JP2015139780A - Resonator and method for manufacturing resonator - Google Patents

Abstract

Provided is a resonator capable of accelerating the biting of a plurality of protrusions provided on a pressing surface into an object to be bonded and preventing burrs and tears from being generated on the object to be bonded. A plurality of cone-shaped cone-shaped projections 26 arranged in a rhombus shape inclined with respect to two opposite sides of a pressing surface 24 at positions excluding the peripheral portion of the pressing surface 24. Each of the four ridge lines is arranged in the vibration direction (X direction) of the resonator body in which two opposed ridge lines 26a and 26b resonate. Accordingly, each edge formed by the two opposing ridge lines 26a and 26b and arranged in the vibration direction bites into the article to be joined, so that the plurality of protrusions 26 provided on the pressing surface 24 bite into the article to be joined. Can be promoted. Moreover, since the protrusion 26 is not formed in the peripheral part of the press surface 24, it can prevent that a burr | flash and a tear arise in a to-be-joined object. [Selection] Figure 3

Description

  The present invention relates to a resonator used in an ultrasonic vibration bonding apparatus that includes a resonator main body that resonates with ultrasonic vibration of a connected vibrator and bonds an object to be bonded, and a method for manufacturing the resonator.

  Conventionally, a pressure surface (pressing surface) of a resonator including a resonator main body that resonates with ultrasonic vibration of a coupled vibrator has a plurality of grooves and a plurality of protrusions in order to prevent slippage with a workpiece. Is provided. For example, in the resonator disclosed in Patent Document 1, vertical grooves and horizontal grooves are formed in a grid pattern on a rectangular pressure surface, and a truncated pyramid having a square cross section is surrounded by the vertical grooves and the horizontal grooves. A plurality of projections are provided. Further, on the pressure surface of the resonator, in order to prevent burrs and tears from being generated at the edge portion of the pressure surface, the vertical groove and A flat portion is provided at a position higher than the lateral groove.

Japanese Patent Laying-Open No. 2012-152792 (paragraphs 0011, 0012, FIG. 1, etc.)

  By the way, in the resonator described above, a plurality of grooves parallel to and perpendicular to the vibration direction of the resonator main body that resonates with the ultrasonic vibration of the vibrator are formed on the pressing surface, whereby a plurality of projections having a truncated pyramid shape with a square cross section are formed. Are arranged in a grid pattern parallel and perpendicular to the two opposite sides of the pressing surface. For this reason, of the four inclined surfaces of each protrusion, two opposing inclined surfaces are arranged substantially orthogonal to the vibration direction of the resonator. Therefore, when the resonator vibrates in a state where the pressing surface is pressed against the workpiece and the tip of each projection slightly bites into the workpiece, the slope of each projection arranged perpendicular to the vibration direction causes the resonator to be There are problems that the vibration is inhibited and the biting of each protrusion into the object to be joined is suppressed.

  The present invention has been made in view of the above-described problems, and can promote the biting of the plurality of protrusions provided on the pressing surface into the object to be bonded, and the object to be bonded can be burred or broken. An object of the present invention is to provide a resonator capable of preventing the above-described problem. It is another object of the present invention to provide a manufacturing method capable of easily manufacturing this resonator.

  In order to achieve the above object, a resonator according to the present invention includes a resonator body that resonates with ultrasonic vibration of a connected vibrator, and is used in an ultrasonic vibration bonding apparatus that bonds an object to be bonded. In the resonator, a rectangular pressing surface that presses the object to be joined and a plurality of protrusions having a truncated pyramid shape with a diamond-shaped cross section are provided at two opposite sides of the pressing surface. And a pressing portion having protrusions arranged in a twill pattern inclined with respect to each other, and each of the protrusions is a vibration of the resonator body in which two opposing ridge lines of the four ridge lines resonate. It is characterized by being arranged in a direction (claim 1).

  A resonator manufacturing method according to the present invention includes a preparation step of preparing a resonator body having a pressing portion provided with a rectangular plane in a resonator manufacturing method used in an ultrasonic vibration bonding apparatus. A groove forming step of forming a plurality of grooves in the plane in the form of a twill that is inclined with respect to two opposite sides of the rectangular plane, and a cross-sectional rhombus shape among the plurality of protrusions formed between the grooves And a removal step for removing non-protrusions (claim 2).

