by the circular movement of the transport belt 412.

  Therefore, the liquid ejection head 404 is driven in accordance with the image signal while moving the carriage 403 in the main scanning direction, thereby ejecting liquid onto the stopped paper 410 to form an image.

  Thus, since this apparatus includes the liquid ejection head according to the present invention, a high-quality image can be stably formed.

  Next, another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 13 is an explanatory plan view of the main part of the unit.

  The liquid discharge unit includes a casing portion composed of side plates 491A and 491B and a back plate 491C, a main scanning moving mechanism 493, a carriage 403, and a liquid among the members constituting the liquid discharge device. The discharge head 404 is configured.

  Note that a liquid discharge unit in which at least one of the above-described maintenance and recovery mechanism 420 and the supply mechanism 494 is further attached to, for example, the side plate 491B of the liquid discharge unit may be configured.

  Next, still another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 14 is an explanatory front view of the unit.

  This liquid discharge unit includes a liquid discharge head 404 to which a flow path component 444 is attached, and a tube 456 connected to the flow path component 444.

  The flow path component 444 is disposed inside the cover 442. A head tank 441 may be included instead of the flow path component 444. In addition, a connector 443 that is electrically connected to the liquid ejection head 404 is provided above the flow path component 444.

  In the present application, the “apparatus for discharging liquid” is an apparatus that includes a liquid discharge head or a liquid discharge unit and drives the liquid discharge head to discharge liquid. The apparatus for ejecting liquid includes not only an apparatus capable of ejecting liquid to an object to which liquid can adhere, but also an apparatus for ejecting liquid toward the air or liquid.

  This “apparatus for discharging liquid” may include means for feeding, transporting, and discharging a liquid to which liquid can adhere, as well as a pre-processing apparatus and a post-processing apparatus.

  For example, as a “liquid ejecting device”, an image forming device that forms an image on paper by ejecting ink, a powder is formed in layers to form a three-dimensional model (three-dimensional model) There is a three-dimensional modeling apparatus (three-dimensional modeling apparatus) that discharges a modeling liquid onto the powder layer.

  Further, the “apparatus for ejecting liquid” is not limited to an apparatus in which significant images such as characters and figures are visualized by the ejected liquid. For example, what forms a pattern etc. which does not have a meaning in itself, and what forms a three-dimensional image are also included.

  The above-mentioned “thing to which liquid can adhere” means that liquid can adhere even temporarily. The material to which “the liquid adheres” may be any material as long as the liquid can temporarily adhere, such as paper, thread, fiber, cloth, leather, metal, plastic, glass, wood, ceramics.

  “Liquid” also includes ink, treatment liquid, DNA sample, resist, pattern material, binder, modeling liquid, and the like.

  Further, the “device for ejecting liquid” includes both a serial type device that moves the liquid ejection head and a line type device that does not move the liquid ejection head, unless otherwise specified.

  In addition to the “device for discharging liquid”, a processing liquid coating apparatus for discharging a processing liquid onto a sheet for applying a processing liquid to the surface of the sheet for the purpose of modifying the surface of the sheet, or a raw material There is an injection granulator for granulating raw material fine particles by spraying a composition liquid dispersed in a solution through a nozzle.

  A “liquid ejection unit” is a unit in which functional parts and mechanisms are integrated with a liquid ejection head, and is an assembly of parts related to liquid ejection. For example, the “liquid discharge unit” includes a combination of at least one of a head tank, a carriage, a supply mechanism, a maintenance / recovery mechanism, and a main scanning movement mechanism with a liquid discharge head.

  Here, the term “integrated” refers to, for example, a liquid discharge head, a functional component, and a mechanism that are fixed to each other by fastening, adhesion, engagement, etc., and one that is held movably with respect to the other. Including. Further, the liquid discharge head, the functional component, and the mechanism may be configured to be detachable from each other.

  For example, there is a liquid discharge unit in which a liquid discharge head and a head tank are integrated, such as the liquid discharge unit 440 shown in FIG. Also, there are some in which the liquid discharge head and the head tank are integrated by being connected to each other by a tube or the like. Here, a unit including a filter may be added between the head tank and the liquid discharge head of these liquid discharge units.

  In addition, there is a liquid discharge unit in which a liquid discharge head and a carriage are integrated.

