JP2016125896A - Measuring apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily manufacture and provide a measuring apparatus capable of improving strength of a tubular member and exactly measuring the flow rate of fluid.SOLUTION: A measuring apparatus according to one aspect of the present invention includes: a tubular member 11; a reinforcement member 21 which is arranged on the outer peripheral surface so as to cover the outer peripheral surface of at least one end of the tubular member 11; and an environment sensor arranged on the outer peripheral surface of the tubular member 11.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a measuring apparatus that can improve the strength of a tubular member and can accurately measure the flow rate of a fluid.

  2. Description of the Related Art Conventionally, as a flow sensor for detecting the flow rate of a fluid to be measured such as gas or air, a liquid flow sensor having a semiconductor module in which at least one temperature sensor and a heat source are incorporated has a pipe for guiding the liquid. The flow sensor is known in which the semiconductor module is provided on the outer surface of the pipe via an adhesive, and the temperature sensor and the heat source are in thermal contact with the outer surface of the pipe. (Patent Document 1).

Special table 2003-532099 gazette

  In the flow sensor of Patent Document 1, when a pipe is joined to another pipe or member, the pipe is connected to some joint member. At this time, pressure is applied to the pipe when it is fixed by the joint member, and if the pipe is thin, the pipe is damaged or deformed.

  Here, in order to improve the sensor sensitivity, it is necessary to efficiently transfer the heat of the heat source included in the semiconductor module bonded to the outer wall of the pipe to the inside of the pipe. Then, when the pipe thickness at the installation position (region) of the semiconductor module is thick, the sensor sensitivity is lowered, and there is a possibility that the fluid flow rate cannot be measured.

  Moreover, in the flow sensor of patent document 1, the pipe thickness in the installation position of a semiconductor module is processed mechanically. However, when mechanically processing the pipe thickness, pipe strength is reduced by damaging the processed surface of the pipe, and when the pipe inner and outer diameter accuracy is low, the pipe thickness after processing varies, The sensor characteristics may be affected. Thus, it is not easy to manufacture a flow sensor that can accurately measure the fluid flow rate by mechanically adjusting the pipe wall thickness.

  Therefore, an object of the present invention is to easily manufacture and provide a measuring device that can improve the strength of a tubular member and can accurately measure the flow rate of a fluid.

  In order to solve the above problems, a measuring apparatus according to one aspect of the present invention includes a tubular member, a reinforcing member disposed on the outer peripheral surface so as to cover an outer peripheral surface of at least one end of the tubular member, An environmental sensor disposed on an outer peripheral surface of the tubular member.

  According to the present invention, the measuring device includes the reinforcing member disposed on the outer peripheral surface so as to cover the outer peripheral surface of at least one end of the tubular member, and the environmental sensor disposed on the outer peripheral surface of the tubular member. Therefore, the strength of the tubular member can be reinforced and the deterioration of the sensor sensitivity of the environmental sensor can be prevented, so that the strength of the tubular member can be improved and the flow rate of the fluid can be accurately measured. A measuring device can be easily manufactured and provided.

It is side surface sectional drawing of the flowmeter which concerns on 1st Embodiment of this invention. It is sectional drawing seen from the II direction of FIG. It is a perspective view which shows the structural example of the flow sensor which concerns on 1st Embodiment of this invention. It is sectional drawing seen from the II-II direction of FIG. It is the figure which showed the manufacturing process of the flowmeter which concerns on 1st Embodiment of this invention. Fig.5 (a) is the figure which showed the process in which a reinforcement member is arrange | positioned to a tubular member. FIG. 5B is a diagram illustrating a process in which the flow sensor is disposed on the tubular member after the reinforcing member is disposed on the tubular member. FIG. 5C is a view showing a state after the flow sensor is arranged on the tubular member. It is sectional drawing seen from the III-III direction or IV-IV direction in the manufacturing process shown in FIG. 6A is a view showing a state after the manufacturing step 1- (A) in FIG. 5A, and is a cross section seen from the III-III direction in the manufacturing step 1- (A) shown in FIG. FIG. FIG. 6B is a view showing a state after the manufacturing step 1- (B) in FIG. 5A, and is a cross section viewed from the III-III direction in the manufacturing step 1- (B) shown in FIG. FIG. FIG. 6C is a view showing a state after the manufacturing process 2 in FIG. 5B, and is a cross-sectional view seen from the IV-IV direction of FIG. 5C. It is the figure which showed the state after the manufacturing process 1- (B) in Fig.5 (a), and is a figure in case one or more groove | channels are formed in one or more reinforcement members arrange | positioned at a tubular member. It is side surface sectional drawing of the flowmeter which concerns on 2nd Embodiment of this invention.

