JP2016113564A - Resin composition for encapsulation, semiconductor device, and structure - Google Patents
Resin composition for encapsulation, semiconductor device, and structure Download PDFInfo
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- JP2016113564A JP2016113564A JP2014254552A JP2014254552A JP2016113564A JP 2016113564 A JP2016113564 A JP 2016113564A JP 2014254552 A JP2014254552 A JP 2014254552A JP 2014254552 A JP2014254552 A JP 2014254552A JP 2016113564 A JP2016113564 A JP 2016113564A
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- Prior art keywords
- resin composition
- sealing
- sealing resin
- phenol
- composition according
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- 239000011342 resin composition Substances 0.000 title claims abstract description 106
- 239000004065 semiconductor Substances 0.000 title claims abstract description 81
- 238000005538 encapsulation Methods 0.000 title 1
- 238000007789 sealing Methods 0.000 claims abstract description 109
- 239000003822 epoxy resin Substances 0.000 claims abstract description 51
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 51
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 27
- 239000003086 colorant Substances 0.000 claims abstract description 26
- 239000003963 antioxidant agent Substances 0.000 claims abstract description 18
- 230000003078 antioxidant effect Effects 0.000 claims abstract description 18
- 239000011256 inorganic filler Substances 0.000 claims abstract description 17
- 229910003475 inorganic filler Inorganic materials 0.000 claims abstract description 17
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims abstract description 17
- 150000002989 phenols Chemical class 0.000 claims abstract description 11
- 150000003568 thioethers Chemical class 0.000 claims abstract description 10
- 239000003566 sealing material Substances 0.000 claims description 25
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 claims description 21
- -1 amine compounds Chemical class 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 19
- 239000005011 phenolic resin Substances 0.000 claims description 17
- 229920005989 resin Polymers 0.000 claims description 14
- 239000011347 resin Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 12
- 238000001721 transfer moulding Methods 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 8
- 229920003986 novolac Polymers 0.000 claims description 8
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 239000008187 granular material Substances 0.000 claims description 4
- 238000012546 transfer Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000003860 storage Methods 0.000 abstract description 18
- 150000001875 compounds Chemical class 0.000 abstract description 16
- 150000001412 amines Chemical class 0.000 abstract description 5
- 239000000047 product Substances 0.000 description 17
- 238000000465 moulding Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 239000002585 base Substances 0.000 description 10
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 9
- 239000002245 particle Substances 0.000 description 8
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 8
- 125000002529 biphenylenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3C12)* 0.000 description 6
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 6
- RSJKGSCJYJTIGS-UHFFFAOYSA-N undecane Chemical compound CCCCCCCCCCC RSJKGSCJYJTIGS-UHFFFAOYSA-N 0.000 description 6
- 125000004432 carbon atom Chemical group C* 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 125000004957 naphthylene group Chemical group 0.000 description 5
- 239000012321 sodium triacetoxyborohydride Substances 0.000 description 5
- 229930185605 Bisphenol Natural products 0.000 description 4
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 4
- BGYHLZZASRKEJE-UHFFFAOYSA-N [3-[3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoyloxy]-2,2-bis[3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoyloxymethyl]propyl] 3-(3,5-ditert-butyl-4-hydroxyphenyl)propanoate Chemical compound CC(C)(C)C1=C(O)C(C(C)(C)C)=CC(CCC(=O)OCC(COC(=O)CCC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)(COC(=O)CCC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)COC(=O)CCC=2C=C(C(O)=C(C=2)C(C)(C)C)C(C)(C)C)=C1 BGYHLZZASRKEJE-UHFFFAOYSA-N 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- 229940125904 compound 1 Drugs 0.000 description 4
- 238000000748 compression moulding Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 239000005350 fused silica glass Substances 0.000 description 4
- 150000002430 hydrocarbons Chemical group 0.000 description 4
- 150000004714 phosphonium salts Chemical class 0.000 description 4
- 239000000049 pigment Substances 0.000 description 4
- 238000006116 polymerization reaction Methods 0.000 description 4
- 238000007493 shaping process Methods 0.000 description 4
- 239000001993 wax Substances 0.000 description 4
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 3
- 235000010290 biphenyl Nutrition 0.000 description 3
- 239000004305 biphenyl Substances 0.000 description 3
- 239000000038 blue colorant Substances 0.000 description 3
- 238000004040 coloring Methods 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 3
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 3
- UHOKSCJSTAHBSO-UHFFFAOYSA-N indanthrone blue Chemical compound C1=CC=C2C(=O)C3=CC=C4NC5=C6C(=O)C7=CC=CC=C7C(=O)C6=CC=C5NC4=C3C(=O)C2=C1 UHOKSCJSTAHBSO-UHFFFAOYSA-N 0.000 description 3
- 239000012948 isocyanate Substances 0.000 description 3
- 239000006082 mold release agent Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000004843 novolac epoxy resin Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 150000003003 phosphines Chemical class 0.000 description 3
- 229920000768 polyamine Polymers 0.000 description 3
- 238000011417 postcuring Methods 0.000 description 3
- 239000001062 red colorant Substances 0.000 description 3
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 3
- 150000004756 silanes Chemical class 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000001060 yellow colorant Substances 0.000 description 3
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 2
- VNQNXQYZMPJLQX-UHFFFAOYSA-N 1,3,5-tris[(3,5-ditert-butyl-4-hydroxyphenyl)methyl]-1,3,5-triazinane-2,4,6-trione Chemical compound CC(C)(C)C1=C(O)C(C(C)(C)C)=CC(CN2C(N(CC=3C=C(C(O)=C(C=3)C(C)(C)C)C(C)(C)C)C(=O)N(CC=3C=C(C(O)=C(C=3)C(C)(C)C)C(C)(C)C)C2=O)=O)=C1 VNQNXQYZMPJLQX-UHFFFAOYSA-N 0.000 description 2
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 2
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 description 2
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 2
- AHDSRXYHVZECER-UHFFFAOYSA-N 2,4,6-tris[(dimethylamino)methyl]phenol Chemical compound CN(C)CC1=CC(CN(C)C)=C(O)C(CN(C)C)=C1 AHDSRXYHVZECER-UHFFFAOYSA-N 0.000 description 2
- RLHGFJMGWQXPBW-UHFFFAOYSA-N 2-hydroxy-3-(1h-imidazol-5-ylmethyl)benzamide Chemical compound NC(=O)C1=CC=CC(CC=2NC=NC=2)=C1O RLHGFJMGWQXPBW-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- XOUQAVYLRNOXDO-UHFFFAOYSA-N 2-tert-butyl-5-methylphenol Chemical compound CC1=CC=C(C(C)(C)C)C(O)=C1 XOUQAVYLRNOXDO-UHFFFAOYSA-N 0.000 description 2
- MWSKJDNQKGCKPA-UHFFFAOYSA-N 6-methyl-3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1CC(C)=CC2C(=O)OC(=O)C12 MWSKJDNQKGCKPA-UHFFFAOYSA-N 0.000 description 2
- RGCKGOZRHPZPFP-UHFFFAOYSA-N Alizarin Natural products C1=CC=C2C(=O)C3=C(O)C(O)=CC=C3C(=O)C2=C1 RGCKGOZRHPZPFP-UHFFFAOYSA-N 0.000 description 2
- MQJKPEGWNLWLTK-UHFFFAOYSA-N Dapsone Chemical compound C1=CC(N)=CC=C1S(=O)(=O)C1=CC=C(N)C=C1 MQJKPEGWNLWLTK-UHFFFAOYSA-N 0.000 description 2
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- 235000000177 Indigofera tinctoria Nutrition 0.000 description 2
- 239000004640 Melamine resin Substances 0.000 description 2
- 229920000877 Melamine resin Polymers 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000007983 Tris buffer Substances 0.000 description 2
- 229920001807 Urea-formaldehyde Polymers 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- VSVVZZQIUJXYQA-UHFFFAOYSA-N [3-(3-dodecylsulfanylpropanoyloxy)-2,2-bis(3-dodecylsulfanylpropanoyloxymethyl)propyl] 3-dodecylsulfanylpropanoate Chemical compound CCCCCCCCCCCCSCCC(=O)OCC(COC(=O)CCSCCCCCCCCCCCC)(COC(=O)CCSCCCCCCCCCCCC)COC(=O)CCSCCCCCCCCCCCC VSVVZZQIUJXYQA-UHFFFAOYSA-N 0.000 description 2
- FDLQZKYLHJJBHD-UHFFFAOYSA-N [3-(aminomethyl)phenyl]methanamine Chemical compound NCC1=CC=CC(CN)=C1 FDLQZKYLHJJBHD-UHFFFAOYSA-N 0.000 description 2
- 150000008065 acid anhydrides Chemical class 0.000 description 2
- HFVAFDPGUJEFBQ-UHFFFAOYSA-M alizarin red S Chemical compound [Na+].O=C1C2=CC=CC=C2C(=O)C2=C1C=C(S([O-])(=O)=O)C(O)=C2O HFVAFDPGUJEFBQ-UHFFFAOYSA-M 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 150000001409 amidines Chemical class 0.000 description 2
- IRERQBUNZFJFGC-UHFFFAOYSA-L azure blue Chemical compound [Na+].[Na+].[Na+].[Na+].[Na+].[Na+].[Na+].[Na+].[Al+3].[Al+3].[Al+3].[Al+3].[Al+3].[Al+3].[S-]S[S-].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-] IRERQBUNZFJFGC-UHFFFAOYSA-L 0.000 description 2
- XITRBUPOXXBIJN-UHFFFAOYSA-N bis(2,2,6,6-tetramethylpiperidin-4-yl) decanedioate Chemical compound C1C(C)(C)NC(C)(C)CC1OC(=O)CCCCCCCCC(=O)OC1CC(C)(C)NC(C)(C)C1 XITRBUPOXXBIJN-UHFFFAOYSA-N 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 239000007822 coupling agent Substances 0.000 description 2
- 229930003836 cresol Natural products 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 2
- QGBSISYHAICWAH-UHFFFAOYSA-N dicyandiamide Chemical compound NC(N)=NC#N QGBSISYHAICWAH-UHFFFAOYSA-N 0.000 description 2
- 238000002845 discoloration Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 239000003063 flame retardant Substances 0.000 description 2
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 2
- 239000000040 green colorant Substances 0.000 description 2
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 235000019239 indanthrene blue RS Nutrition 0.000 description 2
- 229940097275 indigo Drugs 0.000 description 2
- COHYTHOBJLSHDF-UHFFFAOYSA-N indigo powder Natural products N1C2=CC=CC=C2C(=O)C1=C1C(=O)C2=CC=CC=C2N1 COHYTHOBJLSHDF-UHFFFAOYSA-N 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 150000002513 isocyanates Chemical class 0.000 description 2
- 229940018564 m-phenylenediamine Drugs 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- NYGZLYXAPMMJTE-UHFFFAOYSA-M metanil yellow Chemical group [Na+].[O-]S(=O)(=O)C1=CC=CC(N=NC=2C=CC(NC=3C=CC=CC=3)=CC=2)=C1 NYGZLYXAPMMJTE-UHFFFAOYSA-M 0.000 description 2
- CXKWCBBOMKCUKX-UHFFFAOYSA-M methylene blue Chemical compound [Cl-].C1=CC(N(C)C)=CC2=[S+]C3=CC(N(C)C)=CC=C3N=C21 CXKWCBBOMKCUKX-UHFFFAOYSA-M 0.000 description 2
