JP2015066531A - Droplet discharge state confirmation device, droplet discharge state confirmation method, and droplet coating apparatus using the device - Google Patents

Abstract

To provide a droplet discharge state confirmation device capable of accurately confirming a discharge state of a droplet discharged from each nozzle of a coating head from an image obtained by photographing with a camera. A camera 20 for photographing droplets ejected from each nozzle 12 of a coating head 10 in which a plurality of nozzles ejecting droplets of a solution are arranged, and each nozzle 12 obtained by photographing with the camera 20 are disclosed. An apparatus for providing a droplet discharge state having image providing means for providing an image including a flight trace of the discharged droplet as information representing the discharge state of the droplet, wherein the depth of field of the camera 20 is In the optical axis direction of the camera 20, the distance between the outer edge part of the nozzle closest to the camera 20 and the outer edge part of the nozzle farthest from the camera farthest from the camera. The distance is set within the range of 1 to 2 times. [Selection] Figure 5A

Description

  The present invention relates to a droplet discharge state confirmation device, a droplet discharge state confirmation method, and a droplet application apparatus using the droplet discharge state confirmation device.

  In a manufacturing process of a liquid crystal display device, a semiconductor device, or the like, a droplet applying apparatus that applies a solution such as an alignment film material (for example, polyimide) solution or a resist solution to a substrate is used. For example, a droplet applying apparatus disclosed in Patent Document 1 is known. This conventional droplet coating apparatus includes a coating head having a plurality of nozzles that discharge droplets of a solution as a coating solution in a certain direction, and includes a substrate to be coated and a coating head. In a state of being opposed to each other, the application head and the substrate are relatively moved while discharging a droplet of the solution from each nozzle of the application head. Thereby, the solution discharged as a droplet from each nozzle of the coating head is applied to the surface of the substrate.

  In this type of solution coating apparatus, a droplet discharge state confirmation device is used to confirm the discharge state of the droplets discharged from each nozzle in the coating head. This droplet discharge state confirmation device has a camera for photographing a droplet being ejected by ejecting from each nozzle of a coating head, and the flight of the droplet ejected from each nozzle obtained by photographing with the camera An image including a trace is generated. And the state of the droplet discharged from each nozzle can be confirmed from the flight trace of the droplet discharged from each nozzle included in the image. For example, it can be determined that there is a nozzle clogging due to a lack of droplet flight traces in the image.

JP 2011-50935 A

  By the way, from the nozzles of the coating head, in addition to the main droplets, fine liquid particles cling around each droplet in a mist form or from the drain pan that receives the discharged droplets to a mist form. Liquid particles can fly up. On the other hand, in general, the depth of field of the camera is set wide so that the flying droplet can be clearly captured even if the focal position of the camera is slightly deviated from the best position.

However, in the conventional droplet discharge state confirmation device, when the depth of field of the camera is set wide, for example, as shown in FIG. image part I _H and not only flying traces I _FY of droplet discharged from the nozzle, there is also appears a possibility to many of the mist of fine liquid particles remains Ia. For this reason, it may be erroneously determined from the image I obtained by photographing with the camera that there are more nozzles than the original number of nozzles formed on the coating head, and the nozzles of liquid clogging In spite of this, the fine liquid particle trace Ia may be mistakenly determined as a regular liquid droplet flight trace _{IFY and} there is no liquid clogging nozzle.

  The present invention provides a droplet discharge state confirmation device, a droplet discharge state confirmation method, and a method for confirming the discharge state of a droplet discharged from each nozzle of a coating head from an image obtained by photographing with a camera, A droplet applying apparatus using the apparatus is provided.

A droplet discharge state confirmation device according to the present invention is obtained by photographing a droplet ejected from each nozzle of a coating head in which a plurality of nozzles ejecting solution droplets are arranged, and photographing with the camera. A droplet discharge state confirmation device comprising: an image providing unit that provides an image including a flight trace of a droplet discharged from each nozzle as information representing the discharge state of the droplet;
In the optical axis direction of the camera, the camera has a depth of field closest to the outer edge portion of the nozzle located closest to the camera, and from the camera of the nozzle farthest from the camera. It becomes the structure set to the distance within the range of 1 time or more and 2 times or less of the distance with a distant outer edge site | part.

  In the droplet discharge state confirmation apparatus according to the present invention, the coating head includes a first row in which a plurality of nozzles are arranged, and a second row in parallel with the first row, and the camera The depth of field of the first row is equal to or greater than the distance between the outer edge portion of each nozzle of the first row closest to the camera and the outer edge portion of each nozzle of the second row farthest from the camera. It can be set as the structure set to the distance within the range of 2 times or less.