  In addition, in a method for manufacturing a resonator used in an ultrasonic vibration bonding apparatus, a preparation step of preparing a resonator body having a pressing portion provided with a rectangular plane, and a peripheral portion of the rectangular plane are ground. And a convex forming step of forming a table-like convex part at a position excluding the peripheral part of the flat surface, and a plurality of grooves in a grid shape inclined with respect to two opposite sides of the rectangular flat surface. And a groove forming step to be formed on the substrate (claim 3).

  According to the first aspect of the present invention, the pressing portion of the resonator including the resonator main body that resonates with the ultrasonic vibration of the connected vibrator includes the rectangular pressing surface that presses the object to be joined, and the periphery of the pressing surface. And a plurality of projections each having a truncated pyramid shape with a rhombus cross section arranged in a twill shape inclined with respect to two opposite sides of the pressing surface. In addition, each of the protrusions provided on the protrusion is disposed in the vibration direction of the resonator body in which two opposing ridge lines of the four ridge lines resonate. Therefore, when the resonator vibrates in a state where the pressing surface is pressed against the object to be bonded and the tip of each protrusion slightly bites into the object to be bonded, each edge formed by two opposing ridge lines and arranged in the vibration direction. Bites into the article to be joined, so that the biting of the plurality of protrusions provided on the pressing surface into the article to be joined can be promoted.

  In addition, a plurality of truncated pyramid-shaped projections having a rhombus cross section are arranged in a grid pattern inclined with respect to two opposite sides of the pressing surface of the resonator, but protrusions are formed on the peripheral portion of the pressing surface. Therefore, there is no possibility that an edge is formed at the edge position of the pressing surface due to, for example, the projection being cut vertically along the edge of the pressing surface. Therefore, it is possible to provide a resonator that can prevent burrs and tears from being generated in the object to be joined at the edge portion of the pressing surface of the resonator.

  According to the second aspect of the present invention, a plurality of grooves are formed in the groove forming step on the rectangular flat surface provided in the pressing portion of the resonator body in a cross-hatched shape inclined with respect to two opposite sides of the flat surface. The Then, among the plurality of protrusions formed between the grooves, a protrusion having a non-cross-sectional shape formed on the peripheral edge of the plane is removed in the removing step, so that a pyramid having a cross-sectional rhombus is formed at a position excluding the peripheral edge of the flat surface. A projection part composed of a plurality of trapezoidal projections is formed, and a pressing surface is formed around the projection part. Therefore, no protrusion is formed on the peripheral portion of the pressing surface, and a resonator that can prevent the occurrence of burrs and breaks in the object to be joined can be easily manufactured.

  According to invention of Claim 3, the peripheral part of the rectangular plane provided in the press part of the resonator main body is ground in a convex part formation process, and a table-like convex part is formed in the position except a peripheral part of a plane. By doing so, a pressing surface is formed around the convex portion. Then, in the groove forming step, a plurality of grooves are formed in a convex shape in a twill shape inclined with respect to two opposing sides of a rectangular plane, thereby forming a plurality of projections having a truncated cone-shaped truncated cone shape. A protrusion is formed. Therefore, no protrusion is formed on the peripheral portion of the pressing surface, and a resonator that can prevent the occurrence of burrs and breaks in the object to be joined can be easily manufactured.

It is a figure which shows an ultrasonic vibration joining apparatus provided with the resonator concerning one Embodiment of this invention. It is a figure which shows the resonator shown in FIG. 1, Comprising: (a) is a top view, (b) is a front view. It is a principal part enlarged view of FIG. 2, Comprising: (a) is a pressing surface, (b) is a fragmentary sectional view of (a). It is a figure which shows an example of the manufacturing method of a resonator, Comprising: (a), (b) shows a different process, respectively. It is a figure which shows the other example of the manufacturing method of a resonator, Comprising: (a), (b) shows a different state, respectively. It is a figure which shows the modification of a resonator. It is a figure which shows the modification of a resonator, Comprising: (a), (b) is a figure which shows a different vibration state, respectively.

