JP2016050162A - Manufacturing method of glass substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of a glass substrate whose surface is hardly scratched and whose manufacturing cost can be suppressed.SOLUTION: A manufacturing method of a glass substrate includes: a step of performing a surface treatment to a glass plate having a first surface and a second surface; a step of arranging a protective film on the first surface of the glass plate; a step of disposing the glass plate on a stage, which is a step where the glass plate is disposed on the stage so that the second surface is present on the side of the stage, and a protective member is interposed between the glass plate and the stage; and a step of forming a cut groove penetrating the protective film but not penetrating the second surface on the first surface of the glass plate in a state that the glass plate is fixed to the stage, which is a step where the glass plate is cut into pieces of smaller sizes by applying power such that the cut groove reaches the second surface, in this order.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a method for manufacturing a glass substrate.

  Glass substrates are used in various applications such as a carrier for supporting a semiconductor element and a cover member for protecting an internal member.

In general, glass substrates are
(I) a fragmentation step of cutting a large-size glass plate having the first and second surfaces into a final size or a size close thereto, and (ii) adjusting the thickness of the cut glass plate, Surface treatment process performed to add additional functions to the plate (for example, polishing process, etching process, film forming process, etc.)
It is manufactured through the process.

  Among these, in the step (i), the glass plate is disposed on the stage. The glass plate is disposed, for example, so that the second surface side is the stage side. Next, a cut groove (scribe) having a desired shape is formed on the glass plate using a cutting cutter from the upper side (that is, the first surface side). Usually, the kerf does not penetrate to the second surface. For this reason, force is then applied along the kerf of the glass plate. Thereby, the kerf propagates from the first surface to the second surface, and a small piece having a desired size can be separated from the glass plate having a large size.

  In the conventional manufacturing method, in the step (i), when the glass plate is placed on the stage or when the glass plate is recovered from the stage, the glass plate comes into contact with the stage and the glass plate is damaged. There is a risk. In addition, when forming a kerf with a cutting cutter, debris (cullet) adheres to the first surface of the glass plate, and when it moves relative to the glass plate, the glass plate may be damaged. . And when such a damage | wound arises on the surface of a glass plate, the problem that it becomes impossible to ship the glass substrate finally obtained as a product may arise.

  Moreover, in the conventional manufacturing method, it is necessary to surface-treat each cut glass plate in the process (ii). For this reason, there exists a problem that manufacturing cost rises.

  From such a point, the manufacturing method which can eliminate or suppress the problem which the manufacturing method of the conventional glass substrate has is calculated | required.

  The present invention has been made in view of such a background, and the present invention provides a method for manufacturing a glass substrate that is less likely to be scratched on the surface as compared with the prior art and that can suppress manufacturing costs. Objective.

In the present invention, a method for producing a glass substrate,
(A) performing a surface treatment on a glass plate having a first surface and a second surface opposite to the first surface;
(B) installing a protective film on the first surface of the glass plate;
(C) a step of disposing the glass plate on a stage, the glass plate being disposed on the stage so that the second surface is on the stage side, and the glass plate and the A step in which a protective member is interposed between the stages;
(D) In a state where the glass plate is fixed to the stage, a cut groove is formed on the first surface of the glass plate that does not penetrate to the second surface although the protective film penetrates. The glass plate is cut to a smaller size by applying a force such that the kerf propagates to the second surface;
Are provided in this order.

  According to the present invention, it is possible to provide a method for manufacturing a glass substrate that is less likely to be scratched on the surface as compared with the prior art and that can suppress the manufacturing cost.

It is the figure which showed typically the flow of the manufacturing method of the glass substrate by one Embodiment of this invention. It is the figure which showed typically the form as an example of a glass plate. It is the figure which showed the cross section of the 1st laminated body typically. It is the figure which showed typically the state by which the 1st laminated body has been arrange | positioned on the stage. It is the figure which showed typically the state after a kerf was formed in the 1st laminated body. It is the figure which showed typically the state after the several laminated | stacked 2nd laminated body was formed from the 1st laminated body. It is the figure which showed typically the state by which the 2nd laminated body was arrange | positioned on the 2nd stage for chamfering.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  In FIG. 1, the flow of the manufacturing method of the glass substrate by one Embodiment of this invention is shown typically.