  Embodiments of the present invention will be described below with reference to the drawings. However, the embodiment described below is merely an example, and there is no intention to exclude various modifications and technical applications that are not explicitly described below. That is, the present invention can be implemented with various modifications (combining the embodiments) without departing from the spirit of the present invention. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. The drawings are schematic and do not necessarily match actual dimensions and ratios. In some cases, the dimensional relationships and ratios may be different between the drawings. In the following description, the upper side of the drawing is referred to as “upper” and the lower side is referred to as “lower”.

<First Embodiment>
FIG. 1 is a side sectional view of a flow meter according to the first embodiment of the present invention. FIG. 2 is a cross-sectional view seen from the II direction of FIG. As shown in FIGS. 1 and 2, the flow meter 1 (measuring device) exemplarily includes a tubular member 11, a reinforcing member 21, a joint member, and a flow for measuring the flow rate of fluid flowing in the tubular member 11. A sensor 51 (environmental sensor) (not shown in FIG. 2) and a sensor housing 71 are provided. A detection signal from the flow sensor 51 is processed by a processing circuit (not shown).

  The tubular member 11 is a tubular member that allows fluid to pass through. For example, the tubular member 11 is a rigid structural member having a predetermined inner diameter, thickness, and length that can withstand changes in pressure and temperature of the fluid, and is made of ceramic, plastic, stainless steel, or the like. Composed. In addition, the thickness of the tubular member 11 is thin (for example, several tens of micrometers) to such an extent that it hardly becomes an obstacle to heat conduction.

The sensor casing 71 is a member that stores the flow sensor 51. Further, as shown in FIG. 1, the joint member includes, for example, a body member 41, ferrule members 43 and 47, and nut members 45 and 49, and at least one end portion of the tubular member 11. This is a member that connects the tubular member 11 to another tubular member such as the tube 15.
For example, as shown in FIG. 1, the ferrule member 43 of the joint member is inserted into the body member 41 so as to cover the tubular member 11 and the reinforcing member 21 described later, and the nut member 45 is attached to the body member 41 to attach the ferrule member. 43 is pushed into the body member 41. Thus, the joint member fastens at least one end of the tubular member 11 and the reinforcing member 21.
For example, as shown in FIG. 1, the ferrule member 47 of the joint member is inserted into the body member 41 so as to cover the tube 15, and the ferrule member 47 is attached to the body member 41 by attaching the nut member 49 to the body member 41. It is pushed into 41. Thus, the joint member fastens at least one end of the tube 15. Furthermore, as shown in FIG. 1, the tubular member 11 and the reinforcing member 21 and the tube 15 in the joint member are disposed with a space S therebetween, but the tubular member 11 and the reinforcing member 21 without the space S are provided. You may comprise so that the tube 15 may be connected directly.
At least one end of the tubular member 11 is fixed to the sensor housing 71 by a joint member. Each member included in the joint member is made of, for example, ceramic, plastic, stainless steel, or the like.

  The reinforcing member 21 is a member disposed on the tubular member 11 with an adhesive 31 in order to supplement the strength of the tubular member 11. As shown in FIGS. 1 and 2, the reinforcing member 21 is disposed on the outer peripheral surface so as to cover the outer peripheral surface of at least one end of the tubular member 11, for example. The reinforcing member 21 is disposed on the outer peripheral surface of at least one end of the tubular member 11 that is covered with the joint member.

  The flow sensor 51 measures the flow rate of the fluid flowing through the tubular member 11. As shown in FIG. 1, the flow sensor 51 is disposed in the opening O formed in the reinforcing member 21 and is disposed as close as possible to the outer peripheral surface of the tubular member 11.

