JP2016144838A - Position adjustment jig and position adjustment method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a position adjustment jig which efficiently adjusts a position of an auto blade changer relative to a spindle serving as a rotation axis of a cutting blade.SOLUTION: A position adjustment jig includes: a first adjustment member 84 attached to a tip part 36 of a spindle; a second adjustment member 86 attached to a blade holding part 70 included in cutting blade attachment/detachment means 64; and a third adjustment member attached to a fixed nut holding part included in fixed nut attachment/detachment means. A first adjustment surface 84b of the first adjustment member, a second adjustment surface 86b of the second adjustment member, and a third adjustment surface of the third adjustment member have the same shape and size.SELECTED DRAWING: Figure 11

Description

  The present invention relates to a position adjusting tool used for adjusting a positional relationship between a spindle serving as a rotating shaft of a cutting blade and an auto blade changer that automatically replaces the cutting blade in a cutting apparatus that cuts a plate-shaped workpiece. The present invention relates to a tool and a position adjustment method.

  In a small and lightweight electronic device typified by a cellular phone, a device chip including an electronic circuit (device) such as an IC is indispensable. The device chip is, for example, by dividing the surface of a semiconductor wafer made of a material such as silicon with a plurality of division lines called streets, forming devices in each area, and then dividing the semiconductor wafer along the streets. Can be manufactured.

  When a plate-like workpiece such as a semiconductor wafer is divided, for example, a cutting device in which a disc-like cutting blade is attached to the tip of a spindle serving as a rotation shaft is used. If the cutting blade is rotated at a high speed and cut into the street of the work piece, and the cutting blade and the work piece are moved relative to each other in a direction parallel to the street, the work piece is cut to obtain a plurality of chips. Can be divided into

  The above-described cutting blade is replaced when worn to some extent. Thereby, the cutting capability of the cutting device is maintained in a high state. In recent years, a cutting apparatus including an automatic blade changer that automatically replaces a cutting blade has been put into practical use in order to reduce the time required for replacing the cutting blade (see, for example, Patent Document 1).

JP-A-6-326186

  By the way, in the cutting apparatus provided with the above-described auto blade changer, the position of the auto blade changer needs to be adjusted in advance with respect to the spindle serving as the rotation shaft so that the cutting blade can be smoothly attached and detached.

  However, this adjustment is performed by repeating the work of checking whether the cutting blade can be attached and detached after relatively moving the spindle and the auto blade changer, so that a long time is required until the adjustment is completed. There was a problem that it took.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a position adjusting jig and a position adjusting capable of efficiently adjusting the position of an auto blade changer with respect to a spindle serving as a rotating shaft of a cutting blade. Is to provide a method.

  According to the present invention, a workpiece having a chuck table for holding a workpiece, a spindle that is rotationally driven, and a cutting blade that is attached to a tip portion of the spindle is cut. Cutting means, a cutting blade attaching / detaching means for attaching / detaching the cutting blade to / from the tip of the spindle, and a fixing nut for fixing the cutting blade attached to the tip of the spindle to / from the tip of the spindle A cutting apparatus comprising: an auto blade changer provided with a fixing nut attaching / detaching means; and a moving means for relatively moving the cutting means and the auto blade changer. This is a position adjusting jig used for adjusting the position of the fixing nut attaching / detaching means, and is mounted on the tip of the spindle. The first adjusting member, the second adjusting member attached to the blade holding part provided in the cutting blade attaching / detaching means, and the third adjusting member attached to the fixing nut holding part provided in the fixing nut attaching / detaching means The first adjustment member is formed on the opposite side of the first contact surface, and the first contact surface is formed on the opposite side of the first contact surface. A first adjustment surface perpendicular to the spindle center of the spindle in contact with the portion, and the second adjustment member is a second adjustment member in contact with the blade holding portion of the cutting blade attaching / detaching means. A contact surface, and a second adjustment surface formed on the opposite side of the second contact surface and perpendicular to the spindle axis in a state where the second contact surface is in contact with the blade holding portion, And the third adjustment member is in contact with the fixing nut holding portion of the fixing nut attaching / detaching means. And a third contact surface formed on the opposite side of the third contact surface and perpendicular to the spindle axis in a state where the third contact surface is in contact with the fixing nut holding portion. A position adjusting jig, wherein the first adjusting surface, the second adjusting surface, and the third adjusting surface have the same shape and the same size. Provided.

  In the position adjustment jig of the present invention, the first adjustment member, the second adjustment member, and the third adjustment member are formed in a cylindrical shape having a predetermined height, and the first adjustment member One bottom surface and the other bottom surface of each of the first and second bottom surfaces function as the first contact surface and the first adjustment surface, respectively, and the first adjustment surface is in contact with the tip of the spindle. The center of the surface is located on an extension line of the axis of the spindle, and one bottom surface and the other bottom surface of the second adjustment member function as the second contact surface and the second adjustment surface, respectively. With the second contact surface in contact with the blade holder, the center of the second adjustment surface is located on a straight line parallel to the axis of the spindle, and the bottom surface of one of the third adjustment members The other bottom surface functions as the third contact surface and the third adjustment surface, respectively, and the third contact surface is the fixed surface. It is preferred that the center of the adjustment surface of the third is positioned on the axis and a straight line parallel to the spindle in a state of being in contact with the nut holding portion.

