JP2016017746A - Pressure detecting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pressure detecting device that can work on lead frames in a simple process and further secure a sufficient land area.SOLUTION: A pressure detecting device has a housing 21 in which a cavity 23 is formed, a pressure sensor 15 installed in the cavity 23 and multiple lead frames 31 embedded in the housing 21. Each of the multiple lead frames 31 has an upper lead frame 31a exposed into the inside of the cavity 23 and electrically connected to the pressure sensor 15, connecting parts 31d extending in a thickness direction of the housing 21 and an exposed part 31e exposed from a bottom face 21b of the housing 21. The connecting parts 31d are arranged neighboring one another, the upper lead frame 31a is bent from the connecting parts 31d in the same direction, and spaces among the connecting parts 31d on a side of the upper lead frame 31a are greater than spaces among the connecting parts 31d on a side of the exposed part 31e.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a pressure detection device, and more particularly, to a structure of a lead frame electrically connected to a pressure sensor.

  Patent Document 1 listed below discloses an invention related to a pressure detection device (described as a pressure sensor package in Patent Document 1) having high lead frame positional accuracy and waterproof performance. FIG. 10A is a top view of a conventional pressure detection device, and FIG. 10B is a bottom view of the conventional pressure detection device. FIG. 11 is a cross-sectional view taken along the line XI-XI in FIGS. 10A and 10B and viewed from the arrow direction.

  As shown in FIGS. 10A and 11, the conventional pressure detection device 110 is electrically connected to a pressure sensor 115 that detects pressure, a housing 121 that houses the pressure sensor 115, and the pressure sensor 115. Lead frame 131. A cavity 123 is formed in the housing 121, and a pressure sensor 115 is installed in the cavity 123.

  As shown in FIG. 10A, the inner end 131 a of the lead frame 131 is exposed to the cavity 123 and is electrically connected to the pressure sensor 115 via the bonding wire 117. As shown in FIG. 11, the lead frame 131 is bent from the inner end 131a to the bottom surface 121b side of the housing 121 and is provided so as to protrude from the bottom surface 121b. As shown in FIG. 10B, the outer end portion 131b of the lead frame 131 protruding from the bottom surface 121b is bent in the outer peripheral direction of the bottom surface 121b to form an extending portion 131c.

  In the pressure detection device 110 of the conventional example, the lead frame 131 has the inner end portion 131a and the outer end portion 131b oriented in the same direction as shown in FIG. 11 by bending a flat lead frame. The housing 121 is formed integrally with the lead frame 131 using a resin material. Thereby, since the periphery of the connecting portion 131d that connects the inner end portion 131a and the outer end portion 131b is filled with the resin constituting the housing 121, the waterproof performance of the pressure detection device 110 of the conventional example can be improved.

Republished patent WO2010 / 016439

  However, as shown in FIG. 10A, the plurality of inner end portions 131a extend from the corner portion of the pressure introducing recess 124 toward each side of the pressure sensor housing recess 125, and are directed in different directions. . For this reason, when the lead frame 131 is formed by bending a flat metal plate, it is necessary to separately fold a plurality of lead frames 131, which causes a problem that the manufacturing process is complicated.

  FIG. 12A is a top view of the pressure detection device of the comparative example, and FIG. 12B is a bottom view of the pressure detection device of the comparative example. As shown in FIG. 12A, the inner end portions 231a of the plurality of lead frames 231 adjacent in the X1-X2 direction are directed in the same direction (Y1 direction or Y2 direction). Therefore, when forming the lead frame 231, a plurality of lead frames 231 can be bent in the same process, and the pressure detection device 210 can be manufactured in a simple process.

  The inner end portion 231a is drawn upward from the outer end portion 231b, and the interval between the adjacent inner end portions 231a is formed to be equal to the interval between the outer end portions 231b. The outer end portion 231b is connected to an external circuit (not shown) for taking out a detection signal, and the outer end portion 231b is a central portion of the bottom surface 221b in order to reduce the size of the pressure detection device 210 and facilitate connection. It is formed close to. For this reason, as shown in FIG. 12A, the interval between the adjacent inner end portions 231a is narrowed, and the area of the inner end portion 231a exposed to the pressure introducing recess 224 is reduced, so that the pressure sensor 215 is connected. For this reason, it becomes impossible to secure a land area. Further, when the length of the inner end portion 231a extending is short, the bending stability of the inner end portion 231a cannot be obtained in the process of forming the lead frame 231 by bending, and the processing accuracy is lowered.