The droplet discharge state confirmation method according to the present invention includes a photographing step of photographing a droplet ejected from each nozzle of a coating head in which a plurality of nozzles that eject a droplet of a solution are arranged, and a camera;
An image providing step for providing an image including a flight trace of a droplet ejected from each nozzle obtained by photographing by the camera, and the droplet ejected from each nozzle of the coating head using the image A droplet discharge state confirmation method for confirming the discharge state of the nozzle, wherein an outer edge portion of the nozzle closest to the camera in which the depth of field of the camera is closest to the camera in the optical axis direction of the camera And a distance within a range of 1 to 2 times the distance between the nozzle farthest from the camera and the outer edge part farthest from the camera.

In addition, a droplet discharge state confirmation device according to the present invention includes a camera that shoots droplets discharged from each nozzle of a coating head in which a plurality of nozzles that discharge solution droplets are arranged, and shooting using the camera. A droplet discharge state confirmation device having an image providing unit that provides an image including a flight trace of a droplet discharged from each nozzle obtained as described above as information indicating the discharge state of the droplet,
The camera control unit controls the depth of field of the camera according to the arrangement of the plurality of nozzles in the optical axis direction of the camera.

  In the droplet discharge state confirmation apparatus according to the present invention, the camera control unit is configured to make the depth of field of the camera closest to the camera of the nozzle located closest to the camera in the optical axis direction of the camera. It can be set as the distance within the range of 1 to 2 times the distance between the outer edge part and the outer edge part of the nozzle farthest from the camera.

  Further, the method for confirming a droplet discharge state according to the present invention includes a photographing step of photographing a droplet discharged from each nozzle of a coating head in which a plurality of nozzles discharging a droplet of a solution are arranged with a camera, An image providing step for providing an image including a flight trace of a droplet ejected from each nozzle obtained by photographing with a camera, and the droplet ejected from each nozzle of the coating head using the image A droplet discharge state confirmation method for confirming the discharge state of the plurality of nozzles, comprising: a camera control step for controlling a depth of field of the camera according to an arrangement form of the plurality of nozzles in an optical axis direction of the camera; Become.

  In the droplet discharge state confirmation method according to the present invention, the camera control step may be configured such that the depth of field of the camera is closest to the camera of the nozzle closest to the camera in the optical axis direction of the camera. It can be set as the distance within the range of 1 to 2 times the distance between the outer edge part and the outer edge part of the nozzle farthest from the camera.

  Furthermore, in the droplet discharge state confirmation device according to the present invention, the camera control unit can control the depth of field of the camera in accordance with the rotation angle position of the coating head.

  Furthermore, in the droplet discharge state confirmation method according to the present invention, the camera control step can control the depth of field of the camera in accordance with the rotation angle position of the coating head.

  A droplet coating apparatus according to the present invention includes a coating head in which a plurality of nozzles for discharging droplets of a solution are arranged, a support mechanism that supports an object to be coated, and the coating head supported by the support mechanism. In the droplet coating apparatus, comprising: a driving mechanism that relatively moves the coating head and the support mechanism in a state of being opposed to the object to be coated. It becomes the structure which has a state confirmation apparatus.

  According to the present invention, it is possible to accurately confirm the discharge state of droplets discharged from each nozzle of the coating head from an image obtained by photographing with a camera.

It is a figure which shows the basic composition of the solution coating apparatus which concerns on embodiment of this invention. It is a figure which shows the structure seen from the side of the principal part of the droplet discharge state confirmation apparatus with which the solution coating apparatus shown in FIG. 1 is equipped. It is a figure which shows the structure seen from the front of the principal part of the droplet discharge state confirmation apparatus with which the solution coating apparatus shown in FIG. 1 is equipped. It is a figure which shows the structure seen from the main part of the droplet discharge state confirmation apparatus with which the solution coating apparatus shown in FIG. 1 is equipped. It is a figure which shows the positional relationship of the optical axis of a camera and each nozzle of a coating head in the droplet discharge state confirmation apparatus shown to FIG. 1 thru | or FIG. 2C, and the depth of field of the camera. It is a figure which shows an example of the image obtained by imaging | photography with a camera. It is a figure which shows another example of the image acquired by imaging | photography with a camera. 1 shows the arrangement of nozzles in another type of coating head used in the solution coating apparatus shown in FIG. 1, the positional relationship between each nozzle of the coating head and the optical axis of the camera, and the depth of field of the camera. FIG. It is a figure which expands and shows the positional relationship of the nozzle for determining the depth of field of a camera about the coating head shown to FIG. 5A. It is a figure which shows the positional relationship (the 1) of each nozzle of the coating head which can rotate, and the optical axis of a camera. It is a figure which shows the positional relationship (the 2) of each nozzle of the coating head which can rotate, and the optical axis of a camera. It is a figure which shows the positional relationship (the 3) between each nozzle of the coating head which can rotate, and the optical axis of a camera. It is a figure which shows an example of the image obtained by imaging | photography with the camera in the conventional droplet discharge state confirmation apparatus.