  According to the present invention, there is provided a position adjusting method for adjusting the positions of the cutting blade attaching / detaching means and the fixing nut attaching / detaching means with respect to the spindle using the position adjusting jig, wherein the cutting device includes the position of the spindle, The control unit further includes a control unit that stores a position of the cutting blade attaching / detaching unit and a position of the fixing nut attaching / detaching unit, and the first contact surface is brought into contact with a tip portion of the spindle to perform the first adjustment. A first mounting step of mounting a member on the tip of the spindle; and a second mounting step of mounting the second adjustment member on the blade holding unit by bringing the second contact surface into contact with the blade holding unit. A third mounting step of mounting the third adjustment member on the fixed nut holding portion by bringing the third contact surface into contact with the fixed nut holding portion; and the spindle and the cutting blade attaching / detaching means. A first moving step for moving the first adjustment surface and the second adjustment surface to face each other relative to a direction perpendicular to the axis of the spindle, the spindle and the cutting blade attaching / detaching means, Is moved relatively in a direction parallel to the axis of the spindle to bring the first adjustment surface into contact with the second adjustment surface, and the outside of the first adjustment surface. A first deviation confirmation step for confirming deviation between the peripheral edge and the outer peripheral edge of the second adjustment surface; and the spindle and the cutting blade attaching / detaching means are relatively moved in a direction perpendicular to the axis of the spindle. The first adjustment surface is moved and the first adjustment surface and the second adjustment surface are in contact with each other so that the outer peripheral edge of the first adjustment surface and the outer peripheral edge of the second adjustment surface coincide with each other. The spinning step in a state where the outer peripheral edge of the first adjusting surface and the outer peripheral edge of the second adjusting surface coincide with each other. A first storage step for storing the coordinates of the cutting blade and the cutting blade attaching / detaching means in the storage unit, and the spindle and the fixing nut attaching / detaching means relative to each other in a direction perpendicular to the axis of the spindle. A second moving step for moving the first adjustment surface and the third adjustment surface to face each other, and the spindle and the fixing nut attaching / detaching means relative to each other in a direction parallel to the axis of the spindle. A second contact step for bringing the first adjustment surface and the third adjustment surface into contact with each other, and an outer peripheral edge of the first adjustment surface and an outer peripheral edge of the third adjustment surface. A second displacement confirmation step for confirming displacement; and the spindle and the fixing nut attaching / detaching means are moved relative to each other in a direction perpendicular to the axis of the spindle, and the first adjustment surface and the first 3 with the third adjustment surface in contact with the outer peripheral edge of the first adjustment surface and the third adjustment surface. A second adjusting step for matching the outer peripheral edge with the adjusting surface, and the coordinates of the spindle and the fixing nut in a state where the outer peripheral edge of the first adjusting surface and the outer peripheral edge of the third adjusting surface are aligned with each other. And a second storage step of storing the coordinates of the attaching / detaching means in the storage unit.

  In the position adjustment method of the present invention, it is preferable that the first shift confirmation step and the second shift confirmation step check the shift by visual observation or finger contact.

  The position adjustment jig according to the present invention includes a first adjustment surface of the first adjustment member attached to the tip of the spindle and a second adjustment member attached to the blade holding portion of the cutting blade attaching / detaching means. Since the second adjustment surface and the third adjustment surface of the third adjustment member attached to the fixed nut holding portion of the fixed nut attaching / detaching means are formed in the same shape and the same size, The outer peripheral edge of the first adjustment surface and the outer peripheral edge of the second adjustment surface are made to coincide with each other after the adjustment surface and the second adjustment surface are brought into contact with each other, and the first adjustment surface and the third adjustment surface The position of the cutting blade attaching / detaching means and the fixing nut attaching / detaching means with respect to the spindle can be easily adjusted simply by making the outer peripheral edge of the first adjusting surface coincide with the outer peripheral edge of the third adjusting surface after making contact with the surface. it can.

  That is, according to the present invention, it is possible to provide a position adjusting jig and a position adjusting method capable of efficiently adjusting the position of the auto blade changer with respect to the spindle serving as the rotating shaft of the cutting blade.

It is a figure which shows typically the structural example of the cutting device adjusted using the position adjustment jig which concerns on this embodiment. It is a disassembled perspective view which shows the structure of a cutting unit typically. It is a perspective view which shows typically the structure of the periphery of an auto blade changer. FIG. 4A is a perspective view schematically showing the structure of the cutting blade attaching / detaching unit, and FIG. 4B is a perspective view schematically showing the structure of the fixing nut attaching / detaching unit. FIG. 5A is a perspective view schematically showing a first adjustment member of the position adjustment jig, and FIG. 5B is a perspective view of the first adjustment member as seen from another direction. . FIG. 6A and FIG. 6B are partial cross-sectional plan views schematically showing how the first adjustment member is attached to the blade mount. FIG. 7A is a perspective view schematically showing a second adjustment member of the position adjustment jig, and FIG. 7B is a view of the second adjustment member viewed from another direction. 8A and 8B are partial cross-sectional plan views schematically showing how the second adjustment member is attached to the blade holding portion. FIG. 9A is a perspective view schematically showing a third adjustment member of the position adjustment jig, and FIG. 9B is a view of the third adjustment member viewed from another direction. FIG. 10A and FIG. 10B are plan views schematically showing how the third adjustment member is attached to the fixed nut holding portion. FIG. 11A is a partial cross-sectional plan view schematically showing the first contact step, and FIGS. 11B and 11C are partial views schematically showing the first adjustment step. FIG.

  Embodiments of the present invention will be described with reference to the accompanying drawings. First, a cutting apparatus that is adjusted using the position adjusting jig according to the present embodiment will be described. FIG. 1 is a diagram schematically illustrating a configuration example of a cutting apparatus that is adjusted using the position adjusting jig according to the present embodiment. As shown in FIG. 1, the cutting device 2 includes a base 4 that supports each structure.

  A rectangular opening 4 a that is long in the X-axis direction (machining feed direction) is formed on the upper surface of the base 4. In this opening 4a, there are provided an X-axis moving table 6, an X-axis moving mechanism (not shown) for moving the X-axis moving table 6 in the X-axis direction, and a dustproof and drip-proof cover 8 that covers the X-axis moving mechanism. Yes.

  The X-axis movement mechanism includes a pair of X-axis guide rails (not shown) parallel to the X-axis direction, and an X-axis movement table 6 is slidably installed on the X-axis guide rails. A nut portion (not shown) is provided on the lower surface side of the X-axis moving table 6, and an X-axis ball screw (not shown) parallel to the X-axis guide rail is screwed to the nut portion.