  In addition, there is a liquid discharge unit in which the liquid discharge head and the scanning movement mechanism are integrated by holding the liquid discharge head movably on a guide member that constitutes a part of the scanning movement mechanism. Further, as shown in FIG. 13, there is a liquid discharge unit in which a liquid discharge head, a carriage, and a main scanning movement mechanism are integrated.

  Also, there is a liquid discharge unit in which a cap member that is a part of the maintenance / recovery mechanism is fixed to a carriage to which the liquid discharge head is attached, and the liquid discharge head, the carriage, and the maintenance / recovery mechanism are integrated. .

  Further, as shown in FIG. 14, as a liquid discharge unit, there is a unit in which a liquid discharge head and a supply mechanism are integrated by connecting a tube to a liquid discharge head to which a head tank or a flow path component is attached. .

  The main scanning movement mechanism includes a guide member alone. The supply mechanism includes a single tube and a single loading unit.

  The “liquid discharge head” is not limited to the pressure generating means to be used. For example, in addition to the piezoelectric actuator as described in the above embodiment (a multilayer piezoelectric element may be used), a thermal actuator using an electrothermal conversion element such as a heating resistor, a diaphragm and a counter electrode are included. An electrostatic actuator or the like may be used.

  In addition, the terms “image formation”, “recording”, “printing”, “printing”, “printing”, “modeling” and the like in the terms of the present application are all synonymous.

DESCRIPTION OF SYMBOLS 1 Nozzle plate 2 Flow path plate 3 Vibrating plate member 4 Nozzle 6 Individual liquid chamber 11 Piezoelectric element 20 Actuator substrate 50 Holding substrate 50a 1st substrate 50b 2nd substrate 51, 51a, 51b Through-hole part 70 Common liquid chamber member 71 1st Common liquid chamber member 72 Second common liquid chamber member 91 Damper 92 Damper chamber 94 Rib 403 Carriage 404 Liquid discharge head 430 Liquid discharge unit 509 Drive IC

Claims (9)

A nozzle plate formed with a plurality of nozzles for discharging liquid;
An actuator substrate including pressure generating means for forming a plurality of individual liquid chambers that communicate with the nozzle and pressurizing the liquid in the individual liquid chambers;
A common liquid chamber member that forms a common liquid chamber that communicates with the plurality of individual liquid chambers;
A holding substrate disposed between the actuator substrate and the common liquid chamber member and forming a flow path from the common liquid chamber to the individual liquid chamber;
The holding substrate is provided with a reversibly deformable damper that forms a part of the wall surface of the common liquid chamber,
A damper chamber is formed on the holding substrate on the opposite side of the common liquid chamber via the damper.
The liquid ejection head, wherein the damper chamber has a width in a direction perpendicular to the nozzle arrangement direction on the end side in the nozzle arrangement direction in the nozzle arrangement direction, which is wider than the width on the central side in the nozzle arrangement direction. 2. The liquid discharge head according to claim 1, wherein a width of the damper in a direction orthogonal to a nozzle arrangement direction is wider on an end side of the common liquid chamber than on a liquid supply port side of the common liquid chamber. . The holding substrate is composed of a plurality of substrates,
The plurality of substrates include a first substrate bonded to the actuator substrate and a second substrate bonded to the common liquid chamber member and forming a wall surface of the common liquid chamber,
The liquid ejection head according to claim 1, wherein the damper is provided on the second substrate. 4. The liquid ejection head according to claim 1, wherein the damper chamber is provided with ribs that divide the damper chamber into a plurality of regions in the nozzle arrangement direction. 5. The liquid ejection head according to claim 4, wherein the rib is provided obliquely with respect to a direction orthogonal to the nozzle arrangement direction in plan view. 6. The liquid ejection head according to claim 1, wherein the damper chamber is provided with ribs that divide the damper chamber into a plurality of regions in a direction orthogonal to the nozzle arrangement direction. .   A liquid discharge unit comprising the liquid discharge head according to claim 1. A head tank for storing liquid to be supplied to the liquid discharge head, a carriage on which the liquid discharge head is mounted, a supply mechanism for supplying liquid to the liquid discharge head, a maintenance / recovery mechanism for maintaining and recovering the liquid discharge head, and the liquid The liquid discharge unit according to claim 7, wherein at least one of a main scanning movement mechanism that moves the discharge head in a main scanning direction and the liquid discharge head are integrated.   An apparatus for discharging a liquid, comprising the liquid discharge head according to claim 1 or the liquid discharge unit according to claim 7 or 8.

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