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 239000001061 orange colorant Substances 0.000 description 2
- 150000007524 organic acids Chemical class 0.000 description 2
- 238000010525 oxidative degradation reaction Methods 0.000 description 2
- 125000004437 phosphorous atom Chemical group 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 150000004053 quinones Chemical class 0.000 description 2
- 239000002516 radical scavenger Substances 0.000 description 2
- 229920003987 resole Polymers 0.000 description 2
- PYWVYCXTNDRMGF-UHFFFAOYSA-N rhodamine B Chemical compound [Cl-].C=12C=CC(=[N+](CC)CC)C=C2OC2=CC(N(CC)CC)=CC=C2C=1C1=CC=CC=C1C(O)=O PYWVYCXTNDRMGF-UHFFFAOYSA-N 0.000 description 2
- 150000003839 salts Chemical group 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- 235000014692 zinc oxide Nutrition 0.000 description 2
- NWPIOULNZLJZHU-UHFFFAOYSA-N (1,2,2,6,6-pentamethylpiperidin-4-yl) 2-methylprop-2-enoate Chemical compound CN1C(C)(C)CC(OC(=O)C(C)=C)CC1(C)C NWPIOULNZLJZHU-UHFFFAOYSA-N 0.000 description 1
- QGKMIGUHVLGJBR-UHFFFAOYSA-M (4z)-1-(3-methylbutyl)-4-[[1-(3-methylbutyl)quinolin-1-ium-4-yl]methylidene]quinoline;iodide Chemical compound [I-].C12=CC=CC=C2N(CCC(C)C)C=CC1=CC1=CC=[N+](CCC(C)C)C2=CC=CC=C12 QGKMIGUHVLGJBR-UHFFFAOYSA-M 0.000 description 1
- NWHNXXMYEICZAT-UHFFFAOYSA-N 1,2,2,6,6-pentamethylpiperidin-4-ol Chemical compound CN1C(C)(C)CC(O)CC1(C)C NWHNXXMYEICZAT-UHFFFAOYSA-N 0.000 description 1
- HHMAHORWXWSISL-UHFFFAOYSA-N 1,2-bis(ethenoxy)ethane;3-(3-tert-butyl-4-hydroxy-5-methylphenyl)propanoic acid Chemical compound C=COCCOC=C.CC1=CC(CCC(O)=O)=CC(C(C)(C)C)=C1O.CC1=CC(CCC(O)=O)=CC(C(C)(C)C)=C1O HHMAHORWXWSISL-UHFFFAOYSA-N 0.000 description 1
- OUPZKGBUJRBPGC-UHFFFAOYSA-N 1,3,5-tris(oxiran-2-ylmethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound O=C1N(CC2OC2)C(=O)N(CC2OC2)C(=O)N1CC1CO1 OUPZKGBUJRBPGC-UHFFFAOYSA-N 0.000 description 1
- KNMQFBWXSICVQC-UHFFFAOYSA-N 1-amino-4-(4-amino-9,10-dioxoanthracen-1-yl)anthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C(C=1C=3C(=O)C4=CC=CC=C4C(=O)C=3C(N)=CC=1)=CC=C2N KNMQFBWXSICVQC-UHFFFAOYSA-N 0.000 description 1
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 1
- VDVUCLWJZJHFAV-UHFFFAOYSA-N 2,2,6,6-tetramethylpiperidin-4-ol Chemical compound CC1(C)CC(O)CC(C)(C)N1 VDVUCLWJZJHFAV-UHFFFAOYSA-N 0.000 description 1
- HOKCZAUZPYGTJG-UHFFFAOYSA-N 2-(2,2,6,6-tetramethylpiperidin-4-yl)hexadecanoic acid Chemical compound CCCCCCCCCCCCCCC(C(O)=O)C1CC(C)(C)NC(C)(C)C1 HOKCZAUZPYGTJG-UHFFFAOYSA-N 0.000 description 1
- PYHYPLDLZPFMJN-UHFFFAOYSA-N 2-(2,2,6,6-tetramethylpiperidin-4-yl)octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCC(C(O)=O)C1CC(C)(C)NC(C)(C)C1 PYHYPLDLZPFMJN-UHFFFAOYSA-N 0.000 description 1
- ZTISORAUJJGACZ-UHFFFAOYSA-N 2-[(2-methoxy-4-nitrophenyl)diazenyl]-n-(2-methoxyphenyl)-3-oxobutanamide Chemical compound COC1=CC=CC=C1NC(=O)C(C(C)=O)N=NC1=CC=C([N+]([O-])=O)C=C1OC ZTISORAUJJGACZ-UHFFFAOYSA-N 0.000 description 1
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- IYMSIPPWHNIMGE-UHFFFAOYSA-N silylurea Chemical compound NC(=O)N[SiH3] IYMSIPPWHNIMGE-UHFFFAOYSA-N 0.000 description 1
- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical compound C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 description 1
- 235000021286 stilbenes Nutrition 0.000 description 1
- 125000000446 sulfanediyl group Chemical group *S* 0.000 description 1
- TXDNPSYEJHXKMK-UHFFFAOYSA-N sulfanylsilane Chemical compound S[SiH3] TXDNPSYEJHXKMK-UHFFFAOYSA-N 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- WUPCFMITFBVJMS-UHFFFAOYSA-N tetrakis(1,2,2,6,6-pentamethylpiperidin-4-yl) butane-1,2,3,4-tetracarboxylate Chemical compound C1C(C)(C)N(C)C(C)(C)CC1OC(=O)CC(C(=O)OC1CC(C)(C)N(C)C(C)(C)C1)C(C(=O)OC1CC(C)(C)N(C)C(C)(C)C1)CC(=O)OC1CC(C)(C)N(C)C(C)(C)C1 WUPCFMITFBVJMS-UHFFFAOYSA-N 0.000 description 1
- JOUDBUYBGJYFFP-FOCLMDBBSA-N thioindigo Chemical compound S\1C2=CC=CC=C2C(=O)C/1=C1/C(=O)C2=CC=CC=C2S1 JOUDBUYBGJYFFP-FOCLMDBBSA-N 0.000 description 1
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- JEVGKYBUANQAKG-UHFFFAOYSA-N victoria blue R Chemical compound [Cl-].C12=CC=CC=C2C(=[NH+]CC)C=CC1=C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 JEVGKYBUANQAKG-UHFFFAOYSA-N 0.000 description 1
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Images
Landscapes
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Abstract
【課題】外観および高温保管特性のバランスに優れた半導体装置を実現できる封止用樹脂組成物を提供すること。【解決手段】本発明の封止用樹脂組成物は、エポキシ樹脂(A)と、無機充填剤(B)と、硬化剤(C)と、着色剤(D)と、酸化防止剤(E)と、を含む。そして、酸化防止剤(E)は、1分子中にヒンダードフェノール基を2個以上有するヒンダードフェノール系化合物、ヒンダードアミン系化合物およびチオエーテル系化合物から選択される一種または二種以上を含む。【選択図】なしTo provide a sealing resin composition capable of realizing a semiconductor device having an excellent balance between appearance and high-temperature storage characteristics. The sealing resin composition of the present invention comprises an epoxy resin (A), an inorganic filler (B), a curing agent (C), a colorant (D), and an antioxidant (E). And including. And antioxidant (E) contains the 1 type (s) or 2 or more types selected from the hindered phenol type compound, hindered amine type compound, and thioether type compound which have 2 or more of hindered phenol groups in 1 molecule. [Selection figure] None
Description
本発明は、封止用樹脂組成物、半導体装置、および構造体に関する。 The present invention relates to a sealing resin composition, a semiconductor device, and a structure.
半導体装置は、例えば、基板上に搭載された半導体素子を、封止用樹脂組成物を用いて封止成形することにより形成される。このような封止用樹脂組成物として、例えば、エポキシ樹脂を含む樹脂組成物が用いられている。 The semiconductor device is formed, for example, by sealing and molding a semiconductor element mounted on a substrate using a sealing resin composition. As such a sealing resin composition, for example, a resin composition containing an epoxy resin is used.
特許文献1(特開2011−89096号公報)には、エポキシ樹脂、硬化剤、および着色剤を必須成分とする封止用樹脂組成物に関する技術が記載されている。 Patent Document 1 (Japanese Patent Application Laid-Open No. 2011-89096) describes a technique related to a sealing resin composition containing an epoxy resin, a curing agent, and a colorant as essential components.
本発明者らの検討によると、従来の封止用樹脂組成物において、黒以外の着色剤を添加させると、半導体素子を封止するときや、得られた半導体装置をリフロー処理するときに、封止用樹脂組成物により形成される封止材が酸化して色が変化してしまい、半導体装置の外観が悪化してしまう場合があることが明らかになった。
また、本発明者らの検討によると、このような色の変化が大きい封止材を用いた半導体装置は高温保管特性に劣ることが明らかになった。
According to the study by the present inventors, in a conventional sealing resin composition, when a colorant other than black is added, when sealing a semiconductor element or when reflowing the obtained semiconductor device, It has been clarified that the sealing material formed by the sealing resin composition is oxidized to change its color and the appearance of the semiconductor device may be deteriorated.
Further, according to the study by the present inventors, it has been clarified that a semiconductor device using a sealing material having such a large color change is inferior in high-temperature storage characteristics.
本発明によれば、
エポキシ樹脂(A)と、無機充填剤(B)と、硬化剤(C)と、着色剤(D)と、酸化防止剤(E)と、を含む封止用樹脂組成物であって、
前記酸化防止剤(E)が、1分子中にヒンダードフェノール基を2個以上有するヒンダードフェノール系化合物、ヒンダードアミン系化合物およびチオエーテル系化合物から選択される一種または二種以上を含む封止用樹脂組成物が提供される。
According to the present invention,
A sealing resin composition comprising an epoxy resin (A), an inorganic filler (B), a curing agent (C), a colorant (D), and an antioxidant (E),
Sealing resin in which the antioxidant (E) contains one or more selected from hindered phenol compounds, hindered amine compounds and thioether compounds having two or more hindered phenol groups in one molecule A composition is provided.
また、本発明によれば、
基材と、
上記基材の一面上に搭載された半導体素子と、
上記封止用樹脂組成物の硬化物により構成され、かつ上記半導体素子と、上記基材のうちの上記一面と、を封止する封止材と、
を備える半導体装置が提供される。
Moreover, according to the present invention,
A substrate;
A semiconductor element mounted on one surface of the substrate;
A sealing material that is composed of a cured product of the sealing resin composition and seals the semiconductor element and the one surface of the base material;
A semiconductor device is provided.
また、本発明によれば、
基材と、
上記基材の一面上に搭載された複数の半導体素子と、
上記封止用樹脂組成物の硬化物により構成され、かつ上記複数の半導体素子と、上記基材のうちの上記一面と、を封止する封止材と、
を備える構造体が提供される。
Moreover, according to the present invention,
A substrate;
A plurality of semiconductor elements mounted on one surface of the substrate;
A sealing material configured by a cured product of the sealing resin composition and sealing the plurality of semiconductor elements and the one surface of the base material;
A structure is provided.
本発明によれば、外観および高温保管特性のバランスに優れた半導体装置を実現できる封止用樹脂組成物を提供することができる。 ADVANTAGE OF THE INVENTION According to this invention, the resin composition for sealing which can implement | achieve the semiconductor device excellent in the balance of an external appearance and a high temperature storage characteristic can be provided.
以下、実施の形態について、図面を用いて説明する。尚、すべての図面において、同様な構成要素には同様の符号を付し、適宜説明を省略する。また、図は概略図であり、実際の寸法比率とは必ずしも一致していない。また、数値範囲の「A〜B」は特に断りがなければ、「A以上B以下」を表す。 Hereinafter, embodiments will be described with reference to the drawings. In all the drawings, the same reference numerals are given to the same components, and the description will be omitted as appropriate. Moreover, the figure is a schematic diagram and does not necessarily match the actual dimensional ratio. Also, “A to B” in the numerical range represents “A or more and B or less” unless otherwise specified.
本実施形態に係る封止用樹脂組成物は、エポキシ樹脂(A)と、無機充填剤(B)と、硬化剤(C)と、着色剤(D)と、酸化防止剤(E)と、を含む。そして、酸化防止剤(E)は、1分子中にヒンダードフェノール基を2個以上有するヒンダードフェノール系化合物、ヒンダードアミン系化合物およびチオエーテル系化合物から選択される一種または二種以上を含む。 The sealing resin composition according to this embodiment includes an epoxy resin (A), an inorganic filler (B), a curing agent (C), a colorant (D), an antioxidant (E), including. And antioxidant (E) contains the 1 type (s) or 2 or more types selected from the hindered phenol type compound, hindered amine type compound, and thioether type compound which have 2 or more of hindered phenol groups in 1 molecule.
本発明者は、封止用樹脂組成物が酸化防止剤(E)として1分子中にヒンダードフェノール基を2個以上有するヒンダードフェノール系化合物、ヒンダードアミン系化合物およびチオエーテル系化合物から選択される一種または二種以上を含む場合に、着色剤(D)を含む封止用樹脂組成物中の各成分の酸化劣化を効果的に抑制できることを新たに知見した。
本実施形態では、着色剤(D)を含む封止用樹脂組成物中に酸化防止剤(E)として特定の化合物を含有させることにより、着色剤を含む封止用樹脂組成物中の各成分の酸化劣化が抑制され、色の変化が少ない封止用樹脂組成物を実現することができる。これにより、外観および高温保管特性のバランスに優れた半導体装置を実現できる。
The present inventor is a kind selected from a hindered phenol compound, a hindered amine compound and a thioether compound in which the sealing resin composition has two or more hindered phenol groups in one molecule as an antioxidant (E). Or when it included 2 or more types, it discovered newly that the oxidative degradation of each component in the resin composition for sealing containing a coloring agent (D) can be suppressed effectively.