  An X-axis pulse motor (not shown) is connected to one end of the X-axis ball screw. When the X-axis ball screw is rotated by the X-axis pulse motor, the X-axis moving table 6 moves in the X-axis direction along the X-axis guide rail.

  A chuck table 10 is provided on the upper surface of the X-axis moving table 6 for sucking and holding a plate-like workpiece (not shown) such as a semiconductor wafer, a resin substrate, or a ceramic substrate. The chuck table 10 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis parallel to the Z-axis direction (vertical direction). Further, the chuck table 10 is moved in the X-axis direction by the above-described X-axis moving mechanism.

  The surface (upper surface) of the chuck table 10 is a holding surface 10a for sucking and holding a workpiece. The holding surface 10 a is connected to a suction source (not shown) through a flow path (not shown) formed inside the chuck table 10. Around the chuck table 10 is provided a clamp 12 for holding and fixing a frame (not shown) for supporting the workpiece.

  On the upper surface of the base 4, a gate-type support structure 16 that supports a cutting unit (cutting means) 14 is disposed so as to straddle the opening 4 a. A cutting unit moving mechanism (moving means) 18 that moves the cutting unit 14 in the Y-axis direction (index feed direction) and the Z-axis direction is provided on the surface side of the support structure 16.

  The cutting unit moving mechanism 18 includes a pair of Y-axis guide rails 20 arranged on the upper surface of the support structure 16 and parallel to the Y-axis direction. A Y-axis moving plate 22 constituting the cutting unit moving mechanism 18 is slidably installed on the Y-axis guide rail 20.

  A nut portion (not shown) is provided on the back side of the Y-axis moving plate 22, and a Y-axis ball screw 24 parallel to the Y-axis guide rail 20 is screwed to the nut portion. A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 24. If the Y-axis ball screw 24 is rotated by the Y-axis pulse motor, the Y-axis moving plate 22 moves in the Y-axis direction along the Y-axis guide rail 20.

  A pair of Z-axis guide rails 26 parallel to the Z-axis direction are provided on the surface of the Y-axis moving plate 22. A Z-axis moving plate 28 is slidably installed on the Z-axis guide rail 26.

  A nut portion (not shown) is provided on the back side of the Z-axis moving plate 28, and a Z-axis ball screw 30 parallel to the Z-axis guide rail 26 is screwed to the nut portion. A Z-axis pulse motor 32 is connected to one end of the Z-axis ball screw 30. When the Z-axis ball screw 30 is rotated by the Z-axis pulse motor 32, the Z-axis moving plate 28 moves in the Z-axis direction along the Z-axis guide rail 26.

  A cutting unit 14 for cutting the workpiece sucked and held by the chuck table 10 is provided below the Z-axis moving plate 28. If the Y-axis moving plate 22 and the Z-axis moving plate 28 are moved as described above, the cutting unit 14 moves in the Y-axis direction and the Z-axis direction.

  FIG. 2 is an exploded perspective view schematically showing the structure of the cutting unit 14. As shown in FIG. 2, the cutting unit 14 includes a spindle housing 34 fixed to the lower part of the Z-axis moving plate 28.

  A spindle (not shown) that rotates around the Y axis is accommodated in the spindle housing 34. The tip (one end) of the spindle is exposed to the outside of the spindle housing 34, and a blade mount 36 is attached to the tip of the spindle. On the other hand, a motor (not shown) for rotating the spindle is connected to the other end side (base end side) of the spindle.

  The blade mount 36 includes a flange portion 38 that extends radially outward and a boss portion 40 that protrudes from the surface of the flange portion 38. The surface of the flange portion 38 is a support surface 38 a that supports the back surface side of the cutting blade 42. The boss 40 is formed in a cylindrical shape, and a screw thread is provided on the outer peripheral surface 40a on the tip side.

  A circular opening 42 a is formed at the center of the cutting blade 42. By inserting the boss 40 through the opening 42a, the cutting blade 42 is attached to the blade mount 36 (the tip of the spindle).

  The cutting blade 42 is a so-called hub blade, and an annular cutting blade 46 for cutting a workpiece is provided on the outer periphery of a disc-shaped hub base 44. The cutting blade 46 is formed, for example, by mixing abrasives such as diamond and CBN (Cubic Boron Nitride) with a bond material (bonding material) such as metal or resin.

  With the cutting blade 42 attached to the blade mount 36, a disk-shaped fixing nut 48 is disposed on the surface side of the cutting blade 42. A circular opening 48 a is formed at the center of the fixing nut 48, and a screw groove corresponding to a thread formed on the outer peripheral surface 40 a of the boss 40 is provided on the inner peripheral surface of the opening 48 a. ing.

  When the tip of the boss portion 40 is tightened into the opening 48 a of the fixing nut 48, the back surface of the fixing nut 48 comes into contact with the surface of the cutting blade 42, and the cutting blade 42 is sandwiched between the flange portion 38 and the fixing nut 48. . Thereby, the cutting blade 42 can be fixed to the blade mount 36.

  As shown in FIG. 1, an auto blade changer 50 that automatically replaces the cutting blade 42 is provided at a position facing the cutting blade 42 attached to the cutting unit 14. FIG. 3 is a perspective view schematically showing the structure around the auto blade changer 50.

  As shown in FIG. 3, an auto blade changer moving mechanism (moving means) 52 that moves the auto blade changer 50 in the X-axis direction is provided below the auto blade changer 50.

  The auto blade changer moving mechanism 52 includes a pair of guide rails 54 parallel to the X-axis direction, and a moving block 56 is slidably installed on the guide rails 54. A nut portion (not shown) is provided on the lower surface side of the moving block 56, and a ball screw 58 parallel to the guide rail 54 is screwed to the nut portion.