  By increasing the outer circumference of the pressure introducing recess 224, it is possible to increase the exposed area even when the interval between the adjacent inner end portions 231a is narrow. In this case, the pressure detection device 210 is small. There is a problem that goes against Further, when the area of the pressure sensor housing recess 225 is reduced, the exposed inner end 231a can be increased, but there is a problem that the area of the pressure sensor housing recess 225 cannot be secured.

  SUMMARY OF THE INVENTION An object of the present invention is to solve the above-described problems and provide a pressure detection device that can process a lead frame with a simple process and can secure a land area.

  The pressure detection device of the present invention includes a housing in which a cavity is formed, a pressure sensor installed in the cavity, and a plurality of lead frames embedded in the housing, and each of the plurality of lead frames includes the cavity. An upper lead frame that is exposed to the inside and electrically connected to the pressure sensor, a connecting portion that extends in the thickness direction of the housing, and an exposed portion that is exposed from the bottom surface of the housing are adjacent to each other. In the two arranged lead frames, the connecting portions are arranged adjacent to each other, and the upper lead frame is bent in the same direction from the connecting portions, and the connecting portions on the upper lead frame side are connected to each other. The interval is larger than the interval between the connection portions on the exposed portion side.

  According to this, since the upper lead frame is bent in the same direction from the connection portion, when the lead frame is bent and formed, a plurality of upper lead frames can be bent and formed in the same process. Therefore, the lead frame can be processed by a simple process. Further, since the interval between the connecting portions on the upper lead frame side is larger than the interval between the connecting portions on the exposed portion side, the interval between the upper lead frames bent from the connecting portion can also be increased. Therefore, the area of the upper lead frame exposed in the cavity is increased, and the land area can be secured.

  Therefore, the pressure detection device of the present invention can process the lead frame by a simple process and can secure a land area.

  The adjacent connecting portions are preferably bent in directions opposite to each other in a direction intersecting the thickness direction of the housing. According to this, the space | interval of the connection parts in the upper lead frame side can be enlarged, and the area of the upper lead frame exposed in a cavity can be enlarged. Moreover, since the leak path (gap) between the connection portion and the housing can be made longer, the airtightness can be improved.

  It is preferable that an outer edge on the outer side of the adjacent connecting portions is formed on the outer lead side on the upper lead frame side. According to this, the area of the upper lead frame that is bent from the connection portion and exposed in the cavity can be reliably increased.

  The cavity has a pressure introduction recess and a pressure sensor storage recess in order in the depth direction, and the pressure introduction recess and the pressure sensor storage recess are formed in a substantially rectangular shape with different phases in plan view. The upper lead frame is preferably exposed at a corner portion of the pressure introducing recess. According to this, the area of the pressure introduction recess and the pressure sensor storage recess is effectively used to increase the area of the upper lead frame exposed in the cavity to secure a land area, and Miniaturization is possible.

  It is preferable that the upper lead frame extends toward the pressure sensor housing recess, and an end portion of the upper lead frame is formed with an inclined portion facing the outer periphery of the pressure sensor housing recess. According to this, the area of the exposed upper lead frame can be increased by effectively utilizing the area of the pressure introducing recess.

  In the adjacent lead frames, the exposed portions are preferably bent in the same direction as the upper lead frame. According to this, when the lead frame is bent to form the exposed portion and the connecting portion, the exposed portion and the connecting portion can be bent and formed in the same process. Therefore, it can be manufactured by a simple process. In addition, the leak path (gap) connecting the bottom surface of the housing and the cavity can be lengthened, gas intrusion from other than the pressure introducing portion can be suppressed, and airtightness can be improved.

  Preferably, the exposed portion includes a protruding portion that protrudes from the bottom surface, and a flat portion that forms the same plane as the bottom surface on the outer peripheral side of the bottom surface with respect to the protruding portion. According to this, the protruding portion is formed on the center side of the bottom surface to facilitate connection with an external circuit and to reduce the size of the pressure detection device.