In this embodiment, each component in the resin composition for sealing containing a coloring agent is made to contain a specific compound as antioxidant (E) in the resin composition for sealing containing a coloring agent (D). It is possible to realize a sealing resin composition in which the oxidation deterioration of the resin is suppressed and the color change is small. Thereby, a semiconductor device having an excellent balance between appearance and high-temperature storage characteristics can be realized.
以下、本実施形態に係る封止用樹脂組成物、半導体装置100、および構造体102について詳細に説明する。
Hereinafter, the sealing resin composition, the
まず、封止用樹脂組成物について説明する。
封止用樹脂組成物は、基材上に搭載された半導体素子を封止する封止材を形成するために用いられる。封止用樹脂組成物を用いた封止成形は、特に限定されないが、例えば、トランスファー成形法、または圧縮成形法により行うことができる。
封止用樹脂組成物は、例えば、タブレット状または粉粒体である。封止用樹脂組成物がタブレット状である場合、例えば、トランスファー成形法を用いて封止用樹脂組成物を成形することができる。また、封止用樹脂組成物が粉粒体である場合には、例えば、圧縮成形法を用いて封止用樹脂組成物を成形することができる。封止用樹脂組成物が粉粒体であるとは、粉末状または顆粒状のいずれかである場合を指す。
基材は、例えば、インターポーザ等の配線基板、またはリードフレームである。また、半導体素子は、ワイヤボンディングまたはフリップチップ接続等により、基材に電気的に接続される。
First, the sealing resin composition will be described.
The encapsulating resin composition is used to form an encapsulant that encapsulates a semiconductor element mounted on a substrate. The sealing molding using the sealing resin composition is not particularly limited, and can be performed by, for example, a transfer molding method or a compression molding method.
The sealing resin composition is, for example, a tablet or a granular material. When the sealing resin composition is in the form of a tablet, for example, the sealing resin composition can be molded using a transfer molding method. Moreover, when the resin composition for sealing is a granular material, the resin composition for sealing can be shape | molded using the compression molding method, for example. That the resin composition for sealing is a granular material refers to the case where it is either powdery or granular.
The base material is, for example, a wiring board such as an interposer or a lead frame. The semiconductor element is electrically connected to the base material by wire bonding or flip chip connection.
封止用樹脂組成物を用いた封止成形により半導体素子を封止して得られる半導体装置としては、特に限定されないが、例えば、QFP(Quad Flat Package)、SOP(Small Outline Package)、BGA(Ball Grid Array)、CSP(Chip Size Package)、QFN(Quad Flat Non−leaded Package)、SON(Small Outline Non−leaded Package)、LF−BGA(Lead Flame BGA)等が挙げられる。
また、本実施形態に係る封止用樹脂組成物は、近年これらのパッケージの成形に多く適用されるMAP(Mold Array Package)成形により形成される構造体にも適用できる。この場合、基材上に搭載される複数の半導体素子を、封止用樹脂組成物を用いて一括して封止することにより上記構造体が得られる。
A semiconductor device obtained by sealing a semiconductor element by sealing molding using a sealing resin composition is not particularly limited. For example, QFP (Quad Flat Package), SOP (Small Outline Package), BGA (BGA) Ball Grid Array), CSP (Chip Size Package), QFN (Quad Flat Non-Leaded Package), SON (Small Outline Non-Leaded Package), LF-BGA (Lead Frame BGA) and the like.
The sealing resin composition according to the present embodiment can also be applied to a structure formed by MAP (Mold Array Package) molding, which is often applied to molding of these packages in recent years. In this case, the said structure is obtained by sealing the several semiconductor element mounted on a base material collectively using the resin composition for sealing.
また、上記半導体素子としては、例えば、集積回路、大規模集積回路、トランジスタ、サイリスタ、ダイオード、固体撮像素子等が挙げられるが、これらに限定されない。なお、本実施形態に係る封止用樹脂組成物の封止対象となる半導体素子は、受光素子および発光素子(発光ダイオード等)等の光半導体素子を除く、いわゆる、光の入出を伴わない素子をいう。 Examples of the semiconductor element include, but are not limited to, an integrated circuit, a large-scale integrated circuit, a transistor, a thyristor, a diode, and a solid-state imaging element. The semiconductor element to be encapsulated by the encapsulating resin composition according to the present embodiment is a so-called element that does not involve light input / output, excluding optical semiconductor elements such as a light receiving element and a light emitting element (such as a light emitting diode). Say.
封止用樹脂組成物は、エポキシ樹脂(A)と、無機充填剤(B)と、硬化剤(C)と、着色剤(D)と、酸化防止剤(E)と、を含む。そして、酸化防止剤(E)は、1分子中にヒンダードフェノール基を2個以上有するヒンダードフェノール系化合物、ヒンダードアミン系化合物およびチオエーテル系化合物から選択される一種または二種以上を含む。これにより、外観および高温保管特性のバランスに優れた半導体装置を得ることが可能な封止用樹脂組成物を実現することができる。 The sealing resin composition includes an epoxy resin (A), an inorganic filler (B), a curing agent (C), a colorant (D), and an antioxidant (E). And antioxidant (E) contains the 1 type (s) or 2 or more types selected from the hindered phenol type compound, hindered amine type compound, and thioether type compound which have 2 or more of hindered phenol groups in 1 molecule. Thereby, the resin composition for sealing which can obtain the semiconductor device excellent in the balance of an external appearance and a high temperature storage characteristic is realizable.
本実施形態に係る封止用樹脂組成物により形成される封止材は、黒色以外の色に着色していることが好ましい。具体的には、低圧トランスファー成形機を用いて、金型温度175℃、注入圧力9.8MPa、硬化時間300秒の条件で、上記封止用樹脂組成物を金型にトランスファー成形し、直径50mm、厚さ3mmの封止用樹脂組成物の硬化物を作製したとき、上記硬化物の、CIE1976L*a*b*表色系で規定される測色値L*が30以上であることが好ましい。
黒色に着色している、あるいは上記測色値L*が上記下限値未満の封止材は、封止用樹脂組成物を構成する各成分の酸化劣化等が起きても外観の色の変化がほとんど起きないため、半導体装置の外観不良の課題は生じにくい。そのため、本実施形態において、封止用樹脂組成物が黒色以外の色に着色しているとき、あるいは上記測色値L*が上記下限値以上であるときに、本発明の効果をより効果的に得ることができる。
ここで、測色値L*が30以上80未満の場合は、彩度C*が7以上であるとき、半導体装置の外観不良の課題が特に生じやすいため、本発明の効果をより効果的に得ることができる。ここで、C*は{(a*)2+(b*)2}1/2により算出される。
It is preferable that the sealing material formed with the sealing resin composition according to the present embodiment is colored in a color other than black. Specifically, using a low-pressure transfer molding machine, the above resin composition for sealing was transfer molded to a mold under the conditions of a mold temperature of 175 ° C., an injection pressure of 9.8 MPa, and a curing time of 300 seconds, and the diameter was 50 mm. When a cured product of the sealing resin composition having a thickness of 3 mm is produced, the cured product preferably has a colorimetric value L * defined by the CIE 1976 L * a * b * color system of 30 or more. .
The sealing material colored in black or having the colorimetric value L * less than the lower limit value may change the color of the appearance even if the components constituting the sealing resin composition undergo oxidative degradation or the like. Since the problem hardly occurs, the problem of poor appearance of the semiconductor device hardly occurs. Therefore, in this embodiment, when the sealing resin composition is colored in a color other than black, or when the colorimetric value L * is equal to or higher than the lower limit, the effect of the present invention is more effective. Can get to.
Here, when the colorimetric value L * is 30 or more and less than 80, when the saturation C * is 7 or more, the problem of the appearance defect of the semiconductor device is particularly likely to occur. Can be obtained. Here, C * is calculated by {(a * ) 2 + (b * ) 2 } 1/2 .
本実施形態に係る封止用樹脂組成物は、通常、非透明性の硬化物を与える樹脂組成物である。ここで、非透明性の硬化物とは、具体的には、低圧トランスファー成形機を用いて、金型温度175℃、注入圧力9.8MPa、硬化時間300秒の条件で、上記封止用樹脂組成物を金型にトランスファー成形し、直径50mm、厚さ3mmの封止用樹脂組成物の硬化物を作製したとき、上記硬化物の膜厚方向における波長400nmでの光線透過率が好ましくは50%以下、より好ましくは25%以下、特に好ましくは10%以下であるものを言う。光線透過率は、例えば、紫外−可視光分光光度計を用いて測定する。 The sealing resin composition according to this embodiment is usually a resin composition that gives a non-transparent cured product. Here, the non-transparent cured product specifically refers to the above sealing resin using a low-pressure transfer molding machine under conditions of a mold temperature of 175 ° C., an injection pressure of 9.8 MPa, and a curing time of 300 seconds. When the composition is transfer molded into a mold to produce a cured resin composition having a diameter of 50 mm and a thickness of 3 mm, the light transmittance at a wavelength of 400 nm in the film thickness direction of the cured product is preferably 50. % Or less, more preferably 25% or less, particularly preferably 10% or less. The light transmittance is measured using, for example, an ultraviolet-visible light spectrophotometer.
(エポキシ樹脂(A))
本実施形態において、エポキシ樹脂(A)としては、例えば、ビフェニル型エポキシ樹脂;ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、テトラメチルビスフェノールF型エポキシ樹脂等のビスフェノール型エポキシ樹脂;スチルベン型エポキシ樹脂;フェノールノボラック型エポキシ樹脂、クレゾールノボラック型エポキシ樹脂等のノボラック型エポキシ樹脂;トリフェノールメタン型エポキシ樹脂、アルキル変性トリフェノールメタン型エポキシ樹脂等の多官能エポキシ樹脂;フェニレン骨格および/またはビフェニレン骨格を有するフェノールアラルキル型エポキシ樹脂、フェニレン骨格および/またはビフェニレン骨格を有するナフトールアラルキル型エポキシ樹脂等のフェノールアラルキル型エポキシ樹脂;ジヒドロキシナフタレン型エポキシ樹脂、ジヒドロキシナフタレンの2量体をグリシジルエーテル化して得られるエポキシ樹脂等のナフトール型エポキシ樹脂;トリグリシジルイソシアヌレート、モノアリルジグリシジルイソシアヌレート等のトリアジン核含有エポキシ樹脂;ジシクロペンタジエン変性フェノール型エポキシ樹脂等の有橋環状炭化水素化合物変性フェノール型エポキシ樹脂が挙げられ、これらは1種類を単独で用いても2種類以上を併用してもよい。
これらの中でも、外観および高温保管特性のバランスにより一層優れた半導体装置を実現できる観点から、ビスフェノール型エポキシ樹脂、ビフェニル型エポキシ樹脂およびフェノールアラルキル型エポキシ樹脂からなる群から選択される一種または二種以上を含むことが好ましい。
(Epoxy resin (A))
In this embodiment, examples of the epoxy resin (A) include biphenyl type epoxy resins; bisphenol type epoxy resins such as bisphenol A type epoxy resins, bisphenol F type epoxy resins, and tetramethylbisphenol F type epoxy resins; stilbene type epoxy resins. A novolac epoxy resin such as a phenol novolac epoxy resin and a cresol novolac epoxy resin; a polyfunctional epoxy resin such as a triphenolmethane epoxy resin and an alkyl-modified triphenolmethane epoxy resin; a phenylene skeleton and / or a biphenylene skeleton Phenol aralkyl type epoxy resins, phenol aralkyl type epoxy resins such as naphthol aralkyl type epoxy resins having a phenylene skeleton and / or a biphenylene skeleton Dihydroxynaphthalene-type epoxy resins, naphthol-type epoxy resins such as epoxy resins obtained by glycidyl etherification of dihydroxynaphthalene dimers; triazine nucleus-containing epoxy resins such as triglycidyl isocyanurate and monoallyl diglycidyl isocyanurate; dicyclopentadiene Examples include bridged cyclic hydrocarbon compound-modified phenol type epoxy resins such as modified phenol type epoxy resins, and these may be used alone or in combination of two or more.
Among these, one or two or more selected from the group consisting of bisphenol-type epoxy resins, biphenyl-type epoxy resins and phenol-aralkyl-type epoxy resins from the viewpoint of realizing a more excellent semiconductor device due to the balance of appearance and high-temperature storage characteristics It is preferable to contain.