  A pulse motor 60 is connected to one end of the ball screw 58. When the ball screw 58 is rotated by the pulse motor 60, the moving block 56 moves in the X axis direction along the guide rail 54.

  A casing 62 of the auto blade changer 50 is fixed to the upper part of the moving block 56. A cutting blade attaching / detaching unit (cutting blade attaching / detaching means) that attaches the cutting blade 42 to the blade mount 36 (the tip of the spindle) and removes the cutting blade 42 from the blade mount 36 on the side of the housing 62 (on the cutting unit 14 side). 64 is provided.

  FIG. 4A is a perspective view schematically showing the structure of the cutting blade attaching / detaching unit 64. As shown in FIG. 4A, the cutting blade attaching / detaching unit 64 includes an arm 66 extending from the first accommodating portion 62 a of the housing 62.

  A first bottom surface 68a side of a base 68 formed in a columnar shape is fixed to the tip of the arm 66. On the second bottom surface 68b side of the base 68, a blade holding portion 70 including a pressing pin 70a protruding from the center of the second bottom surface 68b and three claws 70b arranged around the pressing pin 70a is provided. It has been.

  If the cutting blade 42 is gripped by the three claws 70b of the blade holding unit 70, and the cutting unit 14 and the cutting blade attaching / detaching unit 64 are relatively moved by the cutting unit moving mechanism 18 and the auto blade changer moving mechanism 52, The cutting blade 42 can be attached to or removed from the blade mount 36 of the cutting unit 14.

  The pressing pin 70a is biased by a coil spring 70c (see FIG. 8A). When the cutting blade 42 is released from being gripped by the three claws 70b, the cutting blade 42 is pressed by the pressing pin 70a. And move in the Y-axis direction. As a result, the cutting blade 42 can be moved from the blade holder 70 to the blade mount 36.

  As shown in FIG. 3, at a position adjacent to the cutting blade attaching / detaching unit 64, a fixing nut 48 is attached to the blade mount 36 (the tip of the spindle) and the fixing nut 48 is removed from the blade mount 36 (fixing). Nut attaching / detaching means) 72 is provided.

  FIG. 4B is a perspective view schematically showing the structure of the fixing nut attaching / detaching unit 72. As shown in FIG. 4B, the fixing nut attaching / detaching unit 72 includes a spindle 74 that is accommodated in the second accommodating portion 62 b of the housing 62 and rotates around the Y axis.

  One end side (front end side) of the spindle 74 is exposed to the outside of the second housing portion 62b. On the other hand, a motor (not shown) for rotating the spindle 74 is connected to the other end side (base end side) of the spindle 74.

  A first bottom surface 76 a side of a base 76 formed in a columnar shape is fixed to the tip of the spindle 74. A fixing nut holding portion 78 including four claws 78 a is provided on the outer peripheral portion of the second bottom surface 76 b of the base 76.

  While holding the fixed nut 48 with the four claws 78a of the fixed nut holding part 78, the cutting unit moving mechanism 18 and the auto blade changer moving mechanism 52 move the cutting unit 14 and the fixed nut attaching / detaching unit 72 relatively. If the spindle 74 is rotated, the fixing nut 48 can be attached to or removed from the blade mount 36 of the cutting unit 14.

  As shown in FIG. 1, a blade rack 80 that accommodates the cutting blade 42 and the fixing nut 48 is arranged at a position adjacent to the auto blade changer 50. For example, the auto blade changer 50 holds the cutting blade 42 and the fixing nut 48 housed in the blade rack 80 and attaches them to the blade mount 36 of the cutting unit 14.

  Each component such as the X-axis moving mechanism, the chuck table 10, the cutting unit 14, the cutting unit moving mechanism 18, the auto blade changer 50, and the auto blade changer moving mechanism 52 is connected to a control device (control means) 82. The control device 82 controls the operation of each unit so that the workpiece can be appropriately cut. The control device 82 is provided with a storage unit (not shown) that stores various types of information.

  Next, the position adjustment jig according to the present embodiment will be described. FIG. 5A is a perspective view schematically showing a first adjustment member of the position adjustment jig according to the present embodiment, and FIG. 5B shows the first adjustment member viewed from another direction. 6 (A) and 6 (B) are partial cross-sectional plan views schematically showing how the first adjustment member is mounted on the blade mount 36 (the tip of the spindle). is there.

  As shown in FIGS. 5A and 5B, the first adjustment member (position adjustment jig) 84 includes a first bottom surface (first contact surface) 84a and the opposite side of the first bottom surface 84a. And a second bottom surface (first adjustment surface) 84b. On the first bottom surface 84a side of the first adjustment member 84, a concave portion 84c corresponding to the boss portion 40 of the blade mount 36 is formed.

  A screw groove corresponding to a thread formed on the outer peripheral surface 40a of the boss portion 40 is provided on the inner peripheral surface of the recess 84c. As shown in FIGS. 6A and 6B, the first adjustment member 84 is attached to the blade mount 36 by tightening the tip of the boss 40 in the recess 84c.

  As shown in FIG. 6B, when the first adjustment member 84 is attached to the blade mount 36, the first bottom surface 84 a comes into contact with the support surface 38 a of the flange portion 38. On the other hand, the second bottom surface 84b is formed substantially flat and is perpendicular to the spindle axis C1 of the cutting unit 14 with the first bottom surface 84a in contact with the support surface 38a. Further, the center of the second bottom surface 84b is positioned on the spindle axis C1 of the cutting unit 14 (on the extension line of the axis C1).

  FIG. 7A is a perspective view schematically showing a second adjustment member of the position adjustment jig according to the present embodiment, and FIG. 7B shows the second adjustment member viewed from another direction. 8A and 8B are partial cross-sectional plan views schematically showing how the second adjustment member is attached to the blade holding portion 70. FIG.