  FIG. 3 is a perspective view illustrating a configuration example of the flow sensor according to the embodiment of the present invention. FIG. 4 is a cross-sectional view seen from the II-II direction of FIG. As shown in FIG. 3 and FIG. 4, the flow sensor 51 is provided on the substrate 101 provided with the cavity 102, the insulating film 103 disposed on the substrate 101 so as to cover the cavity 102, and the insulating film 103. Heater 104, upstream temperature sensing resistor element 105 provided upstream of heater 104, downstream temperature sensor element 106 provided downstream of heater 104, and upstream side of upstream temperature resistance element 105 And an ambient temperature sensor 107.

  The portion of the insulating film 103 covering the cavity 102 constitutes a heat insulating diaphragm. The ambient temperature sensor 107 measures the temperature of the fluid to be measured that flows through the tubular member 11. The heater 104 is disposed substantially at the center of the insulating film 103 that covers the cavity 102, and heats the fluid to be measured flowing through the tubular member 11 so as to be higher than the temperature measured by the ambient temperature sensor 107. The upstream resistance temperature detector 105 is used to detect the temperature upstream of the heater 104, and the downstream resistance temperature detector 106 is used to detect the temperature downstream of the heater 104.

  In the present embodiment, the flow sensor 51 is disposed in contact with the outer peripheral surface of the tubular member 11, and as described above, the thickness of the tubular member 11 is so thin as to hardly hinder heat conduction (for example, several 10 μm), the heat applied to the heater 105 is exerted on the fluid to be measured flowing in the tubular member 11, and the temperature of the fluid to be measured is detected by the upstream resistance thermometer element 105 and the downstream resistance thermometer element 106. It has become so. Here, when the flow rate of the fluid to be measured in the tubular member 11 is zero, the heat applied by the heater 104 diffuses symmetrically in the upstream direction and the downstream direction. Therefore, the temperature of the upstream resistance temperature element 105 and the temperature of the downstream resistance temperature element 106 are equal, and the electrical resistance of the upstream resistance temperature element 105 and the electrical resistance of the downstream resistance temperature element 106 are equal. On the other hand, when the fluid to be measured in the tubular member 11 flows from the upstream side to the downstream side, the heat applied by the heater 104 is conveyed in the downstream direction (transport effect). Therefore, the temperature of the downstream side resistance element 106 becomes higher than the temperature of the upstream side resistance element 105, and the electrical resistance of the upstream side resistance element 105 and the electrical resistance of the downstream side resistance element 106. There will be a difference. It is known that this difference in electrical resistance has a correlation with the speed and flow rate of the fluid to be measured flowing through the tubular member 11. For this reason, the speed and flow rate of the fluid to be measured flowing through the tubular member 11 are measured (calculated) based on the difference between the electrical resistance of the upstream temperature measuring resistance element 105 and the electrical resistance of the downstream temperature measuring resistance element 106. can do.

Note that silicon (Si) or the like can be used as the material of the substrate 101. As a material of the insulating film 103, silicon oxide (SiO ₂ ) or the like can be used. The cavity 102 is formed by anisotropic etching or the like. Further, platinum (Pt) or the like can be used as a material for each of the heater 104, the upstream temperature measuring resistor element 105, the downstream temperature measuring resistor element 106, and the ambient temperature sensor 107. It can be formed.

  Thus, since the tubular member 11 is thin enough to be detected by the flow sensor 51, the mechanical strength is low. Therefore, in this embodiment, the reinforcing member 21 compensates the strength. Further, since the joint member fixes the tubular member 11 to the sensor housing 71 at the end where the reinforcing member 21 is provided, the flow meter 1 can be attached in the middle of the tube 15 without applying stress to the tubular member 11. It is.

(Manufacturing process)
A manufacturing process of the flow meter according to the first embodiment of the present invention will be described with reference to FIGS.
FIG. 5 is a diagram showing a manufacturing process of the flow meter according to the first embodiment of the present invention. Fig.5 (a) is the figure which showed the process in which a reinforcement member is arrange | positioned to a tubular member. FIG. 5B is a diagram illustrating a process in which the flow sensor is disposed on the tubular member after the reinforcing member is disposed on the tubular member. FIG. 5C is a view showing a state after the flow sensor is arranged on the tubular member.
FIG. 6 is a cross-sectional view seen from the III-III direction or the IV-IV direction in the manufacturing process shown in FIG. 6A is a view showing a state after the manufacturing step 1- (A) in FIG. 5A, and is a cross section seen from the III-III direction in the manufacturing step 1- (A) shown in FIG. FIG. FIG. 6B is a view showing a state after the manufacturing step 1- (B) in FIG. 5A, and is a cross section viewed from the III-III direction in the manufacturing step 1- (B) shown in FIG. FIG. FIG. 6C is a view showing a state after the manufacturing process 2 in FIG. 5B, and is a cross-sectional view seen from the IV-IV direction of FIG. 5C.

