JP2015190615A

JP2015190615A - Check valve

Info

Publication number: JP2015190615A
Application number: JP2014070733A
Authority: JP
Inventors: 栄治松村; Eiji Matsumura
Original assignee: Kitz SCT Corp
Current assignee: Kitz SCT Corp
Priority date: 2014-03-31
Filing date: 2014-03-31
Publication date: 2015-11-02
Anticipated expiration: 2034-03-31
Also published as: JP6261426B2

Abstract

【課題】弁体構造の作動に影響を与えることなく、環状のシール部を弁座シートの中心軸から偏芯するように形成することで、弁開時には、弁座シートに固着した弁体シール面が弁座シートの外周から内周方向へ向かって徐々に引き剥がせるようにすると共に、環状シール部が剥離する起点から徐々に剥離できるようにすることを可能とし、固着した弁体シール面を長期間に亘ってより少ない力で環状シール部から引き剥せるように維持し、弁開必要差圧を長期に亘って高精度に安定化させることができる逆止め弁を提供する。【解決手段】ボデー１内の一次側流路１５に弾発付勢させたポペット弁体３を装着し、このポペット弁体３を弁閉シールするダイヤフラム状の弾性シート部材５の外周囲を前記ボデー１の内部に固着すると共に、前記弾性シート部材５には、当該弾性シート部材５の中心軸から偏芯させた位置に環状シール部５０を設けたことを特徴とする逆止め弁である。【選択図】図１A valve body seal fixed to a valve seat when the valve is opened by forming an annular seal portion so as to be eccentric from the central axis of the valve seat without affecting the operation of the valve body structure. The surface of the valve seat can be gradually peeled from the outer periphery toward the inner periphery, and the annular seal portion can be gradually peeled off from the starting point where the valve seat is peeled off. Is provided so as to be able to be peeled off from the annular seal portion with less force over a long period of time, and to provide a check valve that can stabilize the required differential valve opening pressure over a long period of time with high accuracy. A poppet valve body (3) that is elastically energized is attached to a primary flow path (15) in a body (1), and the outer periphery of a diaphragm-like elastic sheet member (5) that seals the poppet valve body (3) is aforesaid. The check valve is characterized in that the elastic sheet member 5 is provided with an annular seal portion 50 at a position eccentric from the central axis of the elastic sheet member 5 while being fixed inside the body 1. [Selection] Figure 1

Description

本発明は、逆止め弁に関し、特に、弁開時に弁体と弁座の接着力を低減できる弁座シートを採用し少ない弁開力で両者が剥離できるようにすることで、弁開必要差圧を安定化させることができる半導体製造装置に好適な逆止め弁に関する。 The present invention relates to a check valve, and in particular, adopts a valve seat that can reduce the adhesive force between the valve body and the valve seat when the valve is opened, and allows both to be peeled off with a small valve opening force. The present invention relates to a check valve suitable for a semiconductor manufacturing apparatus capable of stabilizing pressure.

一般に半導体製造装置では、ウエハの熱処理装置と腐食性ガスを供給するガス供給源との間や、ウエハの熱処理装置と真空チャンバーとの間等に流体輸送ラインが構成され、この流体輸送ラインでは、マスフローコントローラをはじめとして、減圧弁、遮断弁、ガスフィルター等、様々な流体制御機器をもって精密な流体制御がなされている。逆止め弁はこのような流体制御機器の一部として、上記のような流体輸送ラインの途中に設けられている。高品質なウエハ製造のため、逆止め弁には、高精度な弁体や弁座等の内部構造や、流体への高い応答性、組立性、取扱性、高クリーン性等が要求される。 In general, in a semiconductor manufacturing apparatus, a fluid transport line is configured between a wafer heat treatment apparatus and a gas supply source for supplying a corrosive gas, or between a wafer heat treatment apparatus and a vacuum chamber. Precise fluid control is performed with various fluid control devices such as a mass flow controller, a pressure reducing valve, a shutoff valve, and a gas filter. The check valve is provided in the middle of the fluid transport line as described above as a part of such a fluid control device. In order to manufacture high-quality wafers, the check valve is required to have a highly accurate internal structure such as a valve body and a valve seat, high fluid responsiveness, assembly, handling, and high cleanliness.

通常の逆止め弁は、Ｏリングや成形ゴム等による弁体シール面と、付勢手段としてのスプリングによって弁座シートの環状シール部に押し付けられる弁体を持ち、１次側と２次側の配管の圧力差によって、弁体シール面を弁座シートの環状シール部に押し付けて弁閉する構造である。配管の圧力差は配管の許容圧力と等しくなり得ることから、弁座シートが必要以上に圧縮されないように、ストッパ等が設けられている。スプリング（弁体付勢部材）は軽荷重であり、１次側の流体供給を停止した時は、１次側に残圧が発生しないように配慮されている。また、１次側に流体を供給した時は、素早く弁開動作が行われることが要求される。 A normal check valve has a valve body sealing surface such as an O-ring or molded rubber and a valve body that is pressed against an annular seal portion of a valve seat by a spring as a biasing means. According to the pressure difference of the piping, the valve body seal surface is pressed against the annular seal portion of the valve seat to close the valve. Since the pressure difference of the pipe can be equal to the allowable pressure of the pipe, a stopper or the like is provided so that the valve seat is not compressed more than necessary. The spring (valve element urging member) is lightly loaded, and consideration is given so that no residual pressure is generated on the primary side when the supply of fluid on the primary side is stopped. Further, when the fluid is supplied to the primary side, it is required that the valve opening operation is performed quickly.

一方で、弁体シール面が逆圧や昇温・冷却による温度サイクルの発生等の条件下で、長期に亘って弁座シートの環状シール部に押し付けられて、弁体シール面が環状シール部に密着すると、両者が固く接着してしまうことで、弁開動作には弁体を弁座シートから引き剥がすために大きな力、つまりスプリング荷重以上の差圧が必要となってしまう場合がある。逆止め弁では弁体と弁座シートが環状シール部全域に亘って均等な力で密着していることから、弁開動作の際には、両者が環状シール部全域で同時に引き剥がされることが必要となるため、両者の間の接着力が増大すると、設定される差圧以上の弁開力が必要となり、１次側への流体供給に対して弁開タイミングが変化したり、長期弁閉後にバルブが弁開しない等、逆止め弁本来の機能を発揮できなくなる重大な不具合が発生する。この問題は、特に高精度な流体制御が要求される半導体製造装置に設けられる逆止め弁においては、解決すべき喫緊の課題である。 On the other hand, the valve body seal surface is pressed against the annular seal portion of the valve seat seat for a long time under conditions such as the occurrence of a temperature cycle due to reverse pressure or temperature rise / cooling, and the valve body seal surface becomes an annular seal portion. When they are in close contact with each other, they are firmly adhered to each other, so that a large force, that is, a differential pressure greater than the spring load, may be required for the valve opening operation in order to peel off the valve element from the valve seat. In the check valve, the valve body and the valve seat are in close contact with each other over the entire area of the annular seal portion. Therefore, if the adhesive force between the two increases, a valve opening force that exceeds the set differential pressure is required, and the valve opening timing changes with respect to the fluid supply to the primary side or the valve is closed for a long time. A serious problem occurs that the original function of the check valve cannot be exhibited, such as the valve not opening later. This problem is an urgent issue to be solved particularly in a check valve provided in a semiconductor manufacturing apparatus that requires highly accurate fluid control.