エポキシ樹脂(A)としては、外観および高温保管特性のバランスにより一層優れた半導体装置を実現できる観点から、下記式(1)で表されるフェノールアラルキル型エポキシ樹脂、下記式(2)で表されるビフェニル型エポキシ樹脂、および下記式(3)で表されるビスフェノール型エポキシ樹脂からなる群から選択される少なくとも1種を含むことが特に好ましい。 As the epoxy resin (A), a phenol aralkyl type epoxy resin represented by the following formula (1), represented by the following formula (2), from the viewpoint of realizing a more excellent semiconductor device due to a balance between appearance and high-temperature storage characteristics. It is particularly preferable to include at least one selected from the group consisting of a biphenyl type epoxy resin and a bisphenol type epoxy resin represented by the following formula (3).
本実施形態において、封止用樹脂組成物中におけるエポキシ樹脂(A)の含有量は、封止用樹脂組成物全体を100質量%としたとき、2質量%以上であることが好ましく、3質量%以上であることがより好ましく、4質量%以上であることが特に好ましい。エポキシ樹脂(A)の含有量を上記下限値以上とすることにより、成形時において、十分な流動性を実現し、充填性や成形性の向上を図ることができる。
一方で、封止用樹脂組成物中におけるエポキシ樹脂(A)の含有量は、封止用樹脂組成物全体を100質量%としたとき、40質量%以下であることが好ましく、30質量%以下であることがより好ましく、15質量%以下であることが特に好ましい。エポキシ樹脂(A)の含有量を上記上限値以下とすることにより、封止用樹脂組成物を用いて形成される封止材を備える半導体装置について、耐湿信頼性や耐リフロー性を向上させることができる。
In the present embodiment, the content of the epoxy resin (A) in the sealing resin composition is preferably 2% by mass or more when the entire sealing resin composition is 100% by mass, and preferably 3% by mass. % Or more is more preferable, and 4% by mass or more is particularly preferable. By making content of an epoxy resin (A) more than the said lower limit, sufficient fluidity | liquidity can be implement | achieved at the time of shaping | molding, and the improvement of a fillability or a moldability can be aimed at.
On the other hand, the content of the epoxy resin (A) in the encapsulating resin composition is preferably 40% by mass or less, and 30% by mass or less when the entire encapsulating resin composition is 100% by mass. Is more preferable, and it is especially preferable that it is 15 mass% or less. Improve moisture resistance reliability and reflow resistance for a semiconductor device including a sealing material formed using a sealing resin composition by setting the content of the epoxy resin (A) to the upper limit value or less. Can do.
(無機充填剤(B))
本実施形態において、無機充填剤(B)としては、一般的に半導体封止用樹脂組成物に使用されているものを用いることができる。例えば、溶融シリカ、結晶シリカ等のシリカ、アルミナ、タルク、酸化チタン、窒化珪素、窒化アルミニウム等が挙げられる。これらの中でも、汎用性に優れている観点から、シリカを用いることが好ましく、溶融シリカを用いることがより好ましい。また、無機充填剤(B)は、球状であることが好ましく、さらには球状シリカであることが好ましい。これらの無機充填剤(B)は、1種を単独で用いてもよく、2種以上を併用してもよい。
これにより、成形時における封止用樹脂組成物の流動性を向上させ、成形安定性の向上に寄与することができる。
(Inorganic filler (B))
In this embodiment, what is generally used for the resin composition for semiconductor sealing can be used as an inorganic filler (B). Examples thereof include silica such as fused silica and crystalline silica, alumina, talc, titanium oxide, silicon nitride, aluminum nitride, and the like. Among these, from the viewpoint of excellent versatility, it is preferable to use silica, and it is more preferable to use fused silica. Further, the inorganic filler (B) is preferably spherical, and more preferably spherical silica. These inorganic fillers (B) may be used individually by 1 type, and may use 2 or more types together.
Thereby, the fluidity | liquidity of the resin composition for sealing at the time of shaping | molding can be improved, and it can contribute to the improvement of shaping | molding stability.
本実施形態において、封止用樹脂組成物中における無機充填剤(B)の含有量は、封止用樹脂組成物全体を100質量%としたとき、50質量%以上であることが好ましく、70質量%以上であることがより好ましく、80質量%以上であることが特に好ましい。無機充填剤(B)の含有量を上記下限値以上とすることにより、封止用樹脂組成物を用いて形成される封止材の低吸湿性および低熱膨張性を向上させ、得られる半導体装置の耐湿信頼性や耐リフロー性をより効果的に向上させることができる。
一方で、封止用樹脂組成物中における無機充填剤(B)の含有量は、封止用樹脂組成物全体を100質量%としたとき、95質量%以下であることが好ましく、93質量%以下であることがより好ましく、90質量%以下であることが特に好ましい。無機充填剤(B)の含有量を上記上限値以下とすることにより、封止用樹脂組成物の成形時における流動性や充填性をより効果的に向上させることが可能となる。
In the present embodiment, the content of the inorganic filler (B) in the encapsulating resin composition is preferably 50% by mass or more when the entire encapsulating resin composition is 100% by mass, 70 It is more preferably at least mass%, particularly preferably at least 80 mass%. By setting the content of the inorganic filler (B) to the above lower limit value or more, the semiconductor device obtained by improving the low hygroscopicity and low thermal expansion of the sealing material formed using the sealing resin composition The moisture resistance reliability and reflow resistance can be improved more effectively.
On the other hand, the content of the inorganic filler (B) in the sealing resin composition is preferably 95% by mass or less, and 93% by mass when the entire sealing resin composition is 100% by mass. More preferably, it is more preferably 90% by mass or less. By making content of an inorganic filler (B) below the said upper limit, the fluidity | liquidity and filling property at the time of shaping | molding of the resin composition for sealing can be improved more effectively.
無機充填剤(B)の平均粒径D50は、0.01μm以上50μm以下であることが好ましく、0.1μm以上30μm以下であることがより好ましい。平均粒径D50を上記下限値以上とすることにより、封止用樹脂組成物の流動性を良好なものとし、成形性をより効果的に向上させることが可能となる。また、平均粒径D50を上記上限値以下とすることにより、ゲート詰まり等が生じることを確実に抑制できる。なお、平均粒径D50は、市販のレーザー式粒度分布計(例えば、島津製作所社製、SALD−7000)で測定したときの平均粒径である。 The average particle diameter D 50 of the inorganic filler (B) is preferably 0.01 μm or more and 50 μm or less, and more preferably 0.1 μm or more and 30 μm or less. By the average particle diameter D 50 of less than the above lower limit, the fluidity of the encapsulating resin composition is made excellent, it is possible to improve the formability more effectively. Further, by the average particle diameter D 50 and more than the above upper limit can reliably prevent the gate clogging occurs. The average particle diameter D 50 is a commercially available laser particle size distribution analyzer (e.g., manufactured by Shimadzu Corporation, SALD-7000) is the average particle size as measured by.
・
(硬化剤(C))
本実施形態において、硬化剤(C)としては、例えば、重付加型の硬化剤、触媒型の硬化剤、縮合型の硬化剤の3タイプに大別することができる。
重付加型の硬化剤としては、例えば、ジエチレントリアミン(DETA)、トリエチレンテトラミン(TETA)、メタキシレリレンジアミン(MXDA)等の脂肪族ポリアミン、ジアミノジフェニルメタン(DDM)、m−フェニレンジアミン(MPDA)、ジアミノジフェニルスルホン(DDS)等の芳香族ポリアミンのほか、ジシアンジアミド(DICY)、有機酸ジヒドララジド等を含むポリアミン化合物;ヘキサヒドロ無水フタル酸(HHPA)、メチルテトラヒドロ無水フタル酸(MTHPA)等の脂環族酸無水物、無水トリメリット酸(TMA)、無水ピロメリット酸(PMDA)、ベンゾフェノンテトラカルボン酸(BTDA)等の芳香族酸無水物等を含む酸無水物;フェノール樹脂系硬化剤;ポリサルファイド、チオエステル、チオエーテル等のポリメルカプタン化合物;イソシアネートプレポリマー、ブロック化イソシアネート等のイソシアネート化合物;カルボン酸含有ポリエステル樹脂等の有機酸類等が挙げられる。
・
(Curing agent (C))
In this embodiment, as a hardening | curing agent (C), it can divide roughly into three types, for example, a polyaddition type hardening | curing agent, a catalyst type hardening | curing agent, and a condensation type hardening | curing agent.
Examples of polyaddition type curing agents include aliphatic polyamines such as diethylenetriamine (DETA), triethylenetetramine (TETA), and metaxylylene diamine (MXDA), diaminodiphenylmethane (DDM), and m-phenylenediamine (MPDA). In addition to aromatic polyamines such as diaminodiphenylsulfone (DDS), polyamine compounds containing dicyandiamide (DICY), organic acid dihydrazide, etc .; alicyclics such as hexahydrophthalic anhydride (HHPA), methyltetrahydrophthalic anhydride (MTHPA) Acid anhydrides including aromatic acid anhydrides such as acid anhydride, trimellitic anhydride (TMA), pyromellitic anhydride (PMDA), and benzophenone tetracarboxylic acid (BTDA); phenol resin curing agents; polysulfide, thioes Le, polymercaptan compounds such as thioether; an isocyanate prepolymer, an isocyanate compound such as a blocked isocyanate; organic acids such as carboxylic acid-containing polyester resins.
触媒型の硬化剤としては、例えば、ベンジルジメチルアミン(BDMA)、2,4,6−トリスジメチルアミノメチルフェノール(DMP−30)等の3級アミン化合物;2−メチルイミダゾール、2−エチル−4−メチルイミダゾール(EMI24)等のイミダゾール化合物;BF3錯体等のルイス酸等が挙げられる。 Examples of the catalyst-type curing agent include tertiary amine compounds such as benzyldimethylamine (BDMA) and 2,4,6-trisdimethylaminomethylphenol (DMP-30); 2-methylimidazole, 2-ethyl-4 -Imidazole compounds such as methylimidazole (EMI24); Lewis acids such as BF 3 complexes.
縮合型の硬化剤としては、例えば、レゾール型フェノール樹脂;メチロール基含有尿素樹脂のような尿素樹脂;メチロール基含有メラミン樹脂のようなメラミン樹脂等が挙げられる。 Examples of the condensation type curing agent include a resol type phenol resin; a urea resin such as a methylol group-containing urea resin; and a melamine resin such as a methylol group-containing melamine resin.
これらの中でも、耐燃性、耐湿性、電気特性、硬化性、保存安定性等のバランスの観点からフェノール樹脂系硬化剤が好ましい。フェノール樹脂系硬化剤は、一分子内にフェノール性水酸基を2個以上有するモノマー、オリゴマー、ポリマー全般であり、その分子量、分子構造を特に限定するものではないが、例えば、フェノールノボラック樹脂、クレゾールノボラック樹脂、ビスフェノールノボラック等のノボラック型フェノール樹脂;トリスフェノールメタン型フェノール樹脂等の多官能型フェノール樹脂;テルペン変性フェノール樹脂、ジシクロペンタジエン変性フェノール樹脂等の変性フェノール樹脂;フェニレン骨格および/またはビフェニレン骨格を有するフェノールアラルキル樹脂、フェニレン骨格および/またはビフェニレン骨格を有するナフトールアラルキル樹脂等のフェノールアラルキル型樹脂;ビスフェノールA、ビスフェノールF等のビスフェノール化合物等が挙げられる。これらは1種類を単独で用いても2種類以上を併用してもよい。
これらの中でも、外観および高温保管特性のバランスにより一層優れた半導体装置を実現できる観点から、フェノールアラルキル樹脂、ノボラック型フェノール樹脂、多官能型フェノール樹脂からなる群から選択される一種または二種以上を含むことが好ましい。
Among these, a phenol resin-based curing agent is preferable from the viewpoint of balance of flame resistance, moisture resistance, electrical characteristics, curability, storage stability, and the like. The phenol resin-based curing agent is a monomer, oligomer, or polymer in general having two or more phenolic hydroxyl groups in one molecule, and its molecular weight and molecular structure are not particularly limited. For example, phenol novolak resin, cresol novolak Resin, novolak-type phenol resin such as bisphenol novolac; polyfunctional phenol resin such as trisphenolmethane-type phenol resin; modified phenol resin such as terpene-modified phenol resin and dicyclopentadiene-modified phenol resin; phenylene skeleton and / or biphenylene skeleton Phenol aralkyl type resins such as phenol aralkyl resins having a phenylene skeleton and / or biphenylene skeleton, and the like; bisphenols such as bisphenol A and bisphenol F Lumpur compounds. These may be used alone or in combination of two or more.