  An embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a diagram showing an ultrasonic vibration bonding apparatus including a resonator according to an embodiment of the present invention. 2 is a diagram showing the resonator shown in FIG. 1, wherein (a) is a plan view, (b) is a front view, FIG. 3 is an enlarged view of a main part of FIG. 2, and (a) is a pressing surface. (B) is a fragmentary sectional view of (a).

  The ultrasonic vibration bonding apparatus 1 shown in FIG. 1 includes a resonator 2 and an anvil 3, and the first and second objects to be bonded 4 and 5 are moved by a pressing surface 24 of the resonator 2 and a pressing surface 31 of the anvil 3. Ultrasonic vibration is applied in a state of being sandwiched and pressurized, and both the objects to be bonded 4 and 5 are bonded and connected. In the ultrasonic vibration bonding apparatus 1, as the objects to be bonded 4 and 5, metal plates or metal foils are bonded, or resin materials such as a resin substrate are bonded.

  Further, the ultrasonic vibration bonding apparatus 1 is provided with a drive mechanism (not shown) that drives the resonator 2 in the directions of arrows X, Y, Z, and θ and drives the anvil 3 in the directions of arrows X and Y. . Both the objects to be bonded 4 and 5 are held by a holding mechanism (not shown), and the positions of the objects to be bonded 4 and 5 are adjusted in the directions of arrows X and Y by driving the holding mechanism. Therefore, the resonator 2 is driven by the drive mechanism in the directions of arrows X, Y, and θ, the anvil 3 is driven by the drive mechanism in the directions of arrows X and Y, and both the objects to be joined 4 and 5 are adjusted in the directions of the arrows X and Y by the holding mechanism. By doing so, the relative positions of the resonator 2, the anvil 3, and both the objects to be bonded 4, 5 are aligned. Further, when the resonator 2 is driven by the drive mechanism in the direction of the arrow Z, the overlapping portions of the two objects to be joined 4 and 5 are overlapped by the pressing surface 24 of the resonator 2 and the pressing surface 31 of the anvil 3. It is pinched and pressurized.

  In addition, a pressure sensor (not shown) is provided in the resonator 2 or the anvil 3, and the both objects 4 and 5 sandwiched between the pressing surface 24 of the resonator 2 and the pressing surface 31 of the anvil 3. The pressure is detected by a pressure sensor. Therefore, the drive mechanism for driving the resonator 2 in the direction of the arrow Z is feedback-controlled based on the pressure applied to the workpieces 4 and 5 detected by the pressure sensor, so that both the workpieces 4 and 5 are driven. The applied pressure is controlled.

  The drive mechanism that drives the resonator 2 and the anvil 3 can be configured by a known actuator such as a servo motor, a linear motor, a stepping motor, or an air cylinder. Further, the configuration of the moving shaft provided in the resonator 2 and the anvil 3 is not limited to the above-described example, and the anvil 3 may be driven in the directions of arrows Z and θ. The anvil 3 may be provided with any combination of movement axes in the directions of the arrows X, Y, Z, and θ.

  Moreover, it is good also as a structure by which both the to-be-joined objects 4 and 5 are hold | maintained by the adsorption | suction etc. to the pressing surfaces 24 and 31 of the resonator 2 and the anvil 3, respectively. In this case, the resonator 2 and the anvil 3 are driven by a drive mechanism, so that the objects to be bonded 4 and 5 held on the pressing surface 24 of the resonator 2 and the pressing surface 31 of the anvil 3 are respectively relative to each other. Various positions can be aligned.

  Next, the resonator 2 will be described.

  As shown in FIGS. 2A and 2B, the resonator 2 includes a resonator body 21 in which one end side in the X direction is thinly formed in a mouth shape in front view, and one end of the resonator body 21. The resonator main body 21 is resonated with the ultrasonic vibration of a vibrator (not shown) connected to the other end of the resonator main body 21 and ultrasonically vibrates. . In this embodiment, the resonator body 21 is formed to have a half wavelength length of the resonance frequency in the X direction that is the vibration direction.