As shown in FIG. 1, a glass substrate manufacturing method (hereinafter referred to as “first manufacturing method”) according to an embodiment of the present invention includes:
(A) performing a surface treatment on the glass plate having the first surface and the second surface facing the first surface (step S110);
(B) installing a protective film on the first surface of the glass plate (step S120);
(C) a step of disposing the glass plate on a stage, the glass plate being disposed on the stage so that the second surface is on the stage side, and the glass plate and the A step (step S130) in which a protective member is interposed between the stages;
(D) In a state where the glass plate is fixed to the stage, a cut groove is formed on the first surface of the glass plate that does not penetrate to the second surface although the protective film penetrates. And then, the step of cutting the glass sheet to a smaller dimension by applying a force such that the kerf propagates to the second surface (step S140);
(E) A step of chamfering the cut glass plate in a state where the cut glass plate is sucked and fixed to the second stage (step S150);
(F) peeling the protective film (step S160);
Have

  Note that step S150 is not an essential step and may be omitted.

  Hereinafter, each step will be described in detail with reference to FIGS. 2 to 7 are diagrams schematically showing each process in the first manufacturing method.

(Step S110)
First, a glass plate is prepared as a workpiece.

  In FIG. 2, the form as an example of a glass plate is shown typically.

  As shown in FIG. 2, the glass plate 110 has a first surface 115 and a second surface 117 that face each other. The glass plate 110 has dimensions of a length a (length in the X direction), width b (length in the Y direction), and thickness t (length in the Z direction), and has a substantially rectangular shape. Have.

  However, this is merely an example, and the glass plate 110 may have any shape. For example, the glass plate 110 may have a shape such as a square shape, a trapezoidal shape, a rhombus shape, a circular shape, and an elliptical shape. Moreover, the glass plate 110 may be supplied in a roll-to-roll form, for example.

  Next, various surface treatments are performed on the first surface 115 and / or the second surface 117 of the glass plate 110. The surface treatment to be performed may be, for example, a polishing treatment, an etching treatment, and / or a film forming treatment.

  Here, the polishing process includes, for example, a mechanical polishing process, a chemical polishing process, and a chemical mechanical polishing process.

  The etching process includes a process (including a roughening process) for patterning the first surface 115 and / or the second surface 117 using, for example, hydrofluoric acid.

  Furthermore, the film forming process includes a process of forming each functional layer by, for example, a sputtering method, a vapor deposition method, a PVD method, a CVD method, an electroplating method, an electroless plating method, and a coating method.

  By such surface treatment, for example, the thickness t of the glass plate 110 may be set to a desired value. Alternatively, for example, the glass plate 110 may be provided with characteristics such as anti-glare characteristics, conductivity, and chemical resistance by surface treatment.

  The specific examples of the surface treatment described above are merely examples, and other surface treatments may be performed on the glass plate 110.

(Step S120)
Next, a protective film is installed on the first surface 115 of the glass plate 110 to form a first laminate.

  In FIG. 3, the cross section of the 1st laminated body 130 is shown typically. As shown in FIG. 3, the first laminated body 130 is configured by forming a protective film 120 on the entire first surface 115 of the glass plate 110. Note that, for clarification of the drawing, it should be noted that the layer formed by the surface treatment in step S110 is not shown in FIG.

  The protective film 120 may be formed of, for example, an adhesive film.

  As an adhesive film, a commercially available resin film (for example, polyethylene film) etc. can be used, for example.

  If the protective film 120 can protect the 1st surface 115 of the glass plate 110 appropriately in a subsequent step, the material and arrangement method will not be restricted especially. However, since the protective film 120 needs to be finally removed, it is preferable that the protective film 120 is selected from those that can be peeled off from the glass plate 110 relatively easily.

  As shown in FIG. 3, it should be noted that no protective film is provided on the second surface 117 side of the glass plate 110 in the first laminate 130.

(Step S130)
Next, the 1st laminated body 130 is arrange | positioned on a stage.

  FIG. 4 schematically shows a state where the first stacked body 130 is arranged on the stage 150.

  As shown in FIG. 4, the first laminate 130 is arranged on the stage 150 so that the second surface 117 side of the glass plate 110 is on the stage 150 side. In addition, the first stacked body 130 is disposed on the stage 150 such that the protective member 140 is interposed between the first stacked body 130 and the stage 150.

  The protective member 140 has a role of preventing the second surface 117 of the glass plate 110 from being damaged when the first laminated body 130 comes into contact with the stage 150 or is rubbed with the stage 150. Accordingly, the protective member 140 is made of a soft and flexible material such as a paper member and a buffer member. The protective member 140 may be a porous body.