従来は、この問題には以下のような手段で対応していた。すなわち、図６に示す従来例で説明すると、弁体収容部１２の適宜箇所に、弁座シートの環状シール部５０の圧縮率を一定にするストッパ構造を設けたり、受圧面積を増やして低差圧で大きな弁開力を発生させる等、環状シール部５０の形状を改良して軽荷重でシールできる構造を採用したり、スプリングを組み合わせて加圧バランスを変更する構造を採用したり、弁体シール面２５にシールの粘着性を低減するコーティング処理を施す等により、弁閉時に弁体シール面２５と弁座シートの環状シール部５０が固着することを防止させ、或はその固着力を低減させていた。 Conventionally, this problem has been dealt with by the following means. That is, in the conventional example shown in FIG. 6, a stopper structure that makes the compression rate of the annular seal portion 50 of the valve seat seat constant is provided at an appropriate location of the valve body housing portion 12, or the pressure receiving area is increased to reduce the difference. A structure that can be sealed with light load by improving the shape of the annular seal 50, such as generating a large valve opening force with pressure, a structure that changes the pressure balance by combining springs, By applying a coating treatment to reduce the stickiness of the seal on the seal surface 25, the valve body seal surface 25 and the annular seal portion 50 of the valve seat are prevented from adhering when the valve is closed, or the adhering force is reduced. I was letting.

また、逆止め弁において、弁開動作の際に、弁体と弁座を剥離し易い構造を採用した先行技術として、例えば特許文献１、特許文献２が公知である。特許文献１では、弁体の重心を中心軸から偏芯させた逆止弁が提案されている。特許文献２では、弁体に対して弁軸を偏芯させたり、弁軸と弁体の連結部の厚さを不均一にする等、弁体を引き剥がす部材を弁体中心軸に対して不均一に設けた弁体が開示されている。 Further, in the check valve, for example, Patent Document 1 and Patent Document 2 are known as prior arts that employ a structure in which the valve body and the valve seat are easily peeled when the valve is opened. Patent Document 1 proposes a check valve in which the center of gravity of the valve body is eccentric from the central axis. In Patent Document 2, the member that peels off the valve body, such as eccentricity of the valve shaft with respect to the valve body or non-uniform thickness of the connection portion between the valve shaft and the valve body, with respect to the central axis of the valve body. Non-uniformly provided valve bodies are disclosed.

特許第４８４２８６２号公報Japanese Patent No. 4842862 特開平９−３１０７７２号公報JP-A-9-310772

しかしながら、上記した対応はそれぞれ問題点を有していた。すなわち、ストッパ構造による対応には、ヒーティングによる熱影響や長期弁閉作用による機能劣化により、長期間のバルブの作動確実性を確保することが困難となる問題点があった。また、受圧面積を増やす等による弁座シートの環状シール部の形状の改良やスプリングの組み合わせ構造の採用による対応は、バルブ全体の構造の複雑化を招くという問題点があった。また、何れの対応手段も弁体と弁座シートの環状シール部の固着力の低減効果はあるものの、両者を同時に引き剥がさねばならない弁開力が必要となる点は変わらないため、依然として大きな弁開力が必要となる問題は解決できない。さらに、弁体シール面にコーティング処理を施す対応には、ガスや温度等の使用条件の限定やバルブの製造コストの増加という問題点があった。 However, each of the above-mentioned measures has problems. That is, the countermeasure by the stopper structure has a problem that it is difficult to ensure the long-term operation reliability of the valve due to the thermal influence due to heating or the functional deterioration due to the long-term valve closing action. Further, the improvement of the shape of the annular seal portion of the valve seat by increasing the pressure receiving area and the response by adopting the spring combination structure have the problem that the structure of the entire valve is complicated. In addition, although any of the corresponding means has an effect of reducing the adhesion force between the valve body and the annular seal portion of the valve seat, there is no change in the point that the valve opening force that must be peeled off at the same time is required. Problems that require opening force cannot be solved. Furthermore, in order to cope with the coating treatment on the valve body seal surface, there have been problems such as limitation of use conditions such as gas and temperature and an increase in manufacturing cost of the valve.

また、特許文献１に記載の逆止め弁は、弁体の重心がその移動方向の中心軸から偏芯しており、弁体を付勢する付勢手段も有さず自重にて鉛直方向に開閉移動するものである。特許文献２に記載の圧力調整バルブにおいても、弁体の連結部が弁体の中心軸に対して不均一に設けられている。これらは弁体と弁座の剥離はされやすいものの、弁体中心軸が偏心していることから、確実かつ均一なシールを実現することができない。このため、長期間の高精度な流量調整が要求される半導体製造装置のチャッキバルブとして利用できない。すなわち、上記特許文献は、弁体側を偏位させている構造であるから、不均一な作動が発生するおそれがあり、半導体製造用逆止め弁に適用するには不向きである。 In the check valve described in Patent Document 1, the center of gravity of the valve body is eccentric from the central axis in the moving direction, and there is no biasing means for biasing the valve body in the vertical direction by its own weight. It opens and closes. Also in the pressure regulating valve described in Patent Document 2, the connecting portion of the valve body is provided unevenly with respect to the central axis of the valve body. In these cases, the valve body and the valve seat are easily peeled off, but since the central axis of the valve body is eccentric, a reliable and uniform seal cannot be realized. For this reason, it cannot be used as a check valve of a semiconductor manufacturing apparatus that requires long-term highly accurate flow rate adjustment. That is, since the above-mentioned patent document has a structure in which the valve body side is displaced, there is a possibility that non-uniform operation may occur, and it is not suitable for application to a check valve for semiconductor manufacturing.

そこで、本発明は上記問題点を解決するために開発されたものであり、その目的とするところは、弁体構造の作動に影響を与えることなく、環状のシール部を弁座シートの中心軸から偏芯するように形成することで、弁開時には、弁座シートに固着した弁体シール面が弁座シートの外周から内周方向へ向かって徐々に引き剥がせるようにすると共に、環状シール部全域に亘って同時に剥離するのではなく、環状シール部が剥離する起点から徐々に剥離できるようにすることを可能とし、もって、固着した弁体シール面を長期間に亘ってより少ない力で環状シール部から引き剥せるように維持することで、弁開必要差圧を長期に亘って高精度に安定化させることができる逆止め弁を提供することである。 Therefore, the present invention has been developed to solve the above-described problems, and the object of the present invention is to connect the annular seal portion to the central axis of the valve seat without affecting the operation of the valve body structure. When the valve is opened, the valve body seal surface fixed to the valve seat seat can be gradually peeled from the outer periphery of the valve seat seat toward the inner periphery. It is possible to gradually peel from the starting point at which the annular seal portion peels, instead of peeling at the same time over the entire area, and thus, the fixed valve body seal surface with less force over a long period of time. It is to provide a check valve capable of stabilizing the differential pressure required for valve opening with high accuracy over a long period of time by maintaining it so as to be peeled off from the annular seal portion.

上記目的を達成するため、請求項１に係る発明は、一次側流路と二次側流路を有するボデー内に一次側に弾発付勢させたポペット弁を装着し、このポペット弁を弁閉シールするダイヤフラム状の弾性シート部材の外周囲を前記ボデーの内部に固着すると共に、前記弾性シート部材には、当該弾性シート部材の中心軸から偏芯させた位置に環状シール部を設けたことを特徴とする逆止め弁である。 In order to achieve the above object, the invention according to claim 1 is provided with a poppet valve that is elastically biased toward the primary side in a body having a primary side flow path and a secondary side flow path. The outer periphery of the diaphragm-like elastic sheet member to be closed and sealed is fixed inside the body, and the elastic sheet member is provided with an annular seal portion at a position eccentric from the central axis of the elastic sheet member. This is a check valve characterized by the following.

請求項２に係る発明は、前記弾性シート部材と前記ボデーとの間には、弁開時にダイヤフラム状に膨張するための圧入間隔を設けた逆止め弁である。 The invention according to claim 2 is a check valve in which a press-fitting interval is provided between the elastic sheet member and the body so as to expand in a diaphragm shape when the valve is opened.

請求項３に係る発明は、前記圧入間隔は、前記弾性シート部材の一面と当接する前記ボデーの凹部面である逆止め弁である。 The invention according to claim 3 is the check valve, wherein the press-fitting interval is a concave surface of the body that contacts one surface of the elastic sheet member.