  Embodiments of the present invention will be described with reference to the drawings.

  The solution coating apparatus according to an embodiment of the present invention is configured as shown in FIG.

  In FIG. 1, the solution coating apparatus includes a support mechanism 60 and a coating head 10 that support a substrate W (for example, a liquid crystal substrate) that is an object to be coated. Usually, the coating head 10 is located at a coating position. Therefore, it is provided so as to be able to face the substrate W supported by the support mechanism 60 (see the broken line in FIG. 1). The solution coating apparatus further includes a drive mechanism 70 that moves the support mechanism 60 that supports the substrate W in the horizontal direction. The coating head 10 is provided with a plurality of nozzles on the surface facing the substrate W, as will be described in detail later, and from each nozzle by the operation of an unillustrated ejection mechanism (for example, configured using a piezoelectric element or the like). Droplets of a solution (for example, an alignment film material solution (polyimide solution)) as a coating solution are discharged. Then, in a state where the coating head 10 faces the substrate W supported by the support mechanism 60, the solution discharged from each nozzle of the coating head 10 as droplets while the support mechanism 60 moves horizontally by the drive mechanism 70. It is applied to the surface of the substrate W.

  The solution coating apparatus includes a camera 20, a light source 21, and a drain pan 23, and includes a controller 50, a personal computer (hereinafter referred to as a PC) 100, and a display device 110. The controller 50 performs drive control of the ejection mechanism (not shown) of the coating head 10 and lighting control of the light source 21 under the control of the PC 100. The controller 50 also converts the video signal from the camera 20 into image data and supplies the image data to the PC 100, and performs lens aperture drive control in the camera 20 under the control of the PC 100.

  The PC 100 causes the display device 110 to display an image obtained by photographing with the camera 20 based on the image data from the controller 50. Further, the PC 100 has a function of performing image processing on image data from the camera 20 sent from the controller 50, and performing a process for determining a discharge state of droplets discharged from each nozzle 12 of the coating head 20 described later. Further, the PC 100 controls the drive mechanism 70 so that the support mechanism 60 moves in a predetermined pattern when the solution is applied to the substrate W.

  The drain pan 23 is provided at a predetermined position in the solution coating apparatus, and the coating head 10 moves between the above-described coating position (see the broken line in FIG. 1) and a standby position facing the drain pan 23. It is possible. A mechanism for moving the application head 10 between the application position and the standby position can be configured by a person skilled in the art using a known technique, and is not illustrated. Instead of moving the coating head 10, the camera 20, the light source 21, and the drain pan 23 may be moved.

  A droplet discharge state confirmation device according to an embodiment of the present invention includes a camera 20, a light source 21, a drain pan 23, a controller 50, functions of the PC 100 as a control device, and a display device 110. The mechanism system of this droplet discharge state confirmation device is configured as shown in FIGS. 2A to 2C together with FIG. 2A shows the configuration of the droplet discharge confirmation apparatus as viewed from the side, FIG. 2B shows the configuration of the mechanism viewed from the front, and FIG. 2C shows the configuration of the mechanism from below. It shows the configuration as seen.

  As shown in FIG. 2C, the coating head 10 is provided with a single nozzle row 11 in which a plurality of nozzles 12 are arranged in a fixed direction at a predetermined interval. As shown in FIGS. 2A to 2C, the camera 20 has an optical axis direction y (in the present embodiment, the same as the y-axis direction) in the direction x (in this embodiment, x It is installed at a predetermined position so as to match the direction crossing the axial direction), for example, the direction orthogonal to the extending direction x of the nozzle row 11. The light source 21 is installed at a predetermined position so as to sandwich the droplet Ldrp ejected from each nozzle 12 of the coating head 10 in the standby position between the camera 20 (see FIGS. 2A and 2B). Thereby, the camera 20 can photograph the droplet Ldrp discharged from each nozzle 12 of the coating head 10 against the background of light from the light source 21.