  As shown in FIGS. 7A and 7B, the second adjustment member (position adjustment jig) 86 includes a first bottom surface (second contact surface) 86a and a side opposite to the first bottom surface 86a. And a second bottom surface (second adjustment surface) 86b. The first bottom surface 86a and the second bottom surface 86b are substantially flat. The second bottom surface 86 b is formed in the same shape and size as the second bottom surface 84 b of the first adjustment member 84.

  As shown in FIGS. 8A and 8B, after the pressing pin 70a of the blade holding portion 70 is pressed against the first bottom surface 86a of the second adjusting member 86, the three claws 70b are directed inward. The second adjusting member 86 is attached to the blade holding unit 70 by moving the first adjusting member 86 to the blade holding portion 70.

  That is, as shown in FIG. 8B, when the second adjustment member 86 is attached to the blade holding portion 70, the first bottom surface 86a contacts the pressing pin 70a and the claw 70b. On the other hand, the second bottom surface 86b is perpendicular to the central axis C2 of the arm 66 provided in the cutting blade attaching / detaching unit 64. The center of the second bottom surface 86b is positioned on the central axis C2 of the arm 66 (on the extension line of the central axis C2).

  Here, the axis C1 of the spindle provided in the cutting unit 14 and the central axis C2 of the arm 66 provided in the cutting blade attaching / detaching unit 64 are both parallel to the Y-axis direction. That is, when the second adjusting member 86 is mounted on the blade holding unit 70, the second bottom surface 86b is perpendicular to the spindle center C1 of the cutting unit 14, and the center of the second bottom surface 86b is the cutting unit. 14 is positioned on a straight line parallel to the spindle axis C1.

  FIG. 9A is a perspective view schematically showing a third adjustment member of the position adjustment jig according to the present embodiment, and FIG. 9B shows the third adjustment member viewed from another direction. FIGS. 10A and 10B are plan views schematically showing how the third adjustment member is attached to the fixing nut holding portion 78. FIG.

  As shown in FIGS. 9A and 9B, the third adjustment member (position adjustment jig) 88 includes a first bottom surface (third contact surface) 88a and the opposite side of the first bottom surface 88a. And a second bottom surface (third adjustment surface) 88b of a predetermined height. The first bottom surface 88 a is provided with an engaging convex portion 88 c that engages with the four claws 78 a constituting the fixing nut holding portion 78. The second bottom surface 88 b is substantially flat and is formed in the same shape and size as the second bottom surface 84 b of the first adjustment member 84.

  As shown in FIG. 10A and FIG. 10B, the engagement projection 88c is moved inward with the four claws 78a pressed against the first bottom surface 88a of the third adjustment member 88. The third adjusting member 88 is attached to the fixed nut holding portion 78 by engaging with the fixed nut holding portion 78.

  That is, as shown in FIG. 10B, when the third adjustment member 88 is attached to the fixing nut holding portion 78, the first bottom surface 88a comes into contact with the claw 78a. On the other hand, the second bottom surface 88b is perpendicular to the axis C3 of the spindle 74 provided in the fixing nut attaching / detaching unit 72. The center of the second bottom surface 88b is positioned on the axis C3 of the spindle 74 (on the extension line of the axis C3).

  Here, the axis C1 of the spindle provided in the cutting unit 14 and the axis C3 of the spindle 74 provided in the fixing nut attaching / detaching unit 72 are both parallel to the Y-axis direction. That is, when the third adjusting member 88 is mounted on the fixing nut holding portion 78, the second bottom surface 88b is perpendicular to the spindle center C1 of the cutting unit 14, and the center of the second bottom surface 88b is the cutting center. The unit 14 is positioned on a straight line parallel to the spindle axis C1 of the spindle.

  Next, a position adjustment method using the position adjustment jig according to the present embodiment will be described. In the position adjustment method according to this embodiment, first, a first mounting step of mounting the first adjustment member 84 on the blade mount 36 (the tip of the spindle) is performed. In the first mounting step, as described above, the boss portion 40 of the blade mount 36 is fastened into the concave portion 84c of the first adjustment member 84. As a result, the first bottom surface 84 a of the first adjustment member 84 contacts the support surface 38 a of the flange portion 38.

  Further, a second mounting step of mounting the second adjustment member 86 on the blade holding unit 70 is performed. In the second mounting step, as described above, the pressing pin 70a of the blade holding unit 70 is pressed against the first bottom surface 86a of the second adjusting member 86, and then the three claws 70b are moved inward. Thereby, the 1st bottom face 86a of the 2nd adjustment member 86 contacts the press pin 70a and the nail | claw 70b.

  Further, a third mounting step of mounting the third adjustment member 88 on the fixing nut holding portion 78 is performed. In the third mounting step, as described above, the four claws 78a are moved inward in a state where they are pressed against the first bottom surface 88a of the third adjusting member 88 and engaged with the engaging convex portion 88c. . Thereby, the 1st bottom face 88a of the 3rd adjustment member 88 contacts claw 78a. The order of performing the first mounting step, the second mounting step, and the third mounting step is not particularly limited.

  After performing the first mounting step, the second mounting step, and the third mounting step, the cutting blade attaching / detaching unit adjusting step for adjusting the position of the cutting blade attaching / detaching unit 64 with respect to the spindle included in the cutting unit 14 and the cutting unit 14 are performed. A fixing nut attaching / detaching unit adjusting step for adjusting the position of the fixing nut attaching / detaching unit 72 with respect to the spindle provided is performed.

  In the cutting blade attaching / detaching unit adjusting step, first, the spindle provided in the cutting unit 14 and the cutting blade attaching / detaching unit 64 are arranged in a direction perpendicular to the spindle center C1 provided in the cutting unit 14 (that is, with respect to the Y-axis direction). A first movement step in which the second bottom surface 84b of the first adjustment member 84 and the second bottom surface 86b of the second adjustment member 86 face each other by relatively moving in the vertical X-axis direction and the Z-axis direction). To implement.