The flow meter 1 according to an embodiment of the present invention is produced through the following steps.
First, as shown in FIG. 5A, the reinforcing member 21 is disposed on the outer peripheral surface so as to cover the outer peripheral surface of at least one end of the tubular member 11 (step 1).
Next, as shown in FIG.5 (b), the flow sensor 51 is arrange | positioned to the tubular member 11 (process 2).

In step 1, the reinforcing members 21 </ b> A, B, and C are arranged on the tubular member 11 via an adhesive 31 that is attached by the attaching device 200, for example. For example, Step 1- (A) in which the reinforcing member 21A is disposed on the tubular member 11, Step 1- (B) in which the reinforcing member 21B is disposed on the tubular member 11, and Step 1- in which the reinforcing member 21C is disposed on the tubular member 11. About (C), it implements in order of process 1- (A), process 1- (B), and process 1- (C). The positional relationship between the reinforcing member 21 and the tubular member 11 is the relationship shown in FIG. 6 (a) after the manufacturing step 1- (A), and after FIG. 6 (b) after the manufacturing step 1- (B). It is the relationship shown.
In this manner, the plurality of reinforcing members 21 are combined and bonded to each other so as to provide the opening O, and are arranged on the tubular member 11.

  Note that these steps may be the same. Moreover, each process may be implemented simultaneously, at least 2 process may be implemented simultaneously, and another process may be implemented at a different timing.

  Further, in the above description, the reinforcing member 21 has been described as being divided into three such as the reinforcing members 21A, B, and C, but the number of the reinforcing members 21 is not limited and may be one. Two or more may be used. Furthermore, the process which arrange | positions the reinforcement member 21 in the tubular member 11 can be easily implemented compared with the case where the reinforcement member 21 is divided | segmented into two or more.

Here, the merit of dividing and providing the reinforcing member 21 will be described.
FIG. 7 is a view showing a state after the manufacturing step 1- (B) in FIG. 5A, and is a view in the case where one or more grooves are formed in one or more reinforcing members arranged in the tubular member. It is. As shown in FIG. 7, a groove 80 is formed in one or more reinforcing members 21 arranged in the tubular member 11. For example, the groove 80 may be formed continuously from one end to the other end of the reinforcing member 21 or may be formed discontinuously. As shown in FIG. 7, the groove 80 is formed in the reinforcing member 21 in the region where the reinforcing member 21 is disposed on the tubular member 11 and the tubular member 11 is reinforced. By having the effect of thermal insulation, the influence of heat escaping to the reinforcing member 21 can be reduced, so that the sensor characteristics can be improved. Thus, when manufacturing the measuring apparatus 1 by arranging the reinforcing member 21 in which the groove 80 is formed on the tubular member 11, the measuring apparatus 1 can be easily manufactured by dividing the reinforcing member 21. Can do.

  In addition, when the reinforcing member 21 is disposed on the tubular member 11 via the adhesive, it is necessary to apply weight to the reinforcing member 21. When the reinforcing member 21 is one, the reinforcing member 21 is provided. Even when it is difficult to apply a uniform weight to each of the reinforcing members 21, the reinforcing members 21 can be uniformly weighted by having two or more reinforcing members 21, Each reinforcing member 21 can be appropriately arranged.

  Furthermore, as shown in FIGS. 5 and 6, for example, by arranging the reinforcing member 21 </ b> A so as to cover the entire upper half of the tubular member 11, the tubular member 11 can be reinforced against twisting or breaking.

  Furthermore, the attachment device 200 may be configured to attach the adhesive 31 to the reinforcing member 21 and the tubular member 11, or may be configured to adhere to at least one of the reinforcing member 21 and the tubular member 11. Good.

