JP2016058133A - Static electricity generator - Google Patents

Abstract

  [PROBLEMS] Efficiently within a processing spaceStatic eliminationIt can be so.
  [Solution] RemovalAt least a pair of electrode devices (6) are juxtaposed at intervals in a plane intersecting the stream line of the supply air in the air removal passage (3) for supplying the discharge air to the electric treatment chamber (1). A positive voltage is applied to one electrode device (6) and a negative voltage is applied to the other electrode device (6) to generate static elimination air, and the generated static elimination air is transferred to the static elimination processing chamber (1). Supply.
[Selection] Figure 1

Description

  The present invention relates to a static elimination technology for eliminating static electricity in a space (hereinafter, simply referred to as a room) that is required to maintain a low dust state in a clean room, a hospital room, a food factory, etc. in the field of semiconductor manufacturing, and in particular, an explosion-proof static elimination. The present invention relates to an air generating device.

  One of the applicants of the present application is based on the basic configuration of a wire electrode that generates electric lines of force and a voltage applicator that applies a voltage to the wire electrode, as a means to remove static electricity in a clean room or a hospital room. A plurality of wires are stretched together to control energization so that adjacent wire electrodes have different polarities, and the polarity of the voltage supplied to each wire electrode is alternately switched at a predetermined cycle to neutralize the entire room. Suggested what to do. (Patent Document 1)

Japanese Patent No. 5552358

  In the previously proposed room static elimination technology, a plurality of pairs of electrode wires are stretched alongside the target room for static elimination treatment, so use may be restricted in the target room requiring explosion-proof specifications. .

  The present invention makes it possible to efficiently remove dust in the explosion-proof processing space by creating air ionized in the supply air system (hereinafter referred to as static elimination air) and supplying the static elimination air to the processing target chamber. The purpose is to do so.

  In order to achieve the above-mentioned object, according to the first aspect of the present invention, there is provided an air supply path for supplying static elimination air into the static elimination processing chamber, and at least one pair of electrode devices is spaced in a plane intersecting with the air flow. They are arranged in parallel, and a positive voltage is applied to one electrode device and a negative voltage is applied to the other electrode device.

  According to a second aspect of the present invention, there is provided a belt body in which an electrode device disposed in an air supply path for supplying static elimination air into a static elimination processing chamber is knitted with a conductive fiber twisted yarn on a frame formed of an insulating material. It is characterized by comprising a tape body having a brush shape by loosening both ends along the longitudinal direction.

  Furthermore, the invention described in claim 3 is that the electrode device disposed in the air supply path for supplying static elimination air into the static elimination processing chamber is spirally wound with a conductive wire in the longitudinal direction of the prismatic frame formed of an insulator. It is characterized by the fact that it is composed of pillars that have been made.

  Furthermore, according to the invention described in claim 4, the electrode device disposed in the air supply path for supplying the static elimination air into the static elimination processing chamber, the conductive wire in a frame-like frame body formed of an insulating material in a mesh shape. It is characterized by comprising a wound mesh.

  The invention according to claim 5 is characterized in that static elimination air is generated by the electrode device according to any one of claims 1 to 4, and the static elimination air is conveyed and supplied to a static elimination treatment chamber which is an explosion-proof space. .

  In the present invention, since the electrode device is arranged in the air supply path and the generated static elimination air is supplied from the air supply path to the processing target chamber, the neutralization is performed in the processing target chamber with the supplied static elimination air. can do.

  In addition, even if the neutralization positive air is passed through the conductive air supply path, the number of ions is reduced, but sufficient ions are maintained for neutralization and the ion balance after passing through the air supply path is very good. By preventing gas backflow to the generator, it is possible to cope with explosion protection.

FIG. 1A is a schematic configuration diagram of an apparatus for performing static elimination processing in an embodiment of the present invention. FIG. 1A shows an example in which the static elimination apparatus is arranged in an air supply path, and FIG. 1B shows generation of static elimination air. An example in which a device is provided separately will be shown. FIG. 2A is an example of an electrode, FIG. 2A is an example of a tape-shaped tape body, FIG. 2B is an example of a wire wound around a prismatic frame, and FIG. (c) shows the example comprised with the net. Fig. 3 (a) shows an example of arrangement of electrode devices, Fig. 3 (a) shows an example in which a pair of electrode bodies formed of a brush-like tape material are arranged side by side, and Fig. 3 (b) shows a square frame body in which wires are wound spirally. FIG. 3 (c) shows an example in which a pair of electrode bodies formed in a net is arranged in parallel. It is the schematic which shows an example of the experimental apparatus which measures the movement state of the static elimination air. It is a diagram which shows the change of the charge amount by the kind of electrode. It is a diagram which shows the change of the charge amount in an air supply path entrance. It is a diagram which shows the change of the charge amount in an air supply path exit. It is a diagram which shows the difference in the decay time of the charge amount in an exit by the difference in air supply path length.

  As one embodiment of the present invention, a clean room as shown in FIG. The static eliminator of the present invention is installed in the processing chamber (1), which is a clean room that requires room static elimination, the air supply path (3) for supplying air to the processing chamber (1), and the air supply path (3). The neutralizing device (6) is provided.