  In the first moving step, for example, the spindle included in the cutting unit 14 is moved in the Z-axis direction by the cutting unit moving mechanism 18, and the cutting blade attaching / detaching unit 64 is moved in the X-axis direction by the auto blade changer moving mechanism 52. When the spindle and the cutting blade attaching / detaching unit 64 included in the cutting unit 14 are positioned at a position where at least a part of the second bottom surface 84b and the second bottom surface 86b overlap when viewed from the Y-axis direction, the first moving step ends.

  After the first movement step is performed, the spindle included in the cutting unit 14 and the cutting blade attaching / detaching unit 64 are relatively relative to the direction parallel to the spindle center C1 included in the cutting unit 14 (that is, the Y-axis direction). The first contact step of bringing the second bottom surface 84b of the first adjustment member 84 into contact with the second bottom surface 86b of the second adjustment member 86 is performed.

  FIG. 11A is a partial cross-sectional plan view schematically showing the first contact step. In the first contact step, for example, the spindle included in the cutting unit 14 is moved in the Y-axis direction by the cutting unit moving mechanism 18. When the second bottom surface 84b and the second bottom surface 86b come into contact, the first contact step ends.

  After performing the first contact step, the first deviation for confirming the deviation between the outer peripheral edge of the second bottom surface 84b of the first adjustment member 84 and the outer peripheral edge of the second bottom surface 86b of the second adjustment member 86. Perform a confirmation step. As described above, the second bottom surface 84b of the first adjustment member 84 and the second bottom surface 86b of the second adjustment member 86 are formed in the same shape and the same size. Therefore, for example, the deviation between the outer peripheral edge of the second bottom surface 84b and the outer peripheral edge of the second bottom surface 86b can be confirmed by visual observation or finger contact.

  After performing the first deviation confirmation step, the spindle provided in the cutting unit 14 and the cutting blade attaching / detaching unit 64 are moved relatively in a direction perpendicular to the axis C1 of the spindle provided in the cutting unit 14. In the state where the second bottom surface 84b of the first adjustment member 84 and the second bottom surface 86b of the second adjustment member 86 are in contact with each other, the outer peripheral edge of the second bottom surface 84b and the outer peripheral edge of the second bottom surface 86b are matched. 1 adjustment step is performed.

  FIG. 11B and FIG. 11C are partial cross-sectional plan views schematically showing the first adjustment step. In this first adjustment step, for example, the spindle included in the cutting unit 14 is moved in the Z-axis direction by the cutting unit moving mechanism 18, and the cutting blade attaching / detaching unit 64 is moved in the X-axis direction by the auto blade changer moving mechanism 52.

  The relative movement amount of the spindle included in the cutting unit 14 and the cutting blade attaching / detaching unit 64 is the deviation between the outer peripheral edge of the second bottom surface 84b and the outer peripheral edge of the second bottom surface 86b confirmed in the first deviation confirmation step. Will be decided accordingly. As shown in FIG. 11C, when the outer peripheral edge of the second bottom surface 84b matches the outer peripheral edge of the second bottom surface 86b, the first adjustment step ends.

  After performing the first adjustment step, the cutting unit 14 is in a state in which the outer peripheral edge of the second bottom surface 84b of the first adjustment member 84 and the outer peripheral edge of the second bottom surface 86b of the second adjustment member 86 are aligned. The first storage step of storing the position (coordinates) of the spindle and the position (coordinates) of the cutting blade attaching / detaching unit 64 in the storage unit (not shown) of the control device 82 is performed.

  As described above, by aligning the outer peripheral edge of the second bottom surface 84b with the outer peripheral edge of the second bottom surface 86b, the axis C1 of the spindle provided in the cutting unit 14 and the central axis of the arm 66 provided in the cutting blade attaching / detaching unit 64 are provided. C2 is positioned on the same straight line. Therefore, if the position of the spindle included in the cutting unit 14 and the position of the cutting blade attaching / detaching unit 64 are stored in the storage unit of the control device 82 in this state, the cutting blade 42 can be attached / detached appropriately.

  Note that after the first adjustment step, the first deviation confirmation step may be performed as a precaution. If a deviation is confirmed, the first adjustment step may be performed after the first adjustment step is performed again.

  The procedure of the fixing nut attaching / detaching unit adjusting step is the same. Specifically, first, the spindle included in the cutting unit 14 and the fixing nut attaching / detaching unit 72 are moved in a direction perpendicular to the axis C1 of the spindle included in the cutting unit 14 (that is, X perpendicular to the Y-axis direction). The second movement step is performed in which the second bottom surface 84b of the first adjustment member 84 and the second bottom surface 88b of the third adjustment member 88 face each other. .

  In the second moving step, for example, the spindle included in the cutting unit 14 is moved in the Z-axis direction by the cutting unit moving mechanism 18, and the fixed nut attaching / detaching unit 72 is moved in the X-axis direction by the auto blade changer moving mechanism 52. When the spindle and the fixing nut attaching / detaching unit 72 included in the cutting unit 14 are positioned at a position where at least a part of the second bottom surface 84b and the second bottom surface 88b overlap each other when viewed from the Y-axis direction, the second moving step ends.

  After performing the second moving step, the spindle included in the cutting unit 14 and the fixing nut attaching / detaching unit 72 are relatively relative to a direction parallel to the spindle center C1 included in the cutting unit 14 (that is, the Y-axis direction). And the second contact step of bringing the second bottom surface 84b of the first adjustment member 84 into contact with the second bottom surface 88b of the third adjustment member 88 is performed.

  In the first contact step, for example, the spindle included in the cutting unit 14 is moved in the Y-axis direction by the cutting unit moving mechanism 18. When the second bottom surface 84b and the second bottom surface 88b come into contact, the second contact step ends.