  In the above description, the step of disposing the reinforcing members 21A, B, and C on the tubular member 11 via the adhesive 31 has been described. However, it is not always necessary to use the adhesive 31, and instead of the adhesive 31, An auxiliary member, an attachment member, or the like that assists the placement of the reinforcing members 21A, B, and C on the tubular member 11 can also be used.

  5B, in FIG. 5B, the flow sensor 51 is disposed in the opening O formed by combining the plurality of reinforcing members 21 and bonding them so as to provide the opening O and disposing them on the tubular member 11. However, the flow sensor 51 is disposed on the tubular member 11. As shown in FIG. 5C, in the tubular member 11, all regions other than the region where the flow sensor 51 is disposed are covered with the reinforcing member 21, so that the strength of the tubular member 11 can be dramatically increased. . As shown in FIG. 6C, the flow sensor 51 may be disposed on the tubular member 11 via the adhesive 31, or the flow sensor 51 is disposed on the tubular member 11 instead of the adhesive 31. It is also possible to use an auxiliary member, a mounting member, or the like that assists.

(effect)
According to the present embodiment, the reinforcing member 21 disposed on the outer peripheral surface so that the measuring device covers the outer peripheral surface of at least one end of the tubular member 11, and the environmental sensor disposed on the outer peripheral surface of the tubular member 11, , The strength of the tubular member 11 can be reinforced, and the sensor sensitivity of the environmental sensor can be prevented from deteriorating, so that the strength of the tubular member 11 can be improved and the fluid A measuring device that can accurately measure the flow rate can be easily manufactured and provided.

Second Embodiment
In the second embodiment, a measuring device in which the reinforcing member 21 is disposed so as to cover only the outer peripheral surface of at least one end of the tubular member 11 will be described. Unless otherwise specified, the same components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  FIG. 8 is a side sectional view of a flow meter according to the second embodiment of the present invention. As shown in FIG. 8, in the flow meter 2, the reinforcing member 21 is disposed so as to cover only the outer peripheral surface of at least one end of the tubular member 11.

(effect)
As described above, the reinforcing member 21 of the flow meter 2 is disposed so as to cover only the outer peripheral surface of at least one end of the tubular member 11, and is more than the reinforcing member 21 used in the flow meter 1 of the first embodiment. A small amount. Therefore, according to this embodiment, in addition to the effect of 1st Embodiment, the manufacturing cost of a measuring apparatus can be reduced.

(Other embodiments)
The present invention is not limited to the first embodiment and the second embodiment, and can be combined in various ways, can be applied in a modified manner, and each component included in each embodiment is also It can be combined in various ways and can be applied in a modified manner. In each of the above embodiments, the flow meter was used as the measurement device and the flow sensor 51 was used as the environment sensor. For example, a calorimeter or a thermometer may be used.

The present invention can be described as in the following supplementary notes, but is not limited thereto.
(Appendix 1)
Arranging a reinforcing member on the outer peripheral surface so as to cover an outer peripheral surface of at least one end of the tubular member;
Placing an environmental sensor on the outer peripheral surface of the tubular member,
Manufacturing method of the measuring device.
(Appendix 2)
Arranging a plurality of reinforcing members on the outer peripheral surface of at least one end of the tubular member so as to be provided with openings;
Further comprising disposing the environmental sensor in the opening.
A method for manufacturing the measuring apparatus according to appendix 1.

1, 2 Flow meter 11 Tubular member 15 Tube 21 Reinforcement member 31 Adhesive 41 Body member 43, 47 Ferrule member 45, 49 Nut member 51 Flow sensor 71 Sensor housing 101 Substrate 102 Cavity 103 Insulating film 104 Heater 105 Upstream temperature measurement Resistance element 106 Temperature measuring resistance element 107 on the downstream side Ambient temperature sensor 200 Adhering device

Claims (3)

A tubular member;
A reinforcing member disposed on the outer peripheral surface so as to cover an outer peripheral surface of at least one end of the tubular member;
An environmental sensor disposed on the outer peripheral surface of the tubular member,
measuring device. A sensor housing;
The end covered with the reinforcing member is fixed to the sensor housing by a joint member;
The measuring apparatus according to claim 1. The environmental sensor is disposed in an opening formed in the reinforcing member.
The measuring apparatus according to claim 1 or 2.

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