  Further, a supported portion 23 is provided by forming a concave portion along the circumferential direction at the center position in the X direction corresponding to the minimum amplitude point (nodal point) of the resonator body 21. The resonator 21 is supported by being clamped or the like by a supporting means (not shown) having a supported portion 23 of the resonator body 21 connected to a driving mechanism for driving the resonator 21. The

  Moreover, the pressing part 22 is provided on both sides in the Z direction, and has a rectangular pressing surface 24 that presses the workpieces 4 and 5, and a protrusion 25 provided on each of the pressing surfaces 24. Yes. Further, as shown in FIGS. 3A and 3B, each protrusion 25 is provided at a position excluding the peripheral edge of each pressing surface 24, and a plurality of protrusions 26 having a truncated pyramid shape with a diamond-shaped cross section are provided. The pressing surfaces 24 are arranged in a twill shape inclined with respect to two opposing sides.

  Further, the projection 26 is formed in a truncated pyramid shape with a cross-section of a truncated pyramid cut off, and each projection 26 resonates between two opposing ridge lines 26a and 26b among the four ridge lines. The resonator body 21 is arranged in the vibration direction (X direction). In addition, a plurality of grooves 27 having a substantially V-shaped cross section are formed between the protrusions 26 so as to be inclined with respect to two opposing sides of the pressing surface 24.

  Then, the resonator 2 (resonator body 21) ultrasonically vibrates in a state where both the objects to be joined 4 and 5 are sandwiched and pressed between the pressing surface 24 of the resonator 2 and the pressing surface 31 of the anvil 3. Thereby, ultrasonic vibration is applied to both the objects to be bonded 4 and 5.

  As described above, in this embodiment, the pressing portion 22 of the resonator 2 including the resonator main body 21 that resonates with the ultrasonic vibration of the coupled transducers is a rectangular-shaped pressing that presses the workpieces 4 and 5. Protrusions provided at positions excluding the surface 24 and the peripheral portion of the pressing surface 24, and a plurality of pyramidal pyramid-shaped projections 26 having a rhombus cross section are arranged in a cross-hatched pattern inclined with respect to two opposing sides of the pressing surface 24 Part 25. In addition, each of the protrusions 26 provided on the protrusion 25 is disposed in the vibration direction (X direction) of the resonator body 21 in which two opposing ridge lines 26a and 26b out of the four ridge lines resonate. Therefore, when the resonator 2 vibrates in a state where the pressing surface 24 is pressed against the workpiece 4 and the tips of the protrusions 26 slightly bite into the workpiece 4, the resonator 2 is formed by two opposing ridge lines 26a and 26b. Since each edge arranged in the vibration direction bites into the workpiece 4, the biting of the plurality of protrusions 26 provided on the pressing surface 24 into the workpiece 4 can be promoted.

  In addition, a plurality of grooves are formed on the rectangular pressing surface of the resonator so as to be inclined with respect to the two opposing sides of the pressing surface, thereby forming a twill inclined with respect to the two opposing sides of the pressing surface. A plurality of protrusions having a diamond-shaped cross section arranged in a grid may be formed. In this case, each protrusion formed on the peripheral portion of the pressing surface has a shape that is vertically cut at the edge position of the pressing surface. Therefore, the cross-sectional shape is a shape in which the rhombus is vertically cut along the edge of the pressing surface, and an edge is formed on the protrusion at the vertical position. Therefore, when a workpiece having a larger area than the pressing surface is bonded using this resonator, burrs and tearing may occur in the bonding object at the edge position of the pressing surface where the edge is formed. .

  However, in the above-described embodiment, the plurality of projections 26 having a truncated pyramid shape with a rhombus cross section are arranged in a grid shape inclined with respect to two opposite sides of the pressing surface 24 of the resonator 2. Since the protrusion 26 is not formed on the peripheral edge of the pressing surface 24, an edge is formed at the edge position of the pressing surface 24 by, for example, cutting the protrusion vertically along the edge of the pressing surface as in the prior art. There is no fear. Therefore, it is possible to prevent the burrs and tears from being generated in the objects 4 and 5 at the edge portion of the pressing surface of the resonator.