請求項４に係る発明は、前記弾性シート部材の前記環状シール部を小判型や楕円形状に形成した逆止め弁である。 The invention according to claim 4 is a check valve in which the annular seal portion of the elastic sheet member is formed in an oval shape or an elliptical shape.

請求項５に係る発明は、前記環状シール部の環状シール部幅を不均一に形成した逆止め弁である。 The invention according to claim 5 is a check valve in which the annular seal portion width of the annular seal portion is formed non-uniformly.

請求項１に記載の発明によると、弾性シート部材には、当該弾性シート部材の中心軸から偏芯させた位置に環状シール部を設けている。このように本発明では、環状シール部を弾性シート部材の中心軸から偏芯形成しているため、環状シール部の周縁と弾性シート部材の外周縁との間は、環状シール部の中心からの動径方向の距離が、環状シール部の径方向の場所ごとに異なっている。このため弁開時には、環状シール部の径方向の場所ごとに異なる不均一な接着力の中で最も接着力の小さい場所を起点として、径方向に徐々に引き剥がされるように剥離させることができる。従って、弁体と弁座シートを均等に同時に剥離させる必要がある従来例と比較して、小さい弁開力で弁体と弁座シートを剥離させることができるため、両者の接着回避効果を高め、長期弁閉後であっても、弁開作動の確実性の高い逆止め弁を提供することができる。特に、半導体製造装置に使用される逆止め弁では予め高精度に弁体付勢力が設定されているので、弁体と弁座が固着してしまうと、精密に設定された必要差圧で弁開できなくなる、或は弁開できてもタイムラグが発生し逆流閉止の即応性が損なわれてしまうが、本発明によれば、長期弁閉後でも弁体と弁座の固着状況に依らず小さい弁開力を維持することができるので、逆止め弁の弁開圧力差圧が安定する効果がある。さらに、シート部材や使用条件等の限定を要さないことから、汎用性に優れた逆止め弁を提供することができる。 According to the first aspect of the present invention, the elastic sheet member is provided with the annular seal portion at a position eccentric from the central axis of the elastic sheet member. As described above, in the present invention, the annular seal portion is formed eccentrically from the central axis of the elastic sheet member, so that the gap between the peripheral edge of the annular seal portion and the outer peripheral edge of the elastic sheet member is from the center of the annular seal portion. The radial distance is different for each radial location of the annular seal portion. For this reason, when the valve is opened, the annular seal portion can be peeled so as to be gradually peeled off in the radial direction starting from a place having the smallest adhesive force among the non-uniform adhesive forces that differ from place to place in the radial direction. . Therefore, compared with the conventional example where it is necessary to peel the valve body and the valve seat sheet at the same time, the valve body and the valve seat sheet can be peeled off with a small valve opening force. Even after long-term valve closing, it is possible to provide a check valve with high reliability of valve opening operation. In particular, since the valve body biasing force is set with high precision in advance in the check valve used in the semiconductor manufacturing apparatus, if the valve body and the valve seat are fixed, the valve is set with the required differential pressure that is set precisely. Even if the valve cannot be opened or the valve can be opened, a time lag occurs and the quick response of the backflow closing is impaired. However, according to the present invention, the valve body and the valve seat remain small even after the valve is closed for a long time. Since the valve opening force can be maintained, there is an effect of stabilizing the valve opening pressure differential pressure of the check valve. Furthermore, since there is no need to limit the seat member and use conditions, a check valve with excellent versatility can be provided.

請求項２に記載の発明によると、前記弾性シート部材と前記ボデーとの間には、弁開時にダイヤフラム状に膨張するための圧入間隔を設けている。このため、１次側流路が所定圧力となったとき、圧入間隔に流体が圧入することで、弁開前に弾性シート部材をポペット弁体を押し上げるように膨張させることができる。このため、弾性シート部材とポペット弁体の剥離を促進できるので、さらに両者の接着回避効果を高めることができる。さらに、弾性シート部材が膨張することで、固着している弁体シール面と弾性シート部材の環状シール部を、環状シール部の外側から内側へ向かって徐々に引き剥がすように剥離させることができる。従って弁開時には、環状シール部の中心に対する動径方向にも徐々に引き剥がすように剥離させることができるため、さらに小さい弁開力で弁体と弁座シートを剥離させることができる。 According to a second aspect of the present invention, a press-fitting interval is provided between the elastic sheet member and the body for expanding into a diaphragm shape when the valve is opened. For this reason, when the primary side flow path becomes a predetermined pressure, the elastic sheet member can be expanded so as to push up the poppet valve body before the valve is opened by press-fitting the fluid into the press-fitting interval. For this reason, since peeling of an elastic sheet member and a poppet valve body can be accelerated | stimulated, the adhesion avoidance effect of both can further be improved. Furthermore, when the elastic sheet member expands, the fixed valve body seal surface and the annular seal portion of the elastic sheet member can be peeled off gradually from the outside to the inside of the annular seal portion. . Accordingly, when the valve is opened, the valve body and the valve seat can be peeled with a smaller valve opening force because the valve body can be peeled off gradually in the radial direction with respect to the center of the annular seal portion.

請求項３に記載の発明によると、前記圧入間隔は、前記弾性シート部材の一面と当接する前記ボデーの凹部面である。このように圧入間隔は、凹部面としてボデーに設けられるため、簡単に構成することができる。また、この圧入間隔は、流体が圧入する領域として単純な構造で広く設けることができるため、圧入効率が良く、しかもポペット弁体の押し上げ力を十分に確保することができる。従って、ポペット弁体と弾性シート部材の接着回避効果をさらに高めることができる。 According to invention of Claim 3, the said press-fitting space | interval is a recessed part surface of the said body contact | abutted with one surface of the said elastic sheet member. Thus, since the press-fitting interval is provided in the body as the concave surface, it can be easily configured. In addition, the press-fitting interval can be widely provided with a simple structure as a region into which the fluid is press-fitted, so that the press-fitting efficiency is good and the push-up force of the poppet valve body can be sufficiently secured. Therefore, the adhesion avoidance effect between the poppet valve body and the elastic sheet member can be further enhanced.

請求項４に記載の発明によると、前記弾性シート部材の前記環状シール部を小判型や楕円形状に形成している。環状シール部における楕円形状又は小判形状の長辺方向側においては、円形状の場合と比較して、環状シール部の周縁と弾性シート部材の外周縁は、環状シール部の中心からの動径方向の距離が、さらに短くなる。このため、１次側が加圧され弁開となる場合、ポペット弁体のシール面と弾性シート部材の環状シール部の接触角度が所定の離間角度となるために必要となるポペット弁体の押し上げ移動距離が、環状シール部が円形状の場合と比較して、小さくて済むようになる。従って、環状シール部の形状が円形状である場合と比較して、より小さい弁開力で弁開することができる。 According to invention of Claim 4, the said cyclic | annular seal | sticker part of the said elastic sheet member is formed in oval shape or elliptical shape. On the long-side direction side of the oval or oval shape in the annular seal portion, the peripheral edge of the annular seal portion and the outer peripheral edge of the elastic sheet member are in the radial direction from the center of the annular seal portion, as compared to the circular shape. The distance becomes even shorter. For this reason, when the primary side is pressurized and the valve is opened, the poppet valve element needs to be pushed up so that the contact angle between the sealing surface of the poppet valve element and the annular seal portion of the elastic sheet member becomes a predetermined separation angle. The distance can be small compared to the case where the annular seal portion is circular. Therefore, the valve can be opened with a smaller valve opening force than in the case where the annular seal portion has a circular shape.