The user operates the operation unit (not shown) to adjust the lens diaphragm of the camera 20, thereby changing the depth of field Ldp of the camera 20 to each nozzle 12 of the nozzle row 11 as shown in FIG. 3. Is set to a predetermined distance within a range of 1 to 2 times the diameter d.
d ≦ Ldp ≦ 2d
For example, when the diameter of the nozzle 12 is 50 μm, the depth of field Ldp of the camera 20 is set to a predetermined distance (50 μ ≦ Ldp ≦ 100 μm) within the range of 50 μm to 100 μm.

  In the droplet discharge state confirmation device, droplets of the solution are sequentially discharged from each nozzle 12 of the coating head 10 at the standby position toward the drain pan 23. In the process, the camera 20 shoots the liquid droplets discharged from each nozzle 12 in a state where the light from the light source 21 is irradiated (imaging step). A video signal output from the camera 20 at the time of shooting is converted into image data by the controller 50, and the image data is supplied to the PC 100. The PC 100 performs image processing on the image data using a known image processing technique, and whether or not the image captured by the camera 20 includes droplet flight traces (images of droplets in flight) as many as the number of nozzles 12. (Discharge state determination step). Further, the PC 100 displays an image obtained by photographing with the camera 20 on the display device 110 based on the image data (image providing step / image providing means).

For example, an image I as shown in FIG. 4A is displayed on the display device 110. In this image I, in addition to the image portion _IH of the coating head 10, the flight trace _IFY ejected from each nozzle 12 of the coating head 10 indicates the number of nozzles 12 that ejected the droplet (FIG. In the case of 4A, it appears as a number of streaks corresponding to the state in which droplets are ejected from all the nozzles 12). When the nozzle 12 with the application head 10 is clogged, for example, as shown in FIG. 4B, many streaks corresponding to the droplet flight trace _IFY in the image I displayed on the display device 110 are displayed. Missing a occurs. In the PC 100, the droplet flight trace _IFY in the image data shown in FIG. 4A allows the user to eject droplets ejected from each nozzle 12 of the coating head 10 using the image I displayed on the display device 110. The state can be confirmed. For example, in the case of an image I as shown in FIG. 4A, it can be confirmed that the ejection state of the droplets ejected from each nozzle 12 of the application head 10 is normal. On the other hand, for example, in the case of an image I as shown in FIG. 4B, it is confirmed that the discharge state of the liquid droplets discharged from each nozzle 12 of the coating head 10 is not normal due to the liquid clog generated by some nozzles. can do.

  The PC 100 executes the discharge state determination step as follows.

The PC 100 binarizes the image of the droplet flight trace _{IFY in} the image I shown in FIGS. 4A and 4B along a preset horizontal scanning line S with a predetermined threshold. Here, the threshold value is a value that can separate the flight trace L _{FY of the} droplet from the background image. As a result of the binarization processing, if the number of signals indicating the flight trace L _FY of the droplet is obtained for the number of nozzles 12 that ejected the droplet, it is determined that the droplet ejection state is normal. In this case, the application head 10 is moved to the application position as it is, and the solution discharged as droplets from each nozzle 12 of the application head 10 is applied to the substrate W. On the other hand, when the signal indicating the flight trace L _FY of the droplet is different from the number of nozzles 12 that ejected the droplet (usually less than the number of nozzles 12), the droplet ejection state is normal. It is determined that there is no liquid clogging in the nozzle 12 (for example, it is determined that the nozzle 12 is clogged). In this case, after the liquid clogging of the nozzles of the coating head 10 is eliminated, and the normal determination is obtained by taking another droplet by the camera 20, the coating head 10 is moved to the coating position and the coating head 10 is moved. A solution discharged as droplets from each nozzle 12 is applied to the substrate W.

  In the droplet discharge state confirmation apparatus as described above, the depth of field Ldp of the camera 20 that captures the droplets discharged from each nozzle 12 of the coating head 10 is 1 to 2 times the diameter of each nozzle 12. Therefore, by adjusting the focus of the camera 20 to the position of each nozzle 12 in the optical axis direction y of the camera 20, the liquid droplets discharged from each nozzle 12 are changed to the camera 20. The mist-like fine liquid particles that can be clearly imaged without blurring and can be reflected in the image I are at most within the range of twice the diameter of each nozzle 12. Therefore, an image that accurately represents the discharge state of the liquid droplets discharged from each nozzle 12 of the coating head 10 can be displayed on the display device 110. And since the discharge state of the droplet discharged from each nozzle 12 of the coating head 10 can be confirmed using such an image, the image I obtained by photographing with the camera 20 (FIG. 4A and FIG. 4). 4B), the ejection state of the droplets ejected from each nozzle 12 of the coating head 10 can be determined and confirmed more accurately.