(Example of manufacturing method)
An example of a method for manufacturing a resonator will be described with reference to FIG. FIG. 4 is a diagram showing an example of a method for manufacturing a resonator, and (a) and (b) show different processes.

  First, a resonator body 21 having a pressing portion 22 provided with a rectangular flat surface 24a is prepared (preparation step), and as shown in FIG. 4A, two opposite sides of the rectangular flat surface 24a are prepared. A plurality of substantially V-shaped grooves 27 having an inclined cross-shape are formed on the flat surface 24a by grinding / cutting using an end mill or the like (groove forming step). Of the plurality of protrusions 26 formed between the grooves 27, the protrusions that are not diamond-shaped in cross section, that is, the protrusions formed outside the area surrounded by the thick line shown in FIG. The resonator 2 is completed by being removed by the used grinding / cutting or electric discharge tool (removal process).

  In this way, a plurality of grooves 27 are formed in the rectangular plane 24a provided in the pressing portion 22 of the resonator body 21 in a grid shape inclined with respect to two opposite sides of the plane 24a in the groove forming step. Is done. Of the plurality of protrusions 26 formed between the grooves 27, the protrusions that are not in the shape of a cross-section formed on the peripheral edge of the flat surface 24a are removed in the removing step, so that the protrusions 26 are removed from the peripheral edge of the flat surface 24a. A projecting portion 25 including a plurality of rhombus-shaped pyramid-shaped projections 26 is formed, and a pressing surface 24 is formed around the projecting portion 25. Therefore, the protrusion 26 is not formed in the peripheral part of the pressing surface 24, and the resonator 2 which can prevent that the to-be-joined objects 4 and 5 produce a burr | flash and a tear can be manufactured easily.

(Other examples of manufacturing methods)
Another example of the resonator manufacturing method will be described with reference to FIG. FIG. 5 is a diagram showing another example of a method for manufacturing a resonator, and (a) and (b) show different states.

  First, a resonator body 21 having a pressing portion 22 provided with a rectangular flat surface 24a is prepared (preparation step), and is surrounded by a peripheral portion of the rectangular flat surface 24a, that is, a thick line shown in FIG. The outer side of the region is ground and cut using an end mill or the like, and a convex portion 25a on the table is formed at a position excluding the peripheral portion of the flat surface 24a (convex portion forming step). Then, as shown in FIG. 5B, a plurality of grooves 27 are formed in the convex portion 25a by grinding / cutting such as an end mill in a twill shape inclined with respect to two opposite sides of the rectangular flat surface 24a. (Groove forming step), the resonator 2 is completed.

  If it does in this way, the peripheral part of the rectangular-shaped plane 24a provided in the press part 22 of the resonator main body 21 will be ground in a convex part formation process, and the table-like convex part 25a will be in the position except the peripheral part of the plane 24a. By being formed, the pressing surface 24 is formed around the convex portion 25a. Then, in the groove forming step, a plurality of grooves 27 are formed in the convex portions 25a in a twill shape inclined with respect to the opposite two sides of the rectangular flat surface 24a, whereby a plurality of pyramidal trapezoidal trapezoidal cross sections are formed. A protrusion 25 made of the protrusion 26 is formed. Therefore, the protrusion 26 is not formed in the peripheral part of the pressing surface 24, and the resonator 2 which can prevent that the to-be-joined objects 4 and 5 produce a burr | flash and a tear can be manufactured easily.

(Modification)
A modification of the resonator will be described with reference to FIGS. 6 and 7 are diagrams showing modifications of the resonator. FIGS. 7A and 7B are diagrams showing different vibration states.

  In the modification shown in FIG. 6, the resonator 2 is provided with a substantially square-shaped pressing surface 24, and a plurality of protrusions 26 are arranged on diagonal lines of the pressing surface 24. A pressing portion 25 is formed in which the protrusions 26 are arranged in a twill shape inclined with respect to two opposing sides of the pressing surface 24 parallel to the vibration direction (X direction). Each of the protrusions 26 is disposed in the vibration direction (X direction) of the resonator body 21 in which two opposing ridge lines 26a and 26b among the four ridge lines resonate.