請求項５に記載の発明によると、前記環状シール部の環状シール部幅を不均一に形成している。環状シール部の幅を不均一に形成すれば、幅が異なる箇所によって必要となる弁開力が異なるようになるため、剥離の開始となる起点を発生させることができる。さらに、環状シール部の位置で異なる弁開力の不均一性は、環状シール部の幅の不均一性に起因していることから、弾性シート部材に形成する環状シール部の偏芯の度合いを小さくする乃至はなくした場合であっても、不均一な接着力に基づいた剥離の開始となる起点を発生させることができる。 According to the invention described in claim 5, the annular seal portion width of the annular seal portion is formed non-uniformly. If the width of the annular seal portion is formed non-uniformly, the required valve opening force differs depending on the location where the width is different, so that a starting point for starting peeling can be generated. Furthermore, since the non-uniformity of the valve opening force that varies depending on the position of the annular seal portion is caused by the non-uniformity of the width of the annular seal portion, the degree of eccentricity of the annular seal portion formed on the elastic sheet member is reduced. Even if it is reduced or eliminated, it is possible to generate a starting point for starting peeling based on non-uniform adhesive strength.

（ａ）は本発明の第１実施形態に係る弾性シート部材５の正面図を、（ｂ）は本発明の逆止め弁の第１実施形態を示した断面図である。(A) is the front view of the elastic sheet member 5 which concerns on 1st Embodiment of this invention, (b) is sectional drawing which showed 1st Embodiment of the non-return valve of this invention. 本発明の第１実施形態における、弁開時のシートの動作を示した要部拡大断面図である。It is a principal part expanded sectional view which showed operation | movement of the sheet | seat at the time of valve opening in 1st Embodiment of this invention. （ａ）は本発明の第２実施形態に係る弾性シート部材５ａの正面図を、（ｂ）は本発明の逆止め弁の第２実施形態を示した拡大断面図である。(A) is the front view of the elastic sheet member 5a which concerns on 2nd Embodiment of this invention, (b) is the expanded sectional view which showed 2nd Embodiment of the non-return valve of this invention. （ａ）は本発明の第３実施形態に係る弾性シート部材５ｂの正面図を、（ｂ）は本発明の逆止め弁の第３実施形態を示した拡大断面図である。(A) is the front view of the elastic sheet member 5b which concerns on 3rd Embodiment of this invention, (b) is the expanded sectional view which showed 3rd Embodiment of the non-return valve of this invention. （ａ）は本発明の第４実施形態に係る弾性シート部材５ｃの正面図を、（ｂ）は本発明の逆止め弁の第４実施形態を示した拡大断面図である。(A) is the front view of the elastic sheet member 5c which concerns on 4th Embodiment of this invention, (b) is the expanded sectional view which showed 4th Embodiment of the non-return valve of this invention. 従来の逆止め弁の一例を示した断面図である。It is sectional drawing which showed an example of the conventional check valve.

以下に、本発明における逆止め弁の実施形態を図面に基づいて詳細に説明する。図１（ａ）においては本発明の第１実施形態に係るシートの正面図を、図１（ｂ）においては本発明の第１実施形態に係る逆止め弁の断面図を示している。 Hereinafter, embodiments of a check valve according to the present invention will be described in detail with reference to the drawings. 1A shows a front view of a seat according to the first embodiment of the present invention, and FIG. 1B shows a cross-sectional view of the check valve according to the first embodiment of the present invention.

図１（ｂ）に示すように、本発明の第１実施形態における逆止め弁はボデー１からなり、ボデー１は、ボデー部２、ポペット弁体３、コイルスプリング４、弾性シート部材５、ナット６、筒部７からなり、ボデー１、ポペット弁体３、筒部７を連通する流路が形成されている。 As shown in FIG.1 (b), the non-return valve in 1st Embodiment of this invention consists of the body 1, and the body 1 is the body part 2, the poppet valve body 3, the coil spring 4, the elastic sheet member 5, and a nut. 6 and a cylindrical portion 7, and a flow path that communicates the body 1, the poppet valve body 3, and the cylindrical portion 7 is formed.

ボデー部２は、一端側、図においては右側には管接合部８が形成され、この管接合部８は図示しない外部継手の雌螺旋を螺合可能になっている。この外部継手との接合部には縮径口が開口しており、この縮径口と連通して２次側流路９が形成されている。また、この２次側流路９に続いて、段部１０と段部１１を経て、さらに拡径した円筒形の弁体収容部１２が設けられている。さらに、この弁体収容部１２に続いて、後述する弾性シート部材５の形状に適合させた円筒空間部１３が設けられている。 The body 2 is formed with a pipe joint 8 at one end, on the right side in the figure, and the pipe joint 8 can be screwed with a female spiral of an external joint (not shown). A diameter-reducing opening is opened at a joint portion with the external joint, and a secondary-side flow path 9 is formed in communication with the diameter-reducing opening. Further, following this secondary side flow path 9, a cylindrical valve body accommodating portion 12 having a further expanded diameter is provided through a step portion 10 and a step portion 11. Furthermore, following this valve body accommodating part 12, the cylindrical space part 13 adapted to the shape of the elastic sheet member 5 mentioned later is provided.

筒部７は、ボデー１と同様に、一端側、図においては左側には管接合部１４が形成され、この管接合部１４には図示しない外部継手の雌螺旋を螺合可能になっている。この外部継手との接合部には縮径口が開口しており、この縮径口と連通して１次側流路１５が形成されている。１次側流路１５のボデー内部側には開口側端面１６が形成され、この開口側端面１６には、後述する弾性シート部材５を抜止め状態で装着可能となっている。また、装着された弾性シート部材５の外周囲をガイドするため、流路と平行な円筒状の内周壁１７が設けられ、内周壁１７に包囲されて弾性シート部材５の外周囲が固着される外側段部１８が形成されている。 As with the body 1, the tube portion 7 is formed with a pipe joint portion 14 on one end side, on the left side in the figure, and a female spiral of an external joint (not shown) can be screwed into the tube joint portion 14. . A diameter-reducing port is opened at a joint portion with the external joint, and a primary flow path 15 is formed in communication with the diameter-reducing port. An opening-side end surface 16 is formed on the inner side of the primary flow path 15, and an elastic sheet member 5 to be described later can be attached to the opening-side end surface 16 in a retaining state. Further, in order to guide the outer periphery of the mounted elastic sheet member 5, a cylindrical inner peripheral wall 17 parallel to the flow path is provided, and the outer periphery of the elastic sheet member 5 is fixed by being surrounded by the inner peripheral wall 17. An outer step portion 18 is formed.

筒部７の開口側端面１６には、圧入間隔２１が形成されている。圧入間隔２１は、１次側流路１５の流体が所定圧力となったとき、ポペット弁体３と弾性シート部材５が弁開する前に、１次側流路１５のボデー側開口を包囲して流路軸と同心円状に形成された内側段部２２と、弾性シート部材５の流路孔２３との間から流体が浸入して、弾性シート部材５と開口側端面１６との間に流体が圧入するために設けられた空間領域である。圧入間隔２１は、このような機能を果たすように開口側端面１６に形成されていれば、どのような形状でもよく、本例では内側段部２２と外側段部１８との間に形成された開口側端面１６上の段部面となっている。また、弾性シート部材５の開口側端面１６との当接面側に、両者が離間し易くなるようにコーティング処理等を施してもよい。 A press-fitting interval 21 is formed on the opening-side end surface 16 of the cylindrical portion 7. The press-fitting interval 21 surrounds the body side opening of the primary side flow path 15 before the poppet valve body 3 and the elastic sheet member 5 open when the fluid in the primary side flow path 15 reaches a predetermined pressure. The fluid enters between the inner step 22 formed concentrically with the flow path axis and the flow path hole 23 of the elastic sheet member 5, and the fluid flows between the elastic sheet member 5 and the opening-side end face 16. Is a space area provided for press-fitting. The press-fitting interval 21 may have any shape as long as it is formed on the opening-side end face 16 so as to perform such a function, and in this example, it is formed between the inner step portion 22 and the outer step portion 18. It is a stepped surface on the opening side end face 16. In addition, a coating process or the like may be performed on the contact surface side of the elastic sheet member 5 with the opening-side end surface 16 so that the elastic sheet member 5 can be easily separated.