  After carrying out the second contact step, the second deviation for confirming the deviation between the outer peripheral edge of the second bottom surface 84b of the first adjustment member 84 and the outer peripheral edge of the second bottom surface 88b of the third adjustment member 88. Perform a confirmation step. As described above, the second bottom surface 84b of the first adjustment member 84 and the second bottom surface 88b of the third adjustment member 88 are formed in the same shape and the same size. Therefore, for example, a shift between the outer peripheral edge of the second bottom surface 84b and the outer peripheral edge of the second bottom surface 88b can be confirmed by visual observation or finger contact.

  After performing the second deviation confirmation step, the spindle included in the cutting unit 14 and the fixing nut attaching / detaching unit 72 are moved relatively in a direction perpendicular to the axis C1 of the spindle included in the cutting unit 14. In the state where the second bottom surface 84b of the first adjustment member 84 and the second bottom surface 88b of the third adjustment member 88 are in contact with each other, the outer peripheral edge of the second bottom surface 84b and the outer peripheral edge of the second bottom surface 88b are matched. 2 adjustment steps are performed.

  In this second adjustment step, for example, the spindle included in the cutting unit 14 is moved in the Z-axis direction by the cutting unit moving mechanism 18, and the fixed nut attaching / detaching unit 72 is moved in the X-axis direction by the auto blade changer moving mechanism 52.

  The relative movement amount of the spindle included in the cutting unit 14 and the fixing nut attaching / detaching unit 72 is the deviation between the outer peripheral edge of the second bottom surface 84b and the outer peripheral edge of the second bottom surface 88b confirmed in the second deviation confirmation step. Will be decided accordingly. When the outer peripheral edge of the second bottom surface 84b matches the outer peripheral edge of the second bottom surface 88b, the second adjustment step ends.

  After performing the second adjustment step, the cutting unit 14 is in a state in which the outer peripheral edge of the second bottom surface 84b of the first adjustment member 84 and the outer peripheral edge of the second bottom surface 88b of the third adjustment member 88 coincide. The second storage step of storing the spindle position (coordinates) and the position (coordinates) of the fixing nut attaching / detaching unit 72 in the storage unit (not shown) of the control device 82 is performed.

  As described above, by aligning the outer peripheral edge of the second bottom surface 84b with the outer peripheral edge of the second bottom surface 88b, the axis C1 of the spindle provided in the cutting unit 14 and the axis of the spindle 74 provided in the fixing nut attaching / detaching unit 72 are provided. C3 is positioned on the same straight line. Therefore, if the position of the spindle included in the cutting unit 14 and the position of the fixing nut attaching / detaching unit 72 are stored in the storage unit of the control device 82 in this state, the fixing nut 48 can be appropriately attached / detached.

  Note that the second deviation confirmation step may be performed after the second adjustment step, just in case. If a deviation is confirmed, the second adjustment step may be performed after the second adjustment step is performed again. Moreover, the order in which the cutting blade attaching / detaching unit adjusting step and the fixing nut attaching / detaching unit adjusting step are performed is not particularly limited.

  As described above, the position adjustment jig according to the present embodiment includes the second bottom surface (first adjustment surface) 84b of the first adjustment member 84 attached to the blade mount 36 (the tip portion of the spindle), the cutting. A second bottom surface (second adjustment surface) 86b of a second adjustment member 86 attached to the blade holding portion 70 of the blade attachment / detachment unit (cutting blade attachment / detachment means) 64, and a fixed nut attachment / detachment unit (fixation nut attachment / detachment means) 72. Since the second bottom surface (third adjustment surface) 88b of the third adjustment member 88 attached to the fixed nut holding portion 78 is formed in the same shape and the same size, the second bottom surface 84b After the second bottom surface 86b is brought into contact with the outer peripheral edge of the second bottom surface 84b and the outer peripheral edge of the second bottom surface 86b, and the second bottom surface 84b and the second bottom surface 88b are brought into contact with each other. The outer peripheral edge of the second bottom surface 84b and the first Only to match the outer peripheral edge of the bottom surface 88b, it can be easily adjust the position of the cutting blade detachable unit 64 and the fixing nut detachable unit 72 relative to the spindle provided in the cutting unit 14.

  Note that the configurations, methods, and the like according to the above-described embodiments can be modified as appropriate without departing from the scope of the object of the present invention.

2 Processing device 4 Base 4a Opening 6 X-axis moving table 8 Dustproof and drip-proof cover 10 Chuck table 10a Holding surface 12 Clamp 14 Cutting unit (cutting means)
16 Support structure 18 Cutting unit moving mechanism (moving means)
20 Y-axis guide rail 22 Y-axis moving plate 24 Y-axis ball screw 26 Z-axis guide rail 28 Z-axis moving plate 30 Z-axis ball screw 32 Z-axis pulse motor 34 Spindle housing 36 Blade mount (tip end of spindle)
38 flange portion 38a support surface 40 boss portion 40a outer peripheral surface 42 cutting blade 42a opening 44 hub base 46 cutting blade 48 fixing nut 48a opening 50 auto blade changer 52 auto blade changer moving mechanism (moving means)
54 Guide rail 56 Moving block 58 Ball screw 60 Pulse motor 62 Housing 62a First accommodating portion 62b Second accommodating portion 64 Cutting blade attaching / detaching unit (cutting blade attaching / detaching means)
66 Arm 68 Base 68a First bottom surface 68b Second bottom surface 70 Blade holding portion 70a Pressing pin 70b Claw 70c Coil spring 72 Fixed nut attaching / detaching unit (fixing nut attaching / detaching means)
74 Spindle 76 Base 76a First bottom surface 76b Second bottom surface 78 Fixing nut holding portion 78a Claw 80 Blade rack 82 Control device (control means)
84 First adjustment member (position adjustment jig)
84a First bottom surface (first contact surface)
84b Second bottom surface (first adjustment surface)
84c Concave portion 86 Second adjustment member (position adjustment jig)
86a First bottom surface (second contact surface)
86b Second bottom surface (second adjustment surface)
88 Third adjustment member (position adjustment jig)
88a First bottom surface (third contact surface)
88b Second bottom surface (third adjustment surface)
88c engagement projection