Among these, from the viewpoint of realizing a more excellent semiconductor device due to the balance between appearance and high-temperature storage characteristics, one or more selected from the group consisting of phenol aralkyl resins, novolac type phenol resins, and polyfunctional type phenol resins are used. It is preferable to include.
これらの中でも、外観および高温保管特性のバランスにより一層優れた半導体装置を実現できる観点から、硬化剤(C)として、下記式(4)で表されるフェノールアラルキル樹脂、ノボラック型フェノール樹脂からなる群から選択される少なくとも1種を含むことが特に好ましい。 Among these, from the viewpoint of realizing a more excellent semiconductor device due to a balance between appearance and high-temperature storage characteristics, a group consisting of a phenol aralkyl resin and a novolac type phenol resin represented by the following formula (4) as the curing agent (C). It is particularly preferable that at least one selected from the group consisting of:
本実施形態において、封止用樹脂組成物中における硬化剤(C)の含有量は、封止用樹脂組成物全体を100質量%としたとき、0.5質量%以上であることが好ましく、1質量%以上であることがより好ましく、2質量%以上であることが特に好ましい。硬化剤(C)の含有量を上記下限値以上とすることにより、成形時において、十分な流動性を実現し、充填性や成形性の向上を図ることができる。
一方で、封止用樹脂組成物中における硬化剤(C)の含有量は、封止用樹脂組成物全体を100質量%としたとき、15質量%以下であることが好ましく、10質量%以下であることがより好ましく、8質量%以下であることが特に好ましい。硬化剤(C)の含有量を上記上限値以下とすることにより、封止用樹脂組成物を用いて形成される封止材を備える半導体装置について、耐湿信頼性や耐リフロー性を向上させることができる。
In the present embodiment, the content of the curing agent (C) in the sealing resin composition is preferably 0.5% by mass or more when the entire sealing resin composition is 100% by mass, The content is more preferably 1% by mass or more, and particularly preferably 2% by mass or more. By setting the content of the curing agent (C) to the above lower limit value or more, sufficient fluidity can be realized at the time of molding, and filling properties and moldability can be improved.
On the other hand, the content of the curing agent (C) in the sealing resin composition is preferably 15% by mass or less, preferably 10% by mass or less, when the entire sealing resin composition is 100% by mass. It is more preferable that it is, and it is especially preferable that it is 8 mass% or less. Improve moisture resistance reliability and reflow resistance of a semiconductor device including a sealing material formed using a sealing resin composition by setting the content of the curing agent (C) to the upper limit value or less. Can do.
(着色剤(D))
本実施形態において、着色剤(D)としては、十分な着色力が得られる着色剤であれば特に限定されず、任意の着色剤を使用することができる。例えば、青色系着色剤、黄色系着色剤、緑色系着色剤、赤色系着色剤、白色系着色剤、橙色系着色剤、紫色系着色剤、褐色系着色剤等から選択される一種または二種以上を用いることができる。
(Colorant (D))
In this embodiment, as a coloring agent (D), if it is a coloring agent with sufficient coloring power, it will not specifically limit, Arbitrary coloring agents can be used. For example, one or two selected from blue colorants, yellow colorants, green colorants, red colorants, white colorants, orange colorants, purple colorants, brown colorants, etc. The above can be used.
青色系着色剤としては、群青、紺青、コバルトブルー、アルカリブルーレーキ、フタロシアニンブルー、インダンスレンブルー、インジゴ、ビクトリアブルーレーキ、ファストスカイブルー、アニリンブルー、ウルトラマリンブルー、カルコオイルブルー、メチレンブルークロライド、メチレンブルー等の青色顔料または青色染料等が挙げられる。
黄色系着色剤としては、黄鉛、亜鉛華、黄色酸化鉄、カドミウムイエロー、クロムイエロー、ハンザイエロー、チタンイエロー、ベンジンイエロー、スレンイエロー、キノリンイエロー、パーマネントイエロー、モノアゾイエロー、ジスアゾイエロー、不溶性アゾ、縮合アゾ、アゾレーキ等のアゾ系顔料等の黄色顔料または黄色染料等が挙げられる。
緑色系着色剤としては、クロムグリーン、酸化クロム、エメラルドグリーン、ナフトールグリーン、グリーンゴールド、アシッドグリーンレーキ、マラカイトグリーンレーキ、フタロシアニングリーン、ポリクロルブロム銅フタロシアニン等の緑色顔料または緑色染料等が挙げられる。
赤色系着色剤としては、ベンガラ、カドミウムレッド、アンチモンレッド、パーマネントレッド、イルガジンレッド、ペリレンレッド、ローダミンレーキ、アリザリンレーキ、チオインジゴレッド、PVカーミン、モノライトフェーストレッド、キナクリドン、ウオッチングレッド、リソールレッド、ブリリアンカーミン、デイポンオイルレッド、ピラゾロンレッド、ローダミンBレーキ、レーキレッドC、ローズベンガル、エオキシンレッド、アリザリンレーキ、アントラキノン系、インジゴ、イソインドリンジケトピロロピロール系、クロモファインレッド等の縮合多環系顔料等の赤色顔料または赤色染料を用いることができる。
白色系着色剤としては、酸化チタン、亜鉛華、硫化亜鉛、鉛白、リトボン、酸化アンチモン等の白色顔料または白色染料を用いることができる。
橙色系着色剤としては、クロームバーミロオン、パーマネントオレンジ、バルカンファーストオレンジ、インダンスレンブリリアントオレンジ等の橙色顔料または橙色染料を用いることができる。
紫色系着色剤としては、コバルト紫、マンガン紫、ファーストバイオレット、メチルバイオレットレーキ、インダンスレンブリリアントバイオレット、ジオキサジンバイオレット等の紫色顔料または紫色染料を用いることができる。
褐色系着色剤としては、酸化鉄、パーマネントブラウン、パラブラウン等の褐色顔料または褐色染料を用いることができる。
これらは1種類を単独で用いても2種類以上を併用してもよい。
Blue colorants include ultramarine, bitumen, cobalt blue, alkali blue lake, phthalocyanine blue, indanthrene blue, indigo, Victoria blue lake, fast sky blue, aniline blue, ultramarine blue, calco oil blue, methylene blue chloride, Blue pigments such as methylene blue or blue dyes can be used.
Yellow colorants include yellow lead, zinc white, yellow iron oxide, cadmium yellow, chrome yellow, hansa yellow, titanium yellow, benzine yellow, selenium yellow, quinoline yellow, permanent yellow, monoazo yellow, disazo yellow, insoluble azo, Examples thereof include yellow pigments or yellow dyes such as azo pigments such as condensed azo and azo lake.
Examples of the green colorant include green pigments or green dyes such as chrome green, chromium oxide, emerald green, naphthol green, green gold, acid green lake, malachite green lake, phthalocyanine green, and polychlorobrom copper phthalocyanine.
Red colorants include Bengala, Cadmium Red, Antimony Red, Permanent Red, Irgadin Red, Perylene Red, Rhodamine Lake, Alizarin Lake, Thioindigo Red, PV Carmine, Monolite Face Tread, Quinacridone, Watching Red, Resol Condensation of red, brilliantamine, dapon oil red, pyrazolone red, rhodamine B lake, lake red C, rose bengal, oxine red, alizarin lake, anthraquinone, indigo, isoindoline diketopyrrolopyrrole, chromofine red, etc. Red pigments such as polycyclic pigments or red dyes can be used.
As the white colorant, white pigments or white dyes such as titanium oxide, zinc white, zinc sulfide, lead white, lithobon, and antimony oxide can be used.
As the orange colorant, an orange pigment or an orange dye such as chrome vermilon, permanent orange, Vulcan first orange, or indanthrene brilliant orange can be used.
As the purple colorant, purple pigments or purple dyes such as cobalt purple, manganese purple, first violet, methyl violet lake, indanthrene brilliant violet, dioxazine violet can be used.
As the brown colorant, a brown pigment such as iron oxide, permanent brown, para-brown, or a brown dye can be used.
These may be used alone or in combination of two or more.
本実施形態において、封止用樹脂組成物中における着色剤(D)の含有量は、十分な着色力が得られる量であれば、特に限定されないが、封止用樹脂組成物全体を100質量%としたとき、0.01質量%以上5質量%以下であり、より好ましくは0.1質量%以上3質量%以下である。着色剤(D)の含有量が上記範囲内であれば、封止材の他の特性を損なうことなく、着色力をより一層高めることができる。 In the present embodiment, the content of the colorant (D) in the sealing resin composition is not particularly limited as long as sufficient coloring power can be obtained, but the entire sealing resin composition is 100 masses. %, It is 0.01 mass% or more and 5 mass% or less, More preferably, it is 0.1 mass% or more and 3 mass% or less. If content of a coloring agent (D) is in the said range, coloring power can be improved further, without impairing the other characteristic of a sealing material.
(酸化防止剤(E))
本実施形態において、酸化防止剤(E)としては、1分子中にヒンダードフェノール基を2個以上有するヒンダードフェノール系化合物、ヒンダードアミン系化合物およびチオエーテル系化合物から選択される一種または二種以上を含む。
(Antioxidant (E))
In this embodiment, as the antioxidant (E), one or more selected from hindered phenol compounds, hindered amine compounds and thioether compounds having two or more hindered phenol groups in one molecule are used. Including.
ヒンダードフェノール基としては、下記式(5)で表されるヒンダードフェノール基が好ましい。 As the hindered phenol group, a hindered phenol group represented by the following formula (5) is preferable.
1分子中にヒンダードフェノール基を2個以上有するヒンダードフェノール系化合物としては、例えば、1,3,5−トリス(3,5−ジ−tert−ブチル−4−ヒドロキシベンジル)−1,3,5−トリアジン−2,4,6(1H、3H,5H)−トリオン、4,4',4"−(1−メチルプロパニル−3−イリデン)トリス(6−tert−ブチル−m−クレゾール)、6,6'−ジ−tert−ブチル−4,4'−ブチリデンジ−m−クレゾール、ペンタエリスリトールテトラキス[3−(3,5−ジ−tert−ブチル −4−ヒドロキシフェニル)プロピオネート]、3,9−ビス{2−[3−(3−tert−ブチル−4−ヒドロキシ−5−メチルフェニル)プロピオニルオキシ]−1,1−ジメチルエチル}−2,4,8,10−テトラオキサスピロ[5.5]ウンデカン、1,3,5−トリス(3,5−ジ−tert−ブチル−4−ヒドロキシフェニルメチル)−2,4,6−トリメチルベンゼン、2,2'−チオジエチルビス[3−(3,5−ジ−tert−ブチル−4−ヒドロキシフェニル)プロピオナート]、N,N'−(1,6−ヘキサンジイル)ビス[3,5−ビス(1,1−ジメチルエチル)−4−ヒドロキシベンゼンプロパンアミド]、ビス[3−(3−tert−ブチル−4−ヒドロキシ−5−メチルフェニル)プロピオン酸][エチレンビス(オキシエチレン)]、1,6−ヘキサンジオールビス[3−(3,5−ジ−tert−ブチル−4−ヒドロキシフェニル)プロピオナート]等が挙げられる。これらは1種類を単独で用いても2種類以上を併用してもよい。 Examples of the hindered phenol compound having two or more hindered phenol groups in one molecule include 1,3,5-tris (3,5-di-tert-butyl-4-hydroxybenzyl) -1,3. , 5-Triazine-2,4,6 (1H, 3H, 5H) -trione, 4,4 ', 4 "-(1-methylpropanyl-3-ylidene) tris (6-tert-butyl-m-cresol ), 6,6′-di-tert-butyl-4,4′-butylidenedi-m-cresol, pentaerythritol tetrakis [3- (3,5-di-tert-butyl-4-hydroxyphenyl) propionate], 3 , 9-bis {2- [3- (3-tert-butyl-4-hydroxy-5-methylphenyl) propionyloxy] -1,1-dimethylethyl} -2,4,8,10- Traoxaspiro [5.5] undecane, 1,3,5-tris (3,5-di-tert-butyl-4-hydroxyphenylmethyl) -2,4,6-trimethylbenzene, 2,2′-thio Diethylbis [3- (3,5-di-tert-butyl-4-hydroxyphenyl) propionate], N, N ′-(1,6-hexanediyl) bis [3,5-bis (1,1-dimethyl) Ethyl) -4-hydroxybenzenepropanamide], bis [3- (3-tert-butyl-4-hydroxy-5-methylphenyl) propionic acid] [ethylenebis (oxyethylene)], 1,6-hexanediol bis [3- (3,5-di-tert-butyl-4-hydroxyphenyl) propionate], etc. These may be used alone or in combination of two or more.