  The stage 150 may have a suction mechanism. For example, in the example shown in FIG. 4, the stage 150 has a plurality of suction holes 155, and the suction holes 155 are connected to suction means (not shown). In such a “suction stage” 150, the first stacked body 130 placed thereon can be sucked and fixed to the surface 152 of the stage 150 together with the protective member 140 by suction from the suction hole 155.

  When such a suction stage 150 is used, the protective member 140 preferably has a thin thickness (for example, 500 μm or less) and air permeability.

(Step S140)
Next, a scribe (also referred to as a “grooving groove”) is formed on the first surface 115 of the glass plate 110 with the first laminated body 130 fixed on the stage 150.

  FIG. 5 shows a state after the cut groove 160 is formed in the first stacked body 130.

  As shown in FIG. 5, the kerfs 160 are formed so as to penetrate the protective film 120 of the first laminated body 130 but not to the second surface 117 of the glass plate 110.

  In FIG. 5, a plurality of kerfs 160 are formed along a direction perpendicular to the X direction (ie, the Y direction) when viewed from above. However, in addition to this, the kerf 160 is also formed, for example, in a direction parallel to the X direction when viewed from above. Therefore, by forming the kerfs 160, the protective film 120 of the first stacked body 130 is segmented into a protective film 121 having a predetermined size, and these segmented protective films 121 are separated from each other.

  Such a kerf 160 may be formed by, for example, a cutting cutter.

  Next, a force is applied so that the tip of the kerf 160 propagates to the second surface 117 of the glass plate 110, whereby the glass plate 110 of the first laminated body 130 is cut into a predetermined size.

  FIG. 6 shows a state after a plurality of fragmented second stacked bodies 170 are formed from the first stacked body 130 by such an operation.

  As shown in FIG. 6, each second laminated body 170 includes a small piece of the second glass plate 111 and the first surface of the second glass plate 111 (the first surface 115 of the glass plate 110. Therefore, the fragmentation protective film 121 is provided on the “first surface 115”.

  The shape of the second stacked body 170 is not particularly limited. The second stacked body 170 may have a top view, for example, a square shape, a rectangular shape, a trapezoidal shape, a rhombus shape, a circular shape, an elliptical shape, or the like. Further, the second laminate 170 may not be symmetrical but may be asymmetrical such as an unequal triangle.

(Step S160)
Then, the glass substrate which has a desired dimension shape can be manufactured by peeling the protective film 121 fragmented from the 2nd laminated body 170. FIG.

  The dimension and shape of the glass substrate are not particularly limited. For example, the glass substrate may have a shape such as a square shape, a rectangular shape, a trapezoidal shape, a rhombus shape, a circular shape, and an elliptical shape.

Here, as described above, in the conventional manufacturing method, the glass substrate is
(I) A fragmentation process for cutting a large sized glass sheet having first and second surfaces to a final dimension or a dimension close thereto, and (ii) performed to add additional functions to the cut glass sheet. It is manufactured through the surface treatment process.

  Here, in the conventional manufacturing method, in the step (i), when the glass plate is placed on the stage or when the glass plate is recovered from the stage, the glass plate comes into contact with the stage, and the glass plate There is a risk of scratching. In addition, when forming a kerf with a cutting cutter, debris (cullet) adheres to the first surface of the glass plate, and when it moves relative to the glass plate, the glass plate may be damaged. .

  However, in the first manufacturing method of the present invention, the protective film 120 is disposed on the first surface 115 of the glass plate 110 in step S120. In step S <b> 130, the protective member 140 is disposed between the second surface 117 of the glass plate 110 and the stage 150.

  For this reason, in the 1st manufacturing method of this invention, when handling the glass plate 110, it can suppress significantly that the glass plate 110 contact | abuts to the stage 150 and a glass plate 110 is damaged. Further, it is possible to significantly suppress the glass plate 110 from being damaged by debris (cullet) attached to the first surface 115 of the glass plate 110 when the kerfs 160 are formed in step S140.

  Moreover, in the conventional manufacturing method, it is necessary to perform each surface treatment with respect to each cut glass plate in the process (ii). For this reason, there exists a problem that manufacturing cost rises.

  In contrast, in the first manufacturing method of the present invention, in step S110, the surface treatment is performed before the glass plate 110 is cut into small pieces. Then, after the surface treatment is performed on the glass plate 110, the glass plate 110 is cut into small pieces in step S140.

  Therefore, in the first manufacturing method of the present invention, it is not necessary to perform the same surface treatment many times, and an increase in manufacturing cost can be suppressed.

  Due to such effects, in the first manufacturing method of the present invention, the surface is less likely to be scratched compared to the conventional method, and the manufacturing cost can be suppressed.