  According to the pressure detection device of the present invention, it is possible to process a lead frame with a simple process and to secure a land area.

It is a perspective view of the pressure detection apparatus in the embodiment of the present invention. It is a top view of the pressure detection apparatus of this embodiment. It is a bottom view of the pressure detection apparatus of this embodiment. It is sectional drawing of a pressure detection apparatus when it cut | disconnects by the IV-IV line | wire of FIG. 3, and it sees from the arrow direction. It is sectional drawing of a pressure detection apparatus when it cut | disconnects by the VV line | wire of FIG. 3, and it sees from the arrow direction. The process drawing which forms a lead frame by bending is shown, (a) The top view of a lead frame in the state where it is not bent, and (b) The typical sectional view showing the bending process. It is sectional drawing when the pressure detection apparatus of this embodiment is integrated in an electronic device. It is a partial expanded sectional view when a wiring board is connected to a pressure detection apparatus. It is sectional drawing which shows the pressure detection apparatus of the modification in this embodiment. (A) It is a top view of the pressure detection apparatus of a prior art example, (b) It is a bottom view of the pressure detection apparatus of a prior art example. It is sectional drawing of a pressure detection apparatus when it cut | disconnects by the XI-XI line shown to Fig.10 (a) and FIG.10 (b) and it sees from the arrow direction. (A) It is a top view of the pressure detection apparatus of a comparative example, (b) It is a bottom view of the pressure detection apparatus of a comparative example.

  Hereinafter, a pressure detection device according to a specific embodiment will be described with reference to the drawings. In addition, the dimension of each drawing is changed and shown suitably.

  FIG. 1 is a perspective view of a pressure detection device according to an embodiment. FIG. 2 is a top view of the pressure detection device, and FIG. 3 is a bottom view of the pressure detection device. FIG. 4 is a cross-sectional view of the pressure detection device as viewed from the direction of the arrow cut along the line IV-IV in FIG. FIG. 5 is a cross-sectional view seen from a direction different from FIG. 4, and is a cross-sectional view of the pressure detection device as seen from the direction of the arrow cut along line VV in FIG. 3.

  As shown in FIG. 1, the pressure detection device 10 according to the present embodiment includes a housing 21 in which a cavity 23 is formed, a pressure sensor 15 installed in the cavity 23, and is embedded in the housing 21 and exposed in the cavity 23. A lead frame 31.

  In the present embodiment, the housing 21 is formed by resin molding using a thermoplastic resin. As the thermoplastic resin, for example, a liquid crystal polymer (Liquid Crystal Polymer, LCP), polyphenylene sulfide (PPS), polypropylene (PP), polybutylene terephthalate (PBT), polycarbonate (PC), or the like can be used.

  As shown in FIGS. 4 and 5, the cavity 23 formed in the housing 21 includes a pressure introduction recess 24 and a pressure sensor storage recess 25 in order in the depth direction. A pressure sensor 15 is installed on the bottom surface of the pressure sensor housing recess 25, and a potting resin 16 is provided in the pressure introduction recess 24 so as to cover the pressure sensor 15. The potting resin 16 is a gel-like viscoelastic body, and for example, a silicone resin or a fluororesin is used.

  As shown in FIG. 2, the pressure sensor housing recess 25 has a substantially rectangular planar shape corresponding to the outer shape of the pressure sensor 15. Further, the pressure introducing recess 24 has a substantially rectangular planar shape with a diagonal length of the pressure sensor housing recess 25 as one side. The pressure introducing recess 24 and the pressure sensor housing recess 25 are formed with a phase difference of 45 °. Thereby, an external pressure can be introduced from the pressure introducing recess 24, and the bonding wire 17 and the pressure sensor 15 are connected to the potting resin 16 by making the space of the pressure sensor receiving recess 25 smaller than the pressure introducing recess 24. Can be reliably covered.

  The pressure sensor 15 has a MEMS (Micro Electro Mechanical System) structure, and includes a diaphragm portion that receives pressure and a strain detection element that detects deformation of the diaphragm portion. For example, a piezoresistive element can be used as the strain sensing element, and the strain sensing element is provided around the diaphragm portion. The diaphragm portion is deformed according to the pressure applied to the potting resin 16 in the pressure introducing recess 24, and the resistance of the piezoresistive element changes. Based on this resistance change, the pressure applied to the pressure detection device 10 can be detected.