  Further, in the above-described droplet discharge state confirmation device, if the focal position shift of the camera 20 that should be adjusted to the position of the nozzle 12 of the coating head 10 is within half the distance d of the nozzle 12 diameter d. The liquid droplets discharged from all the nozzles 12 of the coating head 10 can be appropriately copied without being out of focus.

  As shown in FIG. 2C, instead of the application head 10 in which the plurality of nozzles 12 are formed, an application head 10 in which a plurality of nozzles are formed as shown in FIG. 5A can be used.

In this case, the application head 10 includes a first row 11a in which a plurality of nozzles 12a are arranged in a fixed direction, and is parallel to the first row 11a, and the plurality of nozzles 12b are arranged in the first row 11a. Each nozzle 12a includes a second row 11b arranged without overlapping in the arrangement direction x. As described above, when the plurality of nozzles 12 a and 12 b of the application head 10 are arranged in two rows 11 a and 11 b in the optical axis direction y of the camera 20, the user operates the operation unit to change the lens in the camera 20. The depth of field Ldp of the camera 20 is adjusted to the nozzle 12a of the first row 11a closest to the camera 20 in the optical axis direction y of the camera 20, as shown in FIGS. 5A and 5B. Within the range of 1 to 2 times the distance D between the outer edge part EDGa closest to the camera 20 and the outer edge part EGGb farthest from the camera 20 of the nozzle 12b of the second row 11b farthest from the camera 20 Set to a predetermined distance.
D ≦ Ldp ≦ 2D
For example, when the distance between the outer edge portion EDGa closest to the camera 20 of the nozzle 12a in the first row 11a and the outer edge portion EDGb farthest from the camera 20 of the nozzle 12b in the second row 11b is 8 mm, The depth of field Ldp of 20 is set to a predetermined distance (8 mm ≦ Ldp ≦ 16 mm) within the range of 8 mm to 16 mm.

  In the droplet discharge state confirmation device in the droplet coating apparatus having the coating head 10 (FIGS. 5A and 5B) as described above, a camera 20 that photographs the droplets discharged from the nozzles 12a and 12b of the coating head 10. The outer edge portion EDGa (see FIG. 5B) closest to the camera 20 of each nozzle 12a in the first row 11a and the outer edge farthest from the camera 20 of each nozzle 12b in the second row 11b. Since the distance between the region EDGb (see FIG. 5B) is set to a distance within the range of 1 to 2 times the distance D, the focus of the camera 20 is set between the first column 11a and the second column 11b. By adjusting to the center in the middle, at least the droplets ejected from each nozzle 12a in the first row 11a and each nozzle 12b in the second row 11b can be appropriately copied by the camera 20 without blurring. Kill. The mist-like fine liquid particles that can clearly appear in the image I (see FIGS. 4A and 4B) are at most the outer edge portion EDGa and the second row closest to the camera 20 of the nozzle 12a in the first row 11a. It is only in the range of twice the distance D between the outer edge part EDGb farthest from the camera 20 of the nozzle 12b of 11b. Therefore, the display device 110 can display an image accurately representing the discharge state of the droplets discharged from the nozzles 12 a and 12 b of the coating head 10 by the camera 20. And since the discharge state of the droplet discharged from each nozzle 12a, 12b of the coating head 10 can be confirmed using such an image, the image I obtained by photographing with the camera 20 (FIG. 4A). 4B), it is possible to determine and confirm the ejection state of the droplets ejected from each nozzle 12 of the coating head 10 more accurately.

  In addition, the deviation of the focal position of the camera 20 that is originally adjusted to the center between the first row 11a and the second row 11b is different from the outer edge portion EDGa closest to the camera 20 in the first row 11a. If the distance D is within half the distance D between the outer edge portion EDGb farthest from the camera 20 in the second row 11b, all the nozzles 12a, 12b of the application head 10 (the first row 11a and the second row 11b) The droplets discharged from the column 11b) can be clearly copied without being out of focus.