  In the first manufacturing method according to the present invention, the protective film 120 is disposed on the first surface 115 of the glass plate 110 in step S120, but the protective film is not disposed on the second surface 117. It has the characteristics.

  Here, when a protective film is also disposed on the second surface 117, the following problems may occur. That is, in step S140, when the glass plate 110 is to be shrunk into the second glass plate 111 using the propagation at the tip of the kerf 160, the protective film disposed on the second surface 117 is It plays the role which connects each 2nd glass plate 111, and it becomes difficult to isolate | separate the 2nd glass plate 111 mutually.

  On the other hand, in the first manufacturing method according to the present invention, since the protective film is not provided on the second surface 117, the end of the kerf 160 reaches the second surface 117 of the glass plate 110. As long as this is done, the fragmented second stacked body 170 can be easily separated from each other.

(Step S150)
A glass substrate having a desired size and shape can be manufactured through the above-described steps S110 to S140 and step S160. However, if necessary, the second glass plate 111 may be chamfered with respect to the second laminated body 170 after the above-described step S140.

  The chamfering process is usually performed in a state where the second stacked body 170 is fixed on the second stage.

  FIG. 7 schematically shows a state where the second stacked body 170 is arranged on the second stage 180 for chamfering as an example.

  The second stage 180 preferably has a surface 182 that is one or more times smaller than the second stacked body 170. Thereby, it becomes possible to chamfer the entire circumference of the second glass plate 111 of the second laminate 170.

  As shown in FIG. 7, the second stage 180 may have a suction mechanism. For example, in the example shown in FIG. 7, the second stage 180 has a suction hole 185, and the suction hole 185 is connected to suction means (not shown). When such a “suction stage” 180 is used, the second stacked body 170 placed thereon can be sucked and fixed to the surface 182 of the second stage 180 by suction from the suction hole 185. .

  The chamfering process is performed, for example, by grinding the end face of the second laminate 170 using a rotating grindstone such as a grinder.

  Here, in the conventional method for manufacturing a glass substrate, the glass plate may come into contact with the second stage when the glass plate is chamfered, and the glass plate may be damaged.

  On the other hand, in the first manufacturing method according to the present invention, the second stacked body 170 has the second stage such that the fragmentation protective film 121 side is the surface 182 side of the second stage 180. 180.

  In this case, when the second glass plate 111 is chamfered, the second glass plate 111 abuts against the second stage 180 to significantly suppress the second glass plate 111 from being damaged. Is possible.

  Thereafter, as described above, in step S160, the fragmentation protective film 121 is peeled from the second stacked body 170, whereby a glass substrate with chamfered ends can be obtained.

  The embodiment of the present invention has been described above using the first manufacturing method as an example. However, the above description is merely an example, and it will be apparent to those skilled in the art that the present invention may be practiced in other embodiments.

DESCRIPTION OF SYMBOLS 110 Glass plate 111 2nd glass plate 115 1st surface 117 2nd surface 120 Protective film 121 Fragmentation protective film 130 1st laminated body 140 Protective member 150 Stage 152 Surface 155 Suction hole 160 Cut groove 170 2nd Laminated body 180 Second stage 182 Surface 185 Suction hole

Claims (6)

A method of manufacturing a glass substrate,
(A) performing a surface treatment on a glass plate having a first surface and a second surface opposite to the first surface;
(B) installing a protective film on the first surface of the glass plate;
(C) a step of disposing the glass plate on a stage, the glass plate being disposed on the stage so that the second surface is on the stage side, and the glass plate and the A step in which a protective member is interposed between the stages;
(D) In a state where the glass plate is fixed to the stage, a cut groove is formed on the first surface of the glass plate that does not penetrate to the second surface although the protective film penetrates. The glass plate is cut to a smaller size by applying a force such that the kerf propagates to the second surface;
In this order.   The manufacturing method according to claim 1, wherein the stage has a suction hole, and the glass plate is sucked and fixed to the stage.   The said protective film is a manufacturing method of Claim 1 or 2 comprised with an adhesive film. Furthermore, after step (d),
(E) chamfering the cut glass plate with the cut glass plate fixed to the second stage,
In the step (e), the cut glass plate is arranged on the second stage such that the protective film is on the second stage side. The manufacturing method as described in any one.   5. The manufacturing method according to claim 1, wherein the second stage has a suction hole, and the cut glass plate is suction-fixed to the second stage.   The manufacturing method according to claim 1, wherein the protective member is selected from the group consisting of paper and a porous body.

Images