Claims (4)

A chuck table for holding the workpiece;
A cutting means that has a spindle that is driven to rotate and a cutting blade that is attached to the tip of the spindle, and that cuts a workpiece held on the chuck table;
Cutting blade attaching / detaching means for attaching / detaching the cutting blade to / from the tip of the spindle and fixing nut attaching / detaching for attaching / detaching a fixing nut for fixing the cutting blade attached to the tip of the spindle to / from the tip of the spindle An auto blade changer with means,
Moving means for relatively moving the cutting means and the auto blade changer;
In a cutting device comprising:
A position adjusting jig used when adjusting the positions of the cutting blade attaching / detaching means and the fixing nut attaching / detaching means with respect to the spindle,
A first adjustment member attached to the tip of the spindle;
A second adjustment member attached to a blade holding part provided in the cutting blade attaching / detaching means;
A third adjusting member attached to a fixing nut holding part provided in the fixing nut attaching / detaching means,
The first adjustment member is formed on the opposite side of the first contact surface in contact with the tip end portion of the spindle and the first contact surface, and the first contact surface is in contact with the tip end portion of the spindle. A first adjustment surface perpendicular to the axis of the spindle,
The second adjusting member is formed on the opposite side of the second contact surface that is in contact with the blade holding portion of the cutting blade attaching / detaching means, and the second contact surface is formed on the blade holding portion. A second adjustment surface perpendicular to the axis of the spindle in contact with the spindle,
The third adjusting member is formed on the opposite side of the third contact surface that is in contact with the fixed nut holding portion of the fixed nut attaching / detaching means, and the third contact surface is formed on the fixed nut. A third adjustment surface perpendicular to the axis of the spindle in contact with the holding portion,
The position adjusting jig, wherein the first adjustment surface, the second adjustment surface, and the third adjustment surface have the same shape and the same size. The first adjustment member, the second adjustment member, and the third adjustment member are formed in a cylindrical shape having a predetermined height,
One bottom surface and the other bottom surface of the first adjustment member function as the first contact surface and the first adjustment surface, respectively, and the first contact surface is in contact with the tip of the spindle. And the center of the first adjustment surface is located on the extension line of the spindle axis,
One bottom surface and the other bottom surface of the second adjustment member function as the second contact surface and the second adjustment surface, respectively, and the second contact surface is in contact with the blade holding portion. The center of the second adjustment surface is located on a straight line parallel to the axis of the spindle;
One bottom surface and the other bottom surface of the third adjustment member function as the third contact surface and the third adjustment surface, respectively, and the third contact surface is in contact with the fixing nut holding portion. The position adjusting jig according to claim 1, wherein the center of the third adjusting surface is located on a straight line parallel to the axis of the spindle. A position adjusting method for adjusting the positions of the cutting blade attaching / detaching means and the fixing nut attaching / detaching means with respect to the spindle using the position adjusting jig according to claim 1 or 2,
The cutting apparatus further includes control means including a storage unit that stores the position of the spindle, the position of the cutting blade attaching / detaching means, and the position of the fixing nut attaching / detaching means,
A first mounting step of mounting the first adjusting member on the tip of the spindle by bringing the first contact surface into contact with the tip of the spindle;
A second mounting step of mounting the second adjustment member on the blade holding unit by bringing the second contact surface into contact with the blade holding unit;
A third attachment step of attaching the third adjustment member to the fixed nut holding portion by bringing the third contact surface into contact with the fixed nut holding portion;
A first movement for causing the first adjustment surface and the second adjustment surface to face each other by moving the spindle and the cutting blade attaching / detaching means in a direction perpendicular to the axis of the spindle. Steps,
A first contact step in which the spindle and the cutting blade attaching / detaching means are moved relatively in a direction parallel to the axis of the spindle to bring the first adjustment surface into contact with the second adjustment surface; ,
A first deviation confirmation step for confirming deviation between the outer peripheral edge of the first adjustment surface and the outer peripheral edge of the second adjustment surface;
The spindle and the cutting blade attaching / detaching means are moved relative to each other in a direction perpendicular to the axis of the spindle so that the first adjustment surface and the second adjustment surface are in contact with each other. A first adjustment step for matching the outer peripheral edge of the first adjustment surface with the outer peripheral edge of the second adjustment surface;
A first storage step of storing in the storage unit the coordinates of the spindle and the coordinates of the cutting blade attaching / detaching means in a state where the outer peripheral edge of the first adjustment surface and the outer peripheral edge of the second adjustment surface coincide with each other. When,
A second movement for moving the spindle and the fixing nut attaching / detaching means relative to each other in a direction perpendicular to the axis of the spindle so that the first adjustment surface and the third adjustment surface face each other. Steps,
A second contact step in which the spindle and the fixing nut attaching / detaching means are moved relative to each other in a direction parallel to the axis of the spindle to bring the first adjustment surface into contact with the third adjustment surface; ,
A second deviation confirmation step for confirming deviation between the outer peripheral edge of the first adjustment surface and the outer peripheral edge of the third adjustment surface;
The spindle and the fixing nut attaching / detaching means are moved relative to each other in a direction perpendicular to the axis of the spindle so that the first adjustment surface and the third adjustment surface are in contact with each other. A second adjustment step for matching the outer peripheral edge of the first adjustment surface with the outer peripheral edge of the third adjustment surface;
A second storage step of storing in the storage unit the coordinates of the spindle and the coordinates of the fixing nut attaching / detaching means in a state in which the outer peripheral edge of the first adjustment surface and the outer peripheral edge of the third adjustment surface coincide with each other; And a position adjustment method comprising:   4. The position adjustment method according to claim 3, wherein in the first displacement confirmation step and the second displacement confirmation step, the displacement is confirmed visually or by finger contact.

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