  In the example shown in FIGS. 7A and 7B, the resonator main body 21 is formed in a substantially cross shape in plan view, as indicated by a dotted line in FIG. When the resonator body 21 is configured in this way, the resonator body 21 resonates with the ultrasonic vibration of the connected vibrator, contracts in the X direction shown in FIG. 7A, and extends in the Y direction. It vibrates in the X and Y directions between the state extending in the X direction and contracting in the Y direction shown in FIG.

  In addition, pressing surfaces 24 are provided at both ends in the X direction and both ends in the Y direction of the resonator body 21. Similarly to the above-described example, each pressing surface 24 has a plurality of protrusions 26 in a grid pattern inclined with respect to two opposing sides of the pressing surface 24 parallel to the vibration direction (X, Y direction). Arranged pressing portions 25 are formed. Each of the protrusions 26 is disposed in the vibration direction (X direction) of the resonator body 21 in which two opposing ridge lines 26a and 26b among the four ridge lines resonate.

  The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit thereof, for example, the length and shape of the resonator 2, etc. Is not limited to the above-described example, and it is sufficient that the resonator is appropriately formed in an optimal shape and size in accordance with the configuration and purpose of use of the ultrasonic bonding apparatus.

  In the manufacturing method described above, the plurality of grooves 27 formed on the plane 24a of the resonator body 21 are opposed to the two sides of the rectangular plane 24a arranged in parallel to the vibration direction (X direction) of the resonator 21. It is good to form in the plane 24a inclining about 45 degrees with respect to this.

  In addition, the object to be joined is not limited to the above example, and is formed on a substrate such as a glass epoxy substrate having rigidity or a flexible substrate made of polyimide having flexibility, a ceramic substrate, a wafer, or the like. The metal joints may be joined by ultrasonic vibration. Further, any material that can be bonded by ultrasonic vibration, such as a ceramic substrate or a wafer, may be bonded by ultrasonic vibration with any material to be bonded. Moreover, you may make it join a lead frame, a flexible substrate, core wires, such as a lead wire and a coaxial cable, an electronic component, and a chip component as a to-be-joined object.

  The present invention can be widely applied to a resonator used for ultrasonic vibration bonding and a method for manufacturing the resonator.

DESCRIPTION OF SYMBOLS 1 ... Ultrasonic vibration joining apparatus 2 ... Resonator 21 ... Resonator main body 22 ... Pressing part 24 ... Pressing surface 24a ... Plane 25 ... Protrusion part 25a ... Convex part 26 ... Protrusion 26a, 26b ... Ridge line 4, 5 ... Joined object

Claims (3)

In a resonator including a resonator body that resonates with ultrasonic vibration of a connected vibrator, and used in an ultrasonic vibration bonding apparatus for bonding an object to be bonded,
A rectangular pressing surface for pressing the object to be joined;
A pressing portion provided at a position excluding the peripheral edge portion of the pressing surface, and a plurality of protrusions having a truncated pyramid shape with a rhombus cross section arranged in a twill shape inclined with respect to two opposite sides of the pressing surface Part
Each of the protrusions is arranged in a vibration direction of the resonator body in which two opposing ridge lines among four ridge lines resonate. In a method for manufacturing a resonator used in an ultrasonic vibration bonding apparatus,
Preparing a resonator body having a pressing portion provided with a rectangular plane; and
A groove forming step of forming a plurality of grooves on the plane in a twill shape inclined with respect to two opposing sides of the rectangular plane;
And a removal step of removing a protrusion having a non-cross-sectional shape out of the plurality of protrusions formed between the grooves. In a method for manufacturing a resonator used in an ultrasonic vibration bonding apparatus,
Preparing a resonator body having a pressing portion provided with a rectangular plane; and
A convex portion forming step of grinding a peripheral portion of the rectangular plane to form a table-like convex portion at a position excluding the peripheral portion of the plane;
And a groove forming step of forming a plurality of grooves on the convex portion in a twill shape inclined with respect to two opposing sides of the rectangular flat surface.

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