ヒンダードアミン系化合物としては、テトラキス(1,2,2,6,6−ペンタメチル−4−ピペリジル)ブタン−1,2,3,4−テトラカルボキシレート、テトラキス(2,2,6,6−テトラメチル−4−ピペリジル)ブタン−1,2,3,4−テトラカルボキシレート、1,2,3,4−ブタンテトラカルボン酸と1,2,2,6,6−ペンタメチル−4−ピペリジノール及び3,9−ビス(2−ヒドロキシ−1,1−ジメチルエチル)−2,4,8,10−テトラオキサスピロ[5.5]ウンデカンとの混合エステル化物、1,2,3,4−ブタンテトラカルボン酸と2,2,6,6−テトラメチル−4−ピペリジノール及び3,9−ビス(2−ヒドロキシ−1,1−ジメチルエチル)−2,4,8,10−テトラオキサスピロ[5.5]ウンデカンとの混合エステル化物、ビス(1,2,2,6,6−ペンタメチル−4−ピペリジル)セバケート、ビス(2,2,6,6−テトラメチル−4−ピペリジル)セバケート、ビス(1−ウンデカノキシ−2,2,6,6−テトラメチルピペリジン−4−イル)カーボネート、1,2,2,6,6−ペンタメチル−4−ピペリジルメタクリレート、2,2,6,6−テトラメチル−4−ピペリジルメタクリレート、2,2,6,6−テトラメチルピペリジン−4−イルヘキサデカノエートと2,2,6,6−テトラメチルピペリジン−4−イルオクタデカノエートとの反応物等が挙げられる。これらは1種類を単独で用いても2種類以上を併用してもよい。 Examples of hindered amine compounds include tetrakis (1,2,2,6,6-pentamethyl-4-piperidyl) butane-1,2,3,4-tetracarboxylate, tetrakis (2,2,6,6-tetramethyl). -4-piperidyl) butane-1,2,3,4-tetracarboxylate, 1,2,3,4-butanetetracarboxylic acid and 1,2,2,6,6-pentamethyl-4-piperidinol and 3, 9-bis (2-hydroxy-1,1-dimethylethyl) -2,4,8,10-tetraoxaspiro [5.5] undecane mixed ester, 1,2,3,4-butanetetracarboxylic Acid and 2,2,6,6-tetramethyl-4-piperidinol and 3,9-bis (2-hydroxy-1,1-dimethylethyl) -2,4,8,10-tetraoxaspiro [ .5] Mixed esterified product with undecane, bis (1,2,2,6,6-pentamethyl-4-piperidyl) sebacate, bis (2,2,6,6-tetramethyl-4-piperidyl) sebacate, bis (1-undecanoxy-2,2,6,6-tetramethylpiperidin-4-yl) carbonate, 1,2,2,6,6-pentamethyl-4-piperidyl methacrylate, 2,2,6,6-tetramethyl Reaction product of -4-piperidyl methacrylate, 2,2,6,6-tetramethylpiperidin-4-ylhexadecanoate and 2,2,6,6-tetramethylpiperidin-4-yloctadecanoate, etc. Is mentioned. These may be used alone or in combination of two or more.
チオエーテル系化合物としては、2,2−ビス{[3−(ドデシルチオ)−1−オキソプロポキシ]メチル}プロパン−1,3−ジイルビス[3−(ドデシルチオ)プロピオネート]、ジ(トリデシル)−3,3'−チオジプロピオネート等が挙げられる。これらは1種類を単独で用いても2種類以上を併用してもよい。 Examples of the thioether compound include 2,2-bis {[3- (dodecylthio) -1-oxopropoxy] methyl} propane-1,3-diylbis [3- (dodecylthio) propionate], di (tridecyl) -3,3. Examples include '-thiodipropionate. These may be used alone or in combination of two or more.
これらの中でも、外観および高温保管特性のバランスにより一層優れた半導体装置を実現できる観点から、3,9−ビス{2−[3−(3−tert−ブチル−4−ヒドロキシ−5−メチルフェニル)プロピオニルオキシ]−1,1−ジメチルエチル}−2,4,8,10−テトラオキサスピロ[5.5]ウンデカン、1,3,5−トリス(3,5−ジ−tert−ブチル−4−ヒドロキシベンジル)−1,3,5−トリアジン−2,4,6(1H、3H,5H)−トリオンおよびペンタエリスリトールテトラキス[3−(3,5−ジ−tert−ブチル −4−ヒドロキシフェニル)プロピオネート]からなる群から選択される一種または二種以上を含むことが特に好ましい。 Among these, 3,9-bis {2- [3- (3-tert-butyl-4-hydroxy-5-methylphenyl) from the viewpoint of realizing a more excellent semiconductor device due to a balance between appearance and high-temperature storage characteristics. Propionyloxy] -1,1-dimethylethyl} -2,4,8,10-tetraoxaspiro [5.5] undecane, 1,3,5-tris (3,5-di-tert-butyl-4- Hydroxybenzyl) -1,3,5-triazine-2,4,6 (1H, 3H, 5H) -trione and pentaerythritol tetrakis [3- (3,5-di-tert-butyl-4-hydroxyphenyl) propionate It is particularly preferred that one or more selected from the group consisting of:
本実施形態において、封止用樹脂組成物中における酸化防止剤(E)の含有量は、封止用樹脂組成物全体を100質量%としたとき、好ましくは0.1質量%以上2.0質量%以下であり、より好ましくは0.2質量%以上1.0質量%以下である。酸化防止剤(E)の含有量が上記範囲内であれば、封止材の他の特性を損なうことなく、封止用樹脂組成物を構成する各成分の酸化劣化をより効果的に抑制できる。 In the present embodiment, the content of the antioxidant (E) in the sealing resin composition is preferably 0.1% by mass or more and 2.0% when the entire sealing resin composition is 100% by mass. It is not more than mass%, more preferably not less than 0.2 mass% and not more than 1.0 mass%. If the content of the antioxidant (E) is within the above range, the oxidative deterioration of each component constituting the sealing resin composition can be more effectively suppressed without impairing other properties of the sealing material. .
(その他の成分(F))
封止用樹脂組成物には、必要に応じて、例えば、カップリング剤、硬化促進剤、離型剤、イオン捕捉剤、低応力成分、難燃剤等の各種添加剤のうち1種以上を適宜配合することができる。
カップリング剤は、例えば、エポキシシラン、メルカプトシラン、アミノシラン、アルキルシラン、ウレイドシラン、ビニルシラン、メタクリルシラン等の各種シラン系化合物、チタン系化合物、アルミニウムキレート類、アルミニウム/ジルコニウム系化合物等の公知のカップリング剤から選択される1種類または2種類以上を含むことができる。これらの中でも、本発明の効果をより効果的に発現するものとして、エポキシシランまたはアミノシランを含むことがより好ましく、2級アミノシランを含むことが流動性等の観点から特に好ましい。
硬化促進剤は、例えば、有機ホスフィン、テトラ置換ホスホニウム化合物、ホスホベタイン化合物、ホスフィン化合物とキノン化合物との付加物、ホスホニウム化合物とシラン化合物との付加物等のリン原子含有化合物;1,8−ジアザビシクロ(5,4,0)ウンデセン−7、ベンジルジメチルアミン、2−メチルイミダゾール等が例示されるアミジンや3級アミン、上記アミジンやアミンの4級塩等の窒素原子含有化合物から選択される1種類または2種類以上を含むことができる。これらの中でも、硬化性を向上させる観点からはリン原子含有化合物を含むことがより好ましい。また、成形性と硬化性のバランスを向上させる観点からは、テトラ置換ホスホニウム化合物、ホスホベタイン化合物、ホスフィン化合物とキノン化合物との付加物、ホスホニウム化合物とシラン化合物との付加物等の潜伏性を有するものを含むことがより好ましい。
離型剤は、例えばカルナバワックス等の天然ワックス、モンタン酸エステルワックス等の合成ワックス、ステアリン酸亜鉛等の高級脂肪酸およびその金属塩類、ならびにパラフィンから選択される1種類または2種類以上を含むことができる。
イオン捕捉剤は、例えば、ハイドロタルサイトを含む。
低応力成分は、例えば、シリコーンオイル、シリコーンゴムを含む。
難燃剤は、例えば水酸化アルミニウム、水酸化マグネシウム、ホウ酸亜鉛、モリブデン酸亜鉛、ホスファゼンから選択される1種類または2種類以上を含むことができる。
(Other ingredients (F))
For the sealing resin composition, one or more of various additives such as a coupling agent, a curing accelerator, a mold release agent, an ion scavenger, a low stress component, a flame retardant, and the like are appropriately used as necessary. Can be blended.
Coupling agents include, for example, known cups such as epoxy silane, mercapto silane, amino silane, alkyl silane, ureido silane, vinyl silane, methacryl silane and other silane compounds, titanium compounds, aluminum chelates, and aluminum / zirconium compounds. One type or two or more types selected from ring agents can be included. Among these, as what expresses the effect of this invention more effectively, it is more preferable to contain an epoxy silane or aminosilane, and it is especially preferable from a viewpoint of fluidity | liquidity to contain secondary aminosilane.
Examples of the curing accelerator include organic phosphines, tetra-substituted phosphonium compounds, phosphobetaine compounds, adducts of phosphine compounds and quinone compounds, phosphorus atom-containing compounds such as adducts of phosphonium compounds and silane compounds; 1,8-diazabicyclo (5,4,0) undecene-7, benzyldimethylamine, 2-methylimidazole and the like, one kind selected from nitrogen atom-containing compounds such as amidine and tertiary amine, and quaternary salts of the above amidine and amine Or two or more types can be included. Among these, it is more preferable that a phosphorus atom containing compound is included from a viewpoint of improving curability. In addition, from the viewpoint of improving the balance between moldability and curability, it has latent properties such as tetra-substituted phosphonium compounds, phosphobetaine compounds, adducts of phosphine compounds and quinone compounds, and adducts of phosphonium compounds and silane compounds. It is more preferable to include those.
The mold release agent may contain, for example, natural wax such as carnauba wax, synthetic wax such as montanic acid ester wax, higher fatty acid such as zinc stearate and metal salts thereof, and one or more selected from paraffin. it can.
The ion scavenger includes, for example, hydrotalcite.
The low stress component includes, for example, silicone oil and silicone rubber.
The flame retardant can include one or more selected from, for example, aluminum hydroxide, magnesium hydroxide, zinc borate, zinc molybdate, and phosphazene.
封止用樹脂組成物としては、例えば、前述の各成分を、公知の手段で混合し、さらにロール、ニーダーまたは押出機等の混練機で溶融混練し、冷却した後に粉砕したもの、粉砕後にタブレット状に打錠成型したもの、また必要に応じて適宜分散度や流動性等を調整したもの等を用いることができる。 As the sealing resin composition, for example, the above-mentioned components are mixed by known means, further melt-kneaded with a kneader such as a roll, kneader or extruder, cooled and pulverized, and tableted after pulverization. For example, it is possible to use a tablet that has been molded into a tablet shape, or that has been appropriately adjusted in dispersity, fluidity, and the like.