  As shown in FIG. 4, the lead frame 31 includes an upper lead frame 31a exposed inside the cavity 23 and electrically connected to the pressure sensor 15, a connection portion 31d extending in the thickness direction of the housing 21, and a housing. And an exposed portion 31e exposed from the bottom surface 21b of the structure 21. A detection signal from the pressure sensor 15 is transmitted to an external circuit via the lead frame 31.

  As shown in FIG. 4, the upper lead frame 31 a is bent from the outer peripheral side of the housing 21 toward the pressure sensor housing recess 25. The upper lead frame 31 a is provided to be exposed in the pressure introducing recess 24, and the exposed upper lead frame 31 a and the pressure sensor 15 are connected by the bonding wire 17.

  As shown in FIG. 4, the connection portion 31 d bent from the upper lead frame 31 a at the first bent portion 31 p extends in the thickness direction of the housing 21 and is exposed from the bottom surface 21 b of the housing 21. The lead frame 31 exposed on the bottom surface 21b is bent at the second bent portion 31q in the same direction as the upper lead frame 31a, so that a protruding portion 31b protruding from the bottom surface 21b of the housing 21 is formed. In the present embodiment, the lead frame 31 is integrally molded with the housing 21, and the periphery of the connection portion 31d that connects the upper lead frame 31a and the protruding portion 31b and the upper lead frame 31a and the protruding portion 31b is as follows. The housing 21 is filled with a resin material. Thereby, the leak path | route which connects the cavity 23 inside and the exterior of the housing 21 can be lengthened, and airtightness can be improved.

  As shown in FIG. 3, a plurality of lead frames 31 are provided on the bottom surface 21b, and the protruding portions 31b adjacent in the X1-X2 direction are formed to extend in the same direction (Y1 direction or Y2 direction). The adjacent protruding portions 31b are bent by about 90 ° from the center side of the bottom surface 21b to the outer peripheral direction at the third bent portion 31r, and are opposite to each other from the center side of the bottom surface 21b to the outer peripheral side (X1 direction or X2 direction). It extends in the direction.

  In the pressure detection device 10 of the present embodiment, as shown in FIG. 5, the exposed portion 31 e exposed on the bottom surface 21 b includes a protruding portion 31 b protruding from the bottom surface 21 b and a bottom surface on the outer peripheral side of the bottom surface 21 b relative to the protruding portion 31 b. 21b and the flat part 31c which comprises the same plane. The flat portion 31c is formed continuously with the protruding portion 31b, and is bent by forming a step with the protruding portion 31b so as to be recessed in the thickness direction of the housing 21 with respect to the protruding portion 31b at the fourth bent portion 31s. It extends in the outer peripheral direction from the center of 21b. As shown in FIGS. 3 and 5, the bottom surface 21 b of the housing 21 is formed with a relief portion 22 that is recessed in the thickness direction, and the extended end portion of the flat portion 31 c is located in the relief portion 22 and is located in the housing. It is formed inside the side surface of 21.

  Further, as shown in FIG. 3, in each lead frame 31, a protruding portion 31b is formed on the center side of the bottom surface 21b, and the flat portion 31c and the bottom surface 21b are the same on the outer peripheral side of the protruding portion 31b. It constitutes a plane. Thereby, in the bottom face 21b of the housing 21, the flat surface which does not have a part which goes around the outer periphery and protrudes from the bottom face 21b is formed. Therefore, when the pressure detection device 10 is incorporated into an electronic device, the outer periphery of the bottom surface 21b of the housing 21 can be brought into contact with an external support member as the contact surface 21c. Thereby, since the nonuniformity of the stress distribution generated in the housing 21 can be suppressed and the occurrence of distortion of the housing 21 can be suppressed, the airtightness between the housing of the external electronic device and the housing 21 can be ensured. it can.