  The outside air is sent to the filter tower (10) by an air conditioner having a blower (not shown), and the coarse dust filter (7), medium performance filter (8), high performance filter (9) in the filter tower (10). ) Passes through clean air that meets the standard of the processing chamber (1), which is a clean room. The clean air passes through the electrode device (6) disposed in the air supply path (3) to become static elimination air, and is supplied from the ceiling portion of the processing chamber (1).

  In the case of this embodiment, only the electrode (11) attached to the electrode device (6) is arranged at the connection portion between the end of the air supply path (3) and the ceiling portion of the processing chamber (1), and the processing chamber It is also possible to supply the static elimination air to (1).

  FIG. 1B shows a case where a static elimination air generator (2) is separately provided as a different method of supplying static elimination air. The static elimination air generator (2) includes a blower (4) for taking in air, a filter (5) mounted on the discharge side of the blower (4), and an electrode disposed on the discharge air downstream side of the filter (5). Device (6). Then, the taken-in air passes through the electrode device (6) to become static elimination air, is fed to the air supply path (3), and merges with the air from the filter tower (10) to enter the processing chamber (1). Supplied.

  The form of the electrode (11) attached to the electrode device (6) is shown in FIG. The tape shown in FIG. 2 (a) is a tape formed by knitting three strands of fiber bundles, which are 200 bundles of stainless steel fibers having a diameter of 8 to 12 μm, into three bundles, and knitting these twisted yarns vertically and horizontally. 12) is cut to a width of 25 mm, the center in the width direction is clamped by an aluminum strip (13) having a width of 10 mm, and both ends not sandwiched by the aluminum strip (13) are 5 mm wide from the end. The warp yarns assembled in the longitudinal direction are extracted and formed into a brush shape. A lead wire (33) for applying a voltage is connected to the electrode (11), and electrical insulation is provided between the electrode (11) and the air supply path (3). An insulator (32) is arranged.

  FIG. 2B shows a 10 mm L-type aluminum material, which forms a 100 mm square × 400 mm square column frame (14), and a stainless steel fiber having a diameter of 8 to 12 μm is formed on the outside of the square column frame (14). This bundle is a spirally wound conductive wire (15) twisted at 10 mm intervals by twisting three bundles of fiber bundles into one bundle.

  In addition, what is shown in FIG. 2 (c) is a 10 mm L type aluminum material, which forms a frame-like frame (16) of 400 mm × 150 mm, and this frame (16) is arranged in two upper and lower steps at intervals of 10 mm. On the outside of the frame (16) arranged in two steps, a wire (15) made by twisting three bundles of fiber bundles made up of 200 bundles of stainless steel fibers having a diameter of 8 to 12 μm and twisted into three bundles is spaced 10 mm apart. It is wound vertically and horizontally. Therefore, the nets are positioned in two stages at intervals of 10 mm.

  The aforementioned electrode (11) is incorporated in a static elimination air generator (2) communicating with the static elimination air supply path (3) in the state shown in FIG. 3, for example. FIG. 3a shows a state in which the electrodes (11) formed in a brush shape are arranged. A pair of rectangular window holes (19) are arranged side by side on a partition wall (18) formed of an insulating material. (19) The two electrodes (11) formed in the shape of the brush as described above are placed in parallel on the frame (20) made of an insulating material, and the brush-like electrodes (11) are stretched in parallel. The frame (20) is attached to the window hole (19), a positive voltage is applied to the electrode (11) attached to one of the window holes (19a), and an electrode attached to the other window hole (19b) ( A negative voltage is applied to 11).

  The brush-like electrode (11) arranged in one window hole (19) portion may be one stretched per one frame (20), or may be stretched three or more.

  FIG. 3 (b) shows an arrangement state of an electrode (11) formed by spirally winding a conductive wire around a prismatic frame (14). A pair of spiral electrodes (11) are arranged in parallel in an air passage. A partition wall (21) made of an insulating material is arranged between the opposing surfaces of the spiral electrodes (11), and a positive voltage is applied to one spiral electrode (11) and a negative voltage is applied to the other spiral electrode (11). I try to let them.

  FIG. 3 (c) shows an arrangement state of the electrode (11) formed in a mesh shape in which a conductive wire is wound vertically and horizontally on a frame-like frame (17), and a partition wall (18) formed of an insulating material. A pair of rectangular window holes (19) are arranged side by side, and the electrodes (11) formed in a mesh shape having the above-described configuration are arranged in each window hole (19) part, and arranged in one window hole (19a). A positive voltage is applied to the electrode (11) and a negative voltage is applied to the electrode (11) disposed in the other window hole (19b).