次に、半導体装置100について説明する。
図1は、本実施形態に係る半導体装置100の一例を示す断面図である。半導体装置100は、基材10と、基材10上に搭載された半導体素子20と、半導体素子20を封止する封止材30と、を備えた半導体パッケージである。図1においては、半導体装置100がBGAパッケージである場合が例示されている。この場合、基材10のうち半導体素子20を搭載する表面とは反対側の裏面には、複数の半田ボール50が設けられる。
半導体素子20は、ボンディングワイヤ40を介して基材10へ電気的に接続される。一方で、半導体素子20は、基材10上にフリップチップ実装されていてもよい。
Next, the
FIG. 1 is a cross-sectional view showing an example of a
The
本実施形態において、封止材30は、上述の封止用樹脂組成物の硬化物により構成される。これにより、半導体素子20の封止に際して、封止材30の変色および酸化を抑制することができる。このため、外観および高温保管特性のバランスに優れた半導体装置100の製造を実現することが可能となる。封止材30は、例えば、封止用樹脂組成物をトランスファー成形法または圧縮成形法等の公知の方法を用いて封止成形することにより形成される。
In this embodiment, the sealing
次に、構造体102について説明する。
図2は、本実施形態に係る構造体102の一例を示す断面図である。構造体102は、MAP成形により形成された成形品である。このため、構造体102を半導体素子20毎に個片化することにより、複数の半導体パッケージが得られることとなる。
構造体102は、基材10と、複数の半導体素子20と、封止材30と、を備えている。複数の半導体素子20は、基材10上に配列されている。図2においては、各半導体素子20が、ボンディングワイヤ40を介して基材10に電気的に接続される場合が例示されている。しかしながら、これに限られず、各半導体素子20は、基材10に対してフリップチップ実装されていてもよい。なお、基材10および半導体素子20は、半導体装置100において例示したものと同様のものを用いることができる。
Next, the
FIG. 2 is a cross-sectional view showing an example of the
The
封止材30は、複数の半導体素子20を封止している。封止材30は、上述した封止用樹脂組成物の硬化物により構成される。これにより、複数の半導体素子20の封止に際して、封止材30の変色および酸化を抑制することができる。このため、外観および高温保管特性のバランスに優れた構造体102およびこれを個片化して得られる半導体装置を実現することが可能となる。封止材30は、例えば、封止用樹脂組成物をトランスファー成形法または圧縮成形法等の公知の方法を用いて封止成形することにより形成される。
The sealing
以上、本発明の実施形態について述べたが、これらは本発明の例示であり、上記以外の様々な構成を採用することもできる。 As mentioned above, although embodiment of this invention was described, these are illustrations of this invention and various structures other than the above are also employable.
以下、本実施形態を、実施例・比較例を参照して詳細に説明する。なお、本実施形態は、これらの実施例の記載に何ら限定されるものではない。 Hereinafter, the present embodiment will be described in detail with reference to examples and comparative examples. In addition, this embodiment is not limited to description of these Examples at all.
(封止用樹脂組成物)
実施例1〜12および比較例1〜3のそれぞれについて、以下のように封止用樹脂組成物を調製した。まず、表1に示す配合に従い、各成分を、ミキサーを用いて粉砕混合した後、80℃で5分間ロール混練した。次いで、これを冷却し、粉砕して封止用樹脂組成物を得た。
表1中における各成分の詳細は下記のとおりである。なお、表1に示す各成分の配合割合は、全て封止用樹脂組成物全体に対する配合割合(質量%)を指す。
(Resin composition for sealing)
About each of Examples 1-12 and Comparative Examples 1-3, the resin composition for sealing was prepared as follows. First, according to the formulation shown in Table 1, each component was pulverized and mixed using a mixer, and then roll kneaded at 80 ° C. for 5 minutes. Next, this was cooled and pulverized to obtain a sealing resin composition.
Details of each component in Table 1 are as follows. In addition, the mixture ratio of each component shown in Table 1 points out the mixture ratio (mass%) with respect to the whole resin composition for sealing.
(エポキシ樹脂(A))
エポキシ樹脂1:ビフェニレン骨格含有フェノールアラルキル型エポキシ樹脂(日本化薬社製、NC−3000)
エポキシ樹脂2:ビスフェノールA型エポキシ樹脂(三菱化学社製、エピコートYL6810)
エポキシ樹脂3:ビフェニル型エポキシ樹脂(三菱化学社製、エピコートYX4000K)
エポキシ樹脂4:オルソクレゾールノボラック型エポキシ樹脂(日本化薬社製、EOCN−1020−55)
(Epoxy resin (A))
Epoxy resin 1: phenol aralkyl type epoxy resin containing biphenylene skeleton (Nippon Kayaku Co., Ltd., NC-3000)
Epoxy resin 2: bisphenol A type epoxy resin (manufactured by Mitsubishi Chemical Corporation, Epicoat YL6810)
Epoxy resin 3: biphenyl type epoxy resin (manufactured by Mitsubishi Chemical Corporation, Epicoat YX4000K)
Epoxy resin 4: Orthocresol novolac type epoxy resin (manufactured by Nippon Kayaku Co., Ltd., EOCN-1020-55)
(無機充填剤(B))
無機充填剤1:球状溶融シリカ(マイクロン社製、S−CO、平均粒径:21μm)
無機充填剤2:球状溶融シリカ(アドマテックス社製、SO−25R、平均粒径:0.5μm)
(Inorganic filler (B))
Inorganic filler 1: spherical fused silica (Micron, S-CO, average particle size: 21 μm)
Inorganic filler 2: Spherical fused silica (manufactured by Admatechs, SO-25R, average particle size: 0.5 μm)
(硬化剤(C))
フェノール樹脂系硬化剤1:ビフェニレン骨格を有するフェノールアラルキル樹脂(日本化薬社製GPH−65/明和化成社製MEH−7851SS)
フェノール樹脂系硬化剤2:フェノールノボラック樹脂(住友ベークライト社製、PR−HF3)
(Curing agent (C))
Phenol resin-based curing agent 1: phenol aralkyl resin having a biphenylene skeleton (GPH-65 manufactured by Nippon Kayaku Co., Ltd./MEH-7851SS manufactured by Meiwa Kasei Co., Ltd.)
Phenol resin-based curing agent 2: Phenol novolak resin (manufactured by Sumitomo Bakelite, PR-HF3)
(着色剤(D))
着色剤1:赤色系着色剤(大日精化工業社製、クロモファインレッド6605T、分類:クロモファインレッド、主成分:4,4'−ジアミノ−1,1'−ビアントラセン−9,9',10,10'−テトラオン)
着色剤2:黄色系着色剤(大日精化工業社製、セイカファーストエロー2054C、分類:モノアゾイエロー、主成分:ピグメントイエロー74(2−[(2−メトキシ―4−ニトロフェニル)アゾ]−N−(2−メトキシフェニル)−3−オキソブタンアミド))
着色剤3:青色系着色剤(大日精化工業社製、シアニンブルー6820、分類:フタロシアニンブルー、主成分:ピグメントブルー15:3(銅フタロシアニンのβ結晶))
(Colorant (D))
Colorant 1: Red colorant (manufactured by Dainichi Seika Kogyo Co., Ltd., Chromofine Red 6605T, classification: Chromofine Red, main component: 4,4′-diamino-1,1′-bianthracene-9,9 ′, 10,10′-tetraone)
Colorant 2: Yellow colorant (manufactured by Dainichi Seika Kogyo Co., Ltd., Seika First Yellow 2054C, classification: monoazo yellow, main component: pigment yellow 74 (2-[(2-methoxy-4-nitrophenyl) azo] -N -(2-methoxyphenyl) -3-oxobutanamide))
Colorant 3: Blue colorant (Daiichi Seika Kogyo Co., Ltd., cyanine blue 6820, classification: phthalocyanine blue, main component: pigment blue 15: 3 (β crystal of copper phthalocyanine))
(酸化防止剤(E))
ヒンダードフェノール系化合物1:3,9−ビス{2−[3−(3−tert−ブチル−4−ヒドロキシ−5−メチルフェニル)プロピオニルオキシ]−1,1−ジメチルエチル}−2,4,8,10−テトラオキサスピロ[5.5]ウンデカン(ADEKA社製アデカスタブAO−80)
ヒンダードフェノール系化合物2:ペンタエリスリトールテトラキス[3−(3,5−ジ−tert−ブチル −4−ヒドロキシフェニル)プロピオネート](ADEKA社製アデカスタブAO−60)
ヒンダードフェノール系化合物3:1,3,5−トリス(3,5−ジ−tert−ブチル−4−ヒドロキシベンジル)−1,3,5−トリアジン−2,4,6(1H、3H,5H)−トリオン(ADEKA社製アデカスタブAO−20)
ヒンダードフェノール系化合物4:2,6−ジ−t−ブチル―p−クレゾール
ヒンダードアミン系化合物1:ビス(2,2,6,6−テトラメチル−4−ピペリジル)セバケート(ADEKA社製アデカスタブLA−77Y)
チオエーテル系化合物1:2,2−ビス{[3−(ドデシルチオ)−1−オキソプロポキシ]メチル}プロパン−1,3−ジイルビス[3−(ドデシルチオ)プロピオネート](ADEKA社製アデカスタブAO−412S)
ホスファイト系化合物1:トリス(2,4−ジ−tert−ブチルフェニル)ホスファイト(ADEKA社製アデカスタブ2112)
(Antioxidant (E))
Hindered phenolic compound 1: 3,9-bis {2- [3- (3-tert-butyl-4-hydroxy-5-methylphenyl) propionyloxy] -1,1-dimethylethyl} -2,4 8,10-tetraoxaspiro [5.5] undecane (ADEKA STAB AO-80 manufactured by ADEKA)
Hindered phenol compound 2: pentaerythritol tetrakis [3- (3,5-di-tert-butyl-4-hydroxyphenyl) propionate] (Adeka Adeka Stub AO-60)
Hindered phenol compound 3: 1,3,5-tris (3,5-di-tert-butyl-4-hydroxybenzyl) -1,3,5-triazine-2,4,6 (1H, 3H, 5H ) -Trion (ADEKA ADEKA STAB AO-20)
Hindered phenol-based compound 4: 2,6-di-t-butyl-p-cresol hindered amine-based compound 1: bis (2,2,6,6-tetramethyl-4-piperidyl) sebacate (ADEKA STAB LA- manufactured by ADEKA) 77Y)
Thioether compound 1: 2,2-bis {[3- (dodecylthio) -1-oxopropoxy] methyl} propane-1,3-diylbis [3- (dodecylthio) propionate] (ADEKA STAB AO-412S manufactured by ADEKA)
Phosphite compound 1: Tris (2,4-di-tert-butylphenyl) phosphite (ADEKA STAB 2112 manufactured by ADEKA)
(その他の成分(F))
離型剤1:モンタン酸エステルワックス(クラリアント社製、リコワックスPED191)
硬化促進剤1:特開2004−231765の段落0021に記載の硬化促進剤Aと特開2007−246671の段落0084に示す硬化促進剤Bを1:3の重量で混合したもの
(Other ingredients (F))
Mold release agent 1: Montanate ester wax (manufactured by Clariant, Lycowax PED191)
Curing accelerator 1: a mixture of curing accelerator A described in paragraph 0021 of JP-A-2004-231765 and curing accelerator B shown in paragraph 0084 of JP-A-2007-246671 at a weight of 1: 3
<封止材の外観評価>
実施例および比較例で得られた封止用樹脂組成物の色差を測定することにより、封止材の外観評価をおこなった。
<Appearance evaluation of sealing material>
The appearance of the sealing material was evaluated by measuring the color difference of the sealing resin compositions obtained in Examples and Comparative Examples.
(試験片の作製)
はじめに、低圧トランスファー成形機(コーキ精機社製「KTS−15」)を用いて、金型に、金型温度175℃、注入圧力9.8MPa、硬化時間300秒の条件で、上記封止用樹脂組成物をトランスファー成形することにより封止用樹脂組成物の硬化物を得た。この硬化物は、直径50mm、厚さ3mmであった。
次いで、得られた硬化物について、コニカミノルタ センシング社製Color Reader CR−13(測定モード:透過、測定回数:n=3)を用い、L1 *値、a1 *値、b1 *値を測定した。CIE1976L*a*b*表色系の数値への変換は装置本体が行い、CIE1976L*a*b*表色系のデータを得た。また、C*は{(a1 *)2+(b1 *)2}1/2により得た。得られた結果を表1に示す。
(Preparation of test piece)
First, using a low-pressure transfer molding machine (“KTS-15” manufactured by Koki Seiki Co., Ltd.), the above-mentioned sealing resin was applied to the mold under conditions of a mold temperature of 175 ° C., an injection pressure of 9.8 MPa, and a curing time of 300 seconds. A cured product of the sealing resin composition was obtained by transfer molding the composition. This cured product had a diameter of 50 mm and a thickness of 3 mm.
Next, with respect to the obtained cured product, L 1 * value, a 1 * value, b 1 * value were obtained using Color Reader CR-13 (measurement mode: transmission, number of measurements: n = 3) manufactured by Konica Minolta Sensing Co., Ltd. It was measured. The CIE 1976 L * a * b * color system values were converted into numerical values by the main body of the apparatus, and CIE 1976 L * a * b * color system data were obtained. C * was obtained by {(a 1 * ) 2 + (b 1 * ) 2 } 1/2 . The obtained results are shown in Table 1.