  In the pressure detection device 10 of the present embodiment, as shown in FIG. 5, two lead frames 31, 31 are arranged adjacent to each other in the X1-X2 direction. In the adjacent lead frames 31, 31, the connection portions 31d, 31d are arranged adjacent to each other, and the two upper lead frames 31a, 31a are bent in the same direction (Y1 direction or Y2 direction) from the connection portions 31d, 31d. It has been. Accordingly, when the lead frame 31 is bent and formed using a flat metal plate, the plurality of upper lead frames 31a and 31a can be bent and formed in the same process, and the lead frame is processed in a simple process. can do.

  Further, as shown in FIG. 5, the adjacent connecting portions 31d and 31d are formed with fifth bent portions 31t and 31t, and are opposite to each other in the direction intersecting the thickness direction of the housings 21 and 21. It is bent. That is, the interval between the connection portions 31d and 31d on the upper lead frame 31a side is formed larger than the interval between the connection portions 31d and 31d on the exposed portion 31e side. Thereby, the space | interval of upper lead frame 31a, 31a continuous with the connection part 31d can be enlarged.

  As shown in FIG. 2, the pressure introduction recess 24 and the pressure sensor storage recess 25 are formed in a substantially rectangular shape having a phase difference of 45 ° in plan view, and the area of the pressure introduction recess 24 is the pressure introduction recess 24. The side 24a increases from the center toward the outside. As shown in FIG. 2, the upper lead frame 31 a extends in the Y1 direction or the Y2 direction and is exposed at the corner portion of the pressure introducing recess 24.

  Therefore, as described above, by forming the fifth bent portion 31t in the connection portion 31d and increasing the interval between the upper lead frames 31a and 31a continuous with the connection portion 31d, as shown in FIG. The area of the upper lead frame 31a exposed in the cavity 23 can be increased, and a land area for electrical connection with the pressure sensor 15 can be secured.

  Further, by forming the pressure introducing recess 24 and the pressure sensor housing recess 25 in different phases, the area in the cavity 23 can be used effectively. Therefore, the area of the exposed upper lead frames 31a and 31a can be increased and the land area can be ensured without reducing the area of the pressure sensor housing recess 25 or increasing the area of the pressure introduction recess 24. Therefore, it is possible to reduce the size of the pressure detection device 10 while securing the area for storing the pressure sensor 15 and the land area.

  As described above, the pressure detection device 10 according to the present embodiment can process the lead frame with a simple process and can ensure a large land area.

  As shown in FIG. 2, the upper lead frame 31 a extends in the Y1 direction or the Y2 direction toward the pressure sensor housing recess 25, and the end of the upper lead frame 31 a faces the outer periphery of the pressure sensor housing recess 25. An inclined portion 31f is formed. According to this, compared with the case where the end portion of the upper lead frame 31a is rectangular, the area of the exposed upper lead frame 31a (land area) is increased by effectively using the area of the pressure introducing recess 24. Can do.

  Further, as shown in FIG. 4, since the periphery of the pressure sensor 15 is surrounded by the housing 21, the housing 21 is compared with the case where the pressure sensor 15 and the upper lead frame 31 a are formed on the same bottom surface of the cavity 23. The rigidity of can be improved.

  As shown in FIG. 5, the connection portion 31d of the lead frame 31 is bent in a direction intersecting the thickness direction of the housing 21 at the fifth bent portion 31t, but is not limited thereto. For example, the linear connection portions 31d and 31d can be inclined in the X1 direction or the two directions, respectively, so that the distance increases as going upward. However, by providing the fifth bent portion 31t, the leak path can be further increased and the airtightness can be improved.

  FIG. 6 shows a process diagram for forming the lead frame by bending, FIG. 6 (a) is a plan view of the lead frame in an unfolded state, and FIG. 6 (b) is a schematic cross-sectional view showing the bending process. It is. In the step shown in FIG. 6A, a flat lead frame 31 is formed by punching or etching using a thin metal plate such as Cu or Cu alloy. As shown in FIG. 6A, the protruding portion 31b, the connecting portion 31d, and the upper lead frame 31a extend continuously. Lead frames 31 extending in the X1 direction are arranged adjacent to each other in the Y1-Y2 direction with an interval, and lead frames 31 extending in the X2 direction are arranged adjacent to each other in the Y1-Y2 direction. Has been.