  In the example described above, the application head 10 has a plurality of nozzles 12a and 12b arranged in two rows 11a and 11b, but may be arranged in three or more rows. In this case, the depth of field Ldp of the camera 20 is farthest from the camera 20 and the outer edge portion EDGa closest to the camera 20 of the nozzle 12 located closest to the camera 20 in the optical axis direction of the camera 20. It is set to a distance within the range of 1 to 2 times the distance between the nozzle 12 at the position and the outer edge part EDGb farthest from the camera 20. Also in this case, by adjusting the focal point of the camera 20 to the center between the nozzle 12 located closest to the camera 20 and the nozzle 12 located farthest from the camera 20, at least the camera 20 is closest. The droplets discharged from all of the nozzles 12 located at the position, the nozzles 12 located farthest from the camera, and the nozzles 12 located between them can be clearly captured by the camera 20 without blurring. Further, the mist-like fine liquid particles that can clearly appear in the image I are at most the outer edge part EDGa closest to the camera 20 of the nozzle 12 closest to the camera 20 and the position farthest from the camera 20. It is only within the range of twice the distance between the outer edge part EDGb farthest from the camera 20 of the nozzle 12 at the center. Therefore, an image that accurately represents the discharge state of the liquid droplets discharged from each nozzle 12 of the application head 10 can be displayed on the display device 110.

  The PC 100 and the controller 50 (camera control unit) are integrated, and the diaphragm of the camera 20, that is, the object field, according to the arrangement form of the plurality of nozzles 12 of the coating head 10 in the optical axis direction y of the camera 20. Depth can be controlled.

  For example, as shown in FIG. 5A, in the droplet applying apparatus using the application head 10 in which a plurality of nozzles 12a and 12b are arranged in two rows (first row 11a and second row 11b), the first row The droplets of the solution are ejected only from the nozzles 12a of 11a and the solution is applied to the substrate G, and the solution liquid is supplied from all the nozzles 11a of the first row 11a and the nozzles 12b of the second row 11b. It can be configured to switch between discharging droplets and applying the solution to the substrate G. In this case, the droplet discharge state confirmation device is obtained by photographing the solution droplets ejected from each nozzle 12 of the coating head 10 with the camera 20 in a state where the solution is actually applied to the substrate W. The image I can be used to determine whether the discharge state is good or not by the PC 100, or can be displayed on the display device 110.

  When droplets of the solution are discharged only from the plurality of nozzles 12a in the first row 11a, the controller 50 controls the depth of field Ldp (camera of the camera 20) under the control of the PC 100 as shown in FIG. 20 lens aperture) is set to a predetermined distance within a range of 1 to 2 times the diameter d of each nozzle 12a of the nozzle array 11a (d ≦ Ldp ≦ 2d). On the other hand, when droplets of the solution are discharged from all of the plurality of nozzles 12a in the first row 11a and the plurality of nozzles 12b in the second row 11b, the control of the PC 100 is performed as shown in FIGS. 5A and 5B. The controller 50 sets the distance D between the outer edge portion EDGa closest to the camera 20 of the nozzle 12a in the first row 11a and the outer edge portion EGGb farthest from the camera 20 of the nozzle 12b in the second row 11b. It is set to a predetermined distance within a range of 1 to 2 times (D ≦ Ldp ≦ 2D). In this case, in addition to the adjustment of the depth of field Ldp, an adjustment for matching the focal position of the camera 20 with the positions of the nozzle rows 11a and 11b from which the solution is discharged may be performed.

  As described above, when the arrangement form of the plurality of nozzles 12 that actually eject the droplets of the solution in the fixed direction in the optical axis direction y of the camera 20 changes, according to the arrangement form of the plurality of nozzles 12, the camera 20. Since the depth of field Ldp is controlled, droplets ejected from the nozzles 12 of the coating head 10 are appropriately controlled by the camera 20 according to the arrangement form of the plurality of nozzles 12 in the optical axis direction y of the camera 20. You can shoot. As a result, the display device 100 can display an image I that accurately represents the discharge state of the droplets discharged from each nozzle 12 of the coating head 10 by the camera 20.

Further, the arrangement form of the plurality of nozzles 12 of the coating head 10 in the optical axis direction y of the camera 20 may be changed even when the coating head 10 is replaced.
For example, when the nozzle row 11 is replaced from the two rows of coating heads 10 to one row of coating heads 10, on the contrary, the nozzle row 11 is replaced from one row of coating heads 10 to two rows of coating heads 10. In this case, further, when the coating head 10 having the two nozzle rows 11a and 11b is replaced with another coating head 10 having a different nozzle row interval, the nozzle head 11 of the coating head 10 after replacement is adjusted. Thus, the depth of field Ldp of the camera 20 can be adjusted.
Furthermore, the arrangement form of the plurality of nozzles 12 of the coating head 10 in the optical axis direction y of the camera 20 can be changed by rotating the coating head 10 in a plane parallel to the arrangement surface of the nozzles 12. be able to.