  The movement of the static elimination air generated using the above-described electrode was confirmed with an experimental apparatus shown in FIG. This experimental apparatus includes a T-type duct (24) having an air intake port (23) formed on the upper surface of the upstream end, a longitudinal elbow pipe (25) connected to the downstream end of the T-type duct (24), and the elbow. The discharge T-type duct (26) connected to the lower end of the pipe (25) forms a transfer path for static elimination air, and an electrode (11) is arranged at the air intake of the T-type duct (24). The inlet side charging plate monitor (27) is positioned on the bottom surface in the T-shaped duct (24) facing the intake port (23), and the discharge T-shaped duct (facing the lower end opening of the elbow pipe (25)) 26) An outlet side charging plate monitor (28) is arranged on the bottom surface of the inside. In the figure, reference numeral (29) is a voltage supply power source for supplying a voltage to the electrode (11), and (30) is a flow rate arranged downstream of the outlet side charging plate monitor (28) in the discharge T-type duct (25). An adjustment damper, (31), is an exhaust fan disposed on the downstream side of the damper.

  In order to verify the difference in the static elimination effect depending on the type of electrode, when one brush-like electrode is arranged per window hole using the above-described experimental apparatus, two brush-like electrodes are arranged in parallel per window hole. With respect to the arrangement, the net electrode, the spiral electrode, and the time-dependent change in the charge amount on the entrance side was measured. The result is shown in FIG.

  As a result, it can be seen that the use of the brush-like electrode has the shortest decay time of the charge amount of the charging plate and the highest static elimination effect compared to the mesh electrode and the spiral electrode.

  In order to investigate the effect of static elimination in the static elimination air after passing through the transfer path, the temporal change in the charge amount at the entrance and exit of the transfer path was measured. The result on the entrance side is shown in FIG. 6, and the result on the exit side is shown in FIG.

  As a result, after a certain period of time has passed, the charge amount on the outlet side is almost zero, and it can be seen that the ion amount is maintained even when the charge-eliminating air is transported and has a sufficient charge-removing effect.

  Next, in order to investigate the change in the static elimination effect due to the length of the transfer path, the change in the charge amount decay time and the change in the charge amount at the outlet are set to the duct lengths 5.3 m, 6.8 m, and 8.8 m, The measurement was performed under conditions of a wind speed of 1.5 m / s, 3 m / s, and 4.5 m / s. The results are shown in FIG. 8 for Table 1 and the wind speed of 3 m / s.

  For example, assuming that the charge amount decay time is 60 seconds, the wind speed of the air flowing in the duct is 3 m / s, and based on the results shown in Table 1, ions effective for static elimination can be transferred up to a length of 12 m. I understand.

  In addition, if the ion balance in the static elimination air is biased, there is a risk of reverse charging after neutralizing static electricity. Therefore, in order to check the ion balance state in the static elimination air, the charging plates on the inlet side and the outlet side respectively. The amplitude of the charge amount was measured. The results are shown in Table 2.

  As a result, the amplitude of the charging amount on the inlet side (inlet amplitude) has a width of several tens of volts, while the amplitude of the charging amount on the outlet side (outlet amplitude) has decreased significantly to a width of several volts. It was confirmed that excess ions were neutralized by passing through the transfer path and were in an appropriate ion balance state. Thereby, if conveyance is continued, ion will be filled in a process chamber and the neutralization effect in the whole process chamber can be anticipated.

  The present invention can be applied not only to a space required to maintain a low dust state such as a clean room, a hospital room, and a food factory, but also to an explosion-proof processing space.

  DESCRIPTION OF SYMBOLS 1 ... Static elimination processing chamber, 3 ... Air supply path, 6 ... Electrode apparatus, 12 ... Tape, 14 ... Square column frame, 15 ... Conductive wire, 16 ... Frame frame, 20 ... Frame, 32 ... Insulator, 33 ... Lead.

Also, be passed through a static eliminator air to the air supply path of the conductive, decreasing the ion is seen, but sufficient ion was maintained at neutralizes, ion balance after the air supply passage passing very good, ion By preventing gas backflow to the generator, it is possible to cope with explosion protection.

Claims (5)

  In supplying static elimination air into the static elimination processing chamber (1), at least a pair of electrode devices (6) are spaced apart from the air supply path (3) for static elimination air in a plane intersecting the stream line of the supply air. The ionizing air generator is characterized in that ionized air is generated by applying a positive voltage to one electrode device (6) and a negative voltage to the other electrode device (6).   The electrode device (6) stretches a tape-like tape body by breaking both ends along the longitudinal direction of the tape (12) knitted with conductive fiber twisted yarn on a frame (20) formed of an insulating material. The static elimination air generator according to claim 1, which is provided.   The air generator for static elimination according to claim 1, wherein the electrode device (6) is a column body in which a conductive wire (15) is spirally wound in a longitudinal direction of a prismatic frame (14) formed of an insulator.   2. The static elimination air generator according to claim 1, wherein the electrode device (6) is a mesh body in which a conductive wire (15) is wound in a mesh pattern around a frame frame (16) formed of an insulating material.   When supplying static elimination air into the static elimination processing chamber (1), static elimination air is generated by the electrode device (6) according to any one of claims 1 to 4, and the static elimination air is eliminated. A static eliminator characterized by being conveyed and supplied to the processing chamber (1).

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