  In the process of FIG. 6B, a bending jig 58 is provided at the center of the four lead frames 31, and bent at the first bent portion 31p and the second bent portion 31q to connect the connecting portion 31d of the lead frame 31 and The upper lead frame 31a is bent and formed.

  As shown in FIG. 6A, in the lead frames 31 and 31 adjacent to each other in the Y1-Y2 direction, the upper lead frame 31a, the connecting portion 31d, and the protruding portion 31b are directed in the same direction (X1 direction or X2 direction). Yes. Therefore, as shown in FIG. 6B, a plurality of lead frames 31 can be bent at the same time in the same process, and the lead frame can be processed in a simple process.

  Further, as shown in FIG. 6A, the fifth bent portion 31t is formed in the connection portion 31d to increase the interval between the upper lead frames 31a adjacent to each other in the Y1-Y2 direction. The extension length of the upper lead frame 31a exposed in the recess 24 can be increased. Therefore, as shown in FIG. 6B, the length of the upper lead frame 31a from the first bent portion 31p can be formed long and can be easily bent, and the processing accuracy can be stabilized. .

  FIG. 7 is a cross-sectional view when the pressure detection device of the present embodiment is incorporated in an electronic apparatus. As shown in FIG. 7, the pressure detection device 10 is disposed so as to face the housing 45 of the electronic device, and the wall portion 21 d provided on the upper surface 21 a of the housing 21 and the housing 45 are in contact with each other. An O-ring 46 is provided between the upper surface 21 a and the housing 45, and the pressure detection device 10 is fixed so that a load is applied to the O-ring 46 to press it. Thereby, the airtightness between the pressure detection apparatus 10 and an electronic device can be ensured, and a pressure can be detected favorably.

  As shown in FIG. 7, a support member 41 that supports the pressure detection device 10 is provided so as to surround the bottom surface 21 b and the periphery of the housing 21. The support member 41 is formed in a hollow cylindrical shape, and a mounting surface 41 a is provided so as to protrude from the inner peripheral surface of the support member 41. An abutment surface 21 c constituted by the bottom surface 21 b of the housing 21 and the flat portion 31 c of the lead frame 31 is in contact with the mounting surface 41 a, and the protruding portion 31 b of the lead frame 31 is surrounded by the support member 41. Located in the space.

  According to the pressure detection device 10 of the present embodiment, since the lead frame 31 is provided in the same plane as the bottom surface 21b of the housing 21, the same plane is provided when the pressure detection device 10 is incorporated in an external electronic device. The support member 41 can be brought into contact with and supported by the bottom surface 21b of the housing 21 and the lead frame 31 that constitute the structure. Therefore, the nonuniformity of the stress distribution generated in the housing 21 can be suppressed, the distortion of the housing 21 can be suppressed, and the output fluctuation of the pressure sensor 15 can be reduced. In addition, since unevenness of the stress distribution generated in the housing 21 can be suppressed, distortion is reduced over the entire circumference of the upper surface 21a of the housing 21, and the housing 45 of the external electronic device and the housing 21 are reduced. Airtightness can be ensured.

  FIG. 8 is a partially enlarged cross-sectional view when a wiring board is connected to the pressure detection device. In the present embodiment, a wiring board 51 such as a flexible printed board is used. As shown in FIG. 8, the wiring substrate 51 includes a substrate 52, a wiring 53 formed on the substrate 52, and a protective layer 54 that protects the wiring 53. The substrate 52 is formed using, for example, polyimide resin, glass epoxy resin, or the like, and the wiring 53 is formed by stacking a plurality of layers of metal materials such as Cu, alloy materials such as CuNi, or the like. The protective layer 54 is a solder resist or a cover film, and is formed on the wiring 53 other than the connection portion.

  In the present embodiment, the wiring 53 of the wiring substrate 51 and the protruding portion 31 b of the lead frame 31 are joined using the solder 56. Thereby, as shown in FIG. 8, it becomes easy to form a solder fillet over the side surface of the protrusion 31b, and the bonding strength is increased.