ポペット弁体３は筒状に形成され、ボデー部２の弁体収容部１２に遊嵌状態で往復動可能にガイドされ、通常時は１本のコイルスプリング４により流路１次側方向へ弾発状態で装着されている。ポペット弁体３の先端部は、先端に平面部を有しており、流路に垂直にポペット弁体３のシール面２５を構成する段部を介して、この平面部の軸方向に連続する円筒部と、この円筒部の内外を連通する流路穴２６を有している。この円筒部に形成された流路穴２６は、ポペット弁体３の内外を連通するように径方向９０°毎に４つ配置され、弁開時にはこの流路穴２６を介して１次側流路１５と２次側流路９が連通可能となる。また、この円筒部は更に段部を介して軸方向に連続して弁体収容部１２内面と摺接する円筒部を有している。この段部の裏面には、前述の段部２４が形成され、コイルスプリング４が作用している。 The poppet valve body 3 is formed in a cylindrical shape, and is guided so as to reciprocate in a loosely fitted state in the valve body housing section 12 of the body section 2. In normal times, the poppet valve body 3 is elastically moved toward the flow path primary side by a single coil spring 4. It is installed in the starting state. The tip portion of the poppet valve body 3 has a flat portion at the tip, and continues in the axial direction of the flat portion through a step portion that forms the seal surface 25 of the poppet valve body 3 perpendicular to the flow path. A cylindrical portion and a flow path hole 26 that communicates the inside and outside of the cylindrical portion are provided. Four passage holes 26 formed in the cylindrical portion are arranged every 90 ° in the radial direction so as to communicate with the inside and outside of the poppet valve body 3. When the valve is opened, the primary side flow is passed through the passage hole 26. The path 15 and the secondary side flow path 9 can communicate with each other. Further, the cylindrical portion further has a cylindrical portion that is slidably contacted with the inner surface of the valve body accommodating portion 12 through the stepped portion in the axial direction. On the back surface of this step portion, the above-described step portion 24 is formed, and the coil spring 4 acts.

コイルスプリング４は、ボデー部２内部の段部１０とポペット弁体３内部の段部２４との間に介在することで、所定の圧力でポペット弁体３を付勢している。付勢されたポペット弁体３は、ポペット弁体３のシール面２５が弾性シート部材５の環状シール部５０で圧接され、１次側流路１５と２次側流路９が遮断される。而して、ポペット弁体３がコイルスプリング４の弾性に抗して後退するように押し上げられることで、ポペット弁体３の流路穴２６を介して１次側流路１５、２次側流路９同士が連通するようになることで、弁開となる。 The coil spring 4 is interposed between the step portion 10 inside the body portion 2 and the step portion 24 inside the poppet valve body 3 to urge the poppet valve body 3 with a predetermined pressure. In the urged poppet valve body 3, the seal surface 25 of the poppet valve body 3 is pressed by the annular seal portion 50 of the elastic sheet member 5, and the primary flow path 15 and the secondary flow path 9 are blocked. Thus, when the poppet valve body 3 is pushed up so as to retreat against the elasticity of the coil spring 4, the primary side flow path 15 and the secondary side flow through the flow path hole 26 of the poppet valve body 3. When the passages 9 communicate with each other, the valve is opened.

弾性シート部材５は、ゴム等を材料とした弾性を有する弁座である。また、図１（ａ）に示すように、流路孔２３の外周に同心円状に、ポペット弁体３のシール面２５と当接する環状シール部５０が形成されている。図１（ｂ）に示すように、環状シール部５０の断面は、所定の厚みを持った凸部となっている。環状シール部５０は、円形状の弾性シート部材５の中心から偏芯させた円形状に形成している。弾性シート部材５の外周囲は、筒部７の内周壁１７と外側段部１８に固着されており、流路軸方向に垂直に面したシート端面３７は、ボデー部２に形成された前述の円筒空間部１３の端面３１と当接し流路軸方向に圧着されている。 The elastic sheet member 5 is an elastic valve seat made of rubber or the like. Further, as shown in FIG. 1A, an annular seal portion 50 that is in contact with the seal surface 25 of the poppet valve body 3 is formed concentrically on the outer periphery of the flow path hole 23. As shown in FIG.1 (b), the cross section of the cyclic | annular seal | sticker part 50 is a convex part with predetermined thickness. The annular seal portion 50 is formed in a circular shape that is eccentric from the center of the circular elastic sheet member 5. The outer periphery of the elastic sheet member 5 is fixed to the inner peripheral wall 17 and the outer step portion 18 of the cylindrical portion 7, and the sheet end surface 37 facing perpendicularly to the flow path axis direction is formed on the body portion 2. It contacts the end surface 31 of the cylindrical space 13 and is crimped in the direction of the flow path axis.

弾性シート部材５の外周囲は、ボデー部２と筒部７の連結作用にて固着されている。筒部７とボデー部２を連結するには、筒部７の内周壁１７を包囲するように形成された取付け部２０へ、弁の外部をシールする金属製のガスケット１９を取付け、ガスケット１９を介在させて、コイルスプリング４とポペット弁体３が装着されたボデー部２の２次側流路９と、弾性シート部材５が嵌着された筒部７の１次側流路１５が連通するように当接させると共に、円筒空間部１３の端面３１を弾性シート部材５のシート端面３７に当接させ、筒部７に形成された雄螺子３４をナット６の雌螺旋で螺合する。この螺合により、ガスケット１９は押圧されてボデー内の流体をボデー外部とシールし、端面３１がシート端面３７を押圧することで弾性シート部材５の外周囲がボデー内部の内周壁１７、外側段部１８に固着される。 The outer periphery of the elastic sheet member 5 is fixed by the connecting action of the body part 2 and the cylinder part 7. In order to connect the cylinder part 7 and the body part 2, a metal gasket 19 that seals the outside of the valve is attached to an attachment part 20 formed so as to surround the inner peripheral wall 17 of the cylinder part 7. The secondary side flow path 9 of the body part 2 to which the coil spring 4 and the poppet valve body 3 are attached and the primary side flow path 15 of the cylindrical part 7 to which the elastic sheet member 5 is fitted communicate with each other. In addition, the end surface 31 of the cylindrical space portion 13 is brought into contact with the sheet end surface 37 of the elastic sheet member 5, and the male screw 34 formed on the cylindrical portion 7 is screwed by the female spiral of the nut 6. By this screwing, the gasket 19 is pressed to seal the fluid in the body from the outside of the body, and the end surface 31 presses the sheet end surface 37 so that the outer periphery of the elastic sheet member 5 is the inner peripheral wall 17 inside the body, the outer step. It is fixed to the part 18.

続いて、図２に基づいて第１実施形態の作用を説明する。 Then, the effect | action of 1st Embodiment is demonstrated based on FIG.

図２（ａ）に示す弁閉時には、図示していないコイルスプリング４の弾発力によって、ポペット弁体３のシール面２５が弾性シート部材５の環状シール部５０へ押圧されて、必要とされる所定圧力にて環状シール部５０上を均一な力で１次側流体を弁閉している。そして、１次側流路１５にて流体が所定圧力以上となったとき、流体は、ポペット弁体３を弾性シート部材５から剥離して弁開させる前に、開口側端面１６から弾性シート部材５を離間させて圧入間隔２１内へ流入する。 When the valve shown in FIG. 2A is closed, the sealing surface 25 of the poppet valve body 3 is pressed against the annular seal portion 50 of the elastic sheet member 5 by the elastic force of the coil spring 4 (not shown). The primary fluid is closed with a uniform force on the annular seal 50 at a predetermined pressure. When the fluid becomes a predetermined pressure or higher in the primary side flow path 15, the fluid is released from the opening side end face 16 before the poppet valve body 3 is peeled off from the elastic sheet member 5 and opened. 5 is separated and flows into the press-fitting interval 21.

圧入間隔２１へ流入した流体は、圧入間隔２１内部を加圧することにより、弾性シート部材５を流路２次側方向へ膨張させる。このため、ポペット弁体３と弾性シート部材５の弁開動作が促進される。 The fluid that has flowed into the press-fitting interval 21 pressurizes the inside of the press-fitting interval 21 to expand the elastic sheet member 5 in the flow path secondary direction. For this reason, the valve opening operation | movement of the poppet valve body 3 and the elastic seat member 5 is accelerated | stimulated.