  For example, as shown in FIGS. 2A to 2C, when the camera 20 is arranged with respect to the application head 10, the application surface of the nozzle 12 is arranged as shown in FIGS. 6A to 6C, for example. It can be rotated in a plane parallel to (the drawing sheet). Thereby, the substantial space | interval in the predetermined direction (direction equivalent to the direction x perpendicular | vertical to the optical axis direction y of the camera 20) of the nozzle 12 at the time of apply | coating a solution can be changed.

  In this case, under the control of the PC 100, the controller 50 (camera control unit) acquires the rotation angle position θ of the application head 10, and according to the rotation angle position θ, that is, according to the change in posture. The depth of field Lpd of the camera 20 (the aperture of the camera 20) is controlled. Specifically, as shown in FIGS. 6A to 6C, when the application head 10 is at each of the rotation angle positions θ1, θ2, and θ3, the optical axis direction y of the camera 20 in the nozzle array 11 From the outer edge portion EDGa (see FIG. 5B) of the nozzle 12a located at one end closest to the camera 20 and the camera 20 of the nozzle 12b located at the other end farthest from the camera 20 in the nozzle row 11 The distance is set in the range of 1 to 2 times the distances Dθ1, Dθ2, and Dθ3 to the farthest outer edge portion EDGb (see FIG. 5). In particular, at the rotation angle position of the coating head 10 in which the arrangement direction of the plurality of nozzles 12 is orthogonal to the optical axis direction y of the camera 20 (see FIGS. 2C and 3), the depth of field Ldp of the camera 20 is The distance is set within a range of 1 to 2 times the diameter d of each nozzle.

  As described above, the coating head 10 rotates in a plane parallel to the array surface of the plurality of nozzles 12, whereby the array form of the plurality of nozzles 12 in the coating head 10 in the optical axis direction y of the camera 20 is changed. When changing, since the depth of field Ldp of the camera is controlled in accordance with the rotation angle position of the coating head 10 (for example, θ1, θ2, θ3: see FIGS. 6A to 6C), the coating head 10 Of the plurality of nozzles 12 corresponding to the rotation angle positions (for example, θ1, θ2, θ3) of the camera 20 having an appropriate depth of field Ldp according to the arrangement form in the optical axis direction y of the camera 20. A droplet discharged from each nozzle 12 of the attached head 20 is photographed. Therefore, the camera 20 can obtain an image that accurately represents the discharge state of the liquid droplets discharged from each nozzle 12 of the coating head 10. In this embodiment, since the rotation center of the coating head 10 is set at the center of the nozzle row 11 and the focal position of the camera 20 is adjusted to be the rotation center position of the coating head 10, the distance Dθ1, Since Dθ2 and Dθ3 are evenly spread in the optical axis direction y of the camera 20 around the rotation center, the focal position of the camera 20 does not need to be adjusted as long as the depth of field Ldp of the camera is adjusted.

  Each of the coating heads 10 described above has a plurality of nozzles 12 arranged in a straight line. However, even if the plurality of nozzles 12 are arranged in a curved line, the optical axis direction y of the camera 20 If they do not overlap in the direction corresponding to, they may be arranged randomly. Even in this case, the depth of field Ldp of the camera 20 is equal to the outer edge portion EDGa of the nozzle 12 closest to the camera 20 in the optical axis direction y of the camera 20 and the camera 20. It is set to a distance within a range of 1 to 2 times the distance between the nozzle 12 located farthest from 20 and the outer edge part EDGb farthest from the camera 20.

  In each of the droplet discharge state confirmation devices described above, an image obtained by photographing by the camera 20 is provided by being displayed on the display device 110. For example, the image is printed by a printer. Or may be provided by distributing to a remote place using a communication device or a communication infrastructure.

Moreover, although the light source 21 shall be arrange | positioned facing the camera 20, it is not restricted to this, You may make it arrange | position on the same side as the camera 20 and image reflected light. In short, the arrangement position and configuration of the light source 21 are not limited as long as an image of a droplet can be captured.
Moreover, although the coating liquid used as the example which uses a polyimide solution, it is not restricted to this, If it is a coating liquid which can be discharged from a nozzle, it is applicable.