  As shown in FIG. 8, the bottom surface 21 b of the housing 21 is provided with a recess 28, and the side surface of the protruding portion 31 b is exposed in the recess 28. The recess 28 is formed by holding the lead frame 31 in a molding die when the lead frame 31 and the housing 21 are integrally molded with resin, thereby positioning the lead frame 31 reliably. can do. Further, as shown in FIG. 8, the side surface of the protrusion 31 b is exposed in the recess 28, and a solder fillet can be formed in the recess 28, so that the solder joint area when connecting to the wiring board 51 is increased. As a result, the bonding strength can be improved.

  According to the pressure detection device 10 of the present embodiment, as shown in FIG. 3, the pressure detection device 10 can be reduced in size by arranging the protruding portion 31 b close to the center of the bottom surface 21 b, and the wiring board. 51 can be easily connected. Even when the protruding portion 31b is moved to the center of the bottom surface 21b, the adjacent connecting portions 31d and 31d are opposite to each other in the direction intersecting the thickness direction of the housing 21, as shown in FIG. Bent in the direction. Therefore, the area of the upper lead frame 31a exposed to the pressure introducing recess 24 can be increased, and a land area for electrical connection with the pressure sensor 15 can be ensured. Therefore, according to the pressure detection device 10 of the present embodiment, it is possible to reduce the size by bringing the protruding portion 31b to the center, and to ensure a large land area.

  FIG. 9 is a cross-sectional view illustrating a pressure detection device according to a modification of the present embodiment. 9 shows the same portion as the cross-sectional view of FIG. In the pressure detection device 11 of this modification, the width of the connection portion 31d on the upper lead frame 31a side is formed larger than the width of the connection portion 31d on the exposed portion 31e side. Even in such an embodiment, the area of the upper lead frame 31a exposed to the pressure introducing recess 24 can be increased, and the land area can be secured.

DESCRIPTION OF SYMBOLS 10, 11 Pressure detection device 15 Pressure sensor 21 Housing 21a Upper surface, 21b Bottom surface, 21c Contact surface, 21d Wall part 23 Cavity 24 Pressure introduction recessed part 25 Pressure sensor accommodating recessed part 31 Lead frame 31a Upper lead frame, 31b Protrusion part, 31c Flat Part,
31d connecting portion, 31e exposed portion, 31f inclined portion 31p first bent portion, 31q second bent portion, 31r third bent portion,
31s 4th bent part, 31t 5th bent part 41 Support member 45 Housing 51 Wiring board 58 Bending jig

Claims (7)

A housing having a cavity, a pressure sensor installed in the cavity, and a plurality of lead frames embedded in the housing;
Each of the plurality of lead frames is exposed from the bottom of the housing, an upper lead frame that is exposed inside the cavity and is electrically connected to the pressure sensor, a connection portion that extends in a thickness direction of the housing. An exposed portion,
In the two lead frames arranged adjacent to each other, the connection portions are arranged adjacent to each other, and the upper lead frame is bent in the same direction from the connection portions,
The pressure detecting device, wherein an interval between the connection portions on the upper lead frame side is larger than an interval between the connection portions on the exposed portion side.   The pressure detecting device according to claim 1, wherein the adjacent connecting portions are bent in directions opposite to each other in a direction intersecting the thickness direction of the housing.   3. The pressure detection device according to claim 1, wherein an outer edge of an outer side of the adjacent connection portions is formed outside the exposed portion side on the upper lead frame side. 4.   The cavity has a pressure introduction recess and a pressure sensor storage recess in order in the depth direction, and the pressure introduction recess and the pressure sensor storage recess are formed in a substantially rectangular shape with different phases in plan view. The pressure detection device according to any one of claims 1 to 3, wherein the upper lead frame is exposed at a corner portion of the pressure introducing recess.   The upper lead frame extends toward the pressure sensor housing recess, and an end portion of the upper lead frame is formed with an inclined portion facing the outer periphery of the pressure sensor housing recess. 5. The pressure detection device according to 4.   6. The pressure detection device according to claim 1, wherein in each of the adjacent lead frames, each of the exposed portions is bent in the same direction as the upper lead frame. The said exposed part has the protrusion part which protrudes from the said bottom face, and the flat part which comprises the same plane as the said bottom face in the outer peripheral side of the said bottom face from the said protrusion part. The pressure detection device according to any one of 6.