上記のように圧入間隔２１への１次側流体の加圧流入により、膨張してポペット弁体３を２次側に押し上げるように作用した弾性シート部材５の環状シール部５０は、その膨張に伴って、ポペット弁体３のシール面２５との接触角度θを増大させていく。この接触角度の増大は、図１（ａ）に示すように、弾性シート部材５の外周囲は筒部７の外側段部１８に固定されていることから、環状シール部５０の内側からではなく、外側から接触角度が増大していく。 As described above, the annular seal portion 50 of the elastic sheet member 5 that has expanded and pushed up the poppet valve body 3 to the secondary side due to the pressurized inflow of the primary side fluid into the press-fitting interval 21 is expanded. Along with this, the contact angle θ with the seal surface 25 of the poppet valve body 3 is increased. The increase in the contact angle is not from the inside of the annular seal portion 50 because the outer periphery of the elastic sheet member 5 is fixed to the outer step portion 18 of the cylindrical portion 7 as shown in FIG. The contact angle increases from the outside.

ここで、ポペット弁体３のシール面２５と弾性シート部材５の環状シール部５０は、両者の接触角度θが互いに所定の離間角度以上となった時に剥離するようになっている。材質、温度、押圧時間等、シール面２５と環状シール部５０が接着する条件が同じであれば、全周に亘ってこの離間角度は同角となる。このため、両者は、環状シール部５０の外側から内側に向かって徐々に引き剥がされていくことで剥離する。 Here, the seal surface 25 of the poppet valve body 3 and the annular seal portion 50 of the elastic sheet member 5 are separated when the contact angle θ between them becomes equal to or greater than a predetermined separation angle. If the conditions for bonding the seal surface 25 and the annular seal portion 50 are the same, such as the material, temperature, and pressing time, the separation angle is the same angle over the entire circumference. For this reason, both are peeled by being gradually peeled from the outer side of the annular seal portion 50 toward the inner side.

接触角度θは、例えば、図２に示すポペット弁体３のシール面２５と環状シール部５０が接着している断面内において、シール面２５と環状シール部５０が離間する点における、ボデー外方向を向いたシール面２５及び環状シール部５０の当接面の接線のなす角度等として定義できる。両者が離間する点においては、環状シール部５０の当接面は断面内において曲率が不連続に変化する曲面となり接触角度θを形成する。また、この定義が不適切な場合は、他にも同様の意義を有するように接触角度の定義ができる。 The contact angle θ is, for example, the body outward direction at the point where the seal surface 25 and the annular seal portion 50 are separated in the cross section where the seal surface 25 and the annular seal portion 50 of the poppet valve body 3 shown in FIG. Can be defined as an angle formed by a tangent line between the contact surface of the seal surface 25 facing the surface and the annular seal portion 50. At the point where they are separated from each other, the contact surface of the annular seal portion 50 becomes a curved surface whose curvature changes discontinuously in the cross section and forms a contact angle θ. If this definition is inappropriate, the contact angle can be defined so as to have the same significance.

また、図１（ａ）に示すように、弾性シート部材５の環状シール部５０は、図においては上側に偏心した小円形状に形成されていることから、弾性シート部材５の上側は環状シール部５０の周縁から弾性シート部材５の外周縁までの距離が相対的に短い薄肉部３２を形成し、弾性シート部材５の下側は環状シール部５０の周縁から弾性シート部材５の外周縁までの距離が相対的に長い厚肉部３３を形成している。 Further, as shown in FIG. 1 (a), the annular seal portion 50 of the elastic sheet member 5 is formed in a small circular shape eccentric to the upper side in the figure, so that the upper side of the elastic sheet member 5 is an annular seal. The thin portion 32 having a relatively short distance from the periphery of the portion 50 to the outer periphery of the elastic sheet member 5 is formed, and the lower side of the elastic sheet member 5 extends from the periphery of the annular seal portion 50 to the outer periphery of the elastic sheet member 5. The thick portion 33 having a relatively long distance is formed.

このため、圧入間隔２１への流体の加圧流入による弾性シート部材５の膨張で、弾性シート部材５とポペット弁体３とが接着したまま、ポペット弁体３が同じ距離だけ流路２次側方向へ移動した場合であっても、弾性シート部材５の薄肉部３２付近の方が、厚肉部３３付近より、接着した弾性シート部材５の屈曲具合が大きくなる。このため、接触角度θも、薄肉部３２付近の方が、厚肉部３３付近より大きくなる。 For this reason, the expansion of the elastic sheet member 5 due to the pressurized inflow of the fluid into the press-fitting interval 21 causes the poppet valve body 3 to be on the secondary side of the flow path by the same distance while the elastic sheet member 5 and the poppet valve body 3 are adhered. Even when the elastic sheet member 5 is moved in the direction, the elastic sheet member 5 is bent more in the vicinity of the thin portion 32 than in the vicinity of the thick portion 33. For this reason, the contact angle θ is also larger near the thin portion 32 than near the thick portion 33.

従って、弾性シート部材５とポペット弁体３とが環状シール部全域で接着したまま弾性シート部材５が加圧膨張した場合、薄肉部３２付近の方が厚肉部３３付近より早期に、ポペット弁体３のシール面２５と弾性シート部材５の環状シール部５０とが剥離する離間角度に到達する。このため、両者は、薄肉部３２付近から環状シール部５０の形状に沿うように径方向に厚肉部３３付近の方へ向けて徐々に引き剥がされていくことで剥離する。 Therefore, when the elastic sheet member 5 is pressurized and expanded while the elastic sheet member 5 and the poppet valve body 3 are bonded in the entire annular seal portion, the portion near the thin portion 32 is earlier than the portion near the thick portion 33. The separation angle at which the seal surface 25 of the body 3 and the annular seal portion 50 of the elastic sheet member 5 are separated is reached. For this reason, both are peeled by being gradually peeled from the vicinity of the thin portion 32 toward the vicinity of the thick portion 33 in the radial direction so as to follow the shape of the annular seal portion 50.

図２（ｂ）では、上記したように、図においては上側の薄肉部３２付近は早期に離間角度に達したことで剥離し、下側の厚肉部３３付近では接触角度θは増大しているものの、未だ離間角度に到達していないため接着した状態を示している。また、図２（ｃ）は、剥離が完了し弾性シート部材５が開口側端面１６に装着された状態に戻り、ポペット弁体３が所定間隔で弁開している状態を示している。 In FIG. 2B, as described above, in the drawing, the vicinity of the upper thin portion 32 is peeled off due to the early arrival of the separation angle, and the contact angle θ is increased in the vicinity of the lower thick portion 33. Although it has not yet reached the separation angle, it shows a bonded state. FIG. 2C shows a state where the peeling is completed and the elastic sheet member 5 is returned to the state where the elastic sheet member 5 is attached to the opening side end face 16, and the poppet valve body 3 is opened at a predetermined interval.

以上説明したように、ポペット弁体３のシール面２５と弾性シート部材５の環状シール部５０の離間動作は、先ず、圧入間隔２１へ加圧流体が流入して弾性シート部材５を開口側端面１６から離間させて膨張させ、ポペット弁体３と弾性シート部材５が環状シール部全域で接着したままポペット弁体３を流路２次側へ押し上げるように作用し、次いで、密着した両者の環状シール部全域の中で、薄肉部３２付近の外側が最も早期に離間角度に到達することで剥離が開始し、徐々に薄肉部３２付近の環状シール部５０の内側方向及び環状シール部５０に沿った厚肉部３３付近への方向へと両者が引き剥がされていくことで剥離が完了し、弁開状態となる。 As described above, the separating operation of the seal surface 25 of the poppet valve body 3 and the annular seal portion 50 of the elastic sheet member 5 is performed by first flowing the pressurized fluid into the press-fitting interval 21 and opening the elastic sheet member 5 to the opening side end surface. The poppet valve body 3 and the elastic sheet member 5 are inflated by being separated from 16 and act so as to push up the poppet valve body 3 to the secondary side of the flow path while adhering in the entire annular seal portion. Separation starts when the outer part near the thin part 32 reaches the separation angle earliest in the entire seal part, and gradually along the inner direction of the annular seal part 50 near the thin part 32 and along the annular seal part 50. Separation is completed when both are peeled in the direction toward the thick portion 33, and the valve is opened.