DESCRIPTION OF SYMBOLS 10 Coating head 11 Nozzle row | line | column 11a 1st row | line | column 11b 2nd row | line | column 12, 12a, 12b Nozzle 20 Camera 21 Light source 23 Drain pan 50 Controller 60 Support mechanism 70 Drive mechanism

Claims (10)

A camera for photographing droplets ejected from each nozzle of a coating head in which a plurality of nozzles for ejecting droplets of solution are arranged, and a flight trace of droplets ejected from each nozzle obtained by photographing with the camera A droplet discharge state confirmation device having image providing means for providing an image including the information as information representing the discharge state of the droplet,
In the optical axis direction of the camera, the camera has a depth of field closest to the outer edge portion of the nozzle located closest to the camera, and from the camera of the nozzle farthest from the camera. A droplet discharge state confirmation device set to a distance within a range of 1 to 2 times the distance to a distant outer edge portion. The application head includes a first row in which a plurality of nozzles are arranged, and a second row arranged in parallel with the first row,
The depth of field of the camera is 1 of the distance between the outer edge part of each nozzle in the first row closest to the camera and the outer edge part of each nozzle in the second row farthest from the camera. The droplet discharge state confirmation device according to claim 1, wherein the droplet discharge state confirmation device is set to a distance within a range of not less than twice and not more than twice. A photographing step of photographing a droplet ejected from each nozzle of a coating head in which a plurality of nozzles ejecting droplets of the solution are arranged, and a camera;
An image providing step for providing an image including a flight trace of a droplet ejected from each nozzle obtained by photographing by the camera, and the droplet ejected from each nozzle of the coating head using the image A droplet discharge state confirmation method for confirming the discharge state of
In the optical axis direction of the camera, the camera has a depth of field closest to the outer edge portion of the nozzle located closest to the camera, and from the camera of the nozzle farthest from the camera. A droplet discharge state confirmation method set to a distance within a range of 1 to 2 times the distance to a distant outer edge portion. A camera for photographing droplets ejected from each nozzle of a coating head in which a plurality of nozzles for ejecting droplets of solution are arranged, and a flight trace of droplets ejected from each nozzle obtained by photographing with the camera A droplet discharge state confirmation device having image providing means for providing an image including the information as information representing the discharge state of the droplet,
A droplet discharge state confirmation device having a camera control unit that controls a depth of field of the camera according to an arrangement form of the plurality of nozzles in an optical axis direction of the camera.   The camera control unit has the depth of field of the camera in the optical axis direction of the camera, the outer edge portion closest to the camera of the nozzle closest to the camera, and the position farthest from the camera. The droplet discharge state confirmation device according to claim 4, wherein the distance is set within a range of 1 to 2 times the distance between the nozzle and the outermost edge part farthest from the nozzle. An imaging step of photographing with a camera droplets ejected from each nozzle of a coating head in which a plurality of nozzles that eject droplets of the solution are arranged;
An image providing step for providing an image including a flight trace of a droplet ejected from each nozzle obtained by photographing with the camera, and the liquid ejected from each nozzle of the coating head using the image A droplet discharge state confirmation method for confirming a droplet discharge state,
A droplet discharge state confirmation method comprising: a camera control step for controlling a depth of field of the camera according to an arrangement form of the plurality of nozzles in an optical axis direction of the camera.   In the camera control step, the depth of field of the camera is set in the optical axis direction of the camera, the outer edge portion closest to the camera of the nozzle closest to the camera, and the position farthest from the camera. The droplet discharge state confirmation method according to claim 6, wherein the distance is set within a range of 1 to 2 times the distance between the nozzle and the outermost edge part farthest from the nozzle.   The droplet discharge state confirmation device according to claim 4 or 5, wherein the camera control unit controls a depth of field of the camera according to a rotation angle position of the coating head.   The droplet discharge state confirmation method according to claim 6 or 7, wherein the camera control step controls a depth of field of the camera according to a rotation angle position of the coating head. A coating head in which a plurality of nozzles for discharging droplets of the solution are arranged;
A support mechanism for supporting an object to be coated;
In a droplet coating apparatus, comprising: a driving mechanism that relatively moves the coating head and the support mechanism in a state where the coating head is opposed to the object to be coated supported by the support mechanism. ,
A droplet applying apparatus comprising the droplet discharge state confirmation device according to claim 1.

Images