(後硬化処理)
次に、上記硬化物を、175℃、2時間後硬化処理をおこなった。後硬化処理後の硬化物について、上記同様に、L2 *値、a2 *値、b2 *値を測定した。次いで、下記式より色差ΔE1を算出した。得られた結果を表1に示す。
ΔE1={(L1 *−L2 *)2+(a1 *−a2 *)2+(b1 *−b2 *)2}1/2
(Post-curing treatment)
Next, the cured product was post-cured at 175 ° C. for 2 hours. The cured product after post-curing treatment in the same manner as described above, L 2 * value, a 2 * value was measured b 2 * value. Next, a color difference ΔE 1 was calculated from the following formula. The obtained results are shown in Table 1.
ΔE 1 = {(L 1 * −L 2 * ) 2 + (a 1 * −a 2 * ) 2 + (b 1 * −b 2 * ) 2 } 1/2
(リフロー処理)
次に、後硬化処理後の硬化物を、260℃、1分間加熱処理をおこなった。加熱処理後の硬化物について、上記同様に、L3 *値、a3 *値、b3 *値を測定した。次いで、下記式より色差ΔE2を算出した。得られた結果を表1に示す。
ΔE2={(L2 *−L3 *)2+(a2 *−a3 *)2+(b2 *−b3 *)2}1/2
(Reflow processing)
Next, the cured product after the post-curing treatment was heat-treated at 260 ° C. for 1 minute. The cured product after the heat treatment in the same manner as described above, were L 3 * value, a 3 * value, the b 3 * values were measured. Next, the color difference ΔE 2 was calculated from the following formula. The obtained results are shown in Table 1.
ΔE 2 = {(L 2 * −L 3 * ) 2 + (a 2 * −a 3 * ) 2 + (b 2 * −b 3 * ) 2 } 1/2
<半導体装置の高温保管特性の評価>
実施例および比較例で得られた封止用樹脂組成物を用いて得られた半導体装置について、高温保管特性の評価を以下の手順で行った。
<Evaluation of high-temperature storage characteristics of semiconductor devices>
About the semiconductor device obtained using the resin composition for sealing obtained by the Example and the comparative example, the high temperature storage characteristic was evaluated in the following procedures.
低圧トランスファー成形機(コーキ精機社製「KTS−15」)を用いて、金型に、金型温度175℃、注入圧力9.8MPa、硬化時間300秒の条件で、上記封止用樹脂組成物を注入して半導体素子(シリコンチップ)が搭載されたリードフレーム等を封止成形し、16ピンSOP(半導体素子はHAST用標準品TEG9を使用し、半導体素子とリードフレームのインナーリード部とは25μm径の金線でボンディングされている。)を成形し、後硬化として175℃、2時間処理を行い半導体装置を作製した。
得られた半導体装置について、175℃の高温保管試験(HTSL)を行い、配線間の電気抵抗値が初期値に対し20%増加した素子が検出された時点を不良発生時間と判定した。
Using a low-pressure transfer molding machine (“KTS-15” manufactured by Koki Seiki Co., Ltd.), the above resin composition for sealing was applied to the mold under conditions of a mold temperature of 175 ° C., an injection pressure of 9.8 MPa, and a curing time of 300 seconds. The lead frame on which the semiconductor element (silicon chip) is mounted is sealed and molded, and a 16-pin SOP (the semiconductor element uses a standard product for HAST TEG9. What is the inner lead portion of the semiconductor element and the lead frame? Bonded with a 25 μm diameter gold wire.) Was molded and post-cured at 175 ° C. for 2 hours to produce a semiconductor device.
The obtained semiconductor device was subjected to a high temperature storage test (HTSL) at 175 ° C., and the time when an element in which the electrical resistance value between the wirings increased by 20% with respect to the initial value was detected was determined as the defect occurrence time.
実施例1〜12により得られた封止用樹脂組成物は、ΔE1およびΔE2がいずれも低く、これらの封止用樹脂組成物を用いて作製した半導体装置は外観に優れていた。また、これらの封止用樹脂組成物を用いて作製した半導体装置は不良発生までの時間が長く、高温保管特性に優れていた。
一方、比較例1〜3により得られた封止用樹脂組成物は、ΔE1およびΔE2がいずれも高く、これらの封止用樹脂組成物を用いて作製した半導体装置は外観に劣っていた。また、これらの封止用樹脂組成物を用いて作製した半導体装置は不良発生までの時間が短く、高温保管特性に劣っていた。
In the sealing resin compositions obtained in Examples 1 to 12, both ΔE 1 and ΔE 2 were low, and the semiconductor device produced using these sealing resin compositions was excellent in appearance. Moreover, the semiconductor device produced using these sealing resin compositions has a long time until occurrence of a defect and is excellent in high-temperature storage characteristics.
On the other hand, the sealing resin compositions obtained by Comparative Examples 1 to 3 had both high ΔE 1 and ΔE 2, and the semiconductor devices produced using these sealing resin compositions were inferior in appearance. . Moreover, the semiconductor device produced using these sealing resin compositions has a short time until occurrence of a defect and is inferior in high-temperature storage characteristics.
100 半導体装置
102 構造体
10 基材
20 半導体素子
30 封止材
40 ボンディングワイヤ
50 半田ボール
DESCRIPTION OF
Claims (9)
前記酸化防止剤(E)が、1分子中にヒンダードフェノール基を2個以上有するヒンダードフェノール系化合物、ヒンダードアミン系化合物およびチオエーテル系化合物から選択される一種または二種以上を含む封止用樹脂組成物。 A sealing resin composition comprising an epoxy resin (A), an inorganic filler (B), a curing agent (C), a colorant (D), and an antioxidant (E),
Sealing resin in which the antioxidant (E) contains one or more selected from hindered phenol compounds, hindered amine compounds and thioether compounds having two or more hindered phenol groups in one molecule Composition.
低圧トランスファー成形機を用いて、金型温度175℃、注入圧力9.8MPa、硬化時間300秒の条件で、当該封止用樹脂組成物を金型にトランスファー成形し、直径50mm、厚さ3mmの当該封止用樹脂組成物の硬化物を作製したとき、
前記硬化物の、CIE1976L*a*b*表色系で規定される測色値L*が30以上である封止用樹脂組成物。 In the sealing resin composition according to claim 1,
Using a low-pressure transfer molding machine, the sealing resin composition was transfer molded into a mold under the conditions of a mold temperature of 175 ° C., an injection pressure of 9.8 MPa, and a curing time of 300 seconds, and had a diameter of 50 mm and a thickness of 3 mm. When producing a cured product of the sealing resin composition,
The resin composition for sealing whose colorimetric value L * prescribed | regulated by CIE1976L * a * b * color system of the said hardened | cured material is 30 or more.
前記酸化防止剤(E)の含有量が、当該封止用樹脂組成物全体に対して0.1質量%以上2.0質量%以下である封止用樹脂組成物。 In the sealing resin composition according to claim 1 or 2,
The sealing resin composition whose content of the said antioxidant (E) is 0.1 mass% or more and 2.0 mass% or less with respect to the said whole resin composition for sealing.
前記硬化剤(C)がフェノールアラルキル樹脂、ノボラック型フェノール樹脂、多官能型フェノール樹脂からなる群から選択される一種または二種以上である封止用樹脂組成物。 In the sealing resin composition according to any one of claims 1 to 3,
A sealing resin composition, wherein the curing agent (C) is one or more selected from the group consisting of a phenol aralkyl resin, a novolac phenol resin, and a polyfunctional phenol resin.
前記エポキシ樹脂(A)がビスフェノール型エポキシ樹脂、ビフェニル型エポキシ樹脂、およびフェノールアラルキル型エポキシ樹脂からなる群から選択される一種または二種以上である封止用樹脂組成物。 In the sealing resin composition according to any one of claims 1 to 4,
A sealing resin composition wherein the epoxy resin (A) is one or more selected from the group consisting of bisphenol-type epoxy resins, biphenyl-type epoxy resins, and phenol-aralkyl-type epoxy resins.
粉粒体またはタブレット状である封止用樹脂組成物。 In the sealing resin composition according to any one of claims 1 to 5,
The resin composition for sealing which is a granular material or a tablet form.
光半導体素子を除く半導体素子の封止に用いられる封止用樹脂組成物。 In the sealing resin composition according to any one of claims 1 to 6,
A sealing resin composition used for sealing a semiconductor element excluding an optical semiconductor element.
前記基材の一面上に搭載された半導体素子と、
請求項1乃至7いずれか一項に記載の封止用樹脂組成物の硬化物により構成され、かつ前記半導体素子と、前記基材のうちの前記一面と、を封止する封止材と、
を備える半導体装置。 A substrate;
A semiconductor element mounted on one surface of the substrate;
A sealing material that is configured by a cured product of the sealing resin composition according to any one of claims 1 to 7 and that seals the semiconductor element and the one surface of the base material;
A semiconductor device comprising:
前記基材の一面上に搭載された複数の半導体素子と、
請求項1乃至7いずれか一項に記載の封止用樹脂組成物の硬化物により構成され、かつ前記複数の半導体素子と、前記基材のうちの前記一面と、を封止する封止材と、
を備える構造体。 A substrate;
A plurality of semiconductor elements mounted on one surface of the substrate;
A sealing material that is configured by a cured product of the sealing resin composition according to claim 1 and that seals the plurality of semiconductor elements and the one surface of the base material. When,
A structure comprising:
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Cited By (4)
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KR20180034247A (en) * | 2016-09-27 | 2018-04-04 | 스미토모 베이클리트 컴퍼니 리미티드 | Resin composition for encapsulating capacitive sensor, and capacitive sensor |
KR20190114968A (en) * | 2017-02-21 | 2019-10-10 | 나믹스 가부시끼가이샤 | Liquid epoxy resin sealant and semiconductor device |
JP2021080470A (en) * | 2021-02-12 | 2021-05-27 | 信越化学工業株式会社 | High strength cured product of white thermosetting epoxy resin, reflector substrate for optical semiconductor element, production method for them, and high strengthening method of the cured product |
JP7166476B1 (en) | 2022-03-29 | 2022-11-07 | Jx金属株式会社 | A strip-shaped copper alloy material and a method for using the same, a semiconductor lead frame, a semiconductor integrated circuit and an electronic device using the strip-shaped copper alloy material, a method for manufacturing a lead frame, and a method for using the strip-shaped copper alloy material as a lead frame |
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KR20180034247A (en) * | 2016-09-27 | 2018-04-04 | 스미토모 베이클리트 컴퍼니 리미티드 | Resin composition for encapsulating capacitive sensor, and capacitive sensor |
KR102352498B1 (en) * | 2016-09-27 | 2022-01-18 | 스미토모 베이클리트 컴퍼니 리미티드 | Resin composition for encapsulating capacitive sensor, and capacitive sensor |
KR20190114968A (en) * | 2017-02-21 | 2019-10-10 | 나믹스 가부시끼가이샤 | Liquid epoxy resin sealant and semiconductor device |
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KR102482539B1 (en) | 2017-02-21 | 2022-12-28 | 나믹스 가부시끼가이샤 | Liquid epoxy resin encapsulants and semiconductor devices |
JP2021080470A (en) * | 2021-02-12 | 2021-05-27 | 信越化学工業株式会社 | High strength cured product of white thermosetting epoxy resin, reflector substrate for optical semiconductor element, production method for them, and high strengthening method of the cured product |
JP7166476B1 (en) | 2022-03-29 | 2022-11-07 | Jx金属株式会社 | A strip-shaped copper alloy material and a method for using the same, a semiconductor lead frame, a semiconductor integrated circuit and an electronic device using the strip-shaped copper alloy material, a method for manufacturing a lead frame, and a method for using the strip-shaped copper alloy material as a lead frame |
JP7300049B1 (en) | 2022-03-29 | 2023-06-28 | Jx金属株式会社 | Method for manufacturing lead frame preform and method for manufacturing semiconductor package |
JP7300051B1 (en) | 2022-03-29 | 2023-06-28 | Jx金属株式会社 | Lead frames and semiconductor packages |
JP2023145952A (en) * | 2022-03-29 | 2023-10-12 | Jx金属株式会社 | Strip-shaped copper alloy material and method of using the same, semiconductor lead frame using strip-shaped copper alloy material, semiconductor integrated circuit and electronic equipment, and method for manufacturing lead frame and method of using strip-shaped copper alloy material as lead frame |
JP2023147168A (en) * | 2022-03-29 | 2023-10-12 | Jx金属株式会社 | Method for manufacturing lead frame element article and method for manufacturing semiconductor package |
JP2023147170A (en) * | 2022-03-29 | 2023-10-12 | Jx金属株式会社 | Lead frame and semiconductor package |
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