このように、本発明に係る弁体と弾性シート部材５の環状シール部５０は、環状シール部５０の外側から内側へ、或は薄肉部３２付近から厚肉部３３付近へ、ポペット弁体３のシール面２５と弾性シート部材５の環状シール部５０の剥離が開始する起点を有していることで、両者が徐々に引き剥がされるようになっている。 As described above, the annular seal portion 50 of the valve body and the elastic sheet member 5 according to the present invention is formed from the outer side to the inner side of the annular seal portion 50 or from the vicinity of the thin portion 32 to the vicinity of the thick portion 33. By having the starting point from which peeling of the sealing surface 25 and the annular seal portion 50 of the elastic sheet member 5 starts, both are gradually peeled off.

一方で、図６は従来の逆止め弁の一例を示した断面図である。この従来例では、本実施形態のように、筒部７の開口側端面１６に圧入間隔２１が形成されておらず、また、弾性シート部材５の環状シール部５０も偏芯形状ではなくシートの形状に対し対称的に形成されている。このため、従来例における弁開動作は、環状シール部全域で接着したポペット弁体３のシール面２５と弾性シート部材５の環状シール部５０を剥離させるには、剥離の開始となる起点を有さないことから、環状シール部全域に大きな力で均等な弁開力を与えて環状シール部全域を同時に剥離させる必要があるため、本実施形態のように剥離する起点から徐々に引き剥がしていくために必要な力より、相応の大きな弁開力が必要となってしまう。 On the other hand, FIG. 6 is a sectional view showing an example of a conventional check valve. In this conventional example, the press-fitting interval 21 is not formed on the opening side end face 16 of the cylindrical portion 7 as in the present embodiment, and the annular seal portion 50 of the elastic sheet member 5 is not an eccentric shape but a sheet shape. It is formed symmetrically with respect to the shape. For this reason, the valve opening operation in the conventional example has a starting point for starting peeling in order to peel off the seal surface 25 of the poppet valve body 3 bonded to the entire annular seal portion and the annular seal portion 50 of the elastic sheet member 5. Therefore, it is necessary to apply an even valve opening force with a large force to the entire area of the annular seal portion to separate the entire area of the annular seal portion at the same time. Therefore, gradually peel off from the starting point of separation as in this embodiment. Therefore, a correspondingly large valve opening force is required rather than the force required for this.

上記したように、本発明の逆止め弁では、筒部７の開口側端面１６と弾性シート部材５との当接面の間に流体が流入する圧入間隔２１を設けると共に、弾性シート部材５の環状シール部５０を、弾性シート部材５の中心から偏芯させて形成していることから、弁開時には、差圧により弁体とシートが弁開する前に圧入間隔へ流体が流入することでシートが膨張して弁体を押し上げるように作用すると共に、弁体とシートが環状シール部で固着している場合であっても、両者の剥離は、シートの外側から内側へ、或は最も接着力の小さい領域を起点として不均一に、徐々に引き剥がされるように剥離させることができる。このため、弁体とシートを均等に同時に剥離させる必要がある従来例と比較して、小さい弁開力で弁体とシートを剥離させることができる。 As described above, in the check valve of the present invention, the press-fitting interval 21 through which fluid flows is provided between the contact surface between the opening-side end surface 16 of the cylindrical portion 7 and the elastic sheet member 5, and the elastic sheet member 5 Since the annular seal portion 50 is formed eccentrically from the center of the elastic sheet member 5, when the valve is opened, the fluid flows into the press-fitting interval before the valve body and the seat are opened due to the differential pressure. The sheet expands and acts to push up the valve body, and even if the valve body and the sheet are fixed by the annular seal portion, the separation of both is from the outside of the sheet to the inside or the most adhesive It can be peeled off so as to be gradually peeled off unevenly starting from a region having a small force. For this reason, compared with the prior art which needs to peel a valve body and a sheet | seat equally simultaneously, a valve body and a sheet | seat can be peeled with a small valve opening force.

次に、本発明の第２実施形態を説明する。図３（ａ）においては本発明の第２実施形態に係る弾性シート部材５ａの正面図を、図３（ｂ）においては本発明の第２実施形態に係る逆止め弁の断面図を示している。なお、以降の実施形態においては第１実施形態と同一部分は同一符号を示してその説明を省略する。 Next, a second embodiment of the present invention will be described. 3A shows a front view of the elastic sheet member 5a according to the second embodiment of the present invention, and FIG. 3B shows a cross-sectional view of the check valve according to the second embodiment of the present invention. Yes. In the following embodiments, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

本例においては、図３（ａ）に示すように、弾性シート部材５ａの環状シール部５０ａは、図においては上下方向に長い楕円形状となっている。このため、薄肉部３２ａ付近及び厚肉部３３ａ付近では、環状シール部５０ａの周縁から弾性シート部材５ａの外周縁までの距離が、それぞれ第１実施形態と比較してさらに短くなっている。その他の構造は、第１実施形態と同様である。 In this example, as shown to Fig.3 (a), the cyclic | annular seal | sticker part 50a of the elastic sheet member 5a becomes elliptical shape long in the up-down direction in the figure. For this reason, in the vicinity of the thin portion 32a and the vicinity of the thick portion 33a, the distance from the peripheral edge of the annular seal portion 50a to the outer peripheral edge of the elastic sheet member 5a is further shorter than that in the first embodiment. Other structures are the same as those of the first embodiment.

このように短く形成されているため、ポペット弁体３が弾性シート部材５ａの環状シール部５０ａと接着したまま押し上げられた際に、第１実施形態と比較して、接着したままポペット弁体３が移動できる距離が小さくなる。 Since the poppet valve body 3 is pushed up while being adhered to the annular seal portion 50a of the elastic sheet member 5a, the poppet valve body 3 remains adhered as compared with the first embodiment. The distance that can be moved becomes smaller.

従って本例では、１次側が加圧され弁開となる場合、ポペット弁体３のシール面２５と弾性シート部材５ａの環状シール部５０ａの接触角度θが、所定の離間角度となるために必要となるポペット弁体３の押し上げ移動距離が、第１実施形態の場合と比較して少なくて済むようになる。このため本例では、第１実施形態と比較してより小さい弁開力で開弁することができる。 Therefore, in this example, when the primary side is pressurized and the valve is opened, it is necessary for the contact angle θ between the seal surface 25 of the poppet valve body 3 and the annular seal portion 50a of the elastic sheet member 5a to be a predetermined separation angle. As a result, the pop-up valve body 3 can be moved less than the first embodiment as compared with the first embodiment. Therefore, in this example, the valve can be opened with a smaller valve opening force than in the first embodiment.

次に、本発明の第３実施形態を説明する。図４（ａ）においては本発明の第３実施形態に係る弾性シート部材５ｂの正面図を、図４（ｂ）においては本発明の第３実施形態に係る逆止め弁の断面図を示している。 Next, a third embodiment of the present invention will be described. 4A shows a front view of the elastic sheet member 5b according to the third embodiment of the present invention, and FIG. 4B shows a cross-sectional view of the check valve according to the third embodiment of the present invention. Yes.

本例においては、図４（ｂ）に示すように、ボデー１内部に形成された２次側流路９は流路の途中で屈曲していると共に、弁体収容部１２及びポペット弁体３の中心軸は、１次側流路１５の流路軸に対して傾斜している。このため、環状シール部５０は開口側端面１６が形成する平面に対し、ポペット弁体３のシール面２５と同じ傾斜となるように傾斜させて形成し、環状シール部５０とシール面２５が弁閉時に均一に当接できるようになっている。また、図４（ａ）に示すように、本例の弾性シート部材５ｂの正面構成は第１実施形態と同様であって、図において上側に薄肉部３２ｂ、下側に厚肉部３３ｂを有する偏芯した環状シール部５０ｂを有している。 In this example, as shown in FIG. 4B, the secondary flow path 9 formed inside the body 1 is bent in the middle of the flow path, and the valve body accommodating portion 12 and the poppet valve body 3 are bent. Is inclined with respect to the flow path axis of the primary flow path 15. For this reason, the annular seal portion 50 is formed so as to be inclined with respect to the plane formed by the opening-side end surface 16 so as to have the same inclination as the seal surface 25 of the poppet valve body 3. It can be evenly contacted when closed. Further, as shown in FIG. 4A, the front configuration of the elastic sheet member 5b of this example is the same as that of the first embodiment, and has a thin portion 32b on the upper side and a thick portion 33b on the lower side in the drawing. An eccentric annular seal portion 50b is provided.

このように弾性シート部材５ｂの環状シール部５０ｂは傾斜面となっているので、開口側端面１６が形成する平面に対する高さが異なっている。このため、最も高く形成された薄肉部３２ｂ付近は、弁開時に押し上げられるポペット弁体３に接着して屈曲する際に、低く形成された場合と比較して、ポペット弁体３の押し上げ距離が同じであっても、より大きな屈曲力が発生する。 Thus, since the annular seal portion 50b of the elastic sheet member 5b is an inclined surface, the height relative to the plane formed by the opening-side end surface 16 is different. For this reason, in the vicinity of the thinned portion 32b that is formed highest, when the adhesive is bent to the poppet valve body 3 that is pushed up when the valve is opened, the push-up distance of the poppet valve body 3 is smaller than when the poppet valve body 3 is formed low. Even if they are the same, a larger bending force is generated.

従って本例でも、１次側が加圧され弁開となる場合、ポペット弁体３のシール面２５と弾性シート部材５ｂの環状シール部５０ｂの接触角度θが、所定の離間角度となるために必要となるポペット弁体３の押し上げ移動距離が、第１実施形態の場合と比較して少なくて済むようになる。このため本例においても、第１実施形態等と比較して、より小さい弁開力で開弁することができる。また、本例によれば、１次側と２次側の流路軸が互いに傾斜して流路が接続されている場合にも応用することができる。 Therefore, also in this example, when the primary side is pressurized and the valve is opened, it is necessary for the contact angle θ between the seal surface 25 of the poppet valve body 3 and the annular seal portion 50b of the elastic sheet member 5b to be a predetermined separation angle. As a result, the pop-up valve body 3 can be moved less than the first embodiment as compared with the first embodiment. For this reason, also in this example, compared with 1st Embodiment etc., it can open with a smaller valve opening force. Moreover, according to this example, the present invention can also be applied to the case where the flow paths are connected such that the primary and secondary flow path axes are inclined with respect to each other.

次に、本発明の第４実施形態を説明する。図５（ａ）においては本発明の第４実施形態に係る弾性シート部材５ｃの正面図を、図５（ｂ）においては本発明の第４実施形態に係る逆止め弁の断面図を示している。 Next, a fourth embodiment of the present invention will be described. 5A shows a front view of the elastic sheet member 5c according to the fourth embodiment of the present invention, and FIG. 5B shows a cross-sectional view of the check valve according to the fourth embodiment of the present invention. Yes.

本例においては、図５（ａ）に示すように、弾性シート部材５ｃの環状シール部５０ｃは、図において上側の薄肉部３２ｃが幅薄であって、下側の厚肉部３３ｃが幅厚に形成されているが、環状シール部５０ｃの幅が不均一に形成されていれば、このような形状に限定されない。その他の構造は、第１実施形態と同様である。 In this example, as shown in FIG. 5A, in the annular seal portion 50c of the elastic sheet member 5c, the upper thin portion 32c is thin in the drawing, and the lower thick portion 33c is wide in the drawing. However, the shape is not limited to such a shape as long as the annular seal portion 50c has a non-uniform width. Other structures are the same as those of the first embodiment.

このように薄幅に形成された環状シール部５０ｃ付近では、ポペット弁体３のシール面２５との環状シール部５０ｃとの接触面積が、幅厚に形成された環状シール部３２ｃ付近と比較して小さくなるため、より少ない弁開力で剥離させることができる。このように、環状シール部３２ｃの幅を不均一に形成すれば、幅が異なる箇所によって必要となる弁開力が異なるようになるため、剥離の開始となる起点を発生させることができる。さらに本例では、環状シール部の位置で異なる弁開力の不均一性は、環状シール部５０ｃの幅の不均一性に起因していることから、弾性シート部材５ｃに形成される環状シール部５０ｃの偏芯の度合いを小さくする乃至はなくした場合であっても、剥離の開始となる起点を発生させることができる。 In the vicinity of the annular seal portion 50c formed in such a thin width, the contact area between the seal surface 25 of the poppet valve body 3 and the annular seal portion 50c is compared with the vicinity of the annular seal portion 32c formed in the width and thickness. Therefore, it can be peeled off with less valve opening force. In this way, if the width of the annular seal portion 32c is formed non-uniformly, the required valve opening force varies depending on the location where the width is different, so that it is possible to generate a starting point from which separation starts. Furthermore, in this example, since the non-uniformity of the valve opening force that varies depending on the position of the annular seal portion is caused by the non-uniformity of the width of the annular seal portion 50c, the annular seal portion formed on the elastic sheet member 5c. Even when the degree of eccentricity of 50c is reduced or eliminated, a starting point for starting peeling can be generated.

更に、本発明は、前記実施の形態の記載に限定されるものではなく、本発明の特許請求の範囲に記載されている発明の精神を逸脱しない範囲で種々の変更ができるものである。 Furthermore, the present invention is not limited to the description of the above embodiment, and various modifications can be made without departing from the spirit of the invention described in the claims of the present invention.

１ボデー
２ボデー部
３ポペット弁体
４コイルスプリング
５、５ａ、５ｂ、５ｃ弾性シート部材
７筒部
９２次側流路
１５１次側流路
１６開口側端面
２１圧入間隔
１８外側段部
２２内側段部
２５シール面
３２、３２ａ、３２ｂ、３２ｃ薄肉部
３３、３３ａ、３３ｂ、３３ｃ厚肉部
５０、５０ａ、５０ｂ、５０ｃ環状シール部
θ 接触角度 DESCRIPTION OF SYMBOLS 1 Body 2 Body part 3 Poppet valve body 4 Coil spring 5, 5a, 5b, 5c Elastic sheet member 7 Cylindrical part 9 Secondary side flow path 15 Primary side flow path 16 Opening side end surface 21 Press-fitting space 18 Outer step part 22 Inner side Step part 25 Seal surface 32, 32a, 32b, 32c Thin part 33, 33a, 33b, 33c Thick part 50, 50a, 50b, 50c Annular seal part θ Contact angle

Claims

A poppet valve that is elastically biased toward the primary side is mounted in a body having a primary side flow path and a secondary side flow path, and the outer periphery of a diaphragm-like elastic sheet member that seals the poppet valve is closed to the body. A non-return valve, wherein the elastic sheet member is provided with an annular seal portion at a position eccentric from the central axis of the elastic sheet member.

The check valve according to claim 1, wherein a press-fitting interval is provided between the elastic sheet member and the body so as to expand in a diaphragm shape when the valve is opened.

The check valve according to claim 1, wherein the press-fitting interval is a concave surface of the body that abuts on one surface of the elastic sheet member.

The check valve according to claim 1, wherein the annular seal portion of the elastic sheet member is formed in an oval shape or an oval shape.

The check valve according to claim 1, wherein a seal surface width of the annular seal portion is formed non-uniformly.